NOMOTO Junichi 野本淳一

… Alternative Names

Junichi NOMOTO 野本淳一

野本淳一ノモトジュンイチ

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Researcher Number	30711288
Other IDs
Affiliation (Current)	2025: 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 主任研究員
Affiliation (based on the past Project Information) *help	2023 – 2024: 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 主任研究員 2021: 国立研究開発法人産業技術総合研究所, エレクトロニクス・製造領域, 研究員 2013 – 2015: 高知工科大学, 公私立大学の部局等, 助教
Review Section/Research Field	Principal Investigator Basic Section 29020:Thin film/surface and interfacial physical properties-related / Basic Section 21050:Electric and electronic materials-related / Thin film/Surface and interfacial physical properties Except Principal Investigator Environmental technology/Environmental materials
Keywords	Principal Investigator 透明導電膜 / 金属酸化物 / 光反応 / リマニュファクチャリング / 欠陥制御 / キャリア輸送 / 固相結晶化 / イオンプレーティング / マグネトロンスパッタリング / 配向制御 / 酸化亜鉛 / 透明導電酸化物 / キャリア輸送機構 … More Except Principal Investigator … More 電子・電気材料 / プラズマ加工 / 水素 / 表面・界面物性 / 環境材料 / 化学吸着 / 活性酸素 / スーパーオキシドアニオン / 起動時間 / 応答時間 / 酸化物半導体式 / superoxide / peroxide / 吸着酸素 / t90 / 半導体式センサー / 導電性薄膜 / 酸化亜鉛 / 酸化物半導体 / 半導体センサー / 水素センサー / グリーンケミストリ Less

光反応による透明導電膜の欠陥制御技術の確立とそのリマン応用に関する研究Principal Investigator
- Principal Investigator
  
  野本淳一
- Project Period (FY)
  2024 – 2026
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 29020:Thin film/surface and interfacial physical properties-related
- Research Institution
  National Institute of Advanced Industrial Science and Technology
Study on the effect of point defects on the high mobility in transparent conductive films and its control by photo irradiationPrincipal Investigator
- Principal Investigator
  
  Junichi NOMOTO
- Project Period (FY)
  2021 – 2023
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 21050:Electric and electronic materials-related
- Research Institution
  National Institute of Advanced Industrial Science and Technology
The control technology and influence of the structural properties of carrier transport for impurity-doped ZnO filmsPrincipal Investigator
- Principal Investigator
  
  Nomoto Junichi
- Project Period (FY)
  2014 – 2015
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  Kochi University of Technology
Hydrogen gas sensors having high sensitivity achieved by control of chemical states of adsorbed oxygen species
- Principal Investigator
  
  YAMAMOTO Tetsuya
- Project Period (FY)
  2012 – 2014
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Environmental technology/Environmental materials
- Research Institution
  Kochi University of Technology

All 2023 2022 2016 2015 2014 2013 Other

All Journal Article Presentation Book Patent

[Book] 工業材料2014
- Author(s)
  山本哲也、宋華平、野本淳一、牧野久雄
- Total Pages
  4
- Publisher
  日刊工業出版
- Data Source
  KAKENHI-PROJECT-24241025
[Book] スマートプロセス学会誌2013
- Author(s)
  山本哲也、宋華平、野本淳一、牧野久雄、岸本誠一、長田実
- Total Pages
  9
- Publisher
  一般社団法人　スマートプロセス学会
- Data Source
  KAKENHI-PROJECT-24241025
[Journal Article] Limiting factors of carrier concentration and transport of polycrystalline Ga-doped ZnO films deposited by ion plating with dc arc discharge2016
- Author(s)
  Junichi Nomoto, Hisao Makino, Tetsuya Yamamoto
- Journal Title
  
  Thin Solid Films
  
  Volume: 601 Pages: 13-17
- DOI
  10.1016/j.tsf.2015.10.034
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26790050
[Journal Article] Carrier mobility of highly transparent conductive Al-doped ZnO polycrystalline films deposited by radio-frequency, direct-current, and radio-frequency-superimposed direct-current magnetron sputtering: Grain boundary effect and scattering in the grain bulk2015
- Author(s)
  Junichi Nomoto, Hisao Makino and Tetsuya Yamamoto
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 117 Issue: 4
- DOI
  10.1063/1.4906353
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-24241025, KAKENHI-PROJECT-26790050
[Journal Article] Carbon monoxide gas sensing properties of Ga-doped ZnO film grown by ion plating with DC arc discharge2014
- Author(s)
  Seiichi Kishimoto, S. Akamatsu, Huaping Song, Junichi Nomoto, Hisao Makino and Tetsuya Yamamoto
- Journal Title
  
  Journal of Sensors and Sensor Systems
  
  Volume: 3 Issue: 2 Pages: 331-334
- DOI
  10.5194/jsss-3-331-2014
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-24241025
[Patent] 導電性部材及び該導電性部材の製造方法2023
- Inventor(s)
  野本淳一、山口巖、鯉田崇、土屋哲男
- Industrial Property Rights Holder
  国立研究開発法人産業技術総合研究所
- Industrial Property Rights Type
  特許
- Filing Date
  2023
- Overseas
- Data Source
  KAKENHI-PROJECT-21K04148
[Patent] 導電性部材及び該導電性部材の製造方法2022
- Inventor(s)
  野本淳一、山口巖、鯉田崇、土屋哲男
- Industrial Property Rights Holder
  国立研究開発法人産業技術総合研究所
- Industrial Property Rights Type
  特許
- Filing Date
  2022
- Data Source
  KAKENHI-PROJECT-21K04148
[Patent] 酸化亜鉛多結晶薄膜を用いたガスセンサ2014
- Inventor(s)
  山本哲也、岸本誠一、野本淳一、牧野久雄
- Industrial Property Rights Holder
  山本哲也、岸本誠一、野本淳一、牧野久雄
- Industrial Property Rights Type
  特許
- Filing Date
  2014-07-15
- Data Source
  KAKENHI-PROJECT-24241025
[Patent] 透明導電性酸化亜鉛薄膜2013
- Inventor(s)
  山本哲也、宋華平、野本淳一、牧野久雄
- Industrial Property Rights Holder
  山本哲也、宋華平、野本淳一、牧野久雄
- Industrial Property Rights Type
  特許
- Filing Date
  2013-08-19
- Data Source
  KAKENHI-PROJECT-24241025
[Patent] 酸化亜鉛多結晶薄膜を用いたガスセンサ2013
- Inventor(s)
  山本哲也、宋華平、野本淳一、牧野久雄
- Industrial Property Rights Holder
  山本哲也、宋華平、野本淳一、牧野久雄
- Industrial Property Rights Type
  特許
- Filing Date
  2013-08-22
- Data Source
  KAKENHI-PROJECT-24241025
[Presentation] Critical layer for achieving low-resistivity impurity-doped ZnO polycrystalline films with a preferred (0001) orientation by magnetron sputtering2016
- Author(s)
  Junichi Nomoto, Hisao Makino, Tetsuya Yamamoto
- Organizer
  EMN Meeting on Ceramics 2016
- Place of Presentation
  Eaton Hotel, Hong Kong, China
- Year and Date
  2016-01-25
- Data Source
  KAKENHI-PROJECT-26790050
[Presentation] Smart Hybrid of Two Different Deposition Technologies to Enhance Carrier Mobility of Highly Transparent Conductive Al-Doped ZnO Films with Well-Defined (0001) Orientation2016
- Author(s)
  Junichi Nomoto, Hisao Makino, Tetsuya Yamamoto
- Organizer
  43rd ICMCTF(International Conference on Metallurgical Coatings and Thin Films)
- Place of Presentation
  Town & Country Hotel, San Diego, CA, USA
- Year and Date
  2016-04-28
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26790050
[Presentation] 直流マグネトロンスパッタ多結晶 Al 添加 ZnO 透明導電膜の配向秩序特性及びキャリア輸送特性に与える Al 添加量の影響2016
- Author(s)
  野本淳一、牧野久雄、山本哲也
- Organizer
  2016年第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学大岡山キャンパス
- Year and Date
  2016-03-20
- Data Source
  KAKENHI-PROJECT-26790050
[Presentation] 酸素ガス流量と放電電流を制御因子とした反応性プラズマ蒸着 Ga 添加 ZnO 膜のキャリア輸送制御2015
- Author(s)
  野本淳一、牧野久雄、北見尚久、酒見俊之、山本哲也
- Organizer
  2015年第 76 回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場
- Year and Date
  2015-09-16
- Data Source
  KAKENHI-PROJECT-26790050
[Presentation] Control of carrier transport of polycrystalline Ga-doped ZnO films with oxygen gas flow rates and discharge current of reactive plasma deposition with dc arc discharge2015
- Author(s)
  Junichi Nomoto, Hisao Makino, Tetsuya Yamamoto
- Organizer
  E-MRS 2015 Spring Meeting
- Place of Presentation
  Lille Grand Palais, Lille, France
- Year and Date
  2015-05-12
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26790050
[Presentation] [講演奨励賞受賞記念講演]クリティカルレイヤーを用いたスパッタAl添加ZnO透明電導電膜のキャリア輸送制御(Ⅱ)2015
- Author(s)
  野本淳一、牧野久雄、山本哲也
- Organizer
  2015年第62回応用物理学会春季学術講演会
- Place of Presentation
  東海大学湘南キャンパス
- Year and Date
  2015-03-11
- Data Source
  KAKENHI-PROJECT-26790050
[Presentation] The characteristics of structural and electrical properties of polycrystalline Al-doped ZnO films by direct current magnetron sputtering using ZnO-Al2O3 targets2015
- Author(s)
  Junichi Nomoto, Hisao Makino, Tetsuya Yamamoto
- Organizer
  2015 MRS Fall Meeting & Exhibit
- Place of Presentation
  Boston, MA, USA
- Year and Date
  2015-12-02
- Invited
- Data Source
  KAKENHI-PROJECT-26790050
[Presentation] Smart Hybrid of Two Different Magnetron Sputtering Technologies to Enhance Electrical Properties of Highly Transparent Conductive Al-Doped ZnO Films with Well-Defined Single (0001) Orientation2015
- Author(s)
  Junichi Nomoto, Hisao Makino, and Tetsuya Yamamoto
- Organizer
  42nd ICMCTF (International Conference on Metallurgical Coatings and Thin Films)
- Place of Presentation
  Town & Country Hotel, San Diego, CA, USA
- Year and Date
  2015-04-22
- Data Source
  KAKENHI-PROJECT-26790050
[Presentation] The Characteristics of Structural Properties of Polycrystalline Al-doped ZnO Films by Direct Current Magnetron Sputtering using Various Al2O3 Contents in Ceramic Targets2015
- Author(s)
  Junichi Nomoto, Katsuhiko Inaba, Shintaro Kobayashi, Minoru Osada, Hisao Makino, Tetsuya Yamamoto
- Organizer
  第25回日本MRS年次大会
- Place of Presentation
  横浜情報文化センター
- Year and Date
  2015-12-08
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26790050
[Presentation] 高周波重畳直流スパッタAl添加ZnO透明電導電膜の電気特性に対する成膜電力の最適化2014
- Author(s)
  野本淳一、宋華平、牧野久雄、岸本誠一、山本哲也
- Organizer
  応用物理学会
- Place of Presentation
  青山学院大学
- Data Source
  KAKENHI-PROJECT-24241025
[Presentation] Sensing characteristics of highly conductive 50-nm-thcik Ga-doped ZnO films as hydrogen gas sensor2014
- Author(s)
  山本哲也、宋華平、野本淳一、牧野久雄
- Organizer
  E-MRS
- Place of Presentation
  Congress Center - Lille, France
- Data Source
  KAKENHI-PROJECT-24241025
[Presentation] Reduction of Contribution of Grain Boundary Scattering to Carrier Transport Using Critical Layers for Polycrystalline Al-Doped ZnO Films Prepared by Magnetron Sputtering2014
- Author(s)
  Junichi Nomoto, Hisao Makino, and Tetsuya Yamamoto
- Organizer
  E-MRS 2014 Spring Meeting
- Place of Presentation
  Lille Grand Palais, Lille, France
- Year and Date
  2014-05-28
- Data Source
  KAKENHI-PROJECT-26790050
[Presentation] 高周波重畳直流スパッタAl添加ZnO透明電導電膜の供給する成膜電力と各種特性との関係2014
- Author(s)
  野本淳一、牧野久雄、岸本誠一、山本哲也
- Organizer
  日本材料科学会四国支部主催第23回講演大会
- Place of Presentation
  高知工科大学宮ノ口キャンパス
- Year and Date
  2014-06-14
- Data Source
  KAKENHI-PROJECT-26790050
[Presentation] 酸化物半導体の物性・材料設計：秩序と混沌2014
- Author(s)
  山本哲也、宋華平、野本淳一、牧野久雄
- Organizer
  応用物理学会
- Place of Presentation
  青山学院大学
- Invited
- Data Source
  KAKENHI-PROJECT-24241025
[Presentation] Ｘ線光電子分光法によるＺｎＯ透明導電膜の極性評価2014
- Author(s)
  牧野久雄、宋華平、野本淳一、山本哲也
- Organizer
  応用物理学会
- Place of Presentation
  青山学院大学
- Data Source
  KAKENHI-PROJECT-24241025
[Presentation] クリティカルレイヤーを用いたスパッタAl添加ZnO透明電導電膜のキャリア輸送制御2014
- Author(s)
  野本淳一、牧野久雄、山本哲也
- Organizer
  2014年第75回応用物理学会秋季学術講演会
- Place of Presentation
  北海道大学札幌キャンパス
- Year and Date
  2014-09-19
- Data Source
  KAKENHI-PROJECT-26790050
[Presentation] 酸化亜鉛透明導電膜を感ガス材とした高出力電流水素センサー2014
- Author(s)
  山本哲也、岸本誠一、宋華平、野本淳一、牧野久雄
- Organizer
  応用物理学会
- Place of Presentation
  青山学院大学
- Data Source
  KAKENHI-PROJECT-24241025
[Presentation] Hydrogen-Gas Sensing Characteristics for Highly Transparent Conductive 50-nm-thcik Heavily Ga-doped ZnO Films2014
- Author(s)
  山本哲也、宋華平、野本淳一、牧野久雄
- Organizer
  IUMRS-ICEM 2014
- Place of Presentation
  TWTC Nangang Exhibition Hall, taipei, Taiwan
- Data Source
  KAKENHI-PROJECT-24241025
[Presentation] Critical Layer to Enhance Electrical Properties with Well-Defined Single (0001) Orientation of Polycrystalline Al-Doped ZnO Films Prepared by Magnetron Sputtering2014
- Author(s)
  Junichi Nomoto, Hisao Makino, and Tetsuya Yamamoto
- Organizer
  第24回日本MRS年次大会,第1回 E-MRS / MRS-J ジョイントシンポジウム
- Place of Presentation
  横浜市開港記念会館
- Year and Date
  2014-12-10
- Data Source
  KAKENHI-PROJECT-26790050
[Presentation] Characteristics of Carrier Transport in Highly Transparent Conductive Ga-Doped ZnO Films2013
- Author(s)
  山本哲也、宋華平、野本淳一、牧野久雄、岸本誠一
- Organizer
  3) The 16th Int. Conf. on II-VI Compounds and Related Materials (II-VI 2013)
- Place of Presentation
  長浜ロイヤルホテル
- Data Source
  KAKENHI-PROJECT-24241025
[Presentation] Al添加ZnO透明電導電膜の特性に及ぼす高周波重畳直流スパッタリング法の効果2013
- Author(s)
  野本淳一、宋華平、牧野久雄、岸本誠一、山本哲也
- Organizer
  応用物理学会
- Place of Presentation
  同志社大学
- Data Source
  KAKENHI-PROJECT-24241025
[Presentation] Weakly Bounded Zn Atoms in Polycrystalline ZnO Thin Films caused by Ga Doping2013
- Author(s)
  牧野久雄、宋華平、野本淳一、山本哲也
- Organizer
  The AVS 60th International Symposium and Exhibition
- Place of Presentation
  Long Beach Convention Center, CA, USA
- Data Source
  KAKENHI-PROJECT-24241025
[Presentation] Characterization of chemical states in near surface region of Ga-doped ZnO thin films by x-ray photoemission spectroscopy2013
- Author(s)
  牧野久雄、宋華平、野本淳一、宋華平、山本哲也
- Organizer
  E-MRS 2013 Spring Meeting
- Place of Presentation
  Congress Center - Strasbourg, France
- Data Source
  KAKENHI-PROJECT-24241025
[Presentation] Sustainable Moisture Resistant Carrier Transport of Highly Transparent Conductive Ga-Doped ZnO Films Controlled by dc arc Plasma Technique2013
- Author(s)
  山本哲也、宋華平、野本淳一、牧野久雄
- Organizer
  the 8th Asia-Pacific International Symposium on the Basics and Applications of Plasma Technology (APSPT-8)
- Place of Presentation
  National Chiao Tung University (NCTU), Hsinchu, Taiwan
- Data Source
  KAKENHI-PROJECT-24241025
[Presentation] Control of Moisture Resistant Properties of Highly Transparent Conductive Ga-Doped ZnO Films2013
- Author(s)
  山本哲也、宋華平、野本淳一、牧野久雄、岸本誠一
- Organizer
  E-MRS 2013 Spring Meeting
- Place of Presentation
  Congress Center - Strasbourg, France
- Data Source
  KAKENHI-PROJECT-24241025
[Presentation] Characteristics of Carrier Transport of Highly Transparent Conductive Ga-Doped ZnO Polycrystalline Films: Theory and Experimental
- Author(s)
  山本哲也、岸本誠一、野本淳一、牧野久雄
- Organizer
  E-MRS/MRS-J Bilateral Symposia Materials Frontier for Transparent Advanced Electronics
- Place of Presentation
  Yokohama Port Opening Plaza
- Year and Date
  2014-12-10 – 2014-12-14
- Invited
- Data Source
  KAKENHI-PROJECT-24241025
[Presentation] 酸化亜鉛透明導電膜を感ガス材とした高速高出力電流水素センサ
- Author(s)
  山本哲也、岸本誠一、野本淳一、牧野久雄
- Organizer
  第62回応用物理学会春季学術講演会
- Place of Presentation
  東海大学湘南キャンパス
- Year and Date
  2015-03-11 – 2015-03-14
- Data Source
  KAKENHI-PROJECT-24241025
[Presentation] Characteristics of carrier transport of Al- or Ga-doped ZnO highly transparent conductive films: Theory and Experimental
- Author(s)
  山本哲也、野本淳一、牧野久雄
- Organizer
  International Conference & Exhibition on Ceramic Interconnect & Ceramic Microsystems Technologies
- Place of Presentation
  The Fraunhofer Institute for Ceramic Technologies and Systems IKTS
- Year and Date
  2015-04-20 – 2015-04-23
- Invited
- Data Source
  KAKENHI-PROJECT-24241025
[Presentation] Materials Design of Wide Band Gap ZnO for Wide Applications
- Author(s)
  山本哲也、岸本誠一、野本淳一、牧野久雄
- Organizer
  The Collaborative Conference on 3D Materials Research
- Place of Presentation
  Incheon/Seou, South Korea Songdo Convensia
- Year and Date
  2014-06-23 – 2014-06-27
- Invited
- Data Source
  KAKENHI-PROJECT-24241025
[Presentation] ワイドバンドギャップ酸化亜鉛における価電子メタモルフォロジ
- Author(s)
  山本哲也、岸本誠一、野本淳一、牧野久雄
- Organizer
  第62回応用物理学会春季学術講演会シンポジウム：合同セッションＫワイドギャップ酸化物半導体材料・デバイス
- Place of Presentation
  東海大学湘南キャンパス
- Year and Date
  2015-03-11 – 2015-03-14
- Invited
- Data Source
  KAKENHI-PROJECT-24241025
[Presentation] Characteritics of carrier transport of highly transparent conductive Al or Ga-doped ZnO films for wide applications; electrodes, plasmonics and chemical sensors
- Author(s)
  山本哲也、岸本誠一、野本淳一、牧野久雄
- Organizer
  Collaborative Conference on 3D and Materials Research (CC3DMR) 2015
- Place of Presentation
  Busan, South Korea
- Year and Date
  2015-06-15 – 2015-06-19
- Invited
- Data Source
  KAKENHI-PROJECT-24241025
[Presentation] Hydrogen-gas sensing characteristics for highly transparent conductive 50-nm-thick heavily Ga-doped ZnO films
- Author(s)
  岸本誠一、野本淳一、牧野久雄、山本哲也
- Organizer
  IUMRS-ICEM 2014
- Place of Presentation
  TWTC Nangang Exhibition Hall, Taipei, TAIWAN
- Year and Date
  2014-06-10 – 2014-06-14
- Data Source
  KAKENHI-PROJECT-24241025
[Presentation] Characteristics of n-type-doped ZnO films for future optoelectric devices
- Author(s)
  山本哲也、野本淳一、牧野久雄
- Organizer
  第25回日本MRS年次大会
- Place of Presentation
  横浜市開港記念会館
- Year and Date
  2015-12-08 – 2015-12-10
- Invited
- Data Source
  KAKENHI-PROJECT-24241025

1. YAMAMOTO Tetsuya (30320120)

# of Collaborated Projects: 1 results

# of Collaborated Products: 24 results
2. SONG Huaping (00611831)

# of Collaborated Projects: 1 results

# of Collaborated Products: 15 results
3. MAKINO Hisao (40302210)

# of Collaborated Projects: 1 results

# of Collaborated Products: 24 results
4. KISHIMOTO Seiichi (90177816)

# of Collaborated Projects: 1 results

# of Collaborated Products: 13 results
5. KOBAYASHI Keisuke (50372149)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

NOMOTO Junichi 野本 淳一

Junichi NOMOTO 野本 淳一

野本 淳一 ノモト ジュンイチ

Research Projects

Research Products

Co-Researchers

光反応による透明導電膜の欠陥制御技術の確立とそのリマン応用に関する研究Principal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

Study on the effect of point defects on the high mobility in transparent conductive films and its control by photo irradiationPrincipal Investigator

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The control technology and influence of the structural properties of carrier transport for impurity-doped ZnO filmsPrincipal Investigator

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Hydrogen gas sensors having high sensitivity achieved by control of chemical states of adsorbed oxygen species

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[Book] 工業材料2014

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[Book] スマートプロセス学会誌2013

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[Journal Article] Limiting factors of carrier concentration and transport of polycrystalline Ga-doped ZnO films deposited by ion plating with dc arc discharge2016

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[Journal Article] Carrier mobility of highly transparent conductive Al-doped ZnO polycrystalline films deposited by radio-frequency, direct-current, and radio-frequency-superimposed direct-current magnetron sputtering: Grain boundary effect and scattering in the grain bulk2015

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[Journal Article] Carbon monoxide gas sensing properties of Ga-doped ZnO film grown by ion plating with DC arc discharge2014

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[Patent] 導電性部材及び該導電性部材の製造方法2023

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[Patent] 導電性部材及び該導電性部材の製造方法2022

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[Patent] 酸化亜鉛多結晶薄膜を用いたガスセンサ2014

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[Patent] 透明導電性酸化亜鉛薄膜2013

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[Patent] 酸化亜鉛多結晶薄膜を用いたガスセンサ2013

NOMOTO Junichi 野本淳一

Junichi NOMOTO 野本淳一

野本淳一ノモトジュンイチ

[Presentation] 高周波重畳直流スパッタAl添加ZnO透明電導電膜の電気特性に対する成膜電力の最適化2014