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MATSUMURA Michio  松村 道雄

ORCIDConnect your ORCID iD *help
… Alternative Names

松村 道雄  マツムラ ミチオ

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Researcher Number 20107080
Other IDs
External Links
Affiliation (based on the past Project Information) *help 2013: 大阪大学, 学内共同利用施設等, 教授
2012 – 2013: 大阪大学, 太陽エネルギー化学研究センター, 教授
2002 – 2009: 大阪大学, 太陽エネルギー化学研究センター, 教授
1997 – 1999: 大阪大学, 有機光工学研究センター, 教授
1994 – 1995: 大阪大学, 有機光工学研究センター, 教授
1988: 大阪大学, 基礎工学部, 助教授
1987: 大阪大学, 基礎工学部, 講師
Review Section/Research Field
Principal Investigator
Science and Engineering / 工業物理化学 / Electron device/Electronic equipment / Nanomaterials/Nanobioscience / Nanostructural science
Except Principal Investigator
物理化学一般
Keywords
Principal Investigator
シリコン / 電気化学 / 触媒 / 界面 / 表面 / ナノ加工 / 有機薄膜 / 酸素 / 溶解 / Interface … More / マイクロ加工 / 触媒・化学プロセス / エッチング / 光電流 / 電極 / 有機太陽電池 / 光照射 / Analytical Method / Electrochemistry / Surface / Oxide / Silicon / 評価法 / 酸化物 / Luminescent material / Schottky emission / Energy barrier / Carrier injection / Organic thin layr / Electroluminescence / EL device / ショットキー放出 / 発光物質 / ショットキー電流 / エネルギー障壁 / 電荷注入 / 有機物薄膜 / エレクトロルミネッセンス / EL素子 / 金属触媒 / 微細加工 / 気相エッチング / エッチン / 微細配線技術 / 半導体超微細化 / 半導体超微細加工 / 細孔 / 熱処理 / 接合界面 / 太陽電池 / 励起子 / 有機太陽 / 光起電力 / フッ化物 / 水 / 表面平坦化 … More
Except Principal Investigator
Hydrogen evolution / Semiconductor electrode / Oxide film / Ultrafine metal particle / Photoelectrochemistry / Plasma CVD method / Solar cell / Amorphous silicon / 水素発生 / 半導体電極 / 酸化物薄膜 / 金属微粒子 / 光電気化学 / プラズマCVD法 / 太陽電池 / アモルファスシリコン Less
  • Research Projects

    (14 results)
  • Research Products

    (25 results)
  • Co-Researchers

    (9 People)
  •  New etching phenomena occurring at catalytic metal/Si interface in gas phasePrincipal Investigator

    • Principal Investigator
      MATSUMURA Michio
    • Project Period (FY)
      2012 – 2013
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Electron device/Electronic equipment
    • Research Institution
      Osaka University
  •  触媒作用を利用したシリコンへの微細配線形成技術の開発Principal Investigator

    • Principal Investigator
      松村 道雄
    • Project Period (FY)
      2008 – 2009
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Review Section
      Science and Engineering
    • Research Institution
      Osaka University
  •  触媒法によるシリコンへのナノサイズ孔・溝形成技術の開発Principal Investigator

    • Principal Investigator
      松村 道雄
    • Project Period (FY)
      2007
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Review Section
      Science and Engineering
    • Research Institution
      Osaka University
  •  Basic study on development of micro- and nano-machining processes for semiconductors using catalytic effects of metalsPrincipal Investigator

    • Principal Investigator
      MATSUMURA Michio
    • Project Period (FY)
      2007 – 2009
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Nanomaterials/Nanobioscience
    • Research Institution
      Osaka University
  •  有機薄膜系太陽電池の高効率化を目指した接合構造の制御Principal Investigator

    • Principal Investigator
      松村 道雄
    • Project Period (FY)
      2005 – 2006
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Review Section
      Science and Engineering
    • Research Institution
      Osaka University
  •  金属微粒子の触媒作用を利用したシリコン基板へのナノ細孔の形成Principal Investigator

    • Principal Investigator
      松村 道雄
    • Project Period (FY)
      2005 – 2006
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Nanostructural science
    • Research Institution
      Osaka University
  •  有機薄膜系太陽電池の高効率化を目指した界面構造制御Principal Investigator

    • Principal Investigator
      松村 道雄
    • Project Period (FY)
      2003 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Review Section
      Science and Engineering
    • Research Institution
      Osaka University
  •  有機薄膜系太陽電池の高効率化を目指した界面構造制御Principal Investigator

    • Principal Investigator
      松村 道雄
    • Project Period (FY)
      2002
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Review Section
      Science and Engineering
    • Research Institution
      Osaka University
  •  Development of New Methods for Structural Analysis of Silicon/Oxide Interface and Silicon SurfacePrincipal Investigator

    • Principal Investigator
      MATSUMURA Michio
    • Project Period (FY)
      2002 – 2003
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      工業物理化学
    • Research Institution
      Osaka University
  •  光照射による溶液中のシリコン表面の原子レベルでの構造変化Principal Investigator

    • Principal Investigator
      松村 道雄
    • Project Period (FY)
      1999
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas (A)
    • Research Institution
      Osaka University
  •  光照射による溶液中のシリコン表面の原子レベルでの構造変化Principal Investigator

    • Principal Investigator
      松村 道雄
    • Project Period (FY)
      1998
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas (A)
    • Research Institution
      Osaka University
  •  シリコン表面の原子レベルでの平坦化に関する電気化学的手法を用いた研究Principal Investigator

    • Principal Investigator
      松村 道雄
    • Project Period (FY)
      1997 – 1998
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      工業物理化学
    • Research Institution
      Osaka University
  •  Elucidation of the mechanism of organic EL devicesPrincipal Investigator

    • Principal Investigator
      MATSUMURA Michio
    • Project Period (FY)
      1994 – 1995
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      工業物理化学
    • Research Institution
      OSAKA UNIVERSITY
  •  Decomposition of Water by Use of a Wet-Type Solar Cell Equipped with a Stacked Multilayer Amorphous Silicon Electrode

    • Principal Investigator
      TSUBOMURA Hiroshi
    • Project Period (FY)
      1987 – 1989
    • Research Category
      Grant-in-Aid for General Scientific Research (A)
    • Research Field
      物理化学一般
    • Research Institution
      Osaka University

All 2014 2013 2012 2010 2009 2008

All Journal Article Presentation Patent

  • [Journal Article] Formation of Si Nano Hole Arrays Using a Self-assembled Nanolithography Mask and Cu Fill of the Array2013

    • Author(s)
      近藤英一、玉井 架、松村道雄
    • Journal Title

      Journal of The Surface Finishing Society of Japan

      Volume: 64 Issue: 12 Pages: 659-661

    • DOI

      10.4139/sfj.64.659

    • NAID

      130004704927

    • ISSN
      0915-1869, 1884-3409
    • Language
      Japanese
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24656232
  • [Journal Article] Pore Formation in a Silicon Wafer Using a Platinum Needle Electrode with Application of Square-Wave Potential Pulses in HF Solution2013

    • Author(s)
      Tomohiko Sugita, Kazuki Hiramatsu, Shigeru Ikeda, Michio Matsumura
    • Journal Title

      ACS Appl. Mater. Interfaces

      Volume: 5 Issue: 7 Pages: 2580-2584

    • DOI

      10.1021/am303167c

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-24656232
  • [Journal Article] Acceleration of groove formation in silicon using catalytic wire electrodes for development of a slicing technique2010

    • Author(s)
      M.S. Salem, C.-L. Lee, S. Ikeda, M. Matsumura
    • Journal Title

      J. Mater. Process. Technol Vol.210,No.2

      Pages: 330-334

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19310073
  • [Journal Article] Formation of 100-μm-deep Vertical Pores in Si Wafers by Wet Etching and Cu Electrodeposition2009

    • Author(s)
      C.-L. Lee, S. Tsuru, Y. Kanda, S. Ikeda, M. Matsumura
    • Journal Title

      Electrochem. Soc Vol.156,No.12

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19310073
  • [Journal Article] Electrochemical Grooving of Si Wafers Using Catalytic Wire Electrodes in HF Solution2009

    • Author(s)
      C.-L. Lee, Y. Kanda, T. Hirai, S. Ikeda, M. Matsumura
    • Journal Title

      J. Electrochem. Soc Vol.156,No.3

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19310073
  • [Journal Article] 触媒を利用したシリコンのエッチングと太陽電池製造工程への応用2009

    • Author(s)
      李佳龍、池田茂、松村道雄
    • Journal Title

      生産技術 Vol.61,No.1

      Pages: 27-31

    • NAID

      40016873419

    • Data Source
      KAKENHI-PROJECT-19310073
  • [Journal Article] Pore Formation in Silicon by Wet Etching Using Micrometer-sized Metal Particles as Catalysts2008

    • Author(s)
      C.-L. Lee, K. Tsujino, Y. Kanda, S. Ikeda, M. Matsumura
    • Journal Title

      J. Mater. Chem Vol.18,No.9

      Pages: 1015-1020

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19310073
  • [Patent] 結晶基板に孔を形成する方法、並びに結晶基板内に配線や配管を有する機能性デバイス2012

    • Inventor(s)
      松村道雄、永田大地、釘宮公一
    • Industrial Property Rights Holder
      松村道雄、永田大地、釘宮公一
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2012-185715
    • Filing Date
      2012-08-14
    • Data Source
      KAKENHI-PROJECT-24656232
  • [Patent] 結晶基板に孔を形成する方法、並びに結晶基板に配線や配管を有する機能デバイス2012

    • Inventor(s)
      松村道雄, 永田大地, 釘宮公一
    • Industrial Property Rights Holder
      大阪大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2012-08-24
    • Data Source
      KAKENHI-PROJECT-24656232
  • [Presentation] TSV Formation by Metal-Assisted Chemical Etching2014

    • Author(s)
      松村道雄
    • Organizer
      第一回日仏三次元集積回路ワークショップ
    • Place of Presentation
      日仏会館
    • Year and Date
      2014-06-09
    • Data Source
      KAKENHI-PROJECT-24656232
  • [Presentation] Making Through Holes in Si for 3D IC Packaging by Metal-Catalyzed Wet Etching: Progress and Challenges2014

    • Author(s)
      川口遼馬、巽 康司、原田隆史、池田 茂、松村道雄
    • Organizer
      MRS Spring Meeting
    • Place of Presentation
      San Francisico
    • Data Source
      KAKENHI-PROJECT-24656232
  • [Presentation] 「Making Through Holes in Si for 3D IC Packaging by Metal-Catalyzed Wet Etching : Progress and Challenges2014

    • Author(s)
      R. Kawaguchi, K. Tatsumi, T. Harada, S. Ikeda and M. Matsumura
    • Organizer
      2014 MRS Spring Meeting
    • Place of Presentation
      San Francisco
    • Data Source
      KAKENHI-PROJECT-24656232
  • [Presentation] Pd触媒を用いたSiの気相エッチングと貫通孔形成2013

    • Author(s)
      川口遼馬,原田隆史,池田 茂,松村 道雄
    • Organizer
      第74回 応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学田辺キャンパス
    • Data Source
      KAKENHI-PROJECT-24656232
  • [Presentation] Making Fine Cu Wires in a Si Wafer Using Catalytic Reactions2013

    • Author(s)
      K. Tatsumi, S. Ikeda and M. Matsumura
    • Organizer
      2013 MRS Spring Meeting
    • Place of Presentation
      San Francisco
    • Data Source
      KAKENHI-PROJECT-24656232
  • [Presentation] Pd触媒を用いたSiの気相エッチングと貫通孔形成2013

    • Author(s)
      川口遼馬, 原田隆史, 池田茂, 松村道雄
    • Organizer
      第74回応用物理学会秋期学術講演会
    • Place of Presentation
      同志社大学
    • Data Source
      KAKENHI-PROJECT-24656232
  • [Presentation] 金属触媒を用いたシリコンの新規気相エッチング法2012

    • Author(s)
      永田大地, 杉田智彦, 池田茂, 松村道雄
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学・松山大学
    • Data Source
      KAKENHI-PROJECT-24656232
  • [Presentation] Micromachining of Silicon Wafers with Catalytic Needle Electrodes in HF solution2010

    • Author(s)
      T. Sugita, T. Hirai, S. Ikeda, M. Matsumura
    • Organizer
      The 217th Meeting of The Electrochemical Society (ECS)
    • Place of Presentation
      Vancouver, Canada (The Fairmont Hotel Vancouver)
    • Year and Date
      2010-04-27
    • Data Source
      KAKENHI-PROJECT-19310073
  • [Presentation] アノード分極した金属針によるシリコンウェハへの微細孔の形成2010

    • Author(s)
      杉田智彦, 平井豪, 松村道雄
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      平塚(東海大学湘南キャンパス)
    • Year and Date
      2010-03-20
    • Data Source
      KAKENHI-PROJECT-19310073
  • [Presentation] 触媒粒子を用いたエッチングにより形成されるシリコンの新規表面構造2009

    • Author(s)
      神田裕士, 原田隆史, 松村道雄
    • Organizer
      電気化学秋季大会
    • Place of Presentation
      小金井(東京農工大学工学部)
    • Year and Date
      2009-09-10
    • Data Source
      KAKENHI-PROJECT-19310073
  • [Presentation] 触媒針電極を用いたシリコン基板への微細加工2009

    • Author(s)
      杉田智彦, 平井豪, 松村道雄
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山(富山大学五福キャンパス)
    • Year and Date
      2009-09-10
    • Data Source
      KAKENHI-PROJECT-19310073
  • [Presentation] 触媒針電極を用いたシリコン基板への貫通孔の形成2009

    • Author(s)
      杉田智彦, 平井豪, 池田茂, 松村道雄
    • Organizer
      電気化学会第76回大会
    • Place of Presentation
      京都(京都大学吉田キャンパス)
    • Year and Date
      2009-03-29
    • Data Source
      KAKENHI-PROJECT-19310073
  • [Presentation] 電気化学的エッチング反応を利用したシリコンブロックのスライシング2009

    • Author(s)
      李佳龍, 神田裕士, Mohamed Shaker Salem, 池田茂, 松村道雄
    • Organizer
      電気化学会第76回大会
    • Place of Presentation
      京都(京都大学吉田キャンパス)
    • Year and Date
      2009-03-29
    • Data Source
      KAKENHI-PROJECT-19310073
  • [Presentation] 水素プラズマ処理により多結晶シリコン中に取り込まれた水素の状態について2009

    • Author(s)
      水田紘平, 池田茂, 松村道雄
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山(富山大学五福キャンパス)
    • Year and Date
      2009-09-09
    • Data Source
      KAKENHI-PROJECT-19310073
  • [Presentation] Wet Processes for Boring, Grooving and Slicing Silicon Using Metal Catalysts2009

    • Author(s)
      Chia-Long Lee, Yuji Kanda, Mohamed Shaker Salem, Takeshi Hirai, Shigeru Ikeda, Michio Matsumura
    • Organizer
      2009 Material Research Society (MRS) Spring Meeting
    • Place of Presentation
      San Francisco, USA (San Francisco Marriott Hotel
    • Year and Date
      2009-04-15
    • Data Source
      KAKENHI-PROJECT-19310073
  • [Presentation] Electrochemical Grooving of Slicing Silicon Wafers Using Catalytic Wires2008

    • Author(s)
      Chia-Long L S alem, Takeshi Hirai, Shigeru Ikeda, Michio Matsumura
    • Organizer
      電気化学日米合同大会
    • Place of Presentation
      Honolulu, USA(ヒルトン・ハワイアンヴィレッジ)
    • Year and Date
      2008-10-14
    • Data Source
      KAKENHI-PROJECT-19310073
  • 1.  IKEDE Shigeru (40312417)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 11 results
  • 2.  KOBAYASHI Hikaru (90195800)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 3.  NAKATO Yoshihiro (70029502)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 4.  TSUBOMURA Hiroshi (20029367)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 5.  大佐々 崇宏 (30403124)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 6.  辻埜 和也 (40403125)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 7.  原田 隆史 (00379314)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 8.  平井 豪 (80423086)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 9.  近藤 英一 (70304871)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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