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TOGUCHI Minoru  渡久地 實

ORCIDConnect your ORCID iD *help
Researcher Number 10163982
Other IDs
Affiliation (based on the past Project Information) *help 1998 – 1999: 琉球大学, 工学部, 教授
Review Section/Research Field
Principal Investigator
Electronic materials/Electric materials
Keywords
Principal Investigator
SUBSTRATE BIAS / PLASMA TREATMENT / HYDOROGEN PARTIAL PRESSURE / SPUTTERING / VHF PLASMA / HYDROGENATED AMORPHOUS CARBON THIN FILM / 基板バイアス / プラズマ処理 / 水素分圧 / スパッタリング法 / VHFプラズマ / a-C:H薄膜
  • Research Projects

    (1 results)
  • Co-Researchers

    (3 People)
  •  GROWTH MECHANISM AND PROPERTIES OF HYDROGENATED AMORPHOUS CARBON THIN FILMSPrincipal Investigator

    • Principal Investigator
      TOGUCHI Minoru
    • Project Period (FY)
      1998 – 1999
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      UNIVERSITY OF THE RYUKYUS
  • 1.  SONEGAWA Tomihiro (20295299)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 2.  HIGA Akira (50228699)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 3.  MAEHAMA Takehiro (60045044)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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