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Japanese Journal of Applied Physics
Volume: 61
10.35848/1347-4065/ac55e1
IEEJ Trans. FM
Volume: 141 Issue: 10 Pages: 574-578
10.1541/ieejfms.141.574
130008095815
Intelligent Automation and Soft Computing
Volume: Vol.18, No.2 Pages: 165-176
Nucl. Instr. Meth. Phys. Res
Volume: B269 Pages: 2184-2188
10.1016/j.nimb.2011.02.043
Nuclear Instruments and Methods in Physics Research Section B : Beam Interactions with Materials and Atoms
Volume: (Online, Science Direct)
Microelectronic Engineering
Transactions of the Materials Research Society of Japan
Volume: 36 Pages: 305-308
130003398960
Microelectron. Eng
Volume: Vol.88 Pages: 2145-2148
10.1016/j.mee.2011.01.019
Trans. Mat. Res. Soc. Japan
Volume: Vol.88 Pages: 325-328
Volume: Vol.87 Pages: 835-838
10.1016/j.mee.2009.12.071
Microelectronic Engineering, Volume 87, Issues 5-8, pp.835-838 (May-August 2010)
Volume: 87 Pages: 835-838
Nuclear Instruments and Methods in Physics Research B-Beam Interactions with Materials and Atoms 267
Pages: 2317-2320
Microelectronic Engineering 86
Pages: 1396-1400
Pages: 945-948
Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms 267
放射線 35
Pages: 77-86
10026204511
放射線
Volume: Vol.35 Pages: 77-86
Nuclear Instruments and Methods in Physics Research B267
Pages: 2285-2288
Journal of Photopolymer Science and Technology 22
Pages: 239-243
Microsystem Technologiesオンライン版(Published online:29 January 2008)
Microsystem Technologiesオンライン版(Published online:29 Janualy 2008)
Microsystem Technologies Published online
第54回応用物理学関係連合講演会、講演予稿集論文番号29p-SH-14 No.2
Pages: 780-780
Journal of Vacuum Science&Technology B:Microelectronics and Nanometer Structures 25
Pages: 2171-2174
Journal of Non-Clystalline Solids 353
Pages: 537-541
Journal of Non-Crystalline Solids 353・Nos.5-7
原子力eye 53
Pages: 48-51
Nuclear Instruments and Methods in Physics Research B260
Pages: 405-408
Nuclear Instruments and Methods in Physics Research Section B:Beam Interactions with Materials and Atoms 260
Journal of Vacuum Science & Technology B : Microelectronics and Nanometer Structures 25
原子力eye(日刊工業新聞社) 53
Surface and Coatings Technology 201
Pages: 8185-8189
成形加工(プラスチック成形加工学会誌) 19
Pages: 276-281
Journal of Non-Crystalline Solids 353
第67回応用物理学会学術講i演会、講演予稿集論文番号31a-RC-9 No.2
Pages: 649-649
成形加工シンポジア'06第14回プラスチック成形加工学会秋季大会予稿集
Pages: 33-44
130005028414
Nuclear Instruments and Methods in Physics Research B242
Pages: 437-440
第53回応用物理学関係連合講演会講演予稿集 論文番号26a-ZB-10 No.2
Pages: 770-770
第53回応用物理学関係連合講演会講演予稿集 論文番号25p-ZA-10 No.2
Pages: 962-962
Abstracts of the 10th International Conference on Nuclear Microprobe Technology and Applications
Pages: 189-189
第66回応用物理学会学術講演会講演予稿集 論文番号9a-ZD-11 No.2
Pages: 629-629
International Conference on Surface Modification of Materials by Ion Beams (SMMIB'05), Paper No.MP-08
Pages: 85-85
2005年放電学会年次大会講演論文集 (CD-ROM)
Proceedings of 2005 International Symposium on Electrical Insulating Materials, Paper No.B3-7
Pages: 210-213
TIARA Annual Report 2002 JAERI-Review 2003-033
Pages: 254-256
Transactions of the Materials Research Society of Japan 29・2
Pages: 603-606
Proceedings of the 1st International Workshop on Proton Beam Writing
Abstract No.87, 14th International Conference on Ion Beam Modification of Materials
第35回電気電子絶縁材料システムシンポジウム、C-3、2004年11月
Pages: 77-80
第35回電気電子絶縁材料システムシンポジウム、I-6、2004年11月
Pages: 193-196
Transactions of the Materials Research Society of Japan 29
第65回応用物理学会学術講演会講演予稿集,No.2 1p-F-3、2004年9月 No.2
Pages: 794-794
Proceedings of the 1st International Workshop on Proton Beam Writing, July 18-22, 2004, Singapore
Proceedings of the 14th International Conference on Ion Beam Modification of Materials
Abstract No.26, 1st International Workshop on Proton Beam Writing
TIARA Annual Report 2003 JAERI-Review 2004-025
Pages: 234-236
Proceedings of the 14th International Conference on Ion Beam Modification of Materials, September 5-10, 2004, USA
Transactions of the Materials Research Society of Japan 29,No.2
Nuclear Instruments and Methods in Physics Research B 210
Pages: 277-280
Nuclear Instruments and Methods in Physics Research B210
Pages: 272-276
Proceedings of the 8th IUMRS International Conference on Advanced Materials, Symposium A-9, Innovative Nanomaterials Using Ion Technology A-9
Pages: 96-96
Nucl.Instr.Meth. B(in press)