Yasuda Masaaki 安田雅昭

… Alternative Names

安田雅昭ヤスダマサアキ

YASUDA Masaaki 安田雅昭

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Researcher Number	30264807
Other IDs
Affiliation (Current)	2025: 大阪公立大学, 大学院工学研究科 , 准教授
Affiliation (based on the past Project Information) *help	2019 – 2020: 大阪府立大学, 工学(系)研究科(研究院), 准教授 2011 – 2017: 大阪府立大学, 工学(系)研究科(研究院), 准教授 2007 – 2012: Osaka Prefecture University, Graduate School of Engineering, Associate Professor 2006: 大阪府立大学, 工学研究科, 講師 1998 – 1999: 大阪府立大学, 工学部, 助手
Review Section/Research Field	Principal Investigator Electron device/Electronic equipment / Electronic materials/Electric materials Except Principal Investigator Medium-sized Section 26:Materials engineering and related fields
Keywords	Principal Investigator 分子動力学法 / モンテカルロ法 / 電子ビーム / ナノカーボン / 照射効果 / 分子動力学 / 電子線リソグラフィ / 電子顕微鏡 / 電子励起 / 半導体リソグラフィ … More / マルチスケール解析 / 確率論的シミュレーション / レジスト分子 / スケール境界領域 / マルチスケールシミュレーション / ナノインプリント / 極端紫外線リソグラフィ / パターン形成 / electron irradiation damage / electron irradiation effect / Monte Carlo method / molecular dynamics / carbon nanotube / nanocarbon / electron beam fabrication / 照射損傷 / 電子線照射損傷 / 電子線照射効果 / カーボンナノチューブ / 電子ビーム加工 / 計算物理 / マルチフィジックス / ナノプロセス / 弾性衝突 / レジスト / 現像 / 電子線露光 / ナノメカニクス / 構造制御 / 微細プロセス技術 / 励起プロセシング / ナノ材料 / Mott検出器 / 電子線マイクロアナライザ / スピン偏極電子線 / スピン偏極度 / モンテカルロシミュレーション / スピン偏極電子 … More Except Principal Investigator モンテカルロ計算 / シリコン薄膜 / 二次電子像 / 表面物性計測 / 低加速SEM / モンテカルロ理論計算 / 像コントラスト / 二次電子 / 走査型電子顕微鏡 Less

Development of contrast-amplified observation method for low-voltage secondary electron images
- Principal Investigator
  
  Itakura Masaru
- Project Period (FY)
  2019 – 2020
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Review Section
  
  Medium-sized Section 26:Materials engineering and related fields
- Research Institution
  Kyushu University
Computational study of pattern formation process in scale-boundary regionPrincipal Investigator
- Principal Investigator
  
  YASUDA MASAAKI
- Project Period (FY)
  2015 – 2017
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Osaka Prefecture University
Multiphysics simulation of electron beam nanoprocessPrincipal Investigator
- Principal Investigator
  
  YASUDA Masaaki
- Project Period (FY)
  2013 – 2015
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Osaka Prefecture University
Molecular simulation of pattern formation in electron beam lithographyPrincipal Investigator
- Principal Investigator
  
  YASUDA Masaaki
- Project Period (FY)
  2011 – 2013
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Osaka Prefecture University
Theoretical Study on Structure Control of Carbon Nanomaterialswith Electron BeamPrincipal Investigator
- Principal Investigator
  
  YASUDA Masaaki
- Project Period (FY)
  2010 – 2012
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Osaka Prefecture University
電子ビーム励起プロセシングを対象とした分子シミュレーションの開発Principal Investigator
- Principal Investigator
  
  安田雅昭
- Project Period (FY)
  2008 – 2009
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Osaka Prefecture University
Dynamics of nanomaterials in electron beam processingPrincipal Investigator
- Principal Investigator
  
  YASUDA Masaaki
- Project Period (FY)
  2006 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Osaka Prefecture University
スピン偏極電子線マイクロアナライザの開発Principal Investigator
- Principal Investigator
  
  安田雅昭
- Project Period (FY)
  1998 – 1999
- Research Category
  
  Grant-in-Aid for Encouragement of Young Scientists (A)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Osaka Prefecture University

[Book] Computational Chemistry: Theories, Methods and Applications, Chapter 4: Molecular Simulation of Electron Beam Nanofabrication2014
- Author(s)
  M. Yasuda and K. Tada
- Total Pages
  22
- Publisher
  Nova Science Publishers
- Data Source
  KAKENHI-PROJECT-25249052
[Journal Article] Stochastic Simulation of the UV Curing Process in Nanoimprint Lithography: Pattern Size and Shape Effects in Sub-50 nm Lithography2017
- Author(s)
  M. Koyama, M. Shirai, H. Kawata, Y. Hirai and M. Yasuda
- Journal Title
  
  Journal of Vacuum Science and Technology B
  
  Volume: 35 Issue: 6
- DOI
  10.1116/1.4997295
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15K13978
[Journal Article] Multiscale Simulation of the Development Process in Electron Beam Lithography2017
- Author(s)
  M. Yasuda, S. Hitomi, H. Kawata and Y. Hirai
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 30 Issue: 2 Pages: 205-209
- DOI
  10.2494/photopolymer.30.205
- NAID
  130005950259
- ISSN
  0914-9244, 1349-6336
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15K13978
[Journal Article] Computational Study on UV Curing Characteristics in Nanoimprint Lithography: Stochastic Simulation2017
- Author(s)
  M. Koyama, M. Shirai, H. Kawata, Y. Hirai and M. Yasuda
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 56 Issue: 6S1 Pages: 06GL03-06GL03
- DOI
  10.7567/jjap.56.06gl03
- NAID
  210000147920
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15K13978
[Journal Article] Multiphysics Simulation of Nanopatterning in Electron Beam Lithography2016
- Author(s)
  M. Yasuda, K. Tada and M. Kotera
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 29 Issue: 5 Pages: 725-730
- DOI
  10.2494/photopolymer.29.725
- NAID
  130005261816
- ISSN
  0914-9244, 1349-6336
- Language
  English
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-15K13978
[Journal Article] Correlation between Electron-Irradiation Defects and Applied Stress in Graphene: A Molecular Dynamics Study2015
- Author(s)
  S. Kida, M. Yamamoto, K. Tada, H. Kawata, Y. Hirai and M. Yasuda
- Journal Title
  
  Journal of Vacuum Science and Technology A
  
  Volume: 33 Issue: 5
- DOI
  10.1116/1.4928414
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25249052
[Journal Article] Molecular Dynamics Study of Line Edge Roughness and the Proximity Effect in Electron Beam Lithography2015
- Author(s)
  S. Hitomi, K. Michishita, H. Kawata, Y. Hirai and M. Yasuda
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 28 Issue: 5 Pages: 677-682
- DOI
  10.2494/photopolymer.28.677
- NAID
  130005104283
- ISSN
  0914-9244, 1349-6336
- Language
  English
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-25249052
[Journal Article] Multiscale simulation of resist pattern shrinkage during scanning electron microscope observations2015
- Author(s)
  M. Yasuda, Y. Furukawa, H. Kawata and Y. Hirai
- Journal Title
  
  Journal of Vacuum Science and Technology B
  
  Volume: 33 Issue: 6
- DOI
  10.1116/1.4935956
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15K13978, KAKENHI-PROJECT-25249052
[Journal Article] Defect formation and transformation in graphene under electron irradiation: A molecular dynamics study2014
- Author(s)
  M. Yamamoto, Y. Asayama, M. Yasuda, H. Kawata and Y. Hirai
- Journal Title
  
  Journal of Vacuum Science and Technology B
  
  Volume: 32 Issue: 6
- DOI
  10.1116/1.4897304
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25249052
[Journal Article] トップダウンナノ加工のシミュレーションとナノ空間創生2014
- Author(s)
  安田雅昭, 多田和広, 平井義彦
- Journal Title
  
  機能材料
  
  Volume: Vol.34 Pages: 41-49
- Data Source
  KAKENHI-PROJECT-23656245
[Journal Article] Electron beam lithography simulation for sub-10 nm patterning2014
- Author(s)
  K. Michishita, M. Yasuda, H. Kawata and Y. Hirai
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 53 Issue: 6S Pages: 06JB02-06JB02
- DOI
  10.7567/jjap.53.06jb02
- NAID
  210000144069
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25249052
[Journal Article] トップダウンナノ加工のシミュレーションとナノ空間創生2014
- Author(s)
  安田雅昭，多田和広，平井義彦
- Journal Title
  
  機能材料
  
  Volume: 34 Pages: 41-49
- Data Source
  KAKENHI-PROJECT-23656245
[Journal Article] トップダウンナノ加工のシミュレーションとナノ空間創生2014
- Author(s)
  安田雅昭、多田和広、平井義彦
- Journal Title
  
  機能材料
  
  Volume: 34 Pages: 41-49
- Data Source
  KAKENHI-PROJECT-25249052
[Journal Article] Molecular Simulation of Pattern Formation in Electron Beam Lithography2013
- Author(s)
  Masaaki Yasuda, Hirofumi Sakai, Rina Takai, Hiroaki Kawata and Yoshihiko Hirai
- Journal Title
  
  Microelectronic Engineering
  
  Volume: 112 Pages: 287-290
- DOI
  10.1016/j.mee.2013.03.119
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23656245
[Journal Article] Correlation between Electron Irradiation Defects and Applied Stress in Carbon Nanotubes: A Molecular Dynamics Study2013
- Author(s)
  M. Yasuda, Y. Chihara, K. Tada, H. Kawata and Y. Hirai
- Journal Title
  
  Journal of Vacuum Science & Technology B
  
  Volume: 31 Issue: 6 Pages: 06FF06-06FF06
- DOI
  10.1116/1.4823760
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25249052
[Journal Article] Molecular Simulation of Pattern Formation in Electron Beam Lithography2013
- Author(s)
  M. Yasuda, H. Sakai, R. Takai, H. Kawata, Y. Hirai
- Journal Title
  
  Microelectronic Engineering
  
  Volume: Vol.112 Pages: 287-290
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23656245
[Journal Article] Molecular Dynamics Study of Electron-Irradiation Effects on Mechanical Properties of Carbon Nanotubes2013
- Author(s)
  K. Tada、 M. Yasuda、 T. Mitsueda、 R. Honda、H. Kawata、 Y. Hirai
- Journal Title
  
  Microelectronic Engineering
  
  Volume: 107 Pages: 50-53
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360145
[Journal Article] 、 Performance evaluation of carbon nanotube-based oscillators and bearings under electron irradiation: Molecular dynamics study2012
- Author(s)
  M. Yasuda、Y. Chihara、R. Mimura、Y. Kimoto、 H. Kawata、 Y. Hirai
- Journal Title
  
  Microelectronic Engineering
  
  Volume: 97 Pages: 241-246
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360145
[Journal Article] Performance evaluation of carbon nanotube-based oscillators and bearings under electron irradiation: Molecular dynamics study2012
- Author(s)
  Masaaki Yasuda et al.
- Journal Title
  
  Microelectronic Engineering
  
  Volume: 97 Pages: 241-246
- DOI
  10.1016/j.mee.2012.05.047
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360145
[Journal Article] Molecular Dynamics Study of the Structural Modification of Graphene by Electron Irradiation2012
- Author(s)
  Y. Asayama、 M. Yasuda、 K. Tada、 H. Kawata、Y. Hirai
- Journal Title
  
  Journal of Vacuum Science and Technology B
  
  Volume: 30
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360145
[Journal Article] Computational study on structural modification of single-walled carbon nanotubes by electron irradiation2011
- Author(s)
  M.Yasuda, et al.
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 109
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360145
[Journal Article] Computational Study of Electron-Irradiation Effects in Carbon Nanomaterials on Substrates2011
- Author(s)
  Y. Chihara、M. Yasuda、S. Wakuda、H. Kawata、Y. Hirai
- Journal Title
  
  Journal of Vacuum Science and Technology B
  
  Volume: 29
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360145
[Journal Article] Computational study on structural modification of single-walled carbon nanotubes by electron irradiation2011
- Author(s)
  M. Yasuda、 R. Mimura、 H. Kawata、 Y. Hirai
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 109
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22360145
[Journal Article] Molecular dynamics study of electron-irradiation effects in single-walled carbon nanotubes2007
- Author(s)
  Masaaki, Yasuda
- Journal Title
  
  Physical Review B Vol.75 No.20
  
  Pages: 205406-205406
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18560341
[Journal Article] Molecular Dynamics Study of Electron Irradiation Damages in Carbon Nanomaterials2007
- Author(s)
  Masaaki, Yasuda
- Journal Title
  
  Mater. Res. Soc. Symp. Proc Vol.1057
  
  Pages: 1110-28
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18560341
[Journal Article] Molecular dynamics study of electron-irradiation effects in single-walled carbon nanotubes2007
- Author(s)
  Masaaki Yasuda
- Journal Title
  
  Physical Review B 75
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18560341
[Journal Article] Molecular Dynamics Study of Electron Irradiation Damages in Carbon Nanomaterials2007
- Author(s)
  Masaaki Yasuda
- Journal Title
  
  Mater. Res. Soc. Symp. Proc. 1057
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18560341
[Journal Article] Molecular synamics study of electron-irradiation effects in single-walled carbon nanotubes2007
- Author(s)
  Masaaki Yasuda
- Journal Title
  
  Physical Review B 75・20
  
  Pages: 205406-205406
- Data Source
  KAKENHI-PROJECT-18560341
[Presentation] 基板上薄膜およびナノ構造物からの二次電子放出解析2021
- Author(s)
  安田雅昭
- Organizer
  日本顕微鏡学会SEMの物理学分科会討論会
- Data Source
  KAKENHI-PROJECT-19K22065
[Presentation] MILC (Si-Ge) 薄膜における二次電子像コントラストの成因2021
- Author(s)
  板倉賢, 小佐々周也, 赤嶺大志, 都甲薫, 熊谷和博, 安田雅昭
- Organizer
  日本顕微鏡学会SEMの物理学分科会討論会
- Data Source
  KAKENHI-PROJECT-19K22065
[Presentation] 結晶コントラスト再考２2020
- Author(s)
  安田雅昭
- Organizer
  日本顕微鏡学会SEMの物理学分科会討論会
- Data Source
  KAKENHI-PROJECT-19K22065
[Presentation] 結晶コントラスト再考２2020
- Author(s)
  安田雅昭
- Organizer
  日本顕微鏡学会SEMの物理学分科会討論会
- Data Source
  KAKENHI-PROJECT-19K22065
[Presentation] 電子線リソグラフィにおけるパターン形成の確率論的シミュレーション2018
- Author(s)
  香山真範、白井正充、川田博昭、平井義彦、安田雅昭
- Organizer
  第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Multiscale Simulation of Development Process in Electron Beam Lithography2017
- Author(s)
  M. Yasuda, S. Hitomi, H. Kawata and Y. Hirai
- Organizer
  34th International Conference of Photopolymer Science and Technology
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] ナノインプリントにおけるレジスト分子挙動の理論解析2017
- Author(s)
  安田雅昭，平井義彦
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（神奈川県横浜市）
- Year and Date
  2017-03-15
- Invited
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] UVナノインプリントにおけるレジスト硬化の確率論的シミュレーション2017
- Author(s)
  安田雅昭、香山真範、白井正充、川田博昭、平井義彦
- Organizer
  次世代リソグラフィワークショップ 2017
- Invited
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Computational study of pattern formation in electron beam lithography for negative type resists2017
- Author(s)
  M. Yasuda, M. Koyama, M. Shirai, H. Kawata and Y. Hirai
- Organizer
  43rd Int. Conf. on Micro- and Nano-Engineering 2017
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Impact of Mold Cavity Size on Resist Pattern Shape in Nanoimprint Lithography: Molecular Dynamics Study2017
- Author(s)
  R. Sakata, H. Kawata, Y. Hirai and M. Yasuda
- Organizer
  16th International Conference on Nanoimprint and Nanoprint Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Stochastic simulation of UV-curing process in nanoimprint lithography: Pattern size and shape effects in sub-50 nm2017
- Author(s)
  M. Koyama, M. Shirai, H. Kawata, Y. Hirai and M. Yasuda
- Organizer
  61st Int. Conf. on Electron, Ion and Photon Beam Technology and Nanofabrication
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Multiphysics Simulation of Nanopatterning in Electron Beam Lithography2016
- Author(s)
  M. Yasuda, K. Tada and M. Kotera
- Organizer
  33nd International Conference of Photopolymer Science and Technology
- Place of Presentation
  Makuhari Messe, Chiba, Japan
- Year and Date
  2016-06-24
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Multiscale Simulation of Pattern Formation in Electron Beam Lithography2016
- Author(s)
  S. Hitomi, H. Kawata, Y. Hirai and M. Yasuda
- Organizer
  The 23rd Symposium on Photomask and NGL Mask Technology
- Place of Presentation
  Pacifico Yokohama, Yokohama, Japan
- Year and Date
  2016-04-07
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] Multiscale Simulation of Pattern Formation in Electron Beam Lithography2016
- Author(s)
  S. Hitomi, H. Kawata, Y. Hirai and M. Yasuda
- Organizer
  23rd Symposium on Photomask and NGL Mask Technology
- Place of Presentation
  Pachifico Yokohama, Yokohama, Japan
- Year and Date
  2016-04-07
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Early Stages of Development Process in Electron-Exposed Resists: A Molecular Dynamics Study2016
- Author(s)
  S. Hitomi, H. Kawata, Y. Hirai and M. Yasuda
- Organizer
  2016 Int. Microprocesses and Nanotechnology Conf.
- Place of Presentation
  ANA Crowne Plaza Kyoto, Kyoto, Japan
- Year and Date
  2016-11-10
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] SEM観察における有機高分子レジスト収縮の理論解析2016
- Author(s)
  香山真範, 古川雄基，川田博昭，平井義彦, 安田雅昭
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学（東京都目黒区）
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] Multiphysics Simulation of Nanopatterning in Electron Beam Lithography2016
- Author(s)
  M. Yasuda, K. Tada and M. Kotera
- Organizer
  33rd International Conference of Photopolymer Science and Technology
- Place of Presentation
  Makuhari Messe, Chiba, Japan
- Year and Date
  2016-06-24
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] 二次元原子層材料の電子ビームナノ加工解析2016
- Author(s)
  多田和広，中川力哉，鎌仲章，安田雅昭
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学（東京都目黒区）
- Year and Date
  2016-03-20
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] Molecular Dynamics Study of Pattern Formation in Extreme Ultraviolet Lithography2016
- Author(s)
  M. Yasuda, A. Iwai, H. Kawata and Y. Hirai
- Organizer
  42nd Int. Conf. on Micro- and Nano-Engineering
- Place of Presentation
  Reed Messe Wien, Wien, Austria
- Year and Date
  2016-09-20
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] SEM観察における有機高分子レジスト収縮の理論解析2016
- Author(s)
  香山真範, 古川雄基，川田博昭，平井義彦, 安田雅昭
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学（東京都目黒区）
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] EUVリソグラフィの分子シミュレーション2016
- Author(s)
  岩井瑛規，川田博昭，平井義彦, 安田雅昭
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学（東京都目黒区）
- Year and Date
  2016-03-20
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] 電子線リソグラフィにおけるパターン形成のマルチスケール解析2016
- Author(s)
  人見洋，川田博昭，平井義彦, 安田雅昭
- Organizer
  マルチスケール材料力学シンポジウム
- Place of Presentation
  富山大学（富山県富山市）
- Year and Date
  2016-05-27
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Molecular Dynamics Study of Pattern Edge Structures in Extreme Ultraviolet Lithography2016
- Author(s)
  A. Iwai, H. Kawata, Y. Hirai and M. Yasuda
- Organizer
  2016 Int. Symp. on Extreme Ultraviolet Lithography
- Place of Presentation
  International Conference Center Hiroshima, Hiroshima, Japan
- Year and Date
  2016-10-24
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] 反射電子像における結晶方位コントラストの情報深さのモンテカルロ解析2015
- Author(s)
  安田雅昭
- Organizer
  日本顕微鏡学会第71回学術講演会
- Place of Presentation
  京都国際会館、京都
- Year and Date
  2015-05-14
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] Computational study on template release process for peeling (rotating) release method2015
- Author(s)
  T. Tochino, T. Iida, M. Yasuda, H. Kawata and Y. Hirai
- Organizer
  41st Int. Conf. on Micro- and Nano-Engineering 2015
- Place of Presentation
  World Forum, Hague, Netherlands
- Year and Date
  2015-09-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Molecular Dynamics Study of Line Edge Roughness and the Proximity Effects in Electron Beam Lithography2015
- Author(s)
  S. Hitomi, K. Michishita, H. Kawata, Y. Hirai and M. Yasuda
- Organizer
  32nd International Conference of Photopolymer Science and Technology
- Place of Presentation
  Makuhari Messe, Chiba, Japan
- Year and Date
  2015-06-26
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] 電子線リソグラフィにおけるSub-10nmパターン形成の分子動力学解析2015
- Author(s)
  安田雅昭
- Organizer
  次世代リソグラフィワークショップ2015
- Place of Presentation
  東京工業大学（東京都目黒区）
- Year and Date
  2015-07-07
- Invited
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] Molecular Dynamics Study of 2D SiC Monolayer and 2D Silica Bilayers under Electron Irradiation2015
- Author(s)
  K. Tada, A. Kamanaka, R. Nakagawa and M. Yasuda
- Organizer
  10th Int. Symp. on Atomic Level Characterizations for New Materials and Devices ’15
- Place of Presentation
  Kunibiki Messe, Matsue, Japan
- Year and Date
  2015-10-28
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] 電子線リソグラフィの分子シミュレーション（３）2015
- Author(s)
  人見洋，道下勝司，安田雅昭，川田博昭，平井義彦
- Organizer
  第62回応用物理学会関係連合講演会
- Place of Presentation
  東海大学、神奈川県、平塚
- Year and Date
  2015-03-12
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] 電子線リソグラフィにおけるSub-10nmパターン形成の分子動力学解析2015
- Author(s)
  安田雅昭
- Organizer
  次世代リソグラフィワークショップ2015
- Place of Presentation
  東京工業大学（東京都目黒区）
- Year and Date
  2015-07-07
- Invited
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Molecular Dynamics Study of Line Edge Roughness in Nanoimprint Lithography2015
- Author(s)
  N. Iwata, M. Yasuda, H. Kawata and Y. Hirai
- Organizer
  13th International Conference on Nanoimprint and Nanoprint Technology
- Place of Presentation
  Silverado Resort and Spa, Napa, USA
- Year and Date
  2015-10-23
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Molecular Dynamics Study on Line Width Roughness and Critical Dimensional Error in Nanoimprint Lithography2015
- Author(s)
  N. Iwata, M. Yasuda, H. Kawata and Y. Hirai
- Organizer
  2015 Int. Microprocesses and Nanotechnology Conf.
- Place of Presentation
  Toyama International Conference Center, Toyama, Japan
- Year and Date
  2015-11-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Molecular dynamics simulation of pattern formation in electron beam lithography2015
- Author(s)
  M. Yasuda
- Organizer
  Electron Beam Scattering Simulation Workshop
- Place of Presentation
  Aranvert Hotel Kyoto, Kyoto, Japan
- Year and Date
  2015-11-09
- Invited
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] 電子ビーム照射下の単層二次元SiCのダイナミクス解析2015
- Author(s)
  多田和広，和泉遼，安田雅昭
- Organizer
  第62回応用物理学会関係連合講演会
- Place of Presentation
  東海大学、神奈川県、平塚
- Year and Date
  2015-03-13
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] Molecular dynamics simulation of pattern formation in electron beam lithography2015
- Author(s)
  M. Yasuda
- Organizer
  Electron Beam Scattering Simulation Workshop
- Place of Presentation
  Aranvert Hotel Kyoto, Kyoto, Japan
- Year and Date
  2015-11-09
- Invited
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] ナノカーボン材料の電子ビーム加工の分子シミュレーション(Ⅸ)2015
- Author(s)
  木田昌吾，山本真也，安田雅昭，多田和広，川田博昭，平井義彦
- Organizer
  第62回応用物理学会関係連合講演会
- Place of Presentation
  東海大学、神奈川県、平塚
- Year and Date
  2015-03-11
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] SEM観察における有機高分子試料変形の理論解析（２）2015
- Author(s)
  古川雄基，安田雅昭，川田博昭，平井義彦
- Organizer
  日本顕微鏡学会第71回学術講演会
- Place of Presentation
  京都国際会館、京都
- Year and Date
  2015-05-14
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] Computational Study of Pattern Formation in Extreme Ultra Violet Lithography2015
- Author(s)
  M. Yasuda, A. Iwai, S. Hitomi, H. Kawata and Y. Hirai
- Organizer
  2015 Int. Microprocesses and Nanotechnology Conf.
- Place of Presentation
  Toyama International Conference Center, Toyama, Japan
- Year and Date
  2015-11-13
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13978
[Presentation] Computational Study of Resist Pattern Shrinkage under CD-SEM Observation2015
- Author(s)
  Y. Furukawa, M. Yasuda, H. Kawata and Y. Hirai
- Organizer
  59th Int. Conf. on Electron, Ion and Photon Beam Technology and Nanofabrication
- Place of Presentation
  Manchester Grand Hyatt, San Diego, USA
- Year and Date
  2015-05-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] Structural Changes of Polymer Materials under Electron Irradiation: Molecular Dynamics Study2015
- Author(s)
  M. Yasuda, S. Hitomi, Y. Furukawa, H. Kawata and Y. Hirai
- Organizer
  10th Int. Symp. on Atomic Level Characterizations for New Materials and Devices ’15
- Place of Presentation
  Kunibiki Messe, Matsue, Japan
- Year and Date
  2015-10-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] Interaction Volume of Electron Beam in Carbon Nanomaterials: A molecular Dynamics Study2014
- Author(s)
  M. Yasuda, S. Wakuda, Y. Asayama, H. Kawata and Y. Hirai
- Organizer
  2014 MRS Spring Meeting & Exhibit
- Place of Presentation
  San Francisco, USA
- Year and Date
  2014-04-23
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] Molecular Dynamics Study of Electron Irradiation Effects on Vibrational Properties of Carbon Nanotubes2014
- Author(s)
  K. Tada, R. Taneda and M. Yasuda
- Organizer
  2014 MRS Spring Meeting & Exhibit
- Place of Presentation
  San Francisco, USA
- Year and Date
  2014-04-23
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] 電子ビーム照射下の二分子層シリカのダイナミクス解析2014
- Author(s)
  和泉遼，石田淳，安田雅昭，多田和広
- Organizer
  平成26年度応用物理学会北陸・信越支部学術講演会
- Place of Presentation
  富山大学工学部、富山県、富山
- Year and Date
  2014-11-07
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] 電子線リソグラフィの分子シミュレーション(2)2014
- Author(s)
  道下勝司, 安田雅昭, 川田博昭, 平井義彦
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  相模原
- Year and Date
  2014-03-18
- Data Source
  KAKENHI-PROJECT-23656245
[Presentation] Computational Study on Electron Beam Lithography2014
- Author(s)
  M. Yasuda
- Organizer
  2014 Int. Microprocesses and Nanotechnology Conf.
- Place of Presentation
  Hilton Fukuoka Sea Hawk, Fukuoka, Japan
- Year and Date
  2014-11-05
- Invited
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] SEM観察における有機高分子試料変形の理論解析2014
- Author(s)
  安田雅昭，古川雄基，川田博昭，平井義彦
- Organizer
  日本顕微鏡学会第70回学術講演会
- Place of Presentation
  幕張メッセ、千葉県、幕張
- Year and Date
  2014-05-13
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] Molecular Dynamics Study on Resist Pattern Structure in Electron Beam Lithography2014
- Author(s)
  K. Michishita, M. Yasuda, H. Kawata and Y. Hirai
- Organizer
  21st Symposium on Photomask and NGL Mask Technology
- Place of Presentation
  Pacifico Yokohama, Yokohama, Japan
- Year and Date
  2014-04-15
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] 電子線リソグラフィにおけるパターン形成過程の分子シミュレーション2014
- Author(s)
  安田雅昭
- Organizer
  日本学術振興会荷電粒子ビームの工業への応用第132委員会第212回研究会
- Place of Presentation
  東京理科大学森戸記念館、東京都、新宿区
- Year and Date
  2014-10-03
- Invited
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] SEM観察におけるレジストパターン収縮の理論解析2014
- Author(s)
  古川雄基，安田雅昭，川田博昭，平井義彦
- Organizer
  第55回真空に関する連合講演会
- Place of Presentation
  大阪府立大学 I-siteなんば、大阪府、大阪市
- Year and Date
  2014-11-19
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] Molecular Dynamics Study on Proximity Effects in Electron Beam Lithography2014
- Author(s)
  K. Michishita, S. Hitomi, M. Yasuda, H. Kawata and Y. Hirai
- Organizer
  2014 Int. Microprocesses and Nanotechnology Conf.
- Place of Presentation
  Hilton Fukuoka Sea Hawk, Fukuoka, Japan
- Year and Date
  2014-11-06
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] ナノカーボン材料の電子ビーム加工の分子シミュレーション(Ⅷ)2014
- Author(s)
  山本真也，朝山良樹，安田雅昭，川田博昭，平井義彦
- Organizer
  第75回応用物理学会秋季学術講演会
- Place of Presentation
  北海道大学、北海道、札幌
- Year and Date
  2014-09-18
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] 電子線リソグラフィのマルチフィジックスシミュレーション2014
- Author(s)
  道下勝司，安田雅昭，川田博昭，平井義彦
- Organizer
  第55回真空に関する連合講演会
- Place of Presentation
  大阪府立大学 I-siteなんば、大阪府、大阪市
- Year and Date
  2014-11-19
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] Structural Change of Graphene during Electron Beam Process: Molecular Dynamics Study2014
- Author(s)
  Y. Asayama, M. Yamamoto, M. Yasuda, H. Kawata and Y. Hirai
- Organizer
  58th Int. Conf. on Electron, Ion and Photon Beam Technology and Nanofabrication
- Place of Presentation
  Washington DC, USA
- Year and Date
  2014-05-29
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] Molecular Dynamics Study of Line Edge Roughness in Electron Beam Lithography2014
- Author(s)
  K. Michishita, M. Yasuda, H. Kawata and Y. Hirai
- Organizer
  58th Int. Conf. on Electron, Ion and Photon Beam Technology and Nanofabrication
- Place of Presentation
  Washington DC, USA
- Year and Date
  2014-05-29
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] グラフェンの電子照射効果における試料固定条件依存性の分子動力学解析2014
- Author(s)
  山本真也，安田雅昭，川田博昭，平井義彦
- Organizer
  第55回真空に関する連合講演会
- Place of Presentation
  大阪府立大学 I-siteなんば、大阪府、大阪市
- Year and Date
  2014-11-19
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] Computational Study of Electron Irradiation Effects on Vibrational Properties of Carbon Nanotube Cantilevers2014
- Author(s)
  K. Tada, R. Taneda and M. Yasuda
- Organizer
  58th Int. Conf. on Electron, Ion and Photon Beam Technology and Nanofabrication
- Place of Presentation
  Washington DC, USA
- Year and Date
  2014-05-30
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] Molecular simulation of resist pattern shrinkage under CD-SEM observation2014
- Author(s)
  Y. Furukawa, M. Yasuda, H. Kawata and Y. Hirai
- Organizer
  21st Symposium on Photomask and NGL Mask Technology
- Place of Presentation
  Pacifico Yokohama, Yokohama, Japan
- Year and Date
  2014-04-15
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] 電子顕微鏡観察下でのカーボンナノチューブの機械的強度変化に関する分子動力学解析2013
- Author(s)
  多田和広、本田亮太、安田雅昭、川田博昭、平井義彦
- Organizer
  日本顕微鏡学会第69回学術講演会
- Place of Presentation
  吹田
- Year and Date
  2013-05-20
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] 電子線リソグラフィにおけるラインエッジラフネスの分子動力学解析(2)2013
- Author(s)
  道下勝司, 安田雅昭, 川田博昭, 平井義彦
- Organizer
  第18回分子動力学シンポジウム
- Place of Presentation
  東京都
- Year and Date
  2013-05-17
- Data Source
  KAKENHI-PROJECT-23656245
[Presentation] 電子顕微鏡観察下のグラフェン構造2013
- Author(s)
  朝山良樹、安田雅昭、川田博昭、平井義彦
- Organizer
  日本顕微鏡学会第69回学術講演会
- Place of Presentation
  吹田
- Year and Date
  2013-05-20
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] Correlation between Electron-Irradiation Effect and Stress in Carbon Nanotubes: Molecular Dynamics Study2013
- Author(s)
  Y. Chihara、 M. Yasuda、 K. Tada、 H. Kawata、Y. Hirai
- Organizer
  57th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication
- Place of Presentation
  Nashville, USA
- Year and Date
  2013-05-29
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] 電子線リソグラフィの分子シミュレーション2013
- Author(s)
  道下勝司, 高井里奈, 安田雅昭, 川田博昭, 平井義彦
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  厚木
- Year and Date
  2013-03-28
- Data Source
  KAKENHI-PROJECT-23656245
[Presentation] Electron Beam Lithography Simulation for Nanometer-scale Patterning2013
- Author(s)
  K. Michishita, M. Yasuda, H. Kawata and Y. Hirai
- Organizer
  2013 International Microprocesses and Nanotechnology Conference
- Place of Presentation
  Sapporo, Japan
- Year and Date
  2013-11-06
- Data Source
  KAKENHI-PROJECT-23656245
[Presentation] 電子線照射によるナノカーボン材料の機械的強度変化に関する原子応力解析2013
- Author(s)
  多田和広、本田亮太、地原由倫、安田雅昭、川田博昭、平井義彦
- Organizer
  60回応用物理学会春季学術講演会
- Place of Presentation
  厚木
- Year and Date
  2013-03-27
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] カーボンナノチューブの機械的強度に及ぼす電子線照射の影響に関する原子応力解析2013
- Author(s)
  多田和広、本田亮太、地原由倫、安田雅昭、川田博昭、平井義彦
- Organizer
  第18回分子動力学シンポジウム
- Place of Presentation
  東京都
- Year and Date
  2013-05-17
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] 応力を印加したカーボンナノチューブにおける電子線照射効果の分子動力学解析2013
- Author(s)
  地原由倫、安田雅昭、多田和広、川田博昭、平井義彦
- Organizer
  第18回分子動力学シンポジウム
- Place of Presentation
  東京都
- Year and Date
  2013-05-17
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] Molecular Simulation of Electron-Irradiation Damages in Resist Materials2012
- Author(s)
  M. Yasuda, K. Araki, H. Sakai, H. Kawata, Y. Hirai
- Organizer
  Ion and Photon Beam Technology and Nanofabrication
- Place of Presentation
  Hawaii, USA, MAY 30
- Year and Date
  2012-05-30
- Invited
- Data Source
  KAKENHI-PROJECT-23656245
[Presentation] 電子線リソグラフィにおけるパターン形成の分子シミュレーション2012
- Author(s)
  高井里奈, 酒井裕史, 安田雅昭, 川田博昭, 平井義彦
- Organizer
  第53回真空に関する連合講演会
- Place of Presentation
  神戸
- Year and Date
  2012-11-15
- Data Source
  KAKENHI-PROJECT-23656245
[Presentation] ナノカーボン材料の電子ビーム加工の分子シミュレーション(VI)2012
- Author(s)
  朝山良樹、安田雅昭、川田博昭、平井義彦
- Organizer
  第73回応用物理学会秋季学術講演会
- Place of Presentation
  松山
- Year and Date
  2012-09-11
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] 電子照射によるグラフェンの構造変化の分子動力学解析2012
- Author(s)
  朝山良樹、安田雅昭、川田博昭、平井義彦
- Organizer
  第53回真空に関する連合講演会
- Place of Presentation
  神戸
- Year and Date
  2012-11-15
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] 荷電粒子ビームによるグラフェン加工の分子シミュレーション2012
- Author(s)
  朝山良樹、地原由倫、安田雅昭、川田博昭、平井義彦
- Organizer
  第17回分子動力学シンポジウム
- Place of Presentation
  東京都
- Year and Date
  2012-06-15
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] SEM 観察における有機高分子試料の構造変化解析2012
- Author(s)
  安田雅昭, 荒木康誠, 酒井裕史, 川田博昭, 平井義彦
- Organizer
  日本顕微鏡学会第68回学術講演会
- Place of Presentation
  つくば
- Year and Date
  2012-05-14
- Data Source
  KAKENHI-PROJECT-23656245
[Presentation] カーボンナノチューブの機械的強度に及ぼす電子線照射の影響に関する分子シミュレーション2012
- Author(s)
  多田和広、三枝孝彰、安田雅昭、川田博昭、平井義彦
- Organizer
  第58回応用物理学会関係連合講演会
- Place of Presentation
  東京都
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] Molecular Dynamics Study of Pattern Formation in Electron Beam Lithography2012
- Author(s)
  M. Yasuda, H. Sakai, H. Kawata, Y. Hirai
- Organizer
  38th International Conference on Micro- and Nano-Engineering 2012
- Place of Presentation
  Toulouse, France
- Year and Date
  2012-09-17
- Data Source
  KAKENHI-PROJECT-23656245
[Presentation] 分子動力学法による有機高分子材料の電子線照射損傷の解析2012
- Author(s)
  荒木康誠、酒井裕史、安田雅昭、川田博昭、平井義彦
- Organizer
  第58回応用物理学会関係連合講演会
- Place of Presentation
  東京都新宿区
- Data Source
  KAKENHI-PROJECT-23656245
[Presentation] 電子線リソグラフィにおけるラインエッジラフネスの分子動力学解析2012
- Author(s)
  酒井裕史, 安田雅昭, 川田博昭, 平井義彦
- Organizer
  第17回分子動力学シンポジウム
- Place of Presentation
  東京都
- Year and Date
  2012-06-05
- Data Source
  KAKENHI-PROJECT-23656245
[Presentation] Molecular Dynamics Study on Structural Modifications of Graphene by Electron Beam Irradiation2012
- Author(s)
  Y. Asayama、Y. Chihara、M. Yasuda、H. Kawata、Y. Hirai
- Organizer
  56th International Conference on Electron
- Place of Presentation
  Hawaii, USA
- Year and Date
  2012-05-30
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] 応力をかけたナノカーボン材料への電子線照射の分子動力学解析2012
- Author(s)
  地原由倫、安田雅昭、多田和広、川田博昭、平井義彦
- Organizer
  第73回応用物理学会秋季学術講演会
- Place of Presentation
  松山
- Year and Date
  2012-09-11
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] Molecular Dynamics Study of Electron Irradiation Effects on Torsional and Bending Property of Carbon Nanotubes2012
- Author(s)
  K. Tada、 M. Yasuda、 H. Kawata、 Y. Hirai
- Organizer
  38th International Conference on Micro- and Nano-Engineering 2012
- Place of Presentation
  Toulouse, France
- Year and Date
  2012-09-17
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] 分子動力学法による有機高分子材料の電子線照射損傷の解析2012
- Author(s)
  荒木康誠, 酒井裕史, 安田雅昭, 川田博昭, 平井義彦
- Organizer
  第58回応用物理学会関係連合講演会
- Place of Presentation
  東京都
- Year and Date
  2012-03-16
- Data Source
  KAKENHI-PROJECT-23656245
[Presentation] ナノカーボン材料を対象とした電子ビーム加工の分子シミュレーション(V)2012
- Author(s)
  地原由倫、安田雅昭、川田博昭、平井義彦
- Organizer
  第58回応用物理学会関係連合講演会
- Place of Presentation
  京都
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] カーボンナノチューブフォレストからの二次電子放出のシミュレーション2011
- Author(s)
  安田雅昭
- Organizer
  日本顕微鏡学会第67回学術講演会
- Place of Presentation
  福岡県福岡
- Year and Date
  2011-05-16
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] Structural Changes in Carbon Nanomaterials under Low Energy Electron Irradiation: Molecular Dynamics Study2011
- Author(s)
  Y. Chihara、 S. Wakuda、 M. Yasuda、 K. Tada、H. Kawata、 Y. Hirai
- Organizer
  International Conference on Materials for Advanced Technologies 2011
- Place of Presentation
  Singapore
- Year and Date
  2011-06-28
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] 有機高分子試料への電子ビーム照射の分子シミュレーション(2)2011
- Author(s)
  荒木康誠, 酒井裕史, 安田雅昭, 川田博昭, 平井義彦
- Organizer
  第52回真空に関する連合講演会
- Place of Presentation
  東京都
- Year and Date
  2011-11-16
- Data Source
  KAKENHI-PROJECT-23656245
[Presentation] Performance Evaluation of Carbon Nanomachines under Electron Irradiation : Molecular Dynamics Study2011
- Author(s)
  M.Yasuda, et al
- Organizer
  37th Int.Conf.on Micro- and Nano-Engineering 2011
- Place of Presentation
  ベルリンドイツ
- Year and Date
  2011-09-20
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] カーボンナノチューブフォレストからの二次電子放出のシミュレーション2011
- Author(s)
  安田雅昭
- Organizer
  日本顕微鏡学会第67回学術講演会
- Place of Presentation
  福岡
- Year and Date
  2011-05-16
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] 基板上ナノカーボン材料への電子照射の分子シミュレーション2011
- Author(s)
  地原由倫、和久田真也、安田雅昭、川田博昭、平井義彦
- Organizer
  第1回マルチスケールマテリアルモデリングシンポジウム
- Place of Presentation
  吹田
- Year and Date
  2011-05-23
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] Molecular Dynamics Study on Electron-Irradiated Carbon Nanotubes: Nanomechanical Properties2011
- Author(s)
  K. Tada、 M. Yasuda、 H. Kawata、 Y. Hirai
- Organizer
  International Conference on Materials for Advanced Technologies 2011
- Place of Presentation
  Singapore
- Year and Date
  2011-06-28
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] Computational Study of Electron-Irradiation Effects in Carbon Nanomaterials on Substrates、55th International Conference on Electron2011
- Author(s)
  M. Yasuda、Y. Chihara、S. Wakuda、H. Kawata、Y. Hirai
- Organizer
  Ion and Photon Beam Technology and Nanofabrication
- Place of Presentation
  Las Vegas, USA
- Year and Date
  2011-06-01
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] ナノカーボン材料の電子ビーム加工の分子シミュレーション(IV)2011
- Author(s)
  地原由倫、和久田真也、安田雅昭、川田博昭、平井義彦
- Organizer
  第58回応用物理学会関係連合講演会
- Place of Presentation
  厚木
- Year and Date
  2011-03-24
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] 有機高分子試料への電子ビーム照射の分子シミュレーション(2)2011
- Author(s)
  荒木康誠、酒井裕史、安田雅昭、川田博昭、平井義彦
- Organizer
  第52回真空に関する連合講演会
- Place of Presentation
  東京都豊島区
- Data Source
  KAKENHI-PROJECT-23656245
[Presentation] Computational Study of Electron-Irradiation Effects in Carbon Nanomaterials on Substrates2011
- Author(s)
  M.Yasuda, et al
- Organizer
  55th Int.Conf.on Electron, Ion and Photon Beam Technology and Nanofabrication
- Place of Presentation
  ラスベガスアメリカ合衆国
- Year and Date
  2011-06-01
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] 低エネルギー電子線照射によるナノカーボン材料の構造変化解析2011
- Author(s)
  安田雅昭、和久田真也、地原由倫、川田博昭、平井義彦
- Organizer
  日本顕微鏡学会第67回学術講演会
- Place of Presentation
  福岡
- Year and Date
  2011-05-16
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] Performance Evaluation of Carbon Nanomachines under Electron Irradiation: Molecular Dynamics Study2011
- Author(s)
  M. Yasuda、Y. Chihara、H. Kawata、Y. Hirai
- Organizer
  37th International Conference on Micro- and Nano-Engineering 2011
- Place of Presentation
  Berlin, Germany
- Year and Date
  2011-09-20
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] ナノカーボン材料を対象とした電子ビーム誘起構造変化の分子シミュレーション(3)2011
- Author(s)
  地原由倫、安田雅昭、川田博昭、平井義彦
- Organizer
  第52回真空に関する連合講演会
- Place of Presentation
  東京都
- Year and Date
  2011-11-16
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] 低エネルギー電子線照射によるナノカーボン材料の構造変化解析2011
- Author(s)
  安田雅昭, 他
- Organizer
  日本顕微鏡学会第67回学術講演会
- Place of Presentation
  福岡県福岡
- Year and Date
  2011-05-16
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] ナノカーボン材料を対象とした電子ビーム励起構造変化のダイナミクス解析2010
- Author(s)
  安田雅昭、和久田真也、川田博昭、平井義彦
- Organizer
  日本顕微鏡学会第66回学術講演会
- Place of Presentation
  名古屋
- Year and Date
  2010-05-24
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] ナノカーボン材料を対象とした電子ビーム励起構造変化のダイナミクス解析2010
- Author(s)
  安田雅昭, 他
- Organizer
  日本顕微鏡学会第66回学術講演会
- Place of Presentation
  愛知県名古屋
- Year and Date
  2010-05-24
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] Molecular Dynamics Study on Mechanical Properties of Electron-Irradiated Carbon Nanaotubes: Tensile Property2010
- Author(s)
  S. Wakuda、 M. Yasuda、 H. Kawata、 Y. Hirai
- Organizer
  36th International Conference on Micro- and Nano-Engineering
- Place of Presentation
  Genova, Italy
- Year and Date
  2010-09-21
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] 電子線照射によるカーボンナノチューブの力学的特性変化の解析2010
- Author(s)
  和久田真也、伊藤圭紀、安田雅昭、川田博昭、平井義彦
- Organizer
  第15回分子動力学シンポジウム
- Place of Presentation
  札幌
- Year and Date
  2010-05-21
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] ナノカーボン材料を対象とした電子ビーム誘起構造変化の分子シミュレーション(II)2010
- Author(s)
  和久田真也、安田雅昭、地原由倫、川田博昭、平井義彦
- Organizer
  第51回真空に関する連合講演会
- Place of Presentation
  吹田
- Year and Date
  2010-11-05
- Data Source
  KAKENHI-PROJECT-22360145
[Presentation] Molecular dynamics study on bending deformation of carbon nanotubesby electron beam irradiation2009
- Author(s)
  M.Yasuda, et al.
- Organizer
  The 53rd International Conf.on Electron, Ion, Photon Beam Technology and Nanofabrication
- Place of Presentation
  米国マルコアイランド
- Year and Date
  2009-05-27
- Data Source
  KAKENHI-PROJECT-20656058
[Presentation] Simulation of structural modification of carbon nanotubes with electronbeam2009
- Author(s)
  M.Yasuda, et al.
- Organizer
  35th International Conference on Micro- and Nano-Engineering 2009
- Place of Presentation
  ベルギーゲント
- Year and Date
  2009-09-29
- Data Source
  KAKENHI-PROJECT-20656058
[Presentation] Simulation of electron irradiation effects in carbon nanotubes-Introduction of relativistic effect-2009
- Author(s)
  M.Yasuda, et al.
- Organizer
  5th International Conference on Materials for Advanced Technologies
- Place of Presentation
  シンガポール
- Year and Date
  2009-06-30
- Data Source
  KAKENHI-PROJECT-20656058
[Presentation] Simulation of Structural changes in Carbon Nanotubes under Electron Beam Irradiation2008
- Author(s)
  M. Yasuda, et al.
- Organizer
  9th Asia-Pacific Microscopy Conference
- Place of Presentation
  韓国済州島
- Year and Date
  2008-11-06
- Data Source
  KAKENHI-PROJECT-20656058
[Presentation] 電子顕微鏡観察下におけるナノカーボン材料のダイナミクス解析2007
- Author(s)
  安田雅昭
- Organizer
  日本顕微鏡学会第63回学術講演会
- Place of Presentation
  新潟
- Year and Date
  2007-05-21
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18560341
[Presentation] Molecular Dynamics Study of Electron Irradiation Damages in Carbon Nanomaterials2007
- Author(s)
  Masaaki Yasuda
- Organizer
  2007 Material Research Society Fall Meeting
- Place of Presentation
  ボストン(アメリカ合衆国)
- Year and Date
  2007-11-27
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18560341
[Presentation] A Molecular Dynamics Study of Electron Irradiation Damages in Carbon Nano-materials2007
- Author(s)
  Masaaki, Yasuda
- Organizer
  68th Autumn Meeting of Japan Soc. of Applied Physics
- Place of Presentation
  Sapporo, Japan
- Year and Date
  2007-09-04
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18560341
[Presentation] Molecular Dynamics Study on Electron-Beam Assembly of Carbon Nanotubes2007
- Author(s)
  Masaaki, Yasuda
- Organizer
  33rd Int. Conf. on Micro- and Nano-Engineering
- Place of Presentation
  Copenhagen, Denmark
- Year and Date
  2007-09-24
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18560341
[Presentation] Molecular Dynamics Study of Electron Irradiation Damages in Carbon Nanomaterials2007
- Author(s)
  Masaaki, Yasuda
- Organizer
  2007 Material Research Society Fall Meeting
- Place of Presentation
  Boston, USA
- Year and Date
  2007-11-27
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18560341
[Presentation] 分子動力学法によるナノカーボン材料の電子線照射損傷の解析2007
- Author(s)
  安田雅昭
- Organizer
  第68回応用物理学会学術講演会
- Place of Presentation
  札幌
- Year and Date
  2007-09-04
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18560341
[Presentation] Molecular Dynamics Study on Electron-Beam Assembly of Carbon Nanotubes2007
- Author(s)
  Masaaki Yasuda
- Organizer
  33nd Int. Conf. on Micro- and Nano-Engineering
- Place of Presentation
  コペンハーゲン(デンマーク)
- Year and Date
  2007-09-24
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18560341
[Presentation] Molecular Dynamics Study on Electron-Beam Assembly of Carbon Nanotubes2007
- Author(s)
  Masaaki Yasuda
- Organizer
  33rd Int.Conf.on Micro-and Nano-Engineering
- Place of Presentation
  コペンハーゲン(デンマーク)
- Year and Date
  2007-09-24
- Data Source
  KAKENHI-PROJECT-18560341
[Presentation] Analysis on dynamics of Carbon Nanomaterials under electron microscope observation2007
- Author(s)
  Masaaki, Yasuda
- Organizer
  63rd Annual Meeting of Japanese Soc. of Microscopy
- Place of Presentation
  Niigata, Japan
- Year and Date
  2007-05-21
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18560341
[Presentation] Beam Condition Dependence of Electron irradiation Damages in Carbon Nanotubes2006
- Author(s)
  Masaaki, Yasuda
- Organizer
  32nd Int. Conf. on Micro- and Nano-Engineering
- Place of Presentation
  Barcelona, Spain
- Year and Date
  2006-09-18
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18560341
[Presentation] Beam Condition Dependence of Electron irradiation Damages in Carbon Nanotubes2006
- Author(s)
  Masaaki Yasuda
- Organizer
  32nd Int. Conf. on Micro- and Nano-Engineering
- Place of Presentation
  バルセロナ(スペイン)
- Year and Date
  2006-09-18
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18560341
[Presentation] 電子線リソグラフィの分子シミュレーション（２）
- Author(s)
  道下勝司, 安田雅昭，川田博昭，平井義彦
- Organizer
  第60回応用物理学会関係連合講演会
- Place of Presentation
  神奈川県、相模原
- Data Source
  KAKENHI-PROJECT-23656245
[Presentation] Molecular Simulation of Electron-Irradiation Damages in Resist Materials
- Author(s)
  M. Yasuda, K. Araki, H. Sakai, H. Kawata and Y. Hirai
- Organizer
  56th Int. Conf. on Electron, Ion and Photon Beam Technology and Nanofabrication
- Place of Presentation
  Hawaii, USA
- Invited
- Data Source
  KAKENHI-PROJECT-23656245
[Presentation] Computational Study of Electron Irradiation Effects on Carbon Nanotubes: Nanomechanical Properties
- Author(s)
  Kazuhiro Tada and Masaaki Yasuda
- Organizer
  9th Int. Symp. on Atomic Level Characterizations for New Materials and Devices ’13
- Place of Presentation
  Hawaii, USA
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] Electron Irradiation Effects on Atomic Scale Mechanics of Carbon Nanotubes: Molecular Dynamics Study
- Author(s)
  Kazuhiro Tada, Masaaki Yasuda, Hiroaki Kawata and Yoshihiko Hirai
- Organizer
  19th Int. Vacuum Congress & Int. Conf. on Nanosci. and Technol. 2013
- Place of Presentation
  Paris, France
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] 電子線リソグラフィにおけるラインエッジラフネスの分子動力学解析（２）
- Author(s)
  道下勝司，安田雅昭，川田博昭，平井義彦
- Organizer
  第18回分子動力学シンポジウム
- Place of Presentation
  目黒区、東京都
- Data Source
  KAKENHI-PROJECT-23656245
[Presentation] Electron Beam Lithography Simulation for Nanometer-scale Patterning
- Author(s)
  Katsushi Michishita, Masaaki Yasuda, Hiroaki Kawata and Yoshihiko Hirai
- Organizer
  2013 Int. Microprocesses and Nanotechnology Conf.
- Place of Presentation
  Sapporo, Japan
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] Electron irradiation effects on nanomechnical properties of graphene: Molecular dynamics study
- Author(s)
  Kazuhiro Tada, Takuya Hashimoto and Masaaki Yasuda
- Organizer
  4th Workshop on Theory, Modeling and Computational Methods for Semiconductor Materials and Nanostructures
- Place of Presentation
  Manchester, England
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] Molecular Simulation of Structural Changes of Organic Polymer Materials under Electron Irradiation
- Author(s)
  Katsushi Michishita, Yuki Furukawa, Masaaki Yasuda, Hiroaki Kawata and Yoshihiko Hirai
- Organizer
  9th Int. Symp. on Atomic Level Characterizations for New Materials and Devices ’13
- Place of Presentation
  Hawaii, USA
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] 電子線リソグラフィにおけるラインエッジラフネスの分子動力学解析
- Author(s)
  酒井裕史，安田雅昭，川田博昭，平井義彦
- Organizer
  第17回分子動力学シンポジウム
- Place of Presentation
  東京都、目黒区
- Data Source
  KAKENHI-PROJECT-23656245
[Presentation] 電子線リソグラフィの分子シミュレーション
- Author(s)
  道下勝司, 高井里奈，安田雅昭，川田博昭，平井義彦
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川県、厚木市
- Data Source
  KAKENHI-PROJECT-23656245
[Presentation] SEM観察における有機高分子試料の構造変化解析
- Author(s)
  安田雅昭、荒木康誠、酒井裕史、川田博昭、平井義彦
- Organizer
  日本顕微鏡学会第68回学術講演会
- Place of Presentation
  茨城県、つくば市
- Data Source
  KAKENHI-PROJECT-23656245
[Presentation] Computational Study on Structural Changes of Carbon Nanomaterials under Electron Irradiation
- Author(s)
  M. Yasuda, M. Yamamoto, H. Kawata and Y. Hirai
- Organizer
  18th Int. Microscopy Congress
- Place of Presentation
  Prague, Czech Republic
- Year and Date
  2014-09-10 – 2014-09-11
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] Molecular Dynamics Dtudy on Interaction Volume in Electron-Irradiated Carbon Nanomaterials
- Author(s)
  Masaaki Yasuda, Shinya Wakuda, Yoshiki Asayama, Hiroaki Kawata and Yoshihiko Hirai
- Organizer
  39th Int. Conf. on Micro- and Nano-Engineering 2013
- Place of Presentation
  London, England
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] Molecular Dynamics Study of Pattern Formation in Electron Beam Lithography
- Author(s)
  M. Yasuda, H. Sakai, H. Kawata and Y. Hirai
- Organizer
  38th Int. Conf. on Micro- and Nano-Engineering 2012
- Place of Presentation
  Toulouse, France
- Data Source
  KAKENHI-PROJECT-23656245
[Presentation] ナノカーボン材料の電子ビーム加工の分子シミュレーション(VII)
- Author(s)
  朝山良樹，安田雅昭，川田博昭，平井義彦
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  京都府、京田辺
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] Molecular Dynamics Study of Electron-Irradiation Effects in Graphene
- Author(s)
  Yoshiki Asayama, Masaaki Yasuda, Hiroaki Kawata and Yoshihiko Hirai
- Organizer
  9th Int. Symp. on Atomic Level Characterizations for New Materials and Devices ’13
- Place of Presentation
  Hawaii, USA
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] カーボンナノチューブ片持ち梁の振動特性への電子線照射効果に関する分子動力学解析
- Author(s)
  多田和広，種田涼佑，安田雅昭
- Organizer
  第60回応用物理学会関係連合講演会
- Place of Presentation
  神奈川県、相模原
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] Molecular Dynamics Study of Electron Irradiation Effects on Nanomechanical Properties of Graphene
- Author(s)
  Kazuhiro Tada, Masaaki Yasuda, Ryosuke Taneda, Hiroaki Kawata and Yoshihiko Hirai
- Organizer
  39th Int. Conf. on Micro- and Nano-Engineering 2013
- Place of Presentation
  London, England
- Data Source
  KAKENHI-PROJECT-25249052
[Presentation] Electron Beam Lithography Simulation for Nanometer-scale Patterning
- Author(s)
  Katsushi Michishita, Masaaki Yasuda, Hiroaki Kawata, and Yoshihiko Hirai
- Organizer
  2013 Int. Microprocesses and Nanotechnology Conf.
- Place of Presentation
  Sapporo, Japan
- Data Source
  KAKENHI-PROJECT-23656245
[Presentation] 電子線リソグラフィにおけるパターン形成の分子シミュレーション
- Author(s)
  高井里奈，酒井裕史，安田雅昭，川田博昭，平井義彦
- Organizer
  第53回真空に関する連合講演会
- Place of Presentation
  兵庫県、神戸市
- Data Source
  KAKENHI-PROJECT-23656245
[Presentation] 電子線リソグラフィの分子シミュレーション（２）
- Author(s)
  道下勝司, 安田雅昭，川田博昭，平井義彦
- Organizer
  第60回応用物理学会関係連合講演会
- Place of Presentation
  神奈川県、相模原
- Data Source
  KAKENHI-PROJECT-25249052

1. TADA Kazuhiro (90579731)

# of Collaborated Projects: 2 results

# of Collaborated Products: 29 results
2. KOTERA MASATOSHI (40170279)

# of Collaborated Projects: 2 results

# of Collaborated Products: 2 results
3. HIRAI Yoshihiko (50285300)

# of Collaborated Projects: 2 results

# of Collaborated Products: 21 results
4. Itakura Masaru (20203078)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
5. 熊谷和博 (20582042)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
6. 都甲薫 (30611280)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
7. 赤嶺大志 (40804737)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results

Yasuda Masaaki 安田 雅昭

安田 雅昭 ヤスダ マサアキ

YASUDA Masaaki 安田 雅昭

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Development of contrast-amplified observation method for low-voltage secondary electron images

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Computational study of pattern formation process in scale-boundary regionPrincipal Investigator

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Multiphysics simulation of electron beam nanoprocessPrincipal Investigator

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Molecular simulation of pattern formation in electron beam lithographyPrincipal Investigator

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Theoretical Study on Structure Control of Carbon Nanomaterialswith Electron BeamPrincipal Investigator

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電子ビーム励起プロセシングを対象とした分子シミュレーションの開発Principal Investigator

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Dynamics of nanomaterials in electron beam processingPrincipal Investigator

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スピン偏極電子線マイクロアナライザの開発Principal Investigator

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[Book] Computational Chemistry: Theories, Methods and Applications, Chapter 4: Molecular Simulation of Electron Beam Nanofabrication2014

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[Journal Article] Stochastic Simulation of the UV Curing Process in Nanoimprint Lithography: Pattern Size and Shape Effects in Sub-50 nm Lithography2017

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[Journal Article] Multiscale Simulation of the Development Process in Electron Beam Lithography2017

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[Journal Article] Computational Study on UV Curing Characteristics in Nanoimprint Lithography: Stochastic Simulation2017

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[Journal Article] Multiphysics Simulation of Nanopatterning in Electron Beam Lithography2016

Author(s)

Yasuda Masaaki 安田雅昭

安田雅昭ヤスダマサアキ

YASUDA Masaaki 安田雅昭