Tanigawa Hiroshi 谷川紘

Researcher Number	00469199
Other IDs
Affiliation (based on the past Project Information) *help	2020: 立命館大学, 総合科学技術研究機構, 教授 2016 – 2017: 立命館大学, 総合科学技術研究機構, 教授 2015: 立命館大学, 総合科学技術研究機構, 上席研究員 2014: 立命館大学, 総合科学技術研究機構, 教授
Review Section/Research Field	Principal Investigator Nano/Microsystems Except Principal Investigator Communication/Network engineering
Keywords	Principal Investigator ネットワークアナライザ / 寄生容量 / フィードスルー電流 / ラメモード / エクステンショナルモード / リング共振器 / 電気機械変換効率 / ニッケルメッキ / 狭ギャップ / メッキ … More / MEMS / シリコン / 金属 / ナノ結晶 / 高周波 / 静電気力 / Q値 / エネルギ損失 / 共振器 … More Except Principal Investigator 指向性アンテナ / センサネットワーク / 低消費電力 / 走査 / 低損失 / ハイブリッドアンテナ / 高周波特性 / アレイアンテナ / MEMSアンテナ / レーダ / 自動追尾 / 共振 / 流体 / スイッチ / 振動 / 周波数可変 / フェーズドアレイ / 移送器 / MEMS / 機械走査 / PAA / ビーム走査 / ミリ波 / MEMSスイッチ / 移相器 / アンテナ / RF-MEMS Less

Ultra-low power consumption MEMS antenna with automatic trace function
- Principal Investigator
  
  Suzuki Kenichiro
- Project Period (FY)
  2016 – 2020
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Communication/Network engineering
- Research Institution
  Ritsumeikan University
Mechanism of energy loss in 1 GHz MEMS metal resonators due to nano-crystalPrincipal Investigator
- Principal Investigator
  
  Tanigawa Hiroshi
- Project Period (FY)
  2014 – 2016
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Nano/Microsystems
- Research Institution
  Ritsumeikan University

All 2019 2018 2017 2016 2015 2014

All Journal Article Presentation Book

[Book] 小さなものをつくるためのナノ/サブミクロン評価法2015
- Author(s)
  肥後矢吉編　谷川紘、鈴木健一郎、磯野吉正、荻博次、土屋智由、石山千恵美
- Total Pages
  196
- Publisher
  コロナ社
- Data Source
  KAKENHI-PROJECT-26390041
[Journal Article] Design and fabrication of a 20 MHz pn-diode silicon ring resonator with in-plane vibration mode2016
- Author(s)
  Y. Asahi, H. Tanigawa, T. Nishino, T. Furutsuka, and K. Suzuki
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 55
- NAID
  210000146682
- Peer Reviewed / Acknowledgement Compliant / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390041
[Journal Article] Frequency Switching with an 80 MHz MEMS Resonator Array Utilizing Torsional-to-Transverse Vibration Conversion2015
- Author(s)
  M. Kiso, H. Fujiura, M. Okada, H. Miyauchi, K. Niki, H. Tanigawa, and K. Suzuki
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines
  
  Volume: 135 Issue: 12 Pages: 502-508
- DOI
  10.1541/ieejsmas.135.502
- NAID
  130005112400
- ISSN
  1341-8939, 1347-5525
- Language
  English
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390041
[Journal Article] Microelectromechanical Systems Oscillator with an 80 MHz Resonator Utilizing Torsional-to-Transverse Vibration Conversion2015
- Author(s)
  M. Kiso, H. Fujiura, M. Okada, H. Miyauchi, K. Niki, H. Tanigawa, and K. Suzuki
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines
  
  Volume: 135 Issue: 12 Pages: 496-501
- DOI
  10.1541/ieejsmas.135.496
- NAID
  130005112401
- ISSN
  1341-8939, 1347-5525
- Language
  English
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390041
[Journal Article] Evaluation on two-port configuration of a Lame-mode octagonal microelectromechanical systems resonator driven by sliding driving electrodes2015
- Author(s)
  K. Tsujishita, H. Tanigawa, T. Furutsuka, and K. Suzuki
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 54 Issue: 6S1 Pages: 06FP05-06FP05
- DOI
  10.7567/jjap.54.06fp05
- Peer Reviewed / Acknowledgement Compliant / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390041
[Presentation] Vibratory silicon MEMS antenna integrated with a beam forming antenna array2019
- Author(s)
  K. Yasuhira, T. Furutsuka, H. Tanigawa, and K. Suzuki
- Organizer
  the 36th Sensor Symposium
- Data Source
  KAKENHI-PROJECT-16H02347
[Presentation] Development of a mechanically-vibrating MEMS antenna installed with a silicon antenna2018
- Author(s)
  K. Yasuhira, Y. Yamoto, T. Furutsuka, H. Tanigawa, and K. Suzuki
- Organizer
  the 35th Sensor Symposium on Sensors, Micromachines and Applied Systems
- Data Source
  KAKENHI-PROJECT-16H02347
[Presentation] Study on installation of antenna on a mechanically vibrating MEMS antenna2017
- Author(s)
  Y. Yamoto, H. Nishio, Y. Motoki, H. Tanigawa, T. Furutsuka, and K. Suzuki
- Organizer
  the 9th Integrated MEMS Symposium
- Data Source
  KAKENHI-PROJECT-16H02347
[Presentation] Evaluation on mechanical vibration of pn-diode ring actuator2016
- Author(s)
  T. Tsushima, Y. Asahi, H. Tanigawa, T. Furutsuka, and K. Suzuki
- Organizer
  the 8th Integrated MEMS Symposium
- Place of Presentation
  平戸文化センター(長崎県平戸市）
- Year and Date
  2016-10-26
- Data Source
  KAKENHI-PROJECT-26390041
[Presentation] Dependence on Driving Voltage Waveforms for a Nickel RF-MEMS Switch2015
- Author(s)
  Hiroshi Ono, Takayuki Higaki, Naoki Higasinaka, Tomoki Nishino, Hiroshi Tanigawa, and Kenichiro Suzuki
- Organizer
  the 7th Integrated MEMS Symposium
- Place of Presentation
  朱鷺メッセ（新潟県、新潟市）
- Year and Date
  2015-10-29
- Data Source
  KAKENHI-PROJECT-26390041
[Presentation] Design on MEMS Actuator for Driving Resonant Yagi-Uda Antenna2015
- Author(s)
  Yuhei Motoki, Ryo Inoue, Hiroshi Tanigawa, Tomoki Nishino, Takashi Furutsuka, and Kenichiro Suzuki
- Organizer
  the 7th Integrated MEMS Symposium
- Place of Presentation
  朱鷺メッセ（新潟県、新潟市）
- Year and Date
  2015-10-29
- Data Source
  KAKENHI-PROJECT-26390041
[Presentation] Desing on 60 MHz pn-diode silicon MEMS viration sensor2015
- Author(s)
  K. Baba, H. Tanigawa, T. Nishino, T. Furutsuka, and K. Suzuki
- Organizer
  he 7th Integrated MEMS Symposium
- Place of Presentation
  朱鷺メッセ（新潟県、新潟市）
- Year and Date
  2015-10-19
- Data Source
  KAKENHI-PROJECT-26390041
[Presentation] 20 MHz pn-diode silicon ring resonator with in-plane vibration mode2015
- Author(s)
  Y. Asahi, H. Tanigawa, T. Nishino, T. Furutsuka, and K. Suzuki
- Organizer
  2015 International Microprocesses and Nanotechnology Conference
- Place of Presentation
  Toyama International Conference Center（富山県、富山市）
- Year and Date
  2015-11-10
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390041
[Presentation] Evaluation on 60 MHz single-crystal silicon pn diode viration sensors2015
- Author(s)
  K. Baba, H. Tanigawa, T. Nishino, T. Furutsuka, and K. Suzuki
- Organizer
  2015 International Microprocesses and Nanotechnology Conference
- Place of Presentation
  Toyama International Conference Center（富山県、富山市）
- Year and Date
  2015-11-10
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390041
[Presentation] Influence of packaging on frequency drift in MEMS resonators2014
- Author(s)
  T. Nishida, Y. Higo, H. Tanigawa, and K. Suzuki
- Organizer
  IEEE CPMT Symposiumu Japan (ICSJ2014)
- Place of Presentation
  Kyoto University Clock Tower Centennial Hall（京都府）
- Year and Date
  2014-11-05
- Data Source
  KAKENHI-PROJECT-26390041
[Presentation] Evaluation on 12 MHz Silicon MEMS Resonators with Low-voltage-driven Shifting Electrodes2014
- Author(s)
  R. Osumi, K. Tsujishita, H. Tanigawa, and K. Suzuki
- Organizer
  the 31th Sensor Symposium
- Place of Presentation
  くにびきメッセ（島根県）
- Year and Date
  2014-10-21
- Data Source
  KAKENHI-PROJECT-26390041
[Presentation] Evaluation on Two-port Junction Configuration of a Lamé-Mode Octagonal Microelectromechanical Systems Resonator Driven by a Low DC Bias Voltage2014
- Author(s)
  K. Tsujishita, H. Tanigawa, and K. Suzuki
- Organizer
  2014 International Microprocesses and Nanotechnology Conference
- Place of Presentation
  ヒルトン福岡シーホーク（福岡県）
- Year and Date
  2014-11-05
- Data Source
  KAKENHI-PROJECT-26390041

1. Suzuki Kenichiro (70388122)

# of Collaborated Projects: 2 results

# of Collaborated Products: 15 results
2. 肥後矢吉 (30016802)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
3. 古塚岐 (90555608)

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results

Tanigawa Hiroshi 谷川 紘

Research Projects

Research Products

Co-Researchers

Ultra-low power consumption MEMS antenna with automatic trace function

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Mechanism of energy loss in 1 GHz MEMS metal resonators due to nano-crystalPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Book] 小さなものをつくるためのナノ/サブミクロン評価法2015

Author(s)

Total Pages

Publisher

Data Source

[Journal Article] Design and fabrication of a 20 MHz pn-diode silicon ring resonator with in-plane vibration mode2016

Author(s)

Journal Title

NAID

Data Source

[Journal Article] Frequency Switching with an 80 MHz MEMS Resonator Array Utilizing Torsional-to-Transverse Vibration Conversion2015

Author(s)

Journal Title

DOI

NAID

ISSN

Language

Data Source

[Journal Article] Microelectromechanical Systems Oscillator with an 80 MHz Resonator Utilizing Torsional-to-Transverse Vibration Conversion2015

Author(s)

Journal Title

DOI

NAID

ISSN

Language

Data Source

[Journal Article] Evaluation on two-port configuration of a Lame-mode octagonal microelectromechanical systems resonator driven by sliding driving electrodes2015

Author(s)

Journal Title

DOI

Data Source

[Presentation] Vibratory silicon MEMS antenna integrated with a beam forming antenna array2019

Author(s)

Organizer

Data Source

[Presentation] Development of a mechanically-vibrating MEMS antenna installed with a silicon antenna2018

Author(s)

Organizer

Data Source

[Presentation] Study on installation of antenna on a mechanically vibrating MEMS antenna2017

Author(s)

Organizer

Data Source

[Presentation] Evaluation on mechanical vibration of pn-diode ring actuator2016

Author(s)

Organizer

Place of Presentation

Year and Date

Data Source

[Presentation] Dependence on Driving Voltage Waveforms for a Nickel RF-MEMS Switch2015

Author(s)

Organizer

Place of Presentation

Year and Date

Data Source

[Presentation] Design on MEMS Actuator for Driving Resonant Yagi-Uda Antenna2015

Author(s)

Organizer

Place of Presentation

Year and Date

Data Source

[Presentation] Desing on 60 MHz pn-diode silicon MEMS viration sensor2015

Author(s)

Organizer

Tanigawa Hiroshi 谷川紘