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IUCHI Tohru  井内 徹

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井内 徹  イウチ トオル

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Researcher Number 20232142
Other IDs
External Links
Affiliation (Current) 2025: 東洋大学, 大学共同利用機関等の部局等 , 客員研究員
Affiliation (based on the past Project Information) *help 2013: 東洋大学, 工業技術研究所, 客員研究員
2009 – 2012: Toyo University, 理工学部, 教授
2008: Toyo University, 工学部, 教授
2001 – 2006: 東洋大学, 工学部, 教授
1998 – 1999: 東洋大学, 工学部, 教授
1994 – 1995: 東洋大学, 工学部, 教授
Review Section/Research Field
Principal Investigator
Measurement engineering / Measurement engineering / 計測・制御工学
Keywords
Principal Investigator
放射率 / 偏光 / 薄膜 / 酸化膜 / 放射測温 / 温度計測 / 半導体 / polarization / radiation thermometry / emissivity … More / 酸化 / temperature measurement / thin film / シリコン / 光学定数 / 透過率 / シリコンウエハ / thermal time constant / heat transfer / semiconductor / photophysics of solid / 熱伝達 / 熱時定数 / 熱接触抵抗 / 光物性 / oxide film / silicon / semiconductor materials / 放射測温法 / 半導体材料 / optical constants / modeling / oxidation / silicon wafer / ウエハー / 薄膜成長 / シリコン半導体 / ABSORPTION / SCATTERING / SURFACE ROUGHNESS / OXIDE FILM / THIN FILM / OPTICAL CONSTANT / POLARIZATION / EMISSIVITY / 温度 / 干渉 / 表面粗さ / 吸収 / 散乱 / Metal / Infrared / Optical sensor / stray radiation / Blackbody radiation / Temperature measurement / Emissivity / Radiation thermometry / 金属 / 赤外線 / 光センサ / 迷光雑音 / 黒体放射 / 背光放射雑音 / 放射輝度 / 反射率 / 非平衡温度場 / 背光放射 / 背光雑音 / in-situ計測 / バンドギャップ / 窒化膜 Less
  • Research Projects

    (7 results)
  • Research Products

    (202 results)
  •  Design and construction of radiation thermometry systems under extremely nonequilibrium temperature conditionPrincipal Investigator

    • Principal Investigator
      IUCHI Tohru
    • Project Period (FY)
      2011 – 2013
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Measurement engineering
    • Research Institution
      Toyo University
  •  In-situ radiation thermometry of semiconductor materials and its calibration systemPrincipal Investigator

    • Principal Investigator
      IUCHI Tohru
    • Project Period (FY)
      2008 – 2010
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Measurement engineering
    • Research Institution
      Toyo University
  •  Research of the in-situ temperature measurement system for silicon wafers.Principal Investigator

    • Principal Investigator
      IUCHI Tohru
    • Project Period (FY)
      2005 – 2006
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Measurement engineering
    • Research Institution
      Toyo University
  •  Study on the method for the measurements of both emissivity and temperature of semiconductor materials.Principal Investigator

    • Principal Investigator
      IUCHI Tohru
    • Project Period (FY)
      2003 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Measurement engineering
    • Research Institution
      Toyo University
  •  Research on a method of temperature measurement for a silicon semiconductor waferPrincipal Investigator

    • Principal Investigator
      IUCHI Tohru
    • Project Period (FY)
      2001 – 2002
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Measurement engineering
    • Research Institution
      Toyo University
  •  MODELING OF EMISSIVITIES OF METALS AND SEMICONDUCTORSPrincipal Investigator

    • Principal Investigator
      IUCHI Tohru
    • Project Period (FY)
      1998 – 1999
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Measurement engineering
    • Research Institution
      TOYO UNIVERSITY
  •  RESEARCH ON RADIATION THERMOMETRY OF NEAR ROOM TEMPERATUREPrincipal Investigator

    • Principal Investigator
      IUCHI Tohru
    • Project Period (FY)
      1994 – 1995
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      計測・制御工学
    • Research Institution
      TOYO UNIVERSITY

All 2014 2013 2012 2011 2010 2009 2008 2007 2006 2005 2004 2003 2002 Other

All Journal Article Presentation Book Patent

  • [Book] 放射測温法の問題点と実用化へのアプローチ、温度計測基礎講座2013

    • Author(s)
      井内徹
    • Publisher
      計測自動制御学会温度計測部会
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Book] SiウエハのIn-situ温度測定技術2013

    • Author(s)
      井内徹
    • Total Pages
      54
    • Publisher
      電子ジャーナル
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Book] 放射測温法の問題点と実用化へのアプローチ 温度計測基礎講座2013

    • Author(s)
      井内徹
    • Publisher
      計測自動制御学会
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Book] Siウェーハのin-situ温度測定技術徹底解説2013

    • Author(s)
      井内徹
    • Total Pages
      54
    • Publisher
      電子ジャーナル
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Book] SiウエーハのIn-situ温度測定技術 徹底解説2012

    • Author(s)
      井内徹
    • Total Pages
      86
    • Publisher
      電子ジャーナル
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Book] Radiometric Temperature Measurements(edited by Z. M. Zhang, B.K. Tsai and G. Machin)(Thermomettry in Steel Production, in Chapter 4, Experimental Methods in the Physical Sciences, Vol.43)2010

    • Author(s)
      T.Iuchi, Y.Yamada, M.Sugiura, A.Torao
    • Publisher
      The Netherlands, Academic Press
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Book] Thermomettry in Steel Production, in Chapter 4, Experimental Methods in the Physical Sciences, Vol. 43, Radiometric Temperature Measurements2009

    • Author(s)
      T.Iuchi, Y.Yamada, M.Sugiura, A.Torao
    • Total Pages
      61
    • Publisher
      Academic Press
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Journal Article] Non-contact temperature measurement of silicon wafers based on the combined use of transmittance and radiance2014

    • Author(s)
      Y. Toyoda, T. Seo and T. Iuchi
    • Journal Title

      Measurement

      Volume: vol. 51 Pages: 393-399

    • DOI

      10.1016/j.measurement.2014.02.023

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Journal Article] A method of reducing background radiance for emissivity-compensated radiation thermometry of silicon wafers2013

    • Author(s)
      T. Iuchi, Y. Toyoda and T. Seo
    • Journal Title

      Review of Scientific Instruments

      Volume: vol. 84 Issue: 2 Pages: 249041-1249047

    • DOI

      10.1063/1.4791793

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Journal Article] Emissivity properties of silicon wafers and application to radiation thermometry2013

    • Author(s)
      T. Iuchi and T. Seo
    • Journal Title

      Temperature : Its Measurement and Control in Science and Industry

      Volume: vol. 8 Pages: 710-715

    • DOI

      10.1063/1.4819629

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Journal Article] Radiation thermometry of silicon wafers based on emissivity-invariant condition2011

    • Author(s)
      T.Iuchi, T.Seo
    • Journal Title

      Applied Optics Vol.50, No.3

      Pages: 323-328

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Journal Article] Radiation thermometry of silicon wafers based on emissivity-invariant condition2011

    • Author(s)
      T. Iuchi and T. Seo
    • Journal Title

      Applied Optics

      Volume: vol. 50 Issue: 3 Pages: 323-328

    • DOI

      10.1364/ao.50.000323

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Journal Article] Radiation thermometry of silicon wafers based on emissivity-invariant condition2011

    • Author(s)
      Tohru Iuchi, Tomohiro Seo
    • Journal Title

      Applied Optics

      Volume: 50 Pages: 323-328

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Journal Article] Simultaneous measurement of emissivity and temperature of silicon wafers based upon a polarization technique2010

    • Author(s)
      T.Iuchi, A.Gogami
    • Journal Title

      Measurement (in print)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Journal Article] Simultaneous measurement of emissivity and temperature of silicon wafers using a polarization technique2010

    • Author(s)
      T.Iuchi, A.Gogami
    • Journal Title

      Measurement Vol.43, No.5

      Pages: 645-651

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Journal Article] Temperature measurement of semitransparent silicon wafer based upon absorption edge wavelength shift2010

    • Author(s)
      Tohru Iuchi, Tomohiro Seo
    • Journal Title

      International Journal of Thermophysics

      Volume: 31 Pages: 1533-1544

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Journal Article] Temperature measurement of semitransparent silicon wafer based upon absorption edge wavelength shift2010

    • Author(s)
      T.Iuchi, T.Seo
    • Journal Title

      International Journal of Thermodynamics Vol.31, No.8

      Pages: 1533-1544

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Journal Article] Simultaneous measurement of emissivity and temperature of silicon wafers using a polarization technique2010

    • Author(s)
      Tohru Iuchi, Atsushi Gogami
    • Journal Title

      Measurement

      Volume: 43 Pages: 645-651

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Journal Article] Uncertainty of a hybrid surface temperature sensor for silicon wafers and its comparison with an embedded thermocouple2009

    • Author(s)
      T.Iuchi, A.Gogami
    • Journal Title

      Review of Scientific Instruments 12

      Pages: 1261091-1261093

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Journal Article] Uncertainty of a hybrid surface temperature sensor for silicon thermocouple2009

    • Author(s)
      T.Iuchi, A.Gogami
    • Journal Title

      Review of Scientific Instruments Vol.80, No.12

      Pages: 1261091-1261093

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Journal Article] シリコン半導体ウエハのin situ温度計測2008

    • Author(s)
      井内徹
    • Journal Title

      計測と制御 Vol.47, No.5

      Pages: 395-402

    • NAID

      10021115066

    • Data Source
      KAKENHI-PROJECT-20560403
  • [Journal Article] Rapid-response hybrid-type surface temperature sensor2008

    • Author(s)
      K. Hiraka, R. Shinagawa, A. Gogami, T. Iuchi
    • Journal Title

      International Journal of Thermophysics 29

      Pages: 1166-1173

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Journal Article] シリコン半導体ウエハのin situ温度計測2008

    • Author(s)
      井内 徹
    • Journal Title

      計測と制御 47

      Pages: 395-402

    • NAID

      10021115066

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Journal Article] Rapid response hybrid-type surface temperature sensor2008

    • Author(s)
      K.Hiraka, R.Shinagawa, A.Gogami, T.Iuchi
    • Journal Title

      International Journal of Thermophysics Vol.29, No.2

      Pages: 1166-1173

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Journal Article] Rapid response hybrid-type surface temperature sensor,2007

    • Author(s)
      A.GOGAMI, K, HIRAKA, T.IUCHI
    • Journal Title

      The 54^<th> Spring Meeting, The Japan Society of Applied Physics and Related Societies, March, Sagamihara No. 1

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Optical temperature measurement of silicon wafers using band gap shift,2007

    • Author(s)
      R.SHINAGAWA, T.IUCHI
    • Journal Title

      The 54^<th> Spring Meeting, The Japan Society of Applied Physics and Related Societies, March, Sagamihara No. 1

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] 高速ハイブリッド型表面温度センサ2007

    • Author(s)
      後上敦史, 平加健介, 井内徹
    • Journal Title

      第54回応用物理学関係連合講演会予稿集 No.1, 28Pb-11

      Pages: 218-218

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] バンドギャップを利用したシリコンウエハの光学的測温法2007

    • Author(s)
      品川亮, 井内徹
    • Journal Title

      第54回応用物理学関係連合講演会予稿集 No.1, 28Pb-10

      Pages: 218-218

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] 透過特性を利用したSiウエハの温度計測法の測温精度2006

    • Author(s)
      品川亮, 井内徹
    • Journal Title

      第67回応用物理学会学術講演会予稿集 No.1, 31p-G-3

      Pages: 189-189

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Temperature measurement of silicon wafers by transmissivity sensing2006

    • Author(s)
      R.SHINAGAWA, T.IWASAKI, T.IUCHI
    • Journal Title

      Proc. of SICE-ICCAS

      Pages: 3346-3350

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] ハイブリッド型表面温度センサー2006

    • Author(s)
      平加健介, 井内徹
    • Journal Title

      第23回計測自動制御学会センシングフォーラム

      Pages: 234-239

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] 高温域におけるSi半導体ウエハの透過率測定2006

    • Author(s)
      品川亮, 井内徹
    • Journal Title

      第53回応用物理学関係連合講演会予稿集 No.1, 22p-K-4

      Pages: 193-193

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Radiation thermometry for silicon wafers by use of polarized radiances2006

    • Author(s)
      T.IUCHI, K.HIRAKA
    • Journal Title

      Optical Engineering (In print)

    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Radiation thermometry for semitransparent silicon wafers at middle temperature,2006

    • Author(s)
      Y.IKEDA, T.IUCHI
    • Journal Title

      The 67^<th> Autumn Meeting, The Japan Society of Applied Physics, August, Kusatsu No. 1, 31p-G-2

      Pages: 189-189

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Temperature measurement of silicon wafers using characteristics o transmissivity,2006

    • Author(s)
      R.SHINAGAWA, T.IUCHI
    • Journal Title

      23th Sensing Forum, October, Tsukuba

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] ハイブリッド型放射測温法2006

    • Author(s)
      平加健介, 井内 徹
    • Journal Title

      第53回応用物理学関係連合講演会 No.1(In print)

    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Non-contact temperature measurement of semitrasparent silicon wafers2006

    • Author(s)
      Y.IKEDA, T.IUCHI
    • Journal Title

      Proc. of SICE-ICCAS

    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] ハイブリッド型表面温度センサー2006

    • Author(s)
      平加健介, 井内徹
    • Journal Title

      第23回センシングフォーラム

    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] ハイブリッド型放射温度計の測温精度2006

    • Author(s)
      平加健介, 井内徹
    • Journal Title

      第67回応用物理学会学術講演会 NO.1, 31p-G-1

      Pages: 189-189

    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] ウエハの偏光反射率の測定と偏光放射率モデルの関係2006

    • Author(s)
      平加健介, 井内徹
    • Journal Title

      第66回応用物理学会学術講演会予稿集 No.1, 9p-ZM-13

      Pages: 137-137

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] ハイブリッド型放射温度計の測温精度2006

    • Author(s)
      平加健介, 井内徹
    • Journal Title

      第67回応用物理学会学術講演会予稿集 No.1, 31p-G-1

      Pages: 189-189

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Radiation thermometry for silicon wafers by use of polarized radiances2006

    • Author(s)
      T.IUCHI, K.HIRAKA
    • Journal Title

      Optical Engineering 45-9

    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] 半透明体Si半導体ウエハのin-situ放射測温法2006

    • Author(s)
      池田義和, 井内徹
    • Journal Title

      第53回応用物理学関係連合講演会予稿集 No.1, 22p-K-5

      Pages: 193-193

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Radiation thermometry for silicon wafers by use of polarized radiances2006

    • Author(s)
      T.IUCHI, K.HIRAKA
    • Journal Title

      Optical Engineering 45・9

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Radiation thermometry for semitransparent silicon wafers near room temperature,2006

    • Author(s)
      Y.IKEDA, T.IUCHI
    • Journal Title

      The 53^<rd> Spring Meeting, The Japan Society of Applied Physics and Related Societies, March, Tokyo No. 1, 22p-K-5

      Pages: 193-193

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Hybrid-type sensor for in situ temperature measurement,2006

    • Author(s)
      T.IUCHI, K.HIRAKA
    • Journal Title

      Review of Scientific Instruments Vol. 77, No. 11

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] 透過率特性を利用したSiウエハの温度計測法の測温精度2006

    • Author(s)
      品川亮, 井内徹
    • Journal Title

      第67回応用物理学会学術講演会 NO.1, 31p-G-3

      Pages: 189-189

    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] ハイブリッド型放射測温法2006

    • Author(s)
      平加健介, 井内徹
    • Journal Title

      第53回応用物理学関係連合講演会予稿集 No.1 22p-K-3

      Pages: 192-192

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] 半透明体Siウエハの中温域における放射測温法2006

    • Author(s)
      池田義和, 井内徹
    • Journal Title

      第67回応用物理学会学術講演会 NO.1, 31p-G-2

      Pages: 189-189

    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] 半透明体Siウエハの中温域における放射測温法2006

    • Author(s)
      池田義和, 井内徹
    • Journal Title

      第67回応用物理学会学術講演会予稿集 No.1, 31p-G-2

      Pages: 189-189

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Transmissivity measurement of Si semiconductor wafers at high temperature,2006

    • Author(s)
      R.SHINAGAWA, T.IUCHI
    • Journal Title

      The 53^<rd> Spring Meeting, The Japan Society of Applied Physics and Related Societies, March, Tokyo No. 1, 22p-K-4

      Pages: 193-193

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Radiation thermometry for silicon wafers by use of polarized radiances,2006

    • Author(s)
      T.IUCHI, K.HIRAKA
    • Journal Title

      Optical Engineering Vol. 45, No. 9

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Temperature measurement of silicon wafers by transmissivity sensing,2006

    • Author(s)
      R.SHINAGAWA, T.IWASAKI, T.IUCHI
    • Journal Title

      Proc. of SICE-ICCAS, October, Busan

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Radiation thermometry of semitransparent silicon wafers near room temperature,2006

    • Author(s)
      T.IUCHI, Y.IKEDA
    • Journal Title

      Proc. of SPIE (Thermosense XXVIII), April, Orlando

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] 半透明体Siウエハのin-situ放射測温法2006

    • Author(s)
      池田義和, 井内 徹
    • Journal Title

      第53回応用物理学関係連合講演会 No.1(In print)

    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Non-contact temperature measurement of semitransparent silicon wafers,2006

    • Author(s)
      Y.IKEDA, T.IUCHI
    • Journal Title

      Proc. of SICE-ICCAS, October, Busan

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Non-contact temperature measurement of semitransparent silicon wafers2006

    • Author(s)
      Y.IKEDA, T.IUCHI
    • Journal Title

      Proc. of SICE-ICCAS

      Pages: 5277-5282

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Radiation thermometry of semitransparent silicon wafers near room temperature2006

    • Author(s)
      T.IUCHI, Y.IKEDA
    • Journal Title

      Proc. of SPIE 6205 (28^<th> Thermosense)

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Hybrid-type surface thermometer2006

    • Author(s)
      T.IUCHI, K.HIRAKA
    • Journal Title

      Proc. of 18^<th> IMEKO WORLD CONGRESS

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Accuracy of temperature measurement for silicon wafers using transmissivity characteristic,2006

    • Author(s)
      R.SHINAGAWA, T.IUCHI
    • Journal Title

      The 67^<th> Autumn Meeting, The Japan Society of Applied Physics, August, Kusatsu No. 1, 31p-G-2

      Pages: 189-189

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Hybrid type surface thermometer2006

    • Author(s)
      T.IUCHI, K.HIRAKA
    • Journal Title

      Proc. of 18th IMEKO WORLD CONGRESS

    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Accuracy of temperature measurement by hybrid-type radiation thermometer,2006

    • Author(s)
      K.HIRAKA, T.IUCHI
    • Journal Title

      The 67^<th> Autumn Meeting, The Japan Society of Applied Physics, August, Kusatsu No. 1, 31p-G-1

      Pages: 189-189

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Development of hybrid-type thermometer,2006

    • Author(s)
      K.HIRAKA, T.IUCHI
    • Journal Title

      23th Sensing Forum, October, Tsukuba

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] 酸化膜付半透明体Siウエハの放射測温法2006

    • Author(s)
      池田義和, 井内徹
    • Journal Title

      第23回センシングフォーラム

    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Hybrid type surface thermometer,2006

    • Author(s)
      T.IUCHI, K.HIRAKA
    • Journal Title

      Proc. of 18^<th> IMEKO WORLD CONGRESS, September, Rio de Janeiro

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] 高温域におけるSi半導体ウエハの透過率測定2006

    • Author(s)
      品川 亮, 井内 徹
    • Journal Title

      第53回応用物理学関係連合講演会 No.1(In print)

    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] 酸化膜付半透明体Siウエハの放射測温法2006

    • Author(s)
      池田義和, 井内徹
    • Journal Title

      第23回計測自動制御学会センシングフォーラム

      Pages: 230-233

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Hybrid-type temperature sensor for in situ measurement2006

    • Author(s)
      T.IUCHI, K.HIRAKA
    • Journal Title

      Review of Scientific Instruments 77・11

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Hybrid-type temperature sensor for in situ measurement2006

    • Author(s)
      T.IUCHI, K.HIRAKA
    • Journal Title

      Review of Scientific Instruments 77-11

    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Hybrid type radiation thermometry,2006

    • Author(s)
      K.HIRAKA, T.IUCHI
    • Journal Title

      The 53^<rd> Spring Meeting, The Japan Society of Applied Physics and Related Societies, March, Tokyo No. 1, 22p-K-3

      Pages: 192-192

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Hybrid-type surface thermometer at high temperature2006

    • Author(s)
      K.HIRAKA, T.IUCHI
    • Journal Title

      Proc. of SICE-ICCAS

      Pages: 3330-3335

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] 透過特性を利用したシリコンウエハの温度測定法2006

    • Author(s)
      品川亮, 井内徹
    • Journal Title

      第23回センシングフォーラム

    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Radiation thermometry o semitransparent silicon wafers with oxide surface layer,2006

    • Author(s)
      Y.IKEDA, T.IUCHI
    • Journal Title

      23th Sensing Forum, October, Tsukuba

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] 透過特性を利用したシリコンウエハの温度計測法2006

    • Author(s)
      品川亮, 井内徹
    • Journal Title

      第23回計測自動制御学会センシングフォーラム

      Pages: 225-229

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Radiation thermometry of semitransparent silicon wafers near room temperature2006

    • Author(s)
      T.IUCHI, Y.IKEDA
    • Journal Title

      Proc. of SPIE6205 (28th Thermosense)

    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Emissivity behaviors of silicon wafers with different resistivity,2005

    • Author(s)
      T.OHKUBO, K.HIRAKA, T.IUCHI
    • Journal Title

      The 52^<nd> Spring Meeting, The Japan Society of Applied Physics and Related Societies, April, Saiama No. 1, lp-M-5

      Pages: 209-209

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Emissivity behaviors of silicon wafers with different resistivity.2005

    • Author(s)
      K.Hiraka, T.Ohkubo, T.Iuchi
    • Journal Title

      The 52^<nd> Spring Meeting, Extended Abstracts, The Japan Society of Applied Physics and Related Societies No.1, 1p-M-5

      Pages: 209-209

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Study on emissivity behaviors of silicon wafers near room temperature.2005

    • Author(s)
      Y.Ikeda, T.Nojima, K.Hashimoto, T.Yamasaki, H.Sugawara, T.Iuchi
    • Journal Title

      Proc.of the 1st Symposium on Sensor Photonics, Sensor Photonics Research Center, Toyo Univ.February

      Pages: 95-96

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Transmissivity measurement of silicon wafers with different resistivity and application to radiation thermometry.2005

    • Author(s)
      Y.Ikeda, H.Sugawara, T.Iuchi
    • Journal Title

      The 52^<nd> Spring Meeting, Extended Abstracts, The Japan Society of Applied Physics and Related Societies No.1, 1p-M-6

      Pages: 210-210

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] 高温域におけるSiウエハの放射率挙動の研究2005

    • Author(s)
      平加健介, 大久保智裕, 井内徹
    • Journal Title

      第1回先端光応用計測研究センター成果報告会要旨集 2月

      Pages: 91-92

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Emissivity-compensated radiation thermometry of silicon wafers at high temperature2005

    • Author(s)
      K.Hiraka, T.Ohkubo, T.Iuchi
    • Journal Title

      Proc. of SICE

      Pages: 1381-1385

    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Study on emissivity behaviors of silicon wafers at high temperature.2005

    • Author(s)
      K.Hiraka, T.Ohkubo, T.Iuchi
    • Journal Title

      Proc.of the 1st Symposium on Sensor Photonics, Sensor Photonics Research Center, Toyo Univ.February

      Pages: 91-92

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] 半透明体Si半導体ウエハの常温付近の放射測温法2005

    • Author(s)
      池田義和, 井内 徹
    • Journal Title

      第66回応用物理学会学術講演会 9p-ZM-14

    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] 高温域におけるSiウエハの放射率補正放射測温法2005

    • Author(s)
      平加健介, 井内徹
    • Journal Title

      第22回計測自動制御学会センシングフォーラム

      Pages: 387-392

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] 半透明体Si半導体ウエハの常温付近の放射測温法2005

    • Author(s)
      池田義和, 井内徹
    • Journal Title

      第66回応用物理学会学術講演会予稿集 No.1, 9p-ZM-14

      Pages: 137-137

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Emissivity-compensated radiation thermometry of silicon wafers at high temperature,2005

    • Author(s)
      K.HIRAKA, T.OHKUBO, T.IUCHI
    • Journal Title

      Proc. of SICE, August, Okayama

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Radiation thermometry of semitransparent silicon wafers2005

    • Author(s)
      Y.IKEDA, H.SUGAWARA, T.IUCHI
    • Journal Title

      Proc. of SICE

      Pages: 2630-2634

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Transmissivity measurement of silicon wafers with different resistivity and application to radiation thermometry,2005

    • Author(s)
      H.SUGAWARA, Y.IKEDA, T.IUCHI
    • Journal Title

      The 52^<nd> Spring Meeting, The Japan Society of Applied Physics and Related Societies, April, Saiama No. 1, lp-M-6

      Pages: 210-210

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Radiation thermometry of semitransparent silicon wafers2005

    • Author(s)
      Y.Ikeda, H.Sugawara, T.Iuchi
    • Journal Title

      Proc. of SICE

      Pages: 2630-2634

    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] 電気抵抗率の違いによるSiウエハの放射率変化2005

    • Author(s)
      平加健介, 大久保智裕, 井内徹
    • Journal Title

      第52回応用物理学関係連合講演会 3月,No.1 1p-M-5

      Pages: 209-209

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] 電気抵抗率の違いによるSiウエハの放射率変化2005

    • Author(s)
      平加健介, 大久保智裕, 井内徹
    • Journal Title

      第52回応用物理学関係連合講演会

    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Radiation thermometry for silicon wafers2005

    • Author(s)
      T.Iuchi, Y.Ikeda, K.Hiraka
    • Journal Title

      Proc. Of SPIE 587819

      Pages: 1-10

    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Radiation thermometry for semitransparent silicon wafers near room temperature,2005

    • Author(s)
      Y.IKEDA, T.IUCHI
    • Journal Title

      The 66^<th> Autumn Meeting, The Japan Society of Applied Physics, September, Tokushima No. 1, 9p-ZM-14

      Pages: 137-137

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] 電気抵抗率の違いによるSiウエハの透過率測定と常温域放射測温法への応用2005

    • Author(s)
      菅原弘司, 池田義和, 井内徹
    • Journal Title

      第52回応用物理学関係連合講演会

    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] 常温域におけるSiウエハの放射率挙動の研究2005

    • Author(s)
      池田義和, 野島孝, 橋本克己, 山崎徹, 菅原弘司, 井内徹
    • Journal Title

      第1回先端光応用計測研究センター成果報告会要旨集 2月

      Pages: 93-94

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Radiation thermometry for silicon wafers,2005

    • Author(s)
      T.IUCHI, Y.IKEDA, K.HIRAKA
    • Journal Title

      Proc. of SPIE(Optics & Photonics), August, San Diego

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Radiation thermometry o semitransparent silicon wafers near room temperature,2005

    • Author(s)
      Y.IKEDA, T.IUCHI
    • Journal Title

      22^<nd> Sensing Forum, September, Osaka

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] 電気抵抗率の違いによるSiウエハの透過率測定と常温域放射測温法への応用2005

    • Author(s)
      菅原弘司, 池田義和, 井内徹
    • Journal Title

      第52回応用物理学関係連合講演会 3月,No.1 1p-M-6

      Pages: 210-210

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] 常温付近の半透明体Siウエハの放射測温法2005

    • Author(s)
      池田義和, 井内 徹
    • Journal Title

      第22回センシングフォーラム

      Pages: 387-392

    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Radiation thermometry for silicon wafers2005

    • Author(s)
      T.IUCHI, Y.IKEDA, K.HIRAKA
    • Journal Title

      Proc. of SPIE

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] 常温付近の半透明体Siウエハの放射測温法2005

    • Author(s)
      池田義和, 井内徹
    • Journal Title

      第22回計測自動制御学会センシングフォーラム

      Pages: 393-397

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] 電気抵抗率の違いによるSiウエハの放射率変化2005

    • Author(s)
      大久保智裕, 平加健介, 井内徹
    • Journal Title

      第52回応用物理学関係連合講演会予稿集 No.1, 1p-M-5

      Pages: 209-209

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Emissivity-compensated radiation thermometry of silicon wafers at high temperature2005

    • Author(s)
      K.HIRAKA, T.OHKUBO, T.IUCHI
    • Journal Title

      Proc. of SICE

      Pages: 1381-1385

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Development of a measurement apparatus of specular reflectivity and its application to silicon wafers.2005

    • Author(s)
      T.Suzuki, T.Miyazaki, T.Tadaki, T.Iuchi
    • Journal Title

      Proc.of the 1st Symposium on Sensor Photonics, Sensor Photonics Research Center, Toyo Univ.February

      Pages: 95-96

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Radiation thermometry of semitransparent silicon wafers,2005

    • Author(s)
      Y.IKEDA, H.SUGAWARA, T.IUCHI
    • Journal Title

      Proc. of SICE, August, Okayama

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] ウエハの偏光反射率の測定と偏光放射率モデルの関係2005

    • Author(s)
      平加健介, 井内 徹
    • Journal Title

      第66回応用物理学会学術講演会 9p-ZM-13

    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] 双方向角度制御した反射率測定装置の開発とSiウエハへの応用2005

    • Author(s)
      鈴木健仁, 宮崎孝行, 但木徹, 井内徹
    • Journal Title

      第1回先端光応用計測研究センター成果報告会要旨集 2月

      Pages: 95-96

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] 電気抵抗率の違いによるSiウエハの透過率測定と常温域放射測温法への応用2005

    • Author(s)
      菅原弘司, 池田義和, 井内徹
    • Journal Title

      第52回応用物理学関係連合講演会予稿集 No.1, 1p-M-6

      Pages: 210-210

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Relation between polarized reflectivity measurement and polarized emissivity modeling of wafers,2005

    • Author(s)
      K.HIRAKA, T.IUCHI
    • Journal Title

      The 66^<th> Autumn Meeting, The Japan Society of Applied Physics, September, Tokushima No. 1, 9p-ZM-13

      Pages: 137-137

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] 高温域におけるSiウエハの放射率補正放射測温法2005

    • Author(s)
      平加健介, 井内 徹
    • Journal Title

      第22回センシングフォーラム

      Pages: 393-397

    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Emissivity compensated radiation thermometry of silicon wafers at high temperature,2005

    • Author(s)
      K.HIRAKA, T.IUCHI
    • Journal Title

      22^<nd> Sensing Forum, September, Osaka, pp

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Journal Article] Polarized radiation thermometry of silicon wafers at high temperature2004

    • Author(s)
      T.Ohkubo, T.Iuchi
    • Journal Title

      Proc.of SICE2004

      Pages: 654-657

    • NAID

      130005441152

    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] ブリュースター角を利用した常温付近におけるSi半導体ウエハの放射測温法2004

    • Author(s)
      菅原弘司, 大久保智裕, 井内徹
    • Journal Title

      第65回応用物理学会学術講演会予稿集 No.1

      Pages: 134-134

    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Some considerations for a method that simultaneously measure the temperature and emissivity of a metal in a high temperature furnace.2004

    • Author(s)
      T.Iuchi, T.Furukawa
    • Journal Title

      Review of Scientific Instruments 75-12

      Pages: 5326-5332

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Polarized radiation thermometry of silicon wafers at high temperature2004

    • Author(s)
      T.Ohkubo, T.Iuchi
    • Journal Title

      Proc.of SICE2004 August Sapporo

      Pages: 654-657

    • NAID

      130005441152

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] ブリュースター角を利用した常温付近におけるSi半導体ウエハの放射測温怯2004

    • Author(s)
      菅原弘司, 大久保智裕, 井内徹
    • Journal Title

      第65回応用物理学会学術講演会予稿集 9月,No.1 3p-ZQ-10

      Pages: 134-134

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Measurement of optical properties of Si wafers and their applications to radiation thermometry.2004

    • Author(s)
      H.Sugawara, T.Ohkubo, T.Iuchi
    • Journal Title

      21^<st> Sensing Forum, Tokyo

      Pages: 123-127

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Polarized transmissivity measurements of a Si semiconductor wafer at high temperature.2004

    • Author(s)
      T.Ohkubo, H.Sugawara, T.Iuchi
    • Journal Title

      The 51^<st> Spring Meeting, Extended Abstracts, The Japan Society of Applied Physics and Related Societies No.1, 29a-YB-10

      Pages: 174-174

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Si半導体ウエハの光学的特牲の測定と放射測温法への応用2004

    • Author(s)
      菅原弘司, 大久保智裕, 井内徹
    • Journal Title

      第21回センシングフォーラム 9月 東京

      Pages: 123-127

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Polarized radiation thermometry of silicon wafers near room temperature2004

    • Author(s)
      H.Sugawara, T.Iuchi
    • Journal Title

      Proc.of SICE2004

      Pages: 646-649

    • NAID

      130006960396

    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Measurement of emissivity and transmissivity of Si silicon wafers at high temperature.2004

    • Author(s)
      H.Sugawara, T.Ohkubo, T.Iuchi
    • Journal Title

      The 51^<st> Spring Meeting, Extended Abstracts, The Japan Society of Applied Physics and Related Societies No.1, 29p-YB-9

      Pages: 177-177

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] 高温下におけるSiウエハの偏光透過率測定2004

    • Author(s)
      大久保智裕, 菅原弘司, 井内徹
    • Journal Title

      第51回応用物理学関係連合講演会 3月,No.1 29a-YB-10

      Pages: 174-174

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] A method for the measurement of surface temperature of a metal in a high temperature furnace.2004

    • Author(s)
      T.Furukawa, N.Sato, T.Iuchi
    • Journal Title

      The 51^<st> Spring Meeting, Extended Abstracts, The Japan Society of Applied Physics and Related Societies No.3, 29p-R-5

      Pages: 1106-1106

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Polarized radiation thermometry of silicon wafers near room temperature2004

    • Author(s)
      H.Sugawara, T.Iuchi
    • Journal Title

      Proc.of SICE2004 August Sapporo

      Pages: 646-649

    • NAID

      130006960396

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] 常温域におけるSiウエハの放射率・透過率測定2004

    • Author(s)
      菅原弘司, 大久保智裕, 井内徹
    • Journal Title

      第51回応用物理学関係連合講演会 3月,No.1 29p-YB-9

      Pages: 177-177

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Measurements of emissivity and transmissivity of silicon wafers at high temperature2004

    • Author(s)
      Y.Chimata, N.Shimamura, H.Endo, T.Ohkubo, T.Iuchi
    • Journal Title

      Proc.of the 3^<rd> Conference of Research Institute of Industrial Technology, Toyo Univ.February

      Pages: 17-18

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] 偏光輝度を利用したSiウエハの放射測温法2004

    • Author(s)
      大久保智裕, 菅原弘司, 井内徹
    • Journal Title

      第65回応用物理学会学術講演会予稿集 9月,No.1 3p-ZQ-9

      Pages: 133-133

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Radiation thermometry of a steel sheet in a high temperature furnace.2004

    • Author(s)
      T.Furukawa, N.Sato, T.Iuchi
    • Journal Title

      Trans.of the Society of Instruments and Control Engineers 40-4

      Pages: 376-381

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Measurements of emissivity and transmissivity of temperature by use of Brewster angle.2004

    • Author(s)
      H.Sugawara, T.Ohkubo, T.Iuchi
    • Journal Title

      The 65^<th> Autumn Meeting, Extended Abstracts, The Japan Society of Applied Physics No.1, 3p-ZQ-10

      Pages: 134-134

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] 常温付近におけるSi半導体ウエハの放射率・透過率測定2004

    • Author(s)
      山本拡樹, 笹原吉弘, 菅原弘司, 井内徹
    • Journal Title

      第3回東洋大学工業技術研究所講演会予稿集 2月

      Pages: 19-20

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Some considerations for a method that simultaneously measures the temperature and emissivity of a metal in a high temperature furnace2004

    • Author(s)
      T.Iuchi, T.Furukawa
    • Journal Title

      Review of Scientific Instruments 75・12

      Pages: 5326-5332

    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Radiation thermometry of silicon wafers by use of polarized radiation.2004

    • Author(s)
      T.Ohkubo, H.Sugawara, T.Iuchi
    • Journal Title

      The 65^<th> Autumn Meeting, Extended Abstracts, The Japan Society of Applied Physics No.1, 3p-ZQ-9

      Pages: 133-133

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Polarized radiation thermometry of silicon wafers at high temperature.2004

    • Author(s)
      T.Ohkubo, T.Iuchi
    • Journal Title

      Proc.of SICE 2004, Sapporo

      Pages: 654-657

    • NAID

      130005441152

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Si半導体ウエハの光学的特性の測定と放射測温法への応用2004

    • Author(s)
      菅原弘司, 大久保智裕, 井内徹
    • Journal Title

      第21回センシングフォーラム

      Pages: 123-127

    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] 高温炉内鋼板の放射測温法2004

    • Author(s)
      古川徹, 井内徹
    • Journal Title

      計測自動制御学会論文集 40・4

      Pages: 376-381

    • NAID

      10012855017

    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] 高温炉内鋼板の放射測温法2004

    • Author(s)
      古川徹, 佐藤伸治, 井内徹
    • Journal Title

      計測自動制御学会論文集 40-4

      Pages: 376-381

    • NAID

      10012855017

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Some considerations for a method that simultaneously measure the temperature and emissivity of a metal in a high temperature furnace2004

    • Author(s)
      T.Iuchi, T.Furukawa
    • Journal Title

      Review of Scientific Instruments 75-12

      Pages: 5326-5332

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] 高温下におけるSi半導体ウエハの放射率・透過率測定2004

    • Author(s)
      街寧, 島村直樹, 遠藤宏子, 大久保智裕, 井内徹
    • Journal Title

      第3回東洋大学工業技術研究所講演会予稿集 2月

      Pages: 17-18

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Measurements of emissivity and transmissivity of silicon wafers near room temperature2004

    • Author(s)
      H.Yamamoto, Y.Sasahara, H.Sugawara, T.Iuchi
    • Journal Title

      Proc.of the 3^<rd> Conference of Research Institute of Industrial Technology, Toyo Univ.February

      Pages: 19-20

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] 高温炉内における金属表面温度計測法2004

    • Author(s)
      古川徹, 佐藤伸治, 井内徹
    • Journal Title

      第51回応用物理学関係連合講演会 3月,No.3 29p-R-5

      Pages: 1106-1106

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] 偏光輝度を利用したSiウエハの放射測温法2004

    • Author(s)
      大久保智裕, 菅原弘司, 井内徹
    • Journal Title

      第65回応用物理学会学術講演会予稿集 No.1

      Pages: 133-133

    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Emissivity modeling of metals during the growth of oxide film and comparison of the model with experimental results.2003

    • Author(s)
      T.Iuchi, T.Furukawa, S.Wada
    • Journal Title

      Applied Optics 42-13

      Pages: 2317-2326

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Radiation thermometry in high temperature2003

    • Author(s)
      T.Iuchi, T.Furukawa
    • Journal Title

      Proc.of 17^<th> IMEKO WORLD CONGRESS

      Pages: 1632-1637

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] 高温炉内ステンレス鋼板の放射測温法2003

    • Author(s)
      古川徹, 井内徹
    • Journal Title

      第20回センシングフォーラム 9月 東京

      Pages: 95-100

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Radiation pyrometry of stainless steel in a high temperature furnace.2003

    • Author(s)
      T.Furukawa, T.Iuchi
    • Journal Title

      20^<th> Sensing Forum, Tokyo

      Pages: 95-100

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Emissivity measurement of silicon semiconductor wafer near room temperature2003

    • Author(s)
      S.Sugawara, T.Ohkubo, T.Fukushima, T.Iuchi
    • Journal Title

      Proc.of SICE2003 August Fukui

      Pages: 580-583

    • NAID

      130005440376

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Emissivity-compensated radiation thermometry of metals by the use of polarization in a high temperature furnace and near room temperature2003

    • Author(s)
      T.Iuchi
    • Journal Title

      International workshop on radiation measurements of the bodies with unknown emissivity November Moscow

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Emissivity-compensated radiation thermometry of metals by the use of polarization in a high temperature and near room temperature.2003

    • Author(s)
      T.Iuchi
    • Journal Title

      International workshop on radiation measurements of the bodies with unknown emissivity, November, Moscow

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] 高温下におけるSiウエハの放射率変化2003

    • Author(s)
      大久保智裕, 菅原弘司, 井内徹
    • Journal Title

      第64回応用物理学会学術講演会予稿集 8月,No.1 2a-ZH-9

      Pages: 127-127

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Emissivity modeling of metals during the growth of oxide film and comparison of the model with experimental results2003

    • Author(s)
      T.Iuchi, T.Furukawa, S.Wada
    • Journal Title

      Applied Optics 42-13

      Pages: 2317-2326

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Emissivity behaviors of a Si semiconductor wafer at high temperature2003

    • Author(s)
      T.Ohkubo, H.Sugawara, T.Iuchi
    • Journal Title

      The 64^<th> Autumn Meeting, Extended Abstracts, The Japan Society of Applied Physics No.1, 2a-ZH-9

      Pages: 127-127

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Emissivity measurement of silicon semiconductor wafer near room temperature.2003

    • Author(s)
      H.Sugawara, T.Ohkubo, T.Fukushima, T.Iuchi
    • Journal Title

      Proc.of SICE 200., Fukui

      Pages: 580-583

    • NAID

      130005440376

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Radiation thermometry in high temperature furnace2003

    • Author(s)
      T.Iuchi, T.Furukawa
    • Journal Title

      Proc.of 17^<th> IMEKO WORLD CONGRESS June Dubrovnik

      Pages: 1632-1637

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Journal Article] Polarized radiation thermometry of silicon wafers near room temperature.2002

    • Author(s)
      H.Sugawara, T.Iuchi
    • Journal Title

      Proc.of SICE 2004, Sapporo

      Pages: 646-649

    • NAID

      130006960396

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15560364
  • [Patent] Radiation thermometry and radiation thermometry system2010

    • Inventor(s)
      井内徹、平加健介
    • Industrial Property Rights Holder
      学校法人東洋大学
    • Filing Date
      2010-06-17
    • Overseas
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Patent] Radiation Thermometry and Radiation Thermometry System2010

    • Inventor(s)
      T.Iuchi, K.Hiraka
    • Industrial Property Rights Holder
      東洋大学
    • Filing Date
      2010-06-17
    • Overseas
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Patent] ハイブリッド型表面温度計,温度分布測定装置及び測定方法2006

    • Inventor(s)
      井内 徹
    • Industrial Property Rights Holder
      東洋大学
    • Industrial Property Number
      2006-036137
    • Filing Date
      2006-02-14
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-17560377
  • [Presentation] 一研究者による放射測温実用化研究のあしあと2014

    • Author(s)
      井内徹、資料
    • Organizer
      日本学術振興会産業計測第36委員会第60回研究会
    • Place of Presentation
      弘済会館、東京
    • Year and Date
      2014-02-14
    • Invited
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Presentation] 放射測温法における背光放射の定量評価2013

    • Author(s)
      岩崎友幸、井内徹
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      京都 同志社大学
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Presentation] Influence of background radiance and the reduction method for radiation thermometry2013

    • Author(s)
      T. Iuchi, Y. Toyoda and T. Iwasaki
    • Organizer
      TEMPMEKO2013
    • Place of Presentation
      Madeira, Portugal
    • Year and Date
      2013-10-17
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Presentation] Emissivity properties of silicon wafers and application to radiation thermometry2013

    • Author(s)
      T. Iuchi and T. Seo
    • Organizer
      9^<th> International Temperature Symposium
    • Place of Presentation
      Anaheim, USA
    • Year and Date
      2013-03-21
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Presentation] 放射測温法における背光放射の定量評価2013

    • Author(s)
      岩崎友幸、井内徹
    • Organizer
      第74回応用物理学会秋季学術講演会同志社大学
    • Place of Presentation
      京都
    • Year and Date
      2013-09-16
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Presentation] Influence of background radiance and the reduction method for radiation thermometry2013

    • Author(s)
      T. Iuchi, Y. Toyoda and T. Iwasaki
    • Organizer
      TEMPMEKO 2013 (Symposium on Temperature and Thermal Measurements in Industry and Science)
    • Place of Presentation
      Madeira, Portugal
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Presentation] シリコンウエハの光学的特性を利用した非接触測温法2012

    • Author(s)
      豊田祐樹、井内徹
    • Organizer
      第37回光学シンポジウム
    • Place of Presentation
      Tokyo University
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Presentation] A combined method of noncontact temperature measurement for silicon wafers2012

    • Author(s)
      Y. Toyoda, T. Seo and T. Iuchi
    • Organizer
      20^<th> IMEKO World Congress
    • Place of Presentation
      Busan, Korea
    • Year and Date
      2012-09-10
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Presentation] シリコンウエハの光学的特性を利用した非接触測温法2012

    • Author(s)
      豊田侑樹、井内徹
    • Organizer
      第37回光学シンポジウム
    • Place of Presentation
      東京大学、東京
    • Year and Date
      2012-06-15
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Presentation] A combined method of noncontact temperature measurement for silicon wafers2012

    • Author(s)
      Y. Toyoda, T. Seo and T. Iuchi
    • Organizer
      XX IMEKO World Congress
    • Place of Presentation
      Busan, Korea
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Presentation] Non-contact temperature measurement for silicon wafers under 600 degrees Celsius2012

    • Author(s)
      Y. Toyoda and T. Iuchi
    • Organizer
      SICE 2012
    • Place of Presentation
      Akita University
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Presentation] Emissivity properties of silicon wafers and application to radiation thermometry2012

    • Author(s)
      T. Iuchi and T. Seo
    • Organizer
      9th International Temperature Symposium
    • Place of Presentation
      Anaheim, CA. USA
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Presentation] Non-contact temperature measurement for silicon wafers under 600˚C2012

    • Author(s)
      Y. Toyoda and T. Iuchi
    • Organizer
      SICE2012
    • Place of Presentation
      Akita Akita University
    • Year and Date
      2012-08-21
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Presentation] 背光雑音を分離したシリコンウエハのin-situ放射測温の検討2011

    • Author(s)
      瀬尾朋博、岩崎友幸、井内徹
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(神奈川県)
    • Year and Date
      2011-03-24
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] シリコンウエハのin-situ放射測温における背光雑音の遮蔽2011

    • Author(s)
      瀬尾朋博、岩崎友幸、井内徹
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学、山形
    • Year and Date
      2011-08-30
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Presentation] Temperature dependence of p-polarized transmittance of a semitransparent silicon wafer and its application to non-contact temperature measurement2011

    • Author(s)
      Y. Toyoda and T. Iuchi
    • Organizer
      SICE Annual Conference 2011
    • Place of Presentation
      早稲田大学(東京都)
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Presentation] シリコンウエハのin-situ放射測温法における背光雑音の遮蔽2011

    • Author(s)
      瀬尾朋博、岩崎友幸、井内徹
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学(山形県)
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Presentation] Temperature dependence of p-polarized transmittance of a semitransparent silicon wafer and its application to non-contact temperature measurement2011

    • Author(s)
      Y. Toyoda and T. Iuchi
    • Organizer
      SICE2011
    • Place of Presentation
      Waseda University, Tokyo
    • Year and Date
      2011-09-16
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Presentation] 背光雑音を分離したシリコンウエハのin-situ放射測温の検討2011

    • Author(s)
      瀬尾朋博、岩崎友幸、井内徹
    • Organizer
      第58回応用物理学連合講演会
    • Place of Presentation
      神奈川工科大学
    • Year and Date
      2011-03-24
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] 背光雑音を分離したシリコンウエハのin-situ放射測温の検討2011

    • Author(s)
      瀬尾朋博、岩崎友幸、井内徹
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学、神奈川
    • Year and Date
      2011-03-24
    • Data Source
      KAKENHI-PROJECT-23560511
  • [Presentation] シリコンウエハのin-situ放射測温法の考察2010

    • Author(s)
      瀬尾朋博、井内徹
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-14
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] Temperature measurement of semitransparent silicon wafers based upon absorption edge wavelength shift2010

    • Author(s)
      井内徹, 瀬尾朋博
    • Organizer
      TEMPMEKO $ ISHM 2010, Portrose (Slovenia)
    • Place of Presentation
      Portoroz, Slovenia
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] シリコンウエハのin-situ放射測温法の考察2010

    • Author(s)
      瀬尾朋博、井内徹
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学(長崎県)
    • Year and Date
      2010-09-14
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] Temperature measurement of semitransparent silicon wafers based upon absorption edge wavelength shift2010

    • Author(s)
      T.Iuchi, T.Seo
    • Organizer
      TEMPMEKO & ISHM 2010
    • Place of Presentation
      Portrose(Slovenia)
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] 鉄鋼プロセスにおける放射測温技術の温故知新2009

    • Author(s)
      井内徹
    • Organizer
      日本鉄鋼協会
    • Place of Presentation
      加古川(兵庫)
    • Year and Date
      2009-11-13
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] 偏光放射率不変条件を利用したシリコンウエハの放射測温法2009

    • Author(s)
      岩崎友幸, 角谷聡, 井内徹
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山
    • Year and Date
      2009-09-09
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] An emissivity-invariant condition of silicon wafers and its application to radiation thermometry2009

    • Author(s)
      井内徹, 後上敦史
    • Organizer
      ICROS-SICE International Joint Conference 2009
    • Place of Presentation
      Fukuoka International Congress Center
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] Uncertainty in the temperature of silicon wafers measured by radiation thermometry based upon a polarization technique2009

    • Author(s)
      T.Iuchi, A.Gogami
    • Organizer
      XIX IMEKO World Congress
    • Place of Presentation
      Lisbon
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] 鉄鋼プロセスにおける放射測温技術の温故知新2009

    • Author(s)
      井内徹
    • Organizer
      日本鉄鋼協会
    • Place of Presentation
      加古川
    • Year and Date
      2009-11-13
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] An emissivity-invariant condition of silicon wafers and its application to radiation thermometry2009

    • Author(s)
      T.Iuchi, A.Gogami
    • Organizer
      ICROS-SICE International Joint Conference 2009
    • Place of Presentation
      Fukuoka
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] Uncertainty in the temperature of silicon wafers measured by radiation thermometry based upon a polarization technique2009

    • Author(s)
      井内徹, 後上敦史
    • Organizer
      XIX IMEKO WORLD CONGRESS
    • Place of Presentation
      Lisbon (Portugal)
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] 偏光放射率不変条件を利用したシリコンウエハの放射測温法2009

    • Author(s)
      岩崎友幸、角谷聡、井内徹
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学
    • Year and Date
      2009-09-09
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] Comparison of surface temperature readings between an embedded thermocouple in a silicon wafer and a hybrid-typetemperature sensor2008

    • Author(s)
      A. Gogami, T. Iuchi
    • Organizer
      International Conference on Instrumentation, Control and Information Technology
    • Place of Presentation
      Tokyo
    • Year and Date
      2008-08-20
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] シリコンウエハの放射率自動補正による非接触測温法2008

    • Author(s)
      後上敦史、井内徹
    • Organizer
      第25回センシングフォーラム
    • Place of Presentation
      佐賀大学
    • Year and Date
      2008-09-25
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] A hybrid-type surface temperature sensor and its application to the development of emissivity compensated radiation therm ometry2008

    • Author(s)
      A. Gogami, T. Iuchi
    • Organizer
      International Conference on Control, Automation and Systems
    • Place of Presentation
      Seoul
    • Year and Date
      2008-10-17
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] 真空加熱炉内におけるハイブリッド型表面温度センサの適用2008

    • Author(s)
      後上敦史、井内徹
    • Organizer
      第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学(春日井キャンパス)
    • Year and Date
      2008-09-03
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] A non-contact temperature measurement of semitransparent silicon wafers with absorption edge wavelength2008

    • Author(s)
      T.Iuchi, R. Shinagawa
    • Organizer
      ICCAS 2008
    • Place of Presentation
      Seoul (Korea)
    • Year and Date
      2008-10-15
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] A non-contact temperature measurement of semitransparent silicon wafers with absorption edge wavelength2008

    • Author(s)
      T. Iuchi, R. Shinagawa
    • Organizer
      International Conference on Control, Automation and Systems
    • Place of Presentation
      Seoul
    • Year and Date
      2008-10-15
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] 偏光放射率補正シリコンウエハの温度計測法2008

    • Author(s)
      後上敦史、井内徹
    • Organizer
      第33回光学シンポジウム
    • Place of Presentation
      東京大学
    • Year and Date
      2008-07-05
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] Comparison of surface temperature readings between an embedded thermocouple in a silicon wafer and a hybrid-type temperature sensor2008

    • Author(s)
      後上敦史, 井内徹
    • Organizer
      SICE 2008
    • Place of Presentation
      Tokyo
    • Year and Date
      2008-08-20
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] 真空加熱炉内におけるハイブリッド型表面温度センサの適用2008

    • Author(s)
      後上敦史, 井内徹
    • Organizer
      第69回応用物理学会学術講演会
    • Place of Presentation
      中部大学
    • Year and Date
      2008-09-03
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] A hybrid-type surface temperature sensor and its application to the development of emissivity compensated radiation thermometry2008

    • Author(s)
      後上敦史, 井内徹
    • Organizer
      ICCAS 2008
    • Place of Presentation
      Seoul (Korea)
    • Year and Date
      2008-10-17
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] Emissivity compensated radiation thermometry of silicon wafers during the growth of oxide film2008

    • Author(s)
      井内徹, 後上敦史
    • Organizer
      International Conference on Temperature and Thermal Measurements
    • Place of Presentation
      Beijing (China)
    • Year and Date
      2008-10-21
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] Emissivity compensated radiation thermometry of silicon wafers during the growth of oxide film2008

    • Author(s)
      T. Iuchi, A. Gogami
    • Organizer
      International Conference on Temperature and Thermal Measurements
    • Place of Presentation
      Beijing
    • Year and Date
      2008-10-21
    • Data Source
      KAKENHI-PROJECT-20560403
  • [Presentation] 一研究者による放射測温実用化研究のあしあと

    • Author(s)
      井内徹
    • Organizer
      日本学術振興会 産業計測第36委員会
    • Place of Presentation
      弘済会館(東京)
    • Invited
    • Data Source
      KAKENHI-PROJECT-23560511

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