NAKAMURA Keiji 中村圭二

Researcher Number	20227888
Other IDs
External Links
Affiliation (Current)	2025: 中部大学, 工学部, 教授
Affiliation (based on the past Project Information) *help	2008 – 2013: Chubu University, 工学部, 教授 1999 – 2005: Chubu Univ., Electrical Eng., Associate Prof., 工学部, 助教授 1997 – 1998: Nagoya University, Graduate School of Eng., Associate Prof., 工学研究科, 講師 1997: 名古屋大学, 大学院・工学研究科, 講師 1996: Nagoya University, Assistant Professor, 工学部, 講師 1992 – 1995: 名古屋大学, 工学部, 助手
Review Section/Research Field	Principal Investigator プラズマ理工学 / Plasma science Except Principal Investigator プラズマ理工学
Keywords	Principal Investigator 電子密度 / プラズマプロセス / シース / 表面波 / 分散関係 / プラズマ吸収プローブ / 堆積膜 / 膜堆積 / 電子温度 / 静電結合 … More / 誘導結合プラズマ / sheath / surface wave / dispersion relation / plasma absorption probe / deposition film / electron density / plasma processing / pulse modulated discharge / VUV / vacuum ultraviolet / SEEC / secondary electron / PIII / ion implantation / plasma / 二次電子放出係数 / 半導体検出器 / 表面モニタ / 注入深さ / 二次電子放出率 / 二次電子 / プラズマイオン注入 / Fluorocarbon plasma / Debye length / Dispersion relation / Sheath / Dielectric tube / Surface wave resonance / Plasma absorption probe / パワー吸収スペクトル / フロンプラズマ / Radical desorption / Wall control / Ion bombardment / RF bias / plasma-wall interaction / Silicon dioxide / Etching / Plasma Process / ラジカル脱離 / 壁制御 / RFバイアス / プラズマ・壁相互作用 / シリコン酸化膜 / エッチング / 経時変化 / 中性ラジカル / クリーニング / イオン衝撃 / ネットワークアナライザ / パルス放電 / プローブ / モニタリング / 電子状態 / 小型化 / 電磁界解析 / マイクロ波共振器プローブ / 周波数シフトプローブ / 内部アンテナ / 磁気絶縁 / 高密度プラズマ / 低圧力プラズマ / ドライエッチング / ITO / 高周波電磁界 / 静電シールド / 高周波プラズマ … More Except Principal Investigator hydrogen recycling / 水素リサイクリング / XPS / CVD / 低温形成 / 多結晶シリコン / 誘導結合プラズマ / inductively coupled plasma / 高密度プラズマ / プラズマプロセス / oxygen gettering / decaborane / boron coating / 酸素ゲッタリング / デカボラン / ボロンコーティング / silicon / ion beam / neutral radical / surface reaction / etching / plaasma processing / プロズマプロセス / シリコン / イオンビーム / 中性ラジカル / 表面反応 / エッチング / large area deposition / high speed deposition / high-density plasma / lower temperature deposition / inductively-coupled plasma / poly-crystalline silicon / 大面積堆積 / 高速堆積 / low temperature deposition / ultraviolet transmission spectroscopy / radical diagnostics / polycrystalline silicon / appearance mass spectrometry / amorphus silicon / 水素化アモルファスシリコン / シランプラズマ / ラジカル計測 / 紫外透過分光法 / 出現質量分析法 / アモルファスシリコン / lithium hydroxide / lithium hydride / tritium / hydrogen desorption / wall pumping / low-Zmaterial coating / lithium / プラズマ・壁相互作用 / 水酸化リチウム / 水素化リチウム / 昇温脱離 / 水素脱離 / 壁排気 / 低Z材コーティング / リチウム / ECR plasma / impurity control / rithium coating / first wall conditioning / ECRプラズマ / 不純物制御 / リチウムコーティング / 第一壁コンディショニング / indium-tin-oxide film / Faraday shield / surface magnetic field / plasma etching / helicon plasma / high density plasma / plasma process / 電子ビーム不安定 / 電子密度測定 / 誘導型RF放電 / 多極磁場 / シリコン・エッチング / 大口径プラズマ / 高周波プラズマ / 誘導型RF / 永久磁石 / アンテナ電磁界 / ラジカル / ファラデシールド / ITO薄膜 / 選択ドライエッチング / ヘリコン波プラズマ / ITO膜 / ファラデーシールド / 表面磁場 / プラズマエッチング / ヘリコンプラズマ / 誘導結合型プラズマ / plasma CVD / nuclear fusion / diborane / boronization / 不純物 / シボラン / デガボラン / プラズマCVD / 核融合 / ジボラン / ボロニゼーション Less

Measurements of Electron Conditions in High Pressure Plasmas for Materials ProcessingPrincipal Investigator
- Principal Investigator
  
  NAKAMURA Keiji
- Project Period (FY)
  2011 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Plasma science
- Research Institution
  Chubu University
Investigation on development of advanced frequency shift probePrincipal Investigator
- Principal Investigator
  
  NAKAMURA Keiji
- Project Period (FY)
  2008 – 2010
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Plasma science
- Research Institution
  Chubu University
Measurements of electron density and electron temperature with plasma absorption probe and its application to deposited plasmasPrincipal Investigator
- Principal Investigator
  
  NAKAMURA Keiji
- Project Period (FY)
  2003 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Plasma science
- Research Institution
  Chubu University
Surface Modification and Behavior of Ions and Radicals in Plasma Immersion Ion ImplantationPrincipal Investigator
- Principal Investigator
  
  NAKAMURA Keiji
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  プラズマ理工学
- Research Institution
  Chubu University
New Technique for measuring electron density under soiled conditions and its application for precise process controlPrincipal Investigator
- Principal Investigator
  
  NAKAMURA Keiji
- Project Period (FY)
  1999 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  プラズマ理工学
- Research Institution
  Chubu University
Study on Surface Reaction Processes Using High Performance Beam Device
- Principal Investigator
  
  SUGAI Hideo
- Project Period (FY)
  1998 – 2001
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  プラズマ理工学
- Research Institution
  Nagoya University
Development of new wall control method and plasma-wall interaction in fluorocarbon plasmasPrincipal Investigator
- Principal Investigator
  
  NAKAMURA Keiji
- Project Period (FY)
  1998 – 2000
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  プラズマ理工学
- Research Institution
  Chubu University
  Nagoya University
Lower-Temperature Deposition of Poly-crystalline Silicon Film by High-Density Plasma
- Principal Investigator
  
  TOYODA Hirotaka
- Project Period (FY)
  1997 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  プラズマ理工学
- Research Institution
  Nagoya University
オール・メタル・アンテナ型誘導RFプラズマの開発と水素負イオン源への応用Principal Investigator
- Principal Investigator
  
  中村圭二
- Project Period (FY)
  1995
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  プラズマ理工学
- Research Institution
  Nagoya University
Development of Selective Hydrogen Pumping Method Using Lithium Films
- Principal Investigator
  
  SUGAI Hideo
- Project Period (FY)
  1995 – 1997
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  プラズマ理工学
- Research Institution
  Nagoya University
Diagnostic and Control of Silane Plasmas by Newlv Developed Radical Measurement Technique
- Principal Investigator
  
  TOYODA Hirotaka
- Project Period (FY)
  1995 – 1996
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  プラズマ理工学
- Research Institution
  Nagoya University
静動シールドアンテナを用いた誘導RFプラズマ源の開発と応用Principal Investigator
- Principal Investigator
  
  中村圭二
- Project Period (FY)
  1994
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  プラズマ理工学
- Research Institution
  Nagoya University
Novel First-Wall Conditioning in Stationary Reactor Studies
- Principal Investigator
  
  SUGAI Hideo
- Project Period (FY)
  1994 – 1995
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  プラズマ理工学
- Research Institution
  Nagoya University
Optimization of Particle Control by Boronization
- Principal Investigator
  
  SUGAI Hideo
- Project Period (FY)
  1992 – 1993
- Research Category
  
  Grant-in-Aid for General Scientific Research (B)
- Research Field
  
  プラズマ理工学
- Research Institution
  Nagoya University
Development of large-diameter RF plasmas under surface magnetic field
- Principal Investigator
  
  SUGAI Hideo
- Project Period (FY)
  1992 – 1994
- Research Category
  
  Grant-in-Aid for Developmental Scientific Research (B)
- Research Field
  
  プラズマ理工学
- Research Institution
  Nagoya University

All 2014 2013 2012 2011 2010 2009 2008 2006 2005 2004 Other

All Journal Article Presentation

[Journal Article] Curling probe measurement of electron density in pulse-modulated plasma2014
- Author(s)
  A. Pandey, W. Sakakibara and , H. Matsuoka, K. Nakamura and H. Sugai
- Journal Title
  
  Appl. Phys. Lett
  
  Volume: Vol. 104
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23540581
[Journal Article] Curling probe measurement of electron density in pulse-modulated plasma2014
- Author(s)
  Anil Pandey, Wataru Sakakibara, Hiroyuki Matsuoka, Keiji Nakamura, Hideo Sugai
- Journal Title
  
  Appl. Phys. Lett. Vol. 104
  
  Volume: 104
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23540581
[Journal Article] Opto-Curling Probe for Simultaneous Monitoring of Optical Emission and Electron Density in Reactive Plasmas2013
- Author(s)
  A. Pandey, K. Nakamura and H. Sugai
- Journal Title
  
  Appl. Phys. Express
  
  Volume: Vol. 6 Pages: 56202-1
- NAID
  10031174342
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23540581
[Journal Article] Temperature dependence of coercivity behavior in Fe films on fractal rough ceramic surfaces2013
- Author(s)
  M. Chen, Z. Jiao and , S. Yu, M. Yu, F. Bao and K. Nakamura
- Journal Title
  
  Jpn. J. Appl. Phys
  
  Volume: Vol. 52
- NAID
  210000141761
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23540581
[Journal Article] Temperature Dependence of Coercivity Behavior in Fe Films on Fractal Rough Ceramics Surfaces2013
- Author(s)
  Miao-Gen Chen, Zhi-Wei Jiao, Sen-Jiang Yu, Ming-Zhou Yu, Fu-Bing Bao, and Keiji Nakamura
- Journal Title
  
  Japanese Journal of Applied Physics 52 (2013) 01AC13-1~4
  
  Volume: 52
- NAID
  210000141761
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23540581
[Journal Article] Opto-Curling Probe for Simultaneous Monitoring of Optical Emission and Electron Density in Reactive Plasmas2013
- Author(s)
  Anil Pandey, Keiji Nakamura, Hideo Sugai
- Journal Title
  
  Appl. Phys. Express
  
  Volume: 6
- NAID
  10031174342
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23540581
[Journal Article] Observation of Optical Fluorescence of GaN Thin Fims in an Inductively Coupled Plasma Containing High Energy Electrons2010
- Author(s)
  Y.Guo, K.Nakamura, J.Zhang, Y.Nakano, H.Sugai
- Journal Title
  
  Jpn.J.Appl.Phys.
  
  Volume: 50
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540487
[Journal Article] Advanced high-pressure plasma diagnostics with hairpin resonator probe surrounded by film and sheath2010
- Author(s)
  J.Xu, J.Shi, J.Zhang, Q.Zhang, K.Nakamura, H.Sugai
- Journal Title
  
  Chinese Physics B 29
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540487
[Journal Article] Observation of Optical Fluorescence of GaN Thin Films in an Inductively-Coupled Plasma Containing High Energy Electrons2010
- Author(s)
  Y.Guo, K.Nakamura, J.Zhang, Y.Nakano, H.Sugai
- Journal Title
  
  Jpn.J.Appl.Phys. 50
- NAID
  210000138234
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540487
[Journal Article] 反応性プロセシングプラズマにおける電子密度測定用平板型マイクロ波共振器プローブとシース効果2010
- Author(s)
  中村圭二, 張祺, 菅井秀郎
- Journal Title
  
  電気学会論文誌A
  
  Volume: 130 Pages: 930-934
- NAID
  10026693463
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540487
[Journal Article] 反応性プロセシングプラズマにおける電子密度測定用平板型マイクロ波共振器プローブとシース効果2010
- Author(s)
  中村圭二,張祺,菅井秀郎
- Journal Title
  
  電気学会論文誌A 130
  
  Pages: 930-934
- NAID
  10026693463
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540487
[Journal Article] Advanced high-pressure plasma diagnostics with hairpin resonator probesurrounded by film and sheath2010
- Author(s)
  J.Xu, J.Shi J.Zhang, Q.Zhang, K.Nakamura, H.Sugai
- Journal Title
  
  Chinese Physics B
  
  Volume: 19
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540487
[Journal Article] Simulation of Resistive Microwave Resonant Probe for High Pressure Plasma Diagnostics2009
- Author(s)
  J.Xu, K.Nakamura, Q.Zhang, H.Sugai
- Journal Title
  
  Plasma Sources Science and Technology 28
  
  Pages: 45009-45018
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540487
[Journal Article] Application of Droplet-Free Metal Ion Source to Formation of Gas Barrier Thin Films2008
- Author(s)
  K. Nakamura
- Journal Title
  
  Physica status Solidi c 5
  
  Pages: 887-892
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540487
[Journal Article] Extension of Frequency Shift Probes for Monitoring of Electron Temperature2008
- Author(s)
  K.Nakamura, Q.Zhang, H.Sugai
- Journal Title
  
  Proc.30th international symposium on dry process
  
  Pages: 181-182
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540487
[Journal Article] Extension of Frequency Shift Probes for Monitoring of Electron Temperature2008
- Author(s)
  K. Nakamura, Q. Zhang, H. Sugai
- Journal Title
  
  Proc. 30th international symposium on dry process
  
  Pages: 181-182
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540487
[Journal Article] Application of Droplet-Free Metal Ion Source to Formation of Gas Barrier Thin Films2008
- Author(s)
  K. Nakamura
- Journal Title
  
  Physica Status Solidi c 5
  
  Pages: 887-892
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20540487
[Journal Article] Investigation on Surface Wave Probe for Measurements of Electron Density and Electron Temperature2006
- Author(s)
  O.Hirano, K.Nakamura, H.Sugai
- Journal Title
  
  Proc.6th Int.Conf.Reactive Plasmas (ICRP-6)/ 23rd Symp.Plasma Processing, (January 2006, Japan), P-3B-14
  
  Pages: 727-728
- Data Source
  KAKENHI-PROJECT-15340200
[Journal Article] Droplet-Free High-Density Metal Ion Source for Plasma Immersion Ion Implantation2005
- Author(s)
  K.Nakamura, H.Yoshinaga, K.Yukimura
- Journal Title
  
  Nuclear Instruments and Methods in Physics research B 242
  
  Pages: 315-317
- Data Source
  KAKENHI-PROJECT-15340200
[Journal Article] Ionization Enhancement of Zirconium Atoms in Inductively Coupled Discharge2005
- Author(s)
  K.Nakamura, H.Yoshinaga, K.Yukimura
- Journal Title
  
  Surf.Coat.Technol. Vol.196, No.1-3
  
  Pages: 188-191
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15340200
[Journal Article] Ionization Enhancement of Zirconium Atoms in Inductively Coupled Discharge2005
- Author(s)
  K.Nakamura ほか 2名
- Journal Title
  
  Surface and Coating Technology Vol. 196 No. 1-3
  
  Pages: 188-191
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15340200
[Journal Article] Ionization Fraction in Sputter-Based Copper Ion Sources for Plasma Immersion Ion Implantation2005
- Author(s)
  K.Nakamura, H.Suzuki
- Journal Title
  
  Surf.Coat.Technol. 196
  
  Pages: 180-183
- Data Source
  KAKENHI-PROJECT-15340200
[Journal Article] Electron Density Measurements with Surface Wave Probes in Magnetized Plasmas2005
- Author(s)
  K.Nakamura ほか 2名
- Journal Title
  
  American Vacuum Society 52nd Int. Symp. & Exhibition
  
  Pages: 107-107
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15340200
[Journal Article] Ionization Enhancement of Zirconium Atoms in Inductively Coupled Discharge2005
- Author(s)
  K.Nakamura, H.Yoshinaga, K.Yukimura
- Journal Title
  
  Surf.Coat.Technol. 196
  
  Pages: 188-191
- Data Source
  KAKENHI-PROJECT-15340200
[Journal Article] Electron Density Measurements with Surface Wave Probes in Magnetized Plasmas2005
- Author(s)
  K.Nakamura, S.Yajima, H.Sugai
- Journal Title
  
  American Vacuum Society 52nd Int.Symp.& Exhibition(October 2005, U.S.A) PS-TuP22
  
  Pages: 107-107
- Data Source
  KAKENHI-PROJECT-15340200
[Journal Article] Stabilization of Radical Density in Fluorocarbon Plasmas2005
- Author(s)
  K.Nakamura ほか 3名
- Journal Title
  
  Proc. Int. Symp. Dry Process(DPS2005) (November 2005, Korea)
  
  Pages: 99-100
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15340200
[Journal Article] Distributions of electron density and deposition rate of a narrow-gap plasma polymerization system2005
- Author(s)
  K.Kinoshita, K.Nakamura, J.Kawahara, O.Kiso, N.Toyoda, H.Sugai, T.Kikkawa
- Journal Title
  
  XXVII International Conference on Phenomena in Ionized Gases, (July 17-22, Netherlands), 10-200 CD-ROM
- Data Source
  KAKENHI-PROJECT-15340200
[Journal Article] Measurements of Electron Density in Low-Density/High-Pressure Plasmas with Surface Wave Probe2004
- Author(s)
  K.Nakamura ほか5名
- Journal Title
  
  Proc Int.Symp.Dry Process
  
  Pages: 169-174
- Data Source
  KAKENHI-PROJECT-15340200
[Journal Article] Polymer Deposition and Radical Composition in Fluorocarbon Plasma Source2004
- Author(s)
  K.Nakamura ほか4名
- Journal Title
  
  Proc Int.Symp.Dry Process
  
  Pages: 163-168
- Data Source
  KAKENHI-PROJECT-15340200
[Journal Article] Decay Characteristics of Radical Densities under Ion Bombardment in Fluorocarbon Plasmas
- Author(s)
  K.Kumagai, T.Tatsumi, K.Oshima, k.Nagahata, K.Nakamura
- Journal Title
  
  Proc.6th Int.Conf.Reactive Plasmas (ICRP-6)/23rd Symp.Plasma Processing (January 2006, Japan) P-2A-43
  
  Pages: 477-478
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15340200
[Journal Article] Electron Density Measurements with Surface Wave Probes in Magnetized Plasmas
- Author(s)
  K.Nakamura, S.Yajima, H.Sugai
- Journal Title
  
  American Vacuum Society 52nd Int.Symp. & Exhibition (October 2005, U.S.A) PS-TuP22
  
  Pages: 107-107
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15340200
[Journal Article] Investigation on Surface Wave Probe for Measurements of Electron Density and Electron Temperature
- Author(s)
  O.Hirano, K.Nakamura, H.Sugai
- Journal Title
  
  Proc.6th Int.Conf.Reactive Plasmas (ICRP-6)/23rd Symp.Plasma Processing (January 2006, Japan) P-3B-14
  
  Pages: 727-728
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15340200
[Journal Article] Stabilization of Radical Density in Fluorocarbon Plasmas
- Author(s)
  K.Nakamura, K.Kumagai, T.Tatsumi, K.Oshima
- Journal Title
  
  Proc.Int.Symp.Dry Process (DPS2005);(November 2005, Korea) 5-36
  
  Pages: 99-100
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15340200
[Journal Article] Distributions of electron density and deposition rate of a narrow-gap plasma polymerization system
- Author(s)
  K.Kinoshita, K.Nakamura, J.Kawahara, O.Kiso, N.Toyoda, H.Sugai, T.Kikkawa
- Journal Title
  
  Proc.27th Int.Conf Phenomena in Ionized Gases(ICPIG-2005);(July 2005, The Netherlands) 10-200
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15340200
[Presentation] Curling probe analysis and simulation for collisional plasma2014
- Author(s)
  A. Pandey, K. Nakamura and H. Sugai
- Organizer
  8th International Conference on Reactive Plasmas (ICRP2014) /31st Symposium on Plasma Processing(SPP-31)
- Place of Presentation
  Fukuoka Convention Center, Japan
- Year and Date
  2014-02-05
- Data Source
  KAKENHI-PROJECT-23540581
[Presentation] Development of curling probe for monitoring of reactive plasmas2014
- Author(s)
  K. Nakamura and H. Sugai
- Organizer
  8th International Conference on Reactive Plasmas (ICRP2014) /31st Symposium on Plasma Processing(SPP-31)
- Place of Presentation
  Fukuoka Convention Center, Japan
- Year and Date
  2014-02-07
- Invited
- Data Source
  KAKENHI-PROJECT-23540581
[Presentation] Simplified analysis and FDTD simulation of curling probe2014
- Author(s)
  A. PANDEY, K. NAKAMURA and H. SUGAI
- Organizer
  6th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials (ISPlasma2014) / 7th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2014)
- Place of Presentation
  Meijo University, Japan
- Year and Date
  2014-03-03
- Data Source
  KAKENHI-PROJECT-23540581
[Presentation] Simplified analysis and FDTD simulation of curling probe2014
- Author(s)
  A. PANDEY, K. NAKAMURA and H. SUGAI
- Organizer
  6th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials (ISPlasma2014)
- Place of Presentation
  Nagoya, Japan
- Data Source
  KAKENHI-PROJECT-23540581
[Presentation] Curling probe analysis and simulation for collisional plasma2014
- Author(s)
  A. Pandey, K. Nakamura and H. Sugai
- Organizer
  8th International Conference on Reactive Plasmas (ICRP2013) /31st Symposium on Plasma Processing(SPP-31) (February 2014, Japan) 7C-AM-I5
- Place of Presentation
  Fukuoka, Japan
- Data Source
  KAKENHI-PROJECT-23540581
[Presentation] Development of curling probe for monitoring of reactive plasmas2014
- Author(s)
  K. Nakamura and H. Sugai
- Organizer
  8th International Conference on Reactive Plasmas (ICRP2013) /31st Symposium on Plasma Processing(SPP-31) (February 2014, Japan) 7C-AM-I5
- Place of Presentation
  Fukuoka, Japan
- Invited
- Data Source
  KAKENHI-PROJECT-23540581
[Presentation] Opto-curling probe Monitoring of local density of electron and radicals2013
- Author(s)
  A. Pandey, K. Kato. , S. Ikezawa, K. Nakamura and H. Sugai
- Organizer
  21st International Symposium on Plasma Chemistry (ISPC2013)
- Place of Presentation
  Cairns, Australia
- Data Source
  KAKENHI-PROJECT-23540581
[Presentation] Opto-curling Probe Method for Space-resolved Measurement of Electron and Radical Densities in Plasma2013
- Author(s)
  A. Pandey, K. Nakamura and H. Sugai
- Organizer
  35th Int. Symp. Dry Process (DPS2013)
- Place of Presentation
  Korea
- Year and Date
  2013-08-30
- Data Source
  KAKENHI-PROJECT-23540581
[Presentation] Opto-curling probe Monitoring of local density of electron and radicals2013
- Author(s)
  A. Pandey, K. Kato. , S. Ikezawa, K. Nakamura and H. Sugai
- Organizer
  21st International Symposium on Plasma Chemistry (ISPC2013)
- Place of Presentation
  Australia
- Year and Date
  2013-08-06
- Data Source
  KAKENHI-PROJECT-23540581
[Presentation] Opto-curling Probe Method for Space-resolved Measurement of Electron and Radical Densities in Plasma2013
- Author(s)
  A. Pandey, K. Nakamura and H. Sugai
- Organizer
  35th Int. Symp. Dry Process (DPS2013)
- Place of Presentation
  Jeju, Korea
- Data Source
  KAKENHI-PROJECT-23540581
[Presentation] Miniaturization of Plane-Type Microwave Resonator Probe with Multi-Resonant Frequencies2012
- Author(s)
  K. Nakamura, H. Kumazaki and N. Sugai
- Organizer
  5th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2012) P-01
- Place of Presentation
  Japan/ Meitetsu Inuyama Hotel
- Data Source
  KAKENHI-PROJECT-23540581
[Presentation] Miniaturization of Plane-Type Microwave Resonator Probe with Multi-Resonant Frequencies2012
- Author(s)
  K. Nakamura, H. Kumazaki and H. Sugai
- Organizer
  5th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2012)
- Place of Presentation
  Meitetsu Inuyama Hotel, Japan
- Year and Date
  2012-03-09
- Data Source
  KAKENHI-PROJECT-23540581
[Presentation] Novel diagnostic tool, curling probe, for monitoring electron density during plasma processing2012
- Author(s)
  Anil Pandey, Kimitaka Kato, Shunjiro Ikezawa, Keiji Nakamura, Hideo Sugai
- Organizer
  65th Gaseous Electronics Conference
- Place of Presentation
  Austin, Texas, U. S. A.
- Data Source
  KAKENHI-PROJECT-23540581
[Presentation] Monitoring of electron density and wall deposit by curling probe during plasma process2012
- Author(s)
  A. Pandey, M. Imai, H. Kanematsu, S. Ikezawa, K. Nakamura and H. Sugai
- Organizer
  2012 International Symposium on Dry Process
- Place of Presentation
  Tokyo, Japan
- Data Source
  KAKENHI-PROJECT-23540581
[Presentation] Monitoring of electron density and wall deposit by curling probe during plasma process2012
- Author(s)
  A. Pandey, M. Imai, H. Kanematsu, S. Ikezawa, K. Nakamura and H. Sugai
- Organizer
  34th Int. Symp. Dry Process (DPS2012)
- Place of Presentation
  Univ. Tokyo, Japan
- Year and Date
  2012-11-16
- Data Source
  KAKENHI-PROJECT-23540581
[Presentation] Miniaturization of plane-type microwave resonator probe2012
- Author(s)
  E. Kumazaki, K. Nakamura and H. Sugai
- Organizer
  4th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials (ISPlasma2012)　P2005A
- Place of Presentation
  Japan/ Chubu University
- Data Source
  KAKENHI-PROJECT-23540581
[Presentation] In-situ Monitoring of Surface Modification of GaN Films Exposed to Inductively-Coupled Plasmas2012
- Author(s)
  Keiji Nakamura, Mio-Gen Chen, Yoshitaka Nakano, Hideo Sugai
- Organizer
  65th Gaseous Electronics Conference
- Place of Presentation
  Austin, Texas, U. S. A.
- Data Source
  KAKENHI-PROJECT-23540581
[Presentation] スパイラルアンテナを用いたマルチ共振型マイクロ波共振器プローブの小型化2012
- Author(s)
  中村圭二, 熊崎恵未, 菅井秀郎
- Organizer
  第５９回応用物理学関係連合講演会17p-B8-3
- Place of Presentation
  東京・早稲田大学
- Data Source
  KAKENHI-PROJECT-23540581
[Presentation] In-situ Photoluminescence Measurements of GaN Films Exposed to Inductively-Coupled Plasmas2012
- Author(s)
  K. Nakamura M. G. Chen, Y. Nakano and H. Sugai
- Organizer
  2012 International Symposium on Dry Process
- Place of Presentation
  Tokyo, Japan
- Data Source
  KAKENHI-PROJECT-23540581
[Presentation] Novel diagnostic tool, curling probe, for monitoring electron density during plasma processing2012
- Author(s)
  A. PANDEY, Y. LIANG. , S. IKEZAWA, K. NAKAMURA and H. SUGAI
- Organizer
  65th Annual Gaseous Electronics Conference (GEC)
- Place of Presentation
  U. S. A.
- Year and Date
  2012-10-24
- Data Source
  KAKENHI-PROJECT-23540581
[Presentation] In-situ Monitoring of Surface Modification of GaN Films Exposed to Inductively-Coupled Plasmas2012
- Author(s)
  K. NAKAMURA, M. CHEN, Y. NAKANO and H. SUGAI
- Organizer
  65th Annual Gaseous Electronics Conference (GEC)
- Place of Presentation
  U. S. A.
- Year and Date
  2012-10-25
- Data Source
  KAKENHI-PROJECT-23540581
[Presentation] In-situ Photoluminescence Measurements of GaN Films Exposed to Inductively-Coupled Plasmas2012
- Author(s)
  K. NAKAMURA, M. CHEN, Y. NAKANO and H. SUGAI
- Organizer
  34th Int. Symp. Dry Process (DPS2012)
- Place of Presentation
  Univ. Tokyo, Japan
- Year and Date
  2012-11-15
- Data Source
  KAKENHI-PROJECT-23540581
[Presentation] Miniaturization of plane-type microwave resonator probe2012
- Author(s)
  E. Kumazaki, K. Nakamura and H. Sugai
- Organizer
  4th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials (ISPlasma2012)
- Place of Presentation
  Chubu Univ. Japan
- Year and Date
  2012-03-05
- Data Source
  KAKENHI-PROJECT-23540581
[Presentation] マイクロ波共振器プローブを用いた密度計測における精度向上2011
- Author(s)
  熊崎恵未, 中村圭二, 菅井秀郎
- Organizer
  第72回応用物理学会学術講演会 31a-ZJ-3
- Place of Presentation
  山形・山形大学
- Data Source
  KAKENHI-PROJECT-23540581
[Presentation] Miniaturization of Plane-Type Microwave Resonator Probe2011
- Author(s)
  E.Kumazaki, K.Nakamura, H.Sugai
- Organizer
  3rd Int.Symp.Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2011-03-07
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] 周波数プローブによる電子密度計測2011
- Author(s)
  中村圭二, 菅井秀郎
- Organizer
  Plasma Conference 2011 (PLASMA2011) S-O1-1(招待講演)
- Place of Presentation
  金沢・石川県立音楽堂
- Data Source
  KAKENHI-PROJECT-23540581
[Presentation] E結合コンパクト周波数シフトプローブによる電子密度測定II2011
- Author(s)
  梁以資, 加藤公孝, 中村圭二, 菅井秀郎
- Organizer
  第58回応用物理学関係連合講演会
- Place of Presentation
  神奈川工科大学(厚木市)(講演会は中止)
- Year and Date
  2011-03-24
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] マイクロ波共振器プローブを用いた電子密度計測における測定精度向上';,;第58回応用物理学関係連合講演会2011
- Author(s)
  熊崎恵未, 土屋貴, 中村博, 中村圭二, 菅井秀郎
- Organizer
  第58回応用物理学関係連合講演会
- Place of Presentation
  神奈川工科大学(厚木市)(講演会は中止)
- Year and Date
  2011-03-24
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Electron Density Measurement by Novel Frequency Shift Probe2011
- Author(s)
  I.Liang, K.Kato, K.Nakamura, H.Sugai
- Organizer
  3rd Int.Symp.Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2011-03-07
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Investigation on Frequency Shift Probes for Monitoring of Electron Conditions in Nano-Materials Processing Plasmas2010
- Author(s)
  K.Nakamura
- Organizer
  Int.Symp.Visualization in Joining & Welding Science through Advanced Measurements and Simulation, and Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials in conjunction with Symposium on the research Activities of Joint Usage/Research Center on Joining and Welding (Visual-JW2010)
- Place of Presentation
  Osaka, Japan(招待講演)
- Year and Date
  2010-11-12
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] コンパクト周波数シフトプローブによる電子密度測定2010
- Author(s)
  梁以資, 加藤公孝, 熊崎恵未, 中村圭二, 菅井秀郎
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学
- Year and Date
  2010-09-15
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] マイクロ波共振プローブの高次モードによる電子密度計測2010
- Author(s)
  保田将宏, 梁以資, 太田習, 加藤公孝, 中村圭二, 菅井秀郎
- Organizer
  平成22年度電気関係学会東海支部連合大会
- Place of Presentation
  中部大学(春日井市)
- Year and Date
  2010-08-30
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Plasma Electron Monitoring with Multi-Resonator Frequency Shift Probe2010
- Author(s)
  Q.Zhang, K.Nakamura, H.Sugai
- Organizer
  2nd International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials
- Place of Presentation
  Nagoya, Japan
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Expansion to Higher Mode in Electron Density Measurement by Microwave resonator Probe2010
- Author(s)
  I.Liang, S.Ohta, K.Kato, K.Nakamura, H.Sugai
- Organizer
  63rd Gaseous Electronica Conference (GEC2010)/7th Int.Conf.Reactive Plasmas (ICRP-7)/28th Syp.Plasma Processing (SPP-28)
- Place of Presentation
  Paris, France
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] 電界結合型周波数シフトプローブによる電子密度計測2010
- Author(s)
  梁以資, 加藤公孝, 中村圭二, 菅井秀郎
- Organizer
  平成22年度電気関係学会東海支部連合大会
- Place of Presentation
  中部大学(春日井市)
- Year and Date
  2010-08-30
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] スパイラルアンテナを用いた小型マイクロ波共振器プローブによる電子密度測定2010
- Author(s)
  中村博, 新海康史, 土屋貴, 熊崎恵未, 中村圭二, 菅井秀郎
- Organizer
  平成22年度電気関係学会東海支部連合大会
- Place of Presentation
  中部大学(春日井市)
- Year and Date
  2010-08-30
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] 電子密度測定用マイクロ波共振プローブの高次モードへの拡張2010
- Author(s)
  梁以資, 太田習, 加藤公孝, 中村圭二, 菅井秀郎
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学
- Year and Date
  2010-09-15
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Investigation on Frequency Shift Probes for Monitoring of Electron Conditions in Nano-Materials Processing Plasmas'2010
- Author(s)
  K.Nakamura
- Organizer
  Int.Symp.Visualization in Joining & Welding Science through Advanced Measurements and Simulation, and Advanced Materiala Development and Integration of Novel Structured Metallic and Inorganic Materials in conjunction with Symposiumon the research Activities of Joint Usage/Research Center on Joining and Welding (Visual-JW2010)
- Place of Presentation
  Osaka, Japan(Invited)
- Year and Date
  2010-11-12
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] マルチ共振型周波数シフトプローブを用いた電子密度および電子温度の計測2010
- Author(s)
  中村圭二
- Organizer
  第27回プラズマプロセシング研究会
- Place of Presentation
  横浜市開港記念会館
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] スパイラルアンテナを用いたマイクロ波共振器プローブの小型化2010
- Author(s)
  熊崎恵未, 新海康史, 中村圭二, 菅井秀郎
- Organizer
  平成22年度電気関係学会東海支部連合大会
- Place of Presentation
  中部大学(春日井市)
- Year and Date
  2010-08-30
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Mircrowave Resonance Probes for Diagnostics of High Pressure Plasmas2009
- Author(s)
  中村圭二
- Organizer
  31st Int.Symp.Dry Process
- Place of Presentation
  Busan, Korea
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Monitoring of Electron Density with Frequency Shift Probes in Reactive Processing Plasmas2009
- Author(s)
  K.Nakamura, Q.Zhang, H.Sugai
- Organizer
  2nd Int.Conf.Plasma-Nano Technol.& Sci.(IC-PLANTS2009)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2009-01-22
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Application of Frequency Shift Probes for Monitoring of Electron Temperature2009
- Author(s)
  Q. Zhang, K. Nakamura, H. Sugai
- Organizer
  8th International Workshop of Advanced Plasma Processing and Diagnostics
- Place of Presentation
  Gifu, Japan
- Year and Date
  2009-01-21
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Influence of Polymer Depositon on Electron Monitoring with Frequency Shift Probes2009
- Author(s)
  Q. Zhang, K. Nakamura, H. Sugai
- Organizer
  1st Int. Symp. Advanced Plasma Science& its Applications (ISPlasma 2009)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2009-03-08
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Influence of Sheath on Measurement of Electron Density in Frequency Shift Probe and its Application to Measurement of Electron Temperature2009
- Author(s)
  K.Nakamura, Q.Zhang, H.Sugai
- Organizer
  American Vaccuum Society 56th Int.Symp.and Exhibition (AVS-56)
- Place of Presentation
  San Jose, U.S.A.
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Monitoring of Electron Density with Frequency Shift Probes in Reactive Processing Plasmas2009
- Author(s)
  K. Nakamura, Q. Zhang, H. Sugai
- Organizer
  2nd Int. Conf. Plasma-Nano Technol. &Sci. (IC-PLANTS2009)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2009-01-22
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Development of Electron-Based Plasma Monitoring for Precise Control of Plasma Process2009
- Author(s)
  K. Nakamura, H. Sugai
- Organizer
  1st Int. Symp. Advanced Plasma Science& its Applications (ISPlasma 2009)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2009-03-08
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Development of Electron-Based Plasma Monitoring for Precise Control of Plasma Process2009
- Author(s)
  K.Nakamura, H.Sugai
- Organizer
  1st Int.Symp.Advanced Plasma Science & its Applications (ISPlasma 2009)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2009-03-08
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Numerical Studies on Mircrowave Resonator Probes for Diagnostics of High Pressure Plasmas2009
- Author(s)
  中村圭二
- Organizer
  Asian-European International Conference on Plasma Surface Engineering(AEPSE2009)
- Place of Presentation
  Busan, Korea
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Influence of Polymer Depositon on Electron Monitoring with Frequency Shift Probes2009
- Author(s)
  Q.Zhang, K.Nakamura, H.Sugai
- Organizer
  1st Int.Symp.Advanced Plasma Science & its Applications (ISPlasma2009)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2009-03-08
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] 高圧力プラズマ診断用マイクロ波共振プローブの開発2009
- Author(s)
  中村圭二
- Organizer
  第70回応用物理学会学術講演会
- Place of Presentation
  富山大学
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Sheath Effects on Electron Density Measurements in Frequency Shift Probe and their Application to Electron Temperature Measurements2009
- Author(s)
  中村圭二
- Organizer
  62nd Gaseous Electronics Conference(GEC2009)
- Place of Presentation
  Saratoga, U.S.A.
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] 周波数シフトプローブを用いた大気圧プラズマのモニタリングの検討2009
- Author(s)
  金徐州, 中村圭二, 菅井秀郎
- Organizer
  第56回応用物理学関係連合講演会
- Place of Presentation
  つくば市・筑波大学
- Year and Date
  2009-03-30
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Influence of Sheath on Measurement of Electron Density in Frequency Shift Probe and its Application to Measurement of Electron Temperature2009
- Author(s)
  中村圭二
- Organizer
  American Vaccuum Society 56th Int.Symp.and Exhibition(AVS-56)
- Place of Presentation
  San Jose, U.S.A.
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Simulation-Based Analysis and Experimental Verification of Inductively-Coupled Fluorocarbon Plasmas2009
- Author(s)
  板津史明, 梅本祥平, 中村圭二, 田中正明
- Organizer
  プラズマ科学シンポジウム2009/第26回プラズマプロセシング研究会
- Place of Presentation
  名古屋市・名古屋大学
- Year and Date
  2009-02-02
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Microwave Plasma Control with use of Multi-Hollow Dielectric Plate2009
- Author(s)
  S. Ohta, T. Sano, Y. Liang, K. Nakamura, H. Sugai
- Organizer
  1st Int. Symp. Advanced Plasma Science& its Applications (ISPlasma 2009)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2009-03-08
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Sheath Effects on Electron Density Measurements in Frequency Shift Probe and their Application to Electron Temperature Measurements2009
- Author(s)
  K.Nakamura, Q.Zhang, H.Sugai
- Organizer
  62nd Gaseous Electronics Conference (GEC2009)
- Place of Presentation
  Saratoga, U.S.A.
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] 周波数シフトプローブを用いた電子状態のモニタリング2009
- Author(s)
  中村圭二
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  同志社大学(京都市)
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Influence of Polymer Deposition on Frequency Shift Probe2009
- Author(s)
  張祺, 中村圭二, 菅井秀郎
- Organizer
  プラズマ科学シンポジウム2009/第26回プラズマプロセシング研究会
- Place of Presentation
  名古屋市・名古屋大学
- Year and Date
  2009-02-02
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] 周波数シフトプローブによるSiウェハーを介した電子密度計測の基礎的検討2008
- Author(s)
  式地祐麻, 井上雄介, 張祺, 中村圭二, 菅井秀郎
- Organizer
  平成20年度電気関係学会東海支部連合大会
- Place of Presentation
  愛知県・愛知県立大学
- Year and Date
  2008-09-18
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Development of Frequency Shift Probes for Monitoring of Electron Density in Reactive Nano-Materials Processing Plasmas2008
- Author(s)
  K. Nakamura, Q. Zhang, H. Sugai
- Organizer
  IUMRS International Conference in Asia2008 (IUMRS-ICA 2008)
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2008-12-09
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Development of Frequency Shift Probes for Monitoring of Electron Density in Reactive Nano-Materials Processing Plasmas2008
- Author(s)
  K.Nakamura, Q.Zhang, H.Sugai
- Organizer
  IUMRS International Conference in Asia 2008 (IUMRS-ICA 2008)
- Place of Presentation
  Nagoya, Japan(招待講演)
- Year and Date
  2008-12-09
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] マイクロ波マルチホロー放電におけるプラズマ制御 ; (2008年9月愛知県立大学)0-0086, p.2008
- Author(s)
  太田習, 佐野貴憲, 塩出悠喜, 加藤公孝, 中村圭二, 菅井秀郎
- Organizer
  平成20年度電気関係学会東海支部連合大会
- Place of Presentation
  愛知県・愛知県立大学
- Year and Date
  2008-09-18
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Effects of probe shape on electron density measurements with frequency shift2008
- Author(s)
  probesK. Nakamura, Q. Zhang, H. Sugai
- Organizer
  14th International Congress on Plasma Physics 2008
- Place of Presentation
  Fukuoka, Japan
- Year and Date
  2008-09-11
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Extension of Frequency Shift Probes for Monitoring of Electron Temperature2008
- Author(s)
  K. Nakamura, Q. Zhang, H. Sugai
- Organizer
  30th international symposium on dry process
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2008-11-26
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] フロン系プラズマのシミュレーションと実験的検証2008
- Author(s)
  中村圭二, 板津史明, 田中正明
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  京都・同志社大学
- Year and Date
  2008-12-19
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] 周波数シフトプローブの電子温度計測への応用2008
- Author(s)
  中村圭二, 張祺, 菅井秀郎
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  仙台市・東北大学
- Year and Date
  2008-10-31
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] シミュレーションを用いた誘導結合型フロロカーボンプラズマの解析と検証2008
- Author(s)
  梅本祥平, 板津史明, 中村圭二, 田中正明
- Organizer
  平成20年度電気関係学会東海支部連合大会
- Place of Presentation
  愛知県・愛知県立大学
- Year and Date
  2008-09-18
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Effects of probe shape on electron density measurements with frequency shift2008
- Author(s)
  K.Nakamura, Q.Zhang, H.Sugai
- Organizer
  14th International Congress on Plasma Physics
- Place of Presentation
  Fukuoka, Japan
- Year and Date
  2008-09-11
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Plasma diagnostics for etching process - Influence of wall conditions on fluorocarbon radicals -2008
- Author(s)
  K. Nakamura
- Organizer
  Tokai Region Knowledge Cluster Workshop on Plasma Etch Technologies
- Place of Presentation
  Nagoya University
- Year and Date
  2008-12-01
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] スリット形状による周波数シフトプローブにおける電子密度測定の精度改善2008
- Author(s)
  張祺, 中村圭二, 菅井秀郎
- Organizer
  第69回応用物理学会学術講演会
- Place of Presentation
  愛知県・中部大学
- Year and Date
  2008-09-03
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] 誘導結合型フロロカーボンプラズマにおけるガス組成の効果2008
- Author(s)
  石原慎也, 張祺, 臼井政志, 中村圭二
- Organizer
  平成20年度電気関係学会東海支部連合大会
- Place of Presentation
  愛知県・愛知県立大学
- Year and Date
  2008-09-18
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] 周波数シフトプローブを用いた電子密度計測におけるプローブ形状の効果' ;, ; (2008年5月名古屋) PST-08-26, pp. 1-62008
- Author(s)
  張祺, 中村圭二, 菅井秀郎
- Organizer
  電気学会プラズマ研究会
- Place of Presentation
  名古屋市・名古屋工業大学
- Year and Date
  2008-05-23
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] マイクロ波マルチホロー放電におけるプラズマ制御2008
- Author(s)
  太田習, 佐野貴憲, 塩出悠喜, 加藤公孝, 中村圭二, 菅井秀郎
- Organizer
  平成20年度電気関係学会東海支部連合大会
- Place of Presentation
  愛知県・愛知県立大学
- Year and Date
  2008-09-18
- Data Source
  KAKENHI-PROJECT-20540487
[Presentation] Development of Frequency Shift Probes for Monitoring of Electrons in Reactive Processing Plasmas2008
- Author(s)
  K. Nakamura
- Organizer
  7th International Workshop of Advanced Plasma Processing and Diagnostics
- Place of Presentation
  Seoul, Korea
- Year and Date
  2008-07-03
- Data Source
  KAKENHI-PROJECT-20540487

1. SUGAI Hideo (40005517)

# of Collaborated Projects: 13 results

# of Collaborated Products: 79 results
2. TOYODA Hirotaka (70207653)

# of Collaborated Projects: 9 results

# of Collaborated Products: 0 results
3. IKEZAWA Shunjiro (60065282)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
4. SASAKI Kohichi (50235248)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
5. ISHIJIMA Tatsuo (00324450)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. MATSUOKA Ryosuke (10308819)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. YAMAGUCHI Sataro (10249964)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. KITAGAWA Masatoshi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. TAKASUKA Seiichi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. TOYODA Naoki

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. 豊田直樹

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. 木下啓蔵

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

NAKAMURA Keiji 中村 圭二

Research Projects

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Measurements of Electron Conditions in High Pressure Plasmas for Materials ProcessingPrincipal Investigator

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Investigation on development of advanced frequency shift probePrincipal Investigator

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Measurements of electron density and electron temperature with plasma absorption probe and its application to deposited plasmasPrincipal Investigator

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Surface Modification and Behavior of Ions and Radicals in Plasma Immersion Ion ImplantationPrincipal Investigator

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New Technique for measuring electron density under soiled conditions and its application for precise process controlPrincipal Investigator

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Study on Surface Reaction Processes Using High Performance Beam Device

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Development of new wall control method and plasma-wall interaction in fluorocarbon plasmasPrincipal Investigator

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Lower-Temperature Deposition of Poly-crystalline Silicon Film by High-Density Plasma

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オール・メタル・アンテナ型誘導RFプラズマの開発と水素負イオン源への応用Principal Investigator

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Development of Selective Hydrogen Pumping Method Using Lithium Films

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Diagnostic and Control of Silane Plasmas by Newlv Developed Radical Measurement Technique

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静動シールドアンテナを用いた誘導RFプラズマ源の開発と応用Principal Investigator

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Novel First-Wall Conditioning in Stationary Reactor Studies

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NAKAMURA Keiji 中村圭二