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Une Atsunobu  宇根 篤暢

ORCIDConnect your ORCID iD *help
Researcher Number 10535371
Affiliation (based on the past Project Information) *help 2017: 元防衛大学校
Review Section/Research Field
Except Principal Investigator
Production engineering/Processing studies
Keywords
Except Principal Investigator
凝固保持 / 研磨 / 石英ガラス / 真空チャック / 基板変形 / ウエハ保持 / 石英ガラスウエハ / 石英ガラス基板 / 研削・研磨 / 薄型基板 / 冷凍液 / 反り / 冷凍ピンチャック
  • Research Projects

    (1 results)
  • Research Products

    (7 results)
  • Co-Researchers

    (1 People)
  •  The study of polishing process to fabricate a nonwarped thin substrate using freezing pin chuck

    • Principal Investigator
      Yoshitomi Kenichiro
    • Project Period (FY)
      2015 – 2017
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Production engineering/Processing studies
    • Research Institution
      防衛大学校(総合教育学群、人文社会科学群、応用科学群、電気情報学群及びシステム工学群)

All 2017 2016 2015

All Journal Article Presentation

  • [Journal Article] Development of a Freezing Pin Chuck for Polishing (2nd Report)2016

    • Author(s)
      吉冨健一郎,竹鼻亮道,宇根篤暢,餅田正秋
    • Journal Title

      Journal of the Japan Society for Precision Engineering

      Volume: 82 Issue: 1 Pages: 82-86

    • DOI

      10.2493/jjspe.82.82

    • NAID

      130005118321

    • ISSN
      0912-0289, 1882-675X
    • Language
      Japanese
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-15K05748
  • [Presentation] 冷凍ピンチャックを用いた石英ガラス基板の平坦化研磨ーピン間冷却液の効果ー2017

    • Author(s)
      吉冨 健一郎,宇根 篤暢,餅田 正秋
    • Organizer
      2017年度砥粒加工学会学術講演会
    • Data Source
      KAKENHI-PROJECT-15K05748
  • [Presentation] Grinding characteristics using a freezing pin chuck for a warped quartz glass wafer2017

    • Author(s)
      K. Yoshitomi, A. Une, M. Mochida
    • Organizer
      The 20th International Symposium on Advancesin Abrasive Technology
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K05748
  • [Presentation] Development of a freezing pin chuck system to prevent a thin substrate from deformation2016

    • Author(s)
      K. Yoshitomi,K. Tada,A. Une,M. Mochida
    • Organizer
      The 19th International Symposium on Advancesin Abrasive Technology
    • Place of Presentation
      Stockholm, Sweden
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K05748
  • [Presentation] 冷凍ピンチャックを用いた基板保持手順の最適化2016

    • Author(s)
      吉冨 健一郎,多田 一生,宇根 篤暢,餅田 正秋
    • Organizer
      砥粒加工学会
    • Place of Presentation
      兵庫県立大学(兵庫県,姫路市)
    • Data Source
      KAKENHI-PROJECT-15K05748
  • [Presentation] Development of a Freezing Pin Chuck for Fabricating a Nonwarped Substrate2015

    • Author(s)
      K. Tada, K. Yoshitom, M. Mochidai, A. Une
    • Organizer
      Proceedings of LEM 21
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2015-10-21
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K05748
  • [Presentation] 冷凍ピンチャックを用いた高平坦化研磨(第1報)-メニスカス力の基板変形への影響-2015

    • Author(s)
      多田一生,吉冨健一郎,餅田 正秋,宇根 篤暢
    • Organizer
      精密工学会
    • Place of Presentation
      宮城県,仙台市
    • Year and Date
      2015-09-06
    • Data Source
      KAKENHI-PROJECT-15K05748
  • 1.  Yoshitomi Kenichiro (40546149)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 5 results

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