Tsuru Toshihide 津留俊英

… Alternative Names

TSURU Toshihide 津留俊英

津留俊英ツルトシヒデ

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Researcher Number	30306526
Other IDs
External Links
Affiliation (Current)	2025: 山形大学, 地域教育文化学部, 教授
Affiliation (based on the past Project Information) *help	2024: 山形大学, 地域教育文化学部, 教授 2018: 山形大学, 地域教育文化学部, 教授 2016 – 2017: 山形大学, 地域教育文化学部, 准教授 2012 – 2015: 山形大学, 教育文化学部, 准教授 2014: 東北大学, 多元物質科学研究所, 助教 … More 2012: 山形大学, 地域教育文化学部, 准教授 2011: 東北大学, 多元物質研究所, 助教 2011: 東北大学, 多元物質科学研究所, 助教 2007 – 2009: Tohoku University, IMRAM, Assistant Professor 2002 – 2006: 東北大学, 多元物質科学研究所, 助手 1998 – 1999: 学習院大学, 理学部, 助手 Less
Review Section/Research Field	Principal Investigator Applied optics/Quantum optical engineering / Basic Section 09080:Science education-related / Cultural assets study and museology / Optical engineering, Photon science / Thin film/Surface and interfacial physical properties Except Principal Investigator Medium-sized Section 30:Applied physics and engineering and related fields / Engineering / Science and Engineering / Applied materials science/Crystal engineering / Science and Engineering / Applied optics/Quantum optical engineering / Applied optics/Quantum optical engineering
Keywords	Principal Investigator エリプソメトリー / 偏光計測 / 形状計測 / 偏光 / 超薄膜 / 軟X線 / 多層膜 / 光計測 / STEAM教育 / 理科教育 … More / ICT機器 / 3D計測 / 応用光学・量子光工学 / 屈折率 / テフラ / 屈折率計測 / 偏光解析 / ミラー / 光学素子 / 広帯域 / ピコメーター / 成膜モニター / エリプソメーター / Layer-by-layer / その場計測 / モニタリング … More Except Principal Investigator 軟X線 / エリプソメーター / スパッタリング / リソグラフィ / 多層膜ミラー / Growth rate monitor / Ellipsometer / Sputtering / Period thickness distribution control / Laser Plasma / Microscope / Multilayer / Soft X-ray / 成膜レートモニター / 周期膜厚分布制御 / レーザープラズマ / 顕微鏡 / 多層膜 / OSF (Oxidation Induced Stacking Faults) / micro-defects / LST (Light Scattering Tomography) / photoluminescence mapping / elastic scattering / Laser Scanning Tomography / growth-in defects / Light Scattering Tomography / 半導体微小欠陥 / 微小欠陥 / 半導体 / 評価法 / 光散乱トモグラフィー / OSF(Oxidation induced Stacking Faults) / 微少欠陥 / LST(Light Scattering Tomography) / 蛍光 / 弾性散乱 / LST(Laser Scanning Tomography) / 成長欠陥 / 光散乱断層画法 / 負の屈折率 / 光磁性 / プラズモニクス / 数値計算 / 光物性 / 微細加工 / 量子ドット / シミュレーション / マックスウェル応力 / トポロジカル絶縁体 / 磁気カイラル効果 / 光リソグラフィー / 周期多重極境界要素法 / カイラル / 非相反性 / トポロジー最適化 / ベリー位相 / 光整流 / メタマテリアル / 偏光計測干渉計 / 分光計測 / エリプソメトリー / ポラリメーター / 偏光 / ミリング / X線 / 極紫外光 / 電磁波 / 波面制御 / 反射波面 / 多層膜鏡 Less

Development of an optical 3D shape measurement system using ICT equipments and its application to science education programsPrincipal Investigator
- Principal Investigator
  
  津留俊英
- Project Period (FY)
  2024 – 2027
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 09080:Science education-related
- Research Institution
  Yamagata University
Precise wavefront control using layer-by-layer etching of multilayer mirrors for diffraction-limited extreme ultraviolet imaging
- Principal Investigator
  
  豊田光紀
- Project Period (FY)
  2024 – 2027
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Review Section
  
  Medium-sized Section 30:Applied physics and engineering and related fields
- Research Institution
  Tokyo Polytechnic University
Development of micro-ellipsometer for precise measurement of refractive index, and its application to tephrochronologyPrincipal Investigator
- Principal Investigator
  
  Tsuru Toshihide
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Cultural assets study and museology
- Research Institution
  Yamagata University
Development of in-situ three-dimensional shape measurement method by tilt-ellipsometryPrincipal Investigator
- Principal Investigator
  
  Tsuru Toshihide
- Project Period (FY)
  2013 – 2015
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Optical engineering, Photon science
- Research Institution
  Yamagata University
Three-dimensional shape measurement by imaging ellipsometryPrincipal Investigator
- Principal Investigator
  
  TSURU Toshihide
- Project Period (FY)
  2011 – 2012
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Yamagata University
  Tohoku University
Fabrication and physics of periodic metamaterials in optical regime
- Principal Investigator
  
  ISHIHARA Teruya
- Project Period (FY)
  2010 – 2014
- Research Category
  
  Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)
- Review Section
  
  Science and Engineering
- Research Institution
  Tohoku University
The development of the spectroscopic real-time ellipsomete
- Principal Investigator
  
  KAWABATA Shuichi
- Project Period (FY)
  2009 – 2011
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Tokyo Polytechnic University
Aperiodic design and development of soft X-ray broadband multilayermirror opticsPrincipal Investigator
- Principal Investigator
  
  TSURU Toshihide
- Project Period (FY)
  2008 – 2009
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  Tohoku University
ピコメーター膜厚検出感度を持つ成膜モニターの開発と水の窓軟X線多層膜反射鏡の作製Principal Investigator
- Principal Investigator
  
  津留俊英
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Tohoku University
High-resolution, element-specific microscope using a laser-produced-plasma soft X-ray source
- Principal Investigator
  
  YAMAMOTO Masaki
- Project Period (FY)
  2003 – 2007
- Research Category
  
  Grant-in-Aid for Specially Promoted Research
- Review Section
  
  Science and Engineering
  Engineering
- Research Institution
  Tohoku University
多層膜表面ミリングによる反射波面の制御Principal Investigator
- Principal Investigator
  
  津留俊英, YAMAMOTO Masaki
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Tohoku University
Tomographic detection of micro-defects in semi-conductions due to light scattering and photoluminescence imaging
- Principal Investigator
  
  OGAWA Tomoya
- Project Period (FY)
  1998 – 1999
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Applied materials science/Crystal engineering
- Research Institution
  Gakushuin University

[Book] Compendium of Surface and Interface Analysis2018
- Author(s)
  Toshihide Tsuru et al., The Surface Science Society of Japan ed.
- Total Pages
  853
- Publisher
  Springer, Singapore
- ISBN
  9789811061554
- Data Source
  KAKENHI-PROJECT-16K12805
[Journal Article] 傾斜エリプソメトリーとその応用2018
- Author(s)
  津留俊英
- Journal Title
  
  光アライアンス
  
  Volume: 29 Pages: 31-35
- Data Source
  KAKENHI-PROJECT-16K12805
[Journal Article] Cr/Sc/Mo multilayer for condenser optics in water window microscopes2017
- Author(s)
  T. Hatano, T. Ejima, T. Tsuru
- Journal Title
  
  Journal of Electron Spectroscopy and Related Phenomena
  
  Volume: 印刷中
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K12805
[Journal Article] Three-Dimensional Shape Measurements by Imaging Ellipsometry2014
- Author(s)
  津留俊英, 山本治美, 松川裕章
- Journal Title
  
  Hyomen Kagaku
  
  Volume: 35 Issue: 6 Pages: 300-305
- DOI
  10.1380/jsssj.35.300
- NAID
  130004718846
- ISSN
  0388-5321, 1881-4743
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25390089
[Journal Article] Tilt-ellipsometry of object surface by specular reflection for three-dimensional shape measurement2013
- Author(s)
  Toshihide Tsuru
- Journal Title
  
  Optics Express
  
  Volume: 21 Issue: 5 Pages: 6625-6632
- DOI
  10.1364/oe.21.006625
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23760042
[Journal Article] Development of spectroscopic transmission-type four detector polarimeter2011
- Author(s)
  T. Tsuru, Y. Kubota, T. Tadokoro and S. Kawabata
- Journal Title
  
  Thin Solid Films
  
  Volume: 519 Issue: 9 Pages: 2707-2710
- DOI
  10.1016/j.tsf.2010.12.044
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21560046
[Journal Article] 軟X線顕微鏡用精密多層膜ミラーの開発2010
- Author(s)
  津留俊英, 羽多野忠, 原田哲男, 山本正樹
- Journal Title
  
  放射光 3(掲載確定)
- NAID
  10026450527
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20760017
[Journal Article] 軟X線顕微鏡用精密多層膜ミラーの開発2010
- Author(s)
  津留俊英, 羽多野忠, 原田哲男, 山本正樹
- Journal Title
  
  放射光 (印刷中)
- NAID
  10026450527
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20760017
[Journal Article] Precise determination of layer structure with EUV ellipsometry data obtained by multilayer polarizing elements2008
- Author(s)
  T. Tsuru
- Journal Title
  
  Physica Status Solidi(c) 5
  
  Pages: 1129-1132
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] Precise determination of layer structure with EUV ellipsometry data obtained by multilayer polarizing elements2008
- Author(s)
  T. Tsuru
- Journal Title
  
  Phys. Stat Sol (c) 5
  
  Pages: 1129-1132
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] Advanced nanometer-size structures, Design and in-situ fabrication control of X-EUV mirrors2008
- Author(s)
  Eva Majkova, Matej Jergel, Masaki Yamamoto, Toshihide Tsuru, Stefan Luby, Peter Siffalovi
- Journal Title
  
  Acta Physica Slovaca 57(6)
  
  Pages: 911-1074
- Data Source
  KAKENHI-PROJECT-20760017
[Journal Article] Reflection passband broadening by aperiodic designs of EUV/soft X-ray multilayers2007
- Author(s)
  T.Tsuru
- Journal Title
  
  AIP Proceedings 879
  
  Pages: 1524-1527
- NAID
  120003728276
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] Reflection passband broadening by aperiodic designs of EUV/soft X-ray multilayers2007
- Author(s)
  T. Tsuru
- Journal Title
  
  AIP, Proc. 9th International Conference on Synchrotron Radiation Instrumentation 879
  
  Pages: 1524-1527
- NAID
  120003728276
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] Reflection passband broadening by aperiodic designs of EUV/soft X-ray multilayers2007
- Author(s)
  T. Tsuru
- Journal Title
  
  AIR, Proc. 9th International Conference on Synchrotron Radiation Instrumentation 879
  
  Pages: 1524-1527
- NAID
  120003728276
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] In-situ ellipsometric monitor with layer-by-layer analysis for precise thickness control of EUV multilayer optics2006
- Author(s)
  T.Tsuru
- Journal Title
  
  Thin Solid Films 515
  
  Pages: 947-951
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] Investigation of soft X-ray multilayer fabrication by an in-situ ellipsometric depositionmonitor2006
- Author(s)
  T. Tsuru
- Journal Title
  
  IPAP Conference Series 7
  
  Pages: 168-170
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] In-situ ellipsometric monitor with layer-by-layer analysis for precise thickness control of EUV multilayer optics2006
- Author(s)
  T. Tsuru
- Journal Title
  
  Thin Solid Films 515
  
  Pages: 947-951
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] Investigation of soft X-ray multilayer fabrication by an in-situ ellipsometric deposition monitor2006
- Author(s)
  T. Tsuru
- Journal Title
  
  IPAP Conference Series 7
  
  Pages: 168-170
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] Investigation of soft X-ray multilayer fabrication by an in-situ ellipsometric deposition monitor2006
- Author(s)
  T.Tsuru
- Journal Title
  
  IPAP Conference Series 7
  
  Pages: 168-170
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] Accurate measurement of EUV multilayer period thicknesses by in-situ automatic ellipsometry2005
- Author(s)
  T.Tsuru
- Journal Title
  
  Journal of Electron Spectroscopy and Related Phenomena 144-147
  
  Pages: 1083-1085
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] Accurate measurement of EUV multilayer period thicknesses by in situ automatic ellipsometr2005
- Author(s)
  T. Tsuru
- Journal Title
  
  J. Electron. Spectrosc. Relat Phenom. 144-147
  
  Pages: 1083-1085
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] Accurate measurement of EUV multilayer period thicknesses by in situ automatic ellipsometry2005
- Author(s)
  T. Tsuru
- Journal Title
  
  J. Electron. Spectrosc. Relat, Phenom.
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] Accurate measurement of EUV multilayer period thicknesses by in-situ automatic ellipsometry2005
- Author(s)
  Toshihide Tsuru
- Journal Title
  
  Journal of Electron Spectroscopy and Related Phenomena 144-147
  
  Pages: 1083-1085
- Data Source
  KAKENHI-PROJECT-16760030
[Journal Article] Thickness monitoring of nm period EUV multilayer fabrication by ellipsometry2004
- Author(s)
  T. Tsuru
- Journal Title
  
  AIP, Proc. 8th International Conference on Synchrotron Radiation Instrumentation 705
  
  Pages: 732-735
- NAID
  120003728299
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] Thickness monitoring of nm period EUV multilayer fabrication by ellipsometry2004
- Author(s)
  T. Tsuru
- Journal Title
  
  AIR, Proc. 8th International Conference on Synchrotron Radiation Instrumentation 705
  
  Pages: 732-735
- NAID
  120003728299
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] Realtime layer-by-layer analysis for multilayer fabrication monitoring by an automatic null ellipsometer2004
- Author(s)
  T. Tsuru
- Journal Title
  
  Thin Solid Films
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] Realtime layer-by-layer analysis for multilayer fabrication monitoring by an automatic nullellipsometer2004
- Author(s)
  T. Tsuru
- Journal Title
  
  Thin Solid Films 455-456
  
  Pages: 705-709
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] Realtime layer-by-layer analysis for multilayer fabrication monitoring by an automatic null ellipsometer2004
- Author(s)
  Toshihide Tsuru
- Journal Title
  
  Thin Solid Films 455-456
  
  Pages: 705-709
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] Thickness monitoring of nm period EUV multilayer fabrication by ellipsometry2004
- Author(s)
  Toshihide Tsuru
- Journal Title
  
  AIP conference proceedings 705
  
  Pages: 732-735
- NAID
  120003728299
- Data Source
  KAKENHI-PROJECT-16760030
[Journal Article] Thickness monitoring of nm period EUV multilayer fabrication by ellipsometry2004
- Author(s)
  Toshihide Tsuru
- Journal Title
  
  AIP conference proceedings 705
  
  Pages: 732-735
- NAID
  120003728299
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] Realtime layer-by-layer analysis for multilayer fabrication monitoring by an automatic null ellipsometer2004
- Author(s)
  Toshihide Tsuru
- Journal Title
  
  Thin Solid Films 455-456
  
  Pages: 705-709
- Data Source
  KAKENHI-PROJECT-16760030
[Patent] 多層膜の表面形状加工方法及び表面形状加工装置2007
- Inventor(s)
  津留俊英
- Industrial Property Rights Holder
  津留俊英
- Industrial Property Number
  2007-065078
- Filing Date
  2007-03-14
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] 顕微偏光解析法による高精度屈折率計測2018
- Author(s)
  津留俊英、八木浩司
- Organizer
  第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16K12805
[Presentation] 分散と散乱を利用した旋光の可視化2017
- Author(s)
  津留俊英、田所利康
- Organizer
  日本理科教育学会第56回東北支部大会
- Data Source
  KAKENHI-PROJECT-16K12805
[Presentation] 微小試料の高精度屈折率計測のための顕微偏光解析装置の開発2017
- Author(s)
  津留俊英、八木浩司
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16K12805
[Presentation] 旋光の可視化2017
- Author(s)
  津留俊英,田所利康
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜
- Year and Date
  2017-03-16
- Data Source
  KAKENHI-PROJECT-16K12805
[Presentation] エリプソメトリーによる3次元形状計測のための偏光照明法2016
- Author(s)
  小川広暉、津留俊英
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東工大
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-25390089
[Presentation] 偏光技術による可視化2016
- Author(s)
  若山俊隆,水谷康弘,津留俊英,大谷幸利
- Organizer
  Optics & Photonics Japan 2016
- Place of Presentation
  筑波大学東京キャンパス文京校舎
- Year and Date
  2016-11-01
- Data Source
  KAKENHI-PROJECT-16K12805
[Presentation] 4検出器型偏光計の高精度化と高速化2015
- Author(s)
  石澤倫、津留俊英
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-25390089
[Presentation] EUV用偏光光学素子の開発と応用2015
- Author(s)
  津留俊英
- Organizer
  第11回偏光計測研究会
- Place of Presentation
  株式会社フォトロン
- Year and Date
  2015-12-04
- Data Source
  KAKENHI-PROJECT-25390089
[Presentation] 4検出器法による高速偏光計測システムの開発2014
- Author(s)
  石澤倫, 津留俊英
- Organizer
  第69回応用物理学会東北支部学術講演会
- Place of Presentation
  東北大学
- Year and Date
  2014-12-04
- Data Source
  KAKENHI-PROJECT-25390089
[Presentation] 4検出器法による液晶可変リターダーの光学特性評価2014
- Author(s)
  津留俊英
- Organizer
  偏光計測・制御技術研究グループ偏光勉強会
- Place of Presentation
  東京都立産業技術研究センター
- Year and Date
  2014-12-24
- Data Source
  KAKENHI-PROJECT-25390089
[Presentation] 液晶可変リターダーの光学特性評価2014
- Author(s)
  大沼穂乃花, 石澤美希, 石澤倫, 津留俊英
- Organizer
  第69回応用物理学会東北支部学術講演会
- Place of Presentation
  東北大学
- Year and Date
  2014-12-04
- Data Source
  KAKENHI-PROJECT-25390089
[Presentation] 光による三次元形状計測2014
- Author(s)
  津留俊英
- Organizer
  第64次山形地区教育研究合同集会
- Place of Presentation
  山形市立第四中学校
- Year and Date
  2014-10-11
- Invited
- Data Source
  KAKENHI-PROJECT-25390089
[Presentation] Three-dimensional shape measurement of a glossy object by imaging ellipsometry2013
- Author(s)
  Toshihide Tsuru
- Organizer
  The 6th International Conference on Spectroscopic Ellipsometry
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-25390089
[Presentation] 偏光計測による立体イメージング2012
- Author(s)
  津留俊英
- Organizer
  日本光学会年次学術講演会(Optics & Photonics Japan 2012)
- Place of Presentation
  タワーホール船堀
- Invited
- Data Source
  KAKENHI-PROJECT-23760042
[Presentation] 偏光計測による立体イメージング2012
- Author(s)
  津留俊英
- Organizer
  2012年日本光学会年次学術講演会(Optics & Photonics Japan 2012)
- Place of Presentation
  東京都タワーホール船堀東京都タワーホール船堀
- Year and Date
  2012-10-24
- Data Source
  KAKENHI-PROJECT-23760042
[Presentation] 液晶可変リターダーを用いた傾斜エリプソメトリーによる3次元形状計測2012
- Author(s)
  津留俊英
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  愛媛大学
- Data Source
  KAKENHI-PROJECT-23760042
[Presentation] 傾斜エリプソメトリーによる3次元形状計測2012
- Author(s)
  津留俊英
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  東京都早稲田大学
- Year and Date
  2012-03-18
- Data Source
  KAKENHI-PROJECT-23760042
[Presentation] 液晶可変リターダーを用いた傾斜エリプソメトリーによる3次元形状計測2012
- Author(s)
  津留俊英
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  愛媛県愛媛大学・松山大学
- Year and Date
  2012-09-12
- Data Source
  KAKENHI-PROJECT-23760042
[Presentation] 傾斜エリプソメトリーによる3次元形状計測2012
- Author(s)
  津留俊英
- Organizer
  2012年春季第59回応用物理学関係連合講演会
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-23760042
[Presentation] 偏光イメージングのものづくり現場への応用2011
- Author(s)
  山本治美、松川裕章、荒木秀和、津留俊英
- Organizer
  第7回偏光計測研究会
- Place of Presentation
  東京都東京工芸大学
- Year and Date
  2011-11-11
- Data Source
  KAKENHI-PROJECT-23760042
[Presentation] 偏光イメージングのものづくり現場への応用2011
- Author(s)
  山本治美、松川裕章、荒木秀和、津留俊英
- Organizer
  第7回偏光計測研究会
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-23760042
[Presentation] 分光透過型Four Detector Polarimeterの開発2010
- Author(s)
  久保田義人, 津留俊英, 田所利康, 川畑州一
- Organizer
  春季応用物理学会
- Place of Presentation
  東海大学
- Year and Date
  2010-03-18
- Data Source
  KAKENHI-PROJECT-21560046
[Presentation] 透過型分光Four Detector Polarimeter2010
- Author(s)
  川畑州一, 津留俊英, 田所利康
- Organizer
  Optics and Photonics Japan 2010
- Place of Presentation
  中央大学(駿河台)
- Year and Date
  2010-11-09
- Data Source
  KAKENHI-PROJECT-21560046
[Presentation] 振幅分割型ポラリメーターの入射偏光特性評価2010
- Author(s)
  津留俊英、久保田義人、田所利康、川畑州一
- Organizer
  応用物理学会
- Place of Presentation
  長崎大学文教キャンパス
- Year and Date
  2010-09-15
- Data Source
  KAKENHI-PROJECT-21560046
[Presentation] 振幅分割型ポラリメーターの入射偏光特性評価2010
- Author(s)
  津留俊英, 久保田義人, 田所利康, 川畑州一
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学文教キャンパス
- Year and Date
  2010-09-15
- Data Source
  KAKENHI-PROJECT-21560046
[Presentation] Development of the spectroscopic four detector polarimeter of transmission type2010
- Author(s)
  T.Tsuru, Y.Kubota, T.Tadokoro, S.Kawabata
- Organizer
  5^<th> International Conference on Spectroscopic Ellipsometry (ICSE-V)
- Place of Presentation
  State University of New York, Albany, NY, USA
- Year and Date
  2010-05-25
- Data Source
  KAKENHI-PROJECT-21560046
[Presentation] 振幅分割型ポラリメーターの分光偏光計測への応用2010
- Author(s)
  津留俊英、久保田義人、田所利康、川畑州一
- Organizer
  日本液晶学会討論会
- Place of Presentation
  九大医学部百年記念会館
- Year and Date
  2010-09-07
- Data Source
  KAKENHI-PROJECT-21560046
[Presentation] 膜厚分布制御成膜法を応用した新機能X線ミラーの開発2009
- Author(s)
  羽多野忠, 原田哲男, 豊田光紀, 津留俊英, 山本正樹
- Organizer
  第10回X線結像光学シンポジウム
- Place of Presentation
  筑波、つくば国際会議場
- Year and Date
  2009-11-06
- Data Source
  KAKENHI-PROJECT-20760017
[Presentation] 軟X線顕微鏡用精密多層膜ミラーの開発, 軟X線顕微鏡用精密多層膜ミラーの開発2009
- Author(s)
  津留俊英, 羽多野忠, 原田哲男, 山本正樹
- Organizer
  日本放射光学会第一回若手研究会「x線ナノ集光技術研究会」
- Place of Presentation
  大阪
- Year and Date
  2009-08-11
- Data Source
  KAKENHI-PROJECT-20760017
[Presentation] エリプソメトリーによる多値情報記録再生技術2009
- Author(s)
  津留俊英, 山本正樹
- Organizer
  光エレクトロニクス第130委員会第268回研究会
- Place of Presentation
  東京理科大学森戸記念館
- Year and Date
  2009-09-03
- Data Source
  KAKENHI-PROJECT-21560046
[Presentation] 膜厚分布制御成膜法を応用した新機能x線ミラーの開発2009
- Author(s)
  羽多野忠, 原田哲男, 豊田光紀, 津留俊英, 山本正樹
- Organizer
  第10回X線結像光学シンポジウム
- Place of Presentation
  筑波
- Year and Date
  2009-11-06
- Data Source
  KAKENHI-PROJECT-20760017
[Presentation] 軟X線顕微鏡用精密多層膜ミラーの開発2009
- Author(s)
  津留俊英, 羽多野忠, 原田哲男, 山本正樹
- Organizer
  日本放射光学会第一回若手研究会「X線ナノ集光技術研究会」
- Place of Presentation
  大阪、大阪大学
- Year and Date
  2009-08-11
- Data Source
  KAKENHI-PROJECT-20760017
[Presentation] 透過型Four Detector Polarimeterの試作と液晶配向解析への応用2009
- Author(s)
  川畑州一, 津留俊英, 田所利康
- Organizer
  液晶学会液晶討論会
- Place of Presentation
  東京農工大学
- Year and Date
  2009-09-14
- Data Source
  KAKENHI-PROJECT-21560046
[Presentation] Development of an ion milling system by a wide-area ion beam for accurate phase correction of EUV multilayer mirrors2008
- Author(s)
  T. Tsuru
- Organizer
  The 9th International Conference on the Physics of X-Ray Multilayer Structures
- Place of Presentation
  USA, Montana
- Year and Date
  2008-02-06
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] 軟X線多層膜成膜のpm感度その場偏光解析2008
- Author(s)
  津留俊英
- Organizer
  先端計測シンポジウム2008-軟X線顕微計測-
- Place of Presentation
  仙台
- Year and Date
  2008-03-05
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] In-situ ellipsometry of picometer sensitivity for soft X-ray multilayer mirror fabrication[in Japanese]2008
- Author(s)
  T. Tsuru
- Organizer
  The 1st Symposium of CAMS
- Place of Presentation
  Japan, Sendai
- Year and Date
  2008-03-05
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] In-situ monitoring of soft X-ray multilayer mirror fabrication by an automatic null ellipsometer with picometer sensitivity[in Japanese]2007
- Author(s)
  T. Tsuru
- Organizer
  The 1st Meeting, Professional Group of Ellipsometry and Polarimetry
- Place of Presentation
  Japan, Sendai
- Year and Date
  2007-11-16
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Period-by-periodイオンミリングによる軟X線多層膜結像鏡の波面補正法の開発2007
- Author(s)
  津留俊英
- Organizer
  第9回X線結像光学シンポジウム
- Place of Presentation
  名古屋
- Year and Date
  2007-11-02
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Period-by-period イオンミリングによる軟X 線多層膜結像鏡の波面補正法の開発2007
- Author(s)
  津留俊英
- Organizer
  第9回X線結像光学シンポジウム
- Place of Presentation
  名古屋
- Year and Date
  2007-11-02
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] 非等周期構造による極端紫外線・軟X線多層膜鏡の高反射帯の広帯域化2007
- Author(s)
  津留俊英
- Organizer
  第54回応用物理学関係連合講演会
- Place of Presentation
  相模原
- Year and Date
  2007-03-28
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Precise determination of layer structure by analysis of EUV ellipsometry data obtained with use of multilayer polarizing elements2007
- Author(s)
  T. Tsuru
- Organizer
  The 4th International Conference on Spectroscopic Elliosometry
- Place of Presentation
  Sweden, Stockholm
- Year and Date
  2007-06-11
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Precise determination of layer structure by analysis of EUV ellipsometry data obtained with use omultilayer polarizing elements2007
- Author(s)
  T. Tsuru
- Organizer
  The 4th International Conference on Spectroscopic EUipsometry
- Place of Presentation
  Sweden, Stockholm
- Year and Date
  2007-06-11
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] pm感度エリプソメーターによる軟X線多層膜ミラーの成膜モニタリング2007
- Author(s)
  津留俊英
- Organizer
  第1回偏光計測研究会
- Place of Presentation
  仙台
- Year and Date
  2007-11-16
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Period-by-period ion milling system for accurate phase correction of EUV multilayer mirror reflection2007
- Author(s)
  T. Tsuru
- Organizer
  The 15th International Conference on Vacuum Ultraviolet Radiation Physics
- Place of Presentation
  Germany, Berlin
- Year and Date
  2007-07-30
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Development of a period-by-period ion milling system for accurate figure error correction of soft X-ray multilayer mirrors[in Japanese]2007
- Author(s)
  T. Tsuru
- Organizer
  The 9th Symposium of X-ray Imaging Optics
- Place of Presentation
  Japan, Nagoya
- Year and Date
  2007-11-02
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Reflection passband broadening by aperiodic designs of EUV/soft X-ray multilayer mirrors[in Japanese]2007
- Author(s)
  T. Tsuru
- Organizer
  The 54th Spring Meeting, 2007, Japan Society of Applied Physics and Related Societies
- Place of Presentation
  Japan, Sagamihara
- Year and Date
  2007-03-28
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] In-situ ellipsometric monitor with layer-by-layer analysis for precise thickness control of EUV multilayer optics2006
- Author(s)
  T. Tsuru
- Organizer
  Internal Conference on Metallurgical Coatings and Thin Films (ICMCTF)
- Place of Presentation
  USA, San Diego
- Year and Date
  2006-05-04
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Optimization of layer thickness in EUV/soft X-ray multilayer optics for wideband reflectance2006
- Author(s)
  T. Tsuru
- Organizer
  he 9th International Conference on Synchrotron Radiation Instrumentation (SRI)
- Place of Presentation
  Korea, Daegu
- Year and Date
  2006-06-01
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Optimization of layer thickness in EUV/soft X-ray multilayer optics for wideband reflectance2006
- Author(s)
  T. Tsuru
- Organizer
  The 9th International Conference on Synchrotron Radiation Instrumentation(SRI)
- Place of Presentation
  Korea, Daegu
- Year and Date
  2006-06-01
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Optimization of boundary structure for soft X-ray multilayer mirrors by an ellipsometric deposition monitor2006
- Author(s)
  T. Tsuru
- Organizer
  The 8th International Conference on the Physics of X-Ray Multilayer Structures (PXRMS)
- Place of Presentation
  Japan, Sapporo
- Year and Date
  2006-03-15
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Precise thickness monitoring of EUV multilayer mirror fabrication by an ellipsometric thickness monitor2005
- Author(s)
  T. Tsuru
- Organizer
  2nd International Symposium on Technologies and Applications of Photoelectron Micro-Spectroscopy with Laser-based VUV Sources
- Place of Presentation
  Japan, Tsukuba
- Year and Date
  2005-02-02
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Investigation of soft X-ray multilayer mirror fabrication by an in-situ ellipsemetric deposition monitor2005
- Author(s)
  T. Tsuru
- Organizer
  The 8th International Conference on X-ray Microscopy (XRM)
- Place of Presentation
  Japan, Himeji
- Year and Date
  2005-07-26
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] イオンビームスパッタリング法によるMo/Si多層膜鏡成膜のその場偏光解析2005
- Author(s)
  津留俊英
- Organizer
  第66回応用物理学会学術講演会
- Place of Presentation
  徳島
- Year and Date
  2005-09-10
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] 軟X線多層膜結像鏡の開発とpm感度レートモニター(招待講演)2005
- Author(s)
  津留俊英
- Organizer
  第8回X線結像光学シンポジウム
- Place of Presentation
  神戸
- Year and Date
  2005-12-13
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] In-situ ellipsometric monitoring of Mo/Si multilayer mirrors deposited by ion beam sputtering method[in Japanese]2005
- Author(s)
  T. Tsuru
- Organizer
  The 66th Autumn Meeting, 2007, Japan Society of Applied Physics and Related Societies, 27a-B-4
- Place of Presentation
  Japan, Tokushima
- Year and Date
  2005-09-10
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Development of soft X-ray multilayer imaging optics by a picometer sensitivity deposition rate monitor[in Japanese]2005
- Author(s)
  T. Tsuru
- Organizer
  The 8th Symposium of X-ray Imaging Optics
- Place of Presentation
  Japan, Kobe
- Year and Date
  2005-12-13
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Investigation of soft X-ray multilayer mirror fabrication by an in-situ ellipsometric depositionmonitor2005
- Author(s)
  T. Tsuru
- Organizer
  The 8th International Conference on X-ray Microscopy (XRM)
- Place of Presentation
  Japan, Himeji
- Year and Date
  2005-07-26
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] その場計測・膜厚解析エリプソメトリーによる軟X線ミラー多層膜成膜pm感度モニタリング2004
- Author(s)
  津留俊英
- Organizer
  第51回応用物理学関係連合学術講演会
- Place of Presentation
  八王子
- Year and Date
  2004-03-28
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] An ellipsometric thickness monitor with layer-by-layer analysis for EUV multilayer optics fabrication2004
- Author(s)
  T. Tsuru
- Organizer
  3rd International EUVL Symposium
- Place of Presentation
  Japan, Miyazaki
- Year and Date
  2004-11-02
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Precise thickness control of EUV beam splitter fabrication by an automatic null ellipsometer[in Japanese]2004
- Author(s)
  Y. Kinoshita, T. Tsuru, M. Yamamoto
- Organizer
  The 65th Autumn Meeting, 2004, Japan Society of Applied Physics and Related Societies
- Place of Presentation
  Japan, Sendai
- Year and Date
  2004-09-03
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Real-time ellipsometry of picometer sensitivity for thickness monitoring of EUV multilayer fabrication2004
- Author(s)
  T. Tsuru
- Organizer
  The 7th International Conference on the Physics of X-Ray Multilayer Structures (PXRMS)
- Place of Presentation
  Japan, Rusutsu
- Year and Date
  2004-03-07
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Precise fabrication of EUV multilayer mirrors for high-resolution imaging.2004
- Author(s)
  T. Tsuru
- Organizer
  SANKEN International Symposium on Scientific and Industrial Nanotechnology 2004 (SISSIN-2004)
- Place of Presentation
  Japan, Osaka
- Year and Date
  2004-12-06
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Precise fabrication of EUV multilayer mirrors for high-resolution imaging2004
- Author(s)
  T. Tsuru
- Organizer
  SANKEN International Symposium on Scientific and Industrial Nanotechnology 2004 (SISSIN-2004)
- Place of Presentation
  Japan, Osaka
- Year and Date
  2004-12-06
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Deposition rate monitoring for accurate period control of EUV multilayers by in-situautomatic ellipsometry2004
- Author(s)
  T. Tsuru
- Organizer
  The 14th International Conference on Vacuum Ultraviolet Radiation Physics (VUV)
- Place of Presentation
  Australia, Cairns
- Year and Date
  2004-07-22
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Deposition rate monitoring for accurate period control of EUV multilayers by in-situ automatic ellipsometry2004
- Author(s)
  T. Tsuru
- Organizer
  The 14th International Conference on Vacuum Ultraviolet Radiation Physics (VUV)
- Place of Presentation
  Australia, Cairns
- Year and Date
  2004-07-22
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Picometer sensitivity monitoring of soft X-ray mirror multilayer by in-situ ellipsometry of real-time thickness analysis[in Japanese]2004
- Author(s)
  T. Tsuru, T. Tsutou, M. Yamamoto
- Organizer
  The 51st Spring Meeting, 2004, Japan Society of Applied Physics and Related Societies
- Place of Presentation
  Japan, Hachiouji
- Year and Date
  2004-03-28
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Precise thickness control of ultra-thin film fabrication by an in-situ ellipsometer[in Japanese]2004
- Author(s)
  Y. Kinoshita, T. Tsuru, T. Ohigashi, T. Hatano, M. Yamamoto
- Organizer
  The 4th Meeting of IMRAM
- Place of Presentation
  Sendai
- Year and Date
  2004-12-03
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Development of a high sensitivity thickness monitor for EUV multilayer mirror fabrication2003
- Author(s)
  T. Tsuru
- Organizer
  he 8th International Conference on Synchrotron RadiationInstrumentation(SRI)
- Place of Presentation
  USA, San Francisco
- Year and Date
  2003-08-28
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] In-situ measurement of multilayer deposition process by an automatic null ellipsometer with picometer sensitivity2003
- Author(s)
  T. Tsuru
- Organizer
  The 3rd International Conference on Spectroscopic Ellipsometry (ICSE)
- Place of Presentation
  Austria, Vienna
- Year and Date
  2003-07-10
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] In-situ measurement of multilayer deposition process by an automatic null ellinsometer with picometer sensitivity2003
- Author(s)
  T. Tsuru
- Organizer
  The 3rd International Conference on Spectroscopic Ellipsometry (ICSE)
- Place of Presentation
  Austria, Vienna
- Year and Date
  2003-07-10
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Development of a high sensitivity thickness monitor for EUV multilayer mirror fabrication2003
- Author(s)
  T. Tsuru
- Organizer
  The 8th International Conference on Synchrotron Radiation Instrumentation (SRI)
- Place of Presentation
  USA, San Francisco
- Year and Date
  2003-08-28
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] 振幅分割型ポラリメーターによる液晶可変リターダーの評価
- Author(s)
  石澤倫, 津留俊英
- Organizer
  第75回応用物理学会秋季学術講演会
- Place of Presentation
  北海道大学
- Year and Date
  2014-09-17 – 2014-09-20
- Data Source
  KAKENHI-PROJECT-25390089

1. HATANO Tadashi (90302223)

# of Collaborated Projects: 2 results

# of Collaborated Products: 1 results
2. YAMAMOTO Masaki (00137887)

# of Collaborated Projects: 2 results

# of Collaborated Products: 3 results
3. NIINO Kazuki (10728182)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
4. TOYODA Mitsunori (40375168)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. KAWABATA Shuichi (10118747)

# of Collaborated Projects: 1 results

# of Collaborated Products: 8 results
6. ISHIHARA Teruya (60168250)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. NISHIMURA Naoshi (90127118)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. ONODA Masaru (80425727)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. TOMITA Satoshi (90360594)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. SAWADA Kei (40462692)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. OHNO Seigo (70435634)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. NAKAYAMA Kazuyuki (80602721)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. MATSUBARA Masakazu (50450648)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. OGAWA Tomoya (50080437)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. YANAGIHARA Mihiro (40174552)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. EJIMA Takeo (80261478)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. 馬敏雅 (60255263)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
18. 浅川直紀 (80270924)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
19. 高田昌樹 (60197100)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
20. WANG Wu

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
21. ISAKARI Hiroshi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
22. BAI Qiang

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
23. YAGI Hiroshi

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results

Tsuru Toshihide 津留 俊英

TSURU Toshihide 津留 俊英

津留 俊英 ツル トシヒデ

Research Projects

Research Products

Co-Researchers

Development of an optical 3D shape measurement system using ICT equipments and its application to science education programsPrincipal Investigator

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Precise wavefront control using layer-by-layer etching of multilayer mirrors for diffraction-limited extreme ultraviolet imaging

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Development of micro-ellipsometer for precise measurement of refractive index, and its application to tephrochronologyPrincipal Investigator

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Development of in-situ three-dimensional shape measurement method by tilt-ellipsometryPrincipal Investigator

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Three-dimensional shape measurement by imaging ellipsometryPrincipal Investigator

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Fabrication and physics of periodic metamaterials in optical regime

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The development of the spectroscopic real-time ellipsomete

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Aperiodic design and development of soft X-ray broadband multilayermirror opticsPrincipal Investigator

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ピコメーター膜厚検出感度を持つ成膜モニターの開発と水の窓軟X線多層膜反射鏡の作製Principal Investigator

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High-resolution, element-specific microscope using a laser-produced-plasma soft X-ray source

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多層膜表面ミリングによる反射波面の制御Principal Investigator

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Tomographic detection of micro-defects in semi-conductions due to light scattering and photoluminescence imaging

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[Book] Compendium of Surface and Interface Analysis2018

Author(s)

Tsuru Toshihide 津留俊英

TSURU Toshihide 津留俊英

津留俊英ツルトシヒデ