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SHIRASAKI Hirokimi  白崎 博公

ORCIDConnect your ORCID iD *help
Researcher Number 30154371
Other IDs
External Links
Affiliation (based on the past Project Information) *help 1999 – 2000: 玉川大学, 工学部, 教授
1997 – 1998: 玉川大学, 工学部, 助教授
Review Section/Research Field
Principal Investigator
Applied optics/Quantum optical engineering
Keywords
Principal Investigator
boundary element method / non-destructive inspection / optical measurement / semiconductor / wavelet analysis / interference spectroscopy / trench / 非破壊検査 / 光測定 / 半導体 / ウェーブレット / 干渉分光法 / トレンチ
  • Research Projects

    (1 results)
  •  The figure measurement simulation for the semiconductor trench by wavelet analysis with interference spectrum data.Principal Investigator

    • Principal Investigator
      SHIRASAKI Hirokimi
    • Project Period (FY)
      1997 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Applied optics/Quantum optical engineering
    • Research Institution
      Tamagawa University

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