SAKAI Yosuke 酒井洋輔

Researcher Number	20002199
Other IDs
External Links
Affiliation (based on the past Project Information) *help	2007: Hokkaido University, Grad. School. of Inf. Sc. & Tech., Professor 2006: 北海道大学, 大学院情報科学研究科, 教授 2004 – 2005: Hokkaido University, Graduate School of Information Science and Technology, Professor, 大学院・情報科学研究科, 教授 1997 – 2003: 北海道大学, 大学院・工学研究科, 教授 1993 – 1997: Hokkaido Univ., Fac.of Eng.Professor, 工学部, 教授 … More 1987 – 1992: 北海道大学, 工学部, 助教授 1986: Hokkaido University, College of Medical Technology , Prof, 医療技術短期大学部, 教授 1985: 北海道大学, 短大, 教授 Less
Review Section/Research Field	Principal Investigator 電力工学 / 電力工学・電気機器工学 / 電力工学・電気機器工学 / プラズマ理工学 Except Principal Investigator 電力工学 / 電力工学・電気機器工学 / プラズマ理工学 / 高分子物性 / 資源開発工学 / 資源開発工学
Keywords	Principal Investigator 放電分解 / パーフルオロカーボン / 非平衡プラズマ / 真空紫外光 / Paschen curve / per-fluorocarbon / amorphous CF film / 絶縁体力向上 / 絶縁耐力向上 / パッシェン曲線 … More / アモルファスCF薄膜 / 電気絶縁 / 薄膜堆積 / フルオロカーボン / non-equilibrium plasma / LID / 窒素酸化物 / 電子付着係数 / 電離係数 / 二酸化窒素 / a-C:F film / breakdown strength / low dielectric strength / plasma CVD / insulation film / a-C : F膜 / a-C:F膜 / 絶縁耐力 / 低誘電率 / プラズマCVD / 絶縁膜 / film precursor / plasma emission spectra / dilectric strength enhancement / perfluorocarbon / electrical insulation / 膜堆積プリカーサ / 膜堆積カーサ / プラズマ発光スペクトル / enhancement of dielectric strength / electric insulation / 薄膜推積 / synergy effect / vacuum ultraviolet / nitrogen oxide / inter-layer insulation / film deposition / fluorocarbon / laser spectroscopy / バリア放電 / フロン / 大気汚染 / 相乗効果 / 真空紫外線 / 層間絶縁 / 分光診断 / laser-spectroscopy / modeling / vacuum-ultra-violet-light / lamp / excimer / レーザ分光診断 / モデリング / ランプ / エキシマ / Decomposition by UV / Electron attachment coefficient / Glow discharge / lonization coefficient / Decomposition by discharge / Nitrogen-dioxide / コロナ放電 / 紫外線分解 / グロー放電 / Dielectric Constant / Dielectric Material / Hydrophilic Gell / Water / Supercooling / Condenser For Energy Compression / Pulse Power / 電場・磁場効果 / スペ-サ効果 / 凍結温度 / 過冷却水 / 水コンデンサ- / 誘電率 / 誘電体 / 親水性ゲル / 水 / 過冷却 / エネルギ-圧縮用コンデンサ- / パルスパワ- / アルゴンフッ素混合液体 / 電子注入 / 希ガス液体 / レーザ光励起 / 液体エキシマレーザ / 予備電離機構 / 紫外光予備電離 / エキシマレーザ / 化学反応定数 / 電子衝突断面積 / データベース / 基礎過程 / 大気汚染粒子 … More Except Principal Investigator 絶縁破壊 / ベーパーミスト誘電体 / GIS / Gas Insulation / 混合ガス / SF_6 / 交流破壊電圧 / ダングリングボンド / シリル / モノシラン / ファインパウダ / ESR / fine particle measurement / dielectric liquids / dielectric strength / vapor-mist dielectric / 微粒径計測 / パルス波高分布分析 / 微粒子計測 / 誘電液体 / 電気絶縁耐力 / Insulating-breakdown Alkyl radical / Soliton / Polyenylradical / Polyacetylene / ESR法 / チーグラー触媒 / インパルス破壊 / 絶縁破壊ポリエニルラジカル / ヨウ素 / 伝導度 / ポリエチレン / ポリアセチレン・ポリエニルラジカル / ドーピング / アルキルラジカル / ソリトン / ポリエニルラジカル / ポリアセチレン / <SF_6> / Synergism / Gas Insulated Cubicle / Vapor-Mist Dielectrics / Gas Mixtures / 電子付着係数 / 実効電離係数 / 絶縁破壊特性 / c-GIS / フロロカーボン / 【SF_6】 / 相乗効果 / ガス絶縁キュービクル / ガス絶縁 / Partial discharge / Breakdown / Bubble / liquid nitrogen / Liquid helium / electrical insulation / power apparatus / superconductivity / 部分放電 / 気泡 / 液体窒素 / 液体ヘリウム / 電気絶縁 / 電力機器 / 超伝導 / Sound of rock failure / Rock noise / Source of noise / Elastic wave / Electrostatic noise / Piezoelectric effect / Cable sensor / 動的応答 / 衝撃荷重 / 波動方程式 / 強誘電性高分子材料 / 電源 / 岩盤崩壊音 / 岩盤破壊音 / 震源 / 波動 / 静電気ノイズ / 圧電効果 / ケーブルセンサ / Distribution of the Size of Rocks / Distribution of Joint Space / Experimental System for Slope Instability / Impact load / Slope Instability / 斜面の安定性 / コンピュ-タ制御 / 電磁制御モデル / 岩盤崩壊 / 落石粒度分布 / ジョイント間隔分布 / モデル実験システム / 落石衝撃荷重 / 斜面崩壊 / Fine Powder Dielectrics / Uniform Electric Field / AC Breakdown Voltage / Electrical Insulation / Gaseous Dielectrics / Vapor-mist Dielectrics / 衝突電離 / モンテカルロ法 / 計算機シミュレーション / 液体誘電体 / 気体誘電体 / ガス絶縁材料 / 平等電界 / 絶縁ガス / ファインパウダー / 絶縁材料 / プラズマモデリング / 反応性rfプラズマ / プラズマプロセス / 放電素過程 / 高温プラズマ / 気体レーザー / スペースプ / 半導体プロセ / プラズマ生成 / 放電プラズマ / 太陽風 / オーロラ / 雷 / プラズマ / 活性種 / 放電 / 励起 / 電離 / Si_3N_4 / SiO_2 / 雷インパルス / 50Hz交流 / フロン / 高電圧絶縁 / 地球環境問題 / TEOS / 電離係数 / 制御 / rfプラズマ / イオン速度分布 / ベーパーミスト絶縁 / ベ-パ-ミスト絶縁 / 微粉体絶縁 / インパルス破壊電圧 / 電気的絶縁破壊 / 膜密度 / スピン密度 / 水素含有量 / 堆積率 / ダイヤモンド構造 / 破壊電圧 / 散布 / ファン / 粒径 / Si_3N_4パウダ / SiO_2パウダ / カスプ / 磁性 / 磁気モーメント / スピングラス / ラジカル / ポリフェニルアセチレン / Rh錯体触媒 Less

COMPACT AND HIGH DIELECTRIC STRENGTH OF ELECTRIC MACHINES WITH a-C:F FILM COATING OF LOW-DIELECTRIC CONSTANT AND HIGH DIELECTRIC STRENGTH DEPOSITED IN PLASMAPrincipal Investigator
- Principal Investigator
  
  SAKAI Yosuke
- Project Period (FY)
  2005 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  電力工学・電気機器工学
- Research Institution
  Hokkaido University
Alternative SF_6 insulation by deposition of amorphous CxFy film on electric machine conductorsPrincipal Investigator
- Principal Investigator
  
  SAKAI Yosuke
- Project Period (FY)
  2003 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  電力工学・電気機器工学
- Research Institution
  HOKKAIDO UNIVERSITY
Development of insulating system with low dielectric constant, high dielectric strength a-C:F film coated conductor prepared by plasma CVD as alternatives to SF_6Principal Investigator
- Principal Investigator
  
  SAKAI Yosuke
- Project Period (FY)
  2001 – 2003
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  電力工学・電気機器工学
- Research Institution
  HOKKAIDO UNIVERSITY
放電プラズマ現象とその応用に関する企画調査
- Principal Investigator
  
  河合良信
- Project Period (FY)
  2000
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  プラズマ理工学
- Research Institution
  Kyushu University
電離気体現象とその応用に関する企画調査
- Principal Investigator
  
  佐藤徳芳
- Project Period (FY)
  1999
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  プラズマ理工学
- Research Institution
  Tohoku University
大気汚染粒子の放電分解と関連する放電基礎量のデータベース化Principal Investigator
- Principal Investigator
  
  酒井洋輔
- Project Period (FY)
  1998
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  電力工学・電気機器工学
- Research Institution
  Hokkaido University
Basic study on decomposition of air pollutants using synergetic effect between barrier discharge and VUV lightPrincipal Investigator
- Principal Investigator
  
  SAKAI Yosuke
- Project Period (FY)
  1997 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  電力工学・電気機器工学
- Research Institution
  HOKKAIDO UNIVERSITY
Electrical Insulation in Superconducting Power Apparatus
- Principal Investigator
  
  OKUBO Hitoshi
- Project Period (FY)
  1996 – 1998
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  電力工学・電気機器工学
- Research Institution
  Nagoya University
地球環境問題を考慮した高電圧電力機器絶縁に関する基礎的研究
- Principal Investigator
  
  田頭博昭
- Project Period (FY)
  1995
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  電力工学・電気機器工学
- Research Institution
  Hokkaido University
Study on Optimization of Barrier Discharge Excimer-LampPrincipal Investigator
- Principal Investigator
  
  SAKAI Yosuke
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  プラズマ理工学
- Research Institution
  HOKKAIDO UNIVERSITY
プラズマプロセスによるフリーラジカル発生、反応、輸送と膜堆積過程の統合的研究
- Principal Investigator
  
  田頭博昭
- Project Period (FY)
  1994
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hokkaido University
Fundamental study on cable sensor for rock noise measurement
- Principal Investigator
  
  UJIHIRA Masuyuki
- Project Period (FY)
  1994 – 1995
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  資源開発工学
- Research Institution
  HOKKAIDO UNIVERSITY
プラズマプロセスによるフリーラジカル発生、反応、輸送と膜堆積過程の統合的研究
- Principal Investigator
  
  田頭博昭
- Project Period (FY)
  1993
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hokkaido University
高電圧電力機器絶縁に関する基礎的研究
- Principal Investigator
  
  田頭博昭
- Project Period (FY)
  1993 – 1994
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  電力工学・電気機器工学
- Research Institution
  Hokkaido University
π-ラジカルの集合化による高分子スピングラスの合成とその磁気特性に関する研究
- Principal Investigator
  
  TABATA Masayoshi
- Project Period (FY)
  1992
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hokkaido University
微粉体誘電体による気体(SF_6、空気)の絶縁耐力上昇機構に関する研究
- Principal Investigator
  
  田頭博昭
- Project Period (FY)
  1992
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  電力工学
- Research Institution
  Hokkaido University
Fundamental Studies on LID Concentration and Discharge Decomposition of Nitrogen-DioxidePrincipal Investigator
- Principal Investigator
  
  SAKAI Yosuke
- Project Period (FY)
  1992 – 1993
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  電力工学
- Research Institution
  Faculty of Engineering, Hokkaido University
コロナ放電による窒素酸化物の分解に関する基礎研究Principal Investigator
- Principal Investigator
  
  酒井洋輔
- Project Period (FY)
  1991
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  電力工学
- Research Institution
  Hokkaido University
Mechanism of Increase of Dielectric Strength of Gaseous Dielectics by Vapor Mist
- Principal Investigator
  
  TAGASHIRA Hiroaki
- Project Period (FY)
  1989 – 1990
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  電力工学
- Research Institution
  Hokkaido University
Studies on Production of Supercooling State and Electrical Properties of Water Condenser for Energy CompressionPrincipal Investigator
- Principal Investigator
  
  SAKAI Yosuke
- Project Period (FY)
  1989 – 1990
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  電力工学
- Research Institution
  Hokkaido University
Development of experimental system controlled by electromagnetic force for the slope stability study
- Principal Investigator
  
  UJIHIRA Masuyuki
- Project Period (FY)
  1989 – 1991
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research
- Research Field
  
  資源開発工学
- Research Institution
  Hokkaido University
反応性非平衡プラズマのモデリング
- Principal Investigator
  
  田頭博昭
- Project Period (FY)
  1988
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Research Institution
  Hokkaido University
小型・高出力希ガス液体エキシマレーザの基礎研究Principal Investigator
- Principal Investigator
  
  酒井洋輔
- Project Period (FY)
  1987
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  電力工学
- Research Institution
  Hokkaido University
Fundamental Research of Vapor-Mist Dielectrics for Insulation of Electric Power Apparatus
- Principal Investigator
  
  TAGASHIRA Hiroaki
- Project Period (FY)
  1987 – 1988
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  電力工学
- Research Institution
  HOKKAIDO UNIVERSITY
Procuction of Polyacetylene from Polyethylene Induced by High Voltage Breakdown
- Principal Investigator
  
  TABATA Masayoshi
- Project Period (FY)
  1986 – 1988
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  高分子物性
- Research Institution
  Hokkaido University
新型予備電離方式によるArF,ArCl用エキシマレーザの試作Principal Investigator
- Principal Investigator
  
  酒井洋輔
- Project Period (FY)
  1985
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research
- Research Field
  
  電力工学
- Research Institution
  Hokkaido University
STUDY OF ELECTRICAL INSULATION CONDITION FOR GAS INSULATED CUBICLE (C-GIS) BY <SF_6> AND FLUOROCABON MIXTURES
- Principal Investigator
  
  TAGASHIRA Hiroaki
- Project Period (FY)
  1985 – 1986
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research
- Research Field
  
  電力工学
- Research Institution
  Hokkaido University

All 2008 2007 2006 2005 2004 2003

All Journal Article Presentation

[Journal Article] Plasma-enhanced chemical vapor deposition of amorphous fluorocarbon polymer films (a-C:F) on spherical surface2008
- Author(s)
  C. Biloiu and Y. Sakai
- Journal Title
  
  IEEE transaction on Plasma Science (印刷中)
  
  Pages: 1-2
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] モンテカルロシミュレーションによる高周波CF_4プラズマ中電子エネルギー分布周期変化の圧力依存性解析2008
- Author(s)
  森直樹, 菅原広剛, 荒木田大嗣, 江口礼良, 須田善行, 酒井洋輔
- Journal Title
  
  電気学会放電研究会資料 ED-08-38
- NAID
  10025769404
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Plasma-enhanced chemical vapor deposition of amorphous fluorocarbon polymer films (a-C:F) on spherical surface2008
- Author(s)
  Costel Biloiu and Yosuke Sakai
- Journal Title
  
  IEEE transaction on Plasma Science
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] 低気圧下衝撃電界電子加速によるCF_4解離反応促進のモンテカルロシミュレーション2008
- Author(s)
  荒木田大嗣, 江口礼良, 森直樹, 菅原広剛, 酒井洋輔, 須田善行
- Journal Title
  
  電気学会放電研究会資料 ED-08-37
- NAID
  10025769397
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Monte Carlo simulation of promotion of CF4 dissociation reaction by impulse-field electron acceleration method under low pressures2008
- Author(s)
  D. Arakida, N. Eguti, N. Mori, H. Sugawara, Y. Sakai, Y. Suda
- Journal Title
  
  Tech. report on Electrical Discharge, IEEJ ED-08-37
  
  Pages: 6-6
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Monte Carlo Analysis of the pressure-dependence of periodical response of the electron Energy distribution in radio-frequency CF_4 plasma2008
- Author(s)
  N. Mori, H. Sugawara, D. Arakida, N. Eguti, Y. Suda, Y. Sakai
- Journal Title
  
  Tech. report on Electrical Discharge, IEEJ ED-08-38
  
  Pages: 6-6
- NAID
  10025769404
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Plasma-enhanced chemical vapor deposition of amorphous fluorocarbon polymer films(a-C:F)on spherical surface2008
- Author(s)
  C. Biloiu and Y. Sakai
- Journal Title
  
  IEEE transaction on Plasma Science (印刷中)
  
  Pages: 1-2
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] 低気圧下衝撃電界電子加速によるCF_4解離反応促進のモンテカルロシミュレーション2008
- Author(s)
  荒木田大嗣, 江口礼良, 森直樹, 菅原剛, 酒井洋輔, 須田善行
- Journal Title
  
  電気学会放電研究会資料 ED-08-37
- NAID
  10025769397
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Observation of surface and cross section of amorphous fluorocarbon films composed by perfluoro-octane plasma-enhanced chemical vapor deposition2007
- Author(s)
  T. Yamauchi, H. Koike, H. Sugawara, Y. Suda and Y. Sakai
- Journal Title
  
  Proc. of 28th Int. Conf. on Phenomena in lonized Gases 2P13-34
  
  Pages: 4-4
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Analysis of electron energy distribution in radio-frequency CF4 plasma using Monte Carlo method2007
- Author(s)
  N. Mori, H. Sugawara, D. Arakida, N. Eguti, Y. Suda, Y. Sakai
- Journal Title
  
  Tech. report on Plasma Science and Technology/Electrical Discharge, IEEJ PST-07-49/ED-07-129
  
  Pages: 6-6
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] C_8F_<18>プラズマCVDによるa-C : F膜堆積とその評価2007
- Author(s)
  小池広恵, 山内達也, 須田善行, 酒井洋輔, 菅原広剛
- Journal Title
  
  電気学会全国大会講演論文集 07(CD版)
  
  Pages: 1-221
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] C_8F_<18>プラズマCVDによるa-C:F膜生成とその特性の評価2007
- Author(s)
  小池広恵、菅原広剛、酒井洋輔、須田善行、山内達也
- Journal Title
  
  電気学会プラズマ放電合同研究会資料 PST-07-54/ED-07-134
- NAID
  10019761487
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] 衝撃電界電子加速によるCF_4分子、CFxラジカル分解の効率2007
- Author(s)
  荒木田大嗣、江口礼良、森直樹、菅原広剛、酒井洋輔、須田善行
- Journal Title
  
  電気学会プラズマ/放電合同研究会資料 PST-07-48/ED-07-128
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] モンテカルロ法による高周波CF_4プラズマ中電子エネルギー分布の特性解析2007
- Author(s)
  森直樹, 菅原広剛, 荒木田大嗣, 江口礼良, 須田善行, 酒井洋輔
- Journal Title
  
  電気学会プラズマ放電合同研究会資料 PST-07-49/ED-07-129
- NAID
  10019761434
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Composition of two-layered amorphous fluorocarbon films by perfluorooctane plasma enhanced chemical vapor deposition2007
- Author(s)
  T. Yamauchi, H. Koike, H. Sugawara, Y. Suda and Y. Sakai
- Journal Title
  
  Japan-Korea Joint Symposium on Electrical Discharge and High Voltage Engineering 16P-24
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] a-C:F Films Deposition by C_8F_<18> Plasma CVD and Measurement of Their Properties2007
- Author(s)
  K. Koike, H. Sugawara, Y. Sakai, Y. Suda, T. Yamauti
- Journal Title
  
  Tech. report on Plasma Sci. and Technology /Electrical Discharge, IEEJ PST-07-54/ ED-07-134
  
  Pages: 6-6
- NAID
  10019761487
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Composition of two-layered amorphous fluorocarbon films by perfluorooctane plasma enhanced chemical vapor deposition2007
- Author(s)
  T. Yamauchi, H. Koike, H. Sugawara, Y. Suda and Y. Sakai
- Journal Title
  
  Japan-Korea Joint Symp. on Electrical Discharge and High Voltage Engineering 16P-24
  
  Pages: 4-4
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Efficiency of CF_4 molecule and CFx radical decomposition by impulse-field electron acceleration2007
- Author(s)
  D. Arakida, N. Eguti, N. Mori, H. Sugawara, Y. Sakai, Y. Suda
- Journal Title
  
  Tech. report on Plasma Sci. and Technology /Electrical Discharge, IEEJ PST-07-48/ED-07-128
  
  Pages: 6-6
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Deposition of amorphous fluorocarbon films by C_8F_<18>/Ar plasma-enhanced chemical vapor deposition and their chemical properties2007
- Author(s)
  H. Koike, T. Yamauchi, Y. Sakai, Y. Suda, H. Sugawara
- Journal Title
  
  Proc. 18th Int. Symp. on Plasma Chemistry 22P
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Observation of surface and cross section of amorphous fluorocarbon films composed by perfluoro-octane plasma-enhanced chemical vapor deposition2007
- Author(s)
  T. Yamauchi, H. Koike, H. Sugawara, Y. Suda and Y. Sakai
- Journal Title
  
  Proc. of 28th Int. Conf. Phenomena in Ionized Gases 2P
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] フッ化物成膜の環境応用2007
- Author(s)
  須田善行, 小池広恵, 内山達也, 酒井洋輔, 菅原広剛
- Journal Title
  
  シンポジウム2007「環境制御における最新の低温プラズマ技術とその応用」論文集 07
  
  Pages: 29-32
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Deposition of amorphous fluorocarbon films by C_8F_<18>/Ar plasma-enhanced chemical vapor deposition and their chemical properties2007
- Author(s)
  H. Koike, T. Yamauchi, Y. Sakai, Y. Suda, H. Sugawara
- Journal Title
  
  Proc. of 18th Int. Symp. on Plasma Chem. 27P-67
  
  Pages: 4-4
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] C_8F_<18>プラズマCVDによるa-C:F 膜堆積-Ar混合の効果-2006
- Author(s)
  小池広恵, 田澤将太, 菅原広剛, 須田善行, 酒井洋輔
- Journal Title
  
  電気学会全国大会論文集 (発表予定)(未定)
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] C_8F_<18>プラズマCVDによるa-C : F膜堆積-Ar混合の効果-2006
- Author(s)
  小池広恵, 田澤将太, 菅原広剛, 須田善行, 酒井洋輔
- Journal Title
  
  電気学会全国大会講演論文集 06(CD版)
  
  Pages: 1-157
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] a-C:F films deposition by C_8F_18/Ar plasma CVD and their electrical and chemical properties2006
- Author(s)
  H. Koike, Y. Sakai, Y. Suda, H. Sugawara and S. Tazawa
- Journal Title
  
  Proc. of 13th Asian Conf. on Electrical Discharge P2-11
  
  Pages: 4-4
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] a-C : F Films Deposition by C8F18/Ar Plasma CVD and their Electrical and Chemical Properties2006
- Author(s)
  H.Koike, Y.Sakai, Y.Suda, H.Sugawara, S.Tazawa
- Journal Title
  
  Proc. of 13th Asian Conference on Electrical Discharge 13(CD版)
  
  Pages: 2-11
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Correlation between a-C:H film properties and Ar/CH_4 dielectric barrier discharge2006
- Author(s)
  M. -A. Bratescu, Y. Yoshizaki, Y. Suda, Y. Sakai, H. Sugawara and O. Takai
- Journal Title
  
  Thin Solid Films 506-507
  
  Pages: 145-149
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] C_8F_<18>/ArプラズマCVDによるa-C : F膜堆積とその特性2006
- Author(s)
  小池広恵, 酒井洋輔, 菅原広剛, 須田善行, 田澤将太
- Journal Title
  
  平成18年度電気・情報関係学会北海道支部連合大会 06(CD版)
  
  Pages: 68-68
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Correlation between a-C:H film properties and Ar/CH_4 dielectric barrier discharge2006
- Author(s)
  M.-A. Bratescu, Y. Yoshizaki, Y. Suda, Y. Sakai, H. Sugawara and O. Takai
- Journal Title
  
  Thin Solid Films 506-507
  
  Pages: 145-149
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] a-C:F films deposition by C_8F_<18>/Ar plasma CVD and their electrical and chemical properties2006
- Author(s)
  H. Koike, Y. Sakai, Y. Suda, H. Sugawara and S. Tazawa
- Journal Title
  
  Proc. of 13th Asian Conference on Electrical Discharge P2-11
  
  Pages: 16-19
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] C_8F_<18>/Ar プラズマCVDを用いたa-C : F膜の生成とその電気的特性の評価2006
- Author(s)
  小池広恵, 酒井洋輔, 菅原広剛, 須田善行, 田澤将太
- Journal Title
  
  放電学会年次大会講演論文集 06(CD版)
  
  Pages: 61-62
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Plasma CVD of a-C:F Films Using C_8F_<18> and Characterization of their Properties2005
- Author(s)
  Y. Sakai, S. Tazawa, Y. Suda, and H. Sugawara
- Journal Title
  
  Bulletin of the American Physical Society Vol.50 (7)
  
  Pages: 21-21
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Application of Perfluorocarbon Liquids for a-C:F Film Production on Electrodes by Plasma Enhanced Chemical Vapor Deposition2005
- Author(s)
  Y.sakai, S.Tazawa, M-A Bratescu, Y.Suda, H.Sugawara
- Journal Title
  
  Proceeding of 2005 IEEE (15^<th>) International Conference on Dielectric Liquids 12(CD版)
  
  Pages: 421-424
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Deposition of low-k films by C_8F_18 plasma CVD and their chemical and electrical characteristics2005
- Author(s)
  S. Tazawa, Y. Sakai, Y. Suda, H. Sugawara
- Journal Title
  
  Tech. l report on Electrical Discharge, IEEJ ED-05-67
  
  Pages: 6-6
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Plasma CVD of a-C:F Films Using C_8F_<18> and Characterization of their Properties2005
- Author(s)
  Y. Sakai, S. Tazawa, Y. Suda, and H. Sugawara
- Journal Title
  
  Bulletin of The American Physical Society Vol.50(7)
  
  Pages: 21-21
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Application of Perfluorocarbon Liquids for a-C:F Film Production on Electrodes by Plasma Enhanced Chemical Vapor Deposition2005
- Author(s)
  Y. Sakai, S. Tazawa, M-A Bratescu, Y. Suda and H. Sugawara
- Journal Title
  
  Proc. of 2005-IEEE (15^<th>) Int. I Conf. on Dielectric Liquids
  
  Pages: 421-424
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Computational study on fundamental properties of CF_4/N_2 plasma and application of impulse-field electron acceleration to CF_4 Deposition2005
- Author(s)
  H. Sugawara, Y. Ishihara, R. Saito and Y. Sakai
- Journal Title
  
  Proc. of XXVII International Conference on Phenomena in Ionized Gases 18
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Application of Perfluorocarbon Liquids for a-C:F Film Production on Electrodes by Plasma Enhanced Chemical Vapor Deposition2005
- Author(s)
  Y. Sakai, S. Tazawa, M-A Bratescu, Y. Suda and H. Sugawara
- Journal Title
  
  Proc. of 2005-IEEE (15th) International Conference on Dielectric Liquids
  
  Pages: 421-424
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Electron swarms and cross section data2005
- Author(s)
  Y.Sakai
- Journal Title
  
  14^<th> International Symposium on Electron-Molecule Collisions and Swarms 8
  
  Pages: 33-33
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Plasma CVD of a-C:F Films Using C_8F_<18> and Characterization of their properties2005
- Author(s)
  Y.Sakai, S.Tazawa, Y.Suda, H.Sugawara
- Journal Title
  
  58^<th> Annual Gaseous Electronics Conference, Bulletin of The American Physical Society 50(7)
  
  Pages: 21-21
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Computational study on fundamental properties of CF_4/N_2 plasma and application of impulse-field electron acceleration to CF_4 Deposition2005
- Author(s)
  H. Sugawara, Y. Ishihara, R. Saito and Y. Sakai
- Journal Title
  
  Proc. of XXVII Int. Conf. on Phenomena in lonized Gases 18-246
  
  Pages: 4-4
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] C_8F_<18>プラズマCVDによる低誘電率膜堆積とその科学的、電気的特性2005
- Author(s)
  田澤将太, 酒井洋輔, 須田善行, 菅原広剛
- Journal Title
  
  電気学会放電研究会資料 ED-05-67
  
  Pages: 67-72
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] C_8F_<18>プラズマCVDによる低誘電率膜堆積とその化学的,電気的特性2005
- Author(s)
  田澤将太, 酒井洋輔, 須田善行, 菅原広剛
- Journal Title
  
  電気学会放電研究会資料 ED-05-67
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Amorphous fluorocarbon polymer(a-C:F) films obtained by plasma enhanced chemical vapor deposition from neofluoro-octane vapor II :2004
- Author(s)
  C.Biloiu, I.A.Biloiu, Y.Sakai, H.Sugawara, A.Ohta
- Journal Title
  
  J.Vac.Sci.Tech.A 22(4)
  
  Pages: 1158-1165
- Data Source
  KAKENHI-PROJECT-15360143
[Journal Article] C_8F_<18>プラズマCVDによる低誘電率膜の電極面上堆積とガス絶縁破壊電圧の上昇効果2004
- Author(s)
  田澤将太, 酒井洋輔
- Journal Title
  
  電気学会・基礎・材料・共通部門大会講演論文集
- Data Source
  KAKENHI-PROJECT-15360143
[Journal Article] Deposition of low-k film on electrodes by C_8F_<18> plasma CVD and enhancement of gas breakdown voltage2004
- Author(s)
  S.Tazawa, Y.Sakai, M.A.Bratescu
- Journal Title
  
  Proc.of 2004 Annual Conference of Fundamentals and Material Society, IEE Japan X-5
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360143
[Journal Article] Amorphous fluorocarbon polymer (a-C : F) films obtained by plasma enhanced chemical vapor deposition from perfluorooctane (C_8F_<18>) vapor I : deposition, morphology, structural and chemical properties2004
- Author(s)
  C.Biloiu, I.A.Biloiu, Y.Sakai, Y.Suda, A.Ohta
- Journal Title
  
  J.Vac.Sci.Tech. Vol.22(1)
  
  Pages: 13-19
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360143
[Journal Article] Laser spectroscopy of the Ar(1s_<3.5>) and CH in Ar+CH_4 DBD for a-C : H deposition2004
- Author(s)
  Y.Yoshizaki, M.A.Bratescu, Y.Sakai, Y.Suda, H.Sugawara
- Journal Title
  
  T.IEE Japan Vol.124-A(2)
  
  Pages: 158-163
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360143
[Journal Article] Ar+CH_4バリア放電を用いたa-C:H堆積におけるAr(1s_<3,5>)およびCHのレーザ分光診断2004
- Author(s)
  吉崎泰直, M.A.Bratescu, 酒井洋輔, 須田善行
- Journal Title
  
  電気学会論文誌A 124(2)
  
  Pages: 158-163
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360143
[Journal Article] Amorphous fluorocarbon polymer (a-C:F) films obtained by plasma enhanced chemical vapor deposition from perfluorooctane (C_8F_<18>) vapor I : deposition, morphology, structural and chemical properties2004
- Author(s)
  C.Biloiu, I.A.Biloiu, Y.Sakai, Y.Suda, A.Ohta
- Journal Title
  
  J.Vac.Sci.Technol. 22
  
  Pages: 13-19
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360143
[Journal Article] Electron-Molecule collision processes in insulating gas mixtures-Investigation of synergy mechanism2004
- Author(s)
  T.Ishigaki, H.Hiroti, H.Sugawara, Y.Sakai
- Journal Title
  
  T.IEE Japan Vol.124-A(2)
  
  Pages: 126-131
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360143
[Journal Article] Decomposed fragment identification in C_8F_<18> RF plasma for a-C : F film production2004
- Author(s)
  Y.Sakai, S.Tazawa, M.A.Bratescu, Y.Suda, H.Sugawara
- Journal Title
  
  Abstracts of 57^<th> Annual Gaseous Electronics Conference ES1-49
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360143
[Journal Article] a-C:F film coated electrodes for electrical insulation2004
- Author(s)
  Y.Sakai, S.Tazawa, M.A.Bratescu, Y.Suda, H.Sugawara
- Journal Title
  
  Proc.12^<th> Asian Conference on Electrical Discharge
  
  Pages: 19-22
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360143
[Journal Article] C_8F_<18>プラズマCVDによる低誘電率膜の電極面上堆積とガス絶縁破壊電圧の上昇効果2004
- Author(s)
  田澤将太, 酒井洋輔, M.A.Bratescu
- Journal Title
  
  電気学会・基礎・材料・共通部門大会講演論文集
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360143
[Journal Article] Decomposed fragment identification in C_8F_<18> RF plasma for a-C:F film production2004
- Author(s)
  Y.Sakai, S.Tazawa, M.A.Bratescu, Y.Suda, H.Sugawara
- Journal Title
  
  Abstracts of 57^<th> Annual Gaseous Electronics Conference
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360143
[Journal Article] 混合絶縁気体中の電子緩和過程-相乗効果発生機構の検討-2004
- Author(s)
  石垣卓也, 広地裕樹, 菅原広剛, 酒井洋輔
- Journal Title
  
  電気学会論文誌A 124(2)
  
  Pages: 126-131
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360143
[Journal Article] a-C:F Film Coated Electrodes For Electrical Insulation2004
- Author(s)
  Y.Sakai, S.Tazawa, M-A Bratescu, Y.Suda, H.Sugawara
- Journal Title
  
  Proceedings of the 12th Asian Conference on Electrical Discharge D
  
  Pages: 404-407
- Data Source
  KAKENHI-PROJECT-17360121
[Journal Article] Relationship between the C_8F_<18> plasma and a-C : F film properties by PECVD2004
- Author(s)
  A.Ohta, S.Tazawa, Y.Sakai, M.A.Bratescu
- Journal Title
  
  Proc.of 21^<st> Symposium on Plasma Processing
  
  Pages: 32-33
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360143
[Journal Article] Relationship between the C_8F_<18> plasma and a-C:F film properties by PECVD2004
- Author(s)
  A.Ohta, S.Tazawa, Y.Sakai, M.A.Bratescu
- Journal Title
  
  第21回プラズマプロセシング研究会論文集
  
  Pages: 32-33
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360143
[Journal Article] Amorphous fluorocarbon polymer (a-C:F) films obtained by plasma enhanced chemical vapor deposition from perfluoro-octane vapor. II:2004
- Author(s)
  C.Biloiu, I.A.Biloiu, Y.Sakai, H.Sugawara, A.Ohta
- Journal Title
  
  J.Vac.Sci.Tech.A 22(4)
  
  Pages: 1158-1165
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360143
[Journal Article] Enhancement of Breakdown Voltages between a-C:F Film Coated Electrodes in N_2, Ar and He Gases2004
- Author(s)
  S.Tazawa, A.Ohta, Y.Sakai, M.A.Bratescu
- Journal Title
  
  第21回プラズマプロセシング研究会論文集
  
  Pages: 154-155
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360143
[Journal Article] Enhancement of Breakdown Voltages between a-C : F Film Coated Electrodes in N_2, Ar and He Gases2004
- Author(s)
  S.Tazawa, A.Ohta, Y.Sakai, M.A.Bratescu
- Journal Title
  
  Proc.of 21^<st> Symposium on Plasma Processing
  
  Pages: 154-155
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360143
[Journal Article] a-C : F film coated electrodes for electrical insulation2004
- Author(s)
  Y.Sakai, S.Tazawa, M.A.Bratescu, Y.Suda, H.Sugawara
- Journal Title
  
  Proc.12^<th> Asian Conference on Electrical Discharge
  
  Pages: 19-22
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360143
[Journal Article] Amorphous fluoroca rbon polymer (a-C : F) films obtained by plasma enhanced chemical vapor deposition from perfluoro-octane vapor II : Dielectric and insulating properties2004
- Author(s)
  C.Biloiu, I.A.Biloiu, Y.Sakai, H.Sugawara, A.Ohta
- Journal Title
  
  J.Vac.Sci.Tech. Vol.22(4)
  
  Pages: 1158-1165
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360143
[Journal Article] Amorphous fluorocarbon polymer (a-C:F) films prepared in perfluorooctane (C_8F_<18>) vapor plasmas2003
- Author(s)
  C.Biloiu, I.A.Biloiu, Y.Sakai, A.Ohta, Y.Suda
- Journal Title
  
  Proc.26^<th> Int.Conf.on Phenomena in Ionized Gase
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360143
[Journal Article] a-C : F : film production by C_8F_<18> vapor plasma CVD and evaluation of the film properties2003
- Author(s)
  A.Ohta, C.Biloiu, Y.Sakai, M.A.Bratescu, Y.Suda
- Journal Title
  
  Papers of Technical Committee for Electrical Discharges, IEE Japan ED-03-115
  
  Pages: 49-54
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360143
[Journal Article] Amorphous fluorocarb on polymer (a-C : F) films prepared in perfluorooctane (C_8F_<18>) vapor Plasmas2003
- Author(s)
  C.Biloiu, I.A.Biloiu, Y.Sakai, A.Ohta, Y.Suda
- Journal Title
  
  Proc.of 26^<th> Int.Conf.on Phenomena in Ionized Gases
  
  Pages: 1-2
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360143
[Journal Article] Amorphous fluorocarbon polymer films prepared in perfluorooctane (C_8F_<18>) vapor plasma CVD for an application of electrical insulation2003
- Author(s)
  C.Biloiu, I.A.Biloiu, Y.Sakai, Y.Suda, A.Ohta
- Journal Title
  
  Proc.of Int.Sym.on Plasma Chemistry
  
  Pages: 500-505
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360143
[Journal Article] Amorphous fluorocarbon polymer films prepared in perfluorooctane (C_8F_<18>) vapor plasma CVD for an application of electrical insulation2003
- Author(s)
  C.Biloiu, I.A.Biloiu, Y.Sakai, Y.Suda, A.Ohta
- Journal Title
  
  Proc.of 16^<th> Int.Sym.on Plasma Chemistry
  
  Pages: 500-505
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360143
[Journal Article] C_8F_<18>プラズマCVDを用いたa-C:F膜の生成とその特性の評価2003
- Author(s)
  太田章嗣, C.Biloiu, 酒井洋輔, M.A.Bratescu, 須田善行
- Journal Title
  
  電気学会放電研究会資料 ED-03-115
  
  Pages: 49-54
- NAID
  10018985552
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360143
[Presentation] C_8F_18プラズマCVDによるa-C:F膜の異種構造積層堆積(No.1-208)2008
- Author(s)
  水野巧一朗、小池広恵、山内達也、菅原広剛、須田善行、酒井洋輔
- Organizer
  平成20年電気学会全国大会
- Place of Presentation
  福岡工大(福岡)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] 封じきりC8F18プラズマCVDによる二層非晶質フッ化炭素膜の間欠堆積(No. 2-093)2008
- Author(s)
  山内達也、菅原広剛、酒井洋輔、須田善行、小池広恵
- Organizer
  平成20年電気学会全国大会
- Place of Presentation
  福岡工大(福岡)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] 封じきりC8F18プラズマCVDによる二層非晶質フッ化炭素膜の間欠堆積(No.2-093)2008
- Author(s)
  山内達也、菅原広剛、酒井洋輔、須田善行、小池広恵
- Organizer
  平成20年電気学会全国大会
- Place of Presentation
  福岡工大(福岡)
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] Intermittent deposition of two-layered a-C:F films by C8F18 plasma CVD in closed system2008
- Author(s)
  T. Yamauti, H. Sugawara, Y. Sakai, Y. Suda, H. Koike
- Organizer
  The 2008 Annual Meeting, IEEJ
- Place of Presentation
  Fukuoka, Japan
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] C_8F_<18>プラズマCVDによるa-C:F膜の異種構造積層堆積(No.1-208)2008
- Author(s)
  水野巧一朗、小池広恵、山内達也、菅原広剛、須田善行、酒井洋輔
- Organizer
  平成20年電気学会全国大会
- Place of Presentation
  福岡工大(福岡)
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] Deposition of a-C:F Films by C_8F_18 Plasma CVD and their Characterization2007
- Author(s)
  H. Koike, T. Yamauti, Y. Suda, Y. Sakai, H. Sugawara
- Organizer
  The 2007 Annual Meeting, IEEJ
- Place of Presentation
  Toyama, Japan
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] モンテカルロ法によるCF_4RFプラズマの構造解析2007
- Author(s)
  森直樹、菅原広剛、江口礼良、荒木田大嗣、須田善行、酒井洋輔
- Organizer
  平成19年度電気・情報関係学会北海道支部連合大会
- Place of Presentation
  北海道工大(札幌)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] Relation between optical emission spectra observed in C_8F_18 plasma CVD and chemical bonding in a-C:F films2007
- Author(s)
  H. Koike, H. Sugawara, Y. Sakai, Y. Suda, T. Yamauti
- Organizer
  Hokkaido Branch Annual Meeting on Electrical Related Institutes
- Place of Presentation
  Sapporo, Japan
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] C_8F_<18>プラズマCVDによるa-C:F膜堆積とその評価(No.1-221)2007
- Author(s)
  小池広恵、山内達也、須由善行、酒井洋輔、菅原広剛
- Organizer
  平成19年電気学会全国大会
- Place of Presentation
  富山大(富山)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] Electron acceleration suitable for decomposition of CF_4 molecules and CFx radicals2007
- Author(s)
  D. Arakida, N. Eguti, N. Mori, H. Sugawara, Y. Sakai, Y. Suda
- Organizer
  Hokkaido Branch Annual Meeting on Electrical Related Institutes
- Place of Presentation
  Sapporo, Japan
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] Analysis of CF4 RF plasmas using a fluid model-Response of electric field in the plasma bulk-2007
- Author(s)
  N. Eguti, H. Sugawara, Y. Sakai, Y. Suda
- Organizer
  Hokkaido Branch Annual Meeting on Electrical Related Institutes
- Place of Presentation
  Sapporo, Japan
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] Intermittent deposition of two-layered a-C:F films by C8F18 plasma CVD in closed system2007
- Author(s)
  T. Yamauti, H. Sugawara, Y. Sakai, Y. Suda, H. Koike
- Organizer
  Hokkaido Branch Annual Meeting on Electrical Related Institutes
- Place of Presentation
  Sapporo, Japan
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] C_8F_<18>プラズマCVDによる二層非晶質フッ化炭素膜の作成(No.104)2007
- Author(s)
  山内達也、菅原広剛、酒井洋輔、須田善行、小池広恵
- Organizer
  平成19年度電気・情報関係学会北海道支部連合大会
- Place of Presentation
  北海道工大(札幌)
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] Modeling of Electron-lon Collisions in Simulation of Radio-Frequency CF4 Plasmas2007
- Author(s)
  N. Mori, H. Sugawara, D. Arakita, Y. Suda, Y. Sakai
- Organizer
  The 2007 Annual Meeting, IEEJ
- Place of Presentation
  Toyama, Japan
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] CF_4中の衝撃電界電子加速におけるエネルギー効率の電界波形依存性(No.1-070)2007
- Author(s)
  荒木田大嗣、森直樹、菅原広剛、須田善行、酒井洋輔
- Organizer
  平成19年電気学会全国大会
- Place of Presentation
  富山大(富山)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] CF4分子、CF_xラジカルの分解に適した電子加速(No.97)2007
- Author(s)
  荒木田大嗣、江口礼良、森直樹、菅原広剛、酒井洋輔、須田善行
- Organizer
  平成19年度電気・情報関係学会北海道支部連合大会
- Place of Presentation
  北海道工大(札幌)
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] 高周波CF_4プラズマシミュレーションにおける電子-イオン衝突のモデリング(No.1-068)2007
- Author(s)
  森直樹、菅原広剛、荒木田大嗣、須田善行、酒井洋輔
- Organizer
  平成19年電気学会全国大会
- Place of Presentation
  富山大(富山)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] C_8F_18プラズマCVDによる二層非晶質フッ化炭素膜の作成(No.104)2007
- Author(s)
  山内達也、菅原広剛、酒井洋輔、須田善行、小池広恵
- Organizer
  平成19年度電気・情報関係学会北海道支部連合大会
- Place of Presentation
  北海道工大(札幌)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] 流体モデルによるCF_4RFプラズマの構造解析-バルクにおける電界の応答特性-(No.98)2007
- Author(s)
  江口礼良、菅原広剛、酒井洋輔、須田善行
- Organizer
  平成19年度電気・情報関係学会北海道支部連合大会
- Place of Presentation
  北海道工大(札幌)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] CF4分子、CFxラジカルの分解に適した電子加速(No.97)2007
- Author(s)
  荒木田大嗣、江口礼良、森直樹、菅原広剛、酒井洋輔、須田善行
- Organizer
  平成19年度電気・情報関係学会北海道支部連合大会
- Place of Presentation
  北海道工大(札幌)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] Dependence of Energy Efficiency on Waveform of Electric Field in Impulse-Field Electron Acceleration in CF_42007
- Author(s)
  D. Arakita, N. Mori, H. Sugawara, Y. Suda, Y. Sakai
- Organizer
  The 2007 Annual Meeting, IEEJ
- Place of Presentation
  Toyama, Japan
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] C_8F_<18>プラズマCVDにおける発光スペクトルとa-C:F膜の化学結合状態の関連(No.92)2007
- Author(s)
  小池広恵、菅原広剛、酒井洋輔、須田善行、山内達也
- Organizer
  平成19年度電気・情報関係学会北海道支部連合大会
- Place of Presentation
  北海道工大(札幌)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] C_8F_<18>/ArプラズマCVDを用いたa-C:F膜の生成とその電気的特性の評価(No.P-4-2)2006
- Author(s)
  小池広恵、酒井洋輔、菅原広剛、須田善行、田澤将太
- Organizer
  2006年放電学会年次大会
- Place of Presentation
  芝浦工大(東京)
- Year and Date
  2006-11-20
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] モンテカルロシミュレーションによる四フッ化炭素プラズマ解析(No.P-4-1)2006
- Author(s)
  森直樹、菅原広剛、荒木田大嗣、須田善行、酒井洋輔
- Organizer
  2006年放電学会年次大会
- Place of Presentation
  芝浦工大(東京)
- Year and Date
  2006-11-20
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] Analysis of CF_4 plasma by Monte Carlo simulation2006
- Author(s)
  N. Mori, H. Sugawara, D. Arakita, Y. Suda, Y. Sakai
- Organizer
  Hokkaido Branch Annual Meeting on Electrical Related Institutes
- Place of Presentation
  Muroran, Japan
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] Simulation of Electron Swarm Development in Carbon Tetrafluoride-Two-Peaked Spatial Distribution of Electrons in Relaxation Process-2006
- Author(s)
  H. Sugawara, N. Mori, D. Arakita, Y. Suda, and Y. Sakai
- Organizer
  8th Asia-Pacific Conf. on Plasma Sci. and Tech. and 19th Symp. on Plasma Science for Materials
- Place of Presentation
  Cairns, Australia
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] Analysis of CF_4 plasma by Monte Carlo simulation2006
- Author(s)
  N. Mori, H. Sugawara, D. Arakita, Y. Suda, and Y. Sakai
- Organizer
  2006-IEED Japan Annual Meeting
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2006-11-20
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] C_8F_<18>/ArプラズマCVDによるa-C:F膜堆積とその特性(No.68)2006
- Author(s)
  小池広恵、酒井洋輔、菅原広剛、須田善行、田澤将太
- Organizer
  平成18年度電気・情報関係学会北海道支部連合大会
- Place of Presentation
  室蘭工業大学(室蘭)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] Simulation of Electron Swarm Development in Carbon Tetrafluoride-Two-Peaked Spatial Distribution of Electrons in Relaxation Process-(P-II-B-27)2006
- Author(s)
  H. Sugawara, N. Mori, D. Arakita, Y. Suda, and Y. Sakai
- Organizer
  8th Asia-Pacific Conference on Plasma Science and Technology and 19th Symposium on Plasma Science for Materials
- Place of Presentation
  Cairns, Australia
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] a-C:F Films Deposition by C_8F_<18>/Ar Plasma CVD and their Properties2006
- Author(s)
  H. Koike, Y. Sakai, H. Sugawara, Y. Suda, S. Tazawa
- Organizer
  2006-IEED Japan Annual Meeting
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2006-11-20
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] モンテカルロシミュレーションによるCF_4プラズマ解析(No.62)2006
- Author(s)
  森直樹、菅原広剛、荒木田大嗣、須田善行、酒井洋輔
- Organizer
  平成18年度電気・情報関係学会北海道支部連合大会
- Place of Presentation
  室蘭工業大学(室蘭)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] Electron swarm properties and cross section in gases2005
- Author(s)
  Y. Sakai
- Organizer
  Romanian-Japanese Symposium on Science and Technology
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2005-05-31
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] Electron swarms and cross section data2005
- Author(s)
  Y. Sakai
- Organizer
  14^<th> Int. Symp. on Electron-Molecule Collisions and Swarms
- Place of Presentation
  Campinas, Brazil
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] Electron swarm properties and cross section in gases2005
- Author(s)
  Y. Sakai
- Organizer
  Romanian-Japanese Symposium on Science and Technology
- Place of Presentation
  Nagoya
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] Deposition of low-k films by C_8F_18 plasma CVD and their characteristics2005
- Author(s)
  S. Tazawa, Y. Sakai, Y. Suda, H. Sugawara
- Organizer
  Hokkaido Branch Annual Meeting on Electrical Related Institutes
- Place of Presentation
  Sapporo, Japan
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] C_8F_<18>プラズマCVDによる低誘電率膜堆積とその特性(No.67)2005
- Author(s)
  田澤将太, 酒井洋輔, 須田善行, 菅原広剛
- Organizer
  電気・情報関係学会北海道支部連合大会
- Place of Presentation
  北海道大学(札幌)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360121
[Presentation] Electron swarms and cross section data2005
- Author(s)
  Y. Sakai
- Organizer
  14th International Symposium on Electron-Molecule Collisions and Swarms
- Place of Presentation
  Campinas, Brazil
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17360121

1. TAGASHIRA Hiroaki (10001174)

# of Collaborated Projects: 14 results

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2. SUGAWARA Hirotake (90241356)

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33. 橘邦英 (40027925)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
34. 諸隈之彦 (60051611)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
35. 北守一隆 (40153134)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
36. 冨長勇作 (80003200)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
37. 大賀光太郎 (40133706)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
38. 山口和美 (00133702)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
39. 相馬純吉 (00001115)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
40. NEGISHI Masamitsu

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
41. ISOJIMA Shigeki

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
42. HOUNO Hitoshi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
43. NAKAJIMA Masatoshi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
44. 中神芳武

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
45. 中村聡

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
46. 森山英重

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
47. 磯島茂樹

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
48. 小野幹幸

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
49. M.A. Bratescu

# of Collaborated Projects: 0 results

# of Collaborated Products: 14 results

SAKAI Yosuke 酒井 洋輔

Research Projects

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Co-Researchers

COMPACT AND HIGH DIELECTRIC STRENGTH OF ELECTRIC MACHINES WITH a-C:F FILM COATING OF LOW-DIELECTRIC CONSTANT AND HIGH DIELECTRIC STRENGTH DEPOSITED IN PLASMAPrincipal Investigator

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Alternative SF_6 insulation by deposition of amorphous CxFy film on electric machine conductorsPrincipal Investigator

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Development of insulating system with low dielectric constant, high dielectric strength a-C:F film coated conductor prepared by plasma CVD as alternatives to SF_6Principal Investigator

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大気汚染粒子の放電分解と関連する放電基礎量のデータベース化Principal Investigator

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Basic study on decomposition of air pollutants using synergetic effect between barrier discharge and VUV lightPrincipal Investigator

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Study on Optimization of Barrier Discharge Excimer-LampPrincipal Investigator

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SAKAI Yosuke 酒井洋輔