MUTA Hiroshi 牟田浩司

… Alternative Names

MUTA HIROSHI 牟田浩司

牟田浩司ムタコウジ

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Researcher Number	10219850
Other IDs
Affiliation (Current)	2025: 近畿大学, 産業理工学部, 教授
Affiliation (based on the past Project Information) *help	2015: 近畿大学, 工学部, 教授 2013 – 2014: 岐阜大学, 工学(系)研究科(研究院), 准教授 2009 – 2010: 岐阜大学, 工学研究科, 准教授 2009: Gifu University, 准教授 2008: Gifu University, 工学部, 准教授 … More 2007: 九州大学, 総合理工学研究院, 助教 2002: 九州大学, 大学院・総合理工学研究院, 助手 1998 – 1999: 北九州工業高等専門学校, 電子制御工学科, 助教授 Less
Review Section/Research Field	Principal Investigator Plasma electronics / Thin film/Surface and interfacial physical properties / プラズマ理工学 Except Principal Investigator Plasma science / Science and Engineering
Keywords	Principal Investigator プラズマパラメータ / VHFプラズマ / 大面積一様化 / クラスタ / 高次シラン / クラスタ- / シランプラズマ / マルチホローカソード / クラスター / 高速製膜 … More / 超音速噴流 / 太陽電池 / バラン給電法 / 微結晶シリコン / 高圧狭ギャップ / 薄膜シリコン太陽電池 / ダイヤモンドライク薄膜 / マイクロ波伝播 / プローブ計測 / レーザー計測 / 数値シミュレーション / 電子速度分布関数 / 電子サイクロトロン共鳴プラズマ … More Except Principal Investigator 電荷交換反応 / 可視化 / 流れ場 / 半導体レーザー / 荷電交換反応 / 化学ポテンシャル / 運動量輸送 / セナ効果 / 構造形成 / 誘起蛍光ドップラー分光 / プラズマ / 反E×B渦 / レーザー誘起蛍光分光法 / 流れ構造 / 中性粒子 / 渦 / プラズマ基礎 / 触媒・化学プロセス / 構造・機能材料 / 複合材料・物性 / 表面・界面物性 / プラズマ加工 Less

High speed fabrication of large-area microcrystalline silicon films using VHF plasma with an under-expanded supersonic jetPrincipal Investigator
- Principal Investigator
  
  MUTA Hiroshi
- Project Period (FY)
  2013 – 2015
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Plasma electronics
- Research Institution
  Kinki University
  Gifu University
Investigation of VHF plasmas with narrow gap under high gas pressure for the fabrication of microcrystalline silicon thin films.Principal Investigator
- Principal Investigator
  
  MUTA Hiroshi
- Project Period (FY)
  2008 – 2010
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  Gifu University
Neutral wind and polarization reversal of vortex.
- Principal Investigator
  
  田中雅慶
- Project Period (FY)
  2007 – 2009
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Plasma science
- Research Institution
  Kyushu University
低温プラズマ表面修飾技術による酸化チタン微粒子の環境浄化機能の改善に関する研究
- Principal Investigator
  
  山田憲二
- Project Period (FY)
  2002
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Kitakyushu National College of Technology
ECRプラズマ中の電子速度分布関数と成膜の再現性に関する研究Principal Investigator
- Principal Investigator
  
  牟田浩司
- Project Period (FY)
  1998 – 1999
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  プラズマ理工学
- Research Institution
  Kitakyushu National College of Technology

All 2015 2014 2011 2010 2009 2008 Other

All Journal Article Presentation

[Journal Article] 高速噴流を利用したプラズマCVDの新規高速製膜手法2015
- Author(s)
  西田哲、納土亮、牟田浩司、栗林志頭眞
- Journal Title
  
  ながれ（日本流体力学会誌）
  
  Volume: 34 Pages: 15-20
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25390108
[Journal Article] 非平衡プラズマジェットCVD法によるシリコン製膜時に装置内圧力が製膜速度, 膜質に及ぼす影響2015
- Author(s)
  西田哲、納土亮、牟田浩司、栗林志頭眞
- Journal Title
  
  化学工学論文集
  
  Volume: 41(2) Pages: 148-152
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25390108
[Journal Article] Effect of Gas Flow Rate on the High-Rate, Localized Jet-Deposition of Silicon in SiH<sub>4</sub>/H<sub>2</sub> PE-CVD2014
- Author(s)
  S. Nishida, H. Muta, S. Kuribayashi
- Journal Title
  
  J. Chem. Eng. Japan / JCEJ
  
  Volume: 47 Issue: 6 Pages: 478-482
- DOI
  10.1252/jcej.13we263
- NAID
  130004145823
- ISSN
  0021-9592, 1881-1299
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25390108
[Journal Article] Estimation of Negative Ions in VHF SiH4/H2 Plasma2014
- Author(s)
  T. Yamane, S. Nakano, S. Nakao, Y. Takeuchi, R. Ichiki, H. Muta,, K. Uchino, Y. Kawai
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 53 Issue: 11 Pages: 1-4
- DOI
  10.7567/jjap.53.116101
- NAID
  210000144592
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25390108
[Journal Article]2011
- Author(s)
  T.Nishimiya, T.Yamane, S.Nakao, Y.Takeuchi, Y.Yamauchi, H.Takatsuka, H.Muta K.Uchino, Y.Kawai
- Journal Title
  
  Surf.Coat.Technol. in press
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560022
[Journal Article]2011
- Author(s)
  T.Nishimiya, T.Yamane, Y.Takeuchi, Y.Yamauchi, H.Takatsuka, H.Muta, K.Uchino, Y.Kawai
- Journal Title
  
  Thin Solid Films in press
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560022
[Journal Article] Characteristics of SiH_4/H_2 VHF Plasma Produced by a Short Gap Discharge2011
- Author(s)
  T.Nishimiya, T.Yamane, S.Nakao, Y.Takeuchi, Y.Yamauchi, H.Takatsuka, H.Muta, K.Uchino, Y.Kawai
- Journal Title
  
  Surface & Coatings Technology
  
  Volume: (in press,in press)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560022
[Journal Article]2011
- Author(s)
  H.Muta S.Nishida, S.Kuribayashi, N.Yoshikawa, R.Komatsu, K.Uchino, Y.Kawai
- Journal Title
  
  Jpn.J.Appl.Physics Vol.50
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560022
[Journal Article] Effect of Excitation Frequency on the Spatial Distributions of a Surface Wave Plasma2011
- Author(s)
  H.Muta, S.Nishida, S.Kunbayashi, N.Yoshikawa, R.Komatsu, K.Uchino, Y.Kawai
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 50
- NAID
  210000138242
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560022
[Journal Article] Dominant Ion Species in VHF SiH_4/H_2 Plasma2010
- Author(s)
  Y.Yamauchi, T.Baba, T.Yamane, Y.Takeuchi, H.Takatsuka, H.Muta, K.Uchino, Y.Kawai
- Journal Title
  
  Physica Status Solidi C
  
  Volume: 7 Pages: 549-552
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560022
[Journal Article]2010
- Author(s)
  Y.Yamauchil, T.Baba, T.Yamanel, Y.Takeuchi, H.Takatsuka, H.Muta, K.Uchino, Y.Kawai
- Journal Title
  
  Phys.Status Solidi C Vol.7
  
  Pages: 549-552
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560022
[Journal Article]2010
- Author(s)
  Y.Kawai, K.Uchino, H.Muta S.Kawai, T.
- Journal Title
  
  Rowf, Vacuum Vol.84
  
  Pages: 1381-1384
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560022
[Journal Article] Development of Large Diameter ECR Plasma Source2010
- Author(s)
  Y.Kawai, K.Uchino, H.Muta, S.Kawai, T.Rowfi
- Journal Title
  
  Vacuum
  
  Volume: 84 Pages: 1381-1384
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560022
[Journal Article] Development of VHF Plasma Source with Short Discharge Gap for Solar Cells2009
- Author(s)
  Y.Yamauchi, T.Baba, Y.Takeuchi, H.Takastsuka, H.Muta, K.Uchino, Y.Kawai
- Journal Title
  
  Plasma Processes and Polymers 6
  
  Pages: 273-277
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560022
[Journal Article]2009
- Author(s)
  Y.Yamauchi, T. Baba, Y. Takeuchi, H.Takatsuka, H.Muta, K.Uchino, Y.Kawai
- Journal Title
  
  Plasma Process.Polym. Vol.6
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560022
[Journal Article]2009
- Author(s)
  H.Muta, S.Kishida, M.Tanaka, Y.Yamauchi, T.Baba, Y.Takeuchi, H.Takatsuka, Y.Kawai
- Journal Title
  
  Plasma Process.Polym. Vol.6
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560022
[Journal Article] Investigation of Plasma Paramclers in a VHF Plasma with Narrow Gapunder High Gaseous Pressure2009
- Author(s)
  H Muta, S, Kishida, M. Tanaka, Y. Yamauchi, T. Baba. Y. Takcuchi, H. Takatsuka. Y. Kawai
- Journal Title
  
  Plasma Processes and Polymers 4(印刷中)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560022
[Journal Article]2008
- Author(s)
  Y.Yamauchi, Y.Takeuchi, H.Takatsuka, H.Yamashita, H.Muta, Y.Kawai
- Journal Title
  
  Contributions to Plasma Physics Vol.48
  
  Pages: 326-330
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560022
[Journal Article]2008
- Author(s)
  Y.Yamauchi, Y.Takeuchi, H.Takatsuka, Y.Kai, H.Muta, Y.Kawai
- Journal Title
  
  Surf.Coat.Technol. Vol.202
  
  Pages: 5668-5671
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560022
[Journal Article]2008
- Author(s)
  T.Nishnniya, Y.Takeuchi, Y.Yamauchi, H.Takatsuka, T.Shioya, H.Muta, Y.Kawai
- Journal Title
  
  Thin Solid Films Vol.516
  
  Pages: 4430-4434
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560022
[Journal Article]2008
- Author(s)
  D.H.Thang, H.Muta, Y.Kawai
- Journal Title
  
  Thin Solid Films Vol.516
  
  Pages: 4452-4455
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560022
[Presentation] Numerical Investigation of VHF Plasmas Produced by a Balanced Power Feeding Method2011
- Author(s)
  H.Muta, S.Nishida, S.Kuribayashi, K.Uchino, Y.Kawai
- Organizer
  第3回先進プラズマ科学と窒化物及びナノ材料への応用に関する国際シンポジウム(ISPlasma2011)
- Place of Presentation
  名古屋工業大学
- Data Source
  KAKENHI-PROJECT-20560022
[Presentation] Analysis of Si Deposition Using Under-expanded Supersonic Jet in SiH_4/H_2 PE-CVD2011
- Author(s)
  S.Nishida, Y.Tsunekawa, M.Ukai, D.Ando, N.Okamoto, S.Tanaka, N.Tanaka, J.Nakamura, Y.Nomura, H.Muta, S.Kuribayashi
- Organizer
  第3回先進プラズマ科学と窒化物及びナノ材料への応用に関する国際シンポジウム(ISPlasma2011)
- Place of Presentation
  名古屋工業大学
- Data Source
  KAKENHI-PROJECT-20560022
[Presentation] 高圧狭ギャップVHFプラズマの数値シミュレーション2010
- Author(s)
  高比良将, 丸尾幸一郎, 牟田浩司, 西田哲, 栗林志頭眞
- Organizer
  秋季第71回応用物理学会学術講演会
- Place of Presentation
  長崎
- Data Source
  KAKENHI-PROJECT-20560022
[Presentation] Control of Large Area VHF Plasma Produced at High Pressure2010
- Author(s)
  T.Nishimiya, T.Yamane, Y.Takeuchi, Y.Yamauchi, H.Takatsuka, H.Muta, K.Uchino, Y.Kawai
- Organizer
  10th APCPST (Asia Pacific Conference on Plasma Science and Technology) and 23th SPSM (Symposium on Plasma Science for Materials
- Place of Presentation
  Jeju (Korea)
- Data Source
  KAKENHI-PROJECT-20560022
[Presentation] 不足膨張噴流を用いた非平衡プラズマCVDによるα/μc-Si:H膜成長2010
- Author(s)
  安藤大輔, 中村次郎, 恒川佳寛, 栗林志頭眞, 西田哲, 牟田浩司, 竹内良昭, 山内康弘, 高塚汎
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  県民文化ホール未来会館(岐阜)
- Year and Date
  2010-08-12
- Data Source
  KAKENHI-PROJECT-20560022
[Presentation] バラン給電法によるVHFプラズマの特性2010
- Author(s)
  水野健太, 松岡正典, 牟田浩司, 西田哲, 栗林志頭眞, 竹内良昭, 山内康弘, 高塚汎
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  県民文化ホール未来会館(岐阜)
- Year and Date
  2010-08-12
- Data Source
  KAKENHI-PROJECT-20560022
[Presentation] 高圧狭ギャップVHFプラズマの空間分布特性2010
- Author(s)
  丸尾幸一郎, 高比良将, 牟田浩司, 西田哲, 栗林志頭眞
- Organizer
  秋季第71回応用物理学会学術講演会
- Place of Presentation
  長崎
- Data Source
  KAKENHI-PROJECT-20560022
[Presentation] Characteristics of SiH_4/H_2 VHF Plasma Produced by a Short Gap Discharge2010
- Author(s)
  T.Nishimiya, T.Yamane, S.Nakao, Y.Takeuchi, Y.Yamauchi, H.Takatsuka, H.Muta, K.Uchino, Y.Kawai
- Organizer
  Twelfth International Conference on Plasma Surface Engineering
- Place of Presentation
  Garmisch-Partenkirchen, (Germany)
- Year and Date
  2010-09-15
- Data Source
  KAKENHI-PROJECT-20560022
[Presentation] Observation of Negative Ions in VHF SiH_4/H_2 Plasma2010
- Author(s)
  Y.Kawai, T.Yamane, Y. Takeuchi, Y.Yamauchi, H.Takatsuka, H.Muta, K.Uchino
- Organizer
  7th International Conference on Reactive Plasmas and 63rd Gaseous Electronics Conference
- Place of Presentation
  Paris (France)
- Data Source
  KAKENHI-PROJECT-20560022
[Presentation] 衝突噴流群を用いた非平衡プラズマCVDによる高速シリコン成膜2010
- Author(s)
  鵜飼正夫, 恒川佳寛, 岡本直樹, 田中翔, 西田哲, 牟田浩司, 栗林志頭眞, 竹内良昭, 山内康弘, 高塚汎
- Organizer
  秋季第71回応用物理学会学術講演会
- Place of Presentation
  長崎
- Data Source
  KAKENHI-PROJECT-20560022
[Presentation] 不足膨張噴流を用いた非平衡プラズマCVDによるα/μc-Si:H膜成長2010
- Author(s)
  安藤大輔, 中村次郎, 恒川佳寛, 栗林志頭眞, 西田哲, 牟田浩司, 竹内良昭, 山内康弘, 高塚汎
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  岐阜
- Data Source
  KAKENHI-PROJECT-20560022
[Presentation] 高圧狭ギャップVHFプラズマの数値シミュレーション2010
- Author(s)
  S.Nishida, Y.Tsunekawa, M.Ukai,, D.Ando, N.Okamoto, S.Tanaka, N.Tanaka, J.Nakamura, Y.Nomura, H.Muta, S.Kuribayashi
- Organizer
  秋季第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学
- Year and Date
  2010-09-14
- Data Source
  KAKENHI-PROJECT-20560022
[Presentation] Characteristics of VHF Plasma Produced by a Balance Power Feeding Method2010
- Author(s)
  H.Muta, S.Nishida, S.Kuribayashi, Y.Takeuchi, Y.Yamauchi, H.Takatsuka, K.Uchino, Y.Kawai
- Organizer
  10th APCPST (Asia Pacific Conference on Plasma Science and Technology) and 23th SPSM (Symposium on Plasma Science for Materials
- Place of Presentation
  Jeju (Korea)
- Data Source
  KAKENHI-PROJECT-20560022
[Presentation] 超音速不足膨張噴流を用いた非平衡プラズマCVDによるSi製膜に及ぼすVHF周波数の影響2010
- Author(s)
  恒川佳寛, 安藤大輔, 中村次郎, 西田哲, 牟田浩司, 栗林志頭眞, 竹内良昭, 山内康弘, 高塚汎
- Organizer
  秋季第71回応用物理学会学術講演会
- Place of Presentation
  長崎
- Data Source
  KAKENHI-PROJECT-20560022
[Presentation] 高圧狭ギャップVHFプラズマの空間分布特性2010
- Author(s)
  丸尾幸一郎, 高比良将, 牟田浩司, 西田哲, 栗林志頭眞
- Organizer
  秋季第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学
- Year and Date
  2010-09-14
- Data Source
  KAKENHI-PROJECT-20560022
[Presentation] Characteristics of SiH_4/H_2 VHF Plasma Produced by a Short Gap Discharge2010
- Author(s)
  T.Nishimiya, T.Yamane, S.Nakao, Y.Takeuchi, Y.Yamauchi, H.Takatsuka, H.Muta, K.Uchino, Y.Kawai
- Organizer
  Twelfth International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen
- Place of Presentation
  Germany
- Data Source
  KAKENHI-PROJECT-20560022
[Presentation] バラン給電法によるVHFプラズマの特性2010
- Author(s)
  水野健太, 松岡正典, 牟田浩司, 西田哲, 栗林志頭眞, 竹内良昭, 山内康弘, 高塚汎
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  岐阜
- Data Source
  KAKENHI-PROJECT-20560022
[Presentation] Dominant ion species in VHF SiH_4/H_2 plasma2009
- Author(s)
  Y.Yamauchi, T.Baba, T.Yamane, Y.Takeuchi, H.Takatsuka, H.Muta, K.Uchino, Y.Kawai
- Organizer
  23rd International Conference on Amorphous and Nanocrystalline Semiconductors
- Place of Presentation
  Utrecht, Netherlands
- Data Source
  KAKENHI-PROJECT-20560022
[Presentation] Proceedings of the 24th European Photovoltaic Solar Energy Conference (Hamburg)2009
- Author(s)
  Y.Yamauchi, T.Baba, Y.Takeuchi, H.Takatsuka, H.Muta, K.Uchino, Y.Kawai
- Organizer
  20090000
- Place of Presentation
  2333-2336
- Data Source
  KAKENHI-PROJECT-20560022
[Presentation] 太陽電池のテクスチャ構造の形状による電流漏れの変化の評価
- Author(s)
  兼松雅斗，西田哲，牟田浩司，栗林志頭眞
- Organizer
  秋季第75回応用物理学会学術講演会
- Place of Presentation
  北海道大学札幌キャンパス
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-25390108
[Presentation] 非平衡プラズマジェットCVD を用いた微結晶シリコン膜(μc-Si) の高速成膜
- Author(s)
  千藤彰大，西田哲，牟田浩司，栗林志頭眞
- Organizer
  秋季第75回応用物理学会学術講演会
- Place of Presentation
  北海道大学札幌キャンパス
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-25390108
[Presentation] 太陽電池用a-Si:H 膜の高速成膜と高品質アニール効果の研究
- Author(s)
  岡田祐希，栗林志頭眞，牟田浩司，西田哲
- Organizer
  秋季第75回応用物理学会学術講演会
- Place of Presentation
  北海道大学札幌キャンパス
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-25390108
[Presentation] 選択的Si 酸化を用いたc-Si/a-Si ヘテロ接合界面における漏れ電流抑制技術の開発
- Author(s)
  三和寛之，西田哲，牟田浩司，野々村修一，栗林志頭眞
- Organizer
  秋季第75回応用物理学会学術講演会
- Place of Presentation
  北海道大学札幌キャンパス
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-25390108
[Presentation] バラン給電型リモートプラズマを用いた低光劣化a-Si:H製膜法の開発
- Author(s)
  岡田俊，牟田浩司，西田哲，栗林志頭眞
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学京田辺キャンパス
- Data Source
  KAKENHI-PROJECT-25390108
[Presentation] 大面積VHFプラズマ中の定在波測定
- Author(s)
  廣井将平，牟田浩司，西田哲，栗林志頭眞
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学京田辺キャンパス
- Data Source
  KAKENHI-PROJECT-25390108
[Presentation] バラン給電型SiH4/H2リモートプラズマにおけるイオン衝撃エネルギー測定と評価
- Author(s)
  滝下裕基，牟田浩司，西田哲，栗林志頭眞
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学京田辺キャンパス
- Data Source
  KAKENHI-PROJECT-25390108
[Presentation] 二次元ノズルを用いた非平衡プラズマジェットCVDの大面積化・高品質化の研究
- Author(s)
  松永卓真，井関将仁，西田哲，牟田浩司，栗林志頭眞
- Organizer
  日本機械学会熱工学コンファレンス2013
- Place of Presentation
  弘前大学
- Data Source
  KAKENHI-PROJECT-25390108
[Presentation] バラン給電型マルチホローカソードプラズマを用いた低光劣化a-Si:H 製膜法の開発
- Author(s)
  鈴木貴也，牟田浩司，西田哲，栗林志頭眞
- Organizer
  秋季第75回応用物理学会学術講演会
- Place of Presentation
  北海道大学札幌キャンパス
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-25390108
[Presentation] 非平衡プラズマジェットCVDに於けるガス流速がSi成膜品質に及ぼす影響の考察
- Author(s)
  井関将仁，西田　哲，牟田浩司，栗林志頭眞
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学京田辺キャンパス
- Data Source
  KAKENHI-PROJECT-25390108

1. 山田憲二 (80101179)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
2. 松嶋茂憲 (80229476)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
3. 中村裕之 (70172434)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
4. 山根大和 (70332096)

# of Collaborated Projects: 1 results

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5. 田中雅慶 (90163576)

# of Collaborated Projects: 1 results

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6. KONO Mitsuo (00038564)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. YOSHIMURA Shinji (50311204)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

MUTA Hiroshi 牟田 浩司

MUTA HIROSHI 牟田 浩司

牟田 浩司 ムタ コウジ

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High speed fabrication of large-area microcrystalline silicon films using VHF plasma with an under-expanded supersonic jetPrincipal Investigator

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Investigation of VHF plasmas with narrow gap under high gas pressure for the fabrication of microcrystalline silicon thin films.Principal Investigator

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Neutral wind and polarization reversal of vortex.

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低温プラズマ表面修飾技術による酸化チタン微粒子の環境浄化機能の改善に関する研究

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ECRプラズマ中の電子速度分布関数と成膜の再現性に関する研究Principal Investigator

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[Journal Article] 高速噴流を利用したプラズマCVDの新規高速製膜手法2015

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[Journal Article] 非平衡プラズマジェットCVD法によるシリコン製膜時に装置内圧力が製膜速度, 膜質に及ぼす影響2015

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[Journal Article] Effect of Gas Flow Rate on the High-Rate, Localized Jet-Deposition of Silicon in SiH<sub>4</sub>/H<sub>2</sub> PE-CVD2014

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[Journal Article] Estimation of Negative Ions in VHF SiH4/H2 Plasma2014

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[Journal Article]2011

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[Journal Article]2011

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[Journal Article] Characteristics of SiH_4/H_2 VHF Plasma Produced by a Short Gap Discharge2011

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[Journal Article]2011

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[Journal Article] Effect of Excitation Frequency on the Spatial Distributions of a Surface Wave Plasma2011

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[Journal Article] Dominant Ion Species in VHF SiH_4/H_2 Plasma2010

MUTA Hiroshi 牟田浩司

MUTA HIROSHI 牟田浩司

牟田浩司ムタコウジ