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Samukawa Seiji  寒川 誠二

… Alternative Names

SAMUKAWA Seiji  寒川 誠二

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Researcher Number 30323108
Other IDs
  • ORCIDhttps://orcid.org/0000-0003-4971-3290
External Links
Affiliation (Current) 2025: 東北大学, 流体科学研究所, 特任教授(客員)
Affiliation (based on the past Project Information) *help 2021 – 2024: 東北大学, 流体科学研究所, 特任教授(客員)
2002 – 2021: 東北大学, 流体科学研究所, 教授
2015: 東北大学, 流体化学研究所, 教授
2005: 東北大学, 流体科学研究科, 教授
2004: 東北大学, 流体力学研究所, 教授
Review Section/Research Field
Principal Investigator
Broad Section C / General applied physics / Thin film/Surface and interfacial physical properties / Microdevices/Nanodevices / Applied physics, general / Applied physics, general
Except Principal Investigator
Electronic materials/Electric materials / Basic Section 19010:Fluid engineering-related / Soft computing / Plasma electronics … More / Plasma science / Electron device/Electronic equipment / Energy engineering / Applied physics, general / Sensitivity informatics/Soft computing / Thin film/Surface and interfacial physical properties Less
Keywords
Principal Investigator
中性粒子ビーム / 表面改質 / エッチング / 量子ドット / 高移動度半導体 / 無欠陥周期ナノ構造 / ナノスケールサーマルマネージメント / 無欠陥ナノ周期構造複合材料 / ナノスケールサーマルマネジメント / 無欠陥ナノ周期構造 … More / エレクトロンバンド / フォノンバンド / 高移動度半導体素子 / フォノン場制御 / 無欠陥ナノピラー複合材料 / フォノン・バンド独立制御 / エネルギー変換 / フォノンエンジニアリング / ナノ構造 / 熱電素子 / nanocolumn / fin-type vertical MOSFET / low-k film / gate electrode etching / silicon oxynitride / negative ion / etching / neutral beam / 薄膜形成 / シリコン酸窒膜 / ナノ加工 / 半導体デバイス / エッチングダメージ / 起立ゲート型トランジスタ / 高誘電率膜 / 有機分子デバイス / カーボンナノチューブ / ナノカラム / フィン型MOSFET / 低誘電率絶縁膜 / ゲート電極加工 / シリコン酸窒化膜 / 負イオン / カーボンナノチューブトレンジタスタ / ナノ材料 / ナノチューブ・フラーレン / マイクロマシンプローブ / Bow-tieアンテナ型 / 表面プラズモン / Bow-tieアンテナ / 近接場光 / Pbセンター / 低ダメージエッチング / フェリチン / 蓄積電荷量 / フォトン / イオンエネルギー / オンウエハーモニタリング / モニタリング / 薄膜堆積 / 微細加工 / 側壁導電性 / 電子エネルギー分布 / イオンエネルギー分布 / センサー / マイクロマシン / 光照射損傷 / プラズマプロセス / オンウエハモニタリング … More
Except Principal Investigator
中性粒子ビーム / 第一原理計算 / 量子ドット / 表面吸着確率 / 化学結合 / 反応分子動力学 / プラズマ援用化学気相体積法 / 原子層体積法 / 表面拡散 / 表面反応 / 反応分子動力学法 / 成膜プロセス / 自己組織化量子ドット / 中性粒子ビームエッチング / 半導体微細加工 / スピン緩和 / 半導体ナノ構造 / 半導体超微細化 / 光物性 / スピンエレクトロニクス / ナノ材料 / 微細ナノ加工 / スピン注入 / 希薄窒化ガリウムヒ素 / スピン増幅 / 光電スピン変換 / スピンダイナミクス / 電子スピン注入 / スピン光デバイス / 半導体量子ドット / 集積回路 / ナノ構造 / 抵抗変化型メモリ素子 / 脳型人工知能ハードウェア / ニューラルネットワーク / ソフトコンピューティング / 結合次数解析 / 活性化エネルギー / 酸性度 / 密度汎関数法 / プラズマ・ビーム誘起錯体反応 / 第一原理理論計算 / 鉄 / 遷移金属錯体 / 遷移金属エッチング / ion beam / Monte-Carlo simulation / molecular dynamics simulation / ultraviolet / reactive sputtering / etching / plasma / 紫外線照射 / イオンビーム / モンテカルロシミュレーション / 分子動力学シミュレーション / 紫外線 / 反応性スパッタリング / エッチング / プラズマ / High Speed Data Transfer / Parallel Processing System / Optical Wave Guide / Optical Interconnection / Wafer Bonding / Three-Dimensional Integration / Multiport Shared Memory / Three-Dimensionally Stacked Processor / ウェーハ張り合わせ / 高速データ転送 / 並列処理システム / 光導波路 / 光インターコネクション / ウェーハ貼り合わせ / 三次元積層化技術 / マルチポート共有メモリ / 三次元積層型プロセッサ / バイオテンプレート極限加工 / バイオテンプレート局面加工 / ケルマニウム量子細線 / バイオテンプレート曲面加工 / ゲルマニウム量子細線 / シリコン量子細線 / 共鳴散乱現象 / ナノシリコン球 / 面内光ガイディング / 高効率化 / 薄膜シリコン太陽電池 / 塩素 / 紫外光スペクトル / オージェ遷移 / 共鳴遷移 / 欠陥生成 / ワイヤレス測定 / イオンシース / 紫外光照射損傷 / オンウェハモニタリング / エッチング形状予測 / CMOSデバイス / FinFET / ゆらぎ / CMOSデバイス / スパイキングニューロン / ナノディスクアレイ構造 / チャージアップ / イオン軌道 / モニタリング / オンウエハセンサ / プラズマ加工 / 量子井戸 / 原子間力顕微鏡 / バイオナノプロセス / X線光電子分光法 / 積層ナノディスク / ナノディスク Less
  • Research Projects

    (17 results)
  • Research Products

    (260 results)
  • Co-Researchers

    (47 People)
  •  Construction of thin film deposition model in CVD / ALD method considering chemical reaction and interfacial flow phenomenon

    • Principal Investigator
      徳増 崇
    • Project Period (FY)
      2021 – 2023
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 19010:Fluid engineering-related
    • Research Institution
      Tohoku University
  •  High-mobility Semiconductor Devices due to Control of Phonon Field caused by Defect-free Nano-periodic StructuresPrincipal Investigator

    • Principal Investigator
      寒川 誠二
    • Project Period (FY)
      2020 – 2024
    • Research Category
      Grant-in-Aid for Scientific Research (S)
    • Review Section
      Broad Section C
    • Research Institution
      Tohoku University
  •  Photoelectric conversion system of spin-information utilizing semiconductor quantum dots

    • Principal Investigator
      Murayama Akihiro
    • Project Period (FY)
      2016 – 2020
    • Research Category
      Grant-in-Aid for Scientific Research (S)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      Hokkaido University
  •  Thermoelectric conversion device and Seebeck coefficient control by 3-dimensional quantum nanodisk arrayPrincipal Investigator

    • Principal Investigator
      Samukawa Seiji
    • Project Period (FY)
      2016 – 2018
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      General applied physics
    • Research Institution
      Tohoku University
  •  遷移金属の新しい低温化学反応エッチングメカニズムの提案

    • Principal Investigator
      久保田 智広
    • Project Period (FY)
      2015 – 2016
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Plasma electronics
    • Research Institution
      Tohoku University
  •  A study of nanostructure memory devices and their integrated circuits toward massively parallel analog brain-like LSI

    • Principal Investigator
      Morie Takashi
    • Project Period (FY)
      2015 – 2018
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Soft computing
    • Research Institution
      Kyushu Institute of Technology
  •  Study of efficiency enhancement of Si solar cells based on quantum and photonic structure control

    • Principal Investigator
      Wada Kazumi
    • Project Period (FY)
      2013 – 2015
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Energy engineering
    • Research Institution
      The University of Tokyo
  •  Modeling of plasma process surface reaction mechanism using energy-controllable particle beams

    • Principal Investigator
      KUBOTA Tomohiro
    • Project Period (FY)
      2011 – 2013
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Applied physics, general
    • Research Institution
      Tohoku University
  •  Development of an intelligent information processing device and circuit using silicon nanodisk array structures

    • Principal Investigator
      MORIE Takashi
    • Project Period (FY)
      2010 – 2013
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Sensitivity informatics/Soft computing
    • Research Institution
      Kyushu Institute of Technology
  •  オンウエハセンサ技術による基板電荷蓄積量とイオンエネルギー分布計測技術の開発

    • Principal Investigator
      大竹 浩人
    • Project Period (FY)
      2009 – 2011
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Thin film/Surface and interfacial physical properties
    • Research Institution
      Tohoku University
  •  単電子デバイスのための積層量子ナノディスク構造の精密作製と量子特性制御

    • Principal Investigator
      久保田 智広
    • Project Period (FY)
      2008
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      Tohoku University
  •  中性粒子ビーム表面改質によるカーボンナノチューブ構造・物性制御と電気特性Principal Investigator

    • Principal Investigator
      寒川 誠二
    • Project Period (FY)
      2008 – 2009
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Microdevices/Nanodevices
    • Research Institution
      Tohoku University
  •  Analyses of Photo-induced Surface Reaction Processes during Plasma Sputtering

    • Principal Investigator
      HAMAGUCHI Satoshi
    • Project Period (FY)
      2005 – 2006
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Plasma science
    • Research Institution
      Osaka University
  •  サブ10nm量子ドットの超解像近接場分光Principal Investigator

    • Principal Investigator
      寒川 誠二
    • Project Period (FY)
      2004 – 2005
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Applied physics, general
    • Research Institution
      Tohoku University
  •  High Performance Parallel Processor System Using Three-Dimensional Processor Chip

    • Principal Investigator
      KOYANAGI Mitsumasa
    • Project Period (FY)
      2003 – 2007
    • Research Category
      Grant-in-Aid for Scientific Research (S)
    • Research Field
      Electron device/Electronic equipment
    • Research Institution
      Tohoku University
  •  Nanometer-scale processing and creation of novel functional materials using low energy high flux neutral beamsPrincipal Investigator

    • Principal Investigator
      SAMUKAWA Seiji
    • Project Period (FY)
      2003 – 2005
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Thin film/Surface and interfacial physical properties
    • Research Institution
      Tohoku University
  •  超高精度プラズマプロセス用オンウエハーモニタリングシステムの構築Principal Investigator

    • Principal Investigator
      寒川 誠二
    • Project Period (FY)
      2002 – 2003
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Applied physics, general
    • Research Institution
      Tohoku University

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All Journal Article Presentation Patent

  • [Journal Article] Lifetime of photoexcited carriers in space-controlled Si nanopillar/SiGe composite films investigated by a laser heterodyne photothermal displacement method2023

    • Author(s)
      Harada Tomoki、Ohori Daisuke、Endo Kazuhiko、Samukawa Seiji、Ikari Tetsuo、Fukuyama Atsuhiko
    • Journal Title

      Journal of Applied Physics

      Volume: 133 Issue: 12 Pages: 125703-125703

    • DOI

      10.1063/5.0146578

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H05649, KAKENHI-PROJECT-22KJ2523, KAKENHI-PROJECT-18K04876
  • [Journal Article] Impact of nanopillars on phonon dispersion and thermal conductivity of silicon membranes2023

    • Author(s)
      Anufriev Roman、Ohori Daisuke、Wu Yunhui、Yanagisawa Ryoto、Jalabert Laurent、Samukawa Seiji、Nomura Masahiro
    • Journal Title

      Nanoscale

      Volume: 15 Issue: 5 Pages: 2248-2253

    • DOI

      10.1039/d2nr06266f

    • Peer Reviewed / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H05649, KAKENHI-PROJECT-21H04635
  • [Journal Article] Management of Phonon Transport in Lateral Direction for Gap-Controlled Si Nanopillar/SiGe Interlayer Composite Materials2021

    • Author(s)
      Ohori Daisuke、Chuang Min-Hui、Sato Asahi、Takeuchi Sou、Murata Masayuki、Yamamoto Atsushi、Lee Ming-Yi、Endo Kazuhiko、Li Yiming、Tarng Jenn-Hwan、Lee Yao-Jen、Samukawa Seiji
    • Journal Title

      IEEE Open Journal of Nanotechnology

      Volume: 2 Pages: 148-152

    • DOI

      10.1109/ojnano.2021.3131165

    • Peer Reviewed / Open Access / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H05649
  • [Journal Article] Fabrication and simulation of neutral-beam-etched silicon nanopillars2020

    • Author(s)
      Chuang Min-Hui、Ohori Daisuke、Li Yiming、Chou Kuan-Ru、Samukawa Seiji
    • Journal Title

      Vacuum

      Volume: 181 Pages: 109577-109577

    • DOI

      10.1016/j.vacuum.2020.109577

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20H05649
  • [Journal Article] Photoluminescence of InGaAs/GaAs Quantum Nanodisk in Pillar Fabricated by Biotemplate, Dry Etching, and MOVPE Regrowth2019

    • Author(s)
      Higo Akio, Kiba Takayuki, Takayama Junichi, Lee C. Y., Thomas Cedric, Ozaki Takuya, Sodabanlu Hassanet, Sugiyama Masakazu, Nakano Yoshiaki, Yamashita Ichiro, Murayama Akihiro, Samukawa Seiji
    • Journal Title

      ACS Applied Electronic Materials

      Volume: 1 Issue: 9 Pages: 1945-1951

    • DOI

      10.1021/acsaelm.9b00432

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Journal Article] Multilevel memory characteristics of Ta/Ta2O5-δ ReRAM for the Application of Neural Network2018

    • Author(s)
      Yuanlin Li, Atsushi Tsurumaki-Fukuchi, Masashi Arita, Hideyuki Andoh, Takashi Morie, Yasuo Takahashi, and Seiji Samukawa
    • Journal Title

      Proc. of the Eighteenth Int. Symp. on Advanced Fluid Information (AFI-2018)

      Volume: - Pages: 98-99

    • Data Source
      KAKENHI-PROJECT-15H01706
  • [Journal Article] Analog Memory Devices for Time-domain Weighted-sum Calculation Circuits2018

    • Author(s)
      K. Yamashita, M. Harada, T. Morie, A. T. Fukuchi, M. Arita, Y. Takahashi, S. Samukawa
    • Journal Title

      Proc. of the Eighteenth Int. Symp. on Advanced Fluid Information (AFI-2018)

      Volume: - Pages: 100-101

    • Data Source
      KAKENHI-PROJECT-15H01706
  • [Journal Article] Temperature-dependent radiative and non-radiative dynamics of photo-excited carriers in extremely high-density and small InGaN nanodisks fabricated by neutral-beam etching using bio-nano-templates2018

    • Author(s)
      Chen Yafeng, Kiba Takayuki, Takayama Junichi, Higo Akio, Tanikawa Tomoyuki, Chen Shula, Samukawa Seiji, Murayama Akihiro
    • Journal Title

      Journal of Applied Physics

      Volume: 123 Issue: 20

    • DOI

      10.1063/1.5027627

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Journal Article] Temperature-dependent radiative and non-radiative dynamics of photo-excited carriers in extremely high-density and small InGaN nanodisks fabricated by neutral-beam etching using bio-nano-templates2018

    • Author(s)
      Yafeng Chen, Takayuki Kiba, Junichi Takayama, Akio Higo, Tomoyuki Tanikawa, Shula Chen, Seiji Samukawa, Akihiro Murayama
    • Journal Title

      Journal of Applied Physics

      Volume: 印刷中

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Journal Article] Low-temperature InGaAs oxidation using oxygen neutral beam2018

    • Author(s)
      Lee Chang-Yong, Higo Akio, Thomas Cedric, Okada Takeru, Ozaki Takuya, Sugiyama Masakazu, Nakano Yoshiaki, Samukawa Seiji
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 57 Issue: 7 Pages: 070305-070305

    • DOI

      10.7567/jjap.57.070305

    • NAID

      210000149239

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Journal Article] Realization of Analog Memory using Ta2O5 Based ReRAM for the Application of Neural Network2017

    • Author(s)
      Yuanlin Li, Reon Katsumura, Mika Kristian Gronroos, Atsushi Tsurumaki-Fukuchi, Masashi Arita, Hideyuki Ando, Takashi Morie, Yasuo Takahashi, and Seiji Samukawa
    • Journal Title

      Proceedings of the Seventeenth International Symposium on Advanced Fuluid Information (AFI-2017)

      Volume: - Pages: 50-51

    • Data Source
      KAKENHI-PROJECT-15H01706
  • [Journal Article] Composite films of highly ordered Si nanowires embedded in SiGe0.3 for thermoelectric applications2017

    • Author(s)
      Kikuchi Akiou、Yao Akifumi、Mori Isamu、Ono Takahito、Samukawa Seiji
    • Journal Title

      Journal of Applied Physics

      Volume: 122 Issue: 16 Pages: 165302-165302

    • DOI

      10.1063/1.4986355

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Journal Article] Extremely low thermal conductivity of high density and ordered 10 nm-diameter silicon2017

    • Author(s)
      Akiou Kikuchi, Akifumi Yao, Isamu Mori, Takahito Ono, and Seiji Samukawa
    • Journal Title

      Appl. Phys. Lett.

      Volume: 110 Issue: 9 Pages: 091908-091908

    • DOI

      10.1063/1.4977778

    • Peer Reviewed / Acknowledgement Compliant / Open Access
    • Data Source
      KAKENHI-PROJECT-16H03898, KAKENHI-PROJECT-15H01706
  • [Journal Article] Photoluminescence emission from GaAs nanodisks in GaAs/AlGaAs nanopillar arrays fabricated by neutral beam etching2017

    • Author(s)
      Daisuke Ohori, Atsuhiko Fukuyama, Kentaro Sakai, Akio Higo, Cedric Thomas, Seiji Samukawa, Tetsuo Ikari
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 5 Pages: 050308-050308

    • DOI

      10.7567/jjap.56.050308

    • NAID

      210000147709

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Journal Article] Optical Study of Sub-10 nm In0.3Ga0.7N Quantum Nanodisks in GaN Nanopillars2017

    • Author(s)
      Akio Higo, Takayuki Kiba, Shula Chen, Yafeng Chen, Tomoyuki Tanikawa, Cedric Thomas, Chang Yong Lee, Yi-Chun Lai, Takuya Ozaki, Junichi Takayama, Ichiro Yamashita, Akihiro Murayama, Seiji Samukawa
    • Journal Title

      ACS Photonics

      Volume: 4 Issue: 7 Pages: 1851-1857

    • DOI

      10.1021/acsphotonics.7b00460

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Journal Article] Analog Memory Operation of Parallel Connected Resistance Change Memory Devices2017

    • Author(s)
      M. Harada, H. Ando, T. Morie, A. T. Fukuchi, M. Arita, Y. Takahashi, and S. Samukawa
    • Journal Title

      Proceedings of the Seventeenth Int. Symp. on Advanced Fluid Information (AFI-2017)

      Volume: - Pages: 60-61

    • Data Source
      KAKENHI-PROJECT-15H01706
  • [Journal Article] Spin relaxation in Si nanoclusters embedded in free-standing SiGe nanocolumns2017

    • Author(s)
      N. P. Stepina, A. F. Zinovieva, A. V. Dvurechenskii, Shuichi Noda, Md. Zaman Molla, Seiji Samukawa
    • Journal Title

      Applied Physics Letters

      Volume: 110 Issue: 20

    • DOI

      10.1063/1.4983644

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Journal Article] Nanometer scale fabrication and optical response of InGaN/GaN quantum disks2016

    • Author(s)
      Yi-Chun Lai, Akio Higo, Takayuki Kiba, Cedric Thomas, Shula Chen, Chang Yong Lee, Tomoyuki Tanikawa, Shigeyuki Kuboya, Ryuji Katayama, Kanako Shojiki, Junichi Takayama, Ichiro Yamashita, Akihiro Murayama, Gou-Chung Chi, Peichen Yu, Seiji Samukawa
    • Journal Title

      Nanotechnology

      Volume: 27 Issue: 42 Pages: 425401-425401

    • DOI

      10.1088/0957-4484/27/42/425401

    • Peer Reviewed / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H06359, KAKENHI-PROJECT-26600082
  • [Journal Article] Spike-based Time-domain Weighted-sum Calculation Using Nanodevices for Low Power Operation2016

    • Author(s)
      T. Morie, H. Liang, T. Tohara, H. Tanaka, M. Igarashi, S. Samukawa, K. Endo, and Y. Takahashi
    • Journal Title

      16th Int. Conf. on Nanotechnology (IEEE NANO)

      Volume: - Pages: 390-392

    • DOI

      10.1109/nano.2016.7751490

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-15H01706, KAKENHI-PROJECT-15H03531
  • [Journal Article] Silicon nanodisk array with a fin field-effect transistor for time-domain weighted sum calculation toward massively parallel spiking neural networks2016

    • Author(s)
      T. Tohara, H. Liang, H. Tanaka, M. Igarashi, S. Samukawa, K. Endo, Y. Takahashi, T. Morie
    • Journal Title

      Appl. Phys..Express

      Volume: 9 Issue: 3 Pages: 034201-034201

    • DOI

      10.7567/apex.9.034201

    • NAID

      210000137828

    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-15K12109, KAKENHI-PROJECT-15H01706, KAKENHI-PROJECT-26630141
  • [Journal Article] A Silicon Nanodisk Array Structure Realizing Synaptic Response of Spiking Neuron Models with Noise2014

    • Author(s)
      T. Morie, H. Liang, Y. Sun, T. Tohara, M. Igarashi, and S. Samukawa
    • Journal Title

      Proc. The 19th Asia and South Pacific Design Automation Conference

      Volume: 該当無し Pages: 185-190

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Journal Article] Effect of PEGylation on Controllably Spaced Adsorption of Ferritin Molecules2013

    • Author(s)
      R. Tsukamoto, M. Godonoga, R. Matsuyama, M. Igarashi, J. Gardiner Heddle, S. Samukawa, and I. Yamashita
    • Journal Title

      Langmuir

      Volume: 29 Pages: 12737-12743

    • Data Source
      KAKENHI-PROJECT-22240022
  • [Journal Article] Proposal of High Current Gain Vibrating-Body Field-Effect Transistor2013

    • Author(s)
      S.Ueki, Y.Nishimori, K.Miwa, S.Nakagawa, H.Imamoto, T.Kubota, M.Sugiyama, S.Samukawa, and G.Hashiguchi
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines

      Volume: 133 Issue: 11 Pages: 332-336

    • DOI

      10.1541/ieejsmas.133.332

    • NAID

      130003382688

    • ISSN
      1341-8939, 1347-5525
    • Language
      Japanese
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Journal Article] Energy-loss Mechanism of Single-crystal Silicon Microcantilever due to Surface Defects G.erated during Plasma Processing2013

    • Author(s)
      A.Wada, Y.Yanagisawa, B.Altansukh, T.Kubota, T.Ono, S.Yamasaki, and S.Samukawa
    • Journal Title

      J. Micromech. Microeng.

      Volume: Vol.23 Issue: 6 Pages: 065020-065020

    • DOI

      10.1088/0960-1317/23/6/065020

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Journal Article] Surface/interface-related optical properties in Si nanodisks fabricated by neutral-beam etching using bio-templates.2013

    • Author(s)
      Takayuki Kiba, Kenta Suzaki, Hao Li, Makoto Igarashi, Seiji Samukawa, Akihiro Murayama
    • Journal Title

      Journal of Crystal Growth

      Volume: (In press) Pages: 127-127

    • DOI

      10.1016/j.jcrysgro.2012.12.081

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-12J09926, KAKENHI-PROJECT-22221007, KAKENHI-PROJECT-22240022
  • [Journal Article] Prediction of etching-shape anomaly due to distortion of ion sheath around a large-scale three-dimensional structure by means of on-wafer monitoring technique and computer simulation2013

    • Author(s)
      T.Kubota, H.Ohtake, R.Araki, Y.Yanagisawa, T.Iwasaki, K.Ono, K.Miwa, and S.Samukawa
    • Journal Title

      J. Phys. D: Appl. Phys.

      Volume: Vol.46 Issue: 41 Pages: 415203-415203

    • DOI

      10.1088/0022-3727/46/41/415203

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Journal Article] Modeling miniband for realistic silicon nanocrystal array2013

    • Author(s)
      Weiguo Hu, Mohd Fairuz Budiman, Makoto Igarashi, Ming-Yi Lee, Yiming Li, and Seiji Samukawa
    • Journal Title

      Mathematical and Computer Modeling

      Volume: 58 Issue: 1-2 Pages: 306-311

    • DOI

      10.1016/j.mcm.2012.11.012

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Journal Article] Highly Selective Silicon Nitride Etching to Si and SiO_2 for Gate Sidewall Spacer Using CF_3I/O_2/H_2 Neutral Beam2013

    • Author(s)
      D.Nakayama, A.Wada, T.Kubota, R.Bruce, R.M.Martin, M.Haass, N.Fuller, and S.Samukawa
    • Journal Title

      Phys. D: Appl. Phys.

      Volume: Vol.46 Issue: 20 Pages: 205203-205203

    • DOI

      10.1088/0022-3727/46/20/205203

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Journal Article] Low-damage silicon etching using a neutral beam2013

    • Author(s)
      K.Miwa, Y.Nishimori, S.Ueki, M.Sugiyama, T.Kubota, and S.Samukawa
    • Journal Title

      J. Vac. Sci. Technol. B

      Volume: Vol.31 Issue: 5

    • DOI

      10.1116/1.4819973

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Journal Article] Fast Two-Dimensional Ferritin Crystal Formation Realized by Mutant Ferritin and Poly(ethylene glycol) Modified SiO2 Substrate2012

    • Author(s)
      Rikako Tsukamoto, Makoto Igarashi, Seiji Samukawa, and Ichiro Yamashita
    • Journal Title

      Applied Physics Express

      Volume: 5 Issue: 6 Pages: 65201-65201

    • DOI

      10.1143/apex.5.065201

    • NAID

      210000015569

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Journal Article] Fast Two-Dimen-sional Ferritin Crystal Formation Realized by Mutant Ferritin and Poly(ethylene glycol) Modified Si02 Substrate2012

    • Author(s)
      R. Tsukamoto, M. Igarashi, S. Samukawa, and I. Yamashita
    • Journal Title

      Applied Physics Express

      Volume: 5 Pages: 65201-65201

    • Data Source
      KAKENHI-PROJECT-22240022
  • [Journal Article] Numerical study on electron transfer mechanism by collision of ions at graphite surface in highly efficient neutral beam generation2012

    • Author(s)
      T.Kubota, N.Watanabe, S.Ohtsuka, T.Iwasaki, K.Ono, Y.Iriye, and S.Samukawa
    • Journal Title

      J. Physics D : Appl. Phys.

      Volume: Vol.45 Issue: 9 Pages: 095202-095202

    • DOI

      10.1088/0022-3727/45/9/095202

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Journal Article] Control of optical bandgap energy and optical absorption coefficient by geometric parameters in sub-10 nm silicon-nanodisc array structure2012

    • Author(s)
      M.F.Budiman, W.Hu, M.Igarashi, R.Tsukamoto, T.Isoda, K.Itoh, Iyamashita, A.Murayama, Y.Okada, Seiji Samukawa
    • Journal Title

      Nanotechnology

      Volume: 23 Pages: 65302-65302

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Journal Article] ナノディスクアレイ構造とCMOS 回路を結合したスパイキングニューロンデバイス2011

    • Author(s)
      梁 海超, 森江 隆, 孫 意来, 五十嵐誠, 寒川 誠二
    • Journal Title

      電子情報通信学会技術研究報告

      Volume: NC2011-66, 111, 241 Pages: 125-129

    • NAID

      110008900440

    • Data Source
      KAKENHI-PROJECT-22240022
  • [Journal Article] Direct Fabrication of Uniform and High Density Sub-10-nm Etching Mask Using Ferritin Molecules on Si and GaAs Surface for Actual Quantum-Dot Superlattice2011

    • Author(s)
      M. Igarashi, R. Tsukamoto, C.-H. Huang, I. Yamashita, and S. Samukawa
    • Journal Title

      Applied Physics Express

      Volume: 4

    • NAID

      10027782649

    • Data Source
      KAKENHI-PROJECT-22240022
  • [Journal Article] Optical absorption characteristic of highly ordered and dense two-dimensional array of silicon nanodisks2011

    • Author(s)
      C.-H.Huang, X.-Y.Wang, M.Igarashi, A.Murayama, Y.Okada, I.Yamashita, S.Samukawa
    • Journal Title

      Nanotechnology

      Volume: 22

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Journal Article] ナノディスクアレイ構造とCMOS回路を結合したスパイキングニューロンデバイス2011

    • Author(s)
      梁海超, 森江隆, 孫意来, 五十嵐誠, 寒川誠二
    • Journal Title

      電子情報通信学会技術研究報告ニューロコンピューティング研究会

      Volume: 111 Pages: 125-129

    • NAID

      110008900440

    • Data Source
      KAKENHI-PROJECT-22240022
  • [Journal Article] Direct Fabrication of Uniform and High Density Sub-10-nm Etching Mask Using Ferritin Molecules on Si and GaAs Surface for Actual Quantum-Dot Superlattice2011

    • Author(s)
      M.Igarashi, R.Tsukamoto, C.-H.Huang, I.Yamashita, S.Samukawa
    • Journal Title

      Applied Physics Express

      Volume: 4

    • NAID

      10027782649

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Journal Article] Prediction of UV spectra and UV radiation damage in actual plasma etching processes using on-wafer monitoring technique2010

    • Author(s)
      B.Jinnai, S.Fukuda, H.Ohtake, S.Samukawa
    • Journal Title

      Journal of Applied Physics

      Volume: 107 Pages: 43302-43302

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21560026
  • [Journal Article] Prediction of Abnormai Etching Profile in High Aspect Ratio Via/Hole Etching Using On-wafer Monitoring System2010

    • Author(s)
      H.Ohtake, S.Fukuda, B.Jinnai, T.Tatsumi, S.Samukawa
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 49

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-21560026
  • [Journal Article] Control of Activation Energy for Electron Transport in Two-Dimensional Array of Si Nanodisks2010

    • Author(s)
      M. Igarashi, C.-H. Huang, T. Morie, and S. Samukawa
    • Journal Title

      Ext. Abstracts of Int. Conf. on Solid State Devices and Materials (SSDM 2010)

      Pages: 934-935

    • Data Source
      KAKENHI-PROJECT-22240022
  • [Journal Article] Control of Electron Transport in Two-Dimensional Array of Si Nanodisks for Spiking Neuron Device2010

    • Author(s)
      M.Igarashi, C.-H.Huang, T.Morie, S.Samukawa
    • Journal Title

      Appl.Phys.Express

      Volume: 3

    • NAID

      10026586552

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Journal Article] Fundamental Study on Spiking Neuron Devices2010

    • Author(s)
      T.Morie, Y.Sun, H.Liang, K.Nakada, M.Igarashi, C.Huang, S.Samukawa
    • Journal Title

      Proc.of the Tenth Int.Symp.on Advanced Fluid Information and Transdisciplinary Fluid Integration

      Pages: 110-111

    • Data Source
      KAKENHI-PROJECT-22240022
  • [Journal Article] Control of Activation Energy for Electron Transport in Two-Dimensional Array of Si Nanodisks2010

    • Author(s)
      M.Igarashi, C.H.Huang, T.Morie, S.Samukawa
    • Journal Title

      Ext.Abstracts of Int.Conf.on Solid State Devices and Materials

      Pages: 934-935

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Journal Article] Control of Electron Transport in Two-Dimensional Array of Si Nanodisks for Spiking Neuron Device2010

    • Author(s)
      M. Igarashi, C.-H. Huang, T. Morie, and S. Samukawa
    • Journal Title

      Appl. Phys. Express

      Volume: 3 Pages: 85202-85202

    • NAID

      10026586552

    • Data Source
      KAKENHI-PROJECT-22240022
  • [Journal Article] A New Silicon Quantum-Well Structure with Controlled Diameter and Thickness Fabricated with Ferritin Iron Core Mask and Chlorine Neutral Beam Etching2008

    • Author(s)
      寒川誠二
    • Journal Title

      Applied Physics Express 1

    • NAID

      10025081642

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20560288
  • [Journal Article] Ultimate Top-down Etching Processes for Future Nanoscale Devices : Advanced Neutral-Beam Etching2006

    • Author(s)
      寒川誠二
    • Journal Title

      Japanese Journal of Applied Physics 45・4A

      Pages: 2395-2407

    • NAID

      40007227437

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15360016
  • [Journal Article] Fabrication of a Vertical-Channel Double Gate Metal-Oxide-Semiconductor Field-Effect Transistor Using a Neutral Beam Etching2006

    • Author(s)
      寒川 誠二
    • Journal Title

      Japanese Journal of Applied Physics Vol.45 No.10

    • NAID

      10018158463

    • Data Source
      KAKENHI-PROJECT-15360016
  • [Journal Article] Highly anisotropic gate electrode patterning in neutral beam etching using F2 gas chemistry2006

    • Author(s)
      寒川 誠二
    • Journal Title

      Journal of Vacuum Science and Technology B23(5)

      Pages: 2063-2068

    • Data Source
      KAKENHI-PROJECT-15360016
  • [Journal Article] Ultimate Top-down Etching Processes for Future Nanoscale Devices : Advanced Neutral-Beam Etching2006

    • Author(s)
      Seiji Samukawa
    • Journal Title

      Japanese Journal of Applied Physics 45(4A)

      Pages: 2395-2407

    • NAID

      40007227437

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15360016
  • [Journal Article] Study of neutral-beam etching conditions for fabrication of 7-nm-diameter nanocolumn structures using ferritin iron-core masks2005

    • Author(s)
      寒川誠二
    • Journal Title

      Journal of Vacuum Science and Technology B23(2)

      Pages: 534-539

    • Data Source
      KAKENHI-PROJECT-16656027
  • [Journal Article] Highly selective low-damage processes using advanced neutral beams for porous low-k films2005

    • Author(s)
      寒川誠二
    • Journal Title

      Journal of Vacuum Science and Technology B23(1)

      Pages: 210-216

    • Data Source
      KAKENHI-PROJECT-15360016
  • [Journal Article] Highly selective low-damage processes using advanced neutral beams for porous low-k films2005

    • Author(s)
      寒川 誠二
    • Journal Title

      Journal of Vacuum Science and Technology B23(1)

      Pages: 210-216

    • Data Source
      KAKENHI-PROJECT-15360016
  • [Journal Article] Study of neutral-beam etching conditions for fabrication of 7-nm-diameter nanocolumn structures using ferritin iron-core masks2005

    • Author(s)
      寒川誠二
    • Journal Title

      Journal of Vacuum Science and Technology E23(2)(印刷中)

    • Data Source
      KAKENHI-PROJECT-16656027
  • [Journal Article] Study of neutral-beam etching conditions for fabrication of 7-nm-diameter nanocolumn structures using ferritin iron-core masks2005

    • Author(s)
      寒川誠二
    • Journal Title

      Journal of Vacuum Science and Technology B23(2)(印刷中)

    • Data Source
      KAKENHI-PROJECT-15360016
  • [Journal Article] Study of neutral-beam etching conditions for the fabrication of 7-nm-diameter nanocolumn structures using ferritin iron-core masks2005

    • Author(s)
      寒川 誠二
    • Journal Title

      Journal of Vacuum Science and Technology B23(2)

      Pages: 534-539

    • Data Source
      KAKENHI-PROJECT-15360016
  • [Journal Article] 新しいビームプロセスによるトップダウン加工=究極のトップダウン加工を目指して=2004

    • Author(s)
      寒川誠二
    • Journal Title

      表面科学 25・10

      Pages: 618-627

    • NAID

      10013649446

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15360016
  • [Journal Article] Control of nitrogen depth profile in ultrathin oxynitride films formed by pulse-time-modulated nitrogen beams2004

    • Author(s)
      Seiji Samukawa
    • Journal Title

      Journal of Vacuum Science and Technology A22(2)

      Pages: 245-249

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15360016
  • [Journal Article] Control of nitrogen depth profile in ultrathin oxynitride films formed by pulse-time-modulated nitrogen beams2004

    • Author(s)
      寒川誠二
    • Journal Title

      Journal of Vacuum Science and Technology A22・2

      Pages: 245-249

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15360016
  • [Journal Article] A 7-nm nanocolumn structure fabricated by using a ferritin iron-core mask and low-energy Cl neutral beams2004

    • Author(s)
      寒川誠二
    • Journal Title

      Applied Physics Letters 84(9)

      Pages: 1555-1557

    • Data Source
      KAKENHI-PROJECT-15360016
  • [Journal Article] Control of nitrogen depth profile in ultrathin oxynitride films formed by pulse-time-modulated nitrogen beams2004

    • Author(s)
      寒川誠二
    • Journal Title

      Journal of Vacuum Science and Technology A22(2)

      Pages: 245-249

    • Data Source
      KAKENHI-PROJECT-15360016
  • [Journal Article] Advanced Beam Processes for Precise Top-Down Patterning2004

    • Author(s)
      Seiji Samukawa
    • Journal Title

      Journal of the Surface Science Society of Japan 25(10)

      Pages: 618-627

    • NAID

      10013649446

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15360016
  • [Journal Article] 50 nm gate electrode patterning using a neutral-beam etching system2004

    • Author(s)
      寒川誠二
    • Journal Title

      Journal of Vacuum Science and Technology A22(4)

      Pages: 1093-1100

    • Data Source
      KAKENHI-PROJECT-15360016
  • [Journal Article] A 7-nm nanocolumn structure fabricated by using a ferritin iron-core mask and low-energy Cl neutral beams2004

    • Author(s)
      寒川誠二
    • Journal Title

      Applied Physics Letters 84(9)

      Pages: 1555-1557

    • Data Source
      KAKENHI-PROJECT-16656027
  • [Journal Article] Ultrathin Oxynitride Films Formed by Using Pulse-Time-Modulated Nitrogen Beams2003

    • Author(s)
      寒川誠二
    • Journal Title

      Japanese Journal of Applied Physics 42・7B

    • NAID

      10011260667

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15360016
  • [Journal Article] Ultrathin Oxynitride Films Formed by Using Pulse-Time-Modulated Nitrogen Beams2003

    • Author(s)
      Seiji Samukawa
    • Journal Title

      Japanese Journal of Applied Physics 42(7B)

    • NAID

      10011260667

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15360016
  • [Journal Article] 中性粒子ビームによるダメージフリー高精度プロセス2003

    • Author(s)
      寒川誠二
    • Journal Title

      応用物理学会誌 72・12

      Pages: 1536-1540

    • NAID

      10012562270

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15360016
  • [Journal Article] Damage-free and precise processes using neutral beams2003

    • Author(s)
      Seiji Samukawa
    • Journal Title

      OYO BUTURI 72(12)

      Pages: 1536-1540

    • NAID

      10012562270

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15360016
  • [Patent] 熱電変換材料及びその製造方法2018

    • Inventor(s)
      菊池亜紀応、八尾章史、寒川誠二、小野崇人
    • Industrial Property Rights Holder
      菊池亜紀応、八尾章史、寒川誠二、小野崇人
    • Industrial Property Rights Type
      特許
    • Filing Date
      2018
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Patent] THERMOELECTRIC CONVERSION MATERIAL AND METHOD FOR PRODUCING SAME2018

    • Inventor(s)
      A. KIKUCHI, S. Samukawa et al.
    • Industrial Property Rights Holder
      A. KIKUCHI, S. Samukawa et al.
    • Industrial Property Rights Type
      特許
    • Filing Date
      2018
    • Overseas
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Patent] エッチング装置2004

    • Inventor(s)
      寒川誠二 他4名
    • Industrial Property Rights Holder
      株式会社東芝
    • Patent Publication Number
      2005-260195
    • Filing Date
      2004-04-23
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15360016
  • [Patent] エッチング方法2004

    • Inventor(s)
      寒川誠二 他2名
    • Industrial Property Rights Holder
      株式会社荏原製作所
    • Patent Publication Number
      2005-259873
    • Filing Date
      2004-03-10
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15360016
  • [Patent] ビーム源及びビーム処理装置2003

    • Inventor(s)
      寒川誠二 他5名
    • Industrial Property Rights Holder
      株式会社荏原製作所, 東北大学長
    • Patent Publication Number
      2004-281232
    • Filing Date
      2003-03-14
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15360016
  • [Patent] ビーム源及び該ビーム源を備えたビーム処理装置2003

    • Inventor(s)
      寒川誠二 他5名
    • Industrial Property Rights Holder
      株式会社荏原製作所, 東北大学長
    • Patent Publication Number
      2004-281228
    • Filing Date
      2003-03-14
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15360016
  • [Patent] ビーム源及びビーム処理装置2003

    • Inventor(s)
      寒川誠二 他5名
    • Industrial Property Rights Holder
      株式会社荏原製作所, 東北大学長
    • Patent Publication Number
      2004-281230
    • Filing Date
      2003-03-14
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15360016
  • [Patent] ビーム源用電極及びビーム源用電極の製造方法2003

    • Inventor(s)
      寒川誠二 他5名
    • Industrial Property Rights Holder
      株式会社荏原製作所, 東北大学長
    • Patent Publication Number
      2004-281229
    • Filing Date
      2003-03-14
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15360016
  • [Patent] ビーム源及びビーム処理装置2003

    • Inventor(s)
      寒川誠二 他5名
    • Industrial Property Rights Holder
      株式会社荏原製作所, 東北大学長
    • Patent Publication Number
      2004-281231
    • Filing Date
      2003-03-14
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15360016
  • [Patent] 中性塩素原子平行ビームによるナノマスクエッチング2003

    • Inventor(s)
      寒川誠二 他1名
    • Industrial Property Rights Holder
      松下電器産業株式会社
    • Patent Publication Number
      2005-144585
    • Filing Date
      2003-11-13
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15360016
  • [Presentation] Analysis of carrier mobility in Si-Nanopillar/SiGe composite films by a laser heterodyne photothermal displacement method2023

    • Author(s)
      Y. Uno, T. Harada, S. Harada, H. Ohyama, D. Ohori, K. Endo, S. Samukawa, T. Ikari, A. Fukuyama
    • Organizer
      20th Int. Conference on Flow Dynamics
    • Data Source
      KAKENHI-PROJECT-20H05649
  • [Presentation] Impact of nanopillars on phonon and thermal transport in silicon membranes2023

    • Author(s)
      Roman Anufriev、Daisuke Ohori、Yunhui Wu、Ryoto Yanagisawa、Laurent Jalabert、Seiji Samukawa、Masahiro Nomura
    • Organizer
      第70回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-20H05649
  • [Presentation] High-mobility Semiconductor Devices due to Control of Phonon Field caused by Defect-free Nano-periodic Structures2023

    • Author(s)
      Seiji Samukawa
    • Organizer
      IEEE-NANO 2023
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H05649
  • [Presentation] ナノピラー間隔を変化させたSi-nanopillar/SiGe0.3複合膜の光ヘテロダイン光熱変位法によるキャリアライフタイム評価2023

    • Author(s)
      原田知季、大堀大介、遠藤和彦、寒川誠二、碇哲雄、福山敦彦
    • Organizer
      第70回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-20H05649
  • [Presentation] Carrier lifetime change by nanopillar space in Si nanopillar/SiGe composite films investigated by a laser heterodyne photothermal displacement method2023

    • Author(s)
      Atsuhiko Fukuyama, Tomoki Harada, Shogo Harada, Hiroki Ohyama, Daisuke Ohori, Kazuhiko Endo, Seiji Samukawa, Tetsuo Ikari
    • Organizer
      IEEE-NANO 2023
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H05649
  • [Presentation] Analysis of In-Plane Thermal Conduction in Si-Nanopillar/SiGe Composite Films by Laser Heterodyne Photothermal Displacement Signal and Theoretical Calculation2022

    • Author(s)
      H. Ohyama,T. Harada, K. Morita, S. Harada, D. Ohori, S. Samukawa, T. Ikari, and A. Fukuyama
    • Organizer
      The 22nd International Symposium on Advanced Fluid Information (AFI-2022)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H05649
  • [Presentation] Siナノピラー/SiGe複合膜構造のナノピラー間隔制御によるフォノン場への影響2022

    • Author(s)
      佐藤旭、大堀大介、Chuang Min-hui、村田正行、山本淳、Li Yiming、遠藤和彦、寒川誠二,
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-20H05649
  • [Presentation] 原子層加工技術-中性粒子ビームによる原子層無欠陥加工技術とデバイスへの展-2021

    • Author(s)
      寒川 誠二
    • Organizer
      応用物理学会 シリコンナノテクノロジー分科会 第231回研究集会
    • Invited
    • Data Source
      KAKENHI-PROJECT-20H05649
  • [Presentation] Plasma Nanotechnologies, =Introduction and Background=2021

    • Author(s)
      S. Samukawa
    • Organizer
      1st International Meeting of IEEE NT
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H05649
  • [Presentation] Si Nanopillar/SiGe Composite Structure for Thermally Managed Nano-Devices2021

    • Author(s)
      D. Ohori, M. Murata, A. Yamamoto, K. Endo, M.-H. Chuang, M. Y. Lee, Y. Li, J. H. Tarng, Y. J. Lee, and S. Samukawa
    • Organizer
      21st IEEE International Conference on Nanotechnology
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H05649
  • [Presentation] Atomic Layer Neutral Beam Processes for Nanofabrication and Interface Engineering2021

    • Author(s)
      S. Samukawa
    • Organizer
      2021 IEEE Nanotechnology Marathon
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H05649
  • [Presentation] Atomic Layer Neutral Beam Processes for Nanofabrication and Interface Engineering2021

    • Author(s)
      S. Samukawa
    • Organizer
      2021 JAPAN-TAIWAN Advanced Materials and Semiconductor Technology Workshop
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H05649
  • [Presentation] Atomic Layer Defect-free Etching Processes for Future Nanoscale-devices2021

    • Author(s)
      寒川 誠二
    • Organizer
      化学工学会反応工学部会 CVD反応分科会主催 第34回シンポジウム 「選択成長にむけた ALD/ALE 技術」
    • Invited
    • Data Source
      KAKENHI-PROJECT-20H05649
  • [Presentation] Atomic Layer Neutral Beam Processes for Nanofabrication and Interface Engineering2021

    • Author(s)
      S. Samukawa
    • Organizer
      240th ECS Meeting
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H05649
  • [Presentation] Damage-Free Plasma Processing for Nano-Devices Manufacturing2021

    • Author(s)
      S. Samukawa
    • Organizer
      21st IEEE International Conference on Nanotechnology
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H05649
  • [Presentation] Estimating Thermal and Optical Properties of Si-Nanopillar/SiGe Composite Film by a Piezoelectric Photothermal Measurements2020

    • Author(s)
      T. Harada, Y. Arata, D. Ohori, S. Samukawa, T. Ikari, A. Fukuyama
    • Organizer
      17th Int. Conference on Flow Dynamics
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H05649
  • [Presentation] 中性粒子ビームプロセスによる表面界面制御加工技術 量子ドットおよび超伝導材料への応用2020

    • Author(s)
      寒川誠二
    • Organizer
      応用物理学会 シリコンナノテクノロジー分科会 第224回研究集会
    • Invited
    • Data Source
      KAKENHI-PROJECT-20H05649
  • [Presentation] Atomic Layer Etching, Deposition & Modification Processes for Future Nanoscale-devices2020

    • Author(s)
      Seiji Samukawa
    • Organizer
      IEEE NTC Distinguished Lecture in Joint Technical Seminar Program
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-20H05649
  • [Presentation] 多層構造体の光熱変換信号理論の検討とSiナノピラー/SiGe複合膜への適用2020

    • Author(s)
      安良田裕基, 原田知季, 大堀大介, 寒川誠二, 碇哲雄, 福山敦彦
    • Organizer
      第41回超音波エレクトロニクスの基礎と応用に関するシンポジウム
    • Data Source
      KAKENHI-PROJECT-20H05649
  • [Presentation] Si ナノピラー構造の間隔制御することによる フォノン場制御とキャリア輸送特性性に与える影響2019

    • Author(s)
      大堀 大介、久保山 英哲、村田 正行、山本 淳、野村 政宏、遠藤 和彦、寒川 誠二
    • Organizer
      第66回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] EFFECTIVE THERMAL CONDUCTION TUNING IN Si THIN FILM BY NANOPILLARS2019

    • Author(s)
      X. Huang, R. Yanagisawa, D. Ohori, S. Samukawa, and Masahiro Nomura
    • Organizer
      The 2nd Pacific Rim Thermal Engineering Conference (PRTEC2019)
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] Atomic Layer Defect-free Etching for Future sub-10nm Nano-devices2019

    • Author(s)
      Seiji Samukawa
    • Organizer
      2019 International Electron, Devices and Materials Symposium (IEDMS 2019)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Presentation] Atomic Layer Defect-free Etching Processes for future sub-10-nm devices2019

    • Author(s)
      Seiji Samukawa
    • Organizer
      Satellite Workshop of XXXIV ICPIG and ICRP-10
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Presentation] Neutral Beam Technology for Damage-free Etching Process,2018

    • Author(s)
      Seiji Samukawa
    • Organizer
      Digest of 2018 International Conference on Compound Semiconductor Manufacturing Technology
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] Fabrication of GaN micro-LEDs with an ultra-low-damage etching process2018

    • Author(s)
      J. Zhu, T. Takahashi, K. Endo, D. Ohori, S. Samukawa, X.L. Wang
    • Organizer
      International Workshop on Nitride Semiconductors 2018
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Presentation] バイオテンプレート極限加工による量子ナノ構造の作製と高効率エネルギーデバイスへの展開2018

    • Author(s)
      寒川誠二
    • Organizer
      日本化学会 第7回E-colloid:先端エレクトロニクスのためのコロイド・界面化学・ナノ界面制御が担う次世代エレクトロニクス材料
    • Invited
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] Low-Temperature atomic layer defect-free etching, modification and deposition process2018

    • Author(s)
      Seiji Samukawa
    • Organizer
      Collaborative Conference on Materials Research 2018
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Presentation] Atomic Layer Defect-free Top-down Process for Future Nano-devices2018

    • Author(s)
      Seiji Samukawa
    • Organizer
      14th IEEE International Conference on Solid-State and Integrated Circuit Technology
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Presentation] 無欠陥Siナノピラー構造によるフォノン場制御と高移動度キャリア輸送2018

    • Author(s)
      大堀 大介、久保山 瑛哲、山本 淳、村田 正行、遠藤 和彦、寒川 誠二
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] 3ω法によるナノスケール熱伝導率の測定とフォノン輸送の制御2018

    • Author(s)
      久保山瑛哲、山本淳、村田正行、遠藤和彦、大堀大介、寒川誠二
    • Organizer
      応用物理学会 シリコンナノテクノロジー分科会 第212回研究集会「半導体素子におけるフォノンのダイナミクスとエンジニアリング」
    • Invited
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] Atomic Layer Defect-free Top-down Processes for Future Nano-devices2018

    • Author(s)
      Seiji Samukawa
    • Organizer
      The 7th International Conference on Microelectronics and Plasma Technology
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Presentation] Atomic Layer Defect-free Etching and Deposition Processes for future sub-10-nm devices2018

    • Author(s)
      Seiji Samukawa
    • Organizer
      71st Annual Gaseous Electronics Conference
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] Nanocolumns of InGaN/GaN MQWs Fabricated by Neutral Beam Etching for Directional Micro-LED2018

    • Author(s)
      K.X. Zhang, H. Yamada, N. Kumagai, T. Yamada, G.W. Cong, K. Endo, M. Shimizu, D. Ohori, S. Samukawa, X.L. Wang
    • Organizer
      International Workshop on Nitride Semiconductors 2018
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Presentation] High-temperature carrier dynamics responsible for a non-radiative process in InGaN nanodisks fabricated by top-down nanotechnology2018

    • Author(s)
      Y. Chen, T. Kiba, J. Takayama, A. Higo, T. Tanikawa, S. Samukawa, A. Murayama
    • Organizer
      12th International Conference on Excitonic and Photonic Processes in Condensed Matter and Nano Materials
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Presentation] Atomic Layer Defect-free Top-down Process for Future Nano-devices2018

    • Author(s)
      Seiji Samukawa
    • Organizer
      2nd Asia-Pacific Conference on Plasma Physics, International Workshop on Plasma and Bio-nano Devices
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Presentation] Optical Study on Thermal Activation Processes of Carrier Dynamics in In0.3Ga0.7N Nanodisks2018

    • Author(s)
      Y. Chen, T. Kiba, J. Takayama, A.Higo, T. Tanikawa, S. Samukawa, A. Murayama
    • Organizer
      31st International Microprocesses and Nanotechnology Conference
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Presentation] 中性粒子ビームによる原子層レベル超低損傷加工・表面改質=2次元材料グラフェンへの展開=2018

    • Author(s)
      寒川誠二
    • Organizer
      酸化グラフェン研究会 第11回酸化グラフェンシンポジウム
    • Invited
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] Atomic Layer Defect-free Top-down Processes for Future Nano-devices2018

    • Author(s)
      Seiji Samukawa
    • Organizer
      The 7th International Conference on Microelectronics and Plasma Technology(ICMAP)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] Low-Temperature atomic layer defect-free etching, modification and deposition process2018

    • Author(s)
      Seiji Samukawa
    • Organizer
      Collaborative Conference on Materials Research (CCMR) 2018
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] Atomic Layer Defect-free Etching and Deposition Processes for future sub-10-nm devices2018

    • Author(s)
      Seiji Samukawa
    • Organizer
      71st Annual Gaseous Electronics Conference
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Presentation] トップダウンナノテクノロジーで作製したIn0.3Ga0.7Nナノディスクにおける光励起キャリアの熱脱離2018

    • Author(s)
      陳亜鳳, 木場隆之, 高山純一, 肥後昭男, 谷川智之, 寒川誠二, 村山明宏
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Presentation] Atomic Layer Defect-free Top-down Process for Future Nano-devices2018

    • Author(s)
      Seiji Samukawa
    • Organizer
      14th IEEE International Conference on Solid-State and Integrated Circuit Technology
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] Atomic Layer Defect-free Top-down Process for Future Nano-devices2018

    • Author(s)
      Seiji Samukawa
    • Organizer
      2nd Asia-Pacific Conference on Plasma Physics, International Workshop on Plasma and Bio-nano Devices
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] Neutral Beam Technology for Damage-free Etching Process2018

    • Author(s)
      Seiji Samukawa
    • Organizer
      Digest of 2018 International Conference on Compound Semiconductor Manufacturing Technology
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Presentation] 無欠陥周期ナノ構造による半導体チャネルのフォノン場制御2018

    • Author(s)
      寒川誠二
    • Organizer
      応用物理学会 シリコンナノテクノロジー分科会 第212回研究集会「半導体素子におけるフォノンのダイナミクスとエンジニアリング」
    • Invited
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] 中性粒子ビームとバイオテンプレートを用いた高アスペクト比Siナノピラー構造の作製2017

    • Author(s)
      大堀大介、遠藤和彦、寒川誠二
    • Organizer
      第65回応用物理学会 春季学術講演会
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] High Efficiency Nano Energy Devices Using Bio-template Ultimate Top-down Process2017

    • Author(s)
      Seiji Samukawa
    • Organizer
      High Efficiency NaThe 3rd International Conference on Nanoenergy and Nanosystems.
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] パイオテンプレート極限加工技術を用いたSi/SIGeナノワイヤーの作製と熱伝導率の評価2017

    • Author(s)
      菊池亜紀応、八尾章史、山本淳、小野崇人、寒川誠二
    • Organizer
      第78回応用物理学会 秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] バイオナノテンプレートで作製したInGaNナノディスクにおける光励起キャリアダイナミクスの温度依存性2017

    • Author(s)
      陳 亜鳳, 木場 隆之, 高山 純一, 肥後 昭男, 寒川誠二, 村山 明宏
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Presentation] Neutral Beam Technology for Future Nano-devices2017

    • Author(s)
      Seiji Samukawa
    • Organizer
      China Semiconductor Technology International Conference
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] Atomic Layer Etching and Deposition Processes for Future Nano-devices2017

    • Author(s)
      Seiji Samukawa
    • Organizer
      82nd IUVSTA Workshop
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H01706
  • [Presentation] Neutral Beam technology for Future Nano-materials and Nano-devices2017

    • Author(s)
      Seiji Samukawa
    • Organizer
      Seiji Samukawa, Neutral Beam18th International Union of Materials Research Societies International Conference in Asia
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] High Efficiency Nano Energy Devices Using Bio-template Ultimate Top-down Process2017

    • Author(s)
      Seiji Samukawa
    • Organizer
      The 3rd International Conference on Nanoenergy and Nanosystems
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H01706
  • [Presentation] Neutral Beam Technology for Nano-Materials and Nano-Devices2017

    • Author(s)
      Seiji Samukawa
    • Organizer
      21st International Symposium on Chemical-Mechanical Planarization
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H01706
  • [Presentation] 大堀大介、石塚ナノピラー中のナノディスク配列による発光再結合の直径依存性2017

    • Author(s)
      大堀大介、石塚史典、トーマスセドリック、寒川誠二、碇哲雄、福山敦彦
    • Organizer
      第78回応用物理学会 秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] Neutral Beam Technology for Future Nano-devices2017

    • Author(s)
      Seiji Samukawa
    • Organizer
      China Semiconductor Technology International Conference 2017
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H01706
  • [Presentation] Neutral Beam Technology for Future Nano-materials and Nano-devices2017

    • Author(s)
      Seiji Samukawa
    • Organizer
      Collaborative Conference on Materials Research (CCMR) 2017
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H01706
  • [Presentation] Neutral Beam Technology for Future Nano-materials and Nano-devices2017

    • Author(s)
      Seiji Samukawa
    • Organizer
      Collaborative Conference on Materials Research (CCMR)
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] パイオテンプレート極限加工を用いたSiナノ構造熱電モジュールの作製と評価2017

    • Author(s)
      菊池亜紀応、八尾章史、毛利勇、山本淳、小野崇人、寒川誠二,
    • Organizer
      第64回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] Neutral Beam technology for Future Nano-materials and Nano-devices2017

    • Author(s)
      Seiji Samukawa
    • Organizer
      18th International Union of Materials Research Societies International Conference in Asia
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H01706
  • [Presentation] Neutral Beam Technology for Future Nano-materials and Nano-devices2017

    • Author(s)
      Seiji Samukawa
    • Organizer
      1st Asia-Pacific Conference on Plasma Physics
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] Neutral Beam Technology for Future Nano-materials and Nano-devices2017

    • Author(s)
      Seiji Samukawa
    • Organizer
      1st Asia-Pacific Conference on Plasma Physics
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H01706
  • [Presentation] Electronic states in the neutral-beam-formed Ta2O5 film measured by thermally stimulated current method2017

    • Author(s)
      Takeo Ohno, Hisashi Shima, Hiroyuki Akinaga, and Seiji Samukawa
    • Organizer
      49th International Conference on Solid State Devices and Materials
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H01706
  • [Presentation] Neutral Beam Technology for Nano-Materials and Nano-Devices2017

    • Author(s)
      Seiji Samukawa
    • Organizer
      21st International Symposium on Chemical-Mechanical Planarization
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] バイオテンプレート極限加工を用いたSiナノ構造熱電モジュールの作製と特性評価2017

    • Author(s)
      菊池 亜紀応、八尾 章史、毛利 勇、山本 淳、小野 崇人、寒川 誠二
    • Organizer
      第64回 応用物理学会春季学術大会
    • Place of Presentation
      東京工業大学(東京)
    • Year and Date
      2017-03-14
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] Analog memory operated by MOSFET and MoOx Resistive Random Access Memory2016

    • Author(s)
      M. Jo, R. Katsumura, A. T. Fukuchi, M. Arita, Y. Takahashi, H. Ando, T. Morie, and S. Samukawa
    • Organizer
      The Sixteenth Int. Symp. on Advanced Fluid Information (AFI-2016)
    • Place of Presentation
      Sendai, Japan
    • Year and Date
      2016-10-11
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H01706
  • [Presentation] Emission from As-etched Quantum Nanodisks Fabricated by Bio-template and Neutral Beam Etching Process2016

    • Author(s)
      Daisuke Ohori, Kiyorfumi Kondo, Kentaro Sakai, Akio Higo, Cedric Thomas, Seiji Samukawa, Tetsuo Ikari, Atsuhiko Fukuyama
    • Organizer
      16th IEEE International Conference on Nanotechnology
    • Place of Presentation
      Sendai International Center, Sendai, JAPAN
    • Year and Date
      2016-08-23
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Presentation] The Effect of Asymmetric Barriers of GaAs Quantum Nanodisks Light Emitting Diode2016

    • Author(s)
      Akio Higo, Cedric Thomas, Takayuki Kiba, Junichi Takayama, Ichiro Yamashita, Akihiro Murayama, Seiji Samukawa
    • Organizer
      16th IEEE International Conference on Nanotechnology
    • Place of Presentation
      Sendai International Center, Sendai, JAPAN
    • Year and Date
      2016-08-23
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Presentation] バイオテンプレート極限加工によるGaAs量子ナノディスクLEDのエレクトロルミネッセンス特性評価2016

    • Author(s)
      肥後昭男、木場隆之、トーマス・セドリック、高山純一、ソダーバンル・ハサネット、岡本尚文、山下一郎、杉山正和、中野義昭、村山明宏、寒川誠二
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ, 新潟市
    • Year and Date
      2016-09-14
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Presentation] Transient photoluminescence in InGaN nano-disks fabricated by nano-scale neutral-beam etching utilizing bio-nano templates2016

    • Author(s)
      Y. Chen, S.L. Chen, T. Kiba, C.Y. Lee, C. Thomas, Y.C. Lai, A. Higo, S. Samukawa, A. Murayama
    • Organizer
      16th IEEE International Conference on Nanotechnology
    • Place of Presentation
      Sendai International Center, Sendai, JAPAN
    • Year and Date
      2016-08-23
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Presentation] 中性粒子ビーム励起錯体反応による遷移金属エッチングメカニズムのTight-binding量子分子動力学法を用いた検討2016

    • Author(s)
      久保田智広, 伊藤寿, 久保百司, 寒川誠二
    • Organizer
      第63回 応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学大岡山キャンパス(東京都目黒区)
    • Year and Date
      2016-03-19
    • Data Source
      KAKENHI-PROJECT-15K04712
  • [Presentation] Transition Metal Complex Reaction Etching with Neutral Beam and Its Mechanism Investigated by First-Principles Calculation2016

    • Author(s)
      Tomohiro Kubota, Yoshiyuki Kikuchi, and Seiji Samukawa
    • Organizer
      IEEE 16th International Conference on Nanotechnology
    • Place of Presentation
      Sendai International Center (宮城県仙台市)
    • Year and Date
      2016-08-22
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K04712
  • [Presentation] 中性粒子ビーム励起錯体反応を用いた遷移金属エッチングにおける吸着分子の影響2016

    • Author(s)
      久保田智広、菊地良幸、伊藤寿、久保百司、寒川誠二
    • Organizer
      第63回 応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学大岡山キャンパス(東京都目黒区)
    • Year and Date
      2016-03-21
    • Data Source
      KAKENHI-PROJECT-15K04712
  • [Presentation] 中性粒子ビーム励起錯体反応を用いたCoFeBエッチング2016

    • Author(s)
      久保田 智広、美山 遼、菊地 良幸、寒川 誠二
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ (新潟県新潟市)
    • Year and Date
      2016-09-13
    • Data Source
      KAKENHI-PROJECT-15K04712
  • [Presentation] バイオテンプレート極限加工を用いた GaAs 量子ナノディスクの発光再結合の温度依存性2016

    • Author(s)
      大堀大介, トーマス セドリック, 肥後昭男, 寒川誠二, 碇 哲雄, 福山敦彦
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ, 新潟市
    • Year and Date
      2016-09-14
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Presentation] 中性粒子ビーム励起錯体反応を用いた Taエッチングのメカニズム2016

    • Author(s)
      久保田智広、久保百司、寒川誠二
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ (新潟県新潟市)
    • Year and Date
      2016-09-13
    • Data Source
      KAKENHI-PROJECT-15K04712
  • [Presentation] Pump-probe study of temperature-dependent spin relaxation in GaAs quantum disks fabricated by fully top-down lithography using Bio-templates2016

    • Author(s)
      T. Kiba, T. Tanaka, A. Higo, C. Thomas, Y. Tamura, S. Samukawa, A. Murayama
    • Organizer
      16th IEEE International Conference on Nanotechnology
    • Place of Presentation
      Sendai International Center, Sendai, JAPAN
    • Year and Date
      2016-08-23
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Presentation] Spike-based Neural Learning Hardware Using a Resistance Change Memory Device toward Brain-like Systems with Nanostructures2016

    • Author(s)
      H. Ando, K. Tomizaki, T. Tohara, T. Morie, A. T. Fukuchi, M. Arita, Y. Takahashi, and S. Samukawa
    • Organizer
      The Sixteenth Int. Symp. on Advanced Fluid Information (AFI-2016)
    • Place of Presentation
      Sendai, Japan
    • Year and Date
      2016-10-11
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H01706
  • [Presentation] Thermal conductivity of 10nm-silicon nanowire array fabricated by bio-template and neutral beam etching.2016

    • Author(s)
      A.kikuchi, A. Yao, I. Mori, T. Ono, S. Samukawa
    • Organizer
      IEEE International Conference on Nanotechnology 2016
    • Place of Presentation
      仙台国際センター(仙台)
    • Year and Date
      2016-08-22
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] 中性粒子ビーム技術を用いたSiNP-SiGe0.3複合膜の作製と熱伝導率の評価2016

    • Author(s)
      菊池亜紀応、八尾章史、毛利勇、小野崇人、寒川誠二
    • Organizer
      第77回 応用物理学会秋季学術大会
    • Place of Presentation
      朱鷺メッセ(新潟)
    • Year and Date
      2016-09-13
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H03898
  • [Presentation] Fabrication of GaAs quantum nanodisk by bio-template, neutral beam etching, and asymmetric AlGaAs barrier regrowth and its optical response2016

    • Author(s)
      A. Higo, T. Kiba, C. Thomas, J. Takayama, M. Sugiyama, Y. Nakano, A. Murayama, S. Samukawa
    • Organizer
      JSPS workshop on Japan-Sweden frontiers in spin and photon functionalities of semiconductor nanostructures
    • Place of Presentation
      Jyozankei Grand Hotel, Sapporo, JAPAN
    • Year and Date
      2016-08-30
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-16H06359
  • [Presentation] Analog Memory Operation of Resistance Change Memory with MOSFET for Brain-like LSIs2015

    • Author(s)
      H. Ando, K. Tomizaki, T. Tohara, T. Morie, T. Hiroi, A. Nakane, R. Katsumura, A. Fukuchi, M. Arita, Y. Takahashi, and S. Samukawa
    • Organizer
      Fifteenth Int. Symp. on Advanced Fluid Information (AFI-2015)
    • Place of Presentation
      仙台
    • Year and Date
      2015-10-28
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15H01706
  • [Presentation] First-Principles Theoretical Investigation on Mechanism of New Transition Metal Etching Process using Oxygen and argon Neutral Beams and Ethanol Gas2015

    • Author(s)
      Tomohiro Kubota, Yoshiyuki Kikuchi, and Seiji Samukawa
    • Organizer
      American Vacuum Society 62nd International Symposium & Exhibition
    • Place of Presentation
      San Jose (USA)
    • Year and Date
      2015-10-20
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K04712
  • [Presentation] Transition Metal Complex Reaction Etching for MRAM Applications using Neutral Beam and Its Mechanism Investigated by First-Principles Calculation2015

    • Author(s)
      Tomohiro Kubota, Yoshiyuki Kikuchi, Toshihisa Nozawa, and Seiji Samukawa
    • Organizer
      2015 International Conference on Solid State Devices and Materials
    • Place of Presentation
      札幌コンベンションセンター(北海道札幌市)
    • Year and Date
      2015-09-29
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K04712
  • [Presentation] 酸素中性粒子ビームによる酸化及び錯体反応を用いた遷移金属エッチングメカニズム(3)2015

    • Author(s)
      久保田智広, 菊地良幸, 野沢俊久, 伊藤寿, 久保百司, 寒川誠二
    • Organizer
      第72回 応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場(愛知県名古屋市)
    • Year and Date
      2015-09-15
    • Data Source
      KAKENHI-PROJECT-15K04712
  • [Presentation] A new metallic complex reaction etching for MRAM materials by a low-temperature neutral beam process2015

    • Author(s)
      Tomohiro Kubota and Seiji Samukawa
    • Organizer
      Plasma Etch and Strip in Microtechnology 2015
    • Place of Presentation
      Leuven (Belgium)
    • Year and Date
      2015-04-27
    • Invited / Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-15K04712
  • [Presentation] Polyethylene glycol (PEG)を塗布した基板上のフェリチン2 次元配列2014

    • Author(s)
      李 昌勇, 肥後昭男, Cedric Thomas, 田村洋典, 吉川憲一, 山下一郎, 寒川誠二
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      相模原
    • Year and Date
      2014-03-20
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] A Silicon Nanodisk Array Structure Realizing Synaptic Response of Spiking Neuron Models with Noise2014

    • Author(s)
      T. Morie, H. Liang, Y. Sun, T. Tohara, M. Igarashi, and S. Samukawa
    • Organizer
      The 19th Asia and South Pacific Design Automation Conference (ASP-DAC 2014)
    • Place of Presentation
      Singapore
    • Year and Date
      2014-01-21
    • Invited
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] オンウェハモニタリングによるプラズマエッチング形状異常予測2014

    • Author(s)
      久保田智広,佐藤充男,岩崎拓也,小野耕平,寒川誠二
    • Organizer
      第61回応用物理学会春季学術講演会
    • Place of Presentation
      相模原
    • Year and Date
      2014-03-19
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] Feature Profile Evolution in Plasma Processing using On-wafer Monitoring System2014

    • Author(s)
      T.Kubota and S.Samukawa
    • Organizer
      8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing
    • Place of Presentation
      福岡
    • Year and Date
      2014-02-05
    • Invited
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] 第一原理電子状態計算による中性粒子ビーム生成メカニズムの解析VII2013

    • Author(s)
      渡辺尚貴,大塚晋吾,岩崎拓也,小野耕平,入江康郎,植木真治,額賀理,杉山正和,久保田智広,寒川誠二
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      厚木
    • Year and Date
      2013-03-28
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] オンウェハモニタリングによるプラズマプロセスダメージ・形状予測2013

    • Author(s)
      久保田智広,佐藤充男,岩崎拓也,小野耕平,寒川誠二
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      厚木
    • Year and Date
      2013-03-27
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] Novel Quantum Effect Devices realized by Fusion of Biotemplate and Defect Free Neutral Beam Etching2013

    • Author(s)
      S. Samukawa
    • Organizer
      2013 IEEE International NanoElectronics Conference
    • Place of Presentation
      Singapore
    • Year and Date
      2013-01-04
    • Invited
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] 中性粒子ビームエッチングの加工形状シミュレーション(4)2013

    • Author(s)
      望月俊輔,渡辺尚貴,大塚晋吾,岩崎拓也,小野耕平,入江康郎,三輪和弘,久保田智広,杉山正和,寒川誠二
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      厚木
    • Year and Date
      2013-03-28
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] Core Technology Consortium for Advanced Energy Devices2013

    • Author(s)
      S.Samukawa and T.Kubota
    • Organizer
      10th International Conference on Flow Dynamics
    • Place of Presentation
      仙台
    • Year and Date
      2013-11-26
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] オンウェハモニタリングによるプラズマエッチング形状予測2013

    • Author(s)
      久保田智広,佐藤充男,岩崎拓也,小野耕平,寒川誠二
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      京田辺
    • Year and Date
      2013-09-18
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] Feature profile evolution in plasma processing using on-wafer monitoring system2013

    • Author(s)
      T.Kubota, M.Sato, T.Iwasaki, K.Ono, and S.Samukawa
    • Organizer
      AVS 60th International Symposium & Exhibition
    • Place of Presentation
      アメリカ・Long Beach
    • Year and Date
      2013-10-31
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] 中性粒子ビームによるシリコンエッチング(7)2013

    • Author(s)
      久保田智広,三輪和弘,バトナサン・アルタンスック,大塚晋吾,渡辺尚貴,岩崎拓也,入江康郎,小野耕平,杉山正和,寒川誠二
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      厚木
    • Year and Date
      2013-03-28
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] On-wafer monitoring technique for highly efficient fabrication process of nano energy devices2013

    • Author(s)
      T.Kubota and S.Samukawa
    • Organizer
      10th International Conference on Flow Dynamics
    • Place of Presentation
      仙台
    • Year and Date
      2013-11-26
    • Invited
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] FinFET とナノディスクアレイ構造を結合したニューロンデバイス2013

    • Author(s)
      東原 敬, 梁 海超, 遠藤 和彦, 五十嵐誠, 寒川 誠二, 昌原明植, 森江 隆
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川
    • Year and Date
      2013-03-29
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] Novel Quantum Effect Devices Fabricated Using Fusion of Bio-template and Defect- Free Neutral Beam Etching2013

    • Author(s)
      S. Samukawa
    • Organizer
      2013 JSAPMRS Joint Symposia
    • Place of Presentation
      Kyotanabe
    • Year and Date
      2013-09-17
    • Invited
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] 中性粒子ビームエッチングプロセスの総合的シミュレーション2013

    • Author(s)
      渡辺尚貴,大塚晋吾,岩崎拓也,小野耕平,入江康郎,望月俊輔,久保田智広,寒川誠二
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      京田辺
    • Year and Date
      2013-09-18
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] 中性粒子ビームエッチングモデルと加工形状解析(3)2013

    • Author(s)
      大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,入江康郎,望月俊輔,三輪和弘,杉山正和,久保田智広,寒川誠二
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      厚木
    • Year and Date
      2013-03-28
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] Numerical simulation of total processes of neutral beam etching from G.eration of neutral beam by collision of ions against graphite sidewall to 3-dimensional etching profile2013

    • Author(s)
      N.Watanabe, S.Ohtsuka, S.Mochizuki, T.Kubota, T.Iwasaki, Y.Iriye, K.Ono, and S.Samukawa
    • Organizer
      AVS 60th International Symposium & Exhibition
    • Place of Presentation
      アメリカ・Long Beach
    • Year and Date
      2013-10-31
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] 中性粒子ビームによるシリコンエッチング(5)2012

    • Author(s)
      久保田智広,三輪和弘,大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,杉山正和,寒川誠二
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      東京
    • Year and Date
      2012-03-17
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] 中性粒子ビームエッチングモデルと加工形状解析2012

    • Author(s)
      大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,入江康郎,望月俊輔,杉山正和,久保田智広,寒川誠二
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      東京
    • Year and Date
      2012-03-17
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] 3-Dimensional and Defect-free Etching by Neutral Beam for MEMS Applications2012

    • Author(s)
      T.Kubota, A.Wada, Y.Yanagisawa, B.Altansukh, K.Miwa, T.Ono, and S.Samukawa
    • Organizer
      2012 International Conference on Solid State Devices and Materials
    • Place of Presentation
      京都
    • Year and Date
      2012-09-25
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] オンウエハーモニタリングとシミュレーションの融合によるプラズマプロセス中の表面イオンシース形状と入射イオン軌道予測2012

    • Author(s)
      荒木良亮,久保田智広,岩崎拓也,小野耕平,寒川誠二
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      東京
    • Year and Date
      2012-03-17
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] 中性粒子ビームエッチングの加工形状シミュレーション(3)2012

    • Author(s)
      望月俊輔,渡辺尚貴,大塚晋吾,岩崎拓也,小野耕平,入江康郎,三輪和弘,久保田智広,杉山正和,寒川誠二
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      松山
    • Year and Date
      2012-09-13
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] 中性粒子ビームエッチングモデルと加工形状解析(2)2012

    • Author(s)
      大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,入江康郎,望月俊輔,杉山正和,久保田智広,寒川誠二
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      松山
    • Year and Date
      2012-09-13
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] Numerical study on electron transfer mechanism by collision of ions at graphite surface in highly-efficient neutral beam Generation2012

    • Author(s)
      N.Watanabe, T.Kubota, and S.Samukawa
    • Organizer
      The 8th EU-Japan Joint Symposium on Plasma Processing
    • Place of Presentation
      奈良
    • Year and Date
      2012-01-17
    • Invited
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] 中性粒子ビームエッチングの加工形状シミュレーション(2)2012

    • Author(s)
      望月俊輔,大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,入江康郎,久保田智広,杉山正和,寒川誠二
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      東京
    • Year and Date
      2012-03-17
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] 中性粒子ビームエッチングモデルと加工形状解析2012

    • Author(s)
      大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,入江康郎,望月俊輔,杉山正和,久保田智広,寒川誠二
    • Organizer
      第29回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      北九州
    • Year and Date
      2012-10-23
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] Prediction of ion sheath shape and ion trajectory during plasma etching processing using on-wafer monitoring technique and simulation2012

    • Author(s)
      R.Araki, T.Kubota, and S.Samukawa
    • Organizer
      The 8th EU-Japan Joint Symposium on Plasma Processing
    • Place of Presentation
      奈良
    • Year and Date
      2012-01-16
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] Theoretical calculation of neutralization efficiency of positive and negative chlorine ions with consideration of excited states2012

    • Author(s)
      S.Ohtsuka, N.Watanabe, T.Kubota, T.Iwasaki, Y.Iriye, K.Ono, and S.Samukawa
    • Organizer
      AVS 59th International Symposium and Exhibition
    • Place of Presentation
      アメリカ・Tampa
    • Year and Date
      2012-11-01
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] 中性粒子ビームによるシリコンエッチング(6)2012

    • Author(s)
      久保田智広,三輪和弘,バトナサン・アルタンスック,大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,杉山正和,寒川誠二
    • Organizer
      第73回応用物理学会学術講演会
    • Place of Presentation
      松山
    • Year and Date
      2012-09-13
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] Feature Profile Evolution in Plasma Processing Using Wireless On-Wafer Monitoring System2012

    • Author(s)
      T.Kubota and S.Samukawa
    • Organizer
      Ninth International Conference on Flow Dynamics
    • Place of Presentation
      仙台
    • Year and Date
      2012-09-19
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] 形状シミュレーションによる塩素中性粒子ビームエッチングの加工形状の検討2012

    • Author(s)
      望月俊輔,大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,入江康郎,三輪和弘,久保田智広,杉山正和,寒川誠二
    • Organizer
      第29回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      北九州
    • Year and Date
      2012-10-23
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] 中性粒子ビーム生成におけるアパーチャ構造とエッチング特性解析2011

    • Author(s)
      大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,入江康郎,植木真治,額賀理,杉山正和,久保田智広,寒川誠二
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形
    • Year and Date
      2011-08-31
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] ノイズを利用する脳型情報処理回路のためのナノデバイス2011

    • Author(s)
      森江隆, 梁海超, 孫意来, 五十嵐誠, 黄啓賢, 寒川誠二
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(神奈川県)
    • Year and Date
      2011-03-25
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] Energy and Angular Distribution Analysis for Neutral Beam and Application for Etching Simulation2011

    • Author(s)
      S.Ohtsuka, N.Watanabe, T.Iwasaki, K.Ono, Y.Iriye, Osamu Nukaga, S.Ueki, T.Kubota, M.Sugiyama, and S.Samukawa
    • Organizer
      AVS 58th International Symposium & Exhibition
    • Place of Presentation
      アメリカ・Nashville
    • Year and Date
      2011-11-03
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] ナノディスクアレイ構造とCMOS回路を結合したスパイキングニューロンデバイス2011

    • Author(s)
      梁海超, 森江隆, 孫意来, 五十嵐誠, 寒川誠二
    • Organizer
      電子情報通信学会ニューロコンピューティング研究会
    • Place of Presentation
      福岡,九州大学
    • Year and Date
      2011-10-20
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] 中性粒子ビームによるシリコンエッチング(4)2011

    • Author(s)
      久保田智広,大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,入江康郎,杉山正和,大竹浩人,寒川誠二
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形
    • Year and Date
      2011-08-31
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] High-aspect-ratio silicon etching using large-diameter neutral beam source2011

    • Author(s)
      T.Kubota, N.Watanabe, S.Ohtsuka, K.Ono, H.Ohtake, S.Ueki, Y.Nishimori, G.Hashiguchi, and S.Samukawa
    • Organizer
      AVS 58th International Symposium & Exhibition
    • Place of Presentation
      アメリカ・Nashville
    • Year and Date
      2011-11-03
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] オンウエハーモニタリングとシミュレーションの融合による立体形状エッチングにおけるシース形状およびイオン軌道予測2011

    • Author(s)
      荒木良亮,久保田智広,三輪和弘,岩崎拓也,小野耕平,寒川誠二
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形
    • Year and Date
      2011-08-31
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] 中性粒子ビームによるエッチングの加工形状シミュレーション2011

    • Author(s)
      望月俊輔,久保田智広,大塚晋吾,小野耕平,岩崎拓也,渡辺尚貴,入江康郎,杉山正和,寒川誠二
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形
    • Year and Date
      2011-08-31
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] 第一原理電子状態計算による中性粒子ビーム生成メカニズムの解析V2011

    • Author(s)
      渡辺尚貴,大塚晋吾,岩崎拓也,小野耕平,入江康郎,植木真治,額賀理,杉山正和,久保田智広,寒川誠二
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形
    • Year and Date
      2011-08-31
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] Theoretical analysis of electron transfer during the process of neutral beam G.eration2011

    • Author(s)
      N.Watanabe, S.Ohtsuka, T.Iwasaki, K.Ono, Yasuro Iriye, S.Ueki, Osamu Nukaga, T.Kubota, M.Sugiyama, and S.Samukawa
    • Organizer
      AVS 58th International Symposium & Exhibition
    • Place of Presentation
      アメリカ・Nashville
    • Year and Date
      2011-11-03
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] 第一原理電子状態計算による中性粒子ビーム生成メカニズムの解析2011

    • Author(s)
      渡辺尚貴, 大塚晋吾, 岩崎拓也, 小野耕平,入江康郎, 額賀理, 植木真治, 杉山正和,久保田智広, 寒川誠二
    • Organizer
      第28回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      東京
    • Year and Date
      2011-09-26
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] ノイズを伴うスパイキングニューロンモデルを実現するナノディスクアレイ構造2011

    • Author(s)
      梁 海超, 孫 意来, 森江 隆, 五十嵐誠, 寒川 誠二
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形
    • Year and Date
      2011-09-01
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] 中性粒子ビーム生成におけるアパーチャ構造とエッチング特性解析2011

    • Author(s)
      大塚晋吾, 渡辺尚貴, 岩崎拓也, 小野耕平,入江康郎, 額賀理, 植木真治, 杉山正和,久保田智広, 寒川誠二
    • Organizer
      第28回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      東京
    • Year and Date
      2011-09-27
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] 脳型情報処理デバイスの現状と今後の展開2011

    • Author(s)
      森江隆, 梁海超, 孫意来, 田中秀樹, 五十嵐誠, 寒川誠二
    • Organizer
      応用物理学会シリコンテクノロジー分科会第140回研究集会
    • Place of Presentation
      宮城,東北大学(招待講演)
    • Year and Date
      2011-08-05
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] A Si Nanodisk Array Structure for Spiking Neuron Models2011

    • Author(s)
      Y.Sun, H.Liang, T.Morie, M.Igarashi, C.Huang, S.Samukawa
    • Organizer
      East-Asia Inter-University Workshop on Brain Engineering
    • Place of Presentation
      九州工大(福岡県)
    • Year and Date
      2011-02-28
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] ノイズを伴うスパイキングニューロンモデルを実現するナノディスクアレイ構造2011

    • Author(s)
      梁海超, 孫意来, 森江隆, 五十嵐誠, 寒川誠二
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形,山形大学
    • Year and Date
      2011-09-01
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] Si量子ナノディスク2次元アレイ構造の電気特性の構造による制御2010

    • Author(s)
      五十嵐誠, 黄啓賢, 王宣又, モハマドファイルズ・ブディマン, 森江隆, 寒川誠二
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大(長崎県)
    • Year and Date
      2010-09-14
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] Control of Activation Energy for Electron Transport in Two-Dimensional Array of Si Nanodisks2010

    • Author(s)
      M.Igarashi, C.H.Huang, T.Morie, S.Samukawa
    • Organizer
      Int.Conf.on Solid State Devices and Materials
    • Place of Presentation
      東京大(東京都)
    • Year and Date
      2010-09-23
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] Fundamental Study on Spiking Neuron Devices2010

    • Author(s)
      T.Morie, Y.Sun, H.Liang, K.Nakada, M.Igarashi, C.Huang, S.Samukawa
    • Organizer
      The Tenth Int.Symp.on Advanced Fluid Information and Transdisciplinary Fluid Integration
    • Place of Presentation
      仙台国際センター(宮城県)
    • Year and Date
      2010-11-02
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] オンウェハモニタリングによるPECVDプロセスにおけるチャージングダメージの発生メカニズム解明とそのリアルタイム評価2010

    • Author(s)
      荒木良亮、奥村宏克、陣内佛霖、松永範昭、寒川誠二
    • Organizer
      2010年秋季第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-16
    • Data Source
      KAKENHI-PROJECT-21560026
  • [Presentation] Ion Trajectory Prediction at High-Aspect-Ratio Hole Etching by the Combination of On-Water Monitoring and Sheath Modeling2009

    • Author(s)
      大竹浩人, 福田誠一, 陣内佛霖, 辰巳知彦, 寒川誠二
    • Organizer
      AVS 56th International Symposium & Exhibition
    • Place of Presentation
      アメリカ合衆国・カリフォルニア州・サンノゼ
    • Year and Date
      2009-11-11
    • Data Source
      KAKENHI-PROJECT-21560026
  • [Presentation] Ultra-Low-Damage Surface Modification of Carbon Nanotube for P-type and N-type Field-Effect Transistor by Neutral Beam Process2009

    • Author(s)
      Akira Wada, Yoshinori sato, Satoru Suzuki, Masahiko Ishida, Fumiyuki Nihey, Yoshihiro Kobayashi, Kazuyuki Tohji, Seiji Samukawa
    • Organizer
      The Sixth International Conference on Flow Dynamics
    • Place of Presentation
      宮城県・仙台市
    • Year and Date
      2009-11-05
    • Data Source
      KAKENHI-PROJECT-20651039
  • [Presentation] Control of Electrical Characteristics of Carbon Nanotubes by Damage-free Surface Modification with Neutral Beam2009

    • Author(s)
      Akira Wada, Yoshinori sato, Satoru Suzuki, Masahiko Ishida, Fumiyuki Nihey, Yoshihiro Kobayashi, Seiji Samukawa
    • Organizer
      Nanotube 2009 : Tenth International Conference on the Science and Application of Nanotubes
    • Place of Presentation
      中華人民共和国・北京
    • Year and Date
      2009-06-25
    • Data Source
      KAKENHI-PROJECT-20651039
  • [Presentation] オンウエハモニタリング技術による異常形状発生予測2009

    • Author(s)
      大竹浩人、福田誠一、陣内佛霖、辰巳知彦、寒川誠二
    • Organizer
      2009年秋季第70回応用物理学会学術講演会
    • Place of Presentation
      富山県・富山市
    • Year and Date
      2009-09-09
    • Data Source
      KAKENHI-PROJECT-21560026
  • [Presentation] 酸素中性粒子ビーム照射による低損傷カーボンナノチューブ表面酸化2009

    • Author(s)
      和田章良、佐藤義倫、鈴木哲、二瓶史行、田路和幸、寒川誠二
    • Organizer
      2009年秋季第70回応用物理学会学術講演会
    • Place of Presentation
      富山県・富山市
    • Year and Date
      2009-09-09
    • Data Source
      KAKENHI-PROJECT-20651039
  • [Presentation] 窒素中性粒子ビーム照射による低損傷カーボンナノチューブ表面窒化2009

    • Author(s)
      和田章良、佐藤義倫、鈴木哲、二瓶史行、田路和幸、寒川誠二
    • Organizer
      2009年秋季第70回応用物理学会学術講演会
    • Place of Presentation
      富山県・富山市
    • Year and Date
      2009-09-09
    • Data Source
      KAKENHI-PROJECT-20651039
  • [Presentation] Prediction of Abnormal Etching Profile in High-Aspect-Ratio Via/Hole Etching Using On-Water Monitoring System2009

    • Author(s)
      大竹浩人, 福田誠一, 陣内佛霖, 辰巳知彦, 寒川誠二
    • Organizer
      International meeting on solid state device and materials
    • Place of Presentation
      宮城県・仙台市
    • Year and Date
      2009-10-09
    • Data Source
      KAKENHI-PROJECT-21560026
  • [Presentation] 中性粒子ビーム照射によるカーボンナノチューブ欠陥生成機構と電気特性2009

    • Author(s)
      和田章良、佐藤義倫、鈴木哲、石田真彦、二瓶史行、小林慶裕、田路和幸、寒川誠二
    • Organizer
      2009年春季第56回応用物理学関係連合講演会
    • Place of Presentation
      茨城・つくば
    • Year and Date
      2009-03-30
    • Data Source
      KAKENHI-PROJECT-20651039
  • [Presentation] 中性粒子ビーム照射によるカーボンナノチューブ欠陥生成の構造依存性2008

    • Author(s)
      和田章良, 佐藤義倫, 鈴木哲, 小林慶裕, 寒川誠二
    • Organizer
      2008年秋季第69回応用物理学会学術講演会
    • Place of Presentation
      愛知・名古屋
    • Year and Date
      2008-09-03
    • Data Source
      KAKENHI-PROJECT-20651039
  • [Presentation] Influences of Electrical Characteristics in Carbon Nanotubes by Neutral Beam Irradiation2008

    • Author(s)
      A. Wada, Y. Sato, M. Ishida, F. Nihey, K. Tohji, and S. Samukawa
    • Organizer
      AVS 55th International Symposium & Exhibition
    • Place of Presentation
      米国・ボストン
    • Year and Date
      2008-10-24
    • Data Source
      KAKENHI-PROJECT-20651039
  • [Presentation] Damage-free Surface Modification of Carbon Nanotubes using Advanced Neutral Beam2008

    • Author(s)
      Akira Wada, Yoshinori Sato, Masahiko Ishida, Fumiyuki Nihey, Kazuyuki Tohji and Seiji Samukawa
    • Organizer
      The 6th EU-Japan Joint Symposium on Plasma Processing (EU-Japan JSPP)
    • Place of Presentation
      沖縄・那覇
    • Year and Date
      2008-04-22
    • Data Source
      KAKENHI-PROJECT-20651039
  • [Presentation] Influence of Neutral Beam Irradiation to Electrical Characteristics in Carbon Nanotubes2008

    • Author(s)
      A. Wada, Y. Sato, M. Ishida, F. Nihey, K. Tohji and S. Samukawa
    • Organizer
      8th International Symposium on Advanced Fluid Information and Transdisciplinary Fluid Information
    • Place of Presentation
      宮城・仙台
    • Year and Date
      2008-10-20
    • Data Source
      KAKENHI-PROJECT-20651039
  • [Presentation] Feature Profile Evolution in Plasma Processing using On-wafer Monitoring System

    • Author(s)
      Tomohiro Kubota and Seiji Samukawa
    • Organizer
      8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing
    • Place of Presentation
      Fukuoka Convention Center
    • Invited
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] Double-dot Si single-electron transistor with tunable coupling capacitance

    • Author(s)
      Takafumi Uchida, Masashi Arita, Akira Fujiwara, Yasuo Takahashi, and Seiji Samukawa
    • Organizer
      The Thirteenth Int. Symp. on Advanced Fluid Information and Transdisciplinary Fluid Integration
    • Place of Presentation
      Sendai, Japan
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] Fabrication and evaluation of silicon micromechanical resonator using neutral beam etching technology

    • Author(s)
      Nguyen Van Toan, Tomohiro Kubota, Halubai Sekhar, Seiji Samukawa, and Takahito Ono
    • Organizer
      The 9th International Conference on Nano/Micro Engineered and Molecular Systems
    • Place of Presentation
      Hyatt Regency Waikiki,アメリカ
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] On-wafer monitoring technique for highly efficient fabrication process of nano energy devices

    • Author(s)
      Tomohiro Kubota and Seiji Samukawa
    • Organizer
      10th International Conference on Flow Dynamics
    • Place of Presentation
      Sendai International Center
    • Invited
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] A Silicon Nanodisk Array Structure Realizing Synaptic Response of Spiking Neuron Models with Noise

    • Author(s)
      T. Morie, H. Liang, Y. Sun, T. Tohara, M. Igarashi, and S. Samukawa
    • Organizer
      The 19th Asia and South Pacific Design Automation Conference
    • Place of Presentation
      Singapore
    • Invited
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] Feature Profile Evolution in Plasma Processing Using Wireless On-Wafer Monitoring System

    • Author(s)
      寒川誠二
    • Organizer
      Ninth International Conference on Flow Dynamics
    • Place of Presentation
      仙台
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] バイオテンプレートを用いた中性粒子ビーム加工によるGeナノディスク作製

    • Author(s)
      モハマド エルマン,岡田 健,磯田大河,伊藤公平,山下一郎,寒川誠二
    • Organizer
      第61回 応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学相模原キャンパス、神奈川県
    • Data Source
      KAKENHI-PROJECT-25249139
  • [Presentation] Polyethylene glycol (PEG)を塗布した基板上のフェリチン2次元配列

    • Author(s)
      李 昌勇,肥後昭男,Cedric Thomas,田村洋典,吉川憲一,山下一郎,寒川誠二
    • Organizer
      第61回 応用物理学会春季学術講演会
    • Place of Presentation
      相模原
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] Silicon micromechanical resonator with high quality factor fabricated by damage-free neutral beametching process

    • Author(s)
      Halubai Sekhar,久保田智広,Van Toan Nguyen,小野崇人,寒川誠二
    • Organizer
      第61回 応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学相模原キャンパス
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] Green nanodevice by super low damage process

    • Author(s)
      Seiji Samukawa
    • Organizer
      10th International Conference on Flow Dynamics
    • Place of Presentation
      Sendai, Japan
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] Damage-free AlGaN/GaN Recess-Gate Etching using Cl2 Neutral Beam

    • Author(s)
      Halubai Sekhar ,久保田智広,岡田 健,太田実雄,藤岡 洋,寒川誠二
    • Organizer
      第61回 応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学相模原キャンパス
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] Enhancement of Electrical Conductivity by Miniband Formation In Silicon Quantum Dot Superlattice Structure

    • Author(s)
      Makoto Igarashi, Weiguo Hu, Mohd Erman Syazwan, and Seiji Samukawa
    • Organizer
      International Conference on Solid State Devices and Materials
    • Place of Presentation
      Kyoto, Japan
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] Novel Quantum Effect Devices realized by Fusion of Biotemplate and DefectFree Neutral Beam Etching

    • Author(s)
      Seiji Samukawa
    • Organizer
      2013 IEEE International NanoElectronics Conference
    • Place of Presentation
      Singapore
    • Invited
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] Novel Quantum Effect Devices Fabricated Using Fusion of Bio-template and Defect-Free Neutral Beam Etching

    • Author(s)
      Seiji Samukawa
    • Organizer
      2013 JSAP-MRS Joint Symposia
    • Place of Presentation
      Kyotanabe, Japan
    • Invited
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] Ultimate Top-down Etching Processes for Future Nano-scale Devices

    • Author(s)
      Seiji Samukawa
    • Organizer
      Semicon Korea SEMI Technology Symposium
    • Place of Presentation
      Seoul, Korea
    • Invited
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] オンウェハモニタリングによるプラズマエッチング形状異常予測

    • Author(s)
      久保田智広,佐藤充男,岩崎拓也,小野耕平,寒川誠二
    • Organizer
      第61回 応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学相模原キャンパス
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] Formation and Characterization of a Three Dimensional Silicon Quantum Dot Superlattice Fabricated by Top-Down Process Using Bio-Template and Neutral Beam Etching Technology for its Application to a High Efficiency Quantum Dot Solar Cell

    • Author(s)
      Mohammad Maksudur Rahman, Makoto Igarashi, Weiguo Hu, Mohd Erman Syazwan, Yusuke Hoshi, Noritaka Usami, and Seiji Samukawa
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      京田辺
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] Ultimate Top-down Processes for Future Nanoscale Devices

    • Author(s)
      Seiji Samukawa
    • Organizer
      8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing
    • Place of Presentation
      Fukuoka, Japan
    • Invited
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] FinFETとナノディスクアレイ構造を結合したニューロンデバイス

    • Author(s)
      東原 敬, 梁 海超, 遠藤 和彦, 五十嵐 誠, 寒川 誠二, 昌原 明植, 森江 隆
    • Organizer
      第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] Intelligent Information Processing Circuits Using Nanodisk Array Structure

    • Author(s)
      T. Morie, T. Tohara, K. Endo, M. Igarashi, and S. Samukawa
    • Organizer
      The Thirteenth Int. Symp. on Advanced Fluid Information and Transdisciplinary Fluid Integration
    • Place of Presentation
      Sendai, Japan
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] Numerical simulation of total processes of neutral beam etching from generation of neutral beam by collision of ions against graphite sidewall to 3-dimensional etching profile

    • Author(s)
      Naoki Watanabe, Shingo Ohtsuka, Shunsuke Mochizuki, Tomohiro Kubota, Takuya Iwasaki, Yasuroh Iriye, Kohei Ono, and Seiji Samukawa
    • Organizer
      AVS 60th International Symposium & Exhibition
    • Place of Presentation
      Long Beach Convention Center,アメリカ
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] 塩素中性粒子ビームを用いた窒化物薄膜のエッチング特性

    • Author(s)
      太田実雄,Halubai Sekhar,久保田智広,岡田 健,寒川誠二,藤岡 洋
    • Organizer
      第61回 応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学相模原キャンパス
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] アンペロメトリックバイオイメージングプラットフォーム「バイオLSI」

    • Author(s)
      井上 久美、松平 昌昭、伊野 浩介、中野 将識、菅野 佑介、須田 篤史、國方 亮太、吉田 慎哉、早坂 丈、菊地 良幸、Xijiang Chang、久保田 智広、珠玖 仁、田中 秀治、寒川 誠二、末永 智一
    • Organizer
      第74回分析化学討論会
    • Place of Presentation
      日本大学工学部
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] 中性粒子ビームによる超低損傷加工が拓く革新的ナノデバイス

    • Author(s)
      寒川誠二
    • Organizer
      大口径中性粒子ビームに関する研究会
    • Place of Presentation
      仙台
    • Invited
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] High-frequency characteristics of Si single-electron transistor

    • Author(s)
      Hiroto Takenaka, Michito Shinohara, Takafumi Uchida, Masashi Arita, Seiji Samukawa, and Yasuo Takahashi
    • Organizer
      Twelfth International Symposium on Advanced Fluid Infromation and Transdisciplinary Fluid Integration
    • Place of Presentation
      仙台
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] オンウェハモニタリングによるプラズマエッチング形状予測

    • Author(s)
      久保田智広,佐藤充男, 岩崎拓也,小野耕平,寒川誠二
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学京田辺キャンパス
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] Damage-free AlGaN/GaN Recess-Gate Etching using Cl2 Neutral Beam for High-Performance HEMTs

    • Author(s)
      Halubai Sekhar, Tomohiro Kubota, Takeru Okada, Yosuke Tamura, ChangYong Lee, Jitsuo Ohta, Hiroshi Fujioka, and Seiji Samukawa
    • Organizer
      The 3rd International Symposiumon Next-Generation Electronics
    • Place of Presentation
      Chang Gung University,台湾
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] バイオテンプレート極限加工による3次元量子ドット超格子構造の作製

    • Author(s)
      Mohammad Rahman、宇佐美徳隆、寒川誠二
    • Organizer
      第10回「次世代の太陽光発電システム」シンポジウム
    • Place of Presentation
      金沢
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] Feature profile evolution in plasma processing using on-wafer monitoring system

    • Author(s)
      Tomohiro Kubota, Michio Sato, Takuya Iwasaki, Kohei Ono, and Seiji Samukawa
    • Organizer
      AVS 60th International Symposium & Exhibition
    • Place of Presentation
      Long Beach Convention Center,アメリカ
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] 中性粒子ビームエッチングプロセスの総合的シミュレーション

    • Author(s)
      渡辺尚貴,大塚晋吾,岩崎拓也,小野耕平,入江康郎,望月俊輔,久保田智広,寒川誠二
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学京田辺キャンパス
    • Data Source
      KAKENHI-PROJECT-23360040
  • [Presentation] Intelligent Information Processing Circuits Using Nanodisk Array Structure

    • Author(s)
      T. Morie, H. Liang, T. Tohara, K. Endo, M. Igarashi, and S. Samukawa
    • Organizer
      Twelfth International Symposium on Advanced Fluid Infromation and Transdisciplinary Fluid Integration
    • Place of Presentation
      仙台
    • Data Source
      KAKENHI-PROJECT-22240022
  • [Presentation] Ultimate Top-down Etching Processes for Future Nano-scale Devices

    • Author(s)
      Seiji Samukawa
    • Organizer
      Japan-Australia Commemorative Workshop
    • Place of Presentation
      Canberra, Australia
    • Invited
    • Data Source
      KAKENHI-PROJECT-22240022
  • 1.  KUBOTA Tomohiro (70322683)
    # of Collaborated Projects: 6 results
    # of Collaborated Products: 64 results
  • 2.  HANE Kazuhiro (50164893)
    # of Collaborated Projects: 4 results
    # of Collaborated Products: 0 results
  • 3.  熊谷 慎也 (70333888)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 4.  遠藤 和彦 (60392594)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 12 results
  • 5.  KOYANAGI Mitsumasa (60205531)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 6.  ONO Takahito (90282095)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 7.  MORIE Takashi (20294530)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 31 results
  • 8.  TAKAHASHI Yasuo (90374610)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 10 results
  • 9.  TOHARA Takashi
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 10 results
  • 10.  FURUKAWA Tetsuo (50219101)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 11.  Wada Kazumi (30376511)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 12.  TANAKA Tetsu (40417382)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 13.  FUKUSHIMA Takafumi (10374969)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 14.  KONDO Michio (30195911)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 15.  HAMAGUCHI Satoshi (60301826)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 16.  YOSHIMURA Satoru (40294029)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 17.  KIUCHI Masato (50356862)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 18.  Murayama Akihiro (00333906)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 14 results
  • 19.  大竹 浩人 (00436156)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 3 results
  • 20.  栗野 浩之 (70282093)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 21.  沈 正七 (00333849)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 22.  末岡 和久 (60250479)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 23.  中村 雅一 (80332568)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 24.  大堀 大介 (00839293)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 13 results
  • 25.  福山 敦彦 (10264368)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 7 results
  • 26.  野村 政宏 (10466857)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 2 results
  • 27.  太田 裕之 (70356640)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 28.  徳増 崇 (10312662)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 29.  NAKATA Kazuki
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 30.  IGARASHI Makoto
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 33 results
  • 31.  LIANG Haichao
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 16 results
  • 32.  SUN Yirai
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 13 results
  • 33.  TAMUKOH Hakaru
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 34.  OHNO Takeo
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 1 results
  • 35.  ANDO Hideyuki
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 6 results
  • 36.  TOMIZAKI KAZUMASA
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 2 results
  • 37.  KATO Takashi
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 38.  WANG Quan
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 39.  TANIMURA Hiroshi
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 40.  YAMAGUCHI Masatoshi
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 41.  HARADA Masataka
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 2 results
  • 42.  IWAMOTO Goki
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 43.  YAMASHITA Kenya
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 1 results
  • 44.  Kikuchi Akioh
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 7 results
  • 45.  黄 啓賢
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 2 results
  • 46.  宮川 宣明
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 47.  田中 啓文
    # of Collaborated Projects: 0 results
    # of Collaborated Products: 1 results

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