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Tabata Akimori  田畑 彰守

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TABATA Akimori  田畑 彰守

田畑 彰守  タバタ アキモリ

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Researcher Number 20227250
Other IDs
Affiliation (Current) 2022: 名古屋大学, 工学研究科, 准教授
Affiliation (based on the past Project Information) *help 2007 – 2008: Nagoya University, 大学院・工学研究科, 准教授
1996: 名古屋大学, 工学部, 助手
1993: 名古屋大学, 工学部, 助手
Review Section/Research Field
Principal Investigator
Electronic materials/Electric materials / Electronic materials/Electric materials
Keywords
Principal Investigator
アモルファス炭化シリコン / プラズマCVD法 / キャピラリプレート / ラジカルビーム / 光電導度 / プラズマCVD / 変調高周波放電 / 光伝導度 / アモルファム / ホットワイヤー化学気相成長法 … More / ラジカル源 / ナノ結晶 / 炭化シリコン / ドーピング / N_2分解 Less
  • Research Projects

    (3 results)
  • Research Products

    (15 results)
  •  Development of HW-CVD technique with a radical source and application to preparation of doped nanocrystalline thin filmsPrincipal Investigator

    • Principal Investigator
      TABATA Akimori
    • Project Period (FY)
      2007 – 2008
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      Nagoya University
  •  変調RFプラズマCVD法によるアモルファス炭化シリコン薄膜の作製Principal Investigator

    • Principal Investigator
      田畑 彰守
    • Project Period (FY)
      1996
    • Research Category
      Grant-in-Aid for Encouragement of Young Scientists (A)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      Nagoya University
  •  二元系アモルファス半導体薄膜作製のためのラジカルビームCVD装置の開発Principal Investigator

    • Principal Investigator
      田畑 彰守
    • Project Period (FY)
      1993
    • Research Category
      Grant-in-Aid for Encouragement of Young Scientists (A)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      Nagoya University

All 2009 2008

All Journal Article Presentation

  • [Journal Article] Preparation of N-type nanocrystalline 3C-SiC films by hot-wire CVD using N2 as doping gas2009

    • Author(s)
      Y. Hoshide, A. Tabata, A. Kitagawa, A. Kondo
    • Journal Title

      Thin Solid Films 517

      Pages: 3524-3524

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19560314
  • [Journal Article] Preparation of n-type nanocrystalline 3C-SiC films by hot-wire CVD using N_2 as doping gas2009

    • Author(s)
      Y. Hoshide, A. Tabata, A. Kitagawa A. Kondo
    • Journal Title

      Thin Solid Films (未定印刷中)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19560314
  • [Journal Article] N_2 decomposition by hot wire and N_2 post-deposition treatment on hydrogenated microcrystalline silicon thin films.2009

    • Author(s)
      K. Mazaki A. Tabata, A. Kitagawa A. Kondo
    • Journal Title

      Thin Solid Films (未定印刷中)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19560314
  • [Journal Article] H_2 decomposition by hot wire and N_2 post-deposition treatment on hydrogenated microcrystalline silicon thin films2009

    • Author(s)
      M. Koji, A. Tabata, A. Kitagawa, A. Kondo
    • Journal Title

      Thin Solid Films 517

      Pages: 3452-3452

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19560314
  • [Presentation] ガラス基板上へのn型ナノ結晶3C-SiC薄膜の低温堆積とその高品質化2008

    • Author(s)
      星出純希, 田畑彰守, 北川明彦, 近藤明弘
    • Organizer
      SiC及び関連ワイドギャップ半導体研究会第17回講演会予稿集
    • Place of Presentation
      大田区産業プラザ(35-36)
    • Year and Date
      2008-12-08
    • Data Source
      KAKENHI-PROJECT-19560314
  • [Presentation] N_2 decomposition by hot wire and N_2 post-deposition treatment on hydrogenated microcrystalline silicon thin films.2008

    • Author(s)
      M. Mazaki, A. Tabata. Kitagawa, A. Kondo
    • Organizer
      5th International Conference on Hot-Wire CVD (Cat-CVD) process
    • Place of Presentation
      Massachusetts, USA
    • Data Source
      KAKENHI-PROJECT-19560314
  • [Presentation] N_2ガスをドーピング原料としたn型ナノ結晶3 C-SiC薄膜の開発2008

    • Author(s)
      星出純希, 田畑彰守, 北川明彦, 近藤明弘
    • Organizer
      第5回Cat-CVD研究会講演予稿集、
    • Place of Presentation
      神奈川工科大学、神奈川
    • Data Source
      KAKENHI-PROJECT-19560314
  • [Presentation] Improvement of electrical properties of n-type nanocrystalline 3C-SiC thin films prepared by hot-wire CVD at high H_2-dilution2008

    • Author(s)
      Y. Hoshide A. Tabata
    • Organizer
      30th International Symposium on Dry Process
    • Place of Presentation
      Tokyo, Japan
    • Data Source
      KAKENHI-PROJECT-19560314
  • [Presentation] N2ガスをドーピング原料としたn型ナノ結晶3C-SiC薄膜の開発2008

    • Author(s)
      星出純希, 田畑彰守, 北川明彦, 近藤明弘
    • Organizer
      第5回Cat-CVD研究会講演予稿集
    • Place of Presentation
      神奈川工科大学メディアホール(33-36)
    • Year and Date
      2008-06-20
    • Data Source
      KAKENHI-PROJECT-19560314
  • [Presentation] H_2 decomposition by hot wire and N2 post-deposition treatment on hydrogenated microcrystalline silicon thin films2008

    • Author(s)
      M. Koji, A. Tabata, A. Kitagawa, A. Kondo
    • Organizer
      5th International Conference on Hot-Wire CVD (Cat-CVD) process
    • Place of Presentation
      Massachusetts (USA)
    • Year and Date
      2008-08-23
    • Data Source
      KAKENHI-PROJECT-19560314
  • [Presentation] Preparation of n-type nanocrystalline 3C-SiC films by hot-wire CVD usine N_2 as doping gas2008

    • Author(s)
      Y. Hoshide, A. Tabata A. Kitagawa, A. Kondo
    • Organizer
      5th International Conference on Hot-wire CVD (Cat-CVD) process
    • Place of Presentation
      Massachusetts, USA
    • Data Source
      KAKENHI-PROJECT-19560314
  • [Presentation] Preparation of n-type nano- crystalline 3C-SiC films by hot-wire CVD using N2 as doping gas2008

    • Author(s)
      Y. Hoshide, A. Tabata, A. Kitagawa, A. Kondo
    • Organizer
      5th International Conference on Hot-Wire CVD (Cat-CVD) process
    • Place of Presentation
      Massachusetts (USA)
    • Year and Date
      2008-08-23
    • Data Source
      KAKENHI-PROJECT-19560314
  • [Presentation] ホットワイヤーによるN2ガス分解2008

    • Author(s)
      間崎耕司, 田畑彰守, 北川明彦, 近藤明弘
    • Organizer
      第5回Cat-CVD研究会講演予稿集
    • Place of Presentation
      神奈川工科大学メディアホール(33-36)
    • Year and Date
      2008-06-20
    • Data Source
      KAKENHI-PROJECT-19560314
  • [Presentation] Improvement of electrical properties of n-type nano- crystalline 3C-SiC thin films prepared by hot-wire CVD at high H2-dilution2008

    • Author(s)
      Y. Hoshide, A. Tabata
    • Organizer
      30th International Symposium on Dry Process
    • Place of Presentation
      Tokyo (Japan)
    • Year and Date
      2008-11-26
    • Data Source
      KAKENHI-PROJECT-19560314
  • [Presentation] ホットワイヤーによるN_2ガス分解2008

    • Author(s)
      間崎耕司, 田畑彰守, 北川明彦, 近藤明弘
    • Organizer
      第5回Cat-CVD研究会講演予稿集、
    • Place of Presentation
      神奈川工科大学、神奈川
    • Data Source
      KAKENHI-PROJECT-19560314

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