TAKEUCHI Mitsuaki 竹内光明

Researcher Number	10552656
Other IDs
Affiliation (based on the past Project Information) *help	2016 – 2017: 京都大学, 工学研究科, 助教 2012 – 2015: 京都大学, 工学(系)研究科(研究院), 助教 2014: 京都大学, 大学院工学研究科, 助教 2012: 京都大学, 大学院・工学研究科, 助教 2010 – 2012: 京都大学, 工学研究科, 助教
Review Section/Research Field	Principal Investigator Electron device/Electronic equipment Except Principal Investigator Electron device/Electronic equipment / Applied materials science/Crystal engineering
Keywords	Principal Investigator イオンビーム / イオン源 / イオン液体 / イオン注入 / 微細プロセス技術 Except Principal Investigator イオンビーム / クラスター / プロセッシング / 薄膜 / 表面加工 … More / ビーム応用 / アルコール / 遷移金属 / スパッタリング / マグネトロン / スピントロニクス / 表面反応 / サイズ分離 / ハイドレート / 二酸化炭素 / メタン / 構造解析 / サイズ分析 / クラスターサイズ / 水和クラスター / 水クラスター / 半導体加工 / 照射損傷 / エタノール / 酸化膜形成 / 半導体基板加工 / アセトン / シリコン / 液体クラスター / 微細プロセス技術 Less

Liquid cluster ion beam processing of metal films for spintronics devices
- Principal Investigator
  
  Ryuto Hiromichi
- Project Period (FY)
  2015 – 2017
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Kyoto University
Study on size separation and structural analysis of hydrate clusters and their interactions with solid surfaces
- Principal Investigator
  
  TAKAOKA Gikan
- Project Period (FY)
  2012 – 2014
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Applied materials science/Crystal engineering
- Research Institution
  Kyoto University
Enhancement of liquid cluster ion beam intensity for application in semiconductor industry
- Principal Investigator
  
  RYUTO Hiromichi
- Project Period (FY)
  2010 – 2012
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Kyoto University
Development of Polyatomic Ion Source for Organic Liquids toward Application of Shallow Ion ImplantationPrincipal Investigator
- Principal Investigator
  
  TAKEUCHI Mitsuaki
- Project Period (FY)
  2010 – 2012
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Kyoto University

All 2017 2016 2015 2014 2013 2012 2011 2010 Other

All Journal Article Presentation

[Journal Article] Characterization by transmission electron microscopy and small-angle X-ray scattering of Au clusters formed in ionic liquids2016
- Author(s)
  G. H. Takaoka, Y. Matsumoto, M. Takeuchi, H. Ryuto
- Journal Title
  
  Surface and interface analysis
  
  Volume: 48 Issue: 11 Pages: 1148-1152
- DOI
  10.1002/sia.6132
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15K06015
[Journal Article] Spectroscopic evidences of high temperatures and pressures during the cluster ion beam interaction with solid surfaces2016
- Author(s)
  F. Musumeci, H. Ryuto, A. Sakata, M. Takeuchi, G. H. Takaoka
- Journal Title
  
  Journal of Luminescence
  
  Volume: 172 Pages: 224-230
- DOI
  10.1016/j.jlumin.2015.12.018
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K06015
[Journal Article] Crystal Structure and Accelerated Ion-Irradiation Effect of Water Clusters2016
- Author(s)
  G. H. Takaoka,H. Ryuto, M. Takeuchi, F. Musumeci
- Journal Title
  
  e-Journal of Surface Science and Nanotechnology
  
  Volume: 14 Pages: 144-149
- NAID
  130005151356
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K06015
[Journal Article] Sputtering of silicon and glass substrates with polyatomic molecular ion beams generated from ionic liquids2016
- Author(s)
  M. Takeuchi, Y. Hoshide, H. Ryuto, G. H. Takaoka
- Journal Title
  
  J. Vac. Sci. Technol. A
  
  Volume: 34 Issue: 2
- DOI
  10.1116/1.4942996
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15K06015
[Journal Article] Growth behavior of gold nanoparticles synthesized in unsaturated fatty acids by vacuum evaporation methods2016
- Author(s)
  A. Fujita, Y. Matsumoto, M. Takeuchi, H. Ryuto, G. H. Takaoka
- Journal Title
  
  Physical Chemistry Chemical Physics
  
  Volume: 18 Issue: 7 Pages: 5464-5470
- DOI
  10.1039/c5cp07323e
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15K06015
[Journal Article] Ion-Beam Deposition/Etching Using EMIM-N(CN)<sub>2</sub> Ionic Liquid Ion Source2015
- Author(s)
  M. Takeuchi, Y. Hoshide, T. Hamaguchi, H. Ryuto, G. H. Takaoka
- Journal Title
  
  Transactions of the Materials Research Society of Japan
  
  Volume: 40 Issue: 2 Pages: 87-90
- DOI
  10.14723/tmrsj.40.87
- NAID
  130005089519
- ISSN
  1382-3469, 2188-1650
- Language
  Japanese
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15K06015
[Journal Article] Irradiation Effect of Gas-Hydrate Cluster Ions on Solid Surfaces2014
- Author(s)
  G.H. Takaoka, H. Ryuto, M. Takeuchi
- Journal Title
  
  Nuclear Instruments and Methods
  
  Volume: B326 Pages: 190-194
- DOI
  10.1016/j.nimb.2013.09.038
- NAID
  120005435065
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-24360010
[Journal Article] Interactions of Fragment Ions of Tetradecane with Solid Surfaces2014
- Author(s)
  G.H. Takaoka, M. Takeuchi, H. Ryuto et al.
- Journal Title
  
  Nuclear Instruments and Methods
  
  Volume: B341 Pages: 48-52
- DOI
  10.1016/j.nimb.2014.06.029
- NAID
  120005525678
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-24360010
[Journal Article] Interaction between Water Cluster Ions and Mica Surface2014
- Author(s)
  H. Ryuto, M. Takeuchi, G.H. Takaoka et al.
- Journal Title
  
  Journal of Vacuum Science and Technology A
  
  Volume: 32 Issue: 2
- DOI
  10.1116/1.4849323
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-24360010
[Journal Article] Mesenchymal Stem Cell Adhesion on Metal and Polymeric Surfaces Modified by Oxygen Cluster Ion Irradiation2014
- Author(s)
  G.H. Takaoka, M. Takeuchi, H. Ryuto et al.
- Journal Title
  
  Transactions of the Materials Research Society of Japan
  
  Volume: 39 Pages: 459-463
- NAID
  130005004381
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360010
[Journal Article] Low Fragment Polyatomic Molecular Ion Source by Using Permanent Magnets2014
- Author(s)
  M. Takeuchi, H. Ryuto, G.H. Takaoka et al.
- Journal Title
  
  Review of Scientific Instruments
  
  Volume: 85 Issue: 2
- DOI
  10.1063/1.4826328
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-24360010
[Journal Article] Surface Modification Using Ionic Liquid Ion Beams2014
- Author(s)
  G.H. Takaoka, M. Takeuchi, H. Ryuto et al.
- Journal Title
  
  Nuclear Instruments and Methods
  
  Volume: B341 Pages: 32-36
- DOI
  10.1016/j.nimb.2014.06.030
- NAID
  120005525679
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-24360010
[Journal Article] Characteristics of Acetone Cluster Ion Beam for Surface Processing and Modification2014
- Author(s)
  H. Ryuto, M. Takeuchi, G.H. Takaoka et al.
- Journal Title
  
  Review of Scientific Instruments
  
  Volume: 85 Issue: 2
- DOI
  10.1063/1.4824754
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-24360010
[Journal Article] Equipment to Detect Luminuscence Induced by Cluster Ion Collision2014
- Author(s)
  H. Ryuto, M. Takeuchi, G.H. Takaoka et al.
- Journal Title
  
  Review of Scientific Instruments
  
  Volume: 85 Issue: 2
- DOI
  10.1063/1.4825388
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-24360010
[Journal Article] Irradiation of Ionic Liquid Ion Beams on Silicon and Glass Substrates2013
- Author(s)
  Mitsuaki Takeuchi (代表者), Takuya Hamaguchi, Hiromichi Ryuto, Gikan H Takaoka
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
  
  Volume: in press
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760252
[Journal Article] Development of Ionic Liquid Ion Source with Porous Emitter for Surface Modification2013
- Author(s)
  M. Takeuchi, H. Ryuto, G.H. Takaoka et al.
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research B
  
  Volume: 315 Pages: 345-349
- DOI
  10.1016/j.nimb.2013.05.065
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360010
[Journal Article] Deposition of Ionic Liquid Ion Beams on Solid Substrates2013
- Author(s)
  M. Takeuchi, H. Ryuto, G.H. Takaoka et al.
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research B
  
  Volume: 315 Pages: 234-239
- DOI
  10.1016/j.nimb.2013.04.074
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360010
[Journal Article] Irradiation effects of ethanol cluster ion beam on mica surface2013
- Author(s)
  H. Ryuto, Y. Ohmura, M. Takeuchi, G. H. Takaoka
- Journal Title
  
  Trans. MRS-J
  
  Volume: 38 Pages: 93-96
- NAID
  130005004202
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560329
[Journal Article] Development of high-current ionic liquid ion source toward surface modification2013
- Author(s)
  Mitsuaki Takeuchi, Takuya Hamaguchi, Hiromichi Ryuto and Gikan H Takaoka
- Journal Title
  
  MRS Online Proceedings Library
  
  Volume: 1575
- DOI
  10.1557/opl.2013.583
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760252
[Journal Article] Development of High-current Ionic Liquid Ion Source toward Surface Modification2013
- Author(s)
  Mitsuaki Takeuchi (代表者), Takuya Hamaguchi, Hiromichi Ryuto, Gikan H Takaoka
- Journal Title
  
  MRS Online Proceedings Library
  
  Volume: in press
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760252
[Journal Article] Acetone Cluster Ion Beam Irradiation on Solid Surfaces2013
- Author(s)
  H. Ryuto, M. Takeuchi, G.H. Takaoka et al.
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research B
  
  Volume: 315 Pages: 231-233
- DOI
  10.1016/j.nimb.2013.04.027
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360010
[Journal Article] Surface Reaction between Water Cluster Ion and Silicon Substrate2013
- Author(s)
  H. Ryuto, M. Takeuchi, G.H. Takaoka et al.
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research B
  
  Volume: 315 Pages: 227-230
- DOI
  10.1016/j.nimb.2013.05.083
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360010
[Journal Article] Irradiation effects of water cluster ion beam on PMMA surface2013
- Author(s)
  H. Ryuto, G. Ichihashi, M. Takeuchi, G. H. Takaoka
- Journal Title
  
  Vacuum
  
  Volume: 87 Pages: 119-122
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560329
[Journal Article] Irradiation of Ionic Liquid Ion Beams on Silicon and Glass Substrates2013
- Author(s)
  Mitsuaki Takeuchi, Takuya Hamaguchi, Hiromichi Ryuto, Gikan H Takaoka
- Journal Title
  
  Nucl. Instrum. Meth. Phys. B
  
  Volume: (in press)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760252
[Journal Article] Development of Ionic Liquid Ion Source with Porous Emitter for Surface Modification2013
- Author(s)
  Mitsuaki Takeuchi, Takuya Hamaguchi, Hiromichi Ryuto, Gikan H Takaoka
- Journal Title
  
  Nucl. Instrum. Meth. Phys. B
  
  Volume: (in press)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760252
[Journal Article] Surface processing using water cluster ion beams2013
- Author(s)
  G.H. Takaoka, H. Ryuto, M. Takeuchi, et al.
- Journal Title
  
  Nuclear Instruments and Methods in Physics Research B
  
  Volume: 307 Pages: 33-36
- DOI
  10.1016/j.nimb.2012.11.070
- NAID
  120005343925
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360010
[Journal Article] Irradiation effects of water cluster ion beam on PMMA surface2013
- Author(s)
  H. Ryuto, M. Takeuchi, G.H. Takaok,, et al.
- Journal Title
  
  Vacuum
  
  Volume: 87 Pages: 119-122
- DOI
  10.1016/j.vacuum.2012.02.051
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24360010
[Journal Article] Production and irradiation of ionic liquid cluster ions2013
- Author(s)
  Gikan H Takaoka, Mitsuaki Takeuchi,Hiromichi Ryuto
- Journal Title
  
  Nucl. Instrum. Meth. Phys. B
  
  Volume: (in press) Pages: 257-259
- DOI
  10.1016/j.nimb.2012.11.072
- NAID
  120005343926
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760252, KAKENHI-PROJECT-24360010
[Journal Article] Surface irradiation and materials processing using polyatomic cluster ion beams2012
- Author(s)
  G. H. Takaoka, H. Ryuto, M. Takeuchi
- Journal Title
  
  J. Mater. Res
  
  Volume: 27 Pages: 806-821
- NAID
  120003988356
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560329
[Journal Article] イオン液体BMIM-PF6イオンビーム照射によるガラス基板の表面改質2012
- Author(s)
  竹内光明, 濱口拓也, 龍頭啓充, 高岡義寛
- Journal Title
  
  信学技報
  
  Volume: vol.112,no.337 Pages: 25-30
- Data Source
  KAKENHI-PROJECT-22760252
[Journal Article] Surface irradiation and materials processing using polyatomic cluster ion beams2012
- Author(s)
  G.H.Takaoka
- Journal Title
  
  J.Mater.Res.
  
  Volume: 27 Issue: 5 Pages: 806-821
- DOI
  10.1557/jmr.2011.426
- NAID
  120003988356
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560329, KAKENHI-PROJECT-22760252, KAKENHI-PROJECT-24360010
[Journal Article] APPLICATION OF LIQUID CLUSTER ION BEAMS IN SURFACE PROCESSING2011
- Author(s)
  H.Ryuto, M.Takeuchi, G.Takaoka
- Journal Title
  
  Proceedings of IPAC'10
  
  Pages: 133-135
- Data Source
  KAKENHI-PROJECT-22760252
[Journal Article] Fabrication of Impregnated-Electrode-Type Polyatomic Ion Source with Ionic Liquid2011
- Author(s)
  M.Takeuchi, H.Ryuto, G.H.Takaoka
- Journal Title
  
  AIP Conf.Proc
  
  Volume: 1,321 Pages: 456-459
- DOI
  10.1063/1.3548449
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760252
[Journal Article] Surface Processing and Modification of Polymers by Water Cluster Ion Beam2011
- Author(s)
  H.Ryuto, M.Takeuchi, G.Ichihashi, P.Sommani, G.H.Takaoka
- Journal Title
  
  AIP Conf.Proc
  
  Volume: 1,321 Pages: 310-313
- DOI
  10.1063/1.3548389
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760252
[Journal Article] Suppression of divergence of low energy ion beams by space charge neutralization with low energy electrons emitted from field emitter2011
- Author(s)
  J.Ishikawa, Y.Gotoh, M.Takeuchi
- Journal Title
  
  AIP Conf.Proc
  
  Volume: 1,321 Pages: 496-500
- DOI
  10.1063/1.3548461
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760252
[Journal Article] Micro-pattering of Si (100) surfaces by ethanol cluster ion beans2011
- Author(s)
  G.H.Takaoka
- Journal Title
  
  Surface & Coatings Technology
  
  Volume: 206 Issue: 5 Pages: 869-873
- DOI
  10.1016/j.surfcoat.2011.04.051
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560329, KAKENHI-PROJECT-22760252
[Journal Article] Chemical erosion and sputtering of solid surfaces with liquid cluster ions2011
- Author(s)
  G.H.Takaoka
- Journal Title
  
  Surface & Coatings Technology
  
  Volume: 206 Issue: 5 Pages: 845-848
- DOI
  10.1016/j.surfcoat.2011.03.108
- NAID
  120003573884
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560329, KAKENHI-PROJECT-22760252
[Journal Article] 多原子分子イオンビームによるシリコン表面照射効果2010
- Author(s)
  竹内光明, 龍頭啓充, 高岡義寛
- Journal Title
  
  信学技報
  
  Volume: 110 Pages: 69-72
- NAID
  110008676031
- Data Source
  KAKENHI-PROJECT-22760252
[Journal Article] Sources of polyatomic ions of organic liquids2010
- Author(s)
  G.H.Takaoka, M.Takeuchi, H.Ryuto
- Journal Title
  
  The Review of scientific instruments
  
  Volume: 81
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760252
[Journal Article] Carbon implantation by polyatomic ion source of organic liquids2010
- Author(s)
  M.Takeuchi
- Journal Title
  
  Proceedings of IPAC'10
  
  Pages: 136-138
- Data Source
  KAKENHI-PROJECT-22560329
[Journal Article] Fabrication of impregnated-electrode-type polyatomic ion source with ion is liquid2010
- Author(s)
  M.Takeuchi
- Journal Title
  
  AIP CP1321, Ion Implantation Technology 2010
  
  Pages: 456-459
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22560329
[Journal Article] Metal-free and gasless space charge compensation of low energy ion beam by using surface-carbonized silicon field emitter array2010
- Author(s)
  M.Takeuchi, Y.Gotoh, H.Tsuji, J.Ishikawa, S.Sakai
- Journal Title
  
  Journal of Vacuum Science & Technology B
  
  Volume: 28
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760252
[Journal Article] Characteristics of liquid cluster ion beam for surface treatment2010
- Author(s)
  H.Ryuto, R.Ozaki, Y.Kubo, M.Takeuchi, G.H.Takaoka
- Journal Title
  
  The Review of scientific instruments
  
  Volume: 81
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760252
[Journal Article] 多原子分子イオンビームによるシリコン表面照射効果2010
- Author(s)
  竹内光明
- Journal Title
  
  信学技報IEICE Technical Report
  
  Volume: SDM2010-197 Pages: 69-72
- NAID
  110008676031
- Data Source
  KAKENHI-PROJECT-22560329
[Presentation] 数十keV電子線照射によるイオン液体中でのCu薄膜の形成2017
- Author(s)
  東浦佑真、竹内光明、龍頭啓充
- Organizer
  応用物理学会関西支部平成29年度第2回講演会
- Data Source
  KAKENHI-PROJECT-15K06015
[Presentation] 液体クラスターイオンビームの遷移金属薄膜への照射効果2017
- Author(s)
  清水友規、清水大貴、竹内光明、龍頭啓充
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（神奈川県・横浜市）
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15K06015
[Presentation] Sputtering and photon emission of metal surface induced by cluster ion collision2017
- Author(s)
  H. Ryuto, Y. Shimizu, M. Yamaoka, D. Shimizu, D. Yamamoto, M. Takeuchi, F. Musumeci
- Organizer
  International Union of Material Research Societies-The 15th International Conference on Advanced Materials (IUMRS-ICAM2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K06015
[Presentation] 遷移金属薄膜に対する液体クラスターイオンビームの照射効果2017
- Author(s)
  清水大貴、山本大介、竹内光明、龍頭啓充
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-15K06015
[Presentation] Etching, oxidation, and photon emission induced by cluster ion collision2017
- Author(s)
  H. Ryuto, M. Takeuchi
- Organizer
  International Symposium on Photonics and Electronics Science and Engineering 2017
- Place of Presentation
  京都大学（京都府・京都市）
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K06015
[Presentation] 竹炭を用いたイオン液体イオン源の長時間動作特性2017
- Author(s)
  東浦佑真、西和哉、竹内光明、龍頭啓充
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（神奈川県・横浜市）
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15K06015
[Presentation] CuCl含有イオン液体EMIM -DCAへの電子線照射によるCu薄膜の形成2017
- Author(s)
  東浦佑真、竹内光明、龍頭啓充
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-15K06015
[Presentation] クラスターイオンビーム誘起発光を用いた表面分析法の開発2017
- Author(s)
  山岡昌貴、龍頭啓充、Francesco Musumeci、竹内光明
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（神奈川県・横浜市）
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-15K06015
[Presentation] Long-life emitter for ionic liquid ion source using open-pore structure of bamboo chacoal2017
- Author(s)
  M. Takeuchi, Y. Higashiura, K. Nishi, H. Ryuto
- Organizer
  International Union of Material Research Societies-The 15th International Conference on Advanced Materials (IUMRS-ICAM2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K06015
[Presentation] 液体クラスターイオンビームによる遷移金属薄膜の表面加工2017
- Author(s)
  清水大貴、山本大介、竹内光明、龍頭啓充
- Organizer
  応用物理学会関西支部平成29年度第2回講演会
- Data Source
  KAKENHI-PROJECT-15K06015
[Presentation] 竹炭エミッタを用いたイオン液体イオン源の開発2016
- Author(s)
  竹内光明、西和哉、龍頭啓充
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  朱鷺メッセ（新潟県・新潟市）
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-15K06015
[Presentation] イオン液体EMIM-DCAイオンビームの表面処理応用に関する検討2016
- Author(s)
  竹内光明, 星出優輝, 竹内裕人, 龍頭啓充, 高岡義寛
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15K06015
[Presentation] イオン液体EMIM-BF4から生成したBF4イオンによる二次イオン収率評価2016
- Author(s)
  西和哉、竹内光明、龍頭啓充
- Organizer
  応用物理学会関西支部平成28年度第1回講演会
- Place of Presentation
  産業技術総合研究所（大阪府・池田市）
- Data Source
  KAKENHI-PROJECT-15K06015
[Presentation] イオン液体EMIM-BF4 イオンビームの固体表面照射効果2016
- Author(s)
  西和哉, 上田弘貴, 藤井志貴, 竹内光明, 龍頭啓充, 高岡義寛
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15K06015
[Presentation] Sputtering, oxidation, and photon emission induced by liquid cluster ion collision2016
- Author(s)
  H. Ryuto, M. Takeuchi, F. Musumeci, G. H. Takaoka
- Organizer
  Ninth International Meeting on Recent Developments in the Study of Radiation Effects in Matter (REM9)
- Place of Presentation
  京都市国際交流会館（京都府・京都市）
- Year and Date
  2016-10-26
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K06015
[Presentation] Setup for measuring cluster ion beam induced luminescence2016
- Author(s)
  山岡昌貴、松井亮祐、Francesco Musumeci、竹内光明、龍頭啓充
- Organizer
  第17回「イオンビームによる表面・界面解析」特別研究会
- Place of Presentation
  京都府立大学（京都府・京都市）
- Year and Date
  2016-12-03
- Data Source
  KAKENHI-PROJECT-15K06015
[Presentation] イオン液体EMIM-DCAイオンビーム蒸着によるCN膜の形成2016
- Author(s)
  竹内光明、西和哉、龍頭啓充
- Organizer
  応用物理学会関西支部平成28年度第1回講演会
- Place of Presentation
  産業技術総合研究所（大阪府・池田市）
- Data Source
  KAKENHI-PROJECT-15K06015
[Presentation] 固体表面へのクラスターイオンビーム照射による発光スペクトル2016
- Author(s)
  織田啓佑、龍頭啓充、Francesco Musumeci、竹内光明、高岡義寛
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15K06015
[Presentation] 固体試料のクラスターイオンビーム誘起発光スペクトル2016
- Author(s)
  山岡昌貴、織田啓佑、龍頭啓充、Francesco Musumeci、坂田彬、竹内光明、高岡義寛
- Organizer
  応用物理学会関西支部平成28年度第1回講演会
- Place of Presentation
  産業技術総合研究所（大阪府・池田市）
- Data Source
  KAKENHI-PROJECT-15K06015
[Presentation] Sputtering of silicon and glass substrates with polyatomic molecular ion beams generated from ionic liquids2015
- Author(s)
  M. Takeuchi, Y. Hoshide, H. Ryuto, G. H Takaoka
- Organizer
  Thirteenth International Symposium on Sputtering & Plasma Processes, ISSP 2015
- Place of Presentation
  京都
- Year and Date
  2015-07-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K06015
[Presentation] Oxygen cluster ion beam assisted deposition of aluminum oxide film2015
- Author(s)
  H. Ryuto, T. Yakushiji, M. Takeuchi, G. H. Takaoka
- Organizer
  Thirteenth International Symposium on Sputtering & Plasma Processes, ISSP 2015
- Place of Presentation
  京都
- Year and Date
  2015-07-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K06015
[Presentation] Interaction of polyatomic carbon ions with Si surface2015
- Author(s)
  M. Takeuchi, K. Hayashi, H. Ryuto, G. H Takaoka, T. Nagayama, K. Matsuda
- Organizer
  Thirteenth International Symposium on Sputtering & Plasma Processes, ISSP 2015
- Place of Presentation
  京都
- Year and Date
  2015-07-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K06015
[Presentation] イオン液体イオンビームにより形成したC-N薄膜の基板温度依存性2015
- Author(s)
  星出優輝、竹内光明、龍頭啓充、高岡義寛
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-15K06015
[Presentation] アルゴンクラスターイオンビーム照射による発光スペクトル2015
- Author(s)
  龍頭啓充、Francesco Musumeci、坂田彬、竹内光明、高岡義寛
- Organizer
  ナノ学会第13回大会
- Place of Presentation
  仙台
- Year and Date
  2015-05-11
- Data Source
  KAKENHI-PROJECT-15K06015
[Presentation] Surface Modification by Using Ionic Liquid Ion Beams2013
- Author(s)
  G.H. Takaoka, M. Takeuchi, H. Ryuto et al.
- Organizer
  E-MRS 2013 Spring Meeting
- Place of Presentation
  Strasbourg, France
- Data Source
  KAKENHI-PROJECT-24360010
[Presentation] Surface Smoothing of Glass Substrate by Irradiation of Ionic Liquid Ion Beams2013
- Author(s)
  M. Takeuchi, H. Ryuto, G.H. Takaoka et al.
- Organizer
  2013 MRS Spring Meeting
- Place of Presentation
  San Francisco, USA
- Data Source
  KAKENHI-PROJECT-24360010
[Presentation] Interactions of Fragment Ions of Tetradecane with Solid Surfaces2013
- Author(s)
  G.H. Takaoka, M. Takeuchi, H. Ryuto et al.
- Organizer
  E-MRS 2013 Spring Meeting
- Place of Presentation
  Strasbourg, France
- Data Source
  KAKENHI-PROJECT-24360010
[Presentation] Low Fragment Polyatomic Molecular Ion Source by Using Permanent Magnets2013
- Author(s)
  M. Takeuchi, H. Ryuto, G.H. Takaoka et al.
- Organizer
  15th International Conference on Ion Sources (ICIS'13)
- Place of Presentation
  Chiba, Japan
- Data Source
  KAKENHI-PROJECT-24360010
[Presentation] Irradiation Effect of Gas-Hydrate Cluster Ions on Solid Surfaces2013
- Author(s)
  G.H. Takaoka, H. Ryuto, M. Takeuchi et al.
- Organizer
  The 17th International Conference on Radiation Effects in Insulators (REI-17)
- Place of Presentation
  Helsinki, Finland
- Data Source
  KAKENHI-PROJECT-24360010
[Presentation] Effects of Ionic Liquid EMIM-N(CN)2 Ion Beam Irradiation2013
- Author(s)
  M. Takeuchi, H. Ryuto, G.H. Takaoka et al.
- Organizer
  23rd Annual Meeting of MRS-Japan
- Place of Presentation
  Yokohama, Japan
- Data Source
  KAKENHI-PROJECT-24360010
[Presentation] Development of High-current Ionic Liquid Ion Source toward Surface Modification2013
- Author(s)
  Mitsuaki Takeuchi (代表者), Takuya Hamaguchi, Hiromichi Ryuto, Gikan H Takaoka
- Organizer
  2013 MRS Spring Meeting & Exhibit April 1-5, 2013 San Francisco, California, USA
- Place of Presentation
  San Francisco, California, USA
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] Characteristics of Acetone Cluster Ion Beam for Surface Processing and Modification2013
- Author(s)
  H. Ryuto, M. Takeuchi, G.H. Takaoka et al.
- Organizer
  15th International Conference on Ion Sources (ICIS'13)
- Place of Presentation
  Chiba, Japan
- Data Source
  KAKENHI-PROJECT-24360010
[Presentation] Equipment to Detect Luminuscence Induced by Cluster Ion Collision2013
- Author(s)
  H. Ryuto, M. Takeuchi, G.H. Takaoka et al.
- Organizer
  15th International Conference on Ion Sources (ICIS'13)
- Place of Presentation
  Chiba, Japan
- Data Source
  KAKENHI-PROJECT-24360010
[Presentation] イオン液体イオンビーム照射によるガラス基板の表面改質(II）2013
- Author(s)
  濱口拓也，竹内光明 (代表者)，龍頭啓充，高岡義寛
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] イオン液体イオンビーム照射によるガラス基板の表面改質(II)2013
- Author(s)
  濱口拓也, 竹内光明, 龍頭啓充, 高岡義寛
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] Surface Smoothing of Glass Substrate by Irradiation of Ionic Liquid Ion Beams2013
- Author(s)
  Mitsuaki Takeuchi, Takuya Hamaguchi, Hiromichi Ryuto, Gikan H Takaoka
- Organizer
  2013 MRS Spring Meeting & Exhibit
- Place of Presentation
  San Francisco, California, USA
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] Surface Smoothing of Glass Substrate by Irradiation of Ionic Liquid Ion Beams2013
- Author(s)
  Mitsuaki Takeuchi (代表者), Takuya Hamaguchi, Hiromichi Ryuto, Gikan H Takaoka
- Organizer
  2013 MRS Spring Meeting & Exhibit April 1-5, 2013 San Francisco, California, USA
- Place of Presentation
  San Francisco, California, USA
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] Polyatomic Ion Beam of Ionic Liquids with Different Conductivity2013
- Author(s)
  M. Takeuchi, H. Ryuto, G.H. Takaoka et al.
- Organizer
  23rd Annual Meeting of MRS-Japan
- Place of Presentation
  Yokohama, Japan
- Data Source
  KAKENHI-PROJECT-24360010
[Presentation] Development of High-Current Ionic Liquid Ion Source toward Surface Modification2013
- Author(s)
  M. Takeuchi, H. Ryuto, G.H. Takaoka et al.
- Organizer
  2013 MRS Spring Meeting
- Place of Presentation
  San Francisco, USA
- Data Source
  KAKENHI-PROJECT-24360010
[Presentation] Development of High-current Ionic Liquid Ion Source toward Surface Modification2013
- Author(s)
  Mitsuaki Takeuchi, Takuya Hamaguchi, Hiromichi Ryuto, Gikan H Takaoka
- Organizer
  2013 MRS Spring Meeting & Exhibit
- Place of Presentation
  San Francisco, California, USA
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] イオン液体イオンビームの質量分析2012
- Author(s)
  濱口拓也, 植田亨, 竹内光明, 龍頭啓充, 高岡義寛
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  東京
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] Surface Processing Using Water Cluster Ion Beams2012
- Author(s)
  G.H. Takaoka, H. Ryuto, M. Takeuchi, et al.
- Organizer
  The 18th Int. Con￡on Ion Beam Modifi. Mater. (IBMM2012)
- Place of Presentation
  青島(中国)
- Data Source
  KAKENHI-PROJECT-24360010
[Presentation] Deposition of Ionic Liquid Ion Beams on Solid Surfaces2012
- Author(s)
  M. Takeuchi, H. Ryuto, G. H. Takaoka, et al.
- Organizer
  25th Int. Conf.on Atomic Colli. Solids (ICACS-25)
- Place of Presentation
  京都(日本)
- Data Source
  KAKENHI-PROJECT-24360010
[Presentation] Deposition of Ionic Liquid Ion Beams on Solid Substrate2012
- Author(s)
  M. Takeuchi, T. Hamaguchi, H. Ryuto, and G. H. Takaoka
- Organizer
  25th International Conference on Atomic Collisions in Solids
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] Irradiation Effect of Ionic Liquid BMI-PF_6 Ion Beam on Glass Surface2012
- Author(s)
  M. Takeuchi, H. Ryuto, G.H. Takaoka, et al.
- Organizer
  IUMRS-Int. Conf. on Electro. Mat. (IUMRS-ICEM2012)
- Place of Presentation
  横浜(日本)
- Data Source
  KAKENHI-PROJECT-24360010
[Presentation] イオン液体イオンビームの固体表面照射効果2012
- Author(s)
  竹内光明, 濱口拓也, 植田亨, 龍頭啓充, 高岡義寛
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  東京
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] 水クラスターイオンとシリコン基板の表面反応2012
- Author(s)
  市橋岳, 西村拓朗, 龍頭啓充, 竹内光明, 高岡義寛
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  東京
- Year and Date
  2012-03-16
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] Irradiation Effects of Ethanol Clustaf Ion Beam on Mica Surface2012
- Author(s)
  H. Ryuto, M. Takeuchi, G.H. Takaoka, et al.
- Organizer
  IUMRS-Int. Conf. on Electro. Mat. (IUMRS-ICEM2012)
- Place of Presentation
  横浜(日本)
- Data Source
  KAKENHI-PROJECT-24360010
[Presentation] Acetone Cluster Ion Beam Irradiation on Solid Surfaces2012
- Author(s)
  H. Ryuto, M. Takeuchi, G.H. Takaoka, et al.
- Organizer
  25^<th> Int. Conf. on Atomic Colli. Solids (ICACS-25)
- Place of Presentation
  京都(日本)
- Data Source
  KAKENHI-PROJECT-24360010
[Presentation] 固体表面改質へ向けたイオン液体 EMI-BF4 イオンビームの特性評価2012
- Author(s)
  竹内光明 (代表者)，濱口拓也，龍頭啓充，高岡義寛
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  愛媛大学・松山大学
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] Surface Reaction between Water Cluster Ion and Silicon Substrate2012
- Author(s)
  H. Ryuto, M. Takeuchi, G.H. Takaoka, et al.
- Organizer
  25^<th> Int. Conf. on Atomic Colli. Solids (ICACS-25)
- Place of Presentation
  京都(日本)
- Data Source
  KAKENHI-PROJECT-24360010
[Presentation] Development of Ionic Liquid Ion Source with Porous Emitter for Surface Modification2012
- Author(s)
  M. Takeuchi, T. Hamaguchi, H. Ryuto, and G. H. Takaoka
- Organizer
  25th International Conference on Atomic Collisions in Solids
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] Acetone cluster ion beam irradiation on solid surfaces2012
- Author(s)
  H. Ryuto, Y. Kakumoto, S. Itozaki, M. Takeuchi, G. H. Takaoka
- Organizer
  25th International Conference on Atomic Collisions in Solids
- Place of Presentation
  Kyoto
- Data Source
  KAKENHI-PROJECT-22560329
[Presentation] Iradiation Effect of Ionic Liquid BMI-PF6 Ion Beam on Glass Surface2012
- Author(s)
  M. Takeuchi, T. Hamaguchi, H. Ryuto, and G. H. Takaoka
- Organizer
  IUMRS-ICEM2012
- Place of Presentation
  Yokohama, Japan
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] Irradiation effects of ethanol cluster ion beam on mica surface2012
- Author(s)
  H. Ryuto, Y. Ohmura, M. Takeuchi, G. H. Takaoka
- Organizer
  International Union of Material Research Societies-International Conference on Electronic Materials 2012
- Place of Presentation
  Yokohama
- Data Source
  KAKENHI-PROJECT-22560329
[Presentation] 多原子分子クラスターイオンビームの固体表面に対する照射効果2012
- Author(s)
  大村祐貴, 龍頭啓充, 竹内光明, 高岡義寛
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  東京
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] Ion Beam Properties of Ionic Liquid Ion Source with Porous Emitter for BMI-PF6 and EMI-BF42012
- Author(s)
  M. Takeuchi (代表者), T. Hamaguchi, H. Ryuto, and G. H. Takaoka
- Organizer
  IUMRS-ICEM2012, september 23-28, Yokohama, Japan
- Place of Presentation
  Yokohama, Japan
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] Ion Beam Properties of Ionic Liquid Ion Source with Porous Emitter for BMI-PF6 and EMI-BF42012
- Author(s)
  M. Takeuchi, T. Hamaguchi, H. Ryuto, and G. H. Takaoka
- Organizer
  IUMRS-ICEM2012
- Place of Presentation
  Yokohama, Japan
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] イオン液体イオンビームの固体表面照射効果2012
- Author(s)
  竹内光明, 濱口拓也, 植田亨, 龍頭啓充, 高岡義寛
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] Development of Ionic Liquid Ion Source with Porous Emitter for Surface Modification2012
- Author(s)
  M. Takeuchi, H. Ryuto, G. H. Takaoka, et al.
- Organizer
  25th Int. Conf on Atomic Com. Solids (ICACS-25)
- Place of Presentation
  京都(日本)
- Data Source
  KAKENHI-PROJECT-24360010
[Presentation] Surface reaction between water cluster ion and silicon surface2012
- Author(s)
  H. Ryuto, G. Ichihashi, M. Takeuchi, G. H. Takaoka
- Organizer
  25th International Conference on Atomic Collisions in Solids
- Place of Presentation
  Kyoto
- Data Source
  KAKENHI-PROJECT-22560329
[Presentation] Development of Ionic Liquid Ion Source with Porous Emitter for Surface Modification2012
- Author(s)
  M. Takeuchi (代表者), T. Hamaguchi, H. Ryuto, and G. H. Takaoka
- Organizer
  25th International Conference on Atomic Collisions in Solids October 21-25, 2012 Kyoto, Japan
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] イオン液体イオンビーム照射によるガラス基板の表面改質2012
- Author(s)
  濱口拓也, 竹内光明, 龍頭啓充, 高岡義寛
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  愛媛大学・松山大学
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] Production and Irradiation of Ionic Liquid Cluster Ions2012
- Author(s)
  G.H. Takaoka, M. Takeuchi, H. Ryuto, et al.
- Organizer
  The 18^<th> Int. Conf. on Ion Beam Modifi. Mater. (IBMM2012)
- Place of Presentation
  青島(中国)
- Data Source
  KAKENHI-PROJECT-24360010
[Presentation] 超音速自由噴流法で生成したアセトンクラスターイオンビームのビーム特性2012
- Author(s)
  龍頭啓充、糸崎俊介、角元友樹、竹内光明、高岡義寛
- Organizer
  ナノ学会第10回大会
- Place of Presentation
  大阪
- Data Source
  KAKENHI-PROJECT-22560329
[Presentation] Deposition of Ionic Liquid Ion Beams on Solid Substrate2012
- Author(s)
  M. Takeuchi (代表者), T. Hamaguchi, H. Ryuto, and G. H. Takaoka
- Organizer
  25th International Conference on Atomic Collisions in Solids October 21-25, 2012 Kyoto, Japan
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] Ion Beam Properties of Ionic Liquid Ion Source with Porous Emitter for BMI-PFe and EMI-BF42012
- Author(s)
  M. Takeuchi, H. Ryuto, G.H. Takaoka, et al.
- Organizer
  IUMRS-Int. Conf. on Electro. Mat. (IUMRS-ICEM2012)
- Place of Presentation
  横浜(日本)
- Data Source
  KAKENHI-PROJECT-24360010
[Presentation] Irradiation Effect of Ionic Liquid BMI-PF6 Ion Beam on Glass Surface2012
- Author(s)
  M. Takeuchi (代表者), T. Hamaguchi, H. Ryuto, and G. H. Takaoka
- Organizer
  IUMRS-ICEM2012, september 23-28, Yokohama, Japan
- Place of Presentation
  Yokohama, Japan
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] Irradiation effects of water cluster ion beam on PMMA surface2011
- Author(s)
  H. Ryuto, G. Ichihashi, M. Takeuchi, G. H. Takaoka
- Organizer
  The Eleventh International Symposium on Sputtering & Plasma Processes
- Place of Presentation
  Kyoto
- Data Source
  KAKENHI-PROJECT-22560329
[Presentation] 酸素クラスターイオンビーム援用蒸着法により作製したSiOx薄膜の表面分析2011
- Author(s)
  福島大貴, Xin Jin, 龍頭啓充, 竹内光明, 高岡義寛
- Organizer
  第58応用物理学関係連合講演会
- Place of Presentation
  神奈川工科大学
- Year and Date
  2011-03-25
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] シリコン基板への炭素系多原子分子イオンビーム蒸着2011
- Author(s)
  竹内光明, 龍頭啓充, 高岡義寛
- Organizer
  第58応用物理学関係連合講演会
- Place of Presentation
  神奈川工科大学
- Year and Date
  2011-03-25
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] シリコン表面へのエタノールクラスターイオン照射効果の基板温度依存性2011
- Author(s)
  龍頭啓充、向井寛、大村祐貴、竹内光明、高岡義寛
- Organizer
  ナノ学会第9回大会
- Place of Presentation
  札幌
- Data Source
  KAKENHI-PROJECT-22560329
[Presentation] 水クラスターイオンビーム照射によるアクリル基板のスパッタリング2011
- Author(s)
  市橋岳, 龍頭啓充, 竹内光明, 高岡義寛
- Organizer
  第58応用物理学関係連合講演会
- Place of Presentation
  神奈川工科大学
- Year and Date
  2011-03-25
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] 含浸型イオン液体イオン源のイオンビーム特性2011
- Author(s)
  植田亨, 竹内光明, 龍頭啓充, 高岡義寛
- Organizer
  第58応用物理学関係連合講演会
- Place of Presentation
  神奈川工科大学
- Year and Date
  2011-03-25
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] H. Ryuto, H. Mukai, M. Takeuchi, G. H. Takaoka2011
- Author(s)
  H. Ryuto, H. Mukai, M. Takeuchi, G. H. Takaoka
- Organizer
  The Eleventh International Symposium on Sputtering & Plasma Processes
- Place of Presentation
  Kyoto
- Data Source
  KAKENHI-PROJECT-22560329
[Presentation] 多原子分子クラスターイオン照射痕のAFM観察II2011
- Author(s)
  大村祐貴, 龍頭啓充, 竹内光明, 高岡義寛
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形
- Year and Date
  2011-09-02
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] ポリイミド基板への酸素クラスターイオンビーム照射効果,第58応用物理学関係連合講演会講演予稿集2011
- Author(s)
  古谷健悟, 龍頭啓充, 竹内光明, ピヤヌットソムマニ, 辻博司, 高岡義寛
- Organizer
  第58応用物理学関係連合講演会
- Place of Presentation
  神奈川工科大学
- Year and Date
  2011-03-25
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] テトラデカンを用いた多原子分子イオンビームの生成2011
- Author(s)
  竹内光明, 今中浩輔, 龍頭啓充, 高岡義寛
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形
- Year and Date
  2011-09-01
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] 固体表面改質へ向けたイオン液体 EMI-BF4 イオンビームの特性評価2011
- Author(s)
  竹内光明, 濱口拓也, 龍頭啓充, 高岡義寛
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  愛媛大学・松山大学
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] 多原子分子クラスターイオンのシリコン基板表面に対する照射効果の基板温度依存性2011
- Author(s)
  向井寛, 大村祐貴, 龍頭啓充, 竹内光明, 高岡義寛
- Organizer
  第58応用物理学関係連合講演会
- Place of Presentation
  神奈川工科大学
- Year and Date
  2011-03-25
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] 水クラスターイオンビーム照射によるPMMA基板のマイクロパターニング2011
- Author(s)
  市橋岳, 龍頭啓充, 竹内光明, 高岡義寛
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形
- Year and Date
  2011-09-02
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] Irradiation effects of water cluster ion beam on PMMA surface2011
- Author(s)
  H.Ryuto, G.Ichihashi, M.Takeuchi, G.H.Takaoka
- Organizer
  The 11th International Symposium on Sputtering and Plasma Processes
- Place of Presentation
  Kyoto
- Year and Date
  2011-05-19
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] エタノールクラスターを用いたシリコン基板表面加工2011
- Author(s)
  龍頭啓充、向井寛、大村祐貴、竹内光明、高岡義寛
- Organizer
  ナノ学会第9回大会
- Place of Presentation
  札幌
- Data Source
  KAKENHI-PROJECT-22560329
[Presentation] 酸素イオンビーム照射によるポリイミド基板の表面改質2011
- Author(s)
  古谷健悟, 龍頭啓充, 竹内光明, 高岡義寛
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形
- Year and Date
  2011-09-02
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] Carbon thin film synthesized by polyatomic ion beam deposition2011
- Author(s)
  M.Takeuchi, H.Ryuto, G.H.Takaoka
- Organizer
  The 11th International Symposium on Sputtering and Plasma Processes
- Place of Presentation
  Kyoto
- Year and Date
  2011-05-19
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] 含浸型イオン液体イオン源のイオンビーム特性(II)2011
- Author(s)
  植田亨, 竹内光明, 龍頭啓充, 高岡義寛
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形
- Year and Date
  2011-09-01
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] アセトンクラスターの生成2011
- Author(s)
  糸崎俊介, 龍頭啓充, 竹内光明, 高岡義寛
- Organizer
  第58応用物理学関係連合講演会
- Place of Presentation
  神奈川工科大学
- Year and Date
  2011-03-25
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] Temperature dependent irradiation effects of polyatomic cluster ion beam on silicon surfac2011
- Author(s)
  H.Ryuto, H.Mukai, M.Takeuchi, G.H.Takaoka
- Organizer
  The 11th International Symposium on Sputtering and Plasma Processes
- Place of Presentation
  Kyoto
- Year and Date
  2011-05-19
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] シリコン表面へのエタノールクラスターイオン照射効果の基板温度依存性2011
- Author(s)
  龍頭啓充, 向井寛, 大村祐貴, 竹内光明, 高岡義寛
- Organizer
  第9回ナノ学会
- Place of Presentation
  札幌
- Year and Date
  2011-06-02
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] エタノールクラスターを用いたシリコン基板表面加2011
- Author(s)
  龍頭啓充, 向井寛, 大村祐貴, 竹内光明, 高岡義寛
- Organizer
  第9回ナノ学会
- Place of Presentation
  札幌
- Year and Date
  2011-06-02
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] 水クラスターイオンビームのアクリル基板への照射効果2010
- Author(s)
  市橋岳, 龍頭啓充, 竹内光明, 高岡義寛
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学
- Year and Date
  2010-09-16
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] Carbon Implantation by Polyatomic Ion Source of Organic Liquids2010
- Author(s)
  M.Takeuchi
- Organizer
  1st International Particle Accelerator Conference
- Place of Presentation
  京都国際会館(京都市)
- Year and Date
  2010-05-24
- Data Source
  KAKENHI-PROJECT-22560329
[Presentation] エタノールクラスターイオンビームのガラス表面への照射効果2010
- Author(s)
  糸崎俊介, 龍頭啓充, 竹内光明, 高岡義寛
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学
- Year and Date
  2010-09-16
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] 多原子分子イオンビームによるシリコン基板への炭素注入2010
- Author(s)
  竹内光明, 龍頭啓充, 高岡義寛
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学
- Year and Date
  2010-09-16
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] Fabrication of Impregnated-Electrode-Type Polyatomic Ion Source with Ionic Liquid2010
- Author(s)
  M.Takeuchi, H.Ryuto, G.H.Takaoka
- Organizer
  IIT2010
- Place of Presentation
  Kyoto
- Year and Date
  2010-06-08
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] 多原子分子イオンビームによるシリコン表面照射効果2010
- Author(s)
  竹内光明
- Organizer
  電子情報通信学会12月度シリコン材料・デバイス(SDM)研究会
- Place of Presentation
  京都大学(京都市)
- Year and Date
  2010-12-17
- Data Source
  KAKENHI-PROJECT-22560329
[Presentation] 多原子分子イオンビームによるシリコン表面照射効果2010
- Author(s)
  竹内光明, 龍頭啓充, 高岡義寛
- Organizer
  電子情報通信学会シリコン材料・デバイス研究会
- Place of Presentation
  京都大学
- Year and Date
  2010-12-17
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] Polyatomic Ion Source with Ionic Liquid for Shallow Implantation2010
- Author(s)
  M.Takeuchi
- Organizer
  18th International Conference on Ion Implantation Technology
- Place of Presentation
  京都大学(京都市)
- Year and Date
  2010-06-07
- Data Source
  KAKENHI-PROJECT-22560329
[Presentation] Surface Processing and Modification of Polymers by Water Cluster Ion Beam2010
- Author(s)
  H.Ryuto, M.Takeuchi, G.H.Takaoka
- Organizer
  IIT2010
- Place of Presentation
  Kyoto
- Year and Date
  2010-06-08
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] CARBON IMPLANTATION BY POLYATOMIC ION SOURCE OF ORGANIC LIQUIDS2010
- Author(s)
  M.Takeuchi, H.Ryuto, G.H.Takaoka
- Organizer
  IPAC'10
- Place of Presentation
  Kyoto
- Year and Date
  2010-05-24
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] APPLICATION OF LIQUID CLUSTER ION BEAMS IN SURFACE PROCESSING2010
- Author(s)
  H.Ryuto, M.Takeuchi, G.H.Takaoka
- Organizer
  IPAC'10
- Place of Presentation
  Kyoto
- Year and Date
  2010-05-24
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] 含浸型イオン液体イオン源の試作2010
- Author(s)
  植田亨、竹内光明、龍頭啓充、高岡義寛
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学
- Year and Date
  2010-09-15
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] シリコン基板に対するエタノールクラスターイオン照射効果の基板温度依存性2010
- Author(s)
  向井寛, 龍頭啓充, 竹内光明, 高岡義寛
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学
- Year and Date
  2010-09-16
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] Ion Beam Deposition/Etchnig by EMIM-N(CN)2 Ionic Liquid Ion Source
- Author(s)
  M. Takeuchi, H. Ryuto, G.H. Takaoka et al.
- Organizer
  The 15th IUMRS-International Conference in Asia (IUMRS-ICA2014)
- Place of Presentation
  Fukuoka, Japan
- Year and Date
  2014-08-24 – 2014-08-30
- Data Source
  KAKENHI-PROJECT-24360010
[Presentation] Photon Emission from Solid Surfaces Irradiated by Cluster Ion Beams
- Author(s)
  G.H. Takaoka, H. Ryuto, M. Takeuchi et al.
- Organizer
  The 19th International Conference on Ion Beam Modification of Materials (IBMM2014)
- Place of Presentation
  Leuven, Belgium
- Year and Date
  2014-09-14 – 2014-09-19
- Data Source
  KAKENHI-PROJECT-24360010
[Presentation] Mesenchymal Stem Cell Adhesion on Metal and Polymeric Surfaces Modified by Oxygen Cluster Ion Irradiation
- Author(s)
  G.H. Takaoka, M. Takeuchi, H. Ryuto et al.
- Organizer
  The 15th IUMRS-International Conference in Asia (IUMRS-ICA2014)
- Place of Presentation
  Fukuoka, Japan
- Year and Date
  2014-08-24 – 2014-08-30
- Data Source
  KAKENHI-PROJECT-24360010
[Presentation] Irradiation Effects of Fragment Ions of Tetradecane on Glass Surfaces
- Author(s)
  G.H. Takaoka, M. Takeuchi, H. Ryuto et al.
- Organizer
  20th International Conference on Ion Implantation Technology (IIT2014)
- Place of Presentation
  Portland, USA
- Year and Date
  2014-06-24 – 2014-07-04
- Data Source
  KAKENHI-PROJECT-24360010
[Presentation] 含浸型イオン液体イオン源のイオンビーム特性II
- Author(s)
  植田亨, 竹内光明, 龍頭啓充, 高岡義寛
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学
- Data Source
  KAKENHI-PROJECT-22760252
[Presentation] Sputtering of Metal Surfaces by CO2-hydrate Cluster Ion Beams
- Author(s)
  G.H. Takaoka, H. Ryuto, M. Takeuchi et al.
- Organizer
  The 19th International Conference on Ion Beam Modification of Materials (IBMM2014)
- Place of Presentation
  Leuven, Belgium
- Year and Date
  2014-09-14 – 2014-09-19
- Data Source
  KAKENHI-PROJECT-24360010
[Presentation] Sputtering and Chemical Modification of Soild Surfaces Using Oxygen Ion Beams
- Author(s)
  G.H. Takaoka, H. Ryuto, M. Takeuchi et al.
- Organizer
  20th International Conference on Ion Implantation Technology (IIT2014)
- Place of Presentation
  Portland, USA
- Year and Date
  2014-06-24 – 2014-07-04
- Data Source
  KAKENHI-PROJECT-24360010
[Presentation] Field-Emitted Ion Beam of Ionic Liquids with Different Viscosities
- Author(s)
  M. Takeuchi, H. Ryuto, G.H. Takaoka et al.
- Organizer
  The 15th IUMRS-International Conference in Asia (IUMRS-ICA2014)
- Place of Presentation
  Fukuoka, Japan
- Year and Date
  2014-08-24 – 2014-08-30
- Data Source
  KAKENHI-PROJECT-24360010

1. RYUTO Hiromichi (20392178)

# of Collaborated Projects: 3 results

# of Collaborated Products: 80 results
2. TAKAOKA H. Gikan (90135525)

# of Collaborated Projects: 2 results

# of Collaborated Products: 53 results

TAKEUCHI Mitsuaki 竹内 光明

Research Projects

Research Products

Co-Researchers

Liquid cluster ion beam processing of metal films for spintronics devices

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Study on size separation and structural analysis of hydrate clusters and their interactions with solid surfaces

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Enhancement of liquid cluster ion beam intensity for application in semiconductor industry

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Development of Polyatomic Ion Source for Organic Liquids toward Application of Shallow Ion ImplantationPrincipal Investigator

Principal Investigator

Project Period (FY)

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Research Institution

[Journal Article] Characterization by transmission electron microscopy and small-angle X-ray scattering of Au clusters formed in ionic liquids2016

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Spectroscopic evidences of high temperatures and pressures during the cluster ion beam interaction with solid surfaces2016

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Crystal Structure and Accelerated Ion-Irradiation Effect of Water Clusters2016

Author(s)

Journal Title

NAID

Data Source

[Journal Article] Sputtering of silicon and glass substrates with polyatomic molecular ion beams generated from ionic liquids2016

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Growth behavior of gold nanoparticles synthesized in unsaturated fatty acids by vacuum evaporation methods2016

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Ion-Beam Deposition/Etching Using EMIM-N(CN)<sub>2</sub> Ionic Liquid Ion Source2015

Author(s)

Journal Title

DOI

NAID

ISSN

Language

Data Source

[Journal Article] Irradiation Effect of Gas-Hydrate Cluster Ions on Solid Surfaces2014

Author(s)

Journal Title

DOI

NAID

Data Source

[Journal Article] Interactions of Fragment Ions of Tetradecane with Solid Surfaces2014

Author(s)

Journal Title

DOI

NAID

Data Source

[Journal Article] Interaction between Water Cluster Ions and Mica Surface2014

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Mesenchymal Stem Cell Adhesion on Metal and Polymeric Surfaces Modified by Oxygen Cluster Ion Irradiation2014

Author(s)

TAKEUCHI Mitsuaki 竹内光明