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Sensors and Materials
Volume: 30 Issue: 12 Pages: 2999-2999
10.18494/sam.2018.2033
10.18494/SAM.2018.2033
Jpn. J. Appl. Phys.
Volume: 57 Issue: 11S Pages: 11UD09-11UD09
10.7567/jjap.57.11ud09
210000149803
Journal of Micromechanics and Microengineering
Volume: vol.23, no.5, (article no.045015)
10.1088/0960-1317/23/4/045015
Volume: vol.23, no.3, (article no.035027)
10.1088/0960-1317/23/3/035027