Imai Yasuhiko 今井康彦

… Alternative Names

IMAI Yasuhiko 今井康彦

Less

Researcher Number	30416375
Other IDs
Affiliation (Current)	2025: 公益財団法人高輝度光科学研究センター, 回折・散乱推進室, 主席研究員 2025: 公益財団法人高輝度光科学研究センター, 研究DX推進室, 主席研究員
Affiliation (based on the past Project Information) *help	2023 – 2024: 公益財団法人高輝度光科学研究センター, 回折・散乱推進室, 主幹研究員 2020: 公益財団法人高輝度光科学研究センター, 回折・散乱推進室, 主幹研究員 2019: 公益財団法人高輝度光科学研究センター, 放射光利用研究基盤センター, 主幹研究員 2017 – 2018: 公益財団法人高輝度光科学研究センター, 利用研究促進部門, 主幹研究員 2015 – 2016: 公益財団法人高輝度光科学研究センター, 利用研究促進部門, 副主幹研究員 … More 2013 – 2014: 公益財団法人高輝度光科学研究センター, 利用研究促進部門, 研究員 2009: 財団法人高輝度光科学研究センター, 利用研究促進部門, 研究員 2008: 財団法人高輝度光科学研究センター, 利用研究促進部門・ナノ先端計測支援チーム, 研究員 2007: The University of Tokyo, SPring-8, Researcher 2006 – 2007: 高輝度光科学研究センター, 利用研究促進部門, 研究員 Less
Review Section/Research Field	Principal Investigator Electronic materials/Electric materials Except Principal Investigator Quantum beam science / Basic Section 21050:Electric and electronic materials-related / Science and Engineering / Condensed matter physics I / Science and Engineering
Keywords	Principal Investigator アラインメント / 放射光 / Ｘ線 / 逆格子マップ / ナノビームＸ線回折 / ナノビーム回折 / マイクロＸ線回折 / マイクロ回折 Except Principal Investigator 放射光 / X線回折 … More / ナノビームX線回折 / 薄膜 / シンクロトロン放射光 / 半導体デバイス / 断層解析 / 歪 / オペランド計測 / 半導体 / 半導体物性 / 異常散乱 / Ｘ線回折 / 電子顕微鏡 / X線ナノビーム回折 / ポンプ＆プローブ法 / 時間分解 / 圧電応答走査プローブ顕微鏡 / 時間分解ポンプ＆プローブ法 / 圧電応答特性 / ナノボイド / Ptワイヤプロファイラー / 圧電応答 / 3次元 / 結晶性断層マッピング解析 / トモグラフィックマッピング / ３次元 / Ptワイヤプロファイラ / 結晶性断層マッピング / AlGaN/GaN HEMT / ポンプ＆プローブ計測 / 時分割パルス放射光回折 / 時分割ポンプ－プローブ法 / 逆圧電効果 / 漏れ電流 / 転位 / 深さ分解結晶評価 / トモグラフィックマッピング解析 / 3次元逆格子マッピング / Refraction imaging / Takagi-Taupin equation / Computer simulation / Phase problem / Polarization / Simultaneous diffraction / Dynamical diffraction thoery / X-ray diffraction / X線結晶構造解析 / X線動力学的回折理論 / 屈折イメージング / 高木-トウパンの式 / 計算機シミュレーション / 位相問題 / 偏光 / 多波回折 / 動力学理論 / X線 / マイクロ回折 / マイクロビーム / 蛍光Ｘ線分析 / GaInN / 石英 / 屈折レンズ / 集光素子 / X繰回折 / 金属錯体 / 薄膜構造 / 微小領域 / 歪み / 界面物性 / マイクロX線回折 / 表面・界面物性 / 結晶工学 Less

ナノビームX線回折による半導体デバイスの4次元断層解析
- Principal Investigator
  
  林侑介
- Project Period (FY)
  2023 – 2025
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 21050:Electric and electronic materials-related
- Research Institution
  National Institute for Materials Science
  Osaka University
Multiscale characterization of singularity structures and behaviors thereof
- Principal Investigator
  
  SAKAI AKIRA
- Project Period (FY)
  2016 – 2020
- Research Category
  
  Grant-in-Aid for Scientific Research on Innovative Areas (Research in a proposed research area)
- Review Section
  
  Science and Engineering
- Research Institution
  Osaka University
Determination of composition and strain for strain released SiGe thin layers on Si with using anomalous x-ray microdiffraction
- Principal Investigator
  
  Kimura Shigeru
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Quantum beam science
- Research Institution
  Japan Synchrotron Radiation Research Institute
Development of nano-scale X-ray diffraction mapping techniquePrincipal Investigator
- Principal Investigator
  
  Imai Yasuhiko
- Project Period (FY)
  2014 – 2016
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Japan Synchrotron Radiation Research Institute
Characterization of InGaN films by synchrotron radiation microdiffraction with using parabolic refractive X-ray lenses made of quartz glass
- Principal Investigator
  
  KIMURA SHIGERU
- Project Period (FY)
  2013 – 2014
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Quantum beam science
- Research Institution
  Japan Synchrotron Radiation Research Institute
Characterization of Si nanoelectronic materials and interface with using synchrotron radiation microprobe
- Principal Investigator
  
  KIMURA Shigeru
- Project Period (FY)
  2006 – 2009
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Japan Synchrotron Radiation Research Institute
Development and application of crystal structure analysis technology with polarized X-ray multiple wave method
- Principal Investigator
  
  OKITSU Kouhei
- Project Period (FY)
  2006 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Condensed matter physics I
- Research Institution
  The University of Tokyo

All 2024 2023 2021 2020 2019 2018 2017 2016 2015 2014 2010 2009 2006

All Journal Article Presentation

[Journal Article] Local strain distribution analysis in strained SiGe spintronics devices2024
- Author(s)
  Onabe Tomoki、Wu Zhendong、Tohei Tetsuya、Hayashi Yusuke、Sumitani Kazushi、Imai Yasuhiko、Kimura Shigeru、Naito Takahiro、Hamaya Kohei、Sakai Akira
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 63 Issue: 2 Pages: 02SP61-02SP61
- DOI
  10.35848/1347-4065/ad18ce
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19H05616, KAKENHI-PROJECT-23K26141
[Journal Article] Quantitative analysis of lattice plane microstructure in the growth direction of a modified Na-flux GaN crystal using nanobeam X-ray diffraction2019
- Author(s)
  Shida Kazuki、Yamamoto Nozomi、Tohei Tetsuya、Imanishi Masayuki、Mori Yusuke、Sumitani Kazushi、Imai Yasuhiko、Kimura Shigeru、Sakai Akira
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 58 Issue: SC Pages: SCCB16-SCCB16
- DOI
  10.7567/1347-4065/ab0d05
- NAID
  210000155953
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-16H06423, KAKENHI-PROJECT-18J10700
[Journal Article] Current Status of Material Characterization by Synchrotron Radiation Nanobeam X-ray Diffraction2019
- Author(s)
  •今井康彦，隅谷和嗣，木村滋
- Journal Title
  
  Nihon Kessho Gakkaishi
  
  Volume: 61 Issue: 1 Pages: 51-55
- DOI
  10.5940/jcrsj.61.51
- NAID
  130007606955
- ISSN
  0369-4585, 1884-5576
- Year and Date
  2019-02-28
- Language
  Japanese
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-16H03913
[Journal Article] Current status of nanobeam x-ray diffraction station at SPring-82019
- Author(s)
  Imai Yasuhiko、Sumitani Kazushi、Kimura Shigeru
- Journal Title
  
  AIP Conference Proceedings
  
  Volume: 2054 Pages: 050004-050004
- DOI
  10.1063/1.5084622
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PLANNED-16H06423, KAKENHI-PROJECT-16H03913
[Journal Article] Compound Refractive Lens Optics for Microbeam X-ray Diffraction Measurements at BL13XU in SPring-82018
- Author(s)
  Sumitani Kazushi、Imai Yasuhiko、Kimura Shigeru
- Journal Title
  
  Microscopy and Microanalysis
  
  Volume: 24 Issue: S2 Pages: 306-309
- DOI
  10.1017/s1431927618013855
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-16H06423
[Journal Article] Microstructural analysis in the depth direction of a heteroepitaxial AlN thick film grown on a trench-patterned template by nanobeam X-ray diffraction2018
- Author(s)
  Shida K.、Takeuchi S.、Tohei T.、Miyake H.、Hiramatsu K.、Sumitani K.、Imai Y.、Kimura S.、Sakai A.
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 123 Issue: 16 Pages: 161563-161563
- DOI
  10.1063/1.5011291
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-16H06423, KAKENHI-PLANNED-25106003, KAKENHI-PLANNED-16H06415
[Journal Article] 半導体結晶中特異構造の３次元微細構造解2018
- Author(s)
  酒井朗，鎌田祥平，志田和己，竹内正太郎，今井康彦，木村滋
- Journal Title
  
  日本結晶成長学会誌
  
  Volume: 45
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-16H06423
[Journal Article] Development of compound refractive lenses made of quartz glass designed for microdiffraction system at BL13XU in SPring-82018
- Author(s)
  Sumitani K.、Imai Y.、Kimura S.
- Journal Title
  
  Journal of Instrumentation
  
  Volume: 13 Issue: 09 Pages: C09002-C09002
- DOI
  10.1088/1748-0221/13/09/c09002
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-16H06423
[Journal Article] Domain Switching by Applied Electric Field in (001) and (111)-epitaxial (K<inf>0.5</inf>Na<inf>0.5</inf>)NbO<inf>3</inf>Films2018
- Author(s)
  Kawano M.、Yamada T.、Matsuo S.、Yoshino M.、Nagasaki T.、Sakata O.、Imai Y.
- Journal Title
  
  Proceedings of 2018 IEEE ISAF-FMA-AMF-AMEC-PFM Joint Conference (IFAAP 2018)
  
  Volume: なし Pages: 1-3
- DOI
  10.1109/isaf.2018.8463311
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-16H06423, KAKENHI-PROJECT-18H01474
[Journal Article] Depth-resolved analysis of lattice distortions in high-Ge-content SiGe/compositionally graded SiGe films using nanobeam x-ray diffraction2018
- Author(s)
  Shida Kazuki、Takeuchi Shotaro、Tohei Tetsuya、Imai Yasuhiko、Kimura Shigeru、Schulze Andreas、Caymax Matty、Sakai Akira
- Journal Title
  
  Semiconductor Science and Technology
  
  Volume: 33 Issue: 12 Pages: 124005-124005
- DOI
  10.1088/1361-6641/aae6d9
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-16H06423, KAKENHI-PROJECT-18J10700
[Journal Article] Time response demonstration of in situ lattice deformation under an applied electric field by synchrotron-based time-resolved X-ray diffraction in polar-axis-oriented epitaxial Pb(Zr,Ti)O3 film2018
- Author(s)
  Sato Tomoya、Ichinose Daichi、Oshima Naoya、Mimura Takanori、Nemoto Yuichi、Shimizu Takao、Imai Yasuhiko、Uchida Hiroshi、Sakata Osami、Funakubo Hiroshi
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 57 Issue: 9 Pages: 0902B8-0902B8
- DOI
  10.7567/jjap.57.0902b8
- NAID
  210000149599
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-16H06423, KAKENHI-PROJECT-26220907
[Journal Article] Control of dislocation morphology and lattice distortion in Na-flux GaN crystals2017
- Author(s)
  Takeuchi S.、Mizuta Y.、Imanishi M.、Imade M.、Mori Y.、Sumitani K.、Imai Y.、Kimura S.、Sakai A.
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 122 Issue: 10 Pages: 105303-105303
- DOI
  10.1063/1.4989647
- Peer Reviewed
- Data Source
  KAKENHI-PLANNED-16H06423
[Journal Article] Tomographic mapping analysis in the depth direction of high-Ge-content SiGe layers with compositionally graded buffers using nanobeam X-ray diffraction2017
- Author(s)
  K. Shida, S. Takeuchi, Y. Imai, S. Kimura, A. Schulze, M. Caymax, A. Sakai
- Journal Title
  
  ACS Applied Materials & Interfaces
  
  Volume: 9 Issue: 15 Pages: 13726-13732
- DOI
  10.1021/acsami.7b01309
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-16H06423
[Journal Article] Microstructural analysis of an epitaxial AlN thick film/trench-patterned template by three-dimensional reciprocal lattice space mapping technique2016
- Author(s)
  S. Kamada, S. Takeuchi, D. T. Khan, H. Miyake, K. Hiramatsu, Y. Imai, S. Kimura, A. Sakai
- Journal Title
  
  Applied Physics Express
  
  Volume: 9 Issue: 11 Pages: 111001-111001
- DOI
  10.7567/apex.9.111001
- NAID
  210000138078
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-16H06423, KAKENHI-PLANNED-16H06415
[Journal Article] High-resolution Micro- and Nano-beam Diffraction System at BL13XU of the SPring-82016
- Author(s)
  Shigeru Kimura, Yasuhiko Imai
- Journal Title
  
  Material Structure in Chemistry, Biology, Physics and Technology
  
  Volume: Vol. 23, No. 3 Pages: 317-317
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-16H03913
[Journal Article] BL13XU（表面界面構造解析）の現状（2014）2014
- Author(s)
  田尻寛男，今井康彦
- Journal Title
  
  SPring-8/SACLA利用研究成果集
  
  Volume: 3 Pages: 145-153
- NAID
  130007969144
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-25600151
[Journal Article] Structural change of direct silicon bonding substrates by interfacial oxide out-diffusion annealing2010
- Author(s)
  T. Kato, Y. Nakamura, J. Kikkawa, A. Sakai, E. Toyoda, K. Izunome, O. Nakatsuka, S. Zaima, Y. Imai, S. Kimura, O. Sakata
- Journal Title
  
  Thin Solid Films Vol.518
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18063019
[Journal Article] High-Angular-Resolution Microbeam X-ray diffraction with CCD Detector2010
- Author(s)
  Y.Imai
- Journal Title
  
  AIP conference proceedings 1221
  
  Pages: 30-33
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18063019
[Journal Article] High-Angular-Resolution Microbeam X-ray diffraction with CCD Detector2010
- Author(s)
  Y. Imai, S. Kimura, O. Sakata, A. Sakai
- Journal Title
  
  AIP Conference Proceedings Vol.1221
  
  Pages: 30-32
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18063019
[Journal Article] Polarization-dependent six-beam X-ray pinhole topographs2006
- Author(s)
  Kouhei Okitsu, Yoshitaka Yoda, Yasuhiko Imai, Yoshinori Ueji, Yuta Urano and Xiao Wei Zhang
- Journal Title
  
  Acta Cryst. A 62
  
  Pages: 237-247
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18540310
[Journal Article] Polarization-dependent six-beam X-ray pinhole topographs2006
- Author(s)
  K. Okitsu, Y. Yoda, Y. Imai, Y. Ueji, Y. Urano and X. -W. Zhang
- Journal Title
  
  Acta Cryst A62
  
  Pages: 237-247
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18540310
[Presentation] OVPE-GaN基板上縦型パワーデバイスのその場ナノビームX線回折2024
- Author(s)
  林侑介、藤平哲也、隅谷和嗣、今井康彦、木村滋、宇佐美茂佳、今西正幸、森勇介、分島彰男、渡邉浩崇、新田州吾、本田善央、天野浩、酒井朗
- Organizer
  2024年第71回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-23K26141
[Presentation] AlGaN系UV-B波長レーザダイオードの深さ分解ナノビームX線回折2023
- Author(s)
  谷口翔太、林侑介、藤平哲也、隅谷和嗣、今井康彦、木村滋、岩谷素顕、三宅秀人、酒井朗
- Organizer
  2023年第84回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K26141
[Presentation] Local strain distribution analysis in strained SiGe spintronics devices2023
- Author(s)
  T. Onabe, Z. D. Wu, T. Tohei, Y. Hayashi, K. Sumitani, Y. Imai, S. Kimura, T. Naito, K. Hamaya, and A. Sakai
- Organizer
  2023 International Conference on Solid State Devices and Materials (SSDM 2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K26141
[Presentation] Three-dimensional tomographic analysis of AlGaN-based UV-B wavelength laser diodes2023
- Author(s)
  S. Taniguchi, Y. Hayashi, T. Tohei, K. Sumitani, Y. Imai, S. Kimura, M. Iwaya, H. Miyake, and A. Sakai
- Organizer
  The 14th International Conference on Nitride Semiconductors (ICNS-14)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K26141
[Presentation] Machine Learning Assisting NanoXRD Based Analysis on HVPE GaN Structure2023
- Author(s)
  Z. D. Wu, Y. Hayashi, T. Tohei, K. Sumitani, Y. Imai, S. Kimura, and A. Sakai
- Organizer
  The 14th International Conference on Nitride Semiconductors (ICNS-14)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K26141
[Presentation] 歪みSiGeスピントロニクスデバイスにおける局所歪み分布解析2023
- Author(s)
  尾鍋友毅、武振東、藤平哲也、林侑介、隅谷和嗣、今井康彦、木村滋、内藤貴大、浜屋宏平、酒井朗
- Organizer
  2023年第84回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K26141
[Presentation] ナノビームX線回折によるHVPE-GaNバルク結晶における単独貫通転位周辺の局所歪解析2021
- Author(s)
  濱地威明、藤平哲也、林侑介、宇佐美茂佳、今西正幸、森勇介、隅谷和嗣、今井康彦、木村滋、酒井朗
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] AlGaN/GaN HEMTデバイスにおける局所圧電格子変形の放射光ナノビームX線回折オペランド計測2021
- Author(s)
  塩見春奈、嶋田章宏、藤平哲也、林侑介、金木奨太、橋詰保、今井康彦、隅谷和嗣、木村滋、酒井朗
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] Structural analysis of Na-flux GaN by nanobeam X-ray diffraction: Local lattice constant variation depending on the growth sector2021
- Author(s)
  Z. D. Wu, K. Shida, T. Hamachi, Y. Hayashi, T. Tohei, M. Imanishi, Y. Mori, K. Sumitani, Y. Imai, S. Kimura, and A. Sakai
- Organizer
  The 8th Asian Conference on Crystal Growth and Crystal Technology (CGCT-8)
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] Depth-resolved three-dimensional characterization of semiconductor materials using nanobeam X-ray diffraction combined with differential-aperture technique2021
- Author(s)
  Y. Imai, K. Sumitani, S. Kimura, T. Hamachi, K. Shida, T. Tohei, H. Miyake, and A. Sakai
- Organizer
  The 8th Asian Conference on Crystal Growth and Crystal Technology (CGCT-8)
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] Advanced analysis of singularity structures in semiconductor materials and devices by synchrotron radiation nanobeam X-ray diffraction2021
- Author(s)
  A. Sakai, Y. Imai, Y. Hayasahi, and T. Tohei
- Organizer
  Virtual Workshop on Materials Science and Advanced Electronics Created by Singularity
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] Space- and time-revolved synchrotron X-ray diffraction for analysis of singularity structures in semiconductor materials2021
- Author(s)
  A. Sakai, Y. Hayashi, T. Tohei, and Y. Imai
- Organizer
  The 8th Asian Conference on Crystal Growth and Crystal Technology (CGCT-8)
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] Analysis of stress and impurity evolution related to growth sector in Na-flux GaN by nanobeam X-ray diffraction2021
- Author(s)
  Z. D. Wu, T. Hamachi, Y. Hayashi, T. Tohei, M. Imanishi, Y. Mori, K. Sumitani, Y. Imai, S. Kimura, and A. Sakai
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] ナノビームX線回折法によるNPSS上AlN厚膜の深さ分解結晶性トモグラフィック評価第2021
- Author(s)
  山本望、林侑介、濱地威明、中西悠太、藤平哲也、隅谷和嗣、今井康彦、木村滋、正直花奈子、三宅秀人、酒井朗
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] ナノビームX線回折によるOVPE成長GaN結晶の微細構造解析2021
- Author(s)
  栗谷淳、藤平哲也、濱地威明、林侑介、滝野淳一、隅智亮、宇佐美茂佳、今西正幸、森勇介、隅谷和嗣、今井康彦、木村滋、酒井朗
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] Systematical analysis in local lattice constant variation depending on stress and impurity evolution in Na-flux GaN2020
- Author(s)
  Z. D. Wu, K. Shida, Y. Hayashi, T. Tohei, M. Imanishi, Y. Mori, K. Sumitani, Y. Imai, S. Kimura, and A. Sakai
- Organizer
  第3回結晶工学×ISYSE 合同研究会
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] OVPE法で成長した GaN バルク単結晶の微細構造解析2020
- Author(s)
  栗谷淳、藤平哲也、濱地威明、林侑介、滝野淳一、隅智亮、今西正幸、森勇介、隅谷和嗣、今井康彦、木村滋、酒井朗
- Organizer
  第81回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] 高Ge添加NaフラックスGaN結晶の特異構造解析2020
- Author(s)
  古賀一朗、林侑介、藤平哲也、佐藤隆、三好直哉、村上明繁、皿山正二、今井康彦、隅谷和嗣、木村滋、酒井朗
- Organizer
  応用物理学会関西支部2019年第3回支部講演会
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] ナノビームX線回折法による高Ge組成SiGe／組成傾斜SiGe／Si積層構造の深さ分解結晶性トモグラフィック評価2020
- Author(s)
  志田和己、藤平哲也、林侑介、隅谷和嗣、今井康彦、木村滋、酒井朗
- Organizer
  第67回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] Oxide-Vapor-Phase-Epitaxy法で成長したGaNバルク単結晶の微細構造解析2020
- Author(s)
  栗谷淳、藤平哲也、志田和己、濱地威明、林侑介、滝野淳一、隅智亮、今西正幸、森勇介、隅谷和嗣、今井康彦、木村滋、酒井朗
- Organizer
  応用物理学会関西支部2019年第3回支部講演会
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] Structural analysis of Na-flux GaN by nanobeam X-ray diffraction2020
- Author(s)
  Z. D. Wu, K. Shida, T. Hamachi, Y. Hayashi, T. Tohei, M. Imanishi, Y. Mori, K. Sumitani, Y. Imai, S. Kimura, and A. Sakai
- Organizer
  日本結晶成長学会ナノエピ分科会「第12回ナノ構造・エピタキシャル成長講演会」
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] Structural analysis of Na flux GaN by nanobeam X ray diffraction: Local lattice constant variation depending on the growth mode2020
- Author(s)
  Z. D. Wu, K. Shida, T. Hamachi, Y. Hayashi, T. Tohei, M. Imanishi, Y. Mori, K. Sumitani, Y. Imai, S. Kimura, and A. Sakai
- Organizer
  第81回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] AlGaN/GaN HEMTデバイスにおける局所圧電格子変形の放射光ナノビームX線回折オペランド計測2020
- Author(s)
  嶋田章宏、塩見春奈、藤平哲也、林侑介、金木奨太、橋詰保、今井康彦、隅谷和嗣、
- Organizer
  第81回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] 放射光ナノビームX線回折による窒化物半導体HEMTデバイスにおける圧電応答局所格子変形ダイナミクスの観測2019
- Author(s)
  植田瑛、藤平哲也、安藤祐也、橋詰保、今井康彦、隅谷和嗣、木村滋、酒井朗
- Organizer
  第66回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] 放射光ナノビームX線回折を用いた半導体材料・デバイスの構造解析2019
- Author(s)
  酒井朗，志田和己，植田瑛，藤平哲也，今井康彦，隅谷和嗣，木村滋
- Organizer
  第66回応用物理学会春季学術講演会,結晶工学×放射光シンポジウム
- Invited
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] Microstructure analysis of FFC-GaN crystal2019
- Author(s)
  Wu Zhendong、Shida Kazuki、Hamachi Takeaki、Tohei Tetsuya、Hayashi Yusuke、Imanishi Masayuki、Mori Yusuke、Sumitani Kazushi、Imai Yasuhiko、Kimura Shigeru、Sakai Akira
- Organizer
  応用物理学会関西支部2019年第2回支部講演会
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] ナノビームＸ線回折装置へのピクセル検出器の導入2019
- Author(s)
  今井康彦，隅谷和嗣，木村　滋
- Organizer
  第３２回放射光学会年会・放射光科学合同シンポジウム
- Data Source
  KAKENHI-PROJECT-16H03913
[Presentation] Depth-resolved three-dimensional characterization of semiconductors using nanobeam X-ray diffraction combined with a differential-aperture technique2019
- Author(s)
  Imai Y、Sumitani K、Kimura S、Shida K、Tohei T、Sakai A
- Organizer
  The 8th Conference on Defects-Recognition, Imaging and Physics in Semiconductors (DRIP XVIII)
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] Operando analysis of local piezoelectric lattice distortion in AlGaN/GaN HEMT devices using synchrotron radiation nanobeam X-ray diffraction2019
- Author(s)
  Ueda A、Shiomi H、Tohei T、Ando Y、Hashizume T、Imai Y、Sumitani K、Kimura S、Sakai A
- Organizer
  13th International Conference on Nitride Semiconductors
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] 放射光ナノビームX線回折による窒化物半導体HEMTデバイスにおける圧電応答局所格子変形の直接観測2019
- Author(s)
  植田瑛，藤平哲也，安藤祐也，橋詰保，今井康彦，隅谷和嗣，木村滋，酒井朗
- Organizer
  第66回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] 組成傾斜層を有するSi基板上高Ge組成SiGe膜の深さ分解ナノビームX線回折評価2019
- Author(s)
  志田和己、藤平哲也、林侑介、隅谷和嗣、今井康彦、木村滋、酒井朗
- Organizer
  第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] 窒化物半導体中の格子欠陥が生み出す特異構造の3次元解析2018
- Author(s)
  酒井朗，志田和己，竹内正太郎，藤平哲也，今井康彦，木村滋
- Organizer
  第65回応用物理学会春季学術講演会
- Invited
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] Current status of nanobeam x-ray diffraction station at SPring-82018
- Author(s)
  Yasuhiko Imai, Kazyshi Sumitani, and Shigeru Kimura
- Organizer
  Synchrotron Radiation Instrumentation (SRI 2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03913
[Presentation] Nanobeam X-ray Diffraction Analysis of Local Lattice Distortions in the Growth Direction of a Modified Na-Flux GaN Bulk Crystal2018
- Author(s)
  Shida K, Takeuchi S, Tohei T, Imanishi M, Mori Y, Sumitani K, Imai Y, Kimura S, Sakai A
- Organizer
  International Symposium on Growth of III-Nitrides (ISGN-7)
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] ナノビームX線回折を用いた組成傾斜層を有する高Ge組成SiGe膜の結晶深さ方向格子面微細構造トモグラフィック解析2018
- Author(s)
  志田和己，竹内正太郎，藤平哲也，今井康彦，木村滋，Schluze Andreas，Caymax Matty，酒井朗
- Organizer
  第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] 白金細線を回折ビームプロファイラーとして用いた深さ分解ナノビームX線回折法の開発2018
- Author(s)
  今井康彦，木村滋
- Organizer
  第31回日本放射光学会年会・放射光科学合同シンポジウム
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] Three-dimensional Analysis of Defect-related Singularity Structures in Semiconductor Materials2018
- Author(s)
  Sakai A, Takeuchi S, Shida K, Kamada S, Tohei T, Imai Y, Kimura S, Miyake H, Hiramatsu K
- Organizer
  OIST-Singularity Project Joint Workshop
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] Tomographic mapping analysis of lattice distortions in the depth direction of high-Ge-content SiGe films with compositionally graded buffer layers using nanobeam X-ray diffraction2018
- Author(s)
  Shida K，Takeuchi S, Tohei T, Imai Y, Kimura S, Schulze A, Caymax M, Sakai A
- Organizer
  1st Joint ISTDM/ICSI 2018 Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] ナノビームX線回折法による改良型NaフラックスGaNバルク単結晶の深さ方向結晶構造解析2018
- Author(s)
  志田和己，山本望，藤平哲也，今西正幸，森勇介，隅谷和嗣，今井康彦，木村滋，酒井朗
- Organizer
  第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] Quantitative analysis of lattice plane microstructure in the growth direction of a modified Na-flux GaN crystal using nanobeam X-ray diffraction2018
- Author(s)
  Shida K, Tohei T, Imanishi M, Mori Y, Sumitani K, Imai Y, Kimura S, Sakai A
- Organizer
  International Workshop on Nitride Semiconductors (IWN2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] ナノビームX線回折法による高Ge組成SiGe／組成傾斜SiGeの結晶深さ方向断層マッピング解析2017
- Author(s)
  志田和己，竹内正太郎，今井康彦，木村滋，Andreas Schulze，Matty Caymax，酒井朗
- Organizer
  応用物理学会結晶工学分科会第6回結晶工学未来塾
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] 金細線パターンを用いたナノビームＸ線回折のための試料位置でのゴニオメータ偏芯量評価2017
- Author(s)
  今井康彦、隅谷和嗣、木村滋
- Organizer
  第30回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  神戸芸術センター（兵庫県・神戸市）
- Year and Date
  2017-01-07
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] In depth microstructural analysis of heteroepitaxial AlN thick films grown on trench-patterned templates by nanobeam X-ray diffraction2017
- Author(s)
  Shida K, Takeuchi S, Tohei T, Miyake H, Hiramatsu K, Sumitani K, Imai Y, Kimura S, Sakai A
- Organizer
  29th International Conference on Defects in Semiconductors (ICDS29)
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] ナノビームX線回折法による周期溝加工基板上AlN厚膜の結晶深さ方向構造解析2017
- Author(s)
  志田和己，竹内正太郎，三宅秀人，平松和政，隅谷和嗣，今井康彦，木村滋，酒井朗
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] Nano beam X-ray diffraction analysis of Na flux GaN bulk crystals grown with controlling seed crystal surfaces and growth mode2017
- Author(s)
  Takeuchi S, Mizuta Y, Imanishi M, Imade M, Mori Y, Imai Y, Kimura S, Sakai A
- Organizer
  The 12th International Conference on Nitride Semiconductors (ICNS-12)
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] 金細線パターンを用いたナノビームＸ線回折のための試料位置でのゴニオメータ偏芯量評価2017
- Author(s)
  今井康彦、隅谷和嗣、木村滋
- Organizer
  第30回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  神戸芸術センター（兵庫県神戸市）
- Year and Date
  2017-01-07
- Data Source
  KAKENHI-PROJECT-26420292
[Presentation] Control of dislocation propagation behaviors in Na-flux GaN bulk crystals2017
- Author(s)
  Takeuchi S, Mizuta Y, Imanishi M, Imade M, Imai Y, Kimura S, Mori Y, Sakai A
- Organizer
  The 12th International Conference on Nitride Semiconductors (ICNS-12)
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] Nano beam X-ray diffraction analysis of microstructures in Na-flux GaN bulk crystals grown with controlling seed crystal surfaces and growth mode2016
- Author(s)
  Y. Mizuta, S. Takeuchi, M. Imanishi, M. Imade, Y. Imai, S. Kimura, Y. Mori, A. Sakai
- Organizer
  The 7th International Symposium on Advanced Science and Technology of Silicon Materials
- Place of Presentation
  Hawaii (USA)
- Year and Date
  2016-11-21
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] An automatic sample positioning system for nano-beam X-ray diffraction multi-scale mapping2016
- Author(s)
  Yasuhiko Imai
- Organizer
  13th Biennial Conference on High Resolution X-Ray Diffraction and Imaging (XTOP2016)
- Place of Presentation
  Brno, Czech Republic
- Year and Date
  2016-09-04
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26420292
[Presentation] Lattice plane microstructure analysis of Na-flux GaN bulk crystals by nanobeam X-ray diffraction2016
- Author(s)
  Y. Mizuta, S. Takeuchi, M. Imanishi, M. Imade, Y. Imai, S. Kimura, Y. Mori, A. Sakai
- Organizer
  The 20th SANKEN International The 15th SANKEN Nanotechnology Symposium
- Place of Presentation
  Knowledge Capital Congres Convention Center (Osaka・Osaka)
- Year and Date
  2016-12-12
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] X線マイクロ回折による種結晶表面・成長モード制御NaフラックスGaNの微視的結晶構造解析2016
- Author(s)
  水田祐貴、竹内正太郎、今西正幸、今出完、今井康彦、木村滋、森勇介、酒井朗
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  朱鷺メッセ（新潟県・新潟市）
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] Synchrotron nano-beam X-Ray diffraction at SPring-82016
- Author(s)
  Y. Imai, K. Sumitani, S. Kimura
- Organizer
  The 7th International Symposium on Advanced Science and Technology of Silicon Materials
- Place of Presentation
  Hawaii (USA)
- Year and Date
  2016-11-21
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] SPring-8における放射光ナノビームＸ線回折の現状2016
- Author(s)
  今井康彦、木村滋
- Organizer
  第57回高圧討論会
- Place of Presentation
  筑波大学大学会館（茨城県つくば市）
- Year and Date
  2016-10-26
- Invited
- Data Source
  KAKENHI-PROJECT-26420292
[Presentation] X線ナノビーム回折のための試料精密アラインメント技術開発2016
- Author(s)
  今井康彦
- Organizer
  第29回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  柏の葉カンファレンスセンター（千葉県柏市）
- Year and Date
  2016-01-09
- Data Source
  KAKENHI-PROJECT-26420292
[Presentation] High-resolution Micro- and Nano-beam Diffraction System at BL13XU of the SPring-82016
- Author(s)
  Shigeru Kimura, Yasuhiko Imai
- Organizer
  13th Biennial Conference on High-Resolution X-Ray Diffraction and Imaging
- Place of Presentation
  ブルノ（チェコ）
- Year and Date
  2016-09-04
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03913
[Presentation] Nanobeam X-ray diffraction for tomographic mapping analysis of high Ge content Si1-yGey/compositionally graded Si1-xGex stacked structure2016
- Author(s)
  K. Shida, S. Takeuchi, Y. Imai, S. Kimura, A. Shulze, M. Caymax, A. Sakai
- Organizer
  The 20th SANKEN International The 15th SANKEN Nanotechnology Symposium
- Place of Presentation
  Knowledge Capital Congres Convention Center (Osaka・Osaka)
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] Tomographic mapping analysis of high Ge composition SiGe layers with compositionally graded buffers by Nanobeam X-ray diffraction2016
- Author(s)
  K. Shida, S. Takeuchi, Y. Imai, S. Kimura, A. Shulze, M. Caymax, A. Sakai
- Organizer
  The 7th International Symposium on Advanced Science and Technology of Silicon Materials
- Place of Presentation
  Hawaii (USA)
- Year and Date
  2016-11-21
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] An automatic sample positioning system for nano-beam X-ray diffraction multi-scale mapping2016
- Author(s)
  Y. Imai
- Organizer
  13th Biennial Conference on High Resolution X-Ray Diffraction and Imaging (XTOP2016)
- Place of Presentation
  Brno (Czech Republic)
- Year and Date
  2016-09-04
- Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-16H06423
[Presentation] Synchrotron Nano-Beam X-Ray Diffraction at SPring-82016
- Author(s)
  Yasuhiko Imai, Kazushi Sumitani, Shigeru Kimura
- Organizer
  The 7th International Symposium on Advanced Science and Technology of Silicon Materials
- Place of Presentation
  Kailua-Kona, Hawaii
- Year and Date
  2016-11-21
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26420292
[Presentation] 高エネルギーX線集光用石英ガラス製屈折レンズの開発2015
- Author(s)
  木村滋，今井康彦
- Organizer
  2015年第62回応用物理学会春季学術講演会
- Place of Presentation
  東海大学（神奈川県平塚市）
- Year and Date
  2015-03-11
- Data Source
  KAKENHI-PROJECT-25600151
[Presentation] X線マイクロビームによるGaN基板上InGaN系デバイスの評価2015
- Author(s)
  横川俊哉，栫拓也，今井康彦，木村滋
- Organizer
  2015年第62回応用物理学会春季学術講演会
- Place of Presentation
  東海大学（神奈川県平塚市）
- Year and Date
  2015-03-13
- Data Source
  KAKENHI-PROJECT-25600151
[Presentation] CCD型検出器を用いた高角度分解能マイクロx線回折計2010
- Author(s)
  今井康彦, 木村滋, 坂田修身, 田尻寛男, 酒井朗, 小瀬村大亮, 小椋厚志
- Organizer
  第23回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  イーグレ姫路
- Year and Date
  2010-01-08
- Data Source
  KAKENHI-PROJECT-18063019
[Presentation] CCD型検出器を用いた高角度分解能マイクロX線回折計2010
- Author(s)
  今井康彦
- Organizer
  第23回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  イーグレ姫路(姫路市)
- Year and Date
  2010-01-08
- Data Source
  KAKENHI-PROJECT-18063019
[Presentation] 高分解能マイクロx線回折装置の現状と応用研究2009
- Author(s)
  今井康彦、木村滋、坂田修身、田尻寛男
- Organizer
  第22回日本放射光学会年会・放射光科学合同シンポジウム
- Year and Date
  2009-01-12
- Data Source
  KAKENHI-PROJECT-18063019
[Presentation] High-Angular-Resolution Microbeam X-ray diffraction with CCD Detector2009
- Author(s)
  Y. Imai, S. Kimura, O. Sakata, A. Sakai
- Organizer
  20th International Congress on X-Ray Optics and Microanalysis
- Place of Presentation
  Karlsruhe, Germany
- Data Source
  KAKENHI-PROJECT-18063019
[Presentation] High-Angular-Resolution Microbeam X-ray diffraction with CCD Detector2009
- Author(s)
  Y.Imai
- Organizer
  20th International Congress on X-Ray Optics and Microanalysis (ICXOM20)
- Place of Presentation
  Congress Center(Karlsruhe)
- Data Source
  KAKENHI-PROJECT-18063019
[Presentation] 高分解能マイクロX線回折装置の現状と応用研究2009
- Author(s)
  今井康彦
- Organizer
  第22回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  東京大学, 東京
- Year and Date
  2009-01-12
- Data Source
  KAKENHI-PROJECT-18063019

1. KIMURA Shigeru (50360821)

# of Collaborated Projects: 4 results

# of Collaborated Products: 14 results
2. SAKATA Osami (40215629)

# of Collaborated Projects: 1 results

# of Collaborated Products: 5 results
3. TAJIRI Hiroo (70360831)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
4. OKITSU Kouhei (50323506)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
5. YODA Yoshitaka (90240366)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
6. SAKAI AKIRA (20314031)

# of Collaborated Projects: 1 results

# of Collaborated Products: 47 results
7. 上エ地義徳 (10312985)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. 林侑介 (00800484)

# of Collaborated Projects: 1 results

# of Collaborated Products: 6 results
9. YOKOGAWA Toshiya

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
10. SUMITANI Kazushi

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
11. HAMAYA Kohei

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
12. 上ヱ地義徳

# of Collaborated Projects: 0 results

# of Collaborated Products: 2 results

Imai Yasuhiko 今井 康彦

IMAI Yasuhiko 今井 康彦

Research Projects

Research Products

Co-Researchers

ナノビームX線回折による半導体デバイスの4次元断層解析

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Multiscale characterization of singularity structures and behaviors thereof

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Determination of composition and strain for strain released SiGe thin layers on Si with using anomalous x-ray microdiffraction

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Development of nano-scale X-ray diffraction mapping techniquePrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Characterization of InGaN films by synchrotron radiation microdiffraction with using parabolic refractive X-ray lenses made of quartz glass

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Characterization of Si nanoelectronic materials and interface with using synchrotron radiation microprobe

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Development and application of crystal structure analysis technology with polarized X-ray multiple wave method

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] Local strain distribution analysis in strained SiGe spintronics devices2024

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Quantitative analysis of lattice plane microstructure in the growth direction of a modified Na-flux GaN crystal using nanobeam X-ray diffraction2019

Author(s)

Journal Title

DOI

NAID

Data Source

[Journal Article] Current Status of Material Characterization by Synchrotron Radiation Nanobeam X-ray Diffraction2019

Author(s)

Journal Title

DOI

NAID

ISSN

Year and Date

Language

Data Source

[Journal Article] Current status of nanobeam x-ray diffraction station at SPring-82019

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Compound Refractive Lens Optics for Microbeam X-ray Diffraction Measurements at BL13XU in SPring-82018

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Microstructural analysis in the depth direction of a heteroepitaxial AlN thick film grown on a trench-patterned template by nanobeam X-ray diffraction2018

Author(s)

Journal Title

Imai Yasuhiko 今井康彦

IMAI Yasuhiko 今井康彦

[Journal Article] BL13XU（表面界面構造解析）の現状（2014）2014