Kawai Akira 河合晃

… Alternative Names

KAWAI Akira 河合晃

河合晃カワイアキラ

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Researcher Number	00251851
Other IDs
Affiliation (based on the past Project Information) *help	2016 – 2020: 長岡技術科学大学, 工学研究科, 教授 2013: 長岡技術科学大学, 工学部, 教授 2011 – 2012: 長岡技術科学大学, 工学部, 准教授 2008: Nagaoka University of Technology, 准教授 2008: Nagaoka University of Technology, 工学部・電気系, 准教授 … More 2007: Nagaoka University of Technology, 工学部・(電気系), 准教授 2006: 長岡技術科学大学, 工学部, 教授 1998 – 2006: 長岡技術科学大学, 工学部, 助教授 1993 – 1995: 長岡技術科学大学, 工学部, 助教授 Less
Review Section/Research Field	Principal Investigator Electron device/Electronic equipment / 電子デバイス・機器工学 / Basic Section 21060:Electron device and electronic equipment-related / Medium-sized Section 21:Electrical and electronic engineering and related fields / 表面界面物性 / Inorganic materials/Physical properties Except Principal Investigator Inorganic materials/Physical properties
Keywords	Principal Investigator 半導体集積回路 / 原子間力顕微鏡 / リソグラフィー / リソグラフィ / 高分子集合体 / 微細加工 / 表面エネルギー / フォトレジスト / レジスト / ラインエッジラフネス … More / 付着力 / マイクロカプセル / 集積化 / DMFC / IoT / ３次元光造形 / カプセル / マイクロ / 電子デバイス / 燃料電池 / solid surface / lithography / finite element method / surface energy / resist / atomic force microscope / integration circuit / adhesion / 固体表面 / 有限要素法解析 / 接着力 / MEMS / 付着性 / ナノバブル / レジストパターン / ラプラス力 / 環境制御型電子顕微鏡 / ファンデルワールスカ / 薄膜 / 表面自由エネルギー / スピンコート / 共焦点レーザー顕微鏡（CLSM) / プローブ顕微鏡 / 高分子レジスト / 自己整合配列 / ナノ集合体 / 共晶点レーザー顕微鏡（CLSM) / 膨潤 / 浸透 / 走査型共焦点レーザー顕微鏡 / 触媒 / ゼータ電位 / 帯電制御 / 血栓抑制 / 3次元光造形 / マイクロ・ナノデバイス / 表面張力 / マイクロチューブ / グルコース / 生体発電 / イオン導電体 / 医療システム / ラプラスカ / Solid Surface / Lithography / Finite element method / Surface energy / Resist / Atomic force microscope / Integrated Circuit of Semiconductor / Adhesion / 凝集破壊 / 摩擦力 / 有限要素法 / フォトレジストパターン / 光リソグラフィー / 生物・生体工学 / ナノバイオ / マイクロマシン / 生体適合性 / マイクロポンプ / レジスト材料 / プロトン濃度 / ｐＨコントロール / 植物育成 / バイオチップ / 植物成長促進 / バイオデバイス / ゲートパターン / ナノパターン / インデンテーション / マニピュレーション / 感光性樹脂 / 集積回路 / 分子間力 / ナノ固体 / 空孔 / ナノスケールパターン / プラズモン変化 / 貴金属 / 吸着 / エネルギーバランス変化 / 微小気泡 / 亀裂 / 接着 / スパッタリング / 表面粗さ / チタン酸バリウム / 誘電率 … More Except Principal Investigator HIP / PMN / ICTS / PTCR / Zinc Oxide / Electron Capture / Grain Boundary / Barium Titanate / 酸化 / 酸化亜鉛 / 電子捕獲 / 粒界 / チタン酸バリウム Less

Development of thrombosis formation system by floating sphere type micro fuel cellPrincipal Investigator
- Principal Investigator
  
  Kawai Akira
- Project Period (FY)
  2018 – 2019
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Review Section
  
  Medium-sized Section 21:Electrical and electronic engineering and related fields
- Research Institution
  Nagaoka University of Technology
Fabrication of three dimensional polymer aggregate structure based on self-align arrangementPrincipal Investigator
- Principal Investigator
  
  Kawai Akira
- Project Period (FY)
  2018 – 2020
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 21060:Electron device and electronic equipment-related
- Research Institution
  Nagaoka University of Technology
Capsule type micro fuel cell development and self-dispersion control of micro condensed matterPrincipal Investigator
- Principal Investigator
  
  Kawai Akira
- Project Period (FY)
  2016 – 2017
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Nagaoka University of Technology
Study of line edge roughness (LER) reduction in 15nm scale gate patternPrincipal Investigator
- Principal Investigator
  
  KAWAI Akira
- Project Period (FY)
  2011 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Nagaoka University of Technology
Development of growth control device by interposing pH control systemPrincipal Investigator
- Principal Investigator
  
  KAWAI Akira
- Project Period (FY)
  2011 – 2012
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Nagaoka University of Technology
Resist pattern development in 25nm size by condensation control in nanometer scalePrincipal Investigator
- Principal Investigator
  
  KAWAI Akira
- Project Period (FY)
  2007 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Nagaoka University of Technology
微細凹凸構造での微小気泡の吸着・脱離制御に基づく新規メモリデバイスの開発Principal Investigator
- Principal Investigator
  
  河合晃
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Nagaoka University of Technology
Development of micro resist patterns less than 35nm size based on interaction control among polymer, aggregates.Principal Investigator
- Principal Investigator
  
  KAWAI Akira
- Project Period (FY)
  2004 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Nagaoka University of Technology
Adhesion and cohesion analysis of resist micro patterns less than 100nm by using atomic force microscopePrincipal Investigator
- Principal Investigator
  
  KAWAI Akira
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  電子デバイス・機器工学
- Research Institution
  Nagaoka University of Technology
Study for adhesion analysis of resist pattern of 0.1μm line-width by using atomic force microscope tipPrincipal Investigator
- Principal Investigator
  
  KAWAI Akira
- Project Period (FY)
  1998 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  電子デバイス・機器工学
- Research Institution
  Nagaoka University of Technology
0.3μm以下の微細レジストパターンの接着破壊機構に関する研究Principal Investigator
- Principal Investigator
  
  河合晃
- Project Period (FY)
  1995
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  表面界面物性
- Research Institution
  Nagaoka University of Technology
超微細サイズにおける誘電体薄膜の誘電メカニズム解析Principal Investigator
- Principal Investigator
  
  河合晃
- Project Period (FY)
  1994
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  Inorganic materials/Physical properties
- Research Institution
  Nagaoka University of Technology
Detection and Characterization of Trap Levels in Semiconducting Ceramics
- Principal Investigator
  
  TAKATA Masasuke
- Project Period (FY)
  1993 – 1995
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  Inorganic materials/Physical properties
- Research Institution
  Nagaoka University of Technology

[Book] 高速・高周波対応部材の最新開発動向2021
- Author(s)
  河合　晃
- Total Pages
  653
- Publisher
  技術情報協会
- Data Source
  KAKENHI-PROJECT-18H01494
[Book] 高周波対応基板材料の開発動向と応用展開2021
- Author(s)
  河合　晃
- Total Pages
  296
- Publisher
  シーエムシー出版
- Data Source
  KAKENHI-PROJECT-18H01494
[Book] プリント配線板材料の開発と実装技術2021
- Author(s)
  河合　晃
- Total Pages
  713
- Publisher
  技術情報協会
- Data Source
  KAKENHI-PROJECT-18H01494
[Book] 接着・接合の支配要因と最適化技術2021
- Author(s)
  河合　晃
- Total Pages
  270
- Publisher
  S＆T出版
- Data Source
  KAKENHI-PROJECT-18H01494
[Book] クリーンルームの微小異物・汚染物対策と作業員教育2020
- Author(s)
  河合　晃
- Total Pages
  523
- Publisher
  技術情報協会
- Data Source
  KAKENHI-PROJECT-18H01494
[Book] レジスト材料・プロセスの使い方ノウハウとトラブル解決2018
- Author(s)
  河合　晃
- Total Pages
  185
- Publisher
  Ｒ＆Ｄ支援センター
- Data Source
  KAKENHI-PROJECT-18H01494
[Book] レジスト材料・プロセスの使い方ノウハウとトラブル解決2018
- Author(s)
  河合　晃
- Total Pages
  185
- Publisher
  Ｒ＆Ｄ支援センター
- ISBN
  9784905507253
- Data Source
  KAKENHI-PROJECT-18K18854
[Book] 最新フォトレジスト材料開発とプロセス最適化技術2017
- Author(s)
  河合　晃
- Total Pages
  320
- Publisher
  シーエムシー出版
- ISBN
  9784781312637
- Data Source
  KAKENHI-PROJECT-16K14250
[Book] 高分子の残留応力対策2017
- Author(s)
  河合　晃
- Total Pages
  480
- Publisher
  技術情報協会
- ISBN
  9784861046483
- Data Source
  KAKENHI-PROJECT-16K14250
[Book] シランカップリング剤の使いこなしノウハウ集2016
- Author(s)
  河合　晃、他
- Total Pages
  384
- Publisher
  技術情報協会
- Data Source
  KAKENHI-PROJECT-16K14250
[Book] 高分子における劣化・破壊現象の写真・データ事例集2014
- Author(s)
  河合　晃、分担執筆
- Total Pages
  729
- Publisher
  技術情報協会
- Data Source
  KAKENHI-PROJECT-23360150
[Book] 気泡・ボイドの発生メカニズムと未然防止・除去技術,第1章第2節塗るときなぜ気泡が発生するのか2014
- Author(s)
  河合
- Publisher
  技術情報協会
- Data Source
  KAKENHI-PROJECT-23360150
[Book] 気泡・ボイドの発生メカニズムと未然防止・除去技術2014
- Author(s)
  河合　晃、分担執筆
- Total Pages
  544
- Publisher
  技術情報協会
- Data Source
  KAKENHI-PROJECT-23360150
[Book] 薄膜塗布技術と乾燥トラブル対策2014
- Author(s)
  河合　晃、分担執筆
- Total Pages
  825
- Publisher
  技術情報協会
- Data Source
  KAKENHI-PROJECT-23360150
[Book] 高分子における劣化・破壊現象の写真・データ事例集, 第14章第6節塗膜の乾燥不良事例～クラック,密着不良～2014
- Author(s)
  河合
- Publisher
  技術情報協会
- Data Source
  KAKENHI-PROJECT-23360150
[Book] 薄膜塗布技術と乾燥トラブル対策,第8章第5節超臨界乾燥, 第10章第6節レべリング性と乾燥速度の両立, 第10章11節さらに高品位な膜を作るためのテクニック2013
- Author(s)
  河合
- Publisher
  技術情報協会
- Data Source
  KAKENHI-PROJECT-23360150
[Book] シランカップリング剤の効果と使用法2012
- Author(s)
  河合　晃
- Total Pages
  395
- Publisher
  サイエンス＆テクノロジー出版
- Data Source
  KAKENHI-PROJECT-23656235
[Book] レジストにおけるシランカップリング剤の効果と使用方法および処理装置2012
- Author(s)
  河合晃他
- Total Pages
  395
- Publisher
  シランカップリング剤の効果と使用法
- Data Source
  KAKENHI-PROJECT-23656235
[Book] 「欠陥を出さない！良い塗布膜を得るためのコントロール技術」2012
- Author(s)
  河合　晃
- Total Pages
  197
- Publisher
  サイエンス＆テクノロジー出版
- Data Source
  KAKENHI-PROJECT-23656235
[Book] 欠陥を出さない!良い塗布膜を得るためのコントロール技術2012
- Author(s)
  河合晃
- Total Pages
  197
- Publisher
  一発必中シリーズ
- Data Source
  KAKENHI-PROJECT-23656235
[Book] シランカップリング剤の効果と使用法2012
- Author(s)
  河合
- Publisher
  S&T
- Data Source
  KAKENHI-PROJECT-23360150
[Book] 現場で応用できるコーティングの理論と現象-トラブルをメカニズムから考える-2012
- Author(s)
  河合晃
- Total Pages
  184
- Publisher
  加工技術研究会
- Data Source
  KAKENHI-PROJECT-23656235
[Book] 現場で応用できるコーティングの理論と現象－トラブルをメカニズムから考える－2012
- Author(s)
  河合　晃
- Total Pages
  184
- Publisher
  加工技術研究会
- Data Source
  KAKENHI-PROJECT-23656235
[Book] 現場で応用できるコーティングの理論と現象－トラブルをメカニズムから考える－2012
- Author(s)
  河合　晃
- Total Pages
  184
- Publisher
  加工技術研究会
- Data Source
  KAKENHI-PROJECT-23360150
[Book] レジストにおけるシランカップリング剤の効果と使用方法および処理装置2012
- Author(s)
  河合　晃
- Total Pages
  395
- Publisher
  サイエンス＆テクノロジー出版
- Data Source
  KAKENHI-PROJECT-23360150
[Book] 現場で応用できるコーティングの理論と現象-トラブルをメカニズムから考える2012
- Author(s)
  河合晃
- Total Pages
  184
- Publisher
  加工技術研究会
- Data Source
  KAKENHI-PROJECT-23360150
[Book] 欠陥を出さない!良い塗布膜を得るためのコントロール技術2012
- Author(s)
  河合晃
- Total Pages
  197
- Publisher
  サイエンス&テクノロジー
- Data Source
  KAKENHI-PROJECT-23360150
[Book] 「欠陥を出さない！良い塗布膜を得るためのコントロール技術」2012
- Author(s)
  河合　晃
- Total Pages
  197
- Publisher
  サイエンス＆テクノロジー出版
- Data Source
  KAKENHI-PROJECT-23360150
[Book] 粒子分散系塗布膜を中心にした高粘度スラリーの調液・塗布・乾燥技術,第5節各種乾燥プロセスにおける装置選定技術2011
- Author(s)
  河合
- Publisher
  技術情報協会
- Data Source
  KAKENHI-PROJECT-23360150
[Book] レジストプロセスの最適化テクニック,～微細化・トラブル解消のための工程別対策および材料技術～2011
- Author(s)
  河合
- Publisher
  情報機構
- Data Source
  KAKENHI-PROJECT-23360150
[Book] 塗膜・レジスト膜の乾燥・付着技術とトラブル対策2011
- Author(s)
  河合晃
- Total Pages
  196
- Publisher
  情報機構
- Data Source
  KAKENHI-PROJECT-23360150
[Book] 粒子分散系塗布膜を中心にした高粘度スラリーの調液・塗布・乾燥技術2011
- Author(s)
  河合晃他
- Total Pages
  336
- Publisher
  第5節各種乾燥プロセスにおける装置選定技術、技術情報協会
- Data Source
  KAKENHI-PROJECT-23656235
[Book] 塗膜・レジスト膜の乾燥・付着技術とトラブル対策2011
- Author(s)
  河合晃
- Total Pages
  196
- Publisher
  単著、情報機構
- Data Source
  KAKENHI-PROJECT-23656235
[Book] バインダー(結着剤)の失敗しない選び方・使い方事例集2011
- Author(s)
  河合晃他
- Total Pages
  262
- Publisher
  第6節乾燥時のバインダー使用の留意点と条件設定、第7 節バインダー乾燥・焼成装置の機構と条件設定、第8節バインダー乾燥・焼成後のトラブル事例および対策、技術情報協会
- Data Source
  KAKENHI-PROJECT-23656235
[Book] バインダー(結着剤)の失敗しない選び方・使い方事例集,第6 節乾燥時のバインダー使用の留意点と条件設定,第7 節バインダー乾燥・焼成装置の機構と条件設定,第8 節バインダー乾燥・焼成後のトラブル事例および対策2011
- Author(s)
  河合
- Publisher
  技術情報協会
- Data Source
  KAKENHI-PROJECT-23360150
[Book] 微細化・トラブル解消のための工程別対策および材料技2011
- Author(s)
  河合晃他
- Total Pages
  557
- Publisher
  レジストプロセスの最適化テクニック
- Data Source
  KAKENHI-PROJECT-23656235
[Book] 接着界面の分析・試験法2008
- Author(s)
  河合晃
- Total Pages
  242
- Publisher
  情報機構
- Data Source
  KAKENHI-PROJECT-19360157
[Book] プリンタブル・エレクトロニクス技術開発2008
- Author(s)
  河合晃
- Total Pages
  294
- Publisher
  技術情報協会
- Data Source
  KAKENHI-PROJECT-19360157
[Book] 乾燥大全集2006
- Author(s)
  河合晃(分担執筆)
- Total Pages
  522
- Publisher
  情報機構
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Book] 新しい分散・乳化の科学と応用技術の新展開2006
- Author(s)
  河合晃(分担執筆)
- Total Pages
  1003
- Publisher
  テクノシステム
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Book] 半導体・液晶ディスプレイフオトリングラフィ技術ハンドブック2006
- Author(s)
  河合晃(分担執筆)
- Total Pages
  587
- Publisher
  リアライズ社
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Book] 粘着技術の3A2006
- Author(s)
  河合晃(分担執筆)
- Total Pages
  347
- Publisher
  リアライズ社
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Book] 表面・界面工学大系(下巻)応用編2005
- Author(s)
  河合晃(分担執筆)
- Total Pages
  1393
- Publisher
  テクノシステム
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Book] 最新レジスト材料ハンドブック2005
- Author(s)
  河合晃(分担執筆)
- Total Pages
  315
- Publisher
  情報機構
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Application of Polyimide Porous Membrane to Photopolymer Filter2019
- Author(s)
  Tsukasa Sugawara, Isao Hirano, Kensuke Kobayashi, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 32 Pages: 791-794
- NAID
  130007789019
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18H01494
[Journal Article] Application of Polyimide Porous Membrane to Photopolymer Filter2019
- Author(s)
  Tsukasa Sugawara, Isao Hirano, Kensuke Kobayashi, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 32 Pages: 791-794
- NAID
  130007789019
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18K18854
[Journal Article] Novel Fabrication of Three-Dimensional Homogeneous Microporous Polyimide Membrane2018
- Author(s)
  Tsukasa Sugawara, Jun Koshiyama, Akira Kawai
- Journal Title
  
  Journal of Photopolymer Science and Technology
  
  Volume: 31 Pages: 437-440
- NAID
  130007481466
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-18K18854
[Journal Article] In-Situ Observation of Permeation Behavior and Structural Analysis of Polyimide Membrane with Electrical Properties2018
- Author(s)
  Tsukasa Sugawara, Hiroyoshi Sago, Akira Kawai
- Journal Title
  
  Journal of Photopolymer Science and Technology
  
  Volume: 31 Pages: 735-738
- NAID
  130007603678
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-18K18854
[Journal Article] Novel Fabrication of Three-Dimensional Homogeneous Microporous Polyimide Membrane2018
- Author(s)
  Tsukasa Sugawara, Jun Koshiyama, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 31 Pages: 437-440
- NAID
  130007481466
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-18H01494
[Journal Article] In-Situ Observation of Permeation Behavior and Structural Analysis of Polyimide Membrane with Electrical Properties2018
- Author(s)
  Tsukasa Sugawara, Hiroyoshi Sago, Akira Kawai
- Journal Title
  
  Journal of Photopolymer Science and Technology
  
  Volume: 31 Pages: 735-738
- NAID
  130007603678
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-18H01494
[Journal Article] Application to Artificial Skin of Double Cone Tube Made of Acrylic Resin Formed by Micro Stereolithography2017
- Author(s)
  Katsuaki Yamane and Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 30 Pages: 345-350
- NAID
  130005950276
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-16K14250
[Journal Article] Three-Dimensional Analysis of Liquid Propagation at Microchannel Junction using ESEM2017
- Author(s)
  Natsumi Yagi and Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 30 Pages: 709-714
- NAID
  130006309127
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-16K14250
[Journal Article] Negative pattern formation in positive resist layer by EB / UV hybrid lithography2016
- Author(s)
  Hiroki Nakano, Kenta Takahashi, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 29 Pages: 603-606
- NAID
  130005261802
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K14250
[Journal Article] In-situ Monitoring of TMAH Developer Intrusion into Resist Film by C-V Method2016
- Author(s)
  Hodaka Shirataki, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 29 Pages: 817-818
- NAID
  130005337942
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-16K14250
[Journal Article] Effect of Sub-Pattern on Guiding Liquid Propagation at Microchannel Junction2016
- Author(s)
  Natsumi Yagi, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 29 Pages: 833-834
- NAID
  130005337943
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-16K14250
[Journal Article] Fabrication and Durability of Single Chip Micro Direct Methanol Fuel Cell (SC-μDMFC) by Photolithography Process2013
- Author(s)
  Yosuke Sakurai, Daisuke Tanaka, Shunsuke Ohata, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 26(6) Pages: 751-756
- NAID
  130004833549
- Data Source
  KAKENHI-PROJECT-23360150
[Journal Article] Effect of Low Surface Tension Developer on Micro Bubble Removal from Resist Square Window Pattern2013
- Author(s)
  Kenta Takahashi, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 26(6) Pages: 765-768
- NAID
  130004833551
- Data Source
  KAKENHI-PROJECT-23360150
[Journal Article] Micro Pinhole Formation in Photoresist Multilayer Structure controlled with Hydrophilic Treatment2013
- Author(s)
  Yuta Noguchi, Kenta Takahashi, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 26(6) Pages: 739-744
- NAID
  130004833547
- Data Source
  KAKENHI-PROJECT-23360150
[Journal Article] Local Heating System Integrated with Platinum Micro Heater and Photopolymer Microfluidic Channel2013
- Author(s)
  Yuta Noguchi, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 26(6) Pages: 713-716
- NAID
  130004833542
- Data Source
  KAKENHI-PROJECT-23360150
[Journal Article] Fabrication of Micro Tube Array by Combining Positive with Negative Type Photoresists due to Solubility Difference in Developer2013
- Author(s)
  Kazutoshi Otsuka, Kenta Takahashi, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 26(6) Pages: 717-720
- NAID
  130004833543
- Data Source
  KAKENHI-PROJECT-23360150
[Journal Article] Electrification on Condensation Surface of Micro Particles with Atomic Force Microscope (AFM)2013
- Author(s)
  Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 26(6) Pages: 705-706
- NAID
  130004833540
- Data Source
  KAKENHI-PROJECT-23360150
[Journal Article] Liquid Penetration Control of Photoresist/Perfluorosulfonic Acid (PFSA) Double Layer Structure by Hydrophobic Treatment2013
- Author(s)
  Yosuke Sakurai, Kenta Takahashi, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 26(6) Pages: 727-732
- NAID
  130004833545
- Data Source
  KAKENHI-PROJECT-23360150
[Journal Article] Surface Stability of SU-8 for Accurate Biopotential Detection2012
- Author(s)
  Yuta Noguchi, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 25 Pages: 719-722
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23656235
[Journal Article] 接着の物理XIV原子間力顕微鏡力顕微鏡(AFM)を用いた微小構造体の付着凝集性解析2012
- Author(s)
  河合晃
- Journal Title
  
  日本接着学会誌
  
  Volume: vol.48, No.1 Pages: 36-46
- Data Source
  KAKENHI-PROJECT-23656235
[Journal Article] Surface Stability of SU-8 film for Accurate Biopotential Detection2012
- Author(s)
  Yuta Noguchi, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 25(6) Pages: 719-722
- NAID
  130004833506
- Data Source
  KAKENHI-PROJECT-23360150
[Journal Article] Enhanced Adhesive Strength of a Double-layer Cu Film Consisting of an Under-layer Depositedin 10 vol% O_2 in Ar and an Upper-layerDeposited in Pure Ar2012
- Author(s)
  Satoru Mori, Akira Kawai
- Journal Title
  
  J. Adhesion Soc. Japan
  
  Volume: 48(1) Pages: 10-16
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23656235
[Journal Article] Interfacial Microstructure of a Double-layer Cu Film Consisting of an Under-layer Deposited on SiO2 Substrate in Ar-10 vol% O2 and an Upper-layer Deposited in Pure Ar2012
- Author(s)
  Satoru Mori, Akira Kawai
- Journal Title
  
  J. Adhesion Soc. Japan
  
  Volume: 48(1) Pages: 10-16
- NAID
  130004568093
- Data Source
  KAKENHI-PROJECT-23360150
[Journal Article] Micro Cantilever Motion in Micro Pattern Peeling by DPAT Method2012
- Author(s)
  Takashi Aiba, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 25(6) Pages: 729-733
- NAID
  130004833508
- Data Source
  KAKENHI-PROJECT-23360150
[Journal Article] Mechanical Stress on Ionic Conductivity of Perfluorosulfonic Acid (PFSA) Film by Photolithography2012
- Author(s)
  Yosuke Sakurai, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 25 Pages: 723-726
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23656235
[Journal Article] Mechanical Stress Effect on Ionic Conductivity of Perfluorosulfonic Acid (PFSA) Film by Photolithography2012
- Author(s)
  Yosuke Sakurai, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 25(6) Pages: 723-727
- Data Source
  KAKENHI-PROJECT-23360150
[Journal Article] Micro Cantilever Motion in Micro Pattern Peeling by DPAT Method2012
- Author(s)
  Takashi Aiba, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 25 Pages: 727-731
- NAID
  130004833508
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23656235
[Journal Article] Fluid Control MEMS constructed with Polymer Materials2011
- Author(s)
  Akira Kawai
- Journal Title
  
  J.Photopolymer Science and Technology
  
  Volume: 24 Pages: 573-598
- NAID
  130004833420
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360150
[Journal Article] Fluid Control MEMSconstructed with Polymer Materials2011
- Author(s)
  Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 24,(5) Pages: 573-598
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23656235
[Journal Article] Micro Polymer Capsule Constructed with Micro Pillars Formed by Multi Laminating Method2011
- Author(s)
  Masayoshi Yamada, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 24 Pages: 647-650
- NAID
  130004464934
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23656235
[Journal Article] 塗工液の液物性コントロールとトラブル対策2011
- Author(s)
  河合晃
- Journal Title
  
  塗装工学
  
  Volume: vol.46, No.7 Pages: 225-237
- NAID
  40018934246
- Data Source
  KAKENHI-PROJECT-23656235
[Journal Article] Micro Polymer Capsule Constructed with Micro Pillars Formed by Multi Laminating Method2011
- Author(s)
  Masayoshi Yamada, Akira Kawai
- Journal Title
  
  J.Photopolymer Science and Technology
  
  Volume: 24 Pages: 647-650
- NAID
  130004464934
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360150
[Journal Article] Fluid Control MEMS constructed with Polymer Materials2011
- Author(s)
  Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 24(5) Pages: 587-593
- NAID
  130004833420
- Data Source
  KAKENHI-PROJECT-23360150
[Journal Article] Micro Polymer Capsule Constructed with Micro Pillars Formed by Multi Laminating Method2011
- Author(s)
  Masayoshi Yamada, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 24(6) Pages: 647-650
- NAID
  130004464934
- Data Source
  KAKENHI-PROJECT-23360150
[Journal Article] Fluid Control MEMS constructed with Polymer Materials2011
- Author(s)
  Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology
  
  Volume: 24 Pages: 573-598
- NAID
  130004833420
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23656235
[Journal Article] Analysis of self-standing structure composed by thick resist layers., J2009
- Author(s)
  Akihiro Takano, Akira Kawai
- Journal Title
  
  Photopolymer Science and Technology 22(in press)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Characterization of photpmask substrate in optical lithography2009
- Author(s)
  Junji Miyazaki, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology 22(in press)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Katsuyoshi Hamasaki, Dielectric dispersion analysis of resist layer2009
- Author(s)
  Hiroki Sasazaki, Takahiro Kato, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology 22(in press)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Mask defect transfer in Si anisotropoc wet etching2009
- Author(s)
  Junji Miyazaki, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology 22(in press)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Surface Energy change of Si(100)Wafer by Exposing to Air2008
- Author(s)
  Akira Kawai, Junko Kawakami, Hiroki Sasazaki
- Journal Title
  
  J. Photopolymer Science and Technology 21
  
  Pages: 739-740
- NAID
  130004833239
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Internal Stress of Dry Film Resist in Multilayer Structure2008
- Author(s)
  Akira Kawai, Takashi Yamaji
- Journal Title
  
  J. Photopolymer Sci. Technol. 21
  
  Pages: 725-726
- NAID
  130004833234
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Micro channel device composed by fry film resist2008
- Author(s)
  Akira Kawai, Daisuke Tanaka, Tomotaka Ariga
- Journal Title
  
  J. Photopolymer Science and Technology 21
  
  Pages: 43-46
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Adsouption of micro tip on various surface energy substrates2008
- Author(s)
  Akira Kawai, Takashi Yamaji, Hiroshi Horiguchi
- Journal Title
  
  J. Photopolymer and Science and Technology 21
  
  Pages: 85-88
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Non-contact deformation of micro resist pattern due to van der Waals force2008
- Author(s)
  Takashi Yamaji, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology 21
  
  Pages: 89-94
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Micro Bubble Removal depending on Glass Cleanness2008
- Author(s)
  Akira Kawai, Daisuke Tanaka
- Journal Title
  
  J. Photopolymer Sci. Technol. 21
  
  Pages: 727-728
- NAID
  130004833235
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Pinning Effects of Micro Bubbles adhered on Resist Substrate2008
- Author(s)
  Akira Kawai, Hotaka Endo, Daisuke Tanaka
- Journal Title
  
  J. Photopolymer Science and Technology 21
  
  Pages: 753-754
- NAID
  130004833242
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Hotaka Endo and Daisuke Tanaka, Pinning Effects of Micro Bubbles adhered on Resist Substrate2008
- Author(s)
  Akira Kawai
- Journal Title
  
  J. Photopolymer Science. Technol. 21
  
  Pages: 753-754
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Adsouption of micro tip on various surface energy substrates2008
- Author(s)
  Akira Kawai, Takashi Yamaj i, Hiroshi Horiguchi
- Journal Title
  
  J. Photopolymer Science and Technology 21
  
  Pages: 85-88
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Internal stress of Dry Film Resist in Multilayer Structure2008
- Author(s)
  Akira Kawai, Takashi Yamaji
- Journal Title
  
  J. Photopolymer Science and Technology 21
  
  Pages: 725-726
- NAID
  130004833234
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Nano-scale Deformation of Resist Film Surface by Humidifying and Drying Processes2008
- Author(s)
  Akira Kawai, Masahito Hirano, Takashi Yamaii
- Journal Title
  
  J. Photopolymer Science and Technology 21
  
  Pages: 737-738
- NAID
  130004833238
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Spreading of Liquid Drop on Resist Film Surface2008
- Author(s)
  Akira Kawai, Akihiro Takano
- Journal Title
  
  J. Photopolymer Science and Technology 21
  
  Pages: 759-760
- NAID
  130004833244
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Spreading of Liquid Drop on Resist Film Surface2008
- Author(s)
  Akira Kawai, Akihiro Takano
- Journal Title
  
  J.Photopolymer Sci. Technol. 21
  
  Pages: 759-760
- NAID
  130004833244
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Flowing control of micro bubbles in DFR micro fluidic channel formed on metal/insulatro composit substrate2008
- Author(s)
  Daisuke Tanaka, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology 21
  
  Pages: 63-68
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Nano-scale Deformation of Resist Film Surface by Humidifying and Drying Processes2008
- Author(s)
  Akira Kawai, Masahito Hirano and Takashi Yamaji
- Journal Title
  
  J. Photopolymer Sci. Technol. 21
  
  Pages: 737-738
- NAID
  130004833238
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Micro Bubble Removal depending on Glass Cleanness2008
- Author(s)
  Akira Kawai, Daisuke Tanaka
- Journal Title
  
  J. Photopolymer Science and Technology 21
  
  Pages: 727-728
- NAID
  130004833235
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Flowing control of micro bubbles in DFR micro fluidic channel formed on metal /insulatro composit substrate2008
- Author(s)
  Daisuke Tanaka, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology 21
  
  Pages: 63-68
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Surface Energy change of Si(100)Wafer by Exposing to Air2008
- Author(s)
  Akira Kawai, Junko Kawakami, Hiroki Sasazaki
- Journal Title
  
  J. Photopolymer Sci. Technol 21
  
  Pages: 739-740
- NAID
  130004833239
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Analysis of micro meniscus shape by light scattering2007
- Author(s)
  Masaki Yamanaka, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology 20
  
  Pages: 781-782
- NAID
  130004833187
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Micro bubbles formed on ArF excimer resist surface detected by tip scanning method2007
- Author(s)
  Kenta Suzuki, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology 20
  
  Pages: 805-806
- NAID
  130004833192
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Visualization of stress distribution in resist film by surface plasma treatment2007
- Author(s)
  Akira Kawai, Norio Moriike
- Journal Title
  
  J. Photopolymer Science and Technology 20
  
  Pages: 783-785
- NAID
  130004833188
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Native oxide growth on Si (100) surface in liquid environment2007
- Author(s)
  Harumitsu Kubota, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology 20
  
  Pages: 823-824
- NAID
  130004833198
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Nano-wetting of DI-water analyzed by AFM2007
- Author(s)
  Akira Kawai, Masahito Hirano
- Journal Title
  
  J. Photopolymer Science and Technology 20
  
  Pages: 813-814
- NAID
  130004833195
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Wetting analysis of hydrophobic substrate treated by HMDS primer2007
- Author(s)
  Akira Kawai, Junko Kawakami
- Journal Title
  
  J. Photopolymer Science and Technology 20
  
  Pages: 815-816
- NAID
  130004833196
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Native oxide growth on Si(100) surface in liquid environment2007
- Author(s)
  Harumitsu Kubota, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology 20
  
  Pages: 823-824
- NAID
  130004833198
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Bubbles Condensed at Water/Resist Interface Analyzed by Atomic Force Microscopy2007
- Author(s)
  Akira Kawai, Kenta Suzuki
- Journal Title
  
  J. Photopolymer Science and Technology 20
  
  Pages: 673-678
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Non-contacting deformation (NCD) of line resist pattern due to interaction force with AFM tip2007
- Author(s)
  Akira Kawai, Takahiro Moriuchi
- Journal Title
  
  J. Photopolymer Science and Technology 20
  
  Pages: 777-780
- NAID
  130004833186
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360157
[Journal Article] Formation factors of watermark for immersion lithography2006
- Author(s)
  Takayoshi Niiyama, Akira Kawai
- Journal Title
  
  Jpn.J.Appl.Phys. 45
  
  Pages: 5383-5387
- NAID
  10017998531
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Removal mechanism of nano-bubble with AFM for Immersion Lithography2006
- Author(s)
  Akira Kawai, Kenta Suzuki
- Journal Title
  
  Microelectronic Engineering 83
  
  Pages: 655-658
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Condensation Mechanism of Micro Bubbles Depending on DFR Pattern Design2006
- Author(s)
  Akira Kawai, Hotaka Endo, Tomotaka Ariga
- Journal Title
  
  Microelectronic Engineering (in press)
- Data Source
  KAKENHI-PROJECT-16656105
[Journal Article] Adhesion Improvement of ArF Resist Pattern Depending on BARC Material2006
- Author(s)
  Akira Kawai, Takahiro Moriuchi, Takayoshi Niiyama
- Journal Title
  
  Microelectronic Engineering (in press)
- Data Source
  KAKENHI-PROJECT-16656105
[Journal Article] Condensation Mechanism of Micro Bubbles Depending on DFR Pattern Design2006
- Author(s)
  Akira Kawai, Hotaka Endo, Tomotaka Ariga
- Journal Title
  
  Microelectronic Engineering (in press)
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Adhesion Improvement of ArF Resist Pattern Depending on BARC Material2006
- Author(s)
  Akira Kawai, Takahiro Moriuchi, Takayoshi Niiyama
- Journal Title
  
  Microelectronic Engineering (in press)
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Removal mechanism of nano-bubble with AFM for Immersion Lithography2006
- Author(s)
  Akira Kawai, Kenta Suzuki
- Journal Title
  
  Microelectronic Engineering (in press)
- Data Source
  KAKENHI-PROJECT-16656105
[Journal Article] Effect of low surface tension liquid on pattern collapse analyzed by dynamic meniscus observation2006
- Author(s)
  Akira Kawai, Kenta Suzuki
- Journal Title
  
  Jpn.J.Appl.Phys. 45
  
  Pages: 5429-5434
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Removal mechanism of nano-bubble with AFM for Immersion Lithography2006
- Author(s)
  Akira Kawai, Kenta Suzuki
- Journal Title
  
  Microelectronic Engineering (in press)
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Effect of low surface tension liquid on pattern collapse analyzed by dynamic meniscus observation2006
- Author(s)
  Akira Kawai, Kenta Suzuki
- Journal Title
  
  Jpn. J. Appl. Phys. 45
  
  Pages: 5429-5434
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Formation factors of watermark for immersion lithography2006
- Author(s)
  Takayoshi Niiyama, Akira Kawai
- Journal Title
  
  Jpn. J. Appl. Phys. 45
  
  Pages: 5383-5387
- NAID
  10017998531
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Micro wetting system by controlling pinning and capillary forces2006
- Author(s)
  Takayoshi Niiyama, Akira Kawai
- Journal Title
  
  Microelectronic Engineering- 83
  
  Pages: 1280-1283
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Condensation Mechanism of Micro Bubbles Depending on DFR Pattern Design2006
- Author(s)
  Akira Kawai, Hotaka Endo, Tomotaka Ariga
- Journal Title
  
  Microelectronic Engineering 83
  
  Pages: 1167-1169
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Removal mechanism of nano-bubble with AFM for Immersion Lithography2006
- Author(s)
  Akira Kawai, Kenta Suzuki
- Journal Title
  
  Microelectronic Engineering- 83
  
  Pages: 655-658
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Micro wetting system by controlling pinning and capillary forces2006
- Author(s)
  Takayoshi Niiyama, Akira Kawai
- Journal Title
  
  Microelectronic Engineering 83
  
  Pages: 1280-1283
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Dot Pattern Collapse due to Laplace Force Analyzed by Dynamical Meniscus Model2005
- Author(s)
  Akira Kawai, Kenta Suzuki
- Journal Title
  
  J.Photopolymer Sci.Technol 18(6)
  
  Pages: 679-679
- NAID
  130004464458
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Condensation Behavior of nanoscale bubbles on ArF excimer resist surface analyzed by atomic force microscope2005
- Author(s)
  Akira Kawai
- Journal Title
  
  J.Photopolymer Sci.Technol 18(3)
  
  Pages: 349-354
- NAID
  130004833035
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Interaction Analysis of DI-water/Air/ArF resist System using Atomic Force Microscope2005
- Author(s)
  Takayoshi Niiyama, Akira Kawai
- Journal Title
  
  J.Photopolymer Science and Technology 18.3
  
  Pages: 373-380
- NAID
  130004833038
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Condensation Behavior of nanoscale bubbles on ArF excimer resist surface analyzed by atomic force microscope2005
- Author(s)
  Akira Kawai
- Journal Title
  
  J.Photopolymer Sci.Technol, 18(3)
  
  Pages: 349-349
- NAID
  130004833035
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Condensation of Nano-size Polymer Aggregates by spin drying2005
- Author(s)
  Atsushi Ishikawa, Akira Kawai
- Journal Title
  
  Journal of the Society of Adhesion and Interface, Korea 6・1
  
  Pages: 7-10
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Interaction Analysis of DI-water/Air/ArF resist System using Atomic Force Microscope2005
- Author(s)
  Takayoshi Niiyama, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology 18・3
  
  Pages: 373-380
- NAID
  130004833038
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Dot Pattern Collapse due to Laplace Force Analyzed by Dynamical Meniscus Model2005
- Author(s)
  Akira Kawai, Kenta Suzuki
- Journal Title
  
  J.Photopolymer Sci.Technol. 18(6)
  
  Pages: 679-679
- NAID
  130004464458
- Data Source
  KAKENHI-PROJECT-16656105
[Journal Article] Deflection Analysis of Micro Cantilever due to Water Vapor Adsorption2005
- Author(s)
  Akira Kawai, Takahiro Moriuchi
- Journal Title
  
  J.Photopolymer Sci.Technol. 18(6)
  
  Pages: 681-681
- NAID
  130004464459
- Data Source
  KAKENHI-PROJECT-16656105
[Journal Article] Dot Pattern Collapse due to Laplace Force Analyzed by Dynamical Meniscus Model2005
- Author(s)
  Akira Kawai, Kenta Suzuk
- Journal Title
  
  J.Photopolymer Sci.Technol 18・6
  
  Pages: 679-680
- NAID
  130004464458
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Condensation Behavior of nanoscale bubbles on ArF excimer resist surface analyzed by atomic force microscope2005
- Author(s)
  Akira Kawai
- Journal Title
  
  J.Photopolymer Sci.Technol. 18(3)
  
  Pages: 349-349
- NAID
  130004833035
- Data Source
  KAKENHI-PROJECT-16656105
[Journal Article] Condensation Behavior of nanoscale bubbles on ArF excimer resist surface analyzed by atomic force microscope2005
- Author(s)
  Akira Kawai
- Journal Title
  
  J. Photopolymer Sci. Technol 18(3)
  
  Pages: 349-354
- NAID
  130004833035
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Dot Pattern Collapse due to Laplace Force Analyzed by Dynamical Meniscus Model2005
- Author(s)
  Akira Kawai, Kenta Suzuki
- Journal Title
  
  J. Photopolymer Sci. Technol 18・6
  
  Pages: 679-680
- NAID
  130004464458
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Deflection Analysis of Micro Cantilever due to Water Vapor Adsorption2005
- Author(s)
  Akira Kawai, Takahiro Moriuchi
- Journal Title
  
  J.Photopolymer Sci.Technol, 18(6)
  
  Pages: 681-681
- NAID
  130004464459
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Pinning effect of micro drops on geometrical complex substrates composed with different surface energy material2004
- Author(s)
  Masaki Yamanaka, Akira Okada, Akira Kawai
- Journal Title
  
  J.Vac.Sci.& Technol B22
  
  Pages: 3525-3527
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Determination of Young's modulus of polymer aggregate based on Hertz theory2004
- Author(s)
  Atsushi Ishikawa, Takashi Tanji, Akira Kawai
- Journal Title
  
  Journal of Photopolymer Science and Technology 17
  
  Pages: 715-718
- NAID
  130004832992
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Viscous finger pattern formed in photoresist film during heat treatment2004
- Author(s)
  Akira Kawai, Akihiko Seki, Hotaka Endo
- Journal Title
  
  Journal of Photopolymer Science and Technology 17
  
  Pages: 103-104
- NAID
  130004832955
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Analysis of drying behavior of rinse water depended on resist pattern arrangement2004
- Author(s)
  Akira Kawai, Masahito Hirano, Takayoshi Niiyama
- Journal Title
  
  Journal of Photopolymer Science and Technology 17
  
  Pages: 461-464
- Data Source
  KAKENHI-PROJECT-16656105
[Journal Article] Micro bubbles captured at micro defect on resist film2004
- Author(s)
  Hotaka Endo, Akira Kawai
- Journal Title
  
  Journal of Photopolymer Science and Technology 17
  
  Pages: 105-106
- NAID
  130004832956
- Data Source
  KAKENHI-PROJECT-16656105
[Journal Article] Interaction force analysis of resist film surface in water vapor2004
- Author(s)
  Takayoshi Niiyama, Akira Kawai
- Journal Title
  
  Journal of Photopolymer Science and Technology 17
  
  Pages: 453-456
- NAID
  130004464372
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Adhesion Mechanism of Micro Bubbles on ArF and F2 Excimer Resists2004
- Author(s)
  Hotaka Endo, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology 17・5
  
  Pages: 713-714
- NAID
  130004832991
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Determination of Young' s Modulus of Polymer Aggregate based on Hertz Theory2004
- Author(s)
  Atsushi Ishikawa, Takashi Tanji, Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology 17・5
  
  Pages: 715-718
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Meniscus analysis in microgap during liquid drying process2004
- Author(s)
  Atsushi Ishikawa, Makoto Sakata, Akira Kawai
- Journal Title
  
  Journal of Photopolymer Science and Technology 17
  
  Pages: 457-460
- NAID
  130004464373
- Data Source
  KAKENHI-PROJECT-16656105
[Journal Article] Analysis for Drying Behavior of Rinse Water Depended on Resist Pattern Arrangement2004
- Author(s)
  Akira Kawai, Masahito Hirano, Takayoshi Niiyama
- Journal Title
  
  J. Photopolymer Science and Technology 17・3
  
  Pages: 461-464
- NAID
  130004464374
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Cohesion property of polymer aggregate depending on hardening treatment2004
- Author(s)
  Atsushi Ishikawa, Takashi Tanji, Akira Kawai
- Journal Title
  
  Journal of Photopolymer Science and Technology 17
  
  Pages: 99-102
- NAID
  130004832985
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Interaction force analysis of resist film surface in water vapor2004
- Author(s)
  Takayoshi Niiyama, Akira Kawai
- Journal Title
  
  Journal of Photopolymer Science and Technology 17
  
  Pages: 453-456
- NAID
  130004464372
- Data Source
  KAKENHI-PROJECT-16656105
[Journal Article] Adhesion mechanism of micro bubbles on ArF and F2 excimer resists2004
- Author(s)
  Hotaka Endo, Akira Kawai
- Journal Title
  
  Journal of Photopolymer Science and Technology 17
  
  Pages: 713-714
- NAID
  130004832991
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Determination of Young' s Modulus of Polymer Aggregate based on Hertz Theory2004
- Author(s)
  Atsushi Ishikawa, Takashi Tanji, Akira Kawai
- Journal Title
  
  J.Photopolymer Science and Technology. 17・5
  
  Pages: 715-718
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Micro bubbles captured at micro defect on resist film2004
- Author(s)
  Hotaka Endo, Akira Kawai
- Journal Title
  
  Journal of Photopolymer Science and Technology 17
  
  Pages: 105-106
- NAID
  130004832956
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Cohesion Property of Resist Pattern Surface analyzed by Tip Indentation Method2004
- Author(s)
  Akira Kawai
- Journal Title
  
  J.Photopolymer Science and Technology 17・3
  
  Pages: 441-448
- NAID
  130004464370
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Cohesion Property of Resist Pattern Surface analyzed by Tip Indentation Method2004
- Author(s)
  Akira Kawai
- Journal Title
  
  J. Photopolymer Science and Technology 17・3
  
  Pages: 441-448
- NAID
  130004464370
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Adhesion mechanism of micro bubbles on ArF and F2 excimer resists2004
- Author(s)
  Hotaka Endo, Akira Kawai
- Journal Title
  
  Journal of Photopolymer Science and Technology 17
  
  Pages: 713-714
- NAID
  130004832991
- Data Source
  KAKENHI-PROJECT-16656105
[Journal Article] Pinning effect of micro liquid drop on geometrical complex substrates composed with different surface energy materials2004
- Author(s)
  Masaki Yamanaka, Akira Okada, Akira Kawai
- Journal Title
  
  Journal of Vacuum Science and Technology B 22・6
  
  Pages: 3525-3527
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Cohesion property of resist pattern surface analyzed by tip indentation method2004
- Author(s)
  Akira Kawai
- Journal Title
  
  Journal of Photopolymer Science and Technology 17
  
  Pages: 441-448
- NAID
  130004464370
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Adhesion Mechanism of Micro Bubbles on ArF and F2 Excimer Resists2004
- Author(s)
  Hotaka Endo, Akira Kawai
- Journal Title
  
  J.Photopolymer Science and Technology 17・5
  
  Pages: 713-714
- NAID
  130004832991
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Pinning effect of micro drops on geometrical complex substrates composed with different surface energy material2004
- Author(s)
  Masaki Yamanaka, Akira Okada, Akira Kawai
- Journal Title
  
  J.Vac.Sci.& Technol B22
  
  Pages: 3525-3527
- Data Source
  KAKENHI-PROJECT-16656105
[Journal Article] Cohesion property of polymer aggregate depending on hardening treatment2004
- Author(s)
  Atsushi Ishikawa, Takashi Tanji, Akira Kawai
- Journal Title
  
  Journal of Photopolymer Science and Technology 17
  
  Pages: 99-102
- NAID
  130004832985
- Data Source
  KAKENHI-PROJECT-16656105
[Journal Article] Meniscus analysis in microgap during liquid drying process2004
- Author(s)
  Atsushi Ishikawa, Makoto Sakata, Akira Kawai
- Journal Title
  
  Journal of Photopolymer Science and Technology 17
  
  Pages: 457-460
- NAID
  130004464373
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Analysis for Drying Behavior of Rinse Water Depended on Resist Pattern Arrangement2004
- Author(s)
  Akira Kawai, Masahito Hirano, Takayoshi Niiyama
- Journal Title
  
  J.Photopolymer Science and Technology- 17・3
  
  Pages: 461-464
- NAID
  130004464374
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Determination of Young's modulus of polymer aggregate based on Hertz theory2004
- Author(s)
  Atsushi Ishikawa, Takashi Tanji, Akira Kawai
- Journal Title
  
  Journal of Photopolymer Science and Technology 17
  
  Pages: 715-718
- NAID
  130004832992
- Data Source
  KAKENHI-PROJECT-16656105
[Journal Article] Analysis of drying behavior of rinse water depended on resist pattern arrangement2004
- Author(s)
  Akira Kawai, Masahito Hirano, Takayoshi Niiyama
- Journal Title
  
  Journal of Photopolymer Science and Technology 17
  
  Pages: 461-464
- Data Source
  KAKENHI-PROJECT-16360171
[Journal Article] Viscous finger pattern formed in photoresist film during heat treatment2004
- Author(s)
  Akira Kawai, Akihito Seki, Hotaka Endo
- Journal Title
  
  Journal of Photopolymer Science and Technology 17
  
  Pages: 103-104
- NAID
  130004832955
- Data Source
  KAKENHI-PROJECT-16656105
[Journal Article] Cohesion property of resist pattern surface analyzed by tip indentation method2004
- Author(s)
  Akira Kawai
- Journal Title
  
  Journal of Photopolymer Science and Technology 17
  
  Pages: 441-448
- NAID
  130004464370
- Data Source
  KAKENHI-PROJECT-16656105
[Patent] ナノ気泡の判別方法及びその装置2007
- Inventor(s)
  鈴木健太, 河合晃
- Industrial Property Rights Holder
  長岡技術科学大学
- Industrial Property Rights Type
  特許
- Acquisition Date
  2007-11-19
- Data Source
  KAKENHI-PROJECT-23360150
[Patent] 振動測定装置及び振動測定方法2007
- Inventor(s)
  河合晃
- Industrial Property Rights Holder
  長岡技術科学大学
- Industrial Property Rights Type
  特許
- Acquisition Date
  2007-06-27
- Data Source
  KAKENHI-PROJECT-23360150
[Patent] ナノ気泡の判別方法及びその装置2007
- Inventor(s)
  鈴木健太、河合晃
- Industrial Property Rights Holder
  長岡技術科学大学
- Industrial Property Number
  2007-293673
- Filing Date
  2007-11-19
- Data Source
  KAKENHI-PROJECT-19360157
[Patent] 振動測定装置及び振動測定方法2007
- Inventor(s)
  河合晃
- Industrial Property Rights Holder
  長岡技術科学大学
- Industrial Property Number
  2007-169543
- Filing Date
  2007-06-27
- Data Source
  KAKENHI-PROJECT-19360157
[Patent] 屈折率分布の解析方法2007
- Inventor(s)
  河合晃、川上喜章
- Industrial Property Rights Holder
  長岡技術科学大学
- Industrial Property Number
  2007-038310
- Filing Date
  2007-02-19
- Data Source
  KAKENHI-PROJECT-19360157
[Patent] ナノ気泡の判別方法及びその装置2007
- Inventor(s)
  鈴木健太, 河合晃
- Industrial Property Rights Holder
  長岡技術科学大学
- Industrial Property Number
  2007-293673
- Filing Date
  2007-11-19
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] Adhesion Improvement of Photoresist; Destruction Mode Analysis2020
- Author(s)
  Keita Hasegawa, Akira Kawai
- Organizer
  SPIE2020 Microlithography
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01494
[Presentation] Local condensation of TMAH developer at photoresist/glass interface analyzed by using confocal laser scanning microscope (CLSM)2020
- Author(s)
  Hirom Takemi, Akira Kawai
- Organizer
  SPIE2020 Microlithography
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K18854
[Presentation] Adhesion Improvement of Photoresist; Destruction Mode Analysis2020
- Author(s)
  Keita Hasegawa, Akira Kawai
- Organizer
  SPIE2020 Microlithography
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K18854
[Presentation] Local condensation of TMAH developer at photoresist/glass interface analyzed by using confocal laser scanning microscope2020
- Author(s)
  Hirom Takemi, Akira Kawai
- Organizer
  SPIE2020 Microlithography
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01494
[Presentation] 接着層の耐久試験の高機能化2019
- Author(s)
  山浦　樹，河合　晃
- Organizer
  令和元年電気学会東京支部新潟支所研究発表会
- Data Source
  KAKENHI-PROJECT-18K18854
[Presentation] 多層レジストプロセスの高機能化によるCu配線技術2019
- Author(s)
  高垣　信巨，河合　晃
- Organizer
  令和元年電気学会東京支部新潟支所研究発表会
- Data Source
  KAKENHI-PROJECT-18K18854
[Presentation] Fabrication of MOS Transistor Array Pattern on i-line Photoresist Film By the Hyblid Lithography2018
- Author(s)
  Ryosuke Sato, Akira Kawai
- Organizer
  GIGAKU conference 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01494
[Presentation] Fabrication of MOS Transistor Array Pattern on i-line Photoresist Film By the Hyblid Lithography2018
- Author(s)
  Ryosuke Sato, Satoshi Shindo, Akira Kawai
- Organizer
  GIGAKU Conference 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K18854
[Presentation] Fabrication of Double Cone Tube Formed by Micro Stereolithography for Molding of Three-Dimensional Metal Structure2017
- Author(s)
  Katsuaki Yamane and Akira Kawai
- Organizer
  The 6th International GIGAKU Conference in Nagaoka (IGCN 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14250
[Presentation] Application to Artificial Skin of Double Cone Tube Made of Acrylic Resin Formed by Micro Stereolithography2017
- Author(s)
  Katsuaki Yamane and Akira Kawai
- Organizer
  The 34th International Conference of Photopolymer Science and Technology (ICPST-34)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14250
[Presentation] Durability of Resist Film in TMAH Developer Analyzed by C-V Method"2017
- Author(s)
  Hodaka Shirataki, Akira Kawai
- Organizer
  International Conference of Science of Technology Innovation 2017 (STI-Gigaku 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14250
[Presentation] Characterization of Nanoscale Bubble and Polymer Aggregate Adhered on Substrate by using Atomic Force Microscope (AFM) Tip2016
- Author(s)
  Akira Kawai, Hodaka Shirataki, Kazuho Kai, Natsumi Yagi, Katsuaki Yamane, Tomohiro Maruyama
- Organizer
  42nd Micro and Nano Engineering (MNE2016)
- Place of Presentation
  Vienna, Austria
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14250
[Presentation] Application of Micro Heating System to Plant Vital Control2016
- Author(s)
  Kazuho Kai, Akira Kawai
- Organizer
  The 5th International GIGAKU Conference in Nagaoka (IGCN 2016)
- Place of Presentation
  Nagaoka University of Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14250
[Presentation] Biomimetic Fabrication of Gas Storage System in Micro Two Step Cone Tube2016
- Author(s)
  Katsuaki Yamane, Akira Kawai
- Organizer
  The 5th International GIGAKU Conference in Nagaoka (IGCN 2016)
- Place of Presentation
  Nagaoka University of Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14250
[Presentation] Negative Pattern Formation in Positive Resist Layer by EB / UV Hybrid Lithography2016
- Author(s)
  Akira Kawai, Tomohiro Maruyama, Hiroki Nakano
- Organizer
  42nd Micro and Nano Engineering (MNE2016)
- Place of Presentation
  Vienna, Austria
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14250
[Presentation] Bubble Trap Analysis for Smooth Fluid Flowing in Micro Channel / Tube Network2016
- Author(s)
  Natsumi Yagi, Kazuho Kai, Tomotaka Ariga, Hotaka Endo, Akira Kawai
- Organizer
  42nd Micro and Nano Engineering (MNE2016)
- Place of Presentation
  Vienna, Austria
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14250
[Presentation] Characterization of SAN (Self-Assembled Network) Structure Formed in Ultra Thin Film by using AFM (atomic force microscope)2016
- Author(s)
  Tomohiro Maruyama, Katsuaki Yamane, Hiroki Nakano, Akira Kawai
- Organizer
  42nd Micro and Nano Engineering (MNE2016)
- Place of Presentation
  Vienna, Austria
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14250
[Presentation] Negative pattern formation in positive resist layer by EB / UV hybrid lithography2016
- Author(s)
  Hiroki Nakano, Kenta Takahashi, Akira Kawai
- Organizer
  International Conference of Photopolymer Science and Technology ICPST-32
- Place of Presentation
  Chiba, Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14250
[Presentation] Smooth Fluid Flow at Micro Channel/Tube Junction2016
- Author(s)
  Natsumi Yagi, Akira Kawai
- Organizer
  The 5th International GIGAKU Conference in Nagaoka (IGCN 2016)
- Place of Presentation
  Nagaoka University of Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14250
[Presentation] Fuel Cell Operation in Liquid Environment by Gas-Liquid Interface Control System2016
- Author(s)
  Akira Kawai, Katsuaki Yamane, Masaya Shinozaki, Yosuke Sakurai
- Organizer
  42nd Micro and Nano Engineering (MNE2016)
- Place of Presentation
  Vienna, Austria
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14250
[Presentation] Dielectric Dispersion Analysis of Resist Materials by Parallel Plate Capacitor Structure2016
- Author(s)
  Akira Kawai, Hodaka Shirataki, Hiroki Sasazaki, Shogo Ohtani
- Organizer
  42nd Micro and Nano Engineering (MNE2016)
- Place of Presentation
  Vienna, Austria
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14250
[Presentation] Analysis of TMAH Developer Intrusion into Resist Film by C-V Curve of MIS Capacitor2016
- Author(s)
  Hodaka Shirataki, Akira Kawai
- Organizer
  The 5th International GIGAKU Conference in Nagaoka (IGCN 2016)
- Place of Presentation
  Nagaoka University of Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14250
[Presentation] Combination of Micro-Heater and Water Channel Device and Its Application to Plant Cell Vital Control2016
- Author(s)
  Kazuho Kai, Natsumi Yagi, Yuta Noguchi, Akira Kawai
- Organizer
  42nd Micro and Nano Engineering (MNE2016)
- Place of Presentation
  Vienna, Austria
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14250
[Presentation] TMAH Developer Intrusion into Resist Film Analyzed by C-V Method of MIS Structure2016
- Author(s)
  Hodaka Shirataki, Akira Kawai
- Organizer
  42nd Micro and Nano Engineering (MNE2016)
- Place of Presentation
  Vienna, Austria
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14250
[Presentation] Formation of Ultra Thin Continuous Resist Film Less Than 10nm2016
- Author(s)
  Tomohiro Maruyama, Akira Kawai
- Organizer
  The 5th International GIGAKU Conference in Nagaoka (IGCN 2016)
- Place of Presentation
  Nagaoka University of Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14250
[Presentation] Development of Micro Cone Shape Tube Utilizing for Gas Trap Sysytem2016
- Author(s)
  Katsuaki Yamane, Tomohiro Maruyama, Yosuke Sakurai, Akira Kawai
- Organizer
  42nd Micro and Nano Engineering (MNE2016)
- Place of Presentation
  Vienna, Austria
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14250
[Presentation] 紫外線照射による酸化チタン膜表面の活性化2013
- Author(s)
  鎌田　隼，河合　晃
- Organizer
  平成25年度電気学会東京支部新潟支所研究発表会
- Place of Presentation
  新潟大学
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Effect of Mechanical Stress on Electrolyte Film for Flexible Sheet Type Direct Methanol Fuel Cell2013
- Author(s)
  Yosuke Sakurai, Akira Kawai
- Organizer
  The 2nd International GIGAKU Conference in Nagaoka
- Place of Presentation
  Nagaoka University of Technology
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] マイクロヒータ／チャネルデバイスの局所加熱特性2013
- Author(s)
  野口悠太、河合　晃
- Organizer
  平成25年度（第23回）電気学会東京支部新潟支所研究発表会
- Place of Presentation
  新潟大学
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Single chip micro direct methanol fuel cell (SC-μDMFC) fabricated by MEMS Process2013
- Author(s)
  Yosuke Sakurai, Daisuke Tanaka, Shunsuke Ohata, Akira Kawai
- Organizer
  IEEEポスターセッション平成25年度電気学会東京支部新潟支所研究発表会
- Place of Presentation
  新潟大学
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] リソグラフィプロセスを用いた燃料電池用電解質のマイクロパターン形成2013
- Author(s)
  桜井、河合
- Organizer
  平成２５年度電気学会東京支部新潟支所研究発表会
- Place of Presentation
  新潟大学
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] ポジ型およびネガ型フォトレジストの溶解度の差を用いたマイクロチューブの作製2013
- Author(s)
  大塚、高橋、河合
- Organizer
  平成２５年度電気学会東京支部新潟支所研究発表会
- Place of Presentation
  新潟大学
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] A SU-8 Photoresist Film as Electrical Stable Layer in Liquid Environment2013
- Author(s)
  Yuta Noguchi, Akira Kawai
- Organizer
  The 2nd International GIGAKU Conference in Nagaoka
- Place of Presentation
  新潟大学
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Micro local heating system integrated with surround microfluidic channel2013
- Author(s)
  Yuta Noguchi, Akira Kawai
- Organizer
  電気学会センサ・マイクロマシン部門　第30回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  仙台国際会議場
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] 紫外線照射により活性化された二酸化チタン膜における表面エネルギーの解析2013
- Author(s)
  鎌田　隼，河合　晃
- Organizer
  第30回「センサ・マイクロマシンと応用システム」
- Place of Presentation
  仙台国際会議場
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Surface energy analysis of Indium Tin Oxide (ITO) thin films on annealing treatment2013
- Author(s)
  Shun Kamada，Akira Kawai
- Organizer
  IEEEポスターセッション平成25年度電気学会東京支部新潟支所研究発表会
- Place of Presentation
  新潟大学
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Photoresist/Pt Electrode/Perflurosulfonic Acid (PFSA) Multilayer Structure for Single Chip Micro Direct Methanol Fuel Cell (SC-μDMFC)2013
- Author(s)
  Yosuke Sakurai, Daisuke Tanaka, Shunsuke Ohata, Akira Kawai
- Organizer
  26th International Microprocesses and Nanotechnology Conference (MNC2013)
- Place of Presentation
  Hotel Roiton(Sapporo)
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Bio-plant power collecting system by functional electrode2013
- Author(s)
  大谷翔吾、河合　晃
- Organizer
  電気学会センサ・マイクロマシン部門大会　第30回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  仙台国際会議場
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] C-V測定を用いた誘電膜の特性評価2013
- Author(s)
  篠崎雅也、河合　晃
- Organizer
  平成25年度電気学会東京支部新潟支所研究発表会
- Place of Presentation
  新潟大学
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Fabrication of Micro Tube Array by Combining Positive with Negative Photoresist due to Solubility Difference in Developer2013
- Author(s)
  Kazutoshi Otsuka, Kenta Takahashi, Akira Kawai
- Organizer
  電気学会センサ・マイクロマシン部門, 第30回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  仙台国際会議場
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Micro Pattern Fabrication of Perflurosulfonic Acid (PFSA) Film by CF4 RIE Process2013
- Author(s)
  Yosuke Sakurai, Kenta Takahashi, Akira Kawai
- Organizer
  26th International Microprocesses and Nanotechnology Conference (MNC2013)
- Place of Presentation
  Hotel Roiton(Sapporo)
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Condensation control of nanoscale polymer aggregates by using atomic force microscope (AFM) tip2012
- Author(s)
  Akira Kawai
- Organizer
  1st International GIGAKU Conference in Nagaoka(招待講演)
- Place of Presentation
  Nagaoka, Japan
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] Monitoring and Modeling for Response Time of Biopotential in Plant Cells2012
- Author(s)
  Akira Kawai
- Organizer
  The Electrochemical Society
- Place of Presentation
  Honolulu, Hawaii
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] SU-8フォトレジストの人工皮膚材料としての検討、I-022012
- Author(s)
  大塚和俊、河合晃
- Organizer
  平成24年度電気学会東京支部新潟支所研究発表会
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] Stress Durability of Electrolyte Structure in Flexible Sheet type Direct Methanol Fuel Cell (FS-DMFC)2012
- Author(s)
  Akira Kawai
- Organizer
  The Electrochemical Society
- Place of Presentation
  Honolulu, Hawaii
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] 摩擦蓄電エネルギーの民生機器の実用化の検討2012
- Author(s)
  河合　晃
- Organizer
  平成２４年度電気学会東京支部新潟支所研究発表会
- Place of Presentation
  長岡技術科学大学
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] 植物電位と表面温度の多点測定による緑葉植物の育成観察2012
- Author(s)
  河合　晃
- Organizer
  平成２４年度電気学会東京支部新潟支所研究発表会
- Place of Presentation
  長岡技術科学大学
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Peeling Force of Polymer Micro Pattern by Direct Peelingby using AFM Tip (DPAT)2012
- Author(s)
  Akira Kawai
- Organizer
  The Electrochemical Society
- Place of Presentation
  Honolulu, Hawaii
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Stress Durability of Electrolyte Structure in Flexible Sheet type Direct Methanol Fuel Cell (FS-DMFC)2012
- Author(s)
  Akira Kawai
- Organizer
  The Electrochemical Society
- Place of Presentation
  Honolulu, Hawaii
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] 植物電位と表面温度の多点測定による緑葉植物の育成観察2012
- Author(s)
  河合　晃
- Organizer
  平成２４年度電気学会東京支部新潟支所研究発表会
- Place of Presentation
  長岡技術科学大学
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] Condensation control ofNanoscale Polymer Aggregates by using atomic force microscope tip2012
- Author(s)
  Akira Kawai
- Organizer
  1^st International GIGAKU Conference in Nagaoka (IGCN2012)
- Place of Presentation
  Nagaoka, Japan
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] Monitoring andModeling for Response Time of Biopotential in Plant Cells2012
- Author(s)
  Yuta Noguchi, Akira Kawai
- Organizer
  The Electrochemical Society, Abstract #69, Honolulu PRiME
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] 植物の細胞間電位の測定とモニタリング2012
- Author(s)
  河合　晃
- Organizer
  平成２４年度電気学会東京支部新潟支所研究発表会
- Place of Presentation
  長岡技術科学大学
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] Monitoring and Modeling for Response Time of Biopotential in Plant Cells2012
- Author(s)
  Akira Kawai
- Organizer
  The Electrochemical Society
- Place of Presentation
  Honolulu, Hawaii
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] 植物電位と表面温度の多点測定による緑葉植物の育成観察、II-132012
- Author(s)
  大谷翔梧、河合晃
- Organizer
  平成24年度電気学会東京支部新潟支所研究発表会
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] Stress Durability of Electrolyte Structure in Flexible Sheet type Direct Methanol Fuel Cell(FS-DMFC)2012
- Author(s)
  Yosuke Sakurai, Akira Kawai
- Organizer
  The Electrochemical Society, Abstract #59, Honolulu PRiME
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] 摩擦蓄電エネルギーの民生機器の実用化の検討2012
- Author(s)
  河合　晃
- Organizer
  平成２４年度電気学会東京支部新潟支所研究発表会
- Place of Presentation
  長岡技術科学大学
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Condensation control of Nanoscale Polymer Aggregates by using atomic force microscope tip2012
- Author(s)
  Akira Kawai
- Organizer
  1st International GIGAKU Conference in Nagaoka (IGCN2012)
- Place of Presentation
  Nagaoka, Japan
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Condensation control of nanoscale polymer aggregates by using atomic force microscope (AFM) tip2012
- Author(s)
  Akira Kawai
- Organizer
  1st International GIGAKU Conference in Nagaoka
- Place of Presentation
  Nagaoka, Japan(招待講演)
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Peeling Force of Polymer Micro Pattern by Direct Peelingby using AFM Tip (DPAT)2012
- Author(s)
  Akira Kawai
- Organizer
  The Electrochemical Society
- Place of Presentation
  Honolulu, Hawaii
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] SU-8フォトレジストの人工皮膚材料としての検討2012
- Author(s)
  河合　晃
- Organizer
  平成２４年度電気学会東京支部新潟支所研究発表会
- Place of Presentation
  長岡技術科学大学
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] Condensation control of Nanoscale Polymer Aggregates by using atomic force microscope tip2012
- Author(s)
  Akira Kawai
- Organizer
  The Electrochemical Society
- Place of Presentation
  Honolulu, Hawaii
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] Condensation control of Nanoscale Polymer Aggregates by using atomic force microscope tip2012
- Author(s)
  Akira Kawai
- Organizer
  The Electrochemical Society
- Place of Presentation
  Honolulu, Hawaii
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] 摩擦蓄電エネルギーの民生機器の実用化の検討、P-142012
- Author(s)
  窪田直也、河合晃
- Organizer
  平成24年度電気学会東京支部新潟支所研究発表会
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] SU-8フォトレジストの人工皮膚材料としての検討2012
- Author(s)
  河合　晃
- Organizer
  平成２４年度電気学会東京支部新潟支所研究発表会
- Place of Presentation
  長岡技術科学大学
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Peeling Force ofPolymer Micro Pattern by Direct Peelingby using AFM Tip (DPAT)2012
- Author(s)
  Takashi Aiba, Akira Kawai
- Organizer
  The ElectrochemicalSociety, Abstract #68, Honolulu PRiME
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] Nano- Porous Structure in Polymer Micro Pattern Analyzed by Atomic Force Microscopy (AFM)2011
- Author(s)
  Akira Kawai
- Organizer
  Nano S&T 2011(招待講演)
- Place of Presentation
  Dalian, China
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] メタノール水溶液中でのワイヤー電極の電位検出2011
- Author(s)
  森永和也, 河合晃
- Organizer
  電気学会C部門大会講演
- Place of Presentation
  富山大学
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] X線光電子分光法(XPS)によるSi基板上のシランカップリング処理層の再生評価と制御2011
- Author(s)
  相場崇、河合晃
- Organizer
  電気学会C部門大会
- Place of Presentation
  富山大学
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] 植物の細胞間電位の測定とモニタリング2011
- Author(s)
  野口悠太、河合晃
- Organizer
  電気学会C部門大会講演
- Place of Presentation
  富山大
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] Nano- Porous Structure in Polymer Micro Pattern Analyzed by Atomic Force Microscopy(AFM)2011
- Author(s)
  Akira Kawai
- Organizer
  Nano S&T 2011
- Place of Presentation
  Dalian, China. Invited
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] Nanoscale Topography of Polymer Film Surface in Dry/Wet Conditions2011
- Author(s)
  Akira Kawai
- Organizer
  Nano S&T 2011(招待講演)
- Place of Presentation
  Dalian, China
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] X線光電子分光法(XPS)によるSi 基板上のシランカップリング処理層の再生評価と制御2011
- Author(s)
  相場崇、河合晃
- Organizer
  電気学会C部門大会講演
- Place of Presentation
  富山大
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] シート型直接メタノール燃料電池(DMFC)の外部荷重による発電基礎特性2011
- Author(s)
  桜井洋輔、河合晃
- Organizer
  電気学会A部門大会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] シート型直接メタノール燃料電池(DMFC)の外部荷重による発電基礎特性2011
- Author(s)
  桜井洋輔、河合晃
- Organizer
  電気学会A部門大会講演
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] Nano- Porous Structure in Polymer Micro Pattern Analyzed by Atomic2011
- Author(s)
  Akira Kawai
- Organizer
  Force Microscopy(AFM) Nano S&T 2011
- Place of Presentation
  Dalian, China
- Invited
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] 植物の細胞間電位の測定とモニタリング2011
- Author(s)
  野口悠太, 河合晃
- Organizer
  電気学会C 部門大会
- Place of Presentation
  富山大
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] 植物の細胞間電位の測定とモニタリング2011
- Author(s)
  野口悠太、河合　晃
- Organizer
  電気学会C部門大会
- Place of Presentation
  富山大学
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] Fluid Control MEMS constructed with Polymer Materials2011
- Author(s)
  Akira Kawai
- Organizer
  International symposium on materials & processes for advanced giga-bit-scale lithography 2011
- Place of Presentation
  Chiba, Japan
- Year and Date
  2011-06-24
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] 植物の細胞間電位の測定とモニタリング2011
- Author(s)
  野口悠太、河合晃
- Organizer
  電気学会C部門大会
- Place of Presentation
  富山大学
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Fluid Control MEMS constructed with Polymer Materials2011
- Author(s)
  Akira Kawai
- Organizer
  International symposium on materials &processes for advanced giga-bit-scale lithography
- Place of Presentation
  Chiba, Japan. invited.
- Year and Date
  2011-06-24
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] Nanoscale Topographyof Polymer Film Surface in Dry/Wet Conditions2011
- Author(s)
  Akira Kawai
- Organizer
  Nano S&T 2011
- Place of Presentation
  Dalian, China.
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] 緑葉植物の0～700mVの局所電位測定と解析2011
- Author(s)
  大谷翔吾、河合晃
- Organizer
  電気学会A部門大会講演
- Place of Presentation
  東工大
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] シート型直接メタノール燃料電池(DMFC)の外部荷重による発電基礎特性2011
- Author(s)
  桜井洋輔、河合　晃
- Organizer
  電気学会A部門大会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] Nano-Porous Structure in Polymer Micro Pattern Analyzed by Atomic Force Microscopy (AFM)2011
- Author(s)
  Akira Kawai
- Organizer
  Nano S&T 2011
- Place of Presentation
  Dalian, China(招待講演)
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] X 線光電子分光法(XPS)によるSi 基板上のシランカップリング処理層の再生評価と制御2011
- Author(s)
  相場崇, 河合晃
- Organizer
  電気学会C 部門大会講演
- Place of Presentation
  富山大
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] 緑葉植物の0～ 700mV の局所電位測定と解析2011
- Author(s)
  大谷翔吾, 河合晃
- Organizer
  電気学会A 部門大会講演
- Place of Presentation
  東工大
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] メタノール水溶液中でのワイヤー電極の電位検出2011
- Author(s)
  森永和也、河合晃
- Organizer
  電気学会C部門大会講演
- Place of Presentation
  富山大学
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] メタノール水溶液中でのワイヤー電極の電位検出2011
- Author(s)
  森永和也、河合晃
- Organizer
  電気学会C部門大会
- Place of Presentation
  富山大学
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Nanoscale Topography of Polymer Film Surface in Dry/Wet Conditions2011
- Author(s)
  Akira Kawai
- Organizer
  Nano S&T 2011
- Place of Presentation
  Dalian, China(招待講演)
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Fluid Control MEMS constructed with Polymer Materials2011
- Author(s)
  Akira Kawai
- Organizer
  International symposium on materials & processes for advanced giga-bit-scale lithography 2011(招待講演)
- Place of Presentation
  Chiba, Japan
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] メタノール水溶液中での高分子膜内の微小電流解析2011
- Author(s)
  森田直也、河合　晃
- Organizer
  電気学会A部門大会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] メタノール水溶液中でのワイヤー電極の電位検出2011
- Author(s)
  森永和也、河合　晃
- Organizer
  電気学会C部門大会
- Place of Presentation
  富山大学
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] X線光電子分光法(XPS)によるSi基板上のシランカップリング処理層の再生評価と制御2011
- Author(s)
  相場崇、河合晃
- Organizer
  電気学会C部門大会
- Place of Presentation
  富山大学
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Nanoscale Topography of Polymer Film Surface in Dry/Wet Conditions2011
- Author(s)
  Akira Kawai
- Organizer
  Nano S&T 2011
- Place of Presentation
  Dalian, China
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] シート型直接メタノール燃料電池(DMFC)の外部荷重による発電基礎特性2011
- Author(s)
  桜井洋輔, 河合晃
- Organizer
  電気学会A 部門大会講演
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] 緑葉植物の0～700mVの局所電位測定と解析2011
- Author(s)
  大谷翔吾、河合　晃
- Organizer
  電気学会A部門大会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] メタノール水溶液中での高分子膜内の微小電流解析2011
- Author(s)
  森田直也, 河合晃
- Organizer
  電気学会A 部門大会講演
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] 緑葉植物の0～700mVの局所電位測定と解析2011
- Author(s)
  大谷翔吾、河合晃
- Organizer
  電気学会A部門大会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Fluid Control MEMS constructed with Polymer Materials2011
- Author(s)
  Akira Kawai
- Organizer
  International symposium on materials & processes for advanced giga-bit-scale lithography 2011
- Place of Presentation
  Chiba, Japan(招待講演)
- Year and Date
  2011-06-24
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] メタノール水溶液中での高分子膜内の微小電流解析2011
- Author(s)
  森田直也、河合晃
- Organizer
  電気学会A部門大会講演
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23656235
[Presentation] メタノール水溶液中での高分子膜内の微小電流解析2011
- Author(s)
  森田直也、河合晃
- Organizer
  電気学会A部門大会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Analysis of self-standing structure composedby thick resist layers2009
- Author(s)
  Akihiro Takano, Akira Kawai
- Organizer
  International symposium on materials & processes for advanced microlithography and nanotechnology 2009
- Place of Presentation
  Chiba, Japan
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] Dissolved oxygen concentration (DO) monitoring in deionized water by electrolysis method2009
- Author(s)
  Akihiro Takano, Akira Kawai
- Organizer
  ACA2009(the third Asian Conference on Adhesion)
- Place of Presentation
  Hamamatsu, Japan
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] Optical fringe pattern observed on condensed micro water droplets2009
- Author(s)
  Akira Kawai, Tomomi Nishimura, Hiroki Sasazaki
- Organizer
  ACA2009(the third Asian Conference on Adhesion)
- Place of Presentation
  Hamamatsu, Japan
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] Nanoscale lithograph of Si surface with micro tip depending on surface adsorption water2009
- Author(s)
  Akira Kawai, Fumi Nishizaki, Akihiro Takano
- Organizer
  ACA2009(the third Asian Conference on Adhesion)
- Place of Presentation
  Hamamatsu, Japan
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] Dielectric dispersio analysis of resist laye2009
- Author(s)
  Hiroki Sasazaki, Takahiro Kato, Akira Kawai, Katsuyoshi Hamasaki
- Organizer
  International symposium on materials & processes for advanced microlithography and nanotechnology 2009
- Place of Presentation
  Chiba, Japan
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] Characterization of photomask substrate in optical lithography2009
- Author(s)
  Junji Miyazaki, Akira Kawai
- Organizer
  International symposium on materials & processes for advanced microlithography and nanotechnology 2009
- Place of Presentation
  Chiba, Japan
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] Frequency dispersion of dielectric constant of liquid nitrogen2009
- Author(s)
  Hiroki Sasazaki, Takahiro Kato, Akira Kawai, Katsuyoshi Hamasaki
- Organizer
  ACA2009(the third Asian Conference on Adhesion)
- Place of Presentation
  Hamamatsu, Japan
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] Analysis of self-standing structure composed by thick resist layers.2009
- Author(s)
  Akihiro Takano, Akira Kawai
- Organizer
  International symposium on materials & processes for advanced microlithography and nanotechnology 2009
- Place of Presentation
  Chiba, Japan
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] Fabrication of micro-channel network composed with polymer material2009
- Author(s)
  Akihiro Takano, Akira Kawai
- Organizer
  ACA2009(the third Asian Conference on Adhesion)
- Place of Presentation
  Hamamatsu, Japan
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] Characterization of photomask substrate in optical lithography2009
- Author(s)
  Junji Miyazaki, Akira Kawai
- Organizer
  ACA2009(the third Asian Conference on Adhesion)
- Place of Presentation
  Hamamatsu, Japan
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] Trap control of micro bubbles on patterned wall surface2009
- Author(s)
  Hiroki Sasazaki, Akira Kawai
- Organizer
  ACA2009(the third Asian Conference on Adhesion)
- Place of Presentation
  Hamamatsu
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] アニール処理中のシリコン基板の表面酸化抑制2008
- Author(s)
  河合晃, エクスリヤペットプーチヤイ
- Organizer
  平成20年度(第18回)電気学会東京支部新潟支所研究発表会
- Place of Presentation
  新潟大学
- Year and Date
  2008-11-08
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] 静電容量測定による液体窒素の誘電率の周波数分散特性2008
- Author(s)
  笹崎大生, 加藤孝弘, 河合晃, 濱崎勝義
- Organizer
  平成20年度(第18回)電気学会東京支部新潟支所研究発表会
- Place of Presentation
  新潟大学
- Year and Date
  2008-11-08
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] マスクシフト型異方性エッチングによるSi(100)面の真円加工2008
- Author(s)
  山路貴司、河合晃
- Organizer
  平成20年度(第18回)電気学会東京支部新潟支所研究発表会
- Place of Presentation
  新潟大学
- Year and Date
  2008-11-08
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] バブル法による液中ガス溶解度解析2008
- Author(s)
  田中大祐、河合晃
- Organizer
  平成20年度(第18回)電気学会東京支部新潟支所研究発表会
- Place of Presentation
  新潟大学
- Year and Date
  2008-11-08
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] 純水中のイオン電流測定による溶存酸素濃度モニタリング2008
- Author(s)
  高野覚啓、河合晃
- Organizer
  平成20年度(第18回)電気学会東京支部新潟支所研究発表会
- Place of Presentation
  新潟大学
- Year and Date
  2008-11-08
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] エクスリヤペットプーチャイ、アニール処理中のシリコン基板の表面酸化抑制2008
- Author(s)
  河合晃
- Organizer
  平成20年度(第18回)電気学会東京支部新潟支所研究発表会
- Place of Presentation
  新潟大学
- Year and Date
  2008-11-08
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] 局所電界印加法による基板上に付着した10.3μmφシリカ粒子の非接触除去2007
- Author(s)
  久保田陽満、河合晃
- Organizer
  第17回電気学会東京支部新潟支所研究発表会、予稿集
- Place of Presentation
  長岡技術科学大学
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] 自己振動プローブ機構を用いた地震振動スペクトルの新規検出システムの開発2007
- Author(s)
  黒田真吾、河合晃
- Organizer
  第17回電気学会東京支部新潟支所研究発表会、予稿集
- Place of Presentation
  長岡技術科学大学
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] 原子間力顕微鏡(AFM)によるナノバブルの付着凝集解析2007
- Author(s)
  河合晃、倉野一俊、鈴木健太
- Organizer
  日本接着学会第45回年次大会
- Place of Presentation
  東京大学
- Year and Date
  2007-06-28
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] シード層によるCuメッキ薄膜の成長促進メカニズム2007
- Author(s)
  田中竜太郎、河合晃
- Organizer
  第17回電気学会東京支部新潟支所研究発表会、予稿集
- Place of Presentation
  長岡技術科学大学
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] 試作した縮小投影露光装置を用いた3μmルールリソグラフィー技術の開発2007
- Author(s)
  田中大祐、山中雅貴、河合晃
- Organizer
  第17回電気学会東京支部新潟支所研究発表会
- Place of Presentation
  長岡技術科学大学
- Year and Date
  2007-11-23
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] 環境制御型走査電子顕微鏡(ESEM)を用いた直系10μm微粒子間のメニスカス操作による再配列技術の開発2007
- Author(s)
  倉野一俊、河合晃
- Organizer
  第17回電気学会東京支部新潟支所研究発表会、予稿集
- Place of Presentation
  長岡技術科学大学
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] 自己振動プローブ機構を用いた地震振動スペクトルの新規検出システムの開発2007
- Author(s)
  黒田真吾、河合晃
- Organizer
  第17回電気学会東京支部新潟支所研究発表会
- Place of Presentation
  長岡技術科学大学
- Year and Date
  2007-11-23
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] 微小液滴の冷却過程とカプセル化2007
- Author(s)
  倉野一俊、河合晃
- Organizer
  日本接着学会第45回年次大会、講演予稿集
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] 液中動作MEMSデバイス内の微細パターン構造の破壊抑制2007
- Author(s)
  倉野一俊、河合晃
- Organizer
  第17回電気学会東京支部新潟支所研究発表会、予稿集
- Place of Presentation
  長岡技術科学大学
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] 原子間力顕微鏡(AFM)によるナノバブルの付着凝集解析2007
- Author(s)
  河合晃、倉野一俊、鈴木健太
- Organizer
  日本接着学会第45回年次大会、講演予稿集
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] 微小液滴の冷却過程とカプセル化2007
- Author(s)
  倉野一俊、河合晃
- Organizer
  日本接着学会第45回年次大会
- Place of Presentation
  東京大学
- Year and Date
  2007-06-28
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] 擬似欠陥マスクを用いたSi異方性エッチング形状異常の発生メカニズム2007
- Author(s)
  黒田真吾、河合晃
- Organizer
  第17回電気学会東京支部新潟支所研究発表会
- Place of Presentation
  長岡技術科学大学
- Year and Date
  2007-11-23
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] 10.3μmΦシリカ粒子表面への銅薄膜メッキ技術の開発2007
- Author(s)
  久保田陽満、河合晃
- Organizer
  第17回電気学会東京支部新潟支所研究発表会
- Place of Presentation
  長岡技術科学大学
- Year and Date
  2007-11-23
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] Bubbles condensed at resist/water interface analyzed by atomic force microscopy2007
- Author(s)
  Akira Kawai and Kenta Suzuki
- Organizer
  International symposium on materials & processes for advanced microlithography and nanotechnology 2006
- Place of Presentation
  Chiba, Japan
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] 10.3μmφシリカ粒子表面への銅薄膜メッキ技術の開発2007
- Author(s)
  久保田陽満、河合晃
- Organizer
  第17回電気学会東京支部新潟支所研究発表会、予稿集
- Place of Presentation
  長岡技術科学大学
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] 10nm以下の極近接領域で作用する固体の引力と変位解析2007
- Author(s)
  山路貴司、河合晃
- Organizer
  第17回電気学会東京支部新潟支所研究発表会、予稿集
- Place of Presentation
  長岡技術科学大学
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] 液中動作MEMSデバイス内の微細パターン構造の破壊抑制2007
- Author(s)
  倉野一俊、河合晃
- Organizer
  第17回電気学会東京支部新潟支所研究発表会
- Place of Presentation
  長岡技術科学大学
- Year and Date
  2007-11-23
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] 10nm以下の極近接領域で作用する固体の引力と変位解析2007
- Author(s)
  山路貴司、河合晃
- Organizer
  第17回電気学会東京支部新潟支所研究発表会
- Place of Presentation
  長岡技術科学大学
- Year and Date
  2007-11-23
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] 試作した縮小投影露光装置を用いた3μmルールリソグラフィー技術の開発2007
- Author(s)
  田中大祐, 山中雅貴、河合晃
- Organizer
  第17回電気学会東京支部新潟支所研究発表会、予稿集
- Place of Presentation
  長岡技術科学大学
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] 局所電界印加法による基板上に付着した10.3μmΦシリカ粒子の非接触除去2007
- Author(s)
  久保田陽満、河合晃
- Organizer
  第17回電気学会東京支部新潟支所研究発表会
- Place of Presentation
  長岡技術科学大学
- Year and Date
  2007-11-23
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] 擬似欠陥マスクを用いたSi異方性エッチング形状異常の発生メカニズム2007
- Author(s)
  黒田真吾、河合晃
- Organizer
  第17回電気学会東京支部新潟支所研究発表会、予稿集
- Place of Presentation
  長岡技術科学大学
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] シード層によるCuメッキ薄膜の成長促進メカニズム2007
- Author(s)
  田中竜太郎、河合晃
- Organizer
  第17回電気学会東京支部新潟支所研究発表会
- Place of Presentation
  長岡技術科学大学
- Year and Date
  2007-11-23
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] 環境制御型走査電子顕微鏡(ESEM)を用いた直系10μm微粒子間のメニスカス操作による再配列技術の開発2007
- Author(s)
  倉野一俊、河合晃
- Organizer
  第17回電気学会東京支部新潟支所研究発表会
- Place of Presentation
  長岡技術科学大学
- Year and Date
  2007-11-23
- Data Source
  KAKENHI-PROJECT-19360157
[Presentation] C-V 測定を用いた誘電膜の特性評価
- Author(s)
  篠崎雅也, 河合晃
- Organizer
  平成25年度(第23回)電気学会東京支部新潟支所研究発表会
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Peeling Force of Polymer Micro Pattern by Direct Peeling by using AFM Tip (DPAT)
- Author(s)
  Takashi Aiba, Akira Kawai
- Organizer
  The Electrochemical Society, Abstract #68, Honolulu PRiME
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] リソグラフィプロセスを用いた燃料電池用電解質のマイクロパターン形成, I-13
- Author(s)
  桜井, 河合
- Organizer
  平成25年度電気学会東京支部新潟支所研究発表会
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Single chip micro direct methanol fuel cell (SC-μDMFC) fabricated by MEMS Process
- Author(s)
  Yosuke Sakurai, Daisuke Tanaka, Shunsuke Ohata, Akira Kawai
- Organizer
  IEEE ポスターセッション平成25年度電気学会東京支部新潟支所研究発表会
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Photoresist/Pt Electrode/Perflurosulfonic Acid (PFSA) Multilayer Structure for Single Chip Micro Direct Methanol Fuel Cell (SC- μ DMFC)
- Author(s)
  Yosuke Sakurai, Daisuke Tanaka, Shunsuke Ohata, Akira Kawai
- Organizer
  26th International Microprocesses and Nanotechnology Conference (MNC2013)
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] 摩擦蓄電エネルギーの民生機器の実用化の検討
- Author(s)
  窪田直也, 河合晃
- Organizer
  平成24年度電気学会東京支部新潟支所研究発表会
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Single Chip Micro Direct Methanol Fuel Cell (SC-μDMFC) composed with Multilayer Structure
- Author(s)
  Yosuke Sakurai, Daisuke Tanaka, Shunsuke Ohata, Akira Kawai
- Organizer
  電気学会センサ・マイクロマシン部門第30回「センサ・マイクロマシンと応用システム」シンポジウム, 5PM3-PSS-119
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Stress Durability of Electrolyte Structure in Flexible Sheet type Direct Methanol Fuel Cell (FS-DMFC)
- Author(s)
  Yosuke Sakurai, Akira Kawai
- Organizer
  The Electrochemical Society, Abstract #59, Honolulu PRiME
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] マイクロヒータ/チャネルデバイスの局所加熱特性
- Author(s)
  野口, 河合
- Organizer
  (第23回)電気学会東京支部新潟支所研究発表会
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Surface energy analysis of Indium Tin Oxide (ITO) thin films on annealing treatment
- Author(s)
  Shun Kamada, Akira Kawai
- Organizer
  平成25年度電気学会東京支部新潟支所研究発表会, IEEE-07
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Bio-plant power collecting system by functional electrode
- Author(s)
  大谷翔吾, 河合晃
- Organizer
  電気学会センサ・マイクロマシン部門大会第30回「センサ・マイクロマシンと応用システム」シンポジウム
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Fabrication of Micro Tube Array by Combining Positive with Negative Photoresist due to Solubility Difference in Developer
- Author(s)
  Kazutoshi Otsuka, Kenta Takahashi, Akira Kawai
- Organizer
  電気学会センサ・マイクロマシン部門, 第30回「センサ・マイクロマシンと応用システム」シンポジウム
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Micro Pattern Fabrication of Perflurosulfonic Acid (PFSA) Film by CF4 RIE Process
- Author(s)
  Yosuke Sakurai, Kenta Takahashi, Akira Kawai
- Organizer
  26thInternational Microprocesses and Nanotechnology Conference (MNC2013)
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] A SU-8 Photoresist Film as Electrical Stable Layer in Liquid Environment MP-11
- Author(s)
  Yuta Noguchi, Akira Kawai
- Organizer
  The 2nd International GIGAKU Conference in Nagaoka
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Monitoring and Modeling for Response Time of Biopotential in Plant Cells
- Author(s)
  Yuta Noguchi, Akira Kawai
- Organizer
  The Electrochemical Society, Abstract #69, Honolulu PRiME
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] 植物電位・電流シグナルにおける測定部位の検討
- Author(s)
  大谷翔吾, 河合晃
- Organizer
  平成25年度電気学会東京支部新潟支所発表会
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Effect of Mechanical Stress on Electrolyte Film for Flexible Sheet Type Direct Methanol Fuel Cell
- Author(s)
  Yosuke Sakurai, Akira Kawai
- Organizer
  The 2ndInternational GIGAKU Conference in Nagaoka (2nd IGCN)
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] 植物電位と表面温度の多点測定による緑葉植物の育成観察
- Author(s)
  大谷翔梧, 河合晃
- Organizer
  平成24年度電気学会東京支部新潟支所研究発表会
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] 紫外線照射による酸化チタン膜表面の活性化
- Author(s)
  鎌田隼, 河合晃
- Organizer
  平成25年度電気学会東京支部新潟支所研究発表会
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] Micro local heating system integrated with surround microfluidic channel
- Author(s)
  Yuta Noguchi, Akira Kawai
- Organizer
  電気学会センサ・マイクロマシン部門第30回「センサ・マイクロマシンと応用システム」シンポジウム, 6PM3-PSS-128
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] 紫外線照射により活性化された二酸化チタン膜における表面エネルギーの解析
- Author(s)
  鎌田隼, 河合晃
- Organizer
  電気学会センサ・マイクロマシン部門大会第30回「センサ・マイクロマシンと応用システム」シンポジウム
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] SU-8 フォトレジストの人工皮膚材料としての検討
- Author(s)
  大塚和俊, 河合晃
- Organizer
  平成24年度電気学会東京支部新潟支所研究発表会
- Data Source
  KAKENHI-PROJECT-23360150
[Presentation] ポジ型およびネガ型フォトレジストの溶解度の差を用いたマイクロチューブの作製, I-14
- Author(s)
  大塚, 高橋, 河合
- Organizer
  平成25年度電気学会東京支部新潟支所研究発表会
- Data Source
  KAKENHI-PROJECT-23360150

1. 加藤有行 (10303190)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
2. 木村宗弘 (20242456)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
3. 進藤怜史 (90826223)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
4. TAKATA Masasuke (20107551)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
5. HUYBRECHTS Ben (60251849)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. 田中久仁彦 (30334692)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

Kawai Akira 河合 晃

KAWAI Akira 河合 晃

河合 晃 カワイ アキラ

Research Projects

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Development of thrombosis formation system by floating sphere type micro fuel cellPrincipal Investigator

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Fabrication of three dimensional polymer aggregate structure based on self-align arrangementPrincipal Investigator

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Capsule type micro fuel cell development and self-dispersion control of micro condensed matterPrincipal Investigator

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Study of line edge roughness (LER) reduction in 15nm scale gate patternPrincipal Investigator

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Development of growth control device by interposing pH control systemPrincipal Investigator

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Resist pattern development in 25nm size by condensation control in nanometer scalePrincipal Investigator

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微細凹凸構造での微小気泡の吸着・脱離制御に基づく新規メモリデバイスの開発Principal Investigator

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Development of micro resist patterns less than 35nm size based on interaction control among polymer, aggregates.Principal Investigator

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Adhesion and cohesion analysis of resist micro patterns less than 100nm by using atomic force microscopePrincipal Investigator

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Study for adhesion analysis of resist pattern of 0.1μm line-width by using atomic force microscope tipPrincipal Investigator

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0.3μm以下の微細レジストパターンの接着破壊機構に関する研究Principal Investigator

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超微細サイズにおける誘電体薄膜の誘電メカニズム解析Principal Investigator

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Detection and Characterization of Trap Levels in Semiconducting Ceramics

Principal Investigator

Kawai Akira 河合晃

KAWAI Akira 河合晃

河合晃カワイアキラ

[Book] シランカップリング剤の使いこなしノウハウ集2016

[Book] 気泡・ボイドの発生メカニズムと未然防止・除去技術,第1章第2節塗るときなぜ気泡が発生するのか2014