Okamoto Kazumasa 岡本一将

… Alternative Names

OKAMOTO Kazumasa 岡本一将

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Researcher Number	10437353
Other IDs	https://orcid.org/0000-0002-5207-5309
Affiliation (Current)	2026: 大阪大学, 産業科学研究所, 助教
Affiliation (based on the past Project Information) *help	2018 – 2025: 大阪大学, 産業科学研究所, 助教 2016 – 2017: 北海道大学, 工学研究院, 助教 2016: 北海道大学, 大学院・工学研究院, 助教 2015: 北海道大学, 大学院工学研究院, 助教 2012 – 2015: 北海道大学, 工学(系)研究科(研究院), 助教 2010 – 2011: 北海道大学, 大学院・工学研究院, 助教 2007 – 2008: Osaka University, 産業科学研究所, 特任助教
Review Section/Research Field	Principal Investigator Basic Section 31010:Nuclear engineering-related / Nuclear engineering / Nanomaterials/Nanobioscience Except Principal Investigator Medium-sized Section 26:Materials engineering and related fields / Nuclear engineering / Medium-sized Section 31:Nuclear engineering, earth resources engineering, energy engineering, and related fields / Nanomaterials engineering
Keywords	Principal Investigator 電子線 / レジスト / パルスラジオリシス / 放射線化学 / リソグラフィ / 極端紫外線（ＥＵＶ） / EUVリソグラフィ / レジスト材料 / 放射線、Ｘ線、粒子線 / 放射線、X線、粒子線 … More / 脱プロトン反応 / 自由電子レーザー / 半導体超微細化 / ポリスチレン / 芳香族分子 / 水溶性レジスト / 有機・無機ハイブリッド / フォトレジスト / 水中結晶合成 / 酸化亜鉛 / ガンマ線（γ線） / 放射線プロセス / 紫外線 / 放射線利用 / 水中結晶成長 / 金属酸化物 / 極端紫外線（EUV）・Ｘ線 / 極端紫外線 / 極端紫外線（EUV） / ジフェニルスルホン / 酸生成促進剤 / 半導体微細化 / 化学増幅型レジスト / 極端紫外線(EUV) / ΠーΠ相互作用 / ＥＵＶリソグラフィ / ラジカルイオン / フッ素系高分子 / ラジカルカチオン / ポリヒドロキシスチレン / 極端紫外光 / 粒子線 / X線 / 放射線 / 分子軌道計算 … More Except Principal Investigator 水中結晶光合成 / 放射線、X線、粒子線 / 半導体超微細化 / 量子ビーム / GX / 半導体 / 光機能材料 / 太陽光利用材料 / 光化学・光物性 / 光水ラジカル反応 / 光材料科学 / 太陽光利用技術開発 / ラジカルメタラジー / 光冶金学 / ガルバニック効果 / 活性酸素種 / 光化学 / ガルバニック水中結晶光合成 / 太陽光利用 / 3Dナノ構造 / 水ラジカル / 太陽光全スペクトル利用 / 太陽光全利用 / 水中ラジカル / 光電気化学 / ヘテロナノ構造 / 光化学反応 / 光ガルバニック効果 / データ科学 / 計算物理 / シミュレーション工学 / インフルエンザ感染性 / 糖鎖の評価・最適化 / 電気伝導率制御 / 自己組織化成長 / ナノカーボン成長制御 / バイオセンサー / ナノカーボン応用 / 放射線科学 / フォトリシス / リソグラフィ / 電子線 / Ｘ線 / フッ素化合物 / 放射線化学 / 粒子線 / X線 / 放射線 / レーザーフォトリシス / パルスラジオリシス / レジスト / ナノ空間 / 熱化過程 / 高分子科学 / 化学増幅レジスト / シミュレーション / フェムト秒パルスジオリシス / ナノテクノロジー / ナノ時空間反応 / フェムト秒パルスラジオリシス Less

Multielement Induced Opto-Critical Phases Tuned for All-Solar Utilization
- Principal Investigator
  
  渡辺精一
- Project Period (FY)
  2025 – 2028
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Review Section
  
  Medium-sized Section 26:Materials engineering and related fields
- Research Institution
  Hokkaido University
電離放射線に感応する有機・無機ハイブリッド水溶性レジストの開発と応用Principal Investigator
- Principal Investigator
  
  岡本一将
- Project Period (FY)
  2025 – 2027
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 31010:Nuclear engineering-related
- Research Institution
  The University of Osaka
放射線プロセスによる位置制御可能なケミカルフリー水中酸化物結晶生成法の確立Principal Investigator
- Principal Investigator
  
  岡本一将
- Project Period (FY)
  2022 – 2025
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 31010:Nuclear engineering-related
- Research Institution
  Osaka University
Fabrication of functional three-dimensional hetero-nanostructures based upon the theory on galvanic submerged photosynthesis of crystalites
- Principal Investigator
  
  watanabe seiichi
- Project Period (FY)
  2020 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Review Section
  
  Medium-sized Section 26:Materials engineering and related fields
- Research Institution
  Hokkaido University
Elucidation of deprotonation induced mechanism in nano-and microfabrication process using ionizing radiations and its applicationsPrincipal Investigator
- Principal Investigator
  
  Okamoto Kazumasa
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 31010:Nuclear engineering-related
- Research Institution
  Osaka University
Development of single nano materials based on quantum beam and data science
- Principal Investigator
  
  Kozawa Takahiro
- Project Period (FY)
  2018 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Review Section
  
  Medium-sized Section 31:Nuclear engineering, earth resources engineering, energy engineering, and related fields
- Research Institution
  Osaka University
Influence of charge delocalization in nanofabrication induced by ionizing radiationsPrincipal Investigator
- Principal Investigator
  
  Okamoto Kazumasa
- Project Period (FY)
  2015 – 2017
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Nuclear engineering
- Research Institution
  Hokkaido University
Development of self-aligned nano-carbon biosensors using glycan for the highly pathogenic avian influenza virus
- Principal Investigator
  
  KAWAHARA Toshio
- Project Period (FY)
  2014 – 2016
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Nanomaterials engineering
- Research Institution
  Chubu University
Dynamics of radical ions of fluorinated polymer for Extreme Ultraviolet (EUV) lithography
- Principal Investigator
  
  Fujiyoshi Ryoko
- Project Period (FY)
  2013 – 2015
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Nuclear engineering
- Research Institution
  Hokkaido University
Elucidation of local ionization in ultra-thin polymer films and its applicationPrincipal Investigator
- Principal Investigator
  
  OKAMOTO Kazumasa
- Project Period (FY)
  2012 – 2014
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Nuclear engineering
- Research Institution
  Hokkaido University
Elucidation of Ionization Dynamics of Polymers for Nanofabrication by Using Quantum BeamPrincipal Investigator
- Principal Investigator
  
  OKAMOTO Kazumasa
- Project Period (FY)
  2010 – 2011
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Nuclear engineering
- Research Institution
  Hokkaido University
Elucidation of Molecular Dynamicsand Reaction Mechanism of ResistMaterials for the Control of Nanosize-roughnessPrincipal Investigator
- Principal Investigator
  
  OKAMOTO Kazumasa
- Project Period (FY)
  2007 – 2008
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Nanomaterials/Nanobioscience
- Research Institution
  Osaka University
Femtosecond Pulse Radiolysis Study on Nanoscale Time Space Reaction Process
- Principal Investigator
  
  TAGAWA Seiichi
- Project Period (FY)
  2005 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Nuclear engineering
- Research Institution
  Osaka University

[Journal Article] Effect of organic ligand and metal nanocluster core structure on resist performance of inorganic-organic hybrid resist materials for EUV and EB lithography2025
- Author(s)
  Yamamoto Hiroki、Hamada Takashi、Muroya Yusa、Okamoto Kazumasa、Shimoda Shuhei、Kozawa Takahiro
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 64 Issue: 3 Pages: 03SP42-03SP42
- DOI
  10.35848/1347-4065/adba6c
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-24H00443, KAKENHI-PROJECT-22K04986
[Journal Article] A study on the resist performance of inorganic-organic resist materials for EUV and electron-beam lithography2024
- Author(s)
  Yamamoto Hiroki、Ito Yuko Tsutsui、Okamoto Kazumasa、Shimoda Shuhei、Kozawa Takahiro
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 63 Issue: 4 Pages: 04SP87-04SP87
- DOI
  10.35848/1347-4065/ad38c5
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H02489, KAKENHI-PROJECT-24H00443, KAKENHI-PROJECT-22K04986
[Journal Article] Synthesis of Botryosin-type Resist Material Containing Acetal Groups in the Main Chain and Its Sensitivity2024
- Author(s)
  Akabane Riku、Okamoto Kazumasa、Kozawa Takahiro、Kudo Hiroto
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 37 Issue: 3 Pages: 293-298
- DOI
  10.2494/photopolymer.37.293
- ISSN
  0914-9244, 1349-6336
- Year and Date
  2024-06-25
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-22K04986
[Journal Article] Synthesis of Resist Materials Containing Hemiacetal Groups and Their Resist Sensitivity2024
- Author(s)
  Iwane Kouta、Kudo Hiroto、Okamoto Kazumasa、Kozawa Takahiro
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 37 Issue: 3 Pages: 287-292
- DOI
  10.2494/photopolymer.37.287
- ISSN
  0914-9244, 1349-6336
- Year and Date
  2024-06-25
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-22K04986
[Journal Article] Dynamics of ionized poly(4-hydroxystyrene)-type resist polymers with tert-butoxycarbonyl-protecting group2024
- Author(s)
  Okamoto Kazumasa、Muroya Yusa、Kozawa Takahiro
- Journal Title
  
  Scientific Reports
  
  Volume: 14 Issue: 1 Pages: 16729-16729
- DOI
  10.1038/s41598-024-67794-0
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-24H00443, KAKENHI-PROJECT-22K04986
[Journal Article] Effects of substituents in triphenylsulfonium cation on its radiation-induced decomposition and dissolution kinetics of chemically amplified resists2024
- Author(s)
  Tsuda Yoshika、Muroya Yusa、Okamoto Kazumasa、Kozawa Takahiro、Ikeda Takuya、Komuro Yoshitaka
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 63 Issue: 7 Pages: 076501-076501
- DOI
  10.35848/1347-4065/ad56ea
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22K04986
[Journal Article] Sensitization of polymethacrylate resist with adding acid-generating promoters upon exposure to EUV light2023
- Author(s)
  Okamoto Kazumasa、Konda Akihiro、Ishimaru Yuki、Kozawa Takahiro、Nakagawa Yasunobu、Nishimura Masamichi
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 62 Issue: 11 Pages: 116503-116503
- DOI
  10.35848/1347-4065/ad0745
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22K04986
[Journal Article] Fabrication of color-toned micro/nanopattern surface by submerged photosynthesis method2022
- Author(s)
  Tsukamura Jumpei、Takahashi Yuki、Zhang Lihua、Jeem Melbert、Okamoto Kazumasa、Watanabe Seiichi
- Journal Title
  
  Microelectronic Engineering
  
  Volume: 256 Pages: 111727-111727
- DOI
  10.1016/j.mee.2022.111727
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K15122, KAKENHI-PROJECT-20H00295, KAKENHI-PROJECT-21K04823
[Journal Article] Synthesis and Resist Sensitive Property of Iodine-Containing Materials using Extreme Ultraviolet (EUV) Exposure Tool2022
- Author(s)
  Yutaro Iwashige, Hiroto Kudo, Kazumasa Okamoto, Takahiro Kozawa
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 35 Issue: 1 Pages: 41-47
- DOI
  10.2494/photopolymer.35.41
- ISSN
  0914-9244, 1349-6336
- Year and Date
  2022-12-16
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-22K04986, KAKENHI-PROJECT-18H03895
[Journal Article] Photo- & radio-chromic iron-doped tungstic acids fabricated via submerged photosynthesis2022
- Author(s)
  Murakami Shuntaro、Zhang Lihua、Jeem Melbert、Okamoto Kazumasa、Nakagawa Yuki、Shibayama Tamaki、Ohnuma Masato、Watanabe Seiichi
- Journal Title
  
  Optical Materials
  
  Volume: 124 Pages: 111966-111966
- DOI
  10.1016/j.optmat.2021.111966
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K15122, KAKENHI-PROJECT-20H00295, KAKENHI-PROJECT-21J11592, KAKENHI-PROJECT-21K04823
[Journal Article] Exploration of charge transport materials to improve the radiation tolerance of lead halide perovskite solar cells2022
- Author(s)
  Yoshiyuki Murakami, Ryosuke Nishikubo, Fumitaka Ishiwari, Kazumasa Okamoto, Takahiro Kozawa , Akinori Saeki
- Journal Title
  
  Materials Advances
  
  Volume: 3 Issue: 12 Pages: 4861-4869
- DOI
  10.1039/d2ma00385f
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-22K04986, KAKENHI-PLANNED-20H05836, KAKENHI-PROJECT-18H03895, KAKENHI-PROJECT-20H00398, KAKENHI-PROJECT-20H02784, KAKENHI-PROJECT-21K20558, KAKENHI-PUBLICLY-21H00400, KAKENHI-PUBLICLY-22H04541
[Journal Article] Study on deprotonation from radiation-induced ionized acrylate polymers including acidgeneration promoters for improving chemically amplified resists2022
- Author(s)
  Kazumasa Okamoto, Akihiro Konda, Yuki Ishimaru, Takahiro Kozawa, Yasunobu Nakagawa, Masamichi Nishimura
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: － Issue: 6 Pages: 066505-066505
- DOI
  10.35848/1347-4065/ac67ba
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K05330, KAKENHI-PROJECT-22K04986
[Journal Article] Dependence of dose rate on the sensitivity of the resist under ultra-high flux extreme ultraviolet (EUV) pulse irradiation2021
- Author(s)
  Okamoto Kazumasa, Kawai Shunpei, Ikari Yuta, Hori Shigeo, Konda Akihiro, Ueno Koki, Arai Yohei, Ishino Masahiko, Thanhhung Dinh, Nishikino Masaharu, Kon Akira, Owada Shigeki, Inubushi Yuichi, Kinoshita Hiroo, Kozawa Takahiro
- Journal Title
  
  Applied Physics Express
  
  Volume: 14 Issue: 6 Pages: 066502-066502
- DOI
  10.35848/1882-0786/abfca3
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19K15402, KAKENHI-PROJECT-19K05330, KAKENHI-PROJECT-18H03895, KAKENHI-PROJECT-21H03750
[Journal Article] Estimation of electron affinity of photoacid generators: density functional theory calculations using static and dynamic models2021
- Author(s)
  Kazumasa Okamoto, Takahiro Kozawa
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 60 Issue: SC Pages: SCCC03-SCCC03
- DOI
  10.35848/1347-4065/abf469
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K05330, KAKENHI-PROJECT-18H03895
[Journal Article] Heating effect of the radiation chemistry of polyhydroxystyrene-type chemically amplified resists2020
- Author(s)
  Ikari Yuta、Okamoto Kazumasa、Konda Akihiro、Kozawa Takahiro、Tamura Takao
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 59 Issue: 8 Pages: 086506-086506
- DOI
  10.35848/1347-4065/aba7d7
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18H03895
[Journal Article] Formation of intramolecular dimer radical ions of diphenyl sulfones2020
- Author(s)
  Kazumasa Okamoto, Shunpei Kawai, Takahiro Kozawa
- Journal Title
  
  Scientific Reports
  
  Volume: 10 Issue: 1 Pages: 19823-19823
- DOI
  10.1038/s41598-020-76907-4
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19K05330
[Journal Article] Synthesis and Property of Tellurium-Containing Molecular Resist Materials for Extreme Ultraviolet Lithography System2020
- Author(s)
  Kudo Hiroto、Fukunaga Mari、Yamada Teppei、Yamakawa Shinji、Watanabe Takeo、Yamamoto Hiroki、Okamoto Kazumasa、Kozawa Takahiro
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 32 Issue: 6 Pages: 805-810
- DOI
  10.2494/photopolymer.32.805
- NAID
  130007789016
- ISSN
  0914-9244, 1349-6336
- Year and Date
  2020-01-31
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18H03895
[Journal Article] Resist thickness dependence of line width roughness of chemically amplified resists used for electron beam lithography2020
- Author(s)
  Maeda Naoki、Konda Akihiro、Okamoto Kazumasa、Kozawa Takahiro、Tamura Takao
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 59 Issue: 8 Pages: 086501-086501
- DOI
  10.35848/1347-4065/ab9fde
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18H03895
[Journal Article] Sensitivity enhancement of chemically amplified EUV resist by adding diphenyl sulfone derivatives2020
- Author(s)
  Okamoto Kazumasa、Kawai Shunpei、Kozawa Takahiro
- Journal Title
  
  Proc. SPIE, Advances in Patterning Materials and Processes XXXVII
  
  Volume: 11326 Pages: 12-12
- DOI
  10.1117/12.2551865
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K05330
[Journal Article] Sensitivity enhancement of chemically amplified EUV resists by adding acid-generating promoters2017
- Author(s)
  Shinya Fujii, Kazumasa Okamoto, Hiroki Yamamoto, Takahiro Kozawa, Toshiro Itani
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 56 Issue: 6S1 Pages: 06GD01-06GD01
- DOI
  10.7567/jjap.56.06gd01
- NAID
  210000147863
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15K06662
[Journal Article] Dynamics of Radical Ions of Hydroxyhexafluoroisopropyl-Substituted Benzenes2017
- Author(s)
  K. Okamoto, N. Nomura, R. Fujiyoshi, K. Umegaki, H. Yamamoto, K. Kobayashi, and T. Kozawa
- Journal Title
  
  J. Phys. Chem. A
  
  Volume: 121 Issue: 49 Pages: 9458-9465
- DOI
  10.1021/acs.jpca.7b09842
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25246036, KAKENHI-PROJECT-15K06662
[Journal Article] Dynamics of radical cations of poly(4-hydroxystyrene) in the presence and absence of triphenylsulfonium triflate as determined by pulse radiolysis of its highly concentrated solution2016
- Author(s)
  K. Okamoto, T. Ishida, H. Yamamoto, T. Kozawa, R. Fujiyoshi, and K. Umegaki
- Journal Title
  
  Chem. Phys. Lett.
  
  Volume: 657 Pages: 44-48
- DOI
  10.1016/j.cplett.2016.05.058
- NAID
  120006488393
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25246036, KAKENHI-PROJECT-15K06662
[Journal Article] Plasma process for the improvements of device characteristics for self-aligned nano-carbon FETs2016
- Author(s)
  Toshio Kawahara, Singh R. Kumar, Yasuhide Ohno, Kenzo Maehashi, Kazuhiko Matsumoto, Kazumasa Okamoto, Risa Utsunomiya, Teruaki Matsuba
- Journal Title
  
  Proc. of 38th International Symposium on Dry Process
  
  Volume: - Pages: 51-52
- NAID
  130005175701
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26390030
[Journal Article] Development of Nano-Carbon Biosensors Using Glycan for Host Range Detection of Influenza Virus2016
- Author(s)
  Toshio Kawahara, Hiroaki Hiramatsu, Yasuo Suzuki, Shin-ichi Nakakita, Yasuhide Ohno, Kenzo Maehashi, Kazuhiko Matsumoto, Kazumasa Okamoto, Teruaki Matsuba, Risa Utsunomiya
- Journal Title
  
  Condens. Matter
  
  Volume: 1 Issue: 1 Pages: 7-7
- DOI
  10.3390/condmat1010007
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-26390030
[Journal Article] Dynamics of radical ions of fluorinated polymer for Extreme Ultraviolet (EUV) lithography2015
- Author(s)
  N. Nomura, K. Okamoto, H. Yamamoto, T. Kozawa, R. Fujiyoshi, K. Umegaki
- Journal Title
  
  Proc. SPIE
  
  Volume: 9658 Pages: 96581C-96581C
- DOI
  10.1117/12.2193060
- Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15K06662, KAKENHI-PROJECT-25630424
[Journal Article] Noise Spectroscopy of Self-aligned Carbon Nanowalls2015
- Author(s)
  T. Kawahara, Y. Ohno, K. Maehashi, K. Matsumoto, K. Okamoto, R. Utsunomiya, T. Matsuba
- Journal Title
  
  IEEE Conf. Proc.: 2015 23rd Int. Conf. Noise and Fluctuations (ICNF)
  
  Volume: - Pages: 108-111
- DOI
  10.1109/icnf.2015.7288600
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26390030
[Journal Article] Pulse Radiolysis Study of Polystyrene-based Polymers with Added Photoacid Generators: Reaction Mechanism of Extreme-ultraviolet and Electron-beam Chemically Amplified Resist2015
- Author(s)
  Kazumasa Okamoto, Hiroki Yamamoto, Takahiro Kozawa, Ryoko Fujiyoshi, Kikuo Umegaki
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 54 Issue: 2 Pages: 026501-026501
- DOI
  10.7567/jjap.54.026501
- NAID
  210000144787
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-24561037, KAKENHI-PROJECT-25630424
[Journal Article] Radiation Chemistry of Fluorinated Polymers for Extreme Ultraviolet Resist2015
- Author(s)
  Naoya Nomura, Kazumasa Okamoto, Hiroki Yamamoto, Takahiro Kozawa, Ryoko Fujiyoshi, Kikuo Umegaki
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 印刷中
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-24561037
[Journal Article] Deprotonation mechanism of ionized poly(4-hydroxystyrene)2014
- Author(s)
  Toshihiko Susa, Kazumasa Okamoto , Takuya Ishida , Hiroki Yamamoto , Takahiro Kozawa , Ryoko Fujiyoshi, and Kikuo Umegaki
- Journal Title
  
  Proc. SPIE
  
  Volume: 9051 Pages: 90511O-90511O
- DOI
  10.1117/12.2045881
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24561037, KAKENHI-PROJECT-25630424
[Journal Article] Carbon Nanowall Field Effect Transistors Using a Self-Aligned Growth Process2014
- Author(s)
  T. Kawahara, S. Yamaguchi, Y. Ohno, K. Maehashi, K. Matsumoto, K. Okamoto, R. Utsunomiya, T. Matsuba
- Journal Title
  
  e-J. Surf. Sci. Nanotechnol.
  
  Volume: 12 Issue: 0 Pages: 225-229
- DOI
  10.1380/ejssnt.2014.225
- NAID
  130004438881
- ISSN
  1348-0391
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26390030
[Journal Article] Fluidity dependence of deprotonation kinetics of chemically amplified resist2014
- Author(s)
  Kazumasa Okamoto , Takuya Ishida , Hiroki Yamamoto , Takahiro Kozawa , Ryoko Fujiyoshi, and Kikuo Umegaki
- Journal Title
  
  Proc. SPIE
  
  Volume: 9051 Pages: 90511T-90511T
- DOI
  10.1117/12.2046057
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24561037, KAKENHI-PROJECT-25630424
[Journal Article] Raman spectral mapping of self-aligned carbon nanowalls2014
- Author(s)
  Toshio Kawahara, Satarou Yamaguchi, Yasuhide Ohno, Kenzo Maehashi, Kazuhiko Matsumoto, Kazumasa Okamoto, Risa Utsunomiya, Teruaki Matsuba, Yuki Matsuoka, Masamichi Yoshimura
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 53 Issue: 5S1 Pages: 05FD10-05FD10
- DOI
  10.7567/jjap.53.05fd10
- NAID
  210000143823
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26390030, KAKENHI-PROJECT-26600105
[Journal Article] Deprotonation of poly(4-hydroxystyrene) intermediates: pulse radiolysis study of EUV and electron beam resist2013
- Author(s)
  Kazumasa Okamoto, Tyo Matsuda, Hiroki Yamamoto, Takahiro Kozawa, Seiichi Tagawa, Ryoko Fujiyoshi, and Takashi Sumiyoshi
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 52 Issue: 6S Pages: 06GC04-06GC04
- DOI
  10.7567/jjap.52.06gc04
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24561037, KAKENHI-PROJECT-25246036, KAKENHI-PROJECT-25630424
[Journal Article] Deprotonation of poly(4-hydroxystyrene) intermediates: Pulse radiolysis study of EUV and electron beam resist2013
- Author(s)
  Kazumasa Okamoto, Ryo Matsuda, Hiroki Yamamoto, Takahiro Kozawa, Seiichi Tagawa, Ryoko Fujiyoshi, and Takashi Sumiyoshi
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 52
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24561037
[Journal Article] Effect of Ultrahigh-Density Ionization of Resist Films on Sensitivity Using Extreme-Ultraviolet Free-Electron Laser2012
- Author(s)
  K. Okamoto, T. Kozawa, K. Oikawa, T. Hatsui, M. Nagasono, T. Kameshima, T. Togashi, K. Tono, M. Yabashi, H. Kimura, Y. Senba, H. Ohashi, R. Fujiyoshi, and T. Sumiyoshi
- Journal Title
  
  Appl. Phys. Express
  
  Volume: 5巻 Issue: 9 Pages: 96701-96701
- DOI
  10.1143/apex.5.096701
- NAID
  40019425422
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246128, KAKENHI-PROJECT-24561037
[Journal Article] Fundamental study on reaction mechanisms in chemically amplified extreme-ultraviolet resists by using 61-nm free-electron laser2011
- Author(s)
  Kazumasa Okamoto, Takahiro Kozawa, Takaki Hatsui, Yasuharu Tajima, Keita Oikawa, Mitsuru Nagasono, Takashi Kameshima, Tadashi Togashi, Kensuke Tono, Makina Yabashi, Hiroaki Kimura, Yasunori Senba, Haruhiko Ohashi, and Takashi Sumiyoshi
- Journal Title
  
  Proc. SPIE
  
  Volume: 7972 Pages: 797217-797217
- DOI
  10.1117/12.879358
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760669
[Journal Article] Deprotonation mechanism of poly(styrene-acrylate)-based chemically amplified resist2011
- Author(s)
  Yasuharu Tajima, Kazumasa Okamoto, Takahiro Kozawa, Seiichi Tagawa, Ryoko Fujiyoshi, and Takashi Sumiyoshi
- Journal Title
  
  Proc. SPIE
  
  Volume: 7972 Pages: 79721N-79721N
- DOI
  10.1117/12.879362
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760669
[Journal Article] Dynamics of radicalcation of poly(styrene acrylate)-based chemically amplified resist for extreme ultraviolet and electron beam lithography2011
- Author(s)
  Yasuharu Tajima, Kazumasa Okamoto, Takahiro Kozawa, Seiichi Tagawa, Ryoko Fujiyoshi, and Takashi Sumiyoshi
- Journal Title
  
  Jpn. J. Appl. Phys
  
  Volume: 50 Issue: 6S Pages: 06GD03-06GD03
- DOI
  10.1143/jjap.50.06gd03
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760669
[Journal Article] Fundamental study on reaction mechanisms in chemically amplified extreme-ultraviolet resists by using 61-nm free-electron laser2011
- Author(s)
  Kazumasa Okamoto
- Journal Title
  
  Proceedings of SPIE
  
  Volume: 7972
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760669
[Journal Article] Dynamics of Radical Cation of Poly(4-hydroxystyrene)-Based Chemically Amplified Resists for Extreme-Ultraviolet and Electron Beam Lithographies2010
- Author(s)
  K. Okamoto, M. Tanaka, T. Kozawa, and S. Tagawa
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 49巻 Issue: 10R Pages: 106501-106501
- DOI
  10.1143/jjap.49.106501
- NAID
  40017341248
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246128, KAKENHI-PROJECT-22760669
[Journal Article] Dynamics of radical cation of poly(4-hydroxystyrene) and its copolymer for extreme ultraviolet and electron beam resists2009
- Author(s)
  K. Okamoto, M. Tanaka, T. Kozawa, S. Tagawa
- Journal Title
  
  Jpn. J. Appl. Phys. (in press)
- NAID
  210000066906
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19710095
[Journal Article] Formation of Intramolecular Poly(4-hydroxystyrene) Dimer Radical Cation2008
- Author(s)
  Kazumasa Okamoto
- Journal Title
  
  J. Phys. Chem. B 112
  
  Pages: 9275-9280
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19710095
[Journal Article] Formation of Intramolecular Poly(4-hydroxystyrene) Dimer Radical Cation2008
- Author(s)
  K. Okamoto, T. Kozawa, K. Natsuda, S. Seki, and S. Tagawa
- Journal Title
  
  J. Phys. Chem B 112
  
  Pages: 9275-9280
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Formation of intramolecular poly(4-hydroxystyrene) dimer radical cation2008
- Author(s)
  K. Okamoto, T. Kozawa, K. Natsuda, S. Seki, S. Tagawa
- Journal Title
  
  J. Phys. Chem. B 112
  
  Pages: 9275-9280
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19710095
[Journal Article] Stroboscopic picosecond pulse radiolysis using near-ultraviolet-enhanced femtosecond continuum generated by CaF_22007
- Author(s)
  A. Saeki, T. Kozawa, K. Okamoto, and S. Tagawa,
- Journal Title
  
  Jpn. J. Appl. Phys. 46
  
  Pages: 407-411
- NAID
  10018705573
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Stroboscopic picosecond pulse radiolysis using near-ultraviolet-enhanced femtosecond continuum generated by CaF22007
- Author(s)
  A. Saeki, T. Kozawa, K. Okamoto, and S. Tagawa
- Journal Title
  
  Jpn. J. Appl. Phys 46
  
  Pages: 407-411
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Effect of Acid Diffusion and Polymer Structure on Line Edge Roughness2007
- Author(s)
  H. Yamamoto, T. Kozawa, A. Saeki, K. Okamoto, S. Tagawa, K. Ohmori, M. Sato, and H. Komano,
- Journal Title
  
  Jpn. J. Appl. Phys. 46
  
  Pages: 6187-6190
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Study of Acid-Base Equilibrium in Chemically Amplified Resist2007
- Author(s)
  K. Natsuda, T. Kozawa, K. Okamoto, S. Tagawa
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 46 Pages: 7285-7289
- NAID
  40015705098
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Subpicosecond pulse radiolysis in liquid methyl-substituted benzene derivatives2007
- Author(s)
  K. Okamoto, T. Kozawa, A. Saeki, Y. Yoshida, and S. Tagawa
- Journal Title
  
  Radiat. Phys. Chem. 76
  
  Pages: 818-826
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Subpicosecond pulse radiolysis in liquid methyl-substituted benzene derivaties2007
- Author(s)
  Okamoto Kazumasa, Kozawa Takahiro, Saeki Akinori, Yoshida Yoichi, Tagawa Seiichi
- Journal Title
  
  Radiation Physics and Chemistry 76
  
  Pages: 818-826
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19710095
[Journal Article] Subpicosecond pulse radiolysis in liquid methyl-substituted benzene derivatives, Radiat2007
- Author(s)
  K. Okamoto, T. Kozawa, A. Saeki, Y. Yoshida, and S. Tagawa
- Journal Title
  
  Phys. Chem 76
  
  Pages: 818-826
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Subpicosecond pulse radiolysis in liquid methyl-substituted benzene derivatives2007
- Author(s)
  K. Okamoto, T. Kozawa, A. Saeki, Y. Yoshida, S. Tagawa
- Journal Title
  
  Radiat. Phys. Chem. 76
  
  Pages: 818-826
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19710095
[Journal Article] Dependence of Acid Yield on Chemically Amplified Electron Beam Resist Thickness2006
- Author(s)
  T.Shigaki, K.Okamoto, T.Kozawa, H.Yamamoto, S.Tagawa
- Journal Title
  
  Jpn. J. Appl. Phys. 45
  
  Pages: 5445-5449
- NAID
  10017998648
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Protonation sites in chemically amplified resists for electron beam lithography Jpn2006
- Author(s)
  K. Natsuda, T. Kozawa, K. Okamoto and S. Tagawa
- Journal Title
  
  J. Appl. Phys 45
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Analysis of Acid Yield Generated in Chemically Amplified Electron Beam Resist2006
- Author(s)
  T. Kozawa, T. Shigaki, K. Okamoto, A. Saeki, S. Tagawa, T. Kai, T. Shimokawa
- Journal Title
  
  J. Vac. Sci. Technol. B
  
  Volume: 24 Pages: 3055-3060
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Acid Generation Mechanism of Poly (4-hydroxystyrene) -Based Chemically Amplified Resists for Post-Optical Lithography : Acid Yield and Deprotonation Behavior of Poly (4-hydroxystyrene) and Poly (4-methoxystyrene)2006
- Author(s)
  A. Nakano, T. Kozawa, K. Okamoto, S. Tagawa, T. Kai, T. Shimokawa
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 45 Pages: 6866-6871
- NAID
  10018245439
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Pulse radiolysis of polystyrene in cyclohexane -Effect of carbon tetrachloride on kinetic dynamics of dimer radical cation-2006
- Author(s)
  K.Okamoto, T.Kozawa, M.Miki, Y.Yoshida, S.Tagawa
- Journal Title
  
  Chem. Phys. Lett. 426
  
  Pages: 306-310
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Relationship between Acid Generator Concentration and Acid Yield in Chemically Amplified Electron Beam Resist2006
- Author(s)
  T. Shigaki, K. Okamoto, T. Kozawa, H. Yamamoto, S. Tagawa, T. Kai, T. Shimokawa
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 45 Pages: 5735-5737
- NAID
  10017999650
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Protonation sites in chemically amplified resists for electron beam lithography2006
- Author(s)
  K.Natsuda, T.Kozawa, K.Okamoto, S.Tagawa
- Journal Title
  
  Jpn. J. Appl. Phys. 45
- NAID
  10018460952
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Reaction mechanism of fluorinated chemically amplified resists2006
- Author(s)
  H. Yamamoto, T. Kozawa, K. Okamoto, A. Saeki, S. Tagawa, T. Ando, M. Sato, H. Komano
- Journal Title
  
  J. Vac. Sci. Technol. B
  
  Volume: 24 Pages: 1833-1836
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Resist Thickness Effect on Acid Concentration Generated in Poly(4-hydroxystyrene) Film upon Exposure to 75 keV Electron Beam2005
- Author(s)
  T.Shigaki, K.Okamoto, T.Kozawa, H.Yamamoto, S.Tagawa
- Journal Title
  
  Jpn.J.Appl.Phys. 44
- NAID
  10016856520
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Dependence of Acid Yield on Acid Generator in Chemically Amplified Resist for Post-Optical Lithography2005
- Author(s)
  A. Nakano, K. Okamoto, Y. Yamamoto, T. Kozawa, S. Tagawa, T. Kai, H. Nemoto
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 44 Pages: 5832-5835
- NAID
  10016678348
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Study on acid generation from polymer2005
- Author(s)
  H. Yamamoto, T. Kozawa, A. Nakano, K. Okamoto, S. Tagawa, T. Ando, M. Sato, H. Komano
- Journal Title
  
  J. Vac. Sci. Technol. B
  
  Volume: 23 Pages: 2728-2732
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Effects of Dielectric Constant on Acid Generation in Chemically Amplified Resists for Post-Optical Lithography2005
- Author(s)
  T.Kozawa, K.Okamoto, A.Saeki, S.Tagawa
- Journal Title
  
  Jpn.J.Appl.Phys. 44
  
  Pages: 3908-3912
- NAID
  10016441312
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Potential Cause of Inhomogeneous Acid Distribution in Chemically Amplified Resists for Post Optical Lithography2005
- Author(s)
  H. Yamamoto, T. Kozawa, A. Nakano, K. Okamoto, S. Tagawa, T. Ando, M. Sato, H. Komano
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 44 Pages: 5836-5838
- NAID
  10016678367
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Journal Article] Requirements for Laser-Induced Desorption/Ionization on Submicrometer Structures2005
- Author(s)
  S. Okuno, R. Arakawa, K. Okamoto, Y. Matsui, S. Seki, T. Kozawa, S. Tagawa, Y. Wada
- Journal Title
  
  Anal. Chem.
  
  Volume: 77 Pages: 5364-5369
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Dynamics of radical cation of poly(4-hydroxystyerne)2024
- Author(s)
  Kazumasa Okamoto, Yusa Muroya, Takahiro Kozawa
- Organizer
  The 27th SANKEN International Symposium
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22K04986
[Presentation] ポリヒドロキシスチレン系レジストポリマーのラジカルカチオンのダイナミクス2024
- Author(s)
  岡本一将、室屋裕佐、古澤孝弘
- Organizer
  日本原子力学会　２０２４年春の年会
- Data Source
  KAKENHI-PROJECT-22K04986
[Presentation] 最先端量子ビームによる反応解析2024
- Author(s)
  室屋裕佐、岡本一将、古澤孝弘
- Organizer
  大阪大学産業科学研究所第８０回学術講演会
- Data Source
  KAKENHI-PROJECT-22K04986
[Presentation] ポリヒドロキシスチレン型レジストポリマーのラジカルカチオンのダイナミクス2024
- Author(s)
  岡本一将
- Organizer
  大阪大学産業科学研究所量子ビーム科学研究施設　令和５年度成果報告会
- Data Source
  KAKENHI-PROJECT-22K04986
[Presentation] パルスラジオリシスと量子化学計算によるポリスチレン誘導体のラジカルカチオンの置換基効果に関する研究2024
- Author(s)
  岡本一将、室屋裕佐、古澤孝弘
- Organizer
  日本原子力学会2024年秋の大会
- Data Source
  KAKENHI-PROJECT-22K04986
[Presentation] 最先端量子ビームによる反応解析2023
- Author(s)
  室屋裕佐、岡本一将、古澤孝弘
- Organizer
  大阪大学産業科学研究所第79回学術講演会
- Data Source
  KAKENHI-PROJECT-22K04986
[Presentation] ガルバニク水中結晶光合成法を用いたZnO/Siの色調表面パターニングと発光特性2022
- Author(s)
  メルバートジェーム, 塚村順平, 髙橋優樹, 張麗華, 岡本一将, 渡辺精一
- Organizer
  NGL2022
- Invited
- Data Source
  KAKENHI-PROJECT-22K04986
[Presentation] ポリスチレンの正電荷非局在性へのパルスラジオリシスおよびシミュレーションによるアプローチ2022
- Author(s)
  岡本一将、山本洋揮、古澤孝弘
- Organizer
  原子力学会２０２２年春の年会
- Data Source
  KAKENHI-PROJECT-19K05330
[Presentation] G-SPSCを用いた欠陥制御による色調表面パターニング2021
- Author(s)
  塚村順平、高橋　優樹、張麗華、ジェームメルバート、岡本一将、渡辺精一
- Organizer
  日本金属学会第３７回
- Data Source
  KAKENHI-PROJECT-20H00295
[Presentation] Fabrication of ZnO/Si Surface Patterning by defect controlvia Galvanic-Submerged Photo-Synthesis of Crystallites2021
- Author(s)
  Jumpei Tsukamura,Yuki Takahashi, Lihua Zhang,Melbert Jeem, Kazumasa Okamoto, and Seiichi Watanabe
- Organizer
  34th International Microprocesses and Nanotechnology Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H00295
[Presentation] Sensitivity enhancement of chemically amplified EUV resist by adding dipheyl sulfone derivatives2020
- Author(s)
  Kazumasa Okamoto, Shunpei Kawai, Takahiro Kozawa
- Organizer
  SPIE Advanced Lithography 2020
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05330
[Presentation] Estimation of electron affinity of photoacid generators: density functional theory calculations using static and dynamic models2020
- Author(s)
  Kazumasa Okamoto, Takahiro Kozawa
- Organizer
  MNC 2020, 33rd International Microprocesses and Nanotechnology Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05330
[Presentation] Estimation of Electron Affinity of Photoacid Generators: Density Functional TheoryCalculations Using Static and Dynamic Models2020
- Author(s)
  Kazumasa Okamoto and Takahiro Kozawa
- Organizer
  MNC2020
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H03895
[Presentation] ジフェニルスルホン酸生成促進剤による化学増幅型レジストの感度向上2019
- Author(s)
  河合俊平、大沼正人、岡本一将、古澤孝弘
- Organizer
  第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05330
[Presentation] パルスラジオリシスによるフェニルスルホン化合物の放射線化学反応2018
- Author(s)
  岡本一将, 河合俊平, 山本洋揮, 古澤孝弘
- Organizer
  日本原子力学会２０１８年春の大会
- Data Source
  KAKENHI-PROJECT-15K06662
[Presentation] 化学増幅型レジストへのスルホン化合物の添加効果2017
- Author(s)
  岡本一将, 藤井槙哉, 山本洋揮, 古澤孝弘, 井谷俊郎
- Organizer
  第６４回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（神奈川県・横浜市）
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15K06662
[Presentation] ポリスチレンのフェニルトリメトキシシラン溶液のパルスラジオリシス2017
- Author(s)
  堀成生, 岡本一将, 山本洋揮, 古澤孝弘, 藤吉亮子, 梅垣菊男
- Organizer
  第60回放射線化学討論会
- Data Source
  KAKENHI-PROJECT-15K06662
[Presentation] ヒドロキシヘキサフルオロイソプロピルベンゼンのラジカルイオンのダイナミクス2016
- Author(s)
  岡本一将、野村直矢、山本洋揮、藤吉亮子、梅垣菊男
- Organizer
  第59回放射線化学討論会
- Place of Presentation
  量子科学技術研究開発機構　高崎量子応用研究所(群馬県・高崎市)
- Year and Date
  2016-09-20
- Data Source
  KAKENHI-PROJECT-15K06662
[Presentation] Sensitivity enhancement of chemically amplified EUV by adding acid generation promoters2016
- Author(s)
  Shinya Fujii, Kazumasa Okamoto, Hiroki Yamamoto, Takahiro Kozawa, Toshiro Itani
- Organizer
  29th International Microprocesses and Nanotechnology Conference (MNC2016)
- Place of Presentation
  ANA Crowne Plaza Kyoto (京都府・京都市)
- Year and Date
  2016-11-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K06662
[Presentation] 添加剤を用いた酸生成促進によるEUV 用化学増幅型レジストの感度向上2016
- Author(s)
  藤井槙哉、岡本一将、山本洋揮、古澤孝弘、井谷俊郎
- Organizer
  第59回放射線化学討論会
- Place of Presentation
  量子科学技術研究開発機構　高崎量子応用研究所(群馬県・高崎市)
- Year and Date
  2016-09-20
- Data Source
  KAKENHI-PROJECT-15K06662
[Presentation] Plasma process for the improvements of device characteristics for self-aligned nano-carbon FETs2016
- Author(s)
  Toshio Kawahara, Singh R. Kumar, Yasuhide Ohno, Kenzo Maehashi, Kazuhiko Matsumoto, Kazumasa Okamoto, Risa Utsunomiya, Teruaki Matsuba
- Organizer
  38th International Symposium on Dry Process
- Place of Presentation
  北海道大学 (北海道札幌市)
- Year and Date
  2016-11-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390030
[Presentation] Developments of the nano-carbon bio sensors using glycan for influenza virus2016
- Author(s)
  Toshio Kawahara, Hiroaki Hiramatsu, Yasuo Suzuki, Shin-ichi Nakakita, Yasuhide Ohno, Kenzo Maehashi, Kazuhiko Matsumoto, Kazumasa Okamoto, Teruaki Matsuba, Risa Utsunomiya
- Organizer
  13th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN2016)
- Place of Presentation
  Frascati National Laboratories (Rome, Italy)
- Year and Date
  2016-10-14
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390030
[Presentation] カーボンナノウォールFETのためのプラズマプロセス2016
- Author(s)
  河原敏男, Singh R. Kumar, 大野恭秀, 前橋兼三, 松本和彦, 岡本一将, 宇都宮里佐, 松葉晃明
- Organizer
  第57回真空に関する連合講演会・第36回表面科学学術講演会
- Place of Presentation
  名古屋国際会議場 (愛知県名古屋市)
- Year and Date
  2016-11-30
- Data Source
  KAKENHI-PROJECT-26390030
[Presentation] 光酸発生剤を添加した芳香族系レジスト樹脂のパルスラジオリシス2015
- Author(s)
  岡本一将、石田拓也、藤吉亮子、梅垣菊男、山本洋揮、古澤孝弘
- Organizer
  日本原子力学会　２０１５年春の年会
- Place of Presentation
  茨城大学日立キャンパス、日立
- Year and Date
  2015-03-22
- Data Source
  KAKENHI-PROJECT-25630424
[Presentation] Radiation-induced reaction of fluorinated polymers and related compounds for extreme-ultraviolet lithography2015
- Author(s)
  N. Nomura, K. Okamoto, H. Yamamoto, T. Kozawa, R. Fujiyoshi, K. Umegaki
- Organizer
  Pacifichem 2015
- Place of Presentation
  Hawii Convention Center(Honolulu, Hawaii, USA)
- Year and Date
  2015-12-15
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K06662
[Presentation] Dynamics of radical ions of fluorinated polymer for Extreme Ultraviolet (EUV) lithography2015
- Author(s)
  N. Nomura, K. Okamoto, H. Yamamoto, T. Kozawa, R. Fujiyoshi, K. Umegaki
- Organizer
  Photomask Japan 2015
- Place of Presentation
  パシフィコ横浜（神奈川県横浜市）
- Year and Date
  2015-04-20
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K06662
[Presentation] Pulse radiolysis in concentrated poly(4-hydroxystyrene) solution: Acid generation dynamics in EUV and electron-beam chemically amplified resist2015
- Author(s)
  K. Okamoto, T. Ishida, H. Yamamoto, T. Kozawa, R. Fujiyoshi, K. Umegaki
- Organizer
  MNC2015
- Place of Presentation
  富山国際会議場（富山県富山市）
- Year and Date
  2015-11-10
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25630424
[Presentation] Radiation-induced reaction of fluorinated polymers and related compounds for extreme-ultraviolet lithography2015
- Author(s)
  N. Nomura, K. Okamoto, H. Yamamoto, T. Kozawa, R. Fujiyoshi, K. Umegaki
- Organizer
  Pacifichem 2015
- Place of Presentation
  ホノルルコンベンションセンター（ハワイ）
- Year and Date
  2015-12-15
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25630424
[Presentation] EUVレジストに向けたフッ素ポリマーの放射線化学反応の解明2015
- Author(s)
  野村直矢、岡本一将、藤吉亮子、梅垣菊男、山本洋揮、古澤孝弘
- Organizer
  日本原子力学会　２０１５年春の年会
- Place of Presentation
  茨城大学日立キャンパス、日立
- Year and Date
  2015-03-22
- Data Source
  KAKENHI-PROJECT-25630424
[Presentation] Radiation chemistry of fluorinated polymers for Extreme-ultraviolet resist2015
- Author(s)
  N. Nomura, K. Okamoto, H. Yamamoto, T. Kozawa, R. Fujiyoshi, K. Umegaki
- Organizer
  28th International Microprocesses and Nanotechnology Conference
- Place of Presentation
  富山国際会議場（富山県富山市）
- Year and Date
  2015-11-10
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K06662
[Presentation] Pulse radiolysis study of resist polymers with and without photoacid generator2015
- Author(s)
  K. Okamoto, T. Ishida, H. Yamamoto, T. Kozawa, R. Fujiyoshi, K. Umegaki
- Organizer
  Pacifichem 2015
- Place of Presentation
  ホノルルコンベンションセンター（ハワイ）
- Year and Date
  2015-12-15
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25630424
[Presentation] パルスラジオリシス法によるフッ素樹脂の放射線化学反応の解明2015
- Author(s)
  野村直矢、岡本一将、藤吉亮子、梅垣菊男、山本洋揮、古澤孝弘
- Organizer
  日本原子力学会２０１５年秋の大会
- Place of Presentation
  静岡大学静岡キャンパス（静岡県静岡市）
- Year and Date
  2015-09-09
- Data Source
  KAKENHI-PROJECT-25630424
[Presentation] Radiation chemistry of fluorinated polymers for Extreme-ultraviolet resist2015
- Author(s)
  N. Nomura, K. Okamoto, H. Yamamoto, T. Kozawa, R. Fujiyoshi, K. Umegaki
- Organizer
  MNC2015
- Place of Presentation
  富山国際会議場（富山県富山市）
- Year and Date
  2015-11-10
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25630424
[Presentation] パルスラジオリシス法によるフッ素樹脂の放射線化学反応の解明2015
- Author(s)
  野村直矢、岡本一将、藤吉亮子、梅垣菊男、山本洋揮、古澤孝弘
- Organizer
  日本原子力学会２０１５年秋の大会
- Place of Presentation
  静岡大学静岡キャンパス（静岡県静岡市）
- Year and Date
  2015-09-09
- Data Source
  KAKENHI-PROJECT-15K06662
[Presentation] Dynamics of radical ions of fluorinated polymer for Extreme Ultraviolet (EUV) lithography2015
- Author(s)
  N. Nomura, K. Okamoto, H. Yamamoto, T. Kozawa, R. Fujiyoshi, K. Umegaki
- Organizer
  Photomask Japan 2015
- Place of Presentation
  パシフィコ横浜（神奈川県横浜市）
- Year and Date
  2015-04-20
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25630424
[Presentation] Pulse radiolysis study of resist polymers with and without photoacid generator2015
- Author(s)
  K. Okamoto, T. Ishida, H. Yamamoto, T. Kozawa, R. Fujiyoshi, K. Umegaki
- Organizer
  Pacifichem 2015
- Place of Presentation
  Hawii Convention Center(Honolulu, Hawaii, USA)
- Year and Date
  2015-12-15
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K06662
[Presentation] 低温バッファー層を用いたCNW-FETのノイズ解析2015
- Author(s)
  河原敏男、川際智聖、中川幸紀、大野泰秀、前橋兼三、松本和彦、岡本一将、宇都宮里佐、松葉晃明、吉村雅満、松岡佑樹
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場（愛知県名古屋市）
- Year and Date
  2015-09-16
- Data Source
  KAKENHI-PROJECT-26390030
[Presentation] Pulse radiolysis in concentrated poly(4-hydroxystyrene) solution: Acid generation dynamics in EUV and electron-beam chemically amplified resist2015
- Author(s)
  K. Okamoto, T. Ishida, H. Yamamoto, T. Kozawa, R. Fujiyoshi, K. Umegaki
- Organizer
  28th International Microprocesses and Nanotechnology Conference
- Place of Presentation
  富山国際会議場（富山県富山市）
- Year and Date
  2015-11-10
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K06662
[Presentation] Noise Spectroscopy of Self-aligned Carbon Nanowalls2015
- Author(s)
  T. Kawahara, Y. Ohno, K. Maehashi, K. Matsumoto, K. Okamoto, R. Utsunomiya, T. Matsuba
- Organizer
  23rd Internationl Conference on Noise and Fluctuations (ICNF)
- Place of Presentation
  Xidian University, Xi'An, China
- Year and Date
  2015-06-03
- Data Source
  KAKENHI-PROJECT-26390030
[Presentation] 化学増幅レジストモデルのパルスラジオリシス2013
- Author(s)
  岡本一将、山本洋揮、古澤孝弘、藤吉亮子、住吉　孝
- Organizer
  第56回放射線化学討論会
- Place of Presentation
  広島大学（東広島市）
- Data Source
  KAKENHI-PROJECT-24561037
[Presentation] ポリ(4-ヒドロキシスチレン)のラジカルカチオンの脱プロトン反応2013
- Author(s)
  須佐俊彦、岡本一将、石田拓也、山本洋揮、古澤孝弘、藤吉亮子、住吉　孝
- Organizer
  第56回放射線化学討論会
- Place of Presentation
  広島大学、広島市
- Data Source
  KAKENHI-PROJECT-25630424
[Presentation] 化学増幅レジストモデルのパルスラジオリシス2013
- Author(s)
  岡本一将、山本洋揮、古澤孝弘、藤吉亮子、住吉　孝
- Organizer
  第56回放射線化学討論会
- Place of Presentation
  広島大学、広島市
- Data Source
  KAKENHI-PROJECT-25630424
[Presentation] Pulse Radiolysis Study of Polystyrene-based Polymers with Adding Photoacid Generators (PAGs): Molecular Dynamics of Extreme-ultraviolet and Electron Beam Resist2013
- Author(s)
  K. Okamoto, K. Tominaga, T. Hori, H. Yamamoto, T. Kozawa, R. Fujiyoshi, and T. Sumiyoshi
- Organizer
  MNC2013
- Place of Presentation
  Royton Sapporo, Sapporo, Japan
- Data Source
  KAKENHI-PROJECT-24561037
[Presentation] Viscosity Effect on Deprotonation Dynamics of Poly(4-hydroxystyrene)2013
- Author(s)
  T. Ishida, K. Okamoto, H. Yamamoto, T. Kozawa, R. Fujiyoshi, and T. Sumiyoshi
- Organizer
  MNC2013
- Place of Presentation
  ロイトン札幌、札幌市
- Data Source
  KAKENHI-PROJECT-25630424
[Presentation] Simulation of Kinetics in High-density Ionization Extra-ultraviolet (EUV) Resist Process2013
- Author(s)
  K. Nishono, K. Okamoto, H. Yamamoto, T. Kozawa, R. Fujiyoshi, and T. Sumiyoshi
- Organizer
  MNC2013
- Place of Presentation
  Royton Sapporo, Sapporo, Japan
- Data Source
  KAKENHI-PROJECT-24561037
[Presentation] ポリ(4-ヒドロキシスチレン)(PHS)濃厚溶液の脱プロトン反応の粘度効果2013
- Author(s)
  石田拓也、岡本一将、山本洋揮、古澤孝弘、藤吉亮子、住吉　孝
- Organizer
  第56回放射線化学討論会
- Place of Presentation
  広島大学（東広島市）
- Data Source
  KAKENHI-PROJECT-24561037
[Presentation] Acid Generation Mechanism in Solid Poly(4-hydroxystyrene) upon Exposeure to Electron Beam2013
- Author(s)
  H. Yamamoto, K. Okamoto, and T. Kozawa
- Organizer
  MNC2013
- Place of Presentation
  Royton Sapporo, Sapporo, Japan
- Data Source
  KAKENHI-PROJECT-24561037
[Presentation] ポリ(4-ヒドロキシスチレン)(PHS)濃厚溶液の脱プロトン反応の粘度効果2013
- Author(s)
  石田拓也、岡本一将、山本洋揮、古澤孝弘、藤吉亮子、住吉　孝
- Organizer
  第56回放射線化学討論会
- Place of Presentation
  広島大学、広島市
- Data Source
  KAKENHI-PROJECT-25630424
[Presentation] Acid Generation Mechanism in Solid Poly(4-hydroxystyrene) upon Exposeure to Electron Beam2013
- Author(s)
  H. Yamamoto, K. Okamoto, and T. Kozawa
- Organizer
  MNC2013
- Place of Presentation
  ロイトン札幌、札幌市
- Data Source
  KAKENHI-PROJECT-25630424
[Presentation] Viscosity Effect on Deprotonation Dynamics of Poly(4-hydroxystyrene)2013
- Author(s)
  T. Ishida, K. Okamoto, H. Yamamoto, T. Kozawa, R. Fujiyoshi, and T. Sumiyoshi
- Organizer
  MNC2013
- Place of Presentation
  Royton Sapporo, Sapporo, Japan
- Data Source
  KAKENHI-PROJECT-24561037
[Presentation] ポリ(4-ヒドロキシスチレン)のラジカルカチオンの脱プロトン反応2013
- Author(s)
  須佐俊彦、岡本一将、石田拓也、山本洋揮、古澤孝弘、藤吉亮子、住吉　孝
- Organizer
  第56回放射線化学討論会
- Place of Presentation
  広島大学（東広島市）
- Data Source
  KAKENHI-PROJECT-24561037
[Presentation] Pulse Radiolysis Study of Polystyrene-based Polymers with Adding Photoacid Generators (PAGs): Molecular Dynamics of Extreme-ultraviolet and Electron Beam Resist2013
- Author(s)
  K. Okamoto, K. Tominaga, T. Hori, H. Yamamoto, T. Kozawa, R. Fujiyoshi, and T. Sumiyoshi
- Organizer
  MNC2013
- Place of Presentation
  ロイトン札幌、札幌市
- Data Source
  KAKENHI-PROJECT-25630424
[Presentation] レジスト高分子の放射線化学2012
- Author(s)
  岡本一将
- Organizer
  日本化学会第92春季年会
- Place of Presentation
  慶応義塾大学日吉キャンパス(神奈川県)(招待講演)
- Year and Date
  2012-03-28
- Data Source
  KAKENHI-PROJECT-22760669
[Presentation] レジスト高分子の放射線化学2012
- Author(s)
  岡本一将、住吉孝
- Organizer
  日本化学会第92春季年会
- Place of Presentation
  慶応義塾大学
- Year and Date
  2012-03-28
- Data Source
  KAKENHI-PROJECT-22760669
[Presentation] 極端紫外自由電子レーザーによる極薄膜高分子内のスパー制御2011
- Author(s)
  岡本一将、古澤孝弘、及川敬太、初井宇記、永園充、亀島敬、富樫格、登野健介、矢橋牧名、木村洋昭、仙波泰徳、大橋治彦、石川哲也、住吉孝
- Organizer
  第54回放射線化学討論会
- Place of Presentation
  大阪大学
- Year and Date
  2011-09-30
- Data Source
  KAKENHI-PROJECT-22760669
[Presentation] Acid generation efficiency in resist films after exposure to the 61 nm free-electron laser light2011
- Author(s)
  K. Oikawa, K. Okamoto, T. Kozawa, T. Hatsui, M. Nagasono, T. Kameshima, T. Togashi, K. Tono, M. Yabashi, H. Kimura, Y. Senba, H. Ohash, R. Fujiyoshi and T. Sumiyoshi
- Organizer
  MNC
- Place of Presentation
  ANA Hotel Kyoto, Kyoto, Japan
- Year and Date
  2011-10-27
- Data Source
  KAKENHI-PROJECT-22760669
[Presentation] Fundamental study on reaction mechanisms in chemically amplified extreme-ultraviolet resists by using 61-nm free-electron laser, SPIE Advanced Lithography 20112011
- Author(s)
  Kazumasa Okamoto, Takahiro Kozawa, Takaki Hatsui, Yasuharu Tajima, Keita Oikawa, Mitsuru Nagasono, Takashi Kameshima, Tadashi Togashi, Kensuke Tono, Makina Yabashi, Hiroaki Kimura, Yasunori Senba, Haruhiko Ohashi, and Takashi Sumiyoshi
- Organizer
  San Jose Convention Center and San Jose Marriott| San Jose
- Place of Presentation
  California, USA
- Year and Date
  2011-03-02
- Data Source
  KAKENHI-PROJECT-22760669
[Presentation] 極端紫外自由電子レーザーによる極薄膜高分子内のスパー制御2011
- Author(s)
  岡本一将
- Organizer
  第54回放射線化学討論会
- Place of Presentation
  大阪大学吹田キャンパス(大阪府)
- Year and Date
  2011-09-30
- Data Source
  KAKENHI-PROJECT-22760669
[Presentation] Fundamental study on reaction mechanisms in chemically amplified extreme-ultraviolet resists by using 61-nm free-electron laser2011
- Author(s)
  Kazumasa Okamoto
- Organizer
  SPIE Advanced Lithography 2011
- Place of Presentation
  San Jose Convention Center, San Jose, USA
- Year and Date
  2011-03-02
- Data Source
  KAKENHI-PROJECT-22760669
[Presentation] Charge dynamics in resist polymers for EUV and EB lithography2010
- Author(s)
  Kazumasa Okamoto
- Organizer
  EUVレジスト国際シンポジウム
- Place of Presentation
  大阪大学中之島センター,大阪市
- Year and Date
  2010-11-18
- Data Source
  KAKENHI-PROJECT-22760669
[Presentation] Dynamics of radical cation of poly(styrene-acrylate)-based chemically amplified resist for EUV and electron beam lithography2010
- Author(s)
  Yasuharu Tajima, Kazumasa Okamoto, Takahiro Kozawa, Seiichi Tagawa, Ryoko Fujiyoshi, and Takashi Sumiyoshi
- Organizer
  MNC 2010, 23rd International Microprocesses and Nanotechnology Conference
- Place of Presentation
  Rihga Royal Hotel Kokura, Fukuoka, Japan
- Year and Date
  2010-11-11
- Data Source
  KAKENHI-PROJECT-22760669
[Presentation] 芳香族分子の電荷非局在性に関する研究2010
- Author(s)
  岡本一将
- Organizer
  第53回放射線化学討論会
- Place of Presentation
  名古屋大学
- Year and Date
  2010-09-22
- Data Source
  KAKENHI-PROJECT-22760669
[Presentation] Hole Dynamics in Poly(4-Hydroxystyrene) and its Copolymer2009
- Author(s)
  Kazumasa Okamoto
- Organizer
  The 12th SANKEN International Symposium
- Place of Presentation
  大阪大学
- Year and Date
  2009-01-22
- Data Source
  KAKENHI-PROJECT-19710095
[Presentation] Hole Dynamics in Poly(4-Hydroxystyrene) and its Copolymer2009
- Author(s)
  Kazumasa Okamoto, Masafumi Tanaka, Takahiro Kozawa, Seiichi Tagawa
- Organizer
  The 12th SANKEN International Symposium
- Place of Presentation
  Osaka Univ.
- Year and Date
  2009-01-22
- Data Source
  KAKENHI-PROJECT-19710095
[Presentation] Dynamics of PHS Radical Cation2008
- Author(s)
  Kasumasa Okamoto, Takahiro Kozawa, Seiichi Tagawa
- Organizer
  SPIE Advanced Lithography 2008
- Place of Presentation
  San Jose, CA, USA
- Year and Date
  2008-02-25
- Data Source
  KAKENHI-PROJECT-19710095
[Presentation] Horie, Effect of acid generator structure on its depth distribution in chemically amplified resist films2008
- Author(s)
  T. Fukuyama, T. Kozawa, K. Okamoto, S. Tagawa, M. Irie, T. Mimura, T. Iwai, J. Onodera, I. Hirosawa, T. Koganesawa, and K
- Organizer
  21st International Microprocesses and Nanotechnology Conference
- Place of Presentation
  Fukuoka, Japan
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Dynamics of Radical Cations of Resist Model Compounds2008
- Author(s)
  Kazumasa Okamoto
- Organizer
  APSRC-2008 The 2nd Asia-Pacific Symposium on Radiation Chemistry
- Place of Presentation
  早稲田大学
- Year and Date
  2008-08-29
- Data Source
  KAKENHI-PROJECT-19710095
[Presentation] Dynamics of Radical Cations of Resist Model Compounds2008
- Author(s)
  K. Okamoto, M. Tanaka, T. Kozawa, S. Tagawa
- Organizer
  2nd Asia-Pacific Symposium on Radiation Chemistry
- Place of Presentation
  Waseda University
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Effect of molecular structures of acid generators on acid generation in chemically amplified resists upon exposure to 75 keV electron beam2008
- Author(s)
  K. Natsuda, T. Kozawa, K. Okamoto, and S. Tagawa
- Organizer
  21st International Microprocesses and Nanotechnology Conference
- Place of Presentation
  Fukuoka, Japan
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] ポリ(4-メトキシスチレン)のパルスラジオリシスーダイマーラジカルカチオン生成の置換基依存性2008
- Author(s)
  岡本一将
- Organizer
  第51回放射線化学討論会
- Place of Presentation
  産総研、つくば
- Year and Date
  2008-10-17
- Data Source
  KAKENHI-PROJECT-19710095
[Presentation] Effect of acid generator structure on its depth distribution in chemically amplified resist films2008
- Author(s)
  T. Fukuyama, T. Kozawa, K. Okamoto, S. Tagawa, M. Irie, T. Mimura, T. Iwai, J. Onodera, I. Hirosawa, T. Koganesawa, K. Horie
- Organizer
  21st International Microprocesses and Nanotechnology Conference
- Place of Presentation
  Fukuoka, Japan
- Year and Date
  2008-10-28
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Dynamics of Radical Cation of Poly (4-Hydroxystyrene) and its Copolymer2008
- Author(s)
  Kazumasa Okamoto, Masafumi Tanaka, Takahiro Kozawa, Seiichi Tagawa
- Organizer
  21st International Microprocesses and Nanotechnology Conference
- Place of Presentation
  Fukuoka, Japan
- Data Source
  KAKENHI-PROJECT-19710095
[Presentation] Dynamics of Poly(4-hydroxystyrene) Radical Cation2008
- Author(s)
  Kazumasa Okamoto, Takahiro Kozawa, Seiichi Tagawa
- Organizer
  SPIE Advanced Lithography
- Place of Presentation
  San Jose, USA
- Year and Date
  2008-02-25
- Data Source
  KAKENHI-PROJECT-19710095
[Presentation] Dynamics of Radical Cation of Poly (4-Hydroxystyrene) and its Copolymer2008
- Author(s)
  Kazumasa Okamoto
- Organizer
  21st International Microprocesses and Nanotechnology Conference
- Place of Presentation
  JAL Resort Sea Hawk Hotel Fukuoka
- Year and Date
  2008-10-29
- Data Source
  KAKENHI-PROJECT-19710095
[Presentation] Acid-base equilibrium in chemically amplified resist, SPIE Advanced Lithography2008
- Author(s)
  K. Natsuda, T. Kozawa, K. Okamoto, and S. Tagawa
- Organizer
  San Jose
- Place of Presentation
  California, USA
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] 化学増幅型レジストベースポリマーのラジカルカチオンのダイナミクス2008
- Author(s)
  岡本一将, 田中将史, 古澤孝弘, 田川精一
- Organizer
  2008年秋季第69回応用物理学会学術講演会
- Place of Presentation
  中部大学
- Year and Date
  2008-09-02
- Data Source
  KAKENHI-PROJECT-19710095
[Presentation] Dynamics of Radical Cations of Resist Model Compounds2008
- Author(s)
  Kazumasa Okamoto, Masafumi Tanaka, Takahiro Kozawa, Seiichi Tagawa
- Organizer
  2nd Asia-Pacific Symposium on Radiation Chemistry
- Place of Presentation
  Waseda University
- Data Source
  KAKENHI-PROJECT-19710095
[Presentation] Dynamics of Radical Cation of Poly(4-Hydroxystyrene)and its Copolymer2008
- Author(s)
  K. Okamoto, M. Tanaka, T. Kozawa, S. Tagawa
- Organizer
  21st International Microprocesses and Nanotechnology Conference
- Place of Presentation
  Fukuoka, Japan
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Study on acid generation of acid generators in chemically amplified resists for electron beam2008
- Author(s)
  K. Natsuda, T. Kozawa, K. Okamoto, and S. Tagawa
- Organizer
  International Workshop on Molecular Information and Dynamics 2008
- Place of Presentation
  Taipei, Taiwan
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] 化学増幅型レジストベースポリマーのラジカルカチオンのダイナミクス2008
- Author(s)
  岡本一将
- Organizer
  第69回応用物理学会学術講演会
- Place of Presentation
  中部大学
- Year and Date
  2008-09-02
- Data Source
  KAKENHI-PROJECT-19710095
[Presentation] ポリ(4-メトキシスチレン)のパルスラジオリシス-ダイマーラジカルカチオン生成の置換基依存性2008
- Author(s)
  田中将史, 岡本一将, 古澤孝弘, 田川精一
- Organizer
  第51回放射線化学討論会
- Place of Presentation
  産総研
- Year and Date
  2008-10-17
- Data Source
  KAKENHI-PROJECT-19710095
[Presentation] Pulse Radiolysis of Polystyrene and Derivatives2007
- Author(s)
  Kazumasa Okamoto, Masafumi Tanaka, Shu Seki, Takahiro Kozawa, Seiichi Tagawa
- Organizer
  13^<th> International Congress of Radiation Research
- Place of Presentation
  San Francisco USA,
- Year and Date
  2007-07-13
- Data Source
  KAKENHI-PROJECT-19710095
[Presentation] Pulse Radiolysis of Polsystyrene and Derivatives2007
- Author(s)
  Kazumasa Okamoto, Masafumi Tanaka, Shu Seki, Seiichi Tagawa
- Organizer
  13th International Congress of Radiation Research
- Place of Presentation
  San Francisco, USA
- Year and Date
  2007-07-13
- Data Source
  KAKENHI-PROJECT-19710095
[Presentation] ポリスチレン誘導体のパルスラジオリシス法を用いたラジカルカチオンのダイナミクスの研究2007
- Author(s)
  田中将史, 岡本一将, 古澤孝弘, 関修平, 田川精一
- Organizer
  第50回放射線化学討論会
- Place of Presentation
  京都大学
- Data Source
  KAKENHI-PROJECT-19710095
[Presentation] Study on Dynamics of adical Ions of Polystyrenes by Pulse Radiolysis2007
- Author(s)
  Kazumasa Okamoto, Masafumi Tanaka, Takahiro Kozawa, Shu Seki, Seiichi Tagawa
- Organizer
  13th International Congress of Radiation Research
- Place of Presentation
  San Francisco, USA
- Year and Date
  2007-07-09
- Data Source
  KAKENHI-PROJECT-19710095
[Presentation] Study on Dynamics of Radical Ions of Polystyrenes by Pulse Radiolysis2007
- Author(s)
  Kazumasa Okamoto, Masafumi Tanaka, Takahiro Kozawa, Shu Seki, Seiichi Tagawa
- Organizer
  13^<th> International Congress of Radiation Research
- Place of Presentation
  San Francisco USA,
- Year and Date
  2007-07-13
- Data Source
  KAKENHI-PROJECT-19710095
[Presentation] ポリ（4-ヒドロキシスチレン）（PHS）濃厚溶液の脱プロトン反応の粘度効果
- Author(s)
  石田拓也、岡本一将、山本洋揮、古澤孝弘、藤吉亮子、梅垣菊男
- Organizer
  日本原子力学会　２０１４年春の年会
- Place of Presentation
  東京都市大学世田谷キャンパス
- Data Source
  KAKENHI-PROJECT-25630424
[Presentation] Analysis of Acid Yield Generated in Chemically Amplified Electron Beam Resist
- Author(s)
  T. Kozawa, T. Shigaki, K. Okamoto, A. Saeki and S. Tagawa
- Organizer
  50th EIPBN
- Place of Presentation
  Baltimore, Maryland, USA
- Year and Date
  2006-05-30 – 2006-06-02
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] High precision measurement of higher diffraction-order contamination in monochromatized soft X-ray by using a compact transmission-grating spectrometer
- Author(s)
  K. Fukui, T. Sakai, T. Hatsui, N. Kosugi, Y. Hamamura, K. Okamoto, Y. Matsui, T. Kozawa, S. Seki, S. Tagawa
- Organizer
  International Conference on Vacuum Ultraviolet Radiation Physics 15th
- Place of Presentation
  Berlin, Germany
- Year and Date
  2007-06-29 – 2007-07-03
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Study on dynamics of radical ions of polystyrenes by pulse radiolysis
- Author(s)
  K. Okamoto, M. Tanaka, S. Seki, T. Kozawa, S. Tagawa
- Organizer
  13th International Congress of Radiation Research
- Place of Presentation
  San Francisco, California, USA
- Year and Date
  2007-06-07 – 2007-06-13
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] 光酸発生剤を添加した芳香族系レジスト樹脂のパルスラジオリシス
- Author(s)
  岡本一将、石田拓也、藤吉亮子、梅垣菊男、山本洋揮、古澤孝弘
- Organizer
  日本原子力学会　２０１５年春の年会
- Place of Presentation
  茨城大学　日立キャンパス
- Year and Date
  2015-03-20 – 2015-03-22
- Data Source
  KAKENHI-PROJECT-24561037
[Presentation] Fluidity dependence of deprotonation kinetics of chemically amplified resist
- Author(s)
  Kazumasa Okamoto , Takuya Ishida , Hiroki Yamamoto , Takahiro Kozawa , Ryoko Fujiyoshi , Kikuo Umegaki
- Organizer
  SPIE Advanced Lithography 2014
- Place of Presentation
  San Jose Marriott and San Jose Convention Center San Jose, California, United States
- Data Source
  KAKENHI-PROJECT-24561037
[Presentation] ポリ（4-ヒドロキシスチレン）（PHS）濃厚溶液の脱プロトン反応の粘度効果
- Author(s)
  石田拓也、岡本一将、山本洋揮、古澤孝弘、藤吉亮子、梅垣菊男
- Organizer
  日本原子力学会　２０１４年春の年会
- Place of Presentation
  東京都市大学世田谷キャンパス(世田谷区)
- Data Source
  KAKENHI-PROJECT-24561037
[Presentation] Pulse Radiolysis Study of EUV Resist Polymers with Photoacid Generator
- Author(s)
  Kazumasa Okamoto, Hiroki Yamamoto, Takahiro Kozawa, Ryoko Fujiyoshi, Kikuo Umegaki
- Organizer
  APSRC2014
- Place of Presentation
  東京大学、東京
- Year and Date
  2014-09-08 – 2014-09-11
- Data Source
  KAKENHI-PROJECT-25630424
[Presentation] Proton Dynamics and Amines in Chemically Amplified Resist
- Author(s)
  K. Natsuda, T. Kozawa, K. Okamoto, S. Tagawa
- Organizer
  Int. Microprocesses and Nanotechnology Conf.
- Place of Presentation
  Kamakura, Japan
- Year and Date
  2006-10-25 – 2006-10-27
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Deprotonation mechanism of ionized poly(4-hydroxystyrene)
- Author(s)
  Toshihiko Susa, Kazumasa Okamoto , Takuya Ishida , Hiroki Yamamoto , Takahiro Kozawa , Ryoko Fujiyoshi , Kikuo Umegaki
- Organizer
  SPIE Advanced Lithography 2014
- Place of Presentation
  San Jose Marriott and San Jose Convention Center San Jose, California, United States
- Data Source
  KAKENHI-PROJECT-24561037
[Presentation] Fluidity dependence of deprotonation kinetics of chemically amplified resist
- Author(s)
  Kazumasa Okamoto , Takuya Ishida , Hiroki Yamamoto , Takahiro Kozawa , Ryoko Fujiyoshi , Kikuo Umegaki
- Organizer
  SPIE Advanced Lithography 2014
- Place of Presentation
  San Jose Marriott and San Jose Convention Center, San Jose, California, U.S.A.
- Data Source
  KAKENHI-PROJECT-25630424
[Presentation] Radiation Chemistry of Fluorinated Polymers for Extreme Ultraviolet Resist
- Author(s)
  Naoya Nomura, Kazumasa Okamoto, Hiroki Yamamoto, Takahiro Kozawa, Ryoko Fujiyoshi, Kikuo Umegaki
- Organizer
  MNC2014
- Place of Presentation
  Hilton Fukuoka Sea Hawk, Fukuoka, Japan
- Year and Date
  2014-11-04 – 2014-11-07
- Data Source
  KAKENHI-PROJECT-24561037
[Presentation] EUVレジストに向けたフッ素ポリマーの放射線化学反応の解明
- Author(s)
  野村直矢、岡本一将、藤吉亮子、梅垣菊男、山本洋揮、古澤孝弘
- Organizer
  日本原子力学会　２０１５年春の年会
- Place of Presentation
  茨城大学　日立キャンパス
- Year and Date
  2015-03-20 – 2015-03-22
- Data Source
  KAKENHI-PROJECT-24561037
[Presentation] Radiation Chemistry of Fluorinated Polymers for Extreme-ultraviolet Resist
- Author(s)
  Naoya Nomura, Kazumasa Okamoto, Hiroki Yamamoto, Takahiro Kozawa, Ryoko Fujiyoshi, Kikuo Umegaki
- Organizer
  APSRC2014
- Place of Presentation
  Univ. Tokyo, Tokyo, Japan
- Year and Date
  2014-09-08 – 2014-09-11
- Data Source
  KAKENHI-PROJECT-24561037
[Presentation] パルスラジオリシスによるポリヒドロキシスチレン固体中での脱プロトン化反応に関する研究
- Author(s)
  山本洋揮、岡本一将、古澤孝弘
- Organizer
  第61 回応用物理学会春季学術講演会
- Place of Presentation
  青山大学相模原キャンパス（相模原市）
- Data Source
  KAKENHI-PROJECT-24561037
[Presentation] Deprotonation of　Poly(4-hydroxystyrene)Intermediates: Pulse Radiolysis Study of EUV and Electron Beam Resist
- Author(s)
  K. Okamoto, R. Matsuda, T. Kozawa, S. Tagawa, R. Fujiyoshi, and T. Sumiyoshi
- Organizer
  ＭＮＣ2012
- Place of Presentation
  Kobe Meriken Park Oriental Hotel, Kobe (Japan)
- Data Source
  KAKENHI-PROJECT-24561037
[Presentation] 高密度イオン化状態におけるＥＵＶリソグラフィプロセスのシミュレーション
- Author(s)
  西野圭一郎、　岡本一将、　古澤孝弘、　藤吉亮子、　梅垣菊男
- Organizer
  日本原子力学会北海道支部第３０回研究発表会
- Place of Presentation
  北海道大学、札幌市
- Data Source
  KAKENHI-PROJECT-25630424
[Presentation] 化学増幅型レジストモデル溶液のパルスラジオリシス及びパルスラジオリシス-レーザーフラッシュフォトリシス
- Author(s)
  井上浩彰, 岡本一将, 藤吉亮子, 住吉孝
- Organizer
  日本化学会第93春季年会(2013)
- Place of Presentation
  立命館大学（草津市）
- Data Source
  KAKENHI-PROJECT-24561037
[Presentation] レジストモデル高分子のパルスラジオリシス
- Author(s)
  岡本一将，古澤孝弘，田川精一, 藤吉亮子, 住吉孝
- Organizer
  日本原子力学会「2012年秋の大会」
- Place of Presentation
  広島大学（東広島市）
- Data Source
  KAKENHI-PROJECT-24561037
[Presentation] Pulse Radiolysis Study of EUV Resist Polymers with Photoacid Generator
- Author(s)
  Kazumasa Okamoto, Hiroki Yamamoto, Takahiro Kozawa, Ryoko Fujiyoshi, Kikuo Umegaki
- Organizer
  APSRC2014
- Place of Presentation
  Univ. Tokyo, Tokyo, Japan
- Year and Date
  2014-09-08 – 2014-09-11
- Data Source
  KAKENHI-PROJECT-24561037
[Presentation] 高密度イオン化状態におけるＥＵＶリソグラフィプロセスのシミュレーション
- Author(s)
  西野圭一郎、岡本一将、古澤孝弘、藤吉亮子、梅垣菊男
- Organizer
  日本原子力学会北海道支部第３０回研究発表会
- Place of Presentation
  北海道大学（札幌市）
- Data Source
  KAKENHI-PROJECT-24561037
[Presentation] Effect of Acid Diffusion and Polymer Structure on Line Edge Roughness
- Author(s)
  H. Yamamoto, T. Kozawa, A. Saeki, K. Okamoto, S. Tagawa, K. Ohmori, M. Sato, H. Komano
- Organizer
  Int. Microprocesses and Nanotechnology Conf.
- Place of Presentation
  Kamakura, Japan
- Year and Date
  2006-10-25 – 2006-10-27
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Radiation Chemistry of Fluorinated Polymers for Extreme Ultraviolet Resist
- Author(s)
  Naoya Nomura, Kazumasa Okamoto, Hiroki Yamamoto, Takahiro Kozawa, Ryoko Fujiyoshi, Kikuo Umegaki,
- Organizer
  MNC2014
- Place of Presentation
  Hilton FukuokaSea Hawk,福岡
- Year and Date
  2014-11-04 – 2014-11-07
- Data Source
  KAKENHI-PROJECT-25630424
[Presentation] Pulse radiolysis of polystyrene and derivatives
- Author(s)
  K. Okamoto, M. Tanaka, T. Kozawa, S. Seki, S. Tagawa
- Organizer
  13th International Congress of Radiation Research
- Place of Presentation
  San Francisco, California, USA
- Year and Date
  2007-07-07 – 2007-07-13
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] CNW-FETプロセスへの低温バッファー層の影響
- Author(s)
  河原敏男、中川幸紀、大野泰秀、前橋謙三、松本和彦、岡本一将、宇都宮里佐、松葉晃明、吉村雅満、松岡佑樹
- Organizer
  第75回応用物理学会秋季学術講演会
- Place of Presentation
  北海道大学札幌キャンパス(北海道札幌市)
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-26390030
[Presentation] Deprotonation mechanism of ionized poly(4-hydroxystyrene)
- Author(s)
  Toshihiko Susa, Kazumasa Okamoto , Takuya Ishida , Hiroki Yamamoto , Takahiro Kozawa , Ryoko Fujiyoshi , Kikuo Umegaki
- Organizer
  SPIE Advanced Lithography 2014
- Place of Presentation
  San Jose Marriott and San Jose Convention Center, San Jose, California, U.S.A.
- Data Source
  KAKENHI-PROJECT-25630424
[Presentation] パルスラジオリシスによるポリヒドロキシスチレン固体中での脱プロトン化反応に関する研究
- Author(s)
  山本洋揮、岡本一将、古澤孝弘
- Organizer
  第61 回応用物理学会春季学術講演会
- Place of Presentation
  青山大学相模原キャンパス
- Data Source
  KAKENHI-PROJECT-25630424
[Presentation] Development and performance of quasi-free standing transmission-grating for soft X-ray emission spectrometer
- Author(s)
  T. Hatsui, K. Okamoto, Y. Matsui, T. Kozawa, S. Seki, S. Tagawa, Y. Hamamura, N. Kosugi
- Organizer
  International Conference on Vacuum Ultraviolet Radiation Physics 15th
- Place of Presentation
  Berlin, Germany
- Year and Date
  2007-06-29 – 2007-07-03
- Data Source
  KAKENHI-PROJECT-17106014
[Presentation] Radiation Chemistry of Fluorinated Polymers for Extreme-ultraviolet Resist
- Author(s)
  Naoya Nomura, Kazumasa Okamoto, Hiroki Yamamoto, Takahiro Kozawa, Ryoko Fujiyoshi, Kikuo Umegaki
- Organizer
  APSRC2014
- Place of Presentation
  東京大学、東京
- Year and Date
  2014-09-08 – 2014-09-11
- Data Source
  KAKENHI-PROJECT-25630424
[Presentation] The reaction mechanism of poly[4-hydroxystyrene-co-4-(1, 1, 1, 3, 3, 3-hexafluoro-2- hydroxypropyl)-styrene]
- Author(s)
  H. Yamamoto, T. Kozawa, K. Okamoto, S. Tagawa, T. Ando, M. Sato, H. Komano
- Organizer
  31st Int. Symp. Microlithography
- Place of Presentation
  San Jose, California, USA
- Year and Date
  2006-02-19 – 2006-02-24
- Data Source
  KAKENHI-PROJECT-17106014

1. KOZAWA Takahiro (20251374)

# of Collaborated Projects: 3 results

# of Collaborated Products: 58 results
2. watanabe seiichi (60241353)

# of Collaborated Projects: 2 results

# of Collaborated Products: 2 results
3. JEEM MELBERT (00815805)

# of Collaborated Projects: 2 results

# of Collaborated Products: 4 results
4. 柴山環樹 (10241564)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. 張麗華 (60719714)

# of Collaborated Projects: 2 results

# of Collaborated Products: 2 results
6. TAGAWA Seiichi (80011203)

# of Collaborated Projects: 1 results

# of Collaborated Products: 36 results
7. SEKI Shuhei (30273709)

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results
8. SAEKI Akinori (10362625)

# of Collaborated Projects: 1 results

# of Collaborated Products: 10 results
9. YAMAMOTO Hiroki (00516958)

# of Collaborated Projects: 1 results

# of Collaborated Products: 13 results
10. Fujiyoshi Ryoko (70229061)

# of Collaborated Projects: 1 results

# of Collaborated Products: 20 results
11. KAWAHARA Toshio (80437350)

# of Collaborated Projects: 1 results

# of Collaborated Products: 10 results
12. MAEHASHI Kenzo (40229323)

# of Collaborated Projects: 1 results

# of Collaborated Products: 10 results
13. 鈴木康夫 (00046278)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
14. 室屋裕佐 (40334320)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
15. 大沼正人 (90354208)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. 中川祐貴 (00787153)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. ヂンタンフン

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
18. 小林一雄

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results

Okamoto Kazumasa 岡本 一将

OKAMOTO Kazumasa 岡本 一将

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Co-Researchers

Multielement Induced Opto-Critical Phases Tuned for All-Solar Utilization

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電離放射線に感応する有機・無機ハイブリッド水溶性レジストの開発と応用Principal Investigator

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放射線プロセスによる位置制御可能なケミカルフリー水中酸化物結晶生成法の確立Principal Investigator

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Fabrication of functional three-dimensional hetero-nanostructures based upon the theory on galvanic submerged photosynthesis of crystalites

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Elucidation of deprotonation induced mechanism in nano-and microfabrication process using ionizing radiations and its applicationsPrincipal Investigator

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Development of single nano materials based on quantum beam and data science

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Influence of charge delocalization in nanofabrication induced by ionizing radiationsPrincipal Investigator

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Development of self-aligned nano-carbon biosensors using glycan for the highly pathogenic avian influenza virus

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Dynamics of radical ions of fluorinated polymer for Extreme Ultraviolet (EUV) lithography

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Elucidation of local ionization in ultra-thin polymer films and its applicationPrincipal Investigator

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Elucidation of Ionization Dynamics of Polymers for Nanofabrication by Using Quantum BeamPrincipal Investigator

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Elucidation of Molecular Dynamicsand Reaction Mechanism of ResistMaterials for the Control of Nanosize-roughnessPrincipal Investigator

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Femtosecond Pulse Radiolysis Study on Nanoscale Time Space Reaction Process

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Okamoto Kazumasa 岡本一将

OKAMOTO Kazumasa 岡本一将