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HIROSE Masataka  廣瀬 全孝

ORCIDConnect your ORCID iD *help
Researcher Number 10034406
External Links
Affiliation (based on the past Project Information) *help 1987 – 1998: 広島大学, 工学部, 教授
1986: Department of Engineering, Hiroshima University, Professor, 工学部, 教授
1985: 広島大学, 工, 教授
Review Section/Research Field
Principal Investigator
電子材料工学 / Electronic materials/Electric materials
Except Principal Investigator
Electronic materials/Electric materials / 計算機科学
Keywords
Principal Investigator
表面反応 / FT-IR-ATR / 質量分析 / 吸着ラジカル / LPCVD / 原子間力顕微鏡 / AFM / SiO_2 / デジタルエッチング / レーザ誘起光化学反応 … More / プラズマ / Grow Discharge Plasma / Epitaxy / Radical Beam / ラマン散乱分光 / 反射高速電子線回析 / RHEED / EC放電 / 電子サイクロトロン共鳴 / グロー放電プラズマ / エピタキシャル成長 / ラジカルビーム / Photochemical Reaction / Vacuum Ultra-Violet / Photochemical Etching / 真空紫外光 / 光化学反応 / 真空紫外線 / 光励起クリーニング / intial uncleathion / laser CVD / excimer laser / 選択CVD / 初期核形成 / レーザーCVD / エキシマーレーザー / luminessence at room temperature / atomic force microscopy / tunneling current / resonant tunneling / double barrier structure / self-assembling / silicon quantum dot / 帯電 / 光電子スペクトル / 可視域発光 / フォトルミネッセンス / 室温量子効果 / 化学気相成長 / 室温発光 / トンネル電流 / 共鳴トンネル効果 / 二重障壁構造 / 自己組織化 / シリコン量子ドット / Selective growth technique / Planarization technique / Real time monitoring / Silicon dioxide / Plasma CVD / シリコン薄膜 / 選択成長法 / 平坦化技術 / その場観察 / 全反射赤外吸収分光 / シリコン酸化膜 / プラズマCVD / Si interface / Layr-by-layr oxidation / Atomic step structure / Hydrogen-terminated Si / Surface microroughness / Silicon surface / 全反射赤外吸収分析 / 表面酸化 / 圧縮性応力 / LOフォノン / layer by layer酸化 / 表面モフォロジー / Si界面 / 原子層酸化 / 原子ステップ構造 / 水素終端表面 / 表面マイクロラフネス / シリコン表面 / レーザ誘起脱離 / 弗化層 / エクシマレーザ / エッチング / ジシラン吸着層 / レ-ザ誘起反応 / エキシマレ-ザ / 炭酸ガスレ-ザ / マイクロロ-ディング / 冷却プラズマCVD / レ-ザ誘起光化学反応 / デジタルCVD … More
Except Principal Investigator
プラズマの制御 / 反応性プラズマ / プラズマプロセシング / Hydrogen Terminated Si Surface / Interface State Density / Photoelectron Escape Depth / Valence Band State Density / Surface States Density / Sur11face Fermi Level / Photoelectron Yield Spectroscopy / c-Si Interface / Ultrathin SiO_2 / 仕事関数 / 電子占有状態 / 極薄シリコン酸化膜 / 表面準位 / 界面準位 / 表面・界面欠陥 / 光電子収率分光 / ケルビンプローブ / 欠陥準位密度 / 水素終端Si処理 / 界面準位密度 / 光電子脱出深さ / 価電子帯状態密度 / 表面準位密度 / フェルミ準位 / 光電子収率分光法 / Si界面 / 極薄SiO_2 / SS-CDMA cellular system / wireless multimedia / optical waveguide / parallel optical wiring / flexware system / super-parallel image processing / dielectric breakdown / thin gate oxide / SAW機能素子 / スペクトラム拡散通信 / パターン認識 / 光インターコネクション / Flexware / Neuron-MOS / デバイスシミュレーション / SAM相関器 / グレーティングカプラ / 光導波路 / 右脳的情報処理 / ホットキャリア効果 / キャリア輸送 / SAW相関器 / CDMA / SS / コホ-ネンネット / プロセッサ・メモリ融合ユニット / 4端子デバイス / ホットエレクトロン / 近似同期CDMA符号 / パケットSS-CDMAシステム / 超並列画像処理システム / 特徴量プリプロセス / 上位桁先行演算 / DSP / セル化SS-CDMAシステム / 光配線 / 超並列画像処理 / 酸化膜絶縁破壊 / spectra simulation / plasma-induced damage / semiconductor detector / impurity profile / surface damage / time of flight measurement / ion implanter / medium energy ion scattering / アンチモンイオン注入 / コンタクトホール / アルゴンプラズマ / スペクトルシミュレーション / プラズマ損傷 / 半導体検出器 / 不純物分布 / 表面損傷 / 飛行時間測定 / イオン注入装置 / 中速イオン散乱 / VLSI Design Education / Full custom LSI / Gate arrays / Multi-project chip / VLSI chip implementation service / VLSI設計教育 / フルカスタムLSI / ゲートアレイ / マルチプロジェクトチップ / VLSIチップ試作サービス / quantum size effects / ATM-AFM / spectroscopic ellipsometry / silicon / surface reaction / in situ observation / semiconductors / mesoscopic structure / ポリシリコン / アモルフアス・シリコン / 自己組織化 / 新機能創製 / 原子レベル制御 / フリーラジカル / 量子サイズ効果 / STM-AFM / 分光エリプソメトリー / シリコン / 表面反応 / その場観察 / 半導体 / メゾスコピック構造 / プラズマプロセス / プロセシングプラズマ Less
  • Research Projects

    (21 results)
  • Co-Researchers

    (30 People)
  •  Determination of Energy Distribution of Defect State Density for Ultrathin SiO_2/Si Interfaces by Using Photoelectron Yield Spectroscopy

    • Principal Investigator
      MIYAZAKI Seiichi
    • Project Period (FY)
      1996 – 1997
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      HIROSHIMA UNIVERSITY
  •  MOMENTARY INFORMATION PROCESSING SYSTEM

    • Principal Investigator
      TSUBOUCHI Kazuo
    • Project Period (FY)
      1995 – 1998
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      TOHOKU UNIVERSITY
  •  Self-Assembling Formation of Silicon Quantum DotsPrincipal Investigator

    • Principal Investigator
      HIROSE Masataka
    • Project Period (FY)
      1995 – 1996
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      HIROSHIMA UNIVERSITY
  •  Study on Advanced Environment for VLSI System Design Education in Universities

    • Principal Investigator
      NANYA Takashi
    • Project Period (FY)
      1994 – 1995
    • Research Category
      Grant-in-Aid for Co-operative Research (A)
    • Research Field
      計算機科学
    • Research Institution
      Tokyo Institute of Technology
  •  Development of medium energy ion scattering spectroscopy using time of flight method and its application to semiconductor process evaluation

    • Principal Investigator
      YOKOYAMA Shin
    • Project Period (FY)
      1994 – 1996
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      HIROSHIMA UNIVERSITY
  •  CONTROL OF FREE RADICALS FOR CONSTRUCTION OF MESOSCOPIC STRUCTURES OF MATERIALS

    • Principal Investigator
      SHIMIZU Isamu
    • Project Period (FY)
      1993 – 1995
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      TOKYO INSTITUTE OF TECHNOLOGY
  •  低温半導体表面吸着分子のレーザ誘起反応の機構と原子層プロセスPrincipal Investigator

    • Principal Investigator
      広瀬 全孝
    • Project Period (FY)
      1992
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Hiroshima University
  •  Layr-by-layr oxidation mechanism of hydrogen-terminated silicon surfaces and their interface structuresPrincipal Investigator

    • Principal Investigator
      HIROSE Masataka
    • Project Period (FY)
      1992 – 1993
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      電子材料工学
    • Research Institution
      HIROSHIMA UNIVERSITY
  •  Development of selective deposition technique of sillicon dioxideinto extremely fine patterned structure and its application to G-bit memory wiringPrincipal Investigator

    • Principal Investigator
      HIROSE Masataka
    • Project Period (FY)
      1992 – 1994
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B)
    • Research Field
      電子材料工学
    • Research Institution
      HIROSHIMA UNIVERSITY
  •  低温半導体表面吸着分子のレ-ザ誘起反応の機構と原子層成長Principal Investigator

    • Principal Investigator
      広瀬 全孝
    • Project Period (FY)
      1991
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Hiroshima University
  •  反応性プラズマの制御(とりまとめ)

    • Principal Investigator
      板谷 良平
    • Project Period (FY)
      1991
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Kyoto University
  •  反応性プラズマの制御

    • Principal Investigator
      板谷 良平
    • Project Period (FY)
      1990
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Kyoto University
  •  プラズマ-表面相互作用の制御Principal Investigator

    • Principal Investigator
      広瀬 全孝
    • Project Period (FY)
      1990
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Hiroshima University
  •  反応性プラズマの制御

    • Principal Investigator
      板谷 良平
    • Project Period (FY)
      1989
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Kyoto University
  •  プラズマ-表面相互作用の制御Principal Investigator

    • Principal Investigator
      広瀬 全孝
    • Project Period (FY)
      1989
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Hiroshima University
  •  反応性プラズマの制御

    • Principal Investigator
      板谷 良平
    • Project Period (FY)
      1988
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Kyoto University
  •  プラズマ-表面相互作用の制御Principal Investigator

    • Principal Investigator
      広瀬 全孝
    • Project Period (FY)
      1988
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Hiroshima University
  •  反応性プラズマの制御

    • Principal Investigator
      板谷 良平
    • Project Period (FY)
      1987
    • Research Category
      Grant-in-Aid for Co-operative Research (B)
    • Research Institution
      Kyoto University
  •  Study on the Fundamental Mechanism of Radical Beam EpitaxyPrincipal Investigator

    • Principal Investigator
      HIROSE Masataka
    • Project Period (FY)
      1986 – 1988
    • Research Category
      Grant-in-Aid for General Scientific Research (A)
    • Research Field
      電子材料工学
    • Research Institution
      HIROSHIMA UNIVERSITY
  •  Development of Process Technology for Semiconductor Surface Cleaning by Using VUV Photochemical ReactionsPrincipal Investigator

    • Principal Investigator
      HIROSE Masataka
    • Project Period (FY)
      1984 – 1986
    • Research Category
      Grant-in-Aid for Developmental Scientific Research
    • Research Field
      電子材料工学
    • Research Institution
      HIROSHIMA UNIVERSITY
  •  Basic study of selective deposition by using excimer laserPrincipal Investigator

    • Principal Investigator
      HIROSE Masataka
    • Project Period (FY)
      1983 – 1985
    • Research Category
      Grant-in-Aid for General Scientific Research (A)
    • Research Field
      電子材料工学
    • Research Institution
      Hiroshima University
  • 1.  MIYAZAKI Seiichi (70190759)
    # of Collaborated Projects: 11 results
    # of Collaborated Products: 0 results
  • 2.  籏野 嘉彦 (90016121)
    # of Collaborated Projects: 5 results
    # of Collaborated Products: 0 results
  • 3.  板谷 良平 (90025833)
    # of Collaborated Projects: 5 results
    # of Collaborated Products: 0 results
  • 4.  田頭 博昭 (10001174)
    # of Collaborated Projects: 5 results
    # of Collaborated Products: 0 results
  • 5.  後藤 俊夫 (50023255)
    # of Collaborated Projects: 5 results
    # of Collaborated Products: 0 results
  • 6.  菅野 卓雄 (50010707)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 7.  堀池 靖浩 (20209274)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 8.  川崎 昌博 (70110723)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 9.  YOKOYAMA Shin (80144880)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 10.  末宗 幾夫 (00112178)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 11.  HAYASHI Toshio
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 12.  SHIMIZU Isamu (40016522)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 13.  ODA Shyunri (50126314)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 14.  ITAYA Kingo (40125498)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 15.  NANYA Takashi (80143684)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 16.  YASUURA Hiroto (80135540)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 17.  AMANO Hideharu (60175932)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 18.  UEDA Kazuhiro (60203436)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 19.  HOH Kohichiro (60211538)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 20.  TSUBOUCHI Kazuo (30006283)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 21.  OHMI Tadahiro (20016463)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 22.  TANUGUCHI Kenji (20192180)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 23.  長田 昭義 (00164426)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 24.  山西 正道 (30081441)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 25.  KOTANI Hideo
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 26.  MATSUDA Akihisa
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 27.  SAKURADA Yuzo
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 28.  三宅 潔
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 29.  小宮 宗治
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 30.  KOMIYA Nobuharu
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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