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Japanese Journal of Applied Physics
Volume: - Issue: SD Pages: SD1027-SD1027
10.35848/1347-4065/ac5d12
Volume: - Issue: 6 Pages: 065507-065507
10.35848/1347-4065/ac6a97
Journal of Medical Devices
Volume: 15 Issue: 3 Pages: 31011-31011
10.1115/1.4051516
Volume: 60 Issue: SC Pages: SCCB01-SCCB01
10.35848/1347-4065/abe683
IEEJ Transactions on Sensors and Micromachines
Volume: 141 Issue: 9 Pages: 304-309
10.1541/ieejsmas.141.304
130008082227
Precision Engineering
Volume: 62 Pages: 106-112
10.1016/j.precisioneng.2019.11.006
International Journal of Automation Technology
Volume: 9 Pages: 662-667
130007673787
IEEJ Transactions on Electrical and Electronic Engineering
Volume: Vol.8,No2 Issue: 2 Pages: 199-205
10.1002/tee.21840
Materials Science and Engineering : A
Volume: Vol.541 Pages: 8-13
10.1016/j.msea.2012.01.075
IEICE Electron. Express
Volume: 9 Issue: 5 Pages: 403-409
10.1587/elex.9.403
130001922362
Volume: vol.50 Issue: 6R Pages: 066601-066601
10.1143/jjap.50.066601
210000070642
Applied Physics Express
Volume: 50 Issue: 5R Pages: 055601-055601
10.1143/jjap.50.055601
40018812643
Volume: vol.35No.4 Issue: 4 Pages: 537-546
10.1016/j.precisioneng.2011.05.004
Volume: 3 Issue: 12 Pages: 125601-125601
10.1143/apex.3.125601
10027618627
Volume: 3 Pages: 1256011-3
Applied Physics Express 3
Pages: 125601-125601
Materials Science Forum
Volume: 654-656 Pages: 2426-2429
Journal Solid Mechanics and Materials Engineering 4
Pages: 1742-1753
130000421002
Journal Solid Mechanics and Materials Engineering
Volume: 4 Pages: 1742-1753
Key Eng.Mater.
Volume: 447-448 Pages: 661-665
Volume: 654-656 Pages: 1066-1069
Jpn.J.Appl.Phys.
Volume: 49 Pages: 0766011-7
Journal of Solid Mechanics and Materials Engineering 3
Pages: 1022-1032
130000127309
Applied Physics Express 2(in press)
10025085461
Precision Engineering (Available online)
Jpn. J. Appl. Phys 48
Applied Physics Express 2
Pages: 36501-36501
材料 58
Pages: 821-826
130000133210
Jpn. J. Appl. Phys. 48
Pages: 25503-25503
精密工学会誌 74
Pages: 252-263
Materials Science & Engineering B 148
Pages: 149-153
日本機械学会論文集(C編) 74
Pages: 1020-1025
110006655873
Pages: 252-257
110006647628
精密工学会誌 37
Pages: 254-257
Pages: 387-395
130000667672
日本機械学会論文集C編 74
Applied Surface Science 254
Pages: 720-724
Jpn. J. Applied Physics 46・No. 4A
Pages: 1590-1595
10018901041
Jpn. J. Appl. Phys 46
Pages: 738-742
Jpn.J.Appl.Phys. 45・4A
40007227498
Book of Abstracts in 4th International Workshop on Combinatorial Materials Science ＆ Technology
Pages: 41-41
Pages: 63-63
Jpn. J. Applied Physics 45. No4
Pages: 2708-2713
Proc. of 2005 MRS Fall Meeting (CD-ROM)
Technical Digest of The 18th IEEE International Conference on MEMS 2005
Pages: 479-482
Proc. of 2005 MRS Fall Metting (CD-ROM)
2005年秋季 第66回応用物理学会学術講演会予稿集
Proceedings of 2005 spring meeting of JSPE
Pages: 477-478
Proc.of 2005 MRS Fall Meeting (CD-ROM)
日本鉄鋼協会第11回ヤングサイエンティストフォーラム講演論文集
Pages: 18-19
2005年度精密工学会春季大会学術講演会講演論文集
130004657459
Proc.of 2005 MRS Fall Meeting (2005.11,Boston, MA, USA) (accept)
The 11th young scientist forum of the Iron and Steel Institute of Japan
Proceedings of 2005 Autumn JSAP annual meeting
2004年度精密工学会秋季大会学術講演会講演論文集
Pages: 555-556
130004655626
Proceedings of 2004 fall meeting of JSPE
Proc.Smart Materials, Nano- and Micro-Smart Systems CD-ROM
Proc. of SPIE Micro- and Nanotechnology : Materials, Processes, Packaging, and Systems II
Pages: 260-267
Proceedings of JMRS
Pages: 541-541
Proceedings of 2003 fall meeting of JSPE
Pages: 575-575
2003年度精密工学会秋季大会学術講演会講演論文集
Pages: 391-391
130005026769
Proceedings of International Conference on Advanced Technology in Experimental Mechanics 2003 (CD-ROM)
Micro System Technology 2003
Pages: 180-187
130005026971
日本金属学会講演概要
Micro System Technology 2003 (MST '03) (2003.10.7-8 Munich, Germany)
Proc.of 2005 MRS Fall Meeting (2005.11, Boston, MA, USA)
Technical Digest of The 18th IEEE International Conference on MEMS 2005 (2005.1. Miami, USA)
Proc.of SPIE Micro- and Nanotechnology : Materials, Processes, Packaging, and Systems II (2004.12. Sydney, Australia)
Jpn. J. Appl. Phys. (in press)
Proceedings of International Conference on Advanced Technology in Experimental Mechanics 2003 (ATEM'03) (2003.9.10-12 Nagoya, Japan) (CD-ROM)
Jpn.J.Appl.Phys. (in press)
