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HATTORI Shuzo  服部 秀三

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服部 秀三  ハツトリ シユウゾウ

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Researcher Number 10023003
External Links
Affiliation (based on the past Project Information) *help 1991 – 1993: 名古屋産業科学研究所, 電子機械部長
1989 – 1991: (財)名古屋産業科学研究所, 電子機械研究部, 部長
1990: 名古屋大学, 名誉教授
1988: Dept. of Engineering, Nagoya University, Professor, 工学部, 教授
1986: 名大, 工学部, 教授
1985: 名古屋大学, 工, 教授
Review Section/Research Field
Principal Investigator
電子材料工学
Except Principal Investigator
機械工作
Keywords
Principal Investigator
Laser interferometer / X-ray source / Dry process / Plasma polymerization / X-ray resist / X-ray lithography / プラズマ重合装置 / 二重双光路レーザ干渉膜厚計 G値 / 自己現像 / アラインメント … More / レーザ干渉膜厚計 / X線源 / ドライプロセス / プラズマ重合 / X線レジスト / X線リソグラフィ … More
Except Principal Investigator
光励起プロセス / Electronic static motor / Effect of carrier gas / Submicron pattern fabrication / Plasma polymerized alpha-methyle-styrene / plasma polymerized styrene / three dementional machining / Plasma polymerized resist / キャリヤガス効果 / 電子線リングラフィ立体加工法 / 静電モ-タ加工 / キセリヤ-ガス効果 / 静電モ-タ-加工 / キャリヤ-ガス効果 / サブミクロンパタ-ン加工 / プラズマ重合αメチルスチレンネガレジスト / プラズマ重合スチレンネガレジスト / 電子線リソグラフィ立体加工法 / プラズマ重合レジスト Less
  • Research Projects

    (5 results)
  • Co-Researchers

    (12 People)
  •  半導体における光励起プロセスの基礎(総括班)

    • Principal Investigator
      高橋 清
    • Project Period (FY)
      1993
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Tokyo Institute of Technology
  •  半導体における光励起プロセスの基礎(総括班)

    • Principal Investigator
      高橋 清
    • Project Period (FY)
      1991
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Tokyo Institute of Technology
  •  半導体における光励起プロセスの基礎(総括班)

    • Principal Investigator
      高橋 清
    • Project Period (FY)
      1990
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Tokyo Institute of Technology
  •  Development and application of the three dimentional fabrication method of micro-mechanical device using plasma polymerized resist

    • Principal Investigator
      MORITA Shinzo
    • Project Period (FY)
      1989 – 1991
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      機械工作
    • Research Institution
      Nagoya University
  •  Research on Resist for X-ray and E-B Total Dry Vacuum LithographyPrincipal Investigator

    • Principal Investigator
      HATTORI Shuzo
    • Project Period (FY)
      1984 – 1986
    • Research Category
      Grant-in-Aid for General Scientific Research (A)
    • Research Field
      電子材料工学
    • Research Institution
      Nagoya University
  • 1.  高橋 清 (10016313)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 2.  廣田 栄治 (30011464)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 3.  西沢 潤一 (20006208)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 4.  伊藤 糾次 (90063205)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 5.  明石 和夫 (00013095)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 6.  MORITA Shinzo (00076548)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 7.  HANE Kazuhiro (50164893)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 8.  松田 文夫 (60109303)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 9.  UCHIKAWA Yoshiki (20023260)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 10.  MARUSE Susumu (20022981)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 11.  IEDA Masayuki (50022984)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 12.  UCHIDA Yoshiyuki (20023187)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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