PREM Pal プレムパル

Researcher Number	20444416
Affiliation (based on the past Project Information) *help	2009: 名古屋大学, 大学院・工学研究科, COE研究員(当時) 2007: 名古屋大学, 大学院・工学研究科, COE研究員
Review Section/Research Field	Except Principal Investigator Microdevices/Nanodevices
Keywords	Except Principal Investigator FTIR / 固液界面 / 界面活性剤 / 不純物イオン / 異方性エッチング / 結晶 / シリコン

Modeling of orientation-dependent etching of silicon and effects of ions in the solution
- Principal Investigator
  
  SATO Kazuo
- Project Period (FY)
  2007 – 2009
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Microdevices/Nanodevices
- Research Institution
  Nagoya University

All 2010 2009 2008 2007

All Journal Article Presentation Patent

[Journal Article] Fabrication methods based on wet etching process for the realization of silicon MEMS structures with new shapes2010
- Author(s)
  Prem Pal, K.Sato
- Journal Title
  
  Microsystem Technologies, (DOI 10.1007/s00542-009-0956-5) (in press, Online published)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Extension of 3D Shapes of MEMS Structures Realized by Wet Etching (Study of micromachining of single crystal silicon)2010
- Author(s)
  Prem Pal, K.Sato
- Journal Title
  
  日本機械学会論文集C2編「マイクロ・ナノ工学シンポジウム小特集」 (in press)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Silicon micromachining based on surfactant-added tetramethyl ammonium hydroxide : Etching mechanism and advanced application2010
- Author(s)
  Prem Pal, M.A.Gosalvez, K.Sato
- Journal Title
  
  Japanese Journal of Applied Physics, accepted Feb. '10 (in press)
- NAID
  40017116129
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Silicon micromachining based on surfactant-added tetramethyl ammonium hydroxide: Etching mechanism and advanced application2010
- Author(s)
  Prem Pal, M.A. Gosalvez, K. Sato
- Journal Title
  
  Japanese Journal of Applied Physics (in press, accepted Feb.)
- NAID
  40017116129
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Extension of 3D Shapes of MEMS Structures Realized by Wet Etching (Study of micromachining of single crystal silicon)2010
- Author(s)
  Prem Pal, K. Sato
- Journal Title
  
  日本機械学会論文集C2編「マイクロ・ナノ工学シンポジウム小特集」 (in press, accepted Feb.)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Fabrication methods based on wet etching process for the realization of silicon MEMS structures with new shapes2010
- Author(s)
  Prem Pal, K. Sato
- Journal Title
  
  Microsystem Technologies 0956-5(in press)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Atomistic mechanism for the macroscopic effects induced by small additions of surfactants to alkaline etching solutions2010
- Author(s)
  M.A.Gosalvez, Prem.Pal, B.Tang, K.Sato
- Journal Title
  
  Sensors and Actuators A, Physical 157
  
  Pages: 91-95
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Atomistic mechanism for the macroscopic effects induced by small additions of surfactants to alkaline etching solutions2010
- Author(s)
  M.A. Gosalvez, Prem. Pal, B. Tang, K. Sato
- Journal Title
  
  Sensors and Actuators A, Physical 157
  
  Pages: 91-95
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH2009
- Author(s)
  B. Tang, Prem Pal, M.A. Gosalvez, M. Shikida, K. Sato, et. al.
- Journal Title
  
  Sensors and Actuators A 156-2(Physical)
  
  Pages: 334-341
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Various shapes of silicon freestanding microfluidic channels and microstructures in one step lithography2009
- Author(s)
  Prem Pal, K. Sato
- Journal Title
  
  J. Micromechanics and Microengineering 40682
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH2009
- Author(s)
  Prem Pal, K.Sato, M.Shikida, M.A.Gosalvez
- Journal Title
  
  Sensors and Actuators A, Physical 154-2
  
  Pages: 192-203
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Complex three-dimensional structures in Si{1 0 0} using wet bulk micromachining2009
- Author(s)
  Prem Pal, K. Sato
- Journal Title
  
  J. Micromechanics and Microengineering 40835
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Various shapes of silicon freestanding microfluidic channels and microstructures in one step lithography2009
- Author(s)
  Prem Pal, K.Sato
- Journal Title
  
  Journal of Micromechanics and Microengineering 19-5
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Surfactant adsorption on single crystal silicon surfaces in TMAH solution : Orientation-dependent adsorption detected by in-situ infra-red spectroscopy2009
- Author(s)
  Prem Pal, K.Sato, M.A. Gosalvez, Y. Kimura, K.Ishibashi, et al.
- Journal Title
  
  Journal of Microelectromechanical Systems 18-6
  
  Pages: 1345-1356
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH2009
- Author(s)
  Prem Pal, K. Sato, M. Shikida, M.A. Gosalvez
- Journal Title
  
  Sensors and Actuators A 154-2(Physical)
  
  Pages: 192-203
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Orientation and concentration dependent surfactant adsorption on silicon in aqueous alkaline solutions: Explaining the changes in the etch rate, roughness and undercutting for MEMS applications2009
- Author(s)
  M.A. Gosalvez, B. Tang, Prem Pal, K. Sato, Y. Kimura, K. Ishibashi
- Journal Title
  
  J. Micromechanics and Microengineering 40896
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH2009
- Author(s)
  B.Tang, Prem Pal, M.A.Gosalvez, M.Shikida, K.Sato, et al.
- Journal Title
  
  Sensors and Actuators A, Physical 156-2
  
  Pages: 334-341
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Suspended Si microstructures over controlled depth micromachined cavities for MEMS based sensing devices2009
- Author(s)
  Prem Pal, K.Sato
- Journal Title
  
  Sensor Letters 7-1
  
  Pages: 11-16
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Orientation and concentration dependent surfactant adsorption on silicon in aqueous alkaline solutions : Explaining the changes in the etch rate, roughness and undercutting for MEMS applications2009
- Author(s)
  M.A.Gosalvez, B.Tang, Prem Pal, K.Sato, Y.Kimura, K.Ishibashi
- Journal Title
  
  Journal of Micromechanics and Microengineering 19-12
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Suspended Si microstructures over controlled depth micromachined cavities for MEMS based sensing devices2009
- Author(s)
  Prem Pal, K. Sato
- Journal Title
  
  Sensor Letters 40725
  
  Pages: 11-16
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Complex three-dimensional structures in Si{100} using wet bulk micromachining2009
- Author(s)
  Prem Pal, K.Sato
- Journal Title
  
  Journal of Micromechanics and Microengineering 19-10
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Surfactant adsorption on single crystal silicon surfaces in TMAH solution: Orientation-dependent adsorption detected by in-situ infra-red spectroscopy2009
- Author(s)
  Prem Pal, K. Sato, M.A. Gosalvez, Y. Kimura, K. Ishibashi, et al.
- Journal Title
  
  J. Microelectromechanical Systems 40712
  
  Pages: 1345-1356
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Suspended Si microstructures with rounded concave and sharp convex corners using wafer bonding and wet anisotropic etching2008
- Author(s)
  Prem Pal, K. Sato, M. Shikida
- Journal Title
  
  ECS Transactions 40771
  
  Pages: 133-140
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Suspended Si microstructures with rounded concave and sharp convex corners using wafer bonding and wet anisotropic etching2008
- Author(s)
  Prem Pal, K.Sato, M.Shikida
- Journal Title
  
  ECS Transactions 16-8
  
  Pages: 133-140
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Study of rounded concave and sharp edge convex corners undercutting in CMOS compatible anisotropic etchants2007
- Author(s)
  Prem Pal, K. Sato, M. A. Gosalvez and M. Shikida
- Journal Title
  
  Journal of Micromechanics and Microengineering vol.17
  
  Pages: 2299-2307
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Fabrication techniques of convex comers in a(100)-silicon wafer using bulk micromachining: a review2007
- Author(s)
  Prem Pal, K. Sato and Sudhir Chandra
- Journal Title
  
  Journal of Micromechanics and Microengineering vol.17
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Fabrication techniques of convex comers in a (100)-silicon wafer using bulk micromachining: a review2007
- Author(s)
  Prem Pal, K. Sato, Sudhir Chandra
- Journal Title
  
  J. Micromechanics and Microengineering 40833
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Journal Article] Study of rounded concave and sharp edge convex corners undercutting in CMOS compatible anisotropic etchants2007
- Author(s)
  Prem Pal, K. Sato, M.A. Gosalvez, M. Shikida
- Journal Title
  
  J. Micromechanics and Microengineering 40864
  
  Pages: 2299-2307
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19201026
[Patent] シリコン微細構造体の製造方法2010
- Inventor(s)
  佐藤一雄, Prem Pal
- Industrial Property Rights Holder
  名古屋大学
- Industrial Property Number
  2009-172553
- Filing Date
  2010-07-23
- Data Source
  KAKENHI-PROJECT-19201026
[Patent] シリコン微細構造体の製造方法2009
- Inventor(s)
  佐藤一雄, Prem Pal
- Industrial Property Rights Holder
  名古屋大学
- Industrial Property Number
  2009-172553
- Filing Date
  2009-07-23
- Data Source
  KAKENHI-PROJECT-19201026
[Patent] シリコン微細構造体の製造方法及び微細流路デバイスの製造方法2009
- Inventor(s)
  佐藤一雄, Prem Pal
- Industrial Property Rights Holder
  名古屋大学
- Industrial Property Number
  2008-312338
- Filing Date
  2009-12-08
- Data Source
  KAKENHI-PROJECT-19201026
[Patent] シリコン微細構造体の製造方法及び微細流路デバイスの製造方法2008
- Inventor(s)
  佐藤一雄, Prem Pal
- Industrial Property Rights Holder
  名古屋大学
- Industrial Property Number
  2008-312338
- Filing Date
  2008-12-08
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Micro/Nano science uncovering the mysteries of silicon wet etching for the fabrication of MEMS structures(invited)2009
- Author(s)
  K.Sato, M.Shikida, M.A.Gosalvez, Prem Pal
- Organizer
  Intl.Conf.on Materials for Advanced Technologies
- Place of Presentation
  Singapore
- Year and Date
  2009-06-28
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Silicon microfluidic channels and microstructures by one step photolithography2009
- Author(s)
  Prem Pal, K. Sato
- Organizer
  Symp. on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP)
- Place of Presentation
  Rome
- Year and Date
  2009-04-01
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Wet etched complex three dimensional MEMS structures2009
- Author(s)
  Prem Pal, K. Sato
- Organizer
  Intl. Symp. on Micro-NanoMechatronics and Human Science (MHS)
- Place of Presentation
  名古屋市
- Year and Date
  2009-11-08
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Surfactant in TMAH for new shapes of silicon MEMS components ; its orientation dependent adsorption detected by infrared spectroscopy2009
- Author(s)
  Prem.Pal, K.Sato, H.Hida, M.A.Gosalvez, Y.Kimura, et al.
- Organizer
  15th Intl.Conf.on Solid-State Sensors, Actuator and Microsystems(Transducers '09)
- Place of Presentation
  Denver, USA
- Year and Date
  2009-06-21
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Anisotropic nature of Si surface during wet alkaline etching ; Effects of cations and surfactants2009
- Author(s)
  K.Sato, M.Shikida, M.A.Gosalvez, Prem Pal, Y.Kimura
- Organizer
  The 5th International Colloquium, Micro-Tribology
- Place of Presentation
  Milowka, Poland
- Year and Date
  2009-09-20
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Extension of 3D Shapes of MEMS Structures Realized by Wet Etching2009
- Author(s)
  Prem Pal, K. Sato
- Organizer
  日本機械学会マイクロ・ナノ工学専門会議第1回シンポジウム
- Place of Presentation
  東京
- Year and Date
  2009-10-15
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Silicon microfluidic channels and microstructures by one step photolithography2009
- Author(s)
  Prem Pal, 佐藤一雄
- Organizer
  Symp.on Design, Test, Integration & Packaging of MEMS/MOEMS(DTIP)
- Place of Presentation
  Rome, Italy
- Year and Date
  2009-04-01
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Experimental verification and theoretical explanation of the effect of surfactant addition to TMAH based etchants for advanced applications in MEMS2009
- Author(s)
  Prem Pal, K.Sato, M.A.Gosalvez, H.Hida, B.Tang, S.Ito, Y.Kimura, K.Ishibashi, M.Niwano
- Organizer
  第26回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  東京タワーホール船堀
- Year and Date
  2009-10-15
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Adsorbed surfactant thickness on a Si wafer dominating etching properties of TMAH solution2009
- Author(s)
  B.Tang, M.A.Gosalvez, Prem Pal, S.Itoh, H.Hida, M.Shikida, K.Sato
- Organizer
  Intl. Symp. on Micro-NanoMechatronics and Human Science (MHS)
- Place of Presentation
  名古屋大学
- Year and Date
  2009-11-08
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Extension of 3D Shapes of MEMS Structures Realized by Wet Etching2009
- Author(s)
  Prem Pal, K.Sato
- Organizer
  日本機械学会マイクロ・ナノ工学専門会議第1回シンポジウム
- Place of Presentation
  東京タワーホール船堀
- Year and Date
  2009-10-15
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Experimental verification and theoretical explanation of the effect of surfactant addition to TMAH based etchants for advanced applications in MEMS2009
- Author(s)
  Prem Pal, K. Sato, M.A. Gosalvez, H. Hida, B. Tang, S. Ito, Y. Kimura, K. Ishibashi, M. Niwano
- Organizer
  第26回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  東京
- Year and Date
  2009-10-15
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Advanced wet etch bulk micromachining in {100} silicon wafers2009
- Author(s)
  Prem Pal, K.Sato
- Organizer
  2009 MRS Fall Meeting
- Place of Presentation
  Boston, USA
- Year and Date
  2009-11-30
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Fabrication Methods Based on Wet Bulk Micromachining for the Realization of Advanced MEMS Structures2009
- Author(s)
  Prem Pal, K. Sato
- Organizer
  15th Intl. Workshop on the Physics of Semiconductor Devices
- Place of Presentation
  New Delhi, India
- Year and Date
  2009-12-15
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Micro/Nano science uncovering the mysteries of silicon wet etching for the fabrication of MEMS structures2009
- Author(s)
  K. Sato, M. Shikida, M.A. Gosalvez, Prem Pal
- Organizer
  Intl. Conf. on Materials for Advanced Technologies
- Place of Presentation
  Singapore
- Year and Date
  2009-06-28
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Wet etched complex three dimensional MEMS structures2009
- Author(s)
  Prem Pal, K.Sato
- Organizer
  Intl. Symp. on Micro-NanoMechatronics and Human Science (MHS)
- Place of Presentation
  名古屋大学
- Year and Date
  2009-11-08
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] dvanced wet etch bulk micromachining in {100} silicon wafers2009
- Author(s)
  Prem Pal, K. Sato
- Organizer
  2009 MRS Fall Meeting
- Place of Presentation
  Boston, USA
- Year and Date
  2009-11-30
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Anisotropic nature of Si surface during wet alkaline etching; Effects of cations and surfactants2009
- Author(s)
  K. Sato, M. Shikida, M.A. Gosalvez, Prem Pal, Y. Kimura
- Organizer
  The 5th International Colloquium, Micro-Tribology
- Place of Presentation
  Milowka, Poland
- Year and Date
  2009-09-20
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Surfactant in TMAH for new shapes of silicon MEMS components; its orientation dependent adsorption detected by infrared spectroscopy2009
- Author(s)
  Prem. Pal, K. Sato, H. Hida, M.A. Gosalvez, Y. Kimura, et. al.
- Organizer
  15th Intl. Conf. on Solid-State Sensors, Actuator and Microsystems
- Place of Presentation
  Denver, USA(Transducers)
- Year and Date
  2009-06-21
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Adsorbed surfactant thickness on a Si wafer dominating etching properties of TMAH solution2009
- Author(s)
  B. Tang, M.A. Gosalvez, Prem Pal, S. Itoh, H. Hida, M. Shikida, K. Sato
- Organizer
  ntl. Symp. on Micro-NanoMechatronics and Human Science (MHS)
- Place of Presentation
  名古屋市
- Year and Date
  2009-11-08
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] A comparative study of non-ionic surfactants in TMAH for conformal wet anisotropic etching on(100)-Si wafers2008
- Author(s)
  Prem Pal, 佐藤一雄
- Organizer
  第25回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  宜野湾市沖縄コンベンションセンター
- Year and Date
  2008-10-22
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Micromachined sealed cavities by silicon wafer bonding for the formation of microstructures of desired thickness using TMAH etching2008
- Author(s)
  Prem Pal, 佐藤一雄
- Organizer
  Intl.Symp.on Micro-NanoMechatronics and Human Science(MHS)
- Place of Presentation
  名古屋市名古屋大学
- Year and Date
  2008-11-06
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Micromachined sealed cavities by silicon wafer bonding for the formation of microstructures of desired thickness using TMAH etching2008
- Author(s)
  Prem Pal, K. Sato
- Organizer
  ntl. Symp. on Micro-NanoMechatronics and Human Science (MHS)
- Place of Presentation
  名古屋市
- Year and Date
  2008-11-06
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Suspended Si microstructures with rounded concave and sharp convex corners using wafer bonding and wet anisotropic etching2008
- Author(s)
  Prem Pal, 佐藤一雄, 式田光宏
- Organizer
  PRiME'08 214th ECS Meeting
- Place of Presentation
  Honolulu, Hawaii
- Year and Date
  2008-10-12
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] 結晶異方性ウェットエッチングによるスキャロッピングの選択除去に関する研究2008
- Author(s)
  稲垣徳幸, 佐々木光, Prem Pal, 式田光宏, 佐藤一雄
- Organizer
  電気学会センサ・マイクロマシン部門研究会
- Place of Presentation
  仙台市
- Year and Date
  2008-06-12
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] A comparative study of non-ionic surfactants in TMAH for conformal wet anisotropic etching on (100)-Si wafers2008
- Author(s)
  Prem Pal, K. Sato
- Organizer
  第25回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  那覇市
- Year and Date
  2008-10-22
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] An improved anisotropic wet etching progress for the fabrication of silicon MEMS structures using a single etching mask2008
- Author(s)
  Prem Pal, K. Sato, M. A. Gosalvez and M. Shikida
- Organizer
  IEEE Intl. Conf. MEMS08, p327-330
- Place of Presentation
  Tucson, USA
- Year and Date
  2008-01-14
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] An improved anisotropic wet etching progress for the fabrication of silicon MEMS structures using a single etching mask2008
- Author(s)
  Prem Pal, K. Sato, M.A. Gosalvez, M. Shikida
- Organizer
  IEEE Intl. Conf. MEMS08
- Place of Presentation
  Tucson, USA
- Year and Date
  2008-01-14
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Gosalvez and M. Shikida, Microstructures with rounded concave and sharp-edged convex corners in a single step wet anisotropic etching2008
- Author(s)
  Prem Pal, K. Sato, M.A. Gosalvez, M. Shikida
- Organizer
  SPIE MOEMS-MEMS (Proc. SPIE Vol. 6882)
- Place of Presentation
  San Jose, USA
- Year and Date
  2008-01-19
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Suspended Si microstructures with rounded concave and sharp convex corners using wafer bonding and wet anisotropic etching2008
- Author(s)
  Prem Pal, K. Sato, M. Shikida
- Organizer
  PRiME'08 214th ECS Meeting
- Place of Presentation
  Honolulu
- Year and Date
  2008-10-12
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] 結晶異方性ウェットエッチングによるスキャロッピングの選択除去に関する研究2008
- Author(s)
  稲垣徳幸, 佐々木光, Prem Pal, 式田光宏, 佐藤一雄
- Organizer
  電気学会センサ・マイクロマシン部門研究会
- Place of Presentation
  仙台市戦災復興記念館
- Year and Date
  2008-06-12
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Microstructures with rounded concave and sharp-edged convex corners in a single step wet anisotropic etching2008
- Author(s)
  Prem Pal, K. Sato, M. A. Gosalvez and M. Shikida
- Organizer
  SPIE MOEMS-MEMS(Proc. SPIE Vol.6882)
- Place of Presentation
  San Jose, USA
- Year and Date
  2008-01-19
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Novel wet anisotropic etching process for the realization of new shapesof silicon MEMS structures2007
- Author(s)
  Prem Pal, K. Sato, M. A. Gosalvez and M. Shikida
- Organizer
  IEEE Intl. Conf. MHS07 & Micro-Nano COE, p499-504
- Place of Presentation
  Nagoya
- Year and Date
  2007-11-13
- Data Source
  KAKENHI-PROJECT-19201026
[Presentation] Novel wet anisotropic etching process for the realization of new shapes of silicon MEMS structures2007
- Author(s)
  Prem Pal, K. Sato, M.A. Gosalvez, M. Shikida
- Organizer
  IEEE Intl. Conf. MHS07 & Micro-Nano COE
- Place of Presentation
  Nagoya
- Year and Date
  2007-11-13
- Data Source
  KAKENHI-PROJECT-19201026

1. GOSALVEZ Miguel (10377814)

# of Collaborated Projects: 2 results

# of Collaborated Products: 60 results
2. SATO Kazuo (30262851)

# of Collaborated Projects: 1 results

# of Collaborated Products: 61 results
3. SHIKIDA Mitsuhiro (80273291)

# of Collaborated Projects: 1 results

# of Collaborated Products: 24 results
4. KIMURA Yasuo (40312673)

# of Collaborated Projects: 1 results

# of Collaborated Products: 10 results
5. HYNNINEN Teemu

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. FERRANDO Nestor

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

PREM Pal プレム パル

Research Projects

Research Products

Co-Researchers

Modeling of orientation-dependent etching of silicon and effects of ions in the solution

Principal Investigator

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Research Institution

[Journal Article] Fabrication methods based on wet etching process for the realization of silicon MEMS structures with new shapes2010

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[Journal Article] Extension of 3D Shapes of MEMS Structures Realized by Wet Etching (Study of micromachining of single crystal silicon)2010

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[Journal Article] Silicon micromachining based on surfactant-added tetramethyl ammonium hydroxide : Etching mechanism and advanced application2010

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[Journal Article] Silicon micromachining based on surfactant-added tetramethyl ammonium hydroxide: Etching mechanism and advanced application2010

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NAID

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[Journal Article] Extension of 3D Shapes of MEMS Structures Realized by Wet Etching (Study of micromachining of single crystal silicon)2010

Author(s)

Journal Title

Data Source

[Journal Article] Fabrication methods based on wet etching process for the realization of silicon MEMS structures with new shapes2010

Author(s)

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Data Source

[Journal Article] Atomistic mechanism for the macroscopic effects induced by small additions of surfactants to alkaline etching solutions2010

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[Journal Article] Atomistic mechanism for the macroscopic effects induced by small additions of surfactants to alkaline etching solutions2010

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[Journal Article] Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH2009

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[Journal Article] Various shapes of silicon freestanding microfluidic channels and microstructures in one step lithography2009

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[Journal Article] Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH2009

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[Journal Article] Complex three-dimensional structures in Si{1 0 0} using wet bulk micromachining2009

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[Journal Article] Various shapes of silicon freestanding microfluidic channels and microstructures in one step lithography2009

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[Journal Article] Surfactant adsorption on single crystal silicon surfaces in TMAH solution : Orientation-dependent adsorption detected by in-situ infra-red spectroscopy2009

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[Journal Article] Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH2009

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[Journal Article] Orientation and concentration dependent surfactant adsorption on silicon in aqueous alkaline solutions: Explaining the changes in the etch rate, roughness and undercutting for MEMS applications2009

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[Journal Article] Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH2009

Author(s)

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PREM Pal プレムパル