Seki Toshio 瀬木利夫

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SEKI Toshio 瀬木利夫

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Researcher Number	00402975
Other IDs	https://orcid.org/0000-0002-0834-1657
Affiliation (Current)	2025: 京都大学, 工学研究科, 講師
Affiliation (based on the past Project Information) *help	2015 – 2020: 京都大学, 工学研究科, 講師 2013: 京都大学, 工学研究科, 講師 2012 – 2013: 京都大学, 工学(系)研究科(研究院), 講師 2012: 京都大学, 大学院・工学研究科, 講師 2010 – 2011: 京都大学, 工学研究科, 講師 2007 – 2008: Kyoto University, 工学研究科, 講師 2006: 京都大学, 工学研究科, 助手
Review Section/Research Field	Principal Investigator Material processing/treatments / Nanostructural science / Material processing/Microstructural control engineering Except Principal Investigator Thin film/Surface and interfacial physical properties / Thin film/Surface and interfacial physical properties
Keywords	Principal Investigator クラスター / 量子ビーム科学 / 複合ビーム / ナノプロセス / 中性ビーム / 金属材料被服 / 金属材料被覆 / ノズル / アルゴン / ナノ構造材料 … More / 微粒子 / 表面処理 / 反応性エッチング / イオンビーム … More Except Principal Investigator 二次イオン / イオン / クラスター / SIMS / 質量分析 / 大気圧分析 / 固液界面 / 表面分析 / 大気圧SIMS法 / 高速重イオン / 2次イオン / 固液 / 高分子 / バイオ / 分析 / クラスターイオン Less

Ambient SIMS Technique for Liquid-Solid Interface Analysis
- Principal Investigator
  
  MATSUO Jiro
- Project Period (FY)
  2017 – 2020
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  Kyoto University
Development of surface process technology with high speed and no damage by huge composite clusterPrincipal Investigator
- Principal Investigator
  
  Seki Toshio
- Project Period (FY)
  2015 – 2017
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Material processing/Microstructural control engineering
- Research Institution
  Kyoto University
Development of analytical technique for organic materials with massive cluster ion beams
- Principal Investigator
  
  MATSUO Jiro
- Project Period (FY)
  2011 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  Kyoto University
Development of Nano-scale structure design and process technology by advanced composite cluster beamPrincipal Investigator
- Principal Investigator
  
  SEKI Toshio
- Project Period (FY)
  2010 – 2012
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Material processing/treatments
- Research Institution
  Kyoto University
Generation of nano-scale structure controlled composite cluster beamPrincipal Investigator
- Principal Investigator
  
  SEKI Toshio
- Project Period (FY)
  2006 – 2008
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Nanostructural science
- Research Institution
  Kyoto University

[Journal Article] MeV-SIMS measurement of lithium-containing electrolyte2020
- Author(s)
  Toshio Seki,Tomoya Nonomura, Takaaki Aoki, Jiro Matsuo
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
  
  Volume: 479(15) Pages: 229-232
- DOI
  10.1016/j.nimb.2020.07.007
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-17H01058
[Journal Article] Secondary ion mass spectrometry measurements under ambient and humid conditions using MeV ions2020
- Author(s)
  Toshio Seki, Kenta Ishii, Takaaki Aoki, Jiro Matsuo
- Journal Title
  
  Journal of Vacuum Science & Technology B
  
  Volume: 38(3) Issue: 3 Pages: 034014-034014
- DOI
  10.1116/1.5145014
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-17H01058
[Journal Article] Development of Atmospheric Pressure MeV-SIMS and Solid–Liquid Interface Analysis2020
- Author(s)
  瀬木　利夫
- Journal Title
  
  JSA
  
  Volume: 26 Issue: 3 Pages: 254-259
- DOI
  10.1384/jsa.26.254
- NAID
  130008022204
- ISSN
  1341-1756, 1347-8400
- Language
  Japanese
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-17H01058
[Journal Article] Phonon transport probed at carbon nanotube yarn/sheet boundaries by ultrafast structural dynamics2020
- Author(s)
  Hada Masaki、Makino Kotaro、Inoue Hirotaka、Hasegawa Taisuke、Masuda Hideki、Suzuki Hiroo、Shirasu Keiichi、Nakagawa Tomohiro、Seki Toshio、Matsuo Jiro、Nishikawa Takeshi、Yamashita Yoshifumi、Koshihara Shin-ya、Stolojan Vlad、Silva S. Ravi P.、Fujita Jun-ichi、Hayashi Yasuhiko、Maeda Satoshi、Hase Muneaki
- Journal Title
  
  Carbon
  
  Volume: 170 Pages: 165-173
- DOI
  10.1016/j.carbon.2020.08.026
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PUBLICLY-20H04657, KAKENHI-PROJECT-17H01058, KAKENHI-PROJECT-20H01832, KAKENHI-PROJECT-18H05208
[Journal Article] Selective Reduction Mechanism of Graphene Oxide Driven by the Photon Mode versus the Thermal Mode2019
- Author(s)
  M. Hada, K. Miyata, S. Ohmura, Y. Arashida, K. Ichiyanagi, I. Katayama, T. Suzuki, W. Chen, S. Mizote, T. Sawa, T. Yokoya, T. Seki, J. Matsuo, T. Tokunaga, C. Itoh, K. Tsuruta, R. Fukaya, S. Nozawa, S. Adachi, J. Takeda, K. Onda, S. Koshihara, Y. Hayashi, Y. Nishina
- Journal Title
  
  ACS Nano
  
  Volume: 13 Issue: 9 Pages: 10103-10112
- DOI
  10.1021/acsnano.9b03060
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K15508, KAKENHI-PROJECT-18H05208, KAKENHI-PLANNED-17H06375, KAKENHI-ORGANIZER-17H06433, KAKENHI-PLANNED-17H06438, KAKENHI-PUBLICLY-18H04371, KAKENHI-PUBLICLY-18H04519, KAKENHI-PUBLICLY-18H05170, KAKENHI-PLANNED-19H05782, KAKENHI-PROJECT-17H06141, KAKENHI-PROJECT-17H01058, KAKENHI-PROJECT-16H06010
[Journal Article] Optimized Alkali-Metal Cationization in Secondary Ion Mass Spectrometry of Polyethylene Glycol Oligomers with up to m/ z 10000: Dependence on Cation Species and Concentration2019
- Author(s)
  Hubert Gnaser, Rika Oki, Takaaki Aoki, Toshio Seki, Jiro Matsuo
- Journal Title
  
  Analytical Chemistry 2020
  
  Volume: 92(1) Issue: 1 Pages: 1511-1517
- DOI
  10.1021/acs.analchem.9b04770
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Journal Article] Gas cooling secondary ions emitted by gas cluster ion beam at the travelling-wave ion guide of a Q-ToF-SIMS system2019
- Author(s)
  P.Thopan, T.Seki, L.D.Yu, U.Tippawan, J.Matsuo
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
  
  Volume: 450 Pages: 139-143
- DOI
  10.1016/j.nimb.2018.07.024
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Journal Article] Cluster ion beam bombardment and Q-ToF-SIMS analysis of large biomolecules2019
- Author(s)
  P.Thopan, T.Seki, L.D.Yu, U.Tippawan, J.Matsuo
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
  
  Volume: 448 Pages: 11-18
- DOI
  10.1016/j.nimb.2019.04.001
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Journal Article] Recent Progress of SIMS Technique : from Novel Primary Beams to Advanced Mass Spectrometers2018
- Author(s)
  松尾　二郎，　瀬木　利夫，　青木　学聡
- Journal Title
  
  Vacuum and Surface Science
  
  Volume: 61 Issue: 7 Pages: 426-434
- DOI
  10.1380/vss.61.426
- NAID
  130007403877
- ISSN
  2433-5835, 2433-5843
- Year and Date
  2018-07-10
- Language
  Japanese
- Data Source
  KAKENHI-PROJECT-17H01058
[Journal Article] Fabrication of a Si lever structure made by double-angled etching with reactive gas cluster injection2017
- Author(s)
  T. Seki, H. Yamamoto, T. Kozawa, K. Koike, T. Aoki, J. Matsuo
- Journal Title
  
  APPLIED PHYSICS LETTERS
  
  Volume: 110(18) Issue: 18 Pages: 182105-182105
- DOI
  10.1063/1.4982970
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17H01058
[Journal Article] Angled etching of Si by ClF3-Ar gas cluster injection2017
- Author(s)
  Toshio Seki, Hiroki Yamamoto, Takahiro Kozawa, Tadashi Shojo, Kunihiko Koike, Takaaki Aoki, Jiro Matsuo
- Journal Title
  
  JAPANESE JOURNAL OF APPLIED PHYSICS
  
  Volume: 56(6) Issue: 6S2 Pages: 06HB02-06HB02
- DOI
  10.7567/jjap.56.06hb02
- NAID
  210000147949
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17H01058
[Journal Article] Study on the detection limit of a new argon gas cluster ion beam secon dary ion mass spectrometry apparatus using lipid compound samples2014
- Author(s)
  M. Fujii, S. Nakagawa, K. Mats uda, N. Man, T. Seki, T. Aoki a nd J. Matsuo
- Journal Title
  
  Rapid Commun. Mass Spectrom.
  
  Volume: 28 Issue: 8 Pages: 917-920
- DOI
  10.1002/rcm.6867
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-13J02001, KAKENHI-PROJECT-23246012
[Journal Article] Prolific cluster emission in sputtering of phenylalanine by argon-cluster ion bombardment2014
- Author(s)
  H.Gnaser, M.Fujii, S.Nakagawa, T.Seki, T.Aoki, J.Matsuo
- Journal Title
  
  International Journal of Mass Spectrometry
  
  Volume: Vol.360 Pages: 54-57
- DOI
  10.1016/j.ijms.2013.12.024
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23246012
[Journal Article] Ion-induced damage evaluation with Ar cluster ion beams2013
- Author(s)
  Y. Yamamoto, K.Ichiki, T. Seki, T. Aokiand J. Matsuo
- Journal Title
  
  Surface and Interface Analysis
  
  Volume: Vol.44, No.1 Issue: 1 Pages: 167-170
- DOI
  10.1002/sia.5014
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760557, KAKENHI-PROJECT-23246012
[Journal Article] Molecular dynamics simulation study of damage formation and sputtering with huge fluorine cluster impact on silicon2013
- Author(s)
  T.Aoki, T.Seki, J.Matsuo
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research B
  
  Volume: Vol.303 Pages: 170-173
- DOI
  10.1016/j.nimb.2012.10.040
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23246012
[Journal Article] Development of gas cluster ion beam irradiation system with an orthogonal acceleration TOF instrument2013
- Author(s)
  K.Ichiki, J. Tamura, T. Seki, T. Aoki and J. Matsuo
- Journal Title
  
  Surface and Interface Analysis
  
  Volume: Vol.44,No.1 Issue: 1 Pages: 522-524
- DOI
  10.1002/sia.5092
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760557, KAKENHI-PROJECT-23246012
[Journal Article] An electrostatic quadrupole doublet focusing system for MeV heavy ions in MeV-SIMS2013
- Author(s)
  T. Seki, S. Shitomoto, S. Nakagawa, T. Aoki and J. Matsuo
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research B
  
  Volume: 315 Pages: 356-359
- DOI
  10.1016/j.nimb.2013.05.069
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23246012
[Journal Article] Peptide dissociation patterns in secondary ion mass spectrometry under large argon cluster ion bombardment2013
- Author(s)
  H.Gnaser, M.Fujii, S.Nakagawa, T.Seki, T.Aoki, J.Matsuo
- Journal Title
  
  Rapid Commun. Mass Spectrom.
  
  Volume: Vol.27 Issue: 13 Pages: 1490-1496
- DOI
  10.1002/rcm.6599
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23246012
[Journal Article] Molecular dynamics study of crater formation by core-shell structured cluster impact2012
- Author(s)
  T. Aoki, T. Seki and J. Matsuo
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research B
  
  Volume: 282 Pages: 29-32
- DOI
  10.1016/j.nimb.2011.08.061
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760557, KAKENHI-PROJECT-23246012
[Journal Article] Depth profiling analysis of damaged arginine films with Ar cluster ion beams2012
- Author(s)
  J. Matsuo, K. Ichiki, Y. Yamamoto, T. Sekiand T. Aoki
- Journal Title
  
  Surface and Interface Analysis
  
  Volume: Vol.44, No.6 Issue: 6 Pages: 729-731
- DOI
  10.1002/sia.4856
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760557, KAKENHI-PROJECT-23246012
[Journal Article] Molecular dynamics simulations of large fluorine cluster impact on silicon with supersonic velocity2011
- Author(s)
  T. Aoki, T. Seki and J. Matsuo
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research B
  
  Volume: 269 Issue: 14 Pages: 1582-1585
- DOI
  10.1016/j.nimb.2010.12.013
- NAID
  40020675504
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760557, KAKENHI-PROJECT-23246012
[Journal Article] Surface morphology of PMMA surfaces bombarded with size-selected gas cluster ion beams2011
- Author(s)
  K. Ichiki, S. Ninomiya, Y. Nakata, H. Yamada, T. Seki, T. Aoki and J. Matsuo
- Journal Title
  
  Surface and Interface Analysis
  
  Volume: Vol.43, No.1-2 Issue: 1-2 Pages: 120-122
- DOI
  10.1002/sia.3444
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760557
[Journal Article] Low Damage Milling of an Ami no Acid thin film with Cluster Ion Beam2011
- Author(s)
  M.Hada, S.Ibuki, Y.Hontani, Y.Yamamoto, K.Ichiki, S.Ninomiya, T.Seki, T.Aoki, J.
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 110 Issue: 9
- DOI
  10.1063/1.3658220
- NAID
  120004920364
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23246012
[Journal Article] Evaluation of damage depth on arginine films with molecular depth profiling by Ar cluster ion beam2011
- Author(s)
  Y.Yamamoto, K.Ichiki, T.Seki, T.Aoki, J.Matsuo
- Journal Title
  
  Transactions of the MRS-J
  
  Volume: 36[3] Pages: 313-316
- NAID
  130003398962
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23246012
[Journal Article] Highly Sensitive Molecular Detection with Swift Heavy Ions2011
- Author(s)
  Y.Wakamatsu, H.Yamada, S.Ninomiya, B.N.Jones, T.Seki
- Journal Title
  
  uclear Instruments and Methods in Physics Research
  
  Volume: 269 Pages: 2251-2253
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23246012
[Journal Article] Etching of metallic materials with Cl2gas cluster ion beam2011
- Author(s)
  T. Seki, T. Aoki and J. Matsuo
- Journal Title
  
  Surface & Coatins Technology
  
  Volume: 206 Issues 5 Issue: 5 Pages: 789-791
- DOI
  10.1016/j.surfcoat.2011.04.054
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760557, KAKENHI-PROJECT-23246012
[Journal Article] The effects of cluster size on sputtering and surface smoothing of PMMA with gas cluster ion beams2011
- Author(s)
  K.Ichiki, S.Ninomiya, T.Seki, T.Aoki, J.Matsuo
- Journal Title
  
  Transactions of the MRS-J
  
  Volume: 36[3] Pages: 309-312
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23246012
[Journal Article] High Speed Si Etching with ClF_3 Cluster Injection2010
- Author(s)
  Toshio Seki
- Journal Title
  
  AIP Conference Proceedings
  
  Volume: 1321 Pages: 317-320
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760557
[Journal Article] High Speed Si Etching with ClF3 Cluster Injection2010
- Author(s)
  T. Seki, Y. Yoshino, T. Senoo, K. Koike, S. Ninomiya, T. Aoki, and J.Matsuo
- Journal Title
  
  AIP Conference Proceedings
  
  Volume: Vol. 1321 Pages: 317-320
- DOI
  10.1063/1.3548393
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760557
[Journal Article] High-Speed Nano-Processing with Cluster Ion Beams2008
- Author(s)
  Toshio,Seki
- Journal Title
  
  Transactions,of the MRS-J 33[4]
  
  Pages: 1019-1022
- NAID
  130007809533
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18681014
[Journal Article] High-Speed Nano-Processing with Cluster Ion Beams2008
- Author(s)
  T. Seki, T. Aoki and J. Matsuo
- Journal Title
  
  Transactions of the MRS-J 33 [4]
  
  Pages: 1019-1022
- NAID
  130007809533
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18681014
[Journal Article] Investigation of Damage with Cluster Ion Beam Irradiation Using HR-RBS2008
- Author(s)
  Toshio Seki
- Journal Title
  
  AIP Conf. Proc 1066
  
  Pages: 423-426
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18681014
[Journal Article] Energy distribution of high-energy cluster ion beams2007
- Author(s)
  Toshio Seki
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research B 261
  
  Pages: 647-650
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18681014
[Journal Article] High-speed processing with high-energy SF_6 cluster ion beam2007
- Author(s)
  T. Seki, J. Matsuo
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research B 257
  
  Pages: 666-669
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18681014
[Journal Article] Surface processing with high-energy gas cluster ion beams2007
- Author(s)
  Toshio Seki
- Journal Title
  
  Surface and Coatings Technology 201
  
  Pages: 8646-8649
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18681014
[Journal Article] Surface processing with high-energy gas cluster ion beams2007
- Author(s)
  T. Seki, J. Matsuo
- Journal Title
  
  Surface and Coatings Technology 201(19-20 SPEC.ISS.)
  
  Pages: 8646-8649
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18681014
[Journal Article] High-speed processing with high-energy SF6 cluster ion beam2007
- Author(s)
  Toshio Seki
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research B 257
  
  Pages: 666-669
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18681014
[Journal Article] Energy distribution of high-energy cluster ion beams2007
- Author(s)
  T. Seki, J. Matsuo
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research B 261
  
  Pages: 647-650
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18681014
[Journal Article] High-Speed Nano-Processing with Cluster Ion Beams2006
- Author(s)
  T. Seki and J. Matsuo,
- Journal Title
  
  AIP Conf. Proc. 866
  
  Pages: 214-217
- NAID
  130007809533
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18681014
[Journal Article] High-Speed Nano-Processing with Cluster Ion Beams2006
- Author(s)
  Toshio Seki
- Journal Title
  
  AIP Conf.Proc. 866
  
  Pages: 214-214
- NAID
  130007809533
- Data Source
  KAKENHI-PROJECT-18681014
[Patent] クラスタによる加工方法2012
- Inventor(s)
  吉野裕　小池国彦　妹尾武彦　松尾二郎　瀬木利夫
- Industrial Property Rights Holder
  吉野裕　小池国彦　妹尾武彦　松尾二郎　瀬木利夫
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2012-189770
- Filing Date
  2012-08-30
- Data Source
  KAKENHI-PROJECT-22760557
[Presentation] 大気圧MeV-SIMSによる固液界面分析に向けた研究2021
- Author(s)
  野々村知也, 瀬木利夫, 松尾二郎
- Organizer
  The 68th JSAP Spring Meeting,2021
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] ESI法によるグリセロールクラスターのSIMS応用2021
- Author(s)
  河野　建太, 瀬木利夫, 松尾二郎
- Organizer
  The 68th JSAP Spring Meeting,2021
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] リチウム化合物を混合させた電解液の大気圧MeV-SIMS 測定(2)2020
- Author(s)
  野々村知也, 瀬木利夫, 松尾二郎
- Organizer
  The 81th JSAP Autumn Meeting
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] SIMS応用に向けたNano-ESI法によるクラスターイオン2020
- Author(s)
  河野　建太, 瀬木利夫, 松尾二郎
- Organizer
  第21回QSEC公開シンポジウム
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] MeV-SIMS measurement of electrolyte dissolved lithium compound at atmospheric pressure2020
- Author(s)
  T. Seki
- Organizer
  The 21th Workshop on Surface and Interface Analysis
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] MeV-SIMSにおける二次イオン軌道シミュレーション2020
- Author(s)
  瀬木利夫, 松尾二郎
- Organizer
  The 81th JSAP Autumn Meeting
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] リチウムイオン電池電解液のMeV-SIMS測定2020
- Author(s)
  野々村　知也, 瀬木利夫, 松尾二郎
- Organizer
  第21回QSEC公開シンポジウム
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] リチウムイオン電池電解質から放出される二次イオンの大気圧下での測定2020
- Author(s)
  野々村知也, 瀬木利夫, 青木学聡, 松尾二郎
- Organizer
  フォーラム２１「イオンビームを用いた物理とその応用」研究会（第25回）
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] Generation of massive cluster ions with electrospray ion source2019
- Author(s)
  T. Matsuda, T. Seki, T. Aoki, J. Matsuo
- Organizer
  The 22st International Conference on Secondary Ion Mass Spectrometry
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] エレクトロスプレーイオン源を用いた巨大クラスターイオンの生成2019
- Author(s)
  松田大輝, 瀬木利夫, 青木学聡, 松尾二郎
- Organizer
  The 80th JSAP Spring Meeting
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] MeV-SIMS Measurements under Ambient and Humid Conditions2019
- Author(s)
  T. Seki
- Organizer
  The 22st International Conference on Secondary Ion Mass Spectrometry
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] ミストの付加によるポリマーのイメージング分解能の向上2019
- Author(s)
  松田大輝, 瀬木利夫, 青木学聡, 松尾二郎
- Organizer
  The 66th JSAP Spring Meeting, 2019
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] Angular Distribution of Neutral Species from Rhodamine 6G Sputtered with Cluster Ion Bombardment2019
- Author(s)
  7. R. Oki, N. Sano, T. Seki, T. Aoki, J. Matsuo
- Organizer
  The 22st International Conference on Secondary Ion Mass Spectrometry
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] Etching by Massive Cluster Ions from Electrospray Ion Source2019
- Author(s)
  T. Matsuda, T. Seki, T. Aoki, J. Matsuo
- Organizer
  23rd International Workshop on Inelastic Ion-Surface Collisions
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] 反応性ガスクラスターインジェクションによる高アスペクト比エッチングに向けた研究2019
- Author(s)
  瀬木利夫, 荘所正, 小池国彦, 青木学聡, 松尾二郎
- Organizer
  The 80th JSAP Spring Meeting
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] 高エネルギークラスターイオン源を用いたSIMS測定2019
- Author(s)
  平田健太郎, 瀬木利夫, 青木学聡, 松尾二郎
- Organizer
  第20回QSEC公開シンポジウム
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] Enhancement of ionization probability of Polymers with cation deposition method2019
- Author(s)
  T. Matsuda, T. Seki, T. Aoki, J. Matsuo
- Organizer
  The 22st International Conference on Secondary Ion Mass Spectrometry
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] 巨大ガスクラスタービームによる表面クリーニングと加工2019
- Author(s)
  瀬木　利夫
- Organizer
  シリコンテクノロジー分科会第２１６回研究集会
- Invited
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] 反応性ガスクラスターインジェクションを用いた斜め2方向エッチングによる3D構造の作成(II)2019
- Author(s)
  瀬木利夫, 山本洋揮, 古澤孝弘, 荘所正, 小池国彦, 青木学聡, 松尾二郎
- Organizer
  The 66th JSAP Spring Meeting, 2019
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] Optimized alkali-metal cationization in secondary ion mass spectrometry of polyethylene glycol oligomers with up to m/z 10000: Dependence on cation species and concentration2019
- Author(s)
  H. Gnaser, R. Oki, T. Aoki, T. Seki and J. Matsuo
- Organizer
  The 22st International Conference on Secondary Ion Mass Spectrometry
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] Liquid Adsorption and Desorption measured with Ambient ?SIMS2019
- Author(s)
  J. Matsuo, T. Seki, T. Aoki
- Organizer
  Symposium on Surface and Nano Science 2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] 大気圧MeV-SIMSの開発と固液界面分析2019
- Author(s)
  瀬木利夫
- Organizer
  第53回表面分析研究会
- Invited
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] 高分子のSIMS分析に向けたエレクトロスプレーイオン源の開発2019
- Author(s)
  山田周平, 瀬木利夫, 青木学聡, 松尾二郎
- Organizer
  The 66th JSAP Spring Meeting, 2019
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] Development of a high energy cluster SIMS system with 50keV GCIB source2019
- Author(s)
  K. Hirata, T. Seki, T. Aoki, J. Matsuo
- Organizer
  The 22st International Conference on Secondary Ion Mass Spectrometry
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] Ambient Secondary Ion Mass Analysis of Electrolyte of Lithium Ion Battery with MeV-Energy Heavy Ion2019
- Author(s)
  T. Seki, T. Nonomura, T. Aoki, J. Matsuo
- Organizer
  23rd International Workshop on Inelastic Ion-Surface Collisions
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] エレクトロスプレーイオン源を用いた巨大クラスターイオンの生成2019
- Author(s)
  松田大輝, 瀬木利夫, 青木学聡, 松尾二郎
- Organizer
  第20回QSEC公開シンポジウム
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] MeV-SIMS Measurement of Electrolyte of Lithium Ion Battery2019
- Author(s)
  T. Nonomura, T. Seki, T. Aoki, J. Matsuo
- Organizer
  The 22st International Conference on Secondary Ion Mass Spectrometry
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] リチウムイオン電池の電解質の大気圧　MeV-SIMS測定2019
- Author(s)
  野々村知也, 瀬木利夫, 青木学聡, 松尾二郎
- Organizer
  The 80th JSAP Spring Meeting
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] Ambient Secondary Ion Mass Analysis of Fatty Acids with MeV-energy Heavy Ion2018
- Author(s)
  T. Seki, T. Aoki, J. Matsuo
- Organizer
  The 19th Workshop on Surface and Interface Analysis by Ion Beam
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] 反応性ガスクラスターインジェクションを用いた斜め2 方向エッチングによる3D構造の作成2018
- Author(s)
  瀬木利夫, 山本洋揮, 古澤孝弘, 荘所正, 小池国彦, 青木学聡, 松尾二郎
- Organizer
  The 65th JSAP Autumn Meeting, 2018
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] Improvement in Detection Sensitivity of Secondary Ions by Na Absorption with Mist Deposition Method on a PEG Surface2018
- Author(s)
  T. Matsuda, T. Seki, T. Aoki, J. Matsuo
- Organizer
  The 28ｔｈ Annual Meeting of MRS-J
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] 二次電子増倍管(CEM)を用いたビーム径測定システムの開発2018
- Author(s)
  山田周平, 瀬木利夫, 青木学聡, 松尾二郎
- Organizer
  The 65th JSAP Autumn Meeting, 2018
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] Adsorption of Liquids Measured with MeV-SIMS in Ambient2018
- Author(s)
  J. Matsuo, T. Seki, T. Aoki
- Organizer
  16th International Conference on Nuclear Microprobe Technology and Applications
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] 新しいプローブイオンを用いたSIMSによる有機材料分析2018
- Author(s)
  瀬木　利夫
- Organizer
  量子ビームによるナノ構造形成とその医療・バイオ応用技術」調査専門委員会公開研究会
- Invited
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] SIMS Analysis of Liquid Materials in Low Vacuum with Large Cluster Ion Beam2018
- Author(s)
  T. Seki, K. Suzuki, T. Aoki, J. Matsuo
- Organizer
  25th International Conference on Application of Accelerators in Research and Industry
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] Fabrication of multilayer lever structure by double-angled etching with reactive gas cluster injection2018
- Author(s)
  T. Seki, H. Yamamoto, T. Kozawa, T. Shojo, K. Koike, T. Aoki, J. Matsuo
- Organizer
  40th International Symposium on Dry Process
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] High-Speed SIMS Imaging Using a High Brightness Cluster Ion Source2018
- Author(s)
  S. Yamada, T. Seki, T. Aoki, J. Matsuo
- Organizer
  The Scientific International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] Secondary Molecular Ion Emission of Polymers with Various Molecular Weights under Large Cluster Ion Bombardment: Enhancement with the Cationization Technique2018
- Author(s)
  J. Matsuo, L. Houssiau, H. Gnaser, T. Satoh, M. Fujii, T. Seki, T. Aoki
- Organizer
  The Scientific International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] 液体材料の大気圧MeV-SIMS測定2018
- Author(s)
  瀬木利夫, 石井健太, 青木学聡, 松尾二郎
- Organizer
  The 79th JSAP Autumn Meeting, 2018
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] ミスト法を用いたナトリウム付加によるPEG表面の2次イオン検出感度の向上2018
- Author(s)
  松田大輝 , 瀬木利夫 , 青木学聡 , 松尾二郎
- Organizer
  The 65th JSAP Autumn Meeting, 2018
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] 固液界面分析に向けたAmbient SIMS法の開発2018
- Author(s)
  石井健太, 瀬木利夫, 青木学聡, 松尾二郎
- Organizer
  The 65th JSAP Autumn Meeting, 2018
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] Cationization Technique for Polyethylene glycol (PEG) with Argon Cluster Ion Beam connected with AccuToF Mass Analyzer2018
- Author(s)
  Prutchayawoot Thopan, Rika Oki, Hubert Gnaser, Toshio Seki, Takaaki Aoki, Jiro Matsuo
- Organizer
  The 65th JSAP Autumn Meeting, 2018
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] Improvement in the Detection Sensitivity of Secondary Ions by Na Absorption with the Mist Deposition Method on a PEG Surface2018
- Author(s)
  T. Matsuda, T. Seki, T. Aoki, J. Matsuo
- Organizer
  The Scientific International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] Chemical Analysis under Ambient Conditions using MeV-Energy Heavy Ion2018
- Author(s)
  T. Seki
- Organizer
  25th International Conference on Application of Accelerators in Research and Industry
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] 画像分析技術のイメージングSIMS分析への応用2018
- Author(s)
  青木学聡, 瀬木利夫, 松尾二郎
- Organizer
  The 79th JSAP Autumn Meeting, 2018
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] ミスト法を用いたセシウム付加によるPEG表面の次イオン検出感度の向上2018
- Author(s)
  松田大輝, 松尾二郎, 瀬木利夫, 青木学聡
- Organizer
  The 79th JSAP Autumn Meeting, 2018
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] Ambient SIMS using MeV-Energy Heavy Ion2017
- Author(s)
  T. Seki, K. Ishii, M. Kusakari, T. Aoki and J. Matsuo
- Organizer
  The 23rd International Conference on Ion Beam Analysis
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] Fabrication of 3D structure by double-angled etching with reactive gas cluster injection2017
- Author(s)
  T. Seki, H. Yamamoto, T. Kozawa, T. Shojo, K. Koike, T. Aoki and J. Matsuo
- Organizer
  39th International Smposium on Dry Process
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] Observation of Adsorption and Desorption of Water Molecules with Ambient SIMS2017
- Author(s)
  J. Matsuo, T. Seki, T. Aoki
- Organizer
  21st International Conference on Secondary Ion Mass Spectrometry
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] SIMS Measurement in Ambient and Humid Condition2017
- Author(s)
  K. Ishii, T. Seki, T. Aoki and J. Matsuo
- Organizer
  The 15th International Conference on Advanced Materials
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] PEG表面へのナトリウム付加による2次イオン検出感度向上2017
- Author(s)
  松田大輝, 瀬木利夫, 青木学聡, 松尾二郎
- Organizer
  The 78th JSAP Autumn Meeting, 2017
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] パイプ型ノズルを用いた湿潤環境下ＳＩＭＳ測定2017
- Author(s)
  石井健太, 瀬木利夫, 青木学聡, 松尾二郎
- Organizer
  The 78th JSAP Autumn Meeting, 2017
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] Organic Material Analysis with a SIMS System with Q-TOF MS/MS Technique2017
- Author(s)
  J. Matsuo, L. Houssiau, H. Gnaser, T. Seki1,T. Aoki
- Organizer
  The 8th International Symposium on Surface Science
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] Angled Etching by ClF3?Ar Gas Cluster Injection2017
- Author(s)
  T. Seki, H. Yamamoto, T. Kozawa, T. Shojo, K. Koike, T. Aoki and J. Matsuo
- Organizer
  The 15th International Conference on Advanced Materials
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] Ambient Secondary Ion Mass Analysis with MeV-energy Heavy Ion2017
- Author(s)
  T. Seki, K. Ishii, M. Kusakari, T. Aoki, J. Matsuo
- Organizer
  11th International Symposium on Atomic Level Characterizations for New Materials and Devices ’17
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] Characterization of Bio-Molecules with GCIBSIMS equipped with MS/MS SpectrometerSecondary Molecular Ion Emission of Polymers with Various Molecular Weights under Large Cluster Ion Bombardment: Enhancement with the Cationization Technique2017
- Author(s)
  J. Matsuo, T. Seki, T. Aoki
- Organizer
  AVS 64th International Symposium & Exhibition 2017
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] ClF3中性クラスターエッチング表面の凹凸構造2017
- Author(s)
  瀬木利夫, 荘所正, 小池国彦, 青木学聡, 松尾二郎
- Organizer
  The 78th JSAP Autumn Meeting, 2017
- Data Source
  KAKENHI-PROJECT-17H01058
[Presentation] ClF3 中性クラスタービームによる斜めエッチング2015
- Author(s)
  214.瀬木利夫,山本洋揮,古澤孝弘,吉野裕,妹尾武彦,小池国彦,青木学聡,松尾二郎
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場、愛知県
- Year and Date
  2015-09-14
- Data Source
  KAKENHI-PROJECT-15H04157
[Presentation] Reactive etching with ClF3-Ar neutral cluster beam2015
- Author(s)
  T.Seki, M. Kusakari, M. Fujii, T. Aoki and J. Matsuo
- Organizer
  The 37th International Symposium on Dry Process
- Place of Presentation
  Awaji Yumebutai International Conference Center, Hyogo, Japan
- Year and Date
  2015-11-05
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H04157
[Presentation] 中性クラスター速度計測技術の開発2014
- Author(s)
  瀬木利夫、唐橋一浩、青木学聡、松尾二郎
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] COクラスターの生成および評価2014
- Author(s)
  唐橋一浩、瀬木利夫、松尾二郎、浜口智志
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] 低真空下における揮発性試料の二次イオン質量分析に関する検討2014
- Author(s)
  草刈将一、藤井麻樹子、瀬木利夫、青木学聡、松尾二郎
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] 角形状を持つ標的材料へのクラスターイオン衝突シミュレーション2014
- Author(s)
  青木学聡，瀬木利夫，松尾二郎
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] ガスクラスターイオンビームによる有機多層膜の3D質量イメージング2014
- Author(s)
  若本恵佑、中川俊一郎、瀬木利夫、青木学聡，松尾二郎
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] 水クラスターイオンビーム照射によるSIMS分析2014
- Author(s)
  中川駿一郎、瀬木利夫、青木学聡、松尾二郎
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Arクラスターイオンビームを用いた細胞レベルの質量イメージング2014
- Author(s)
  鳥居聡太、瀬木利夫、青木学聡、松尾二郎
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] 低真空二次イオン質量分析法(Wet-SIMS)の開発2014
- Author(s)
  松尾二郎、草刈将一、藤井麻樹子、青木学聡、瀬木利夫
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] MeV-SIMS with Swift Heavy Ions at low pressure2014
- Author(s)
  J. Matsuo, M. Kusakari, M. Fujii, T. Seki and T. Aoki
- Organizer
  ICNMTA 2014
- Place of Presentation
  Firenze and Torino, Italy
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] ClF3クラスタービームによる大面積Siエッチング技術(2)2014
- Author(s)
  吉野裕、妹尾武彦、小池国彦、瀬木利夫、青木学聡、松尾二郎
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] 新しい二次イオン質量分析法を用いた生体試料中の脂質分析2014
- Author(s)
  藤井麻樹子、草刈将一、中川駿一郎、瀬木利夫、青木学聡、松尾二郎
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Possibilities and Limitations of Ar GCIB SIMS for Biological Applications2013
- Author(s)
  M. Fujii, S. Nakagawa, T. Seki, T. Aoki and J. Matsuo
- Organizer
  SIMS XIX 19th International Conference on Secondary Ion Mass Spectrometry
- Place of Presentation
  Jeju, Korea
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Sputtered Ion Emission from Peptides and Amino Acids under Large Argon Cluster Ion Bombardment2013
- Author(s)
  H. Gnaser, M. Fujii, S. Nakagawa, T. Seki, T. Aoki, and J. Matsuo
- Organizer
  SIMS XIX 19th International Conference on Secondary Ion Mass Spectrometry
- Place of Presentation
  Jeju, Korea
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] 二次イオン質量分析法によるイメージング技術の進展と展望2013
- Author(s)
  松尾二郎，中川駿一郎，藤井麻樹子，鳥居聡太，瀬木利夫，青木学聡
- Organizer
  第61回質量分析総合討論会
- Place of Presentation
  つくば国際会議場
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] 高速重イオン照射による脂質の二次イオン質量分析2013
- Author(s)
  藤井麻樹子，草刈将一，瀬木利夫，青木学聡，松尾二郎
- Organizer
  第40回BMSコンファレンス
- Place of Presentation
  シーガイアコンベンションセンター
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] 高空間分解能クラスターSIMS用プローブの形成2013
- Author(s)
  鳥居聡太，松尾二郎，瀬木利夫，青木学聡
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Depth analysis of DSPC by SIMS, using gas cluster ion beam2013
- Author(s)
  S. Nakagawa, T. Seki, T. Aoki, J. Matsuo
- Organizer
  SIMS19
- Place of Presentation
  Jeju, Korea
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] ガスクラスターイオンビームによる有機デバイスの深さ方向SIMS分析2013
- Author(s)
  中川駿一郎，瀬木利夫，青木学聡，松尾二郎
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Quantitative Analysis of Lipids with Ar Cluster Ion Beam2013
- Author(s)
  M. Fujii, S. Nakagawa, T. Seki, T. Aoki and J. Matsuo
- Organizer
  ALC13
- Place of Presentation
  Hawaii, USA
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Si Etching with ClF3 Neutral Cluster Beam from Multi-nozzle2013
- Author(s)
  T. Seki, Y. Yoshino, T. Senoo, K. Koike, T. Aoki and J. Matsuo
- Organizer
  23rd Annual Meeting of MRS-J
- Place of Presentation
  Yokohama, Japan
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Depth analysis of organic matelial by SIMS, using gas cluster ion beam2013
- Author(s)
  S. Nakagawa, M. Kusakari, M. Fujii, T. Seki, T. Aoki, J. Matsuo
- Organizer
  23rd Annual Meeting of MRS-J
- Place of Presentation
  Yokohama, Japan
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Study on the Sputtering Mechanism of Amino Acid with Ar Cluster Ion Beam Irradiation2013
- Author(s)
  M. Fujii, H. Gnaser, S. Nakagawa, T. Seki, T. Aoki and J. Matsuo
- Organizer
  SISS-15
- Place of Presentation
  Tokyo, Japan
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] クラスターSIMS法による脂質分子の高感度検出とイメージングへの応用2013
- Author(s)
  松尾二郎、中川駿一郎、鳥居聡太、藤井麻樹子、瀬木利夫、青木学聡
- Organizer
  第33回表面科学学術講演会・第54回真空に関する連合講演会
- Place of Presentation
  つくば国際会議場
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Low Vacuum SIMS Measurement of Higher Alcohols with MeV-energy Heavy Ion Beam2013
- Author(s)
  M. Kusakari, M. Fujii, T. Seki, T. Aoki, J. Matsuo
- Organizer
  23rd Annual Meeting of MRS-J
- Place of Presentation
  Yokohama, Japan
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Ambient Analysis with Wet-SIMS2013
- Author(s)
  T. Seki, M. Fujii, S. Nakagawa, T. Aoki and J. Matsuo
- Organizer
  ALC13
- Place of Presentation
  Hawaii, USA
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Mass Imaging of Biological Samples with Focused Massive Ar Cluster Ion Beams2013
- Author(s)
  S. Nakagawa, M. Fujii, T. Aoki, T. Seki and J. Matsuo
- Organizer
  AVS 60th International Symposium & Exhibition
- Place of Presentation
  Long beach, USA
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Si トレンチ構造への巨大フッ素クラスター衝突の MD シミュレーション2013
- Author(s)
  青木学聡、瀬木利夫、松尾二郎
- Organizer
  第60回応用物理学会学術講演会
- Place of Presentation
  神奈川工科大学
- Year and Date
  2013-03-29
- Data Source
  KAKENHI-PROJECT-22760557
[Presentation] Generation of Ar cluster ion beam for high spatial resolution SIMS2013
- Author(s)
  S. Torii, T. Seki, T. Aoki, J. Matsuo
- Organizer
  SIMS19
- Place of Presentation
  Jeju, Korea
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] ClF3 中性クラスタービームによる反応性エッチングの高速化2013
- Author(s)
  瀬木利夫、吉野裕、妹尾武彦、小池国彦、青木学聡、松尾二郎
- Organizer
  第60回応用物理学会学術講演会
- Place of Presentation
  神奈川工科大学
- Year and Date
  2013-03-29
- Data Source
  KAKENHI-PROJECT-22760557
[Presentation] Molecular ion imaging with swift heavy ions2013
- Author(s)
  J. Matsuo, S. Nakagawa, M. Fujii, T. Seki and T. Aoki
- Organizer
  REI-17
- Place of Presentation
  Helsinki, Finland
- Invited
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Mass Analysis by Ar-GCIB-Dynamic SIMS for Organic Materials2013
- Author(s)
  M. Suzuki, M. Nojima, M. Fujii, T. Seki and J. Matsuo
- Organizer
  ALC13
- Place of Presentation
  Hawaii, USA
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Arガスクラスターイオンビームを用いたダイナミック二次イオン質量分析装置による有機材料の深さ方向分析2013
- Author(s)
  鈴木将人，野島雅，藤井麻樹子，瀬木利夫，松尾二郎
- Organizer
  日本分析化学会第62年会
- Place of Presentation
  近畿大学東大阪キャンパス
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] 高速重イオンビームを用いた脂質の二次イオン質量分析2013
- Author(s)
  藤井麻樹子，草刈将一，瀬木利夫，青木学聡，松尾二郎
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Analysis of liquid materials with Wet-SIMS2013
- Author(s)
  T. Seki, M. Fujii, M. Kusakari1, S. Nakagawa, T. Aoki and J. Matsuo
- Organizer
  2nd Workshop on Strategic Japanese-Croatian Cooperative Program
- Place of Presentation
  Nara, Japan
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Lipid Compounds Analysis with MeV-SIMS Apparatus for Biological Applications2013
- Author(s)
  M. Fujii, M. Kusakari, T. Seki, T. Aoki and J. Matsuo
- Organizer
  2nd Workshop on Strategic Japanese-Croatian Cooperative Program
- Place of Presentation
  Nara
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Liquid Sample Measurements using Wet SIMS Apparatus with Swift Heavy Ion Beam2013
- Author(s)
  M. Fujii, M. Kusakari, T. Seki, T. Aoki and J. Matsuo
- Organizer
  SIMS XIX 19th International Conference on Secondary Ion Mass Spectrometry
- Place of Presentation
  Jeju, Korea
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] ガスクラスターイオンビームによるDSPC の深さ方向 SIMS 分析2013
- Author(s)
  中川駿一郎、瀬木利夫、青木学聡、松尾二郎
- Organizer
  第60回応用物理学会学術講演会
- Place of Presentation
  神奈川工科大学
- Year and Date
  2013-03-28
- Data Source
  KAKENHI-PROJECT-22760557
[Presentation] Effects of cluster ion beam irradiation with a mixture of noble and reactive gases on inorganic solids2013
- Author(s)
  S. Nakagawa, T.Seki, T.Aoki and J.Matsuo
- Organizer
  SISS-15
- Place of Presentation
  Tokyo, Japan
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Secondary Ion Mass Spectrometry with Methanol Cluster Ions2013
- Author(s)
  S. Nakagawa, T. Seki, T. Aoki, J. Matsuo
- Organizer
  SIMS19
- Place of Presentation
  Jeju, Korea
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Development of MeV-SIMS imaging system with electrostatic quadrupole lens2013
- Author(s)
  T. Seki, S. Shitomoto, S. Nakagawa, T. Aoki and J. Matsuo
- Organizer
  SISS-15
- Place of Presentation
  Tokyo, Japan
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] コア-シェル構造を持つクラスターの衝突シミュレーション2013
- Author(s)
  青木学聡，瀬木利夫，松尾二郎
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Development of organic depth profiling system with Ar-GCIB and IMS-4f2013
- Author(s)
  M. Nojima, M. Suzuki, M. Fujii, T. Seki and J. Matsuo
- Organizer
  SIMS XIX 19th International Conference on Secondary Ion Mass Spectrometry
- Place of Presentation
  Jeju, Korea
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] マルチノズルを用いたClF3中性クラスタービームによるSiエッチング2013
- Author(s)
  瀬木利夫，吉野裕，妹尾武彦，小池国彦，青木学聡，松尾二郎
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] 新しいイオンビームを用いた脂質の二次イオン質量分析2013
- Author(s)
  藤井麻樹子，草刈将一，中川駿一郎，瀬木利夫，青木学聡，松尾二郎
- Organizer
  第61回質量分析総合討論会
- Place of Presentation
  つくば国際会議場
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Bio-imaging with MeV-energy heavy ion beams2013
- Author(s)
  T. Seki, S. Shitomoto, S. Nakagawa, T. Aoki and J. Matsuo
- Organizer
  IBA2013
- Place of Presentation
  Seattle, USA
- Invited
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Chemical Reaction on the Specimen Surface by Cluster Ion Beam Irradiation2013
- Author(s)
  M. Fujii, T. Seki, T. Aoki and J. Matsuo
- Organizer
  2013 JSAP-MRS Joint Symposia
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Computer simulation of cluster impact on soft- and hard- material interface2013
- Author(s)
  T. Aoki, T. Seki and J. Matsuo
- Organizer
  23rd Annual Meeting of MRS-J
- Place of Presentation
  Yokohama, Japan
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Lipid Compounds Analysis with Swift Heavy Ion Beam for Biological Applications2013
- Author(s)
  M. Fujii, M. Kusakari, T. Seki, T. Aoki and J. Matsuo
- Organizer
  23rd Annual Meeting of MRS-J
- Place of Presentation
  Yokohama, Japan
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] ClF3クラスタービームによる大面積Siエッチング技術2013
- Author(s)
  吉野裕，妹尾武彦，小池国彦，瀬木利夫，青木学聡，松尾二郎
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Molecular ion imaging with swift heavy ions2013
- Author(s)
  J.Matsuo, S.Nakagawa, M.Fujii, T.Seki, T.Aoki
- Organizer
  The 17th International Conference on Radiation Effects in Insulators
- Place of Presentation
  Helsinki
- Year and Date
  2013-07-03
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] ガスクラスタービームを利用した微小パーティクル除去技術の開発2012
- Author(s)
  土橋和也、井内健介、斉藤美佐子、瀬木利夫、青木学聡、松尾二郎
- Organizer
  第59回応用物理学会
- Place of Presentation
  早稲田大学
- Year and Date
  2012-03-16
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] 集束クラスターイオンビーム照射による直行加速飛行時間型 SIMS 分析2012
- Author(s)
  中川駿一郎、瀬木利夫、青木学聡、松尾二郎
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  愛媛大学/松山大学
- Year and Date
  2012-09-13
- Data Source
  KAKENHI-PROJECT-22760557
[Presentation] 巨大反応性クラスター衝突の大規模分子動力学シミュレーション2012
- Author(s)
  青木学聡、瀬木利夫、松尾二郎
- Organizer
  第59回応用物理学会
- Place of Presentation
  早稲田大学
- Year and Date
  2012-03-16
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Arクラスターイオンを用いた直行加速飛行時間型SIMS分析2012
- Author(s)
  市木和弥、瀬木利夫、青木学総、田村淳、松尾二郎
- Organizer
  第59回応用物理学会
- Place of Presentation
  早稲田大学
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] SiエッチングにおけるClF_3クラスターの添加ガス効果2012
- Author(s)
  吉野裕、妹尾武彦、井上吾一、小池国彦、瀬木利夫、青木学聡、松尾二
- Organizer
  第59回応用物理学会
- Place of Presentation
  早稲田大学
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Ar-CH_3OH混合クラスタイオンビーム照射によるSi二次イオン放出2012
- Author(s)
  中川駿一郎、市木和弥、瀬木利夫、青木学聡、松尾二郎
- Organizer
  第59回応用物理学会
- Place of Presentation
  早稲田大学
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] ClF3 クラスターイオンビームによる反応性エッチング2012
- Author(s)
  瀬木利夫、吉野裕、妹尾武彦、小池国彦、青木学聡、松尾二郎
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  愛媛大学/松山大学
- Year and Date
  2012-09-13
- Data Source
  KAKENHI-PROJECT-22760557
[Presentation] “High-speed Processing with ClF3 Cluster Injection”2012
- Author(s)
  T. Seki
- Organizer
  IUMRS-International Conference on Electronic Materials
- Place of Presentation
  Yokohama, Japan
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] High-speed Processing with ClF3 Cluster Injection2012
- Author(s)
  T. Seki, Y. Yoshino, T. Senoo, K. Koike, T. Aoki, and J. Matsuo
- Organizer
  IUMRS-International Conference on Electronic Materials (IUMRS-ICEM 2012)
- Place of Presentation
  Yokohama, Japan
- Data Source
  KAKENHI-PROJECT-22760557
[Presentation] 高速重イオンプローブ集束用静電型四重極レンズの開発II2012
- Author(s)
  志戸本祥、瀬木利夫、青木学聡、松尾二郎
- Organizer
  第59回応用物理学会
- Place of Presentation
  早稲田大学
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] バブリング法によるメタノールクラスターイオンビーム生成2012
- Author(s)
  瀬木利夫、青木学聡、松尾二郎
- Organizer
  第59回応用物理学会
- Place of Presentation
  早稲田大学
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-22760557
[Presentation] “Development of MeV-SIMS imaging system with Electrostatic Quadrupole Lens”2012
- Author(s)
  T. Seki
- Organizer
  22nd International Conference on the Application of Accelerators in Research & Industry
- Place of Presentation
  Fort Worth, USA
- Invited
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] ArクラスターSIMSを用いた投影型質量イメージング2012
- Author(s)
  山本恭千、市木和弥、瀬木利夫、青木学聡、松尾二郎
- Organizer
  第59回応用物理学会
- Place of Presentation
  早稲田大学
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] バブリング法によるメタノールクラスターイオンビーム生成2012
- Author(s)
  瀬木利夫、青木学聡、松尾二郎
- Organizer
  第59回応用物理学会
- Place of Presentation
  早稲田大学
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] “Bio-imaging with Swift Heavy Ion Beams”2012
- Author(s)
  T. Seki
- Organizer
  19th International Mass Spectrometry Conference
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Arクラスターを用いた有機試料表面のイオンビーム照射損傷深さ評価2011
- Author(s)
  山本恭千、市木和弥、瀬木利夫、青木学聡、松尾二郎
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学
- Year and Date
  2011-09-01
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] The effects of cluster size and energy on sputtering with gas cluster ion beams2011
- Author(s)
  K.Ichiki, T.Seki, T.Aoki, J.Matsuo
- Organizer
  E-MRS Spring Meeting
- Place of Presentation
  Nice, France
- Year and Date
  2011-05-09
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Depth Profiling Analysis with Size-controlled Cluster Ion Beam2011
- Author(s)
  J.Matsuo, K.Ichiki, Y.Yamamoto, T.Seki, T.Aoki
- Organizer
  8th International Symposium on Atomic Level Characterizations for New Materials and Devices
- Place of Presentation
  Seoul, Korea
- Year and Date
  2011-05-24
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Cluster Beam Generation of Low Vapor Pressure Materials2011
- Author(s)
  T. Seki, Y. Yoshino, T. Senoo, K. Koike, T. Aoki and J. Matsuo
- Organizer
  21th MRS-J Symposium (International Session)
- Place of Presentation
  Yokohama, Japan
- Year and Date
  2011-12-20
- Data Source
  KAKENHI-PROJECT-22760557
[Presentation] Cluster Beam Generation of Low Vapor Pressure Materials2011
- Author(s)
  T.Seki, Y.Yoshino, T.Senoo, K.Koike, T.Aoki, T.Matsuo
- Organizer
  21th MRS-J Symposium (International Session)
- Place of Presentation
  神奈川県横浜市
- Year and Date
  2011-12-20
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Large-Seale Molecular Dynamics Simulation of Huge Fluorine Cluster Impact on Silicon2011
- Author(s)
  T.Aoki, T.Seki, J.Matsuo
- Organizer
  21th MRS-J Symposium (International Session)
- Place of Presentation
  神奈川県横浜市
- Year and Date
  2011-12-20
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Development of Electrostatic Quadrupole Lens for Focusing of Swift Heavy Ion2011
- Author(s)
  S.Shitomoto, Y.Wakamatsu, T.Seki, T.Aoki, T.Matsuo
- Organizer
  21th MRS-J Symposium (International Session)
- Place of Presentation
  神奈川県横浜市
- Year and Date
  2011-12-20
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Si Processing with Energetic Neutral Cluster Beam2011
- Author(s)
  T. Seki, Y. Yoshino, T. Senoo, K. Koike, T. Aoki and J. Matsuo
- Organizer
  E-MRS 2011 Spring Meeting
- Place of Presentation
  Nice, France
- Year and Date
  2011-05-09
- Data Source
  KAKENHI-PROJECT-22760557
[Presentation] Damage free sputtering with size-controlled cluster ion beam for material analysis2011
- Author(s)
  J.Matsuo, K.Ichiki, Y.Yamamoto, T.Seki, T.Aoki
- Organizer
  20th International Conference on Ion Beam Analysis
- Place of Presentation
  Itapema, Brazil
- Year and Date
  2011-04-13
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Bio-imaging technique with swift heavy ions -from single cells to t1 ssues-2011
- Author(s)
  J.Matsuo, Y.Wakamatsu, T.Aoki, T. Seki
- Organizer
  20th International Conference on Ion Beam Analysis
- Place of Presentation
  Itapema, Brazil
- Year and Date
  2011-04-15
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] A focused Ar cluster ion beam for molecular imaging2011
- Author(s)
  J.Matsuo, K.Ichiki, T.Yamanbe, Y.Yamamoto, T.Seki
- Organizer
  18th International Conference on Secondary Ion Mass Spectrometry (SIMS XVIII)
- Place of Presentation
  Trento, Itary
- Year and Date
  2011-09-23
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] 高融点材料の混合クラスタービーム生成2011
- Author(s)
  瀬木利夫、吉野裕、妹尾武彦、小池国彦、青木学聡、松尾二郎
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学
- Year and Date
  2011-09-01
- Data Source
  KAKENHI-PROJECT-22760557
[Presentation] Depth Profiling Technique and Molecular Imaging with Cluster SIMS -from Organic Thin Films and Single Cells-2011
- Author(s)
  J.Matsuo, K.Ichiki, S.Nakagawa, T.Seki, T.Aoki
- Organizer
  21th MRS-J Symposium (International Session)
- Place of Presentation
  神奈川県横浜市
- Year and Date
  2011-12-19
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Molecular dynamics study of species and structure effect on large cluster impact2011
- Author(s)
  T.Aoki, T.Seki, J.Matsuo
- Organizer
  E-MRS Spring Meeting
- Place of Presentation
  Nice, France
- Year and Date
  2011-05-09
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Ion-induced damage evaluation with Ar cluster ion beams2011
- Author(s)
  Y.Yamamoto, K.Ichiki, T.Seki, T.Aoki, T.Matsuo
- Organizer
  18th International Conference on Secondary Ion Mass Spectrometry (SIMS XVIII)
- Place of Presentation
  Trento, Itary
- Year and Date
  2011-09-22
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] クラスター生成とそのサイズ分布制御2011
- Author(s)
  中川駿一郎、市木和弥、瀬木利夫、青木学聡、松尾二郎
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学
- Year and Date
  2011-09-01
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Secondary ion emission from biomaterials with swift heavy ions : toward a novel application for bio-imaging2011
- Author(s)
  J.Matsuo, Y.Wakamatsu, T.Seki, T.Aoki
- Organizer
  16th International Conference on Radiation Effects in Insulators
- Place of Presentation
  Beijing, China
- Year and Date
  2011-08-17
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Si Processing with Energetic Neutral Cluster Beam2011
- Author(s)
  T.Seki, Y.Yoshino, T.Senoo, K.Koike, T.Aoki, T.Matsuo
- Organizer
  E-MRS Spring Meeting
- Place of Presentation
  Nice, France
- Year and Date
  2011-05-09
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Cluster Beam Generation of Low Vapor Pressure Materials2011
- Author(s)
  Toshio Seki
- Organizer
  21th MRS-J Symposium
- Place of Presentation
  Yokohama, Japan
- Year and Date
  2011-12-20
- Data Source
  KAKENHI-PROJECT-22760557
[Presentation] The effect of size variation in sputtering with size-selected cluster ion beams2011
- Author(s)
  J.Matsuo, K.Ichiki, T.Seki, T.Aoki
- Organizer
  18th International Conference on Secondary Ion Mass Spectrometry (SIMS XVIII)
- Place of Presentation
  Trento, Itary
- Year and Date
  2011-09-23
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] The Effect of Size Variation in Sputtering with Size-Selected Cluster Ion Beams2011
- Author(s)
  T. Seki, K. Ichiki, J. Tamura, T. Aoki and J. Matsuo
- Organizer
  11th Workshop on Cluster Ion Beam Technology
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2011-12-05
- Data Source
  KAKENHI-PROJECT-22760557
[Presentation] 高融点材料の混合クラスタービーム生成2011
- Author(s)
  瀬木利夫、吉野裕、妹尾武彦、小池国彦、青木学聡、松尾二郎
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学
- Year and Date
  2011-09-01
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] 大電流密度ガスクラスターイオンビームのサイズ選別照射VIII2011
- Author(s)
  市木和弥、瀬木利夫、青木学聡、松尾二郎
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学
- Year and Date
  2011-09-01
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Secondary Molecular Ion Emission with Swift Heavy Ions : A Novel Imaging Technique for Biological Applications2011
- Author(s)
  J.Matsuo, Y.Wakamatsu, T.Aoki, T.Seki
- Organizer
  E-MRS Spring Meeting
- Place of Presentation
  Nice, France
- Year and Date
  2011-05-11
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] ClF_3クラスター・インジェクションによるSiエッチング(IV)2011
- Author(s)
  吉野裕、妹尾武彦、小池国彦、瀬木利夫、青木学聡、松尾二郎
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学
- Year and Date
  2011-09-02
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] 高速重イオンプローブ集束用静電型四重極レンズの開発2011
- Author(s)
  志戸本祥、若松慶信、瀬木利夫、青木学聡、松尾二郎
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学
- Year and Date
  2011-09-01
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] Etching Characteristics with Ar-Cl2 Gas Mixed Cluster Ion Beam2010
- Author(s)
  T. Seki, T. Aoki and J. Matsuo
- Organizer
  10th Workshop on Cluster Ion Beam Technology
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2010-06-14
- Data Source
  KAKENHI-PROJECT-22760557
[Presentation] 複合クラスター生成技術の開発2010
- Author(s)
  瀬木利夫,青木学聡,松尾二郎
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学
- Year and Date
  2010-09-16
- Data Source
  KAKENHI-PROJECT-22760557
[Presentation] 複合クラスター生成技術の開発2010
- Author(s)
  瀬木利夫
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎
- Year and Date
  2010-09-16
- Data Source
  KAKENHI-PROJECT-22760557
[Presentation] High-speed Si etching with ClF3 neutral cluster beam2010
- Author(s)
  T. Seki, Y. Yoshino, T. Senoo, K. Koike, T. Aoki and J. Matsuo
- Organizer
  20th MRS-J Symposium (International Session)
- Place of Presentation
  Yokohama, Japan
- Year and Date
  2010-12-22
- Data Source
  KAKENHI-PROJECT-22760557
[Presentation] High-speed Si etching with ClF_3 neutral cluster beam2010
- Author(s)
  瀬木利夫
- Organizer
  20th MRS-J Symposium
- Place of Presentation
  横浜
- Year and Date
  2010-12-22
- Data Source
  KAKENHI-PROJECT-22760557
[Presentation] Etching Characteristics with Ar-Cl2 Gas Mixed Cluster Ion Beam2010
- Author(s)
  瀬木利夫
- Organizer
  10th Workshop on Cluster Ion Beam Technology
- Place of Presentation
  京都
- Year and Date
  2010-06-14
- Data Source
  KAKENHI-PROJECT-22760557
[Presentation] 塩素ガスクラスターイオンビームによるスパッタ率のクラスターサイズ依存性2009
- Author(s)
  瀬木利夫、青木学聡、松尾二郎
- Organizer
  2008年春季第56回応用物理学関係連合講演会
- Place of Presentation
  筑波大学
- Year and Date
  2009-03-30
- Data Source
  KAKENHI-PROJECT-18681014
[Presentation] Investigation of Damage with Cluster Ion Beam Irradiation2008
- Author(s)
  T. Seki, T. Aoki and J. Matsuo
- Organizer
  17th International Conference on Ion Implantation Technology
- Place of Presentation
  California, USA
- Year and Date
  2008-06-12
- Data Source
  KAKENHI-PROJECT-18681014
[Presentation] 塩素ガズクラスターイオンビームによる高速加工2008
- Author(s)
  瀬木利夫
- Organizer
  第9回京都学大学院工学研究科附属量子理工学研九実験センター公開シンポジウム
- Place of Presentation
  京都大学
- Year and Date
  2008-10-17
- Data Source
  KAKENHI-PROJECT-18681014
[Presentation] 塩素ガスクラスターイオンビームによる金属材料エッチング特性2008
- Author(s)
  瀬木利夫、青木学聡、松尾二郎
- Organizer
  2008年春季第55回応用物理学関係連合講演会
- Place of Presentation
  日本大学船橋キャンパス
- Year and Date
  2008-03-29
- Data Source
  KAKENHI-PROJECT-18681014
[Presentation] High-speed processing with Cl_2 cluster ion beam2008
- Author(s)
  T. Seki, T. Aoki and J. Matsuo
- Organizer
  16th International Conference on Ion Beam Modification of Materials
- Place of Presentation
  Dresden, Germany
- Year and Date
  2008-09-03
- Data Source
  KAKENHI-PROJECT-18681014
[Presentation] Investigation of Damage with Cluster Ion Beam Irradiation2008
- Author(s)
  Toshio Seki
- Organizer
  17th international Conference on Ion Implantation Technology
- Place of Presentation
  California, USA
- Year and Date
  2008-06-12
- Data Source
  KAKENHI-PROJECT-18681014
[Presentation] 塩素ガスクラスターイオンビームによる高速加工2008
- Author(s)
  瀬木利夫、青木学聡、松尾二郎
- Organizer
  第9回京都大学大学院工学研究科附属量子理工学研究実験センター公開シンポジウム
- Place of Presentation
  京都大学
- Year and Date
  2008-10-17
- Data Source
  KAKENHI-PROJECT-18681014
[Presentation] Etching Characteristics with Ar-Cl_2 Gas Mixed Cluster Ion Beam2008
- Author(s)
  T. Seki, T. Aoki and J. Matsuo
- Organizer
  The IUMRS International Conference in Asia
- Place of Presentation
  Nagoya Congress Center, Japan
- Year and Date
  2008-12-11
- Data Source
  KAKENHI-PROJECT-18681014
[Presentation] Etching Characteristics with Ar-Cl_2 Gas Mixed Cluster Ion Beam?2008
- Author(s)
  Toshio Seki
- Organizer
  The IUMRS International Conference in Asia
- Place of Presentation
  Nagoya Congress Center, Japan
- Year and Date
  2008-12-11
- Data Source
  KAKENHI-PROJECT-18681014
[Presentation] High-Speed Nano-Processing with Cluster Ion Beams2007
- Author(s)
  T. Seki, T. Aoki, J. Matsuo
- Organizer
  MRS-J 2007 Symposium
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2007-12-09
- Data Source
  KAKENHI-PROJECT-18681014
[Presentation] 塩素ガスクラスターイオンビームの生成2007
- Author(s)
  瀬木利夫, 青木学聡, 松尾二郎
- Organizer
  第68回応用物理学会学術講演会
- Place of Presentation
  北海道工業大学
- Data Source
  KAKENHI-PROJECT-18681014
[Presentation] Nano-processing with gas cluster ion beams2007
- Author(s)
  Toshio Seki
- Organizer
  15th International Conference on Surface Modification of Materials by Ion Beams
- Place of Presentation
  Mumbai, India
- Data Source
  KAKENHI-PROJECT-18681014
[Presentation] High-Speed Nano-Processing with Reactive Cluster Ion Beam2007
- Author(s)
  T. Seki, T. Aoki and J. Matsuo
- Organizer
  8th Workshop on Cluster Ion Beam Technology
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2007-11-09
- Data Source
  KAKENHI-PROJECT-18681014
[Presentation] Nano-processing with gas cluster ion beams2007
- Author(s)
  T. Seki
- Organizer
  15^<th> International Conference on Surface Modification of Materials by Ion Beams
- Place of Presentation
  Mumbai, India
- Data Source
  KAKENHI-PROJECT-18681014
[Presentation] "ClF3 クラスターイオンビームによる反応性エッチング"
- Author(s)
  瀬木利夫
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  愛媛大学/松山大学
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] “Development of MeV SIMS Instrumentation and application at Kyoto”
- Author(s)
  Toshio Seki
- Organizer
  Joint IAEA-SPIRIT-Japan Technical Meeting on Development and Utilization of MeV SIMS
- Place of Presentation
  Dubrovnik, Croatia
- Invited
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] ClF3中性クラスタービームによる反応性エッチングの高速化
- Author(s)
  瀬木利夫
- Organizer
  第60回応用物理学会学術講演会
- Place of Presentation
  神奈川工科大学
- Data Source
  KAKENHI-PROJECT-22760557
[Presentation] “An Electrostatic Quadrupole Lens for Focusing Swift Heavy Ions in MeV-SIMS”
- Author(s)
  T. Seki
- Organizer
  25th International Conference on Atomic Collisions in Solids
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] “An Electrostatic Quadrupole Lens for Focusing Swift Heavy Ions in MeV-SIMS”
- Author(s)
  T. Seki
- Organizer
  13th International Conference On Nuclear Microprobe Technology & Applications
- Place of Presentation
  Lisbon, Portgue
- Data Source
  KAKENHI-PROJECT-23246012
[Presentation] ClF3 クラスターイオンビームによる反応性エッチング
- Author(s)
  瀬木利夫
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  愛媛大学/松山大学
- Data Source
  KAKENHI-PROJECT-22760557
[Presentation] “An Electrostatic Quadrupole Lens for Focusing Swift Heavy Ions in MeV-SIMS”
- Author(s)
  T. Seki
- Organizer
  The International Symposium on SIMS and Related Techniques Based on Ion-Solid Interactions at Seikei University
- Place of Presentation
  Seikei Univ., Tokyo
- Data Source
  KAKENHI-PROJECT-23246012

1. MATSUO Jiro (40263123)

# of Collaborated Projects: 2 results

# of Collaborated Products: 140 results
2. AOKI Takaaki (90402974)

# of Collaborated Projects: 2 results

# of Collaborated Products: 128 results
3. 宮田潔志

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
4. 羽田真毅

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results

Seki Toshio 瀬木 利夫

SEKI Toshio 瀬木 利夫

Research Projects

Research Products

Co-Researchers

Ambient SIMS Technique for Liquid-Solid Interface Analysis

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Development of surface process technology with high speed and no damage by huge composite clusterPrincipal Investigator

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Development of analytical technique for organic materials with massive cluster ion beams

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Development of Nano-scale structure design and process technology by advanced composite cluster beamPrincipal Investigator

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Generation of nano-scale structure controlled composite cluster beamPrincipal Investigator

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[Journal Article] MeV-SIMS measurement of lithium-containing electrolyte2020

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[Journal Article] Secondary ion mass spectrometry measurements under ambient and humid conditions using MeV ions2020

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[Journal Article] Development of Atmospheric Pressure MeV-SIMS and Solid–Liquid Interface Analysis2020

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[Journal Article] Phonon transport probed at carbon nanotube yarn/sheet boundaries by ultrafast structural dynamics2020

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[Journal Article] Selective Reduction Mechanism of Graphene Oxide Driven by the Photon Mode versus the Thermal Mode2019

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[Journal Article] Optimized Alkali-Metal Cationization in Secondary Ion Mass Spectrometry of Polyethylene Glycol Oligomers with up to m/ z 10000: Dependence on Cation Species and Concentration2019

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[Journal Article] Gas cooling secondary ions emitted by gas cluster ion beam at the travelling-wave ion guide of a Q-ToF-SIMS system2019

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[Journal Article] Cluster ion beam bombardment and Q-ToF-SIMS analysis of large biomolecules2019

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[Journal Article] Recent Progress of SIMS Technique : from Novel Primary Beams to Advanced Mass Spectrometers2018

Author(s)

Seki Toshio 瀬木利夫

SEKI Toshio 瀬木利夫