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MIMURA Kouji  三村 耕司

ORCIDConnect your ORCID iD *help
Researcher Number 00091752
Affiliation (based on the past Project Information) *help 2007 – 2012: Tohoku University, 多元物質科学研究所, Associate Professor
2005 – 2006: 東北大学, 多元物質科学研究所, 助教授
2002 – 2004: 東北大学, 多元物質科学研究所, 助手
1995 – 1999: 東北大学, 素材工学研究所, 助手
1992 – 1993: 東北大学, 素材工学研究所, 助手
Review Section/Research Field
Principal Investigator
Metal making engineering / Metal making engineering / 金属精錬・金属化学
Except Principal Investigator
Metal making engineering / Metal making engineering / Structural/Functional materials
Keywords
Principal Investigator
高純度金属 / 水素プラズマ / 高純度化 / ランタン / 金属生産工学 / 希土類金属 / ジルコニウム / 水素プラズマ溶解 / 高純度精製 / 精製 … More / 帯溶融 / Annealing effect / Trace impurity / Cobalt / Iron / Copper / Purity evaluation / Residual resistivity ratio / High purity metals / 伝導電子 / サイズ効果 / 真空焼鈍 / 水素焼鈍 / 比抵抗 / クロム / 焼鈍効果 / 微量不純物 / コバルト / 鉄 / 銅 / 純度評価 / 残留抵抗比 / Vacuum melting / Zone melting / Purification / Lantharum / Neodymium / Rare earth metal / 真空溶解 / 高真空溶解 / 帯域溶融 / ネオジム / 不純物除去 / バナジウム / プラズマ溶解 / 不純物 / 高融点金属 / 減圧水素プラズマ / バナジウムジルコニウム / モリブデン / 水素プラズマ溶解精製 / セリウム / 活性水素 / 帯溶融精製 / 精製機構 / プラズマ溶解精製 / 不純物強除去速度 / チタン / ハフニウム / レアメタル / 熱プラズマ … More
Except Principal Investigator
Oxidation / Thin Film / Copper / Hafnium / Zirconium / 誘電特性 / 酸化 / 薄膜 / 銅 / ハフニウム / ジルコニウム / high purity iron / high quality single crystal / Si substrate / hydrogen terminate / molecular beam epitaxy / chemical vapor transport / β-FeSi_2 / β-FeSi_2単結晶 / フォトルミネッセンス / 化学気相輸送法 / 成長機構 / 電気特性 / β-FeSi2単結晶 / 半導体用超高純度鉄 / 超高純度鉄 / 高品位単結晶 / Si基板 / 水素終端処理 / 分子線エピタキシー / 化学気相輸送 / β-FeSi2 / Kinetics / High purity metals / Refining / Hydrogen plasma / Plasma melting / 蒸発種 / 反応速度 / 分光学的解析 / 熱伝導 / 蒸発 / 発光スペクトル / シミュレーション / 高純度金属 / 精製 / 水素プラズマ / プラズマ溶解 / 配線評価用TEG / パルスめっき技術 / 配線抵抗率 / 添加剤フリーめつき技術 / 超高純度めっき材料 / ULSI / 微細構造 / 微量不純物 / Cuの高純度化 / TEG / 分子動力学シミュレーション / 革新的高導電性 / 超高純度めっき材 / 添加剤フリー / Cu 配線 / 収差補正STEM / クレヴァス / Ru膜 / 添加剤フリーめっき / 収差補正TEM / 粒界不純物 / 抵抗率 / 超高純度硫酸銅 / Cu配線 / LSI / 情報材料 / 電子 Less
  • Research Projects

    (9 results)
  • Research Products

    (31 results)
  • Co-Researchers

    (16 People)
  •  Purification of refractory metals used for the sputtering targetPrincipal Investigator

    • Principal Investigator
      MIMURA Kouji
    • Project Period (FY)
      2010 – 2012
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Metal making engineering
    • Research Institution
      Tohoku University
  •  Nano-structure Control of Cu Interconnects by a Very High Purity Plating Processes and Its Application to Next-generation LSIs.

    • Principal Investigator
      ONUKI Jin (OONUKI Jin)
    • Project Period (FY)
      2008 – 2012
    • Research Category
      Grant-in-Aid for Scientific Research (S)
    • Research Field
      Structural/Functional materials
    • Research Institution
      Ibaraki University
  •  Purification of sputtering target metals for high-k insulator films of MOSFET devicesPrincipal Investigator

    • Principal Investigator
      MIMURA Kouji
    • Project Period (FY)
      2007 – 2009
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Metal making engineering
    • Research Institution
      Tohoku University
  •  Low Temperature Oxidation of Ultra-High Purity Metals and Stoichiometry Control of Oxide Films

    • Principal Investigator
      ISSHIKI Minoru
    • Project Period (FY)
      2005 – 2007
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Metal making engineering
    • Research Institution
      Tohoku University
  •  Single Crystal Growth and Stoichiometory Control of Ecologically Friendly Semiconductor β-FeSi_2

    • Principal Investigator
      ISSHIKI Minoru
    • Project Period (FY)
      2002 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Metal making engineering
    • Research Institution
      Tohoku University
  •  Precise Purity Evaluation of High-Purity Metals by Residual Resistivity RatioPrincipal Investigator

    • Principal Investigator
      MIMURA Kouji
    • Project Period (FY)
      1997 – 1999
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Metal making engineering
    • Research Institution
      TOHOKU UNIVERSITY
  •  Impurity removal kinetics of hydrogen plasma arc melting

    • Principal Investigator
      ISSHIKI Minoru
    • Project Period (FY)
      1996 – 1998
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Metal making engineering
    • Research Institution
      Tohoku University
  •  プラズマ帯溶融精製法の開発とレアメタル高純度化への応用Principal Investigator

    • Principal Investigator
      三村 耕司
    • Project Period (FY)
      1995
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B)
    • Research Field
      Metal making engineering
    • Research Institution
      Tohoku University
  •  Purification of Rare Earth Metals by Advanced Electron Beam Floating Zone Melting MethodPrincipal Investigator

    • Principal Investigator
      MIMURA Kouji
    • Project Period (FY)
      1992 – 1993
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      金属精錬・金属化学
    • Research Institution
      Tohoku University

All 2012 2011 2010 2009 2008 2007

All Journal Article Presentation

  • [Journal Article] 高純度めっき材料を用いた低抵抗率Cu配線形成プロセスの8インチウエハによる検証2011

    • Author(s)
      田代優, 門田裕行, 伊藤雅彦, 打越雅仁, 三村耕司, 一色実, 大貫仁
    • Journal Title

      日本金属学会誌

      Volume: 75(掲載決定)

    • NAID

      10029368773

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20226014
  • [Journal Article] 高純度めっき材料を用いた 低抵抗率Cu配線形成プロセスの8インチウエハによる検証2011

    • Author(s)
      田代優, 打越雅仁, 三村耕司, 一色実, 大貫仁
    • Journal Title

      本金属学会誌 75掲載決定

    • NAID

      10029368773

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20226014
  • [Journal Article] Preparation of high purity metals for advanced devices2011

    • Author(s)
      一色実、三村耕司、打越雅仁
    • Journal Title

      Thin Solid Films

      Volume: Vol.519 Issue: 24 Pages: 8451-8455

    • DOI

      10.1016/j.tsf.2011.05.038

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22360311
  • [Journal Article] 金属の高純度精製プロセス2011

    • Author(s)
      三村耕司、打越雅仁、一色実
    • Journal Title

      金属

      Volume: 81巻 Pages: 941-948

    • URL

      http://www.agne.co.jp/kinzoku/

    • Data Source
      KAKENHI-PROJECT-22360311
  • [Journal Article] Hydrogen effect on refining of Mo metal by Ar-H_2 plasma arc melting2010

    • Author(s)
      J.W.Lim, K.Mimura, D.Miyawaki J.M.Oh, G.S.Choi, S.B.Kim, M.Uchikoshi, M.Isshiki
    • Journal Title

      Materials Letters

      Volume: 64 Pages: 2290-2292

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22360311
  • [Journal Article] Purification of CuC12 by anion-exchange separation using multi-column method2010

    • Author(s)
      M.Uchikoshi, Y.Yamada, Y.Baba, J.Onuki, K.Mimura, M.Isshiki
    • Journal Title

      High Temperature Materials and Processes

      Volume: 29 Pages: 469-481

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20226014
  • [Journal Article] Hydrogen effect on refining of Mometal by Ar-H2 plasma arc melting2010

    • Author(s)
      J.W.Lim, 三村耕司 , D.Miyawaki, J.M.Oh, G.S.Choi, S.B.Kim, 打越雅仁、一色実
    • Journal Title

      Materials Letters

      Volume: Vol.64 Issue: 21 Pages: 2290-2292

    • DOI

      10.1016/j.matlet.2010.07.067

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22360311
  • [Journal Article] Refining effect of hydrogen plasma arc melting on titanium sponges2010

    • Author(s)
      三村耕司, J. W. Lim, J. M. Oh, G. S. Choi, S. W. Cho, 打越雅仁, 一色実
    • Journal Title

      Materials Letters Vol. 64

      Pages: 411-414

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19360339
  • [Journal Article] Refining effect of hydrogen plasma arc melting on titanium sponges2010

    • Author(s)
      K.Mimura, J.W. Lim, J.M. Oh, G.S. Choi, S.W. Cho, M.Uchikoshi, M.Isshiki
    • Journal Title

      Materials Letters 64

      Pages: 411-414

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19360339
  • [Journal Article] Impurity behavior in Cu refined by Ar plasma-arc zone melting2009

    • Author(s)
      G.M.Lalev, J.-W.Lim, N.R.Munirathnam, G.-S.Choi, M.Uchikoshi, K.Mimura, M.Isshiki
    • Journal Title

      Metals and Materials International 15

      Pages: 753-757

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20226014
  • [Journal Article] Purification of Cu by hydrogen plasma-arc zone melting and characterization of trace impurities by secondary ion mass spectrometry2009

    • Author(s)
      G.M.Lalev, J.W.Lim, N.R.Munirathnmam, G.S.Choi, M.Uchikoshi, K.Mimura, M.Isshiki
    • Journal Title

      Materials Characterization 60

      Pages: 60-64

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20226014
  • [Journal Article] Concentration Behavior of Non-Metallic Impurities in Cu Rods Refined by Argon and Hydrogen Plasma-Arc Zone Melting2009

    • Author(s)
      G.M.Lalev, J.-W.Lim, N.R.Munirathnam, G.-S.Choi, M.Uchikoshi, K.Mimura, M.Isshiki
    • Journal Title

      Materials Transactions 50

      Pages: 618-621

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20226014
  • [Journal Article] Purification of lanthanum and cerium by plasma arczone melting2008

    • Author(s)
      三村耕司、佐藤貴則、一色実
    • Journal Title

      Journal of Materials Science 43

      Pages: 721-2730

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19360339
  • [Journal Article] Purification of lanthanum and cerium by plasma arc zone melting2008

    • Author(s)
      三村耕司, 佐藤貴則, 一色実
    • Journal Title

      Journal of Materials Science Vol. 43

      Pages: 2721-2730

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19360339
  • [Presentation] 水素プラズマ溶解による金属Moの高純度精製2012

    • Author(s)
      三村耕司、宮脇大、打越雅仁、一色実
    • Organizer
      日本金属学会
    • Place of Presentation
      横浜市
    • Year and Date
      2012-03-29
    • Data Source
      KAKENHI-PROJECT-22360311
  • [Presentation] Vの水素化反応と1水素化物相中の水素の拡散に及ぼす酸素の影響2012

    • Author(s)
      浅野耕太、林繁信、三村耕司、榎浩利、中村優美子
    • Organizer
      日本金属学会
    • Place of Presentation
      愛媛大学(松山市)
    • Year and Date
      2012-09-18
    • Data Source
      KAKENHI-PROJECT-22360311
  • [Presentation] Vの水素化反応と1水素化物相中の水素の拡散に及ぼす酸素の影響2012

    • Author(s)
      浅野耕太、林繁信、三村耕司、榎浩利、中村優美子
    • Organizer
      日本金属学会
    • Place of Presentation
      愛媛大学、松山市
    • Data Source
      KAKENHI-PROJECT-22360311
  • [Presentation] Effect of oxygen content on hydrogenation of vanadium and hydrogen diffusion in the monohydride phase2012

    • Author(s)
      浅野耕太、林繁信、三村耕司、榎浩利、中村優美子
    • Organizer
      International Symposium on Metal–Hydrogen Systems 2012
    • Place of Presentation
      Kyoto, Japan
    • Data Source
      KAKENHI-PROJECT-22360311
  • [Presentation] Effect of oxygen content on hydrogenation of vanadium andhydrogen diffusion in the monohydride phase2012

    • Author(s)
      浅野耕太、林繁信、 三村耕司 、榎浩利、 中村優美子
    • Organizer
      International Symposium on Metal-Hydrogen Systems 2012
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2012-10-21
    • Data Source
      KAKENHI-PROJECT-22360311
  • [Presentation] 水素プラズマ溶解による金属Moの溶解精製2012

    • Author(s)
      三村耕司、宮脇大、打越雅仁、一色実
    • Organizer
      日本金属学会
    • Place of Presentation
      横浜国立大(横浜市)
    • Year and Date
      2012-03-29
    • Data Source
      KAKENHI-PROJECT-22360311
  • [Presentation] Hydrogen Plasma Arc Melting and Refining of Refractory Metals2011

    • Author(s)
      K.Mimura, M.Isshiki
    • Organizer
      International Symposium of Materials Integration
    • Place of Presentation
      Sendai, Japan
    • Year and Date
      2011-12-01
    • Data Source
      KAKENHI-PROJECT-22360311
  • [Presentation] Hydrogen plasma arc melting and refining of refractory metals2011

    • Author(s)
      三村耕司、一色実
    • Organizer
      International Symposium ofMaterials Integration
    • Place of Presentation
      東北大学(仙台市)
    • Year and Date
      2011-12-01
    • Data Source
      KAKENHI-PROJECT-22360311
  • [Presentation] 水素プラズマアーク溶解によるTi及びTi合金の精製2009

    • Author(s)
      三村耕司, J. W. Lim, G. S. Choi, 一色実
    • Organizer
      日本金属学会
    • Place of Presentation
      京都大学(京都市)
    • Year and Date
      2009-09-16
    • Data Source
      KAKENHI-PROJECT-19360339
  • [Presentation] Plasma Arc Melting and Refining of Titanium and Hafnium2008

    • Author(s)
      三村 耕司
    • Organizer
      Proceedings of International Symposium of Resource Recycling 2007
    • Place of Presentation
      韓国、済州島
    • Year and Date
      2008-11-28
    • Data Source
      KAKENHI-PROJECT-19360339
  • [Presentation] Refining and Purification of Rare Metals using Plasma Arc Heating2008

    • Author(s)
      三村耕司, 一色実
    • Organizer
      Symposium on the Development and Applications of Rare Metals
    • Place of Presentation
      大田(韓国)
    • Year and Date
      2008-05-22
    • Data Source
      KAKENHI-PROJECT-19360339
  • [Presentation] Refining and Purification of Rare Metals using Plasma Are Heating2008

    • Author(s)
      三村耕司、一色実
    • Organizer
      Symposium on the Development and Applications of Rare Metals
    • Place of Presentation
      Korea, Daejon
    • Year and Date
      2008-05-22
    • Data Source
      KAKENHI-PROJECT-19360339
  • [Presentation] Purification of Rare Metals by Special Melting Method2007

    • Author(s)
      Kouji Mimura
    • Organizer
      The International Symposium on Metals Root Technology, 2007 Spring Conference of the Korea Institute of Metals and Materials
    • Place of Presentation
      ChangWon (Korea)
    • Year and Date
      2007-04-26
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17360366
  • [Presentation] Plasma arc melting and refining of titanium and hafnium2007

    • Author(s)
      Kouji Mimura
    • Organizer
      International Symposium of Resource Recycling 2007
    • Place of Presentation
      Jeju (Korea)
    • Year and Date
      2007-11-27
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17360366
  • [Presentation] Purification of Rare Metals by Special Melting Method2007

    • Author(s)
      Kouji Mimura
    • Organizer
      The International Symposium on Metals Root Technology, 2007 Spring Conference of the Korea Institute of Metals and Materials
    • Place of Presentation
      Korea, ChangWon
    • Year and Date
      2007-04-26
    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17360366
  • [Presentation] Plasma arc melting and refining of titanium and hafnium2007

    • Author(s)
      Kouji Mimura J.-W. Lim, G.-S. Choi, Minoru Isshiki
    • Organizer
      International Symposium of Resource Recycling 2007
    • Place of Presentation
      Korea, Jeju
    • Year and Date
      2007-11-27
    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17360366
  • [Presentation] Plasma Arc Melting and Refining of Titanium and Hafnium2007

    • Author(s)
      三村耕司
    • Organizer
      International Symposium of Resource Recycling 2007
    • Place of Presentation
      済州島(韓国)
    • Year and Date
      2007-11-28
    • Data Source
      KAKENHI-PROJECT-19360339
  • 1.  ISSHIKI Minoru (20111247)
    # of Collaborated Projects: 9 results
    # of Collaborated Products: 22 results
  • 2.  ISHIKAWA Yukio (40250823)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 3.  WANG Jifeng (30271977)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 4.  ONUKI Jin (70315612)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 3 results
  • 5.  ISHIKAWA Nobuhiro (00370312)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 6.  KONDO Kazuo (50250478)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 7.  INAMI Takashi (20091853)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 8.  CHONAN Yasunori (30363740)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 9.  ITO Shinji (50370317)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 1 results
  • 10.  UCHIKOSHI Masahito (60447191)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 6 results
  • 11.  OHTA Hiromichi (70168946)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 12.  NAGANO Takatoshi (70343621)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 13.  KIMURA Takashi (70370319)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 14.  SASAJIMA Yasushi (80187137)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 15.  AOYAMA Takashi (80363737)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 16.  TASHIRO Suguru (90272111)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 2 results

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