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TOKUDA Yutaka  徳田 豊

ORCIDConnect your ORCID iD *help
… Alternative Names

徳田 豊  トクダ ユタカ

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Researcher Number 30078927
Other IDs
Affiliation (Current) 2025: 愛知工業大学, 工学部, 教授
Affiliation (based on the past Project Information) *help 2010: 愛知工業大学, 工学部, 教授
1997 – 1999: 愛知工業大学, 工学部, 教授
Review Section/Research Field
Principal Investigator
Applied materials science/Crystal engineering
Except Principal Investigator
Materials/Mechanics of materials
Keywords
Principal Investigator
FT-IR / DLTS / SCHOTTKY / BOILING WATER / HYDROGEN PLASMA / PィイD1+ィエD1 SILICON / 水素導入 / 水素パシベーション / 水素イオン注入 / 水素プラズマ … More / ショットキ / 沸騰水 / 水素プラズ / p^+シリコン … More
Except Principal Investigator
等価き裂 / 損傷 / 寿命分布 / 強度分布 / 機械材料・材料力学 / 寿命予測 / 疲労破壊 / 初期損傷 / 強度 / ポリシリコン / シリコン / マイクロマシン / MEMS(マイクロマシン) / 疲労 Less
  • Research Projects

    (2 results)
  • Research Products

    (3 results)
  • Co-Researchers

    (2 People)
  •  Establishment of an reliability evaluation scheme based on statistical analysis and electronic defect sensing for the reliability of silicon against fatigue failure

    • Principal Investigator
      KAMIYA Shoji
    • Project Period (FY)
      2008 – 2010
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Materials/Mechanics of materials
    • Research Institution
      Nagoya Institute of Technology
  •  DEVELOPMENT OF CHARACTERIZATION METHODS FRO SILICON CRYSTALS WITH THE USE OF HYDROGEN INCORPORATIONPrincipal Investigator

    • Principal Investigator
      TOKUDA Yutaka
    • Project Period (FY)
      1997 – 1999
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Applied materials science/Crystal engineering
    • Research Institution
      AICHI INSTITUTE OF TECHNOLOGY

All 2010 Other

All Journal Article Presentation

  • [Journal Article] Electronic properties of dislocations introduced mechanically at room temperature on a single crystal silicon surface

    • Author(s)
      Masatoshi Ogawa, Shoji Kamiya, Hayato Izumi, Yutaka Tokuda, Physica B
    • Journal Title

      Physica B

      Volume: (in press)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20360052
  • [Presentation] Electrical properties of mechanically induced defects in single crystal silicon2010

    • Author(s)
      Masatoshi Ogawa, Shoji Kamiya, Hayato Izumi Yutaka Tokuda
    • Organizer
      The 27th Sensor Symposium on Sensors
    • Place of Presentation
      Shimane, Japan, Book of Abstracts
    • Data Source
      KAKENHI-PROJECT-20360052
  • [Presentation] 単結晶シリコンの機械的損傷の電子的性質に関する研究2010

    • Author(s)
      小川将史、神谷庄司、泉隼人、徳田豊
    • Organizer
      第27回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      くにびきメッセ(松江市)
    • Year and Date
      2010-10-14
    • Data Source
      KAKENHI-PROJECT-20360052
  • 1.  KAMIYA Shoji (00204628)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 3 results
  • 2.  HAYASHI Takahiro (30324479)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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