Yoshida Shinya 吉田慎哉

… Alternative Names

YOSHIDA Shinya 吉田慎哉

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Researcher Number	30509691
Other IDs
Affiliation (Current)	2025: 芝浦工業大学, 工学部, 教授
Affiliation (based on the past Project Information) *help	2022 – 2024: 芝浦工業大学, 工学部, 准教授 2016 – 2021: 東北大学, 工学研究科, 特任准教授 2015: 東北大学, 工学(系)研究科(研究院), 准教授 2015: 東北大学, 大学院工学研究科, 特任准教授 2014: 東北大学, 原子分子材料科学高等研究機構, 助教 … More 2013: 東北大学, 原子分子材料高等研究機構, 助教 2009 – 2011: Tohoku University, 原子分子材料科学高等研究機構, 助教 2008: Tohoku University, 原子分子材料科学高等研究機構, 助手 Less
Review Section/Research Field	Principal Investigator Basic Section 28050:Nano/micro-systems-related / Nano/Microsystems / Microdevices/Nanodevices / Applied physics, general Except Principal Investigator Basic Section 20010:Mechanics and mechatronics-related / Nano/Microsystems
Keywords	Principal Investigator 圧電MEMS / 圧電単結晶薄膜 / MEMSアクチュエータ / 圧電MEMSアクチュエータ / 単結晶 / エピタキシャル成長 / 圧電ＭＥＭＳ / 走査型プローブ顕微鏡 / 分子層堆積 / MEMS … More / 導電性高分子 / 微小電気機械システム / 破壊靭性 / 単結晶薄膜 / 圧電材料 / 圧電薄膜 / スパッタ膜 / リラクサ系単結晶薄膜 / PMN-PT / PZT / コンポジット / 巨大圧電 / スパッタ成膜 / キュリー点変調 / 微小電気機械システム（MEMS） / アクチュエータ / スパッタ法 / デバイス設計・製造プロセス / 電子デバイス・機器 / 電子・電気材料 / 先端機能デバイス / マイクロ・ナノデバイス / ｐＭＵＴ / レンジファインダー / pMUT / 超音波トランスデューサ / チタン酸ジルコン酸鉛(PZT) / MEMSスイッチ / 圧電アクチュエータ / 化学気相堆積 / RF-MEMS / RF-スイッチ / 超高密度記録 / マルチプローブ超高密度記録 / 高密度記録 … More Except Principal Investigator 圧電薄膜 / MEMS / エピタキシャル成長 / PZT / センサ / アクチュエータ / SmドープPMN-PT / ピエゾ抵抗 / 圧電MEMS / PMN-PT / 信頼性 / ピエゾ抵抗センサー / 圧電定数 / シリコン基板 / 単結晶膜 / スパッタ成膜 / チタン酸ジルコン酸鉛 / スパッタリング / キュリー点 / バッファ層 / 誘電率 / 急冷法 / 単結晶圧電薄膜 Less

Creation of innovative piezoelectric transducer thin films that combine the giant piezoelectricity of single crystals with the toughness of polycrystalsPrincipal Investigator
- Principal Investigator
  
  吉田慎哉
- Project Period (FY)
  2022 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 28050:Nano/micro-systems-related
- Research Institution
  Shibaura Institute of Technology
Creation of Giant Piezoelectric Transducer Thin Film with High Curie Point and Breaking Performance Limit of Piezoelectric MEMSPrincipal Investigator
- Principal Investigator
  
  Yoshida Shinya
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 28050:Nano/micro-systems-related
- Research Institution
  Tohoku University
Stable / Reliable Sensing and Precise Control of Piezoelectric Thin Film Actuators
- Principal Investigator
  
  Tanaka Shuji
- Project Period (FY)
  2018 – 2020
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 20010:Mechanics and mechatronics-related
- Research Institution
  Tohoku University
Creation of ultrahigh-performance piezoelectric micromachined ultrasonic rangefinder and its application to robot systemPrincipal Investigator
- Principal Investigator
  
  Yoshida Shinya
- Project Period (FY)
  2016 – 2017
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Nano/Microsystems
- Research Institution
  Tohoku University
Deposition of Ideally-oriented PZT Monocrystalline Thin Film on Si Substrate and Feasibility Study of Its Application to MEMS
- Principal Investigator
  
  Tanaka Shuji
- Project Period (FY)
  2013 – 2015
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Nano/Microsystems
- Research Institution
  Tohoku University
Research on robust and reliable RF-MEMS switch using conductive soft materialPrincipal Investigator
- Principal Investigator
  
  YOSHIDA Shinya
- Project Period (FY)
  2010 – 2011
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Microdevices/Nanodevices
- Research Institution
  Tohoku University
Conductive polymer recording media architected in molecular level for scanning multiprobe data storagePrincipal Investigator
- Principal Investigator
  
  YOSHIDA Shinya
- Project Period (FY)
  2008 – 2009
- Research Category
  
  Grant-in-Aid for Young Scientists (Start-up)
- Research Field
  
  Applied physics, general
- Research Institution
  Tohoku University

[Journal Article] Epitaxial SM-Doped PMN-Pt Film with High Piezoelectric Constant for MEMS Application2024
- Author(s)
  Fukushi Kai、Yoshida Shinya、Qi Xuanmeng、Tanaka Shuji
- Journal Title
  
  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
  
  Volume: 23 Pages: 765-768
- DOI
  10.1109/mems58180.2024.10439604
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23K23193
[Journal Article] Influence of underlayer roughness on the properties of Sc0.4Al0.6N thin films prepared via sputter deposition2024
- Author(s)
 Teshigahara Akihiko、Enomoto Tetsuya、Yamada Hideo、Yoshida Shinya
- Journal Title
 
 Japanese Journal of Applied Physics
 
 Volume: 63 Issue: 5 Pages: 055501-055501
- DOI
 10.35848/1347-4065/ad3da3
- Peer Reviewed / Open Access
- Data Source
 KAKENHI-PROJECT-23K23193
[Journal Article] Epitaxial Pb(Zr,Ti)O3-Based Piezoelectric Micromachined Ultrasonic Transducer Fabricated on Silicon-On-Nothing (SON) Structure2023
- Author(s)
 Sekiguchi Takuma、Yoshida Shinya、Kanamori Yoshiaki、Tanaka Shuji
- Journal Title
 
 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
 
 Volume: January Pages: 139-142
- DOI
 10.1109/mems49605.2023.10052628
- Peer Reviewed
- Data Source
 KAKENHI-PROJECT-23K23193
[Journal Article] Sputter Deposition and Characterization of Sm-Doped Pb(Mg1/3, Nb2/3)O3?PbTiO3 Epitaxial Thin Film on Si toward Giant-Piezoelectric Thin Film for MEMS Actuator Application2022
- Author(s)
  X. Qi, S. Yoshida, and S. Tanaka
- Journal Title
  
  IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control.
  
  Volume: - Issue: 5 Pages: 1821-1828
- DOI
  10.1109/tuffc.2022.3156881
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K05231
[Journal Article] スパッタ法によるSm 添加PMN-PTのSi 基板上へのエピタキシャル成長2022
- Author(s)
  福士海伊, 吉田慎哉, Qi Xuanmeng, 田中秀治
- Journal Title
  
  第39回「センサ・マイクロマシンと応用システム」シンポジウム予稿集
  
  Volume: 11月
- Data Source
  KAKENHI-PROJECT-23K23193
[Journal Article] Sm-doped Pb(Mg1/3, Nb2/3)O3-PbTiO3 Sputter-Epitaxy on Si Towards Giant-Piezoelectric Thin Film for Mems2021
- Author(s)
  Qi Xuanmeng、Yoshida Shinya、Tanaka Shuji
- Journal Title
  
  Proceedings of 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
  
  Volume: 34 Pages: 654-657
- DOI
  10.1109/mems51782.2021.9375393
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K05231
[Journal Article] Development of Sputter Epitaxy Technique of Pure-Perovskite (001)/(100)-Oriented Sm-Doped Pb(Mg1/3, Nb2/3)O3?PbTiO3 on Si2020
- Author(s)
  Qi Xuanmeng、Yoshida Shinya、Tanaka Shuji
- Journal Title
  
  IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
  
  Volume: 67 Issue: 12 Pages: 2738-2744
- DOI
  10.1109/tuffc.2020.3011649
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K05231, KAKENHI-PROJECT-18H01390
[Journal Article] 良好な絶縁性を有するc軸配向PZT系単結晶薄膜のSi基板上への形成2020
- Author(s)
  海老原凌, 吉田慎哉, 田中秀治
- Journal Title
  
  電気学会論文誌E
  
  Volume: 140 Pages: 137-143
- NAID
  130007850137
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18H01390
[Journal Article] Epitaxial growth of metallic buffer layer structure and c-axis oriented PMnN-PZT thin film on Si for high performance pMUT2017
- Author(s)
  Pham Ngoc Thao, Shinya Yoshida and Shuji Tanaka
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 56 Issue: 12 Pages: 127201-127201
- DOI
  10.7567/jjap.56.127201
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K17500
[Journal Article] Epitaxial PMnN-PZT/Si MEMS ultrasonic rangefinder with 2 m range at 1 V drive2017
- Author(s)
  Zhen Zhou, Shinya Yoshida, Shuji Tanaka
- Journal Title
  
  Sensors and Actuators A: Physical
  
  Volume: 266 Pages: 352-360
- DOI
  10.1016/j.sna.2017.09.058
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K17500
[Journal Article] Development of buffer layer structure for epitaxial growth of (100)/(001)Pb(Zr,Ti)O 3 -based thin film on (111)Si wafer2017
- Author(s)
  Takeshi Hayasaka, Shinya Yoshida, Shuji Tanaka
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 56 Issue: 7 Pages: 071501-071501
- DOI
  10.7567/jjap.56.071501
- NAID
  210000147990
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K17500
[Journal Article] MEMS用PZTの高性能化2016
- Author(s)
  吉田　慎哉
- Journal Title
  
  セラミックデータブック2016/17
  
  Volume: 2016/17 Pages: 117-121
- Data Source
  KAKENHI-PROJECT-16K17500
[Journal Article] Enhanced Curie Temperature and High Heat Resistivity of PMnN-PZT Monocrystalline Thin Film on Si.2016
- Author(s)
  Shinya Yoshida, Hiroaki Hanzawa, Kiyotaka Wasa, Shuji Tanaka
- Journal Title
  
  Sensors & Actuators: A. Physical
  
  Volume: 251 Pages: 100-107
- DOI
  10.1016/j.sna.2016.10.009
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-16K17500
[Journal Article] Fabrication and characterization of large figure-of-merit epitaxialPMnN-PZT/Si transducer for piezoelectric MEMS sensors2016
- Author(s)
  Shinya Yoshida, Hiroaki Hanzawa, Kiyotaka Wasa, Shuji Tanaka
- Journal Title
  
  Sensors and Actuators A
  
  Volume: 239 Pages: 201-208
- DOI
  10.1016/j.sna.2016.01.031
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25286033
[Journal Article] PZT薄膜とPZT MEMS2015
- Author(s)
  吉田慎哉, 森山雅昭
- Journal Title
  
  金属
  
  Volume: 85 Pages: 701-707
- Data Source
  KAKENHI-PROJECT-25286033
[Journal Article] Highly c-Axis Oriented Monocrystalline Pb(Zr, Ti)O3 Thin Films on Si Wafer Prepared by Fast Cooling Immediately after Sputter Deposition2014
- Author(s)
  Shinya Yoshida, Hiroaki Hanzawa, Kiyotaka Wasa, Masayosh Esashi, Shuji Tanaka
- Journal Title
  
  IEEE Transactions on Ultrasonics, Feroelectrics, and Frequency Control
  
  Volume: 61 Issue: 9 Pages: 1552-1558
- DOI
  10.1109/tuffc.2014.3069
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25286033
[Journal Article] Conformal coating of poly-glycidyl methacrylate as lithographic polymer via initiated chemical vapor deposition2012
- Author(s)
  Shinya Yoshida, Tatsuya Kobayashi, Masafumi Kumano, Masayoshi Esashi
- Journal Title
  
  Journal of Micro/Nanolithography, MEMS, and MOEMS
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22710119
[Journal Article] Etching Technology Using Ozone for Chemically Stable Polymer in MEMS.2011
- Author(s)
  Hideaki Yanagida, Shinya Yoshida, Masayoshi Esashi, Shuji Tanaka
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines
  
  Volume: 131 Pages: 122-127
- NAID
  10027805324
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22710119
[Journal Article] Local electrical modification of a conductivity-switching polyimide film formed by molecular layer deposition2011
- Author(s)
  Shinya Yoshida, Takahito Ono and Masayoshi Esashi
- Journal Title
  
  Nanotechnology
  
  Volume: 22 Pages: 335302-335302
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22710119
[Journal Article] Etching Technology Using Ozone for Chemically Stable Polymer in MEMS2011
- Author(s)
  Hideaki Yanagida, Shinya Yoshida, Masayoshi Esashi, Shuji Tanaka
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines
  
  Volume: 131(3) Pages: 122-127
- NAID
  10027805324
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22710119
[Journal Article] Local electrical modification of a conductivity-switching polyimide film formed by molecular layer deposition2011
- Author(s)
  Shinya Yoshida, Takahito Ono, Masayoshi Esashi
- Journal Title
  
  Nanotechnology
  
  Volume: 22 Pages: 335302-335302
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22710119
[Journal Article] Redox active polymers with phenothiazine moieties for nanoscale patterning via conductive scanning force microscopy2011
- Author(s)
  Ali A. Golriz, Tassilo Kaule, Jeannine Heller, Maria B. Untch, Philipp Schattling, Patrick Theato, Masaya Toda, Shinya Yoshida, Takahito Ono, Hans-Jurgen Butt, Jochen Stefan Gutmann and Rudiger Berger
- Journal Title
  
  Nanoscale
  
  Volume: 3(12) Pages: 5049-5058
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22710119
[Journal Article] Deposition of conductivity-switching polyimide film by molecular layer deposition and electrical modification using scanning probe microscope2010
- Author(s)
  Shinya Yoshida, Takahito Ono, Masayoshi Esashi
- Journal Title
  
  Micro & Nano Letters
  
  Volume: 5(5) Pages: 321-323
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22710119
[Journal Article] モノリシックPZT多軸マイクロステージ2009
- Author(s)
  小野崇人、モハマドファイズル、吉田慎哉、江刺正喜
- Journal Title
  
  マテリアルインテグレーション 22(4)
  
  Pages: 39-44
- Data Source
  KAKENHI-PROJECT-20860005
[Journal Article] モノリシックPZT多軸マイクロステージ2009
- Author(s)
  小野崇人, モハマドファイズル, 吉田慎哉, 江刺正喜
- Journal Title
  
  株式会社ティー・アイ・シィーマテリアルインテグレーション Vol.22(No.4)
  
  Pages: 39-44
- Data Source
  KAKENHI-PROJECT-20860005
[Journal Article] Advanced materials for MEMS.2009
- Author(s)
  江刺正喜, 吉田慎哉, Masanori Muroyama
- Journal Title
  
  WPI-AIMR NEWS 6
  
  Pages: 85-95
- Data Source
  KAKENHI-PROJECT-20860005
[Journal Article] Advanced materials for MEMS2009
- Author(s)
  Masayoshi Esashi, Shinya Yoshida, Masanori Muroyama
- Journal Title
  
  WPI-AIMR NEWS 6
  
  Pages: 85-95
- Data Source
  KAKENHI-PROJECT-20860005
[Journal Article] Formation of a Flat Conductive Polymer Film Using Template-Stripped Gold (TSG) Surface and Surface-Graft Polymerization for Scanning Multiprobe Data Storage2008
- Author(s)
  Shinya Yoshida, Takahito Ono, Masayoshi Esashi
- Journal Title
  
  e-Journal of Surface Science and Nanotechnology 6
  
  Pages: 202-208
- NAID
  130004439098
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20860005
[Journal Article] Conductive polymer recording media for scanning multiprobe data storage system2008
- Author(s)
  Shinya Yoshida, Takahito Ono, and Masayoshi Esashi
- Journal Title
  
  Proceeding of International Workshop on Nanomechanical Cantilever Sensors 5
  
  Pages: 127-128
- Data Source
  KAKENHI-PROJECT-20860005
[Journal Article] Conductive polymer patterned media fabricated by diblock copolymer lithography for scanning multiprobe data storage2008
- Author(s)
  Shinya Yoshida, Takahito Ono, Masayoshi Esashi
- Journal Title
  
  Nanotechnology 19(47)
  
  Pages: 475302-475400
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20860005
[Journal Article] CONDUCTIVE POLYMER PATTERNED MEDIA FABLICATED USING DIBLOCK COPOLYMER LITHOGRAPHY FOR SCANNING MULTIPROBE DATA STORAGE2008
- Author(s)
  Shinya Yoshida, Takahito Ono, Masayoshi Esashi
- Journal Title
  
  The proceedings of the 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies 4
  
  Pages: 1-4
- Data Source
  KAKENHI-PROJECT-20860005
[Presentation] バッファ層の領域選択的ウェットエッチングを利用した単結晶・多結晶コンポジットPZT薄膜のスパッタ成膜2024
- Author(s)
  片貝有作、勅使河原明彦、吉田慎哉
- Organizer
  2024年第71回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-23K23193
[Presentation] EPITAXIAL SM-DOPED PMN-PT FILM WITH HIGH PIEZOELECTRIC CONSTANT FOR MEMS APPLICATION2024
- Author(s)
  Kai Fukushi, Shinya Yoshida, Xuanmeng Qi, Shuji Tanaka
- Organizer
  IEEE MEMS2024
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23193
[Presentation] 圧電薄膜積層MEMSアクチュエータへの応用を目指したPZT/LaNiO3/PZTエピタキシャル積層構造の作製2024
- Author(s)
  加藤創吉、勅使河原明彦、吉田慎哉
- Organizer
  2024年第71回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-23K23193
[Presentation] DEVELOPMENT OF PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER WITH DUAL HETEROGENEOUS PIEZOELECTRIC THIN FILM STACKING2023
- Author(s)
  Xuanmeng Qi, Shinya Yoshida, Mohssen Moridi, Sarah Risquez, Anirban Ghosh, Shuji Tanaka
- Organizer
  Transducers 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23193
[Presentation] 高圧電定数を示すSm添加PMN-PT単結晶薄膜のスパッタ堆積と組成依存性の調査2023
- Author(s)
  福士海伊, 吉田慎哉, Qi Xuanmeng, 田中秀治
- Organizer
  第40回「センサ・マイクロマシンと応用システム」シンポジウム
- Data Source
  KAKENHI-PROJECT-23K23193
[Presentation] 圧電ＭＥＭＳの高性能化のための高性能圧電単結晶薄膜の研究2023
- Author(s)
  吉田慎哉
- Organizer
  第34回マイクロシステム融合研究会
- Invited
- Data Source
  KAKENHI-PROJECT-23K23193
[Presentation] MEMS応用のための高性能圧電単結晶薄膜のSi基板上への形成2023
- Author(s)
  吉田慎哉
- Organizer
  令和5年電気学会 A部門大会
- Invited
- Data Source
  KAKENHI-PROJECT-23K23193
[Presentation] Si 基板上への圧電薄膜のエピタキシャル成長と高性能圧電MEMS デバイスの創出2022
- Author(s)
  吉田慎哉
- Organizer
  第186回電子セラミック・プロセス研究会
- Invited
- Data Source
  KAKENHI-PROJECT-23K23193
[Presentation] Development of Piezoelectric Micromachined Ultrasonic Transducer with PZT-based Monocrystalline Thin Film2022
- Author(s)
  Shinya Yoshida
- Organizer
  Piezoelectric Materials and Applications in Actuators 2022
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23193
[Presentation] 多結晶を用いた区画化によるPZTエピタキシャル薄膜の亀裂進展抑制2022
- Author(s)
  吉田慎哉，勝又優，田中秀治
- Organizer
  第13回マイクロ・ナノ工学シンポジウム
- Data Source
  KAKENHI-PROJECT-23K23193
[Presentation] EPITAXIAL PB(ZR,TI)O3-BASED PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER FABRICATED ON SILICON-ON-NOTHING (SON) STRUCTURE2022
- Author(s)
  Takuma Sekiguchi, Shinya Yoshida, Yoshiaki Kanamori, and Shuji Tanaka
- Organizer
  IEEE MEMS 2023
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K23193
[Presentation] スパッタ法によるSm 添加PMN-PTのSi 基板上へのエピタキシャル成長2022
- Author(s)
  福士海伊, 吉田慎哉, Qi Xuanmeng, 田中秀治
- Organizer
  第39回「センサ・マイクロマシンと応用システム」シンポジウム
- Data Source
  KAKENHI-PROJECT-23K23193
[Presentation] 圧電MEMSのための鉛複合酸化物のスパッタエピタキシー2022
- Author(s)
  吉田慎哉
- Organizer
  スパッタリングおよびプラズマプロセス技術部会（SP 部会）第171 回定例研究会
- Invited
- Data Source
  KAKENHI-PROJECT-23K23193
[Presentation] Sm-doped Pb(Mg1/3, Nb2/3)O3-PbTiO3 Sputter-Epitaxy on Si Towards Giant-Piezoelectric Thin Film for MEMS2021
- Author(s)
  Xuanmeng Qi, Shinya Yoshida, Shuji Tanaka
- Organizer
  2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05231
[Presentation] SM-DOPED PB(MG1/3, NB2/3)O3-PBTIO3 SPUTTER-EPITAXY ON SI TOWARDS GIANT-PIEZOELECTRIC THIN FILM FOR MEMS2021
- Author(s)
  Xuanmeng Qi, Shinya Yoshida, Shuji Tanaka
- Organizer
  34th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2021)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01390
[Presentation] Sputter-Epitaxy of Sm-Doped Pb(Mg1/3, Nb2/3)O3-PbTiO3 on Si for Creation of Giant-Piezoelectric MEMS Actuator2021
- Author(s)
  Xuanmeng Qi, Shinya Yoshida, Shuji Tanaka
- Organizer
  圧電材料・デバイスシンポジウム2021
- Data Source
  KAKENHI-PROJECT-19K05231
[Presentation] Development of Piezoelectric Epitaxial Thin Film for High-Performance MEMS2021
- Author(s)
  Shinya Yoshida
- Organizer
  8th PiezoMEMS Workshop
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05231
[Presentation] Sputter-Epitaxy of Sm-Doped Pb(Mg1/3, Nb2/3)O3-PbTiO3 on Si towards Giant-Piezoelectric MEMS Actuator2021
- Author(s)
  Xuanmeng Qi, Shinya Yoshida, Shuji Tanaka
- Organizer
  8th PiezoMEMS Workshop
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05231
[Presentation] Sputter-Epitaxy of Sm-Doped Pb(Mg1/3, Nb2/3)O3-PbTiO3 on Si for Creation of Giant-Piezoelectric MEMS Actuator2021
- Author(s)
  Xuanmeng Qi, Shinya Yoshida and Shuji Tanaka
- Organizer
  圧電材料・デバイスシンポジウム
- Data Source
  KAKENHI-PROJECT-18H01390
[Presentation] 圧電MEMSのための高性能圧電薄膜の開発2021
- Author(s)
  吉田慎哉
- Organizer
  早稲田大学各務記念材料技術研究所オープンセミナー「次世代スマートフォン向けの圧電材料および弾性波デバイスの進展」
- Invited
- Data Source
  KAKENHI-PROJECT-19K05231
[Presentation] エピタキシャル圧電薄膜のSi基板上への成膜と高性能MEMSの創出2021
- Author(s)
  吉田慎哉
- Organizer
  公益社団法人日本セラミックス協会第34回秋季シンポジウム
- Invited
- Data Source
  KAKENHI-PROJECT-19K05231
[Presentation] Epitaxial Growth of Pure-Perovskite-Phase Sm-Doped Pb(Mg1/3Nb2/3)O3-PbTiO3 Thin Film on Si by Magnetron Sputter using Powder Target2020
- Author(s)
  Xuanmeng Qi, Shinya Yoshida, Shuji Tanaka
- Organizer
  Electroceramics XVII
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05231
[Presentation] Fabrication of Pure-Perovskite-Phase Sm-Doped Pb(Mg1/3,Nb2/3)O3-PbTiO3 Epitaxial Thin Film on Si by Magnetron Sputter using Powder Target2020
- Author(s)
  Xuanmeng Qi, Shinya Yoshida, Shuji Tanaka
- Organizer
  第67回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05231
[Presentation] Epitaxial Growth of Pure-Perovskite-Phase Sm-Doped Pb(Mg1/3Nb2/3)O3-PbTiO3 Thin Film on Si by Magnetron Sputter using Powder Target2020
- Author(s)
  Xuanmeng Qi, Shinya Yoshida, Shuji Tanaka
- Organizer
  Electroceramics XVII
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18H01390
[Presentation] Development of Sputter Deposition Technology of Sm-Doped Pb(Mg1/3Nb2/3)O3-PbTiO3 Epitaxial Thin Film with Pure Perovskite Phase on Si for Piezoelectric MEMS Actuator2020
- Author(s)
  Xuanmeng Qi, Shinya Yoshida, Shuji Tanaka
- Organizer
  圧電材料・デバイスシンポジウム2020
- Data Source
  KAKENHI-PROJECT-19K05231
[Presentation] Sputter Epitaxy of Sm-Doped Pb(Mg1/3Nb2/3)O3-PbTiO3 Thin Film on Si for High-performance Piezoelectric MEMS Actuator2019
- Author(s)
  Qi Xuanmeng, 吉田慎哉, 田中秀治
- Organizer
  第36回「センサ・マイクロマシンと応用システム」シンポジウム
- Data Source
  KAKENHI-PROJECT-19K05231
[Presentation] Si基板上c軸配向PZT系エピタキシャル成長への靭性付与法の探索2019
- Author(s)
  勝又優, 吉田慎哉, 田中秀治
- Organizer
  圧電材料・デバイスシンポジウム2020
- Data Source
  KAKENHI-PROJECT-18H01390
[Presentation] 良好な絶縁性を有するc軸配向PZT系単結晶薄膜のSi基板上への形成2019
- Author(s)
  海老原凌, 吉田慎哉, 田中秀治
- Organizer
  第36回「センサ・マイクロマシンと応用システム」シンポジウム
- Data Source
  KAKENHI-PROJECT-18H01390
[Presentation] 圧電薄膜デバイスと基板の選択2019
- Author(s)
  和佐清孝, 清水貴博, 足立英明, 吉田慎哉, 柳谷隆彦, 田中秀治
- Organizer
  圧電材料・デバイスシンポジウム2019
- Data Source
  KAKENHI-PROJECT-18H01390
[Presentation] 良好な絶縁性を有するMEMS用PZT系単結晶薄膜の形成法の探索2019
- Author(s)
  海老原凌, 吉田慎哉, 田中秀治
- Organizer
  圧電材料・デバイスシンポジウム2020
- Data Source
  KAKENHI-PROJECT-18H01390
[Presentation] 圧電MEMS超音波デバイスの高性能化と最新技術動向2018
- Author(s)
  吉田慎哉
- Organizer
  第15回圧電ＭＥＭＳ研究会
- Invited
- Data Source
  KAKENHI-PROJECT-16K17500
[Presentation] Ultrasonic MEMS Rangefinder with 2 m Range at 1 V Drive Based on Large Figure-of-Merit PMnN-PZT Epitaxial Thin Film2018
- Author(s)
  Shinya Yoshida
- Organizer
  PiezoMEMS 2018 Workshop
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K17500
[Presentation] エピタキシャルPMnN-PZT/Si トランスデューサを用いた高S/N 比pMUT レンジファインダー2017
- Author(s)
  吉田慎哉
- Organizer
  第64回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16K17500
[Presentation] MONOCRYSTALLINE PMNN-PZT THIN FILM ULTRASONIC RANGEFINDER WITH 2 METER RANGE AT 1 VOLT DRIVE2017
- Author(s)
  Shinya Yoshida
- Organizer
  The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K17500
[Presentation] エピタキシャルPMnN-PZT/Si トランスデューサを用いた高S/N 比pMUTレンジファインダー2017
- Author(s)
  吉田慎哉，周朕，田中秀治
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  神奈川県横浜市パシフィコ横浜
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-16K17500
[Presentation] Deposition Temperature Dependency of Characteristics of PMnN-PZT Epitaxial Thin Film on Si Prepared by Sputter Deposition with Fast Cooling.2016
- Author(s)
  Zhen Zhou、Shinya Yoshida、Shuji Tanaka
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  新潟県新潟市朱鷺メッセ
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-16K17500
[Presentation] Fabrication of pMUT Based on Large Figure-of-Merit Epitaxial PMnN-PZT/Si Transducer2016
- Author(s)
  Zhen Zhou, Shinya Yoshida, Shuji Tanaka
- Organizer
  The 8th Japan-China Symposium on Ferroelectric Materials and Their Applications (JCFMA8)
- Place of Presentation
  筑波　つくば国際会議場
- Year and Date
  2016-09-29
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K17500
[Presentation] Si基板上c軸配向PMnN-PZTエピタキシャル急冷薄膜の面内ひずみの高温XRD解析2016
- Author(s)
  吉田慎哉，田中秀治
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  新潟県新潟市朱鷺メッセ
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-16K17500
[Presentation] Sputtering Epitaxy of Highly c-Axis Oriented PMnN-PZT Thin Film on SrRuO3/Pt/Ir/YSZ/Si for Piezoelectric MEMS Sensors2016
- Author(s)
  Pham Ngoc Thao，Shinya Yoshida，Shuji Tanaka
- Organizer
  第33回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  長崎県　平戸平戸文化センター
- Year and Date
  2016-10-23
- Data Source
  KAKENHI-PROJECT-16K17500
[Presentation] Sputter Epitaxy of Large Figure-of-Merit PMnN-PZT thin film on Si for Ultrahigh-Performance Piezoelectric MEMS Sensor.2016
- Author(s)
  Shinya Yoshida
- Organizer
  The 11th Korea-Japan Conference on Ferroelectrics
- Place of Presentation
  韓国，ソウル
- Year and Date
  2016-08-07
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K17500
[Presentation] MEMS研究者から見た見た圧電MEMS と圧電材料2015
- Author(s)
  吉田慎哉, 田中秀治
- Organizer
  応用物理学会春季講演会
- Place of Presentation
  名古屋, 名古屋国際会議場
- Year and Date
  2015-09-13
- Invited
- Data Source
  KAKENHI-PROJECT-25286033
[Presentation] Advanced Piezoelectric Films for MEMS and Acoustic Wave Devices2015
- Author(s)
  S. Tanaka, S. Yoshida, M. Kadota, K. Wasa
- Organizer
  Sixth International Symposium on Acoustic Wave Devices for Future Mobile Communication Systems
- Place of Presentation
  千葉, 千葉大学
- Year and Date
  2015-11-24
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25286033
[Presentation] Epitaxial Growth of (100)/(001) PZT-Based Thin Film on (111) Si Wafer Using SrRuO3/LaNiO3/Pt/CeO2 Buffer Layer2015
- Author(s)
  Takeshi Hayasaka, Shinya Yoshida, Shuji Tanaka
- Organizer
  IEEE International Symposium on Applications of Ferroelectric (ISAF)
- Place of Presentation
  Singapore
- Year and Date
  2015-05-24
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25286033
[Presentation] K. Wasa, H. Hanzawa, S. Yoshida, S. Tanaka, H. Adachi, T. Matsunaga, Structure and Ferroelectric Properties of High TcBi(Me)O3-PbTiO3 Single Crystal Thin Films2015
- Author(s)
  K. Wasa, H. Hanzawa, S. Yoshida, S. Tanaka, H. Adachi, T. Matsunaga
- Organizer
  IEEE International Symposium on Applications of Ferroelectric (ISAF)
- Place of Presentation
  Singapore
- Year and Date
  2015-05-24
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25286033
[Presentation] LARGE FIGURE-OF-MERIT EPITAXIAL PB(MN,NB)O3-PB(ZR,TI)O3/SI TRANSDUCER FOR PIEZOELECTRIC MEMS SENSORS2015
- Author(s)
  Hiroaki Hanzawa, Shinya Yoshida, Kiyotaka Wasa, and Shuji Tanaka
- Organizer
  18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015
- Place of Presentation
  Anchorage, Alaska, USA
- Year and Date
  2015-06-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25286033
[Presentation] Sputter Deposition of Epitaxial Yttria-Stabilized Zirconia (YSZ) Buffer Layer on Large Diameter Si Wafer for Epitaxial PZT Thin Film Transducer2015
- Author(s)
  S. Yoshida, S. Nishizawa, T. Hayasaka, K. Wasa and S. Tanaka
- Organizer
  IEEE International Symposium on Applications of Ferroelectric (ISAF)
- Place of Presentation
  Singapore
- Year and Date
  2015-05-24
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25286033
[Presentation] 水素アニール処理のシリコンの破壊強度に与える影響2012
- Author(s)
  羽鹿亮, 吉田慎哉, 牧志渉, 金森義明, 江刺正喜
- Organizer
  2012年春季第59回応用物理学関係連合講演会
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-22710119
[Presentation] Conformal Coating of Lithographic Polymer on 3D Structure via Initiated Chemical Vapor Deposition for MEMS fabrication2012
- Author(s)
  Shinya Yoshida, Tatsuya Kobayashi, Masafumi Kumano, and Masayoshi Esashi
- Organizer
  The 2012 WPI-AIMR Annual Workshop
- Place of Presentation
  Sendai
- Data Source
  KAKENHI-PROJECT-22710119
[Presentation] 複合酸化物と貴金属のための多元系原子層堆積装置の開発2012
- Author(s)
  熊野勝文, 西野仁, 吉田慎哉, 田中秀治, 江刺正喜
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-22710119
[Presentation] 水素アニール処理のシリコンの破壊強度に与える影響2012
- Author(s)
  羽鹿亮, 吉田慎哉, 牧志渉, 金森義明, 江刺正喜
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-22710119
[Presentation] MEMS用難除去性高分子材料の高速除去のための蒸気オゾンエッチング装置の開発2012
- Author(s)
  原島卓也, 吉田慎哉, 江刺正喜, 田中秀治
- Organizer
  日本機械学会東北支部第47期総会
- Place of Presentation
  仙台
- Year and Date
  2012-03-13
- Data Source
  KAKENHI-PROJECT-22710119
[Presentation] MEMS用難除去性高分子材料の高速除去のための蒸気オゾンエッチング装置の開発2012
- Author(s)
  原島卓也, 吉田慎哉, 江刺正喜, 田中秀治
- Organizer
  日本機械学会東北支部第47期総会・講演会
- Place of Presentation
  仙台
- Year and Date
  2012-03-13
- Data Source
  KAKENHI-PROJECT-22710119
[Presentation] Fabrication of High-aspect-ratio PZT Structure by Nanocomposite Sol-gel Method for Laterally-driven Piezoelectric MEMS Switch2012
- Author(s)
  Nan Wang, Shinya Yoshida, Masafumi Kumano, Yusuke Kawai, Masayoshi Esashi
- Organizer
  NEMS 2012
- Place of Presentation
  京都
- Data Source
  KAKENHI-PROJECT-22710119
[Presentation] Fabrication of High-aspect-ratio PZT Structure by Nanocomposite Sol-gel Method for Laterally-driven Piezoelectric MEMS Switch2012
- Author(s)
  Nan WANG, Shinya YOSHIDA, Masafumi KUMANO, Yusuke KAWAI and Masayoshi ESASHI
- Organizer
  7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems IEEE-NEMS 2012
- Place of Presentation
  Kyoto
- Data Source
  KAKENHI-PROJECT-22710119
[Presentation] CONFORMAL COATING OF POLY(GLYCIDYL METHACRYLATE) AS A LITHOGRAPHIC POLYMER BY INITIATED CHEMICAL VAPOR DEPOSITION2011
- Author(s)
  S.Yoshida, T.Kobayashi, M.Kumano, M.Esashi
- Organizer
  The 16th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers'11
- Place of Presentation
  中国、北京
- Data Source
  KAKENHI-PROJECT-22710119
[Presentation] 面内方向駆動型圧電MEMSスイッチのためのSi鋳型を用いた高アスペクト比PZT構造体の作製法の開発2011
- Author(s)
  王楠, 吉田慎哉, 熊野勝文, 江刺正喜
- Organizer
  日本機械学会第3回マイクロ・ナノ工学シンポジウム
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-22710119
[Presentation] CONFORMAL COATING OF POLY(GLYCIDYL METHACRYLATE)AS A LITHOGRAPHIC POLYMER BY INITIATED CHEMICAL VAPOR DEPOSITION.2011
- Author(s)
  S. Yoshida, T. Kobayashi, M. Kumano, and M. Esashi
- Organizer
  The 16th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers' 11
- Place of Presentation
  中国, 北京
- Data Source
  KAKENHI-PROJECT-22710119
[Presentation] Electrical modification on a conductivity-switching polyimide film formed by molecular layer deposition using scanning probe microscope2011
- Author(s)
  Shinya Yoshida, Takahito Ono and Masayoshi Esashi
- Organizer
  The 2011 WPI-AIMR Annual Workshop
- Place of Presentation
  仙台
- Data Source
  KAKENHI-PROJECT-22710119
[Presentation] 面内方向駆動型圧電MEMSスイッチのためのSi 鋳型を用いた高アスペクト比PZT構造体の作製法の開発2011
- Author(s)
  王楠, 吉田慎哉, 熊野勝文, 江刺正喜
- Organizer
  第3回マイクロ・ナノ工学シンポジウム
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-22710119
[Presentation] Electrical modification on a conductivity-switching polyimide film formed by molecular layer deposition using scanning Probe microscope2011
- Author(s)
  Shinya Yoshida
- Organizer
  The 2011 WPI-AIMR Annual Workshop
- Place of Presentation
  仙台
- Year and Date
  2011-02-22
- Data Source
  KAKENHI-PROJECT-22710119
[Presentation] Investigation of frictional and elastic properties of a conductive polymer brush by atomic force microscopy for scanning probe data storage system2010
- Author(s)
  Shinya Yoshida
- Organizer
  The 2010 WPI-AIMR Annual Workshop
- Place of Presentation
  仙台
- Data Source
  KAKENHI-PROJECT-20860005
[Presentation] Deposition of a conductivity-switching polyimide film by molecular layer deposition and electrical modification using scanning probe microscope.2010
- Author(s)
  Shinya Yoshida
- Organizer
  The 36th international conference on Micro & Nano Engineering
- Place of Presentation
  イタリア、ジェノバ
- Year and Date
  2010-09-22
- Data Source
  KAKENHI-PROJECT-22710119
[Presentation] Investigation of Frictional and Elastic Properties of a Conductive Polymer Brush by Atomic Force Microscopy for MEMS Probe-Based Data Storage System2010
- Author(s)
  Shinya Yoshida, So Fujinami and Masayoshi Esashi
- Organizer
  5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010)
- Place of Presentation
  オーストラリア, パース
- Data Source
  KAKENHI-PROJECT-22710119
[Presentation] MEMS用難除去高分子材料のオゾンエッチング2010
- Author(s)
  柳田秀彰, 吉田慎哉, 江刺正喜, 田中秀治
- Organizer
  第27回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  島根
- Data Source
  KAKENHI-PROJECT-22710119
[Presentation] Investigation of Frictional and Elastic Properties of a Conductive Polymer Brush by Atomic Force Microscopy for MEMS Probe-Based Data Storage System.2010
- Author(s)
  Shinya Yoshida
- Organizer
  5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010)
- Place of Presentation
  オーストラリア、パース
- Year and Date
  2010-07-07
- Data Source
  KAKENHI-PROJECT-22710119
[Presentation] Investigation of Frictional and Elastic Properties of a Conductive Polymer Brush by Atomic Force Microscopy for MEMS Probe-Based Data Storage System2010
- Author(s)
  Shinya Yoshida, So Fujinami, Masayoshi Esashi
- Organizer
  The 2010 WPI-AIMR Annual Workshop
- Place of Presentation
  仙台・日本
- Data Source
  KAKENHI-PROJECT-20860005
[Presentation] Deposition of a conductivity-switching polyimide film by molecular layer deposition and electrical modification using scanning probe microscope2010
- Author(s)
  Shinya Yoshida, Takahito Ono, Masayoshi Esashi
- Organizer
  The 36th International Conference on Micro & Nano Engineering
- Place of Presentation
  イタリア, ジェノバ
- Data Source
  KAKENHI-PROJECT-22710119
[Presentation] Scanning multiprobe data storage system based on reversible co nductance change of conductive polymer2009
- Author(s)
  Shinya Yoshida
- Organizer
  2009 WPE-AIMR Annual Workshop
- Place of Presentation
  日本、仙台
- Data Source
  KAKENHI-PROJECT-20860005
[Presentation] Scanning multiprobe data storage system based on reversible conductance change of conductive polymer2009
- Author(s)
  Shinya Yoshida
- Organizer
  2009 WPI-AIMR Annual Workshop
- Place of Presentation
  仙台
- Data Source
  KAKENHI-PROJECT-20860005
[Presentation] CONDUCTIVE POLYMER PATTERNED MEDIA FABLICATED USING DIBLOCK COPOLYMER LITHOGRAPHY FOR SCANNING MULTIPROBE DATA STORAGE2008
- Author(s)
  Shinya Yoshida
- Organizer
  The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies
- Place of Presentation
  台湾、台南
- Year and Date
  2008-06-22
- Data Source
  KAKENHI-PROJECT-20860005
[Presentation] Conductive polymer recording media for scanning multiprobe data storage system2008
- Author(s)
  Shinya Yoshida
- Organizer
  International Workshop on Nanomechanical Cantilever Sensors 2008
- Place of Presentation
  ドイツ、マインツ
- Year and Date
  2008-05-19
- Data Source
  KAKENHI-PROJECT-20860005
[Presentation] Conductive polymer recording media for MEMS-based multiprobe data storage system2008
- Author(s)
  Shinya Yoshida
- Organizer
  Nanotech in Japan, the 4th International Nanotechnology Conference on Communications and Cooperation (INC4)
- Place of Presentation
  東京都千代田区
- Year and Date
  2008-04-14
- Data Source
  KAKENHI-PROJECT-20860005
[Presentation] マルチプローブ高密度記録のための導電性高分子記録媒体2008
- Author(s)
  吉田慎哉
- Organizer
  第69回応用物理学会学術講演会
- Place of Presentation
  愛知県春日井市
- Data Source
  KAKENHI-PROJECT-20860005
[Presentation] マルチプローブ高密度記録のための導電性高分子記録媒体2008
- Author(s)
  吉田慎哉
- Organizer
  第69回応用物理学会学術講演会
- Place of Presentation
  日本、愛知県
- Data Source
  KAKENHI-PROJECT-20860005
[Presentation] Conductive polymer recording media for MEMS-based multiprobe data storage system2008
- Author(s)
  Shinya Yoshida
- Organizer
  Nanotech in Japan, the 4th International Nanotechnology Conference on Communications and Cooperation (INC4)
- Place of Presentation
  日本, 東京
- Year and Date
  2008-04-14
- Data Source
  KAKENHI-PROJECT-20860005
[Presentation] CONDUCTIVE POLYMER PATTERNED MEDIA FABLICATED USING DIBLOCK COPOLYMER LITHOGRAPHY FOR SCANNING MULTIPROBE DATA STORAGE2008
- Author(s)
  Shinya Yoshida
- Organizer
  The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies
- Place of Presentation
  台湾
- Data Source
  KAKENHI-PROJECT-20860005
[Presentation] Conductive polymer recording media for scanning multiprobe data storage system2008
- Author(s)
  Shinya Yoshida
- Organizer
  International Workshop on Nanomechanical Cantilever Sensors 2008
- Place of Presentation
  ドイツ, Mainz
- Data Source
  KAKENHI-PROJECT-20860005
[Presentation] 圧電MEMSのためのスパッタ堆積による大口径Si基板上へのYSZバッファ層のエピタキシャル成長
- Author(s)
  西澤信典, 吉田慎哉, 和佐清孝, 田中秀治
- Organizer
  第62回応用物理学会春季学術講演会
- Place of Presentation
  東海大学湘南キャンパス，平塚，神奈川
- Year and Date
  2015-03-11 – 2015-03-14
- Data Source
  KAKENHI-PROJECT-25286033
[Presentation] 高性能圧電MEMSセンサのためのc軸配向PMnN-PZTエピタキシャル薄膜のSi基板上への形成
- Author(s)
  吉田慎哉, 半澤弘明, 和佐清孝, 田中秀治
- Organizer
  圧電材料・デバイスシンポジウム2015
- Place of Presentation
  東北大学，仙台，宮城
- Year and Date
  2015-02-18 – 2015-02-19
- Data Source
  KAKENHI-PROJECT-25286033
[Presentation] 急冷法によってc軸配向させたSi基板上のPMnN-PZT単結晶薄膜の高温特性
- Author(s)
  半澤弘明, 吉田慎哉, 和佐清孝, 田中秀治
- Organizer
  第62回応用物理学会春季学術講演会
- Place of Presentation
  東海大学湘南キャンパス，平塚，神奈川
- Year and Date
  2015-03-11 – 2015-03-14
- Data Source
  KAKENHI-PROJECT-25286033
[Presentation] Highly c-Axis Oriented Monocrystalline Pb(Zr, Ti)O3 based Thin Film on Si Wafer by Sputter Deposition with Fast Cooling Process
- Author(s)
  Hiroaki Hanzawa, Shinya Yoshida, Kiyotaka Wasa and Shuji Tanaka
- Organizer
  2014 IEEE International Ultrasonics Symposium
- Place of Presentation
  Chicago, Illinois, USA
- Year and Date
  2014-09-03 – 2014-09-06
- Data Source
  KAKENHI-PROJECT-25286033

1. Tanaka Shuji (00312611)

# of Collaborated Projects: 2 results

# of Collaborated Products: 20 results
2. 塚本貴城 (70646413)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

Yoshida Shinya 吉田 慎哉

YOSHIDA Shinya 吉田 慎哉

Research Projects

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Co-Researchers

Creation of innovative piezoelectric transducer thin films that combine the giant piezoelectricity of single crystals with the toughness of polycrystalsPrincipal Investigator

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Creation of Giant Piezoelectric Transducer Thin Film with High Curie Point and Breaking Performance Limit of Piezoelectric MEMSPrincipal Investigator

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Stable / Reliable Sensing and Precise Control of Piezoelectric Thin Film Actuators

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Creation of ultrahigh-performance piezoelectric micromachined ultrasonic rangefinder and its application to robot systemPrincipal Investigator

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Deposition of Ideally-oriented PZT Monocrystalline Thin Film on Si Substrate and Feasibility Study of Its Application to MEMS

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Research on robust and reliable RF-MEMS switch using conductive soft materialPrincipal Investigator

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Conductive polymer recording media architected in molecular level for scanning multiprobe data storagePrincipal Investigator

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[Journal Article] Epitaxial SM-Doped PMN-Pt Film with High Piezoelectric Constant for MEMS Application2024

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[Journal Article] Influence of underlayer roughness on the properties of Sc<sub>0.4</sub>Al<sub>0.6</sub>N thin films prepared via sputter deposition2024

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[Journal Article] Epitaxial P<sub>b</sub>(Z<sub>r</sub>,T<sub>i</sub>)O<sub>3</sub>-Based Piezoelectric Micromachined Ultrasonic Transducer Fabricated on Silicon-On-Nothing (SON) Structure2023

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[Journal Article] Sputter Deposition and Characterization of Sm-Doped Pb(Mg1/3, Nb2/3)O3?PbTiO3 Epitaxial Thin Film on Si toward Giant-Piezoelectric Thin Film for MEMS Actuator Application2022

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[Journal Article] スパッタ法によるSm 添加PMN-PTのSi 基板上へのエピタキシャル成長2022

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[Journal Article] Sm-doped Pb(Mg1/3, Nb2/3)O3-PbTiO3 Sputter-Epitaxy on Si Towards Giant-Piezoelectric Thin Film for Mems2021

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[Journal Article] Development of Sputter Epitaxy Technique of Pure-Perovskite (001)/(100)-Oriented Sm-Doped Pb(Mg1/3, Nb2/3)O3?PbTiO3 on Si2020

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Yoshida Shinya 吉田慎哉

YOSHIDA Shinya 吉田慎哉