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TOCHITANI Gen  栃谷 元

ORCIDConnect your ORCID iD *help
Researcher Number 00264143
Affiliation (based on the past Project Information) *help 1994 – 1996: 佐賀大学, 理工学部, 講師
Review Section/Research Field
Principal Investigator
プラズマ理工学
Except Principal Investigator
プラズマ理工学
Keywords
Principal Investigator
発光空間構造 / 発光分光分析 / 光ファイバー / マグネトロンプラズマ
Except Principal Investigator
negative ion / annular slot antenna / ring-shaped permanent magnet / uniform plasma / high density plasma / large diameter plasma … More / 負イオン / リング状永久磁石 / 円環スロットアンテナ / 均一密度プラズマ / 高密度プラズマ / 大面積プラズマ Less
  • Research Projects

    (3 results)
  • Co-Researchers

    (3 People)
  •  光プローブを用いたプラズマ中ラジカル粒子の空間分布の観察Principal Investigator

    • Principal Investigator
      栃谷 元
    • Project Period (FY)
      1996
    • Research Category
      Grant-in-Aid for Encouragement of Young Scientists (A)
    • Research Field
      プラズマ理工学
    • Research Institution
      Saga University
  •  光ファイバーを用いたプラズマ発光空間構造解析システムの構築Principal Investigator

    • Principal Investigator
      栃谷 元
    • Project Period (FY)
      1995
    • Research Category
      Grant-in-Aid for Encouragement of Young Scientists (A)
    • Research Field
      プラズマ理工学
    • Research Institution
      Saga University
  •  Development of generation method of microwave plasmas with an annular slot antenna for large diameter wafer etching

    • Principal Investigator
      FUJITA Hiroharu
    • Project Period (FY)
      1994 – 1995
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B)
    • Research Field
      プラズマ理工学
    • Research Institution
      Saga University
  • 1.  FUJITA Hiroharu (10038086)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 2.  OHTSU Yasunori (50233169)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 3.  IKUSHIMA Takayuki
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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