IUCHI Tohru 井内徹

… Alternative Names

井内徹イウチトオル

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Researcher Number	20232142
Other IDs
External Links
Affiliation (Current)	2025: 東洋大学, 大学共同利用機関等の部局等 , 客員研究員
Affiliation (based on the past Project Information) *help	2013: 東洋大学, 工業技術研究所, 客員研究員 2009 – 2012: Toyo University, 理工学部, 教授 2008: Toyo University, 工学部, 教授 2001 – 2006: 東洋大学, 工学部, 教授 1998 – 1999: 東洋大学, 工学部, 教授 1994 – 1995: 東洋大学, 工学部, 教授
Review Section/Research Field	Principal Investigator Measurement engineering / Measurement engineering / 計測・制御工学
Keywords	Principal Investigator 放射率 / 偏光 / 薄膜 / 酸化膜 / 放射測温 / 温度計測 / 半導体 / polarization / radiation thermometry / emissivity … More / 酸化 / temperature measurement / thin film / シリコン / 光学定数 / 透過率 / シリコンウエハ / thermal time constant / heat transfer / semiconductor / photophysics of solid / 熱伝達 / 熱時定数 / 熱接触抵抗 / 光物性 / oxide film / silicon / semiconductor materials / 放射測温法 / 半導体材料 / optical constants / modeling / oxidation / silicon wafer / ウエハー / 薄膜成長 / シリコン半導体 / ABSORPTION / SCATTERING / SURFACE ROUGHNESS / OXIDE FILM / THIN FILM / OPTICAL CONSTANT / POLARIZATION / EMISSIVITY / 温度 / 干渉 / 表面粗さ / 吸収 / 散乱 / Metal / Infrared / Optical sensor / stray radiation / Blackbody radiation / Temperature measurement / Emissivity / Radiation thermometry / 金属 / 赤外線 / 光センサ / 迷光雑音 / 黒体放射 / 背光放射雑音 / 放射輝度 / 反射率 / 非平衡温度場 / 背光放射 / 背光雑音 / in-situ計測 / バンドギャップ / 窒化膜 Less

Research Projects
(7 results)
Research Products
(202 results)

Design and construction of radiation thermometry systems under extremely nonequilibrium temperature conditionPrincipal Investigator
- Principal Investigator
  
  IUCHI Tohru
- Project Period (FY)
  2011 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Measurement engineering
- Research Institution
  Toyo University
In-situ radiation thermometry of semiconductor materials and its calibration systemPrincipal Investigator
- Principal Investigator
  
  IUCHI Tohru
- Project Period (FY)
  2008 – 2010
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Measurement engineering
- Research Institution
  Toyo University
Research of the in-situ temperature measurement system for silicon wafers.Principal Investigator
- Principal Investigator
  
  IUCHI Tohru
- Project Period (FY)
  2005 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Measurement engineering
- Research Institution
  Toyo University
Study on the method for the measurements of both emissivity and temperature of semiconductor materials.Principal Investigator
- Principal Investigator
  
  IUCHI Tohru
- Project Period (FY)
  2003 – 2004
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Measurement engineering
- Research Institution
  Toyo University
Research on a method of temperature measurement for a silicon semiconductor waferPrincipal Investigator
- Principal Investigator
  
  IUCHI Tohru
- Project Period (FY)
  2001 – 2002
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Measurement engineering
- Research Institution
  Toyo University
MODELING OF EMISSIVITIES OF METALS AND SEMICONDUCTORSPrincipal Investigator
- Principal Investigator
  
  IUCHI Tohru
- Project Period (FY)
  1998 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Measurement engineering
- Research Institution
  TOYO UNIVERSITY
RESEARCH ON RADIATION THERMOMETRY OF NEAR ROOM TEMPERATUREPrincipal Investigator
- Principal Investigator
  
  IUCHI Tohru
- Project Period (FY)
  1994 – 1995
- Research Category
  
  Grant-in-Aid for General Scientific Research (C)
- Research Field
  
  計測・制御工学
- Research Institution
  TOYO UNIVERSITY

[Book] 放射測温法の問題点と実用化へのアプローチ、温度計測基礎講座2013
- Author(s)
  井内徹
- Publisher
  計測自動制御学会温度計測部会
- Data Source
  KAKENHI-PROJECT-23560511
[Book] SiウエハのIn-situ温度測定技術2013
- Author(s)
  井内徹
- Total Pages
  54
- Publisher
  電子ジャーナル
- Data Source
  KAKENHI-PROJECT-23560511
[Book] 放射測温法の問題点と実用化へのアプローチ　温度計測基礎講座2013
- Author(s)
  井内徹
- Publisher
  計測自動制御学会
- Data Source
  KAKENHI-PROJECT-23560511
[Book] Siウェーハのin-situ温度測定技術徹底解説2013
- Author(s)
  井内徹
- Total Pages
  54
- Publisher
  電子ジャーナル
- Data Source
  KAKENHI-PROJECT-23560511
[Book] SiウエーハのIn-situ温度測定技術　徹底解説2012
- Author(s)
  井内徹
- Total Pages
  86
- Publisher
  電子ジャーナル
- Data Source
  KAKENHI-PROJECT-23560511
[Book] Radiometric Temperature Measurements(edited by Z. M. Zhang, B.K. Tsai and G. Machin)(Thermomettry in Steel Production, in Chapter 4, Experimental Methods in the Physical Sciences, Vol.43)2010
- Author(s)
  T.Iuchi, Y.Yamada, M.Sugiura, A.Torao
- Publisher
  The Netherlands, Academic Press
- Data Source
  KAKENHI-PROJECT-20560403
[Book] Thermomettry in Steel Production, in Chapter 4, Experimental Methods in the Physical Sciences, Vol. 43, Radiometric Temperature Measurements2009
- Author(s)
  T.Iuchi, Y.Yamada, M.Sugiura, A.Torao
- Total Pages
  61
- Publisher
  Academic Press
- Data Source
  KAKENHI-PROJECT-20560403
[Journal Article] Non-contact temperature measurement of silicon wafers based on the combined use of transmittance and radiance2014
- Author(s)
  Y. Toyoda, T. Seo and T. Iuchi
- Journal Title
  
  Measurement
  
  Volume: vol. 51 Pages: 393-399
- DOI
  10.1016/j.measurement.2014.02.023
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560511
[Journal Article] A method of reducing background radiance for emissivity-compensated radiation thermometry of silicon wafers2013
- Author(s)
  T. Iuchi, Y. Toyoda and T. Seo
- Journal Title
  
  Review of Scientific Instruments
  
  Volume: vol. 84 Issue: 2 Pages: 249041-1249047
- DOI
  10.1063/1.4791793
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560511
[Journal Article] Emissivity properties of silicon wafers and application to radiation thermometry2013
- Author(s)
  T. Iuchi and T. Seo
- Journal Title
  
  Temperature : Its Measurement and Control in Science and Industry
  
  Volume: vol. 8 Pages: 710-715
- DOI
  10.1063/1.4819629
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560511
[Journal Article] Radiation thermometry of silicon wafers based on emissivity-invariant condition2011
- Author(s)
  T.Iuchi, T.Seo
- Journal Title
  
  Applied Optics Vol.50, No.3
  
  Pages: 323-328
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560403
[Journal Article] Radiation thermometry of silicon wafers based on emissivity-invariant condition2011
- Author(s)
  T. Iuchi and T. Seo
- Journal Title
  
  Applied Optics
  
  Volume: vol. 50 Issue: 3 Pages: 323-328
- DOI
  10.1364/ao.50.000323
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23560511
[Journal Article] Radiation thermometry of silicon wafers based on emissivity-invariant condition2011
- Author(s)
  Tohru Iuchi, Tomohiro Seo
- Journal Title
  
  Applied Optics
  
  Volume: 50 Pages: 323-328
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560403
[Journal Article] Simultaneous measurement of emissivity and temperature of silicon wafers based upon a polarization technique2010
- Author(s)
  T.Iuchi, A.Gogami
- Journal Title
  
  Measurement (in print)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560403
[Journal Article] Simultaneous measurement of emissivity and temperature of silicon wafers using a polarization technique2010
- Author(s)
  T.Iuchi, A.Gogami
- Journal Title
  
  Measurement Vol.43, No.5
  
  Pages: 645-651
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560403
[Journal Article] Temperature measurement of semitransparent silicon wafer based upon absorption edge wavelength shift2010
- Author(s)
  Tohru Iuchi, Tomohiro Seo
- Journal Title
  
  International Journal of Thermophysics
  
  Volume: 31 Pages: 1533-1544
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560403
[Journal Article] Temperature measurement of semitransparent silicon wafer based upon absorption edge wavelength shift2010
- Author(s)
  T.Iuchi, T.Seo
- Journal Title
  
  International Journal of Thermodynamics Vol.31, No.8
  
  Pages: 1533-1544
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560403
[Journal Article] Simultaneous measurement of emissivity and temperature of silicon wafers using a polarization technique2010
- Author(s)
  Tohru Iuchi, Atsushi Gogami
- Journal Title
  
  Measurement
  
  Volume: 43 Pages: 645-651
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560403
[Journal Article] Uncertainty of a hybrid surface temperature sensor for silicon wafers and its comparison with an embedded thermocouple2009
- Author(s)
  T.Iuchi, A.Gogami
- Journal Title
  
  Review of Scientific Instruments 12
  
  Pages: 1261091-1261093
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560403
[Journal Article] Uncertainty of a hybrid surface temperature sensor for silicon thermocouple2009
- Author(s)
  T.Iuchi, A.Gogami
- Journal Title
  
  Review of Scientific Instruments Vol.80, No.12
  
  Pages: 1261091-1261093
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560403
[Journal Article] シリコン半導体ウエハのin situ温度計測2008
- Author(s)
  井内徹
- Journal Title
  
  計測と制御 Vol.47, No.5
  
  Pages: 395-402
- NAID
  10021115066
- Data Source
  KAKENHI-PROJECT-20560403
[Journal Article] Rapid-response hybrid-type surface temperature sensor2008
- Author(s)
  K. Hiraka, R. Shinagawa, A. Gogami, T. Iuchi
- Journal Title
  
  International Journal of Thermophysics 29
  
  Pages: 1166-1173
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560403
[Journal Article] シリコン半導体ウエハのin situ温度計測2008
- Author(s)
  井内徹
- Journal Title
  
  計測と制御 47
  
  Pages: 395-402
- NAID
  10021115066
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560403
[Journal Article] Rapid response hybrid-type surface temperature sensor2008
- Author(s)
  K.Hiraka, R.Shinagawa, A.Gogami, T.Iuchi
- Journal Title
  
  International Journal of Thermophysics Vol.29, No.2
  
  Pages: 1166-1173
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560403
[Journal Article] Rapid response hybrid-type surface temperature sensor,2007
- Author(s)
  A.GOGAMI, K, HIRAKA, T.IUCHI
- Journal Title
  
  The 54^<th> Spring Meeting, The Japan Society of Applied Physics and Related Societies, March, Sagamihara No. 1
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Optical temperature measurement of silicon wafers using band gap shift,2007
- Author(s)
  R.SHINAGAWA, T.IUCHI
- Journal Title
  
  The 54^<th> Spring Meeting, The Japan Society of Applied Physics and Related Societies, March, Sagamihara No. 1
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] 高速ハイブリッド型表面温度センサ2007
- Author(s)
  後上敦史, 平加健介, 井内徹
- Journal Title
  
  第54回応用物理学関係連合講演会予稿集 No.1, 28Pb-11
  
  Pages: 218-218
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] バンドギャップを利用したシリコンウエハの光学的測温法2007
- Author(s)
  品川亮, 井内徹
- Journal Title
  
  第54回応用物理学関係連合講演会予稿集 No.1, 28Pb-10
  
  Pages: 218-218
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] 透過特性を利用したSiウエハの温度計測法の測温精度2006
- Author(s)
  品川亮, 井内徹
- Journal Title
  
  第67回応用物理学会学術講演会予稿集 No.1, 31p-G-3
  
  Pages: 189-189
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Temperature measurement of silicon wafers by transmissivity sensing2006
- Author(s)
  R.SHINAGAWA, T.IWASAKI, T.IUCHI
- Journal Title
  
  Proc. of SICE-ICCAS
  
  Pages: 3346-3350
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] ハイブリッド型表面温度センサー2006
- Author(s)
  平加健介, 井内徹
- Journal Title
  
  第23回計測自動制御学会センシングフォーラム
  
  Pages: 234-239
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] 高温域におけるSi半導体ウエハの透過率測定2006
- Author(s)
  品川亮, 井内徹
- Journal Title
  
  第53回応用物理学関係連合講演会予稿集 No.1, 22p-K-4
  
  Pages: 193-193
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Radiation thermometry for silicon wafers by use of polarized radiances2006
- Author(s)
  T.IUCHI, K.HIRAKA
- Journal Title
  
  Optical Engineering (In print)
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Radiation thermometry for semitransparent silicon wafers at middle temperature,2006
- Author(s)
  Y.IKEDA, T.IUCHI
- Journal Title
  
  The 67^<th> Autumn Meeting, The Japan Society of Applied Physics, August, Kusatsu No. 1, 31p-G-2
  
  Pages: 189-189
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Temperature measurement of silicon wafers using characteristics o transmissivity,2006
- Author(s)
  R.SHINAGAWA, T.IUCHI
- Journal Title
  
  23th Sensing Forum, October, Tsukuba
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] ハイブリッド型放射測温法2006
- Author(s)
  平加健介, 井内徹
- Journal Title
  
  第53回応用物理学関係連合講演会 No.1(In print)
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Non-contact temperature measurement of semitrasparent silicon wafers2006
- Author(s)
  Y.IKEDA, T.IUCHI
- Journal Title
  
  Proc. of SICE-ICCAS
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] ハイブリッド型表面温度センサー2006
- Author(s)
  平加健介, 井内徹
- Journal Title
  
  第23回センシングフォーラム
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] ハイブリッド型放射温度計の測温精度2006
- Author(s)
  平加健介, 井内徹
- Journal Title
  
  第67回応用物理学会学術講演会 NO.1, 31p-G-1
  
  Pages: 189-189
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] ウエハの偏光反射率の測定と偏光放射率モデルの関係2006
- Author(s)
  平加健介, 井内徹
- Journal Title
  
  第66回応用物理学会学術講演会予稿集 No.1, 9p-ZM-13
  
  Pages: 137-137
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] ハイブリッド型放射温度計の測温精度2006
- Author(s)
  平加健介, 井内徹
- Journal Title
  
  第67回応用物理学会学術講演会予稿集 No.1, 31p-G-1
  
  Pages: 189-189
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Radiation thermometry for silicon wafers by use of polarized radiances2006
- Author(s)
  T.IUCHI, K.HIRAKA
- Journal Title
  
  Optical Engineering 45-9
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] 半透明体Si半導体ウエハのin-situ放射測温法2006
- Author(s)
  池田義和, 井内徹
- Journal Title
  
  第53回応用物理学関係連合講演会予稿集 No.1, 22p-K-5
  
  Pages: 193-193
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Radiation thermometry for silicon wafers by use of polarized radiances2006
- Author(s)
  T.IUCHI, K.HIRAKA
- Journal Title
  
  Optical Engineering 45・9
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Radiation thermometry for semitransparent silicon wafers near room temperature,2006
- Author(s)
  Y.IKEDA, T.IUCHI
- Journal Title
  
  The 53^<rd> Spring Meeting, The Japan Society of Applied Physics and Related Societies, March, Tokyo No. 1, 22p-K-5
  
  Pages: 193-193
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Hybrid-type sensor for in situ temperature measurement,2006
- Author(s)
  T.IUCHI, K.HIRAKA
- Journal Title
  
  Review of Scientific Instruments Vol. 77, No. 11
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] 透過率特性を利用したSiウエハの温度計測法の測温精度2006
- Author(s)
  品川亮, 井内徹
- Journal Title
  
  第67回応用物理学会学術講演会 NO.1, 31p-G-3
  
  Pages: 189-189
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] ハイブリッド型放射測温法2006
- Author(s)
  平加健介, 井内徹
- Journal Title
  
  第53回応用物理学関係連合講演会予稿集 No.1 22p-K-3
  
  Pages: 192-192
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] 半透明体Siウエハの中温域における放射測温法2006
- Author(s)
  池田義和, 井内徹
- Journal Title
  
  第67回応用物理学会学術講演会 NO.1, 31p-G-2
  
  Pages: 189-189
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] 半透明体Siウエハの中温域における放射測温法2006
- Author(s)
  池田義和, 井内徹
- Journal Title
  
  第67回応用物理学会学術講演会予稿集 No.1, 31p-G-2
  
  Pages: 189-189
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Transmissivity measurement of Si semiconductor wafers at high temperature,2006
- Author(s)
  R.SHINAGAWA, T.IUCHI
- Journal Title
  
  The 53^<rd> Spring Meeting, The Japan Society of Applied Physics and Related Societies, March, Tokyo No. 1, 22p-K-4
  
  Pages: 193-193
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Radiation thermometry for silicon wafers by use of polarized radiances,2006
- Author(s)
  T.IUCHI, K.HIRAKA
- Journal Title
  
  Optical Engineering Vol. 45, No. 9
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Temperature measurement of silicon wafers by transmissivity sensing,2006
- Author(s)
  R.SHINAGAWA, T.IWASAKI, T.IUCHI
- Journal Title
  
  Proc. of SICE-ICCAS, October, Busan
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Radiation thermometry of semitransparent silicon wafers near room temperature,2006
- Author(s)
  T.IUCHI, Y.IKEDA
- Journal Title
  
  Proc. of SPIE (Thermosense XXVIII), April, Orlando
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] 半透明体Siウエハのin-situ放射測温法2006
- Author(s)
  池田義和, 井内徹
- Journal Title
  
  第53回応用物理学関係連合講演会 No.1(In print)
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Non-contact temperature measurement of semitransparent silicon wafers,2006
- Author(s)
  Y.IKEDA, T.IUCHI
- Journal Title
  
  Proc. of SICE-ICCAS, October, Busan
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Non-contact temperature measurement of semitransparent silicon wafers2006
- Author(s)
  Y.IKEDA, T.IUCHI
- Journal Title
  
  Proc. of SICE-ICCAS
  
  Pages: 5277-5282
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Radiation thermometry of semitransparent silicon wafers near room temperature2006
- Author(s)
  T.IUCHI, Y.IKEDA
- Journal Title
  
  Proc. of SPIE 6205 (28^<th> Thermosense)
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Hybrid-type surface thermometer2006
- Author(s)
  T.IUCHI, K.HIRAKA
- Journal Title
  
  Proc. of 18^<th> IMEKO WORLD CONGRESS
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Accuracy of temperature measurement for silicon wafers using transmissivity characteristic,2006
- Author(s)
  R.SHINAGAWA, T.IUCHI
- Journal Title
  
  The 67^<th> Autumn Meeting, The Japan Society of Applied Physics, August, Kusatsu No. 1, 31p-G-2
  
  Pages: 189-189
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Hybrid type surface thermometer2006
- Author(s)
  T.IUCHI, K.HIRAKA
- Journal Title
  
  Proc. of 18th IMEKO WORLD CONGRESS
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Accuracy of temperature measurement by hybrid-type radiation thermometer,2006
- Author(s)
  K.HIRAKA, T.IUCHI
- Journal Title
  
  The 67^<th> Autumn Meeting, The Japan Society of Applied Physics, August, Kusatsu No. 1, 31p-G-1
  
  Pages: 189-189
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Development of hybrid-type thermometer,2006
- Author(s)
  K.HIRAKA, T.IUCHI
- Journal Title
  
  23th Sensing Forum, October, Tsukuba
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] 酸化膜付半透明体Siウエハの放射測温法2006
- Author(s)
  池田義和, 井内徹
- Journal Title
  
  第23回センシングフォーラム
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Hybrid type surface thermometer,2006
- Author(s)
  T.IUCHI, K.HIRAKA
- Journal Title
  
  Proc. of 18^<th> IMEKO WORLD CONGRESS, September, Rio de Janeiro
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] 高温域におけるSi半導体ウエハの透過率測定2006
- Author(s)
  品川亮, 井内徹
- Journal Title
  
  第53回応用物理学関係連合講演会 No.1(In print)
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] 酸化膜付半透明体Siウエハの放射測温法2006
- Author(s)
  池田義和, 井内徹
- Journal Title
  
  第23回計測自動制御学会センシングフォーラム
  
  Pages: 230-233
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Hybrid-type temperature sensor for in situ measurement2006
- Author(s)
  T.IUCHI, K.HIRAKA
- Journal Title
  
  Review of Scientific Instruments 77・11
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Hybrid-type temperature sensor for in situ measurement2006
- Author(s)
  T.IUCHI, K.HIRAKA
- Journal Title
  
  Review of Scientific Instruments 77-11
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Hybrid type radiation thermometry,2006
- Author(s)
  K.HIRAKA, T.IUCHI
- Journal Title
  
  The 53^<rd> Spring Meeting, The Japan Society of Applied Physics and Related Societies, March, Tokyo No. 1, 22p-K-3
  
  Pages: 192-192
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Hybrid-type surface thermometer at high temperature2006
- Author(s)
  K.HIRAKA, T.IUCHI
- Journal Title
  
  Proc. of SICE-ICCAS
  
  Pages: 3330-3335
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] 透過特性を利用したシリコンウエハの温度測定法2006
- Author(s)
  品川亮, 井内徹
- Journal Title
  
  第23回センシングフォーラム
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Radiation thermometry o semitransparent silicon wafers with oxide surface layer,2006
- Author(s)
  Y.IKEDA, T.IUCHI
- Journal Title
  
  23th Sensing Forum, October, Tsukuba
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] 透過特性を利用したシリコンウエハの温度計測法2006
- Author(s)
  品川亮, 井内徹
- Journal Title
  
  第23回計測自動制御学会センシングフォーラム
  
  Pages: 225-229
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Radiation thermometry of semitransparent silicon wafers near room temperature2006
- Author(s)
  T.IUCHI, Y.IKEDA
- Journal Title
  
  Proc. of SPIE6205 (28th Thermosense)
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Emissivity behaviors of silicon wafers with different resistivity,2005
- Author(s)
  T.OHKUBO, K.HIRAKA, T.IUCHI
- Journal Title
  
  The 52^<nd> Spring Meeting, The Japan Society of Applied Physics and Related Societies, April, Saiama No. 1, lp-M-5
  
  Pages: 209-209
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Emissivity behaviors of silicon wafers with different resistivity.2005
- Author(s)
  K.Hiraka, T.Ohkubo, T.Iuchi
- Journal Title
  
  The 52^<nd> Spring Meeting, Extended Abstracts, The Japan Society of Applied Physics and Related Societies No.1, 1p-M-5
  
  Pages: 209-209
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Study on emissivity behaviors of silicon wafers near room temperature.2005
- Author(s)
  Y.Ikeda, T.Nojima, K.Hashimoto, T.Yamasaki, H.Sugawara, T.Iuchi
- Journal Title
  
  Proc.of the 1st Symposium on Sensor Photonics, Sensor Photonics Research Center, Toyo Univ.February
  
  Pages: 95-96
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Transmissivity measurement of silicon wafers with different resistivity and application to radiation thermometry.2005
- Author(s)
  Y.Ikeda, H.Sugawara, T.Iuchi
- Journal Title
  
  The 52^<nd> Spring Meeting, Extended Abstracts, The Japan Society of Applied Physics and Related Societies No.1, 1p-M-6
  
  Pages: 210-210
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] 高温域におけるSiウエハの放射率挙動の研究2005
- Author(s)
  平加健介, 大久保智裕, 井内徹
- Journal Title
  
  第1回先端光応用計測研究センター成果報告会要旨集 2月
  
  Pages: 91-92
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Emissivity-compensated radiation thermometry of silicon wafers at high temperature2005
- Author(s)
  K.Hiraka, T.Ohkubo, T.Iuchi
- Journal Title
  
  Proc. of SICE
  
  Pages: 1381-1385
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Study on emissivity behaviors of silicon wafers at high temperature.2005
- Author(s)
  K.Hiraka, T.Ohkubo, T.Iuchi
- Journal Title
  
  Proc.of the 1st Symposium on Sensor Photonics, Sensor Photonics Research Center, Toyo Univ.February
  
  Pages: 91-92
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] 半透明体Si半導体ウエハの常温付近の放射測温法2005
- Author(s)
  池田義和, 井内徹
- Journal Title
  
  第66回応用物理学会学術講演会 9p-ZM-14
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] 高温域におけるSiウエハの放射率補正放射測温法2005
- Author(s)
  平加健介, 井内徹
- Journal Title
  
  第22回計測自動制御学会センシングフォーラム
  
  Pages: 387-392
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] 半透明体Si半導体ウエハの常温付近の放射測温法2005
- Author(s)
  池田義和, 井内徹
- Journal Title
  
  第66回応用物理学会学術講演会予稿集 No.1, 9p-ZM-14
  
  Pages: 137-137
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Emissivity-compensated radiation thermometry of silicon wafers at high temperature,2005
- Author(s)
  K.HIRAKA, T.OHKUBO, T.IUCHI
- Journal Title
  
  Proc. of SICE, August, Okayama
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Radiation thermometry of semitransparent silicon wafers2005
- Author(s)
  Y.IKEDA, H.SUGAWARA, T.IUCHI
- Journal Title
  
  Proc. of SICE
  
  Pages: 2630-2634
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Transmissivity measurement of silicon wafers with different resistivity and application to radiation thermometry,2005
- Author(s)
  H.SUGAWARA, Y.IKEDA, T.IUCHI
- Journal Title
  
  The 52^<nd> Spring Meeting, The Japan Society of Applied Physics and Related Societies, April, Saiama No. 1, lp-M-6
  
  Pages: 210-210
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Radiation thermometry of semitransparent silicon wafers2005
- Author(s)
  Y.Ikeda, H.Sugawara, T.Iuchi
- Journal Title
  
  Proc. of SICE
  
  Pages: 2630-2634
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] 電気抵抗率の違いによるSiウエハの放射率変化2005
- Author(s)
  平加健介, 大久保智裕, 井内徹
- Journal Title
  
  第52回応用物理学関係連合講演会 3月,No.1 1p-M-5
  
  Pages: 209-209
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] 電気抵抗率の違いによるSiウエハの放射率変化2005
- Author(s)
  平加健介, 大久保智裕, 井内徹
- Journal Title
  
  第52回応用物理学関係連合講演会
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Radiation thermometry for silicon wafers2005
- Author(s)
  T.Iuchi, Y.Ikeda, K.Hiraka
- Journal Title
  
  Proc. Of SPIE 587819
  
  Pages: 1-10
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Radiation thermometry for semitransparent silicon wafers near room temperature,2005
- Author(s)
  Y.IKEDA, T.IUCHI
- Journal Title
  
  The 66^<th> Autumn Meeting, The Japan Society of Applied Physics, September, Tokushima No. 1, 9p-ZM-14
  
  Pages: 137-137
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] 電気抵抗率の違いによるSiウエハの透過率測定と常温域放射測温法への応用2005
- Author(s)
  菅原弘司, 池田義和, 井内徹
- Journal Title
  
  第52回応用物理学関係連合講演会
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] 常温域におけるSiウエハの放射率挙動の研究2005
- Author(s)
  池田義和, 野島孝, 橋本克己, 山崎徹, 菅原弘司, 井内徹
- Journal Title
  
  第1回先端光応用計測研究センター成果報告会要旨集 2月
  
  Pages: 93-94
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Radiation thermometry for silicon wafers,2005
- Author(s)
  T.IUCHI, Y.IKEDA, K.HIRAKA
- Journal Title
  
  Proc. of SPIE(Optics ＆ Photonics), August, San Diego
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Radiation thermometry o semitransparent silicon wafers near room temperature,2005
- Author(s)
  Y.IKEDA, T.IUCHI
- Journal Title
  
  22^<nd> Sensing Forum, September, Osaka
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] 電気抵抗率の違いによるSiウエハの透過率測定と常温域放射測温法への応用2005
- Author(s)
  菅原弘司, 池田義和, 井内徹
- Journal Title
  
  第52回応用物理学関係連合講演会 3月,No.1 1p-M-6
  
  Pages: 210-210
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] 常温付近の半透明体Siウエハの放射測温法2005
- Author(s)
  池田義和, 井内徹
- Journal Title
  
  第22回センシングフォーラム
  
  Pages: 387-392
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Radiation thermometry for silicon wafers2005
- Author(s)
  T.IUCHI, Y.IKEDA, K.HIRAKA
- Journal Title
  
  Proc. of SPIE
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] 常温付近の半透明体Siウエハの放射測温法2005
- Author(s)
  池田義和, 井内徹
- Journal Title
  
  第22回計測自動制御学会センシングフォーラム
  
  Pages: 393-397
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] 電気抵抗率の違いによるSiウエハの放射率変化2005
- Author(s)
  大久保智裕, 平加健介, 井内徹
- Journal Title
  
  第52回応用物理学関係連合講演会予稿集 No.1, 1p-M-5
  
  Pages: 209-209
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Emissivity-compensated radiation thermometry of silicon wafers at high temperature2005
- Author(s)
  K.HIRAKA, T.OHKUBO, T.IUCHI
- Journal Title
  
  Proc. of SICE
  
  Pages: 1381-1385
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Development of a measurement apparatus of specular reflectivity and its application to silicon wafers.2005
- Author(s)
  T.Suzuki, T.Miyazaki, T.Tadaki, T.Iuchi
- Journal Title
  
  Proc.of the 1st Symposium on Sensor Photonics, Sensor Photonics Research Center, Toyo Univ.February
  
  Pages: 95-96
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Radiation thermometry of semitransparent silicon wafers,2005
- Author(s)
  Y.IKEDA, H.SUGAWARA, T.IUCHI
- Journal Title
  
  Proc. of SICE, August, Okayama
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] ウエハの偏光反射率の測定と偏光放射率モデルの関係2005
- Author(s)
  平加健介, 井内徹
- Journal Title
  
  第66回応用物理学会学術講演会 9p-ZM-13
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] 双方向角度制御した反射率測定装置の開発とSiウエハへの応用2005
- Author(s)
  鈴木健仁, 宮崎孝行, 但木徹, 井内徹
- Journal Title
  
  第1回先端光応用計測研究センター成果報告会要旨集 2月
  
  Pages: 95-96
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] 電気抵抗率の違いによるSiウエハの透過率測定と常温域放射測温法への応用2005
- Author(s)
  菅原弘司, 池田義和, 井内徹
- Journal Title
  
  第52回応用物理学関係連合講演会予稿集 No.1, 1p-M-6
  
  Pages: 210-210
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Relation between polarized reflectivity measurement and polarized emissivity modeling of wafers,2005
- Author(s)
  K.HIRAKA, T.IUCHI
- Journal Title
  
  The 66^<th> Autumn Meeting, The Japan Society of Applied Physics, September, Tokushima No. 1, 9p-ZM-13
  
  Pages: 137-137
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] 高温域におけるSiウエハの放射率補正放射測温法2005
- Author(s)
  平加健介, 井内徹
- Journal Title
  
  第22回センシングフォーラム
  
  Pages: 393-397
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Emissivity compensated radiation thermometry of silicon wafers at high temperature,2005
- Author(s)
  K.HIRAKA, T.IUCHI
- Journal Title
  
  22^<nd> Sensing Forum, September, Osaka, pp
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Journal Article] Polarized radiation thermometry of silicon wafers at high temperature2004
- Author(s)
  T.Ohkubo, T.Iuchi
- Journal Title
  
  Proc.of SICE2004
  
  Pages: 654-657
- NAID
  130005441152
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] ブリュースター角を利用した常温付近におけるSi半導体ウエハの放射測温法2004
- Author(s)
  菅原弘司, 大久保智裕, 井内徹
- Journal Title
  
  第65回応用物理学会学術講演会予稿集 No.1
  
  Pages: 134-134
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Some considerations for a method that simultaneously measure the temperature and emissivity of a metal in a high temperature furnace.2004
- Author(s)
  T.Iuchi, T.Furukawa
- Journal Title
  
  Review of Scientific Instruments 75-12
  
  Pages: 5326-5332
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Polarized radiation thermometry of silicon wafers at high temperature2004
- Author(s)
  T.Ohkubo, T.Iuchi
- Journal Title
  
  Proc.of SICE2004 August Sapporo
  
  Pages: 654-657
- NAID
  130005441152
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] ブリュースター角を利用した常温付近におけるSi半導体ウエハの放射測温怯2004
- Author(s)
  菅原弘司, 大久保智裕, 井内徹
- Journal Title
  
  第65回応用物理学会学術講演会予稿集 9月,No.1 3p-ZQ-10
  
  Pages: 134-134
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Measurement of optical properties of Si wafers and their applications to radiation thermometry.2004
- Author(s)
  H.Sugawara, T.Ohkubo, T.Iuchi
- Journal Title
  
  21^<st> Sensing Forum, Tokyo
  
  Pages: 123-127
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Polarized transmissivity measurements of a Si semiconductor wafer at high temperature.2004
- Author(s)
  T.Ohkubo, H.Sugawara, T.Iuchi
- Journal Title
  
  The 51^<st> Spring Meeting, Extended Abstracts, The Japan Society of Applied Physics and Related Societies No.1, 29a-YB-10
  
  Pages: 174-174
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Si半導体ウエハの光学的特牲の測定と放射測温法への応用2004
- Author(s)
  菅原弘司, 大久保智裕, 井内徹
- Journal Title
  
  第21回センシングフォーラム 9月東京
  
  Pages: 123-127
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Polarized radiation thermometry of silicon wafers near room temperature2004
- Author(s)
  H.Sugawara, T.Iuchi
- Journal Title
  
  Proc.of SICE2004
  
  Pages: 646-649
- NAID
  130006960396
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Measurement of emissivity and transmissivity of Si silicon wafers at high temperature.2004
- Author(s)
  H.Sugawara, T.Ohkubo, T.Iuchi
- Journal Title
  
  The 51^<st> Spring Meeting, Extended Abstracts, The Japan Society of Applied Physics and Related Societies No.1, 29p-YB-9
  
  Pages: 177-177
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] 高温下におけるSiウエハの偏光透過率測定2004
- Author(s)
  大久保智裕, 菅原弘司, 井内徹
- Journal Title
  
  第51回応用物理学関係連合講演会 3月,No.1 29a-YB-10
  
  Pages: 174-174
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] A method for the measurement of surface temperature of a metal in a high temperature furnace.2004
- Author(s)
  T.Furukawa, N.Sato, T.Iuchi
- Journal Title
  
  The 51^<st> Spring Meeting, Extended Abstracts, The Japan Society of Applied Physics and Related Societies No.3, 29p-R-5
  
  Pages: 1106-1106
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Polarized radiation thermometry of silicon wafers near room temperature2004
- Author(s)
  H.Sugawara, T.Iuchi
- Journal Title
  
  Proc.of SICE2004 August Sapporo
  
  Pages: 646-649
- NAID
  130006960396
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] 常温域におけるSiウエハの放射率・透過率測定2004
- Author(s)
  菅原弘司, 大久保智裕, 井内徹
- Journal Title
  
  第51回応用物理学関係連合講演会 3月,No.1 29p-YB-9
  
  Pages: 177-177
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Measurements of emissivity and transmissivity of silicon wafers at high temperature2004
- Author(s)
  Y.Chimata, N.Shimamura, H.Endo, T.Ohkubo, T.Iuchi
- Journal Title
  
  Proc.of the 3^<rd> Conference of Research Institute of Industrial Technology, Toyo Univ.February
  
  Pages: 17-18
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] 偏光輝度を利用したSiウエハの放射測温法2004
- Author(s)
  大久保智裕, 菅原弘司, 井内徹
- Journal Title
  
  第65回応用物理学会学術講演会予稿集 9月,No.1 3p-ZQ-9
  
  Pages: 133-133
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Radiation thermometry of a steel sheet in a high temperature furnace.2004
- Author(s)
  T.Furukawa, N.Sato, T.Iuchi
- Journal Title
  
  Trans.of the Society of Instruments and Control Engineers 40-4
  
  Pages: 376-381
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Measurements of emissivity and transmissivity of temperature by use of Brewster angle.2004
- Author(s)
  H.Sugawara, T.Ohkubo, T.Iuchi
- Journal Title
  
  The 65^<th> Autumn Meeting, Extended Abstracts, The Japan Society of Applied Physics No.1, 3p-ZQ-10
  
  Pages: 134-134
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] 常温付近におけるSi半導体ウエハの放射率・透過率測定2004
- Author(s)
  山本拡樹, 笹原吉弘, 菅原弘司, 井内徹
- Journal Title
  
  第3回東洋大学工業技術研究所講演会予稿集 2月
  
  Pages: 19-20
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Some considerations for a method that simultaneously measures the temperature and emissivity of a metal in a high temperature furnace2004
- Author(s)
  T.Iuchi, T.Furukawa
- Journal Title
  
  Review of Scientific Instruments 75・12
  
  Pages: 5326-5332
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Radiation thermometry of silicon wafers by use of polarized radiation.2004
- Author(s)
  T.Ohkubo, H.Sugawara, T.Iuchi
- Journal Title
  
  The 65^<th> Autumn Meeting, Extended Abstracts, The Japan Society of Applied Physics No.1, 3p-ZQ-9
  
  Pages: 133-133
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Polarized radiation thermometry of silicon wafers at high temperature.2004
- Author(s)
  T.Ohkubo, T.Iuchi
- Journal Title
  
  Proc.of SICE 2004, Sapporo
  
  Pages: 654-657
- NAID
  130005441152
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Si半導体ウエハの光学的特性の測定と放射測温法への応用2004
- Author(s)
  菅原弘司, 大久保智裕, 井内徹
- Journal Title
  
  第21回センシングフォーラム
  
  Pages: 123-127
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] 高温炉内鋼板の放射測温法2004
- Author(s)
  古川徹, 井内徹
- Journal Title
  
  計測自動制御学会論文集 40・4
  
  Pages: 376-381
- NAID
  10012855017
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] 高温炉内鋼板の放射測温法2004
- Author(s)
  古川徹, 佐藤伸治, 井内徹
- Journal Title
  
  計測自動制御学会論文集 40-4
  
  Pages: 376-381
- NAID
  10012855017
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Some considerations for a method that simultaneously measure the temperature and emissivity of a metal in a high temperature furnace2004
- Author(s)
  T.Iuchi, T.Furukawa
- Journal Title
  
  Review of Scientific Instruments 75-12
  
  Pages: 5326-5332
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] 高温下におけるSi半導体ウエハの放射率・透過率測定2004
- Author(s)
  街寧, 島村直樹, 遠藤宏子, 大久保智裕, 井内徹
- Journal Title
  
  第3回東洋大学工業技術研究所講演会予稿集 2月
  
  Pages: 17-18
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Measurements of emissivity and transmissivity of silicon wafers near room temperature2004
- Author(s)
  H.Yamamoto, Y.Sasahara, H.Sugawara, T.Iuchi
- Journal Title
  
  Proc.of the 3^<rd> Conference of Research Institute of Industrial Technology, Toyo Univ.February
  
  Pages: 19-20
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] 高温炉内における金属表面温度計測法2004
- Author(s)
  古川徹, 佐藤伸治, 井内徹
- Journal Title
  
  第51回応用物理学関係連合講演会 3月,No.3 29p-R-5
  
  Pages: 1106-1106
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] 偏光輝度を利用したSiウエハの放射測温法2004
- Author(s)
  大久保智裕, 菅原弘司, 井内徹
- Journal Title
  
  第65回応用物理学会学術講演会予稿集 No.1
  
  Pages: 133-133
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Emissivity modeling of metals during the growth of oxide film and comparison of the model with experimental results.2003
- Author(s)
  T.Iuchi, T.Furukawa, S.Wada
- Journal Title
  
  Applied Optics 42-13
  
  Pages: 2317-2326
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Radiation thermometry in high temperature2003
- Author(s)
  T.Iuchi, T.Furukawa
- Journal Title
  
  Proc.of 17^<th> IMEKO WORLD CONGRESS
  
  Pages: 1632-1637
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] 高温炉内ステンレス鋼板の放射測温法2003
- Author(s)
  古川徹, 井内徹
- Journal Title
  
  第20回センシングフォーラム 9月東京
  
  Pages: 95-100
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Radiation pyrometry of stainless steel in a high temperature furnace.2003
- Author(s)
  T.Furukawa, T.Iuchi
- Journal Title
  
  20^<th> Sensing Forum, Tokyo
  
  Pages: 95-100
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Emissivity measurement of silicon semiconductor wafer near room temperature2003
- Author(s)
  S.Sugawara, T.Ohkubo, T.Fukushima, T.Iuchi
- Journal Title
  
  Proc.of SICE2003 August Fukui
  
  Pages: 580-583
- NAID
  130005440376
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Emissivity-compensated radiation thermometry of metals by the use of polarization in a high temperature furnace and near room temperature2003
- Author(s)
  T.Iuchi
- Journal Title
  
  International workshop on radiation measurements of the bodies with unknown emissivity November Moscow
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Emissivity-compensated radiation thermometry of metals by the use of polarization in a high temperature and near room temperature.2003
- Author(s)
  T.Iuchi
- Journal Title
  
  International workshop on radiation measurements of the bodies with unknown emissivity, November, Moscow
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] 高温下におけるSiウエハの放射率変化2003
- Author(s)
  大久保智裕, 菅原弘司, 井内徹
- Journal Title
  
  第64回応用物理学会学術講演会予稿集 8月,No.1 2a-ZH-9
  
  Pages: 127-127
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Emissivity modeling of metals during the growth of oxide film and comparison of the model with experimental results2003
- Author(s)
  T.Iuchi, T.Furukawa, S.Wada
- Journal Title
  
  Applied Optics 42-13
  
  Pages: 2317-2326
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Emissivity behaviors of a Si semiconductor wafer at high temperature2003
- Author(s)
  T.Ohkubo, H.Sugawara, T.Iuchi
- Journal Title
  
  The 64^<th> Autumn Meeting, Extended Abstracts, The Japan Society of Applied Physics No.1, 2a-ZH-9
  
  Pages: 127-127
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Emissivity measurement of silicon semiconductor wafer near room temperature.2003
- Author(s)
  H.Sugawara, T.Ohkubo, T.Fukushima, T.Iuchi
- Journal Title
  
  Proc.of SICE 200., Fukui
  
  Pages: 580-583
- NAID
  130005440376
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Radiation thermometry in high temperature furnace2003
- Author(s)
  T.Iuchi, T.Furukawa
- Journal Title
  
  Proc.of 17^<th> IMEKO WORLD CONGRESS June Dubrovnik
  
  Pages: 1632-1637
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Journal Article] Polarized radiation thermometry of silicon wafers near room temperature.2002
- Author(s)
  H.Sugawara, T.Iuchi
- Journal Title
  
  Proc.of SICE 2004, Sapporo
  
  Pages: 646-649
- NAID
  130006960396
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15560364
[Patent] Radiation thermometry and radiation thermometry system2010
- Inventor(s)
  井内徹、平加健介
- Industrial Property Rights Holder
  学校法人東洋大学
- Filing Date
  2010-06-17
- Overseas
- Data Source
  KAKENHI-PROJECT-20560403
[Patent] Radiation Thermometry and Radiation Thermometry System2010
- Inventor(s)
  T.Iuchi, K.Hiraka
- Industrial Property Rights Holder
  東洋大学
- Filing Date
  2010-06-17
- Overseas
- Data Source
  KAKENHI-PROJECT-20560403
[Patent] ハイブリッド型表面温度計,温度分布測定装置及び測定方法2006
- Inventor(s)
  井内徹
- Industrial Property Rights Holder
  東洋大学
- Industrial Property Number
  2006-036137
- Filing Date
  2006-02-14
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-17560377
[Presentation] 一研究者による放射測温実用化研究のあしあと2014
- Author(s)
  井内徹、資料
- Organizer
  日本学術振興会産業計測第36委員会第60回研究会
- Place of Presentation
  弘済会館、東京
- Year and Date
  2014-02-14
- Invited
- Data Source
  KAKENHI-PROJECT-23560511
[Presentation] 放射測温法における背光放射の定量評価2013
- Author(s)
  岩崎友幸、井内徹
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  京都　同志社大学
- Data Source
  KAKENHI-PROJECT-23560511
[Presentation] Influence of background radiance and the reduction method for radiation thermometry2013
- Author(s)
  T. Iuchi, Y. Toyoda and T. Iwasaki
- Organizer
  TEMPMEKO2013
- Place of Presentation
  Madeira, Portugal
- Year and Date
  2013-10-17
- Data Source
  KAKENHI-PROJECT-23560511
[Presentation] Emissivity properties of silicon wafers and application to radiation thermometry2013
- Author(s)
  T. Iuchi and T. Seo
- Organizer
  9^<th> International Temperature Symposium
- Place of Presentation
  Anaheim, USA
- Year and Date
  2013-03-21
- Data Source
  KAKENHI-PROJECT-23560511
[Presentation] 放射測温法における背光放射の定量評価2013
- Author(s)
  岩崎友幸、井内徹
- Organizer
  第74回応用物理学会秋季学術講演会同志社大学
- Place of Presentation
  京都
- Year and Date
  2013-09-16
- Data Source
  KAKENHI-PROJECT-23560511
[Presentation] Influence of background radiance and the reduction method for radiation thermometry2013
- Author(s)
  T. Iuchi, Y. Toyoda and T. Iwasaki
- Organizer
  TEMPMEKO 2013 (Symposium on Temperature and Thermal Measurements in Industry and Science)
- Place of Presentation
  Madeira, Portugal
- Data Source
  KAKENHI-PROJECT-23560511
[Presentation] シリコンウエハの光学的特性を利用した非接触測温法2012
- Author(s)
  豊田祐樹、井内徹
- Organizer
  第37回光学シンポジウム
- Place of Presentation
  Tokyo University
- Data Source
  KAKENHI-PROJECT-23560511
[Presentation] A combined method of noncontact temperature measurement for silicon wafers2012
- Author(s)
  Y. Toyoda, T. Seo and T. Iuchi
- Organizer
  20^<th> IMEKO World Congress
- Place of Presentation
  Busan, Korea
- Year and Date
  2012-09-10
- Data Source
  KAKENHI-PROJECT-23560511
[Presentation] シリコンウエハの光学的特性を利用した非接触測温法2012
- Author(s)
  豊田侑樹、井内徹
- Organizer
  第37回光学シンポジウム
- Place of Presentation
  東京大学、東京
- Year and Date
  2012-06-15
- Data Source
  KAKENHI-PROJECT-23560511
[Presentation] A combined method of noncontact temperature measurement for silicon wafers2012
- Author(s)
  Y. Toyoda, T. Seo and T. Iuchi
- Organizer
  XX IMEKO World Congress
- Place of Presentation
  Busan, Korea
- Data Source
  KAKENHI-PROJECT-23560511
[Presentation] Non-contact temperature measurement for silicon wafers under 600 degrees Celsius2012
- Author(s)
  Y. Toyoda and T. Iuchi
- Organizer
  SICE 2012
- Place of Presentation
  Akita University
- Data Source
  KAKENHI-PROJECT-23560511
[Presentation] Emissivity properties of silicon wafers and application to radiation thermometry2012
- Author(s)
  T. Iuchi and T. Seo
- Organizer
  9th International Temperature Symposium
- Place of Presentation
  Anaheim, CA. USA
- Data Source
  KAKENHI-PROJECT-23560511
[Presentation] Non-contact temperature measurement for silicon wafers under 600˚C2012
- Author(s)
  Y. Toyoda and T. Iuchi
- Organizer
  SICE2012
- Place of Presentation
  Akita Akita University
- Year and Date
  2012-08-21
- Data Source
  KAKENHI-PROJECT-23560511
[Presentation] 背光雑音を分離したシリコンウエハのin-situ放射測温の検討2011
- Author(s)
  瀬尾朋博、岩崎友幸、井内徹
- Organizer
  第58回応用物理学関係連合講演会
- Place of Presentation
  神奈川工科大学(神奈川県)
- Year and Date
  2011-03-24
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] シリコンウエハのin-situ放射測温における背光雑音の遮蔽2011
- Author(s)
  瀬尾朋博、岩崎友幸、井内徹
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学、山形
- Year and Date
  2011-08-30
- Data Source
  KAKENHI-PROJECT-23560511
[Presentation] Temperature dependence of p-polarized transmittance of a semitransparent silicon wafer and its application to non-contact temperature measurement2011
- Author(s)
  Y. Toyoda and T. Iuchi
- Organizer
  SICE Annual Conference 2011
- Place of Presentation
  早稲田大学（東京都）
- Data Source
  KAKENHI-PROJECT-23560511
[Presentation] シリコンウエハのin-situ放射測温法における背光雑音の遮蔽2011
- Author(s)
  瀬尾朋博、岩崎友幸、井内徹
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学（山形県）
- Data Source
  KAKENHI-PROJECT-23560511
[Presentation] Temperature dependence of p-polarized transmittance of a semitransparent silicon wafer and its application to non-contact temperature measurement2011
- Author(s)
  Y. Toyoda and T. Iuchi
- Organizer
  SICE2011
- Place of Presentation
  Waseda University, Tokyo
- Year and Date
  2011-09-16
- Data Source
  KAKENHI-PROJECT-23560511
[Presentation] 背光雑音を分離したシリコンウエハのin-situ放射測温の検討2011
- Author(s)
  瀬尾朋博、岩崎友幸、井内徹
- Organizer
  第58回応用物理学連合講演会
- Place of Presentation
  神奈川工科大学
- Year and Date
  2011-03-24
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] 背光雑音を分離したシリコンウエハのin-situ放射測温の検討2011
- Author(s)
  瀬尾朋博、岩崎友幸、井内徹
- Organizer
  第58回応用物理学関係連合講演会
- Place of Presentation
  神奈川工科大学、神奈川
- Year and Date
  2011-03-24
- Data Source
  KAKENHI-PROJECT-23560511
[Presentation] シリコンウエハのin-situ放射測温法の考察2010
- Author(s)
  瀬尾朋博、井内徹
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学
- Year and Date
  2010-09-14
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] Temperature measurement of semitransparent silicon wafers based upon absorption edge wavelength shift2010
- Author(s)
  井内徹, 瀬尾朋博
- Organizer
  TEMPMEKO $ ISHM 2010, Portrose (Slovenia)
- Place of Presentation
  Portoroz, Slovenia
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] シリコンウエハのin-situ放射測温法の考察2010
- Author(s)
  瀬尾朋博、井内徹
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学(長崎県)
- Year and Date
  2010-09-14
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] Temperature measurement of semitransparent silicon wafers based upon absorption edge wavelength shift2010
- Author(s)
  T.Iuchi, T.Seo
- Organizer
  TEMPMEKO & ISHM 2010
- Place of Presentation
  Portrose(Slovenia)
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] 鉄鋼プロセスにおける放射測温技術の温故知新2009
- Author(s)
  井内徹
- Organizer
  日本鉄鋼協会
- Place of Presentation
  加古川(兵庫)
- Year and Date
  2009-11-13
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] 偏光放射率不変条件を利用したシリコンウエハの放射測温法2009
- Author(s)
  岩崎友幸, 角谷聡, 井内徹
- Organizer
  第70回応用物理学会学術講演会
- Place of Presentation
  富山
- Year and Date
  2009-09-09
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] An emissivity-invariant condition of silicon wafers and its application to radiation thermometry2009
- Author(s)
  井内徹, 後上敦史
- Organizer
  ICROS-SICE International Joint Conference 2009
- Place of Presentation
  Fukuoka International Congress Center
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] Uncertainty in the temperature of silicon wafers measured by radiation thermometry based upon a polarization technique2009
- Author(s)
  T.Iuchi, A.Gogami
- Organizer
  XIX IMEKO World Congress
- Place of Presentation
  Lisbon
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] 鉄鋼プロセスにおける放射測温技術の温故知新2009
- Author(s)
  井内徹
- Organizer
  日本鉄鋼協会
- Place of Presentation
  加古川
- Year and Date
  2009-11-13
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] An emissivity-invariant condition of silicon wafers and its application to radiation thermometry2009
- Author(s)
  T.Iuchi, A.Gogami
- Organizer
  ICROS-SICE International Joint Conference 2009
- Place of Presentation
  Fukuoka
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] Uncertainty in the temperature of silicon wafers measured by radiation thermometry based upon a polarization technique2009
- Author(s)
  井内徹, 後上敦史
- Organizer
  XIX IMEKO WORLD CONGRESS
- Place of Presentation
  Lisbon (Portugal)
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] 偏光放射率不変条件を利用したシリコンウエハの放射測温法2009
- Author(s)
  岩崎友幸、角谷聡、井内徹
- Organizer
  第70回応用物理学会学術講演会
- Place of Presentation
  富山大学
- Year and Date
  2009-09-09
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] Comparison of surface temperature readings between an embedded thermocouple in a silicon wafer and a hybrid-typetemperature sensor2008
- Author(s)
  A. Gogami, T. Iuchi
- Organizer
  International Conference on Instrumentation, Control and Information Technology
- Place of Presentation
  Tokyo
- Year and Date
  2008-08-20
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] シリコンウエハの放射率自動補正による非接触測温法2008
- Author(s)
  後上敦史、井内徹
- Organizer
  第25回センシングフォーラム
- Place of Presentation
  佐賀大学
- Year and Date
  2008-09-25
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] A hybrid-type surface temperature sensor and its application to the development of emissivity compensated radiation therm ometry2008
- Author(s)
  A. Gogami, T. Iuchi
- Organizer
  International Conference on Control, Automation and Systems
- Place of Presentation
  Seoul
- Year and Date
  2008-10-17
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] 真空加熱炉内におけるハイブリッド型表面温度センサの適用2008
- Author(s)
  後上敦史、井内徹
- Organizer
  第69回応用物理学会学術講演会
- Place of Presentation
  中部大学(春日井キャンパス)
- Year and Date
  2008-09-03
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] A non-contact temperature measurement of semitransparent silicon wafers with absorption edge wavelength2008
- Author(s)
  T.Iuchi, R. Shinagawa
- Organizer
  ICCAS 2008
- Place of Presentation
  Seoul (Korea)
- Year and Date
  2008-10-15
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] A non-contact temperature measurement of semitransparent silicon wafers with absorption edge wavelength2008
- Author(s)
  T. Iuchi, R. Shinagawa
- Organizer
  International Conference on Control, Automation and Systems
- Place of Presentation
  Seoul
- Year and Date
  2008-10-15
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] 偏光放射率補正シリコンウエハの温度計測法2008
- Author(s)
  後上敦史、井内徹
- Organizer
  第33回光学シンポジウム
- Place of Presentation
  東京大学
- Year and Date
  2008-07-05
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] Comparison of surface temperature readings between an embedded thermocouple in a silicon wafer and a hybrid-type temperature sensor2008
- Author(s)
  後上敦史, 井内徹
- Organizer
  SICE 2008
- Place of Presentation
  Tokyo
- Year and Date
  2008-08-20
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] 真空加熱炉内におけるハイブリッド型表面温度センサの適用2008
- Author(s)
  後上敦史, 井内徹
- Organizer
  第69回応用物理学会学術講演会
- Place of Presentation
  中部大学
- Year and Date
  2008-09-03
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] A hybrid-type surface temperature sensor and its application to the development of emissivity compensated radiation thermometry2008
- Author(s)
  後上敦史, 井内徹
- Organizer
  ICCAS 2008
- Place of Presentation
  Seoul (Korea)
- Year and Date
  2008-10-17
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] Emissivity compensated radiation thermometry of silicon wafers during the growth of oxide film2008
- Author(s)
  井内徹, 後上敦史
- Organizer
  International Conference on Temperature and Thermal Measurements
- Place of Presentation
  Beijing (China)
- Year and Date
  2008-10-21
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] Emissivity compensated radiation thermometry of silicon wafers during the growth of oxide film2008
- Author(s)
  T. Iuchi, A. Gogami
- Organizer
  International Conference on Temperature and Thermal Measurements
- Place of Presentation
  Beijing
- Year and Date
  2008-10-21
- Data Source
  KAKENHI-PROJECT-20560403
[Presentation] 一研究者による放射測温実用化研究のあしあと
- Author(s)
  井内徹
- Organizer
  日本学術振興会　産業計測第36委員会
- Place of Presentation
  弘済会館（東京）
- Invited
- Data Source
  KAKENHI-PROJECT-23560511

IUCHI Tohru 井内 徹

井内 徹 イウチ トオル

Research Projects

Research Products

Design and construction of radiation thermometry systems under extremely nonequilibrium temperature conditionPrincipal Investigator

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In-situ radiation thermometry of semiconductor materials and its calibration systemPrincipal Investigator

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Research of the in-situ temperature measurement system for silicon wafers.Principal Investigator

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Study on the method for the measurements of both emissivity and temperature of semiconductor materials.Principal Investigator

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Research on a method of temperature measurement for a silicon semiconductor waferPrincipal Investigator

Principal Investigator

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MODELING OF EMISSIVITIES OF METALS AND SEMICONDUCTORSPrincipal Investigator

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RESEARCH ON RADIATION THERMOMETRY OF NEAR ROOM TEMPERATUREPrincipal Investigator

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[Book] 放射測温法の問題点と実用化へのアプローチ、温度計測基礎講座2013

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[Book] SiウエハのIn-situ温度測定技術2013

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[Book] 放射測温法の問題点と実用化へのアプローチ 温度計測基礎講座2013

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[Book] Siウェーハのin-situ温度測定技術徹底解説2013

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[Book] SiウエーハのIn-situ温度測定技術 徹底解説2012

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[Book] Radiometric Temperature Measurements(edited by Z. M. Zhang, B.K. Tsai and G. Machin)(Thermomettry in Steel Production, in Chapter 4, Experimental Methods in the Physical Sciences, Vol.43)2010

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[Book] Thermomettry in Steel Production, in Chapter 4, Experimental Methods in the Physical Sciences, Vol. 43, Radiometric Temperature Measurements2009

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[Journal Article] Non-contact temperature measurement of silicon wafers based on the combined use of transmittance and radiance2014

Author(s)

IUCHI Tohru 井内徹

井内徹イウチトオル

[Book] 放射測温法の問題点と実用化へのアプローチ　温度計測基礎講座2013

[Book] SiウエーハのIn-situ温度測定技術　徹底解説2012