Tabata Akimori 田畑彰守

… Alternative Names

TABATA Akimori 田畑彰守

田畑彰守タバタアキモリ

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Researcher Number	20227250
Other IDs
Affiliation (Current)	2022: 名古屋大学, 工学研究科, 准教授
Affiliation (based on the past Project Information) *help	2007 – 2008: Nagoya University, 大学院・工学研究科, 准教授 1996: 名古屋大学, 工学部, 助手 1993: 名古屋大学, 工学部, 助手
Review Section/Research Field	Principal Investigator Electronic materials/Electric materials / Electronic materials/Electric materials
Keywords	Principal Investigator アモルファス炭化シリコン / プラズマCVD法 / キャピラリプレート / ラジカルビーム / 光電導度 / プラズマCVD / 変調高周波放電 / 光伝導度 / アモルファム / ホットワイヤー化学気相成長法 … More / ラジカル源 / ナノ結晶 / 炭化シリコン / ドーピング / N_2分解 Less

Research Projects
(3 results)
Research Products
(15 results)

Development of HW-CVD technique with a radical source and application to preparation of doped nanocrystalline thin filmsPrincipal Investigator
- Principal Investigator
  
  TABATA Akimori
- Project Period (FY)
  2007 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Nagoya University
変調RFプラズマCVD法によるアモルファス炭化シリコン薄膜の作製Principal Investigator
- Principal Investigator
  
  田畑彰守
- Project Period (FY)
  1996
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Nagoya University
二元系アモルファス半導体薄膜作製のためのラジカルビームCVD装置の開発Principal Investigator
- Principal Investigator
  
  田畑彰守
- Project Period (FY)
  1993
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Nagoya University

All 2009 2008

All Journal Article Presentation

[Journal Article] Preparation of N-type nanocrystalline 3C-SiC films by hot-wire CVD using N2 as doping gas2009
- Author(s)
  Y. Hoshide, A. Tabata, A. Kitagawa, A. Kondo
- Journal Title
  
  Thin Solid Films 517
  
  Pages: 3524-3524
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19560314
[Journal Article] Preparation of n-type nanocrystalline 3C-SiC films by hot-wire CVD using N_2 as doping gas2009
- Author(s)
  Y. Hoshide, A. Tabata, A. Kitagawa A. Kondo
- Journal Title
  
  Thin Solid Films (未定印刷中)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19560314
[Journal Article] N_2 decomposition by hot wire and N_2 post-deposition treatment on hydrogenated microcrystalline silicon thin films.2009
- Author(s)
  K. Mazaki A. Tabata, A. Kitagawa A. Kondo
- Journal Title
  
  Thin Solid Films (未定印刷中)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19560314
[Journal Article] H_2 decomposition by hot wire and N_2 post-deposition treatment on hydrogenated microcrystalline silicon thin films2009
- Author(s)
  M. Koji, A. Tabata, A. Kitagawa, A. Kondo
- Journal Title
  
  Thin Solid Films 517
  
  Pages: 3452-3452
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19560314
[Presentation] ガラス基板上へのn型ナノ結晶3C-SiC薄膜の低温堆積とその高品質化2008
- Author(s)
  星出純希, 田畑彰守, 北川明彦, 近藤明弘
- Organizer
  SiC及び関連ワイドギャップ半導体研究会第17回講演会予稿集
- Place of Presentation
  大田区産業プラザ(35-36)
- Year and Date
  2008-12-08
- Data Source
  KAKENHI-PROJECT-19560314
[Presentation] N_2 decomposition by hot wire and N_2 post-deposition treatment on hydrogenated microcrystalline silicon thin films.2008
- Author(s)
  M. Mazaki, A. Tabata. Kitagawa, A. Kondo
- Organizer
  5th International Conference on Hot-Wire CVD (Cat-CVD) process
- Place of Presentation
  Massachusetts, USA
- Data Source
  KAKENHI-PROJECT-19560314
[Presentation] N_2ガスをドーピング原料としたn型ナノ結晶3 C-SiC薄膜の開発2008
- Author(s)
  星出純希, 田畑彰守, 北川明彦, 近藤明弘
- Organizer
  第5回Cat-CVD研究会講演予稿集、
- Place of Presentation
  神奈川工科大学、神奈川
- Data Source
  KAKENHI-PROJECT-19560314
[Presentation] Improvement of electrical properties of n-type nanocrystalline 3C-SiC thin films prepared by hot-wire CVD at high H_2-dilution2008
- Author(s)
  Y. Hoshide A. Tabata
- Organizer
  30th International Symposium on Dry Process
- Place of Presentation
  Tokyo, Japan
- Data Source
  KAKENHI-PROJECT-19560314
[Presentation] N2ガスをドーピング原料としたn型ナノ結晶3C-SiC薄膜の開発2008
- Author(s)
  星出純希, 田畑彰守, 北川明彦, 近藤明弘
- Organizer
  第5回Cat-CVD研究会講演予稿集
- Place of Presentation
  神奈川工科大学メディアホール(33-36)
- Year and Date
  2008-06-20
- Data Source
  KAKENHI-PROJECT-19560314
[Presentation] H_2 decomposition by hot wire and N2 post-deposition treatment on hydrogenated microcrystalline silicon thin films2008
- Author(s)
  M. Koji, A. Tabata, A. Kitagawa, A. Kondo
- Organizer
  5th International Conference on Hot-Wire CVD (Cat-CVD) process
- Place of Presentation
  Massachusetts (USA)
- Year and Date
  2008-08-23
- Data Source
  KAKENHI-PROJECT-19560314
[Presentation] Preparation of n-type nanocrystalline 3C-SiC films by hot-wire CVD usine N_2 as doping gas2008
- Author(s)
  Y. Hoshide, A. Tabata A. Kitagawa, A. Kondo
- Organizer
  5th International Conference on Hot-wire CVD (Cat-CVD) process
- Place of Presentation
  Massachusetts, USA
- Data Source
  KAKENHI-PROJECT-19560314
[Presentation] Preparation of n-type nano- crystalline 3C-SiC films by hot-wire CVD using N2 as doping gas2008
- Author(s)
  Y. Hoshide, A. Tabata, A. Kitagawa, A. Kondo
- Organizer
  5th International Conference on Hot-Wire CVD (Cat-CVD) process
- Place of Presentation
  Massachusetts (USA)
- Year and Date
  2008-08-23
- Data Source
  KAKENHI-PROJECT-19560314
[Presentation] ホットワイヤーによるN2ガス分解2008
- Author(s)
  間崎耕司, 田畑彰守, 北川明彦, 近藤明弘
- Organizer
  第5回Cat-CVD研究会講演予稿集
- Place of Presentation
  神奈川工科大学メディアホール(33-36)
- Year and Date
  2008-06-20
- Data Source
  KAKENHI-PROJECT-19560314
[Presentation] Improvement of electrical properties of n-type nano- crystalline 3C-SiC thin films prepared by hot-wire CVD at high H2-dilution2008
- Author(s)
  Y. Hoshide, A. Tabata
- Organizer
  30th International Symposium on Dry Process
- Place of Presentation
  Tokyo (Japan)
- Year and Date
  2008-11-26
- Data Source
  KAKENHI-PROJECT-19560314
[Presentation] ホットワイヤーによるN_2ガス分解2008
- Author(s)
  間崎耕司, 田畑彰守, 北川明彦, 近藤明弘
- Organizer
  第5回Cat-CVD研究会講演予稿集、
- Place of Presentation
  神奈川工科大学、神奈川
- Data Source
  KAKENHI-PROJECT-19560314

Tabata Akimori 田畑 彰守

TABATA Akimori 田畑 彰守

田畑 彰守 タバタ アキモリ

Research Projects

Research Products

Development of HW-CVD technique with a radical source and application to preparation of doped nanocrystalline thin filmsPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

変調RFプラズマCVD法によるアモルファス炭化シリコン薄膜の作製Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

二元系アモルファス半導体薄膜作製のためのラジカルビームCVD装置の開発Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] Preparation of N-type nanocrystalline 3C-SiC films by hot-wire CVD using N2 as doping gas2009

Author(s)

Journal Title

Data Source

[Journal Article] Preparation of n-type nanocrystalline 3C-SiC films by hot-wire CVD using N_2 as doping gas2009

Author(s)

Journal Title

Data Source

[Journal Article] N_2 decomposition by hot wire and N_2 post-deposition treatment on hydrogenated microcrystalline silicon thin films.2009

Author(s)

Journal Title

Data Source

[Journal Article] H_2 decomposition by hot wire and N_2 post-deposition treatment on hydrogenated microcrystalline silicon thin films2009

Author(s)

Journal Title

Data Source

[Presentation] ガラス基板上へのn型ナノ結晶3C-SiC薄膜の低温堆積とその高品質化2008

Author(s)

Organizer

Place of Presentation

Year and Date

Data Source

[Presentation] N_2 decomposition by hot wire and N_2 post-deposition treatment on hydrogenated microcrystalline silicon thin films.2008

Author(s)

Organizer

Place of Presentation

Data Source

[Presentation] N_2ガスをドーピング原料としたn型ナノ結晶3 C-SiC薄膜の開発2008

Author(s)

Organizer

Place of Presentation

Data Source

[Presentation] Improvement of electrical properties of n-type nanocrystalline 3C-SiC thin films prepared by hot-wire CVD at high H_2-dilution2008

Author(s)

Organizer

Place of Presentation

Data Source

[Presentation] N2ガスをドーピング原料としたn型ナノ結晶3C-SiC薄膜の開発2008

Author(s)

Organizer

Place of Presentation

Year and Date

Data Source

[Presentation] H_2 decomposition by hot wire and N2 post-deposition treatment on hydrogenated microcrystalline silicon thin films2008

Author(s)

Organizer

Place of Presentation

Year and Date

Data Source

[Presentation] Preparation of n-type nanocrystalline 3C-SiC films by hot-wire CVD usine N_2 as doping gas2008

Author(s)

Organizer

Place of Presentation

Data Source

[Presentation] Preparation of n-type nano- crystalline 3C-SiC films by hot-wire CVD using N2 as doping gas2008

Author(s)

Organizer

Tabata Akimori 田畑彰守

TABATA Akimori 田畑彰守

田畑彰守タバタアキモリ