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Ishihara Sunao  石原 直

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ISHIHSRA Sunao  石原 直

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Researcher Number 00422329
Other IDs
Affiliation (Current) 2025: 東京大学, 大学院工学系研究科(工学部), 名誉教授
Affiliation (based on the past Project Information) *help 2010 – 2012: The University of Tokyo, 工学(系)研究科(研究院), 教授
2007 – 2012: The University of Tokyo, 大学院・工学系研究科, 教授
Review Section/Research Field
Principal Investigator
Production engineering/Processing studies
Except Principal Investigator
Production engineering/Processing studies
Keywords
Principal Investigator
ナノ加工・ナノ計測 / 電子ビーム・イオンビーム / 機械共振特性 / ナノ計測 / センシングデバイス / ナノ振動子 / ナノメカニクス / ナノ・マイクロデバイス / ナノメカニカル振動子 / ナノ計測・ナノ加工 … More / NEMS / ナノマイクロ加工 / 高Q値 / 機械特性評価 / 微小共振器 / 自己組織化 / 機械共振特性評価 / センシング / ナノレゾネータ / ナノ加工・計測 / マイクロ・ナノデバイス / 電子ビーム・イオンビーム加工 / 機械振動共振特性 / ナノ加工 / 三次元ナノ構造 … More
Except Principal Investigator
ナノメカニクス / 薄膜形成 / FIB-CVD / 基板処理 / 光学多層膜 / プラズモン共鳴 / メカニカル振動子 / 自由膜 / 多層膜 / テンプレート / 集束イオンビーム化学気相成長法 / ブロック共重合体 / 三次元ナノ構造 / 自己組織化 / ナノ・マイクロ加工 Less
  • Research Projects

    (3 results)
  • Research Products

    (239 results)
  • Co-Researchers

    (4 People)
  •  Creation and Characterization of Nanomechanical Structures andits Applications to DevicesPrincipal Investigator

    • Principal Investigator
      ISHIHARA Sunao
    • Project Period (FY)
      2010 – 2012
    • Research Category
      Grant-in-Aid for Scientific Research (S)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      The University of Tokyo
  •  Three dimensional nanostructure fabrication technology using self-assemble phenomena

    • Principal Investigator
      WARISAWA Shinichi
    • Project Period (FY)
      2009 – 2011
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      The University of Tokyo
  •  Nanostructure creation and its functionalizationPrincipal Investigator

    • Principal Investigator
      ISHIHSRA Sunao
    • Project Period (FY)
      2007 – 2010
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      The University of Tokyo

All 2013 2012 2011 2010 2009 2008 2007

All Journal Article Presentation Patent

  • [Journal Article] ナノエレクトロメカニカルシステム(NEMS) のセンサ応用2012

    • Author(s)
      石原 直
    • Journal Title

      応用物理

      Volume: 81 Pages: 21-21

    • NAID

      10030158115

    • URL

      http://www.jsap.or.jp/ap/2012/01/ob810021.xml

    • Data Source
      KAKENHI-PROJECT-22226004
  • [Journal Article] ナノエレクトロメカニカルシステム(NEMS)のセンサ応用2012

    • Author(s)
      石原 直
    • Journal Title

      応用物理

      Volume: 81 Pages: 21-25

    • NAID

      10030158115

    • Data Source
      KAKENHI-PROJECT-22226004
  • [Journal Article] Nanomechanical tuning forks fabricated using focused-ion-beam chemical vapor deposition2012

    • Author(s)
      Hiroki Ashiba
    • Journal Title

      Journal of Vacuum Science and Technology B

      Volume: 30 Issue: 6

    • DOI

      10.1116/1.4766315

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-12J08898, KAKENHI-PROJECT-22226004, KAKENHI-PROJECT-23760025
  • [Journal Article] Three-Dimensional Nanostructure Fabrication by Controlling Downward Growth on Focused-Ion-Beam Chemical Vapor Deposition2012

    • Author(s)
      D. Guo, R. Kometani, S. Warisawa, and S.Ishihara
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: 51 Issue: 6R Pages: 65001-65001

    • DOI

      10.1143/jjap.51.065001

    • NAID

      40019317176

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226004, KAKENHI-PROJECT-23760025
  • [Journal Article] High Quality Factor Graphene Resonator Fabrication Using Resist Shrinkage-Induced Strain2012

    • Author(s)
      Y. Oshidari, T. Hatakeyama, R. Kometani, S.Warisawa, S. Ishihara
    • Journal Title

      Appl. Phys. Express

      Volume: 5 Issue: 11 Pages: 117201-117201

    • DOI

      10.1143/apex.5.117201

    • NAID

      10031126464

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226004, KAKENHI-PROJECT-22656035, KAKENHI-PROJECT-23760025
  • [Journal Article] A Nanomechanical Resonator from HSQ Fabricated by FIB/EB Dual Beam Lithography2012

    • Author(s)
      S. Warisawa, K. Kuroda, S. Chen, R.Kometani, S. Ishihara
    • Journal Title

      J. Photopolym. Sci. Technol

      Volume: 25 Pages: 37-37

    • NAID

      130004464942

    • Data Source
      KAKENHI-PROJECT-22226004
  • [Journal Article] Motion detection of a micro- mechanical cantilever through magneto- piezovoltage in two-dimensional electron systems2012

    • Author(s)
      H. Yamaguchi, H. Okamoto, S. Ishihara and Y.Hirayama
    • Journal Title

      Appl. Phys. Lett

      Volume: 100 Issue: 1 Pages: 12106-12106

    • DOI

      10.1063/1.3674288

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226004, KAKENHI-PROJECT-23241046
  • [Journal Article] A Nanomechanical Resonator from HSQ Fabricated by FIB/EB Dual Beam Lithography2012

    • Author(s)
      S. Warisawa, K. Kuroda, S. Chen, R. Kometani, S. Ishihara
    • Journal Title

      J. Photopol. Sci. Technol.

      Volume: 25 Issue: 1 Pages: 37-42

    • DOI

      10.2494/photopolymer.25.37

    • NAID

      130004464942

    • ISSN
      0914-9244, 1349-6336
    • Language
      English
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226004, KAKENHI-PROJECT-22656035, KAKENHI-PROJECT-23760025
  • [Journal Article] Nanoporous Structure Fabrication in Selective Areas by Block Copolymer Self-Assembly and Electron Beam Lithography2012

    • Author(s)
      H. Suzuki, R. Kometani, S. Ishihara, S. Warisawa
    • Journal Title

      J. Photopol. Sci. Technol.

      Volume: 25 Issue: 1 Pages: 33-36

    • DOI

      10.2494/photopolymer.25.33

    • NAID

      130004464941

    • ISSN
      0914-9244, 1349-6336
    • Language
      English
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Journal Article] High-sensitivity charge detection using antisymmetric vibration in coupled micromechanical oscillators2011

    • Author(s)
      H. Okamoto, N. Kitajima, K. Onomitsu, R.Kometani, S. Warisawa, S. Ishihara and H.Yamaguchi
    • Journal Title

      Appl. Phys. Lett

      Volume: 98 Issue: 1 Pages: 14103-14103

    • DOI

      10.1063/1.3541959

    • Data Source
      KAKENHI-PROJECT-22226004
  • [Journal Article] Gradually shifting surface plasmon resonance by controlling the diameter of a nano-hole structure by self-assembly2011

    • Author(s)
      T.Takagi, K.Kurihara, K.Awazu, R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      Journal of Vacuum Science and Technology B

      Volume: 29 Issue: 6 Pages: 06FF03-06FF03

    • DOI

      10.1116/1.3660387

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21360059, KAKENHI-PROJECT-22226004
  • [Journal Article] Dynamic characteristics control of DLC nano-resonator fabricated by focused-ion-beam chemical vapor depo- sition2011

    • Author(s)
      R. Kometani, S. Nishi, S. Warisawa, and S.Ishihara
    • Journal Title

      J. Vac. Sci. Technol. B

      Volume: 29 Issue: 6

    • DOI

      10.1116/1.3662493

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226004, KAKENHI-PROJECT-23760025
  • [Journal Article] Gradually shifting surface plasmon resonance by controlling the diameter of a nano-hole structure by self-assembly2011

    • Author(s)
      T. Takagi, R. Kometani, S. Ishihara, S. Warisawa
    • Journal Title

      J. Vac. Sci. Technolo. B

      Volume: 29

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21360059
  • [Journal Article] Electromechanical Displacement Detection With an On-chip High Electron Mobility Transistor Amplifier2011

    • Author(s)
      Y. Oda, K. Onomitsu, R. Kometani, S.Warisawa, S. Ishihara, and H. Yamaguchi
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: 50 Issue: 6S Pages: 06GJ01-06GJ01

    • DOI

      10.1143/jjap.50.06gj01

    • NAID

      210000070732

    • Data Source
      KAKENHI-PROJECT-22226004
  • [Journal Article] High-sensitivity charge detection using antisymmetric vibration in coupled micromechanical oscillators2011

    • Author(s)
      H.Okamoto, N.Kitajima, K.Onomitsu, R.Kometani, S.Warisawa, S.Ishihara, H.Yamaguchi
    • Journal Title

      Applied Physics Letters

      Volume: 98

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Journal Article] Quality factor enhancement on nanomechanical resonators utilizing stiction phenomena2011

    • Author(s)
      H. Ashiba, R. Kometani, S. Warisawa, and S.Ishihara
    • Journal Title

      J. Vac. Sci. Technol. B

      Volume: 29 Issue: 6

    • DOI

      10.1116/1.3660384

    • Data Source
      KAKENHI-PROJECT-22226004
  • [Journal Article] Carbon nano- mechanical resonator fabrication from PMMA by FIB/electron-beam dual-beam lithography2011

    • Author(s)
      R. Kometani, T. Hatakeyama, K. Kuroda, S.Warisawa, and S. Ishihara
    • Journal Title

      J. Vac. Sci. Technol. B

      Volume: 29 Issue: 6

    • DOI

      10.1116/1.3662083

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226004, KAKENHI-PROJECT-23760025
  • [Journal Article] Selective graphene growth from DLC thin film patterned by focused-ion-beam chemical vapor deposition2011

    • Author(s)
      T. Hatakeyama, R. Kometani, S. Warisawa, and S. Ishihara
    • Journal Title

      Journal of Vacuum Science and Technology B

      Volume: 29 Issue: 6 Pages: 06FG04-06FG04

    • DOI

      10.1116/1.3655581

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226004, KAKENHI-PROJECT-22656035
  • [Journal Article] Non-Core-Shell Nanostructure Deposition on Focused-Ion-Beam Chemical-Vapor-Deposition2010

    • Author(s)
      R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 49

    • NAID

      210000068637

    • Data Source
      KAKENHI-PROJECT-22226004
  • [Journal Article] Nanostructure fabrication by self-assembly of block copolymers on three-dimensional diamond-like carbon structures2010

    • Author(s)
      H.Mino, R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      Journal of Vaccum Science and Technology B

      Volume: 28(6)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Journal Article] Dynamic Characteristics Design System for 3D Nanostructure Fabricated by FIB-CVD2010

    • Author(s)
      S.Nishi, R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      J.Adv.Mech.Des.Sys.Man. 4

      Pages: 948-948

    • NAID

      130000335368

    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] The 3D nanostructure growth evaluations by the real-time current monitoring on focusedion-beam chemical vapor deposition2010

    • Author(s)
      R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      Microelectronic Eng. 87

      Pages: 1044-1048

    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] The 3D nanostructure growth evaluations by the real-time current monitoring on focused-ion-beam chemical vapor deposition2010

    • Author(s)
      R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      Microelectronic Engineering

      Volume: 87 Pages: 1044-1048

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Journal Article] Evaluation of Resonance Characteristics Change of Silicon Resonators Due to Surface Treatment2010

    • Author(s)
      H.Shimizu, J.-J.Delaunay, R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      Jpn.J.Appl.Phys. 49

    • NAID

      210000068736

    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] Piezoresistive effect in the three-dimensional diamondlike carbon nanostructure fabricated by focused-ion-beam chemical vapor deposition2010

    • Author(s)
      R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      J.Vac.Sci.Technol.B 28

    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] Direct Actuation of GaAs Membrane Resonator by Scanning Probe2010

    • Author(s)
      M.Nagase, K.Tamaru, K.Nonaka, S.Warisawa, S.Ishihara, H.Yamaguchi
    • Journal Title

      NTT Technical Review

      Volume: 8(8) Pages: 1-7

    • Data Source
      KAKENHI-PROJECT-22226004
  • [Journal Article] Dynamic Characteristics Design System for 3D Nanostructure Fabricated by FIB-CVD2010

    • Author(s)
      S.Nishi, R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      Journal of Advanced Mechanical Design, Systems, and Manufacturing

      Volume: 4(5) Pages: 958-954

    • NAID

      130000335368

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Journal Article] Piezoresistive effect in the three-dimensional diamondlike carbon nanostructure fabricated by focused-ion-beam chemical vapor deposition2010

    • Author(s)
      R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      Journal of Vaccum Science and Technology B

      Volume: 28(6)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Journal Article] Nanostructure fabrication by self-assembly of block copolymers on three-dimensional diamond-like carbon structures2010

    • Author(s)
      H. Mino, R. Kometani, S. Warisawa, S. Ishihara
    • Journal Title

      J. Vac. Sci. Technol. B

      Volume: 20

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21360059
  • [Journal Article] Evaluation of Resonance Characteristics Change of Silicon Resonators Due to Surface Treatment2010

    • Author(s)
      H.Shimizu, J.-J.Delaunay, R.Kometani, S.Warisawa, S.Ishihara
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 49

    • NAID

      210000068736

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Journal Article] Growth characteristics evaluations on the 3D nansotructure fabrication by the high accuracy control of focused-ion-beam2009

    • Author(s)
      米谷玲皇, T.Hoshino, 割澤伸一, 石原直
    • Journal Title

      Microelectronic Engineering 86

      Pages: 552-555

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] Evaluating Method for Quality Factor of Nano-resonator by Electron Beam2009

    • Author(s)
      H.Ashiba, S.Warisawa, S.Ishihara
    • Journal Title

      Jpn.J.Appl.Phys. 48

    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] Nanoelectromechanical device fabrications by 3-D nanotechnology using focused-ion beams2009

    • Author(s)
      R.Kometani, S.Ishihara
    • Journal Title

      Sci.Technol.Adv.Mater. 10

    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] Direct Actuation of GaAs Membrane with the Microprobe of Scanning Probe Microscopy2009

    • Author(s)
      K.Tamaru, K.Nonaka, M.Nagase, H.Yamaguchi, 割澤伸一, 石原直
    • Journal Title

      Japanese Journal of Applied Physics 48

    • NAID

      210000066954

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] Evaluations of the hopping growth characteristics on 3-D nanostructure fabrication using focused-ion-beam2009

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Journal Title

      Journal of Vacuum Science and Technology B27

      Pages: 2698-2701

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] The fabrication of aligned pairs of gold nanowires in SO2 films by ion irradiation2009

    • Author(s)
      K.Awazu, X.Wang, T.Komatsubara, J.Watanabe, Y.Matsumoto, 割澤伸一, 石原直
    • Journal Title

      Nanotechnology 20

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] Evaluations of the hopping growth characteristics on 3-D nanostructure fabrication using focused-ion-beam2009

    • Author(s)
      R. Kometani, S. Warisawa, S. Ishihara
    • Journal Title

      J.Vac.Sci.Technol. B27

      Pages: 2698-2701

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] Evaluation of Thermal-mechanical Vibration Amplitude and Mechanical Properties for Carbon Nanopillars Using Scanning Electron Microscopy2009

    • Author(s)
      K.Nonaka, K.Tamaru, M.Nagase, H.Yamaguchi, S.Warisawa, S.Ishihara
    • Journal Title

      Jpn.J.Appl.Phys. 48

    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] Evaluating Method for Quality Factor of Nano-resonator by Electron Beam2009

    • Author(s)
      H.Ashiba, 割澤伸一, 石原直
    • Journal Title

      Japanese Journal of Applied Physics 48

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] Graphite Shell Film Formation Induced by Eduction Phenomenon of Ga Implanted by Focused Ion Beam2009

    • Author(s)
      米谷玲皇, T.Ichihashi, 割澤伸一, 石原直
    • Journal Title

      Japanese Journal of Applied Physics 48

    • NAID

      210000066925

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] Evaluation of Thermal-mechanical Vibration Amplitude and Mechanical Properties for Carbon Nanopillars Using Scanning Electron Microscopy2009

    • Author(s)
      K.Nonaka, K.Tamaru, M.Nagase, H.Yamaguchi, 割澤伸一, 石原直
    • Journal Title

      Japanese Journal of Applied Physics 48

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] Direct Actuation of GaAs Membrane with the Microprobe of Scanning Probe Microscopy2009

    • Author(s)
      K. Tamaru, K. Nonaka, M. Nagase, H. Yamaguchi, S. Warisawa, S. Ishihara
    • Journal Title

      Jpn.J.Appl.Phys. 48

    • NAID

      210000066954

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] Direct Actuation of GaAs Membrane with the Microprobe of Scanning Probe Microscopy2009

    • Author(s)
      K.Tamaru, K.Nonaka, M.Nagase, H.Yamaguchi, S.Warisawa, S.Ishihara
    • Journal Title

      Jpn.J.Appl.Phys. 48

    • NAID

      210000066954

    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] Nanoelectromechanical device fabrications by 3-D nantechnology using focused-ionbeams2009

    • Author(s)
      R.Komentani, 石原直
    • Journal Title

      Science and Technology of Advanced Materials 10

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] Evaluating Method for Quality Factor of Nano-resonator by Electron Beam2009

    • Author(s)
      H. Ashiba, S. Warisawa, S. Ishihara
    • Journal Title

      Jpn.J.Appl.Phys. 48

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] Height dependence of Young's Modulus for Carbon Nanopillars Grown by Focused-Ion-Beam-Induced Chemical Vapor Deposition2008

    • Author(s)
      K. Nonaka, K. Tamaru, M. Nagase, H. Yamaguchi, S. Warisawa and S. Ishihara
    • Journal Title

      Japanese Journal of Applied Physics Vol. 47, No. 6

      Pages: 5116-5119

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] Height dependence of Young's Modulus for Carbon Nanopillars Grown by Focused Ion Beam Induced Chemical Vapor Deposition2008

    • Author(s)
      K.Nonaka, K.Tamaru, M.Nagase, H.Yamaguchi, S.Warisawa, S.Ishihara
    • Journal Title

      Jpn.J.Appl.Phys. 47

      Pages: 5116-5119

    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] In-Situ Observation of the Three-Dimensional Nano-Structure Growth on Focused-Ion-Beam Chemical Vapor Deposition by Scanning Electron Microscope2008

    • Author(s)
      R. Kometani, S. Ishihara, T. Kaito and S. Matsui
    • Journal Title

      Applied Physics Express Vol. 1

    • NAID

      10025080476

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] Improved resonance characteristics of GaAs beam resonators by epitaxially induced strain2008

    • Author(s)
      H.Yamaguchi, K.Kato, Y.Nakai, K.Onomitsu, S.Warisawa, S.Ishihara
    • Journal Title

      App.Phys.Lett. 92

    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] Height dependence of Young's Modulus for Carbon Nanopillhrs Grown by Focused-Ion-Beam-lnduced Chemical Vapor Deposition2008

    • Author(s)
      Keiichiro NONAKA, Kojiro TAMARU, Masao NAGASE, Hiroshi YAMAGUCHI, Shin'ichi WARISAWA, Sunao ISHIHARA
    • Journal Title

      Japanese Journal of Applied Physics (掲載確定)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] Improved resonance characteristics of GaAs beam resonators by epitaxially induced strain2008

    • Author(s)
      H. Yamaguchi, K. Kaito, Y. Nakai, K, Onomitsu, S. Warisawa and S. Ishihara
    • Journal Title

      Applied Physics Letters Vol. 92

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] Improved resonance characteristics of GaAs beam resonators by epitaxially induced strain2008

    • Author(s)
      H. Yamaguchi, K. Kato, Y. Nakai, K. Onomitsu, S. Warisawa, S. Ishihara
    • Journal Title

      App.Phys.Lett. 92

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] Eduction Position Control of Incorporated Gallium in the Diamond-like Carbon Deposited by Focused-Ion-Beam Chemical Vapor Deposition2008

    • Author(s)
      R. Kometani, S. Ishihara, K. Kanda, Y. Haruyama, T. Kaito and S. Matsui
    • Journal Title

      Japanese Journal of Applied Physics Vol. 47, No. 6

      Pages: 5032-5035

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] Resistivity change of the diamondlike carbon, deposited by focusedion-beam Chemical vapor deposition, induced by the annealing treatmen2008

    • Author(s)
      R. Kometani, T. Ichihashi, K. Kanda, T. Suzuki, K, Niihara, S. Ishihara, T. Kaito and S. Matsui
    • Journal Title

      Journal of Vacuum Science and Technology B26, 6

      Pages: 2628-2631

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Journal Article] Giant magneto-piezoresistance and internal friction in a two-dimensional electron system2007

    • Author(s)
      H. Yamaguchi, H. Okamoto, Y. Maruta, S. Ishihara, S. Miyashita, and Y. Hirayama
    • Journal Title

      Part 2 Express Letter, Japanese Journal of Applied Physics 46,27

    • NAID

      210000064035

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Patent] 微小共振器およびその製造方法2012

    • Inventor(s)
      山口浩司、小野満恒二、加藤慶一、石原 直、割沢伸一
    • Industrial Property Rights Holder
      日本電信電話株式会社、東京大学
    • Acquisition Date
      2012-07-06
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Patent] 超伝導回路の作製方法2012

    • Inventor(s)
      米谷玲皇,代俊,割澤伸一,石原 直,小野満恒二,山口浩司
    • Industrial Property Rights Holder
      東京大学、日本電信電話株式会社
    • Industrial Property Number
      2012-187329
    • Filing Date
      2012-08-28
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Patent] 微小構造物の製造装置、及び製造方法2012

    • Inventor(s)
      米谷玲皇, 郭登極,割澤伸一,石原直
    • Industrial Property Rights Holder
      東京大学
    • Industrial Property Number
      2012-018557
    • Filing Date
      2012-10-01
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Patent] 微小構造物の製造装置、及び製造方法2012

    • Inventor(s)
      米谷玲皇、郭登極、割澤伸一、石原直
    • Industrial Property Rights Holder
      米谷玲皇、郭登極、割澤伸一、石原直
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-018557
    • Filing Date
      2012-10-01
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Patent] 超伝導回路の作製方法2012

    • Inventor(s)
      米谷玲皇、代俊、割澤伸一、石原 直,小野満恒二,山口浩司
    • Industrial Property Rights Holder
      米谷玲皇、代俊、割澤伸一、石原 直,小野満恒二,山口浩司
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-187329
    • Filing Date
      2012-08-28
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Patent] 微小機械振動子とその製造方法2011

    • Inventor(s)
      西駿次郎,米谷玲皇,割澤伸一,石原 直,山口浩司
    • Industrial Property Rights Holder
      東京大学,日本電信電話株式会社
    • Industrial Property Number
      2011-111521
    • Filing Date
      2011-05-18
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Patent] 微小機械振動子とその製造方法2011

    • Inventor(s)
      西駿次郎、米谷玲皇、割澤伸一、石原直、山口浩司
    • Industrial Property Rights Holder
      西駿次郎、米谷玲皇、割澤伸一、石原直、山口浩司
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2011-111521
    • Filing Date
      2011-05-18
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Patent] 微小機械振動子の製造方法および微小 機械振動子2011

    • Inventor(s)
      芦葉裕樹,米谷玲皇,石原 直,割澤伸 一,山口浩司
    • Industrial Property Rights Holder
      東京大学、日本電信電話株式会社
    • Industrial Property Number
      2011-111517
    • Filing Date
      2011-05-18
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Patent] 微小機械振動子の製造方法および微小機械振動子2011

    • Inventor(s)
      芦葉裕樹、米谷玲皇、石原直、割澤伸一、山口浩司
    • Industrial Property Rights Holder
      芦葉裕樹、米谷玲皇、石原直、割澤伸一、山口浩司
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2011-111517
    • Filing Date
      2011-05-18
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Patent] 微小構造体の製造方法2010

    • Inventor(s)
      米谷玲呈,石原直, 割澤伸一, 黒田耕平, 山口浩司, 永瀬雅夫, 岡本創
    • Industrial Property Rights Holder
      東京大学,日本電信電話(株)
    • Filing Date
      2010-06-22
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Patent] 微小構造体の作製方法2010

    • Inventor(s)
      米谷玲呈,石原直, 割澤伸一, 遊佐幸樹, 山口浩司, 永瀬雅夫, 岡本創
    • Industrial Property Rights Holder
      東京大学,日本電信電話(株)
    • Filing Date
      2010-05-28
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Patent] 微小構造体の作製方法2010

    • Inventor(s)
      米谷玲皇, 石原直, 割澤伸一, 遊佐幸樹, 山口浩司, 永瀬雅夫, 岡本創
    • Industrial Property Rights Holder
      東京大学,日本電信電話(株)
    • Industrial Property Number
      2010-122423
    • Filing Date
      2010-05-28
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Patent] 微小構造体の製造方法2010

    • Inventor(s)
      米谷玲皇, 石原直, 割澤伸一, 黒田耕平, 山口浩司, 永瀬雅夫, 岡本創
    • Industrial Property Rights Holder
      東京大学,日本電信電話(株)
    • Industrial Property Number
      2010-141690
    • Filing Date
      2010-06-22
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Patent] 微小機械共振器ならびに微小機械検出素子2009

    • Inventor(s)
      石原直, 割澤伸一, 加藤慶一, 山口浩司, 小野満恒二
    • Industrial Property Rights Holder
      東京大学,日本電信電話(株)
    • Industrial Property Number
      2008-070933
    • Filing Date
      2009-03-19
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Patent] 薄膜振動子およびその製造方法2009

    • Inventor(s)
      永瀬雅夫, 山口浩司, 石原直, 割澤伸一, 田丸耕二郎
    • Industrial Property Rights Holder
      東京大学,日本電信電話(株)
    • Industrial Property Number
      2009-078589
    • Filing Date
      2009-03-27
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Patent] 微小機械共振器ならびに微小機械検出素子2008

    • Inventor(s)
      石原 直, 割澤 伸一, 加藤 慶一, 山口 浩司, 小野満 恒二
    • Industrial Property Rights Holder
      東京大学、日本電信電話株式会社
    • Filing Date
      2008-03-19
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Patent] 微小機械共振器ならびに微小機械検出素子2008

    • Inventor(s)
      石原直, 割澤伸一, 加藤慶一, 山口浩司, 小野満恒二
    • Industrial Property Rights Holder
      東京大学, 日本電信電話 (株)
    • Industrial Property Number
      2008-070933
    • Filing Date
      2008-03-19
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] ナノ機械振動子を用いた高感度光波長検出に関する研究2013

    • Author(s)
      劉琿、米谷玲皇、割澤伸一、石原直
    • Organizer
      2013年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京工業大学、東京
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Partial patterning of periodic nanostructures using block copolymer lithography2013

    • Author(s)
      H. Suzuki, R. Kometani, S. Ishihara, S. Warisawa
    • Organizer
      SPIE Advanced Lithography 2013
    • Place of Presentation
      San Jose, USA
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] 集束イオンビーム実時間照射量制御によるオーバーハング微細構造の長尺作製2013

    • Author(s)
      郭登極、米谷玲皇、割澤伸一、石原直
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学、厚木市
    • Invited
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] 光波長検出微小機械振動子の作製と特性評価2013

    • Author(s)
      米谷玲皇、劉琿、割澤伸一、石原直
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学、厚木市
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] FIB/EB 複合リソグラフィーによるHSQ からの3次元ナノ構造作製2012

    • Author(s)
      米谷玲皇、黒田耕平、割澤伸一、石原直
    • Organizer
      第73回秋季応用物理学関係連合講演会
    • Place of Presentation
      愛媛大学・松山大学、松山市
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Nanoporous Structure Fabrication in Selective Areas by Block Copolymer Self-Assembly and Electron Beam Lithography2012

    • Author(s)
      H. Suzuki, R. Kometani, S. Ishihara, S. Warisawa
    • Organizer
      29th International Conference of Photopolymer Science and Technology (ICPST-29)
    • Place of Presentation
      Chiba Univ., Chiba, Japan
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] The three-dimentional nanostructure fabrication from HSQ by FIB/EB dual-beam lithography2012

    • Author(s)
      R. Kometani, K. Kuroda, S. Warisawa and S. Ishihara
    • Organizer
      The 56th International Conference on Electron, Ion and Photon Beam Technology and Nanaofabrication (EIPBN2012)
    • Place of Presentation
      Waikoloa, Hawaii, USA
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Height and Edge Shape Correction on the Nanostructure Fabrication by Focused- ion-beam Chemical Vapor Deposition2012

    • Author(s)
      Y. Murao, R. Kometani, S. Warisawa and S.Ishihara
    • Organizer
      25th Int. Microprocesses and Nanotechnology Conf. (MNC2012)
    • Place of Presentation
      Kobe, Japan
    • Year and Date
      2012-10-02
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Superconductivity of tungsten-containing carbon nanowires fabricated focused-ion-beam chemical vapor deposition2012

    • Author(s)
      J. Dai, R. Kometani, S. Warisawa, S. Ishihara, K. Onomitsu, Y. Krockenberger and H. Yamaguchi
    • Organizer
      The 56th International Conference on Electron, Ion and Photon Beam Technology and Nanaofabrication (EIPBN2012)
    • Place of Presentation
      Waikoloa, Hawaii, USA
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Nanomechanical Tuning Forks Fabricated by Focused-Ion-Beam Chemical Vapor Deposition2012

    • Author(s)
      H. Ashiba, R. Kometani, S. Warisawa and S. Ishihara
    • Organizer
      The 56th International Conference on Electron, Ion and Photon Beam Technology and Nanaofabrication (EIPBN2012)
    • Place of Presentation
      Waikoloa, Hawaii, USA
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Ultra-long horizontal free-space-nanowire growth by the real-time feedback control of the scanning speed on focused-ion-beam chemical vapor deposition2012

    • Author(s)
      D. Guo, R. Kometani, S. Warisawa, S. Ishihara
    • Organizer
      38th International Conference on Micro and Nano Engineering (MNE2012)
    • Place of Presentation
      Toulose, France
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Quality factor improvement of grapheme resonator by SU-8 shrinkage-induced strain2012

    • Author(s)
      Oshidari, T. Hatakeyama, R. Kometani, S.Warisawa and S. Ishihara
    • Organizer
      The 56th Int. Conf. on Electron, Ion and Photon Beam Technol. and Nanofabrication (EIPBN2012)
    • Place of Presentation
      Hawaii
    • Year and Date
      2012-06-01
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] 自己組織化ジブロック共重合体薄膜をポジ型/ネガ型混合レジストとして用いた電子線リソグラフィ2012

    • Author(s)
      鈴木裕之, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      東京,日本
    • Year and Date
      2012-03-17
    • Data Source
      KAKENHI-PROJECT-21360059
  • [Presentation] ブロック共重合体リソグラフィによる選択的金属ナノドットアレイの作製2012

    • Author(s)
      鈴木裕之、米谷玲皇、石原 直、割澤伸一
    • Organizer
      第73回秋季応用物理学関係連合講演会
    • Place of Presentation
      愛媛大学・松山大学、松山市
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] SU-8の熱収縮を用いた歪印加によるグラフェン振動子の高Q値化2012

    • Author(s)
      忍足優太、畠山大輝、米谷玲皇、割澤伸一、石原直
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学、東京
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] 二次電子の角度依存性を利用した微小機械振動子の振動計測法2012

    • Author(s)
      中野和洋、米谷玲皇、割澤伸一、石原直
    • Organizer
      第73回秋季応用物理学関係連合講演会
    • Place of Presentation
      愛媛大学・松山大学、松山市
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] 電子線リソグラフィを用いたジブロック共重合体ミクロ相分離膜の選択的パターニング2012

    • Author(s)
      鈴木裕之, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      精密工学会2012年度春季大会
    • Place of Presentation
      東京,日本
    • Year and Date
      2012-03-15
    • Data Source
      KAKENHI-PROJECT-21360059
  • [Presentation] Electron Beam Lithography by Using Self-Assembled Block Copolymer Thin Films as Positive/Negative Tone Combined Resist2012

    • Author(s)
      H. Suzuki, R. Kometani, S. Ishihara and S. Warisawa
    • Organizer
      The 56th International Conference on Electron, Ion and Photon Beam Technology and Nanaofabrication (EIPBN2012)
    • Place of Presentation
      Waikoloa, Hawaii, USA
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Electron Beam Lithography on Block Copolymer Self-Assembled Thin Films2012

    • Author(s)
      H. Suzuki, R. Kometani, S. Warisawa, S. Ishihara
    • Organizer
      Next Generation Lithography Workshop 2012 (NGL2012)
    • Place of Presentation
      蔵前会館、東京
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Evaluation of Resonance Detection Properties on Vibration Measurement of the Mechanical Resonator using Scanning Probe Microscope2012

    • Author(s)
      R. Kometani, S. Mifune, S. Warisawa and S. Ishihara
    • Organizer
      25th International Microprocesses and Nanotechnology Conference (MNC2012)
    • Place of Presentation
      Kobe, Japan
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Superconductivity of tungsten- containing carbon nanowires fabricated focused-ion-beam chemical vapor deposition2012

    • Author(s)
      Jun Dai, R. Kometani, S. Warisawa, S.Ishihara, K. Onomitsu, Y. Krockenberger, H. Yamaguchi
    • Organizer
      The 56th Int. Conf. on Electron, Ion and Photon Beam Technol. and Nanofabrication (EIPBN2012)
    • Place of Presentation
      Hawaii
    • Year and Date
      2012-05-31
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Superconducting tungsten nanowire growth by focused-ionbeam chemical vapor deposition2012

    • Author(s)
      代俊、小野満恒二、米谷玲皇、Y. Krockenberger、割澤伸一、山口浩司、石原直
    • Organizer
      2012年度精密工学会秋季大会学術講演会
    • Place of Presentation
      九州工業大学、北九州市
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Partial Control of Nanoporous Structures Using Block Copolymer Self-Assembly and Electron Beam Lithography2012

    • Author(s)
      H. Suzuki, R. Kometani, S. Warisawa, S. Ishihara
    • Organizer
      4th International Symposium on Global Center for Excellence for Mechanical Systems Innovation (GMSI)
    • Place of Presentation
      The Univ. of Tokyo, Tokyo, Japan
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] A Nanomechanical Resonator from HSQ Fabricated by FIB/EB Dual Beam Lithography2012

    • Author(s)
      S. Warisawa, K. Kuroda, S. Chen, R. Kometani, S. Ishihara
    • Organizer
      29th International Conference of Photopolymer Science and Technology (ICPST-29)
    • Place of Presentation
      Chiba Univ., Chiba, Japan
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Electron-mediated mechanical back-action in quantum hole systems2012

    • Author(s)
      H. Yamaguchi, H. Okamoto, S. Ishihara, and Y. Hirayama
    • Organizer
      Gordon Research Conferences, Mechanical Systems in the Quantum Regime
    • Place of Presentation
      Galveston, Texas, USA
    • Invited
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] FIB-CVD による音叉型ナノメカニカル振動子作製とその振動特性評価2012

    • Author(s)
      芦葉裕樹、米谷玲皇、割澤伸一、石原直
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学、東京
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] ナノエレクトロメカニカルシステム(NEMS)のセンサ応用2012

    • Author(s)
      石原直
    • Organizer
      応用物理学会電子物性分科会
    • Place of Presentation
      秋葉原、東京
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Strained-nanomechanical resonator fabrication from HSQ by FIB/EB dual-beam lithography and annealing treatment2012

    • Author(s)
      R. Kometani, K. Kuroda, S. Warisawa and S.Ishihara
    • Organizer
      38th Int. Conf. on Micro and Nano Engineering (MNE2012)
    • Place of Presentation
      Toulose, France
    • Year and Date
      2012-09-18
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] 電子線リソグラフィを用いたジブロック共重合体ミクロ相分離膜の選択的パターニング2012

    • Author(s)
      鈴木裕之,米谷玲皇,割澤伸一,石原直
    • Organizer
      精密工学会 2012年度春季学術講演会
    • Place of Presentation
      首都大学東京、東京
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Strained-nanomechanical resonator fabrication from HSQ by FIB/EB dual-beam lithography and annealing treatment2012

    • Author(s)
      R. Kometani, K. Kuroda, S. Warisawa and S. Ishihara
    • Organizer
      38th International Conference on Micro and Nano Engineering (MNE2012)
    • Place of Presentation
      Toulose, France
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Direct Fabrication of WxCy SNS Josephson Junction by Using Focused-ion-beam Chemical Vapor Deposition2012

    • Author(s)
      J. Dai, K. Onomitsu, R. Kometani, Y. Krockenberger, H. Yamaguchi, S. Ishihara and S. Warisawa
    • Organizer
      25th International Microprocesses and Nanotechnology Conference (MNC2012)
    • Place of Presentation
      Kobe, Japan
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Vibration measurement technique of micro and nano mechanical resonators using tilt dependence of electron beam-induced secondary electron emission2012

    • Author(s)
      K. Nakano, R. Kometani, S. Warisawa, S.Ishihara
    • Organizer
      38th Int. Conf. on Micro and Nano Engineering (MNE2012)
    • Place of Presentation
      Toulose, France
    • Year and Date
      2012-09-18
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] FIB/EB 複合リソグラフィーによるカーボンナノ機械振動子の作製とその特性評価2012

    • Author(s)
      米谷玲皇、畠山大輝、黒田耕平、割澤伸一、石原直
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学、東京
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] 集束イオンビーム化学気相成長法による空中水平長尺ナノ構造形成2012

    • Author(s)
      郭登極、米谷玲皇、割澤伸一、石原直
    • Organizer
      第4回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      北九州国際会議場、北九州市
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Selectively patterned metal nanodots fabrication by combining block copolymer self-assembly and electron beam lithography2012

    • Author(s)
      H. Suzuki, R. Kometani, S. Ishihara, S. Warisawa
    • Organizer
      SPIE Optics + Photonics 2012
    • Place of Presentation
      San Diego, California, USA
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Issues and Strategy towards Long-term Digital Data Preservation2012

    • Author(s)
      Sunao Ishihara and Toshio Kobayashi
    • Organizer
      International Symposium on Optical Memory 2012 (ISOM'12)
    • Place of Presentation
      Mirai-kan, Tokyo, Japan
    • Invited
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Height and Edge Shape Correction on the Nanostructure Fabrication by Focused-ionbeam Chemical Vapor Deposition2012

    • Author(s)
      Y. Murao, R. Kometani, S. Warisawa and S. Ishihara
    • Organizer
      25th International Microprocesses and Nanotechnology Conference (MNC2012)
    • Place of Presentation
      Kobe, Japan
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] FIB-CVDの下方成長を利用した三次元ナノ構造の作製2012

    • Author(s)
      郭登極、米谷玲皇、割澤伸一、石原直
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学、東京
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Vibration Characteristics of DLC Nanomechanical Resonator under Parametric Excitation2012

    • Author(s)
      K. Fuse, R. Kometani, S. Ishihara, S. Warisawa
    • Organizer
      38th International Conference on Micro and Nano Engineering (MNE2012)
    • Place of Presentation
      Toulose, France
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Vibration Characteristics of DLC Nanomechanical Resonator under Parametric Excitation2012

    • Author(s)
      K. Fuse, R. Kometani, S. Ishihara, S.Warisawa
    • Organizer
      38th Int. Conf. on Micro and Nano Engineering (MNE2012)
    • Place of Presentation
      Toulose, France
    • Year and Date
      2012-09-18
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Evaluation of Resonance Detection Properties on Vibration Measurement of the Mechanical Resonator using Scanning Probe Microscope2012

    • Author(s)
      R. Kometani, S. Mifune, S. Warisawa and S.Ishihara
    • Organizer
      25th Int. Microprocesses and Nanotechnology Conf. (MNC2012)
    • Place of Presentation
      Kobe, Japan
    • Year and Date
      2012-11-01
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] FIB-CVD の実時間走査速度制御による空中水平ナノワイヤの長尺形成2012

    • Author(s)
      郭登極、米谷玲皇、割澤伸一、石原直
    • Organizer
      第73回秋季応用物理学関係連合講演会
    • Place of Presentation
      愛媛大学・松山大学、松山市
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] パラメトリック励振下におけるDLC ナノメカニカル振動子の振動特性2012

    • Author(s)
      布施健太、米谷玲皇、石原直、割澤伸一
    • Organizer
      第73回秋季応用物理学関係連合講演会
    • Place of Presentation
      愛媛大学・松山大学、松山市
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Superconductivity of tungsten-containing carbon nanowires fabricated by focused-ion-beam chemical vapor deposition2012

    • Author(s)
      代俊、小野満恒二、米谷玲皇、Yoshiharu Krockenberger,割澤伸一、山口浩司、石原直
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学、東京
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] SU-8 の熱収縮を利用した高Q 値グラフェン振動子の作製2012

    • Author(s)
      忍足優太、畠山大輝、米谷玲皇、割澤伸一、石原直
    • Organizer
      2012年度精密工学会秋季大会学術講演会
    • Place of Presentation
      九州工業大学、北九州市
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Evaluations of the Downward Growth Characteristics on the 3-DNanostructure Fabrication using Focused-Ion-Beam Chemical Vapor Deposition2012

    • Author(s)
      D.J. Guo, R. Kometani, S. Warisawa, and S. Ishihara
    • Organizer
      4th International Symposium on Global Center for Excellence for Mechanical Systems Innovation (GMSI)
    • Place of Presentation
      The Univ. of Tokyo, Tokyo, Japan
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Ultra-long horizontal free-space- nanowire growth by the real-time feedback control of the scanning speed on focused- ion-beam chemical vapor deposition2012

    • Author(s)
      D. Guo, R. Kometani, S. Warisawa, S.Ishihara
    • Organizer
      38th Int. Conf. on Micro and Nano Engineering (MNE2012)
    • Place of Presentation
      Toulose, France
    • Year and Date
      2012-09-20
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Direct Fabrication of WxCy SNS Josephson Junction by Using Focused- ion-beam Chemical Vapor Deposition2012

    • Author(s)
      J. Dai, K. Onomitsu, R. Kometani, Y.Krockenberger, H. Yamaguchi, S. Ishihara and S. Warisawa
    • Organizer
      25th International Microprocesses and Nano- technology Conference (MNC2012)
    • Place of Presentation
      Kobe, Japan
    • Year and Date
      2012-10-31
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Quality factor improvement of grapheme resonator by SU-8 shrinkage-induced strain2012

    • Author(s)
      Oshidari, T. Hatakeyama, R. Kometani, W. Warisawa and S. Ishihara
    • Organizer
      The 56th International Conference on Electron, Ion and Photon Beam Technology and Nanaofabrication (EIPBN2012)
    • Place of Presentation
      Waikoloa, Hawaii, USA
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Vibration measurement technique of micro and nano mechanical resonators using tilt dependence of electron beam-induced secondary electron emission2012

    • Author(s)
      K. Nakano, R. Kometani, S. Warisawa, S. Ishihara
    • Organizer
      38th International Conference on Micro and Nano Engineering (MNE2012)
    • Place of Presentation
      Toulose, France
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] 真空・大気下における音叉型ナノメカニカル振動子の振動特性2012

    • Author(s)
      芦葉裕樹、米谷玲皇、割澤伸一、石原直
    • Organizer
      第4回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      北九州国際会議場、北九州市
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] リング型ナノメカニカル振動子の作製法とその振動特性評価2012

    • Author(s)
      芦葉裕樹、米谷玲皇、割澤伸一、石原直
    • Organizer
      第73回秋季応用物理学関係連合講演会
    • Place of Presentation
      愛媛大学・松山大学、松山市
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] FIB/EBデュアルビームリソグラフィーによるカーボンナノ機械振動子の作製2011

    • Author(s)
      米谷玲皇、畠山大輝、黒田耕平、割澤伸一、石原直
    • Organizer
      第3回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      船堀、東京
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Relationship between Q factor and the surface condition of the DLC nanoresonator fabricated by focused-ion-beam chemical vapor deposition2011

    • Author(s)
      R. Kometani, H. Shimizu, S. Warisawa, and S. Ishihara
    • Organizer
      37th International Conference on Micro and Nano Engineering (MNE2011)
    • Place of Presentation
      Berlin, Germany
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Strained Carbon Nanomechanical Resonator Fabrication from SU-8 by FIB/EB Dual-beam Lithography and Annealing Treatment2011

    • Author(s)
      R. Kometani, K. Kuroda, S. Warisawa and S. Ishihara
    • Organizer
      24th International Microprocesses and Nanotechnology Conference (MNC2011)
    • Place of Presentation
      ANA Hotel Kyoto, Kyoto, Japan
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] フッ素表面コーティングによるFIB-CVD形成DLC振動子の高Q値化2011

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      2011年春季第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学,神奈川
    • Year and Date
      2011-03-26
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Effect of Annealing on Ultra-thin Silicon Nanomechanical Resonators Fabricated by Focused-Ion-Beam Implantation2011

    • Author(s)
      H. Liu, R. Kometani, S. Warisawa, and S. Ishihara
    • Organizer
      37th International Conference on Micro and Nano Engineering (MNE2011)
    • Place of Presentation
      Berlin, Germany
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] 自己組織化膜によるプラズモン共鳴波長連続変素子の開発2011

    • Author(s)
      高木崇光, 栗原一真, 粟津浩一, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      2011年秋季第72回応用物理学会学術講演会
    • Place of Presentation
      山形,日本
    • Year and Date
      2011-08-30
    • Data Source
      KAKENHI-PROJECT-21360059
  • [Presentation] A gradually shifted surface plasmon resonance with a controlled diameter of a nano-hole structure by self-assembly technique2011

    • Author(s)
      T. Takagi, R. Kometani, S. Warisawa and S. Ishihara
    • Organizer
      The 55th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN2011)
    • Place of Presentation
      Las Vegas, Nevada, USA
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Selective Patterning of Self-Assembled Block Copolymer Thin Films by Electron Beam Lithography2011

    • Author(s)
      H. Suzuki, R. Kometani, S. Warisawa and S. Ishihara
    • Organizer
      2011 MRS Fall Meeting & Exhibit
    • Place of Presentation
      Boston, USA
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Selective Graphene Growth from DLC Thin Film Patterned by Focused-ion-beam Chemical Vapor Deposition2011

    • Author(s)
      T. Hatakeyama, R. Kometani, S. Warisawa, and S. Ishihara
    • Organizer
      The 55th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN2011)
    • Place of Presentation
      Las Vegas, Nevada, USA
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Patterning and Carbonization of Block Copolymer Self-assembled Structures by Focused-ion-beam2011

    • Author(s)
      S. Warisawa, R. Mitsuhashi, R. Kometani and S. Ishihara
    • Organizer
      24th International Microprocesses and Nanotechnology Conference(MNC2011)
    • Place of Presentation
      ANA Hotel Kyoto, Kyoto, Japa
    • Data Source
      KAKENHI-PROJECT-21360059
  • [Presentation] FIB-CVDによる三次元微細構造作製の高精度化に関する研究2011

    • Author(s)
      村尾裕規, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      精密工学会2011年度春季大会学術講演会
    • Place of Presentation
      埼玉大学,埼玉
    • Year and Date
      2011-03-14
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] The 3-D Nanostructure Fabrication by controlling Downward Growth on Focused-ion-beam Chemical Vapor Deposition2011

    • Author(s)
      D.J. Guo, R. Kometani, S. Warisawa and S. Ishihara
    • Organizer
      24th International Microprocesses and Nanotechnology Conference (MNC2011)
    • Place of Presentation
      ANA Hotel Kyoto, Kyoto, Japan
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Fabrication of Self-Assembled Cylindrical Structures within Free-Standing Block Copolymer Ultrathin Membranes2011

    • Author(s)
      S. Warisawa, H. Mino, R. Kometani and S. Ishihara
    • Organizer
      2011 MRS Fall Meeting & Exhibit, Hynes Convention Center
    • Place of Presentation
      Boston, USA
    • Data Source
      KAKENHI-PROJECT-21360059
  • [Presentation] Dynamic Characteristics Control of DLC Nano-Resonator Fabricated by Focused-Ion-Beam Chemical Vapor Deposition2011

    • Author(s)
      R. Kometani, S. Nishi, S. Warisawa and S. Ishihara
    • Organizer
      The 55th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN2011)
    • Place of Presentation
      Las Vegas, Nevada, USA
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] A gradually shifted surface plasmon resonance with a controlled diameter of a nano-hole structure by self-assembly technique2011

    • Author(s)
      T.Takagi, K.Kurihara, K.Awazu, R.Kometani, S.Warisawa, S.Ishihara
    • Organizer
      The 55th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2011)
    • Place of Presentation
      Las Vegas, Nevada, USA
    • Year and Date
      2011-06-01
    • Data Source
      KAKENHI-PROJECT-21360059
  • [Presentation] EUV Lithography – from the beginning to the future -2011

    • Author(s)
      S. Ishihara
    • Organizer
      EIDEC Symposium
    • Place of Presentation
      Tokyo, Japan
    • Invited
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] FIB-CVD形成DLCナノ振動子のフッ素表面コーティングの効果2011

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      精密工学会2011年度春季大会学術講演会
    • Place of Presentation
      埼玉大学,埼玉
    • Year and Date
      2011-03-14
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Quality Factor Enhancement on Nano Mechanical Resonators Utilizing Stiction Phenomena2011

    • Author(s)
      H. Ashiba, R. Kometani, S. Warisawa and S. Ishihara
    • Organizer
      The 55th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN2011)
    • Place of Presentation
      Las Vegas, Nevada, USA
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Selective Patterning of Self-Assembled Block Copolymer Thin Films by Electron Beam Lithography2011

    • Author(s)
      H.Suzuki, R.Kometani, S.Warisawa, S.Ishihara
    • Organizer
      2011 MRS Fall Meeting & Exhibit
    • Place of Presentation
      Boston, MA, USA
    • Year and Date
      2011-11-30
    • Data Source
      KAKENHI-PROJECT-21360059
  • [Presentation] FIB-CVD法により堆積させたDLCによるグラフェンの選択成長2011

    • Author(s)
      畠山大輝, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      2011年春季第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学,神奈川
    • Year and Date
      2011-03-27
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] FIB/EB複合リソグラフィによる歪印加振動子作製技術2011

    • Author(s)
      黒田耕平, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      精密工学会2011年度春季大会学術講演会
    • Place of Presentation
      埼玉大学,埼玉
    • Year and Date
      2011-03-14
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] A gradually shifted surface plasmon resonance with a controlled diameter of a nano-hole structure by self-assembly technique2011

    • Author(s)
      T. Takagi, K. Kurihara, K. Awazu, R. Kometani, S. Warisawa, S. Ishihara
    • Organizer
      The 55th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication(EIPBN2011)
    • Place of Presentation
      Las Vegas, Nevada, USA
    • Data Source
      KAKENHI-PROJECT-21360059
  • [Presentation] Fabrication of Nanowire SQUID by means of FIB-CVD2011

    • Author(s)
      J. Dai, R. Kometani, S. Warisawa, and S. Ishihara
    • Organizer
      5th TU-SNU-UT Joint Symposium
    • Place of Presentation
      Beijing, China
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Carbon Nanomechanical Resonator Fabrication from PMMA by FIB/EB Dual-Beam Lithography2011

    • Author(s)
      R. Kometani, T. Hatakeyama, S. Warisawa, and S. Ishihara
    • Organizer
      The 55th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN2011)
    • Place of Presentation
      Las Vegas, Nevada, USA
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] FIB/EB 複合リソグラフィーによるHSQ3次元ナノ構造作製2011

    • Author(s)
      黒田耕平、米谷玲皇、割澤伸一、石原直
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学、山形
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Selective Patterning of Self-Assembled Block Copolymer Thin Films by Electron Beam Lithography2011

    • Author(s)
      H. Suzuki, R. Kometani, S. Warisawa and S. Ishihara
    • Organizer
      2011 MRS Fall Meeting & Exhibit, Hynes Convention Center
    • Place of Presentation
      Boston, USA
    • Data Source
      KAKENHI-PROJECT-21360059
  • [Presentation] Fabrication of Self-Assembled Cylindrical Structures within Free-Standing Block Copolymer Ultrathin Membranes2011

    • Author(s)
      Shinichi Warisawa, Hiroyuki Mino, Reo Kometani, Sunao Ishihara
    • Organizer
      2011 MRS Fall Meeting & Exhibit
    • Place of Presentation
      Boston, MA, USA
    • Year and Date
      2011-11-29
    • Data Source
      KAKENHI-PROJECT-21360059
  • [Presentation] Stressed Nanomechanical Resonator Fabrication Utilizing Stiction Phenomena2011

    • Author(s)
      H. Ashiba, R. Kometani, S. Warisawa, and S. Ishihara
    • Organizer
      IEEE International Conference on Mechatronics and Automation (ICMA2011)
    • Place of Presentation
      Beijing, China
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] 照射ドーズ量制御によるFIB-CVD三次元微細構造形成の高精度化に関する研究2011

    • Author(s)
      村尾裕規、米谷玲皇、割澤伸一、石原直
    • Organizer
      2011年度精密工学会秋季大会学術講演会
    • Place of Presentation
      金沢大学、金沢
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Q Factor Improvement of DLC Nanoresonator using a Fluorine Surface Coating2011

    • Author(s)
      R. Kometani, S. Warisawa, and S. Ishihara
    • Organizer
      The 6th International Conference on Leading Edge Manufacturing in 21st Century (LEM21 2011)
    • Place of Presentation
      Omiya Sonic City, Saitama, Japan
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Patterning and Carbonization of Block Copolymer Self-assembled Structures by Focused-ion-beam2011

    • Author(s)
      S.Warisawa, R.Mitsuhashi, R.Kometani, S.Ishihara
    • Organizer
      24th International Micaroprocesses and Nanotechnology Conference (MNC2011)
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2011-10-27
    • Data Source
      KAKENHI-PROJECT-21360059
  • [Presentation] スティクションを利用したナノ振動子の高Q値化2011

    • Author(s)
      葉裕樹, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      2011年春季第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学,神奈川
    • Year and Date
      2011-03-26
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] スティクションを利用した引張応力印加ナノ振動子の作製法2011

    • Author(s)
      芦葉裕樹, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      精密工学会2011年度春季大会学術講演会
    • Place of Presentation
      埼玉大学,埼玉
    • Year and Date
      2011-03-14
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] FIB-CVDの下方成長を利用した三次元ナノ構造の作製2011

    • Author(s)
      郭登極、米谷玲皇、割澤伸一、石原直
    • Organizer
      第3回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      船堀、東京
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Fabrication of Self-Assembled Cylindrical Structures within Free-Standing Block Copolymer Ultrathin Membranes2011

    • Author(s)
      S. Warisawa, H. Mino, R. Kometani and S. Ishihara
    • Organizer
      2011 MRS Fall Meeting & Exhibit
    • Place of Presentation
      Boston, USA
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Sensitive charge detection using perfectly-tuned coupled nanomechanical oscillators2010

    • Author(s)
      H.Okamoto, N.Kitajima, K.Onomitsu, R.Kometani, S.Warisawa, S.Ishihara H.Yamaguchi
    • Organizer
      7th International Workshop on Nanomechanical Cantilever Sensors(NMC2010)
    • Place of Presentation
      Bannif,Canada
    • Year and Date
      2010-05-26
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Nano Patterning on Surfaces of 3-D Micro Structures by Means of Block Copolymer Self Assembly2010

    • Author(s)
      S.Warisawa, H.Mino, R.Kometani, S.Ishihara
    • Organizer
      2010 MRS Fall Meeting
    • Place of Presentation
      Boston,USA
    • Year and Date
      2010-12-02
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Effect of a Fluorine Surface Coating on Vibration Characteristics of Diamond-like Carbon Mechanical Resonator Fabricated by FIB-CVD2010

    • Author(s)
      R.Kometani, S.Warisawa, S.Ishihara
    • Organizer
      The 23rd International Microprocesses and Nanotechnology Conference(MNC2010)
    • Place of Presentation
      Fukuoka,Japan
    • Year and Date
      2010-11-10
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Nanostructure Fabrication by Self-assembly of Block Copolymer on 3-D DLC Structure2010

    • Author(s)
      H. Mino, R. Kometani, S. Warisawa, S. Ishihara
    • Organizer
      The 54th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication(EIPBN2010)
    • Place of Presentation
      Anchorage, Alaska, USA
    • Year and Date
      2010-07-02
    • Data Source
      KAKENHI-PROJECT-21360059
  • [Presentation] AFM振動励起法による単層グラフェンの振動特性評価2010

    • Author(s)
      畠山大輝, 米谷玲皇, 永瀬雅夫, 割澤伸一, 石原直
    • Organizer
      2010年春季 第57回応用物理関係連合講演会
    • Place of Presentation
      東海大学,神奈川
    • Year and Date
      2010-03-19
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] 集束イオンビーム化学気相成長法による超薄膜DLC機械振動子の作製2010

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      第71回応用物理学術講演会
    • Place of Presentation
      長崎大学,長崎
    • Year and Date
      2010-09-14
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Nanostructure Fabrication by Self-assembly of Block Copolymer on 3-D DLC Structure2010

    • Author(s)
      H.Mino, R.Kometani, S.Warisawa, S.Ishihara
    • Organizer
      The 54th International Conference on Electron, Ion, Photon Beams and Nanotechnology
    • Place of Presentation
      Anchorage,USA
    • Year and Date
      2010-06-02
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] 集束イオンビーム化学気相成長法における非コアシェルナノ構造の堆積法2010

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      2010年度精密工学会春季大会学術講演会
    • Place of Presentation
      埼玉大学,埼玉
    • Year and Date
      2010-03-18
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] 集束イオンビーム化学気相成長法における非コアシェルナノ構造の堆積法2010

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      2010年春季 第57回応用物理関係連合講演会
    • Place of Presentation
      東海大学,神奈川
    • Year and Date
      2010-03-19
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] A Novel Fabrication Process for the Tensile Strained Resonators2010

    • Author(s)
      K.Kuroda, R.Kometani, S.Warisawa, S.Ishihara
    • Organizer
      The 23rd International Microprocesses and Nanotechnology Conference(MNC2010)
    • Place of Presentation
      Fukuoka,Japan
    • Year and Date
      2010-11-12
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] A new displacement detection system using a HEMT amplifier2010

    • Author(s)
      Y.Oda, K.Onomitsu, R.Kometani, S.Warisawa, S.Ishihara, H.Yamaguchi
    • Organizer
      The 23rd International Microprocesses and Nanotechnology Conference(MNC2010)
    • Place of Presentation
      Fukuoka,Japan
    • Year and Date
      2010-11-11
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Layer-by-layer Stacking Method for 3-D Nano Structure Fabrication Using Block Copolymer Self Assembly2010

    • Author(s)
      S.Warisawa, R.Kanameda, R.Kometani, S.Ishihara
    • Organizer
      2010 MRS Fall Meeting
    • Place of Presentation
      Boston,USA
    • Year and Date
      2010-12-02
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] 架橋グラフェンの振動特性評価2010

    • Author(s)
      畠山大輝, 米谷玲皇, 永瀬雅夫, 割澤伸一, 石原直
    • Organizer
      ナノ学会第8回大会
    • Place of Presentation
      自然科学研究機構,岡崎
    • Year and Date
      2010-05-13
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] 集束イオンビーム励起表面反応による超薄膜DLC機械振動子の作製とその特性2010

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      精密工学会2010年度秋季大会学術講演会
    • Place of Presentation
      名古屋大学,名古屋
    • Year and Date
      2010-09-27
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] 3次元DLC構造へのブロック共重合体の自己組織化2010

    • Author(s)
      三野宏之, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      次世代リソグラフィワークショップ(NGL2010)
    • Place of Presentation
      蔵前会館,東京
    • Year and Date
      2010-07-13
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Frequency Tunable Coupled Nanomechanical Resonators and their Sensing Applications2010

    • Author(s)
      H.Okamoto, N.Kitajima, K.Onomitsu, R.Kometani, S.Warisawa, S.Ishihara, H.Yamaguchi
    • Organizer
      International Conference on Quantum Nanostructures and Spin-related Phenomena(QNSP)
    • Place of Presentation
      Tokyo,Japan
    • Year and Date
      2010-03-09
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Vibration Characteristics of Monolayer Graphene Resonator2010

    • Author(s)
      T.Hatakeyama, R.Kometani, M.Nagase, S.Warisawa, S.Ishihara
    • Organizer
      The 54th International Conference on Electron, Ion, Photon Beams and Nanotechnology
    • Place of Presentation
      Anchorage,USA
    • Year and Date
      2010-06-03
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] The piezoresistive effect in the 3-D diamond-like carbon nanostructure fabricated by focused-ion-beam chemical vapor deposition2010

    • Author(s)
      R.Kometani, K.Yusa, S.Warisawa, S.Ishihara
    • Organizer
      The 54^<th> Intn'l Conf. on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2010)
    • Place of Presentation
      Anchorage, Alaska
    • Year and Date
      2010-06-02
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] 集束イオンビーム化学気相成長法により堆積したダイアモンドライクカーボンのピエゾ抵抗効果特性評価2010

    • Author(s)
      米谷玲皇, 遊佐幸樹, 割澤伸一, 石原直
    • Organizer
      2010年度精密工学会春季大会学術講演会
    • Place of Presentation
      埼玉大学,埼玉
    • Year and Date
      2010-03-18
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] The piezoresistive effect in the 3-D diamond-like carbon nanostructure fabricated by focused-ion-beam chemical vapor deposition2010

    • Author(s)
      R.Kometani, K.Yusa, S.Warisawa, S.Ishihara
    • Organizer
      The 54th International Conference on Electron, Ion, Photon Beams and Nanotechnology
    • Place of Presentation
      Anchorage,USA
    • Year and Date
      2010-06-02
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] 集束イオンビーム化学気相成長法を利用したピエゾ抵抗特性を有する3次元DLCナノ構造体の作製法2010

    • Author(s)
      米谷玲皇, 遊佐幸樹, 割澤伸一, 石原直
    • Organizer
      ナノ学会第8回大会
    • Place of Presentation
      自然科学研究機構,岡崎
    • Year and Date
      2010-05-14
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Vibration Characteristics of Monolayer Graphene Resonator2010

    • Author(s)
      T.Hatakeyama, R.Kometani, M.Nagase, S.Warisawa, S.Ishihara
    • Organizer
      The 54^<th> Intn'l Conf.on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2010).
    • Place of Presentation
      Anchorage, Alaska
    • Year and Date
      2010-06-03
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Mechanical to electrical power transduction using a micromechanical 2DES cantilever2010

    • Author(s)
      H.Yamaguchi, H.Okamoto, Y.Maruta, S.Ishihara, Y.Hirayama
    • Organizer
      16th International Conference on Molecular Beam Epitaxy(MBE2010)
    • Place of Presentation
      Berlin,Germany(Invited)
    • Year and Date
      2010-08-22
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] 集束イオンビーム化学気相成長法により作製した3次元DLCナノ構造の機能化2010

    • Author(s)
      米谷玲皇, 遊佐幸樹, 割澤伸一, 石原直
    • Organizer
      2010年春季 第57回応用物理関係連合講演会
    • Place of Presentation
      東海大学,神奈川
    • Year and Date
      2010-03-19
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Ultra thin diamond-like carbon film mechanical resonator fabrication by a combined process of FIB-CVD and wet-etching2010

    • Author(s)
      R.Kometani, S.Warisawa, S.Ishihara
    • Organizer
      The 36th International Conference on Micro and Nano Engineering(MNE2010)
    • Place of Presentation
      Genova,Italy
    • Year and Date
      2010-09-21
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] 表面プラズモンセンサーへ向けた連続変化自己組織化膜の作製法2010

    • Author(s)
      高木崇光, 栗原一真, 粟津浩一, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      第71回応用物理学術講演会
    • Place of Presentation
      長崎大学,長崎
    • Year and Date
      2010-09-16
    • Data Source
      KAKENHI-PROJECT-22226004
  • [Presentation] Evaluation of Resonance Characteristics Change of Silicon Resonators due to Surface Treatment2009

    • Author(s)
      H.Shimizu, J.-J.Delaunay, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      22nd International Microprocesses and Nanotechnology Conference (MNC2009)
    • Place of Presentation
      Sheraton Sapporo Hotel, Sapporo, Japan
    • Year and Date
      2009-11-18
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Dynamic characterization method of GaAs membrane resonator by direct excitation using scanning probe microscopy2009

    • Author(s)
      K.Tamaru, K.Nonaka, M.Nagnse, H.Yamaguchi, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      The 35th International Conference on Micro & Nano Engineering (MNE2009)
    • Place of Presentation
      Ghent, Belgium
    • Year and Date
      2009-09-30
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] High-sensitive charge detection using anti-symmetric vibration in coupled micromechanical resonators2009

    • Author(s)
      N.Kitajima, H.Okamoto, T.Kamada, K.Onomitsu, 割澤伸一, 石原直, Hiroshi Yamaguchi
    • Organizer
      22nd International Microprocesses and Nanotechnology Conference (MNC2009)
    • Place of Presentation
      Sheraton Sapporo Hotel, Sapporo, Japan
    • Year and Date
      2009-11-18
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Dynamic Characteristics Design System for 3D Nanostructure Fabricated by FIB-CVD2009

    • Author(s)
      西駿次郎, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      The 5th International Conference on Leading Edge manufacturing in 21st Century (LEM21)
    • Place of Presentation
      Osaka University Convention Center, Osaka, Japan
    • Year and Date
      2009-12-02
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Improvement of Vibration Characteristics of Silicon Resonators by Means of Surface Treatment2009

    • Author(s)
      H.Shimizu, J.-J.Delaunay, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      The 5th International Conference on Leading Edge manufacturing in 21st Century (LEM21)
    • Place of Presentation
      Osaka University Convention Center, Osaka, Japan
    • Year and Date
      2009-12-04
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] FIB-CVDナノ機械デバイス動特性評価のための解析モデル構築法2009

    • Author(s)
      西駿次郎, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      ナノ学会 第7回大会
    • Place of Presentation
      東京大学,東京
    • Year and Date
      2009-05-10
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] High-sensitive charge detection using anti-symmetric vibration in coupled micromechanical resonators2009

    • Author(s)
      N.Kitajima, H.Okamoto, T.Kamada, K.Onomitsu, S.Warisawa, S.Ishihara, H.Yamaguchi
    • Organizer
      22nd Intn'l Microprocesses & Nanotechnology Conf. (MNC2009)
    • Place of Presentation
      Sapporo
    • Year and Date
      2009-11-18
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Evaluations of The Hopping Growth Characteristics On 3-D Nanostructure Fabrication Using Focused-Ion-Beam2009

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      The 53rd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2009)
    • Place of Presentation
      Marco Island, Florida, USA
    • Year and Date
      2009-05-28
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Dynamic Property Evaluation of Nano/Micro Mechanical Resonators Utilizing Frequency-modulated Secondary Electron Singnals2009

    • Author(s)
      H.Ashiba, 割澤伸一, 石原直
    • Organizer
      The 5th International Conference on Leading Edge manufacturing in 21st Century (LEM21)
    • Place of Presentation
      Osaka University Convention Center, Osaka, Japan
    • Year and Date
      2009-12-02
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] FIB-CVDによる振動特性可変レゾネータの作製2009

    • Author(s)
      西駿次郎, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      2009年度秋季 第70回応用物理学関係連合講演会
    • Place of Presentation
      富山大学,富山
    • Year and Date
      2009-09-10
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] The 3-D nanostructure growth evaluations by the real-time current monitoring on focused-ionbeam chemical vapor deposition2009

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      The 35th International Conference on Micro & Nano Engineering (MNE2009)
    • Place of Presentation
      Ghent, Belgium
    • Year and Date
      2009-09-30
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Evaluation of Resonance Characteristics Change of Silicon Resonators due to Surface Treatment2009

    • Author(s)
      H.Shimizu, J.-J.Delaunay, R.Kometani, S.Warisawa, S.Ishihara
    • Organizer
      22nd Intn'l Microprocesses and Nanotechnology Conf. (MNC2009)
    • Place of Presentation
      Sapporo
    • Year and Date
      2009-11-18
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] 走査プローブによるGaAsメンブレンマイクロレゾネ一夕の動的特性評価2009

    • Author(s)
      田丸耕二郎, 野中啓一郎, 永瀬雅夫, 山口浩司, 割澤伸一, 米谷玲皇, 石原直
    • Organizer
      2009年春季 第56回応用物理関係連合講演会
    • Place of Presentation
      筑波大学,茨城
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] 集束イオンビーム3次元ナノ構造形成における成長モード評価2009

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      2009年春季 第56回応用物理関係連合講演会
    • Place of Presentation
      筑波大学,茨城
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Piezoresistance Effect of Diamond-Like Carbon Deposited by FIB2009

    • Author(s)
      遊佐幸樹, 米谷玲皇, 石原直, 割澤伸一
    • Organizer
      19th Academic Symposium of MRS-Japan 2009
    • Place of Presentation
      Yokohama, Japan
    • Year and Date
      2009-12-08
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] その場プローブ電流計測による集束イオンビーム3次元ナノ構造成長特性評価2009

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      2009年度秋季 第70回応用物理学関係連合講演会
    • Place of Presentation
      富山大学,富山
    • Year and Date
      2009-09-10
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] The 3-D nanostructure growth evaluations by the real-time current monitoring on focused-ionbeam chemical vapor deposition2009

    • Author(s)
      R.Kometani, S.Warisawa, S.Ishihara
    • Organizer
      The 35th International Conference on Micro & Nano Engineering (MNE2009)
    • Place of Presentation
      Ghent, BelgiumS
    • Year and Date
      2009-09-30
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Vibration Characteristics-Tunable Resonator Fabrication by Focused-Ion -Beam Chemical Vapor Deposition2009

    • Author(s)
      S.Nishi, R.Kometani, S.Warisawa, S.Ishihara
    • Organizer
      the 22nd Intn'l Microprocesses and Nano- technology Conf. (MNC2009)
    • Place of Presentation
      Sapporo
    • Year and Date
      2009-11-18
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] 表面状態に起因するシリコンレゾネータの振動特性2009

    • Author(s)
      清水宏樹, Jean-Jacques Delaunay, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      ナノ学会 第7回大会
    • Place of Presentation
      東京大学,東京
    • Year and Date
      2009-05-10
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Non Core-Shell Nanostructure Deposition on Focused-Ion-Beam Chemical Vapor Deposition2009

    • Author(s)
      R.Kometani, S.Warisawa, S.Ishihara
    • Organizer
      22nd International Microprocesses and Nanotechnology Conf.(MNC2009)
    • Place of Presentation
      Sapporo
    • Year and Date
      2009-11-19
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] 表面改質によるシリコンレゾネータのQ値変化の評価2009

    • Author(s)
      清水宏樹, Jean-Jacques Delaunay, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      2009年度秋季 第70回応用物理学関係連合講演会
    • Place of Presentation
      富山大学,富山
    • Year and Date
      2009-09-09
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Homogeneous Material Deposition on Focused-Ion-Beam Chemical Vapor Deposition2009

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      International Symposium on the Physics of Excitation-assisted Nano-processes (ISPEN2009)
    • Place of Presentation
      Diwa Roynet Hotel Wakayama, Wakayama, Japan
    • Year and Date
      2009-11-20
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] 集束イオンビーム化学気相成長法により堆積したDLCからのGa誘起グラファイト薄膜形成2009

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      ナノ学会 第7回大会
    • Place of Presentation
      東京大学,東京
    • Year and Date
      2009-05-10
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Dynamic Characteristics Analysis Method on a Nanomechanical Device Fabrication Using FIB-CVD2009

    • Author(s)
      西駿次郎, 米谷玲皇, 割澤伸一, 石原直
    • Organizer
      第1回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      東京大学,東京
    • Year and Date
      2009-10-15
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] High-sensitive charge detection using anti-symmetric vibration in coupled micromechanical resonators2009

    • Author(s)
      N. Kitajima, H. Okamoto, T. Kamada, K. Onomitsu, S. Warisawa, S. Ishihara, H. Yamaguchi
    • Organizer
      22nd Intern'l Microprocesses & Nanotechnology Conf. (MNC2009)
    • Place of Presentation
      Sapporo, Japan
    • Year and Date
      2009-11-18
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Non Core-Shell Nanostructure Deposition on Focused-Ion-Beam Chemical Vapor Deposition2009

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      22nd International Microprocesses and Nanotechnology Conference (MNC2009)
    • Place of Presentation
      Sheraton Sapporo Hotel, Sapporo, Japan
    • Year and Date
      2009-11-19
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Evaluations of The Hopping Growth Characteristics on 3-D Nanostructure Fabrication Using Focused-Ion-Beam2009

    • Author(s)
      R.Kometani, S.Warisawa, S.Ishihara
    • Organizer
      The 53rd Intn'l Conf. on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN2009)
    • Place of Presentation
      Marco Island, Florida, USA
    • Year and Date
      2009-05-25
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Nanomanufacturing Tool Fabrications by Focused-Ion-Beam Chemical Vapor Deposition2009

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      The 5th International Conference on Leading Edge manufacturing in 21st Century (LEM21)
    • Place of Presentation
      Osaka University Convention Center, Osaka, Japan
    • Year and Date
      2009-12-02
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] The Three-Dimensional Nanostructure Growth Characteristics Evaluations for a Development of Computer Pattern Generator on Focused-Ion-Beam Chemical Vapor Deposition2009

    • Author(s)
      米谷玲皇, 割澤伸一, 石原直
    • Organizer
      第1回マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      東京大学,東京
    • Year and Date
      2009-10-15
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] lmprovement Charecteristics of micromechanical resonators by epitaxially-induced strain2008

    • Author(s)
      H. Yamaguchi, K. Kato, Y. Nakai, K. Onomitsu, S. Warisawa, S. Ishihara
    • Organizer
      International Symposium on Novel Nano-Electro-Mechanical 3D Structures: Fabrication and Properties(NT2008)
    • Place of Presentation
      Ishikawa, Japan
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Evaluation Method for Quality Factor of Nano-resonator by Electron Beam2008

    • Author(s)
      H.Ashiba, S.Warisawa, S.Ishihara
    • Organizer
      21st Intn'l Microprocesses and Nanotechnology Conf. (MNC2008)
    • Place of Presentation
      Fukuoka
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Evaluation of Thermal-mechanical Vibration Amplitude Using Scanning Electron Microscopy Images2008

    • Author(s)
      K.Nonaka, K.Tamaru, M.Nagase, H.Yamaguchi, S.Warisawa, S.Ishihara
    • Organizer
      21st Intn'l Microprocesses and Nanotechnology Conf. (MNC2008)
    • Place of Presentation
      Fukuoka.
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Nano electro-mechanical device fabrication by 3-D nanotechnoligy using focused-ion-beam2008

    • Author(s)
      R. Kometani, S. Warisawa, S. Ishihara
    • Organizer
      International Symposium on Novel Nano-Electro-Mechanical 3D Structures: Fabrication and Properties(NT2008)
    • Place of Presentation
      Ishikawa, Japan
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] 集束イオンビーム注入Gaの析出現象により引起されるグラファイト薄膜の形成2008

    • Author(s)
      米谷玲皇, 市橋鋭也, 割澤伸一, 石原直
    • Organizer
      2008年秋季 第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学, 愛知
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Direct Actuation of GaAs Membrane Using Microprobe of SPM2008

    • Author(s)
      K.Tamaru, K.Nonaka, M.Nagase, H.Yamaguchi, S.Warisawa, S.Ishihara
    • Organizer
      21^<st> Microprocesses and Nanotechnology Conf.(MNC2008)
    • Place of Presentation
      Fukuoka
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] GaASメンブレンのマイクロプローブによる加振と振幅検出2008

    • Author(s)
      田丸耕二郎, 野中啓一郎, 永瀬雅夫, 山口浩司, 割澤伸一, 石原直
    • Organizer
      2008年秋季 第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学, 愛知
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Direct Actuation of GaAs Membrane Using Microprobe of SPMA2008

    • Author(s)
      K. Tamaru, K. Nonaka, M. Nagase, H. Yamaguchi, S. Warisawa, S.Ishihara
    • Organizer
      20th International Mocroprocesses and Nanotechnology Conference(MNC2008)
    • Place of Presentation
      Fukuoka, Japan
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Resistivity change of the diamondlike carbon, deposited by focusedion-beam chemical vapor deposition, induced by the annealing treatment2008

    • Author(s)
      R. Kometani, T. Ichihashi, K. Kanda, T. Suzuk, K. Niihara, S. Ishihara, T. Kaito, S. Matsui
    • Organizer
      The 52nd International Conference on Electron, Ion and Photon Beam technoligy and Nanoabrication(EIPBN2008)
    • Place of Presentation
      Portland, USA
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Evaluation of Thermal-Machanical Vibration Amplitude Using Scanning Electron Microscopy Image2008

    • Author(s)
      K. Nonaka, K. Tamaru, M. Nagase, H. Yamaguchi, S. Warisawa, S.Ishihara
    • Organizer
      20th International Mocroprocesses and Nanotechnology Conference(MNC2008)
    • Place of Presentation
      Fukuoka, Japan
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] The Three-Dimensional Nano-Electromechanical Tool Fabrications by FIB-CVD for the Nono-Factory Creation2008

    • Author(s)
      R. Kometani and S. Ishihara
    • Organizer
      The Fouth International Nanotechnoligy Conference on Communication and Cooperation(INC4)
    • Place of Presentation
      Tokyo, Japan
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Drastic Improvement in mechanical properties of micromechanical resonators using a strain-engineered heterostructure2008

    • Author(s)
      K.Kato, K.Onomitsu, S.Warisawa, S.Ishihara, H.Yamaguchi
    • Organizer
      15^<th> International Conference on Molecular Beam Epitaxy (MBE2008)
    • Place of Presentation
      at the University of British Columbia, Vancouver, Canada
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Rapid Directed Self-Assembly of Cylinder-Forming Diblock Copolymers2008

    • Author(s)
      T. Yamaguchi, Y. Ozaki, J. Hayashi, K. Yamazaki, S. Waeisawa, S. Ishihara, and H. Yamaguchi
    • Organizer
      International Symposium on Engineering Micro-/Nano-Materials Based on Self-Assembling and Self-organization(ISEM2008)
    • Place of Presentation
      Tokyo, Japan
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Drastic Improvement in mechanical properties of microechanical resonators using a strain-engineered heterostructure2008

    • Author(s)
      K. Kato, K. Onomitsu, S. Warisawa, S. Ishihara, H. Yamaguchi
    • Organizer
      15th International Conference on Molecular Beam Epitaxy
    • Place of Presentation
      Vancouver, Canada
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] ブロック共重合体の面内ハーフシリンダー相の高速配向2008

    • Author(s)
      山口徹, 尾崎秦野, 林順三, 山崎謙治, 割澤伸一, 石原直, 山口浩司
    • Organizer
      2008年秋季 第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学, 愛知
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] 静的変位解放によるシリコンカンチレバーに振動特性評価2008

    • Author(s)
      野中啓一郎, 田丸耕二郎, 永瀬雅夫, 山口浩司, 割澤伸一, 石原直
    • Organizer
      2008年秋季 第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学, 愛知
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Graphite Shell Film Fromation induced by Eduction Phenomenon of Ga Implanted by Focused-ion-beam2008

    • Author(s)
      R. Kometani, T. Ichihashi, S. Warisawa and S. Ishihara
    • Organizer
      20th International Mocroprocesses and Nanotechnology Conference(MNC2008)
    • Place of Presentation
      Fukuoka, Japan
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Two-Dimensional Arrangement of Vertically Oriented Cylindrical Domains of Diblock Copolymers Using Graphoepitaxy with Artificial Guiding Pattern Layout2007

    • Author(s)
      T. Yamaguchi, M. Edamoto, S. Warisawa, S. Ishihara, and H. Yamaguchi
    • Organizer
      20th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Kyoto,Japan
    • Year and Date
      2007-11-06
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] FIB-CVDにより作製したカーボンナノピラーの構造解析2007

    • Author(s)
      田丸 耕二郎, 野中 啓一郎, 永瀬 雅夫, 山口 浩司, 割澤 伸一, 石原 直
    • Organizer
      2007年秋季第68回応用物理学会学術講演会
    • Place of Presentation
      北海道
    • Year and Date
      2007-09-07
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] カーボンナノピラーにおける熱励起機械振動の振幅評価2007

    • Author(s)
      野中 啓一郎, 田丸 耕二郎, 永瀬 雅夫, 山口 浩司, 割澤 伸一, 石原 直
    • Organizer
      2008年度精密工学会春季大会学術講演会
    • Place of Presentation
      神奈川
    • Year and Date
      2007-03-19
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] Control of Young's Modulus for Carbon Nanopillars Grown by Focused Ion Beam Induced Chemical Vapor Deposition2007

    • Author(s)
      K.Nonaka, K.Tamaru, M.Nagase, H.Yamaguchi, S.Warisawa, S.Ishihara
    • Organizer
      20^<th> Intn'l Microprocesses and Nanotechnology Conf.(MNC2007)
    • Place of Presentation
      Kyoto
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] FIB-CVDによるカーボンナノピラーの構造解析2007

    • Author(s)
      野中 啓一郎, 田丸 耕二郎, 永瀬 雅夫, 山口 浩司, 割澤 伸一, 石原 直
    • Organizer
      2007年度精密工学会秋季大会学術講i演会
    • Place of Presentation
      北海道
    • Year and Date
      2007-09-14
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] ナノ機械振動子の製作・評価2007

    • Author(s)
      加藤 慶一, 項 大雨, 山口 浩司, 割澤 伸一, 石原 直
    • Organizer
      2007年度精密工学会秋季大会学術講演会
    • Place of Presentation
      北海道
    • Year and Date
      2007-09-14
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] 引張応力印加による微小機械共振器の特性改善2007

    • Author(s)
      加藤 慶一, 中井 康貴, 小野満 恒二, 山口 浩司, 割澤 伸一, 石原 直
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      千葉
    • Year and Date
      2007-03-28
    • Data Source
      KAKENHI-PROJECT-19206016
  • [Presentation] AFMによるGaAsメンブレン構造の振動解析2007

    • Author(s)
      田丸 耕二郎, 加藤 慶一, 永瀬 雅夫, 山口 浩司, 割澤 伸一, 石原 直
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      千葉
    • Year and Date
      2007-03-28
    • Data Source
      KAKENHI-PROJECT-19206016
  • 1.  WARISAWA ShinーIchi (20262321)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 202 results
  • 2.  KOMETANI Reo (90466780)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 169 results
  • 3.  DELAUNEY JeanーJacques (80376516)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 7 results
  • 4.  YAMAGUCHI Hiroshi (60374071)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 52 results

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