Samukawa Seiji 寒川誠二

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SAMUKAWA Seiji 寒川誠二

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Researcher Number	30323108
Other IDs	https://orcid.org/0000-0003-4971-3290
External Links
Affiliation (Current)	2025: 東北大学, 流体科学研究所, 特任教授(客員)
Affiliation (based on the past Project Information) *help	2021 – 2024: 東北大学, 流体科学研究所, 特任教授(客員) 2002 – 2021: 東北大学, 流体科学研究所, 教授 2015: 東北大学, 流体化学研究所, 教授 2005: 東北大学, 流体科学研究科, 教授 2004: 東北大学, 流体力学研究所, 教授
Review Section/Research Field	Principal Investigator Broad Section C / General applied physics / Thin film/Surface and interfacial physical properties / Microdevices/Nanodevices / Applied physics, general / Applied physics, general Except Principal Investigator Electronic materials/Electric materials / Basic Section 19010:Fluid engineering-related / Soft computing / Plasma electronics … More / Plasma science / Electron device/Electronic equipment / Energy engineering / Applied physics, general / Sensitivity informatics/Soft computing / Thin film/Surface and interfacial physical properties Less
Keywords	Principal Investigator 中性粒子ビーム / 表面改質 / エッチング / 量子ドット / 高移動度半導体 / 無欠陥周期ナノ構造 / ナノスケールサーマルマネージメント / 無欠陥ナノ周期構造複合材料 / ナノスケールサーマルマネジメント / 無欠陥ナノ周期構造 … More / エレクトロンバンド / フォノンバンド / 高移動度半導体素子 / フォノン場制御 / 無欠陥ナノピラー複合材料 / フォノン・バンド独立制御 / エネルギー変換 / フォノンエンジニアリング / ナノ構造 / 熱電素子 / nanocolumn / fin-type vertical MOSFET / low-k film / gate electrode etching / silicon oxynitride / negative ion / etching / neutral beam / 薄膜形成 / シリコン酸窒膜 / ナノ加工 / 半導体デバイス / エッチングダメージ / 起立ゲート型トランジスタ / 高誘電率膜 / 有機分子デバイス / カーボンナノチューブ / ナノカラム / フィン型MOSFET / 低誘電率絶縁膜 / ゲート電極加工 / シリコン酸窒化膜 / 負イオン / カーボンナノチューブトレンジタスタ / ナノ材料 / ナノチューブ・フラーレン / マイクロマシンプローブ / Bow-tieアンテナ型 / 表面プラズモン / Bow-tieアンテナ / 近接場光 / Pbセンター / 低ダメージエッチング / フェリチン / 蓄積電荷量 / フォトン / イオンエネルギー / オンウエハーモニタリング / モニタリング / 薄膜堆積 / 微細加工 / 側壁導電性 / 電子エネルギー分布 / イオンエネルギー分布 / センサー / マイクロマシン / 光照射損傷 / プラズマプロセス / オンウエハモニタリング … More Except Principal Investigator 中性粒子ビーム / 第一原理計算 / 量子ドット / 表面吸着確率 / 化学結合 / 反応分子動力学 / プラズマ援用化学気相体積法 / 原子層体積法 / 表面拡散 / 表面反応 / 反応分子動力学法 / 成膜プロセス / 自己組織化量子ドット / 中性粒子ビームエッチング / 半導体微細加工 / スピン緩和 / 半導体ナノ構造 / 半導体超微細化 / 光物性 / スピンエレクトロニクス / ナノ材料 / 微細ナノ加工 / スピン注入 / 希薄窒化ガリウムヒ素 / スピン増幅 / 光電スピン変換 / スピンダイナミクス / 電子スピン注入 / スピン光デバイス / 半導体量子ドット / 集積回路 / ナノ構造 / 抵抗変化型メモリ素子 / 脳型人工知能ハードウェア / ニューラルネットワーク / ソフトコンピューティング / 結合次数解析 / 活性化エネルギー / 酸性度 / 密度汎関数法 / プラズマ・ビーム誘起錯体反応 / 第一原理理論計算 / 鉄 / 遷移金属錯体 / 遷移金属エッチング / ion beam / Monte-Carlo simulation / molecular dynamics simulation / ultraviolet / reactive sputtering / etching / plasma / 紫外線照射 / イオンビーム / モンテカルロシミュレーション / 分子動力学シミュレーション / 紫外線 / 反応性スパッタリング / エッチング / プラズマ / High Speed Data Transfer / Parallel Processing System / Optical Wave Guide / Optical Interconnection / Wafer Bonding / Three-Dimensional Integration / Multiport Shared Memory / Three-Dimensionally Stacked Processor / ウェーハ張り合わせ / 高速データ転送 / 並列処理システム / 光導波路 / 光インターコネクション / ウェーハ貼り合わせ / 三次元積層化技術 / マルチポート共有メモリ / 三次元積層型プロセッサ / バイオテンプレート極限加工 / バイオテンプレート局面加工 / ケルマニウム量子細線 / バイオテンプレート曲面加工 / ゲルマニウム量子細線 / シリコン量子細線 / 共鳴散乱現象 / ナノシリコン球 / 面内光ガイディング / 高効率化 / 薄膜シリコン太陽電池 / 塩素 / 紫外光スペクトル / オージェ遷移 / 共鳴遷移 / 欠陥生成 / ワイヤレス測定 / イオンシース / 紫外光照射損傷 / オンウェハモニタリング / エッチング形状予測 / CMOSデバイス / FinFET / ゆらぎ / ＣＭＯＳデバイス / スパイキングニューロン / ナノディスクアレイ構造 / チャージアップ / イオン軌道 / モニタリング / オンウエハセンサ / プラズマ加工 / 量子井戸 / 原子間力顕微鏡 / バイオナノプロセス / X線光電子分光法 / 積層ナノディスク / ナノディスク Less

Construction of thin film deposition model in CVD / ALD method considering chemical reaction and interfacial flow phenomenon
- Principal Investigator
  
  徳増崇
- Project Period (FY)
  2021 – 2023
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 19010:Fluid engineering-related
- Research Institution
  Tohoku University
High-mobility Semiconductor Devices due to Control of Phonon Field caused by Defect-free Nano-periodic StructuresPrincipal Investigator
- Principal Investigator
  
  寒川誠二
- Project Period (FY)
  2020 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Review Section
  
  Broad Section C
- Research Institution
  Tohoku University
Photoelectric conversion system of spin-information utilizing semiconductor quantum dots
- Principal Investigator
  
  Murayama Akihiro
- Project Period (FY)
  2016 – 2020
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Hokkaido University
Thermoelectric conversion device and Seebeck coefficient control by 3-dimensional quantum nanodisk arrayPrincipal Investigator
- Principal Investigator
  
  Samukawa Seiji
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  General applied physics
- Research Institution
  Tohoku University
遷移金属の新しい低温化学反応エッチングメカニズムの提案
- Principal Investigator
  
  久保田智広
- Project Period (FY)
  2015 – 2016
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Plasma electronics
- Research Institution
  Tohoku University
A study of nanostructure memory devices and their integrated circuits toward massively parallel analog brain-like LSI
- Principal Investigator
  
  Morie Takashi
- Project Period (FY)
  2015 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Soft computing
- Research Institution
  Kyushu Institute of Technology
Study of efficiency enhancement of Si solar cells based on quantum and photonic structure control
- Principal Investigator
  
  Wada Kazumi
- Project Period (FY)
  2013 – 2015
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Energy engineering
- Research Institution
  The University of Tokyo
Modeling of plasma process surface reaction mechanism using energy-controllable particle beams
- Principal Investigator
  
  KUBOTA Tomohiro
- Project Period (FY)
  2011 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Applied physics, general
- Research Institution
  Tohoku University
Development of an intelligent information processing device and circuit using silicon nanodisk array structures
- Principal Investigator
  
  MORIE Takashi
- Project Period (FY)
  2010 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Sensitivity informatics/Soft computing
- Research Institution
  Kyushu Institute of Technology
オンウエハセンサ技術による基板電荷蓄積量とイオンエネルギー分布計測技術の開発
- Principal Investigator
  
  大竹浩人
- Project Period (FY)
  2009 – 2011
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  Tohoku University
単電子デバイスのための積層量子ナノディスク構造の精密作製と量子特性制御
- Principal Investigator
  
  久保田智広
- Project Period (FY)
  2008
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Tohoku University
中性粒子ビーム表面改質によるカーボンナノチューブ構造・物性制御と電気特性Principal Investigator
- Principal Investigator
  
  寒川誠二
- Project Period (FY)
  2008 – 2009
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Microdevices/Nanodevices
- Research Institution
  Tohoku University
Analyses of Photo-induced Surface Reaction Processes during Plasma Sputtering
- Principal Investigator
  
  HAMAGUCHI Satoshi
- Project Period (FY)
  2005 – 2006
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Plasma science
- Research Institution
  Osaka University
サブ10nm量子ドットの超解像近接場分光Principal Investigator
- Principal Investigator
  
  寒川誠二
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Applied physics, general
- Research Institution
  Tohoku University
High Performance Parallel Processor System Using Three-Dimensional Processor Chip
- Principal Investigator
  
  KOYANAGI Mitsumasa
- Project Period (FY)
  2003 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Tohoku University
Nanometer-scale processing and creation of novel functional materials using low energy high flux neutral beamsPrincipal Investigator
- Principal Investigator
  
  SAMUKAWA Seiji
- Project Period (FY)
  2003 – 2005
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  Tohoku University
超高精度プラズマプロセス用オンウエハーモニタリングシステムの構築Principal Investigator
- Principal Investigator
  
  寒川誠二
- Project Period (FY)
  2002 – 2003
- Research Category
  
  Grant-in-Aid for Exploratory Research
- Research Field
  
  Applied physics, general
- Research Institution
  Tohoku University

[Journal Article] Lifetime of photoexcited carriers in space-controlled Si nanopillar/SiGe composite films investigated by a laser heterodyne photothermal displacement method2023
- Author(s)
  Harada Tomoki、Ohori Daisuke、Endo Kazuhiko、Samukawa Seiji、Ikari Tetsuo、Fukuyama Atsuhiko
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 133 Issue: 12 Pages: 125703-125703
- DOI
  10.1063/5.0146578
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H05649, KAKENHI-PROJECT-22KJ2523, KAKENHI-PROJECT-18K04876
[Journal Article] Impact of nanopillars on phonon dispersion and thermal conductivity of silicon membranes2023
- Author(s)
  Anufriev Roman、Ohori Daisuke、Wu Yunhui、Yanagisawa Ryoto、Jalabert Laurent、Samukawa Seiji、Nomura Masahiro
- Journal Title
  
  Nanoscale
  
  Volume: 15 Issue: 5 Pages: 2248-2253
- DOI
  10.1039/d2nr06266f
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H05649, KAKENHI-PROJECT-21H04635
[Journal Article] Management of Phonon Transport in Lateral Direction for Gap-Controlled Si Nanopillar/SiGe Interlayer Composite Materials2021
- Author(s)
  Ohori Daisuke、Chuang Min-Hui、Sato Asahi、Takeuchi Sou、Murata Masayuki、Yamamoto Atsushi、Lee Ming-Yi、Endo Kazuhiko、Li Yiming、Tarng Jenn-Hwan、Lee Yao-Jen、Samukawa Seiji
- Journal Title
  
  IEEE Open Journal of Nanotechnology
  
  Volume: 2 Pages: 148-152
- DOI
  10.1109/ojnano.2021.3131165
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H05649
[Journal Article] Fabrication and simulation of neutral-beam-etched silicon nanopillars2020
- Author(s)
  Chuang Min-Hui、Ohori Daisuke、Li Yiming、Chou Kuan-Ru、Samukawa Seiji
- Journal Title
  
  Vacuum
  
  Volume: 181 Pages: 109577-109577
- DOI
  10.1016/j.vacuum.2020.109577
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H05649
[Journal Article] Photoluminescence of InGaAs/GaAs Quantum Nanodisk in Pillar Fabricated by Biotemplate, Dry Etching, and MOVPE Regrowth2019
- Author(s)
  Higo Akio, Kiba Takayuki, Takayama Junichi, Lee C. Y., Thomas Cedric, Ozaki Takuya, Sodabanlu Hassanet, Sugiyama Masakazu, Nakano Yoshiaki, Yamashita Ichiro, Murayama Akihiro, Samukawa Seiji
- Journal Title
  
  ACS Applied Electronic Materials
  
  Volume: 1 Issue: 9 Pages: 1945-1951
- DOI
  10.1021/acsaelm.9b00432
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H06359
[Journal Article] Multilevel memory characteristics of Ta/Ta2O5-δ ReRAM for the Application of Neural Network2018
- Author(s)
  Yuanlin Li, Atsushi Tsurumaki-Fukuchi, Masashi Arita, Hideyuki Andoh, Takashi Morie, Yasuo Takahashi, and Seiji Samukawa
- Journal Title
  
  Proc. of the Eighteenth Int. Symp. on Advanced Fluid Information (AFI-2018)
  
  Volume: － Pages: 98-99
- Data Source
  KAKENHI-PROJECT-15H01706
[Journal Article] Analog Memory Devices for Time-domain Weighted-sum Calculation Circuits2018
- Author(s)
  K. Yamashita, M. Harada, T. Morie, A. T. Fukuchi, M. Arita, Y. Takahashi, S. Samukawa
- Journal Title
  
  Proc. of the Eighteenth Int. Symp. on Advanced Fluid Information (AFI-2018)
  
  Volume: － Pages: 100-101
- Data Source
  KAKENHI-PROJECT-15H01706
[Journal Article] Temperature-dependent radiative and non-radiative dynamics of photo-excited carriers in extremely high-density and small InGaN nanodisks fabricated by neutral-beam etching using bio-nano-templates2018
- Author(s)
  Chen Yafeng, Kiba Takayuki, Takayama Junichi, Higo Akio, Tanikawa Tomoyuki, Chen Shula, Samukawa Seiji, Murayama Akihiro
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 123 Issue: 20
- DOI
  10.1063/1.5027627
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H06359
[Journal Article] Temperature-dependent radiative and non-radiative dynamics of photo-excited carriers in extremely high-density and small InGaN nanodisks fabricated by neutral-beam etching using bio-nano-templates2018
- Author(s)
  Yafeng Chen, Takayuki Kiba, Junichi Takayama, Akio Higo, Tomoyuki Tanikawa, Shula Chen, Seiji Samukawa, Akihiro Murayama
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 印刷中
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06359
[Journal Article] Low-temperature InGaAs oxidation using oxygen neutral beam2018
- Author(s)
  Lee Chang-Yong, Higo Akio, Thomas Cedric, Okada Takeru, Ozaki Takuya, Sugiyama Masakazu, Nakano Yoshiaki, Samukawa Seiji
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 57 Issue: 7 Pages: 070305-070305
- DOI
  10.7567/jjap.57.070305
- NAID
  210000149239
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H06359
[Journal Article] Realization of Analog Memory using Ta2O5 Based ReRAM for the Application of Neural Network2017
- Author(s)
  Yuanlin Li, Reon Katsumura, Mika Kristian Gronroos, Atsushi Tsurumaki-Fukuchi, Masashi Arita, Hideyuki Ando, Takashi Morie, Yasuo Takahashi, and Seiji Samukawa
- Journal Title
  
  Proceedings of the Seventeenth International Symposium on Advanced Fuluid Information (AFI-2017)
  
  Volume: － Pages: 50-51
- Data Source
  KAKENHI-PROJECT-15H01706
[Journal Article] Composite films of highly ordered Si nanowires embedded in SiGe0.3 for thermoelectric applications2017
- Author(s)
  Kikuchi Akiou、Yao Akifumi、Mori Isamu、Ono Takahito、Samukawa Seiji
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 122 Issue: 16 Pages: 165302-165302
- DOI
  10.1063/1.4986355
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-16H03898
[Journal Article] Extremely low thermal conductivity of high density and ordered 10 nm-diameter silicon2017
- Author(s)
  Akiou Kikuchi, Akifumi Yao, Isamu Mori, Takahito Ono, and Seiji Samukawa
- Journal Title
  
  Appl. Phys. Lett.
  
  Volume: 110 Issue: 9 Pages: 091908-091908
- DOI
  10.1063/1.4977778
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-16H03898, KAKENHI-PROJECT-15H01706
[Journal Article] Photoluminescence emission from GaAs nanodisks in GaAs/AlGaAs nanopillar arrays fabricated by neutral beam etching2017
- Author(s)
  Daisuke Ohori, Atsuhiko Fukuyama, Kentaro Sakai, Akio Higo, Cedric Thomas, Seiji Samukawa, Tetsuo Ikari
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 56 Issue: 5 Pages: 050308-050308
- DOI
  10.7567/jjap.56.050308
- NAID
  210000147709
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H06359
[Journal Article] Optical Study of Sub-10 nm In0.3Ga0.7N Quantum Nanodisks in GaN Nanopillars2017
- Author(s)
  Akio Higo, Takayuki Kiba, Shula Chen, Yafeng Chen, Tomoyuki Tanikawa, Cedric Thomas, Chang Yong Lee, Yi-Chun Lai, Takuya Ozaki, Junichi Takayama, Ichiro Yamashita, Akihiro Murayama, Seiji Samukawa
- Journal Title
  
  ACS Photonics
  
  Volume: 4 Issue: 7 Pages: 1851-1857
- DOI
  10.1021/acsphotonics.7b00460
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H06359
[Journal Article] Analog Memory Operation of Parallel Connected Resistance Change Memory Devices2017
- Author(s)
  M. Harada, H. Ando, T. Morie, A. T. Fukuchi, M. Arita, Y. Takahashi, and S. Samukawa
- Journal Title
  
  Proceedings of the Seventeenth Int. Symp. on Advanced Fluid Information (AFI-2017)
  
  Volume: － Pages: 60-61
- Data Source
  KAKENHI-PROJECT-15H01706
[Journal Article] Spin relaxation in Si nanoclusters embedded in free-standing SiGe nanocolumns2017
- Author(s)
  N. P. Stepina, A. F. Zinovieva, A. V. Dvurechenskii, Shuichi Noda, Md. Zaman Molla, Seiji Samukawa
- Journal Title
  
  Applied Physics Letters
  
  Volume: 110 Issue: 20
- DOI
  10.1063/1.4983644
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06359
[Journal Article] Nanometer scale fabrication and optical response of InGaN/GaN quantum disks2016
- Author(s)
  Yi-Chun Lai, Akio Higo, Takayuki Kiba, Cedric Thomas, Shula Chen, Chang Yong Lee, Tomoyuki Tanikawa, Shigeyuki Kuboya, Ryuji Katayama, Kanako Shojiki, Junichi Takayama, Ichiro Yamashita, Akihiro Murayama, Gou-Chung Chi, Peichen Yu, Seiji Samukawa
- Journal Title
  
  Nanotechnology
  
  Volume: 27 Issue: 42 Pages: 425401-425401
- DOI
  10.1088/0957-4484/27/42/425401
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06359, KAKENHI-PROJECT-26600082
[Journal Article] Spike-based Time-domain Weighted-sum Calculation Using Nanodevices for Low Power Operation2016
- Author(s)
  T. Morie, H. Liang, T. Tohara, H. Tanaka, M. Igarashi, S. Samukawa, K. Endo, and Y. Takahashi
- Journal Title
  
  16th Int. Conf. on Nanotechnology (IEEE NANO)
  
  Volume: － Pages: 390-392
- DOI
  10.1109/nano.2016.7751490
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H01706, KAKENHI-PROJECT-15H03531
[Journal Article] Silicon nanodisk array with a fin field-effect transistor for time-domain weighted sum calculation toward massively parallel spiking neural networks2016
- Author(s)
  T. Tohara, H. Liang, H. Tanaka, M. Igarashi, S. Samukawa, K. Endo, Y. Takahashi, T. Morie
- Journal Title
  
  Appl. Phys..Express
  
  Volume: 9 Issue: 3 Pages: 034201-034201
- DOI
  10.7567/apex.9.034201
- NAID
  210000137828
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15K12109, KAKENHI-PROJECT-15H01706, KAKENHI-PROJECT-26630141
[Journal Article] A Silicon Nanodisk Array Structure Realizing Synaptic Response of Spiking Neuron Models with Noise2014
- Author(s)
  T. Morie, H. Liang, Y. Sun, T. Tohara, M. Igarashi, and S. Samukawa
- Journal Title
  
  Proc. The 19th Asia and South Pacific Design Automation Conference
  
  Volume: 該当無し Pages: 185-190
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22240022
[Journal Article] Effect of PEGylation on Controllably Spaced Adsorption of Ferritin Molecules2013
- Author(s)
  R. Tsukamoto, M. Godonoga, R. Matsuyama, M. Igarashi, J. Gardiner Heddle, S. Samukawa, and I. Yamashita
- Journal Title
  
  Langmuir
  
  Volume: 29 Pages: 12737-12743
- Data Source
  KAKENHI-PROJECT-22240022
[Journal Article] Proposal of High Current Gain Vibrating-Body Field-Effect Transistor2013
- Author(s)
  S.Ueki, Y.Nishimori, K.Miwa, S.Nakagawa, H.Imamoto, T.Kubota, M.Sugiyama, S.Samukawa, and G.Hashiguchi
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines
  
  Volume: 133 Issue: 11 Pages: 332-336
- DOI
  10.1541/ieejsmas.133.332
- NAID
  130003382688
- ISSN
  1341-8939, 1347-5525
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360040
[Journal Article] Energy-loss Mechanism of Single-crystal Silicon Microcantilever due to Surface Defects G.erated during Plasma Processing2013
- Author(s)
  A.Wada, Y.Yanagisawa, B.Altansukh, T.Kubota, T.Ono, S.Yamasaki, and S.Samukawa
- Journal Title
  
  J. Micromech. Microeng.
  
  Volume: Vol.23 Issue: 6 Pages: 065020-065020
- DOI
  10.1088/0960-1317/23/6/065020
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360040
[Journal Article] Surface/interface-related optical properties in Si nanodisks fabricated by neutral-beam etching using bio-templates.2013
- Author(s)
  Takayuki Kiba, Kenta Suzaki, Hao Li, Makoto Igarashi, Seiji Samukawa, Akihiro Murayama
- Journal Title
  
  Journal of Crystal Growth
  
  Volume: (In press) Pages: 127-127
- DOI
  10.1016/j.jcrysgro.2012.12.081
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-12J09926, KAKENHI-PROJECT-22221007, KAKENHI-PROJECT-22240022
[Journal Article] Prediction of etching-shape anomaly due to distortion of ion sheath around a large-scale three-dimensional structure by means of on-wafer monitoring technique and computer simulation2013
- Author(s)
  T.Kubota, H.Ohtake, R.Araki, Y.Yanagisawa, T.Iwasaki, K.Ono, K.Miwa, and S.Samukawa
- Journal Title
  
  J. Phys. D: Appl. Phys.
  
  Volume: Vol.46 Issue: 41 Pages: 415203-415203
- DOI
  10.1088/0022-3727/46/41/415203
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360040
[Journal Article] Modeling miniband for realistic silicon nanocrystal array2013
- Author(s)
  Weiguo Hu, Mohd Fairuz Budiman, Makoto Igarashi, Ming-Yi Lee, Yiming Li, and Seiji Samukawa
- Journal Title
  
  Mathematical and Computer Modeling
  
  Volume: 58 Issue: 1-2 Pages: 306-311
- DOI
  10.1016/j.mcm.2012.11.012
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22240022
[Journal Article] Highly Selective Silicon Nitride Etching to Si and SiO_2 for Gate Sidewall Spacer Using CF_3I/O_2/H_2 Neutral Beam2013
- Author(s)
  D.Nakayama, A.Wada, T.Kubota, R.Bruce, R.M.Martin, M.Haass, N.Fuller, and S.Samukawa
- Journal Title
  
  Phys. D: Appl. Phys.
  
  Volume: Vol.46 Issue: 20 Pages: 205203-205203
- DOI
  10.1088/0022-3727/46/20/205203
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360040
[Journal Article] Low-damage silicon etching using a neutral beam2013
- Author(s)
  K.Miwa, Y.Nishimori, S.Ueki, M.Sugiyama, T.Kubota, and S.Samukawa
- Journal Title
  
  J. Vac. Sci. Technol. B
  
  Volume: Vol.31 Issue: 5
- DOI
  10.1116/1.4819973
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360040
[Journal Article] Fast Two-Dimensional Ferritin Crystal Formation Realized by Mutant Ferritin and Poly(ethylene glycol) Modified SiO2 Substrate2012
- Author(s)
  Rikako Tsukamoto, Makoto Igarashi, Seiji Samukawa, and Ichiro Yamashita
- Journal Title
  
  Applied Physics Express
  
  Volume: 5 Issue: 6 Pages: 65201-65201
- DOI
  10.1143/apex.5.065201
- NAID
  210000015569
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22240022
[Journal Article] Fast Two-Dimen-sional Ferritin Crystal Formation Realized by Mutant Ferritin and Poly(ethylene glycol) Modified Si02 Substrate2012
- Author(s)
  R. Tsukamoto, M. Igarashi, S. Samukawa, and I. Yamashita
- Journal Title
  
  Applied Physics Express
  
  Volume: 5 Pages: 65201-65201
- Data Source
  KAKENHI-PROJECT-22240022
[Journal Article] Numerical study on electron transfer mechanism by collision of ions at graphite surface in highly efficient neutral beam generation2012
- Author(s)
  T.Kubota, N.Watanabe, S.Ohtsuka, T.Iwasaki, K.Ono, Y.Iriye, and S.Samukawa
- Journal Title
  
  J. Physics D : Appl. Phys.
  
  Volume: Vol.45 Issue: 9 Pages: 095202-095202
- DOI
  10.1088/0022-3727/45/9/095202
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23360040
[Journal Article] Control of optical bandgap energy and optical absorption coefficient by geometric parameters in sub-10 nm silicon-nanodisc array structure2012
- Author(s)
  M.F.Budiman, W.Hu, M.Igarashi, R.Tsukamoto, T.Isoda, K.Itoh, Iyamashita, A.Murayama, Y.Okada, Seiji Samukawa
- Journal Title
  
  Nanotechnology
  
  Volume: 23 Pages: 65302-65302
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22240022
[Journal Article] ナノディスクアレイ構造とCMOS 回路を結合したスパイキングニューロンデバイス2011
- Author(s)
  梁海超, 森江隆, 孫意来, 五十嵐誠, 寒川誠二
- Journal Title
  
  電子情報通信学会技術研究報告
  
  Volume: NC2011-66, 111, 241 Pages: 125-129
- NAID
  110008900440
- Data Source
  KAKENHI-PROJECT-22240022
[Journal Article] Direct Fabrication of Uniform and High Density Sub-10-nm Etching Mask Using Ferritin Molecules on Si and GaAs Surface for Actual Quantum-Dot Superlattice2011
- Author(s)
  M. Igarashi, R. Tsukamoto, C.-H. Huang, I. Yamashita, and S. Samukawa
- Journal Title
  
  Applied Physics Express
  
  Volume: 4
- NAID
  10027782649
- Data Source
  KAKENHI-PROJECT-22240022
[Journal Article] Optical absorption characteristic of highly ordered and dense two-dimensional array of silicon nanodisks2011
- Author(s)
  C.-H.Huang, X.-Y.Wang, M.Igarashi, A.Murayama, Y.Okada, I.Yamashita, S.Samukawa
- Journal Title
  
  Nanotechnology
  
  Volume: 22
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22240022
[Journal Article] ナノディスクアレイ構造とCMOS回路を結合したスパイキングニューロンデバイス2011
- Author(s)
  梁海超, 森江隆, 孫意来, 五十嵐誠, 寒川誠二
- Journal Title
  
  電子情報通信学会技術研究報告ニューロコンピューティング研究会
  
  Volume: 111 Pages: 125-129
- NAID
  110008900440
- Data Source
  KAKENHI-PROJECT-22240022
[Journal Article] Direct Fabrication of Uniform and High Density Sub-10-nm Etching Mask Using Ferritin Molecules on Si and GaAs Surface for Actual Quantum-Dot Superlattice2011
- Author(s)
  M.Igarashi, R.Tsukamoto, C.-H.Huang, I.Yamashita, S.Samukawa
- Journal Title
  
  Applied Physics Express
  
  Volume: 4
- NAID
  10027782649
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22240022
[Journal Article] Prediction of UV spectra and UV radiation damage in actual plasma etching processes using on-wafer monitoring technique2010
- Author(s)
  B.Jinnai, S.Fukuda, H.Ohtake, S.Samukawa
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 107 Pages: 43302-43302
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21560026
[Journal Article] Prediction of Abnormai Etching Profile in High Aspect Ratio Via/Hole Etching Using On-wafer Monitoring System2010
- Author(s)
  H.Ohtake, S.Fukuda, B.Jinnai, T.Tatsumi, S.Samukawa
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 49
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21560026
[Journal Article] Control of Activation Energy for Electron Transport in Two-Dimensional Array of Si Nanodisks2010
- Author(s)
  M. Igarashi, C.-H. Huang, T. Morie, and S. Samukawa
- Journal Title
  
  Ext. Abstracts of Int. Conf. on Solid State Devices and Materials (SSDM 2010)
  
  Pages: 934-935
- Data Source
  KAKENHI-PROJECT-22240022
[Journal Article] Control of Electron Transport in Two-Dimensional Array of Si Nanodisks for Spiking Neuron Device2010
- Author(s)
  M.Igarashi, C.-H.Huang, T.Morie, S.Samukawa
- Journal Title
  
  Appl.Phys.Express
  
  Volume: 3
- NAID
  10026586552
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22240022
[Journal Article] Fundamental Study on Spiking Neuron Devices2010
- Author(s)
  T.Morie, Y.Sun, H.Liang, K.Nakada, M.Igarashi, C.Huang, S.Samukawa
- Journal Title
  
  Proc.of the Tenth Int.Symp.on Advanced Fluid Information and Transdisciplinary Fluid Integration
  
  Pages: 110-111
- Data Source
  KAKENHI-PROJECT-22240022
[Journal Article] Control of Activation Energy for Electron Transport in Two-Dimensional Array of Si Nanodisks2010
- Author(s)
  M.Igarashi, C.H.Huang, T.Morie, S.Samukawa
- Journal Title
  
  Ext.Abstracts of Int.Conf.on Solid State Devices and Materials
  
  Pages: 934-935
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22240022
[Journal Article] Control of Electron Transport in Two-Dimensional Array of Si Nanodisks for Spiking Neuron Device2010
- Author(s)
  M. Igarashi, C.-H. Huang, T. Morie, and S. Samukawa
- Journal Title
  
  Appl. Phys. Express
  
  Volume: 3 Pages: 85202-85202
- NAID
  10026586552
- Data Source
  KAKENHI-PROJECT-22240022
[Journal Article] A New Silicon Quantum-Well Structure with Controlled Diameter and Thickness Fabricated with Ferritin Iron Core Mask and Chlorine Neutral Beam Etching2008
- Author(s)
  寒川誠二
- Journal Title
  
  Applied Physics Express 1
- NAID
  10025081642
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20560288
[Journal Article] Ultimate Top-down Etching Processes for Future Nanoscale Devices : Advanced Neutral-Beam Etching2006
- Author(s)
  寒川誠二
- Journal Title
  
  Japanese Journal of Applied Physics 45・4A
  
  Pages: 2395-2407
- NAID
  40007227437
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360016
[Journal Article] Fabrication of a Vertical-Channel Double Gate Metal-Oxide-Semiconductor Field-Effect Transistor Using a Neutral Beam Etching2006
- Author(s)
  寒川誠二
- Journal Title
  
  Japanese Journal of Applied Physics Vol.45 No.10
- NAID
  10018158463
- Data Source
  KAKENHI-PROJECT-15360016
[Journal Article] Highly anisotropic gate electrode patterning in neutral beam etching using F2 gas chemistry2006
- Author(s)
  寒川誠二
- Journal Title
  
  Journal of Vacuum Science and Technology B23(5)
  
  Pages: 2063-2068
- Data Source
  KAKENHI-PROJECT-15360016
[Journal Article] Ultimate Top-down Etching Processes for Future Nanoscale Devices : Advanced Neutral-Beam Etching2006
- Author(s)
  Seiji Samukawa
- Journal Title
  
  Japanese Journal of Applied Physics 45(4A)
  
  Pages: 2395-2407
- NAID
  40007227437
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360016
[Journal Article] Study of neutral-beam etching conditions for fabrication of 7-nm-diameter nanocolumn structures using ferritin iron-core masks2005
- Author(s)
  寒川誠二
- Journal Title
  
  Journal of Vacuum Science and Technology B23(2)
  
  Pages: 534-539
- Data Source
  KAKENHI-PROJECT-16656027
[Journal Article] Highly selective low-damage processes using advanced neutral beams for porous low-k films2005
- Author(s)
  寒川誠二
- Journal Title
  
  Journal of Vacuum Science and Technology B23(1)
  
  Pages: 210-216
- Data Source
  KAKENHI-PROJECT-15360016
[Journal Article] Highly selective low-damage processes using advanced neutral beams for porous low-k films2005
- Author(s)
  寒川誠二
- Journal Title
  
  Journal of Vacuum Science and Technology B23(1)
  
  Pages: 210-216
- Data Source
  KAKENHI-PROJECT-15360016
[Journal Article] Study of neutral-beam etching conditions for fabrication of 7-nm-diameter nanocolumn structures using ferritin iron-core masks2005
- Author(s)
  寒川誠二
- Journal Title
  
  Journal of Vacuum Science and Technology E23(2)(印刷中)
- Data Source
  KAKENHI-PROJECT-16656027
[Journal Article] Study of neutral-beam etching conditions for fabrication of 7-nm-diameter nanocolumn structures using ferritin iron-core masks2005
- Author(s)
  寒川誠二
- Journal Title
  
  Journal of Vacuum Science and Technology B23(2)(印刷中)
- Data Source
  KAKENHI-PROJECT-15360016
[Journal Article] Study of neutral-beam etching conditions for the fabrication of 7-nm-diameter nanocolumn structures using ferritin iron-core masks2005
- Author(s)
  寒川誠二
- Journal Title
  
  Journal of Vacuum Science and Technology B23(2)
  
  Pages: 534-539
- Data Source
  KAKENHI-PROJECT-15360016
[Journal Article] 新しいビームプロセスによるトップダウン加工=究極のトップダウン加工を目指して=2004
- Author(s)
  寒川誠二
- Journal Title
  
  表面科学 25・10
  
  Pages: 618-627
- NAID
  10013649446
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360016
[Journal Article] Control of nitrogen depth profile in ultrathin oxynitride films formed by pulse-time-modulated nitrogen beams2004
- Author(s)
  Seiji Samukawa
- Journal Title
  
  Journal of Vacuum Science and Technology A22(2)
  
  Pages: 245-249
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360016
[Journal Article] Control of nitrogen depth profile in ultrathin oxynitride films formed by pulse-time-modulated nitrogen beams2004
- Author(s)
  寒川誠二
- Journal Title
  
  Journal of Vacuum Science and Technology A22・2
  
  Pages: 245-249
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360016
[Journal Article] A 7-nm nanocolumn structure fabricated by using a ferritin iron-core mask and low-energy Cl neutral beams2004
- Author(s)
  寒川誠二
- Journal Title
  
  Applied Physics Letters 84(9)
  
  Pages: 1555-1557
- Data Source
  KAKENHI-PROJECT-15360016
[Journal Article] Control of nitrogen depth profile in ultrathin oxynitride films formed by pulse-time-modulated nitrogen beams2004
- Author(s)
  寒川誠二
- Journal Title
  
  Journal of Vacuum Science and Technology A22(2)
  
  Pages: 245-249
- Data Source
  KAKENHI-PROJECT-15360016
[Journal Article] Advanced Beam Processes for Precise Top-Down Patterning2004
- Author(s)
  Seiji Samukawa
- Journal Title
  
  Journal of the Surface Science Society of Japan 25(10)
  
  Pages: 618-627
- NAID
  10013649446
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360016
[Journal Article] 50 nm gate electrode patterning using a neutral-beam etching system2004
- Author(s)
  寒川誠二
- Journal Title
  
  Journal of Vacuum Science and Technology A22(4)
  
  Pages: 1093-1100
- Data Source
  KAKENHI-PROJECT-15360016
[Journal Article] A 7-nm nanocolumn structure fabricated by using a ferritin iron-core mask and low-energy Cl neutral beams2004
- Author(s)
  寒川誠二
- Journal Title
  
  Applied Physics Letters 84(9)
  
  Pages: 1555-1557
- Data Source
  KAKENHI-PROJECT-16656027
[Journal Article] Ultrathin Oxynitride Films Formed by Using Pulse-Time-Modulated Nitrogen Beams2003
- Author(s)
  寒川誠二
- Journal Title
  
  Japanese Journal of Applied Physics 42・7B
- NAID
  10011260667
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360016
[Journal Article] Ultrathin Oxynitride Films Formed by Using Pulse-Time-Modulated Nitrogen Beams2003
- Author(s)
  Seiji Samukawa
- Journal Title
  
  Japanese Journal of Applied Physics 42(7B)
- NAID
  10011260667
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360016
[Journal Article] 中性粒子ビームによるダメージフリー高精度プロセス2003
- Author(s)
  寒川誠二
- Journal Title
  
  応用物理学会誌 72・12
  
  Pages: 1536-1540
- NAID
  10012562270
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360016
[Journal Article] Damage-free and precise processes using neutral beams2003
- Author(s)
  Seiji Samukawa
- Journal Title
  
  OYO BUTURI 72(12)
  
  Pages: 1536-1540
- NAID
  10012562270
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15360016
[Patent] 熱電変換材料及びその製造方法2018
- Inventor(s)
  菊池亜紀応、八尾章史、寒川誠二、小野崇人
- Industrial Property Rights Holder
  菊池亜紀応、八尾章史、寒川誠二、小野崇人
- Industrial Property Rights Type
  特許
- Filing Date
  2018
- Data Source
  KAKENHI-PROJECT-16H03898
[Patent] THERMOELECTRIC CONVERSION MATERIAL AND METHOD FOR PRODUCING SAME2018
- Inventor(s)
  A. KIKUCHI, S. Samukawa et al.
- Industrial Property Rights Holder
  A. KIKUCHI, S. Samukawa et al.
- Industrial Property Rights Type
  特許
- Filing Date
  2018
- Overseas
- Data Source
  KAKENHI-PROJECT-16H03898
[Patent] エッチング装置2004
- Inventor(s)
  寒川誠二他4名
- Industrial Property Rights Holder
  株式会社東芝
- Patent Publication Number
  2005-260195
- Filing Date
  2004-04-23
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360016
[Patent] エッチング方法2004
- Inventor(s)
  寒川誠二他2名
- Industrial Property Rights Holder
  株式会社荏原製作所
- Patent Publication Number
  2005-259873
- Filing Date
  2004-03-10
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360016
[Patent] ビーム源及びビーム処理装置2003
- Inventor(s)
  寒川誠二他5名
- Industrial Property Rights Holder
  株式会社荏原製作所, 東北大学長
- Patent Publication Number
  2004-281232
- Filing Date
  2003-03-14
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360016
[Patent] ビーム源及び該ビーム源を備えたビーム処理装置2003
- Inventor(s)
  寒川誠二他5名
- Industrial Property Rights Holder
  株式会社荏原製作所, 東北大学長
- Patent Publication Number
  2004-281228
- Filing Date
  2003-03-14
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360016
[Patent] ビーム源及びビーム処理装置2003
- Inventor(s)
  寒川誠二他5名
- Industrial Property Rights Holder
  株式会社荏原製作所, 東北大学長
- Patent Publication Number
  2004-281230
- Filing Date
  2003-03-14
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360016
[Patent] ビーム源用電極及びビーム源用電極の製造方法2003
- Inventor(s)
  寒川誠二他5名
- Industrial Property Rights Holder
  株式会社荏原製作所, 東北大学長
- Patent Publication Number
  2004-281229
- Filing Date
  2003-03-14
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360016
[Patent] ビーム源及びビーム処理装置2003
- Inventor(s)
  寒川誠二他5名
- Industrial Property Rights Holder
  株式会社荏原製作所, 東北大学長
- Patent Publication Number
  2004-281231
- Filing Date
  2003-03-14
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360016
[Patent] 中性塩素原子平行ビームによるナノマスクエッチング2003
- Inventor(s)
  寒川誠二他1名
- Industrial Property Rights Holder
  松下電器産業株式会社
- Patent Publication Number
  2005-144585
- Filing Date
  2003-11-13
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15360016
[Presentation] Analysis of carrier mobility in Si-Nanopillar/SiGe composite films by a laser heterodyne photothermal displacement method2023
- Author(s)
  Y. Uno, T. Harada, S. Harada, H. Ohyama, D. Ohori, K. Endo, S. Samukawa, T. Ikari, A. Fukuyama
- Organizer
  20th Int. Conference on Flow Dynamics
- Data Source
  KAKENHI-PROJECT-20H05649
[Presentation] Impact of nanopillars on phonon and thermal transport in silicon membranes2023
- Author(s)
  Roman Anufriev、Daisuke Ohori、Yunhui Wu、Ryoto Yanagisawa、Laurent Jalabert、Seiji Samukawa、Masahiro Nomura
- Organizer
  第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20H05649
[Presentation] High-mobility Semiconductor Devices due to Control of Phonon Field caused by Defect-free Nano-periodic Structures2023
- Author(s)
  Seiji Samukawa
- Organizer
  IEEE-NANO 2023
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H05649
[Presentation] ナノピラー間隔を変化させたSi-nanopillar/SiGe0.3複合膜の光ヘテロダイン光熱変位法によるキャリアライフタイム評価2023
- Author(s)
  原田知季、大堀大介、遠藤和彦、寒川誠二、碇哲雄、福山敦彦
- Organizer
  第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20H05649
[Presentation] Carrier lifetime change by nanopillar space in Si nanopillar/SiGe composite films investigated by a laser heterodyne photothermal displacement method2023
- Author(s)
  Atsuhiko Fukuyama, Tomoki Harada, Shogo Harada, Hiroki Ohyama, Daisuke Ohori, Kazuhiko Endo, Seiji Samukawa, Tetsuo Ikari
- Organizer
  IEEE-NANO 2023
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H05649
[Presentation] Analysis of In-Plane Thermal Conduction in Si-Nanopillar/SiGe Composite Films by Laser Heterodyne Photothermal Displacement Signal and Theoretical Calculation2022
- Author(s)
  H. Ohyama,T. Harada, K. Morita, S. Harada, D. Ohori, S. Samukawa, T. Ikari, and A. Fukuyama
- Organizer
  The 22nd International Symposium on Advanced Fluid Information (AFI-2022)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H05649
[Presentation] Siナノピラー/SiGe複合膜構造のナノピラー間隔制御によるフォノン場への影響2022
- Author(s)
  佐藤旭、大堀大介、Chuang Min-hui、村田正行、山本淳、Li Yiming、遠藤和彦、寒川誠二,
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-20H05649
[Presentation] 原子層加工技術-中性粒子ビームによる原子層無欠陥加工技術とデバイスへの展-2021
- Author(s)
  寒川誠二
- Organizer
  応用物理学会シリコンナノテクノロジー分科会第231回研究集会
- Invited
- Data Source
  KAKENHI-PROJECT-20H05649
[Presentation] Plasma Nanotechnologies, =Introduction and Background=2021
- Author(s)
  S. Samukawa
- Organizer
  1st International Meeting of IEEE NT
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H05649
[Presentation] Si Nanopillar/SiGe Composite Structure for Thermally Managed Nano-Devices2021
- Author(s)
  D. Ohori, M. Murata, A. Yamamoto, K. Endo, M.-H. Chuang, M. Y. Lee, Y. Li, J. H. Tarng, Y. J. Lee, and S. Samukawa
- Organizer
  21st IEEE International Conference on Nanotechnology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H05649
[Presentation] Atomic Layer Neutral Beam Processes for Nanofabrication and Interface Engineering2021
- Author(s)
  S. Samukawa
- Organizer
  2021 IEEE Nanotechnology Marathon
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H05649
[Presentation] Atomic Layer Neutral Beam Processes for Nanofabrication and Interface Engineering2021
- Author(s)
  S. Samukawa
- Organizer
  2021 JAPAN-TAIWAN Advanced Materials and Semiconductor Technology Workshop
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H05649
[Presentation] Atomic Layer Defect-free Etching Processes for Future Nanoscale-devices2021
- Author(s)
  寒川誠二
- Organizer
  化学工学会反応工学部会 CVD反応分科会主催第34回シンポジウム「選択成長にむけた ALD/ALE 技術」
- Invited
- Data Source
  KAKENHI-PROJECT-20H05649
[Presentation] Atomic Layer Neutral Beam Processes for Nanofabrication and Interface Engineering2021
- Author(s)
  S. Samukawa
- Organizer
  240th ECS Meeting
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H05649
[Presentation] Damage-Free Plasma Processing for Nano-Devices Manufacturing2021
- Author(s)
  S. Samukawa
- Organizer
  21st IEEE International Conference on Nanotechnology
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H05649
[Presentation] Estimating Thermal and Optical Properties of Si-Nanopillar/SiGe Composite Film by a Piezoelectric Photothermal Measurements2020
- Author(s)
  T. Harada, Y. Arata, D. Ohori, S. Samukawa, T. Ikari, A. Fukuyama
- Organizer
  17th Int. Conference on Flow Dynamics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H05649
[Presentation] 中性粒子ビームプロセスによる表面界面制御加工技術量子ドットおよび超伝導材料への応用2020
- Author(s)
  寒川誠二
- Organizer
  応用物理学会シリコンナノテクノロジー分科会第224回研究集会
- Invited
- Data Source
  KAKENHI-PROJECT-20H05649
[Presentation] Atomic Layer Etching, Deposition & Modification Processes for Future Nanoscale-devices2020
- Author(s)
  Seiji Samukawa
- Organizer
  IEEE NTC Distinguished Lecture in Joint Technical Seminar Program
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H05649
[Presentation] 多層構造体の光熱変換信号理論の検討とSiナノピラー/SiGe複合膜への適用2020
- Author(s)
  安良田裕基, 原田知季, 大堀大介, 寒川誠二, 碇哲雄, 福山敦彦
- Organizer
  第41回超音波エレクトロニクスの基礎と応用に関するシンポジウム
- Data Source
  KAKENHI-PROJECT-20H05649
[Presentation] Si ナノピラー構造の間隔制御することによるフォノン場制御とキャリア輸送特性性に与える影響2019
- Author(s)
  大堀大介、久保山英哲、村田正行、山本淳、野村政宏、遠藤和彦、寒川誠二
- Organizer
  第66回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] EFFECTIVE THERMAL CONDUCTION TUNING IN Si THIN FILM BY NANOPILLARS2019
- Author(s)
  X. Huang, R. Yanagisawa, D. Ohori, S. Samukawa, and Masahiro Nomura
- Organizer
  The 2nd Pacific Rim Thermal Engineering Conference (PRTEC2019)
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] Atomic Layer Defect-free Etching for Future sub-10nm Nano-devices2019
- Author(s)
  Seiji Samukawa
- Organizer
  2019 International Electron, Devices and Materials Symposium (IEDMS 2019)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06359
[Presentation] Atomic Layer Defect-free Etching Processes for future sub-10-nm devices2019
- Author(s)
  Seiji Samukawa
- Organizer
  Satellite Workshop of XXXIV ICPIG and ICRP-10
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06359
[Presentation] Neutral Beam Technology for Damage-free Etching Process,2018
- Author(s)
  Seiji Samukawa
- Organizer
  Digest of 2018 International Conference on Compound Semiconductor Manufacturing Technology
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] Fabrication of GaN micro-LEDs with an ultra-low-damage etching process2018
- Author(s)
  J. Zhu, T. Takahashi, K. Endo, D. Ohori, S. Samukawa, X.L. Wang
- Organizer
  International Workshop on Nitride Semiconductors 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06359
[Presentation] バイオテンプレート極限加工による量子ナノ構造の作製と高効率エネルギーデバイスへの展開2018
- Author(s)
  寒川誠二
- Organizer
  日本化学会第７回E-colloid:先端エレクトロニクスのためのコロイド・界面化学・ナノ界面制御が担う次世代エレクトロニクス材料
- Invited
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] Low-Temperature atomic layer defect-free etching, modification and deposition process2018
- Author(s)
  Seiji Samukawa
- Organizer
  Collaborative Conference on Materials Research 2018
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06359
[Presentation] Atomic Layer Defect-free Top-down Process for Future Nano-devices2018
- Author(s)
  Seiji Samukawa
- Organizer
  14th IEEE International Conference on Solid-State and Integrated Circuit Technology
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06359
[Presentation] 無欠陥Siナノピラー構造によるフォノン場制御と高移動度キャリア輸送2018
- Author(s)
  大堀大介、久保山瑛哲、山本淳、村田正行、遠藤和彦、寒川誠二
- Organizer
  第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] 3ω法によるナノスケール熱伝導率の測定とフォノン輸送の制御2018
- Author(s)
  久保山瑛哲、山本淳、村田正行、遠藤和彦、大堀大介、寒川誠二
- Organizer
  応用物理学会シリコンナノテクノロジー分科会　第212回研究集会「半導体素子におけるフォノンのダイナミクスとエンジニアリング」
- Invited
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] Atomic Layer Defect-free Top-down Processes for Future Nano-devices2018
- Author(s)
  Seiji Samukawa
- Organizer
  The 7th International Conference on Microelectronics and Plasma Technology
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06359
[Presentation] Atomic Layer Defect-free Etching and Deposition Processes for future sub-10-nm devices2018
- Author(s)
  Seiji Samukawa
- Organizer
  71st Annual Gaseous Electronics Conference
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] Nanocolumns of InGaN/GaN MQWs Fabricated by Neutral Beam Etching for Directional Micro-LED2018
- Author(s)
  K.X. Zhang, H. Yamada, N. Kumagai, T. Yamada, G.W. Cong, K. Endo, M. Shimizu, D. Ohori, S. Samukawa, X.L. Wang
- Organizer
  International Workshop on Nitride Semiconductors 2018
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06359
[Presentation] High-temperature carrier dynamics responsible for a non-radiative process in InGaN nanodisks fabricated by top-down nanotechnology2018
- Author(s)
  Y. Chen, T. Kiba, J. Takayama, A. Higo, T. Tanikawa, S. Samukawa, A. Murayama
- Organizer
  12th International Conference on Excitonic and Photonic Processes in Condensed Matter and Nano Materials
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06359
[Presentation] Atomic Layer Defect-free Top-down Process for Future Nano-devices2018
- Author(s)
  Seiji Samukawa
- Organizer
  2nd Asia-Pacific Conference on Plasma Physics, International Workshop on Plasma and Bio-nano Devices
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06359
[Presentation] Optical Study on Thermal Activation Processes of Carrier Dynamics in In0.3Ga0.7N Nanodisks2018
- Author(s)
  Y. Chen, T. Kiba, J. Takayama, A.Higo, T. Tanikawa, S. Samukawa, A. Murayama
- Organizer
  31st International Microprocesses and Nanotechnology Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06359
[Presentation] 中性粒子ビームによる原子層レベル超低損傷加工・表面改質＝２次元材料グラフェンへの展開＝2018
- Author(s)
  寒川誠二
- Organizer
  酸化グラフェン研究会第１１回酸化グラフェンシンポジウム
- Invited
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] Atomic Layer Defect-free Top-down Processes for Future Nano-devices2018
- Author(s)
  Seiji Samukawa
- Organizer
  The 7th International Conference on Microelectronics and Plasma Technology(ICMAP)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] Low-Temperature atomic layer defect-free etching, modification and deposition process2018
- Author(s)
  Seiji Samukawa
- Organizer
  Collaborative Conference on Materials Research (CCMR) 2018
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] Atomic Layer Defect-free Etching and Deposition Processes for future sub-10-nm devices2018
- Author(s)
  Seiji Samukawa
- Organizer
  71st Annual Gaseous Electronics Conference
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06359
[Presentation] トップダウンナノテクノロジーで作製したIn0.3Ga0.7Nナノディスクにおける光励起キャリアの熱脱離2018
- Author(s)
  陳亜鳳, 木場隆之, 高山純一, 肥後昭男, 谷川智之, 寒川誠二, 村山明宏
- Organizer
  第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16H06359
[Presentation] Atomic Layer Defect-free Top-down Process for Future Nano-devices2018
- Author(s)
  Seiji Samukawa
- Organizer
  14th IEEE International Conference on Solid-State and Integrated Circuit Technology
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] Atomic Layer Defect-free Top-down Process for Future Nano-devices2018
- Author(s)
  Seiji Samukawa
- Organizer
  2nd Asia-Pacific Conference on Plasma Physics, International Workshop on Plasma and Bio-nano Devices
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] Neutral Beam Technology for Damage-free Etching Process2018
- Author(s)
  Seiji Samukawa
- Organizer
  Digest of 2018 International Conference on Compound Semiconductor Manufacturing Technology
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06359
[Presentation] 無欠陥周期ナノ構造による半導体チャネルのフォノン場制御2018
- Author(s)
  寒川誠二
- Organizer
  応用物理学会シリコンナノテクノロジー分科会　第212回研究集会「半導体素子におけるフォノンのダイナミクスとエンジニアリング」
- Invited
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] 中性粒子ビームとバイオテンプレートを用いた高アスペクト比Siナノピラー構造の作製2017
- Author(s)
  大堀大介、遠藤和彦、寒川誠二
- Organizer
  第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] High Efficiency Nano Energy Devices Using Bio-template Ultimate Top-down Process2017
- Author(s)
  Seiji Samukawa
- Organizer
  High Efficiency NaThe 3rd International Conference on Nanoenergy and Nanosystems.
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] パイオテンプレート極限加工技術を用いたSi/SIGeナノワイヤーの作製と熱伝導率の評価2017
- Author(s)
  菊池亜紀応、八尾章史、山本淳、小野崇人、寒川誠二
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] バイオナノテンプレートで作製したInGaNナノディスクにおける光励起キャリアダイナミクスの温度依存性2017
- Author(s)
  陳亜鳳, 木場隆之, 高山純一, 肥後昭男, 寒川誠二, 村山明宏
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16H06359
[Presentation] Neutral Beam Technology for Future Nano-devices2017
- Author(s)
  Seiji Samukawa
- Organizer
  China Semiconductor Technology International Conference
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] Atomic Layer Etching and Deposition Processes for Future Nano-devices2017
- Author(s)
  Seiji Samukawa
- Organizer
  82nd IUVSTA Workshop
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H01706
[Presentation] Neutral Beam technology for Future Nano-materials and Nano-devices2017
- Author(s)
  Seiji Samukawa
- Organizer
  Seiji Samukawa, Neutral Beam18th International Union of Materials Research Societies International Conference in Asia
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] High Efficiency Nano Energy Devices Using Bio-template Ultimate Top-down Process2017
- Author(s)
  Seiji Samukawa
- Organizer
  The 3rd International Conference on Nanoenergy and Nanosystems
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H01706
[Presentation] Neutral Beam Technology for Nano-Materials and Nano-Devices2017
- Author(s)
  Seiji Samukawa
- Organizer
  21st International Symposium on Chemical-Mechanical Planarization
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H01706
[Presentation] 大堀大介、石塚ナノピラー中のナノディスク配列による発光再結合の直径依存性2017
- Author(s)
  大堀大介、石塚史典、トーマスセドリック、寒川誠二、碇哲雄、福山敦彦
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] Neutral Beam Technology for Future Nano-devices2017
- Author(s)
  Seiji Samukawa
- Organizer
  China Semiconductor Technology International Conference　2017
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H01706
[Presentation] Neutral Beam Technology for Future Nano-materials and Nano-devices2017
- Author(s)
  Seiji Samukawa
- Organizer
  Collaborative Conference on Materials Research (CCMR) 2017
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H01706
[Presentation] Neutral Beam Technology for Future Nano-materials and Nano-devices2017
- Author(s)
  Seiji Samukawa
- Organizer
  Collaborative Conference on Materials Research (CCMR)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] パイオテンプレート極限加工を用いたSiナノ構造熱電モジュールの作製と評価2017
- Author(s)
  菊池亜紀応、八尾章史、毛利勇、山本淳、小野崇人、寒川誠二,
- Organizer
  第64回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] Neutral Beam technology for Future Nano-materials and Nano-devices2017
- Author(s)
  Seiji Samukawa
- Organizer
  18th International Union of Materials Research Societies International Conference in Asia
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H01706
[Presentation] Neutral Beam Technology for Future Nano-materials and Nano-devices2017
- Author(s)
  Seiji Samukawa
- Organizer
  1st Asia-Pacific Conference on Plasma Physics
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] Neutral Beam Technology for Future Nano-materials and Nano-devices2017
- Author(s)
  Seiji Samukawa
- Organizer
  1st Asia-Pacific Conference on Plasma Physics
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H01706
[Presentation] Electronic states in the neutral-beam-formed Ta2O5 film measured by thermally stimulated current method2017
- Author(s)
  Takeo Ohno, Hisashi Shima, Hiroyuki Akinaga, and Seiji Samukawa
- Organizer
  49th International Conference on Solid State Devices and Materials
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H01706
[Presentation] Neutral Beam Technology for Nano-Materials and Nano-Devices2017
- Author(s)
  Seiji Samukawa
- Organizer
  21st International Symposium on Chemical-Mechanical Planarization
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] バイオテンプレート極限加工を用いたSiナノ構造熱電モジュールの作製と特性評価2017
- Author(s)
  菊池亜紀応、八尾章史、毛利勇、山本淳、小野崇人、寒川誠二
- Organizer
  第64回応用物理学会春季学術大会
- Place of Presentation
  東京工業大学（東京）
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] Analog memory operated by MOSFET and MoOx Resistive Random Access Memory2016
- Author(s)
  M. Jo, R. Katsumura, A. T. Fukuchi, M. Arita, Y. Takahashi, H. Ando, T. Morie, and S. Samukawa
- Organizer
  The Sixteenth Int. Symp. on Advanced Fluid Information (AFI-2016)
- Place of Presentation
  Sendai, Japan
- Year and Date
  2016-10-11
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H01706
[Presentation] Emission from As-etched Quantum Nanodisks Fabricated by Bio-template and Neutral Beam Etching Process2016
- Author(s)
  Daisuke Ohori, Kiyorfumi Kondo, Kentaro Sakai, Akio Higo, Cedric Thomas, Seiji Samukawa, Tetsuo Ikari, Atsuhiko Fukuyama
- Organizer
  16th IEEE International Conference on Nanotechnology
- Place of Presentation
  Sendai International Center, Sendai, JAPAN
- Year and Date
  2016-08-23
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06359
[Presentation] The Effect of Asymmetric Barriers of GaAs Quantum Nanodisks Light Emitting Diode2016
- Author(s)
  Akio Higo, Cedric Thomas, Takayuki Kiba, Junichi Takayama, Ichiro Yamashita, Akihiro Murayama, Seiji Samukawa
- Organizer
  16th IEEE International Conference on Nanotechnology
- Place of Presentation
  Sendai International Center, Sendai, JAPAN
- Year and Date
  2016-08-23
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06359
[Presentation] バイオテンプレート極限加工によるGaAs量子ナノディスクLEDのエレクトロルミネッセンス特性評価2016
- Author(s)
  肥後昭男、木場隆之、トーマス・セドリック、高山純一、ソダーバンル・ハサネット、岡本尚文、山下一郎、杉山正和、中野義昭、村山明宏、寒川誠二
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  朱鷺メッセ, 新潟市
- Year and Date
  2016-09-14
- Data Source
  KAKENHI-PROJECT-16H06359
[Presentation] Transient photoluminescence in InGaN nano-disks fabricated by nano-scale neutral-beam etching utilizing bio-nano templates2016
- Author(s)
  Y. Chen, S.L. Chen, T. Kiba, C.Y. Lee, C. Thomas, Y.C. Lai, A. Higo, S. Samukawa, A. Murayama
- Organizer
  16th IEEE International Conference on Nanotechnology
- Place of Presentation
  Sendai International Center, Sendai, JAPAN
- Year and Date
  2016-08-23
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06359
[Presentation] 中性粒子ビーム励起錯体反応による遷移金属エッチングメカニズムのTight-binding量子分子動力学法を用いた検討2016
- Author(s)
  久保田智広, 伊藤寿, 久保百司, 寒川誠二
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス（東京都目黒区）
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15K04712
[Presentation] Transition Metal Complex Reaction Etching with Neutral Beam and Its Mechanism Investigated by First-Principles Calculation2016
- Author(s)
  Tomohiro Kubota, Yoshiyuki Kikuchi, and Seiji Samukawa
- Organizer
  IEEE 16th International Conference on Nanotechnology
- Place of Presentation
  Sendai International Center (宮城県仙台市)
- Year and Date
  2016-08-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K04712
[Presentation] 中性粒子ビーム励起錯体反応を用いた遷移金属エッチングにおける吸着分子の影響2016
- Author(s)
  久保田智広、菊地良幸、伊藤寿、久保百司、寒川誠二
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス（東京都目黒区）
- Year and Date
  2016-03-21
- Data Source
  KAKENHI-PROJECT-15K04712
[Presentation] 中性粒子ビーム励起錯体反応を用いたCoFeBエッチング2016
- Author(s)
  久保田智広、美山遼、菊地良幸、寒川誠二
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  朱鷺メッセ (新潟県新潟市)
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-15K04712
[Presentation] バイオテンプレート極限加工を用いた GaAs 量子ナノディスクの発光再結合の温度依存性2016
- Author(s)
  大堀大介, トーマスセドリック, 肥後昭男, 寒川誠二, 碇哲雄, 福山敦彦
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  朱鷺メッセ, 新潟市
- Year and Date
  2016-09-14
- Data Source
  KAKENHI-PROJECT-16H06359
[Presentation] 中性粒子ビーム励起錯体反応を用いた Taエッチングのメカニズム2016
- Author(s)
  久保田智広、久保百司、寒川誠二
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  朱鷺メッセ (新潟県新潟市)
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-15K04712
[Presentation] Pump-probe study of temperature-dependent spin relaxation in GaAs quantum disks fabricated by fully top-down lithography using Bio-templates2016
- Author(s)
  T. Kiba, T. Tanaka, A. Higo, C. Thomas, Y. Tamura, S. Samukawa, A. Murayama
- Organizer
  16th IEEE International Conference on Nanotechnology
- Place of Presentation
  Sendai International Center, Sendai, JAPAN
- Year and Date
  2016-08-23
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06359
[Presentation] Spike-based Neural Learning Hardware Using a Resistance Change Memory Device toward Brain-like Systems with Nanostructures2016
- Author(s)
  H. Ando, K. Tomizaki, T. Tohara, T. Morie, A. T. Fukuchi, M. Arita, Y. Takahashi, and S. Samukawa
- Organizer
  The Sixteenth Int. Symp. on Advanced Fluid Information (AFI-2016)
- Place of Presentation
  Sendai, Japan
- Year and Date
  2016-10-11
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H01706
[Presentation] Thermal conductivity of 10nm-silicon nanowire array fabricated by bio-template and neutral beam etching.2016
- Author(s)
  A.kikuchi, A. Yao, I. Mori, T. Ono, S. Samukawa
- Organizer
  IEEE International Conference on Nanotechnology 2016
- Place of Presentation
  仙台国際センター（仙台）
- Year and Date
  2016-08-22
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] 中性粒子ビーム技術を用いたSiNP-SiGe0.3複合膜の作製と熱伝導率の評価2016
- Author(s)
  菊池亜紀応、八尾章史、毛利勇、小野崇人、寒川誠二
- Organizer
  第77回応用物理学会秋季学術大会
- Place of Presentation
  朱鷺メッセ（新潟）
- Year and Date
  2016-09-13
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03898
[Presentation] Fabrication of GaAs quantum nanodisk by bio-template, neutral beam etching, and asymmetric AlGaAs barrier regrowth and its optical response2016
- Author(s)
  A. Higo, T. Kiba, C. Thomas, J. Takayama, M. Sugiyama, Y. Nakano, A. Murayama, S. Samukawa
- Organizer
  JSPS workshop on Japan-Sweden frontiers in spin and photon functionalities of semiconductor nanostructures
- Place of Presentation
  Jyozankei Grand Hotel, Sapporo, JAPAN
- Year and Date
  2016-08-30
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H06359
[Presentation] Analog Memory Operation of Resistance Change Memory with MOSFET for Brain-like LSIs2015
- Author(s)
  H. Ando, K. Tomizaki, T. Tohara, T. Morie, T. Hiroi, A. Nakane, R. Katsumura, A. Fukuchi, M. Arita, Y. Takahashi, and S. Samukawa
- Organizer
  Fifteenth Int. Symp. on Advanced Fluid Information (AFI-2015)
- Place of Presentation
  仙台
- Year and Date
  2015-10-28
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H01706
[Presentation] First-Principles Theoretical Investigation on Mechanism of New Transition Metal Etching Process using Oxygen and argon Neutral Beams and Ethanol Gas2015
- Author(s)
  Tomohiro Kubota, Yoshiyuki Kikuchi, and Seiji Samukawa
- Organizer
  American Vacuum Society 62nd International Symposium & Exhibition
- Place of Presentation
  San Jose (USA)
- Year and Date
  2015-10-20
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K04712
[Presentation] Transition Metal Complex Reaction Etching for MRAM Applications using Neutral Beam and Its Mechanism Investigated by First-Principles Calculation2015
- Author(s)
  Tomohiro Kubota, Yoshiyuki Kikuchi, Toshihisa Nozawa, and Seiji Samukawa
- Organizer
  2015 International Conference on Solid State Devices and Materials
- Place of Presentation
  札幌コンベンションセンター（北海道札幌市）
- Year and Date
  2015-09-29
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K04712
[Presentation] 酸素中性粒子ビームによる酸化及び錯体反応を用いた遷移金属エッチングメカニズム(3)2015
- Author(s)
  久保田智広, 菊地良幸, 野沢俊久, 伊藤寿, 久保百司, 寒川誠二
- Organizer
  第72回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場（愛知県名古屋市）
- Year and Date
  2015-09-15
- Data Source
  KAKENHI-PROJECT-15K04712
[Presentation] A new metallic complex reaction etching for MRAM materials by a low-temperature neutral beam process2015
- Author(s)
  Tomohiro Kubota and Seiji Samukawa
- Organizer
  Plasma Etch and Strip in Microtechnology 2015
- Place of Presentation
  Leuven (Belgium)
- Year and Date
  2015-04-27
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K04712
[Presentation] Polyethylene glycol (PEG)を塗布した基板上のフェリチン2 次元配列2014
- Author(s)
  李昌勇, 肥後昭男, Cedric Thomas, 田村洋典, 吉川憲一, 山下一郎, 寒川誠二
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  相模原
- Year and Date
  2014-03-20
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] A Silicon Nanodisk Array Structure Realizing Synaptic Response of Spiking Neuron Models with Noise2014
- Author(s)
  T. Morie, H. Liang, Y. Sun, T. Tohara, M. Igarashi, and S. Samukawa
- Organizer
  The 19th Asia and South Pacific Design Automation Conference (ASP-DAC 2014)
- Place of Presentation
  Singapore
- Year and Date
  2014-01-21
- Invited
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] オンウェハモニタリングによるプラズマエッチング形状異常予測2014
- Author(s)
  久保田智広,佐藤充男,岩崎拓也,小野耕平,寒川誠二
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  相模原
- Year and Date
  2014-03-19
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Feature Profile Evolution in Plasma Processing using On-wafer Monitoring System2014
- Author(s)
  T.Kubota and S.Samukawa
- Organizer
  8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing
- Place of Presentation
  福岡
- Year and Date
  2014-02-05
- Invited
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 第一原理電子状態計算による中性粒子ビーム生成メカニズムの解析VII2013
- Author(s)
  渡辺尚貴,大塚晋吾,岩崎拓也,小野耕平,入江康郎,植木真治,額賀理,杉山正和,久保田智広,寒川誠二
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  厚木
- Year and Date
  2013-03-28
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] オンウェハモニタリングによるプラズマプロセスダメージ・形状予測2013
- Author(s)
  久保田智広,佐藤充男,岩崎拓也,小野耕平,寒川誠二
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  厚木
- Year and Date
  2013-03-27
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Novel Quantum Effect Devices realized by Fusion of Biotemplate and Defect Free Neutral Beam Etching2013
- Author(s)
  S. Samukawa
- Organizer
  2013 IEEE International NanoElectronics Conference
- Place of Presentation
  Singapore
- Year and Date
  2013-01-04
- Invited
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] 中性粒子ビームエッチングの加工形状シミュレーション(4)2013
- Author(s)
  望月俊輔,渡辺尚貴,大塚晋吾,岩崎拓也,小野耕平,入江康郎,三輪和弘,久保田智広,杉山正和,寒川誠二
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  厚木
- Year and Date
  2013-03-28
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Core Technology Consortium for Advanced Energy Devices2013
- Author(s)
  S.Samukawa and T.Kubota
- Organizer
  10th International Conference on Flow Dynamics
- Place of Presentation
  仙台
- Year and Date
  2013-11-26
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] オンウェハモニタリングによるプラズマエッチング形状予測2013
- Author(s)
  久保田智広,佐藤充男,岩崎拓也,小野耕平,寒川誠二
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  京田辺
- Year and Date
  2013-09-18
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Feature profile evolution in plasma processing using on-wafer monitoring system2013
- Author(s)
  T.Kubota, M.Sato, T.Iwasaki, K.Ono, and S.Samukawa
- Organizer
  AVS 60th International Symposium & Exhibition
- Place of Presentation
  アメリカ・Long Beach
- Year and Date
  2013-10-31
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームによるシリコンエッチング(7)2013
- Author(s)
  久保田智広,三輪和弘,バトナサン・アルタンスック,大塚晋吾,渡辺尚貴,岩崎拓也,入江康郎,小野耕平,杉山正和,寒川誠二
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  厚木
- Year and Date
  2013-03-28
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] On-wafer monitoring technique for highly efficient fabrication process of nano energy devices2013
- Author(s)
  T.Kubota and S.Samukawa
- Organizer
  10th International Conference on Flow Dynamics
- Place of Presentation
  仙台
- Year and Date
  2013-11-26
- Invited
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] FinFET とナノディスクアレイ構造を結合したニューロンデバイス2013
- Author(s)
  東原敬, 梁海超, 遠藤和彦, 五十嵐誠, 寒川誠二, 昌原明植, 森江隆
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川
- Year and Date
  2013-03-29
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] Novel Quantum Effect Devices Fabricated Using Fusion of Bio-template and Defect- Free Neutral Beam Etching2013
- Author(s)
  S. Samukawa
- Organizer
  2013 JSAPMRS Joint Symposia
- Place of Presentation
  Kyotanabe
- Year and Date
  2013-09-17
- Invited
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] 中性粒子ビームエッチングプロセスの総合的シミュレーション2013
- Author(s)
  渡辺尚貴,大塚晋吾,岩崎拓也,小野耕平,入江康郎,望月俊輔,久保田智広,寒川誠二
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  京田辺
- Year and Date
  2013-09-18
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームエッチングモデルと加工形状解析(3)2013
- Author(s)
  大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,入江康郎,望月俊輔,三輪和弘,杉山正和,久保田智広,寒川誠二
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  厚木
- Year and Date
  2013-03-28
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Numerical simulation of total processes of neutral beam etching from G.eration of neutral beam by collision of ions against graphite sidewall to 3-dimensional etching profile2013
- Author(s)
  N.Watanabe, S.Ohtsuka, S.Mochizuki, T.Kubota, T.Iwasaki, Y.Iriye, K.Ono, and S.Samukawa
- Organizer
  AVS 60th International Symposium & Exhibition
- Place of Presentation
  アメリカ・Long Beach
- Year and Date
  2013-10-31
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームによるシリコンエッチング(5)2012
- Author(s)
  久保田智広,三輪和弘,大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,杉山正和,寒川誠二
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  東京
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームエッチングモデルと加工形状解析2012
- Author(s)
  大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,入江康郎,望月俊輔,杉山正和,久保田智広,寒川誠二
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  東京
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 3-Dimensional and Defect-free Etching by Neutral Beam for MEMS Applications2012
- Author(s)
  T.Kubota, A.Wada, Y.Yanagisawa, B.Altansukh, K.Miwa, T.Ono, and S.Samukawa
- Organizer
  2012 International Conference on Solid State Devices and Materials
- Place of Presentation
  京都
- Year and Date
  2012-09-25
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] オンウエハーモニタリングとシミュレーションの融合によるプラズマプロセス中の表面イオンシース形状と入射イオン軌道予測2012
- Author(s)
  荒木良亮,久保田智広,岩崎拓也,小野耕平,寒川誠二
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  東京
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームエッチングの加工形状シミュレーション(3)2012
- Author(s)
  望月俊輔,渡辺尚貴,大塚晋吾,岩崎拓也,小野耕平,入江康郎,三輪和弘,久保田智広,杉山正和,寒川誠二
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  松山
- Year and Date
  2012-09-13
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームエッチングモデルと加工形状解析(2)2012
- Author(s)
  大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,入江康郎,望月俊輔,杉山正和,久保田智広,寒川誠二
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  松山
- Year and Date
  2012-09-13
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Numerical study on electron transfer mechanism by collision of ions at graphite surface in highly-efficient neutral beam Generation2012
- Author(s)
  N.Watanabe, T.Kubota, and S.Samukawa
- Organizer
  The 8th EU-Japan Joint Symposium on Plasma Processing
- Place of Presentation
  奈良
- Year and Date
  2012-01-17
- Invited
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームエッチングの加工形状シミュレーション(2)2012
- Author(s)
  望月俊輔,大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,入江康郎,久保田智広,杉山正和,寒川誠二
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  東京
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームエッチングモデルと加工形状解析2012
- Author(s)
  大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,入江康郎,望月俊輔,杉山正和,久保田智広,寒川誠二
- Organizer
  第29回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  北九州
- Year and Date
  2012-10-23
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Prediction of ion sheath shape and ion trajectory during plasma etching processing using on-wafer monitoring technique and simulation2012
- Author(s)
  R.Araki, T.Kubota, and S.Samukawa
- Organizer
  The 8th EU-Japan Joint Symposium on Plasma Processing
- Place of Presentation
  奈良
- Year and Date
  2012-01-16
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Theoretical calculation of neutralization efficiency of positive and negative chlorine ions with consideration of excited states2012
- Author(s)
  S.Ohtsuka, N.Watanabe, T.Kubota, T.Iwasaki, Y.Iriye, K.Ono, and S.Samukawa
- Organizer
  AVS 59th International Symposium and Exhibition
- Place of Presentation
  アメリカ・Tampa
- Year and Date
  2012-11-01
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームによるシリコンエッチング(6)2012
- Author(s)
  久保田智広,三輪和弘,バトナサン・アルタンスック,大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,杉山正和,寒川誠二
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  松山
- Year and Date
  2012-09-13
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Feature Profile Evolution in Plasma Processing Using Wireless On-Wafer Monitoring System2012
- Author(s)
  T.Kubota and S.Samukawa
- Organizer
  Ninth International Conference on Flow Dynamics
- Place of Presentation
  仙台
- Year and Date
  2012-09-19
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 形状シミュレーションによる塩素中性粒子ビームエッチングの加工形状の検討2012
- Author(s)
  望月俊輔,大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,入江康郎,三輪和弘,久保田智広,杉山正和,寒川誠二
- Organizer
  第29回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  北九州
- Year and Date
  2012-10-23
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビーム生成におけるアパーチャ構造とエッチング特性解析2011
- Author(s)
  大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,入江康郎,植木真治,額賀理,杉山正和,久保田智広,寒川誠二
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形
- Year and Date
  2011-08-31
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] ノイズを利用する脳型情報処理回路のためのナノデバイス2011
- Author(s)
  森江隆, 梁海超, 孫意来, 五十嵐誠, 黄啓賢, 寒川誠二
- Organizer
  第58回応用物理学関係連合講演会
- Place of Presentation
  神奈川工科大学(神奈川県)
- Year and Date
  2011-03-25
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] Energy and Angular Distribution Analysis for Neutral Beam and Application for Etching Simulation2011
- Author(s)
  S.Ohtsuka, N.Watanabe, T.Iwasaki, K.Ono, Y.Iriye, Osamu Nukaga, S.Ueki, T.Kubota, M.Sugiyama, and S.Samukawa
- Organizer
  AVS 58th International Symposium & Exhibition
- Place of Presentation
  アメリカ・Nashville
- Year and Date
  2011-11-03
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] ナノディスクアレイ構造とCMOS回路を結合したスパイキングニューロンデバイス2011
- Author(s)
  梁海超, 森江隆, 孫意来, 五十嵐誠, 寒川誠二
- Organizer
  電子情報通信学会ニューロコンピューティング研究会
- Place of Presentation
  福岡,九州大学
- Year and Date
  2011-10-20
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] 中性粒子ビームによるシリコンエッチング(4)2011
- Author(s)
  久保田智広,大塚晋吾,渡辺尚貴,岩崎拓也,小野耕平,入江康郎,杉山正和,大竹浩人,寒川誠二
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形
- Year and Date
  2011-08-31
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] High-aspect-ratio silicon etching using large-diameter neutral beam source2011
- Author(s)
  T.Kubota, N.Watanabe, S.Ohtsuka, K.Ono, H.Ohtake, S.Ueki, Y.Nishimori, G.Hashiguchi, and S.Samukawa
- Organizer
  AVS 58th International Symposium & Exhibition
- Place of Presentation
  アメリカ・Nashville
- Year and Date
  2011-11-03
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] オンウエハーモニタリングとシミュレーションの融合による立体形状エッチングにおけるシース形状およびイオン軌道予測2011
- Author(s)
  荒木良亮,久保田智広,三輪和弘,岩崎拓也,小野耕平,寒川誠二
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形
- Year and Date
  2011-08-31
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームによるエッチングの加工形状シミュレーション2011
- Author(s)
  望月俊輔,久保田智広,大塚晋吾,小野耕平,岩崎拓也,渡辺尚貴,入江康郎,杉山正和,寒川誠二
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形
- Year and Date
  2011-08-31
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 第一原理電子状態計算による中性粒子ビーム生成メカニズムの解析V2011
- Author(s)
  渡辺尚貴,大塚晋吾,岩崎拓也,小野耕平,入江康郎,植木真治,額賀理,杉山正和,久保田智広,寒川誠二
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形
- Year and Date
  2011-08-31
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Theoretical analysis of electron transfer during the process of neutral beam G.eration2011
- Author(s)
  N.Watanabe, S.Ohtsuka, T.Iwasaki, K.Ono, Yasuro Iriye, S.Ueki, Osamu Nukaga, T.Kubota, M.Sugiyama, and S.Samukawa
- Organizer
  AVS 58th International Symposium & Exhibition
- Place of Presentation
  アメリカ・Nashville
- Year and Date
  2011-11-03
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 第一原理電子状態計算による中性粒子ビーム生成メカニズムの解析2011
- Author(s)
  渡辺尚貴, 大塚晋吾, 岩崎拓也, 小野耕平,入江康郎, 額賀理, 植木真治, 杉山正和,久保田智広, 寒川誠二
- Organizer
  第28回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  東京
- Year and Date
  2011-09-26
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] ノイズを伴うスパイキングニューロンモデルを実現するナノディスクアレイ構造2011
- Author(s)
  梁海超, 孫意来, 森江隆, 五十嵐誠, 寒川誠二
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形
- Year and Date
  2011-09-01
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] 中性粒子ビーム生成におけるアパーチャ構造とエッチング特性解析2011
- Author(s)
  大塚晋吾, 渡辺尚貴, 岩崎拓也, 小野耕平,入江康郎, 額賀理, 植木真治, 杉山正和,久保田智広, 寒川誠二
- Organizer
  第28回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  東京
- Year and Date
  2011-09-27
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 脳型情報処理デバイスの現状と今後の展開2011
- Author(s)
  森江隆, 梁海超, 孫意来, 田中秀樹, 五十嵐誠, 寒川誠二
- Organizer
  応用物理学会シリコンテクノロジー分科会第140回研究集会
- Place of Presentation
  宮城,東北大学(招待講演)
- Year and Date
  2011-08-05
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] A Si Nanodisk Array Structure for Spiking Neuron Models2011
- Author(s)
  Y.Sun, H.Liang, T.Morie, M.Igarashi, C.Huang, S.Samukawa
- Organizer
  East-Asia Inter-University Workshop on Brain Engineering
- Place of Presentation
  九州工大(福岡県)
- Year and Date
  2011-02-28
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] ノイズを伴うスパイキングニューロンモデルを実現するナノディスクアレイ構造2011
- Author(s)
  梁海超, 孫意来, 森江隆, 五十嵐誠, 寒川誠二
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形,山形大学
- Year and Date
  2011-09-01
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] Si量子ナノディスク2次元アレイ構造の電気特性の構造による制御2010
- Author(s)
  五十嵐誠, 黄啓賢, 王宣又, モハマドファイルズ・ブディマン, 森江隆, 寒川誠二
- Organizer
  第71回応用物理学会学術講演会
- Place of Presentation
  長崎大(長崎県)
- Year and Date
  2010-09-14
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] Control of Activation Energy for Electron Transport in Two-Dimensional Array of Si Nanodisks2010
- Author(s)
  M.Igarashi, C.H.Huang, T.Morie, S.Samukawa
- Organizer
  Int.Conf.on Solid State Devices and Materials
- Place of Presentation
  東京大(東京都)
- Year and Date
  2010-09-23
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] Fundamental Study on Spiking Neuron Devices2010
- Author(s)
  T.Morie, Y.Sun, H.Liang, K.Nakada, M.Igarashi, C.Huang, S.Samukawa
- Organizer
  The Tenth Int.Symp.on Advanced Fluid Information and Transdisciplinary Fluid Integration
- Place of Presentation
  仙台国際センター(宮城県)
- Year and Date
  2010-11-02
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] オンウェハモニタリングによるPECVDプロセスにおけるチャージングダメージの発生メカニズム解明とそのリアルタイム評価2010
- Author(s)
  荒木良亮、奥村宏克、陣内佛霖、松永範昭、寒川誠二
- Organizer
  2010年秋季第71回応用物理学会学術講演会
- Place of Presentation
  長崎大学
- Year and Date
  2010-09-16
- Data Source
  KAKENHI-PROJECT-21560026
[Presentation] Ion Trajectory Prediction at High-Aspect-Ratio Hole Etching by the Combination of On-Water Monitoring and Sheath Modeling2009
- Author(s)
  大竹浩人, 福田誠一, 陣内佛霖, 辰巳知彦, 寒川誠二
- Organizer
  AVS 56th International Symposium & Exhibition
- Place of Presentation
  アメリカ合衆国・カリフォルニア州・サンノゼ
- Year and Date
  2009-11-11
- Data Source
  KAKENHI-PROJECT-21560026
[Presentation] Ultra-Low-Damage Surface Modification of Carbon Nanotube for P-type and N-type Field-Effect Transistor by Neutral Beam Process2009
- Author(s)
  Akira Wada, Yoshinori sato, Satoru Suzuki, Masahiko Ishida, Fumiyuki Nihey, Yoshihiro Kobayashi, Kazuyuki Tohji, Seiji Samukawa
- Organizer
  The Sixth International Conference on Flow Dynamics
- Place of Presentation
  宮城県・仙台市
- Year and Date
  2009-11-05
- Data Source
  KAKENHI-PROJECT-20651039
[Presentation] Control of Electrical Characteristics of Carbon Nanotubes by Damage-free Surface Modification with Neutral Beam2009
- Author(s)
  Akira Wada, Yoshinori sato, Satoru Suzuki, Masahiko Ishida, Fumiyuki Nihey, Yoshihiro Kobayashi, Seiji Samukawa
- Organizer
  Nanotube 2009 : Tenth International Conference on the Science and Application of Nanotubes
- Place of Presentation
  中華人民共和国・北京
- Year and Date
  2009-06-25
- Data Source
  KAKENHI-PROJECT-20651039
[Presentation] オンウエハモニタリング技術による異常形状発生予測2009
- Author(s)
  大竹浩人、福田誠一、陣内佛霖、辰巳知彦、寒川誠二
- Organizer
  2009年秋季第70回応用物理学会学術講演会
- Place of Presentation
  富山県・富山市
- Year and Date
  2009-09-09
- Data Source
  KAKENHI-PROJECT-21560026
[Presentation] 酸素中性粒子ビーム照射による低損傷カーボンナノチューブ表面酸化2009
- Author(s)
  和田章良、佐藤義倫、鈴木哲、二瓶史行、田路和幸、寒川誠二
- Organizer
  2009年秋季第70回応用物理学会学術講演会
- Place of Presentation
  富山県・富山市
- Year and Date
  2009-09-09
- Data Source
  KAKENHI-PROJECT-20651039
[Presentation] 窒素中性粒子ビーム照射による低損傷カーボンナノチューブ表面窒化2009
- Author(s)
  和田章良、佐藤義倫、鈴木哲、二瓶史行、田路和幸、寒川誠二
- Organizer
  2009年秋季第70回応用物理学会学術講演会
- Place of Presentation
  富山県・富山市
- Year and Date
  2009-09-09
- Data Source
  KAKENHI-PROJECT-20651039
[Presentation] Prediction of Abnormal Etching Profile in High-Aspect-Ratio Via/Hole Etching Using On-Water Monitoring System2009
- Author(s)
  大竹浩人, 福田誠一, 陣内佛霖, 辰巳知彦, 寒川誠二
- Organizer
  International meeting on solid state device and materials
- Place of Presentation
  宮城県・仙台市
- Year and Date
  2009-10-09
- Data Source
  KAKENHI-PROJECT-21560026
[Presentation] 中性粒子ビーム照射によるカーボンナノチューブ欠陥生成機構と電気特性2009
- Author(s)
  和田章良、佐藤義倫、鈴木哲、石田真彦、二瓶史行、小林慶裕、田路和幸、寒川誠二
- Organizer
  2009年春季第56回応用物理学関係連合講演会
- Place of Presentation
  茨城・つくば
- Year and Date
  2009-03-30
- Data Source
  KAKENHI-PROJECT-20651039
[Presentation] 中性粒子ビーム照射によるカーボンナノチューブ欠陥生成の構造依存性2008
- Author(s)
  和田章良, 佐藤義倫, 鈴木哲, 小林慶裕, 寒川誠二
- Organizer
  2008年秋季第69回応用物理学会学術講演会
- Place of Presentation
  愛知・名古屋
- Year and Date
  2008-09-03
- Data Source
  KAKENHI-PROJECT-20651039
[Presentation] Influences of Electrical Characteristics in Carbon Nanotubes by Neutral Beam Irradiation2008
- Author(s)
  A. Wada, Y. Sato, M. Ishida, F. Nihey, K. Tohji, and S. Samukawa
- Organizer
  AVS 55th International Symposium & Exhibition
- Place of Presentation
  米国・ボストン
- Year and Date
  2008-10-24
- Data Source
  KAKENHI-PROJECT-20651039
[Presentation] Damage-free Surface Modification of Carbon Nanotubes using Advanced Neutral Beam2008
- Author(s)
  Akira Wada, Yoshinori Sato, Masahiko Ishida, Fumiyuki Nihey, Kazuyuki Tohji and Seiji Samukawa
- Organizer
  The 6th EU-Japan Joint Symposium on Plasma Processing (EU-Japan JSPP)
- Place of Presentation
  沖縄・那覇
- Year and Date
  2008-04-22
- Data Source
  KAKENHI-PROJECT-20651039
[Presentation] Influence of Neutral Beam Irradiation to Electrical Characteristics in Carbon Nanotubes2008
- Author(s)
  A. Wada, Y. Sato, M. Ishida, F. Nihey, K. Tohji and S. Samukawa
- Organizer
  8th International Symposium on Advanced Fluid Information and Transdisciplinary Fluid Information
- Place of Presentation
  宮城・仙台
- Year and Date
  2008-10-20
- Data Source
  KAKENHI-PROJECT-20651039
[Presentation] Feature Profile Evolution in Plasma Processing using On-wafer Monitoring System
- Author(s)
  Tomohiro Kubota and Seiji Samukawa
- Organizer
  8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing
- Place of Presentation
  Fukuoka Convention Center
- Invited
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Double-dot Si single-electron transistor with tunable coupling capacitance
- Author(s)
  Takafumi Uchida, Masashi Arita, Akira Fujiwara, Yasuo Takahashi, and Seiji Samukawa
- Organizer
  The Thirteenth Int. Symp. on Advanced Fluid Information and Transdisciplinary Fluid Integration
- Place of Presentation
  Sendai, Japan
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] Fabrication and evaluation of silicon micromechanical resonator using neutral beam etching technology
- Author(s)
  Nguyen Van Toan, Tomohiro Kubota, Halubai Sekhar, Seiji Samukawa, and Takahito Ono
- Organizer
  The 9th International Conference on Nano/Micro Engineered and Molecular Systems
- Place of Presentation
  Hyatt Regency Waikiki,アメリカ
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] On-wafer monitoring technique for highly efficient fabrication process of nano energy devices
- Author(s)
  Tomohiro Kubota and Seiji Samukawa
- Organizer
  10th International Conference on Flow Dynamics
- Place of Presentation
  Sendai International Center
- Invited
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] A Silicon Nanodisk Array Structure Realizing Synaptic Response of Spiking Neuron Models with Noise
- Author(s)
  T. Morie, H. Liang, Y. Sun, T. Tohara, M. Igarashi, and S. Samukawa
- Organizer
  The 19th Asia and South Pacific Design Automation Conference
- Place of Presentation
  Singapore
- Invited
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] Feature Profile Evolution in Plasma Processing Using Wireless On-Wafer Monitoring System
- Author(s)
  寒川誠二
- Organizer
  Ninth International Conference on Flow Dynamics
- Place of Presentation
  仙台
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] バイオテンプレートを用いた中性粒子ビーム加工によるGeナノディスク作製
- Author(s)
  モハマドエルマン，岡田　健，磯田大河，伊藤公平，山下一郎，寒川誠二
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパス､神奈川県
- Data Source
  KAKENHI-PROJECT-25249139
[Presentation] Polyethylene glycol (PEG)を塗布した基板上のフェリチン2次元配列
- Author(s)
  李　昌勇，肥後昭男，Cedric Thomas，田村洋典，吉川憲一，山下一郎，寒川誠二
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  相模原
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] Silicon micromechanical resonator with high quality factor fabricated by damage-free neutral beametching process
- Author(s)
  Halubai Sekhar，久保田智広，Van Toan Nguyen，小野崇人，寒川誠二
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパス
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Green nanodevice by super low damage process
- Author(s)
  Seiji Samukawa
- Organizer
  10th International Conference on Flow Dynamics
- Place of Presentation
  Sendai, Japan
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] Damage-free AlGaN/GaN Recess-Gate Etching using Cl2 Neutral Beam
- Author(s)
  Halubai Sekhar ，久保田智広，岡田　健，太田実雄，藤岡　洋，寒川誠二
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパス
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Enhancement of Electrical Conductivity by Miniband Formation In Silicon Quantum Dot Superlattice Structure
- Author(s)
  Makoto Igarashi, Weiguo Hu, Mohd Erman Syazwan, and Seiji Samukawa
- Organizer
  International Conference on Solid State Devices and Materials
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] Novel Quantum Effect Devices realized by Fusion of Biotemplate and DefectFree Neutral Beam Etching
- Author(s)
  Seiji Samukawa
- Organizer
  2013 IEEE International NanoElectronics Conference
- Place of Presentation
  Singapore
- Invited
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] Novel Quantum Effect Devices Fabricated Using Fusion of Bio-template and Defect-Free Neutral Beam Etching
- Author(s)
  Seiji Samukawa
- Organizer
  2013 JSAP-MRS Joint Symposia
- Place of Presentation
  Kyotanabe, Japan
- Invited
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] Ultimate Top-down Etching Processes for Future Nano-scale Devices
- Author(s)
  Seiji Samukawa
- Organizer
  Semicon Korea SEMI Technology Symposium
- Place of Presentation
  Seoul, Korea
- Invited
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] オンウェハモニタリングによるプラズマエッチング形状異常予測
- Author(s)
  久保田智広，佐藤充男，岩崎拓也，小野耕平，寒川誠二
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパス
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Formation and Characterization of a Three Dimensional Silicon Quantum Dot Superlattice Fabricated by Top-Down Process Using Bio-Template and Neutral Beam Etching Technology for its Application to a High Efficiency Quantum Dot Solar Cell
- Author(s)
  Mohammad Maksudur Rahman, Makoto Igarashi, Weiguo Hu, Mohd Erman Syazwan, Yusuke Hoshi, Noritaka Usami, and Seiji Samukawa
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  京田辺
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] Ultimate Top-down Processes for Future Nanoscale Devices
- Author(s)
  Seiji Samukawa
- Organizer
  8th International Conference on Reactive Plasmas and 31st Symposium on Plasma Processing
- Place of Presentation
  Fukuoka, Japan
- Invited
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] FinFETとナノディスクアレイ構造を結合したニューロンデバイス
- Author(s)
  東原敬, 梁海超, 遠藤和彦, 五十嵐誠, 寒川誠二, 昌原明植, 森江隆
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] Intelligent Information Processing Circuits Using Nanodisk Array Structure
- Author(s)
  T. Morie, T. Tohara, K. Endo, M. Igarashi, and S. Samukawa
- Organizer
  The Thirteenth Int. Symp. on Advanced Fluid Information and Transdisciplinary Fluid Integration
- Place of Presentation
  Sendai, Japan
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] Numerical simulation of total processes of neutral beam etching from generation of neutral beam by collision of ions against graphite sidewall to 3-dimensional etching profile
- Author(s)
  Naoki Watanabe, Shingo Ohtsuka, Shunsuke Mochizuki, Tomohiro Kubota, Takuya Iwasaki, Yasuroh Iriye, Kohei Ono, and Seiji Samukawa
- Organizer
  AVS 60th International Symposium & Exhibition
- Place of Presentation
  Long Beach Convention Center,アメリカ
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 塩素中性粒子ビームを用いた窒化物薄膜のエッチング特性
- Author(s)
  太田実雄，Halubai Sekhar，久保田智広，岡田健，寒川誠二，藤岡洋
- Organizer
  第61回応用物理学会春季学術講演会
- Place of Presentation
  青山学院大学相模原キャンパス
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] アンペロメトリックバイオイメージングプラットフォーム「バイオLSI」
- Author(s)
  井上久美、松平昌昭、伊野浩介、中野将識、菅野佑介、須田篤史、國方亮太、吉田慎哉、早坂丈、菊地良幸、Xijiang Chang、久保田智広、珠玖仁、田中秀治、寒川誠二、末永智一
- Organizer
  第74回分析化学討論会
- Place of Presentation
  日本大学工学部
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームによる超低損傷加工が拓く革新的ナノデバイス
- Author(s)
  寒川誠二
- Organizer
  大口径中性粒子ビームに関する研究会
- Place of Presentation
  仙台
- Invited
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] High-frequency characteristics of Si single-electron transistor
- Author(s)
  Hiroto Takenaka, Michito Shinohara, Takafumi Uchida, Masashi Arita, Seiji Samukawa, and Yasuo Takahashi
- Organizer
  Twelfth International Symposium on Advanced Fluid Infromation and Transdisciplinary Fluid Integration
- Place of Presentation
  仙台
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] オンウェハモニタリングによるプラズマエッチング形状予測
- Author(s)
  久保田智広,佐藤充男, 岩崎拓也,小野耕平,寒川誠二
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学京田辺キャンパス
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Damage-free AlGaN/GaN Recess-Gate Etching using Cl2 Neutral Beam for High-Performance HEMTs
- Author(s)
  Halubai Sekhar, Tomohiro Kubota, Takeru Okada, Yosuke Tamura, ChangYong Lee, Jitsuo Ohta, Hiroshi Fujioka, and Seiji Samukawa
- Organizer
  The 3rd International Symposiumon Next-Generation Electronics
- Place of Presentation
  Chang Gung University,台湾
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] バイオテンプレート極限加工による３次元量子ドット超格子構造の作製
- Author(s)
  Mohammad Rahman、宇佐美徳隆、寒川誠二
- Organizer
  第10回「次世代の太陽光発電システム」シンポジウム
- Place of Presentation
  金沢
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] Feature profile evolution in plasma processing using on-wafer monitoring system
- Author(s)
  Tomohiro Kubota, Michio Sato, Takuya Iwasaki, Kohei Ono, and Seiji Samukawa
- Organizer
  AVS 60th International Symposium & Exhibition
- Place of Presentation
  Long Beach Convention Center,アメリカ
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] 中性粒子ビームエッチングプロセスの総合的シミュレーション
- Author(s)
  渡辺尚貴,大塚晋吾,岩崎拓也,小野耕平,入江康郎,望月俊輔,久保田智広,寒川誠二
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学京田辺キャンパス
- Data Source
  KAKENHI-PROJECT-23360040
[Presentation] Intelligent Information Processing Circuits Using Nanodisk Array Structure
- Author(s)
  T. Morie, H. Liang, T. Tohara, K. Endo, M. Igarashi, and S. Samukawa
- Organizer
  Twelfth International Symposium on Advanced Fluid Infromation and Transdisciplinary Fluid Integration
- Place of Presentation
  仙台
- Data Source
  KAKENHI-PROJECT-22240022
[Presentation] Ultimate Top-down Etching Processes for Future Nano-scale Devices
- Author(s)
  Seiji Samukawa
- Organizer
  Japan-Australia Commemorative Workshop
- Place of Presentation
  Canberra, Australia
- Invited
- Data Source
  KAKENHI-PROJECT-22240022

1. KUBOTA Tomohiro (70322683)

# of Collaborated Projects: 6 results

# of Collaborated Products: 64 results
2. HANE Kazuhiro (50164893)

# of Collaborated Projects: 4 results

# of Collaborated Products: 0 results
3. 熊谷慎也 (70333888)

# of Collaborated Projects: 3 results

# of Collaborated Products: 0 results
4. 遠藤和彦 (60392594)

# of Collaborated Projects: 3 results

# of Collaborated Products: 12 results
5. KOYANAGI Mitsumasa (60205531)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
6. ONO Takahito (90282095)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
7. MORIE Takashi (20294530)

# of Collaborated Projects: 2 results

# of Collaborated Products: 31 results
8. TAKAHASHI Yasuo (90374610)

# of Collaborated Projects: 2 results

# of Collaborated Products: 10 results
9. TOHARA Takashi

# of Collaborated Projects: 2 results

# of Collaborated Products: 10 results
10. FURUKAWA Tetsuo (50219101)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. Wada Kazumi (30376511)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. TANAKA Tetsu (40417382)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. FUKUSHIMA Takafumi (10374969)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. KONDO Michio (30195911)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. HAMAGUCHI Satoshi (60301826)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
16. YOSHIMURA Satoru (40294029)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
17. KIUCHI Masato (50356862)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
18. Murayama Akihiro (00333906)

# of Collaborated Projects: 1 results

# of Collaborated Products: 14 results
19. 大竹浩人 (00436156)

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
20. 栗野浩之 (70282093)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
21. 沈正七 (00333849)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
22. 末岡和久 (60250479)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
23. 中村雅一 (80332568)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
24. 大堀大介 (00839293)

# of Collaborated Projects: 1 results

# of Collaborated Products: 13 results
25. 福山敦彦 (10264368)

# of Collaborated Projects: 1 results

# of Collaborated Products: 7 results
26. 野村政宏 (10466857)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
27. 太田裕之 (70356640)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
28. 徳増崇 (10312662)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
29. NAKATA Kazuki

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
30. IGARASHI Makoto

# of Collaborated Projects: 1 results

# of Collaborated Products: 33 results
31. LIANG Haichao

# of Collaborated Projects: 1 results

# of Collaborated Products: 16 results
32. SUN Yirai

# of Collaborated Projects: 1 results

# of Collaborated Products: 13 results
33. TAMUKOH Hakaru

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
34. OHNO Takeo

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
35. ANDO Hideyuki

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results
36. TOMIZAKI KAZUMASA

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
37. KATO Takashi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
38. WANG Quan

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
39. TANIMURA Hiroshi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
40. YAMAGUCHI Masatoshi

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
41. HARADA Masataka

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
42. IWAMOTO Goki

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
43. YAMASHITA Kenya

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
44. Kikuchi Akioh

# of Collaborated Projects: 1 results

# of Collaborated Products: 7 results
45. 黄啓賢

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
46. 宮川宣明

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
47. 田中啓文

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results

Samukawa Seiji 寒川 誠二

SAMUKAWA Seiji 寒川 誠二

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High-mobility Semiconductor Devices due to Control of Phonon Field caused by Defect-free Nano-periodic StructuresPrincipal Investigator

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Thermoelectric conversion device and Seebeck coefficient control by 3-dimensional quantum nanodisk arrayPrincipal Investigator

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中性粒子ビーム表面改質によるカーボンナノチューブ構造・物性制御と電気特性Principal Investigator

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サブ10nm量子ドットの超解像近接場分光Principal Investigator

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Samukawa Seiji 寒川誠二

SAMUKAWA Seiji 寒川誠二