NODA Daiji 野田大二

Researcher Number	00378267
Other IDs
Affiliation (based on the past Project Information) *help	2012: 名古屋大学, 工学(系)研究科(研究院), その他 2012: 名古屋大学, 工学研究科, 招へい教員 2011: 兵庫県立大学, 高度産業科学技術研究所, 助教 2008: 兵庫県立大学, 高度産業化学技術研究所, 助教 2008: 兵庫県立大学, 高度産業科学技術研究所, 助教 2007: 高度産業科学技術研究所, 助教 2005 – 2006: 兵庫県立大学, 高度産業科学技術研究所, 助手
Review Section/Research Field	Principal Investigator Production engineering/Processing studies / Electron device/Electronic equipment Except Principal Investigator Science and Engineering
Keywords	Principal Investigator マイクロマシン / MEMS / 高アスペクト比加工 / 超微細構造 / 光インプリント / 熱酸化 / 透明金型 / ナノインプリント / 一体化システム / シリコンデバイス … More / ゲッター / 超高速LSI / マイクロ・ナノデバイス / フィールドエミッタ / 局所的パッケージ … More Except Principal Investigator ナノマイクロファブリケーショ / X線マスク / LIGA / 放射光 / MEMS / マイクロシステム / マイクロマシン / 高アスペクト比加工 / 三次元構造体 / マイクロアクチュエータ / X線リソグラフィ / LIGAプロセス Less

Fabrication of transparence micro-mold using thermal oxidation for nano-imprintPrincipal Investigator
- Principal Investigator
  
  NODA Daiji
- Project Period (FY)
  2011 – 2012
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Nagoya University
  University of Hyogo
シリコン基板上の任意の場所に形成する超高速LSI用真空マイクロパッケージの研究Principal Investigator
- Principal Investigator
  
  野田大二
- Project Period (FY)
  2005 – 2006
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  University of Hyogo
Development of a New Micro-Nano Solid Processing Technology Based on a LIGA Process and a Next-Generation Micro Actuators
- Principal Investigator
  
  HATTORI Tadashi
- Project Period (FY)
  2004 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  University of Hyogo

All 2012 2011 2009 2008 2007 2006 2005 Other

All Journal Article Presentation Book

[Book] "微細転写・加工技術全集",片岡大企画編集2008
- Author(s)
  野田大二(分担執筆)
- Publisher
  株式会社技術情報協会発行
- Data Source
  KAKENHI-PROJECT-16078212
[Book] 微細転写・加工技術全集2008
- Author(s)
  野田大二(分担執筆)
- Publisher
  株式会社技術情報協会
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication of Si Mold Using ICP Etching for X-ray Diffraction Grating2012
- Author(s)
  Daiji Noda, Atsushi Tokuoka and Tadashi Hattori
- Journal Title
  
  Key Engineering Materials
  
  Volume: Vols. 523-524 Pages: 587-591
- DOI
  10.4028/www.scientific.net/kem.523-524.587
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23760119
[Journal Article] 高アスペクト比マイクロコイルの作製と電磁型アクチュエータへの展開2009
- Author(s)
  野田大二, 他
- Journal Title
  
  日本AEM学会誌 17
  
  Pages: 162-167
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication and Estimation of Electromagnetic Type Micro-Actuator with Microcoil2009
- Author(s)
  Daiji Noda, et.al.
- Journal Title
  
  Proceedings of the Society of Photo-Optical Instrumentation Engineering (SPIE) 7268
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] 高アスペクト比マイクロコイルの作製と電磁型アクチュエータへの展開2009
- Author(s)
  野田大二,服部正
- Journal Title
  
  日本AEM学会誌 Vol.17
  
  Pages: 162-167
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication of Spiral Micro Coil Lines for Electromagnetic Actuators2008
- Author(s)
  M. Setomoto, Y. Matsumoto, S. Yamashita, D. Noda, and T. Hattori
- Journal Title
  
  Journal of Advanced Mechanical Design, Systems, and Manufacturing Vol.2
  
  Pages: 238-245
- NAID
  130000080773
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication and Estimation of Electromagnetic Type Micro-Actuator with Microcoil2008
- Author(s)
  D. Noda, M. Setomoto, Y. Kobayashi, and T. Hattori
- Journal Title
  
  Proceedings of the Society of Photo- Optical Instrumentation Engineering Vol.7268
  
  Pages: 7268021-7268028
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication of High Aspect Ratio Microcoil Using Dipping Method2008
- Author(s)
  D. Noda, S. Yamashita, Y. Matsumoto, M. Setomoto, and T. Hattori
- Journal Title
  
  Proceedings of the 2007 IEEE International Symposium on Micro-Nano Mecha- tronics and Human Science Vol.2
  
  Pages: 174-179
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication of Microcoil with Narrow and High Aspect Ratio Lines for Electromagnetic Actuators2008
- Author(s)
  Daiji Noda, et.al.
- Journal Title
  
  Proceedings of the 2008 IEEE International Symposium on Micro-Nano Mechatronics and Human Science
  
  Pages: 219-224
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication of High Aspect Ratio Microcoil Using Dipping Method2008
- Author(s)
  Daiji Noda, et.al.
- Journal Title
  
  Journal of Advanced Mechanical Design, Systems, and Manufacturing 2
  
  Pages: 174-179
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication of Microcoil with Narrow and High Aspect Ratio Lines for Electromagnetic Actuators2008
- Author(s)
  D. Noda, M. Setomoto, and T. Hattori,
- Journal Title
  
  Proceed ings of the 2008 IEEE International Symposium on Micro-Nano Mecha- tronics and Human Science
  
  Pages: 219-224
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication of Microcoils Using X-ray Lithography and Metallization2008
- Author(s)
  Daiji Noda, et.al.
- Journal Title
  
  IEEJ Transaction on Sensors and Micromachines 128
  
  Pages: 181-185
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication of Microcoils Using X-ray Lithography and Metallization2008
- Author(s)
  D. Noda, Y. Matsumoto, M. Setomoto, and T. Hattori
- Journal Title
  
  IEEJ Transaction on Sensors and Micromachines Vol.128
  
  Pages: 181-185
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Cylindrical Coils Created with 3D X-ray Lithography and Metallization for Electromagnetic Actuators2008
- Author(s)
  Y. Matsumoto, M. Setomoto, D. Noda, and T. Hattori
- Journal Title
  
  Microsystem Technologies Vol.14
  
  Pages: 1371-1379
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] 電磁型マイクロアクチュエータ用マイクロコイルの製作2007
- Author(s)
  服部正,野田大二
- Journal Title
  
  日本設備管理会 Vol.19
  
  Pages: 9-14
- NAID
  10019931941
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication and Estimation of Microcoils Using LIGA Process2007
- Author(s)
  D. Noda, Y. Matsumoto, M. Setomoto, and T. Hattori
- Journal Title
  
  Proceedings of the 24th Sensor Symposium on Sensors, Micromach- ines, and Applied Systems
  
  Pages: 161-164
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication and Estimation of Microcoils Using LIGA Process2007
- Author(s)
  Daiji Noda, et. al.
- Journal Title
  
  Proceedings of the 24th Sensor Symposium on Sensors, Micromachines, and Applied Systems
  
  Pages: 161-164
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] 電磁型マイクロアクチュエータ用マイクロコイルの製作2007
- Author(s)
  服部正,野田大二
- Journal Title
  
  電気学会誌 Vol.127
  
  Pages: 288-290
- NAID
  10019931941
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication of Coil Lines with High Aspect Ratio for Electromagnetic Actuators2007
- Author(s)
  Daiji Noda, et. al.
- Journal Title
  
  Proceedings of the 2007 IEEE International Symposium on MIcro-Nano Mechatronics and Human Science
  
  Pages: 436-441
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Development of Cavity Structure for Field Emission on Si Substrate2007
- Author(s)
  Daiji Noda, et al.
- Journal Title
  
  Japanese Journal of Applied Physics 46(In printing)
- Data Source
  KAKENHI-PROJECT-17760276
[Journal Article] Fabrication of Coil Lines with High Aspect Ratio for Electromagnetic Actuators2007
- Author(s)
  D. Noda, Y. Matsumoto, M. Setomoto, and T. Hattori
- Journal Title
  
  Proceedings of the 2007 IEEE International Symposium on Micro-Nano Mecha- tronics and Human Science
  
  Pages: 436-441
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication of local microvacuum package incorporating Si field emitter array and Ti getter2007
- Author(s)
  Daiji Noda, et al.
- Journal Title
  
  Journal of Vacuum Science ＆ Technology B 25(In printing)
- Data Source
  KAKENHI-PROJECT-17760276
[Journal Article] 電磁型マイクロアクチュエータ用マイクロコイルの製作2007
- Author(s)
  服部正, 野田大二
- Journal Title
  
  日本設備管理学会誌 19
  
  Pages: 9-14
- NAID
  10019931941
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] 電磁型マイクロアクチュエータ用マイクロコイルの製作2007
- Author(s)
  服部正, 野田大二
- Journal Title
  
  電気学会誌 127
  
  Pages: 288-290
- NAID
  10019931941
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Development of Cavity Structure for Field Emission on Si Substrate2006
- Author(s)
  Daiji Noda, et al.
- Journal Title
  
  19^<th> International Microprocesses and Nanotechnology Conference
  
  Pages: 330-331
- Data Source
  KAKENHI-PROJECT-17760276
[Journal Article] Fabrication of high aspect ratio coil for electromagnetic actuators using LlGA process2006
- Author(s)
  Daiji Noda, et al.
- Journal Title
  
  Proceedings of the Society of Photo-Optical Instrumentation Engineering 6414
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] An Electromagnetic Actuators Using a Cylindrical Coil Created with 3D X-ray Lithography and Metallization Techniques2006
- Author(s)
  Y. Matsumoto, S. Yamashita, D. Noda, and T. Hattori
- Journal Title
  
  Proceedings of the 2006 IEEE International Symposium on Micro-Nano Mechatro- nics and Human Science
  
  Pages: 143-148
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Fabrication of Local Micro Vacuum Package incorporating Si Field Emitter Array and Ti Getter2006
- Author(s)
  Daiji Noda, et al.
- Journal Title
  
  19^<th> International Vacuum Nanoelectronics Conference and 50^<th> International Field Emission Symposium
  
  Pages: 387-388
- Data Source
  KAKENHI-PROJECT-17760276
[Journal Article] Fabri- cation of High Aspect Ratio Coil for Microactuators using LIGA Process2006
- Author(s)
  D. Noda, Y. Matsumoto, S. Yamashita, M. Setomoto, and T. Hattori
- Journal Title
  
  Proceedings of the Society of Photo- Optical Instrumentation Engineering Vol.6414
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] マイクロアクチュエータの製造技術2006
- Author(s)
  服部正,野田大二
- Journal Title
  
  日本AEM学会誌 Vol.14
  
  Pages: 174-179
- NAID
  110004862755
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16078212
[Journal Article] Electron Emission Properties of ZnS-Based Thin-Film Cold Cathode for Field Emission display2005
- Author(s)
  D.Noda, et al.
- Journal Title
  
  Japanese Journal of Applied Physics 44
  
  Pages: 4108-4111
- NAID
  10016442117
- Data Source
  KAKENHI-PROJECT-17760276
[Journal Article] Fabrication of Si field emitter array in local vacuum package2005
- Author(s)
  D.Noda, et al.
- Journal Title
  
  Journal of Vacuum Science & Technology B 23
  
  Pages: 864-867
- Data Source
  KAKENHI-PROJECT-17760276
[Presentation] Si ドライエッチングによる X 線格子の作製2012
- Author(s)
  野田大二,徳岡篤,服部正
- Organizer
  先端技術セミナー2012
- Place of Presentation
  イーグレ姫路あいめっせホール
- Year and Date
  2012-04-27
- Data Source
  KAKENHI-PROJECT-23760119
[Presentation] Fabrication of High Aspect Ratio X-ray Grating Using Silicon Dry Etching Method2012
- Author(s)
  Daiji Noda, Atsushi Tokuoka and Tadashi Hattori
- Organizer
  International Workshop on X-ray and Neutron Phase Imaging with Gratings (XNPIG)
- Place of Presentation
  National Museum of Emerging Science and Innovation
- Year and Date
  2012-03-05
- Data Source
  KAKENHI-PROJECT-23760119
[Presentation] Fabrication of Si Mold Using ICP Etching for X-ray Diffraction Grating2012
- Author(s)
  Daiji Noda
- Organizer
  14th International conference on Precision Engineering
- Place of Presentation
  Awaji Yumebutai International Conference Center
- Data Source
  KAKENHI-PROJECT-23760119
[Presentation] SiドライエッチングによるX線格子の作製2012
- Author(s)
  野田大二
- Organizer
  先端技術セミナー2012
- Place of Presentation
  イーグレ姫路あいめっせホール
- Data Source
  KAKENHI-PROJECT-23760119
[Presentation] Fabrication of Si Mold Using ICP Etching for X-ray Diffraction Grating2012
- Author(s)
  Daiji Noda, Atsushi Tokuoka and Tadashi Hattori
- Organizer
  14thInternational conference on Precision Engineering (ICPE 2012)
- Place of Presentation
  Awaji Yumebutai International Conference Center
- Year and Date
  2012-11-08
- Data Source
  KAKENHI-PROJECT-23760119
[Presentation] Siドライエッチングを用いたタルボ干渉計用回折格子の作製2012
- Author(s)
  徳岡篤,矢代航,野田大二,服部正
- Organizer
  平成 24 年電気学会全国大会
- Place of Presentation
  広島工業大学
- Year and Date
  2012-03-21
- Data Source
  KAKENHI-PROJECT-23760119
[Presentation] ICP エッチングによる狭周期格子パターンの作製2012
- Author(s)
  野田大二,徳岡篤,服部正
- Organizer
  日本機械学会第12回機素潤滑設計部門講演会
- Place of Presentation
  愛媛県県民文化会館
- Year and Date
  2012-04-24
- Data Source
  KAKENHI-PROJECT-23760119
[Presentation] ICP エッチングによる狭周期シリコン金型の作製2012
- Author(s)
  野田大二,徳岡篤,服部正
- Organizer
  日本機械学会年次大会
- Place of Presentation
  金沢大学
- Year and Date
  2012-09-12
- Data Source
  KAKENHI-PROJECT-23760119
[Presentation] Siドライエッチングを用いたタルボ干渉計用回折格子の作製2012
- Author(s)
  徳岡篤，矢代航，野田大二，服部正
- Organizer
  平成24年電気学会全国大会
- Place of Presentation
  広島工業大学（広島県）
- Data Source
  KAKENHI-PROJECT-23760119
[Presentation] X線タルボ干渉計用大面積X線格子の作製2012
- Author(s)
  野田大二
- Organizer
  先端技術セミナー2012
- Place of Presentation
  イーグレ姫路あいめっせホール
- Data Source
  KAKENHI-PROJECT-23760119
[Presentation] ICPエッチングによる狭周期シリコン金型の作製2012
- Author(s)
  野田大二
- Organizer
  日本機械学会年次大会
- Place of Presentation
  金沢大学
- Data Source
  KAKENHI-PROJECT-23760119
[Presentation] ICPエッチングによる狭周期格子パターンの作製2012
- Author(s)
  野田大二
- Organizer
  日本機械学会　第12回機素潤滑設計部門講演会
- Place of Presentation
  愛媛県県民文化会館
- Data Source
  KAKENHI-PROJECT-23760119
[Presentation] Fabrication of High Aspect Ratio X-ray Grating Using Silicon Dry Etching Method2012
- Author(s)
  Daiji Noda, Atsushi Tokuoka and Tadashi Hattori
- Organizer
  International Workshop on X-ray and Neutron Phase Imaging with Gratings
- Place of Presentation
  日本科学未来館（東京都）
- Data Source
  KAKENHI-PROJECT-23760119
[Presentation] X 線タルボ干渉計用大面積 X 線格子の作製2012
- Author(s)
  野田大二,徳岡篤,香取めぐみ,南山康人,山下健治,西田諭史,服部正
- Organizer
  先端技術セミナー2012
- Place of Presentation
  イーグレ姫路あいめっせホール
- Year and Date
  2012-04-27
- Data Source
  KAKENHI-PROJECT-23760119
[Presentation] Si構造体への直接めっきによる高アスペクト比金属構造体の作製2011
- Author(s)
  徳岡篤，野田大二，服部正
- Organizer
  精密工学会2011年度関西地方定期学術講演会
- Place of Presentation
  兵庫県立大学（兵庫県）
- Data Source
  KAKENHI-PROJECT-23760119
[Presentation] 熱酸化による透明ナノインプリント用金型の作製2011
- Author(s)
  野田大二,徳岡篤,服部正
- Organizer
  第28回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  タワーホール船掘
- Year and Date
  2011-09-27
- Data Source
  KAKENHI-PROJECT-23760119
[Presentation] Fabrication of high aspect ratio Au microstructure using direct electroplating on Si microstructure2011
- Author(s)
  Atsushi Tokuoka, Daiji Noda and Tadashi Hattori
- Organizer
  9th International Workshop on High-Aspect-Ratio Micro-Structure Technology
- Place of Presentation
  Ambassador Hotel Hsinchu, Taiwan
- Year and Date
  2011-06-14
- Data Source
  KAKENHI-PROJECT-23760119
[Presentation] 熱酸化による透明ナノインプリント用金型の作製2011
- Author(s)
  徳岡篤，野田大二，服部正
- Organizer
  第28回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  タワーホール船掘（東京都）
- Data Source
  KAKENHI-PROJECT-23760119
[Presentation] Si 構造体への直接めっきによる高アスペクト比金属構造体の作製2011
- Author(s)
  徳岡篤,野田大二,服部正
- Organizer
  精密工学会 2011 年度関西地方定期学術講演会
- Place of Presentation
  兵庫県立大学
- Year and Date
  2011-06-30
- Data Source
  KAKENHI-PROJECT-23760119
[Presentation] Fabrication of high aspect ratio Au microstructure using direct electroplating on Si microstructure2011
- Author(s)
  Atsushi Tokuoka, Daiji Noda and Tadashi Hattori
- Organizer
  9th International Workshop on High-Aspect-Ratio Micro-Structure Technology
- Place of Presentation
  Ambassador Hotel Hsinchu, Hsinchu, Taiwan
- Data Source
  KAKENHI-PROJECT-23760119
[Presentation] マイクロコイルの作製と電磁型アクチュエータへの展開2009
- Author(s)
  野田大二,瀬戸本勝,小林雄貴,服部正
- Organizer
  先端技術セミナー2009
- Place of Presentation
  イーグレ姫路
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 無電解めっき法によるマイクロコイル用シード層の検討2009
- Author(s)
  小林雄貴,瀬戸本勝,山下健治,野田大二,服部正
- Organizer
  日本設備管理学会2008年度第4回ナノマイクロ加工研究会
- Place of Presentation
  兵庫県先端科学技術支援センタ-
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 次世代アクチュエータ研究の成果2009
- Author(s)
  野田大二,服部正
- Organizer
  先端技術セミナー2009
- Place of Presentation
  イーグレ姫路
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabrication and Estimation of Electromagnetic Type Micro-Actuator with Microcoil2008
- Author(s)
  D. Noda, M. Setemoto, Y. Kobayashi, and T. Hattori
- Organizer
  SPIE International Symposium on Smart Materials, Nano- and Micro-Smart Systems
- Place of Presentation
  RMIT University, Melbourne, Australia, 7268-01
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 二層ニッケル電鋳による高強度マイクロ金型の作製2008
- Author(s)
  木村太郎,佐和吉敬,山下健治,北谷武,山下満,野田大二,服部正
- Organizer
  平成20年電気学会全国大会
- Place of Presentation
  福岡工業大学,3-119
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabrication and Estimation of Electromagnetic Type Micro-Actuator with Microcoil2008
- Author(s)
  Daiji Noda, et.al.
- Organizer
  SPIE International Symposium on Smart Materials, Nano- and Micro-Smart Systems
- Place of Presentation
  Melbourne, Australia
- Year and Date
  2008-12-10
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 高アスペクト比マイクロコイルの作製と電磁型アクチュエータへの展開2008
- Author(s)
  野田大二,松本吉史,瀬戸本勝,服部正
- Organizer
  第20回「電磁力関連のダイナミクス」シンポジウム
- Place of Presentation
  別府ビーコンプラザ,23B3-1
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] マイクロコイルの作製と電磁型アクチュエータへの展開2008
- Author(s)
  野田大二,松本吉史,瀬戸本勝,服部正
- Organizer
  日本機械学会年次大会
- Place of Presentation
  横浜国立大学,3203
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] LIGAプロセスによる電磁アクチュエータの作製2008
- Author(s)
  野田大二, 他
- Organizer
  日本機械学会・第8回機素潤滑設計部門講演会
- Place of Presentation
  倉敷アイビースクエア
- Year and Date
  2008-04-21
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] ディッピング法を用いた立体マイクロコイルラインの形成2008
- Author(s)
  瀬戸本勝,松本吉史,越智大介,野田大二,服部正
- Organizer
  平成20年電気学会全国大会
- Place of Presentation
  福岡工業大学,3-117
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 大面積電鋳装置の開発と大面積金型作製技術2008
- Author(s)
  木村太郎,山下健治,西田諭史,北谷武,佐和吉敬,野田大二,服部正
- Organizer
  日本設備管理学会2007年度第4回ナノマイクロ加工研究会
- Place of Presentation
  兵庫県先端科学技術支援センタ-
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] マイクロコイルの作製と電磁型アクチュエータへの展開2008
- Author(s)
  野田大二, 他
- Organizer
  日本機械学会年次大会
- Place of Presentation
  横浜国立大学
- Year and Date
  2008-08-04
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 円筒型マイクロコイルを用いた電磁駆動型アクチュエータの作製2008
- Author(s)
  松本吉史,瀬戸本勝,越智大介,野田大二,服部正
- Organizer
  精密工学会春季大会学術講演会
- Place of Presentation
  明治大学,H19
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Development of a New Nano-Micro Solid Processing Technology Based on a LIGA Process and a Next-Generation Micro Actua- tors2008
- Author(s)
  D. Noda and T. Hattori
- Organizer
  The 2nd International Sympo- sium on Next-Generation Actuators Leading Breakthroughs
- Place of Presentation
  APA Hotel & Resort Tokyo Bay Makuhari, Chiba, Japan, B3-1
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabrication of Spiral Micro Coil Lines for Micro Actuators Using X-ray Lithography and Metallization2008
- Author(s)
  M. Setomoto, Y. Matsumoto, D. Noda, and T. Hattori
- Organizer
  1th International Conference on New Actuators and 5th International Exhibition on Smart Actuators and Drive Systems
- Place of Presentation
  Bremen Convention Center, Bremen, Germany, P066
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 円筒型マイクロコイルを用いた電磁ソレノイドの作製2008
- Author(s)
  松本吉史,瀬戸本勝,越智大介,野田大二,服部正
- Organizer
  日本設備管理学会2007年度第4回ナノマイクロ加工研究会
- Place of Presentation
  兵庫県先端科学技術支援センタ-
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabrication of Narrow Pitch and High Aspect Ratio Microcoil for Electromagnetic Micro- actuators2008
- Author(s)
  D. Noda, Y. Matsumoto, M. Setomoto, D. Ochi, and T. Hattori
- Organizer
  11th International Conf- erence on New Actuators and 5th International Exhibition on Smart Actuators and Drive Systems (Actuator 2008)
- Place of Presentation
  Bremen Convention Center, Bremen, Germany, P065
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] LIGAプロセスによる電磁アクチュエータの作製2008
- Author(s)
  野田大二,松本吉史,瀬戸本勝,服部正
- Organizer
  日本機械学会第8回機素潤滑設計部門講演会
- Place of Presentation
  倉敷アイビースクエア,1301
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] マイクロコイルを用いた電磁型アクチュエータの作製2008
- Author(s)
  野田大二,松本吉史,瀬戸本勝,越智大介,服部正
- Organizer
  先端技術セミナー2008
- Place of Presentation
  イーグレ姫路
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabrication of Microcoil with Narrow and High Aspect Ratio Lines for Electromagnetic Actuators2008
- Author(s)
  Daiji Noda, et.al.
- Organizer
  2008 International Symposium on Micro-Nano Mechatronics and Human Science
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2008-11-08
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 高アスペクト比マイクロコイルの作製と電磁型アクチュエータへの展開2008
- Author(s)
  野田大二, 他
- Organizer
  第20回「電磁力関連のダイナミクス」シンポジウム
- Place of Presentation
  別府ビーコンプラザ
- Year and Date
  2008-05-23
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 無電解ニッケル-ホウ素めっき法を用いた高硬度金型の作製2008
- Author(s)
  佐和吉敬,山下健治,北谷武,野田大二,服部正
- Organizer
  日本設備管理学会平成20年度創立20周年記念大会
- Place of Presentation
  パシフィコ横浜,OS2-4
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] X線リソグラフィによるマイクロコイルの製作2008
- Author(s)
  越智大介,瀬戸本勝,松本吉史,野田大二,服部正
- Organizer
  平成20年電気学会全国大会
- Place of Presentation
  福岡工業大学,3-118
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabrication of Narrow Pitch and High Aspect Ratio Microcoil for Electromagnetic Microactuators2008
- Author(s)
  Daiji Noda, et.al.
- Organizer
  11^<th> International Conference on New Actuators and 5^th International Exhibition on Smart Actuators and Drive Systems
- Place of Presentation
  Bremen, Germany
- Year and Date
  2008-06-10
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Development of a New Nano-Micro Solid Processing Technology Based on a LIGA Process and a Next-Generation Micro Actuators2008
- Author(s)
  Daiji Noda and Tadashi Hattori
- Organizer
  The 2^<nd> International Symposium on Next-Generation Actuators Leading Breakthroughs
- Place of Presentation
  Chiba, Japan
- Year and Date
  2008-04-17
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabrication of Microcoil with Narrow and High Aspect Ratio Lines for Electromagnetic Actuators2008
- Author(s)
  D. Noda, M. Setomoto, and T. Hattori
- Organizer
  2008 Inter- national Symposium on Micro-Nano Mechatronics and Human Science
- Place of Presentation
  Nagoya University, Nagoya, Japan, SA2-1
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Cylindrical Coils Created with 3D X-ray Lithography and Metallization for Electromagnetic Actuators2007
- Author(s)
  Y. Matsumoto, M. Setomoto, D. Noda, and T. Hattori
- Organizer
  7th International Workshop on High-Aspect-Ratio Micro-Structure Technology
- Place of Presentation
  CCI Doubs, Besancon, France
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 電磁駆動アクチュエータ用立体コイルラインの形成2007
- Author(s)
  瀬戸本勝,松本吉史,山下修平,野田大二,服部正
- Organizer
  平成19年電気学会全国大会
- Place of Presentation
  富山大学,3-125
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 円筒型マイクロコイルラインの高アスペクト比化とソレノイドアクチュエータへの応用2007
- Author(s)
  山下修平,松本吉史,瀬戸本勝,奥田孝一,野田大二,服部正
- Organizer
  精密工学会春季大会学術講演会
- Place of Presentation
  芝浦工業大学,L76
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] LIGAプロセスによるマイクロコイルの作製と評価2007
- Author(s)
  野田大二, 他
- Organizer
  第24回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  タワーホール船掘
- Year and Date
  2007-10-16
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 二層ニッケル電鋳法による高強度マイクロ金型の作製2007
- Author(s)
  佐和吉敬,木村太郎,山下健治,北谷武,山下満,野田大二,服部正
- Organizer
  日本設備管理学会平成19年度秋季研究発表大会
- Place of Presentation
  神戸市産業振興センタ-,A3.2
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabrication of High Aspect Ratio Microcoil Using by Dipping Method2007
- Author(s)
  Daiji Noda, et. al.
- Organizer
  2nd International Conference on Machine Designand Tribology
- Place of Presentation
  Sapporo,Japan
- Year and Date
  2007-07-02
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabrication of Spiral Micro Coil Lines for Electromagnetic Actuators2007
- Author(s)
  M. Setomoto, Y. Matsumoto, S. Yamashita, D. Noda, and T. Hattori
- Organizer
  2nd International Conference on Machine Design and Tribology
- Place of Presentation
  Hokkaido University, Sapporo, Japan, B02
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 高アスペクト比コイルを用いた電磁型アクチュエータ2007
- Author(s)
  野田大二, 他
- Organizer
  日本機械学会年次大会
- Place of Presentation
  関西大学
- Year and Date
  2007-09-10
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabrication of Coil Lines with High Aspect Ratio for Electromagnetic Actuators2007
- Author(s)
  D. Noda, Y. Matsumoto, M. Setomoto, and T. Hattori
- Organizer
  2007 Inter- national Symposium on Micro-Nano Mechatronics and Human Science
- Place of Presentation
  Nagoya University, Nagoya, Japan, TA2-2-4
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 次世代アクチュエータ2007
- Author(s)
  野田大二
- Organizer
  日本設備管理学会2007年度第1回ナノマイクロ加工研究会
- Place of Presentation
  兵庫県先端科学技術支援センタ-
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] LIGAプロセスによる微細ラインマイクロコイルの作製と評価2007
- Author(s)
  野田大二, 他
- Organizer
  第15回機械材料・材料加工技術講演会
- Place of Presentation
  長岡技術科学大学
- Year and Date
  2007-11-17
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 高アスペクト比コイルを用いた電磁型アクチュエータ2007
- Author(s)
  松本吉史,瀬戸本勝,野田大二,山下修平,服部正
- Organizer
  日本機械学会年次大会
- Place of Presentation
  関西大学,2902
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 次世代アクチュエータ2007
- Author(s)
  野田大二
- Organizer
  日本設備管理学会 2007年度第1回ナノマイクロ加工研究会
- Place of Presentation
  兵庫県先端科学技術支援センター
- Year and Date
  2007-07-20
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] LIGAプロセスによるマイクロコイルの作製と評価2007
- Author(s)
  野田大二,松本吉史,瀬戸本勝,服部正
- Organizer
  第24回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  タワーホール船掘,Po-04
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 多層ニッケル電鋳による高強度金型の作製2007
- Author(s)
  木村太郎,佐和吉敬,山下健治,北谷武,山下満,野田大二,服部正
- Organizer
  第15回機械材料・材料加工技術講演会
- Place of Presentation
  長岡技術科学大学,117
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 電磁型アクチュエータ用高アスペクト比コイルの作製2007
- Author(s)
  松本吉史,瀬戸本勝,山下修平,野田大二,服部正
- Organizer
  先端技術セミナー2007
- Place of Presentation
  イーグレ姫路
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 高アスペクト比マイクロコイルおよびアクチュエータの作製2007
- Author(s)
  山下修平,野田大二,服部正
- Organizer
  日本設備管理学会2006年度第4回ナノマイクロ加工研究会
- Place of Presentation
  兵庫県先端科学技術支援センタ-
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabrication of Coil Lines with High Aspect Ratio for Electromagnetic Actuators2007
- Author(s)
  Daiji Noda, et. al.
- Organizer
  2007 International Symposium on Micro-Nano Mechatronics and Human Science
- Place of Presentation
  Nagoya,Japan
- Year and Date
  2007-11-13
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 高アスペクト比コイルを用いた電磁型アクチュエータ2007
- Author(s)
  野田大二,山下修平,松本吉史,瀬戸本勝,服部正
- Organizer
  日本機械学会年次大会
- Place of Presentation
  関西大学,2901
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 高アスペクト比マイクロコイルの作製と電磁型アクチュエータへの展開2007
- Author(s)
  野田大二, 他
- Organizer
  第19回「電磁力関連のダイナミクス」シンポジウム
- Place of Presentation
  早稲田大学
- Year and Date
  2007-05-18
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabri- cation of High Aspect Ratio Microcoil Using by Dipping Method2007
- Author(s)
  D. Noda, S. Yamashita, Y. Matsumoto, M. Setomoto, and T. Hattori
- Organizer
  2nd International Conference on Machine Design and Tribology
- Place of Presentation
  Hokkaido University, Sapporo, Japan, B01
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 高アスペクト比マイクロコイルの作製と電磁型アクチュエータへの展開2007
- Author(s)
  野田大二,山下修平,松本吉史,瀬戸本勝,服部正
- Organizer
  第19回「電磁力関連のダイナミクス」シンポジウム
- Place of Presentation
  早稲田大学,B324
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] LIGAプロセスによる微細ラインマイクロコイルの作製2007
- Author(s)
  野田大二,松本吉史,瀬戸本勝,服部正
- Organizer
  第15回機械材料・材料加工技術講演会
- Place of Presentation
  長岡技術科学大学,116
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 電磁型マイクロアクチュエータ用マイクロコイルの製作2006
- Author(s)
  服部正,野田大二,嶋田修,佐藤憲昭,清水正己,山下満,銘苅春隆
- Organizer
  平成18年電気学会産業応用部門大会
- Place of Presentation
  名古屋工業大学,3-03-3
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabrication of Cylindrical Microcoil Line Through Surface Modification for Microactuators2006
- Author(s)
  S. Yamashita, S. Kusumi, O. Shimada, K. Okuda, D. Noda, and T. Hattori
- Organizer
  10th International Conference on New Actuators and 4th International Exhibition on Smart Actuators and Drive Systems
- Place of Presentation
  Bremen Convention Center, Bremen, Germany, P065
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Development of a New Nano-Micro Solid Processing Technology Based on a LIGA Process and a Next-Generatic Micro Actuator2006
- Author(s)
  T. Hattori, D. Noda, and H. Ishigaki
- Organizer
  The 1st International Symposium on Next-Generation Actua- tors Leading Breakthroughs
- Place of Presentation
  Makuhari Prince Hotel, Chiba, Japan, A02-1
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] LIGAプロセスによる電磁アクチュエータの作製2006
- Author(s)
  野田大二,松本吉史,服部正
- Organizer
  日本機械学会第6回機素潤滑設計部門講演会
- Place of Presentation
  ホテル松島大観荘,2305
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] イオン照射によるPTFEとCu薄膜の密着力向上2006
- Author(s)
  山下修平,植田寛康,糸魚川貢一,野田大二,奥田孝一,服部正
- Organizer
  平成18年電気学会全国大会
- Place of Presentation
  横浜国立大学,3-128
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] An Electromagnetic Actuators Using a Cylindrical Coil Created with 3D X-ray Lithography and Metallization Techniques2006
- Author(s)
  Y. Matsumoto, S. Yamashita, D. Noda, and T. Hattori
- Organizer
  2006 Inter- national Symposium on Micro-Nano Mechatronics and Human Science
- Place of Presentation
  Nagoya University, Nagoya, Japan, MP1-2-5
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabrication of High Aspect Ratio Micro Coil for Microactuators using Three- Dimensional X-Ray Lithography Tech- nique2006
- Author(s)
  D. Noda, H. Mochizuki, Y. Matsumoto, S. Kusumi, N. Sato, M. Shimizu, M. Yamashita, O. Shimada, and T. Hattori
- Organizer
  10th International Conference on New Actuators and 4th International Exhibition on Smart Actuators and Drive Systems
- Place of Presentation
  Bremen Convention Center, Bremen, Germany, P061
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 円筒コイルを用いた電磁型アクチュエータ2006
- Author(s)
  望月浩晃,久住真治,佐藤憲昭,清水正己,山下満,嶋田修,野田大二,服部正
- Organizer
  第19回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  名古屋大学,8P127M
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 高アスペクト比を有する円筒型電磁アクチュエータの作製2006
- Author(s)
  野田大二,松本吉史,服部正
- Organizer
  第18回「電磁力関連のダイナミクス」シンポジウム
- Place of Presentation
  神戸国際会館,B2A14
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] ACTUATOR2006動向調査報告2006
- Author(s)
  野田大二
- Organizer
  日本設備管理学会2006年度第2回ナノマイクロ加工研究会
- Place of Presentation
  神戸市産業振興財団
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 円筒コイルを用いた電磁型アクチュエータ2006
- Author(s)
  望月浩晃,野田大二,服部正
- Organizer
  ニュースバルセミナー2006
- Place of Presentation
  イーグレ姫路
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] Fabri- cation of High Aspect Ratio Coil for Microactuators Using LIGA Process2006
- Author(s)
  D. Noda, Y. Matsumoto, S. Yamashita, M. Setemoto, and T. Hattori
- Organizer
  SPIE International Symposium on Smart Materials, Nano- and Micro- Smart Systems
- Place of Presentation
  University of Adelaide, Adelaide, Australia, 6414-63
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 3次元X線リソグラフィ及びメタライズによる円筒型コイル作製2006
- Author(s)
  松本吉史,野田大二,山下修平,服部正
- Organizer
  日本機械学会年次大会
- Place of Presentation
  熊本大学,4102
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 円筒コイルを用いた電磁型アクチュエータ2006
- Author(s)
  望月浩晃,松本吉史,野田大二,服部正
- Organizer
  平成18年電気学会全国大会
- Place of Presentation
  横浜国立大学,3-139
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] 高アスペクト比コイルを用いた電磁型アクチュエータ2006
- Author(s)
  野田大二,松本吉史,山下修平,服部正
- Organizer
  日本機械学会年次大会
- Place of Presentation
  熊本大学,4101
- Data Source
  KAKENHI-PROJECT-16078212
[Presentation] シミュレーションによるマイクロ電磁弁の吸引力向上
- Author(s)
  松本吉史,望月浩晃,野田大二,服部正
- Organizer
  平成18年電気学会全国大会
- Place of Presentation
  横浜国立大学,3-138
- Data Source
  KAKENHI-PROJECT-16078212

1. HATTORI Tadashi (70326297)

# of Collaborated Projects: 1 results

# of Collaborated Products: 66 results
2. ISHIGAKI Hiroyuki (40081244)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
3. UTSUMI Yuichi (80326298)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
4. MEKARU Harutaka (30321681)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
5. 石垣博行

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results

NODA Daiji 野田 大二

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Fabrication of transparence micro-mold using thermal oxidation for nano-imprintPrincipal Investigator

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シリコン基板上の任意の場所に形成する超高速LSI用真空マイクロパッケージの研究Principal Investigator

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Development of a New Micro-Nano Solid Processing Technology Based on a LIGA Process and a Next-Generation Micro Actuators

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[Book] "微細転写・加工技術全集",片岡大企画編集2008

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[Book] 微細転写・加工技術全集2008

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[Journal Article] Fabrication of Si Mold Using ICP Etching for X-ray Diffraction Grating2012

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[Journal Article] 高アスペクト比マイクロコイルの作製と電磁型アクチュエータへの展開2009

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[Journal Article] Fabrication and Estimation of Electromagnetic Type Micro-Actuator with Microcoil2009

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[Journal Article] 高アスペクト比マイクロコイルの作製と電磁型アクチュエータへの展開2009

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[Journal Article] Fabrication of Spiral Micro Coil Lines for Electromagnetic Actuators2008

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[Journal Article] Fabrication and Estimation of Electromagnetic Type Micro-Actuator with Microcoil2008

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[Journal Article] Fabrication of High Aspect Ratio Microcoil Using Dipping Method2008

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[Journal Article] Fabrication of Microcoil with Narrow and High Aspect Ratio Lines for Electromagnetic Actuators2008

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[Journal Article] Fabrication of High Aspect Ratio Microcoil Using Dipping Method2008

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[Journal Article] Fabrication of Microcoil with Narrow and High Aspect Ratio Lines for Electromagnetic Actuators2008

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[Journal Article] Fabrication of Microcoils Using X-ray Lithography and Metallization2008

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[Journal Article] Fabrication of Microcoils Using X-ray Lithography and Metallization2008

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NODA Daiji 野田大二