MIMURA HIDEKAZU 三村秀和

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MIMURA Hidekazu 三村秀和

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Researcher Number	30362651
External Links
Affiliation (Current)	2025: 東京大学, 先端科学技術研究センター, 教授
Affiliation (based on the past Project Information) *help	2022 – 2024: 東京大学, 先端科学技術研究センター, 教授 2022: 東京大学, 大学院工学系研究科(工学部), 教授 2015 – 2022: 東京大学, 大学院工学系研究科(工学部), 准教授 2015: 東京大学, 工学研究科, 准教授 2014: 東京大学, 大学院工学系研究科, 准教授 … More 2011 – 2014: 東京大学, 工学(系)研究科(研究院), 准教授 2012: 東京大学, 大学院・工学系研究科, 准教授 2010: 東京大学, 大学院・工学系研究科, 准教授 2010: 東京大学, 工学系研究科, 准教授 2009: Osaka University, 工学研究科, 助教 2007 – 2008: Osaka University, 大学院・工学研究科, 助教 2006: 大阪大学, 大学院工学研究科, 助手 2003 – 2005: 大阪大学, 工学研究科, 助手 2004: 大阪大学, 大学院・工学研究科, 助手 Less
Review Section/Research Field	Principal Investigator Production engineering/Processing studies / Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields / Medium-sized Section 30:Applied physics and engineering and related fields / Mechanics of materials, Production engineering, Design engineering, and related fields / Quantum beam science Except Principal Investigator Production engineering/Processing studies / Basic Section 80040:Quantum beam science-related / Engineering / Science and Engineering
Keywords	Principal Investigator X線ミラー / 精密計測 / 集光 / Ｘ線ミラー / Ｘ線集光 / 軟X線 / 超精密加工 / 精密加工 / X線イメージング / ウォルターミラー … More / 軟X線集光 / Ｘ線 / 高次高調波 / X線集光 / 形状計測 / 位相回復 / 形状修正 / X 線ミラー / X線顕微鏡 / ナノ精度 / 電鋳法 / ナノ精度計測 / ナノ精度加工 / Ｘ線顕微鏡 / Ｘ線望遠鏡 / X線望遠鏡 / X線 / 高精度ミラー / Ｘ線結像 / 超精密計測 / 波面計測 / 位相回復法 / 精密部品加工 / 回転体ミラー / 顕微鏡 / 生産工学 / 応用光学 / 放射光 / SPring-8 / 回転楕円ミラー / 軟Ｘ線 / 成膜 / 計測 / 軟 X 線 / SOIウエハ / X線自由電子レーザ / ビームスプリッター / X線自由電子レーザー / 表面 / 転写 / 電鋳 / 超精密形状計測 / コヒーレントX線 … More Except Principal Investigator X線ミラー / X線自由電子レーザー / X線光学 / 超精密加工 / X線集光 / X線顕微鏡 / 微細加工 / X線 / 電子ビーム露光 / X線吸収分光 / X線吸収微細構造 / 分光イメージング / ウォルターミラー / 電子ビームリソグラフィ / 回折格子 / X線分光 / 多層膜ミラー / X線干渉計 / X線波面計測 / 精密計測 / 精密加工 / 非接触給電 / 放電加工 / 微細軸加工 / 工具電極消耗 / サーボ送り制御 / 電気二重層 / 静電誘導給電 / 超短パルス / 電解加工 / X 線光学 / X線自由電子レーザ / ナノ集光 / 波面光学 / 数値制御加工 / 非球面ミラー / コヒーレントX線 / 放射光 / 超精密形状計測 Less

高精度大型ウォルターミラーの開発とX線望遠鏡・X線顕微鏡への展開Principal Investigator
- Principal Investigator
  
  三村秀和
- Project Period (FY)
  2023 – 2026
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Review Section
  
  Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
- Research Institution
  The University of Tokyo
Demonstration of X-ray single-shot microspectroscopic imaging
- Principal Investigator
  
  Kimura Takashi
- Project Period (FY)
  2020 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 80040:Quantum beam science-related
- Research Institution
  The University of Tokyo
Development of Ultra-Short Pulse X-ray Imaging Method through High-Precision Wolter Mirror FabricationPrincipal Investigator
- Principal Investigator
  
  Mimura Hidekazu
- Project Period (FY)
  2019 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Review Section
  
  Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
- Research Institution
  The University of Tokyo
Development of 1 nm X-ray focusing systemPrincipal Investigator
- Principal Investigator
  
  Mimura Hidekazu
- Project Period (FY)
  2019 – 2022
- Research Category
  
  Grant-in-Aid for Challenging Research (Pioneering)
- Review Section
  
  Medium-sized Section 30:Applied physics and engineering and related fields
- Research Institution
  The University of Tokyo
Development of highly accurate figure measurement method using high order harmonic generation sourcePrincipal Investigator
- Principal Investigator
  
  Mimura Hidekazu
- Project Period (FY)
  2017 – 2019
- Research Category
  
  Grant-in-Aid for Challenging Research (Exploratory)
- Research Field
  
  Mechanics of materials, Production engineering, Design engineering, and related fields
- Research Institution
  The University of Tokyo
Development of advanced soft x-ray focusing system with a symmetric rotational mirrorPrincipal Investigator
- Principal Investigator
  
  Mimura Hidekazu
- Project Period (FY)
  2015 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Quantum beam science
- Research Institution
  The University of Tokyo
Research on Ultra-short Pulse Electrochemical Machining using Electrostatic Induction Feeding Method
- Principal Investigator
  
  KUNIEDA Masanori
- Project Period (FY)
  2012 – 2014
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Development of surface profile measurement method for ellipsoidal mirrorsPrincipal Investigator
- Principal Investigator
  
  MIMURA Hidekazu
- Project Period (FY)
  2011 – 2012
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
Adaptively controlled multistage nanofocusing systemfor x-ray free electron laser
- Principal Investigator
  
  Yamauchi Kazuto
- Project Period (FY)
  2011 – 2015
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
In-situ surface figure correction system for soft X-ray mirrorsPrincipal Investigator
- Principal Investigator
  
  MIMURA Hidekazu
- Project Period (FY)
  2010 – 2012
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
X線自由電子レーザー用ビームスプリッターの開発Principal Investigator
- Principal Investigator
  
  三村秀和
- Project Period (FY)
  2009 – 2010
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  The University of Tokyo
  Osaka University
Sub-10nm hard X-ray focusing and application to nanoscopy/spectroscopy
- Principal Investigator
  
  YAMAUCHI Kazuto
- Project Period (FY)
  2006 – 2010
- Research Category
  
  Grant-in-Aid for Specially Promoted Research
- Review Section
  
  Science and Engineering
  Engineering
- Research Institution
  Osaka University
高精度X線ミラー作製のためのナノ精度表面形状転写法の開発Principal Investigator
- Principal Investigator
  
  三村秀和
- Project Period (FY)
  2006 – 2007
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
硬X線用超平坦全反射ミラーの作製とコヒーレントX線による全反射の評価Principal Investigator
- Principal Investigator
  
  三村秀和
- Project Period (FY)
  2004 – 2005
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University
超高精度X線ミラー作製による高分解能硬X線顕微鏡の開発
- Principal Investigator
  
  YAMAUCHI Kazuto
- Project Period (FY)
  2003 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Production engineering/Processing studies
- Research Institution
  Osaka University

[Journal Article] Efficient and precise fabrication of Wolter type-I x-ray mirrors via nickel electroforming replication using quartz glass mandrels2023
- Author(s)
  G. Yamaguchi, Y. Matsuzawa, T. Kume, Y. Imamura, H. Miyashita, A. Ito, K. Sakuta, K. Ampuku, R. Fujii, K. Hiraguri, H. Hashizume, I. Mitsuishi, H. Mimura
- Journal Title
  
  Review of Scientific Instruments
  
  Volume: 94 Issue: 12 Pages: 124501-124501
- DOI
  10.1063/5.0160262
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23H00156
[Journal Article] Fabrication of ultrashort sub-meter-radius x-ray mirrors using dynamic stencil deposition with figure correction2023
- Author(s)
  Shimamura Takenori、Takeo Yoko、Kimura Takashi、Perrin Francois、Vivo Amparo、Senba Yasunori、Kishimoto Hikaru、Ohashi Haruhiko、Mimura Hidekazu
- Journal Title
  
  Review of Scientific Instruments
  
  Volume: 94 Issue: 4 Pages: 043102-043102
- DOI
  10.1063/5.0135367
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H04451, KAKENHI-PROJECT-20J21562, KAKENHI-PROJECT-20K20444
[Journal Article] ウォルターミラーを利用した軟X線タイコグラフィ装置の開発2023
- Author(s)
  木村隆志、竹尾陽子、櫻井快、古谷登、江川悟、山口豪太、松澤雄介、久米健大、三村秀和、志村まり、大橋治彦、松田巌、原田慈久
- Journal Title
  
  放射光
  
  Volume: 36 Pages: 10-16
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H04451
[Journal Article] Abrasive slurry jet machining system using polyurethane silica coreshell particles for internal surfaces of axisymmetric x-ray mirrors2023
- Author(s)
  Shunya Yokomae, Yoko Takeo, Takenori Shimamura, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, Hidekazu Mimura
- Journal Title
  
  Review of Scientific Instruments
  
  Volume: 94 Issue: 1 Pages: 015106-015106
- DOI
  10.1063/5.0125242
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H00736, KAKENHI-PROJECT-20J21562
[Journal Article] Design of soft x-ray fluorescence microscopy beyond 100-nm spatial resolution with ultrashort Kirkpatrick-Baez mirror2022
- Author(s)
  Shimamura Takenori、Takeo Yoko、Moriya Fumika、Kimura Takashi、Shimura Mari、Senba Yasunori、Kishimoto Hikaru、Ohashi Haruhiko、Shimba Kenta、Jimbo Yasuhiko、Mimura Hidekazu
- Journal Title
  
  Advances in X-Ray/EUV Optics and Components XVII
  
  Volume: 12240 Pages: 1224004-1224004
- DOI
  10.1117/12.2632949
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20H04451, KAKENHI-PROJECT-20J21562
[Journal Article] An arrayed-window microfluidic device for observation of mixed nanoparticles with an X-ray free-electron laser2022
- Author(s)
  Matsumoto Yutaka、Takeo Yoko、Egawa Satoru、Yamaguchi Gota、Yokomae Shunya、Takei Masashi、Yumoto Hirokatsu、Koyama Takahisa、Ohashi Haruhiko、Tono Kensuke、Yabashi Makina、Mimura Hidekazu、Kimura Takashi
- Journal Title
  
  Optical Review
  
  Volume: 29 Issue: 1 Pages: 7-12
- DOI
  10.1007/s10043-021-00716-x
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H04451
[Journal Article] Soft X-ray ptychography system using a Wolter mirror for achromatic illumination optics2022
- Author(s)
  Kimura Takashi、Takeo Yoko、Sakurai Kai、Furuya Noboru、Egawa Satoru、Yamaguchi Gota、Matsuzawa Yusuke、Kume Takehiro、Mimura Hidekazu、Shimura Mari、Ohashi Haruhiko、Matsuda Iwao、Harada Yoshihisa
- Journal Title
  
  Optics Express
  
  Volume: 30 Issue: 15 Pages: 26220-26220
- DOI
  10.1364/oe.462190
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20H04451
[Journal Article] Organic abrasive machining system for optical fabrication with 0.1-mm spatial resolution2022
- Author(s)
  Y. Matsuzawa, K. Hiraguri, H. Hashizume, H. Mimura,
- Journal Title
  
  Review of Scientific Instruments
  
  Volume: 93 Issue: 1 Pages: 013101-013101
- DOI
  10.1063/5.0068556
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H00736
[Journal Article] Fabrication of soft x-ray monolithic Wolter mirror based on surface scanning measurement using touch probe2022
- Author(s)
  Takehiro Kume, Kentaro Hiraguri, Yoichi Imamura, Yusuke Matsuzawa, Takahiro Saito, Hiroaki Miyashita, Yoko Takeo, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi,Hirokazu Hashizume, Hidekazu Mimura
- Journal Title
  
  Review of Scientific Instruments
  
  Volume: 93 Issue: 6
- DOI
  10.1063/5.0087171
- Data Source
  KAKENHI-PROJECT-19H00736
[Journal Article] Design of ultrashort Kirkpatrick-Baez mirror for soft x-ray nanofocusing2020
- Author(s)
  Takenori Shimamura, Yoko Takeo, Takashi Kimura, Hirokazu Hashizume, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, and Hidekazu Mimura
- Journal Title
  
  SPIE Proceedings
  
  Volume: 11492 Pages: 1-9
- DOI
  10.1117/12.2569845
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20K20444, KAKENHI-PROJECT-20J21562
[Journal Article] Single-shot achromatic imaging for a broadband soft X-ray pulse2020
- Author(s)
  S. Egawa, H. Motoyama, A. Iwasaki, G. Yamaguchi, T. Kume, K. Yamanouchi, H. Mimura
- Journal Title
  
  Optics Letters
  
  Volume: 45(2) Issue: 2 Pages: 515-518
- DOI
  10.1364/ol.381538
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H00736, KAKENHI-PROJECT-15H05696
[Journal Article] Development of shape measurement system for high precision Wolter mandrel2020
- Author(s)
  Takehiro Kume, Hirokazu Hashizume, Kentarou Hiraguri, Yusuke Matsuzawa, Yoichi Imamura, Hiroaki Miyashita, Takahiro Saito, Gota Yamaguchi, Yoko Takeo, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, Hidekazu Mimura
- Journal Title
  
  SPIE Proceedings
  
  Volume: 11492 Pages: 20-20
- DOI
  10.1117/12.2568929
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H00736
[Journal Article] Development of precise electroformed Wolter mirror for X-ray astronomy2020
- Author(s)
  Gota Yamaguchi, Takehiro Kume, Yoko Takeo, Yusuke Matsuzawa, Kentaro Hiraguri, Yoichi Imamura, Hiroaki Miyashita, Keisuke Tamura, Yusuke Takehara, Ayumu Takigawa, Tetsuo Kanoh, Kenji Tachibana, Ikuyuki Mitsuishi, Hirokazu Hashizume, Hidekazu Mimura
- Journal Title
  
  SPIE Proceedings
  
  Volume: 11491 Pages: 19-19
- DOI
  10.1117/12.2569834
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H00736
[Journal Article] Advanced fabrication technologies for ultraprecise replicated mirrors for x-ray telescopes2020
- Author(s)
  Hidekazu Mimura, Gota Yamaguchi, Takehiro Kume, Yoko Takeo, Akinari Ito, Yusuke Matsuzawa, Takahiro Saito, Kentarou Hiraguri, Yusuke Takehara, Ayumu Takigawa, Keisuke Tamura, Tetsuo Kanoh, Kenji Tachibana, Hirokazu Hashizume, Ikuyuki Mitsuishi
- Journal Title
  
  SPIE Proceedings
  
  Volume: 11444 Pages: 155-155
- DOI
  10.1117/12.2560892
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H00736
[Journal Article] A highly efficient nanofocusing system for soft x rays2020
- Author(s)
  Y. Takeo,　H. Motoyama, T. Shimamura, T. Kimura, T. Kume, Y. Matsuzawa, T Saito, Y. Imamura, H. Miyashita, K. Hiraguri, H. Hashizume, Y. Senba, H. Kishimoto, H. Ohashi, and H. Mimura
- Journal Title
  
  Appl. Phys. Lett.
  
  Volume: 117 Issue: 15 Pages: 151104-151104
- DOI
  10.1063/5.0027118
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H00736, KAKENHI-PROJECT-20H04451
[Journal Article] Soft x-ray nanobeam formed by an ellipsoidal mirror2020
- Author(s)
  Yoko Takeo, Akihiro Suzuki, Hiroto Motoyama, Yoshinori Takei, Takehiro Kume, Yusuke Matsuzawa, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, and Hidekazu Mimura1Applied Physics Letters
- Journal Title
  
  Applied Physics Letters
  
  Volume: 116 Issue: 12 Pages: 121102-121102
- DOI
  10.1063/1.5144932
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H05737, KAKENHI-PROJECT-17J04201, KAKENHI-PROJECT-17K18821, KAKENHI-PROJECT-15H02041
[Journal Article] Design of two-stage soft-X-ray nano-focusing system with a ring-focusing mirror and quasi-Wolter mirror2020
- Author(s)
  Yoko Takeo, Hiroto Motoyama, Takenori Shimamura, Takashi Kimura, Takehiro Kume, Yusuke Matsuzawa, Takahiro Saito, Yoichi Imamura, Hiroaki Miyashita, Kentarou Hiraguri, Hirokazu Hashizume, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, and Hidekazu Mimura
- Journal Title
  
  SPIE Proceedings
  
  Volume: 11492 Pages: 21-21
- DOI
  10.1117/12.2570007
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H00736
[Journal Article] Probing the spatial coherence of soft X-ray beams with Fresnel mirrors at BL25SU of SPring-82019
- Author(s)
  Y. Takeo, H. Motoyama, Y. Senba, H. Kishimoto, H. Ohashi, and H. Mimura
- Journal Title
  
  Journal of Synchrotron Radiation
  
  Volume: 26 Issue: 3 Pages: 756-761
- DOI
  10.1107/s1600577519002583
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17J04201, KAKENHI-PROJECT-15H02041
[Journal Article] Broadband nano-focusing of high-order harmonics in soft X-ray region with ellipsoidal mirro2019
- Author(s)
  H. Motoyama, A. Iwasaki, Y. Takei, T. Kume, S. Egawa, T. Sato, K. Yamanouchi, H. Mimura
- Journal Title
  
  Applied Physics Letters
  
  Volume: 114 Issue: 24 Pages: 241102-241102
- DOI
  10.1063/1.5091587
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H02041
[Journal Article] Full-field microscope with twin Wolter mirrors for soft X-ray free-electron lasers2019
- Author(s)
  S. Egawa, S. Owada, H. Motoyama, G. Yamaguchi, Y. Matsuzawa, T. Kume, Y. Kubota, K. Tono, M. Yabashi, H. Ohashi, H. Mimura
- Journal Title
  
  Optics Express
  
  Volume: 27(23) Issue: 23 Pages: 33889-33897
- DOI
  10.1364/oe.27.033889
- Data Source
  KAKENHI-PROJECT-19H00736
[Journal Article] Differential deposition for producing microstructure2018
- Author(s)
  H. Motoyama, M. Nagayama, and H. Mimura
- Journal Title
  
  Precision Engineering
  
  Volume: 印刷中
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H02041
[Journal Article] System Development for Fabricating Mandrel of Soft X-ray Rotating-Body Mirror (1st Report)2017
- Author(s)
  武井良憲，三村秀和
- Journal Title
  
  Journal of the Japan Society for Precision Engineering
  
  Volume: 83 Issue: 3 Pages: 245-250
- DOI
  10.2493/jjspe.83.245
- NAID
  130005436044
- ISSN
  0912-0289, 1882-675X
- Language
  Japanese
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-15H02041, KAKENHI-PROJECT-14J08051
[Journal Article] A Fundamental Study of Local Electrochemical Nano-processing2017
- Author(s)
  G.Yamaguchi, T. Kume, H. Mimura
- Journal Title
  
  International Journal of Electrical Machining
  
  Volume: 22 Pages: 36-41
- NAID
  130005712362
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H02041
[Journal Article] Precise characterization of focused vortex beams2017
- Author(s)
  Takahiro Saito, Yoko Takeo, and Hidekazu Mimura
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 56 Issue: 9 Pages: 092501-092501
- DOI
  10.7567/jjap.56.092501
- NAID
  210000148263
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H02041
[Journal Article] System Development for Fabricating Mandrel of Soft X-ray Rotating-Body Mirror (2<sup>nd</sup> Report)2017
- Author(s)
  武井良憲, 三村秀和
- Journal Title
  
  Journal of the Japan Society for Precision Engineering
  
  Volume: 83 Issue: 6 Pages: 585-592
- DOI
  10.2493/jjspe.83.585
- NAID
  130005689946
- ISSN
  0912-0289, 1882-675X
- Language
  Japanese
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H02041
[Journal Article] Three-dimensional Shape Measurement for X-ray Ellipsoidal Mirror2017
- Author(s)
  T. Kume, Y. Takei, S. Egawa, G. Yamaguchi, H. Motoyama, and H. Mimura,
- Journal Title
  
  Proceeding of SPIE
  
  Volume: 10385 Pages: 22-22
- DOI
  10.1117/12.2273666
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H02041
[Journal Article] 電鋳法による高精度表面転写プロセスの開発2017
- Author(s)
  三村秀和
- Journal Title
  
  電気加工学会誌
  
  Volume: 51（126） Pages: 147-151
- Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H02041
[Journal Article] Optical design of a sub-1-μm focusing system for soft x-ray free electron lasers2017
- Author(s)
  H. Motoyama, S. Owada, K. Tono, T. Koyama, H. Ohashi, M. Yabashi, and H. Mimura
- Journal Title
  
  Proceeding of SPIE
  
  Volume: 10386 Pages: 1038609-1038609
- DOI
  10.1117/12.2271282
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15H02041
[Journal Article] Development of an Ion Beam Sputter Deposition System for Producing Complex-Shaped X-ray Mirrors2016
- Author(s)
  H. Motoyama, M. Nagayama, and H. Mimura
- Journal Title
  
  Procedia CIRP
  
  Volume: 42 Pages: 512-515
- DOI
  10.1016/j.procir.2016.02.242
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-15H02041, KAKENHI-PROJECT-15J08622
[Journal Article] Development of internal stress measurement technique for Ni electroforming using Shack.Hartmann sensor2016
- Author(s)
  T. Kume, S. Egawa, and H. Mimura
- Journal Title
  
  International Journal of Electrical Machining
  
  Volume: 21 Issue: 0 Pages: 25-30
- DOI
  10.2526/ijem.21.25
- NAID
  130005395684
- ISSN
  1341-7908, 2188-5117
- Language
  English
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H02041
[Journal Article] Development of high-order harmonic focusing system based on ellipsoidal mirror2016
- Author(s)
  H. Motoyama, T. Sato, A. Iwasaki, S. Egawa, K. Yamanouchi, and H. Mimura
- Journal Title
  
  Review of Scientific Instruments
  
  Volume: 87 Issue: 5 Pages: 051803-051803
- DOI
  10.1063/1.4950735
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H02041, KAKENHI-PROJECT-15J08622
[Journal Article] Evaluation of figure accuracy of Wolter mirror fabricated by electroforming2016
- Author(s)
  S. Egawa, T. Kume, Y. Takeo, Y. Takei, H. Motoyama and H. Mimura
- Journal Title
  
  Proceeding of SPIE
  
  Volume: 9687 Pages: 968705-968705
- DOI
  10.1117/12.2243422
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H02041, KAKENHI-PROJECT-16J10126
[Journal Article] Influence of Residual Stress of Electrodeposited Layer on Shape Replication Accuracy in Ni Electroforming2016
- Author(s)
  T. kume, S. Egawa, G. Yamaguchi, H. Mimura
- Journal Title
  
  Procedia CIRP
  
  Volume: 42 Pages: 783-787
- DOI
  10.1016/j.procir.2016.02.319
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-15J08580, KAKENHI-PROJECT-15H02041
[Journal Article] Development of surface profiler for master mandrel of x-ray ellipsoidal mirror2016
- Author(s)
  Y. Takei, H. Mimura
- Journal Title
  
  Proceeding of SPIE
  
  Volume: 9962 Pages: 99620C-99620C
- DOI
  10.1117/12.2235314
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H02041
[Journal Article] 高精度電鋳法の開発と軟X線集光ミラーの作製2016
- Author(s)
  三村秀和
- Journal Title
  
  Electrochemistry
  
  Volume: 84(9) Pages: 721-725
- Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H02041
[Journal Article] 高精度回転楕円ミラーによる高強度EUV・軟X線ビーム形成2016
- Author(s)
  三村秀和
- Journal Title
  
  光アライアンス
  
  Volume: 27(2) Pages: 45-49
- NAID
  40020888126
- Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H02041
[Journal Article] ナノ精度表面製造法とX線集光ミラー2016
- Author(s)
  三村秀和
- Journal Title
  
  応用物理
  
  Volume: 85（11） Pages: 957-961
- NAID
  130007715294
- Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H02041
[Journal Article] Evaluation of surface figure error profile of ultra-precise ellipsoidal mirror for soft X-ray focusing2016
- Author(s)
  Y. Takeo, T. Saito, H. Mimura
- Journal Title
  
  Proceeding of SPIE
  
  Volume: 9588 Pages: 95880A-95880A
- DOI
  10.1117/12.2188824
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H02041
[Journal Article] Atomic inner-shell laser at 1.5-ångström wavelength pumped by an X-ray free-electron laser2015
- Author(s)
  H. Yoneda, Y. Inubushi, K. Nagamine, Y. Michine, H. Ohashi, H. Yumoto, K. Yamauchi, H. Mimura, H. Kitamura, T. Katayama, T. Ishikawa and M. Yabashi
- Journal Title
  
  Nature
  
  Volume: ５２４ Issue: 7566 Pages: 446-449
- DOI
  10.1038/nature14894
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25247093, KAKENHI-PROJECT-23226004
[Journal Article] Two-stage reflective optical system for achromatic 10 nm x-ray focusing2015
- Author(s)
  H. Motoyama and H. Mimura
- Journal Title
  
  J. Phys. B: At. Mol. Opt. Phys.
  
  Volume: 48 Issue: 24 Pages: 244002-244002
- DOI
  10.1088/0953-4075/48/24/244002
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15J08622, KAKENHI-PROJECT-15H02041
[Journal Article] Development of ellipsoidal focusing mirror for soft x-ray and extreme ultraviolet light2015
- Author(s)
  H. Mimura, Y. Takei, T. Saito, T. Kume, H. Motoyama, S. Egawa, Y. Takeo, T. Higashi,
- Journal Title
  
  Proceeding of SPIE
  
  Volume: 9588 Pages: 95880L-95880L
- DOI
  10.1117/12.2187455
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H02041
[Journal Article] X-ray two-photon absorption competing against single and sequential multiphoton processes2014
- Author(s)
  K. Tamasaku, E. Shigemasa, Y. Inubushi, T. Katayama, K. Sawada, H. Yumoto, H. Ohashi, H. Mimura, M. Yabashi, K. Yamauchi and T. Ishikawa
- Journal Title
  
  Nature Photonics
  
  Volume: 8 Issue: 4 Pages: 313-313
- DOI
  10.1038/nphoton.2014.10
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-22109005, KAKENHI-PROJECT-23360038, KAKENHI-PROJECT-23226004
[Journal Article] Saturable absorption of intense hard X-rays in iron2014
- Author(s)
  Hitoki Yoneda, Yuichi Inubushi, Makina Yabashi, Tetsuo Katayama, Tetsuya Ishikawa, Haruhiko Ohashi, Hirokatsu Yumoto, Kazuto Yamauchi, Hidekazu Mimura & Hikaru Kitamura
- Journal Title
  
  Nature Communications
  
  Volume: 5 Issue: 1 Pages: 5080-5080
- DOI
  10.1038/ncomms6080
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-25247093, KAKENHI-PROJECT-23226004
[Journal Article] Damage study of optical substrates using 1-um-focusing beam of hard X-ray free-electron laser2013
- Author(s)
  T. Koyama, H. Yumoto, Y. Senba, K. Tono, T. Sato, T. Togashi, Y. Inubushi, J. Kim, T. Kimura, S. Matsuyama, H. Mimura, M. Yabashi, K. Yamauchi, H. Ohashi, and T. Ishikawa
- Journal Title
  
  Journal of Physics: Conference Series
  
  Volume: 463 Pages: 012043-012043
- DOI
  10.1088/1742-6596/463/1/012043
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-23226004
[Journal Article] A Precision Grazing-incidence Angle Error Measurement of a Hard X-ray Condenser Mirror Using Single-grating Interferometry2013
- Author(s)
  R. Fukui, J. Kim, S. Matsuyama, H. Yumoto, Y. Inubushi, K. Tono, T. Koyama, T. Kimura, H. Mimura, H. Ohashi, M. Yabashi, T. Ishikawa, and K. Yamauchi
- Journal Title
  
  Synchrotron Radiation News
  
  Volume: 26 Issue: 5 Pages: 13-16
- DOI
  10.1080/08940886.2013.832585
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-13J00129, KAKENHI-PROJECT-23226004
[Journal Article] Investigation of ablation thresholds of optical materials using 1-μm-focusing beam at hard X-ray free electron laser2013
- Author(s)
  T. Koyama, H. Yumoto, Y. Senb a, K. Tono, T. Sato, T. Togashi, Y Inubushi, T. Katayama, J. Ki m, S. Matsuyama, H. Mimura, M. Yabashi, K. Yamauchi, H. Ohashi, and T. Ishikawa
- Journal Title
  
  Optics Express
  
  Volume: 21 Issue: 13 Pages: 15382-15388
- DOI
  10.1364/oe.21.015382
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-13J00129, KAKENHI-PROJECT-23226004
[Journal Article] Damage threshold investigation using grazing incidence irradiation by hard X-ray free electron laser2013
- Author(s)
  T. Koyama, H. Yumoto, K. Tono, T. Sato, T. Togashi, Y. Inubushi, T. Katayama, J. Kim, S. Mats uyama, H. Mimura, M. Yabashi, K. Yamauchi, and H. Ohashi
- Journal Title
  
  Proceedings of SPIE
  
  Volume: 8848 Pages: 88480T-88480T
- DOI
  10.1117/12.2025377
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-13J00129, KAKENHI-PROJECT-23226004
[Journal Article] One-dimensional sub-10-nm hard X-ray focusing using laterally graded multilayer mirror2011
- Author(s)
  H.Mimura, S.Handa, T.Kimura, H.Yumoto, D.Yamakawa, H.Yokoyama, S.Matsuyama, K.Inagaki, K.Yamamura, Y.Sano, K.Tamasaku, Y.Nishino, M.Yabashi,T.Ishikawa, K.Yamauchi
- Journal Title
  
  Nucl.Instrum.Meth.A 616
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] 放射光とナノ精度光学素子が拓く世界2010
- Author(s)
  H.Mimura, et al.
- Journal Title
  
  Proceedings of SPIE
  
  Volume: 7803
- NAID
  130000450912
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] X線ミラー用ナノ精度表面創成法の開発-形状修正加工の高分解能化とX線集光ミラーの適応2010
- Author(s)
  三村秀和, 他
- Journal Title
  
  精密工学会誌
  
  Volume: 76(3) Pages: 338-342
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Breaking the 10 nm barrier in hard-X-ray focusing2010
- Author(s)
  H.Mimura, S.Handa, T.Kimura, H.Yumoto, D.Yamakawa, H.Yokoyama, S.Matsuyama, K.Inagaki, K.Yamamura, Y.Sano, K.Tamasaku, Y.Nishino, M.Yabashi,T.Ishikawa, K.Yamauchi
- Journal Title
  
  Nature Physics 6
  
  Pages: 122-125
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Extended knife-edge method for characterizing Sub-10-nm X-ray beams2010
- Author(s)
  S.Handa, H.Mimura, H.Yumoto, T.Kimura, S.Matsuyama, Y.Sano, K.Tamasaku, Y.Nishino, M.Yabashi , T.Ishikawa, K.Yamauchi
- Journal Title
  
  Nucl.Instrum.Meth. 616
  
  Pages: 246-250
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Breaking the 10 nanometer barrier in hard X-ray focusing2010
- Author(s)
  H.Mimura, et al.
- Journal Title
  
  Nature Physics
  
  Volume: 6(2) Pages: 122-125
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Stitching angle measurable microscopic interferometer : surface-figure metrology tool for hard X-ray nanofocusing mirrors with large curvature2010
- Author(s)
  H.Yumoto, H.Mimura, S.Handa, T.Kimura, S.Matsuyama, Y.Sano, H.Ohashi, K.Yamauchi, T.Ishikawa
- Journal Title
  
  Nucl.Instrum.Meth. 616
  
  Pages: 203-206
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] X線ナノ集光技術の現状とその利用に向けた将来展望「ミラー光学素子の開発およびその応用の現状と将来展望」2010
- Author(s)
  三村秀和、松山智至
- Journal Title
  
  放射光
  
  Volume: 23(3) Pages: 173-179
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Wavefield characterization of nearly diffraction-limited focused hard x-ray beam with size less than 10 nm2010
- Author(s)
  T.Kimura, H.Mimura, S.Handa, H.Yumoto, H.Yokoyam, S.Imai, S.Matsuyama, Y.Sano, K.Tamasaku, Y.Kohmura, Y.Nishino, M.Yabashi, T.Ishikawa, K.Yamauchi
- Journal Title
  
  Rev.Sci.Instrum. 81
  
  Pages: 123704-123704
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] 放射光とナノ精度光学素子が拓く世界2010
- Author(s)
  三村秀和
- Journal Title
  
  学術の動向
  
  Volume: 15(8) Pages: 42-46
- NAID
  130000450912
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Trace element mapping of a single cell using a hard x-ray nanobeam focused by a Kirkpatrick-Baez mirror system2009
- Author(s)
  S. Matsuyama, M. Shimura, H. Mimura, M. Fujii, H. Yumoto, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa and K. Yamauchi
- Journal Title
  
  X-ray Spectrometry 38
  
  Pages: 89-94
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Direct determination of the wave field of an x-ray nanobeam2008
- Author(s)
  H.Mimura, H.Yumoto, S.Matsuyama, S.Handa, T.Kimura, Y.Sano, M.Yabashi, Y.Nishino, K.Tamasaku, T.Ishikawa, K.Yamauchi
- Journal Title
  
  Phys.Rev.A 77
  
  Pages: 15812-15812
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Focusing mirror for x-ray free-electron lasers2008
- Author(s)
  H.Mimura, S.Morita, T.Kimura, D.Yamakawa, W.Lin, Y.Uehara, S.Matsuyama, H.Yumoto, H.Ohashi, K.Tamasaku, Y.Nishino, M.Yabashi, T.Ishikawa, H.Ohmori, K.Yamauchi
- Journal Title
  
  Rev.Sci.Instum. 79
  
  Pages: 83104-83104
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Direct determination of the wave field of a X-ray nanobeam2008
- Author(s)
  H., Mimura, et. al.
- Journal Title
  
  Physical Review A 77
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Focusing mirror for x-ray free-electron lasers2008
- Author(s)
  H. Mimura, et.al.
- Journal Title
  
  Review of Scientific Instruments 79
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Highly accurate differential deposition for X-ray reflective optics2008
- Author(s)
  S. Handa, H. Mimura, H. Yumoto, T. Kimura, S. Matsuyama, Y. Sano and K. Yamauchi
- Journal Title
  
  Surface and Interface Analysis 40
  
  Pages: 1019-1022
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Fabrication of a 400-mm-long mirror for focusing x-ray free-electron lasers to sub-100 nm2008
- Author(s)
  H. Mimura, et.al.
- Journal Title
  
  Proceeding of SPIE 7077
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Direct Determination of the Wave Field of an X-ray Nanobeam2008
- Author(s)
  H.Mimura, H. Yumoto, S. Matsuyama, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, K. Yamauchi
- Journal Title
  
  Physical Review A 77(1)
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Reflective optics for sub-10nm hard X-ray focusing2007
- Author(s)
  H., Mimura, et. al.
- Journal Title
  
  Proceedings of SPIE (The international Society for Opitcal Engineering) 6704
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Efficient focusing of hard x rays to 25 nm by a total reflection mirror2007
- Author(s)
  H.Mimura et al.
- Journal Title
  
  Applied Physics Letters 90
  
  Pages: 31903-31903
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Efficient focusing of hard x rays to 25 nm by a total reflection mirror2007
- Author(s)
  H.Mimura, H.Yumoto, S.Matsuyama, Y.Sano, K.Yamamura, Y.Mori, M.Yabashi, Y.Nishino, K.Tamasaku, T.Ishikawa, K.Yamauchi
- Journal Title
  
  Appl.Phys.Lett. vol.90
  
  Pages: 51903-51903
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Waveoptical simulation for designing and evaluating hard X-ray nanofocusing mirror2006
- Author(s)
  H.Mimura et al.
- Journal Title
  
  Proceedings of SPIE (The international Society for Optical Engineering) 6317
  
  Pages: 631718-631718
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] At-wavelength figure metrology of hard x-ray focusing mirrors2006
- Author(s)
  H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi
- Journal Title
  
  Review of Scientific Instruments 77
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18002009
[Journal Article] Surface figuring and measurement methods with spatial resolution close to 0.1 mm for x-ray mirror fabrication2005
- Author(s)
  H.Mimura
- Journal Title
  
  Proceeding of SPIE, Int.Soc.Opt.Eng 5921
- Data Source
  KAKENHI-PROJECT-15106003
[Journal Article] Relative angle determinable stitching interferometry for hard X-ray reflective optics2005
- Author(s)
  H.Mimura
- Journal Title
  
  Review of Scientific Instruments 発表予定
- Data Source
  KAKENHI-PROJECT-15106003
[Journal Article] Hard X-ray Diffraction-Limited Nanofocusing with Kirkpatrick-Baez Mirrors2005
- Author(s)
  H.Mimura
- Journal Title
  
  Japanese Journal of Applied Physics Express Letter 44(18)
- NAID
  10015726316
- Data Source
  KAKENHI-PROJECT-15106003
[Journal Article] Surface figuring and measurement methods with spatial resolution close to 0.1 mm for x-ray mirror fabrication2005
- Author(s)
  H.Mimura
- Journal Title
  
  Proceeding of SPIE, Int.Soc.Opt.Eng 5921
- Data Source
  KAKENHI-PROJECT-16760093
[Journal Article] Image quality improvement in hard X-ray projection microscope using total reflection mirror optics2004
- Author(s)
  H.Mimura
- Journal Title
  
  Journal of Synchrotron Radiation 11
  
  Pages: 343-346
- Data Source
  KAKENHI-PROJECT-15106003
[Journal Article] Effect of Focusing flow on Stationary Spot Machining Properties in Elastic Emission Machining
- Author(s)
  Y. Takei, H. Mimura
- Journal Title
  
  Nanoscale Research Letters
  
  Volume: (to be published)
- Data Source
  KAKENHI-PROJECT-22686017
[Journal Article] Development of Surface Profile Measurement Method for Ellisoidal X-ray Mirror using Phase retrieval
- Author(s)
  T. Saito, Y. Yoshinori, H. Mimura
- Journal Title
  
  Proc. SPIE
  
  Volume: 8501 Pages: 850103-850103
- Data Source
  KAKENHI-PROJECT-23656106
[Journal Article] Development of Surface Profile Measurement Method for Ellisoidal X-ray Mirror using Phase retrieval
- Author(s)
  T. Saito, Y. Yoshinori, H. Mimura
- Journal Title
  
  Proc. SPIE
  
  Volume: 8501 Pages: 850103-850103
- Data Source
  KAKENHI-PROJECT-22686017
[Patent] 精密電鋳法のための気泡除去方法2017
- Inventor(s)
  山口豪太、三村秀和
- Industrial Property Rights Holder
  東京大学
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2017-096795
- Filing Date
  2017
- Data Source
  KAKENHI-PROJECT-15H02041
[Patent] 精密電鋳のための気泡除去方法2016
- Inventor(s)
  久米健大、三村秀和
- Industrial Property Rights Holder
  久米健大、三村秀和
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2016-113951
- Filing Date
  2016-06-07
- Data Source
  KAKENHI-PROJECT-15H02041
[Patent] 高NA集光素子の出口波面計測方法及び出口波面計測システム2015
- Inventor(s)
  竹尾陽子、三村秀和
- Industrial Property Rights Holder
  東京大学
- Industrial Property Rights Type
  特許
- Industrial Property Number
  2015-158575
- Filing Date
  2015-08-10
- Data Source
  KAKENHI-PROJECT-15H02041
[Patent] 電鋳法における形状転写導電層の形成方法2007
- Inventor(s)
  三村秀和
- Industrial Property Rights Holder
  大阪大学・大阪TLO共願
- Industrial Property Number
  2007-260639
- Filing Date
  2007-10-04
- Data Source
  KAKENHI-PROJECT-18760100
[Patent] 超精密形状測定方法2006
- Inventor(s)
  山内和人, 三村秀和
- Industrial Property Rights Holder
  (株)ジェイック, 山内和人
- Industrial Property Number
  2006-042547
- Filing Date
  2006-02-20
- Data Source
  KAKENHI-PROJECT-15106003
[Patent] X線ミラーの高精度姿勢制御法2006
- Inventor(s)
  山内和人, 三村秀和, 岡田浩巳
- Industrial Property Rights Holder
  大阪大学, (株)ジェイテツク
- Industrial Property Number
  2006-221714
- Filing Date
  2006-07-18
- Data Source
  KAKENHI-PROJECT-18002009
[Patent] 精密形状転写法2006
- Inventor(s)
  三村秀和, 山内和人, 岡田浩巳
- Industrial Property Rights Holder
  大阪大学, (株)ジェイテツク
- Filing Date
  2006-09-12
- Data Source
  KAKENHI-PROJECT-18760100
[Patent] X線波面計測法と形状可変ミラーによるX線集光法2006
- Inventor(s)
  山内和人, 三村秀和, 岡田浩巳
- Industrial Property Rights Holder
  大阪大学, (株)ジェイテツク
- Industrial Property Number
  2006-357566
- Filing Date
  2006-12-28
- Data Source
  KAKENHI-PROJECT-18002009
[Presentation] 高精度X線望遠鏡用電鋳ウォルターミラーの開発2024
- Author(s)
  毛利柊太郎，伊藤駿佑，本山央人，江川悟，郭建麗，山口豪太，久米健太，松澤雄介，高野秀和，香村芳樹，矢橋牧名，三村秀和
- Organizer
  第37回日本放射光学会年会・放射光科学合同シンポジウム
- Data Source
  KAKENHI-PROJECT-23H00156
[Presentation] 斜入射X線ミラー製造プロセスの開発2024
- Author(s)
  三村秀和
- Organizer
  理研シンポジウム：第11回「光量子工学研究」ー次世代の光量子工学に向けてー
- Invited
- Data Source
  KAKENHI-PROJECT-23H00156
[Presentation] 超精密加工が拓いたX線光学、高速X線撮像が拓く精密加工学ー原子レベル超精密加工法とX線による加工現象解析ー2023
- Author(s)
  三村秀和
- Organizer
  第10回板橋オプトフォーラム
- Invited
- Data Source
  KAKENHI-PROJECT-23H00156
[Presentation] Development of an inner surface profile measurement system for precise electroformed Wolter mirrors for X-ray telescopes2023
- Author(s)
  S. Ito, A. Ito, S. Mohri, G. Yamaguchi, H. Mimura
- Organizer
  SPIE Optical Engineering + Applications
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23H00156
[Presentation] 細穴放電加工の放射光高速X線撮像による解析2023
- Author(s)
  工藤悠佑，山本祥大，内田大悟，山口豪太, 三村秀和
- Organizer
  2023年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19H00736
[Presentation] 軟X線から硬X線領域にわたる放射光ミラーに関する研究開発2023
- Author(s)
  三村秀和
- Organizer
  第36回日本放射光学会年会・放射光科学合同シンポジウム
- Invited
- Data Source
  KAKENHI-PROJECT-19H00736
[Presentation] 高精度X線望遠鏡用電鋳ウォルターミラーの開発 ―内面形状計測システムの開発―2023
- Author(s)
  伊藤駿佑，伊藤旺成，毛利柊太郎，山口豪太, 三村秀和
- Organizer
  2023年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19H00736
[Presentation] 筒形Wolterミラーを用いた軟X線顕微イメージング技術の開発2023
- Author(s)
  竹尾陽子、木村隆志、三村秀和
- Organizer
  第36回日本放射光学会年会・放射光科学合同シンポジウム
- Invited
- Data Source
  KAKENHI-PROJECT-20H04451
[Presentation] 回転体ミラーと自由曲面X線ミラー2023
- Author(s)
  三村秀和
- Organizer
  第36回日本放射光学会年会・放射光科学合同シンポジウム
- Invited
- Data Source
  KAKENHI-PROJECT-19H00736
[Presentation] 高精度X線望遠鏡用電鋳ウォルターミラーの開発 ―内面成膜システムの開発―2023
- Author(s)
  毛利柊太郎，伊藤旺成，伊藤駿佑，山口豪太, 三村秀和
- Organizer
  2023年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19H00736
[Presentation] Development of deposition system for the inner surface of Wolter mirror for x-ray telescopes2023
- Author(s)
  S. Mohri, A. Ito, S. Ito, G. Yamaguchi, H. Mimura
- Organizer
  SPIE Optical Engineering + Applications
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23H00156
[Presentation] “Design of soft x-ray fluorescence microscopy beyond 100-nm spatial resolution with ultrashort Kirkpatrick-Baez mirror2022
- Author(s)
  T. Shimamura, Y. Takeo, F. Moriya, T. Kimura, M. Shimura, Y. Senba, H. Kishimoto, H. Ohashi, K. Shimba, Y. Jimbo, and H. Mimura
- Organizer
  SPIE Optical Engineering + Applications, 2022
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K20444
[Presentation] Development of ultrashort Kirkpatrick-Baez mirrors for sub-50-nm achromatic soft-X-ray probes2022
- Author(s)
  T. Shimamura, Y. Takeo, T. Kimura, M. Shimura, Y. Senba, H. Kishimoto, H. Ohashi, and H. Mimura
- Organizer
  XOPT2022 (International Conference on X-ray Optics and Application)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K20444
[Presentation] High-speed imaging of metal drilling using 100-keV X-rays at SPring-82022
- Author(s)
  Hidekazu Mimura, Gota Yamaguchi, Keito Tamura, Hirokatsu Yumoto, Takahisa Koyam, Hidekazu Takano, Yujiro Hayashi, Makina Yabashi, Haruhiko Ohash
- Organizer
  SPIE Optical Engineering + Applications
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H00736
[Presentation] 超高分解能X線望遠鏡の実現に向けたNi電鋳ミラーの形状精度向上ーシミュレーションモデルの構築と遮蔽物配置による膜厚分布の均一化ー2022
- Author(s)
  伊藤旺成，伊藤駿祐，毛利柊太郎，山口豪太，三村秀和
- Organizer
  電気加工学会全国大会(2022)
- Data Source
  KAKENHI-PROJECT-19H00736
[Presentation] Design, fabrication, and testing of 2-mm-long X-ray mirrors for soft-X-ray nanofocusing2022
- Author(s)
  T. Shimamura, Y. Takeo, T. Kimura, Y. Senba, H. Kishimoto, H. Ohashi, and H. Mimura
- Organizer
  IWXM 2022 (7th International Workshop on Metrology for X-ray Optics, Mirror Design and Fabrication)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K20444
[Presentation] X 線望遠鏡用ウォルターミラーの高精度作製プロセスの開発 ―電鋳プロセスにおけるミラー長手方向膜厚分布の均一化―2022
- Author(s)
  伊藤旺成，伊藤駿佑，毛利柊太郎，山口豪太, 三村秀和
- Organizer
  2022年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19H00736
[Presentation] 細穴放電加工の放射光高速X線撮像による解析2022
- Author(s)
  工藤悠佑，山口豪太，山本祥大，内田大悟，三村秀和
- Organizer
  2022年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19H00736
[Presentation] 小径工具を用いた金属ミーリング加工の放射光高速X線撮像による解析2022
- Author(s)
  山本祥大，工藤悠佑，内田大悟，山口豪太，三村秀和
- Organizer
  2022年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-19H00736
[Presentation] Development of Soft X-ray Ptychography System with Electroformed Wolter Mirror2022
- Author(s)
  Takashi Kimura, Takeo Yoko, Kai Sakurai, Noboru Furuya, Satoru Egawa, Gota Yamaguchi, Yusuke Matsuzawa, Takehiro Kume, Hidekazu Mimura, Mari Shimura and Haruhiko Ohashi
- Organizer
  15th International Conference on X-ray Microscopy
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H04451
[Presentation] アクリル板と水のみによるガラス表面とシリコン表面の原子レベル平坦化2022
- Author(s)
  三村秀和
- Organizer
  第4回ナノ茶論
- Invited
- Data Source
  KAKENHI-PROJECT-19H00736
[Presentation] 軟X線による超小型Kirkpatrick-Baezミラーの特性評価2021
- Author(s)
  島村勇徳, 竹尾陽子, 木村隆志, 仙波泰徳, 岸本輝, 大橋治彦, 三村秀和
- Organizer
  第34回日本放射光学会年会・放射光科学合同シンポジウム, オンライン開催
- Data Source
  KAKENHI-PROJECT-20K20444
[Presentation] X線宇宙望遠鏡用高精度大型ウォルターミラーの開発2021
- Author(s)
  三村秀和
- Organizer
  2021年度日本表面真空学会学術講演会シンポジウム講演
- Invited
- Data Source
  KAKENHI-PROJECT-19H00736
[Presentation] Development of figure correction system for axisymmetric x-ray mirrors2021
- Author(s)
  S. Yokomae, Y. Takeo, T. Shimamura, Y. Matsuzawa, T. Kume, Y. Senba, H. Kishimoto, H. Ohashi and H. Mimura,
- Organizer
  SPIE Optical Engineering + Applications
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H00736
[Presentation] 高分解能なＸ線望遠鏡実現に向けたウォルターミラーの電鋳プロセスの高精度化―電流密度分布の有限要素解析を通じた最適なめっき条件の探求―2021
- Author(s)
  伊藤旺成, 山口豪太, 竹尾陽子, 三村秀和
- Organizer
  2021年度精密工学会春季大会, 2021年度精密工学会春季大会学術講演会, オンライン開催
- Data Source
  KAKENHI-PROJECT-19H00736
[Presentation] 差分成膜法による超小型X線集光ミラーの作製2021
- Author(s)
  島村勇徳, 竹尾陽子, 木村隆志, 仙波泰徳, 岸本輝, 大橋治彦, 三村秀和
- Organizer
  2021年度精密工学会春季大会学術講演会, オンライン開催
- Data Source
  KAKENHI-PROJECT-20K20444
[Presentation] 超小型 KB ミラーを用いた軟 X 線 sub 50 nm 集光システムの開発2021
- Author(s)
  島村勇徳, 竹尾陽子, 木村隆志, 仙波泰徳, 岸本煇, 大橋治彦, 三村秀和
- Organizer
  2021年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-20K20444
[Presentation] 回転体形状を有する光学素子のX線CT による高精度形状評価法2021
- Author(s)
  清水冴月, 三村秀和
- Organizer
  第88回精密工学会現物融合型エンジニアリング専門委員会
- Data Source
  KAKENHI-PROJECT-19H00736
[Presentation] アクリル定盤と水によるガラス表面の平坦化－平坦性と除去レート向上の試み―2021
- Author(s)
  郭建麗，松澤雄介，三村秀和
- Organizer
  2021年度精密工学会春季大会，2021年度精密工学会春季大会学術講演会，オンライン開催
- Data Source
  KAKENHI-PROJECT-19H00736
[Presentation] 超小型KBミラーを用いた軟X線sub 50 nm集光システムの開発2021
- Author(s)
  島村勇徳、竹尾陽子、木村隆志、仙波泰徳、岸本輝、大橋治彦、三村秀和
- Organizer
  2021年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-20H04451
[Presentation] Development of precise electroformed Wolter mirror for X-ray astronomy2021
- Author(s)
  G. Yamaguchi, T. Kume, Y. Takeo, Y. Matsuzawa, K. Hiraguri, Y. Imamura, H. Miyashita, K. Tamura, Y. Takehara, A. Takigawa, T. Kanoh, K. Tachibana, I. Mitsuishi, H. Hashizume, H. Mimura
- Organizer
  SPIE Optical Engineering + Applications
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H00736
[Presentation] 銅電鋳製回転楕円ミラーによる軟X線FELのサブミクロン集光2021
- Author(s)
  山口豪太, 本山央人, 大和田成起, 久保田雄也, 江川悟, 竹尾陽子, 矢橋牧名, 三村秀和
- Organizer
  第34回日本放射光学会年会・放射光科学合同シンポジウム, オンライン開催
- Data Source
  KAKENHI-PROJECT-19H00736
[Presentation] 軟Ｘ線用集光ミラーの開発と大学研究の事業化の一例2020
- Author(s)
  三村秀和
- Organizer
  強光子場科学研究懇談会
- Invited
- Data Source
  KAKENHI-PROJECT-19H00736
[Presentation] Development of shape measurement system for high precision Wolter mandrel2020
- Author(s)
  Takehiro Kume, Hirokazu Hashizume, Kentarou Hiraguri, Yusuke Matsuzawa, Yoichi Imamura, Hiroaki Miyashita, Takahiro Saito, Gota Yamaguchi, Yoko Takeo, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, Hidekazu Mimura
- Organizer
  S Advances in Metrology for X-Ray and EUV Optics IX, Optical Engineering + Applications, SPIE Optics + Photonics 2020 Digital Forum, Online Only
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H00736
[Presentation] X線自由電子レーザーとマイクロ流路デバイスを用いた液中試料観察法の開発2020
- Author(s)
  松本豊, 竹尾陽子, 山口豪太, 横前俊也, 三村秀和, 江川悟, 湯本博勝, 小山貴久, 大橋治彦, 木村隆志
- Organizer
  第34回日本放射光学会年会・放射光科学合同シンポジウム
- Data Source
  KAKENHI-PROJECT-20H04451
[Presentation] X線自由電子レーザーを用いたイメージングとデータ解析の高効率化2020
- Author(s)
  松本豊, 山口豪太, 横前俊也, 三村秀和, 竹尾陽子, 江川悟, 湯本博勝, 小山貴久, 大橋治彦, 木村隆志
- Organizer
  精密工学会2020年度秋季大会
- Data Source
  KAKENHI-PROJECT-20H04451
[Presentation] Development of ultra-short Kirkpatrick-Baez mirror system for nano-focusing of soft X-rays2020
- Author(s)
  Takenori Shimamura, Yoko Takeo, Takashi Kimura, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, and Hidekazu Mimura
- Organizer
  XOPT2-01, XOPT2020 (International Conference on X-ray Optics and Application), OPIC2020 (OPTICS & PHOTONICS International Congress 2020), Online Only
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K20444
[Presentation] Development of precise electroformed Wolter mirror for X-ray astronomy2020
- Author(s)
  Gota Yamaguchi, Takehiro Kume, Yoko Takeo, Yusuke Matsuzawa, Kentaro Hiraguri, Yoichi Imamura, Hiroaki Miyashita, Keisuke Tamura, Yusuke Takehara, Ayumu Takigawa, Tetsuo Kanoh, Kenji Tachibana, Ikuyuki Mitsuishi, Hirokazu Hashizume, Hidekazu Mimura
- Organizer
  Advances in Metrology for X-Ray and EUV Optics IX,Optical Engineering + Applications, SPIE Optics + Photonics 2020 Digital Forum, Online Only
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H00736
[Presentation] Advanced fabrication technologies for ultraprecise replicated mirrors for x-ray telescopes2020
- Author(s)
  Hidekazu Mimura, Gota Yamaguchi, Takehiro Kume, Yoko Takeo, Akinari Ito, Yusuke Matsuzawa, Takahiro Saito, Kentarou Hiraguri, Yusuke Takehara, Ayumu Takigawa, Keisuke Tamura, Tetsuo Kanoh, Kenji Tachibana, Hirokazu Hashizume, Ikuyuki Mitsuishi
- Organizer
  SPIE Astronomical Telescopes + Instrumentation, Online Only
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H00736
[Presentation] Design of two-stage soft-X-ray nano-focusing system with a ring-focusing mirror and quasi-Wolter mirror2020
- Author(s)
  Yoko Takeo, Hiroto Motoyama, Takenori Shimamura, Takashi Kimura, Takehiro Kume, Yusuke Matsuzawa, Takahiro Saito, Yoichi Imamura, Hiroaki Miyashita, Kentarou Hiraguri, Hirokazu Hashizume, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, Hidekazu Mimura
- Organizer
  Advances in Metrology for X-Ray and EUV Optics IX, Optical Engineering + Applications, SPIE Optics + Photonics 2020 Digital Forum, Online Only
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H00736
[Presentation] Design of ultrashort Kirkpatrick-Baez mirror for soft x-ray nanofocusing2020
- Author(s)
  Takenori Shimamura, Yoko Takeo, Takashi Kimura, Hirokazu Hashizume, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, and Hidekazu Mimura
- Organizer
  Advances in Metrology for X-Ray and EUV Optics IX,Optical Engineering + Applications, SPIE Optics + Photonics 2020 Digital Forum, Online Only
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K20444
[Presentation] Two-stage reflective focusing system for soft X-rays at BL25SU of SPring-82020
- Author(s)
  Yoko Takeo, Hiroto Motoyama, Takenori Shimamura, Takashi Kimura , Takehiro Kume, Yusuke Matsuzawa, Takahiro Saito, Yoichi Imamura , Hiroaki Miyashita, Kentaro Hiraguri, Hirokazu Hashizume, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, and Hidekazu Mimura
- Organizer
  XOPT2-02, XOPT2020 (International Conference on X-ray Optics and Application), OPIC2020 (OPTICS & PHOTONICS International Congress 2020), Online Only
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H00736
[Presentation] 回転楕円ミラーによる高NA集光ビームを用いた軟X線タイコグラフィ計測2019
- Author(s)
  竹尾陽子、鈴木明大、仙波康徳、岸本輝、大橋治彦、三村秀和
- Organizer
  第32回日本放射光学会年会放射光科学合同シンポジウム
- Data Source
  KAKENHI-PROJECT-17K18821
[Presentation] Development of Small Kirkpatrick-Baez Mirror System for Nano-Focusing of X-Rays2019
- Author(s)
  T. Shimamura, H. Mimura
- Organizer
  XOPT2019 (International Conference on X-ray Optics and Application)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K20444
[Presentation] Fabrication and testing of Wolter type-I mirrors for femtosecond soft x-ray imaging2019
- Author(s)
  . S. Egawa, H. Motoyama, G. Yamaguchi, S. Owada, Y. Kubota, Y. Matsuzawa, T. Kume, M. Yabashi, H. Mimura
- Organizer
  SPIE Optics + Photonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H00736
[Presentation] 軟X線タイコグラフィを用いた回転楕円ミラーの形状評価2019
- Author(s)
  竹尾陽子，鈴木明大，仙波泰徳，岸本輝，大橋治彦，三村秀和
- Organizer
  2019年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Fabrication of ultra-small mirrors for soft-X-ray nano-focusing by differential deposition2019
- Author(s)
  T. Shimamura, H. Mimura,
- Organizer
  The 8th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K20444
[Presentation] 軟X線タイコグラフィを用いた回転楕円ミラーの形状評価2019
- Author(s)
  竹尾陽子，鈴木明大，仙波泰徳，岸本輝，大橋治彦，三村秀和
- Organizer
  2019年度精密工学会秋季大会学術講演会
- Data Source
  KAKENHI-PROJECT-17K18821
[Presentation] 回転楕円ミラーによるナノ集光ビームを用いた軟X線タイコグラフィ顕微鏡の開発2018
- Author(s)
  竹尾陽子，鈴木明大，仙波泰徳，岸本輝，大橋治彦，三村秀和
- Organizer
  日本光学会年次学術講演会
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 軟X線集光用回転楕円ミラーの高精度化 -直接的形状修正法の開発と実証-2018
- Author(s)
  横前俊也，本山央人，三村秀和
- Organizer
  第31回日本放射光学会年会・放射光科学合同シンポジウム
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 回転楕円ミラーを用いた軟X線自由電子レーザー集光システムの開発2018
- Author(s)
  本山央人，大和田成起，久米健大，山口豪太，犬伏雄一，登野健介，小山貴久，江川悟，大橋治彦，矢橋牧名，三村秀和
- Organizer
  第31回日本放射光学会年会・放射光科学合同シンポジウム
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 回転楕円軟X線ミラー内面形状修正法の開発 -ミラー内面修正性能の評価-2018
- Author(s)
  横前俊也，本山央人，三村秀和
- Organizer
  2018年精密工学会春季大会
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Fabrication of precise ellipsoidal mirrors for soft x-ray nanofocusing,2018
- Author(s)
  Hidekazu Mimura
- Organizer
  International Workshop on X-ray Optics and Application (IWXM2018)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K18821
[Presentation] 精密銅電鋳法の転写精度に及ぼす電析条件の影響，2018年度精密工学会春季大会学術講演会2018
- Author(s)
  山口豪太，久米健大，三村秀和
- Organizer
  2018年度精密工学会春季大会
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Fabrication of Ellipsoidal Mirror by Cu Electroforming2017
- Author(s)
  G. Yamaguchi, T. Kume, H. Mimura
- Organizer
  International Conference on X-ray Optics and Applications 2017
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 高精度ミラーを用いた軟X線のナノ集光2017
- Author(s)
  三村秀和
- Organizer
  物性研究所短期研究会「新世代光源で切り拓く物質科学と生命科学の融合領域」
- Place of Presentation
  東京大学
- Year and Date
  2017-03-08
- Invited
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Development of EUV focusing system based on ellipsoidal mirror2017
- Author(s)
  H. Motoyama, and H. Mimura
- Organizer
  2017 SPIE Optics + Photonics
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Fabrication process of precise mandrel for Wolte mirror2017
- Author(s)
  S. Egawa, Y. Takei, Y. Matsuzawa, H. Motoyama, T. Kume, Y. Takeo and H. Mimura
- Organizer
  The 24th Congress of the International Commission for Optics (ICO-24)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 回転楕円ミラー用マンドレルの3次元高精度形状計測法の開発2017
- Author(s)
  久米健大、武井良憲、三村秀和
- Organizer
  2017年度精密工学会春季大会学術講演会
- Place of Presentation
  慶應義塾大学
- Year and Date
  2017-03-13
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Development of differential deposition method for inner surfaces of ellipsoidal x-ray mirrors2017
- Author(s)
  S. Yokomae, H. Motoyama, and H. Mimura
- Organizer
  7th International Conference of Asian Society for Precision Engineering and Nanotechnology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Replication Accuracy of Electroforming Process for X-ray Ellipsoidal Mirror2017
- Author(s)
  T. Kume, Y. Takei, S. Egawa, G. Yamaguchi, H. Motoyama, and H. Mimura
- Organizer
  International Conference on X-ray Optics and Application 2017 (XOPT'2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Focusing EUV high-order harmonics at the diffraction limit2017
- Author(s)
  H. Motoyama, A. Iwasaki, T. Sato, H. Mimura, and K. Yamanouchi
- Organizer
  14th International conference on multiphoton processes
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 回転楕円ミラー評価のための高精度波面計測装置の開発2017
- Author(s)
  齋藤貴宏，竹尾陽子，江川悟，三村秀和
- Organizer
  2017年度精密工学会春季大会
- Place of Presentation
  慶応義塾大学
- Year and Date
  2017-03-13
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 高分解能スティッチング干渉計測における高精度つなぎ合わせ角度決定法2017
- Author(s)
  松澤雄介、三村秀和
- Organizer
  2017年度精密工学会春季大会学術講演会
- Place of Presentation
  慶應義塾大学
- Year and Date
  2017-03-13
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 回転楕円ミラーの作製のための高精度電鋳法の開発2017
- Author(s)
  山口豪太，久米健大，三村秀和
- Organizer
  第30回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  神戸芸術センター
- Year and Date
  2017-01-07
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] イオンビームスパッタ成膜による回転体ミラーの内面形状修正2017
- Author(s)
  横前俊也，本山央人，三村秀和
- Organizer
  2017年度精密工学会秋季大会
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Three-dimensional Shape Measurement for X-ray Ellipsoidal Mirror2017
- Author(s)
  T. Kume, Y. Takei, S. Egawa, G. Yamaguchi, H. Motoyama, and H. Mimura
- Organizer
  2017 SPIE Optics + Photonics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 回転体X線ミラー内面への追加成膜プロセスの開発2017
- Author(s)
  横前俊也，本山央人，三村秀和
- Organizer
  第14回X線結像光学シンポジウム
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 銅電析による高精度電鋳法の開発2017
- Author(s)
  山口豪太，久米健大，三村秀和
- Organizer
  2017年度精密工学会春季大会学術講演会
- Place of Presentation
  慶應義塾大学
- Year and Date
  2017-03-13
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Fabrication of Cu-electroformed Mirrors for X-ray Focusing2017
- Author(s)
  G. Yamaguchi, T. Kume, H. Mimura
- Organizer
  7th International Conference of Asian Society for Precision Engineering and Nanotechnology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Construction of a soft x-ray transmission microscope for evaluation of Wolter mirror optics2017
- Author(s)
  S. Egawa, H. Motoyama, A. Iwasaki, K. Yamanouchi, H. Mimura
- Organizer
  International Conference on X-ray Optics, Detectors, Sources, and their Applications 2017 (XOPT2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 回転楕円ミラーによる高次高調波集光システムの開発2017
- Author(s)
  本山央人、岩崎純史、佐藤堯洋、武井良憲、久米健大、江川悟、山内薫、三村秀和
- Organizer
  2017年度精密工学会春季大会学術講演会
- Place of Presentation
  慶應義塾大学
- Year and Date
  2017-03-13
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] ナノ精度コピーによる超高精度ミラー作製2017
- Author(s)
  三村秀和
- Organizer
  科学技術振興機構　新技術説明会
- Place of Presentation
  JST東京本部
- Year and Date
  2017-03-16
- Invited
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Focusing EUV light with ellipsoidal mirror2017
- Author(s)
  H. Motoyama, and H. Mimura
- Organizer
  International Conference on X-ray Optics, Detectors, Sources, and their Applications 2017 (XOPT2017)
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 回転楕円ミラーによる軟X線集光2017
- Author(s)
  三村秀和，本山央人，竹尾陽子，武井良憲, 松澤雄介, 久米健大, 仙波泰徳，岸本輝, 大橋治彦
- Organizer
  第30回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  神戸芸術センター
- Year and Date
  2017-01-07
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] ピンホール成膜による高分解能形状修正成膜法の開発2017
- Author(s)
  西岡勇人、本山央人、三村秀和
- Organizer
  2017年度精密工学会春季大会学術講演会
- Place of Presentation
  慶應義塾大学
- Year and Date
  2017-03-13
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 高精度X線ミラー製造のための超精密形状計測法2017
- Author(s)
  三村秀和
- Organizer
  H28年度長さクラブ講演会
- Place of Presentation
  機械振興会館
- Year and Date
  2017-02-24
- Invited
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 放射光ナノビーム開発の現状と展望2016
- Author(s)
  三村秀和
- Organizer
  東北放射光施設（SLiT-J）利用分野調査検討ワークショップ
- Place of Presentation
  東北大学
- Year and Date
  2016-01-19
- Invited
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Development of Pulse Electrodeposition for Removal of Hydrogen Bubbles Adhering to Cathode2016
- Author(s)
  T. Kume, G. Yamaguchi, and H. Mimura
- Organizer
  Electrochemistry 2016
- Place of Presentation
  Goslar, Germany,
- Year and Date
  2016-09-26
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 軟X線結像のためのウォルターミラーの開発2016
- Author(s)
  江川悟、竹尾陽子、本山央人、久米健大、武井良憲、三村秀和
- Organizer
  第29回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  東京大学
- Year and Date
  2016-01-09
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 複雑な形状を有するＸ線ミラー作製のための高分解能形状修正成膜法の開発2016
- Author(s)
  長山光、本山央人、三村秀和
- Organizer
  第29回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  東京大学
- Year and Date
  2016-01-09
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Current status of development of ultraprecise Wolter mirror for soft X-ray microscopy2016
- Author(s)
  S. Egawa, T. Kume, Y. Takei, Y. Takeo, H. Motoyama and H. Mimura
- Organizer
  International Conference on X-ray Optics, Detectors, Sources, and their Applications 2016 (XOPT2016)
- Place of Presentation
  Yokohama, Japan
- Year and Date
  2016-05-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Evaluation of degree of spatial coherence at a soft X-ray beamline of SPring-82016
- Author(s)
  Y. Takeo, H. Motoyama, Y. Senba, H. Kisimoto, H. Ohashi and H. Mimura
- Organizer
  International Conference on X-ray Optics, Detectors, Sources, and their Applications 2016 (XOPT2016)
- Place of Presentation
  Yokohama, Japan
- Year and Date
  2016-05-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 高精度回転楕円ミラーによる軟X線ナノ集光2016
- Author(s)
  三村秀和
- Organizer
  第76回ELIDセミナー
- Place of Presentation
  理化学研究所
- Year and Date
  2016-12-22
- Invited
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Wavefront measurement using ptychographic phase retrieval for evaluating figure and alignment errors of ellipsoidal mirror2016
- Author(s)
  Y. Takeo, T. Saito and H. Mimura
- Organizer
  International Conference on X-ray Optics, Detectors, Sources, and their Applications 2016 (XOPT2016)
- Place of Presentation
  Yokohama, Japan
- Year and Date
  2016-05-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Development of an Ion Beam Sputter Deposition System for Producing Complex-Shaped X-ray Mirrors2016
- Author(s)
  H. Motoyama, M. Nagayama, and H. Mimura
- Organizer
  18th CIRP Conference on Electro Physical and Chemical Machining (ISEM XVIII)
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2016-04-19
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Electroforming process specialized for fabrication of x-ray ellipsoidal mirror2016
- Author(s)
  T. Kume, S. Egawa, Y. Takeo, and H. Mimura
- Organizer
  International Conference on X-ray Optics, Detectors, Sources, and their Applications 2016 (XOPT2016)
- Place of Presentation
  Yokohama, Japan
- Year and Date
  2016-05-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Replication result of Wolter mirror for soft x-ray microscopy by electroforming2016
- Author(s)
  S. Egawa, T. Kume, Y. Takeo, Y. Takei, H. Motoyama and H. Mimura
- Organizer
  The 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies
- Place of Presentation
  Suzhou China
- Year and Date
  2016-04-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 高精度マンドレル作製と高精度形状転写による軟 X 線回転楕円ミラーの作製2016
- Author(s)
  武井良憲，久米健大，竹尾陽子，三村秀和
- Organizer
  第29回日本放射光学会年会・放射光科学シンポジウム
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Development of figure correction system for master mandrel of ellipsoidal x-ray mirror,2016
- Author(s)
  Y. Takei, T. Higashi and H. Mimura
- Organizer
  International Conference on X-ray Optics, Detectors, Sources, and their Applications 2016 (XOPT2016)
- Place of Presentation
  Yokohama, Japan
- Year and Date
  2016-05-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 回転楕円ミラーによる高次高調波集光システムの開発と自由電子レーザへの展開2016
- Author(s)
  本山央人、佐藤尭洋、岩崎純史、江川悟、山内薫、三村秀和
- Organizer
  第29回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  東京大学
- Year and Date
  2016-01-09
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Influence of Residual Stress of Electrodeposited Layer on Shape Replication Accuracy in Ni Electroforming2016
- Author(s)
  T. Kume, S. Egawa, G. Yamaguchi, and H. Mimura
- Organizer
  18th CIRP Conference on Electro Physical and Chemical Machining (ISEM XVIII)
- Place of Presentation
  Tokyo, Japan
- Year and Date
  2016-04-19
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] フレネルミラー光学系による軟X線ビームの空間コヒーレンス評価2016
- Author(s)
  竹尾陽子、本山央人、仙波泰徳、岸本輝、大橋治彦、三村秀和
- Organizer
  第29回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  東京大学
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] ピンホールマスクを用いた高分解能形状修正成膜法の開発　第 2 報-数値制御システムによる任意形状創成-2016
- Author(s)
  長山光、本山央人、三村秀和
- Organizer
  2016年精密工学会春季大会
- Place of Presentation
  東京理科大学
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 位相回復法を用いた転楕円ミラーの形状計測高精度化2016
- Author(s)
  竹尾陽子、齋藤貴宏、三村秀和
- Organizer
  2016年度精密工学会春季大会
- Place of Presentation
  東京理科大学
- Year and Date
  2016-03-15
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] X線集光用回転楕円ミラーマンドレル作製プロセスの開発2016
- Author(s)
  武井良憲，松澤雄介，三村秀和
- Organizer
  2016年度精密工学会秋季大会学術講演会
- Place of Presentation
  茨城大学
- Year and Date
  2016-09-06
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 極限集光光学システムによる超高強度X線パルスの実現2016
- Author(s)
  三村秀和
- Organizer
  レーザー学会学術講演会第３６回年次大会
- Place of Presentation
  名城大学
- Year and Date
  2016-01-09
- Invited
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Development of a surface profiler for mandrel of ellipsoidal soft x-ray focusing mirror2016
- Author(s)
  Y. Takei, H. Mimura
- Organizer
  2016 Optics + Photonics
- Place of Presentation
  San Diego USA
- Year and Date
  2016-08-28
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 常温Ni電鋳におけるパルス電析条件の検討2016
- Author(s)
  山口豪太，久米健大，三村秀和
- Organizer
  2016年度精密工学会秋季大会学術講演会
- Place of Presentation
  茨城大学
- Year and Date
  2016-09-06
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Current status of the development of two-staged focusing system for soft X-ray lasers2016
- Author(s)
  H. Motoyama, T. Sato, A. Iwasaki, Y. Takeo, Y. Senba, H. Ohashi, K. Yamanouchi, and H. Mimura
- Organizer
  International Conference on X-ray Optics, Detectors, Sources, and their Applications 2016 (XOPT2016)
- Place of Presentation
  Yokohama, Japan
- Year and Date
  2016-05-18
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Development of ellipsoidal focusing mirror for soft x-ray and extreme ultraviolet light2015
- Author(s)
  H. Mimura, Y. Takei, T. Saito, T. Kume, H. Motoyama, S. Egawa, Y. Takeo, T. Higashi
- Organizer
  2015 Optics + Photonics
- Place of Presentation
  San Diego USA
- Year and Date
  2015-08-09
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Evaluation of surface figure error profile of ultra-precise ellipsoidal mirror for soft X-ray focusing2015
- Author(s)
  Y. Takeo, T. Saito, H. Mimura
- Organizer
  2015 Optics + Photonics
- Place of Presentation
  San Diego USA
- Year and Date
  2015-08-09
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] High-order Harmonics Focusing with Ellipsoidal Mirror in Soft X-ray Region2015
- Author(s)
  H. Motoyama, T. Sato, A. Iwasaki, S. Egawa, K. Yamanouchi, and H. Mimura
- Organizer
  International Workshop on X-Ray Optics and Metrology (IWXM2015)
- Place of Presentation
  Berkeley, USA
- Year and Date
  2015-07-13
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Effect of Electrodeposition Conditions on Replication Accuracy of Electroforming2015
- Author(s)
  T. Kume, S. Egawa, and H. Mimura
- Organizer
  EUSPEN 15th International Conference
- Place of Presentation
  Leuven, Belgium
- Year and Date
  2015-07-01
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] イオンビームスパッタ成膜法による回転楕円ミラーの内面形状修正装置の開発2015
- Author(s)
  本山央人、長山光、三村秀和
- Organizer
  2015年精密工学会秋季大会
- Place of Presentation
  東北大学
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 回転楕円ミラー用マンドレルの形状計測装置の開発とその形状修正加工2015
- Author(s)
  武井良憲，東隆裕，三村秀和
- Organizer
  2015年度精密工学会秋季大会
- Place of Presentation
  東北大学
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 軟X線結像用ウォルターミラーの作製と形状精度の評価2015
- Author(s)
  江川悟、久米健大、竹尾陽子、斎藤貴宏、武井良憲、三村秀和
- Organizer
  2015年精密工学会秋季大会
- Place of Presentation
  東北大学
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 軟X線用回転体集光ミラー開発の現状と今後の展開2015
- Author(s)
  三村秀和
- Organizer
  X線ナノ集光技術研究会2015
- Place of Presentation
  東京大学
- Year and Date
  2015-10-31
- Invited
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] タイコグラフィ位相回復法による集光波面計測の高精度化2015
- Author(s)
  竹尾陽子、齋藤貴宏、三村秀和
- Organizer
  日本光学会年次学術講演会 Optics & Photonics Japan 2015
- Place of Presentation
  筑波大学東京キャンパス文京校舎
- Year and Date
  2015-10-28
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 軟X線結像用ウォルターミラーの形状評価と結像性能の予測2015
- Author(s)
  江川悟、久米健大、武井良憲、竹尾陽子、斎藤貴宏、三村秀和
- Organizer
  日本光学会年次学術講演会 Optics & Photonics Japan 2015
- Place of Presentation
  筑波大学東京キャンパス文京校舎
- Year and Date
  2015-10-28
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] Ptychographic phase retrieval method for characterizing ultra-precise ellipsoidal mirrors2015
- Author(s)
  Y. Takeo, T. Saito, H. Mimura
- Organizer
  SPIE Optifab 2015
- Place of Presentation
  Rochester USA
- Year and Date
  2015-10-12
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 位相回折格子を用いたX線自由電子レーザーナノビームの集光波面計測2015
- Author(s)
  西原明彦，松山智至，金章雨，長平良綾香，湯本博勝，三村秀和，小山貴久，登野健介，犬伏雄一，片山拓也，富樫格，矢代航，大橋治彦，百生敦，後藤俊治，矢橋牧名，石川哲也，山内和人
- Organizer
  第28回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  滋賀，立命館大学BKC
- Year and Date
  2015-01-10
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] 回転楕円ミラーによる軟X線集光システムの開発2015
- Author(s)
  本山央人、佐藤尭洋、岩崎純史、江川悟、山内薫、三村秀和
- Organizer
  日本光学会年次学術講演会 Optics & Photonics Japan 2015
- Place of Presentation
  筑波大学東京キャンパス文京校舎
- Year and Date
  2015-10-28
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] ピンホールマスクを用いた高分解能形状修正成膜手法の開発修正装置の開発2015
- Author(s)
  長山光、本山央人、三村秀和
- Organizer
  2015年精密工学会秋季大会
- Place of Presentation
  東北大学
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 電析膜の内部応力測定と電鋳法の形状転写性能評価2015
- Author(s)
  久米健大、江川悟、山口豪太、三村秀和
- Organizer
  2015年度精密工学会秋季大会
- Place of Presentation
  東北大学
- Year and Date
  2015-09-04
- Data Source
  KAKENHI-PROJECT-15H02041
[Presentation] 位相回折格子を用いたX線レーザナノビームの波面計測法の研究―フーリエ変換法と縞走査法の2つの解析法の検討―2014
- Author(s)
  西原明彦，松山智至，金章雨，長平良綾香，湯本博勝，三村秀和，小山貴久，登野健介，犬伏雄一，佐藤尭洋，片山拓也，富樫格，矢代航，佐野泰久，大橋治彦，百生敦，後藤俊治，矢橋牧名，石川哲也，山内和人
- Organizer
  精密工学会関西支部2014年度関西地方定期学術講演会
- Place of Presentation
  大阪，近畿大学東大阪キャンパス
- Year and Date
  2014-07-04
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] 位相回折格子を用いたX線レーザーナノビームの高精度波面計測2014
- Author(s)
  西原明彦，松山智至，金章雨，長平良綾香，湯本博勝，三村秀和，小山貴久，登野健介，犬伏雄一，佐藤尭洋，片山拓也，富樫格，矢代航，佐野泰久，大橋治彦，百生敦，後藤俊治，矢橋牧名，石川哲也，山内和人
- Organizer
  2014年度精密工学会秋季大会学術講演会
- Place of Presentation
  鳥取大学，鳥取
- Year and Date
  2014-09-16
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] 回転楕円X線集光ミラーのための位相回復による波面計測法の開発2013
- Author(s)
  斎藤貴宏、本山央人、三村秀和
- Organizer
  2013年精密工学会春季大会、2013年度精密工学会春季大会学術講演論文集
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23656106
[Presentation] 高精度電鋳法による回転楕円X線集光ミラーの作製2013
- Author(s)
  久米健大、武井良憲、三村秀和
- Organizer
  第2回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  名古屋大学、名古屋市
- Data Source
  KAKENHI-PROJECT-22686017
[Presentation] 回転楕円 X線集光ミラー用高精度マンドレル作製プロセスの開発2013
- Author(s)
  武井良憲、久米健大、三村秀和
- Organizer
  第26回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  名古屋大学、名古屋市
- Data Source
  KAKENHI-PROJECT-22686017
[Presentation] 回転楕円ミラーを用いたX線集光システムの光学設計2013
- Author(s)
  4. 本山央人、斎藤貴宏、三村秀和
- Organizer
  第26回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  名古屋大学、名古屋市
- Year and Date
  2013-01-12
- Data Source
  KAKENHI-PROJECT-22686017
[Presentation] 回転楕円X線集光ミラーの形状計測法の開発2013
- Author(s)
  斎藤貴宏、本山央人、三村秀和
- Organizer
  第26回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  名古屋大学、名古屋市
- Data Source
  KAKENHI-PROJECT-23656106
[Presentation] 回転楕円X線集光ミラーのための位相回復による波面計測法の開発2013
- Author(s)
  斎藤貴宏、本山央人、三村秀和
- Organizer
  2013年精密工学会春季大会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-22686017
[Presentation] 回転楕円線集光ミラーの形状計測法の開発2013
- Author(s)
  斎藤貴宏、本山央人、三村秀和
- Organizer
  第26回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  名古屋大学、名古屋市
- Data Source
  KAKENHI-PROJECT-22686017
[Presentation] 回転体X線ミラーのための高精度電鋳プロセスの開発2013
- Author(s)
  久米健大、武井良憲、三村秀和
- Organizer
  2013年精密工学会春季大会
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-22686017
[Presentation] 回転体型軟X線集光用高精度マンドレルの作製2012
- Author(s)
  武井良憲、斎藤貴宏、大森整、三村秀和
- Organizer
  第5回日本放射光学会年会、放射光科学シンポジウム
- Place of Presentation
  鳥栖市民文化会館、鳥栖市
- Data Source
  KAKENHI-PROJECT-22686017
[Presentation] 超高精度 X 線ミラーの開発と硬 X 線ナノビーム形成2012
- Author(s)
  三村秀和
- Organizer
  財団法人光産業技術振興協会平成 23 年度多元技術融合光プロセス研究会第5回研究プログラム「最先端計測・モニタリング技術の現状と将来展望」、産業技術総合研究所
- Place of Presentation
  臨海副都心センター別館
- Year and Date
  2012-02-16
- Data Source
  KAKENHI-PROJECT-22686017
[Presentation] スティッチング干渉計および位相回復法によるX線集光ミラーの超精密形状計測2012
- Author(s)
  三村秀和
- Organizer
  オプトメカトロニクス協会、光部品生産技術部会
- Year and Date
  2012-05-28
- Data Source
  KAKENHI-PROJECT-22686017
[Presentation] 位相回復法による回転体型軟X線集光ミラーの形状計測 -光学設計と理論的検討2012
- Author(s)
  齋藤貴宏、三村秀和
- Organizer
  2012年度精密工学会春季大会
- Place of Presentation
  首都大学東京南大沢キャンパス、八王子市
- Data Source
  KAKENHI-PROJECT-22686017
[Presentation] 位相回復法による回転体型軟X線集光ミラーの形状計測-光学設計と理論的検討-2012
- Author(s)
  齋藤貴宏、三村秀和
- Organizer
  2012年度精密工学会春季大会、2012年度精密工学会春季大会学術講演論文集
- Place of Presentation
  首都大学東京南大沢キャンパス、八王子市
- Data Source
  KAKENHI-PROJECT-23656106
[Presentation] Control of Shape of Stationary Spot Profile in Nozzle-type Elastic Emission Machining2012
- Author(s)
  Y. Takei, H. Mimura
- Organizer
  5th International Symposiumu on Atomically Controlled Fabrication Technology
- Place of Presentation
  Osaka, Japan
- Data Source
  KAKENHI-PROJECT-22686017
[Presentation] ナノ精度表面製造プロセスの構築と X 線ミラーへの展開2012
- Author(s)
  三村秀和
- Organizer
  第63回ELID研削研究会
- Year and Date
  2012-07-27
- Data Source
  KAKENHI-PROJECT-22686017
[Presentation] ノズル型EEM(Elastic Emission Machining) における加工特性の向上2012
- Author(s)
  武井良憲、三村秀和
- Organizer
  2011年度精密工学会春季学術講演会
- Place of Presentation
  首都大学東京南大沢キャンパス、八王子市
- Data Source
  KAKENHI-PROJECT-22686017
[Presentation] Feasibility study for measuring figure error profile of ellipsoidal mirror using phase retrieval with ptychography2012
- Author(s)
  T. Saito, H. Mimura
- Organizer
  5th International Symposiumu on Atomically Controlled Fabrication Technology
- Place of Presentation
  Osaka, Japan
- Year and Date
  2012-10-22
- Data Source
  KAKENHI-PROJECT-22686017
[Presentation] 位相回復法による回転体型軟X線集光ミラーの形状計測　-光学設計と理論的検討-2012
- Author(s)
  齋藤貴宏、三村秀和
- Organizer
  2011年度精密工学会春季大会
- Place of Presentation
  首都大東京
- Data Source
  KAKENHI-PROJECT-23656106
[Presentation] 回転楕円体型軟 X 線ミラーの光学設計と形状計測法の開発2012
- Author(s)
  斎藤貴宏、武井良憲、J. R. Fienup, 三村秀和
- Organizer
  第25回日本放射光学会年会、放射光科学シンポジウム
- Place of Presentation
  鳥栖市民文化会館、鳥栖市
- Data Source
  KAKENHI-PROJECT-22686017
[Presentation] Improvement of Spatial Resolution of Figuring in Elastic Emission Machining2012
- Author(s)
  Y. Takei, H. Mimura
- Organizer
  nanoMan2012 (The International State-of-the-art in nano Manufacturing)
- Place of Presentation
  Wako, Japan
- Data Source
  KAKENHI-PROJECT-22686017
[Presentation] 回転楕円体型軟X線ミラーの光学設計と形状計測法の開発2012
- Author(s)
  斎藤貴宏、武井良憲、J.R.Fienup,三村秀和
- Organizer
  第25回日本放射光学会年会、放射光科学シンポジウム
- Place of Presentation
  鳥栖市民文化会館、鳥栖市
- Data Source
  KAKENHI-PROJECT-23656106
[Presentation] Development of Surface Profile Measurement Method for Spheroidal X-ray Mirror usin phase retrieval2012
- Author(s)
  T. Saito, Y. Takei, H. Mimura
- Organizer
  2012 Optics + Photonics
- Place of Presentation
  San Diego, USA
- Data Source
  KAKENHI-PROJECT-23656106
[Presentation] Development of Surface Profile Measurement Method for Spheroidal X-ray Mirror usin phase retrieval2012
- Author(s)
  T. Saito, Y. Takei, H. Mimura
- Organizer
  2012 Optics + Photonics
- Place of Presentation
  San Diego, USA
- Data Source
  KAKENHI-PROJECT-22686017
[Presentation] ナノ精度表面製造プロセスの構築と次世代X線ミラーの開発2012
- Author(s)
  三村秀和
- Organizer
  静岡大学「第27回GRL浜松セミナ-」
- Place of Presentation
  静岡大学、浜松市
- Year and Date
  2012-05-14
- Data Source
  KAKENHI-PROJECT-22686017
[Presentation] 回転楕円体型軟X線ミラーの光学設計と形状計測法の開発2012
- Author(s)
  齋藤貴宏、武井良憲、J.R.Fienup、三村秀和
- Organizer
  第25回放射光学会年会
- Place of Presentation
  鳥栖市文化会館
- Data Source
  KAKENHI-PROJECT-23656106
[Presentation] Micro- and Nano- Focusing System for Japanese XFEL2011
- Author(s)
  H. Mimura
- Organizer
  SPIE Optics and Photonics Annual Conference　2011
- Place of Presentation
  サンディエゴ、アメリカ
- Invited
- Data Source
  KAKENHI-PROJECT-22686017
[Presentation] Development of Focusing System for X-ray Free Electron Laser2011
- Author(s)
  H. Mimura
- Organizer
  ASPEN2011
- Place of Presentation
  香港、中国
- Data Source
  KAKENHI-PROJECT-22686017
[Presentation] 多層膜ミラーによる硬X線Sub-10nm集光と顕微鏡への応用2011
- Author(s)
  三村秀和, 他
- Organizer
  2011年精密工学会春季学術講演会
- Place of Presentation
  東洋大学(東京都文京区)
- Year and Date
  2011-03-15
- Data Source
  KAKENHI-PROJECT-18002009
[Presentation] KBミラー集光X線を用いた高分解能走査型回折顕微法の開発2011
- Author(s)
  三村秀和
- Organizer
  第31回レーザー学会学術講演会
- Place of Presentation
  電気通信大学(東京都調布市)(Invited)
- Year and Date
  2011-01-09
- Data Source
  KAKENHI-PROJECT-18002009
[Presentation] An adaptive optical system for sub-10nm hard x-ray focusing2010
- Author(s)
  H.Mimura, et al.
- Organizer
  SPIE Optics+Photonics
- Place of Presentation
  San-Diego (USA)
- Year and Date
  2010-08-03
- Data Source
  KAKENHI-PROJECT-18002009
[Presentation] 多層膜ミラーによるSub-10nm硬X線集光システムの開発2010
- Author(s)
  三村秀和, 他
- Organizer
  2010年精密工学会秋季学術講演会
- Place of Presentation
  名古屋大学(名古屋市)
- Year and Date
  2010-09-28
- Data Source
  KAKENHI-PROJECT-18002009
[Presentation] Hard X-ray sub-10nm focusing by adaptive optical system2010
- Author(s)
  H.Mimura
- Organizer
  International workshop on Phase retrieval and Coherent Scattering (Coherence 2010)
- Place of Presentation
  Rostock-Warnemunde, (Germany)(Invited)
- Year and Date
  2010-07-09
- Data Source
  KAKENHI-PROJECT-18002009
[Presentation] Hard X-ray Nanofocusing with Adaptive Optical System2009
- Author(s)
  H.Mimura, et al.
- Organizer
  The 10th international conference on synchrotron radiation instrumentation
- Place of Presentation
  Melbourne, Australia
- Year and Date
  2009-09-28
- Data Source
  KAKENHI-PROJECT-18002009
[Presentation] Graded multilayer mirror for sub-10nm hard x-ray focusing2009
- Author(s)
  H.Mimura, et al.
- Organizer
  SPIE Optics Photonics 2009
- Place of Presentation
  San-Diego, USA
- Year and Date
  2009-08-03
- Data Source
  KAKENHI-PROJECT-18002009
[Presentation] ミラー光学素子による硬X線集光システムの開発2009
- Author(s)
  三村秀和
- Organizer
  日本放射光学会第1回若手研究会
- Place of Presentation
  大阪大学(大阪府吹田市)(Invited)
- Year and Date
  2009-08-11
- Data Source
  KAKENHI-PROJECT-18002009
[Presentation] Ray-tracing analysis of aberration of a depth-graded multilayer mirror2009
- Author(s)
  H.Mimura, et al.
- Organizer
  International workshop on X-ray mirror design, fabrication and metrology
- Place of Presentation
  大阪大学(大阪府吹田市)
- Year and Date
  2009-09-22
- Data Source
  KAKENHI-PROJECT-18002009
[Presentation] KBミラー光学系によるXFELナノ集光システムの開発-400mmX光ミラーの作製と評価-2008
- Author(s)
  三村秀和他
- Organizer
  第21回放射光科学合同シンポジウム
- Place of Presentation
  立命巻大学びわこ・くさつキャンパズ
- Year and Date
  2008-01-14
- Data Source
  KAKENHI-PROJECT-18002009
[Presentation] K. Bミラー光学系によるXFELナノ集光システムの開発-大型X集光ミラーの集光特性の評価-2008
- Author(s)
  三村秀和, 他
- Organizer
  2008年度精密工学会秋季大会学術講演会講演論文集425-426
- Place of Presentation
  東北大学
- Year and Date
  2008-09-17
- Data Source
  KAKENHI-PROJECT-18002009
[Presentation] Fabrication of 400mm long X-ray mirror by Electrolytic In-process Dressing Grinding and Elastic Emission Machining2008
- Author(s)
  H. Mimura
- Organizer
  The 6^<th> CHINA-JAPAN, International Conference on Ultraprecision Machining, Extended Abstract 22-26
- Place of Presentation
  Hunan Univ., Changsha, China
- Data Source
  KAKENHI-PROJECT-18002009
[Presentation] 放射光およびX線自由電子レーザー施殻における集光光学系の開発2008
- Author(s)
  三村秀和
- Organizer
  理研シンポジウム : 第壱回「先進ものづくり技術によるアナライザーキーコンポーネント開発基盤の構築状況
- Place of Presentation
  理化学研究所基幹研究所(埼玉和光市)
- Year and Date
  2008-07-23
- Data Source
  KAKENHI-PROJECT-18002009
[Presentation] Reflective optics for sub-10nm hard X-ray focusing2007
- Author(s)
  H., Mimura, et. al.
- Organizer
  SPIE Optics + Photonics 2007
- Place of Presentation
  USA, San-Diego,
- Year and Date
  2007-08-27
- Data Source
  KAKENHI-PROJECT-18002009
[Presentation] 超高精度X線ミラーの作製とその応用2007
- Author(s)
  三村秀和
- Organizer
  2007年第62回物理学会秋季大会
- Place of Presentation
  北海道大学
- Year and Date
  2007-09-23
- Data Source
  KAKENHI-PROJECT-18002009
[Presentation] Experimental determination of the wave field of X-ray nanobeam2007
- Author(s)
  H., Mimura, et. al.
- Organizer
  Intemational 21st Century COE Symposium on Atomistic Fabrication Technology
- Place of Presentation
  大阪大学
- Year and Date
  2007-10-15
- Data Source
  KAKENHI-PROJECT-18002009
[Presentation] Nanofocusing and single shot wavefront diagnosis of SACLA
- Author(s)
  K. Yamauchi, M. Yabashi, H. Mimura, H. Yumoto, T. Koyama, K. Tono, T. Togashi, Y. Inubushi, T. Sato, T. Katayama, S. Matsuyama, J. Kim, R. Fukui, Y. Sano, W. Yashiro, T. Ohmori, S. Goto, H. Ohashi, A. Momose, and T. Ishikawa
- Organizer
  SPIE Optics+Optelectronics
- Place of Presentation
  Clarion Congress Hotel, Prague, Czech
- Year and Date
  2013-04-17 – 2013-04-18
- Invited
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] Single-shot wavefront measurement of XFEL nanobeam
- Author(s)
  R. Fukui, J. Kim, S. Matsuyama, H. Yumoto, Y. Inubushi, K. Tono, T. Koyama, T. Kimura, H. Mimura, H. Ohashi, M. Yabashi, T. Ishikawa, and K. Yamauchi
- Organizer
  The 12th symposium on X-ray Imaging Optics
- Place of Presentation
  Osaka, Japan
- Year and Date
  2013-10-18 – 2013-10-20
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] X線回折格子を用いたX線自由電子レーザーのシングルショット波面計測
- Author(s)
  福井亮介，松山智至，金章雨，湯本博勝，三村秀和，小山貴久，百生敦，大橋治彦，矢橋牧名，石川哲也，山内和人
- Organizer
  2013年度精密工学会秋季大会学術講演
- Place of Presentation
  大阪，関西大学
- Year and Date
  2013-09-12 – 2013-09-14
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] チェス盤回折格子を用いたXFELナノビームのシングルショット波面計測
- Author(s)
  西原明彦，福井亮介，松山智至，金章雨，長平良綾香，湯本博勝，三村秀和，小山貴久，登野健介，犬伏雄一，佐藤尭洋，片山拓也，富樫格，矢代航，佐野泰久，大橋治彦，百生敦，後藤俊治，矢橋牧名，石川哲也，山内和人
- Organizer
  第27回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  大阪，中ノ島センター
- Year and Date
  2014-01-11 – 2014-01-13
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] スティッチング干渉計および位相回復法によるX線集光ミラーの超精密形状計測
- Author(s)
  三村秀和
- Organizer
  オプトメカトロニクス協会、光部品生産技術部会
- Place of Presentation
  機械振興会館、東京都
- Invited
- Data Source
  KAKENHI-PROJECT-22686017
[Presentation] 二次元位相回折格子を用いたXFELナノビームのシングルショット波面計測
- Author(s)
  西原明彦，福井亮介，松山智至，金章雨，長平良綾香，湯本博勝，三村秀和，小山貴久，登野健介，犬伏雄一，佐藤尭洋，片山拓也，富樫格，矢代航，佐野泰久，大橋治彦，百生敦，後藤俊治，矢橋牧名，石川哲也，山内和人
- Organizer
  2014年度精密工学会春季大会学術講演会
- Place of Presentation
  東京，東京大学
- Year and Date
  2014-03-18 – 2014-03-20
- Data Source
  KAKENHI-PROJECT-23226004
[Presentation] ナノ精度表面製造プロセスの構築とX線ミラーへの展開
- Author(s)
  三村秀和
- Organizer
  第63回ELID研究会
- Place of Presentation
  理化学研究所基幹研究所、埼玉県
- Invited
- Data Source
  KAKENHI-PROJECT-22686017
[Presentation] ナノ精度表面製造プロセスの構築と次世代X線ミラーの開発
- Author(s)
  三村秀和
- Organizer
  第27回GRL浜松セミナ－
- Place of Presentation
  静岡大学、静岡県
- Invited
- Data Source
  KAKENHI-PROJECT-22686017
[Presentation] 超高精度X線ミラーの開発と硬X線ナノビーム形成
- Author(s)
  三村秀和
- Organizer
  平成23年度多元技術融合光プロセス研究会
- Place of Presentation
  臨界副都心センター，東京都
- Invited
- Data Source
  KAKENHI-PROJECT-22686017

1. SANO Yasuhisa (40252598)

# of Collaborated Projects: 4 results

# of Collaborated Products: 16 results
2. YAMAUCHI Kazuto (10174575)

# of Collaborated Projects: 3 results

# of Collaborated Products: 21 results
3. YAMAMURA Kazuya (60240074)

# of Collaborated Projects: 3 results

# of Collaborated Products: 3 results
4. INAGAKI Kouji (50273579)

# of Collaborated Projects: 3 results

# of Collaborated Products: 2 results
5. MATSUYAMA Satoshi (10423196)

# of Collaborated Projects: 2 results

# of Collaborated Products: 22 results
6. Kimura Takashi (50531472)

# of Collaborated Projects: 2 results

# of Collaborated Products: 19 results
7. TAKAHASHI Yukio (00415217)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. KUNIEDA Masanori (90178012)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. TAMASAKU KENJI (30300883)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
10. OHASHI HARUHIKO (30443550)

# of Collaborated Projects: 1 results

# of Collaborated Products: 9 results
11. YUMOTO HIROKATSU (20423197)

# of Collaborated Projects: 1 results

# of Collaborated Products: 9 results
12. KOYAMA TAKAHISA (20468276)

# of Collaborated Projects: 1 results

# of Collaborated Products: 9 results
13. 森勇藏 (00029125)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. 中川桂一 (00737926)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
15. 本山央人 (00822636)

# of Collaborated Projects: 1 results

# of Collaborated Products: 8 results
16. 志村まり (90226267)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results
17. 三石郁之 (90725863)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
18. 江川悟 (90885469)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
19. SAWADA Kei

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
20. 北村光

# of Collaborated Projects: 0 results

# of Collaborated Products: 2 results
21. 米田仁紀

# of Collaborated Projects: 0 results

# of Collaborated Products: 2 results
22. 鈴木明大

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results

MIMURA HIDEKAZU 三村 秀和

MIMURA Hidekazu 三村 秀和

Research Projects

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高精度大型ウォルターミラーの開発とX線望遠鏡・X線顕微鏡への展開Principal Investigator

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Demonstration of X-ray single-shot microspectroscopic imaging

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Development of Ultra-Short Pulse X-ray Imaging Method through High-Precision Wolter Mirror FabricationPrincipal Investigator

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Development of 1 nm X-ray focusing systemPrincipal Investigator

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Development of highly accurate figure measurement method using high order harmonic generation sourcePrincipal Investigator

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Development of advanced soft x-ray focusing system with a symmetric rotational mirrorPrincipal Investigator

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Research on Ultra-short Pulse Electrochemical Machining using Electrostatic Induction Feeding Method

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Development of surface profile measurement method for ellipsoidal mirrorsPrincipal Investigator

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Adaptively controlled multistage nanofocusing systemfor x-ray free electron laser

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In-situ surface figure correction system for soft X-ray mirrorsPrincipal Investigator

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X線自由電子レーザー用ビームスプリッターの開発Principal Investigator

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Sub-10nm hard X-ray focusing and application to nanoscopy/spectroscopy

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高精度X線ミラー作製のためのナノ精度表面形状転写法の開発Principal Investigator

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MIMURA HIDEKAZU 三村秀和

MIMURA Hidekazu 三村秀和