SHIBAYAMA Shigehisa 柴山茂久

… Alternative Names

柴山茂久シバヤマシゲヒサ

Shibayama Shigehisa 柴山茂久

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Researcher Number	00774126
Other IDs
Affiliation (Current)	2025: 名古屋大学, 工学研究科, 助教
Affiliation (based on the past Project Information) *help	2023: 名古屋大学, 工学研究科, 助教 2018: 名古屋大学, 工学研究科, 助教 2016 – 2017: 東京大学, 大学院工学系研究科(工学部), 特別研究員
Review Section/Research Field	Principal Investigator Medium-sized Section 21:Electrical and electronic engineering and related fields / Electronic materials/Electric materials
Keywords	Principal Investigator アルミニウム-スズ共晶 / スズ / ナノシート / 偏析 / ゲルマニウムスズ / 超格子 / 二元系遷移金属酸化物 / ピエゾ応答力顕微鏡 / ドーピング / 相図 … More / 核形成 / 強誘電体 / ZrO2 / HfO2 / 相変態 / 反強誘電性 / 強誘電性 / ジルコニウム酸化膜 / ハフニウム酸化膜 Less

Research Projects
(2 results)
Research Products
(28 results)

Al-Sn共晶を媒介とした拡散・偏析法を用いたスズハニカムナノシート合成への挑戦Principal Investigator
- Principal Investigator
  
  柴山茂久
- Project Period (FY)
  2023 – 2024
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Review Section
  
  Medium-sized Section 21:Electrical and electronic engineering and related fields
- Research Institution
  Nagoya University
Study of ferroelectricity of rare-earth transition binary oxide materialPrincipal Investigator
- Principal Investigator
  
  Shibayama Shigehisa
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Nagoya University
  The University of Tokyo

All 2024 2023 2019 2018 2017 2016

All Journal Article Presentation Book

[Book] Ferroelectricity in Doped Hafnium Oxide 1st Edition (CHAPTER 3.3 Ferroelectric Films by Physical Vapor Deposition and Ion Implantation)2019
- Author(s)
  Akira Toriumi, Lun Xu, Shigehisa Shibayama, Shinji Migita
- Total Pages
  570
- Publisher
  ELSEVIER
- ISBN
  9780081024300
- Data Source
  KAKENHI-PROJECT-16K14225
[Journal Article] Thermodynamic control of ferroelectric-phase formation in HfxZr1－xO2 and ZrO22018
- Author(s)
  S. Shibayama, T. Nishimura, S. Migita, and A. Toriumi
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 122 Issue: 18
- DOI
  10.1063/1.5028181
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K14225
[Journal Article] Evolution of ferroelectric HfO2 in ultrathin region down to 3-nm2018
- Author(s)
  Tian Xuan、Shibayama Shigehisa、Nishimura Tomonori、Yajima Takeaki、Migita Shinji、Toriumi Akira
- Journal Title
  
  Applied Physics Letters
  
  Volume: 112 Issue: 10
- DOI
  10.1063/1.5017094
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K14225, KAKENHI-PROJECT-15J10995
[Journal Article] Ferroelectricity of Non-doped Thin HfO2 Films in TiN/HfO2/TiN Stacks2016
- Author(s)
  T. Nishimura, L. Xu, S. Shibayama, T. Yajima, S. Migita, and A. Toriumi
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 55 Issue: 8S2 Pages: 08PB01-08PB01
- DOI
  10.7567/jjap.55.08pb01
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15J10995, KAKENHI-PROJECT-16K14225
[Journal Article] Ferroelectric phase stabilization of HfO2 by nitrogen doping2016
- Author(s)
  L. Xu, T. Nishimura, S. Shibayama, T. Yajima, S. Migita, and A. Toriumi
- Journal Title
  
  Applied Physics Express
  
  Volume: 9 Issue: 9 Pages: 091501-091501
- DOI
  10.7567/apex.9.091501
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15J10995, KAKENHI-PROJECT-16K14225
[Presentation] Al/GeSn(111)構造上への熱処理による極薄・高Sn組成GeSn表面偏析2024
- Author(s)
  柴山茂久、松本泰河、大田晃生、横川凌、坂下満男、黒澤昌志、中塚理
- Organizer
  特別研究会「電子デバイス界面テクノロジー研究会―材料・プロセス・デバイス特性の物理―」（第29回）
- Data Source
  KAKENHI-PROJECT-23K17745
[Presentation] Al/GeSn(111)構造からの偏析を用いた極薄・高Sn組成GeSnの形成2023
- Author(s)
  松本泰河、大田晃生、横川凌、坂下満男、黒澤昌志、中塚理、柴山茂久
- Organizer
  第10回応用物理学会SC東海地区学術講演会 2023 (JSAP SCTS 2023)
- Data Source
  KAKENHI-PROJECT-23K17745
[Presentation] Al/GeSn(111)エピタキシャル層構造からの偏析による極薄GeSn形成2023
- Author(s)
  松本泰河、柴山茂久、大田晃生、横川凌、黒澤昌志、坂下満男、中塚理
- Organizer
  2023年第84回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K17745
[Presentation] HfO2-ZrO2系薄膜の反強誘電性の発現過程について2019
- Author(s)
  柴山茂久, 坂下満男, 中塚理, 財満鎭明
- Organizer
  2019年第66回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16K14225
[Presentation] アンドープZrO2薄膜における強誘電性の実現2018
- Author(s)
  柴山茂久、西村知紀、右田真司、鳥海明
- Organizer
  2018年第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16K14225
[Presentation] Ferroelectric and anti-ferroelectric phase control of un-doped ZrO22018
- Author(s)
  S. Shibayama, T. Nishimura, S. Migita, and A. Toriumi
- Organizer
  2018 ISAF-FMA-AMF-AMEC-PFM Joint Conference (IFAAP 2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14225
[Presentation] HfxZr1-xO2が広い濃度領域で強誘電性を示す起源について2018
- Author(s)
  柴山茂久、西村知紀、右田真司、鳥海明
- Organizer
  2018年第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16K14225
[Presentation] Effect of internal-strain caused by monoclinic phase formation on ferroelectric phase formation of ZrO22018
- Author(s)
  S. Shibayama, T. Nishimura, X. Tian, S. Migita, and A. Toriumi
- Organizer
  2018 International Conference on Solid State Devices and Materials
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14225
[Presentation] Nucleation-Driven Ferroelectric Phase Formation in ZrO2 Thin Films -What is Different in ZrO2 from HfO2 ?-2018
- Author(s)
  S. Shibayama, T. Nishimura, S. Migita, and A. Toriumi
- Organizer
  2nd Electron Devices Technology and Manufacturing (EDTM) Conference 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14225
[Presentation] Understanding of ferroelectric phase formation mechanism for un-doped ZrO22018
- Author(s)
  S. Shibayama, T. Nishimura, S. Migita, and A. Toriumi
- Organizer
  12th International Workshop on New Group IV Semiconductor Nanoelectronics
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14225
[Presentation] HfO2膜の強誘電相形成における熱履歴の重要性2017
- Author(s)
  柴山茂久、徐倫、田旋、右田真司、鳥海明
- Organizer
  2017年第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（横浜）
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-16K14225
[Presentation] General relationship for cation and anion doping effects on ferroelectric HfO2 formation2017
- Author(s)
  L. Xu, S. Shibayama, K. Izukashi, T. Nishimura, T. Yajima, S. Migita, and A. Toriumi
- Organizer
  応用物理シリコンテクノロジー分科会第197回　研究集会
- Place of Presentation
  機会振興会館（東京）
- Year and Date
  2017-01-30
- Invited
- Data Source
  KAKENHI-PROJECT-16K14225
[Presentation] 圧電応答力顕微鏡を用いたYドープHfO2の強誘電性ドメインの観察2017
- Author(s)
  柴山茂久、徐倫、田旋、右田真司、鳥海明
- Organizer
  特別研究会「電子デバイス界面テクノロジー研究会―材料・プロセス・デバイス特性の物理―」（第22回）
- Place of Presentation
  東レ研修センター（三島）
- Year and Date
  2017-01-19
- Data Source
  KAKENHI-PROJECT-16K14225
[Presentation] Dopant-independent maximum Pr of doped ferroelectric HfO22017
- Author(s)
  L. Xu, S. Shibayama, T. Nishimura, T. Yajima, S. Migita, and A. Toriumi
- Organizer
  2017年第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（横浜）
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-16K14225
[Presentation] 10-nm-Scale Ferroelectric Domain Distribution in Ferroelectric HfO2 Observed by Using Piezo-Response Force Microscopy2016
- Author(s)
  S. Shibayama, L. Xu, X. Tian, S. Migita, and A. Toriumi
- Organizer
  7th International Symposium on control of semiconductor interfaces (ISCSI-VII)/International SiGe Technology and Device Meeting (ISTDM 2016)
- Place of Presentation
  Noyori Conference Hall, Nagoya University, Chikusa-ku, Nagoya (Japan)
- Year and Date
  2016-06-07
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14225
[Presentation] General relationship for cation and anion doping effects on ferroelectric HfO2 formation2016
- Author(s)
  L. Xu, S. Shibayama, K. Izukashi, T. Nishimura, T. Yajima, S. Migita, and A. Toriumi
- Organizer
  2016 IEEE International Electron Devices Meeting
- Place of Presentation
  San Francisco (USA)
- Year and Date
  2016-12-03
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14225
[Presentation] 圧電応答力顕微鏡を用いた強誘電性HfO2のエージング特性に関する研究2016
- Author(s)
  柴山茂久, 徐倫, 右田真司, 鳥海明
- Organizer
  応用物理シリコンテクノロジー分科会第194回　研究集会「2016 VLSI特別シンポジウム」特集
- Place of Presentation
  甲南大学（東京）
- Year and Date
  2016-08-23
- Invited
- Data Source
  KAKENHI-PROJECT-16K14225
[Presentation] Study of polarization uniformity in N-doped ferroelectric HfO2 by piezo-response force microscopy2016
- Author(s)
  L. Xu, S. Shibayama, T. Nishimura, T. Yajima, S. Migita, and A. Toriumi
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  朱鷺メッセ（新潟）
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-16K14225
[Presentation] 強誘電性HfO2膜における局所内部電界に起因する分極の不均質性2016
- Author(s)
  柴山茂久、徐倫、田旋、右田真司、鳥海明
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  朱鷺メッセ（新潟）
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-16K14225
[Presentation] Opportunity of Ferroelectric Phase Formation in Nitrogen-doped HfO22016
- Author(s)
  L. Xu, S. Shibayama, T. Nishimura, T. Yajima, S. Migita, and A. Toriumi
- Organizer
  2016 International Conference on Solid State Devices and Materials
- Place of Presentation
  Tsukuba International Congress Center, Tsukuba (Japan)
- Year and Date
  2016-09-26
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14225
[Presentation] Depolarization Process in Ferroelectric HfO2 Probed by Piezo-response Force Microscopy (PFM)2016
- Author(s)
  S. Shibayama, L. Xu, X. Tian, S. Migita, and A. Toriumi
- Organizer
  2016 International Conference on Solid State Devices and Materials
- Place of Presentation
  Tsukuba International Congress Center, Tsukuba (Japan)
- Year and Date
  2016-09-26
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14225
[Presentation] Effects of nitrogen bonding on para-/ferroelectric transition of HfO22016
- Author(s)
  L. Xu, T. Nishimura, S. Shibayama, T. Yajima, S. Migita, and A. Toriumi
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  朱鷺メッセ（新潟）
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-16K14225
[Presentation] Study of Wake‐up and Fatigue Properties in Doped and Undoped Ferroelectric HfO2 in Conjunction with Piezo‐Response Force Microscopy Analysis2016
- Author(s)
  S. Shibayama, L. Xu, S. Migita, and A. Toriumi
- Organizer
  2016 Symposia on VLSI Technology and Circuits
- Place of Presentation
  Hawaii (USA)
- Year and Date
  2016-06-13
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K14225

SHIBAYAMA Shigehisa 柴山 茂久

柴山 茂久 シバヤマ シゲヒサ

Shibayama Shigehisa 柴山 茂久

Research Projects

Research Products

Al-Sn共晶を媒介とした拡散・偏析法を用いたスズハニカムナノシート合成への挑戦Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Study of ferroelectricity of rare-earth transition binary oxide materialPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Book] Ferroelectricity in Doped Hafnium Oxide 1st Edition (CHAPTER 3.3 Ferroelectric Films by Physical Vapor Deposition and Ion Implantation)2019

Author(s)

Total Pages

Publisher

ISBN

Data Source

[Journal Article] Thermodynamic control of ferroelectric-phase formation in HfxZr1－xO2 and ZrO22018

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Evolution of ferroelectric HfO2 in ultrathin region down to 3-nm2018

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Ferroelectricity of Non-doped Thin HfO2 Films in TiN/HfO2/TiN Stacks2016

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Ferroelectric phase stabilization of HfO2 by nitrogen doping2016

Author(s)

Journal Title

DOI

Data Source

[Presentation] Al/GeSn(111)構造上への熱処理による極薄・高Sn組成GeSn表面偏析2024

Author(s)

Organizer

Data Source

[Presentation] Al/GeSn(111)構造からの偏析を用いた極薄・高Sn組成GeSnの形成2023

Author(s)

Organizer

Data Source

[Presentation] Al/GeSn(111)エピタキシャル層構造からの偏析による極薄GeSn形成2023

Author(s)

Organizer

Data Source

[Presentation] HfO2-ZrO2系薄膜の反強誘電性の発現過程について2019

Author(s)

Organizer

Data Source

[Presentation] アンドープZrO2薄膜における強誘電性の実現2018

Author(s)

Organizer

Data Source

[Presentation] Ferroelectric and anti-ferroelectric phase control of un-doped ZrO22018

Author(s)

Organizer

Data Source

[Presentation] HfxZr1-xO2が広い濃度領域で強誘電性を示す起源について2018

Author(s)

Organizer

Data Source

[Presentation] Effect of internal-strain caused by monoclinic phase formation on ferroelectric phase formation of ZrO22018

Author(s)

Organizer

Data Source

[Presentation] Nucleation-Driven Ferroelectric Phase Formation in ZrO2 Thin Films -What is Different in ZrO2 from HfO2 ?-2018

Author(s)

Organizer

Data Source

[Presentation] Understanding of ferroelectric phase formation mechanism for un-doped ZrO22018

SHIBAYAMA Shigehisa 柴山茂久

柴山茂久シバヤマシゲヒサ

Shibayama Shigehisa 柴山茂久