TAKAHIKO Yanagitani 柳谷隆彦

… Alternative Names

柳谷隆彦ヤナギタニタカヒコ

YANAGITANI Takahiko 柳谷隆彦

Less

Researcher Number	10450652
Other IDs
Affiliation (Current)	2025: 早稲田大学, 理工学術院, 教授
Affiliation (based on the past Project Information) *help	2025: 早稲田大学, 理工学術院, 教授 2021 – 2023: 早稲田大学, 理工学術院, 教授 2015 – 2021: 早稲田大学, 理工学術院, 准教授 2014: 早稲田大学先進理工学部, 電気・情報生命工学科, 准教授 2012 – 2014: 名古屋工業大学, 工学(系)研究科(研究院), 助教 2010: 名古屋工業大学, 大学院・工学研究科, 助教 2009 – 2010: Nagoya Institute of Technology, 工学研究科, 助教
Review Section/Research Field	Principal Investigator Basic Section 21060:Electron device and electronic equipment-related / Electron device/Electronic equipment / Medium-sized Section 21:Electrical and electronic engineering and related fields / Medium-sized Section 30:Applied physics and engineering and related fields / Materials/Mechanics of materials / Applied physics, general Except Principal Investigator Measurement engineering / General applied physics
Keywords	Principal Investigator 圧電薄膜 / 圧電デバイス / 圧電薄膜センサ / BAWフィルタ / 抗原抗体反応 / ScAlN / エピタキシャル成長 / 音響ブラッグ反射器 / 圧電薄膜共振子 / SMR … More / 分極反転構造 / 横波デバイス / 圧電薄膜共振子センサ / たんぱく質センサ / すべりモード / 横波トランスデューサ / 複素反射率測定 / AlN / FBAR / 圧電薄膜デバイス / 液体中センサ / 液中センサ / 横波共振子 / センサ / 高周波超音波プローブ / 極性反転構造 / 超音波プローブ / イオンビーム支援成膜 / 配向制御 / 圧電性評価 / 横波応用センサ / 窒化アルミニウム薄膜 / 巨大横波圧電性 / 高感度ＭＥＭＳ / 横波圧電薄膜 / 横波励振 / 面内配向膜 / ZnO薄膜 / 液体センサ / 弾性表面波 / スパッタリング … More Except Principal Investigator 圧電 / AlN圧電薄膜 / 分極反転層 / 層厚測定 / 極性反転圧電薄膜 / 極性反転構造 / 走査型非線形誘電率顕微法 / 圧電薄膜 / 分極反転 / 音速 / 非接触 / 半導体 / 光散乱 / 計測システム / FDTD / トランスデューサ / 骨 / 皮質骨 / 超音波 Less

高次モードScAlNエピブラッグ反射器を用いたマイクロセンサPrincipal Investigator
- Principal Investigator
  
  柳谷隆彦
- Project Period (FY)
  2025 – 2029
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 21060:Electron device and electronic equipment-related
- Research Institution
  Waseda University
Polarization inverted ScAlN multilayers for high power SMRPrincipal Investigator
- Principal Investigator
  
  Yanagitani Takahiko
- Project Period (FY)
  2021 – 2023
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Review Section
  
  Medium-sized Section 21:Electrical and electronic engineering and related fields
- Research Institution
  Waseda University
Detection of protein binding by shear mode ultrasonic reflection coefficients using c-axis tilted ScAlN film in UHF rangePrincipal Investigator
- Principal Investigator
  
  Yanagitani Takahiko
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 21060:Electron device and electronic equipment-related
- Research Institution
  Waseda University
Electromagnetical coupling of AlCeN films grown by RF magnetron sputteringPrincipal Investigator
- Principal Investigator
  
  Yanagitani Takahiko
- Project Period (FY)
  2018 – 2020
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Review Section
  
  Medium-sized Section 30:Applied physics and engineering and related fields
- Research Institution
  Waseda University
Shear mode resonators for detection of biomolecular interactions in liquidPrincipal Investigator
- Principal Investigator
  
  Yanagitani Takahiko
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Waseda University
Measurement method for polarity-inverted layered piezoelectric thin films using scanning nonlinear dielectric microscopy
- Principal Investigator
  
  ODAGAWA HIROYUKI
- Project Period (FY)
  2015 – 2017
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  General applied physics
- Research Institution
  National Institute of Technology, Kumamoto College
Ultrasonic probe using polarity inverted piezoelectric layerPrincipal Investigator
- Principal Investigator
  
  Yanagitani Takahiko
- Project Period (FY)
  2015 – 2016
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Waseda University
Study on the piezoelectricity in bone in the MHz range
- Principal Investigator
  
  MATSUKAWA Mami
- Project Period (FY)
  2012 – 2014
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Measurement engineering
- Research Institution
  Doshisha University
Development of non contact piezoelectricity measurement system By Brillouin light scattering
- Principal Investigator
  
  MATSUKAWA Mami
- Project Period (FY)
  2012 – 2013
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Measurement engineering
- Research Institution
  Doshisha University
Piezoelectric thin film MEMS with giant shear electromechanical couplingPrincipal Investigator
- Principal Investigator
  
  YANAGITANI Takahiko
- Project Period (FY)
  2012 – 2014
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Materials/Mechanics of materials
- Research Institution
  Nagoya Institute of Technology
Development of surface acoustic wave piezoelectric films sensors for liquid property measurementPrincipal Investigator
- Principal Investigator
  
  YANAGITANI Takahiko
- Project Period (FY)
  2009 – 2010
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Applied physics, general
- Research Institution
  Nagoya Institute of Technology

[Journal Article] Epitaxial ZnO piezoelectric layer on SiO2/Mo solidly mounted resonator fabricated using epitaxial Au sacrificial layer2024
- Author(s)
  S. Tokai,T. Yanagitani
- Journal Title
  
  Appl. Phys. Express
  
  Volume: 17 Issue: 2 Pages: 25501-25501
- DOI
  10.35848/1882-0786/ad2222
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-21K18734
[Journal Article] Full-epitaxial ScAlN and MgZnO solidly mounted resonators based on epitaxial acoustic Bragg reflector2024
- Author(s)
  S. Tokai,T. Yanagitani
- Journal Title
  
  Appl. Phys. Lett.
  
  Volume: 124, Issue: 8 Pages: 82901-82901
- DOI
  10.1063/5.0196492
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-21K18734
[Journal Article] Enhanced electromechanical coupling from cation local structures in (Mg,Zn)O2024
- Author(s)
  J. Jia,D. Kishi,N. Bai,T. Okajima,F. Lesari,T. Yanagitani
- Journal Title
  
  Phys. Rev. B
  
  Volume: 109 Issue: 13 Pages: 134101-134101
- DOI
  10.1103/physrevb.109.134101
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-21K18734
[Journal Article] Simple microfabrication process for quartz crystal using HF gas and catalytic materials2023
- Author(s)
  Ko-Hei Sano,Yoshitaka Ono,Yutaka Imamura,Yasuo Hayashi,Takahiko Yanagitani]
- Journal Title
  
  Proc 2023 IEEE Ultrason. Symp.
  
  Volume: 1 Pages: 1-1
- DOI
  10.1109/ius51837.2023.10308115
- Data Source
  KAKENHI-PROJECT-21K18734
[Journal Article] GHz fingerprint acoustic imaging by mechanically scanning a soft conductive probe on epitaxial PbTiO3 films2023
- Author(s)
  Y. Koike,Y. Sato,T. Yanagitani
- Journal Title
  
  IEEE Sens. Lett
  
  Volume: 7 Issue: 10 Pages: 2504004-2504004
- DOI
  10.1109/lsens.2023.3308517
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21K18734
[Journal Article] Bragg reflector type shear mode BAW transformer based on c-axis zig-zag ScAlN multilayer for rectifying antenna2023
- Author(s)
  K. Shiraiwa,T. Yanagitani
- Journal Title
  
  IEEE Sens. Lett.
  
  Volume: 7 Issue: 11 Pages: 2504404-2504404
- DOI
  10.1109/lsens.2023.3316883
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21K18734
[Journal Article] Improvement of Shear-Mode Electromechanical Coupling of c-Axis Parallel Oriented ZnO Film by Limiting Particle Irradiation Direction During RF Magnetron Sputtering2023
- Author(s)
  Naoki Tomiyama,Taiki Sato,Shinji Takayanagi,Takahiko Yanagitani
- Journal Title
  
  Proc. 2023 IEEE Ultrason. Symp.
  
  Volume: 1 Pages: 1-1
- DOI
  10.1109/ius51837.2023.10307602
- Data Source
  KAKENHI-PROJECT-21K18734
[Journal Article] Enhanced Electromechanical Coupling in Yb-Substituted III?V Nitride Alloys2022
- Author(s)
  Jia Junjun、Iwata Naoya、Suzuki Masashi、Yanagitani Takahiko
- Journal Title
  
  ACS Applied Electronic Materials
  
  Volume: 4 Issue: 7 Pages: 3448-3456
- DOI
  10.1021/acsaelm.2c00371
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21K18734, KAKENHI-PROJECT-19H02202
[Journal Article] c軸ジグザク分極反転ScAlN薄膜を用いたBAW送受波型トランスバーサルフィルタ2022
- Author(s)
  泉航太、柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: vol. 121, no. 348, US2021-59, Pages: 5-10
- Data Source
  KAKENHI-PROJECT-21K18734
[Journal Article] Giga-hertz ultrasonic reflectometry for fingerprint imaging using epitaxial PbTiO3 transducers2022
- Author(s)
  K. Nakamura, Y. Koike, Y. Sato, and T. Yanagitani
- Journal Title
  
  Appl. Phys. Lett.,
  
  Volume: vol.121, no. 17 Issue: 17 Pages: 172903-172903
- DOI
  10.1063/5.0106931
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21K18734, KAKENHI-PROJECT-19H02202
[Journal Article] Oblique incidence ultrasonic reflectometry device based on c-axis tilted ScAlN films for evaluating viscoelastic properties of liquids above 100 MHz2022
- Author(s)
  S. Kinoshita and T. Yanagitani
- Journal Title
  
  Appl. Phys. Lett.,
  
  Volume: vol.121, no. 15 Issue: 15 Pages: 152901-152901
- DOI
  10.1063/5.0112070
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21K18734, KAKENHI-PROJECT-19H02202
[Journal Article] A method for extracting sole mechanical properties of Bragg reflector by GHz ultrasonic pulse-echo technique2022
- Author(s)
  T. Yanagitani, N. Ishii, K. Kondo, M. Suzuki
- Journal Title
  
  Appl. Phys. Lett.,
  
  Volume: vol.121, no. 18 Issue: 18 Pages: 182901-182901
- DOI
  10.1063/5.0109429
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21K18734, KAKENHI-PROJECT-19H02202
[Journal Article] Polarization control of ScAlN, ZnO, and PbTiO3 piezoelectric films: Application to polarization inverted multilayer BAW and SAW devices2021
- Author(s)
  T. Yanagitani and S. Takayanagi
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: vol. 60 Issue: SD Pages: SD0803-SD0803
- DOI
  10.35848/1347-4065/abfd95
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-21K18734
[Journal Article] Comparison of the kt2 Extraction Methods of Piezoelectric Films in Film/Substrate Structure and SelfStanding Film Structure2021
- Author(s)
  Y. Shimizu, K. Kondo, and T. Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: - Pages: 1-4
- DOI
  10.1109/ius52206.2021.9593646
- Data Source
  KAKENHI-PROJECT-21K18734
[Journal Article] GHz BAW Piezoelectric Transformers for Passive Voltage Amplification Using the Epitaxial ZnO Thin Films2021
- Author(s)
  H. Kishi, S. Kobayashi, and T. Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: - Pages: 1-4
- DOI
  10.1109/ius52206.2021.9593412
- Data Source
  KAKENHI-PROJECT-21K18734
[Journal Article] 超音波映像装置用の耐電力性プローブ向けの新しいエピタキシャル圧電薄膜材料2021
- Author(s)
  柳谷隆彦
- Journal Title
  
  非破壊検査
  
  Volume: vol. 70 no. 9
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21K18734
[Journal Article] Detection of Protein Binding by Shear Mode Ultrasonic Reflection Coefficients Using c-Axis Tilted ScAlN Film Above 100MHz2021
- Author(s)
  Y. Miho, and T. Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: - Pages: 1-4
- DOI
  10.1109/ius52206.2021.9593876
- Data Source
  KAKENHI-PROJECT-21K18734
[Journal Article] c-Axis-Tilted ScAlN Film on Silicon Substrate for Surface Acoustic Wave Device2021
- Author(s)
  T. Tominaga, S. Takayanagi, and T. Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: - Pages: 1-4
- DOI
  10.1109/ius52206.2021.9593770
- Data Source
  KAKENHI-PROJECT-21K18734
[Journal Article] Theoretical and experimental study of shear mode bulk acoustic wave transformer based on c-axis zigzag ScAlN multilayer for rectenna application2021
- Author(s)
  S. Kinoshita and T. Yanagitani
- Journal Title
  
  Appl. Phys. Lett.
  
  Volume: vol. 118 Issue: 14 Pages: 142903-142903
- DOI
  10.1063/5.0041623
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-21K18734
[Journal Article] Negative-ion bombardment increases during low-pressure sputtering deposition and their effects on the crystallinities and piezoelectric properties of scandium aluminum nitride films2021
- Author(s)
  T. Tominaga, S. Takayanagi and T. Yanagitani
- Journal Title
  
  J. Phys. D: Appl. Phys.
  
  Volume: vol. 55 Issue: 10 Pages: 105306-105306
- DOI
  10.1088/1361-6463/ac3d5c
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21K18734
[Journal Article] ScAlNとPbTiO3エピタキシャル薄膜を用いた高効率超音波トランスデューサの現状2021
- Author(s)
  岩田直也、柳谷隆彦
- Journal Title
  
  超音波テクノ(日本工業出版)
  
  Volume: vol. 33 Pages: 90-94
- Data Source
  KAKENHI-PROJECT-21K18734
[Journal Article] A Method for Evaluating Acoustic Bragg Reflector by Ultrasonic Microscope2021
- Author(s)
  N. Ishii, K. Kondo, and T. Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: - Pages: 1-4
- DOI
  10.1109/ius52206.2021.9593536
- Data Source
  KAKENHI-PROJECT-21K18734
[Journal Article] Ion-beam-induced in-plane a-axis oriented (0001) AlN and ScAlN thin film BAW resonators2021
- Author(s)
  C. Masamune, and T. Yanagitani
- Journal Title
  
  AIP Advances
  
  Volume: vol. 11 no.12 Issue: 12 Pages: 125215-125215
- DOI
  10.1063/5.0002307
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-21K18734
[Journal Article] PbTiO3エピ圧電薄膜を用いた基板裏面におけるGHz超音波の指紋イメージング2021
- Author(s)
  佐藤裕友、柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: vol. 121, no. 272, US2021-42
- Data Source
  KAKENHI-PROJECT-21K18734
[Journal Article] Experimental and Theoretical Investigation of kt2 and Velocity in YbGaN Films by DFT2021
- Author(s)
  Y. Koike, J. Jia, M. Suzuki, and T. Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: - Pages: 1-3
- DOI
  10.1109/ius52206.2021.9593474
- Data Source
  KAKENHI-PROJECT-21K18734
[Journal Article] スパッタ法により作製した0.3mmの10MHz帯ScAlN薄板トランスデューサ2021
- Author(s)
  岩田直也、柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: vol. 121, no. 272, US2021-432 Pages: 19-24
- Data Source
  KAKENHI-PROJECT-21K18734
[Journal Article] レクテナ昇圧素子に向けた傾斜反転ScAlN圧電薄膜トランス2020
- Author(s)
  木下紗里那、柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: vol. 120, no. 174 Pages: 45-50
- Data Source
  KAKENHI-PROJECT-19H02202
[Journal Article] AlNとScAlNにおける非線形性に起因するDCバイアス時の周波数シフトおよび格子ひずみの比較2020
- Author(s)
  五月女巧、柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: vol. 120, no. 222 Pages: 34-39
- Data Source
  KAKENHI-PROJECT-19H02202
[Journal Article] Experimental and Theoretical Investigation of kt? and Mechanical Quality Factor (Qm) in YbAlN Films Asing DFT2020
- Author(s)
  Naoya Iwata, Sarina Kinoshita, Junjun Jia, Takahiko Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: 1 Pages: 1-2
- DOI
  10.1109/ius46767.2020.9251775
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202, KAKENHI-PROJECT-18K19037
[Journal Article] c-Axis Oriented ScAlN/ SiO2 Multilayer BAW Transformer for Rectifying Antenna Applications2020
- Author(s)
  Kota Izumi, Takahiko Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: 1 Pages: 1-4
- DOI
  10.1109/ius46767.2020.9251603
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202, KAKENHI-PROJECT-18K19037
[Journal Article] ScAlスパッタターゲットから生じる負イオンがScAlN圧電薄膜の結晶配向性や電気機械結合係数に及ぼす影響2020
- Author(s)
  木原流唯、高柳真司、柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: vol. 120, no. 174 Pages: 51-56
- Data Source
  KAKENHI-PROJECT-19H02202
[Journal Article] AlNとScAlNにおける非線形性に起因するDCバイアス時の周波数シフトおよび格子ひずみの比較2020
- Author(s)
  五月女巧、柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: vol. 120, no. 222 Pages: 34-39
- Data Source
  KAKENHI-PROJECT-18K19037
[Journal Article] Self-Standing FBAR Transformer Based on Shear Mode Zig-Zag ScAlN Multilayer for Rectenna Application2020
- Author(s)
  Sarina Kinoshita, Takahiko Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: 1 Pages: 1-4
- DOI
  10.1109/ius46767.2020.9251481
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202, KAKENHI-PROJECT-18K19037
[Journal Article] GHz BAW Piezoelectric Transformers with High Voltage Gain Using the Combination of High and Low Dielectric Constant Thin Films2020
- Author(s)
  Sarina Kinoshita, Takahiko Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: 1 Pages: 1-4
- DOI
  10.1109/ius46767.2020.9251634
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202, KAKENHI-PROJECT-18K19037
[Journal Article] 低圧スパッタ成膜で増大する負イオン照射がScAlN薄膜の結晶性と圧電性に及ぼす影響2020
- Author(s)
  冨永卓海、髙柳真司、柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: vol. 120, no. 222 Pages: 1-6
- Data Source
  KAKENHI-PROJECT-18K19037
[Journal Article] Enhancement of GHz Electromechanical Coupling Coefficient kt? of MgZnO and CaZnO Thin Film BAW Resonators2020
- Author(s)
  Kota Izumi, Takahiko Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: 1 Pages: 1-3
- DOI
  10.1109/ius46767.2020.9251624
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202, KAKENHI-PROJECT-18K19037
[Journal Article] Extracting Mechanical Q Factor of the Pure AlN, ZnO, and ScAlN Film Without Etching Substrate2020
- Author(s)
  Naoya Iwata, Sarina Kinoshita, Takahiko Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: 1 Pages: 1-2
- DOI
  10.1109/ius46767.2020.9251667
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202, KAKENHI-PROJECT-18K19037
[Journal Article] Extraction of kt? of Piezoelectric Film/Substrate Structure by Conversion Loss Derived by Electromagnetic Signal Including No Acoustic Losses2020
- Author(s)
  Ryota Tatsumi, Takahiko Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: 1 Pages: 1-3
- DOI
  10.1109/ius46767.2020.9251575
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202, KAKENHI-PROJECT-18K19037
[Journal Article] Zig-Zag ScAlN Multilayer SMR for High Power BAW Filter Application Such as RF Base Station2020
- Author(s)
  Yusuke Sato, Takahiko Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: 1 Pages: 1-3
- DOI
  10.1109/ius46767.2020.9251656
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202, KAKENHI-PROJECT-18K19037
[Journal Article] ScAlスパッタターゲットから生じる負イオンがScAlN圧電薄膜の結晶配向性や電気機械結合係数に及ぼす影響2020
- Author(s)
  木原流唯、高柳真司、柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: vol. 120, no. 174 Pages: 51-56
- Data Source
  KAKENHI-PROJECT-18K19037
[Journal Article] Measurement of Antiresonant Frequency During DC Bias Voltage Application for Analysis of Second Harmonic Response of ScAlN on SMR2020
- Author(s)
  Takumi Soutome, Takahiko Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: 1 Pages: 1-4
- DOI
  10.1109/ius46767.2020.9251804
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202, KAKENHI-PROJECT-18K19037
[Journal Article] レクテナ昇圧素子に向けた傾斜反転ScAlN圧電薄膜トランス2020
- Author(s)
  木下紗里那、柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: vol. 120, no. 174 Pages: 45-50
- Data Source
  KAKENHI-PROJECT-18K19037
[Journal Article] ScAlN Nano-Rods Structure Thin Film Grown by a Self-Shadowing Oblique Sputtering for High Electromechanical Coupling Transducer Applications2020
- Author(s)
  Takumi Soutome, Takahiko Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: 1 Pages: 1-4
- DOI
  10.1109/ius46767.2020.9251311
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202, KAKENHI-PROJECT-18K19037
[Journal Article] 基板付き薄膜共振子の基板内損失を含まない新規kt2評価法と従来法の比較2020
- Author(s)
  龍見亮汰、柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: vol. 120, no. 174 Pages: 57-60
- Data Source
  KAKENHI-PROJECT-18K19037
[Journal Article] Accurate Extraction of kt2 of Piezoelectric Film/Substrate Structure by Conversion Loss Method Subtracting Experimental Acoustic Losses in the Substrate2020
- Author(s)
  Ryota Tatsumi, Takahiko Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: 1 Pages: 1-3
- DOI
  10.1109/ius46767.2020.9251360
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202, KAKENHI-PROJECT-18K19037
[Journal Article] 基板付き薄膜共振子の基板内損失を含まない新規kt2評価法と従来法の比較2020
- Author(s)
  龍見亮汰、柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: vol. 120, no. 174 Pages: 57-60
- Data Source
  KAKENHI-PROJECT-19H02202
[Journal Article] Giga-Hertz Piezoelectric Epitaxial PZT/La-SrTiO3 Transducer for the Application of Fingerprint Imaging2020
- Author(s)
  Yusuke Sato, Takahiko Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: 1 Pages: 1-3
- DOI
  10.1109/ius46767.2020.9251666
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202, KAKENHI-PROJECT-18K19037
[Journal Article] 低圧スパッタ成膜で増大する負イオン照射がScAlN薄膜の結晶性と圧電性に及ぼす影響2020
- Author(s)
  冨永卓海、髙柳真司、柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: vol. 120, no. 222 Pages: 1-6
- Data Source
  KAKENHI-PROJECT-19H02202
[Journal Article] Deterioration in the Piezoelectric Property of ScAlN Thin Films by Negative Ion Bombardment Increased in Low-Pressure Sputtering Deposition2020
- Author(s)
  Takumi Tominaga, Shinji Takayanagi, Takahiko Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: 1 Pages: 1-4
- DOI
  10.1109/ius46767.2020.9251438
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202, KAKENHI-PROJECT-18K19037
[Journal Article] 擬似すべりモードc軸傾斜配向ScAlN圧電薄膜を用いた複素反射率法による液体試料の粘弾性評価2019
- Author(s)
  天野凌輔，山川愉生，柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: vol. 119 Pages: 19-23
- Data Source
  KAKENHI-PROJECT-18K19037
[Journal Article] Ion beam induced A-Axis in-plane oriented C-Axis oriented AlN thin film growth for high-Q BAW resonator application2019
- Author(s)
  C. Masamune and T. Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: 1 Pages: 1127-1128
- DOI
  10.1109/ultsym.2019.8926047
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037, KAKENHI-PROJECT-19H02202, KAKENHI-PROJECT-16H04356
[Journal Article] A method to estimate Kt2 of piezoelectric films from the change of lattice strain by XRD without removing substrate2019
- Author(s)
  T. Soutome and T. Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: 1 Pages: 301-304
- DOI
  10.1109/ultsym.2019.8925766
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037, KAKENHI-PROJECT-19H02202, KAKENHI-PROJECT-16H04356
[Journal Article] ScAlN圧電薄膜の高品質化に向けたScAl合金スパッタターゲットから発生する負イオンの抑制～電子ビーム溶融、アーク溶融、焼結ScAl合金ターゲットの比較～2019
- Author(s)
  柳谷隆彦
- Journal Title
  
  真空ジャーナル
  
  Volume: 2019年９月号 Pages: 11-15
- Data Source
  KAKENHI-PROJECT-18K19037
[Journal Article] ZnO薄膜を用いた厚みすべりモード共振子の作製と液体負荷時の周波数特性2019
- Author(s)
  宮田昌哉，高柳真司，松川真美，柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: vol. 119 Pages: 33-37
- Data Source
  KAKENHI-PROJECT-16H04356
[Journal Article] A method for extracting mechanical Q factor of the piezoelectric film without etching substrate2019
- Author(s)
  S. Kinoshita and T. Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: 1 Pages: 229-300
- DOI
  10.1109/ultsym.2019.8926088
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037, KAKENHI-PROJECT-19H02202, KAKENHI-PROJECT-16H04356
[Journal Article] 擬似すべりモードc軸傾斜配向ScAlN圧電薄膜を用いた複素反射率法による液体試料の粘弾性評価2019
- Author(s)
  天野凌輔，山川愉生，柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: vol. 119 Pages: 19-23
- Data Source
  KAKENHI-PROJECT-19H02202
[Journal Article] Shear mode polarity inverted ScAlN multilayer for application to BAW transformer in rectifying antenna2019
- Author(s)
  S. Kinoshita and T. Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: 1 Pages: 1118-1119
- DOI
  10.1109/ultsym.2019.8925674
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037, KAKENHI-PROJECT-19H02202, KAKENHI-PROJECT-16H04356
[Journal Article] Improvement of C-Axis parallel orientation of ZnO film on silica glass pipes with various diameters for SH-SAW pipe sensor2019
- Author(s)
  T. Wakabayashi, S. Takayanagi, Y. Takamura, M. Matsukawa, and T. Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: 1 Pages: 671-674
- DOI
  10.1109/ultsym.2019.8925796
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037, KAKENHI-PROJECT-19H02202, KAKENHI-PROJECT-18K13766, KAKENHI-PROJECT-16H04356
[Journal Article] ScAlN圧電薄膜の高品質化に向けたScAl合金スパッタターゲットから発生する負イオンの抑制～電子ビーム溶融、アーク溶融、焼結ScAl合金ターゲットの比較～2019
- Author(s)
  柳谷隆彦
- Journal Title
  
  真空ジャーナル
  
  Volume: 2019年９月号 Pages: 11-15
- Data Source
  KAKENHI-PROJECT-16H04356
[Journal Article] Frequency-switchable polarity-inverted BAW resonators based on PZT/PTO epitaxial films using difference in coercive field2019
- Author(s)
  T. Shimidzu, T. Mori, and T. Yanagitani
- Journal Title
  
  Appl. Phys. Lett.,
  
  Volume: vol. 114 Issue: 21 Pages: 212902-212902
- DOI
  10.1063/1.5089554
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037, KAKENHI-PROJECT-19H02202, KAKENHI-PROJECT-16H04356
[Journal Article] ScAlN圧電薄膜の高品質化に向けたScAl合金スパッタターゲットから発生する負イオンの抑制～電子ビーム溶融、アーク溶融、焼結ScAl合金ターゲットの比較～2019
- Author(s)
  柳谷隆彦
- Journal Title
  
  真空ジャーナル
  
  Volume: 2019年９月号 Pages: 11-15
- Data Source
  KAKENHI-PROJECT-19H02202
[Journal Article] Effect of negative ions generation from sputtering target on crystalline orientation and Kt2 of ScAlN thin films2019
- Author(s)
  R. Kihara and T. Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: 1 Pages: 1120-1123
- DOI
  10.1109/ultsym.2019.8925983
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037, KAKENHI-PROJECT-19H02202, KAKENHI-PROJECT-16H04356
[Journal Article] ZnO薄膜を用いた厚みすべりモード共振子の作製と液体負荷時の周波数特性2019
- Author(s)
  宮田昌哉，高柳真司，松川真美，柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: vol. 119 Pages: 33-37
- Data Source
  KAKENHI-PROJECT-19H02202
[Journal Article] ZnO薄膜を用いた厚みすべりモード共振子の作製と液体負荷時の周波数特性2019
- Author(s)
  宮田昌哉，高柳真司，松川真美，柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: vol. 119 Pages: 33-37
- Data Source
  KAKENHI-PROJECT-18K19037
[Journal Article] 擬似すべりモードc軸傾斜配向ScAlN圧電薄膜を用いた複素反射率法による液体試料の粘弾性評価2019
- Author(s)
  天野凌輔，山川愉生，柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: vol. 119 Pages: 19-23
- Data Source
  KAKENHI-PROJECT-16H04356
[Journal Article] Frequency-switchable polarity-inverted BAW resonators based on electric-field-induced piezoelectric PMN-PT/PZT epitaxial film stacks2019
- Author(s)
  T. Shimidzu and T. Yanagitani
- Journal Title
  
  J. Appl. Phys.
  
  Volume: vol. 126 Issue: 11 Pages: 114104-114104
- DOI
  10.1063/1.5092753
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037, KAKENHI-PROJECT-19H02202, KAKENHI-PROJECT-16H04356
[Journal Article] “Rapid wave velocity measurement by Brillouin scattering using coherent phonons induced by ScAlN piezoelectric thin-film transducer,”2018
- Author(s)
  M. Kawabe, S. Takayanagi, H, Ichihashi, M. Suzuki, T. Yanagitani and M. Matsukawa
- Journal Title
  
  IEEE Trans. Ultrason.,Ferroelectr.,Freq.Contr.
  
  Volume: 65 Issue: 10 Pages: 1882-1887
- DOI
  10.1109/tuffc.2018.2854710
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Journal Article] “ScAlN thick film ultrasonic transducer in 40 MHz ?80 MHz,”2018
- Author(s)
  K-H. Sano, R. Karasawa, and T. Yanagitani
- Journal Title
  
  IEEE Trans. Ultrason.,Ferroelectr.,Freq.Contr.
  
  Volume: 65 Issue: 11 Pages: 2097-2102
- DOI
  10.1109/tuffc.2018.2865791
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Journal Article] Effects of negative oxygen ions generated during Sc ingot sputtering on electromechanical coupling of ScAlN film2017
- Author(s)
  Sliinji Takayanagi; Takahiko Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp
  
  Volume: 1 Pages: 1-4
- DOI
  10.1109/ultsym.2017.8092666
- Data Source
  KAKENHI-PROJECT-16H04356
[Journal Article] High electromechanical coefficient kt 2=19% thick ScAlN piezoelectric films for ultrasonic transducer in low frequency of 80 MHz2017
- Author(s)
  K-h. Sano, R. Karasawa, and T. Yanagitani,
- Journal Title
  
  Proc. IEEE Ultrason. Symp
  
  Volume: 1 Pages: 1-4
- DOI
  10.1109/ultsym.2017.8092005
- Data Source
  KAKENHI-PROJECT-16H04356
[Journal Article] Al極性ScAlNとO極性ZnO薄膜を用いた多層構造の高効率超音波トランスデューサ2017
- Author(s)
  森剛志、柳谷隆彦
- Journal Title
  
  超音波テクノ(日本工業出版) ,,
  
  Volume: vol. 29 Pages: 84-87
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15K13974
[Journal Article] Film growth of c-axis tilted ScAlN on the sapphire substrate for SAW devices,2017
- Author(s)
  S. Tokuda, S. Takayanagi, M. Matsukawa, T. Yanagitani,
- Journal Title
  
  Proc. IEEE Ultrason. Symp
  
  Volume: 1 Pages: 1-4
- DOI
  10.1109/ultsym.2017.8092072
- Data Source
  KAKENHI-PROJECT-16H04356
[Journal Article] Thick ScAlN film for high efficient ultrasonic transducer in low frequency of 81 MHz2017
- Author(s)
  Ko-Hei Sano; Rei Karasawa; Takahiko Yanagitani
- Journal Title
  
  2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
  
  Volume: 1 Pages: 862-865
- DOI
  10.1109/transducers.2017.7994185
- Data Source
  KAKENHI-PROJECT-16H04356
[Journal Article] Al極性ScAlNとO極性ZnO薄膜を用いた多層構造の高効率超音波トランスデューサ2017
- Author(s)
  森剛志、柳谷隆彦
- Journal Title
  
  超音波テクノ(日本工業出版)
  
  Volume: vol. 29 Pages: 84-87
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H04356
[Journal Article] コヒーレントフォノン励起を用いたBrillouin散乱法による縦波・横波音速測定の高速化2017
- Author(s)
  川部昌彦、柳谷隆彦、柴垣慶明、高柳真司、鈴木雅視、松川真美
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: 117 Pages: 71-74
- Data Source
  KAKENHI-PROJECT-16H04356
[Journal Article] Quantitative thickness measurement of polarity-inverted piezoelectric thin-film layer by scanning nonlinear dielectric microscopy2017
- Author(s)
  Hiroyuki Odagawa, Koshiro Terada, Yohei Tanaka, Hiroaki Nishikawa, Takahiko Yanagitani and Yasuo Cho
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 56 Issue: 10S Pages: 10PF18-10PF18
- DOI
  10.7567/jjap.56.10pf18
- NAID
  210000148395
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15K04725, KAKENHI-PROJECT-16H06360
[Journal Article] Effect of anisotropy on stress-induced electrical potentials in bovine bone using ultrasound irradiation2017
- Author(s)
  S. Matsukawa, T. Makino, S. Mori, D. Koyama, S. Takayanagi, K. Mizuno, T. Yanagitani, and M. Matsukawa,
- Journal Title
  
  Appl. Phys. Lett.
  
  Volume: 110 Issue: 14 Pages: 143701-143701
- DOI
  10.1063/1.4979599
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H04356, KAKENHI-PROJECT-15K13974
[Journal Article] ScAlN薄膜/低TCF基板構造のすべりモード共振子を用いたMHz帯-GHz帯同時粘性評価2017
- Author(s)
  山川愉生、佐野耕平、唐澤嶺、柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: 117 Pages: 61-66
- Data Source
  KAKENHI-PROJECT-16H04356
[Journal Article] C-axis zig-zag polarization inverted ScAlN multilayer for FBAR transformer rectifying antenna2017
- Author(s)
  R. Karasawa, and T. Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp
  
  Volume: 1 Pages: 1-4
- DOI
  10.1109/ultsym.2017.8091618
- Data Source
  KAKENHI-PROJECT-16H04356
[Journal Article] “A new type wide-frequency-range shear viscosity sensor using caxis tilted ScAlN thin film on temperature Stable AT-cut quartz thick plate2017
- Author(s)
  Y. Yamakawa, K-h. Sano, R. Karasawa, and T. Yanagitani,
- Journal Title
  
  Proc. IEEE Ultrason. Symp
  
  Volume: 1 Pages: 1-4
- DOI
  10.1109/ultsym.2017.8092520
- Data Source
  KAKENHI-PROJECT-16H04356
[Journal Article] Broadband frequency viscositymeasurement using low TCF shear mode resonators consisting of C-axis tilted scaln thin film on thick at-cut quartz plate2017
- Author(s)
  Y. Yamakawa; K. Sano; R. Karasawa; T. Yanagitani
- Journal Title
  
  2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
  
  Volume: 1 Pages: 2135-2138
- DOI
  10.1109/transducers.2017.7994497
- Data Source
  KAKENHI-PROJECT-16H04356
[Journal Article] Evaluation of the acoustoelectric effect in the thickness direction of c-plane ZnO single crystals by Brillouin scattering2017
- Author(s)
  S. Tomita, T. Yanagitani, S. Takayanagi, H．Ichihashi, Y. Shibagaki, H. Hayashi, and M. Matsukawa,
- Journal Title
  
  J. Appl. Phys
  
  Volume: 121 Issue: 23 Pages: 235102-235102
- DOI
  10.1063/1.4985699
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H04356
[Journal Article] The frequency wwitchable multi-layered BST/BaTiO3 epitaxial film resonator,2017
- Author(s)
  T. Shimidzu, T. Yanagitani, K. Wasa
- Journal Title
  
  Proc. IEEE Ultrason. Symp
  
  Volume: 1 Pages: 1-4
- DOI
  10.1109/ultsym.2017.8091518
- Data Source
  KAKENHI-PROJECT-16H04356
[Journal Article] 電気機械結合係数kt2=19％のScAlN厚膜を用いた低周波帯80MHzトランスデューサ2017
- Author(s)
  佐野耕平、唐澤嶺、柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: 117 Pages: 59-63
- Data Source
  KAKENHI-PROJECT-16H04356
[Journal Article] ScAlN/ZnO極性反転圧電薄膜を用いた2次モード励振超音波トランスデューサ2016
- Author(s)
  森剛志、鈴木雅視、柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: 116 Pages: 1-6
- Data Source
  KAKENHI-PROJECT-15K13974
[Journal Article] Effects of energetic negative ions generated from sputtering targets on ScAlN film growth2016
- Author(s)
  S. Takayanagi, M. Matsukawa, T. Yanagitani
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: 1 Pages: 1-4
- DOI
  10.1109/ultsym.2016.7728836
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H04356, KAKENHI-PROJECT-15K13974
[Journal Article] ScAlN/ZnO極性反転圧電薄膜を用いた2次モード励振超音波トランデューサ2016
- Author(s)
  森剛志、鈴木雅視、柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: vol. 116 Pages: 1-6
- Data Source
  KAKENHI-PROJECT-16H04356
[Journal Article] GHz帯で純横波超音波を高効率励振するc軸平行ZnO薄膜トランスデューサ2016
- Author(s)
  森剛志、鈴木雅視、柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: 116 Pages: 7-12
- Data Source
  KAKENHI-PROJECT-15K13974
[Journal Article] Hｚ帯で純横波超音波を高効率励振するc軸平行ZnO薄膜トランスデューサ2016
- Author(s)
  森剛志、鈴木雅視、柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: vol. 116 Pages: 7-12
- Data Source
  KAKENHI-PROJECT-15K13974
[Journal Article] Method for measuring polarity-inverted layered structure in dielectric thin films using scanning nonlinear dielectric microscopy2016
- Author(s)
  Hiroyuki Odagawa, Koshiro Terada, Hiroaki Nishikawa, Takahiko Yanagitani, Yasuo Cho
- Journal Title
  
  Ferroelectrics
  
  Volume: 498(1) Issue: 1 Pages: 47-51
- DOI
  10.1080/00150193.2016.1169493
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15K04725, KAKENHI-PROJECT-15K13974
[Journal Article] Hｚ帯で純横波超音波を高効率励振するc軸平行ZnO薄膜トランスデューサ2016
- Author(s)
  森剛志、鈴木雅視、柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: vol.116 Pages: 7-12
- Data Source
  KAKENHI-PROJECT-16H04356
[Journal Article] Acoustic wave velocities and refractive indices in an m-plane GaN single crystal plate and c-axis oriented ScAlN films measured by Brillouin scattering techniques2016
- Author(s)
  H. Ichihashi T. Yanagitani, M. Suzuki, S. Takayanagi, M. Kawabe, S. Tomita and M. Matsukawa
- Journal Title
  
  IEEE Trans. Ultrason., Ferroelectr., Freq. Contr
  
  Volume: 63 Issue: 5 Pages: 717-725
- DOI
  10.1109/tuffc.2016.2544864
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15K13974, KAKENHI-PROJECT-16H04356
[Journal Article] ScAlN/ZnO極性反転圧電薄膜を用いた2次モード励振超音波トランデューサ2016
- Author(s)
  森剛志、鈴木雅視、柳谷隆彦
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: vol. 116 Pages: 1-6
- Data Source
  KAKENHI-PROJECT-15K13974
[Journal Article] Rapid and simultaneous measurement of longitudinal and shear wave velocities by Brillouin scattering from artificially induced phonons2016
- Author(s)
  M. Kawabe, Y. Shibagaki, M. Matsukawa, T. Yanagitani M. Suzuki, S .Takayanagi
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: 1 Pages: 1-4
- DOI
  10.1109/ultsym.2016.7728801
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H04356, KAKENHI-PROJECT-15K13974
[Journal Article] Method for measuring polarity-inverted layered structure in dielectric thin films using scanning nonlinear dielectric microscopy2016
- Author(s)
  H. Odagawa, K. Terada, H. Nishikawa, T. Yanagitani, Y. Cho
- Journal Title
  
  Ferroelectrics
  
  Volume: vol. 498 Pages: 47-51
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H04356
[Journal Article] 非破壊検査用の高分解能超音波プローブ2015
- Author(s)
  柳谷隆彦、鈴木雅視、高柳真司
- Journal Title
  
  日本音響学会誌
  
  Volume: 71 Pages: 230-238
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15K13974
[Journal Article] Effects of microstructure and water on the electrical potentials in bone induced by ultrasound irradiation2015
- Author(s)
  Hiroko Tsuneda, Sayaka Matsukawa, Shinji Takayanagi, Katsunori Mizuno, Takahiko Yanagigatani, Mami Matsukawa
- Journal Title
  
  Applied Physics Letters
  
  Volume: 106 Issue: 7 Pages: 0737041-4
- DOI
  10.1063/1.4909546
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-24360161, KAKENHI-PROJECT-24760075
[Journal Article] 走査型非線形誘電率顕微法による極性反転層状構造圧電膜の層厚の定量測定2015
- Author(s)
  寺田浩士朗、西川宏明、田中陽平、小田川裕之、柳谷隆彦、長康雄
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: 115 Pages: 23-26
- Data Source
  KAKENHI-PROJECT-15K13974
[Journal Article] High-Tc/high-coupling relaxed PZT-based single crystal thin films2015
- Author(s)
  K. Wasa, T. Matsushima, H. Adachi, T. Matsunaga, T. Yanagitani and T. Yamamoto
- Journal Title
  
  J. Appl. Phys.
  
  Volume: 117 Issue: 12 Pages: 124106-124106
- DOI
  10.1063/1.4915947
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24760075
[Journal Article] 走査型非線形誘電率顕微法に・E謔驪ﾉ性反転層状構造圧電薄膜の層厚の定量測定2015
- Author(s)
  寺田浩士朗, 西川宏明, 田中陽平, 小田川裕之, 柳谷隆彦, 長康雄
- Journal Title
  
  電子情報通信学会技術報告
  
  Volume: US2015-62 Pages: 23-26
- Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15K04725
[Journal Article] Gigahertz acoustic wave velocity measurement in GaN single crystals considerinf acoust-electric effect2014
- Author(s)
  H.Ichihashi, T.Yanagitani, S.Takayanagi, M.Kawabe, M.Matsukawa
- Journal Title
  
  IEEE Trans. Ultrason., Ferroelect., Freq. Contr.
  
  Volume: 61
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656259
[Journal Article] Gigahertz acoustic wave velocities measurement in GaN single crystals considering acousto-electric effect2014
- Author(s)
  H. Ichihashi, T. Yanagitani, S. Takayanagi, M. Kawabe and M. Matsukawa
- Journal Title
  
  IEEE Trans. Ultrason., Ferroelect., Freq. Contr.,
  
  Volume: in press
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24760075
[Journal Article] Electromechanical coupling and gigahertz elastic properties of ScAlN films near phase boundary2014
- Author(s)
  Takahiko Yanagitani and Masashi Suzuki
- Journal Title
  
  Applied Physics Letters
  
  Volume: 105 Issue: 12 Pages: 122907-122907
- DOI
  10.1063/1.4896262
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-13J05891, KAKENHI-PROJECT-24760075
[Journal Article] Polarity-inverted ScAlN film growth by ion beam irradiation and application to overtone acoustic wave (000-1)/(0001) film resonators2014
- Author(s)
  M. Suzuki, T. Yanagitani, and H. Odagawa
- Journal Title
  
  Appl. Phys. Lett
  
  Volume: 104
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24760075
[Journal Article] Gigahertz acoustic wave velocity measurement in GaN single crystals considering acousto-electric effect2014
- Author(s)
  H Ichihashi, T Yanagitani, S Takayanagi, M Kawabe, M Matsukawa
- Journal Title
  
  IEEE Trans. Ultrason., Ferroelectr., Freq. Contr.
  
  Volume: 61 Issue: 8 Pages: 1307-1307
- DOI
  10.1109/tuffc.2014.3037
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24760075
[Journal Article] Polarity-inverted ScAlN film growth by ion beam irradiation and application to overtone acoustic wave (000-1)/(0001) film resonators2014
- Author(s)
  Masashi Suzuki, Takahiko Yanagitani, and Hiroyuki Odagawa
- Journal Title
  
  Applied Physics Letters
  
  Volume: 104 Issue: 17 Pages: 172905-172905
- DOI
  10.1063/1.4874840
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-13J05891, KAKENHI-PROJECT-24760075
[Journal Article] Enhanced piezoelectricity in YbGaN films near phase boundary2014
- Author(s)
  Takahiko Yanagitani, Masashi Suzuki
- Journal Title
  
  Applied Physics Letters
  
  Volume: 104 Issue: 8 Pages: 8291-8291
- DOI
  10.1063/1.4866969
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-13J05891, KAKENHI-PROJECT-24656259, KAKENHI-PROJECT-24760075
[Journal Article] Influence of the circumferential wave on the fast and slow wave propagation in small distal radius bone2014
- Author(s)
  Isao Mano, kaoru Horii, Fuminori Fujita, Yoshiki Nagatani, Mami Matsukawa, Takahiko Otani
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 53 Issue: 7S Pages: 07KF07-07KF07
- DOI
  10.7567/jjap.53.07kf07
- NAID
  210000144258
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-24360161, KAKENHI-PROJECT-25871038
[Journal Article] High-performance Brillouin spectroscopy of phonons induced by a piezoelectric thin film with a coaxial microwave resonator2013
- Author(s)
  H.Sano, T.Yanagitani, S.Takayanagi, T.Sugimoto, M.Matsukawa
- Journal Title
  
  IEEE Transactions on Ultrasonics, Ferroelectronics, Frequency control
  
  Volume: 60
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24656259
[Journal Article] High-performance brillouin spectroscopy of phonons induced by a piezoel ectric thin film with a coaxial microwave resonator2013
- Author(s)
  Hiroyuki Sano, Takahiko Yanagitani, Shinji Takayanagi, Takeshi Sugimoto, Mami Matsukawa
- Journal Title
  
  IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequencv Control
  
  Volume: 60 Issue: 5 Pages: 873-876
- DOI
  10.1109/tuffc.2013.2643
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-12J05255, KAKENHI-PROJECT-24656259, KAKENHI-PROJECT-24760075
[Journal Article] Electrical potentials in bone induced by ultrasound irradiation in the megahertz range2013
- Author(s)
  M. Okino, S. Coutelou, K. Mizuno, T. Yanagitani, M. Matsukawa
- Journal Title
  
  Applied Physics Letters
  
  Volume: Vol. 103 Issue: 10 Pages: 103701-103701
- DOI
  10.1063/1.4819853
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360161, KAKENHI-PROJECT-24760075
[Journal Article] A method for predicting thickness of the unoriented layer in ZnO film using piezoelectricity distribution in depth direction2013
- Author(s)
  Shinji Takayanagi, Takahiko Yanagitani, Mami Matsukawa
- Journal Title
  
  Journal of Physics D : Applied Physics
  
  Volume: 46 Issue: 31 Pages: 315305-315305
- DOI
  10.1088/0022-3727/46/31/315305
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-12J05255, KAKENHI-PROJECT-24760075
[Journal Article] Effect of metal mode and oxide mode on unusual c-axis parallel oriented ZnO film growth on Al/glass substrate in a reactive magnetron sputtering of Zn target2013
- Author(s)
  Shinii Takayanagi, Takahiko Yanagitani, Mami Matsukawa
- Journal Title
  
  Journal of Crystal Growth
  
  Volume: 363 Pages: 22-24
- DOI
  10.1016/j.jcrysgro.2012.09.016
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-12J05255, KAKENHI-PROJECT-24760075
[Journal Article] Significant shear mode softening in a c-axis tilt nanostructured hexagonal thin fil m induced by a self-shadowing effect2013
- Author(s)
  Takahiko Yanagitani, Masashi Suzuki
- Journal Title
  
  Scripta Materialia
  
  Volume: 69(10) Issue: 10 Pages: 724-727
- DOI
  10.1016/j.scriptamat.2013.08.011
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-13J05891, KAKENHI-PROJECT-24760075
[Journal Article] Unusual growth of polycrystalline oxide film induced by negative ion bombardment in the capacitively coupled plasma deposition2012
- Author(s)
  Shinii Takayanagi, Takahiko Yanagitani, Mami Matsukawa
- Journal Title
  
  Applied Physics Letters
  
  Volume: 101 Issue: 23 Pages: 232902-232902
- DOI
  10.1063/1.4769224
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-12J05255, KAKENHI-PROJECT-24760075
[Journal Article] Fast hypersonic velocity measurement by Brillouin scattering from induced phonons2012
- Author(s)
  T. Sugimoto, T. Yanagitani, S. Takayanagi, M. Matsukawa
- Journal Title
  
  Abstract reviewed, Proc. IEEE Ultrason. Symp.
  
  Volume: 1 Pages: 2187-2190
- DOI
  10.1109/ultsym.2012.0546
- Data Source
  KAKENHI-PROJECT-24656259, KAKENHI-PROJECT-24760075
[Journal Article] Wideband multimode transducer consisting of c-axis tilted ZnO/c-axis normal ZnO multilayer2012
- Author(s)
  Shinii Takayanagi, Takahiko Yanagitani, Mami Matsukawa
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 51 Issue: 7S Pages: 07GC08-07GC08
- DOI
  10.1143/jjap.51.07gc08
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-12J05255, KAKENHI-PROJECT-24760075
[Journal Article] Polarization inverted (0001) / (000-1) ScAlN film resonators operating in second overtone mode2012
- Author(s)
  M. Suzuki, T. Yanagitani, H. Odagawa
- Journal Title
  
  Proc. IEEE Ultrason. Symp.
  
  Volume: 1 Pages: 1230-1233
- DOI
  10.1109/ultsym.2012.0482
- Data Source
  KAKENHI-PROJECT-24760075
[Journal Article] c-axis zig-zag ZnO film ultrasonic transducers for designing longitudinal and shear wave resonant frequencies and modes2011
- Author(s)
  T.Yanagitani, N Morisato, S.Takayanagi, M.Matsukawa, Y.Watanabe
- Journal Title
  
  IEEE Trans.Ultrason., Ferroelectr., Freq.Contr.
  
  Volume: 58(印刷中)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21760049
[Journal Article] Texture modification of wurtzite piezoelectric films by ion beam irradiation2011
- Author(s)
  T.Yanagitani, M.Kiuchi
- Journal Title
  
  Surf.Coat.Technol.
  
  Volume: (印刷中)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21760049
[Journal Article] Observation of induced longitudinal and shear acoustic phonons by Brillouin scattering2011
- Author(s)
  T.Yoshida, T.Yanagitani, M.Matsukawa
- Journal Title
  
  IEEE Trans.Ultrason., Ferroelectr., Freq.Contr. vol.58. no.6,in press
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21760049
[Journal Article] Texture modification of wurtzite piezoelectric films by ion beam irradiation2011
- Author(s)
  T.Yanagitani, M.Kiuchi
- Journal Title
  
  Surf.Coat.Technol. in press
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21760049
[Journal Article] 超高周波、高Q値、高圧電性、高キュリー温度の両立に向けて2011
- Author(s)
  柳谷隆彦
- Journal Title
  
  超音波テクノ(解説記事)
  
  Volume: 23 Pages: 40-44
- Data Source
  KAKENHI-PROJECT-21760049
[Journal Article] A method for measuring in-plane unidirectional electrical properties in a wide band-gapsemiconductor using a Brillouin scattering method2010
- Author(s)
  T.Yanagitani, H.Sano, M.Matsukawa
- Journal Title
  
  J.Appl.Phys.
  
  Volume: 108
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21760049
[Journal Article] Large-area growth of in-plane oriented (11-20) ZnO films by linear cathode magnetron sputtering2010
- Author(s)
  T.Kawamoto, T.Yanagitani, M.Matsukawa, Y.Watanabe, Y.Mori, S.Sasaki, M.Oba
- Journal Title
  
  Jpn.J.Appl.Phys.
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21760049
[Journal Article] A method for measuring in-plane unidirectional electrical properties in a wide band-gap semiconductor using a Brillouin scattering method2010
- Author(s)
  T.Yanagitani, H.Sano, M.Matsukawa
- Journal Title
  
  J.Appl.Phys. vol.108
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21760049
[Journal Article] (11-20)配向AlN薄膜を用いた純横波モード共振子2010
- Author(s)
  柳谷隆彦, 木内正人, 松川真美
- Journal Title
  
  超音波テクノ 22
  
  Pages: 46-49
- Data Source
  KAKENHI-PROJECT-21760049
[Journal Article] Large-area growth of in-plane oriented (11-20) ZnO films by linear cathode magnetron sputtering2010
- Author(s)
  T.Kawamoto, T.Yanagitani, M.Matsukawa, Y.Watanabe, Y.Mori, S.Sasaki, M.Oba
- Journal Title
  
  Jpn, J.Appl.Phys (未定)(印刷中)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21760049
[Journal Article] Anisotropy of longitudinal wave velocity and hydroxyapatite orientation in bovine cortical bone2009
- Author(s)
  Y.Yaoi, K Yamamoto, Y.Yamato, T.Yanagitani, M.Matsukawa, K.Yamazaki, A.Nagano
- Journal Title
  
  Jpn, J.Appl.Phys 48
- NAID
  210000067157
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21760049
[Journal Article] Multilayered shear wave resonator consisting of c-axis tilted ZnO films2009
- Author(s)
  N.Morisato, S.Takayanagi, T.Yanagitani, M.Matsukawa, Y.Watanabe
- Journal Title
  
  Proc.IEEE Ultrason.Symp.2009 1
  
  Pages: 2162-2165
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21760049
[Journal Article] Distribution of longitudinal wave velocity and hydroxyapatite crystallite orientation in bovine cortical bone2009
- Author(s)
  Y.Yaoi, K.Yamamoto, Y.Yamato, T.Yanagitani, M.Matsukawa, K.Yamazaki, A.Nagano
- Journal Title
  
  Acoust.Sci.& Tech. vol.30, no.4
  
  Pages: 306-309
- NAID
  10025992837
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21760049
[Journal Article] Brillouin散乱法による圧電半導体の面内方向抵抗率評価に関する検討2009
- Author(s)
  柳谷隆彦, 佐野広幸, 松川真美
- Journal Title
  
  超音波テクノ 21
  
  Pages: 35-38
- Data Source
  KAKENHI-PROJECT-21760049
[Journal Article] Measurement of electric properties in a ZnO single crystal via electromechanical coupling using Brillouin scattering method2009
- Author(s)
  T. Yanagitani, H.Sano, M.Matsukawa
- Journal Title
  
  Proc.IEEE Ultrason.Symp.2009 1
  
  Pages: 1074-1077
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21760049
[Journal Article] Anisotropy of longitudinal wave velocity and hydroxyapatite orientation in bovine cortical bone2009
- Author(s)
  Y.Yaoi, K.Yamamoto, T.Nakatsuji, T.Yanagitani, M.Matsukawa, K.Yamazaki, A.Nagano
- Journal Title
  
  Jpn.J.Appl.Phys. vol.48
- NAID
  210000067157
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21760049
[Journal Article] c-axis zig-zag ZnO film ultrasonic transducers for designing longitudinal and shear wave resonant frequencies and modes
- Author(s)
  T.Yanagitani, N.Morisato, S.Takayanagi, M.Matsukawa, Y.Watanabe
- Journal Title
  
  IEEE Trans.Ultrason., Ferroelectr., Freq.Contr. vol.58. no.5
  
  Pages: 1062-1068
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21760049
[Journal Article] Gigahertz acoustic wave velocities measurement in GaN single crystals considering acousto-electric effect
- Author(s)
  H. Ichihashi T. Yanagitani, S. Takayanagi, M. Kawabe and M. Matsukawa
- Journal Title
  
  Reviewed, IEEE Trans. Ultrason., Ferroelectr., Freq. Contr.
  
  Volume: (accepted)
- Data Source
  KAKENHI-PROJECT-24656259
[Journal Article] Observation of induced longitudinal and shear acoustic phonons by Brillouin scattering
- Author(s)
  T.Yoshida, T.Yanagitani, M.Matsukawa
- Journal Title
  
  IEEE Trans.Ultrason., Ferroelectr., Freq.Contr.
  
  Volume: (Accepted)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21760049
[Patent] 薄膜の配向制御方法及び薄膜製造方法2012
- Inventor(s)
  藤澤隆志、川本貴之，森嘉一，渡辺好章，柳谷隆彦
- Industrial Property Rights Holder
  藤澤隆志、川本貴之，森嘉一，渡辺好章，柳谷隆彦
- Industrial Property Rights Type
  特許
- Filing Date
  2012-06-15
- Data Source
  KAKENHI-PROJECT-24760075
[Patent] 薄膜製造方法飲び装2010
- Inventor(s)
  柳谷隆彦, 高柳真司, 松川真美, 渡辺好章
- Industrial Property Rights Holder
  名古屋工業大学、同志社大学
- Filing Date
  2010-01-29
- Data Source
  KAKENHI-PROJECT-21760049
[Patent] ウルツ鉱圧電体薄膜、該薄膜の製造方法及び製造装置、並びに薄膜共振子2010
- Inventor(s)
  柳谷隆彦、鈴木雅視、渡辺好章
- Industrial Property Rights Holder
  名古屋工業大学、同志社大学
- Filing Date
  2010-12-03
- Data Source
  KAKENHI-PROJECT-21760049
[Patent] 薄膜製造方法及び装置2010
- Inventor(s)
  柳谷隆彦、高柳真司、松川真美、渡辺好章
- Industrial Property Rights Holder
  名古屋工業大学、同志社大学
- Industrial Property Number
  2009-019956
- Filing Date
  2010-01-29
- Data Source
  KAKENHI-PROJECT-21760049
[Patent] ウルツ鉱圧電体薄膜、該薄膜の製造方法及び製造装置、並びに薄膜共振子2010
- Inventor(s)
  柳谷隆彦、鈴木雅視、渡辺好章
- Industrial Property Rights Holder
  名古屋工業大学、同志社大学
- Industrial Property Number
  2010-270539
- Filing Date
  2010-12-03
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] エピタキシャルYSZ薄膜およびYHfO2薄膜の誘起圧電性2024
- Author(s)
  勝又彩馨, 島野耀康, 柳谷隆彦
- Organizer
  第７１回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] パルスエコー法による減衰定数測定を用いたScAlN薄膜のQ値評価2024
- Author(s)
  島野耀康, 柳谷隆彦
- Organizer
  圧電・材料デバイスシンポジウム2024
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 純 AlN 薄膜 SMR の kt2ヒステリシス特性2024
- Author(s)
  花井彩香, 柳谷隆彦
- Organizer
  第７１回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 電極抵抗低減に向けて上下電極に金属音響ブラッグ反射器を採用したSMR2024
- Author(s)
  富岡美咲, 渡海智, 柳谷隆彦
- Organizer
  圧電・材料デバイスシンポジウム2024
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] エピタキシャル PbTiO3薄膜を用いたブラッグ反射器型共振子の分極反転特性2024
- Author(s)
  下山航, 島野耀康, 國信聡太, 柳谷隆彦
- Organizer
  第７１回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 分極反転もしくは中間電極を用いたScAlN多層薄膜SMRによる二重モード型BAWフィルタ(DMB)2024
- Author(s)
  松村桃佳, 柴田真之, 柳谷隆彦
- Organizer
  圧電・材料デバイスシンポジウム2024
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] エピタキシャルPbTiO3薄膜を用いたブラッグ反射器型共振子2024
- Author(s)
  下山航, 島野耀康, 國信聡太, 柳谷隆彦
- Organizer
  圧電・材料デバイスシンポジウム2024
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] c 軸傾斜 ScAlN 薄膜を用いた送受波型ジャイロセンサの作製2024
- Author(s)
  小池由奈, 柳谷隆彦
- Organizer
  第７１回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 純AlN薄膜共振子の強誘電性とヒステリシス特性2024
- Author(s)
  花井彩香, 柳谷隆彦
- Organizer
  圧電・材料デバイスシンポジウム2024
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 周期的傾斜分極反転構造とベタ電極からなるSAWデバイス2024
- Author(s)
  松村理司, 島野耀康, 大野直輝, 柳谷隆彦,長康雄
- Organizer
  第７１回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 周期的傾斜分極反転構造を用いたベタ電極によるSAWの励振2024
- Author(s)
  松村理司, 島野耀康, 大野直輝, 柳谷隆彦,長康雄
- Organizer
  圧電・材料デバイスシンポジウム2024
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] AOGsレスSc0.4Al0.6N薄膜の大面積成膜を目指した矩形カソード平行平板スパッタリング2024
- Author(s)
  浴田航平, 石井直輝, 島野耀康, 柳谷隆彦
- Organizer
  圧電・材料デバイスシンポジウム2024
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] エピタキシャルYSZ薄膜およびYHfO2薄膜の電界誘起圧電性2024
- Author(s)
  勝又彩馨, 島野耀康, 柳谷隆彦
- Organizer
  圧電・材料デバイスシンポジウム2024
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] PbTiO3エピタキシャル自立薄膜共振子の電気機械結合係数ヒステリシスカーブ2023
- Author(s)
  國信聡太, 柳谷隆彦
- Organizer
  電子情報通信学会技術研究報告
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 高電力性向上を目的とした高次モード分極反転ScAlN薄膜SMR2023
- Author(s)
  柴田真之, 柳谷隆彦
- Organizer
  電子情報通信学会技術研究報告
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] エピタキシャルZnO犠牲層を用いたc軸傾斜エピタキシャルScAlN自立薄膜共振子2023
- Author(s)
  小林栞, 柳谷隆彦
- Organizer
  電子情報通信学会応用音響研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Acoustic separation of piezoelectric layer and substrate using 30-layer c-axis zigzag ScAlN polarization inversion resonator2023
- Author(s)
  S. Tokai and T. Yanagitani
- Organizer
  The 15th PACIFIC RIM conference of ceramic societies(PACRIM15)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] オフ角基板を用いたc軸傾斜エピPbTiO 3 薄膜の擬似横波励振特性2023
- Author(s)
  國信聡太, 柳谷隆彦
- Organizer
  第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 基板付き圧電薄膜の様々な kt2評価法における電極面積依存性2023
- Author(s)
  関崚, 清水祐樹, 近藤圭太, 柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2023
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 圧電層と基板の音響分離を目指した30層分極反転HBAR2023
- Author(s)
  白岩和剛, 柳谷隆彦
- Organizer
  電子情報通信学会技術研究報告
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] エピ音響ブラッグ反射器およびエピScAlN, MgZnO圧電薄膜から成るSMR2023
- Author(s)
  渡海智, 柳谷隆彦
- Organizer
  第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 高い横波電気機械結合係数を持つc軸傾斜PbTiO3薄膜/オフ角La-SrTiO3基板共振子2023
- Author(s)
  國信聡太, 柳谷隆彦
- Organizer
  第44回超音波エレクトロニクスの基礎と応用に関するシンポジウムUSE2023
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 数百MHz帯超音波を用いた複素反射率測定による生体物質の相互作用の検出2023
- Author(s)
  茂木彩音, 柳谷隆彦
- Organizer
  電子情報通信学会技術研究報告
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] YbGaNおよびYbAlNエピタキシャル薄膜を用いたBAW共振子の特性2023
- Author(s)
  馮子泰, 李嵩, 柳谷隆彦
- Organizer
  第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 圧電層と基板の音響分離を目指した 30 層分極反転共振子案2023
- Author(s)
  白岩和剛, 柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2023
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 基板除去前後におけるPbTiO3エピタキシャル薄膜共振子のkt2ヒステリシスカーブ2023
- Author(s)
  國信聡太, 柳谷隆彦
- Organizer
  第11回弾性波素子技術コンソーシアム研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Characteristics of piezoelectric LiNbO3 epitaxial thin films grown on off-angle Al2O3 substrate2023
- Author(s)
  F. Zitai and T. Yanagitani
- Organizer
  The 15th PACIFIC RIM conference of ceramic societies(PACRIM15)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 基板付き薄膜共振子における共振反共振法用いた電極を含む電気機械結合係数keff2の直接評価2023
- Author(s)
  島野耀康, 矢田部浩平, 柳谷隆彦
- Organizer
  第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 積層電極によるScAlN多層薄膜SMRを用いた二重モードBAWフィルタ(DMB)2023
- Author(s)
  柴田真之, 柳谷隆彦
- Organizer
  電子情報通信学会技術研究報告
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] High quasi-shear mode electromechanical coupling of c-axis tilted PbTiO3 epitaxial thin film grown on off-angle SrTiO3 single crystal substrate2023
- Author(s)
  S. Kuninobu and T. Yanagitani
- Organizer
  IEEE Ultrasonic Symposium 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 基地局向けRFフィルタを目指した多層圧電薄膜共振子2023
- Author(s)
  白岩和剛, 柳谷隆彦
- Organizer
  革新的無線通信技術に関する横断型研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] kt2 Hysteresis curves of PbTiO3 epitaxial film resonators before and after removing substrate2023
- Author(s)
  S. Kuninobu and T. Yanagitani
- Organizer
  The 15th PACIFIC RIM conference of ceramic societies(PACRIM15)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] RFフィルタ向け窒化物多層圧電薄膜のハイパワー特性2023
- Author(s)
  柴田真之, 柳谷隆彦
- Organizer
  革新的無線通信技術に関する横断型研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] GHz 帯パルスエコー法による音響ブラッグ反射層の横波機械的通過損失の測定2023
- Author(s)
  鈴木基嗣, 石井直輝, 近藤圭太, 柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2023
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Li0.65Nb0.3Ta0.05O3 スパッタエピ薄膜のGHz帯励振特性2023
- Author(s)
  中村華英, 工藤慎也, 柳谷隆彦
- Organizer
  第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] オフ角サファイア基板を用いた ScAlN および MgZnO 薄膜の c 軸傾斜エピタキシャル成長と横波圧電特性2023
- Author(s)
  岸大貴, 柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2023
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] エピタキシャル金属薄膜から成る音響ブラッグ反射器を用いたフルエピタキシャル SMR の作製2023
- Author(s)
  渡海智, 柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2023
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] エピScAlN, MgZnO圧電薄膜/エピ音響ブラッグ反射器構造のSMR2023
- Author(s)
  渡海智, 柳谷隆彦
- Organizer
  第11回弾性波素子技術コンソーシアム研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 基板付き圧電薄膜構造の kt2評価における電極面積依存性の実験データとFEM解析データの比較2023
- Author(s)
  関崚, 清水祐樹, 柳谷隆彦
- Organizer
  第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] GHz帯パルスエコー法による音響ブラッグ反射層の横波特性の抽出2023
- Author(s)
  鈴木基嗣, 柳谷隆彦
- Organizer
  第11回弾性波素子技術コンソーシアム研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] c軸傾斜Sc0.4Al0.6N薄膜の大面積成膜を目指した矩形カソードによる平行平板スパッタリング2023
- Author(s)
  石井直輝, 柳谷隆彦
- Organizer
  電子情報通信学会技術研究報告
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 強誘電性ScAlN薄膜SMRのkt2ヒステリシス特性2023
- Author(s)
  松村理司, 柳谷隆彦
- Organizer
  第52回EMシンポジウム
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] エピ金属薄膜から成る音響ブラッグ反射器上にエピ圧電薄膜を持つSMR2023
- Author(s)
  渡海智, 柳谷隆彦
- Organizer
  第52回EMシンポジウム
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 厚みすべりモードc軸ジグザグScAlN積層を用いたSMR型圧電トランス2023
- Author(s)
  白岩和剛, 柳谷隆彦
- Organizer
  電子情報通信学会応用音響研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] (10-12)LiNbO3スパッタエピ薄膜のGHz帯擬似横波励振特性2023
- Author(s)
  内田拓希, 工藤慎也, 柳谷隆彦
- Organizer
  第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] エピタキシャルZnO犠牲層を用いたc軸傾斜エピタキシャルScAlN自立薄膜共振子2023
- Author(s)
  小林栞, 柳谷隆彦
- Organizer
  電子情報通信学会技術研究報告
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] c軸ジグザグ分極反転ScAlN薄膜を用いたトランスバーサル型BAWフィルタ2023
- Author(s)
  柴田真之, 柳谷隆彦
- Organizer
  第44回超音波エレクトロニクスの基礎と応用に関するシンポジウムUSE2023
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] オフ角 La-SrTiO3 基板を用いた c 軸傾斜エピ PbTiO3 薄膜の高い横波圧電性2023
- Author(s)
  國信聡太, 柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2023
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 圧電層と基板の音響分離を目指した30層c軸ジグザグScAlN分極反転共振子2023
- Author(s)
  白岩和剛, 柳谷隆彦
- Organizer
  第11回弾性波素子技術コンソーシアム研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Characteristics of acoustic resonators using YbAlN and YbGaN epitaxial piezoelectric thin films2023
- Author(s)
  F. Zitai and T. Yanagitani
- Organizer
  The 15th PACIFIC RIM conference of ceramic societies(PACRIM15)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 厚さ0.1 mmのc軸傾斜ScAlN 厚膜の擬似横波励振特性2023
- Author(s)
  國信聡太, 柳谷隆彦
- Organizer
  第52回EMシンポジウム
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Polarization-inverted c-axis zigzag ScAlN multilayers for transversal type BAW filter2023
- Author(s)
  S. Shibata and T. Yanagitani
- Organizer
  The 15th PACIFIC RIM conference of ceramic societies(PACRIM15)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 基板付き薄膜共振子において通常の共振反共振法を用いる新しい kt2 評価法の提案2023
- Author(s)
  島野耀康, 矢田部浩平, 柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2023
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] オフ角 Al2O3 基板を用いた LiNbO3 薄膜の c 軸傾斜エピタキシャル成長2023
- Author(s)
  工藤慎也, 柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2023
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] c-axis tilted LiNbO3 epitaxial thin film grown on off-angle Al2O3 single crystal substrate2023
- Author(s)
  H. Uchida and T. Yanagitani
- Organizer
  IEEE Ultrasonic Symposium 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 基板付き圧電薄膜構造の kt2評価における電極面積依存性の実験データとFEM解析データの比較2023
- Author(s)
  関崚, 清水祐樹, 柳谷隆彦
- Organizer
  第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] PbTiO3エピタキシャル自立薄膜共振子の電気機械結合係数ヒステリシスカーブ2023
- Author(s)
  國信聡太, 柳谷隆彦
- Organizer
  電子情報通信学会応用音響研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] オフ角基板を用いたc軸傾斜エピPbTiO 3 薄膜の擬似横波励振特性2023
- Author(s)
  國信聡太, 柳谷隆彦
- Organizer
  第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Investigation of the origins of electrode area dependence in kt2 evaluation using FEM analysis in comparison with experimental data2023
- Author(s)
  Y. Shimano and T. Yanagitani
- Organizer
  IEEE Ultrasonic Symposium 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Full epitaxial ZnO, MgZnO and ScAlN piezoelectric thin film BAW resonators based on epitaxial acoustic Bragg refractor2023
- Author(s)
  S. Tokai and T. Yanagitani
- Organizer
  The 15th PACIFIC RIM conference of ceramic societies(PACRIM15)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] c軸傾斜エピPbTiO3薄膜の高い擬似すべりモード電気機械結合係数2023
- Author(s)
  國信聡太, 柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 30 層分極反転共振子による圧電層と基板の音響分離2023
- Author(s)
  白岩和剛, 柳谷隆彦
- Organizer
  第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] YbGaNおよびYbAlNエピタキシャル薄膜を用いたBAW共振子の特性2023
- Author(s)
  馮子泰, 李嵩, 柳谷隆彦
- Organizer
  第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] エピ犠牲層エッチングを用いたエピ圧電層/音響ブラッグ反射器構造の作製2023
- Author(s)
  渡海智, 柳谷隆彦
- Organizer
  電子情報通信学会応用音響研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] エピ圧電薄膜/エピ音響ブラッグ反射器構造のSMR2023
- Author(s)
  渡海智, 柳谷隆彦
- Organizer
  電子情報通信学会技術研究報告
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Quasi-shear mode excitation of c-axis tilted ScAlN and MgZnO epitaxial thin films on off-angle sapphire single crystal substrates2023
- Author(s)
  S. Kuninobu and T. Yanagitani
- Organizer
  IEEE Ultrasonic Symposium 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 積層電極によるScAlN多層薄膜SMRを用いた二重モードBAWフィルタ(DMB)2023
- Author(s)
  柴田真之, 柳谷隆彦
- Organizer
  電子情報通信学会応用音響研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] c軸傾斜エピPbTiO3薄膜の高い擬似すべりモード電気機械結合係数2023
- Author(s)
  國信聡太, 柳谷隆彦
- Organizer
  電子情報通信学会技術研究報告
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Shear mode electromechanical coupling coefficient of c-axis tilted PbTiO3 epitaxial thin film/off-angle La-SrTiO3 substrate2023
- Author(s)
  S. Kuninobu and T. Yanagitani
- Organizer
  The 15th PACIFIC RIM conference of ceramic societies(PACRIM15)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Full-epitaxial ScAlN, ZnO and MgZnO SMR based on epitaxial metal acoustic Bragg reflector2023
- Author(s)
  S. Tokai and T. Yanagitani
- Organizer
  IEEE Ultrasonic Symposium 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] エピ音響ブラッグ反射器およびエピScAlN, MgZnO圧電薄膜から成るSMR2023
- Author(s)
  渡海智, 柳谷隆彦
- Organizer
  第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 圧電層と基板の音響分離を目指した 30 層分極反転共振子案2023
- Author(s)
  白岩和剛, 柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2023
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 基板付き圧電薄膜の様々な kt2評価法における電極面積依存性2023
- Author(s)
  関崚, 清水祐樹, 近藤圭太, 柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2023
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] エピタキシャル金属薄膜から成る音響ブラッグ反射器を用いたフルエピタキシャル SMR の作製2023
- Author(s)
  渡海智, 柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2023
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] オフ角サファイア単結晶基板上 c 軸傾斜MgZnO, ScAlN,エピタキシャル薄膜の擬似横波励振特性2023
- Author(s)
  小林栞, 岸大貴, 柳谷隆彦
- Organizer
  第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] c軸傾斜Sc0.4Al0.6N薄膜の大面積成膜を目指した矩形カソードによる平行平板スパッタリング2023
- Author(s)
  石井直輝, 柳谷隆彦
- Organizer
  電子情報通信学会応用音響研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 30 層分極反転共振子による圧電層と基板の音響分離2023
- Author(s)
  白岩和剛, 柳谷隆彦
- Organizer
  第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] BAWフィルタ応用を目指した強誘電性酸化物圧電薄膜の開発2023
- Author(s)
  柳谷隆彦
- Organizer
  第７１回応用物理学会春季学術講演会
- Invited
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Li0.65Nb0.3Ta0.05O3 スパッタエピ薄膜のGHz帯励振特性2023
- Author(s)
  中村華英, 工藤慎也, 柳谷隆彦
- Organizer
  第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 基板付き薄膜共振子における共振反共振法用いた電極を含む電気機械結合係数keff2の直接評価2023
- Author(s)
  島野耀康, 矢田部浩平, 柳谷隆彦
- Organizer
  第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 30-layer polarization inversion resonator for acoustic separation of the piezoelectric layer and the substrate2023
- Author(s)
  S. Tokai and T. Yanagitani
- Organizer
  IEEE Ultrasonic Symposium 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 多重エコー集約による基板付き圧電薄膜の電気機械結合係数keff2の新規評価法2023
- Author(s)
  島野耀康, 柳谷隆彦
- Organizer
  日本音響学会第150回(2023年秋季)研究発表会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 厚みすべりモードc軸ジグザグScAlN積層を用いたSMR型圧電トランス2023
- Author(s)
  白岩和剛, 柳谷隆彦
- Organizer
  電子情報通信学会技術研究報告
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Hysteresis curves of ferroelectric ScAlN films for fabricating periodically polarization inverted structure2023
- Author(s)
  S. Matsumura and T.Yanagitani
- Organizer
  IEEE Ultrasonic Symposium 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 圧電層と基板の音響分離を目指した30層分極反転HBAR2023
- Author(s)
  白岩和剛, 柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] New method for extracting keff2 from HBAR by producing pseudo FBAR characteristics without substrate removal2023
- Author(s)
  Y. Shimano and T. Yanagitani
- Organizer
  IEEE Ultrasonic Symposium 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] エピ音響ブラッグ反射器上に成長させたエピScAlN, MgZnO圧電薄膜SMR2023
- Author(s)
  渡海智, 柳谷隆彦
- Organizer
  第44回超音波エレクトロニクスの基礎と応用に関するシンポジウムUSE2023
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] オフ角 Al2O3 基板を用いた LiNbO3 薄膜の c 軸傾斜エピタキシャル成長2023
- Author(s)
  工藤慎也, 柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2023
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 数百MHz帯超音波を用いた複素反射率測定による生体物質の相互作用の検出2023
- Author(s)
  茂木彩音, 柳谷隆彦
- Organizer
  電子情報通信学会応用音響研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 基板付き薄膜共振子において通常の共振反共振法を用いる新しい kt2 評価法の提案2023
- Author(s)
  島野耀康, 矢田部浩平, 柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2023
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] RF power durability of polarization-inverted c-axis zigzag ScAlN piezoelectric multilayers2023
- Author(s)
  S. Shibata and T. Yanagitani
- Organizer
  The 15th PACIFIC RIM conference of ceramic societies(PACRIM15)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] オフ角サファイア基板を用いた ScAlN および MgZnO 薄膜の c 軸傾斜エピタキシャル成長と横波圧電特性2023
- Author(s)
  岸大貴, 柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2023
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] オフ角サファイア単結晶基板上 c 軸傾斜MgZnO, ScAlN,エピタキシャル薄膜の擬似横波励振特性2023
- Author(s)
  小林栞, 岸大貴, 柳谷隆彦
- Organizer
  第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 高電力性向上を目的とした高次モード分極反転ScAlN薄膜SMR2023
- Author(s)
  柴田真之, 柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 横波型RFフィルタを目指したPbTiO3圧電薄膜2023
- Author(s)
  國信聡太, 柳谷隆彦
- Organizer
  革新的無線通信技術に関する横断型研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] オフ角 La-SrTiO3 基板を用いた c 軸傾斜エピ PbTiO3 薄膜の高い横波圧電性2023
- Author(s)
  國信聡太, 柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2023
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] RFフィルタ向けエピタキシャル圧電薄膜多層構造2023
- Author(s)
  渡海智, 柳谷隆彦
- Organizer
  革新的無線通信技術に関する横断型研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] GHz 帯パルスエコー法による音響ブラッグ反射層の横波機械的通過損失の測定2023
- Author(s)
  鈴木基嗣, 石井直輝, 近藤圭太, 柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2023
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] エピ犠牲層エッチングを用いたエピ圧電層/音響ブラッグ反射器構造の作製2023
- Author(s)
  渡海智, 柳谷隆彦
- Organizer
  電子情報通信学会技術研究報告
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] エピ圧電薄膜/エピ音響ブラッグ反射器構造のSMR2023
- Author(s)
  渡海智, 柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] (10-12)LiNbO3スパッタエピ薄膜のGHz帯擬似横波励振特性2023
- Author(s)
  内田拓希, 工藤慎也, 柳谷隆彦
- Organizer
  第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] GHz frequency switchable BAW filter applications of ferroelectric ScAlN and MgZnO thin films2022
- Author(s)
  T. Yanagitani
- Organizer
  2022 US-Japan Seminar on Dielectric and Piezoelectric Ceramics
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 超音波顕微鏡による音響ブラッグ反射層の機械的通過損失の測定2022
- Author(s)
  鈴木基嗣、石井直輝、近藤圭太、柳谷隆彦
- Organizer
  第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Improvement of electromechanical coupling coefficient of piezoelectric LiNbO3 by doping praseodymium2022
- Author(s)
  K. Nakamura and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Mechanical Q factor extraction of sputter-grown Pb(ZrxTi1-x)O3 epitaxial thin films without removing substrate2022
- Author(s)
  Y. Shimizu and T. Yanagitani
- Organizer
  2022 US-Japan Seminar on Dielectric and Piezoelectric Ceramics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Experimental and theoretical investigation of enhanced electromechanical properties in YbAlN and YbGaN films2022
- Author(s)
  S. Li and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] YbGaNおよびYbAlNエピタキシャル薄膜共振子の特性2022
- Author(s)
  李嵩, 賈軍軍, 柳谷隆彦
- Organizer
  超音波研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Sputter epitaxial (101??2) LiNbO3 film / (112??0) AZO / (101??2) Al2O3 shear mode thin film resonators2022
- Author(s)
  S. Kudo and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] IBAD c-axis parallel ZnO piezoelectric film stack?for gyroscope applications2022
- Author(s)
  S. Kudo and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] c軸10°傾斜配向ZnOエピタキシャル薄膜における擬似横波励振特性2022
- Author(s)
  岸大貴, 柳谷隆彦
- Organizer
  日本音響学会第148回
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] GHz frequency switchable BAW filter applications of ferroelectric ScAlN and MgZnO thin films2022
- Author(s)
  T. Yanagitani
- Organizer
  2022 US-Japan Seminar on Dielectric and Piezoelectric Ceramics
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 基板付きの圧電薄膜と自立構造の圧電薄膜に対する各種 kt2値評価法の比較2022
- Author(s)
  関崚, 清水祐樹, 柳谷隆彦
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] c軸ジグザク分極反転ScAlN薄膜を用いたBAW送受波型トランスバーサルフィルタ2022
- Author(s)
  泉航太、柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] piezoelectric gyroscope with tilted c-axis ScAlN thin-films2022
- Author(s)
  Y. Koike and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Quasi-shear mode excitation of c-axis tilted MgZnO epitaxial thin film2022
- Author(s)
  H. Kishi and T. Yanagitani
- Organizer
  The 43rd Symposium on UltraSonic Electronics (USE2022)
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Experimental and theoretical investigation of enhanced electromechanical properties in YbAlN and YbGaN films2022
- Author(s)
  S. Li and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] YbGaNおよびYbAlNエピタキシャル薄膜共振子の特性2022
- Author(s)
  李嵩, 賈軍軍, 柳谷隆彦
- Organizer
  超音波研究会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] c軸10°傾斜配向ZnOエピタキシャル薄膜の成長と擬似横波励振特性2022
- Author(s)
  岸大貴, 柳谷隆彦
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] GHz electromechanical coupling hysteresis curves for ferroelectric ScAlN and epitaxial MgZnO films2022
- Author(s)
  N. Ishi and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 基板付き薄膜構造からの圧電薄膜のQ値抽出における横方向伝搬の影響2022
- Author(s)
  清水祐樹, 柳谷隆彦
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 基板付き圧電薄膜の kt2評価における電極面積の影響2022
- Author(s)
  関崚, 清水祐樹, 近藤圭太, 柳谷隆彦
- Organizer
  超音波研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] SMR-type piezoelectric transformer based on c-axis zig-zag polarization inverted ScAlN multilayer2022
- Author(s)
  K. Shiraiwa and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] c軸傾斜反転ScAlN薄膜を用いたブラッグ反射器型圧電トランス2022
- Author(s)
  白岩和剛、佐藤裕友、関崚、柳谷隆彦
- Organizer
  第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] kt2 hysteresis curves of PbTiO3 epitaxial film resonators before and after removing substrate2022
- Author(s)
  S. Kuninobu and T. Yanagitani
- Organizer
  2022 US-Japan Seminar on Dielectric and Piezoelectric Ceramics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 外部電場により分極反転処理した強誘電性 ScAlN 薄膜共振子2022
- Author(s)
  石井直輝、岩田直也、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2022
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Extracting Q factor of the piezoelectric thin films from film/high-Q substrate HBAR structure2022
- Author(s)
  M. Suzuki and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 20%を超える高いkt2値のc軸配向Sc0.4Al0.6N薄膜および高いk´352値のc軸傾斜配向Sc0.4Al0.6N薄膜2022
- Author(s)
  内田拓希, 清水祐樹, 鈴木雅視, 高柳真司, 柳谷隆彦
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Quasi-shear mode electromechanical coupling coefficient of c-axis tilted MgZnO thin films2022
- Author(s)
  Y. Shimano and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] スパッタによる透明 ScAlN 薄板の成長と10 MHz帯トランスデューサへの応用2022
- Author(s)
  岩田直也、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2022
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Thickness shear mode BAW resonator based on epitaxial (10-12) LiNbO3 (11-20) AZO/(10-12) Al2O32022
- Author(s)
  S. Kudo and T. Yanagitani
- Organizer
  The 43rd Symposium on UltraSonic Electronics (USE2022)
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Mechanical Q factor dependence on Zr/Ti ratio of sputter-grown PZT epitaxial thin films2022
- Author(s)
  Y. Shimizu and T. Yanagitani
- Organizer
  The 43rd Symposium on UltraSonic Electronics (USE2022)
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Epitaxial PbTiO3 ultrasonic transducer for higher resolution of fingerprint imaging using GHz reflectometry of back side of substrate2022
- Author(s)
  Y. Koike and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 耐電力性向上に向けた高次モード分極反転ScAlN薄膜の作製およびサブ W 耐電力性の評価2022
- Author(s)
  柴田真之、佐藤裕友、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2022
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Sputter epitaxial (101??2) LiNbO3 film / (112??0) AZO / (101??2) Al2O3 shear mode thin film resonators2022
- Author(s)
  S. Kudo and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 分極反転 ScAlN 薄膜を用いたBAW送受波型トランスバーサルフィルタ2022
- Author(s)
  泉航太、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2022
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Polarization inverted 2 layer ScAlN thin film resonator fabricated by applying external electric field2022
- Author(s)
  N. Ishi and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 基板付き薄膜共振子を用いたScAlN、ZnO、PZT圧電薄膜層のQ値抽出2022
- Author(s)
  清水祐樹, 柳谷隆彦
- Organizer
  超音波研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Fingerprint imaging using GHz PbTiO3 epitaxial thin film ultrasonic transducer2022
- Author(s)
  K. Nakamura and T. Yanagitani
- Organizer
  2022 US-Japan Seminar on Dielectric and Piezoelectric Ceramics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Thickness shear mode epitaxial (10?("1" ) "2") LiNbO3 (11?("2" )0) AZO/(10?("1" ) "2") Al2O3 BAW resonator2022
- Author(s)
  S. Kudo and T. Yanagitani
- Organizer
  IEEE IC-MAM 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 音響ブラッグ反射器上へのエピ圧電層の形成2022
- Author(s)
  渡海智、浴田航平、柳谷隆彦
- Organizer
  第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] A method for evaluating sole mechanical properties of acoustic Bragg reflector by pulse echo technique in the GHz range2022
- Author(s)
  M. Suzuki and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Mechanical Q factor dependence on Zr/Ti ratio of sputter-grown PZT epitaxial thin films2022
- Author(s)
  Y. Shimizu and T. Yanagitani
- Organizer
  The 43rd Symposium on UltraSonic Electronics (USE2022)
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Grow of O-polar and Zn polar ferroelectric MgZnO thin films controlled by sputtering geometry2022
- Author(s)
  Y. Shimano and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 20%を超える高いkt2値のc軸配向Sc0.4Al0.6N薄膜および高いk´352値のc軸傾斜配向Sc0.4Al0.6N薄膜2022
- Author(s)
  内田拓希, 清水祐樹, 鈴木雅視, 高柳真司, 柳谷隆彦
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Extracting Q factor of the piezoelectric thin films from film/high-Q substrate HBAR structure2022
- Author(s)
  M. Suzuki and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 基板付きの圧電薄膜と自立構造の圧電薄膜に対する各種 kt2値評価法の比較2022
- Author(s)
  関崚, 清水祐樹, 柳谷隆彦
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] SiO2遅延層を用いたGHz帯パルスエコー法による音響ブラッグ反射層の機械的通過損失の測定2022
- Author(s)
  近藤圭太, 石井直輝, 鈴木基嗣, 柳谷隆彦
- Organizer
  超音波研究会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] (10-12)LiNbO3エピタキシャル薄膜/(10-12)Al2O3基板のGHz帯向け擬似横波励振特性2022
- Author(s)
  工藤慎也, 柳谷隆彦
- Organizer
  日本音響学会第148回
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 基板付き圧電薄膜の kt2評価における電極面積の影響2022
- Author(s)
  関崚, 清水祐樹, 近藤圭太, 柳谷隆彦
- Organizer
  超音波研究会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 高 Q 基板を用いた基板付き薄膜共振子からの圧電薄膜層のQ 値抽出2022
- Author(s)
  清水祐樹、小林栞、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2022
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] (100)AgNbO3エピタキシャル薄膜/(100)STO基板のGHz帯超音波励振特性2022
- Author(s)
  浴田航平, 大森拳, 工藤慎也, 柳谷隆彦
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] c軸傾斜配向MgZnO薄膜の作製2022
- Author(s)
  岸大貴、柳谷隆彦
- Organizer
  第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Fingerprint imaging in GHz using PbTiO3 epitaxial piezoelectric thin films2022
- Author(s)
  Y. Koike and T. Yanagitani
- Organizer
  IEEE IC-MAM 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Thickness shear mode epitaxial (10?("1" ) "2") LiNbO3 (11?("2" )0) AZO/(10?("1" ) "2") Al2O3 BAW resonator2022
- Author(s)
  S. Kudo and T. Yanagitani
- Organizer
  IEEE IC-MAM 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] LiNbO3スパッタエピ薄膜のGHz帯励振特性2022
- Author(s)
  工藤慎也, 柳谷隆彦
- Organizer
  超音波研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Fabrication of epitaxial piezoelectric layer on acoustic Bragg reflector using epitaxial sacrificial layer2022
- Author(s)
  S. Tokai and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 厚みすべりモード c 軸ジグザグ ScAlN 積層を用いたブラッグ反射器型圧電トランス2022
- Author(s)
  白岩和剛、佐藤裕友、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2022
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] PZTエピタキシャル薄膜のZr/Ti比における機械的品質Qmの依存性2022
- Author(s)
  國信聡太, 清水祐樹, 柳谷隆彦
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] III-V族窒化物圧電薄膜へのYb添加効果2022
- Author(s)
  賈軍軍、岩田直也、柳谷隆彦
- Organizer
  第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] ウルツ鉱型強誘電体薄膜におけるGHz帯kt2-Eヒステリシス特性2022
- Author(s)
  石井直輝, 小林栞, 柳谷隆彦
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] piezoelectric gyroscope with tilted c-axis ScAlN thin-films2022
- Author(s)
  Y. Koike and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] (0001)YbAlN／(0001)Ti／(0001)Al2 O3 エピタキシャル薄膜共振子2022
- Author(s)
  李嵩、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2022
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] PbTiO3 薄膜共振子の基板除去前後における kt2 ヒステリシスカーブの比較2022
- Author(s)
  國信聡太、岩田直也、柳谷隆彦
- Organizer
  第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Extraction of mechanical reflectance of acoustic Bragg reflector by GHz pulse echo technique2022
- Author(s)
  M. Suzuki and T. Yanagitani
- Organizer
  The 43rd Symposium on UltraSonic Electronics (USE2022)
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Grow of O-polar and Zn polar ferroelectric MgZnO thin films controlled by sputtering geometry2022
- Author(s)
  Y. Shimano and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Fabrication of high kt2 and k’352 Sc0.4Al0.6N thin films by RF magnetron sputtering2022
- Author(s)
  Y. Shimizu and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] c軸20°傾斜配向MgZnOエピタキシャル薄膜の擬似横波励振特性2022
- Author(s)
  岸大貴, 柳谷隆彦
- Organizer
  超音波研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] c軸10°傾斜配向ZnOエピタキシャル薄膜の成長と擬似横波励振特性2022
- Author(s)
  岸大貴, 柳谷隆彦
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Epitaxial PbTiO3 ultrasonic transducer for higher resolution of fingerprint imaging using GHz reflectometry of back side of substrate2022
- Author(s)
  Y. Koike and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 基板付き薄膜構造からの圧電薄膜のQ値抽出における横方向伝搬の影響2022
- Author(s)
  清水祐樹, 柳谷隆彦
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] PbTiO3 アレイトランスデューサの基板裏面での反射率測定によるGHz帯超音波イメージング2022
- Author(s)
  小池由奈、佐藤裕友、松村理司、柳谷隆彦
- Organizer
  第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] (10-12)LiNbO3エピタキシャル薄膜/(10-12)Al2O3基板のGHz帯向け擬似横波励振特性2022
- Author(s)
  工藤慎也, 柳谷隆彦
- Organizer
  日本音響学会第148回
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] A method to evaluate the mechanical transmission loss of the sole Bragg reflector by using GHz pulse echo technique2022
- Author(s)
  N. ishi and T. Yanagitani
- Organizer
  IEEE IC-MAM 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Quasi-shear mode electromechanical coupling coefficient of c-axis tilted MgZnO thin films2022
- Author(s)
  Y. Shimano and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Fabrication of epitaxial piezoelectric layer on acoustic Bragg reflector using epitaxial sacrificial layer2022
- Author(s)
  S. Tokai and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Polarization inverted 2 layer ScAlN thin film resonator fabricated by applying external electric field2022
- Author(s)
  N. Ishi and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Improvement of electromechanical coupling coefficient of piezoelectric LiNbO3 by doping praseodymium2022
- Author(s)
  K. Nakamura and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 分極反転多層デバイスに向けた極性制御MgZnO圧電薄膜の作製2022
- Author(s)
  島野耀康, 高柳真司, 柳谷隆彦
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] kt2 hysteresis curves of PbTiO3 epitaxial film resonators before and after removing substrate2022
- Author(s)
  S. Kuninobu and T. Yanagitani
- Organizer
  2022 US-Japan Seminar on Dielectric and Piezoelectric Ceramics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 外部電場によるScAlN薄膜の分極反転と圧電特性2022
- Author(s)
  石井直輝、岩田直也、島野耀康、柳谷隆彦
- Organizer
  第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] SiO2遅延層を用いたGHz帯パルスエコー法による音響ブラッグ反射層の機械的通過損失の測定2022
- Author(s)
  近藤圭太, 石井直輝, 鈴木基嗣, 柳谷隆彦
- Organizer
  超音波研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] c軸ジグザグ分極反転ScAlN薄膜を用いたBAW送受波型トランスバーサルフィルタ2022
- Author(s)
  柴田真之、柳谷隆彦
- Organizer
  第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Thickness shear mode BAW resonator based on epitaxial (10-12) LiNbO3 (11-20) AZO/(10-12) Al2O32022
- Author(s)
  S. Kudo and T. Yanagitani
- Organizer
  The 43rd Symposium on UltraSonic Electronics (USE2022)
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] LiNbO3 エピタキシャル薄膜の共振特性2022
- Author(s)
  工藤慎也、柳谷隆彦
- Organizer
  第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] c軸傾斜配向ScAlN薄膜を用いた複素反射法による生体物質の相互作用の検出2022
- Author(s)
  茂木彩音、中村華英、山下美穂、柳谷隆彦
- Organizer
  第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Mechanical Q factor extraction of sputter-grown Pb(ZrxTi1-x)O3 epitaxial thin films without removing substrate2022
- Author(s)
  Y. Shimizu and T. Yanagitani
- Organizer
  2022 US-Japan Seminar on Dielectric and Piezoelectric Ceramics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] スパッタ法による透明 ScAlN 薄板の成長2022
- Author(s)
  李嵩、岩田直也、柳谷隆彦
- Organizer
  第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] A method for evaluating sole mechanical properties of acoustic Bragg reflector by pulse echo technique in the GHz range2022
- Author(s)
  M. Suzuki and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Extraction of mechanical reflectance of acoustic Bragg reflector by GHz pulse echo technique2022
- Author(s)
  M. Suzuki and T. Yanagitani
- Organizer
  The 43rd Symposium on UltraSonic Electronics (USE2022)
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] c軸10°傾斜配向ZnOエピタキシャル薄膜における擬似横波励振特性2022
- Author(s)
  岸大貴, 柳谷隆彦
- Organizer
  日本音響学会第148回
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 耐電力性向上を目的とした分極反転ScAlN薄膜ブラッグ反射共振子2022
- Author(s)
  柴田真之, 柳谷隆彦
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Quasi-shear mode excitation of c-axis tilted MgZnO epitaxial thin film2022
- Author(s)
  H. Kishi and T. Yanagitani
- Organizer
  The 43rd Symposium on UltraSonic Electronics (USE2022)
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Epitaxial piezoelectric layer SMR fabricated using epitaxial sacrificial layer process2022
- Author(s)
  S. Kudo and T. Yanagitani
- Organizer
  IEEE IC-MAM 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] c軸傾斜MgZnO薄膜における擬似横波励振特性2022
- Author(s)
  島野耀康, 柳谷隆彦
- Organizer
  日本音響学会第148回
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] PZTエピタキシャル薄膜のZr/Ti比における機械的品質Qmの依存性2022
- Author(s)
  國信聡太, 清水祐樹, 柳谷隆彦
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Epitaxial piezoelectric layer SMR fabricated using epitaxial sacrificial layer process2022
- Author(s)
  S. Kudo and T. Yanagitani
- Organizer
  IEEE IC-MAM 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 耐電力性向上を目的とした分極反転ScAlN薄膜ブラッグ反射共振子2022
- Author(s)
  柴田真之, 柳谷隆彦
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] c軸ジグザグ配向ScAlN薄膜/Si基板構造におけるSAW伝搬特性2022
- Author(s)
  冨永卓海、高柳真司、柳谷隆彦
- Organizer
  第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] GHz electromechanical coupling hysteresis curves for ferroelectric ScAlN and epitaxial MgZnO films2022
- Author(s)
  N. Ishi and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] c軸20°傾斜配向MgZnOエピタキシャル薄膜の擬似横波励振特性2022
- Author(s)
  岸大貴, 柳谷隆彦
- Organizer
  超音波研究会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] GHz帯パルスエコー法による音響多層膜単体の機械特性評価2022
- Author(s)
  鈴木基嗣, 石井直輝, 近藤圭太, 柳谷隆彦
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] GHz 帯パルスエコー法による音響ブラッグ反射層単体の機械的通過特性の評価2022
- Author(s)
  近藤圭太、石井直輝、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2022
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] PbTiO3 エピ薄膜の基板裏面反射率測定を用いたGHz帯音響イメージングの高分解能化2022
- Author(s)
  佐藤裕友、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2022
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 分極反転多層デバイスに向けた極性制御MgZnO圧電薄膜の作製2022
- Author(s)
  島野耀康, 高柳真司, 柳谷隆彦
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] GHz帯パルスエコー法による音響多層膜単体の機械特性評価2022
- Author(s)
  鈴木基嗣, 石井直輝, 近藤圭太, 柳谷隆彦
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] (100)AgNbO3エピタキシャル薄膜/(100)STO基板のGHz帯超音波励振特性2022
- Author(s)
  浴田航平, 大森拳, 工藤慎也, 柳谷隆彦
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] IBAD c-axis parallel ZnO piezoelectric film stack?for gyroscope applications2022
- Author(s)
  S. Kudo and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] ウルツ鉱型強誘電体薄膜におけるGHz帯kt2-Eヒステリシス特性2022
- Author(s)
  石井直輝, 小林栞, 柳谷隆彦
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 基板付き薄膜共振子を用いたScAlN、ZnO、PZT圧電薄膜層のQ値抽出2022
- Author(s)
  清水祐樹, 柳谷隆彦
- Organizer
  超音波研究会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] c軸傾斜MgZnO薄膜における擬似横波励振特性2022
- Author(s)
  島野耀康, 柳谷隆彦
- Organizer
  日本音響学会第148回
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] LiNbO3スパッタエピ薄膜のGHz帯励振特性2022
- Author(s)
  工藤慎也, 柳谷隆彦
- Organizer
  超音波研究会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Fingerprint imaging using GHz PbTiO3 epitaxial thin film ultrasonic transducer2022
- Author(s)
  K. Nakamura and T. Yanagitani
- Organizer
  2022 US-Japan Seminar on Dielectric and Piezoelectric Ceramics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] エピ犠牲層を用いた音響ブラッグ反射器上へのエピ圧電層の形成2022
- Author(s)
  渡海智、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2022
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Fabrication of high kt2 and k’352 Sc0.4Al0.6N thin films by RF magnetron sputtering2022
- Author(s)
  Y. Shimizu and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] A method to evaluate the mechanical transmission loss of the sole Bragg reflector by using GHz pulse echo technique2022
- Author(s)
  N. ishi and T. Yanagitani
- Organizer
  IEEE IC-MAM 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Fingerprint imaging in GHz using PbTiO3 epitaxial piezoelectric thin films2022
- Author(s)
  Y. Koike and T. Yanagitani
- Organizer
  IEEE IC-MAM 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 高Q基板を用いた圧電薄膜/基板構造からの圧電薄膜層のQ値抽出2022
- Author(s)
  小林栞、清水祐樹、柳谷隆彦
- Organizer
  第69回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] SMR-type piezoelectric transformer based on c-axis zig-zag polarization inverted ScAlN multilayer2022
- Author(s)
  K. Shiraiwa and T. Yanagitani
- Organizer
  IEEE IUS 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] SAW デバイスへの応用に向けて Si 基板上に成長させた c 軸傾斜配向 ScAlN 薄膜2021
- Author(s)
  冨永卓海、高柳真司、柳谷隆彦
- Organizer
  The 42th Symposium on Ultrasonic Electronics (USE 2021)
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] PbTiO3エピタキシャル薄膜の基板裏面における反射率測定を用いたGHz帯指紋イメージング2021
- Author(s)
  佐藤裕友、石井直輝、柳谷隆彦
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] イオン照射を用いたScAlN薄膜の極性制御2021
- Author(s)
  工藤慎也、天野凌輔、柳谷隆彦
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Effect of Lateral Propagation on Extraction of Mechanical Q Factor of the Piezoelectric Films Without　Removing Substrate2021
- Author(s)
  Yuki Shimizu, Takahiko Yanagitani
- Organizer
  2021 IEEE International Ultrasonics Symposium (IUS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Precise Extraction of kt? for Piezoelectric Film/Substrate Structure by Unembedding Parasitic Inductance2021
- Author(s)
  Keita Kondo, Takahiko Yanagitani
- Organizer
  2021 IEEE International Ultrasonics Symposium (IUS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 自立構造 PbTiO3薄膜共振子における kt2ヒステリシスカーブの測定2021
- Author(s)
  國信聡太、岩田直也、柳谷隆彦
- Organizer
  第５０回ＥＭシンポジウム
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Measurement of GHz kt2 hysteresis curve in piezoelectric film/substrate structure without removing substrate2021
- Author(s)
  Takahiko Yanagitani
- Organizer
  8th PiezoMEMS Workshop
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] ブラッグ反射器を用いた厚みすべりモード c 軸ジグザグ ScAlN 積層型圧電トランス2021
- Author(s)
  白岩和剛、柳谷隆彦
- Organizer
  第５０回ＥＭシンポジウム
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] MgおよびCaドーピングによるZnO薄膜のUHF帯電気機械結合係数kt2の向上2021
- Author(s)
  泉航太、柳谷隆彦
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] GHz 帯 PbTiO3 エピ薄膜を用いた基板裏面での反射率測定によるイメージング2021
- Author(s)
  佐藤裕友、柳谷隆彦
- Organizer
  The 42th Symposium on Ultrasonic Electronics (USE 2021)
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] A Method for Evaluating Acoustic Bragg Reflector by Ultrasonic Microscope2021
- Author(s)
  Ishii Naoki, Keita Kondo, Takahiko Yanagitani
- Organizer
  2021 IEEE International Ultrasonics Symposium (IUS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] スパッタ法により作製した0.3mmの10MHz帯ScAlN薄板トランスデューサ2021
- Author(s)
  岩田直也、柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Effect of Epitaxial Stress in PbTiO3 Epitaxial Film Resonators on kt? Hysteresis Curve2021
- Author(s)
  Sota Kuninobu, Naoya Iwata, Takahiko Yanagitani
- Organizer
  2021 IEEE International Ultrasonics Symposium (IUS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] PbTiO3エピタキシャル薄膜の基板裏面における反射率測定を用いたGHz帯指紋イメージング2021
- Author(s)
  佐藤裕友、石井直輝、柳谷隆彦
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 5GHz 帯に向けた自立構造 ScAlN エピタキシャル薄膜共振子2021
- Author(s)
  関崚、柳谷隆彦
- Organizer
  第５０回ＥＭシンポジウム
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 窒化物強誘電体薄膜の BAW フィルタ応用とウエハ付きの圧電薄膜の kt2 および音速評価法2021
- Author(s)
  柳谷隆彦
- Organizer
  第38回強誘電体会議
- Invited
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] ジグザク配向 ScAlN 薄膜/Si 基板構造におけるレイリー波の伝搬特性解析2021
- Author(s)
  冨永卓海、高柳真司、柳谷隆彦
- Organizer
  第５０回ＥＭシンポジウム
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] PbTiO3エピ圧電薄膜を用いた基板裏面におけるGHz超音波の指紋イメージング2021
- Author(s)
  佐藤裕友、柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] c-Axis-Tilted ScAlN Film on Silicon Substrate for Surface Acoustic Wave Device2021
- Author(s)
  Takumi Tominaga, Shinji Takayanagi, Takahiko Yanagitani
- Organizer
  2021 IEEE International Ultrasonics Symposium (IUS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] エピタキシャルPbTiO3 自立薄膜共振子のGHz 帯圧電特性2021
- Author(s)
  渡海智、國信総太、柳谷隆彦
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] c軸傾斜配向ScAlN薄膜の横波反射率測定による液体の粘性評価2021
- Author(s)
  山下美穂、木下紗里那、柳谷隆彦
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] イオン照射を用いたScAlN薄膜の極性制御2021
- Author(s)
  工藤慎也、天野凌輔、柳谷隆彦
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 誘電率の異なる材料を組み合わせた圧電薄膜トランスの作製2021
- Author(s)
  岸大貴、木下紗里那、泉航太、柳谷隆彦
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Electromechanical coupling hysteresis curve of piezoelectric film/substrate structure in the GHz range2021
- Author(s)
  柳谷隆彦
- Organizer
  Materials Research Meeting 2021
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] Experimental and Theoretical Investigation of kt? and Velocity in YbGaN Films by DFT2021
- Author(s)
  Yuna Koike, Junjun Jia, Suzuki Masashi, Takahiko Yanagitani
- Organizer
  2021 IEEE International Ultrasonics Symposium (IUS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 0.1 mm Thick ScAlN Film: Application to MHz Transducer and Precise Lattice Constant Measurement2021
- Author(s)
  Ningrui Bai, Takahiko Yanagitani
- Organizer
  2021 IEEE International Ultrasonics Symposium (IUS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 誘電率の異なる材料を組み合わせた圧電薄膜トランスの作製2021
- Author(s)
  岸大貴、木下紗里那、泉航太、柳谷隆彦
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Detection of Protein Binding by Shear Mode Ultrasonic Reflection Coefficients Using c-Axis Tilted　ScAlN Film Above 100MHz2021
- Author(s)
  Yamashita Miho, Yanagitani Takahiko
- Organizer
  2021 IEEE International Ultrasonics Symposium (IUS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 基板付き圧電薄膜構造におけるkt2評価法に寄生インダクタンスが与える影響2021
- Author(s)
  山中恵理、近藤圭太、龍見亮汰、柳谷隆彦
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 基板付き圧電薄膜構造におけるkt2評価法に寄生インダクタンスが与える影響2021
- Author(s)
  山中恵理、近藤圭太、龍見亮汰、柳谷隆彦
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] c軸傾斜配向ScAlN薄膜の横波反射率測定による液体の粘性評価2021
- Author(s)
  山下美穂、木下紗里那、柳谷隆彦
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Comparison of the kt? Extraction Methods of Piezoelectric Films in Film/Substrate Structure and SelfStanding Film Structure2021
- Author(s)
  Yuki Shimizu, Keita Kondo, Takahiko Yanagitani
- Organizer
  2021 IEEE International Ultrasonics Symposium (IUS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] MgおよびCaドーピングによるZnO薄膜のUHF帯電気機械結合係数kt2の向上2021
- Author(s)
  泉航太、柳谷隆彦
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Thick Epitaxial ScAlN Film/ (111) Pt/ (0001) Sapphire Ultrasonic Transducer in the 30 MHz2021
- Author(s)
  Naoya Iwata, Takahiko Yanagitani
- Organizer
  2021 IEEE International Ultrasonics Symposium (IUS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] エピタキシャルPbTiO3 自立薄膜共振子のGHz 帯圧電特性2021
- Author(s)
  渡海智、國信総太、柳谷隆彦
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Epitaxial PbTiO3 Ultrasonic Transducer for Fingerprint Imaging in the Giga-Hertz Range Using the Reflectometry of Back Side of Substrate2021
- Author(s)
  Yusuke Sato, Takahiko Yanagitani
- Organizer
  2021 IEEE International Ultrasonics Symposium (IUS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] GHz BAW Piezoelectric Transformers for Passive Voltage Amplification Using the Epitaxial ZnO Thin Films2021
- Author(s)
  Hiroki Kishi, Shiori Kobayashi, Takahiko Yanagitani
- Organizer
  2021 IEEE International Ultrasonics Symposium (IUS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-21K18734
[Presentation] 基板付き圧電薄膜構造における変換損失kt2評価法に寄生インダクタンスが与える影響2020
- Author(s)
  近藤圭太、龍見亮汰、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2021
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] GHz BAW Piezoelectric Transformers with High Voltage Gain Using the Combination of High and Low Dielectric Constant Thin Films2020
- Author(s)
  S. Kinoshita, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] AlNとScAlN薄膜共振子の非線形性に起因する周波数シフトとDCバイアス時の格子ひずみの比較2020
- Author(s)
  五月女巧、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2021
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Enhancement of GHz Electromechanical Coupling Coefficient kt? of MgZnO and CaZnO Thin Film BAW Resonators2020
- Author(s)
  K. Izumi, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 基板へのイオン照射を抑制したスパッタ法によるZnO 薄膜形成と結晶性および圧電性への影響2020
- Author(s)
  富永浩平、高柳真司、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2021
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 厚膜成長と粉体化により応力を緩和したScAlNにおける結晶構造のSc濃度依存性2020
- Author(s)
  白寧蕊、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2021
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] c-Axis Oriented ScAlN/ SiO2 Multilayer BAW Transformer for Rectifying Antenna Applications2020
- Author(s)
  K. Izumi, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] ScAlN, ZnO, and PbTiO3 polarization inverted thin multilayers for BAW and SAW applications2020
- Author(s)
  T. Yanagitani
- Organizer
  The 41th Symposium on Ultrasonic Electronics (USE 2020)
- Invited
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] GHz帯PbTiO3エピ薄膜の基板裏面における反射率差を用いた指紋イメージング2020
- Author(s)
  佐藤裕友、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2021
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Zig-Zag ScAlN Multilayer SMR for High Power BAW Filter Application Such as RF Base Station2020
- Author(s)
  Y. Sato, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] GHz BAW Piezoelectric Transformers with High Voltage Gain Using the Combination of High and Low Dielectric Constant Thin Films2020
- Author(s)
  S. Kinoshita, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Deterioration in the Piezoelectric Property of ScAlN Thin Films by Negative Ion Bombardment Increased in Low-Pressure Sputtering Deposition2020
- Author(s)
  T. Tominaga, S. Takayanagi, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] イオンビームにより面内a軸方向を揃えたc軸配向AlN薄膜の成長2020
- Author(s)
  正宗千明、柳谷隆彦
- Organizer
  第67回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] ScAlN, ZnO, and PbTiO3 polarization inverted thin multilayers for BAW and SAW applications2020
- Author(s)
  T. Yanagitani
- Organizer
  The 41th Symposium on Ultrasonic Electronics (USE 2020)
- Invited
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 低圧スパッタ成膜で増大する負イオン照射がScAlN薄膜の結晶性と圧電性に及ぼす影響2020
- Author(s)
  冨永卓海、髙柳真司、柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] GHz帯PbTiO3エピ薄膜の基板裏面における反射率差を用いた指紋イメージング2020
- Author(s)
  佐藤裕友、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2021
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] PZT系エピタキシャル薄膜共振子の600 ?C以上の高温域における圧電特性2020
- Author(s)
  松田友佳、柳谷隆彦
- Organizer
  第67回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] スパッタ法によるPZT系膜を用いた高効率超音波トランスデューサ2020
- Author(s)
  佐藤裕友、柳谷隆彦
- Organizer
  第37回強誘電体応用会議
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] イオンビームにより面内a軸方向を揃えたc軸配向AlN薄膜の成長2020
- Author(s)
  正宗千明、柳谷隆彦
- Organizer
  第67回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] ZnO薄膜のMgおよびCaドーピングによるUHF帯電気機械結合係数kt2の向上2020
- Author(s)
  泉航太、柳谷隆彦
- Organizer
  第４９回ＥＭシンポジウム
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] スパッタ法によるPZT系膜を用いた高効率超音波トランスデューサ2020
- Author(s)
  佐藤裕友、柳谷隆彦
- Organizer
  第37回強誘電体応用会議
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 基板付き薄膜共振子の電磁結合信号もしくは音響信号を用いた変換損 kt2評価法の比較2020
- Author(s)
  龍見亮汰、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2020
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] GHz帯PZT系エピ薄膜トランスデューサを用いた指紋イメージング2020
- Author(s)
  佐藤裕友、柳谷隆彦
- Organizer
  第４９回ＥＭシンポジウム
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] c-Axis Oriented ScAlN/ SiO2 Multilayer BAW Transformer for Rectifying Antenna Applications2020
- Author(s)
  K. Izumi, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] c 軸配向 ZnO 薄膜を用いた極性反転共振子の圧電トランス応用2020
- Author(s)
  間島毅、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2020
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] レクテナ昇圧素子に向けたSMR型傾斜反転ScAlN圧電薄膜トランス2020
- Author(s)
  木下紗里那、柳谷隆彦
- Organizer
  第67回応用物理学会春季学術講演会
- Invited
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 窒化物強誘電体圧電薄膜材料の５Ｇ向けBAWフィルタ応用2020
- Author(s)
  柳谷隆彦
- Organizer
  第37回強誘電体応用会議
- Invited
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Experimental and Theoretical Investigation of kt? and Mechanical Quality Factor (Qm) in YbAlN Films Asing DFT2020
- Author(s)
  N. Iwata, S. Kinoshita, J. Jia, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] ScAlN Nano-Rods Structure Thin Film Grown by a Self-Shadowing Oblique Sputtering for High Electromechanical Coupling Transducer Applications2020
- Author(s)
  T. Soutome, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 基板へのイオン照射を抑制したスパッタ法によるZnO 薄膜形成と結晶性および圧電性への影響2020
- Author(s)
  富永浩平、高柳真司、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2021
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] PZT系エピタキシャル薄膜共振子の600 ?C以上の高温域における圧電特性2020
- Author(s)
  松田友佳、柳谷隆彦
- Organizer
  第67回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 負イオン発生抑制を目指したSc粒埋め込みAl金属ターゲットによる高配向ScAlN薄膜の成長と評価2020
- Author(s)
  岩田直也、木原流唯、高柳真司、柳谷隆彦
- Organizer
  第37回強誘電体応用会議
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Giga-Hertz Piezoelectric Epitaxial PZT/La-SrTiO3 Transducer for the Application of Fingerprint Imaging2020
- Author(s)
  Y. Sato, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics Symposium (IUS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 基板付き圧電薄膜構造における変換損失kt2評価法に寄生インダクタンスが与える影響2020
- Author(s)
  近藤圭太、龍見亮汰、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2021
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Effect of Negative-Ion-Bombardment Suppression by Applying Voltage to Grids Set Between Substrate and Sputtering Target During Sputtering Deposition on Crystalline Orientation of ZnO Film2020
- Author(s)
  K. Tominaga, S. Takayanagi, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics Symposium (IUS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] ウェハー状態の圧電薄膜共振子の基板内音響損失を除いた変換損 kt2 導出法2020
- Author(s)
  龍見亮汰、柳谷隆彦
- Organizer
  The 41th Symposium on Ultrasonic Electronics (USE 2020)
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Zig-Zag ScAlN Multilayer SMR for High Power BAW Filter Application Such as RF Base Station2020
- Author(s)
  Y. Sato, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Multilayer Piezoelectric ScAlN Film Transducers for Ultrasonic Microscopy in the VHF Range2020
- Author(s)
  Y. Korai, M. Suzuki, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics Symposium (IUS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 低圧スパッタ成膜で増大する負イオン照射がScAlN薄膜の結晶性と圧電性に及ぼす影響2020
- Author(s)
  冨永卓海、髙柳真司、柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] レクテナ昇圧素子に向けたSMR型傾斜反転ScAlN圧電薄膜トランス2020
- Author(s)
  木下紗里那、柳谷隆彦
- Organizer
  第67回応用物理学会春季学術講演会
- Invited
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Improvement of Crystallization and Shear-Mode Electromechanical Coupling of c-Axis-ParallelOriented ZnO Film by Annealing Treatment2020
- Author(s)
  S. Takayanagi, K. Kimoto, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 圧電トランス応用に向けたc軸配向極性反転ZnO薄膜共振子の作製2020
- Author(s)
  間島毅、柳谷隆彦
- Organizer
  第67回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Effect of Negative-Ion-Bombardment Suppression by Applying Voltage to Grids Set Between Substrate and Sputtering Target During Sputtering Deposition on Crystalline Orientation of ZnO Film2020
- Author(s)
  K. Tominaga, S. Takayanagi, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics Symposium (IUS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] E-3 円管構造 SH-SAW センサに向けた c 軸平行配向 ZnO 薄膜の石英ガラス管への成膜2020
- Author(s)
  若林拓也、高柳真司、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2021
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 自立薄膜共振子の作製を目指したPbTiO3エピタキシャル薄膜のMgO下地エッチング2020
- Author(s)
  國信聡太、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2021
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] レクテナ用の昇圧回路応用を目指した積層型圧電トランスのモデル化と試作2020
- Author(s)
  平澤直人、木下紗里那、柳谷隆彦
- Organizer
  第67回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] ScAlN Nano-Rods Structure Thin Film Grown by a Self-Shadowing Oblique Sputtering for High Electromechanical Coupling Transducer Applications2020
- Author(s)
  T. Soutome, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 低圧スパッタ成膜で増大する負イオン照射と ScAlN 薄膜の結晶性および圧電性の劣化2020
- Author(s)
  冨永卓海、高柳真司、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2021
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 傾斜反転ScAlN圧電薄膜を用いた積層型トランス2020
- Author(s)
  泉航太、木下紗里那、柳谷隆彦
- Organizer
  第37回強誘電体応用会議
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Extracting Mechanical Q Factor of the Pure AlN, ZnO, and ScAlN Film Without Etching Substrate2020
- Author(s)
  N. Iwata, S. Kinoshita, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics Symposium (IUS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] AlNとScAlNにおける非線形性に起因するDCバイアス時の周波数シフトおよび格子ひずみの比較2020
- Author(s)
  五月女巧、柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 基板付き薄膜共振子の電磁結合信号もしくは音響信号を用いた変換損 kt2評価法の比較2020
- Author(s)
  龍見亮汰、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2020
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] イオンビームにより面内a軸方向を揃えたc軸配向AlN薄膜の成長2020
- Author(s)
  正宗千明、柳谷隆彦
- Organizer
  第67回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Measurement of Time Response of Electrical Properties in Thickness Shear Mode Resonator with Liquid Loadings2020
- Author(s)
  M. Watabe, S. Takayanagi, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] c 軸配向 ZnO 薄膜を用いた極性反転共振子の圧電トランス応用2020
- Author(s)
  間島毅、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2020
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 圧電トランス応用に向けたc軸配向極性反転ZnO薄膜共振子の作製2020
- Author(s)
  間島毅、柳谷隆彦
- Organizer
  第67回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Measurement of Antiresonant Frequency During DC Bias Voltage Application for Analysis of Second Harmonic Response of ScAlN on SMR2020
- Author(s)
  T. Soutome, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] レクテナ昇圧素子に向けたScAlN/SiO2積層型圧電薄膜トランス2020
- Author(s)
  岸大貴、泉航太、木下紗里那、柳谷隆彦
- Organizer
  第４９回ＥＭシンポジウム
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] スパッタ成膜中に基板へ照射されるイオンの抑制をした ZnO 薄膜の形成と圧電性への影響2020
- Author(s)
  富永浩平、髙柳真司、柳谷隆彦
- Organizer
  The 41th Symposium on Ultrasonic Electronics (USE 2020)
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 円管構造 SH-SAW センサに向けた c 軸平行配向 ZnO 薄膜の石英ガラス管回転成膜2020
- Author(s)
  若林拓也、髙柳真司、柳谷隆彦
- Organizer
  The 41th Symposium on Ultrasonic Electronics (USE 2020)
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 圧電トランス応用に向けたc軸配向極性反転ZnO薄膜共振子の作製2020
- Author(s)
  間島毅、柳谷隆彦
- Organizer
  第67回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Accurate Extraction of kt? of Piezoelectric Film/Substrate Structure by Conversion Loss Method Subtracting Experimental Acoustic Losses in the Substrate2020
- Author(s)
  R. Tatsumi, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 低圧スパッタ成膜で増大する負イオン照射と ScAlN 薄膜の結晶性および圧電性の劣化2020
- Author(s)
  冨永卓海、高柳真司、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2021
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 窒化物強誘電体圧電薄膜材料の５Ｇ向けBAWフィルタ応用2020
- Author(s)
  柳谷隆彦
- Organizer
  第37回強誘電体応用会議
- Invited
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] PZT系エピタキシャル薄膜共振子の600 ?C以上の高温域における圧電特性2020
- Author(s)
  松田友佳、柳谷隆彦
- Organizer
  第67回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] ScAlスパッタターゲットから生じる負イオンがScAlN圧電薄膜の結晶配向性や電気機械結合係数に及ぼす影響2020
- Author(s)
  木原流唯、高柳真司、柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Enhancement of GHz Electromechanical Coupling Coefficient kt? of MgZnO and CaZnO Thin Film BAW Resonators2020
- Author(s)
  K. Izumi, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Extracting Mechanical Q Factor of the Pure AlN, ZnO, and ScAlN Film Without Etching Substrate2020
- Author(s)
  N. Iwata, S. Kinoshita, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics Symposium (IUS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Measurement of Time Response of Electrical Properties in Thickness Shear Mode Resonator with Liquid Loadings2020
- Author(s)
  M. Watabe, S. Takayanagi, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] GHz帯PZT系エピ薄膜トランスデューサを用いた指紋イメージング2020
- Author(s)
  佐藤裕友、柳谷隆彦
- Organizer
  第４９回ＥＭシンポジウム
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 基板付き薄膜共振子の基板内損失を含まない新規kt2評価法と従来法の比較2020
- Author(s)
  龍見亮汰、柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Giga-Hertz Piezoelectric Epitaxial PZT/La-SrTiO3 Transducer for the Application of Fingerprint Imaging2020
- Author(s)
  Y. Sato, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics Symposium (IUS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Experimental and Theoretical Investigation of kt? and Mechanical Quality Factor (Qm) in YbAlN Films Asing DFT2020
- Author(s)
  N. Iwata, S. Kinoshita, J. Jia, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] レクテナ用の昇圧回路応用を目指した積層型圧電トランスのモデル化と試作2020
- Author(s)
  平澤直人、木下紗里那、柳谷隆彦
- Organizer
  第67回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] c 軸配向 ZnO 薄膜を用いた極性反転共振子の圧電トランス応用2020
- Author(s)
  間島毅、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2020
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Self-Standing FBAR Transformer Based on Shear Mode Zig-Zag ScAlN Multilayer for Rectenna Application2020
- Author(s)
  S. Kinoshita, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] レクテナ用の昇圧回路応用を目指した積層型圧電トランスのモデル化と試作2020
- Author(s)
  平澤直人、木下紗里那、柳谷隆彦
- Organizer
  第67回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] PZT, ScAlN, MgZnOにおける圧電薄膜/基板構造からのGHz帯電気機械結合係数kt2の抽出A method for extracting kt2 of PZT, ScAlN, and MgZnO from piezoelectric film/substrate structure without removing substrate2020
- Author(s)
  柳谷隆彦
- Organizer
  日本MRS学会
- Invited
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] ZnO薄膜のMgおよびCaドーピングによるUHF帯電気機械結合係数kt2の向上2020
- Author(s)
  泉航太、柳谷隆彦
- Organizer
  第４９回ＥＭシンポジウム
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 自立薄膜共振子の作製を目指したPbTiO3エピタキシャル薄膜のMgO下地エッチング2020
- Author(s)
  國信聡太、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2021
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] AlNとScAlN薄膜共振子の非線形性に起因する周波数シフトとDCバイアス時の格子ひずみの比較2020
- Author(s)
  五月女巧、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2021
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] レクテナ昇圧素子に向けたScAlN/SiO2積層型圧電薄膜トランス2020
- Author(s)
  岸大貴、泉航太、木下紗里那、柳谷隆彦
- Organizer
  第４９回ＥＭシンポジウム
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Accurate Extraction of kt? of Piezoelectric Film/Substrate Structure by Conversion Loss Method Subtracting Experimental Acoustic Losses in the Substrate2020
- Author(s)
  R. Tatsumi, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Measurement of Antiresonant Frequency During DC Bias Voltage Application for Analysis of Second Harmonic Response of ScAlN on SMR2020
- Author(s)
  T. Soutome, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 傾斜反転ScAlN圧電薄膜を用いた積層型トランス2020
- Author(s)
  泉航太、木下紗里那、柳谷隆彦
- Organizer
  第37回強誘電体応用会議
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Extraction of kt? of Piezoelectric Film/Substrate Structure by Conversion Loss Derived by Electromagnetic Signal Including No Acoustic Losses2020
- Author(s)
  R. Tatsumi, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] レクテナ昇圧素子に向けた傾斜反転ScAlN圧電薄膜トランス2020
- Author(s)
  木下紗里那、柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 基板付き薄膜共振子の電磁結合信号もしくは音響信号を用いた変換損 kt2評価法の比較2020
- Author(s)
  龍見亮汰、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2020
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] スパッタ成膜中に基板へ照射されるイオンの抑制をした ZnO 薄膜の形成と圧電性への影響2020
- Author(s)
  富永浩平、髙柳真司、柳谷隆彦
- Organizer
  The 41th Symposium on Ultrasonic Electronics (USE 2020)
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] ScAlスパッタターゲットから生じる負イオンがScAlN圧電薄膜の結晶配向性や電気機械結合係数に及ぼす影響2020
- Author(s)
  木原流唯、高柳真司、柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] ウェハー状態の圧電薄膜共振子の基板内音響損失を除いた変換損 kt2 導出法2020
- Author(s)
  龍見亮汰、柳谷隆彦
- Organizer
  The 41th Symposium on Ultrasonic Electronics (USE 2020)
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Improvement of Crystallization and Shear-Mode Electromechanical Coupling of c-Axis-ParallelOriented ZnO Film by Annealing Treatment2020
- Author(s)
  S. Takayanagi, K. Kimoto, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 基板付きAlN、ScAlN、ZnO薄膜共振子の機械的Qm値の抽出2020
- Author(s)
  清水祐樹、木下紗里那、岩田直也、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2021
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] PZT, ScAlN, MgZnOにおける圧電薄膜/基板構造からのGHz帯電気機械結合係数kt2の抽出A method for extracting kt2 of PZT, ScAlN, and MgZnO from piezoelectric film/substrate structure without removing substrate2020
- Author(s)
  柳谷隆彦
- Organizer
  日本MRS学会招待講演
- Invited
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] レクテナ昇圧素子に向けた傾斜反転ScAlN圧電薄膜トランス2020
- Author(s)
  木下紗里那、柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Multilayer Piezoelectric ScAlN Film Transducers for Ultrasonic Microscopy in the VHF Range2020
- Author(s)
  Y. Korai, M. Suzuki, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics Symposium (IUS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 厚膜成長と粉体化により応力を緩和したScAlNにおける結晶構造のSc濃度依存性2020
- Author(s)
  白寧蕊、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2021
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] レクテナ昇圧素子に向けたSMR型傾斜反転ScAlN圧電薄膜トランス2020
- Author(s)
  木下紗里那、柳谷隆彦
- Organizer
  第67回応用物理学会春季学術講演会
- Invited
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Extraction of kt? of Piezoelectric Film/Substrate Structure by Conversion Loss Derived by Electromagnetic Signal Including No Acoustic Losses2020
- Author(s)
  R. Tatsumi, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 低圧スパッタ成膜において増大する負イオン照射が ScAlN 薄膜の圧電性に及ぼす影響2020
- Author(s)
  冨永卓海、髙柳真司、柳谷隆彦
- Organizer
  The 41th Symposium on Ultrasonic Electronics (USE 2020)
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] AlNとScAlNにおける非線形性に起因するDCバイアス時の周波数シフトおよび格子ひずみの比較2020
- Author(s)
  五月女巧、柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 低圧スパッタ成膜において増大する負イオン照射が ScAlN 薄膜の圧電性に及ぼす影響2020
- Author(s)
  冨永卓海、髙柳真司、柳谷隆彦
- Organizer
  The 41th Symposium on Ultrasonic Electronics (USE 2020)
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Deterioration in the Piezoelectric Property of ScAlN Thin Films by Negative Ion Bombardment Increased in Low-Pressure Sputtering Deposition2020
- Author(s)
  T. Tominaga, S. Takayanagi, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] E-3 円管構造 SH-SAW センサに向けた c 軸平行配向 ZnO 薄膜の石英ガラス管への成膜2020
- Author(s)
  若林拓也、高柳真司、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2021
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 円管構造 SH-SAW センサに向けた c 軸平行配向 ZnO 薄膜の石英ガラス管回転成膜2020
- Author(s)
  若林拓也、髙柳真司、柳谷隆彦
- Organizer
  The 41th Symposium on Ultrasonic Electronics (USE 2020)
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 基板付きAlN、ScAlN、ZnO薄膜共振子の機械的Qm値の抽出2020
- Author(s)
  清水祐樹、木下紗里那、岩田直也、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2021
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Self-Standing FBAR Transformer Based on Shear Mode Zig-Zag ScAlN Multilayer for Rectenna Application2020
- Author(s)
  S. Kinoshita, T. Yanagitani
- Organizer
  2020 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 負イオン発生抑制を目指したSc粒埋め込みAl金属ターゲットによる高配向ScAlN薄膜の成長と評価2020
- Author(s)
  岩田直也、木原流唯、高柳真司、柳谷隆彦
- Organizer
  第37回強誘電体応用会議
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 基板付き薄膜共振子の基板内損失を含まない新規kt2評価法と従来法の比較2020
- Author(s)
  龍見亮汰、柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] レクテナ昇圧素子に向けた傾斜反転ScAlN圧電薄膜HBAR型トランス2019
- Author(s)
  木下紗里那、柳谷隆彦
- Organizer
  第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] ScAlN Polarization Inverted Resonators and Enhancement of Kt2 in New YbAlN Materials for BAW Devices2019
- Author(s)
  T. Yanagitani
- Organizer
  2019 IEEE International Ultrasonics
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] スパッタ法によるScAlN厚膜を用いたVHF帯高効率超音波トランスデューサ2019
- Author(s)
  佐藤裕友、柳谷隆彦
- Organizer
  2019年電気学会電子・情報・システム部門大会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] ScAlN Free?standing 0.1 mm Piezoelectric Plates in the 30?50 MHz Resonance Frequency2019
- Author(s)
  C. Masamune, R. Karasawa and T. Yanagitani
- Organizer
  ICoSEM2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] A Method for Extracting Mechanical Q Factor of the Piezoelectric Film without Etching Substrate2019
- Author(s)
  S. Kinoshita and T. Yanagitani
- Organizer
  2019 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 巨大圧電性ScAlN厚膜の成長および粉体化による結晶構造解析2019
- Author(s)
  白寧蕊、柳谷隆彦
- Organizer
  粉体粉末冶金協会2019年度秋季大会
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Giant piezoelectricity and temperature characteristics of free-standing sputter-epitaxial PbTiO3 plates2019
- Author(s)
  Y. Mazda and T. Yanagitani
- Organizer
  The 13th Pacific Rim Conference of Ceramic Societies　(PACRIM13)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] CVDグラフェン上のRFスパッタc軸配向ScAlN薄膜の圧電特性2019
- Author(s)
  天野凌輔、柳谷隆彦
- Organizer
  第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] グラフェン上巨大圧電性ScAlN薄膜の弾性波デバイス応用2019
- Author(s)
  天野凌輔、柳谷隆彦
- Organizer
  2019年電気学会電子・情報・システム部門大会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Shear Mode Polarity Inverted ScAlN Multilayer for Application to BAW Transformer in Rectifying Antenna2019
- Author(s)
  S. Kinoshita and T. Yanagitani
- Organizer
  2019 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 自立構造エピタキシャル PbTiO3薄片の共振特性と温度特性2019
- Author(s)
  松田友佳、柳谷隆彦
- Organizer
  第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] CVDグラフェン上のRFスパッタc軸配向ScAlN薄膜の圧電特性2019
- Author(s)
  天野凌輔、柳谷隆彦
- Organizer
  第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Sc 粒埋め込みスパッタターゲットによる成膜中負イオン照射抑制と ScAlN 薄膜結晶性向上2019
- Author(s)
  白寧蕊、柳谷隆彦
- Organizer
  第４８回EMシンポジウム
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] イオンビーム成膜を用いた結晶配向制御と極性反転デバイス応用2019
- Author(s)
  柳谷隆彦
- Organizer
  弾性波素子技術第150委員会第156回委員会
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] レクテナ昇圧素子を目指したジグザグ配向ScAlN圧電薄膜トランス2019
- Author(s)
  木下紗里那、柳谷隆彦
- Organizer
  2019年電気学会電子・情報・システム部門大会
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] BAW type transformer with ScAlN multilayer for rectifying antenna2019
- Author(s)
  S. Kinoshita and T. Yanagitani
- Organizer
  The 13th Pacific Rim Conference of Ceramic Societies　(PACRIM13)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] YbAlN圧電薄膜のUHF帯における電気機械結合係数kt2の増幅2019
- Author(s)
  木原流唯、柳谷隆彦
- Organizer
  第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] レクテナ昇圧素子に向けた傾斜反転ScAlN圧電薄膜HBAR型トランス2019
- Author(s)
  木下紗里那、柳谷隆彦
- Organizer
  第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] ５Ｇのスマートフォン向けフィルタ（ＢＡＷ filter）の薄膜材料2019
- Author(s)
  柳谷隆彦
- Organizer
  粉体粉末冶金協会2019年度秋季大会
- Invited
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] レクテナ昇圧素子を目指したジグザグ配向ScAlN圧電薄膜トランス2019
- Author(s)
  木下紗里那、柳谷隆彦
- Organizer
  2019年電気学会電子・情報・システム部門大会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Ion Beam Induced A-Axis In-Plane Oriented C-Axis Oriented AlN Thin Film Growth for High-Q BAW Resonator Application2019
- Author(s)
  C. Masamune and T. Yanagitani
- Organizer
  2019 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 基板付き薄膜構造を用いた圧電薄膜の機械的品質Qm値の推定法2019
- Author(s)
  木下紗里那、柳谷隆彦
- Organizer
  2019年電気学会電子・情報・システム部門大会
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Estimation of the mechanical Q factor of the piezoelectric film without removing substrate2019
- Author(s)
  S. Kinoshita and T. Yanagitani
- Organizer
  International Workshop on Piezoelectric Materials and Applications in Actuators (IWPMA2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Ion Beam Induced A-Axis In-Plane Oriented C-Axis Oriented AlN Thin Film Growth for High-Q BAW Resonator Application2019
- Author(s)
  C. Masamune and T. Yanagitani
- Organizer
  2019 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Enhancement of Electromechanical Coupling kt2 in Rare Earth Doped AlN Films for Bulk Acoustic Wave Filter Applications2019
- Author(s)
  T. Yanagitani
- Organizer
  ICoSEM2019
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] ScAlN Polarization Inverted Resonators and Enhancement of Kt2 in New YbAlN Materials for BAW Devices2019
- Author(s)
  T. Yanagitani
- Organizer
  2019 IEEE International Ultrasonics
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Effect of Negative Ions Generation from Sputtering Target on Crystalline Orientation and Kt2 of ScAlN Thin Films2019
- Author(s)
  R. Kihara and T. Yanagitani
- Organizer
  2019 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] YbAlN圧電薄膜のUHF帯における電気機械結合係数kt2の増幅2019
- Author(s)
  木原流唯、柳谷隆彦
- Organizer
  第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Enhancement of Electromechanical Coupling kt2 in Rare Earth Doped AlN Films for Bulk Acoustic Wave Filter Applications2019
- Author(s)
  T. Yanagitani
- Organizer
  ICoSEM2019
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Measurement of lattice strain change in ScAlN piezoelectric films by XRD for kt 2 estimation without removing substrate2019
- Author(s)
  T. Sotome and T. Yanagitani
- Organizer
  The 13th Pacific Rim Conference of Ceramic Societies　(PACRIM13)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] レクテナ昇圧回路への応用を目指したc軸ジグザグ傾斜ScAlN圧電薄膜トランス2019
- Author(s)
  柳谷隆彦
- Organizer
  弾性波素子技術第150委員会第158回委員会
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Measurement of lattice strain change in ScAlN piezoelectric films by XRD for kt 2 estimation without removing substrate2019
- Author(s)
  T. Sotome and T. Yanagitani
- Organizer
  The 13th Pacific Rim Conference of Ceramic Societies　(PACRIM13)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] 基板付き薄膜構造を用いた圧電薄膜の機械的品質Qm値の推定法2019
- Author(s)
  木下紗里那、柳谷隆彦
- Organizer
  2019年電気学会電子・情報・システム部門大会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] ウエハ付き状態の圧電薄膜のBAWフィルタ向け評価法およびScAlN薄膜成長のノウハウ2019
- Author(s)
  柳谷隆彦
- Organizer
  圧電MEMS研究会第２０回研究会
- Invited
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Measurement of lattice strain change in ScAlN piezoelectric films by XRD for kt 2 estimation without removing substrate2019
- Author(s)
  T. Sotome and T. Yanagitani
- Organizer
  The 13th Pacific Rim Conference of Ceramic Societies　(PACRIM13)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] イオンビームアシストスパッタ法による a軸方向が揃った c 軸配向 AlN 薄膜の成長2019
- Author(s)
  正宗千明、柳谷隆彦
- Organizer
  第４８回EMシンポジウム
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 自立構造エピタキシャル PbTiO3薄片の共振特性と温度特性2019
- Author(s)
  松田友佳、柳谷隆彦
- Organizer
  第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] 基板付き薄膜構造を用いた圧電薄膜の機械的品質Qm値の推定法2019
- Author(s)
  木下紗里那、柳谷隆彦
- Organizer
  2019年電気学会電子・情報・システム部門大会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] ScAlN thin film stack for BAW transformer in rectifying antenna2019
- Author(s)
  S. Kinoshita and T. Yanagitani
- Organizer
  International Workshop on Piezoelectric Materials and Applications in Actuators (IWPMA2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Polarization inverted ScAlN films and new high kt2 YbAlN films for BAW device applications2019
- Author(s)
  Y. Mazda and T. Yanagitani
- Organizer
  The 13th Pacific Rim Conference of Ceramic Societies　(PACRIM13)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] 巨大圧電性ScAlN厚膜の成長および粉体化による結晶構造解析2019
- Author(s)
  白寧蕊、柳谷隆彦
- Organizer
  粉体粉末冶金協会2019年度秋季大会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] ５Ｇのスマートフォン向けフィルタ（ＢＡＷ filter）の薄膜材料2019
- Author(s)
  柳谷隆彦
- Organizer
  粉体粉末冶金協会2019年度秋季大会
- Invited
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] ウエハ付き状態の圧電薄膜のBAWフィルタ向け評価法およびScAlN薄膜成長のノウハウ2019
- Author(s)
  柳谷隆彦
- Organizer
  圧電MEMS研究会第２０回研究会
- Invited
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] ウエハ付き状態の圧電薄膜のBAWフィルタ向け評価法およびScAlN薄膜成長のノウハウ2019
- Author(s)
  柳谷隆彦
- Organizer
  圧電MEMS研究会第２０回研究会
- Invited
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] ５Ｇのスマートフォン向けフィルタ（ＢＡＷ filter）の薄膜材料2019
- Author(s)
  柳谷隆彦
- Organizer
  粉体粉末冶金協会2019年度秋季大会
- Invited
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] イオンビームアシストスパッタ法による a 軸方向の揃った c 軸配向 ScAlN 薄膜の成長2019
- Author(s)
  正宗千明、柳谷隆彦
- Organizer
  The 40th Symposium on Ultrasonic Electronics (USE 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Sc 粒埋め込みスパッタターゲットによる成膜中負イオン照射抑制と ScAlN 薄膜結晶性向上2019
- Author(s)
  白寧蕊、柳谷隆彦
- Organizer
  第４８回EMシンポジウム
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] 擬似すべりモードc軸傾斜配向ScAlN圧電薄膜を用いた複素反射率法による液体試料の粘弾性評価2019
- Author(s)
  天野凌輔、山川愉生、柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 微弱電波による環境発電用の新しい昇圧素子2019
- Author(s)
  柳谷隆彦
- Organizer
  JST 新技術説明会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] イオンビーム成膜を用いた結晶配向制御と極性反転デバイス応用2019
- Author(s)
  柳谷隆彦
- Organizer
  弾性波素子技術第150委員会第156回委員会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] PZT Family Epitaxial Thick Film for Ultrasonic Transducer at Frequencies Below 100MHz2019
- Author(s)
  Y. Mazda and T. Yanagitani
- Organizer
  ICoSEM2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] c軸配向ZnO薄膜成長におけるZn面またはO面極性制御および分極反転多層圧電デバイスへの応用2019
- Author(s)
  間島毅、柳谷隆彦
- Organizer
  粉体粉末冶金協会2019年度秋季大会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Improvement of crystalline orientation and kt2 of ScAlN thin films by suppression of negative ions generation from sputtering target2019
- Author(s)
  R. Kihara, S. Takayanagi and T. Yanagitani
- Organizer
  The 13th Pacific Rim Conference of Ceramic Societies　(PACRIM13)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] YbAlN圧電薄膜のUHF帯における電気機械結合係数kt2の増幅2019
- Author(s)
  木原流唯、柳谷隆彦
- Organizer
  第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 自立構造エピタキシャル PbTiO3薄片の高い電気機械結合係数と温度特性2019
- Author(s)
  松田友佳、柳谷隆彦
- Organizer
  The 40th Symposium on Ultrasonic Electronics (USE 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] イオンビームアシストスパッタ法による a軸方向が揃った c 軸配向 AlN 薄膜の成長2019
- Author(s)
  正宗千明、柳谷隆彦
- Organizer
  第４８回EMシンポジウム
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] 擬似すべりモードc軸傾斜配向ScAlN圧電薄膜を用いた複素反射率法による液体試料の粘弾性評価2019
- Author(s)
  天野凌輔、山川愉生、柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] レクテナ昇圧素子への応用を目指したc軸ジグザグ配向ScAlN圧電薄膜トランス2019
- Author(s)
  柳谷隆彦
- Organizer
  同志社大学　超音波応用科学研究センター7月例会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Sc 粒埋め込みスパッタターゲットによる成膜中負イオン照射抑制と ScAlN 薄膜結晶性向上2019
- Author(s)
  白寧蕊、柳谷隆彦
- Organizer
  第４８回EMシンポジウム
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Giant piezoelectricity and temperature characteristics of free-standing sputter-epitaxial PbTiO3 plates2019
- Author(s)
  Y. Mazda and T. Yanagitani
- Organizer
  The 13th Pacific Rim Conference of Ceramic Societies　(PACRIM13)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Effect of Negative Ions Generation from Sputtering Target on Crystalline Orientation and Kt2 of ScAlN Thin Films2019
- Author(s)
  R. Kihara and T. Yanagitani
- Organizer
  2019 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Estimation of the mechanical Q factor of the piezoelectric film without removing substrate2019
- Author(s)
  S. Kinoshita and T. Yanagitani
- Organizer
  International Workshop on Piezoelectric Materials and Applications in Actuators (IWPMA2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Shear Mode Polarity Inverted ScAlN Multilayer for Application to BAW Transformer in Rectifying Antenna2019
- Author(s)
  S. Kinoshita and T. Yanagitani
- Organizer
  2019 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] BAW type transformer with ScAlN multilayer for rectifying antenna2019
- Author(s)
  S. Kinoshita and T. Yanagitani
- Organizer
  The 13th Pacific Rim Conference of Ceramic Societies　(PACRIM13)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] 自立構造エピタキシャル PbTiO3薄片の高い電気機械結合係数と温度特性2019
- Author(s)
  松田友佳、柳谷隆彦
- Organizer
  The 40th Symposium on Ultrasonic Electronics (USE 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 超高周波帯超音波映像装置用プローブの新しい分極反転圧電薄膜材料2019
- Author(s)
  柳谷隆彦
- Organizer
  超音波計測に関する萌芽技術研究会
- Invited
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] グラフェン上巨大圧電性ScAlN薄膜の弾性波デバイス応用2019
- Author(s)
  天野凌輔、柳谷隆彦
- Organizer
  2019年電気学会電子・情報・システム部門大会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] A Method to Estimate Kt2 of Piezoelectric Films from the Change of Lattice Strain by XRD without Removing Substrate2019
- Author(s)
  T. Soutome and T. Yanagitani
- Organizer
  2019 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] グラフェン上巨大圧電性ScAlN薄膜の弾性波デバイス応用2019
- Author(s)
  天野凌輔、柳谷隆彦
- Organizer
  2019年電気学会電子・情報・システム部門大会
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] イオンビームアシストスパッタ法による a 軸方向の揃った c 軸配向 ScAlN 薄膜の成長2019
- Author(s)
  正宗千明、柳谷隆彦
- Organizer
  The 40th Symposium on Ultrasonic Electronics (USE 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 自立構造エピタキシャル PbTiO3薄片の共振特性と温度特性2019
- Author(s)
  松田友佳、柳谷隆彦
- Organizer
  第４８回EMシンポジウム
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Improvement of crystalline orientation and kt2 of ScAlN thin films by suppression of negative ions generation from sputtering target2019
- Author(s)
  R. Kihara, S. Takayanagi and T. Yanagitani
- Organizer
  The 13th Pacific Rim Conference of Ceramic Societies　(PACRIM13)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] A Method to Estimate Kt2 of Piezoelectric Films from the Change of Lattice Strain by XRD without Removing Substrate2019
- Author(s)
  T. Soutome and T. Yanagitani
- Organizer
  2019 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] レクテナ昇圧素子への応用を目指したc軸ジグザグ配向ScAlN圧電薄膜トランス2019
- Author(s)
  柳谷隆彦
- Organizer
  同志社大学　超音波応用科学研究センター7月例会
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] PZT Family Epitaxial Thick Film for Ultrasonic Transducer at Frequencies Below 100MHz2019
- Author(s)
  Y. Mazda and T. Yanagitani
- Organizer
  ICoSEM2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] イオンビーム成膜を用いた結晶配向制御と極性反転デバイス応用2019
- Author(s)
  柳谷隆彦
- Organizer
  弾性波素子技術第150委員会第156回委員会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 超高周波帯超音波映像装置用プローブの新しい分極反転圧電薄膜材料2019
- Author(s)
  柳谷隆彦
- Organizer
  超音波計測に関する萌芽技術研究会
- Invited
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] PZT Family Epitaxial Thick Film for Ultrasonic Transducer at Frequencies Below 100MHz2019
- Author(s)
  Y. Mazda and T. Yanagitani
- Organizer
  ICoSEM2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] c軸配向ZnO薄膜成長におけるZn面またはO面極性制御および分極反転多層圧電デバイスへの応用2019
- Author(s)
  間島毅、柳谷隆彦
- Organizer
  粉体粉末冶金協会2019年度秋季大会
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] A Method for Extracting Mechanical Q Factor of the Piezoelectric Film without Etching Substrate2019
- Author(s)
  S. Kinoshita and T. Yanagitani
- Organizer
  2019 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 自立構造エピタキシャル PbTiO3薄片の共振特性と温度特性2019
- Author(s)
  松田友佳、柳谷隆彦
- Organizer
  第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 巨大圧電性ScAlN厚膜の成長および粉体化による結晶構造解析2019
- Author(s)
  白寧蕊、柳谷隆彦
- Organizer
  粉体粉末冶金協会2019年度秋季大会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] レクテナ昇圧素子を目指したジグザグ配向ScAlN圧電薄膜トランス2019
- Author(s)
  木下紗里那、柳谷隆彦
- Organizer
  2019年電気学会電子・情報・システム部門大会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Polarization inverted ScAlN films and new high kt2 YbAlN films for BAW device applications2019
- Author(s)
  Y. Mazda and T. Yanagitani
- Organizer
  The 13th Pacific Rim Conference of Ceramic Societies　(PACRIM13)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] レクテナ昇圧素子への応用を目指したc軸ジグザグ配向ScAlN圧電薄膜トランス2019
- Author(s)
  柳谷隆彦
- Organizer
  同志社大学　超音波応用科学研究センター7月例会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Polarization inverted ScAlN films and new high kt2 YbAlN films for BAW device applications2019
- Author(s)
  Y. Mazda and T. Yanagitani
- Organizer
  The 13th Pacific Rim Conference of Ceramic Societies　(PACRIM13)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] 自立構造エピタキシャル PbTiO3薄片の共振特性と温度特性2019
- Author(s)
  松田友佳、柳谷隆彦
- Organizer
  第４８回EMシンポジウム
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] c軸配向ZnO薄膜成長におけるZn面またはO面極性制御および分極反転多層圧電デバイスへの応用2019
- Author(s)
  間島毅、柳谷隆彦
- Organizer
  粉体粉末冶金協会2019年度秋季大会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] レクテナ昇圧回路への応用を目指したc軸ジグザグ傾斜ScAlN圧電薄膜トランス2019
- Author(s)
  柳谷隆彦
- Organizer
  弾性波素子技術第150委員会第158回委員会
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] Improvement of crystalline orientation and kt2 of ScAlN thin films by suppression of negative ions generation from sputtering target2019
- Author(s)
  R. Kihara, S. Takayanagi and T. Yanagitani
- Organizer
  The 13th Pacific Rim Conference of Ceramic Societies　(PACRIM13)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] スパッタ法によるScAlN厚膜を用いたVHF帯高効率超音波トランスデューサ2019
- Author(s)
  佐藤裕友、柳谷隆彦
- Organizer
  2019年電気学会電子・情報・システム部門大会
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] CVDグラフェン上のRFスパッタc軸配向ScAlN薄膜の圧電特性2019
- Author(s)
  天野凌輔、柳谷隆彦
- Organizer
  第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Estimation of the mechanical Q factor of the piezoelectric film without removing substrate2019
- Author(s)
  S. Kinoshita and T. Yanagitani
- Organizer
  International Workshop on Piezoelectric Materials and Applications in Actuators (IWPMA2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] ScAlN Polarization Inverted Resonators and Enhancement of Kt2 in New YbAlN Materials for BAW Devices2019
- Author(s)
  T. Yanagitani
- Organizer
  2019 IEEE International Ultrasonics
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] レクテナ昇圧素子に向けた傾斜反転ScAlN圧電薄膜HBAR型トランス2019
- Author(s)
  木下紗里那、柳谷隆彦
- Organizer
  第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] A Method to Estimate Kt2 of Piezoelectric Films from the Change of Lattice Strain by XRD without Removing Substrate2019
- Author(s)
  T. Soutome and T. Yanagitani
- Organizer
  2019 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] ScAlN Free?standing 0.1 mm Piezoelectric Plates in the 30?50 MHz Resonance Frequency2019
- Author(s)
  C. Masamune, R. Karasawa and T. Yanagitani
- Organizer
  ICoSEM2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] ScAlN thin film stack for BAW transformer in rectifying antenna2019
- Author(s)
  S. Kinoshita and T. Yanagitani
- Organizer
  International Workshop on Piezoelectric Materials and Applications in Actuators (IWPMA2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] A Method for Extracting Mechanical Q Factor of the Piezoelectric Film without Etching Substrate2019
- Author(s)
  S. Kinoshita and T. Yanagitani
- Organizer
  2019 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] ScAlN Free?standing 0.1 mm Piezoelectric Plates in the 30?50 MHz Resonance Frequency2019
- Author(s)
  C. Masamune, R. Karasawa and T. Yanagitani
- Organizer
  ICoSEM2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] レクテナ昇圧回路への応用を目指したc軸ジグザグ傾斜ScAlN圧電薄膜トランス2019
- Author(s)
  柳谷隆彦
- Organizer
  弾性波素子技術第150委員会第158回委員会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] スパッタ法によるScAlN厚膜を用いたVHF帯高効率超音波トランスデューサ2019
- Author(s)
  佐藤裕友、柳谷隆彦
- Organizer
  2019年電気学会電子・情報・システム部門大会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Ion Beam Induced A-Axis In-Plane Oriented C-Axis Oriented AlN Thin Film Growth for High-Q BAW Resonator Application2019
- Author(s)
  C. Masamune and T. Yanagitani
- Organizer
  2019 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] BAW type transformer with ScAlN multilayer for rectifying antenna2019
- Author(s)
  S. Kinoshita and T. Yanagitani
- Organizer
  The 13th Pacific Rim Conference of Ceramic Societies　(PACRIM13)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Giant piezoelectricity and temperature characteristics of free-standing sputter-epitaxial PbTiO3 plates2019
- Author(s)
  Y. Mazda and T. Yanagitani
- Organizer
  The 13th Pacific Rim Conference of Ceramic Societies　(PACRIM13)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 超高周波帯超音波映像装置用プローブの新しい分極反転圧電薄膜材料2019
- Author(s)
  柳谷隆彦
- Organizer
  超音波計測に関する萌芽技術研究会
- Invited
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 微弱電波による環境発電用の新しい昇圧素子2019
- Author(s)
  柳谷隆彦
- Organizer
  JST 新技術説明会
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Effect of Negative Ions Generation from Sputtering Target on Crystalline Orientation and Kt2 of ScAlN Thin Films2019
- Author(s)
  R. Kihara and T. Yanagitani
- Organizer
  2019 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] イオンビームアシストスパッタ法による a 軸方向の揃った c 軸配向 ScAlN 薄膜の成長2019
- Author(s)
  正宗千明、柳谷隆彦
- Organizer
  The 40th Symposium on Ultrasonic Electronics (USE 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 微弱電波による環境発電用の新しい昇圧素子2019
- Author(s)
  柳谷隆彦
- Organizer
  JST 新技術説明会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Shear Mode Polarity Inverted ScAlN Multilayer for Application to BAW Transformer in Rectifying Antenna2019
- Author(s)
  S. Kinoshita and T. Yanagitani
- Organizer
  2019 IEEE International Ultrasonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] 自立構造エピタキシャル PbTiO3薄片の高い電気機械結合係数と温度特性2019
- Author(s)
  松田友佳、柳谷隆彦
- Organizer
  The 40th Symposium on Ultrasonic Electronics (USE 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 擬似すべりモードc軸傾斜配向ScAlN圧電薄膜を用いた複素反射率法による液体試料の粘弾性評価2019
- Author(s)
  天野凌輔、山川愉生、柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] 自立構造エピタキシャル PbTiO3薄片の共振特性と温度特性2019
- Author(s)
  松田友佳、柳谷隆彦
- Organizer
  第４８回EMシンポジウム
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] イオンビームアシストスパッタ法による a軸方向が揃った c 軸配向 AlN 薄膜の成長2019
- Author(s)
  正宗千明、柳谷隆彦
- Organizer
  第４８回EMシンポジウム
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] ScAlN thin film stack for BAW transformer in rectifying antenna2019
- Author(s)
  S. Kinoshita and T. Yanagitani
- Organizer
  International Workshop on Piezoelectric Materials and Applications in Actuators (IWPMA2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Enhancement of Electromechanical Coupling kt2 in Rare Earth Doped AlN Films for Bulk Acoustic Wave Filter Applications2019
- Author(s)
  T. Yanagitani
- Organizer
  ICoSEM2019
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02202
[Presentation] “Frequency switchable polarity inverted resonators based on cubic PMN-PT/tetragonal PZT epitaxial stack,”2018
- Author(s)
  T. Shimidzu and T. Yanagitani
- Organizer
  12th Japan-Korea Conference on Ferroelectrics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 最近のBAWデバイス(FBAR)の薄膜材料と評価手法2018
- Author(s)
  柳谷隆彦
- Organizer
  第６５回応用物理学会学術講演会
- Invited
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 「c 軸傾斜配向厚みすべりモード ScAlN 薄膜共振子を用いた生体高分子反応の検出」2018
- Author(s)
  矢崎花、唐澤嶺、吉田憲司、高柳真司、柳谷隆彦
- Organizer
  第４７回EMシンポジウム
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] “c-axis tilted ScAlN film shear mode resonators for biosensing,”2018
- Author(s)
  H. Yazaki, T. Sotome, S. Takayanagi, K. Yoshida and T. Yanagitani
- Organizer
  IEEE International Ultrasonics Symposium
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 「PZT エピ厚膜および ScAlN 厚膜を用いた 30-90 MHz 帯トランスデューサ」2018
- Author(s)
  正宗千明、松田友佳、唐澤嶺、清水貴博、柳谷隆彦
- Organizer
  第４７回EMシンポジウム
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] “ScAlN free-standing 0.1mm plates with 30-50 MHz resonance frequency,”2018
- Author(s)
  C. Masamune, R. Karasawa, and T. Yanagitani
- Organizer
  IEEE International Ultrasonics Symposium
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 最新のBAW デバイス材料の研究と応用2018
- Author(s)
  柳谷隆彦
- Organizer
  マイクロナノ先端技術交流会
- Invited
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] “PZT epitaxial thick film for ultrasonic transducer at frequencies below 100MHz,”2018
- Author(s)
  Y. Mazuda, T. Shimidzu, and T. Yanagitani
- Organizer
  IEEE International Ultrasonics Symposium
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] “High efficiency ultrasonic transducer using polarity inverted ZnO thin film,”2018
- Author(s)
  T. Majima, T. Shimidzu, and T. Yanagitani
- Organizer
  IEEE International Ultrasonics Symposium
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 「分極反転PZT/PTOエピ膜を用いた周波数スイッチナブルなGHz帯共振子」2018
- Author(s)
  清水貴博、森剛志、柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] “Polarity inverted ScAlN multilayer for application to transformer in rectifying antenna,”2018
- Author(s)
  R. Karasawa and T. Yanagitani
- Organizer
  IEEE International Ultrasonics Symposium
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 「基本モード/3 次モード間共振周波数比を用いた基板付き薄膜構造における圧電薄膜の kt抽出法と従来法との比較」2018
- Author(s)
  戸塚誠、柳谷隆彦
- Organizer
  第４７回EMシンポジウム
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 溶融及び焼結 ScAl 合金ターゲットからの負イオン照射が ScAlN 薄膜成長へ及ぼす影響2018
- Author(s)
  遠藤結佳、唐澤嶺、高柳真司、今川誠、森坂啓介、鈴木雄、柳谷隆彦
- Organizer
  第 39 回超音波エレクトロニクスの基礎と応用に関するシンポジウム
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] New BAW filter materials for 5G smart phone2018
- Author(s)
  T. Yanagitani
- Organizer
  LG化学 Tech Scouting Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] “Thick PZT epitaxial film growth for ultrasonic transducer application below 100 MHz" 12th Japan-Korea Conference on Ferroelectrics,”2018
- Author(s)
  Y. Mazda and T. Yanagitani
- Organizer
  12th Japan-Korea Conference on Ferroelectrics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] “Temperature characteristics of ScAlN/SiO2 BAW resonators,”2018
- Author(s)
  H.Igeta, M. Totsuka, M. Suzuki, and T. Yanagitani
- Organizer
  IEEE International Ultrasonics Symposium
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] c軸傾斜配向ScAlN薄膜を用いた擬似すべりモード基板付き共振子による液体試料のMHz帯-GHz帯にわたる粘性評価2018
- Author(s)
  山川愉生, 柳谷隆彦
- Organizer
  第65回応用物理学会春季学術講演会(日本、東京)
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] 「圧電トランス薄膜音響共振子による電波発電」2018
- Author(s)
  柳谷隆彦
- Organizer
  第4回分科会ワークショップ「革新的エナジー・ハーベスティングに向けた材料・デバイス技術」
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] “A method for extracting GHz electromechanical coupling coefficient from piezoelectric film/substrate structure without removing substrate,”2018
- Author(s)
  T. Yanagitani
- Organizer
  12th Japan-Korea Conference on Ferroelectrics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 「製法の異なるScAl合金スパッタターゲットから発生する負イオンがScAlN薄膜の特性に及ぼす影響～電子ビーム溶融、アーク溶融、焼結ScAl合金ターゲットの比較～」2018
- Author(s)
  唐澤嶺、高柳真司、遠藤結佳、今川　誠、森坂啓介、鈴木　雄、柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 「レクテナ昇圧素子への応用を目指したc軸ジグザグ配向ScAlN多層圧電薄膜共振子」2018
- Author(s)
  唐澤嶺、柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] c 軸傾斜配向すべりモード ScAlN 薄膜共振子を用いた生体反応検出2018
- Author(s)
  矢崎花、五月女巧、唐澤嶺、高柳真司、吉田憲司、柳谷隆彦
- Organizer
  第 39 回超音波エレクトロニクスの基礎と応用に関するシンポジウム
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 「c軸傾斜配向厚みすべりモードScAlN薄膜共振子を用いた液体中生体分子相互作用の検出」2018
- Author(s)
  矢崎花、五月女巧、唐澤　嶺、高柳真司、吉田憲司、柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 「Electromechanical coupling hysteresis curves of PZT epitaxial ferroelectric films determined by gigahertz ultrasonic method」2018
- Author(s)
  T. Yanagitani, T. Mori, K. Wasa
- Organizer
  12th Pacific Rim Conference on Ceramic and Glass Technology (PACRIM 12)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] c 軸傾斜配向 ScAlN 薄膜 / 音響多層膜構造の共振子を用いた 400MHz 付近における液体粘性評価2018
- Author(s)
  山川愉生、五月女巧、唐澤嶺、柳谷隆彦
- Organizer
  第 39 回超音波エレクトロニクスの基礎と応用に関するシンポジウム
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] “The influence of negative ions generation on the arc-melted and hot press sintered ScAlN alloy targets to the crystalline orientation and kt2 of the ScAlN films,”2018
- Author(s)
  Y. Endo, R. Karasawa, S. Takayanagi, M.Imakawa, K. Morisaka, and T. Yanagitani
- Organizer
  IEEE International Ultrasonics Symposium
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 基板付き薄膜構造における高次モード間共振周波数比を用いた圧電薄膜の kt 2 評価法2018
- Author(s)
  戸塚誠、柳谷隆彦
- Organizer
  第 39 回超音波エレクトロニクスの基礎と応用に関するシンポジウム
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] “Polarity inverted high efficiency ultrasonic transducer with (0001)ZnO/(000-1)ZnO/SiO2 glass buffer rod,”2018
- Author(s)
  T. Majima, T. Shimidzu, and T. Yanagitani
- Organizer
  International Workshop on Piezoelectric Materials and Applications in Actuators(IWPMA2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 「溶融および焼結 ScAl 合金スパッタターゲットから発生する負イオンが ScAlN 薄膜の成長に及ぼす影響」2018
- Author(s)
  唐澤嶺、遠藤結佳、高柳真司、今川誠、森坂啓介、鈴木雄、柳谷隆彦
- Organizer
  第４７回EMシンポジウム
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 大きな圧電性を持つ ScAlN 自立薄板を用いた 30?40 MHz 帯振動子2018
- Author(s)
  正宗千明、唐澤嶺、柳谷隆彦
- Organizer
  第 39 回超音波エレクトロニクスの基礎と応用に関するシンポジウム
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 「ScAlN, ZnOおよびPZT系薄膜の極性制御と分極反転デバイスへの応用」2018
- Author(s)
  清水貴博、柳谷隆彦
- Organizer
  第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 「c軸傾斜配向ScAlN薄膜/音響多層膜構造の共振子を用いたUHF帯における液体粘性評価」2018
- Author(s)
  山川愉生、五月女巧、唐澤嶺、柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 「FBARフィルタ用の圧電薄膜材料の進展とウエハの評価手法」2018
- Author(s)
  柳谷隆彦
- Organizer
  第168回電子セラミック・プロセス研究会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 分極反転電圧薄膜の成長と応用～レクテナ昇回路へ検討～2018
- Author(s)
  柳谷隆彦
- Organizer
  第４６回ＥＭシンポジウム
- Invited
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 「ウエハ付きAs-grown圧電薄膜のRFフィルタ向け特性評価法およびScAlN薄膜の成長ノウハウ」2018
- Author(s)
  柳谷隆彦
- Organizer
  アルバックシンポジウム
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 大きな電気機械結合係数 (kt 2 =22%) を持つ ScAlN 薄膜2018
- Author(s)
  白寧蕊、正宗千明、唐澤嶺、柳谷隆彦
- Organizer
  第 39 回超音波エレクトロニクスの基礎と応用に関するシンポジウム
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] “A new method for extracting Qfactor of the piezoelectric film without removing substrate,”2018
- Author(s)
  S. Kinoshita, M. Totsuka, R. Karasawa, and T. Yanagitani
- Organizer
  IEEE International Ultrasonics Symposium
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 「最新の窒化物BAWフィルタの動向と酸化物圧電薄膜の位置づけ」2018
- Author(s)
  柳谷隆彦
- Organizer
  第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 「抗電界差により周波数スイッチナブルとなるPZT/PbTiO3分極反転エピタキシャル薄膜音響共振子」2018
- Author(s)
  清水貴博、柳谷隆彦
- Organizer
  第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 分極反転圧電薄膜材料の進展と超音波デバイス応用2018
- Author(s)
  柳谷隆彦
- Organizer
  日本音響学会研究発表会
- Invited
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 周波数スイッチナブルフィルタを目指した分極反転 PZT/PbTiO3エピタキシャル薄膜共振子2018
- Author(s)
  清水貴博、森剛志、柳谷隆彦
- Organizer
  第 39 回超音波エレクトロニクスの基礎と応用に関するシンポジウム
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 「(0001)ScAlN/(000-1)ZnO 極性反転構造を用いた 2 次モードトランスデューサの水中放射特性」2018
- Author(s)
  間島毅、清水貴博、柳谷隆彦
- Organizer
  第４７回EMシンポジウム
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 擬似すべりモードc軸傾斜配向ScAlN薄膜を用いた複素反射率測定による液体試料のUHF帯粘弾性評価2018
- Author(s)
  山川愉生, 柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2018(日本、宮城)
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] “Evaluation of viscoelactic properties of liquids based on the oblique incidence technology using shear horizontal waves at frequencies above 100 megahertz from c-axis tilted ScAlN thin films,”2018
- Author(s)
  Y. Yamakawa and T. Yanagitani
- Organizer
  IEEE International Ultrasonics Symposium
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 「Pb(Zrx,Ti1-x)O3スパッタエピ膜における MPB 特性発現の検証」2018
- Author(s)
  野田隆太、清水貴博、和佐清孝、柳谷隆彦
- Organizer
  第４７回EMシンポジウム
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] “Thick PZT epitaxial film and ScAlN film for ultrasonic transducer below 100 MHz,”2018
- Author(s)
  Y. Mazda, C. Masamune, R. Karasawa, T. Shimidzu, and T. Yanagitani
- Organizer
  International Workshop on Piezoelectric Materials and Applications in Actuators(IWPMA2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 圧電トランス薄膜音響共振子による電波発電2018
- Author(s)
  柳谷隆彦
- Organizer
  第4回分科会ワークショップ
- Invited
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] c軸傾斜配向ScAlN薄膜を用いた横波超音波の斜入射による液体試料のVHF帯粘弾性評価2018
- Author(s)
  山川愉生, 柳谷隆彦
- Organizer
  第65回応用物理学会春季学術講演会(日本、東京)
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] “Comparison of kt2 extraction method from film/substrate structure by using the ratio of resonant frequencies with conventional methods,”2018
- Author(s)
  M. Totsuka and T. Yanagitani
- Organizer
  International Workshop on Piezoelectric Materials and Applications in Actuators(IWPMA2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 「周波数スイッチナブルフィルタを目指した常誘電相PMN-PT/強誘電相PZT分極反転エピ膜音響共振子」2018
- Author(s)
  清水貴博、柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] “Extraction of electromechanical coupling coefficient of film / substrate structure by using the ration of a third mode resonant frequency to a fundamental mode resonant frequency,”2018
- Author(s)
  M. Totsuka and T. Yanagitani
- Organizer
  IEEE International Ultrasonics Symposium
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] PZT エピタキシャル厚膜を用いた 80 MHz 帯の超音波トランスデューサ2018
- Author(s)
  松田友佳、清水貴博、柳谷隆彦
- Organizer
  第 39 回超音波エレクトロニクスの基礎と応用に関するシンポジウム
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] “DC-induced piezoelectric cubic PMN-PT/piezoelectric tetragonal PZT epitaxial stack polarity inverted resonators for frequency switchable filters,”2018
- Author(s)
  T. Shimidzu and T. Yanagitani
- Organizer
  IEEE International Ultrasonics Symposium
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 「基板付き圧電薄膜の機械的品質係数 Q 値評価の検討」2018
- Author(s)
  木下紗里那、戸塚誠、唐澤嶺、柳谷隆彦
- Organizer
  第４７回EMシンポジウム
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] 「基板付き薄膜共振子からの新規kt2評価法と従来法の比較～共振周波数比法、変換損失法、共振スペクトル法、共振反共振法～」2018
- Author(s)
  戸塚誠、柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] “Investigation of MPB in Pb(Zrx,Ti1-x)O3 epitaxial films by RF magnetron sputtering growth,”2018
- Author(s)
  R. Noda and T. Yanagitani
- Organizer
  12th Japan-Korea Conference on Ferroelectrics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K19037
[Presentation] Polarity inverted PZT/PbTiO3 ferroelectric epitaxial film for frequency switchable resonator filters"2017
- Author(s)
  T. Shimizu; T.Mori, M. Suzuki; T. Yanagitani, and K. Wasa
- Organizer
  12th Pacific Rim Conference on Ceramic and Glass Technology (PACRIM 12)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Broadband frequency viscosity measurement using low TCF shear mode resonators consisting of c-axis tilted ScAlN thin film on thick AT-Cut quartz plate2017
- Author(s)
  Y. Yamakawa, K. Sano, R. Karasawa, and T. Yanagitani
- Organizer
  The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers'17)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] 抗電界差による基本モード/高次モード周波数切替可能なPZT/PTエピ膜分極反転共振子2017
- Author(s)
  清水貴博、森剛志、柳谷隆彦、和佐清孝
- Organizer
  圧電材料・デバイスシンポジウム2017
- Place of Presentation
  東北大学カタールサイエンスキャンパスホール
- Year and Date
  2017-02-06
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] Thick ScAlN film for high efficient ultrasonic transducer in low frequency of 81 MHz2017
- Author(s)
  K.-H. Sano, R. Karasawa, and T. Yanagitani
- Organizer
  The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers'17)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Electromechanical coupling hysteresis curves of PZT epitaxial ferroelectric films determined by gigahertz ultrasonic method2017
- Author(s)
  T. Yanagitani, T. Mori, K. Wasa
- Organizer
  12th Pacific Rim Conference on Ceramic and Glass Technology (PACRIM 12)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] A new type wide-frequency-range shear viscosity sensor using caxis tilted ScAlN thin film on temperature stable AT-cut quartz thick plate,2017
- Author(s)
  Y. Yamakawa, K-h. Sano, R. Karasawa, and T. Yanagitani
- Organizer
  2017 IEEE International Ultrason. Symp.
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Liquid gigahertz viscosity sensors using shear mode c-axis tilted ScAlN piezoelectric thin films2017
- Author(s)
  Y. Yamakawa, R. Karasawa; T. Mori; K. Sano; M. Suzuki and T. Yanagitani
- Organizer
  12th Pacific Rim Conference on Ceramic and Glass Technology (PACRIM 12)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] 最近のBAWデバイス(FBAR)の薄膜材料と評価手法2017
- Author(s)
  柳谷隆彦
- Organizer
  第６５回応用物理学会学術講演会
- Invited
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] 単結晶PZT/PTエピタキシャル薄膜を用いた周波数切り替え可能な共振子2017
- Author(s)
  森剛志、高柳真司、清水貴博、柳谷隆彦
- Organizer
  2017年電子情報通信学会総合大会
- Place of Presentation
  名城大学　天白キャンパス
- Year and Date
  2017-03-22
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] “Effects of highly energetic negative ions generated from Sc grains during sputtering deposition on electromechanical properties of ScAlN film”2017
- Author(s)
  S. Takayanagi, T. Yanagitani
- Organizer
  The 38th Symposium on Ultrasonic Electronics
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] 分極反転圧電薄膜材料の進展と超音波デバイス応用2017
- Author(s)
  柳谷隆彦、唐澤嶺
- Organizer
  2017年秋季日本音響学会研究発表会
- Invited
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] C-axis zig-zag polarization inverted ScAlN multilayer for FBAR transformer rectifying antenna,2017
- Author(s)
  R. Karasawa, and T. Yanagitani
- Organizer
  2017 IEEE International Ultrason. Symp.
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] c軸傾斜配向ScAlN膜/ATカット水晶基板構造の低TCF横波共振子を用いた広帯域周波数粘度測定2017
- Author(s)
  山川愉生、佐野耕平、唐澤嶺、森剛志、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2017
- Place of Presentation
  東北大学カタールサイエンスキャンパスホール
- Year and Date
  2017-02-06
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] DC field-induced piezoelectricity of cubic perovskite 0.95Pb(Mg1/3Nb2/3)O3-0.05PbTiO3 epitaxial film for RF switchable resonator,2017
- Author(s)
  T.Shimidzu, K.Wasa, and T. Yanagitani,
- Organizer
  IUMRS-ICA2017
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] “Induced electrical potentials in cortical bone under shear ultrasound exposure2017
- Author(s)
  T. Makino, K. Takano , S. Nakanishi , D. Koyama, S. Takayanagi , T. Yanagitani , M. Matsukawa
- Organizer
  The 38th Symposium on Ultrasonic Electronics
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] c軸傾斜配向ScAlN膜/ブラック反射層構造のGHz帯厚みすべりモード共振子を用いた液体粘性評価2017
- Author(s)
  唐澤嶺、山川愉生、森剛志、矢﨑花、佐野耕平、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2017
- Place of Presentation
  東北大学カタールサイエンスキャンパスホール
- Year and Date
  2017-02-06
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] Quantitative thickness measurement in polarity-inverted piezoelectric layered thin film using scanning nonlinear dielectric microscopy2017
- Author(s)
  H. Odagawa, K. Terada, H. Nishikawa, Y. Tanaka, T. Yanagitani and Y. Cho
- Organizer
  2017 Joint IEEE ISAF - IWATMD - PFM (26th International Symposium on Applications of Ferroelectrics (ISAF))
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K04725
[Presentation] c-Axis tilted ScAlN film on sapphire substrate for SAW devices with high electromechanical coupling2017
- Author(s)
  S. Tokuda, S. Takayanagi, M. Matsukawa, T. Yanagitani
- Organizer
  The 38th Symposium on Ultrasonic Electronics
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] RFマグネトロンスパッタ法を用いて作製したc軸平行配向ZnO膜の圧電不活性層低減に関する検討2017
- Author(s)
  盛一馬、高柳真司、松川真美、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2017
- Place of Presentation
  東北大学カタールサイエンスキャンパスホール
- Year and Date
  2017-02-06
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] High efficiency ScAlN thick film hydrophone operating in the ranges of 40-80 MHz2017
- Author(s)
  K-h. Sano, R. Karasawa, T. Yanagitani
- Organizer
  The 38th Symposium on Ultrasonic Electronics
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] 高電気機械結合係数を持つ80MHz 帯 ScAlN 厚膜のハイドロフォン応用への検討2017
- Author(s)
  佐野耕平，唐澤嶺，柳谷隆彦
- Organizer
  第４６回ＥＭシンポジウム
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] The frequency wwitchable multi-layered BST/BaTiO3 epitaxial film resonator,2017
- Author(s)
  T. Shimidzu, T. Yanagitani, K. Wasa
- Organizer
  2017 IEEE International Ultrason. Symp.
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] 分極反転圧電薄膜の成長と応用～レクテナ昇回路へ検討～2017
- Author(s)
  柳谷隆彦、唐澤嶺
- Organizer
  第４６回ＥＭシンポジウム
- Invited
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Polarity inverted ScAlN films for application to transformer in rectenna2017
- Author(s)
  R. Karasawa, T. Yanagitani
- Organizer
  The 38th Symposium on Ultrasonic Electronics
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] c軸傾斜配向ScAlN膜/ATカット水晶基板構造の低TCF横波共振子を用いた広帯域周波数粘度測定2017
- Author(s)
  山川愉生、佐野耕平、唐澤嶺、森剛志、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2017
- Place of Presentation
  東北大学カタールサイエンスキャンパスホール
- Year and Date
  2017-02-06
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] 最新のBAW デバイス材料の研究と応用2017
- Author(s)
  柳谷隆彦
- Organizer
  マイクロナノ先端技術交流会
- Invited
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] 抗電界差による基本モード/高次モード周波数切替可能なPZT/PTエピ膜分極反転共振子2017
- Author(s)
  清水貴博、森剛志、柳谷隆彦、和佐清孝
- Organizer
  圧電材料・デバイスシンポジウム2017
- Place of Presentation
  東北大学カタールサイエンスキャンパスホール
- Year and Date
  2017-02-06
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Simple and rapid measurement of hypersonic wave velocity by Brillouin scattering method2017
- Author(s)
  Y. Shibagaki, M. Kawabe, S. Takayanagi, T. Yanagitani
- Organizer
  The 38th Symposium on Ultrasonic Electronics
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] PMN paraelectric phase epitaxial film for DC field-induced frequency switchable filter2017
- Author(s)
  T. Shimidzu, K. Wasa , T. Yanagitani
- Organizer
  The 38th Symposium on Ultrasonic Electronics
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] High electromechanical coupling thick ScAlN piezoelectric films for ultrasonic generation in low frequency of 80MHz2017
- Author(s)
  K. Sano, R. Karasawa, and T. Yanagitani
- Organizer
  12th Pacific Rim Conference on Ceramic and Glass Technology (PACRIM 12)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] 電気機械結合係数 kt2=19%のScAlN厚膜を用いた低周波帯80 MHzトランスデューサ2017
- Author(s)
  佐野耕平、唐澤嶺、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2017
- Place of Presentation
  東北大学カタールサイエンスキャンパスホール
- Year and Date
  2017-02-06
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] Effects of negative oxygen ions generated during Sc ingot sputtering on electromechanical coupling of ScAlN film2017
- Author(s)
  S. Takayanagi, M. Matsukawa, T. Yanagitani
- Organizer
  2017 IEEE International Ultrason. Symp.
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Simultaneous viscosity evaluation in the MHz to GHz range with low TCF resonators consisting of shear mode piezoelectric thin films on AT-cut quartz crystal”2017
- Author(s)
  Y. Yamakawa, R. Karasawa, T. Shimidzu ,T. Yanagitani
- Organizer
  The 38th Symposium on Ultrasonic Electronics
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] c 軸傾斜配向 ScAlN/AT カット水晶基板構造の低 TCF 横波 HBAR を用いた MHz 帯-GHz 帯粘性評価2017
- Author(s)
  山川愉生, 佐野耕平, 唐澤嶺, 柳谷隆彦
- Organizer
  第４６回ＥＭシンポジウム
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Film growth of c-axis tilted ScAlN on the sapphire substrate for SAW devices,”2017
- Author(s)
  S. Tokuda, S. Takayanagi, M. Matsukawa, T. Yanagitani,
- Organizer
  2017 IEEE International Ultrason. Symp.
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] c軸傾斜配向ScAlN膜/ブラック反射層構造のGHz帯厚みすべりモード共振子を用いた液体粘性評価2017
- Author(s)
  唐澤嶺、山川愉生、森剛志、矢﨑花、佐野耕平、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2017
- Place of Presentation
  東北大学カタールサイエンスキャンパスホール
- Year and Date
  2017-02-06
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Film Growth of C-Axis parallel oriented ZnO on entire surface of silica glass pipe for SH-SAW pipe sensor2017
- Author(s)
  Y. Takamura, S. Takayanagi, M. Matsukawa, Chizu Ishida, and T. Yanagitani,
- Organizer
  2017 IEEE International Ultrason. Symp.
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] 電気機械結合係数 kt2=19%のScAlN厚膜を用いた低周波帯80 MHzトランスデューサ2017
- Author(s)
  佐野耕平、唐澤嶺、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2017
- Place of Presentation
  東北大学カタールサイエンスキャンパスホール
- Year and Date
  2017-02-06
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] ウルツ鉱型圧電薄膜による横波を用いたMHz-GHz帯における液体の粘性評価2017
- Author(s)
  山川愉生, 清水貴博, 唐澤嶺, 柳谷隆彦
- Organizer
  日本音響学会2017秋季研究発表会 (日本, 愛媛)
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Film growth of c-axis parallel oriented ZnO films by RF magnetron sputtering for improvement of electromechanical properties2017
- Author(s)
  K. Mori, S. Takayanagi, M. Matsukawa, T. Yanagitani
- Organizer
  The 38th Symposium on Ultrasonic Electronics
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Frequency switchable multi-layered paraelectric-BST/ferroelectric-BaTiO3 stack epitaxial film resonator2017
- Author(s)
  R.Noda, T.Shimidzu, K.Wasa, and T. Yanagitani
- Organizer
  IUMRS-ICA2017
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] High electromechanical coefficient kt 2=19% thick ScAlN piezoelectric films for ultrasonic transducer in low frequency of 80 MHz,2017
- Author(s)
  K-h. Sano, R. Karasawa, and T. Yanagitani
- Organizer
  2017 IEEE International Ultrason. Symp.
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] RFマグネトロンスパッタ法を用いて作製したc軸平行配向ZnO膜の圧電不活性層低減に関する検討2017
- Author(s)
  盛一馬、高柳真司、松川真美、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2017
- Place of Presentation
  東北大学カタールサイエンスキャンパスホール
- Year and Date
  2017-02-06
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] 単結晶PZT/PTエピタキシャル薄膜を用いた周波数切り替え可能な共振子2017
- Author(s)
  森剛志、高柳真司。清水貴博、柳谷隆彦
- Organizer
  2017年電子情報通信学会総合大会
- Place of Presentation
  名城大学　天白キャンパス
- Year and Date
  2017-03-22
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] Electromechanical coupling hysteresis curves of Pb(Zr,Ti)O3 epitaxial films determined by GHz ultrasonic method using film/substrate structure2016
- Author(s)
  Takahiko Yanagitani and Masashi Suzuki
- Organizer
  13th International Workshop on Piezoelectric Materials and Applications in Actuators & Energy Conversion Materials and Devices 2016
- Place of Presentation
  Seogwipo KAL Hotel, Jeju, Korea
- Year and Date
  2016-08-21
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Electromechanicalcoupling hysteresis curvesof Pb(Zr,Ti)O3and PbTiO3epitaxial films determinedby ultrasonic measurementusing film/substratestructure2016
- Author(s)
 T. Mori, M. Suzuki, S. Takayanagi, T. Yanagitani
- Organizer
 2016 IEEE International Ultrason. Symp
- Place of Presentation
 VINCI convention center, Tours
- Year and Date
 2016-09-18
- Int'l Joint Research
- Data Source
 KAKENHI-PROJECT-16H04356
[Presentation] High electromechanical coupling of Sezawa mode SAW in c-axis-parallel-oriented ScAlN film/high-velocitysubstrate structures2016
- Author(s)
  S. Takayanagi, M. Matsukawa, T. Yanagitani
- Organizer
  2016 IEEE International Ultrason. Symp
- Place of Presentation
  VINCI convention center, Tours
- Year and Date
  2016-09-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] c-axis tilted ScAlN shear wave acoustic Bragg reflect resonator for gigahertz viscosity measurement2016
- Author(s)
  Takeshi Mori, Yui Yamakawa, Rei Karasawa, Ko-hei Sano,Takahiko Yanagitani, Shinji Takanayanagi
- Organizer
  5th Joint Meeting of the Acoustical Society of America and Acoustical Society of Japan
- Place of Presentation
  Hilton Hawaiian Village
- Year and Date
  2016-11-28
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] High electromechanical coupling of sezawa mode SAW using a polarization-inverted ScAlN film/highvelocity substrate structure2016
- Author(s)
  Shinji Takayanagi, Takahiko Yanagitani
- Organizer
  The 37th Symposium on Ultrasonic Electronics
- Place of Presentation
  釜慶大学
- Year and Date
  2016-11-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Quantitative Thickness Measurement in Layered Polarity-Inverted Piezoelectric Thin Films Using Scanning Nonlinear Dielectric Microscopy2016
- Author(s)
  Koshiro Terada, Hiroaki Nishikawa, Yohei Tanaka1, Hiroyuki Odagawa1, Takahiko Yanagitani, and Yasuo Cho
- Organizer
  The 3rd International Conference of Global Network for Innovative Technology
- Place of Presentation
  Penang, Malaysia
- Year and Date
  2016-01-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K04725
[Presentation] Rapid and simultaneousmeasurement of longitudinaland shear wave velocitiesby Brillouin scattering fromartificially induced phonons2016
- Author(s)
  M. Kawabe, T. Yanagitani, S. Takayanagi, Y. Shibagaki, M. Suzuki, M. Matsukawa
- Organizer
  2016 IEEE International Ultrason. Symp
- Place of Presentation
  VINCI convention center, Tours
- Year and Date
  2016-09-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] High electromechanical coupling of sezawa mode SAW using a polarization-inverted ScAlN film/highvelocity substrate structure2016
- Author(s)
  Shinji Takayanagi, Takahiko Yanagitani
- Organizer
  The 37th Symposium on Ultrasonic Electronics
- Place of Presentation
  釜慶大学
- Year and Date
  2016-11-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] Electromechanicalcoupling hysteresis curvesof Pb(Zr,Ti)O3and PbTiO3epitaxial films determinedby ultrasonic measurementusing film/substratestructure2016
- Author(s)
 T. Mori, M. Suzuki, S. Takayanagi, T. Yanagitani
- Organizer
 2016 IEEE International Ultrason. Symp
- Place of Presentation
 VINCI convention center, Tours
- Year and Date
 2016-09-18
- Int'l Joint Research
- Data Source
 KAKENHI-PROJECT-15K13974
[Presentation] 超音波顕微鏡プローブ用の新しい圧電薄膜材料2016
- Author(s)
  柳谷隆彦
- Organizer
  第８回バイオ超音波顕微鏡研究会
- Place of Presentation
  東北大学東京分室
- Invited
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] 励起フォノンを用いたBrillouin散乱測定の高速化に関する検討2016
- Author(s)
  柴垣慶明, 川部昌彦, 柳谷隆彦, 高柳真司, 鈴木雅視, 松川真美
- Organizer
  第58回光波センシング技術研究会
- Place of Presentation
  東京理科大学神楽坂校舎　森戸記念館
- Year and Date
  2016-12-08
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Brillouin scatteringstudy on piezoelectricstiffening effect in thethickness direction ofc-plane ZnO single crystal2016
- Author(s)
  S. Tomita, T. Yanagitani, S. Takayanagi, H. Ichihashi, M. Matsukawa
- Organizer
  2016 IEEE International Ultrason. Symp
- Place of Presentation
  VINCI convention center, Tours
- Year and Date
  2016-09-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] The frequencyswitchable resonatorconsisting of polarityinverted Pb(Zr,Ti)O3/PbTiO3epitaxial multilayer2016
- Author(s)
 T. Mori, M. Suzuki,T. Yanagitani
- Organizer
 2016 IEEE International Ultrason. Symp
- Place of Presentation
 VINCI convention center, Tours
- Year and Date
 2016-09-18
- Int'l Joint Research
- Data Source
 KAKENHI-PROJECT-16H04356
[Presentation] Piezoelectric stiffening in the thickness direction of c-plane ZnO single crystal measured by Brillouin2016
- Author(s)
  Shota Tomita, Takahiko Yanagitani, Shinji Takayanagi, Mami Matsukawa
- Organizer
  The 37th Symposium on Ultrasonic Electronics
- Place of Presentation
  釜慶大学
- Year and Date
  2016-11-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] Improvement ofelectromechanical propertiesin c-axis parallel orientedZnO film by RF magnetronsputtering with negative ionbombardment2016
- Author(s)
  K. Mori, S. Takayanagi, M. Matsukawa, T. Yanagitani
- Organizer
  2016 IEEE International Ultrason. Symp
- Place of Presentation
  VINCI convention center, Tours
- Year and Date
  2016-09-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] Evaluation of piezoelectricity in bone by ultrasound irradiation2016
- Author(s)
  Sayaka Matsukawa1, Shunki Mori, Daisuke Koyama, Shinji Takayanagi, Katsunori Mizuno Takahiko Yanagitani, Mami Matsukaw
- Organizer
  The 37th Symposium on Ultrasonic Electronics
- Place of Presentation
  釜慶大学
- Year and Date
  2016-11-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] Evaluation of viscousliquid using resonance andanti-resonance of thicknessshearmode resonatorconsisting of c-axis paralleloriented ZnO film2016
- Author(s)
  R. Iwanaga, S. Takayanagi, Y. Watanabe, M. Matsukawa, T. Tsuchiya, T. Yanagitani
- Organizer
  2016 IEEE International Ultrason. Symp
- Place of Presentation
  VINCI convention center, Tours
- Year and Date
  2016-09-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] Quantitative thickness measurement in polarityinverted piezoelectric layered thin film using scanning nonlinear dielectric microscopy2016
- Author(s)
  Hiroyuki Odagawa, Koshiro Terada, Hiroaki Nishikawa, Yohei Tanaka, Takahiko Yanagitani and Yasuo Cho
- Organizer
  2016 Joint IEEE International Symposium on the Applications of Ferroelectrics, European Conference on Applications of Polar Dielectrics & Workshop on Piezoresponse Force Microscopy (ISAF/ECAPD/PFM)
- Place of Presentation
  Darmstadt, Germany
- Year and Date
  2016-08-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K04725
[Presentation] ScAlN薄膜トランスデューサを用いた縦波・横波のブリュアン散乱光の同時増幅2016
- Author(s)
  柴垣慶明，川部昌彦，柳谷隆彦，高柳真司，鈴木雅視，松川真美
- Organizer
  日本音響学会2016年秋季研究発表会
- Place of Presentation
  富山大学五福キャンパス
- Year and Date
  2016-09-14
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Polarity inverted Pb(Zr,Ti)O3/PbTiO3 epitaxial multilayer frequency switchable resonator in the GHz range2016
- Author(s)
  Takeshi Mori, Takahiko Yanagitani, and Kiyotaka Wasa
- Organizer
  13th International Workshop on Piezoelectric Materials and Applications in Actuators & Energy Conversion Materials and Devices 2016
- Place of Presentation
  Seogwipo KAL Hotel, Jeju, Korea
- Year and Date
  2016-08-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] Anisotropic behavior ofinduced electric potentialsin bone by ultrasoundirradiation2016
- Author(s)
  S. Matsukawa, S. Mori, Isao Mano, T. Yanagitani, K. Mizuno, S.Takayanagi, M. Matsukawa
- Organizer
  2016 IEEE International Ultrason. Symp
- Place of Presentation
  VINCI convention center, Tours
- Year and Date
  2016-09-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Anisotropic behavior ofinduced electric potentialsin bone by ultrasoundirradiation2016
- Author(s)
  S. Matsukawa, S. Mori, Isao Mano, T. Yanagitani, K. Mizuno, S.Takayanagi, M. Matsukawa
- Organizer
  2016 IEEE International Ultrason. Symp
- Place of Presentation
  VINCI convention center, Tours
- Year and Date
  2016-09-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] 極性反転構造のZnO及びScAlN圧電薄膜の形成と弾性波デバイス応用2016
- Author(s)
  森剛志、鈴木雅視, 柳谷隆彦
- Organizer
  （講演奨励賞受賞記念講演）第63回応用物理学会春季学術講演会
- Place of Presentation
  東工大大岡山キャンパス
- Year and Date
  2016-03-19
- Invited
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] 超音波顕微鏡プローブ用の新しい圧電薄膜材料2016
- Author(s)
  柳谷隆彦
- Organizer
  第８回バイオ超音波顕微鏡研究会
- Place of Presentation
  東北大学東京分室
- Invited
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] 励起フォノンを用いたBrillouin散乱測定の高速化に関する検討2016
- Author(s)
  柴垣慶明, 川部昌彦, 柳谷隆彦, 高柳真司, 鈴木雅視, 松川真美
- Organizer
  第58回光波センシング技術研究会
- Place of Presentation
  東京理科大学神楽坂校舎　森戸記念館
- Year and Date
  2016-12-08
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] Temperature stable liquid gigahertz viscosity sensors by combining shear mode piezoelectric ScAlN thin film and AT-cut quartz crystal plate2016
- Author(s)
  Ko-hei Sano, Takeshi Mori, Rei Karasawa, Takahiko Yanagitani
- Organizer
  5th Joint Meeting of the Acoustical Society of America and Acoustical Society of Japan
- Place of Presentation
  Hilton Hawaiian Village
- Year and Date
  2016-11-28
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Piezoelectric stiffening in the thickness direction of c-plane ZnO single crystal measured by Brillouin2016
- Author(s)
  Shota Tomita, Takahiko Yanagitani, Shinji Takayanagi, Mami Matsukawa
- Organizer
  The 37th Symposium on Ultrasonic Electronics
- Place of Presentation
  釜慶大学
- Year and Date
  2016-11-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Temperature stable liquid gigahertz viscosity sensors by combining shear mode piezoelectric ScAlN thin film and AT-cut quartz crystal plate2016
- Author(s)
  Ko-hei Sano, Takeshi Mori, Rei Karasawa, Takahiko Yanagitani
- Organizer
  5th Joint Meeting of the Acoustical Society of America and Acoustical Society of Japan
- Place of Presentation
  Hilton Hawaiian Village
- Year and Date
  2016-11-28
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] Electromechanical coupling hysteresis curves of Pb(Zr,Ti)O3 epitaxial films determined by GHz ultrasonic method using film/substrate structure2016
- Author(s)
  Takahiko Yanagitani and Masashi Suzuki,
- Organizer
  13th International Workshop on Piezoelectric Materials and Applications in Actuators & Energy Conversion Materials and Devices 2016
- Place of Presentation
  Seogwipo KAL Hotel, Jeju, Korea
- Year and Date
  2016-08-21
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] Improvement ofelectromechanical propertiesin c-axis parallel orientedZnO film by RF magnetronsputtering with negative ionbombardment2016
- Author(s)
  K. Mori, S. Takayanagi, M. Matsukawa, T. Yanagitani
- Organizer
  2016 IEEE International Ultrason. Symp
- Place of Presentation
  VINCI convention center, Tours
- Year and Date
  2016-09-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Polarity inverted Pb(Zr,Ti)O3/PbTiO3 epitaxial multilayer frequency switchable resonator in the GHz range2016
- Author(s)
  Takeshi Mori, Takahiko Yanagitani, and Kiyotaka Wasa
- Organizer
  13th International Workshop on Piezoelectric Materials and Applications in Actuators & Energy Conversion Materials and Devices 2016
- Place of Presentation
  Seogwipo KAL Hotel, Jeju, Korea
- Year and Date
  2016-08-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] ScAlN薄膜トランスデューサを用いた縦波・横波のブリュアン散乱光の同時増幅2016
- Author(s)
  柴垣慶明，川部昌彦，柳谷隆彦，高柳真司，鈴木雅視，松川真美
- Organizer
  日本音響学会2016年秋季研究発表会
- Place of Presentation
  富山大学五福キャンパス
- Year and Date
  2016-09-14
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] Evaluation of viscousliquid using resonance andanti-resonance of thicknessshearmode resonatorconsisting of c-axis paralleloriented ZnO film2016
- Author(s)
  R. Iwanaga, S. Takayanagi, Y. Watanabe, M. Matsukawa, T. Tsuchiya, T. Yanagitani
- Organizer
  2016 IEEE International Ultrason. Symp
- Place of Presentation
  VINCI convention center, Tours
- Year and Date
  2016-09-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] The frequencyswitchable resonatorconsisting of polarityinverted Pb(Zr,Ti)O3/PbTiO3epitaxial multilayer2016
- Author(s)
 T. Mori, M. Suzuki,T. Yanagitani
- Organizer
 2016 IEEE International Ultrason. Symp
- Place of Presentation
 VINCI convention center, Tours
- Year and Date
 2016-09-18
- Int'l Joint Research
- Data Source
 KAKENHI-PROJECT-15K13974
[Presentation] Evaluation of piezoelectricity in bone by ultrasound irradiation2016
- Author(s)
  Sayaka Matsukawa1, Shunki Mori, Daisuke Koyama, Shinji Takayanagi, Katsunori Mizuno Takahiko Yanagitani, Mami Matsukawa
- Organizer
  The 37th Symposium on Ultrasonic Electronics
- Place of Presentation
  釜慶大学
- Year and Date
  2016-11-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Rapid and simultaneousmeasurement of longitudinaland shear wave velocitiesby Brillouin scattering fromartificially induced phonons2016
- Author(s)
  M. Kawabe, T. Yanagitani, S. Takayanagi, Y. Shibagaki, M. Suzuki, M. Matsukawa
- Organizer
  2016 IEEE International Ultrason. Symp
- Place of Presentation
  VINCI convention center, Tours
- Year and Date
  2016-09-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] Brillouin scatteringstudy on piezoelectricstiffening effect in thethickness direction ofc-plane ZnO single crystal2016
- Author(s)
  S. Tomita, T. Yanagitani, S. Takayanagi, H. Ichihashi, M. Matsukawa
- Organizer
  2016 IEEE International Ultrason. Symp
- Place of Presentation
  VINCI convention center, Tours
- Year and Date
  2016-09-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] c-axis tilted ScAlN shear wave acoustic Bragg reflect resonator for gigahertz viscosity measurement2016
- Author(s)
  Takeshi Mori, Yui Yamakawa, Rei Karasawa, Ko-hei Sano,Takahiko Yanagitani, Shinji Takanayanagi
- Organizer
  5th Joint Meeting of the Acoustical Society of America and Acoustical Society of Japan
- Place of Presentation
  Hilton Hawaiian Village
- Year and Date
  2016-11-28
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H04356
[Presentation] High electromechanical coupling of Sezawa mode SAW in c-axis-parallel-oriented ScAlN film/high-velocitysubstrate structures2016
- Author(s)
  S. Takayanagi, M. Matsukawa, T. Yanagitani
- Organizer
  2016 IEEE International Ultrason. Symp
- Place of Presentation
  VINCI convention center, Tours
- Year and Date
  2016-09-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] c-axis parallel polarity inverted multilayer ZnO film resonators fabricated by grazing ion beam assisted RF magnetron sputtering2015
- Author(s)
  Takeshi Mori, Takahiko Yanagitani, Masashi Suzuki
- Organizer
  2015 IEEE International Ultrasonics Symposium
- Place of Presentation
  台湾
- Year and Date
  2015-10-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] Polarization Control of ScAlN and ZnO films: Application to polarization Inverted Multilayer2015
- Author(s)
  Takahiko Yanagitani and Masashi Suzuki,
- Organizer
  2015 International Symposium on Acoustic Wave Devices for Future Mobile Communication Systems
- Place of Presentation
  千葉大学けやきホール
- Year and Date
  2015-11-24
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] Method for Measuring Polarity-Inverted Layered Structure in Dielectric Thin Films Using Scanning Nonlinear Dielectric Microscocpy2015
- Author(s)
  Hiroyuki Odagawa, Koshiro Terada, Hiroaki Nishikawa, TakahikoYanagitani abd Yasuo Cho
- Organizer
  13th European Meeting on Ferroelectricity (EMF2015)
- Place of Presentation
  Porto, Portugal
- Year and Date
  2015-06-28
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K04725
[Presentation] High order mode polarity inverted Al-polar (0001) ScAlN/O-polar (000-1) ZnO film resonator2015
- Author(s)
  Takeshi Mori, Takahiko Yanagitani, Masashi Suzuki,
- Organizer
  2015 IEEE International Ultrasonics Symposium
- Place of Presentation
  台湾
- Year and Date
  2015-10-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] Measurement of acoustic wave velocity and refractive index in thickness direction of c-axis oriented ScAlN films by Brillouin scattering2015
- Author(s)
  Shota Tomita, Takahiko Yanagitani, Masashi Suzuki, Hayato Ichihashi, Shinji Takayanagi, Mami Matsukawa
- Organizer
  2015 IEEE International Ultrasonics Symposium
- Place of Presentation
  台湾
- Year and Date
  2015-10-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] 走査型非線形誘電率顕微法による層状極性反転圧電膜の層厚の定量測定2015
- Author(s)
  寺田浩士朗, 西川宏明, 田中陽平, 小田川裕之, 柳谷隆彦, 長康雄
- Organizer
  超音波エレクトロニクスの基礎と応用に関するシンポジウム(USE2015)
- Place of Presentation
  つくば
- Year and Date
  2015-11-05
- Data Source
  KAKENHI-PROJECT-15K04725
[Presentation] Elastic constant cij E tensors of (0001) ScxAl1-xN films (x=0-0.63)2015
- Author(s)
  Takahiko Yanagitani, Hayato Ichihashi, Masashi Suzuki, Shinji Takayanagi, Mami Matsukawa
- Organizer
  2015 IEEE International Ultrasonics Symposium
- Place of Presentation
  台湾
- Year and Date
  2015-10-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] Quasi-shear mode electromechanical coupling k'15 and shear wave velocity in c-axis tilted ScxAl1-xN films2015
- Author(s)
  Masashi Suzuki, and Takahiko Yanagitani
- Organizer
  2015 IEEE International Ultrasonics Symposium
- Place of Presentation
  台湾
- Year and Date
  2015-10-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] Fast wave velocity measurement by Brillouin scattering using induced phonon from ScAlN piezoelectric thin film2015
- Author(s)
  Masahiko Kawabe, Takahiko Yanagitani, Hayato Ichihashi, Shinji Takayanagi, Masashi Suzuki
- Organizer
  2015 IEEE International Ultrasonics Symposium
- Place of Presentation
  台湾
- Year and Date
  2015-10-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] ScAlN thin film transducers for ultrasonic microscopy in the VHF range2015
- Author(s)
  Yusuke Korai, Masashi Suzuki, Takahiko Yanagitani
- Organizer
  2015 IEEE International Ultrasonics Symposium
- Place of Presentation
  台湾
- Year and Date
  2015-10-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] High Performance Piezoelectric Thin Films Beyond PZT2015
- Author(s)
  K.Wasa, H.Hanzawa, S.Yoshida, T.Yanagitani, and S.Tanaka
- Organizer
  2015 International Symposium on Acoustic Wave Devices for Future Mobile Communication Systems
- Place of Presentation
  千葉大学けやきホール
- Year and Date
  2015-11-24
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] Shear mode properties of c-axis parallel oriented ScxAl1-xN films grown by RF bias sputtering2015
- Author(s)
  Shinji Takayanagi, Takahiko Yanagitani, Mami Matsukawa
- Organizer
  2015 IEEE International Ultrasonics Symposium
- Place of Presentation
  台湾
- Year and Date
  2015-10-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13974
[Presentation] c軸傾斜ScAlN薄膜の擬似すべりモード電気機械結合係数2014
- Author(s)
  鈴木雅視，片田克吉，柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2014
- Place of Presentation
  東北大学青葉記念館
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] 超音波により励起される骨中電位の極性について2014
- Author(s)
  常田裕子, 松川沙弥果, 眞野功, 水野勝紀, 柳谷隆彦, 高柳真司, 松川真美
- Organizer
  電子情報通信学会超音波研究会
- Place of Presentation
  山形大学
- Year and Date
  2014-09-29
- Data Source
  KAKENHI-PROJECT-24360161
[Presentation] PZT系エピタキシャル薄膜を用いた二次モード分極反転共振子2014
- Author(s)
  片田克吉，柳谷隆彦，鈴木雅視，和佐清孝
- Organizer
  圧電材料・デバイスシンポジウム2014
- Place of Presentation
  東北大学青葉記念館
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] Bi(Me)O3-PbTiO3 高キュリー温度セラミックスの単結晶薄膜化2014
- Author(s)
  和佐清孝，松嶋朝明，足立秀明，松永利之，柳谷隆彦，山本孝
- Organizer
  圧電材料・デバイスシンポジウム2014
- Place of Presentation
  東北大学青葉記念館
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] エピタキシャルPZT系厚膜の高温550℃における高い電気機械結合係数2014
- Author(s)
  柳谷隆彦，片田克吉，鈴木雅視，和佐清孝
- Organizer
  圧電材料・デバイスシンポジウム2014
- Place of Presentation
  東北大学青葉記念館
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] 音響電気効果を考慮したGaN単結晶のGHz域音速の温度・周波数分散測定2014
- Author(s)
  市橋隼人,柳谷隆彦,高柳真司,松川真美
- Organizer
  圧電材料・デバイスシンポジウム2014
- Data Source
  KAKENHI-PROJECT-24656259
[Presentation] イオンビーム照射成膜によるc軸垂直配向希土類GaN 薄膜の形成2014
- Author(s)
  鈴木雅視,柳谷隆彦
- Organizer
  第61回応用物理学会春季学術講演会
- Year and Date
  2014-03-17
- Data Source
  KAKENHI-PROJECT-24656259
[Presentation] イオンビーム照射成膜によるc軸垂直配向希土類GaN薄膜の形成2014
- Author(s)
  鈴木雅視，柳谷隆彦
- Organizer
  第61回応用物理学関係連合講演会
- Place of Presentation
  神奈川
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] 音響電気効果を考慮したGaN単結晶のGHz域音速の温度・周波数分散測定2014
- Author(s)
  市橋隼人, 柳谷隆彦, 高柳真司, 松川真美
- Organizer
  圧電材料・デバイスシンポジウム2014
- Place of Presentation
  東北大学
- Data Source
  KAKENHI-PROJECT-24656259
[Presentation] PZT-based high coupling with low permittivity thin films2013
- Author(s)
  K. Wasa, T. Matsushima, H. Adachi, T. Matsunaga, T. Yanagitani, T. Yamamoto, S. Trolier-McKinstry
- Organizer
  IEEE 2013 Joint UFFC, EFTF and PFM Symposium IEEE 2013 Joint UFFC, EFTF and PFM
- Place of Presentation
  プラハ国際会議場
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] 平行配向ZnO圧電薄膜を用いた液中横波励振デバイス2013
- Author(s)
  柳谷隆彦、松川真美、渡辺好章
- Organizer
  マイクロEMデバイス・システムとICの融合化技術調査専門委員会
- Place of Presentation
  沼津高専
- Invited
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] MHz域の超音波照射による骨の誘発電位2013
- Author(s)
  常田裕子, 沖野正裕, 水野勝紀, 柳谷隆彦, 高柳真司, 松川真美
- Organizer
  第33回日本骨形態計測学会
- Place of Presentation
  アクトシティ浜松コングレスセンター
- Data Source
  KAKENHI-PROJECT-24360161
[Presentation] Detection of antigen-antibody reaction by thickness-shear mode resonators consisting of caxis parallel oriented ZnO films2013
- Author(s)
  K. Yoshida, T. Yanagitani, T. Kawamoto, S. Sasaki, M. Oba, Y. Kato, S. Takayanagi, Y. Watanabe
- Organizer
  IEEE 2013 Joint UFFC, EFTF and PFM Symposium IEEE 2013 Joint UFFC, EFTF and PFM
- Place of Presentation
  プラハ国際会議場
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] Enhancement of electromechanical coupling kt in rare earth doped c-axis oriented GaN films2013
- Author(s)
  M. Suzuki, T. Yanagitani
- Organizer
  IEEE 2013 Joint UFFC, EFTF and PFM Symposium IEEE 2013 Joint UFFC, EFTF and PFM
- Place of Presentation
  プラハ国際会議場
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] Multiple roundtrip SH-SAW liquid sensor using c-axis parallel oriented ZnO _lms on silica glass pipe2013
- Author(s)
  Y. Kato, T. Yanagitani, K. Imamura, S. Takayanagi, M. Matsukawa
- Organizer
  IEEE 2013 Joint UFFC, EFTF and PFM Symposium IEEE 2013 Joint UFFC, EFTF and PFM
- Place of Presentation
  プラハ国際会議場
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] Electrical potentials in wet induced by ultrasound irradiatio2013
- Author(s)
  H. Tsuneda, M. Okino, K. Mizuno, T. Yanagitani, S. Takayanagi, M. Matsukawa
- Organizer
  European Symposium on Ultrasonic Characterization of Bone 2013
- Place of Presentation
  University of Granada
- Data Source
  KAKENHI-PROJECT-24360161
[Presentation] 「c軸傾斜配向ZnOまたはScAlN膜のレイリーSAWにおける高い電気機械結合係数」2013
- Author(s)
  加藤善也，柳谷隆彦，高柳真司，今村功佑，松川真美
- Organizer
  圧電材料・デバイスシンポジウム2013
- Place of Presentation
  東北大学
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] 講演奨励賞受賞記念講演　イオンビーム照射成膜によるAlN薄膜の極性・配向制御および極性反転多層構造の形成2013
- Author(s)
  鈴木雅視，柳谷隆彦
- Organizer
  第74回応用物理学会学術講演会
- Place of Presentation
  同志社大学
- Invited
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] Electromechanical coupling kt and GHzl ongitudinal wave velocity in ScAlN _lms near phase boundary2013
- Author(s)
  M. Suzuki, T. Yanagitani
- Organizer
  IEEE 2013 Joint UFFC, EFTF and PFM Symposium IEEE 2013 Joint UFFC, EFTF and PFM
- Place of Presentation
  プラハ国際会議場
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] Brillouin散乱法を用いたGaN単結晶の音速分散測定2013
- Author(s)
  市橋隼人, 柳谷隆彦, 高柳真司, 川部昌彦, 松川真美
- Organizer
  第34回超音波エレクトロニクスの基礎と応用に関するシンポジウム
- Place of Presentation
  同志社大学
- Data Source
  KAKENHI-PROJECT-24656259
[Presentation] Shear and longitudinal GHz elastic properties in GaN single crystals determined by Brillouin scattering method2013
- Author(s)
  H. Ichihashi, T. Sugimoto, T. Yanagitani, S. Takayanagi, M. Matsukawa
- Organizer
  IEEE 2013 Joint UFFC, EFTF and PFM Symposium IEEE 2013 Joint UFFC, EFTF and PFM Symposium
- Data Source
  KAKENHI-PROJECT-24656259
[Presentation] 「希土類を添加したAlNおよびGaN薄膜の圧電特性」2013
- Author(s)
  伊藤一也，鈴木雅視，柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2013
- Place of Presentation
  東北大学
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] Enhancement of electromechanical coupling kt in rare earth doped c-axis oriented GaN films2013
- Author(s)
  M. Suzuki, T. Yanagitani
- Organizer
  IEEE 2013 Joint UFFC, EFTF and PFM Symposium IEEE 2013 Joint UFFC, EFTF and PFM Symposium
- Data Source
  KAKENHI-PROJECT-24656259
[Presentation] Characterization of GHz electromechanical properties of PZT single crystalline thin films without removing substrate2013
- Author(s)
  T. Yanagitani, M. Suzuki, K. Wasa T. Yanagitani, M. Suzuki, K. Wasa
- Organizer
  IEEE 2013 Joint UFFC, EFTF and PFM Symposium IEEE 2013 Joint UFFC, EFTF and PFM
- Place of Presentation
  プラハ国際会議場
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] Shear and longitudinal GHz elastic properties in GaN single crystals determined byBrillouin scattering method2013
- Author(s)
  H.Ichihashi, T.Sugimoto, T.yanagitani, S.Takayanagi, M.Matsukawa
- Organizer
  IEEE Ultrassonic Symposium
- Place of Presentation
  プラハ国際会議場
- Data Source
  KAKENHI-PROJECT-24656259
[Presentation] Orientation control of ZnO _lms by highly-energetic positive ion irradiation using RF substrate bias sputtering2013
- Author(s)
  S. Takayanagi, T. Yanagitani, M. Matsukawa S. Takayanagi, T. Yanagitani, M. Matsukawa
- Organizer
  IEEE 2013 Joint UFFC, EFTF and PFM Symposium IEEE 2013 Joint UFFC, EFTF and PFM
- Place of Presentation
  プラハ国際会議場
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] 「AlN系薄膜におけるイオンビームを用いたc軸平行螺旋構造およびc軸垂直極性反転構造の形成」2013
- Author(s)
  鈴木雅視，柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2013
- Place of Presentation
  東北大学
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] Sear and longitudinal GHz elestic properties in GaN single crystals determined by Brillouin scattering method2013
- Author(s)
  H.Ichihashi, T.Sugimoto, T.Yanagitani, S.Takayanagi, M.Matsukawa
- Organizer
  2013 IEEE Joint UFFC, EFTF and PFM symposium
- Place of Presentation
  Prague Congress Centre
- Data Source
  KAKENHI-PROJECT-24656259
[Presentation] Polarity control of c-axis oriented ZnO films and application to polarity-inverted to ZnO multilayer resonators2013
- Author(s)
  R. Hashimoto, T. Yanagitani, Ryo Ikoma, S. Takayanagi1, M. Suzuki, H. Odagawa, M. Matsukawa
- Organizer
  IEEE 2013 Joint UFFC, EFTF and PFM Symposium IEEE 2013 Joint UFFC, EFTF and PFM
- Place of Presentation
  プラハ国際会議場
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] Brillouin散乱法によるGaN単結晶の音波物性測定2013
- Author(s)
  市橋、杉本、柳谷、高柳、松川
- Organizer
  2013年第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川理工科大学
- Data Source
  KAKENHI-PROJECT-24656259
[Presentation] Shear and longitudinal GHz elastic properties in GaN single crystals determined by Brillouin scattering method2013
- Author(s)
  H. Ichihashi, T. Sugimoto, T. Yanagitani, S. Takayanagi, M. Matsukawa
- Organizer
  IEEE 2013 Joint UFFC, EFTF and PFM Symposium IEEE 2013 Joint UFFC, EFTF and PFM
- Place of Presentation
  プラハ国際会議場
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] Bone ultrasound transducer in the MHz range2012
- Author(s)
  Okino, Mizuno, Takayanagi, Suga, Yanagitani, Matsukawa
- Organizer
  2012 IEEE International Ultrasonics Symposium
- Place of Presentation
  Dresden Conference Center(Germany)
- Year and Date
  2012-10-09
- Data Source
  KAKENHI-PROJECT-24360161
[Presentation] “Polarization inverted (0001) / (000-1) ScAlN film resonators operating in second overtone mode,”2012
- Author(s)
  M. Suzuki, T. Yanagitani, H. Odagawa,
- Organizer
  2012 IEEE International Ultrason. Symp.
- Place of Presentation
  ドレスデン
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] “High electromechanical coupling of PMnN-PZT thin film resonator operating in the GHz range,”2012
- Author(s)
  T. Yanagitani, M. Suzuki, K. Wasa,
- Organizer
  2012 IEEE International Ultrason. Symp.
- Place of Presentation
  ドレスデン
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] “Polarization control of the c-axis oriented ZnO films by ion bombardment during an RF magnetron sputtering,”2012
- Author(s)
  R. Ikoma, T. Yanagitani, S. Takayanagi, M. Suzuki, H. Odagawa, M. Matsukawa,
- Organizer
  2012 IEEE International Ultrason. Symp.
- Place of Presentation
  ドレスデン
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] c 軸垂直極性反転ScAlN 多層膜を用いた高次モード音響共振子2012
- Author(s)
  鈴木雅視，柳谷隆彦，
- Organizer
  日本音響学会2012年秋季研究発表会
- Place of Presentation
  東京工科大学八王子キャンパス
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] “Metal grain ingot sputtering method for ScAlN film fabrication and for searching alternative element of Sc,”2012
- Author(s)
  T. Yanagitani, M. Suzuki, N. Suganuma,
- Organizer
  2012 IEEE International Ultrason. Symp.
- Place of Presentation
  ドレスデン
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] “Micro liquid viscometer by thickness-shear mode resonator with c-axis parallel oriented ZnO film,”2012
- Author(s)
  Y. Kato, T. Yanagitani, M. Matsukawa, M. Sawasaki, T. Kawamoto, Y. Mori, S. Takayanagi, S. Sasaki, M. Oba, Y. Watanabe,
- Organizer
  2012 IEEE International Ultrason. Symp.
- Place of Presentation
  ドレスデン
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] イオンビーム照射成膜による(0001)配向ScAlN薄膜の極性制御と極性反転構造の実現」2012
- Author(s)
  鈴木雅視，柳谷隆彦，小田川裕之，
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  愛媛大学城北地区
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] MHz域における骨の電気機械変換特性2012
- Author(s)
  沖野、水野、柳谷、クテル、松川
- Organizer
  第33回超音波エレクトロニクスの基礎と応用に関するシンポジウム
- Place of Presentation
  千葉大学
- Year and Date
  2012-11-15
- Data Source
  KAKENHI-PROJECT-24360161
[Presentation] “Fast hypersonic velocity measurement by Brillouin scattering from induced phonons,”2012
- Author(s)
  T. Sugimoto, T. Yanagitani, S. Takayanagi, M. Matsukawa,
- Organizer
  2012 IEEE International Ultrason. Symp.
- Place of Presentation
  ドレスデン
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] “Fabrication of c-axis parallel oriented AlN and ScAlN films by RF bias sputtering,”2012
- Author(s)
  S. Takayanagi, T. Yanagitani, M. Matsukawa,
- Organizer
  2012 IEEE International Ultrason. Symp.
- Place of Presentation
  ドレスデン
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] “Bone ultrasound transducer in the MHz range,”2012
- Author(s)
  M. Okino, Katsunori M., S. Takayanagi, D. Suga, T. Yanagitani, M. Matsukawa,
- Organizer
  2012 IEEE International Ultrason. Symp.
- Place of Presentation
  ドレスデン
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] Fast hypersonic velocity measure- ment by Brillouin scattering from induced phonons2012
- Author(s)
  T. Sugimoto, T. Yanagitani, S. Takayanagi, M. Matsukawa
- Organizer
  2012 IEEE International Ultrason. Symp.
- Year and Date
  2012-10-09
- Data Source
  KAKENHI-PROJECT-24656259
[Presentation] c軸平行配向AlN薄膜を用いた極性反転すべり共振子2011
- Author(s)
  鈴木雅視, 柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2011
- Place of Presentation
  東北大学工学部
- Year and Date
  2011-01-31
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] 曲面試料上に成膜したZnO薄膜からの励起フォノンによるBrillouin散乱2011
- Author(s)
  杉本剛士, 佐野広幸, 中東佑太, 高柳真司, 柳谷隆彦, 松川真美
- Organizer
  日本音響学会2011年春季研究発表会
- Place of Presentation
  早稲田大学理工学術院
- Year and Date
  2011-03-09
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] c軸平行配向ZnO膜/非圧電性基板構造におけるSH-SAWの電気機械結合係数およびセンサ応用の検討2011
- Author(s)
  中東佑太, 柳谷隆彦, 松川真美, 渡辺好章
- Organizer
  圧電材料・デバイスシンポジウム2011
- Place of Presentation
  東北大学工学部
- Year and Date
  2011-02-01
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] 傾斜配向AlN膜の結晶粒界と横波音響特性2010
- Author(s)
  鈴木雅視、柳谷隆彦
- Organizer
  日本音響学会2010年春季研究発表会
- Place of Presentation
  電気通信大学
- Year and Date
  2010-03-10
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] c軸傾斜配向ScAlN膜の擬似すべりモードにおける巨大圧電性2010
- Author(s)
  柳谷隆彦、秋山守人
- Organizer
  日本音響学会2010年秋季研究発表会
- Place of Presentation
  関西大学
- Year and Date
  2010-09-15
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] A simple technique for obtaining (11-20) or (10-10)textured ZnO films by RF bias sputtering2010
- Author(s)
  S.Takayanagi, T.Yanagitani, M.Matsukawa, Y.Watanabe
- Organizer
  IEEE Ultrason. Symp.(2010) 4pages
- Place of Presentation
  in press
- Year and Date
  2010-10-14
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] Brillouin散乱法による圧電半導体の面内方向抵抗率評価2010
- Author(s)
  柳谷隆彦、佐野広幸、松川真美
- Organizer
  日本音響学会2010年春季研究発表会
- Place of Presentation
  電気通信大学
- Year and Date
  2010-03-08
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] Brillouin散乱法による導電性ZnO単結晶を用いた擬似すべりモード電気機械結合係数kl5'の評価2010
- Author(s)
  佐野広幸, 柳谷隆彦, 松川真美
- Organizer
  日本音響学会2010年秋季研究発表会
- Place of Presentation
  関西大学
- Year and Date
  2010-09-14
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] c軸傾斜配向ScAlN膜の擬似すべりモードにおける巨大圧電性2010
- Author(s)
  柳谷隆彦、荒川和樹、鈴木雅視、加納一彦、勅使河原明彦、秋山守人
- Organizer
  電子情報通信学会超音波研究会
- Place of Presentation
  東北大学工学部
- Year and Date
  2010-09-30
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] 傾斜配向AlN膜の構造が横波音響特性におよぼす影響2010
- Author(s)
  鈴木雅視、柳谷隆彦
- Organizer
  圧電材料・デバイスシンポジウム2010
- Place of Presentation
  仙台市青葉区荒巻字青葉東北大学工学部青葉記念会館
- Year and Date
  2010-02-01
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] A simple technique for obtaining (11-20) or (10-10) textured ZnO films by RF bias sputtering2010
- Author(s)
  S, Takayanagi, T.Yanagitani, M.Matsukawa, Y.Watanabe
- Organizer
  2010 IEEE International Ultrasonics Symposium
- Place of Presentation
  San Diego, California
- Year and Date
  2010-10-14
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] Brillouin散乱法による同軸共振器と圧電薄膜を用いた励起フォノンの観測2010
- Author(s)
  佐野広幸, 柳谷隆彦, 高柳真司、松川真美
- Organizer
  電子情報通信学会超音波研究会
- Place of Presentation
  東北大学工学部
- Year and Date
  2010-09-30
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] RFバイアススパッタ法による簡便な(11-20)および(10-10)配向ZnO膜の形成2010
- Author(s)
  高柳真司、柳谷隆彦、松川真美、渡辺好章
- Organizer
  応用物理学会2010年春季大会
- Place of Presentation
  東海大学湘南キャンパス
- Year and Date
  2010-03-17
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] Deposition techniques of c-axis-tilted ScAlN films by conventional RF magnetron sputtering2010
- Author(s)
  K.Arakawa, T.Yanagitani, K.Kano, A.Teshigahara, M.Akiyama
- Organizer
  2010 IEEE International Ultrasonics Symposium
- Place of Presentation
  San Diego, California
- Year and Date
  2010-10-14
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] RFバイアススパッタ法による簡便な面内配向ZnO薄膜の形成2010
- Author(s)
  高柳真司、柳谷隆彦、松川真美、渡辺好章
- Organizer
  圧電材料・デバイスシンポジウム2010
- Place of Presentation
  仙台市青葉区荒巻字青葉東北大学工学部青葉記念会館
- Year and Date
  2010-02-01
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] RFバイアススパッタ法によるc軸平行配向ZnO薄膜の形成～バイアス周波数が配向性に及ぼす影響～2010
- Author(s)
  高柳真司、柳谷隆彦、松川真美、渡辺好章
- Organizer
  電子情報通信学会超音波研究会
- Place of Presentation
  東北大学工学部
- Year and Date
  2010-09-30
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] ウシ大腿骨皮質骨の3次元音速異方性～ハイドロキシアパタイト結晶配向と微細構造の影響～2010
- Author(s)
  中辻知宏, 犬童雅規, 小泉喬亮, 松川真美, 山本和史, 山崎薫, 柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Place of Presentation
  関西大学千里山キャンパス第四学舎(システム理工学部)
- Year and Date
  2010-01-25
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] Effects of HAp alignment and microstructure on the anisotropy of longitudinal wave velocity in bovine cortical bone2010
- Author(s)
  K.Yamamoto, T.Nakatsuji, Y.Yamato, T.Yanagitani, K.Yamazaki, M.Matsukawa, Y.Matsuyama
- Organizer
  2010 IEEE International Ultrasonics Symposium
- Place of Presentation
  San Diego, California
- Year and Date
  2010-10-14
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] Giant shear mode electromechanical coupling in c-axis tilted ScAlN films2010
- Author(s)
  T.Yanagitani, K.Arakawa, M.Suzuki, K.Kano, T.Akihiko, A.Morito
- Organizer
  The 31th Symposium on Ultrasonic Electronics
- Place of Presentation
  明治大学
- Year and Date
  2010-12-08
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] Influence of shadowing effect on shear mode acoustic properties in the c-axis tilted AlN films2010
- Author(s)
  M Suzuki, T.Yanagitani
- Organizer
  IEEE Ultrason. Symp.(2010) 4pages
- Place of Presentation
  in press
- Year and Date
  2010-10-14
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] Influence of shadowing effect on shear mode acoustic properties in the c-axis tilted AlN films2010
- Author(s)
  M Suzuki, T.Yanagitani
- Organizer
  2010 IEEE International Ultrasonics Symposium
- Place of Presentation
  San Diego, California
- Year and Date
  2010-10-14
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] c-axis parallel oriented ZnO film depositions by variable frequency RF bias sputtering2010
- Author(s)
  S.Takayanagi, T.Yanagitani, M.Matsukawa, Y.Watanabe
- Organizer
  The 31th Symposium on Ultrasonic Electronics
- Place of Presentation
  明治大学
- Year and Date
  2010-12-08
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] Deposition techniques of c-axis-tilted ScAlN films by conventional RF magnetron sputtering2010
- Author(s)
  K.Arakawa, T.Yanagitani, K.Kano, A.Teshigahara, M.Akiyama
- Organizer
  IEEE Ultrason. Symp.(2010) 4pages
- Place of Presentation
  in press
- Year and Date
  2010-10-14
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] Observation of induced phonons by ZnO transducer with coaxial microwave resonator using Brillouin scattering2010
- Author(s)
  H.Sano, T Yanagitani, S.Takayanagi, M.Matsukawa, N.Ohtori
- Organizer
  The 31th Symposium on Ultrasonic Electronics
- Place of Presentation
  明治大学
- Year and Date
  2010-12-06
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] Giant shear mode electromechanical coupling coefficient k15 in c-axis tilted ScAlN films2010
- Author(s)
  T.Yanagitani, K.Arakawa, M.Suzuki, K.Kano, T.Akihiko, A.Morito
- Organizer
  2010 IEEE International Ultrasonics Symposium
- Place of Presentation
  San Diego, California
- Year and Date
  2010-10-14
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] Highest wave velocity direction in the bovine cortical bone : observation of a small tilt relative to the bone axis2010
- Author(s)
  T.Nakatsuji, K.Yamamoto, T.Yanagitani, M.Matsukawa, K.Yamazaki
- Organizer
  2010 IEEE International Ultrasonics Symposium
- Place of Presentation
  San Diego, California
- Year and Date
  2010-10-12
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] In-plane and out-of-plane orientation control of AlN films by ion beam assisted RF magnetron sputtering2010
- Author(s)
  M Suzuki, T.Yanagitani
- Organizer
  The 31th Symposium on Ultrasonic Electronics
- Place of Presentation
  明治大学
- Year and Date
  2010-12-08
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] Giant shear mode electromechanical coupling coefficient k15 in c-axis tilted ScAlN films2010
- Author(s)
  T.Yanagitani, K.Arakawa, K.Kano, A.Teshigahara, M.Akiyama
- Organizer
  IEEE Ultrason. Symp.(2010) 4pages
- Place of Presentation
  in press
- Year and Date
  2010-10-14
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] ウシ大腿骨皮質骨中の超音波縦波音速～ハイドロキシアパタイト結晶配向と微細構造の影響～2009
- Author(s)
  中辻知宏, 矢追佑一郎, 松川真美, 山本和史, 山崎薫, 柳谷隆彦
- Organizer
  電子情報通信学会超音波研究会
- Place of Presentation
  千葉大学フロンティアメディカル工学研究開発センターB号棟1階会議室
- Year and Date
  2009-06-26
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] ヒト及びウシ円環状皮質骨における骨軸方向への超音波伝搬特性2009
- Author(s)
  山本和史, 大和雄, 山崎薫, 長野昭, 矢追佑一郎, 中辻智宏, 松川真美, 柳谷隆彦
- Organizer
  第29回日本骨形態計測学会
- Place of Presentation
  大阪国際会議場
- Year and Date
  2009-05-28
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] Relationships between anisotropy of longitudinal wave velocity and HAp orientation in bovine cortical bone2009
- Author(s)
  K.Yamamoto, T.Nakatsuji, Y.Yaoi, Y.Yamato, T.Yanagitani, M.Matsukawa, K.Yamazaki
- Organizer
  3rd European Symposium on Ultrasonic Characterization of Bone
- Place of Presentation
  Kazimierz Wielki University in Bydgoszcz, Bydgoszcz, Poland
- Year and Date
  2009-09-17
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] 直線状エロージョンマグネトロンスパッタを用いた(11-20)配向ZnO圧電膜の結晶性2009
- Author(s)
  川本貴之, 柳谷隆彦, 松川真美, 渡辺好章, 森嘉一, 佐々木昌, 大場正利
- Organizer
  第30回超音波エレクトロニクスの基礎と応用に関するシンポジウム
- Place of Presentation
  同志社大学今出川キャンパス寒梅館
- Year and Date
  2009-11-20
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] Multilayered shear wave resonator consisting of c-axis tilted ZnO films2009
- Author(s)
  N.Morisato, S.Takayanagi, T.Yanagitani, M.Matsukawa, Y.Watanabe
- Organizer
  IEEE Ultrasonic.Symposium.2009
- Place of Presentation
  Ergife Palace Hotel, Roma, Italy
- Year and Date
  2009-09-22
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] 高角度傾斜配向AlN膜の作製と圧電特性2009
- Author(s)
  鈴木雅視, 柳谷隆彦
- Organizer
  第30回超音波エレクトロニクスの基礎と応用に関するシンポジウム
- Place of Presentation
  同志社大学今出川キャンパス寒梅館
- Year and Date
  2009-11-20
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] 直線状エロージョンマグネトロンスパッタリングによる(11-20)配向ZnO圧電膜の大面積成膜2009
- Author(s)
  川本貴之, 柳谷隆彦, 松川真美, 渡辺好章, 森嘉一, 佐々木昌, 大場正利
- Organizer
  電子情報通信学会超音波研究会
- Place of Presentation
  登別グランドホテル会議室
- Year and Date
  2009-09-30
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] Brillouin散乱法による圧電性ワイドバンドギャップ半導体の面内方向電気特性評価2009
- Author(s)
  柳谷隆彦, 佐野広幸, 松川真美
- Organizer
  第30回超音波エレクトロニクスの基礎と応用に関するシンポジウム
- Place of Presentation
  同志社大学今出川キャンパス寒梅館
- Year and Date
  2009-11-20
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] Texture modification of wurtzite piezoelectric films by ion beam irradiation2009
- Author(s)
  T.Yanagitani, M.Kiuchi
- Organizer
  16th International Conference on Surface Modification of Materials by Ion Beams
- Place of Presentation
  Miraikan Hall, The National Museum of Emerging Science and Innovation (Miraikan)
- Year and Date
  2009-09-14
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] c軸傾斜反転配向ZnO多層膜の作製と横波共振子への応用2009
- Author(s)
  守里直希・高柳真司, 柳谷隆彦, 松川真美, 渡辺好章
- Organizer
  電子情報通信学会超音波研究会
- Place of Presentation
  登別グランドホテル会議室
- Year and Date
  2009-09-30
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] c軸傾斜反転配向ZnO多層膜の作製と横波共振子への応用2009
- Author(s)
  守里直希, 高柳真司, 柳谷隆彦, 松川真美, 渡辺好章
- Organizer
  第30回超音波エレクトロニクスの基礎と応用に関するシンポジウム
- Place of Presentation
  同志社大学今出川キャンパス寒梅館
- Year and Date
  2009-11-20
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] Brillouin散乱法による圧電半導体の面内方向電気特性評価に関する検討2009
- Author(s)
  柳谷隆彦, 佐野広幸, 松川真美
- Organizer
  電子情報通信学会超音波研究会
- Place of Presentation
  登別グランドホテル会議室
- Year and Date
  2009-09-30
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] Multilayered shear wave resonator consisting of c-axis tilted ZnO films2009
- Author(s)
  N.Morisato, S.Takayanagi, T.Yanagitani, M.Matsukawa, Y.Watanabe
- Organizer
  IEEE Ultrason. Symp. pp.2162-2165 (2009)
- Year and Date
  2009-09-22
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] Measurement of electric properties in a ZnO single crystal via electromechanical coupling using Brillouin scattering method2009
- Author(s)
  T.Yanagitani, H.Sano, M.Matsukawa
- Organizer
  IEEE Ultrasonic.Symposium.2009
- Place of Presentation
  Ergife Palace Hotel, Roma, Italy
- Year and Date
  2009-09-22
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] Measurement of electric properties in a ZnO single crystal via electromechanical coupling using Brillouin scattering method2009
- Author(s)
  T.Yanagitani, H.Sano, M.Matsukawa
- Organizer
  IEEE Ultrason. Symp. pp.1074-1077 (2009)
- Year and Date
  2009-09-22
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] ウシ大腿骨皮質骨の縦波音速異方性とHAp結晶配向2009
- Author(s)
  山本和史, 大和雄, 山崎薫, 長野昭, 矢追佑一郎, 中辻智宏, 松川真美, 柳谷隆彦
- Organizer
  第24回日本整形外科学会基礎学術集会
- Place of Presentation
  パシフィコ横浜
- Year and Date
  2009-11-05
- Data Source
  KAKENHI-PROJECT-21760049
[Presentation] RF bias induced polarity inversion of ScAlN film for overtone mode BAW resonator
- Author(s)
  M. Suzuki, and T. Yanagitani,
- Organizer
  IEEE International Ultrasonics Symposium
- Place of Presentation
  シカゴ
- Year and Date
  2014-09-03 – 2014-09-06
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] Effect of sputtering target temperature on crystalline orientations of ZnO piezoelectric films in RF magnetron sputtering
- Author(s)
  C. Takata, S. Takayanagi, T. Yanagitani, M. Matsukawa
- Organizer
  IEEE International Ultrasonics Symposium
- Place of Presentation
  シカゴ
- Year and Date
  2014-09-03 – 2014-09-06
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] Polarity of piezoelectric properties in bone induced by ultrasound irradiation
- Author(s)
  Hiroko Tsuneda, Isao Mano, Elena Hernanz, Katsunori Mizuno, Takahiko Yanagitani, Shinji Takayanagi, Mami Matsukawa
- Organizer
  2014 IEEE International Ultrasonics Symposium
- Place of Presentation
  Chicago USA
- Year and Date
  2014-09-03 – 2014-09-06
- Data Source
  KAKENHI-PROJECT-24360161
[Presentation] Polarity of piezoelectric properties in bone induced by ultrasound irradiation
- Author(s)
  H. Tsuneda, I. Mano, E. Hernanz, K. Mizuno, T. Yanagitani, S. Takayanagi, M. Matsukawa
- Organizer
  IEEE International Ultrasonics Symposium
- Place of Presentation
  シカゴ
- Year and Date
  2014-09-03 – 2014-09-06
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] Second overtone mode polarization inverted resonator consisting of (001)/(00-1) PbTiO3 thin film
- Author(s)
  T. Yanagitani, K. Katada, M. Suzuki, K. Wasa
- Organizer
  IEEE International Ultrasonics Symposium
- Place of Presentation
  シカゴ
- Year and Date
  2014-09-03 – 2014-09-06
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] Effect of Sc concentration on shear wave velocities in ScAlN films measured by micro-Brillouin scattering technique
- Author(s)
  H. Ichihashi, T. Yanagitani, S. Takayanagi1, M. Matsukawa
- Organizer
  IEEE International Ultrasonics Symposium
- Place of Presentation
  シカゴ
- Year and Date
  2014-09-03 – 2014-09-06
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] Sezawa mode SAW with high electromechanical coupling at the boundary of polarization-inverted (000-1)/(0001) ZnO, AlN and ScAlN films
- Author(s)
  S. Takayanagi, T.Yanagitani, M. Matsukawa
- Organizer
  IEEE International Ultrasonics Symposium
- Place of Presentation
  シカゴ
- Year and Date
  2014-09-03 – 2014-09-06
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] Multiple shear wave roundtrips liquid sensor by c-axis parallel oriented ZnO film/silica glass pipe structure
- Author(s)
  S. Hiyama, T. Yanagitani, S. Takayanagi, Y. Kato, M. Matsukawa
- Organizer
  IEEE International Ultrasonics Symposium
- Place of Presentation
  シカゴ
- Year and Date
  2014-09-03 – 2014-09-06
- Data Source
  KAKENHI-PROJECT-24760075
[Presentation] 骨の微細構造が超音波帯域の圧電性に与える影響
- Author(s)
  常田裕子, 松川沙弥果, 眞野功, 水野勝紀, 柳谷隆彦, 高柳真司, 松川真美
- Organizer
  第35回超音波エレクトロニクスの基礎と応用に関するシンポジウム
- Place of Presentation
  明治大学御茶ノ水キャンパス
- Year and Date
  2014-12-03 – 2014-12-05
- Data Source
  KAKENHI-PROJECT-24360161
[Presentation] 超音波照射による骨中誘発電位の極性について
- Author(s)
  常田裕子, 松川沙弥果, 真野功, 水野勝紀, 柳谷隆彦, 松川真美
- Organizer
  圧電材料・デバイスシンポジウム2015
- Place of Presentation
  東北大学
- Year and Date
  2015-02-18 – 2015-02-19
- Data Source
  KAKENHI-PROJECT-24360161

1. MATSUKAWA Mami (60288602)

# of Collaborated Projects: 2 results

# of Collaborated Products: 23 results
2. YOSHIKI Nagatani (60448769)

# of Collaborated Projects: 2 results

# of Collaborated Products: 1 results
3. 高柳真司 (00735326)

# of Collaborated Projects: 2 results

# of Collaborated Products: 46 results
4. 吉田憲司 (10572985)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. ATSUSHI Hosokawa (00321456)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. HIRONOBU Hoshino (70293636)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. ODAGAWA HIROYUKI (00250845)

# of Collaborated Projects: 1 results

# of Collaborated Products: 8 results
8. CHO YASUO (40179966)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. 鈴木雅視 (60763852)

# of Collaborated Projects: 1 results

# of Collaborated Products: 8 results
10. 長康雄

# of Collaborated Projects: 0 results

# of Collaborated Products: 8 results

TAKAHIKO Yanagitani 柳谷 隆彦

柳谷 隆彦 ヤナギタニ タカヒコ

YANAGITANI Takahiko 柳谷 隆彦

Research Projects

Research Products

Co-Researchers

高次モードScAlNエピブラッグ反射器を用いたマイクロセンサPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Polarization inverted ScAlN multilayers for high power SMRPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Detection of protein binding by shear mode ultrasonic reflection coefficients using c-axis tilted ScAlN film in UHF rangePrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Electromagnetical coupling of AlCeN films grown by RF magnetron sputteringPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Shear mode resonators for detection of biomolecular interactions in liquidPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Measurement method for polarity-inverted layered piezoelectric thin films using scanning nonlinear dielectric microscopy

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Ultrasonic probe using polarity inverted piezoelectric layerPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Study on the piezoelectricity in bone in the MHz range

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Development of non contact piezoelectricity measurement system By Brillouin light scattering

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Piezoelectric thin film MEMS with giant shear electromechanical couplingPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Development of surface acoustic wave piezoelectric films sensors for liquid property measurementPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] Epitaxial ZnO piezoelectric layer on SiO2/Mo solidly mounted resonator fabricated using epitaxial Au sacrificial layer2024

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Full-epitaxial ScAlN and MgZnO solidly mounted resonators based on epitaxial acoustic Bragg reflector2024

Author(s)

Journal Title

TAKAHIKO Yanagitani 柳谷隆彦

柳谷隆彦ヤナギタニタカヒコ

YANAGITANI Takahiko 柳谷隆彦