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yamanaka takuya  山中 卓也

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YAMANAKA Takuya  山中 卓也

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Researcher Number 00546335
Affiliation (Current) 2025: 徳島大学, 技術支援部常三島技術部門, 技術支援職員
Affiliation (based on the past Project Information) *help 2012 – 2014: 徳島大学, ソシオテクノサイエンス研究部, 技術専門職員
Review Section/Research Field
Except Principal Investigator
Thin film/Surface and interfacial physical properties
Keywords
Except Principal Investigator
シミュレーション / ヘリウムイオン / 二次電子放出 / イオン顕微鏡
  • Research Projects

    (1 results)
  • Research Products

    (6 results)
  • Co-Researchers

    (1 People)
  •  Simulation for evaluation of secondary electron signals in helium ion microscope

    • Principal Investigator
      OHYA Kaoru
    • Project Period (FY)
      2012 – 2014
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Thin film/Surface and interfacial physical properties
    • Research Institution
      The University of Tokushima

All 2013 Other

All Presentation

  • [Presentation] 走査イオン顕微鏡によるラインパターン計測のシミュレーション2013

    • Author(s)
      山中 卓也,大宅 薫
    • Organizer
      第33回ナノテスティングシンポジウム
    • Place of Presentation
      千里ライフサイエンスセンター(大阪府)
    • Data Source
      KAKENHI-PROJECT-24560029
  • [Presentation] Modeling Secondary Electron Emission from Line Edge Patterns in Scanning Ion Microscopes2013

    • Author(s)
      Ohya K, Yamanaka K
    • Organizer
      26th International Microprocess and Nanotechnology Conference
    • Place of Presentation
      Royton Sapporo (Hokkaido)
    • Data Source
      KAKENHI-PROJECT-24560029
  • [Presentation] Modeling secondary electron emission in scanning He ion microscope: comparison with scanning Ga ion and electron microscopes2013

    • Author(s)
      Ohya K, Yamanaka K
    • Organizer
      19th International Vacuum Congress
    • Place of Presentation
      Paris Palais des Congres (France)
    • Data Source
      KAKENHI-PROJECT-24560029
  • [Presentation] Modeling Ion Induced Secondary Electron Emission in Scanning Ion Microscopes2013

    • Author(s)
      Ohya K, Yamanaka K
    • Organizer
      9th International Symposium on Atomic Level Characterization for New Materials and Devices'13
    • Place of Presentation
      Sheraton Kona (USA)
    • Data Source
      KAKENHI-PROJECT-24560029
  • [Presentation] Modelling and observastion of a trench pattern on a silicon substrate in helium ion microscope

    • Author(s)
      Takuya Yamanaka, Kaoru Ohya, Emile van Veldhoven, Paul F. A. Alkemade, Diederik J. Maas
    • Organizer
      19th International Conference on Ion Beam Modification of Materials
    • Place of Presentation
      Pieter De Somer Auditorium, Leuven (Belgium)
    • Year and Date
      2014-09-14 – 2014-09-19
    • Data Source
      KAKENHI-PROJECT-24560029
  • [Presentation] Helium ion beam charging of an oxide layer on a silicon substrate: a comparison between observed and Monte Carlo-simulated results

    • Author(s)
      Kaoru Ohya, Takuya Yamanaka, Emile van Veldhoven, Paul F. A. Alkemade, Diederik J. Maas
    • Organizer
      19th International Conference on Ion Beam Modification of Materials
    • Place of Presentation
      Pieter De Somer Auditorium, Leuven (Belgium)
    • Year and Date
      2014-09-14 – 2014-09-19
    • Data Source
      KAKENHI-PROJECT-24560029
  • 1.  OHYA Kaoru (10108855)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 6 results

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