Takei Yoshinori 武井良憲

… Alternative Names

TAKEI Yoshinori 武井良憲

武井良憲タケイヨシノリ

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Researcher Number	00805145
Other IDs	https://orcid.org/0000-0001-5970-3809
Affiliation (Current)	2024: 国立研究開発法人産業技術総合研究所, 計量標準総合センター, 主任研究員
Affiliation (based on the past Project Information) *help	2022 – 2024: 国立研究開発法人産業技術総合研究所, 計量標準総合センター, 主任研究員 2018 – 2021: 国立研究開発法人産業技術総合研究所, 計量標準総合センター, 研究員 2014 – 2016: 東京大学, 工学系研究科, 特別研究員(DC1)
Review Section/Research Field	Principal Investigator Basic Section 21030:Measurement engineering-related / Production engineering/Processing studies
Keywords	Principal Investigator 標準 / 圧力 / 光学式圧力計 / 真空 / 熱力学温度 / 屈折率 / 圧力標準 / 分極率 / ファブリ・ペロ共振器 / ファブリペロ共振器 … More / 計測 / 屈折率計 / 真空計測 / 大型光学素子 / Large Telescope / 計測システム / 真円度測定 / 回転楕円 / 軟X線集光ミラー / ノズル型EEM / 運動誤差 / 多点法 / 形状修正加工 / 真円度測定器 / マンドレル / EEM / 回転楕円ミラー / 軟X線 / 超精密加工 / 2ガス法 / 光学式圧力標準 / 温度の絶対値計測 / 気体の屈折率計測 / 真空の圧力の絶対値計測 / 計量 / 光学的圧力計測 / 絶対値 / 不確かさ / ファブリペロ Less

Research Projects
(4 results)
Research Products
(44 results)

クアッドキャビティを用いた光学式圧力計による圧力の絶対値計測Principal Investigator
- Principal Investigator
  
  武井良憲
- Project Period (FY)
  2022 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 21030:Measurement engineering-related
- Research Institution
  National Institute of Advanced Industrial Science and Technology
Development of optical pressure measurement systemPrincipal Investigator
- Principal Investigator
  
  Takei Yoshinori
- Project Period (FY)
  2020 – 2021
- Research Category
  
  Grant-in-Aid for Early-Career Scientists
- Review Section
  
  Basic Section 21030:Measurement engineering-related
- Research Institution
  National Institute of Advanced Industrial Science and Technology
Development of pressure measurement system using optical methodPrincipal Investigator
- Principal Investigator
  
  TAKEI Yoshinori
- Project Period (FY)
  2018 – 2019
- Research Category
  
  Grant-in-Aid for Early-Career Scientists
- Review Section
  
  Basic Section 21030:Measurement engineering-related
- Research Institution
  National Institute of Advanced Industrial Science and Technology
３次元ナノ精度形状修正加工システムの構築と次世代軟Ｘ線ミラーへの展開Principal Investigator
- Principal Investigator
  
  武井良憲
- Project Period (FY)
  2014 – 2016
- Research Category
  
  Grant-in-Aid for JSPS Fellows
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo

All 2024 2023 2022 2021 2020 2019 2018 2017 2016 2015 Other

All Journal Article Presentation

[Journal Article] Challenges of an optical pressure standard in medium vacuum measurements2022
- Author(s)
  Takei Yoshinori、Telada Souichi、Yoshida Hajime、Bitou Youichi、Kobata Tokihiko
- Journal Title
  
  Measurement: Sensors
  
  Volume: - Pages: 100371-100371
- DOI
  10.1016/j.measen.2022.100371
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20K14758, KAKENHI-PROJECT-23K22775
[Journal Article] In-situ measurement of mirror deformation using dual Fabry-Perot cavities for optical pressure standard2021
- Author(s)
  Takei Yoshinori、Telada Souichi、Yoshida Hajime、Arai Kenta、Bitou Youichi、Kobata Tokihiko
- Journal Title
  
  Measurement
  
  Volume: 173 Pages: 108496-108496
- DOI
  10.1016/j.measurement.2020.108496
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20K14758
[Journal Article] Towards medium vacuum measurements using an optical pressure standard2021
- Author(s)
  Takei Yoshinori、Telada Souichi、Yoshida Hajime、Bitou Youichi、Kobata Tokihiko
- Journal Title
  
  Measurement: Sensors
  
  Volume: 18 Pages: 100339-100339
- DOI
  10.1016/j.measen.2021.100339
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20K14758
[Journal Article] Development of an optical pressure measurement system using an external cavity diode laser with a wide tunable frequency range2020
- Author(s)
  Yoshinori Takei, Kenta Arai, Hajime Yoshida, Youichi Bitou, Souichi Telada, Tokihiko Kobata
- Journal Title
  
  Measurement
  
  Volume: 151 Pages: 1-5
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-18K13771
[Journal Article] Newly developed pressure measurement system using an optical method at NMIJ2019
- Author(s)
  Yoshinori Takei, Kenta Arai, Hajime Yoshida, Youichi Bitou, Souichi Telada, Tokihiko Kobata
- Journal Title
  
  USB for APMF2019 conference
  
  Volume: 1 Pages: 1-5
- Data Source
  KAKENHI-PROJECT-18K13771
[Journal Article] Accurate and wide-range radius of curvature measurement directly linked to a time standard using a FabryPerot cavity2018
- Author(s)
  Youichi Bitou, Yoshinori Takei, Souichi Telada,
- Journal Title
  
  Precision Engineering
  
  Volume: Volume 54 Pages: 149-153
- DOI
  10.1016/j.precisioneng.2018.05.011
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-18K13771
[Journal Article] 軟X線回転体ミラーのマンドレル作製システムの開発（第2報）－複数の変位計を用いた自由曲線形状の計測装置開発－2017
- Author(s)
  武井良憲，三村秀和
- Journal Title
  
  精密工学会誌
  
  Volume: 印刷中
- NAID
  130005689946
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-14J08051
[Journal Article] System Development for Fabricating Mandrel of Soft X-ray Rotating-Body Mirror (1st Report)2017
- Author(s)
  武井良憲，三村秀和
- Journal Title
  
  Journal of the Japan Society for Precision Engineering
  
  Volume: 83 Issue: 3 Pages: 245-250
- DOI
  10.2493/jjspe.83.245
- NAID
  130005436044
- ISSN
  0912-0289, 1882-675X
- Language
  Japanese
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-15H02041, KAKENHI-PROJECT-14J08051
[Presentation] 光学式圧力標準におけるファブリ・ペロ共振器の熱膨張変形の軽減2024
- Author(s)
  武井良憲, 寺田聡一, 吉田肇, 尾藤洋一
- Organizer
  精密工学会2023年度春季大会
- Data Source
  KAKENHI-PROJECT-23K22775
[Presentation] Recent studies for vacuum standards ~ static expansion system, dimensional measurements for pressure balances, and optical pressure standard ~2023
- Author(s)
  Yoshinori Takei
- Organizer
  日本表面真空学会学術講演会
- Invited
- Data Source
  KAKENHI-PROJECT-23K22775
[Presentation] Recent studies to advance pressure and vacuum standards through the use of length and dimensional measurement techniques2023
- Author(s)
  Yoshinori Takei
- Organizer
  Emerging Scientist Workshop 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K22775
[Presentation] Recent studies to advance pressure and vacuum standards through the use of quantum techniques in NMIJ2023
- Author(s)
  Yoshinori Takei
- Organizer
  The 65th KVS Summer Annual Conference & IFFM 2023
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K22775
[Presentation] Vacuum pressure standards through the use of laser and dimensional measurement techniques2023
- Author(s)
  Yoshinori Takei
- Organizer
  International Symposium on Ultraprecision Engineering and Nanotechnology
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K22775
[Presentation] Progress towards dimensional measurements for piston-cylinder of pressure balance2023
- Author(s)
  Yoshinori Takei , Yohan Kondo, Hiroaki Kajikawa, Tsukasa Watanabe
- Organizer
  2023 CCM & IMEKO TC16 7th International Conference on Pressure and Vacuum Metrology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K22775
[Presentation] Measurement of deformation coefficient of Fabry-Perot cavity using two gas method in optical pressure standard2022
- Author(s)
  Yoshinori Takei, Souichi Telada, Hajime Yoshida, Youichi Bitou, Tokihiko Kobata
- Organizer
  IVC-22 (The 22nd International Vacuum Congress)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K22775
[Presentation] レーザの光周波数計測技術の気体圧力計測への応用2022
- Author(s)
  武井良憲、吉田肇、寺田聡一、尾藤洋一、小畠時彦
- Organizer
  精密工学会 2021年度春季大会
- Data Source
  KAKENHI-PROJECT-20K14758
[Presentation] ファブリペロ共振器を用いた曲率半径測定2022
- Author(s)
  尾藤洋一、武井良憲、寺田聡一
- Organizer
  精密工学会
- Data Source
  KAKENHI-PROJECT-23K22775
[Presentation] ファブリ・ペロ共振器を利用した光学式圧力計測装置の開発　―気体の圧力を屈折率と温度から求める―2021
- Author(s)
  武井良憲、寺田聡一、吉田肇、新井健太、小畠時彦
- Organizer
  精密工学会 2021年度春季大会
- Data Source
  KAKENHI-PROJECT-20K14758
[Presentation] 光学式圧力標準の開発　～圧力を屈折率と温度から求める～2021
- Author(s)
  武井良憲、吉田肇、寺田聡一、尾藤洋一、小畠時彦
- Organizer
  2021年日本表面真空学会学術講演会
- Invited
- Data Source
  KAKENHI-PROJECT-20K14758
[Presentation] Towards medium vacuum measurements using an optical pressure standard2021
- Author(s)
  Takei Yoshinori、Telada Souichi、Yoshida Hajime、Bitou Youichi、Kobata Tokihiko
- Organizer
  IMEKO2021
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K14758
[Presentation] 光学式圧力計の開発と低真空における性能評価2019
- Author(s)
  武井良憲、吉田肇、新井健太、寺田聡一、尾藤洋一、小畠時彦
- Organizer
  2019年日本表面真空学会学術講演会
- Data Source
  KAKENHI-PROJECT-18K13771
[Presentation] Improvement of optical pressure measurement system by stabilizing temperature inside chamber at 1 mK level.2019
- Author(s)
  Yoshinori Takei, Kenta Arai, Hajime Yoshida, Youichi Bitou, Souichi Telada, Tokihiko Kobata
- Organizer
  IVC-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K13771
[Presentation] Newly developed pressure measurement system using an optical method at NMIJ2019
- Author(s)
  Yoshinori Takei, Kenta Arai, Hajime Yoshida, Youichi Bitou, Souichi Telada, Tokihiko Kobata
- Organizer
  APMF2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K13771
[Presentation] Development of a pressure measurement system using an Optical method2018
- Author(s)
  Yoshinori Takei, Kenta Arai, Hajime Yoshida, Youichi Bitou, Souichi Telada, and Tokihiko Kobata.
- Organizer
  Asia Pacific Metrology Program(APMP) 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K13771
[Presentation] Development of a measurement system for pressures in vacuum regions using an optical method2018
- Author(s)
  Yoshinori Takei, Kenta Arai, Hajime Yoshida, Youichi Bitou, Souichi Telada, and Tokihiko Kobata.
- Organizer
  65th AVS(American Vacuum Society) International Symposium and Exhibition.
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K13771
[Presentation] 圧力計測のためのファブリ・ペロ共振器を用いた屈折率計測システムの開発2018
- Author(s)
  武井良憲、吉田肇、新井健太、寺田聡一、尾藤洋一、小畠時彦
- Organizer
  公益社団法人精密工学会 2018年度秋季大会
- Data Source
  KAKENHI-PROJECT-18K13771
[Presentation] 屈折率の計測による真空域の圧力計測装置の開発2018
- Author(s)
  武井良憲、吉田肇、新井健太、寺田聡一、尾藤洋一、小畠時彦
- Organizer
  公益社団法人日本表面真空学会 2018年日本表面真空学会学術講演会
- Data Source
  KAKENHI-PROJECT-18K13771
[Presentation] 回転楕円ミラー用マンドレルの3次元高精度形状計測法の開発2017
- Author(s)
  久米健大，武井良憲，三村秀和
- Organizer
  精密工学会
- Place of Presentation
  慶応義塾大学
- Year and Date
  2017-03-13
- Data Source
  KAKENHI-PROJECT-14J08051
[Presentation] 回転楕円ミラーによる高次高調波集光システムの開発2017
- Author(s)
  本山央人，岩崎純史，佐藤堯洋，武井良憲，久米健大，江川悟，山内薫，三村秀和
- Organizer
  精密工学会
- Place of Presentation
  慶応義塾大学
- Year and Date
  2017-03-13
- Data Source
  KAKENHI-PROJECT-14J08051
[Presentation] Development of a surface profiler for mandrel of ellipsoidal soft x-ray focusing mirror2016
- Author(s)
  Yoshinori Takei, Hidekazu Mimura
- Organizer
  SPIE
- Place of Presentation
  San diego,United States
- Year and Date
  2016-08-28
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-14J08051
[Presentation] Development of figure correction system for master mandrel of ellipsoidal x-ray mirror2016
- Author(s)
  Yoshinori Takei, Takahiro Higashi and Hidekazu Mimura
- Organizer
  XOPT
- Place of Presentation
  パシフィコ横浜
- Year and Date
  2016-05-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-14J08051
[Presentation] X 線集光用回転楕円ミラーのマンドレル作製プロセスの開発2016
- Author(s)
  武井良憲，松澤雄介，三村秀和
- Organizer
  精密工学会
- Place of Presentation
  茨城大学
- Year and Date
  2016-09-06
- Data Source
  KAKENHI-PROJECT-14J08051
[Presentation] evelopment of a surface profiler for mandrel of ellipsoidal soft x-ray focusing mirror2016
- Author(s)
  Yoshinori Takei, Hidekazu Mimura
- Organizer
  SPIE
- Place of Presentation
  アメリカ、サンディエゴ
- Year and Date
  2016-08-28
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-14J08051
[Presentation] Development of figure correction system for master mandrel of ellipsoidal x-ray mirror2016
- Author(s)
  Yoshinori Takei, Takahiro Higashi and Hidekazu Mimura
- Organizer
  XOPT
- Place of Presentation
  Pacifico Yokohama, Yokohama, Kanagawa
- Year and Date
  2016-05-17
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-14J08051
[Presentation] 高精度マンドレル作製と高精度形状転写による軟 X 線回転楕円ミラーの作製2016
- Author(s)
  武井良憲，久米健大，竹尾陽子，三村秀和
- Organizer
  放射光科学シンポジウム
- Place of Presentation
  東京大学、文京区、東京都
- Year and Date
  2016-01-09
- Data Source
  KAKENHI-PROJECT-14J08051
[Presentation] 回転楕円ミラー用マンドレルの形状計測装置の開発とその形状修正加工2015
- Author(s)
  武井良憲，東隆裕，三村秀和
- Organizer
  2015年度精密工学会秋季大会
- Place of Presentation
  東北大学、宮城県、仙台市
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-14J08051
[Presentation] Roundness correction processing with nanometer order accuracy.2015
- Author(s)
  Y. Takei and H. Mimura
- Organizer
  12th ISMTII
- Place of Presentation
  Taipei, Taiwan
- Year and Date
  2015-09-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-14J08051
[Presentation] Development of ellipsoidal focusing mirror for soft x-ray and extreme ultraviolet light2015
- Author(s)
  Hidekazu Mimura, Yoshinori Takei, Takahiro Saito, Takehiro Kume, Hiroto Motoyama, Satoru Egawa, Yoko Takeo, Takahiro Higashi
- Organizer
  SPIE
- Place of Presentation
  San diego,United States
- Year and Date
  2015-09-07
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-14J08051
[Presentation] Fabrication of Soft X-ray Ellipsoidal Focusing Mirror by Highly Accurate Electroforming Process
- Author(s)
  T. Kume, Y. Takei, T. Saito, H. Motoyama, S. Egawa, H. Mimura
- Organizer
  ICPE2014 (The 15th International Conference on Precision Engineering)
- Place of Presentation
  Kanazawa, Japan
- Year and Date
  2014-07-22 – 2014-07-25
- Data Source
  KAKENHI-PROJECT-14J08051
[Presentation] 複数の1 nm分解能レーザプローブを用いたX線ミラー用計測装置の開発
- Author(s)
  東隆裕，武井良憲，三村秀和
- Organizer
  2014年精密工学会秋季大会
- Place of Presentation
  鳥取大学，　鳥取県
- Year and Date
  2014-09-16 – 2014-09-18
- Data Source
  KAKENHI-PROJECT-14J08051
[Presentation] Roundness correction processing with nanometer order accuracy
- Author(s)
  Yoshinori Takei, Hidekazu Mimura
- Organizer
  the 12th International Symposiumon Measurement Technology and Intelligent Instruments (ISMTII 2015)
- Place of Presentation
  Taipei, Taiwan
- Year and Date
  2015-09-22 – 2015-09-25
- Data Source
  KAKENHI-PROJECT-14J08051
[Presentation] 再現性１nmの大型光学素子計測システム
- Author(s)
  武井良憲, Renaud Jourdain, Paul Morantz and Paul Shore
- Organizer
  2015年精密工学会春季大会
- Place of Presentation
  東洋大学，東京都
- Year and Date
  2015-03-17 – 2015-03-19
- Data Source
  KAKENHI-PROJECT-14J08051
[Presentation] Investigation of large optics measurement system with 1 nm repeatability
- Author(s)
  Yoshinori Takei, Renaud Jourdain, Paul Morantz and Paul Shore
- Organizer
  Structured & Freeform Surfaces Meeting
- Place of Presentation
  Padova, Italy
- Year and Date
  2014-11-19 – 2014-11-20
- Data Source
  KAKENHI-PROJECT-14J08051
[Presentation] 複数の1 nm分解能レーザプローブを用いたX線ミラー形状計測装置の開発（第2報） ‐計測精度の向上と評価‐
- Author(s)
  東隆裕，武井良憲，齋藤貴宏，久米健大，三村秀和
- Organizer
  2015年精密工学会春季大会
- Place of Presentation
  東洋大学, 東京都
- Year and Date
  2015-03-17 – 2015-03-19
- Data Source
  KAKENHI-PROJECT-14J08051

Takei Yoshinori 武井 良憲

TAKEI Yoshinori 武井 良憲

武井 良憲 タケイ ヨシノリ

Research Projects

Research Products

クアッドキャビティを用いた光学式圧力計による圧力の絶対値計測Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Development of optical pressure measurement systemPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Development of pressure measurement system using optical methodPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

３次元ナノ精度形状修正加工システムの構築と次世代軟Ｘ線ミラーへの展開Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] Challenges of an optical pressure standard in medium vacuum measurements2022

Author(s)

Journal Title

DOI

Data Source

[Journal Article] In-situ measurement of mirror deformation using dual Fabry-Perot cavities for optical pressure standard2021

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Towards medium vacuum measurements using an optical pressure standard2021

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Development of an optical pressure measurement system using an external cavity diode laser with a wide tunable frequency range2020

Author(s)

Journal Title

Data Source

[Journal Article] Newly developed pressure measurement system using an optical method at NMIJ2019

Author(s)

Journal Title

Data Source

[Journal Article] Accurate and wide-range radius of curvature measurement directly linked to a time standard using a FabryPerot cavity2018

Author(s)

Journal Title

DOI

Data Source

[Journal Article] 軟X線回転体ミラーのマンドレル作製システムの開発（第2報）－複数の変位計を用いた自由曲線形状の計測装置開発－2017

Author(s)

Journal Title

NAID

Data Source

[Journal Article] System Development for Fabricating Mandrel of Soft X-ray Rotating-Body Mirror (1st Report)2017

Author(s)

Journal Title

DOI

NAID

ISSN

Language

Data Source

[Presentation] 光学式圧力標準におけるファブリ・ペロ共振器の熱膨張変形の軽減2024

Author(s)

Organizer

Data Source

[Presentation] Recent studies for vacuum standards ~ static expansion system, dimensional measurements for pressure balances, and optical pressure standard ~2023

Author(s)

Organizer

Data Source

[Presentation] Recent studies to advance pressure and vacuum standards through the use of length and dimensional measurement techniques2023

Author(s)

Takei Yoshinori 武井良憲

TAKEI Yoshinori 武井良憲

武井良憲タケイヨシノリ

[Presentation] ファブリ・ペロ共振器を利用した光学式圧力計測装置の開発　―気体の圧力を屈折率と温度から求める―2021

[Presentation] 光学式圧力標準の開発　～圧力を屈折率と温度から求める～2021