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ECS Transactions
Volume: 97 Pages: 61-66
10.1149/09701.0061ecst
Applied Physics Express
Volume: 10 Issue: 2 Pages: 025702-025702
10.7567/apex.10.025702
210000135772
Jpn. J. Appl. Phys.
Volume: 56 Issue: 4S Pages: 04CJ03-04CJ03
10.7567/jjap.56.04cj03
210000147626
Applied Physics Letters
Volume: 未定
Japanese Journal of Applied Physics Vol.46
Pages: 2907-2909
Journal of Vacuum Science and Technology A 27
Pages: 492-495
Journal of Vacuum Science and Technology A Vol.27
JAPANESE JOURNAL OF APPLIED PHYSICS 46