MOTOHIRO Tomoyoshi 元廣友美

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Motohiro Tomoyoshi 元廣友美

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Researcher Number	20394421
Other IDs
Affiliation (based on the past Project Information) *help	2019 – 2022: 名古屋大学, 未来社会創造機構, 客員教授 2016: 名古屋大学, 未来社会創造機構, 教授 2014 – 2015: 名古屋大学, グリーンモビリティ連携研究センター, 教授
Review Section/Research Field	Principal Investigator Basic Section 21060:Electron device and electronic equipment-related / Power engineering/Power conversion/Electric machinery
Keywords	Principal Investigator 超電導磁気エネルギー貯蔵 / 超電導 / コイル / 蓄電 / 極低温冷凍機 / 銅めっき / シリコンウェハ / MEMS / 小型化 / Si微細加工技術 … More / Siウェハ / めっき / 超電導蓄電コイル / シリコン微細加工プロセス / 銅酸化物高温超電導薄膜 / MOD法 / トレンチ / 電力貯蔵 / 超電導コイル / 磁場計算 / 化学機械研磨(CMP) / MOD成膜技術 / スパッタ成膜技術 / シリコン微細加工技術（MEMS） / Li二次電池 / 電力機器 / SMES / 薄膜 / 超伝導 / 電気エネルギー貯蔵 / 電気エネルギー工学 / 極低温 / 電気エネルギー / 磁気エネルギー / シリコン / 化学機械研磨（CMP） / 超電導薄膜・ / 螺旋コイル / 超電導磁気エネルギー貯蔵（SMES） Less

Development of compact superconducting magnetic energy storage devices for volume demand based on the silicon microfabrication technologyPrincipal Investigator
- Principal Investigator
  
  MOTOHIRO Tomoyoshi
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 21060:Electron device and electronic equipment-related
- Research Institution
  Nagoya University
Compact superconducting magnetic energy storage device fabricated using process technologies of microelectromechanical systemsPrincipal Investigator
- Principal Investigator
  
  Motohiro Tomoyoshi
- Project Period (FY)
  2014 – 2016
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Power engineering/Power conversion/Electric machinery
- Research Institution
  Nagoya University

All 2022 2021 2020 2019 2017 2016 2015

All Journal Article Presentation Patent

[Journal Article] 100 m-level Spiral Silicon Micro-Trenches with 3-Step Smooth Sidewalls to Deposit Superconducting Material for Miniaturized Magnetic Energy Storage2022
- Author(s)
  Sasaki Minoru、Noh Joo-Hyong、Takai Osamu、Motohiro Tomoyoshi
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines
  
  Volume: 142 Issue: 5 Pages: 78-84
- DOI
  10.1541/ieejsmas.142.78
- ISSN
  1341-8939, 1347-5525
- Year and Date
  2022-05-01
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H02195
[Journal Article] Estimation of the Electricity Storage Volume Density of Compact SMESs of a New Concept Based on Si Microfabrication Technologies2021
- Author(s)
  Motohiro Tomoyoshi、Sasaki Minoru、Noh Joo-hyong、Takai Osamu
- Journal Title
  
  Magnetochemistry
  
  Volume: 7 Issue: 3 Pages: 44-44
- DOI
  10.3390/magnetochemistry7030044
- NAID
  120007180197
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19H02195
[Journal Article] 微細加工技術を用いた超電導磁気エネルギー貯蔵デバイスの開発における表面処理技術2020
- Author(s)
  元廣友美、佐々木実、盧柱亨
- Journal Title
  
  工業材料
  
  Volume: 68(2) Pages: 66-74
- Data Source
  KAKENHI-PROJECT-19H02195
[Journal Article] Estimation of Electricity Storage Density of Compact SMESs Composed of Si-wafer Stacks Loaded with Superconducting Thin Film Coils in Spiral Trenches under the Constraints of the Critical Magnetic Flux Density2020
- Author(s)
  Motohiro T、Sasaki M、Noh J-H、Takai O、Honma H
- Journal Title
  
  Journal of Physics: Conference Series
  
  Volume: 1590 Issue: 1 Pages: 012045-012045
- DOI
  10.1088/1742-6596/1590/1/012045
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19H02195
[Journal Article] 微細加工技術を用いた超小型超電導磁気エネルギー貯蔵技術の開発2019
- Author(s)
  元廣友美
- Journal Title
  
  ケミカルエンジニアリング
  
  Volume: 64(6) Pages: 412-422
- NAID
  40021931352
- Data Source
  KAKENHI-PROJECT-19H02195
[Journal Article] Estimation of electricity storage capacity of compact SMESs composed of stacks of Si-wafers loaded with superconducting thin film coils in spiral trenches formed by MEMS process2019
- Author(s)
  Ichiki Y、Ichiki A、Hioki T、Sasaki M、Noh J-H、Takai O、Honma H、Motohiro T
- Journal Title
  
  Journal of Physics: Conference Series
  
  Volume: 1293 Issue: 1 Pages: 012058-012058
- DOI
  10.1088/1742-6596/1293/1/012058
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19H02195
[Journal Article] Compact SMES with a superconducting film in a spiral groove on a Si wafer formed by MEMS technology with possible high-energy storage volume density comparable to that of rechargeable batteries2017
- Author(s)
  N. Sugimoto, N. Iguchi, Y. Kusano, T. Fukano, T. Hioki, A. Ichiki,　T. Bessho, T, Motohiro
- Journal Title
  
  Superconductor Science and Technology
  
  Volume: 30 Issue: 1 Pages: 015014-015014
- DOI
  10.1088/0953-2048/30/1/015014
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-26289074
[Patent] 超伝導コイル2017
- Inventor(s)
  元廣友美、別所毅、杉本憲昭
- Industrial Property Rights Holder
  元廣友美、別所毅、杉本憲昭
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2017-073869
- Filing Date
  2017-04-03
- Data Source
  KAKENHI-PROJECT-26289074
[Patent] 超電導エネルギー貯蔵装置2015
- Inventor(s)
  杉本憲昭、深野達雄、元廣友美
- Industrial Property Rights Holder
  ㈱豊田中央研究所
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2015-198866
- Filing Date
  2015-10-06
- Data Source
  KAKENHI-PROJECT-26289074
[Presentation] めっき法を用いた小型SMESのための超電導体材料上への銅膜形成2021
- Author(s)
  信夫勇佑, 荒川太郎，盧柱亨，高井治, 本間英雄, 元廣友美, 佐々木実
- Organizer
  日本材料科学学会2021年度学術講演大会
- Data Source
  KAKENHI-PROJECT-19H02195
[Presentation] Estimation of Electricity Storage Density of Compact SMESs Composed of Si wafer Stacks Loaded with Superconducting Thin Film Coils in Spiral Trenches under the Constraint of Critical Magnetic Flux Density2019
- Author(s)
  T. Motohiro, M. Sasaki, J.-H. Noh
- Organizer
  The 32nd International Symposium on Superconductivity (ISS2019), December 3rd-5th, Kyoto, Japan
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02195
[Presentation] Stacking 4” Si Wafer with Parallel 3-Stepped Micro-Trenches to Deposit Superconducting Material for Magnetic Energy Storage2019
- Author(s)
  M. Sasaki, Y. Suzuki, T. Hioki, T. Motohiro,
- Organizer
  2019 6th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02195
[Presentation] Over 100m Length Single Spiral Silicon Micro-Trench with 3-Step Smooth Sidewalls to Deposit Superconducting Material for Magnetic Energy Storage2019
- Author(s)
  M. Sasaki, Y. Suzuki, K. Adachi, T. Hioki, T. Motohiro
- Organizer
  International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (ISPlasma 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02195
[Presentation] Copper thin film formation on superconductor material for compact SMES using plating method2019
- Author(s)
  Kaito Seki, Joo-Hyoung Noh, Yoshio Horiuchi, Osamu Takai, Hideo Honma, Tomoyoshi Motohiro, Tatsumi Hioki, Minoru Sasaki and Taro Arakawa
- Organizer
  The 8th International Symposium on Materials Science and Surface Technology (MSST2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02195
[Presentation] Stress control of NbN film on the Si wafer for SMES2017
- Author(s)
  Yushi Ichiki, Yasuhiro Suzuki, Nobuhiro Iguchi, Tatsumi Hioki, Akihisa Ichiki and Tomoyoshi Motohiro
- Organizer
  The 1st Seminar on JSPS Core-to-Core Program ( B. Asia-Africa Sxience Platforms) "Establishment of Reaearch Hub for Compact Mobility in the ASEAN Region"
- Place of Presentation
  Hanoi University of Science and Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26289074
[Presentation] Fabrication of a Traversable Thick NbN Film Superconducting Coil of 42m in Length in a Spiral Three-Storied Trench Engraved in a Si Wafer of 76.2 mm in Diameter Formed by MEMS Technology for a Compact Electric Power Storage as a Magnetic Field with High Energy Storage Volume Density2017
- Author(s)
  T. Motohiro
- Organizer
  The 1st Seminar on JSPS Core-to-Core Program ( B. Asia-Africa Sxience Platforms) "Establishment of Reaearch Hub for Compact Mobility in the ASEAN Region"
- Place of Presentation
  Hanoi University of Science and Technology
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26289074
[Presentation] Compact SMES with a Superconducting Film in a Spiral Trench　on a Si-Wafer Formed by MEMS Technology with Possible High Energy Storage Volume-Density Comparable to Those of Rechargeable Batteries2016
- Author(s)
  N. Iguchi, Y. Suzuki, K. Adachi, T. Hioki, A. Ichiki, T. Motohiro, N. Sugimoto, C.-H Hsu, R. Sato, S. Kumagai, M. Sasaki, J.-H. Noh, Y. Sakurahara, K. Okabe,O. Takai, H. Honma, H. Watanabe, H.Sakoda, H. Sasagawa, H. Doy, S. Zhou,T. Nozaki, H. Hori, S. Nishikawa
- Organizer
  1st Asian Int’l Cryogenic Mater. Conf.-50th Anniversary Conf. of Cryogenics and Superconductivity Soc. Jpn
- Place of Presentation
  Kanazawa-Kagekiza, Kanazawa, Japan
- Year and Date
  2016-11-07
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26289074
[Presentation] Compact SMES with a Superconducting Film in a Spiral Groove on a Si-Wafer Formed by MEMS Technol.with Possible Energy Storage Volume-Density Surpassing that of Li-Ion Batteries (II)2015
- Author(s)
  N. Iguchi, N. Sugimoto, Y. Kusano, T. Fukano, T. Hioki, A. Ichiki, T. Bessho, T.Motohiro
- Organizer
  The 28th International Symposium on Superconductivity
- Place of Presentation
  Tower Hall Funabori, Funabori, Tokyo
- Year and Date
  2015-11-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26289074
[Presentation] Compact SMES with a Superconducting Film in a Spiral Groove on a Si-Wafer Formed by MEMS Technol.with Possible Energy Storage Volume-Density Surpassing that of Li-Ion Batteries (I)2015
- Author(s)
  N. Sugimoto, N. Iguchi, Y. Kusano, T. Fukano, T. Hioki, A. Ichiki, T. Bessho, T. Motohiro
- Organizer
  The 28th International　Symposium on Superconductivity
- Place of Presentation
  Tower Hall Funabori, Funabori, Tokyo
- Year and Date
  2015-11-16
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26289074

1. Kajino Tsutomu (10394636)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
2. Takeda Yasuhiko (10394660)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
3. 杉本憲昭 (60394714)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
4. 盧柱亨 (50313474)

# of Collaborated Projects: 1 results

# of Collaborated Products: 7 results
5. 佐々木実 (70282100)

# of Collaborated Projects: 1 results

# of Collaborated Products: 9 results

MOTOHIRO Tomoyoshi 元廣 友美

Motohiro Tomoyoshi 元廣 友美

Research Projects

Research Products

Co-Researchers

Development of compact superconducting magnetic energy storage devices for volume demand based on the silicon microfabrication technologyPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Compact superconducting magnetic energy storage device fabricated using process technologies of microelectromechanical systemsPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] 100 m-level Spiral Silicon Micro-Trenches with 3-Step Smooth Sidewalls to Deposit Superconducting Material for Miniaturized Magnetic Energy Storage2022

Author(s)

Journal Title

DOI

ISSN

Year and Date

Language

Data Source

[Journal Article] Estimation of the Electricity Storage Volume Density of Compact SMESs of a New Concept Based on Si Microfabrication Technologies2021

Author(s)

Journal Title

DOI

NAID

Data Source

[Journal Article] 微細加工技術を用いた超電導磁気エネルギー貯蔵デバイスの開発における表面処理技術2020

Author(s)

Journal Title

Data Source

[Journal Article] Estimation of Electricity Storage Density of Compact SMESs Composed of Si-wafer Stacks Loaded with Superconducting Thin Film Coils in Spiral Trenches under the Constraints of the Critical Magnetic Flux Density2020

Author(s)

Journal Title

DOI

Data Source

[Journal Article] 微細加工技術を用いた超小型超電導磁気エネルギー貯蔵技術の開発2019

Author(s)

Journal Title

NAID

Data Source

[Journal Article] Estimation of electricity storage capacity of compact SMESs composed of stacks of Si-wafers loaded with superconducting thin film coils in spiral trenches formed by MEMS process2019

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Compact SMES with a superconducting film in a spiral groove on a Si wafer formed by MEMS technology with possible high-energy storage volume density comparable to that of rechargeable batteries2017

Author(s)

Journal Title

DOI

Data Source

[Patent] 超伝導コイル2017

Inventor(s)

Industrial Property Rights Holder

Industrial Property Rights Type

Industrial Property Number

Filing Date

Data Source

[Patent] 超電導エネルギー貯蔵装置2015

Inventor(s)

Industrial Property Rights Holder

Industrial Property Rights Type

Industrial Property Number

Filing Date

Data Source

[Presentation] めっき法を用いた小型SMESのための超電導体材料上への銅膜形成2021

Author(s)

Organizer

Data Source

[Presentation] Estimation of Electricity Storage Density of Compact SMESs Composed of Si wafer Stacks Loaded with Superconducting Thin Film Coils in Spiral Trenches under the Constraint of Critical Magnetic Flux Density2019

Author(s)

Organizer

Data Source

[Presentation] Stacking 4” Si Wafer with Parallel 3-Stepped Micro-Trenches to Deposit Superconducting Material for Magnetic Energy Storage2019

Author(s)

Organizer

MOTOHIRO Tomoyoshi 元廣友美

Motohiro Tomoyoshi 元廣友美

[Presentation] Compact SMES with a Superconducting Film in a Spiral Trench　on a Si-Wafer Formed by MEMS Technology with Possible High Energy Storage Volume-Density Comparable to Those of Rechargeable Batteries2016