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SUGAI Hideo  菅井 秀郎

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… Alternative Names

管井 秀郎  スガイ ヒデオ

SUGAI HIDEO  菅井 秀郎

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Researcher Number 40005517
External Links
Affiliation (based on the past Project Information) *help 2013: 中部大学, 工学部, 教授
2010: 中部大学, 工学部, 教授
2006: Nagoya University, Graduate School of Engineering, Professor, 大学院工学研究科, 教授
1999 – 2005: 名古屋大学, 大学院・工学研究科, 教授
1997 – 2004: Nagoya University, Graduate School of Engineering, Professor, 工学研究科, 教授 … More
2002: 名古屋大学, 大学院・工学研究科, 助教授
2000: 名古屋大学, 大学院・工学研究所, 教授
1997: 名古屋大学, 大学院・工学研究科, 教授
1992 – 1996: 名古屋大学, 工学部, 教授
1987 – 1990: Faculty of Engineering,Nagoya University, 工学部, 教授
1986: FACULTY OF ENGINEERING, NAGOYA UNIVERSITY, 工学部, 助教授
1986: FACULTY OF ENGINEERING, NAGOYA UNIVERSITY, 工学部, 助教授
1985: 名古屋大学, 工, 助教授 Less
Review Section/Research Field
Principal Investigator
プラズマ理工学 / Plasma science
Except Principal Investigator
プラズマ理工学 / Plasma science
Keywords
Principal Investigator
水素リサイクリング / プラズマプロセス / hydrogen recycling / マイクロ波放電 / silicon oxidation / liquid crystal display / large area plasma / slot antenna / surface wave plasma / シリコン酸化 … More / スロットアンテナ / 表面波プラズマ / XPS / イオンビーム / CVD / 大口径プラズマ / oxygen gettering / decaborane / boron coating / 不純物 / 核融合 / 酸素ゲッタリング / デカボラン / ボロンコーティング / plasma CVD / surface magnetic field / plasma etching / エッチング / 反応性プラズマ / 多極磁場 / 表面磁場 / プラズマCVD / プラズマエッチング / プラズマ / Double Plasma / Glow Discharge / Microwave Discharge / Electron Beam / Ion Beam / Plasma Process / Thin Film / ダブルプラズマ / グブルプラズマ / グロー放電 / 電子ビーム / 機能性薄膜 / Electron Cyclotron Resonance / Bernstein Mode Upper-Hybrid Resonance / Extraordinary Mode / Ordinary Mode / Mode Conversion / Weve Heating / 電子サイクロトロン加熱 / 高域混成共鳴 / 電磁波 / レィトレーシング / 電子サイクロトロン共鳴 / アッパーハイブリッド共鳴 / バーンシュタイン波 / 異常波 / 正常波 / モード変換 / 波動加熱 / Hydrogen Recycling / Carbonization / Coating / Carbon / Plasma CVD / 壁 / 薄膜 / メタン / ダイアモンド状薄膜 / カーボニゼーション / コーティング / カーボン / プラスマCVD / micro-crystalline silicon / solar cell / microwave discharge / 液晶デイスプレイ / 液晶ディスプレス / 微結晶シリコン / 液晶ディスプレイ / 太陽電池 / 大面積プラズマ / oxygen radical / poly-silicon / electron energy distribution function / 表面加熱 / 体積加熱 / 酸素ラジカル / ポリシリコン / 液晶 / 電子エネルギー分布関数 / silicon / ion beam / neutral radical / surface reaction / etching / plaasma processing / プロズマプロセス / シリコン / 中性ラジカル / 表面反応 / lithium hydroxide / lithium hydride / tritium / hydrogen desorption / wall pumping / low-Zmaterial coating / lithium / プラズマ・壁相互作用 / 水酸化リチウム / 水素化リチウム / 昇温脱離 / 水素脱離 / 壁排気 / 低Z材コーティング / リチウム / ECR plasma / impurity control / rithium coating / first wall conditioning / ECRプラズマ / 不純物制御 / リチウムコーティング / 第一壁コンディショニング / indium-tin-oxide film / Faraday shield / helicon plasma / inductively coupled plasma / high density plasma / plasma process / 電子ビーム不安定 / 電子密度測定 / 誘導型RF放電 / シリコン・エッチング / 高周波プラズマ / 誘導型RF / 永久磁石 / アンテナ電磁界 / ラジカル / ファラデシールド / ITO薄膜 / 選択ドライエッチング / ヘリコン波プラズマ / ITO膜 / ファラデーシールド / ヘリコンプラズマ / 誘導結合型プラズマ / 高密度プラズマ / nuclear fusion / diborane / boronization / シボラン / デガボラン / ジボラン / ボロニゼーション / plasma-surface interaction / fragmentation / radio frequency discharge / multi-dipole field / plasma processing / 電子ビ-ム / デポジション / プラズマ・表面相互作用 / フラグメンテ-ション / 高周波放電 / 廃液処理 / マイクロ波 / ソノケミストリー / 超音波 … More
Except Principal Investigator
プラズマCVD / シース / 電子密度 / プラズマプロセス / マイクロ波プラズマ / プラズマ / 質量分析法 / メタンガス / Sheath / 表面波 / 分散関係 / プラズマ吸収プローブ / 堆積膜 / ダイヤモンド薄膜 / プラズマ・壁相互作用 / 膜堆積 / microwave plasma / surface wave plasma / 表面波プラズマ / 低温形成 / 多結晶シリコン / 誘導結合プラズマ / 電磁界解析 / 電子温度 / ラジカル絶対密度 / シランガス / Recycling / Carbon / Discharge Cleaning / Laser Blow-Off / Arcing / Plasma-Wall Interaction / レーザ / ブローオフ / 不純物 / 壁 / リサイクリング / コーティング / カーボン / 放電洗浄 / レーザブローオフ / アーク / Stark spectroscopy / Argon / Diode laser / Cost reduction / Measurement of sheath electric field / Laser-induced fluorescence-dip spectroscopy / シュタルク分光法 / アルゴン / 半導体レーザー / 低コスト化 / シース電界計測 / レーザー誘起蛍光減光法 / beam experiment / silicon dioxide / selective etching / fluorocarbon / ビーム実験 / 酸化シリコン / 選択エッチング / フロロカーボン / sheath / surface wave / dispersion relation / plasma absorption probe / deposition film / electron density / plasma processing / High Pressure Plasma / Large-area Thin Film Processing / Electromagnetic Wave Analysis / Microwave Launcher / Carbon Nanotube / Diamond Thin Film / Plasma CVD / Microwave Plasma / 時間差分法 / カーボン系薄膜 / 大面積プラズマCVD / アッシング / 高圧力プラズマ / 大面積薄膜プロセス / マイクロ波ランチャー / カーボンナノチューブ / pulse modulated discharge / VUV / vacuum ultraviolet / SEEC / secondary electron / PIII / ion implantation / plasma / 二次電子放出係数 / 半導体検出器 / 表面モニタ / 注入深さ / 二次電子放出率 / 二次電子 / プラズマイオン注入 / Fluorocarbon plasma / Debye length / Dispersion relation / Dielectric tube / Surface wave resonance / Plasma absorption probe / パワー吸収スペクトル / フロンプラズマ / diamond-like carbon film / field emission / diamond film / plasma CVD / 電子電界放出 / 電子エミッター / アモルファスカーボン膜 / ダイヤモンドライクカーボン膜 / 電界電子放出特性 / ダイヤモンド膜 / Radical desorption / Wall control / Ion bombardment / RF bias / plasma-wall interaction / Silicon dioxide / Etching / Plasma Process / ラジカル脱離 / 壁制御 / RFバイアス / シリコン酸化膜 / エッチング / 経時変化 / 中性ラジカル / クリーニング / イオン衝撃 / energy absorption mechanism / processing plasma / slot antenna / antenna-plasma coupling / 大面積プラズマ / エネルギー吸収機構 / プロセス用プラズマ / スロットアンテナ / アンテナ-プラズマ結合系 / large area deposition / high speed deposition / high-density plasma / lower temperature deposition / inductively-coupled plasma / poly-crystalline silicon / 大面積堆積 / 高速堆積 / 高密度プラズマ / low temperature deposition / ultraviolet transmission spectroscopy / radical diagnostics / polycrystalline silicon / appearance mass spectrometry / inductively coupled plasma / amorphus silicon / 水素化アモルファスシリコン / シランプラズマ / ラジカル計測 / 紫外透過分光法 / 出現質量分析法 / アモルファスシリコン / oxygen gettering / Hydrogen recycling / Lithium coating / Nuclear fusion / 酸素ゲッタリング / 水素リサイクリング / リチウムコーティング / 核融合 / ION / PROCESS / SPECTROSCOPY / MODELING / PARTICLES / LASER / PLASMA / FREE RADICAL / シリコン / イオン / プロセス / 分光 / モデリング / 微粒子 / レーザー / フリーラジカル / 反応速度定数 / ラジカル検出 / しきい値イオン化法 / レーザ誘起蛍光法 / ネットワークアナライザ / パルス放電 / プローブ / モニタリング / 電子状態 / 小型化 / マイクロ波共振器プローブ / 周波数シフトプローブ / 太陽風 / オーロラ / 雷 / 活性種 / 放電 / 励起 / 電離 / aーSi;H薄膜 / ラジカル流束 / レ-ザ-分光法 / ラジカル反応速度 / ラジカル空間分布 / レーザー分光法 Less
  • Research Projects

    (32 results)
  • Research Products

    (123 results)
  • Co-Researchers

    (35 People)
  •  Measurements of Electron Conditions in High Pressure Plasmas for Materials Processing

    • Principal Investigator
      NAKAMURA Keiji
    • Project Period (FY)
      2011 – 2013
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Plasma science
    • Research Institution
      Chubu University
  •  Investigation on development of advanced frequency shift probe

    • Principal Investigator
      NAKAMURA Keiji
    • Project Period (FY)
      2008 – 2010
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Plasma science
    • Research Institution
      Chubu University
  •  超音波キャビテーションによる液中プラズマ生成と応用のさきがけ研究Principal Investigator

    • Principal Investigator
      菅井 秀郎
    • Project Period (FY)
      2005 – 2006
    • Research Category
      Grant-in-Aid for Exploratory Research
    • Research Field
      Plasma science
    • Research Institution
      Nagoya University
  •  Cost reduction and performance improvement of electric field measurement in plasmas by laser-induced fluorescence-dip spectroscopy

    • Principal Investigator
      SASAKI Koichi
    • Project Period (FY)
      2004 – 2006
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Plasma science
    • Research Institution
      Nagoya University
  •  Development of Giant Plasma Processing Based on Large-Area Microwave DischargePrincipal Investigator

    • Principal Investigator
      SUGAI Hideo
    • Project Period (FY)
      2003 – 2005
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Plasma science
    • Research Institution
      Nagoya University
  •  Measurements of electron density and electron temperature with plasma absorption probe and its application to deposited plasmas

    • Principal Investigator
      NAKAMURA Keiji
    • Project Period (FY)
      2003 – 2005
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Plasma science
    • Research Institution
      Chubu University
  •  Surface Reaction Processes of Fluorocarbon Molecule and Fundamental Research on New Etching Process

    • Principal Investigator
      TOYODA Hirotaka
    • Project Period (FY)
      2003 – 2004
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Plasma science
    • Research Institution
      Nagoya University
  •  Development of High-Pressure, High-Density Micorwave Plasma Source and Its Application to Large-area Thin Film Processing

    • Principal Investigator
      NAGATSU Masaaki
    • Project Period (FY)
      2002 – 2003
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      プラズマ理工学
    • Research Institution
      Shizuoka University
  •  Surface Modification and Behavior of Ions and Radicals in Plasma Immersion Ion Implantation

    • Principal Investigator
      NAKAMURA Keiji
    • Project Period (FY)
      2001 – 2002
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      プラズマ理工学
    • Research Institution
      Chubu University
  •  Development of Large-area High-quality LCD Processing by Surface Wave PlasmaPrincipal Investigator

    • Principal Investigator
      SUGAI Hideo
    • Project Period (FY)
      2000 – 2002
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      プラズマ理工学
    • Research Institution
      Nagoya University
  •  電離気体現象とその応用に関する企画調査

    • Principal Investigator
      佐藤 徳芳
    • Project Period (FY)
      1999
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      プラズマ理工学
    • Research Institution
      Tohoku University
  •  Study of Large-Area Diamond Film Deposition using Planar Surface-Wave Plasma

    • Principal Investigator
      NAGATSU Masaaki
    • Project Period (FY)
      1999 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (B).
    • Research Field
      プラズマ理工学
    • Research Institution
      Nagoya University
  •  New Technique for measuring electron density under soiled conditions and its application for precise process control

    • Principal Investigator
      NAKAMURA Keiji
    • Project Period (FY)
      1999 – 2001
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      プラズマ理工学
    • Research Institution
      Chubu University
  •  Study on Surface Reaction Processes Using High Performance Beam DevicePrincipal Investigator

    • Principal Investigator
      SUGAI Hideo
    • Project Period (FY)
      1998 – 2001
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      プラズマ理工学
    • Research Institution
      Nagoya University
  •  Development of new wall control method and plasma-wall interaction in fluorocarbon plasmas

    • Principal Investigator
      NAKAMURA Keiji
    • Project Period (FY)
      1998 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      プラズマ理工学
    • Research Institution
      Chubu University
      Nagoya University
  •  Lower-Temperature Deposition of Poly-crystalline Silicon Film by High-Density Plasma

    • Principal Investigator
      TOYODA Hirotaka
    • Project Period (FY)
      1997 – 1999
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      プラズマ理工学
    • Research Institution
      Nagoya University
  •  Clarification of Microwave Absorption Mechanism in Surface Wave Plasma and Optimization of Plasma-Antenna Coupling

    • Principal Investigator
      NAGATSU Masaaki
    • Project Period (FY)
      1997 – 1998
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      プラズマ理工学
    • Research Institution
      Nagoya University
  •  Development of Selective Hydrogen Pumping Method Using Lithium FilmsPrincipal Investigator

    • Principal Investigator
      SUGAI Hideo
    • Project Period (FY)
      1995 – 1997
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      プラズマ理工学
    • Research Institution
      Nagoya University
  •  Diagnostic and Control of Silane Plasmas by Newlv Developed Radical Measurement Technique

    • Principal Investigator
      TOYODA Hirotaka
    • Project Period (FY)
      1995 – 1996
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      プラズマ理工学
    • Research Institution
      Nagoya University
  •  Novel First-Wall Conditioning in Stationary Reactor StudiesPrincipal Investigator

    • Principal Investigator
      SUGAI Hideo
    • Project Period (FY)
      1994 – 1995
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      プラズマ理工学
    • Research Institution
      Nagoya University
  •  STUDIES ON MEASUREMENTS OF RADICALS IN GAS PHASE USING SPECTROSCOPY TECHNIQUES

    • Principal Investigator
      GOTO Toshio
    • Project Period (FY)
      1993 – 1995
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Nagoya University
  •  Basic study on lithium coating and plasma-surface processes

    • Principal Investigator
      TOYODA Hirotaka
    • Project Period (FY)
      1993 – 1994
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      プラズマ理工学
    • Research Institution
      Nagoya University
  •  Optimization of Particle Control by BoronizationPrincipal Investigator

    • Principal Investigator
      SUGAI Hideo
    • Project Period (FY)
      1992 – 1993
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      プラズマ理工学
    • Research Institution
      Nagoya University
  •  Development of large-diameter RF plasmas under surface magnetic fieldPrincipal Investigator

    • Principal Investigator
      SUGAI Hideo
    • Project Period (FY)
      1992 – 1994
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B)
    • Research Field
      プラズマ理工学
    • Research Institution
      Nagoya University
  •  プラズマCVDにおけるラジカルの空間分布と輸送の制御

    • Principal Investigator
      橘 邦英
    • Project Period (FY)
      1990
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Kyoto Institute of Technology
  •  プラズマCVDにおけるラジカルの空間分布と輸送の制御

    • Principal Investigator
      TACHIBANA Kunihide
    • Project Period (FY)
      1989
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Kyoto Institute of Technology
  •  Development of Low-Energy Particle-Beam Sources for Super-fine Plasma ProcessingPrincipal Investigator

    • Principal Investigator
      SUGAI Hideo
    • Project Period (FY)
      1989 – 1990
    • Research Category
      Grant-in-Aid for Developmental Scientific Research (B).
    • Research Field
      プラズマ理工学
    • Research Institution
      Nagoya University
  •  プラズマCVDにおけるラジカルの空間分布と輸送の制御

    • Principal Investigator
      橘 邦英
    • Project Period (FY)
      1988
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Research Institution
      Kyoto Institute of Technology
  •  Formation of Functional Thin Films by a Double Plasma DevicePrincipal Investigator

    • Principal Investigator
      SUGAI Hideo
    • Project Period (FY)
      1987 – 1988
    • Research Category
      Grant-in-Aid for Developmental Scientific Research
    • Research Field
      プラズマ理工学
    • Research Institution
      Nagoya University
  •  Mode Conversion Phenomena of Electromagnetic Waves in a Magnetized PlasmaPrincipal Investigator

    • Principal Investigator
      SUGAI Hideo
    • Project Period (FY)
      1986 – 1987
    • Research Category
      Grant-in-Aid for General Scientific Research (B)
    • Research Field
      プラズマ理工学
    • Research Institution
      Nagoya University
  •  DEVELOPMENT OF CARBON COATING BY PLASMA CVDPrincipal Investigator

    • Principal Investigator
      SUGAI HIDEO
    • Project Period (FY)
      1985 – 1986
    • Research Category
      Grant-in-Aid for Developmental Scientific Research
    • Research Field
      プラズマ理工学
    • Research Institution
      NAGOYA UNIVERSITY
  •  PHYSICAL AND CHEMICAL PROCESSES AND ROLES OF A SHEATH IN PLASMA-WALL INTERACTIONS

    • Principal Investigator
      OKUDA TAKAYOSHI
    • Project Period (FY)
      1984 – 1986
    • Research Category
      Grant-in-Aid for General Scientific Research (A)
    • Research Field
      プラズマ理工学
    • Research Institution
      NAGOYA UNIVERSITY

All 2014 2013 2012 2011 2010 2009 2008 2006 2005 2004 2003 Other

All Journal Article Presentation Book

  • [Book] プラズマ診断の基礎と応用2006

    • Author(s)
      菅井 秀郎(分担執筆)
    • Publisher
      コロナ社
    • Data Source
      KAKENHI-PROJECT-15204053
  • [Book] プラズマ診断の基礎と応用(2.2,6.1,6.2章)2006

    • Author(s)
      菅井 秀郎(分担執筆)
    • Total Pages
      37
    • Publisher
      コロナ社
    • Data Source
      KAKENHI-PROJECT-17654117
  • [Book] Technology of Microwave Plasma2005

    • Author(s)
      H.Sugai
    • Total Pages
      257
    • Publisher
      Omu Company
    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15204053
  • [Book] マイクロ波プラズマの技術(電気学会・マイクロ波プラズマ調査専門委員会編)2003

    • Author(s)
      菅井 秀郎(分担執筆)
    • Total Pages
      257
    • Publisher
      オーム社
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Curling probe measurement of electron density in pulse-modulated plasma2014

    • Author(s)
      A. Pandey, W. Sakakibara and , H. Matsuoka, K. Nakamura and H. Sugai
    • Journal Title

      Appl. Phys. Lett

      Volume: Vol. 104

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Journal Article] Curling probe measurement of electron density in pulse-modulated plasma2014

    • Author(s)
      Anil Pandey, Wataru Sakakibara, Hiroyuki Matsuoka, Keiji Nakamura, Hideo Sugai
    • Journal Title

      Appl. Phys. Lett. Vol. 104

      Volume: 104

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Journal Article] Opto-Curling Probe for Simultaneous Monitoring of Optical Emission and Electron Density in Reactive Plasmas2013

    • Author(s)
      A. Pandey, K. Nakamura and H. Sugai
    • Journal Title

      Appl. Phys. Express

      Volume: Vol. 6 Pages: 56202-1

    • NAID

      10031174342

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Journal Article] Opto-Curling Probe for Simultaneous Monitoring of Optical Emission and Electron Density in Reactive Plasmas2013

    • Author(s)
      Anil Pandey, Keiji Nakamura, Hideo Sugai
    • Journal Title

      Appl. Phys. Express

      Volume: 6

    • NAID

      10031174342

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Journal Article] Observation of Optical Fluorescence of GaN Thin Fims in an Inductively Coupled Plasma Containing High Energy Electrons2010

    • Author(s)
      Y.Guo, K.Nakamura, J.Zhang, Y.Nakano, H.Sugai
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: 50

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Journal Article] Advanced high-pressure plasma diagnostics with hairpin resonator probe surrounded by film and sheath2010

    • Author(s)
      J.Xu, J.Shi, J.Zhang, Q.Zhang, K.Nakamura, H.Sugai
    • Journal Title

      Chinese Physics B 29

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Journal Article] Observation of Optical Fluorescence of GaN Thin Films in an Inductively-Coupled Plasma Containing High Energy Electrons2010

    • Author(s)
      Y.Guo, K.Nakamura, J.Zhang, Y.Nakano, H.Sugai
    • Journal Title

      Jpn.J.Appl.Phys. 50

    • NAID

      210000138234

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Journal Article] 反応性プロセシングプラズマにおける電子密度測定用平板型マイクロ波共振器プローブとシース効果2010

    • Author(s)
      中村圭二, 張祺, 菅井秀郎
    • Journal Title

      電気学会論文誌A

      Volume: 130 Pages: 930-934

    • NAID

      10026693463

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Journal Article] 反応性プロセシングプラズマにおける電子密度測定用平板型マイクロ波共振器プローブとシース効果2010

    • Author(s)
      中村圭二,張祺,菅井秀郎
    • Journal Title

      電気学会論文誌A 130

      Pages: 930-934

    • NAID

      10026693463

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Journal Article] Advanced high-pressure plasma diagnostics with hairpin resonator probesurrounded by film and sheath2010

    • Author(s)
      J.Xu, J.Shi J.Zhang, Q.Zhang, K.Nakamura, H.Sugai
    • Journal Title

      Chinese Physics B

      Volume: 19

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Journal Article] Simulation of Resistive Microwave Resonant Probe for High Pressure Plasma Diagnostics2009

    • Author(s)
      J.Xu, K.Nakamura, Q.Zhang, H.Sugai
    • Journal Title

      Plasma Sources Science and Technology 28

      Pages: 45009-45018

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Journal Article] Extension of Frequency Shift Probes for Monitoring of Electron Temperature2008

    • Author(s)
      K.Nakamura, Q.Zhang, H.Sugai
    • Journal Title

      Proc.30th international symposium on dry process

      Pages: 181-182

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Journal Article] Extension of Frequency Shift Probes for Monitoring of Electron Temperature2008

    • Author(s)
      K. Nakamura, Q. Zhang, H. Sugai
    • Journal Title

      Proc. 30th international symposium on dry process

      Pages: 181-182

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Journal Article] Investigation on Surface Wave Probe for Measurements of Electron Density and Electron Temperature2006

    • Author(s)
      O.Hirano, K.Nakamura, H.Sugai
    • Journal Title

      Proc.6th Int.Conf.Reactive Plasmas (ICRP-6)/ 23rd Symp.Plasma Processing, (January 2006, Japan), P-3B-14

      Pages: 727-728

    • Data Source
      KAKENHI-PROJECT-15340200
  • [Journal Article] Slot-Excited Surface Wave Plasma for Giant Scale Processing2006

    • Author(s)
      H.Sugai, Y.Nojiri, T.Ishijima, H.Toyoda
    • Journal Title

      Proceedings of 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing

      Pages: 17-18

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Slot-Exited Surface Wave Plasma for Giant Scale Processing2006

    • Author(s)
      H.Sugai, Y.Nojiri, T.Ishijima, H.Toyoda
    • Journal Title

      Proceedings of 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing

      Pages: 17-18

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] High-Pressure Large-Area Cold Plasma Production by Microwave Discharge2006

    • Author(s)
      Y.Kouyama, T.Ishijima, H.Sugai
    • Journal Title

      Proceedings of 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing

      Pages: 581-582

    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Microwave Irradiation Effect on Sonoluminescence Excited by Ultrasonic Waves2006

    • Author(s)
      H.Hotta, T.Ishijima, M.Sato, H.Sugai
    • Journal Title

      Proceedings of 6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing

      Pages: 579-580

    • Data Source
      KAKENHI-PROJECT-17654117
  • [Journal Article] Production of Multi-Bubblc Plasmas in Water by Slot-Excited Microwave Discharge2006

    • Author(s)
      H.Hotta, T Ishijima, M.Sato, H.Sugai
    • Journal Title

      Proceedings of 6th International Symposium on Dry Process

      Pages: 313-314

    • Data Source
      KAKENHI-PROJECT-17654117
  • [Journal Article] Evidence of Direct SiO_2 Etching by Fluorocarbon Molecules under Ion Bombardment2005

    • Author(s)
      N.Takada, H.Toyoda, I.Murakami, H.Sugai
    • Journal Title

      Journal of Applied Physics 97・1

    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Gas Feed Position Control for High-Quality μc-Si Film Deposition at High Speed in Surface Wave Plasma2005

    • Author(s)
      Y.Hotta, T.Okayasu, Y.Takanishi, H.Toyoda, H.Sugai
    • Journal Title

      Proceedings of 5th International Symposium on Dry process

      Pages: 297-298

    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] ジャイアントプラズマプロセス -低圧から大気圧プロセスまで-2005

    • Author(s)
      菅井 秀郎
    • Journal Title

      静電気学会誌 29・3

      Pages: 144-149

    • NAID

      10015672530

    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Control of Meter-Scale High-Density Microwave Plasma for Giant Materials Processing2005

    • Author(s)
      Y.Nojiri, Y.Yamaguchi, T.Ishijima, H.Sugai
    • Journal Title

      Proceedings of 5th International Symposium on Dry process

      Pages: 19-20

    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Diagnostics of Surface Wave Plasmas for Giant Materials Processing2005

    • Author(s)
      H.Sugai, Y.Nojiri, T.Ishijima, E.Stamatc, H.Toyoda
    • Journal Title

      Abstracts of 17th International Symposium on Plasma Chemistry

      Pages: 56-57

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Control of Meter-Scale High-Density Microwave Plasma for Giant Materials Processing2005

    • Author(s)
      Y.Nojiri, Y.Yamaguchi, T.Ishijima, H.Sugai
    • Journal Title

      Proceedings of 5th International Symposium on Dry Process

      Pages: 19-20

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Evidence of Direct SiO_2 Etching by Fluorocarbon Molecules under Ion Bombardment2005

    • Author(s)
      N.Takada, H.Toyoda, I.Murakami, H.Sugai
    • Journal Title

      Journal of Applied Physics 97・1

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15540474
  • [Journal Article] Diagnostics of Surface Wave Plasmas for Giant Materials Processing2005

    • Author(s)
      H.Sugai, Y.Nojiri, T.Ishijima, E.Stamate, H.Toyoda
    • Journal Title

      Abstracts of 17th International Symposium on Plasma Chemistry

      Pages: 56-57

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Electron Density Measurements with Surface Wave Probes in Magnetized Plasmas2005

    • Author(s)
      K.Nakamura, S.Yajima, H.Sugai
    • Journal Title

      American Vacuum Society 52nd Int.Symp.& Exhibition(October 2005, U.S.A) PS-TuP22

      Pages: 107-107

    • Data Source
      KAKENHI-PROJECT-15340200
  • [Journal Article] Distributions of electron density and deposition rate of a narrow-gap plasma polymerization system2005

    • Author(s)
      K.Kinoshita, K.Nakamura, J.Kawahara, O.Kiso, N.Toyoda, H.Sugai, T.Kikkawa
    • Journal Title

      XXVII International Conference on Phenomena in Ionized Gases, (July 17-22, Netherlands), 10-200 CD-ROM

    • Data Source
      KAKENHI-PROJECT-15340200
  • [Journal Article] Investigation of Energetic Electrons in a 915MHz Surface Wave Plasma2004

    • Author(s)
      E.Stamate, S.Nakao, H.Sugai
    • Journal Title

      Proc.ESCAMPIG 17 (The 17th European Conference on Atomic & Molecular Physics of Ionized Gases

      Pages: 31-32

    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Plasma Production and Control for Materials Processing2004

    • Author(s)
      H.Sugai, E.Abdel-Fattah, T.Ishijima, P.Ganachev
    • Journal Title

      Abstracts of 7th Asia Pacific Conference on Plasma Science and Technology & 17th Symposium on Plasma Science for Materials

      Pages: 503-503

    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Beam Study on the Si and SiO_2 Etching Processes by Energetic Fluorocarbon Ions2004

    • Author(s)
      H.Toyoda, H.Morishima, R.Fukute, Y.Hod, I.Murakami, H.Sugai
    • Journal Title

      Journal of Applied Physics 95・5

      Pages: 5172-5179

    • Data Source
      KAKENHI-PROJECT-15540474
  • [Journal Article] Influence of Dielectric Window Material and Pumping Speed on Silicon Film Crystallinity Deposited by Surface Wave Plasma2004

    • Author(s)
      Y.Hotta, H.Toyoda, H.Sugai
    • Journal Title

      Proceedings of 4th International Symposium on Dry Process

      Pages: 63-66

    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Investigation of Plasma Nitridation of Silicon (111) as a Mask Layer for GaN Selective Area Growth2004

    • Author(s)
      T.Ishijima, S.Frederico, Y.Honda, H.Sugai
    • Journal Title

      Abstracts of 7th Asia Pacific Conference on Plasma Science and Technology & 17th Symposium on Plasma Science for Materials

      Pages: 118-118

    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Experiment Evidence of SiO_2 Etching by Co-Incidence of Fluorocarbon Molecule and Energetic Ar Ion Beam2004

    • Author(s)
      N.Takada, H.Toyoda, H.Sugai
    • Journal Title

      Proc.International Symposium on Dry Process ‘04

      Pages: 47-50

    • Data Source
      KAKENHI-PROJECT-15540474
  • [Journal Article] Plasma Sources Development in VHF/Microwave Range for Materials Processing2004

    • Author(s)
      H.Sugai, E.Abdel-Fattah, E.Stamate, T.Ishijima
    • Journal Title

      Abstracts of International Symposium on Novel Materials Processing by Advanced Electromagnetic Energy Sources

      Pages: 28-28

    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] High Speed Deposition of μc-Si and Large Grain Poly-Si Films by Surface-Wave Excited H_2/SiH_4 Plasma2004

    • Author(s)
      T.Toyoda, Y.Hotta, H.Sugai
    • Journal Title

      Abstracts of 15th Symposium of Materials Research Society of Japan

      Pages: 138-138

    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Experiment Evidence of SiO_2 Etching by Co-Incidence of Fluorocarbon Molecule and Energetic Ar Ion Beam2004

    • Author(s)
      N.Takada, H.Toyoda, H.Sugai
    • Journal Title

      Proc.International Symposium on Dry Process '04

      Pages: 47-50

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15540474
  • [Journal Article] Chemical Reactivity of Fluorocarbon Molecules on SiO_2/Si Surface under Co-Incidence with Energetic Argon Ions2004

    • Author(s)
      N.Takada, H.Toyoda, H.Sugai
    • Journal Title

      Abstracts Asia Pacific Conference on Plasma Science and Technology/Symposium on Plasma Science for Materials

      Pages: 368-368

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15540474
  • [Journal Article] Beam Study on the Si and SiO_2_Etching Processes by Energetic Fluorocarbon Ions2004

    • Author(s)
      H.Toyoda, H.Morishima, R.Fukute, Y.Hori, I.Murakami, H.Sugai
    • Journal Title

      Journal of Applied Physics 95・5

      Pages: 5172-5179

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15540474
  • [Journal Article] Chemical Reactivity of Fluorocarbon Molecules on SiO_2/Si Surface under Co-Incidence with Energetic Argon Ions2004

    • Author(s)
      N.Takada, H.Toyoda, H.Sugai
    • Journal Title

      Abstracts Asia Pacific Conference on Plasma Science and Technology / Symposium on Plasma Science for Materials

      Pages: 368-368

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15540474
  • [Journal Article] Production of Meter-scale High-density Microwave Plasmas for Giant Materials Processing2004

    • Author(s)
      H.Sugai, Y.Nojiri, T.Ishijima, E.Stamate
    • Journal Title

      Abstracts of the 51th International Symposium on American Vacuum Society

      Pages: 112-112

    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Giant Plasma Production for Meter-scale Materials Processing2004

    • Author(s)
      H.Sugai, Y.Nojiri, K.Takasu, T.Ishijia
    • Journal Title

      Abstracts of 15th Symposium of Materials Research Society of Japan

      Pages: 143-143

    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Impurity Release and Suppression in Deposition of Nano-Micro and Poly-crystalline Sillicon Films by a Surface-Wave Excited Plasma2004

    • Author(s)
      H.Toyoda, S.Somiya, Y.Hotta, H.Sugai
    • Journal Title

      Proceedings of International Workshop on Plasma Nano-Technology and Its Future Vision

      Pages: 17-17

    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Beam Study on the Si and SiO_2 Etching Processes by Energetic Fluorocarbon Ions2004

    • Author(s)
      H.Toyoda, H.Morishima, R.Fukute, Y.Hori, I.Murakami, H.Sugai
    • Journal Title

      Journal of Applied Physics 95・5

      Pages: 5172-5179

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15540474
  • [Journal Article] Radical Diagnostics in Silicon Oxidation Process Using Surface Wave Plasma2004

    • Author(s)
      T.Ishijima, Y.Tanabe, H.Sugai
    • Journal Title

      Abstracts of 15th Symposium of Materials Research Society of Japan

      Pages: 144-144

    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Investigation of Energetic Electrons in a 915MHz Surface Wave Plasma for Oxygen-based Resist Ashing2004

    • Author(s)
      S.Nakao, E.Stamate, H.Sugai
    • Journal Title

      Proceedings of 4th International Symposium on Dry Process

      Pages: 103-106

    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Suppression and Oxygen Impurity Incorporationinto Silicon Films Prepared from Surface-Wave Excited H_2/SiH_4 Plasma2004

    • Author(s)
      S.Somiya, H.Toyoda, Y.Hotta, H.Sugai
    • Journal Title

      Japanese Journal of Applied Physics Vol.43, No.11A

      Pages: 7696-7700

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Suppression and Oxygen Impurity Incorporation into Silicon Films Prepared from Surface-Wave Excited H_2/SiH_4 Plasma2004

    • Author(s)
      S.Somiya, H.Toyoda, Y.Hotta, H.Sugai
    • Journal Title

      Japanese Journal of Applied Physics 43・11A

      Pages: 7696-7700

    • NAID

      10014030844

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Novel Giant-Size Plasmas Produced by Microwave Discharge with Slot Antenna Array2004

    • Author(s)
      H.Sugai, Y.Nojiri, K.Takasu, T.Ishijima, E.Stamate
    • Journal Title

      Abstracts of the 57th Annual Gaseous Electronics Conference 49・5

      Pages: 10-10

    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Meter-Scale High-Density Microwave Plasma Production with Novel Antenna Coupler Design2004

    • Author(s)
      Y.Nojiri, K.Takasu, T.Ishijima, H.Sugai
    • Journal Title

      Proceedings of 4th International Symposium on Dry Process

      Pages: 67-70

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Observation of SiO_2/Si Surface under Co-incidence of Fluorocarbon Molecules and Energetic Argon Ions2004

    • Author(s)
      N.Takada, H.Toyoda, H.Sugai
    • Journal Title

      Proc.Int.COE Forum on Plasma Science and Technology

      Pages: 209-210

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15540474
  • [Journal Article] Investigation of Energetic Electrons in a 915 MHz Surface Wave Plasma Produced in Ar and O_22004

    • Author(s)
      E.Stamate, S.Nakao, H.Sugai
    • Journal Title

      Abstracts of 7th Asia Pacific Conference on Plasma Science and Technology & 17th Symposium on Plasma Science for Materials

      Pages: 222-222

    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Advanced Large-Area Microwave Plasmas for Materials Processing2003

    • Author(s)
      Ganachev, H.Sugai
    • Journal Title

      Surface and Coatings Technology Vol.174-175

      Pages: 15-20

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Observation of SiO_2 Surface Irradiated by Fluorocarbon Neutrals and Energetic Ion Beam2003

    • Author(s)
      H.Toyoda, N.Takada, H.Sugai
    • Journal Title

      Proc.Int.Sympo.Dry Process '03

      Pages: 259-264

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15540474
  • [Journal Article] Advanced Large-Area Microwave Plasmas for Materials Processing2003

    • Author(s)
      I.Ganachev, H.Sugai
    • Journal Title

      Surface and Coatings Technology 174-175

      Pages: 15-20

    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-15204053
  • [Journal Article] Electron Density Measurements with Surface Wave Probes in Magnetized Plasmas

    • Author(s)
      K.Nakamura, S.Yajima, H.Sugai
    • Journal Title

      American Vacuum Society 52nd Int.Symp. & Exhibition (October 2005, U.S.A) PS-TuP22

      Pages: 107-107

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15340200
  • [Journal Article] Investigation on Surface Wave Probe for Measurements of Electron Density and Electron Temperature

    • Author(s)
      O.Hirano, K.Nakamura, H.Sugai
    • Journal Title

      Proc.6th Int.Conf.Reactive Plasmas (ICRP-6)/23rd Symp.Plasma Processing (January 2006, Japan) P-3B-14

      Pages: 727-728

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15340200
  • [Journal Article] Distributions of electron density and deposition rate of a narrow-gap plasma polymerization system

    • Author(s)
      K.Kinoshita, K.Nakamura, J.Kawahara, O.Kiso, N.Toyoda, H.Sugai, T.Kikkawa
    • Journal Title

      Proc.27th Int.Conf Phenomena in Ionized Gases(ICPIG-2005);(July 2005, The Netherlands) 10-200

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-15340200
  • [Presentation] Curling probe analysis and simulation for collisional plasma2014

    • Author(s)
      A. Pandey, K. Nakamura and H. Sugai
    • Organizer
      8th International Conference on Reactive Plasmas (ICRP2014) /31st Symposium on Plasma Processing(SPP-31)
    • Place of Presentation
      Fukuoka Convention Center, Japan
    • Year and Date
      2014-02-05
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Presentation] Development of curling probe for monitoring of reactive plasmas2014

    • Author(s)
      K. Nakamura and H. Sugai
    • Organizer
      8th International Conference on Reactive Plasmas (ICRP2014) /31st Symposium on Plasma Processing(SPP-31)
    • Place of Presentation
      Fukuoka Convention Center, Japan
    • Year and Date
      2014-02-07
    • Invited
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Presentation] Simplified analysis and FDTD simulation of curling probe2014

    • Author(s)
      A. PANDEY, K. NAKAMURA and H. SUGAI
    • Organizer
      6th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials (ISPlasma2014) / 7th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2014)
    • Place of Presentation
      Meijo University, Japan
    • Year and Date
      2014-03-03
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Presentation] Simplified analysis and FDTD simulation of curling probe2014

    • Author(s)
      A. PANDEY, K. NAKAMURA and H. SUGAI
    • Organizer
      6th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials (ISPlasma2014)
    • Place of Presentation
      Nagoya, Japan
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Presentation] Curling probe analysis and simulation for collisional plasma2014

    • Author(s)
      A. Pandey, K. Nakamura and H. Sugai
    • Organizer
      8th International Conference on Reactive Plasmas (ICRP2013) /31st Symposium on Plasma Processing(SPP-31) (February 2014, Japan) 7C-AM-I5
    • Place of Presentation
      Fukuoka, Japan
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Presentation] Development of curling probe for monitoring of reactive plasmas2014

    • Author(s)
      K. Nakamura and H. Sugai
    • Organizer
      8th International Conference on Reactive Plasmas (ICRP2013) /31st Symposium on Plasma Processing(SPP-31) (February 2014, Japan) 7C-AM-I5
    • Place of Presentation
      Fukuoka, Japan
    • Invited
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Presentation] Opto-curling probe Monitoring of local density of electron and radicals2013

    • Author(s)
      A. Pandey, K. Kato. , S. Ikezawa, K. Nakamura and H. Sugai
    • Organizer
      21st International Symposium on Plasma Chemistry (ISPC2013)
    • Place of Presentation
      Cairns, Australia
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Presentation] Opto-curling Probe Method for Space-resolved Measurement of Electron and Radical Densities in Plasma2013

    • Author(s)
      A. Pandey, K. Nakamura and H. Sugai
    • Organizer
      35th Int. Symp. Dry Process (DPS2013)
    • Place of Presentation
      Korea
    • Year and Date
      2013-08-30
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Presentation] Opto-curling probe Monitoring of local density of electron and radicals2013

    • Author(s)
      A. Pandey, K. Kato. , S. Ikezawa, K. Nakamura and H. Sugai
    • Organizer
      21st International Symposium on Plasma Chemistry (ISPC2013)
    • Place of Presentation
      Australia
    • Year and Date
      2013-08-06
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Presentation] Opto-curling Probe Method for Space-resolved Measurement of Electron and Radical Densities in Plasma2013

    • Author(s)
      A. Pandey, K. Nakamura and H. Sugai
    • Organizer
      35th Int. Symp. Dry Process (DPS2013)
    • Place of Presentation
      Jeju, Korea
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Presentation] Miniaturization of Plane-Type Microwave Resonator Probe with Multi-Resonant Frequencies2012

    • Author(s)
      K. Nakamura, H. Kumazaki and N. Sugai
    • Organizer
      5th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2012) P-01
    • Place of Presentation
      Japan/ Meitetsu Inuyama Hotel
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Presentation] Miniaturization of Plane-Type Microwave Resonator Probe with Multi-Resonant Frequencies2012

    • Author(s)
      K. Nakamura, H. Kumazaki and H. Sugai
    • Organizer
      5th International Conference on Plasma-Nano Technology & Science (IC-PLANTS2012)
    • Place of Presentation
      Meitetsu Inuyama Hotel, Japan
    • Year and Date
      2012-03-09
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Presentation] Novel diagnostic tool, curling probe, for monitoring electron density during plasma processing2012

    • Author(s)
      Anil Pandey, Kimitaka Kato, Shunjiro Ikezawa, Keiji Nakamura, Hideo Sugai
    • Organizer
      65th Gaseous Electronics Conference
    • Place of Presentation
      Austin, Texas, U. S. A.
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Presentation] Monitoring of electron density and wall deposit by curling probe during plasma process2012

    • Author(s)
      A. Pandey, M. Imai, H. Kanematsu, S. Ikezawa, K. Nakamura and H. Sugai
    • Organizer
      2012 International Symposium on Dry Process
    • Place of Presentation
      Tokyo, Japan
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Presentation] Monitoring of electron density and wall deposit by curling probe during plasma process2012

    • Author(s)
      A. Pandey, M. Imai, H. Kanematsu, S. Ikezawa, K. Nakamura and H. Sugai
    • Organizer
      34th Int. Symp. Dry Process (DPS2012)
    • Place of Presentation
      Univ. Tokyo, Japan
    • Year and Date
      2012-11-16
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Presentation] Miniaturization of plane-type microwave resonator probe2012

    • Author(s)
      E. Kumazaki, K. Nakamura and H. Sugai
    • Organizer
      4th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials (ISPlasma2012) P2005A
    • Place of Presentation
      Japan/ Chubu University
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Presentation] In-situ Monitoring of Surface Modification of GaN Films Exposed to Inductively-Coupled Plasmas2012

    • Author(s)
      Keiji Nakamura, Mio-Gen Chen, Yoshitaka Nakano, Hideo Sugai
    • Organizer
      65th Gaseous Electronics Conference
    • Place of Presentation
      Austin, Texas, U. S. A.
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Presentation] スパイラルアンテナを用いたマルチ共振型マイクロ波共振器プローブの小型化2012

    • Author(s)
      中村圭二, 熊崎恵未, 菅井秀郎
    • Organizer
      第59回応用物理学関係連合講演会17p-B8-3
    • Place of Presentation
      東京・早稲田大学
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Presentation] In-situ Photoluminescence Measurements of GaN Films Exposed to Inductively-Coupled Plasmas2012

    • Author(s)
      K. Nakamura M. G. Chen, Y. Nakano and H. Sugai
    • Organizer
      2012 International Symposium on Dry Process
    • Place of Presentation
      Tokyo, Japan
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Presentation] Novel diagnostic tool, curling probe, for monitoring electron density during plasma processing2012

    • Author(s)
      A. PANDEY, Y. LIANG. , S. IKEZAWA, K. NAKAMURA and H. SUGAI
    • Organizer
      65th Annual Gaseous Electronics Conference (GEC)
    • Place of Presentation
      U. S. A.
    • Year and Date
      2012-10-24
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Presentation] In-situ Monitoring of Surface Modification of GaN Films Exposed to Inductively-Coupled Plasmas2012

    • Author(s)
      K. NAKAMURA, M. CHEN, Y. NAKANO and H. SUGAI
    • Organizer
      65th Annual Gaseous Electronics Conference (GEC)
    • Place of Presentation
      U. S. A.
    • Year and Date
      2012-10-25
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Presentation] In-situ Photoluminescence Measurements of GaN Films Exposed to Inductively-Coupled Plasmas2012

    • Author(s)
      K. NAKAMURA, M. CHEN, Y. NAKANO and H. SUGAI
    • Organizer
      34th Int. Symp. Dry Process (DPS2012)
    • Place of Presentation
      Univ. Tokyo, Japan
    • Year and Date
      2012-11-15
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Presentation] Miniaturization of plane-type microwave resonator probe2012

    • Author(s)
      E. Kumazaki, K. Nakamura and H. Sugai
    • Organizer
      4th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials (ISPlasma2012)
    • Place of Presentation
      Chubu Univ. Japan
    • Year and Date
      2012-03-05
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Presentation] マイクロ波共振器プローブを用いた密度計測における精度向上2011

    • Author(s)
      熊崎恵未, 中村圭二, 菅井秀郎
    • Organizer
      第72回応用物理学会学術講演会 31a-ZJ-3
    • Place of Presentation
      山形・山形大学
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Presentation] Miniaturization of Plane-Type Microwave Resonator Probe2011

    • Author(s)
      E.Kumazaki, K.Nakamura, H.Sugai
    • Organizer
      3rd Int.Symp.Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
    • Place of Presentation
      Nagoya, Japan
    • Year and Date
      2011-03-07
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] 周波数プローブによる電子密度計測2011

    • Author(s)
      中村圭二, 菅井秀郎
    • Organizer
      Plasma Conference 2011 (PLASMA2011) S-O1-1(招待講演)
    • Place of Presentation
      金沢・石川県立音楽堂
    • Data Source
      KAKENHI-PROJECT-23540581
  • [Presentation] E結合コンパクト周波数シフトプローブによる電子密度測定II2011

    • Author(s)
      梁以資, 加藤公孝, 中村圭二, 菅井秀郎
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(厚木市)(講演会は中止)
    • Year and Date
      2011-03-24
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] マイクロ波共振器プローブを用いた電子密度計測における測定精度向上';,;第58回応用物理学関係連合講演会2011

    • Author(s)
      熊崎恵未, 土屋貴, 中村博, 中村圭二, 菅井秀郎
    • Organizer
      第58回応用物理学関係連合講演会
    • Place of Presentation
      神奈川工科大学(厚木市)(講演会は中止)
    • Year and Date
      2011-03-24
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] Electron Density Measurement by Novel Frequency Shift Probe2011

    • Author(s)
      I.Liang, K.Kato, K.Nakamura, H.Sugai
    • Organizer
      3rd Int.Symp.Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
    • Place of Presentation
      Nagoya, Japan
    • Year and Date
      2011-03-07
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] コンパクト周波数シフトプローブによる電子密度測定2010

    • Author(s)
      梁以資, 加藤公孝, 熊崎恵未, 中村圭二, 菅井秀郎
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-15
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] マイクロ波共振プローブの高次モードによる電子密度計測2010

    • Author(s)
      保田将宏, 梁以資, 太田習, 加藤公孝, 中村圭二, 菅井秀郎
    • Organizer
      平成22年度電気関係学会東海支部連合大会
    • Place of Presentation
      中部大学(春日井市)
    • Year and Date
      2010-08-30
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] Plasma Electron Monitoring with Multi-Resonator Frequency Shift Probe2010

    • Author(s)
      Q.Zhang, K.Nakamura, H.Sugai
    • Organizer
      2nd International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials
    • Place of Presentation
      Nagoya, Japan
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] Expansion to Higher Mode in Electron Density Measurement by Microwave resonator Probe2010

    • Author(s)
      I.Liang, S.Ohta, K.Kato, K.Nakamura, H.Sugai
    • Organizer
      63rd Gaseous Electronica Conference (GEC2010)/7th Int.Conf.Reactive Plasmas (ICRP-7)/28th Syp.Plasma Processing (SPP-28)
    • Place of Presentation
      Paris, France
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] 電界結合型周波数シフトプローブによる電子密度計測2010

    • Author(s)
      梁以資, 加藤公孝, 中村圭二, 菅井秀郎
    • Organizer
      平成22年度電気関係学会東海支部連合大会
    • Place of Presentation
      中部大学(春日井市)
    • Year and Date
      2010-08-30
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] スパイラルアンテナを用いた小型マイクロ波共振器プローブによる電子密度測定2010

    • Author(s)
      中村博, 新海康史, 土屋貴, 熊崎恵未, 中村圭二, 菅井秀郎
    • Organizer
      平成22年度電気関係学会東海支部連合大会
    • Place of Presentation
      中部大学(春日井市)
    • Year and Date
      2010-08-30
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] 電子密度測定用マイクロ波共振プローブの高次モードへの拡張2010

    • Author(s)
      梁以資, 太田習, 加藤公孝, 中村圭二, 菅井秀郎
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学
    • Year and Date
      2010-09-15
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] スパイラルアンテナを用いたマイクロ波共振器プローブの小型化2010

    • Author(s)
      熊崎恵未, 新海康史, 中村圭二, 菅井秀郎
    • Organizer
      平成22年度電気関係学会東海支部連合大会
    • Place of Presentation
      中部大学(春日井市)
    • Year and Date
      2010-08-30
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] Monitoring of Electron Density with Frequency Shift Probes in Reactive Processing Plasmas2009

    • Author(s)
      K.Nakamura, Q.Zhang, H.Sugai
    • Organizer
      2nd Int.Conf.Plasma-Nano Technol.& Sci.(IC-PLANTS2009)
    • Place of Presentation
      Nagoya, Japan
    • Year and Date
      2009-01-22
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] Application of Frequency Shift Probes for Monitoring of Electron Temperature2009

    • Author(s)
      Q. Zhang, K. Nakamura, H. Sugai
    • Organizer
      8th International Workshop of Advanced Plasma Processing and Diagnostics
    • Place of Presentation
      Gifu, Japan
    • Year and Date
      2009-01-21
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] Influence of Polymer Depositon on Electron Monitoring with Frequency Shift Probes2009

    • Author(s)
      Q. Zhang, K. Nakamura, H. Sugai
    • Organizer
      1st Int. Symp. Advanced Plasma Science& its Applications (ISPlasma 2009)
    • Place of Presentation
      Nagoya, Japan
    • Year and Date
      2009-03-08
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] Influence of Sheath on Measurement of Electron Density in Frequency Shift Probe and its Application to Measurement of Electron Temperature2009

    • Author(s)
      K.Nakamura, Q.Zhang, H.Sugai
    • Organizer
      American Vaccuum Society 56th Int.Symp.and Exhibition (AVS-56)
    • Place of Presentation
      San Jose, U.S.A.
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] Monitoring of Electron Density with Frequency Shift Probes in Reactive Processing Plasmas2009

    • Author(s)
      K. Nakamura, Q. Zhang, H. Sugai
    • Organizer
      2nd Int. Conf. Plasma-Nano Technol. &Sci. (IC-PLANTS2009)
    • Place of Presentation
      Nagoya, Japan
    • Year and Date
      2009-01-22
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] Development of Electron-Based Plasma Monitoring for Precise Control of Plasma Process2009

    • Author(s)
      K. Nakamura, H. Sugai
    • Organizer
      1st Int. Symp. Advanced Plasma Science& its Applications (ISPlasma 2009)
    • Place of Presentation
      Nagoya, Japan
    • Year and Date
      2009-03-08
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] Development of Electron-Based Plasma Monitoring for Precise Control of Plasma Process2009

    • Author(s)
      K.Nakamura, H.Sugai
    • Organizer
      1st Int.Symp.Advanced Plasma Science & its Applications (ISPlasma 2009)
    • Place of Presentation
      Nagoya, Japan
    • Year and Date
      2009-03-08
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] Influence of Polymer Depositon on Electron Monitoring with Frequency Shift Probes2009

    • Author(s)
      Q.Zhang, K.Nakamura, H.Sugai
    • Organizer
      1st Int.Symp.Advanced Plasma Science & its Applications (ISPlasma2009)
    • Place of Presentation
      Nagoya, Japan
    • Year and Date
      2009-03-08
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] 周波数シフトプローブを用いた大気圧プラズマのモニタリングの検討2009

    • Author(s)
      金徐州, 中村圭二, 菅井秀郎
    • Organizer
      第56回応用物理学関係連合講演会
    • Place of Presentation
      つくば市・筑波大学
    • Year and Date
      2009-03-30
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] Microwave Plasma Control with use of Multi-Hollow Dielectric Plate2009

    • Author(s)
      S. Ohta, T. Sano, Y. Liang, K. Nakamura, H. Sugai
    • Organizer
      1st Int. Symp. Advanced Plasma Science& its Applications (ISPlasma 2009)
    • Place of Presentation
      Nagoya, Japan
    • Year and Date
      2009-03-08
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] Sheath Effects on Electron Density Measurements in Frequency Shift Probe and their Application to Electron Temperature Measurements2009

    • Author(s)
      K.Nakamura, Q.Zhang, H.Sugai
    • Organizer
      62nd Gaseous Electronics Conference (GEC2009)
    • Place of Presentation
      Saratoga, U.S.A.
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] Influence of Polymer Deposition on Frequency Shift Probe2009

    • Author(s)
      張祺, 中村圭二, 菅井秀郎
    • Organizer
      プラズマ科学シンポジウム2009/第26回プラズマプロセシング研究会
    • Place of Presentation
      名古屋市・名古屋大学
    • Year and Date
      2009-02-02
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] 周波数シフトプローブによるSiウェハーを介した電子密度計測の基礎的検討2008

    • Author(s)
      式地祐麻, 井上雄介, 張祺, 中村圭二, 菅井秀郎
    • Organizer
      平成20年度電気関係学会東海支部連合大会
    • Place of Presentation
      愛知県・愛知県立大学
    • Year and Date
      2008-09-18
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] Development of Frequency Shift Probes for Monitoring of Electron Density in Reactive Nano-Materials Processing Plasmas2008

    • Author(s)
      K. Nakamura, Q. Zhang, H. Sugai
    • Organizer
      IUMRS International Conference in Asia2008 (IUMRS-ICA 2008)
    • Place of Presentation
      Nagoya, Japan
    • Year and Date
      2008-12-09
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] Development of Frequency Shift Probes for Monitoring of Electron Density in Reactive Nano-Materials Processing Plasmas2008

    • Author(s)
      K.Nakamura, Q.Zhang, H.Sugai
    • Organizer
      IUMRS International Conference in Asia 2008 (IUMRS-ICA 2008)
    • Place of Presentation
      Nagoya, Japan(招待講演)
    • Year and Date
      2008-12-09
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] マイクロ波マルチホロー放電におけるプラズマ制御 ; (2008年9月 愛知県立大学)0-0086, p.2008

    • Author(s)
      太田習, 佐野貴憲, 塩出悠喜, 加藤公孝, 中村圭二, 菅井秀郎
    • Organizer
      平成20年度電気関係学会東海支部連合大会
    • Place of Presentation
      愛知県・愛知県立大学
    • Year and Date
      2008-09-18
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] Effects of probe shape on electron density measurements with frequency shift2008

    • Author(s)
      probesK. Nakamura, Q. Zhang, H. Sugai
    • Organizer
      14th International Congress on Plasma Physics 2008
    • Place of Presentation
      Fukuoka, Japan
    • Year and Date
      2008-09-11
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] Extension of Frequency Shift Probes for Monitoring of Electron Temperature2008

    • Author(s)
      K. Nakamura, Q. Zhang, H. Sugai
    • Organizer
      30th international symposium on dry process
    • Place of Presentation
      Tokyo, Japan
    • Year and Date
      2008-11-26
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] 周波数シフトプローブの電子温度計測への応用2008

    • Author(s)
      中村圭二, 張祺, 菅井秀郎
    • Organizer
      電気学会プラズマ研究会
    • Place of Presentation
      仙台市・東北大学
    • Year and Date
      2008-10-31
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] Effects of probe shape on electron density measurements with frequency shift2008

    • Author(s)
      K.Nakamura, Q.Zhang, H.Sugai
    • Organizer
      14th International Congress on Plasma Physics
    • Place of Presentation
      Fukuoka, Japan
    • Year and Date
      2008-09-11
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] スリット形状による周波数シフトプローブにおける電子密度測定の精度改善2008

    • Author(s)
      張祺, 中村圭二, 菅井秀郎
    • Organizer
      第69回応用物理学会学術講演会
    • Place of Presentation
      愛知県・中部大学
    • Year and Date
      2008-09-03
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] 周波数シフトプローブを用いた電子密度計測におけるプローブ形状の効果' ;, ; (2008年5月 名古屋) PST-08-26, pp. 1-62008

    • Author(s)
      張祺, 中村圭二, 菅井秀郎
    • Organizer
      電気学会プラズマ研究会
    • Place of Presentation
      名古屋市・名古屋工業大学
    • Year and Date
      2008-05-23
    • Data Source
      KAKENHI-PROJECT-20540487
  • [Presentation] マイクロ波マルチホロー放電におけるプラズマ制御2008

    • Author(s)
      太田習, 佐野貴憲, 塩出悠喜, 加藤公孝, 中村圭二, 菅井秀郎
    • Organizer
      平成20年度電気関係学会東海支部連合大会
    • Place of Presentation
      愛知県・愛知県立大学
    • Year and Date
      2008-09-18
    • Data Source
      KAKENHI-PROJECT-20540487
  • 1.  TOYODA Hirotaka (70207653)
    # of Collaborated Projects: 15 results
    # of Collaborated Products: 21 results
  • 2.  NAKAMURA Keiji (20227888)
    # of Collaborated Projects: 13 results
    # of Collaborated Products: 79 results
  • 3.  ISHIJIMA Tatsuo (00324450)
    # of Collaborated Projects: 5 results
    # of Collaborated Products: 16 results
  • 4.  TACHIBANA Kunihide (40027925)
    # of Collaborated Projects: 4 results
    # of Collaborated Products: 0 results
  • 5.  NAGATSU Masaaki (20155948)
    # of Collaborated Projects: 4 results
    # of Collaborated Products: 0 results
  • 6.  IKEZAWA Shunjiro (60065282)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 7.  播磨 弘 (00107351)
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 8.  松田 彰久
    # of Collaborated Projects: 3 results
    # of Collaborated Products: 0 results
  • 9.  SASAKI Kohichi (50235248)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 10.  GOTO Toshio (50023255)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 11.  OKUDA TAKAYOSHI (30022990)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 12.  TAKASUKA Seiichi
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 13.  MAKABE Toshiaki (60095651)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 14.  WATANABE Yukio (80037902)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 15.  MURAOKA Katsunori (80038546)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 16.  MATSUOKA Ryosuke (10308819)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 17.  KONDO Michio (30195911)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 18.  YAMAGUCHI Sataro (10249964)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 19.  KONO Akihiro (40093025)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 20.  KISHI KUMEYO (20023129)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 21.  TAKAMURA SHUICHI (40023254)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 22.  佐藤 徳芳 (40005252)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 23.  酒井 洋輔 (20002199)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 24.  河合 良信 (10038565)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 25.  神藤 正士 (60023248)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 26.  堤 喜代司 (50111993)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 27.  西城 浩志 (80111996)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 28.  KITAGAWA Masatoshi
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 29.  TOYODA Naoki
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 30.  GHANASHEV Ivan
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 31.  IVAN Ghanashev
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 32.  西谷 幹彦
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 33.  神田 稔
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 34.  豊田 直樹
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 35.  木下 啓蔵
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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