Maida Osamu 毎田修

… Alternative Names

MAIDA Osamu 毎田修

毎田修マイダオサム

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Researcher Number	40346177
Other IDs
External Links
Affiliation (Current)	2025: 大阪大学, 大学院工学研究科, 助教
Affiliation (based on the past Project Information) *help	2022 – 2023: 大阪大学, 大学院工学研究科, 助教 2016 – 2021: 大阪大学, 工学研究科, 助教 2015: 大阪大学, 工学(系)研究科(研究院), 助教 2012: 大阪大学, 工学(系)研究科(研究院), 助教 2011 – 2012: 大阪大学, 大学院・工学研究科, 助教 … More 2009 – 2010: 大阪大学, 工学研究科, 助教 2007 – 2008: Osaka University, 大学院・工学研究科, 助教 2006: 大阪大学, 大学院工業研究科, 助手 2003 – 2004: 大阪大学, 産業科学研究所, 助手 Less
Review Section/Research Field	Principal Investigator Electronic materials/Electric materials / Basic Section 30010:Crystal engineering-related / Measurement engineering Except Principal Investigator Thin film/Surface and interfacial physical properties / Crystal engineering
Keywords	Principal Investigator ダイヤモンド / 半導体物性 / 欠陥評価 / 格子欠陥 / 電子・電気材料 / ワイドギャップ半導体 / ワイドギャップ / 結晶欠陥 / 非輻射欠陥 / 光散乱 … More / プラズマCVD / アモルファスシリコン / 太陽電池 / スピンオン法 / 固定電荷 / 閾値電圧 / MOS / SiO_2 / セシウム / ゲート絶縁膜 / MOSFET / フラットバンド電位 … More Except Principal Investigator マイクロ波プラズマCVD / CVDダイヤモンド / マイクロ波プラズマＣＶＤ / p型ダイヤモンド / n型ダイヤモンド / 軟X線検出器 / 紫外線検出器 / 成膜装置 / ＣＶＤ成膜装置 / ｐ型半導体 / CVD成膜装置 / p型半導体 / CVD製膜装置 / 不純物ドーピング / ワイドギャップ半導体 / ダイヤモンドパワーデバイス / ダイヤモンド検出器 / 不純物伝導 / 自立膜 / 放射線検出器 / 微斜面基板 / 燐ドープダイヤモンド / ホウ素ドープダイヤモンド / 不純物バンド伝導 / パワーデバイス / 粒子検出器 / 燐ドープ / ホウ素ドープ / 微斜面(001)基板 / 応答速度 / 増幅機能 Less

Improvement of diamond semiconductor device properties by clarifying the non-radiative defect generation mechanismPrincipal Investigator
- Principal Investigator
  
  毎田修
- Project Period (FY)
  2022 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 30010:Crystal engineering-related
- Research Institution
  Osaka University
Improvement of device characteristics by elucidation of non-radiative defect formation mechanism in diamond crystalsPrincipal Investigator
- Principal Investigator
  
  Maida Osamu
- Project Period (FY)
  2019 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 30010:Crystal engineering-related
- Research Institution
  Osaka University
Elucidation and control of generation mechanism of non-radiative defects in diamond crystalPrincipal Investigator
- Principal Investigator
  
  Maida Osamu
- Project Period (FY)
  2016 – 2019
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Osaka University
Large-size clusterization of heavily-doped degenerate CVD diamond layer and its functional device application
- Principal Investigator
  
  Ito Toshimichi
- Project Period (FY)
  2015 – 2017
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Crystal engineering
- Research Institution
  Osaka University
Development of high sensitivity non-radiation defect characterization systems for diamond semiconductorPrincipal Investigator
- Principal Investigator
  
  MAIDA Osamu
- Project Period (FY)
  2010 – 2011
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Measurement engineering
- Research Institution
  Osaka University
Development of Fundamental Fabrication Processes for Functionalizing Electronic Devices Composed of High-Quality CVD Diamond
- Principal Investigator
  
  ITO Toshimichi
- Project Period (FY)
  2009 – 2012
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  Osaka University
Development of highly-sensitive diamond detectors with a large amplification function
- Principal Investigator
  
  ITO Toshimichi
- Project Period (FY)
  2007 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  Osaka University
セラミック微粒子分散構造による非晶質シリコン太陽電池の高効率化Principal Investigator
- Principal Investigator
  
  毎田修
- Project Period (FY)
  2006 – 2007
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Osaka University
ゲート絶縁膜中固定電荷によるMOSFETのしきい値制御Principal Investigator
- Principal Investigator
  
  毎田修
- Project Period (FY)
  2003 – 2004
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Osaka University

[Book] 太陽光利用最前線
- Author(s)
  毎田修
- Publisher
  エヌ・ティー・エス
- Data Source
  KAKENHI-PROJECT-18760234
[Journal Article] Characterization of deep interface states in SiO2/B-doped diamond using the transient photocapacitance method2022
- Author(s)
  O. Maida, D. Kanemoto, and T. Hirose
- Journal Title
  
  Thin Solid Films
  
  Volume: 741 Pages: 139026-139026
- DOI
  10.1016/j.tsf.2021.139026
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K05293
[Journal Article] Development of Highly-Sensitive Transient Photocapacitance Mesurement System for Deep Defects in Boron-Doped Diamond (100) Films2018
- Author(s)
  Miyawaki Kenta、Yamashita Ryosuke、Kodama Taishi、Maida Osamu
- Journal Title
  
  Future of Electron Devices on IEEE Xplore Digital Library
  
  Volume: - Pages: 1-2
- DOI
  10.1109/imfedk.2018.8581973
- Data Source
  KAKENHI-PROJECT-16K06262
[Journal Article] Characterization of Deep Defects in Boron-Doped CVD Diamond Films Using Transient Photocapacitance Method2017
- Author(s)
  O. Maida, T. Hori, T. Kodama and T. Ito
- Journal Title
  
  Materials Science in Semiconductor Processsing
  
  Volume: 印刷中
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15H03557
[Journal Article] Improvement on p-type CVD diamond semiconducting properties by fabricating thin heavily-boron-doped multi-layer clusters isolated each other in unintentionally boron-doped diamond layer2017
- Author(s)
  Maida Osamu、Tabuchi Tomohiro、Ito Toshimichi
- Journal Title
  
  Journal of Crystal Growth
  
  Volume: 480 Pages: 51-55
- DOI
  10.1016/j.jcrysgro.2017.10.008
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K06262, KAKENHI-PROJECT-15H03557
[Journal Article] Behavior of nitrogen-related luminescence centers in laser-cut single-crystalline diamond under irradiation with keV electron beam2017
- Author(s)
  Maruoka Kenji、Naito Taiki、Maida Osamu、Ito Toshimichi
- Journal Title
  
  MRS Advances
  
  Volume: 2 Issue: 43 Pages: 2355-2360
- DOI
  10.1557/adv.2017.414
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K06262, KAKENHI-PROJECT-15H03557
[Journal Article] Characterization of Deep Defects in Boron-Doped CVD Diamond Films Using Transient Photocapacitance Method2017
- Author(s)
  O. Maida, T. Hori, T. Kodama and T. Ito
- Journal Title
  
  Materials Science in Semiconductor Processing
  
  Volume: 印刷中 Pages: 203-206
- DOI
  10.1016/j.mssp.2016.12.001
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-16K06262, KAKENHI-PROJECT-15H03557
[Journal Article] Survey meter combining CVD diamond and silicon detectors for wide range of dose rates and high accumulated doses2012
- Author(s)
  H. Sato, A. Yamaguchi, O. Maida, T. Ito
- Journal Title
  
  Radiation Meas
  
  Volume: Vol.47 Pages: 266-271
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21246011
[Journal Article] Survey meter combining CVD diamond and silicon detectors for wide range of dose rates and high accumulated doses2012
- Author(s)
  H.Sato
- Journal Title
  
  Radiation Measurements
  
  Volume: Vol.47 Issue: 4 Pages: 266-271
- DOI
  10.1016/j.radmeas.2012.02.011
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21246011, KAKENHI-PROJECT-22760300
[Journal Article] Sensitivity improvement of γ-ray detector fabricated with self-standing CVD diamond by attaching heavy element film2012
- Author(s)
  H. Sato, O. Maida, T. Ito
- Journal Title
  
  Diam. Relat. Mater.
  
  Volume: Vol.29 Pages: 2-7
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21246011
[Journal Article] Hall data analysis of heavily boron-doped CVD diamond films using a model considering an impurity band well separated from valence bands2011
- Author(s)
  M. Aono, O. Maida, T. Ito
- Journal Title
  
  Diam. Relat. Mater
  
  Volume: Vol.20 Pages: 1357-1362
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21246011
[Journal Article] Reduced influences of the HPHT substrates on the electronic quality of homoepitaxial CVD diamond layers and on their ultraviolet detector performance2011
- Author(s)
  O. Maida, H. Sato, M. Kanasugi, S. Iguchi, T. Ito
- Journal Title
  
  Diam. Relat. Mater.
  
  Volume: Vol.20 Pages: 242-245
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21246011
[Journal Article] Reduced influences of the HPHT substrates on the electronic quality of homoepitaxial CVD diamond layers and on their ultraviolet detector performance2011
- Author(s)
  O.Maida
- Journal Title
  
  Diamond and Related Materials
  
  Volume: 20 Pages: 242-245
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21246011
[Journal Article] Reduced influences of the HPHT substrates on the electronic quality of homoepitaxial CVD diamond layers and on their ultraviolet detector performance2011
- Author(s)
  O. Maida, H. Sato, M. Kanasugi, S. Iguchi and T. Ito
- Journal Title
  
  Diamond and Related Materials
  
  Volume: Vol.20 Issue: 2 Pages: 242-245
- DOI
  10.1016/j.diamond.2010.12.016
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760300
[Journal Article] Improvement in low-voltage performance of surface-electrode soft-X-ray detectors composed of undoped homo- epitaxial CVD/HPHT Ib diamond layers2010
- Author(s)
  M. Kanasugi, Y. Iwakaji, T. Yamamoto, O. Maida, Y. Takeda, Y. Saitoh, T. Ito
- Journal Title
  
  Nucl. Instr. Methods Phys. Research A
  
  Volume: Vol.621 Pages: 650-655
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21246011
[Journal Article] Self-standing device-quality single-crystalline diamond films on vicinal (001) surfaces fabricated using micro- wave-plasma chemical-vapor-deposition method2010
- Author(s)
  S. Iguchi, O. Maida, T. Ito
- Journal Title
  
  Thin Solid Films
  
  Volume: Vol.518
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21246011
[Journal Article] Characterization of diamond ultraviolet detec-tors fabricated with high-quality single- crystal- line chemical vapor deposition films2009
- Author(s)
  Y. Iwakaji, M. Kanasugi, O. Maida, T. Ito
- Journal Title
  
  Appl. Phys. Lett.
  
  Volume: Vol.94
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21246011
[Journal Article] Fabrication and characterization of ultra-violet detectors using high-quality CVD diamond films2009
- Author(s)
  Y. Iwakaji, M. Kanasugi, O. Maida, T. Ito
- Journal Title
  
  Applied Physics Letters (発表予定)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360018
[Journal Article] Characterization of substrate off-angle effects for high-quality homoepitaxial CVD diamond films2008
- Author(s)
  O. Maida
- Journal Title
  
  Diamond and Related Materials 17
  
  Pages: 435-439
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360018
[Journal Article] High-quality diamond films grown at high deposition rates using high-power-density MWPCVD method with conventional quartz-type chamber2008
- Author(s)
  T. Nakai, O. Maida and T. Ito
- Journal Title
  
  Applied Surface Science (印刷中)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360018
[Journal Article] Characterization of the soft-X-ray detectors fabricated with high-quality CVD diamond thin films2008
- Author(s)
  Y. Iwakaji, M. Kanasugi, O. Maida, Y. Takeda, Y. Saitoh and T. Ito
- Journal Title
  
  Applied Surface Science (印刷中)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360018
[Journal Article] High-quality diamond films grown at high deposition rates using high-power-density MWPCVD method with conventional quartz-type chamber2008
- Author(s)
  T. Nakai, O. Maida, T. Ito
- Journal Title
  
  Applied Surface Science Vol. 254
  
  Pages: 6281-6284
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360018
[Journal Article] Characterization of the soft-X-ray detectors fabricated with high-quality CVD diamond thin films2008
- Author(s)
  Y. Iwakaji, M. Kanasugi, O. Maida, Y. Takeda, Y. Saitoh, T. Ito
- Journal Title
  
  Applied Surface Science Vol. 254
  
  Pages: 6277-6280
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360018
[Journal Article] Characterization of substrate off-angle effects for high-quality homoepitaxial CVD diamond films2008
- Author(s)
  O. Maida, H. Miyatake, T. Teraji, T. Ito
- Journal Title
  
  Diamond and Related Materials Vol. 17
  
  Pages: 435-439
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360018
[Journal Article] Characterization of substrate off-angle effects for high-quality homoepitaxial CVD diamond films2008
- Author(s)
  O. Maida, H. Miyatake, T. Teraji and T. Ito
- Journal Title
  
  Diamond and Related Materials 17(印刷中)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360018
[Journal Article] High-quality diamond films grown at high deposition rates using high-power-density MWPCVD method with conventional quartz-type chamber2007
- Author(s)
  T. Nakai, K. Arima, O. Maida, T. Ito
- Journal Title
  
  Journal of Crystal Growth Vol. 309
  
  Pages: 134-139
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360018
[Journal Article] Al_2O_3微粒子を用いた光閉じ込め構造を有するa-Si太陽電池の作製2007
- Author(s)
  毎田修
- Journal Title
  
  J. Vac. Soc. Jpn. 50
  
  Pages: 534-536
- NAID
  10019750174
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18760234
[Journal Article] High-quality diamond films grown at high deposition rates using high-power-density MWPCVD method with conventional quartz-type chamber2007
- Author(s)
  T. Nakai, K. Arima, O. Maida and T. Ito
- Journal Title
  
  Journal of Crystal Growth 309
  
  Pages: 134-139
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19360018
[Journal Article] Interface states for HfO_2/Si structure observed by x-ray photoelectron spectroscopy measurements under bias2006
- Author(s)
  Osamu MAIDA
- Journal Title
  
  Applied Physics Letters 89
  
  Pages: 122112-122112
- Data Source
  KAKENHI-PROJECT-18760234
[Journal Article] Control of flat band voltage of Si-based metal-oxide semiconductor diodes by inclusion of cesium ions in silicon dioxide2004
- Author(s)
  T.Kobayashi, K.Tanaka, O.Maida, H.Kobayashi
- Journal Title
  
  Applied Physics Letters 85
  
  Pages: 2806-2808
- Data Source
  KAKENHI-PROJECT-15760221
[Journal Article] Postoxidation annealing treatments to improve Si/ultrathin SiO_2, characteristics formed by nitric acid oxidation2004
- Author(s)
  Asuha, L.Yueh-Ling, 0.Maida, M.Takahashi, H.Kobayashi
- Journal Title
  
  Journal of the Electrochemical Society 151
- Data Source
  KAKENHI-PROJECT-15760221
[Journal Article] Al_2O_3微粒子を用いた光閉じ込め構造を有するa-Si太陽電池の作製
- Author(s)
  毎田修
- Journal Title
  
  真空 (発表予定)
- NAID
  10019750174
- Data Source
  KAKENHI-PROJECT-18760234
[Presentation] Ir/sapphire基板上ヘテロエピタキシャル成長(001)面ダイヤモンド膜の断面SEM像に見られる縞状コントラストの分析2023
- Author(s)
  望月梧生, 毎田修, 金聖祐, 加藤学, 小山浩司, 本田達也, 市川修平, 小島一信
- Organizer
  第84回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-22K04951
[Presentation] Large Area Heteroepitaxial Diamond for High-End Applications2023
- Author(s)
  K. Koyama, K. Hitomi, M. Nogami, T. Onodera, S.W. Kim, O. Maida
- Organizer
  7th International Conference on Advanced Electromaterials
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22K04951
[Presentation] Ir/sapphire 基板上ヘテロエピタキシャル成長（001）面ダイヤモンド膜の結晶品質評価2023
- Author(s)
  望月梧生, 毎田修, 金聖祐, 加藤学, 小山浩司, アンジェフリ, 市川修平, 小島一信
- Organizer
  第37回ダイヤモンドシンポジウム
- Data Source
  KAKENHI-PROJECT-22K04951
[Presentation] ホモエピタキシャル成長ホウ素ドープダイヤモンド半導体結晶の深い欠陥準位評価2022
- Author(s)
  毎田修, 市川修平, 小島一信
- Organizer
  第42回ナノテスティングシンポジウム
- Data Source
  KAKENHI-PROJECT-19K05293
[Presentation] Characterization of deep level defects in boron-doped (001) and (111) diamond films2022
- Author(s)
  O. Maida, S. Ichikawa, and K. Kojima
- Organizer
  The 22nd International Vacuum Congress
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22K04951
[Presentation] Characterization of Semiconductor Crystals Based on Omnidirectional Photoluminescence (ODPL) Spectroscopy2022
- Author(s)
  K. Kojima, S. Ichikawa, O. Maida, K. Shima, and S. Chichibu
- Organizer
  241st ECS Meeting
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22K04951
[Presentation] Characterization of deep level defects in boron-doped (001) and (111) diamond films2022
- Author(s)
  O. Maida, S. Ichikawa, and K. Kojima
- Organizer
  The 22nd International Vacuum Congress
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05293
[Presentation] ホモエピタキシャル成長ホウ素ドープダイヤモンド半導体結晶の深い欠陥準位評価2022
- Author(s)
  毎田修, 市川修平, 小島一信
- Organizer
  第42回ナノテスティングシンポジウム
- Data Source
  KAKENHI-PROJECT-22K04951
[Presentation] 時間分解2光子光電子分光法を用いた表面再結合寿命の直接評価2022
- Author(s)
  市川修平, 毎田修, 小島一信
- Organizer
  第83回応用物理学会秋季学術講演会
- Invited
- Data Source
  KAKENHI-PROJECT-19K05293
[Presentation] 時間分解2光子光電子分光法を用いた表面再結合寿命の直接評価2022
- Author(s)
  市川修平, 毎田修, 小島一信
- Organizer
  第83回応用物理学会秋季学術講演会
- Invited
- Data Source
  KAKENHI-PROJECT-22K04951
[Presentation] Characterization of Semiconductor Crystals Based on Omnidirectional Photoluminescence (ODPL) Spectroscopy2022
- Author(s)
  K. Kojima, S. Ichikawa, O. Maida, K. Shima, and S. Chichibu
- Organizer
  241st ECS Meeting
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05293
[Presentation] SiO2/ホウ素添加CVDダイヤモンド界面の過渡光容量法を用いた界面準位評価2021
- Author(s)
  毎田修, 児玉大志, 兼本大輔，廣瀬哲也
- Organizer
  2021年日本表面真空学会学術講演会
- Data Source
  KAKENHI-PROJECT-19K05293
[Presentation] Transient photocapacitance measurement for characterization of deep level defects in boron-doped (001) and (111) diamond films2021
- Author(s)
  O. Maida, T. Kodama, D. Kanemoto and Tetsuya Hirose
- Organizer
  9th International Symposium on Surface Science
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05293
[Presentation] 過渡光容量分光法による (111)ホウ素ドープCVDダイヤモンド薄膜の結晶欠陥評価2021
- Author(s)
  毎田修, 児玉大志, 兼本大輔, 廣瀬哲也
- Organizer
  第82回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05293
[Presentation] 高濃度ホウ素ドープダイヤモンド多層膜クラスター構造の作製とその評価2020
- Author(s)
  毎田修，兼本大輔，廣瀬哲也
- Organizer
  2020年日本表面真空学会学術講演会
- Data Source
  KAKENHI-PROJECT-19K05293
[Presentation] ホウ素添加ホモエピタキシャル成長ダイヤモンド薄膜の過渡光容量法を用いた結晶欠陥評価2020
- Author(s)
  毎田修，兼本大輔，廣瀬哲也
- Organizer
  2020年日本表面真空学会学術講演会
- Data Source
  KAKENHI-PROJECT-19K05293
[Presentation] 過渡光容量分光法を用いたボロンドープダイヤモンド薄膜の非輻射欠陥評価2019
- Author(s)
  毎田修，兼本大輔，廣瀬哲也
- Organizer
  2019年日本表面真空学会学術講演会
- Data Source
  KAKENHI-PROJECT-19K05293
[Presentation] (111)ダイヤモンド基板上ホモエピタキシャル成長におけるメタン濃度2019
- Author(s)
  毎田修，兼本大輔，廣瀬哲也
- Organizer
  2019年日本表面真空学会学術講演会
- Data Source
  KAKENHI-PROJECT-16K06262
[Presentation] Transient photocapacitance measurement for characterization of deep defects in B-doped diamond films2019
- Author(s)
  Osamu Maida and Ryosuke Yamashita
- Organizer
  21th International Vacuum Congress
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06262
[Presentation] (111)ダイヤモンド基板上ホモエピタキシャル成長におけるメタン濃度2019
- Author(s)
  毎田修，兼本大輔，廣瀬哲也
- Organizer
  2019年日本表面真空学会学術講演会
- Data Source
  KAKENHI-PROJECT-19K05293
[Presentation] Transient photocapacitance measurement for characterization of deep defects in B-doped diamond films2019
- Author(s)
  Osamu Maida and Ryosuke Yamashita
- Organizer
  21th International Vacuum Congress
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19K05293
[Presentation] 過渡光容量分光法を用いたボロンドープダイヤモンド薄膜の非輻射欠陥評価2019
- Author(s)
  毎田修，兼本大輔，廣瀬哲也
- Organizer
  2019年日本表面真空学会学術講演会
- Data Source
  KAKENHI-PROJECT-16K06262
[Presentation] 高温高圧合成ダイヤモンド基板上のホモエピタキシャルCVD成長段階で形成されるCVDダイヤモンド単結晶基板中の結晶欠陥の抑制2018
- Author(s)
  丸岡憲史、毎田修、伊藤利道
- Organizer
  第65回応用物理学会春季学術講演会（2018年春季）、早稲田大学
- Data Source
  KAKENHI-PROJECT-15H03557
[Presentation] Characterization of the high-quality CVD diamond films for quantum information device2018
- Author(s)
  O. Maida and T. Ito
- Organizer
  Advanced Materials World Congress 2018
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06262
[Presentation] ダイヤモンド(111)基板ホモエピタキシャル成長における基板オフ方位及びメタン濃度依存性2018
- Author(s)
  児玉大志，毎田修，伊藤利道
- Organizer
  第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16K06262
[Presentation] Development of highly-sensitive transient photocapacitance mesurement system for deep defects in boron-doped diamond (100) films2018
- Author(s)
  K. Miyawaki, R. Yamashita, T. Kodama, T. Hori and O. Maida
- Organizer
  The 2018 International Meeting for Future of Electron Devices, Kansai
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06262
[Presentation] Characterization of deep level defects in boron-doped (100) and (111) diamond films using transient photocapacitance method2018
- Author(s)
  O. Maida, T. Hori and T. Kodama
- Organizer
  29th International Conference on Diamond and Carbon Materials
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06262
[Presentation] ダイヤモンド(111)基板ホモエピタキシャル成長における基板オフ方位及びメタン濃度依存性2018
- Author(s)
  児玉大志、毎田修、伊藤利道
- Organizer
  第65回応用物理学会春季学術講演会（2018年春季）、早稲田大学
- Data Source
  KAKENHI-PROJECT-15H03557
[Presentation] Characterization of the high-quality CVD diamond films for quantum information device2018
- Author(s)
  O. Maida, T. Ito
- Organizer
  Advanced Materials World Congress 2018, Singapore,
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03557
[Presentation] SiOxハードマスクを用いた高アスペクト比ダイヤモンドエッチングプロセス2017
- Author(s)
  別府晟多，毎田修，伊藤利道
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（横浜市）
- Year and Date
  2017-03-16
- Data Source
  KAKENHI-PROJECT-15H03557
[Presentation] 酸素終端CVDダイヤモンド (001) 微斜面における超音波処理効果2017
- Author(s)
  川端直人，毎田修，伊藤利道
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（神奈川県横浜市）
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-16K06262
[Presentation] ホウ素添加ホモエピタキシャル成長ダイヤモンド薄膜の過渡光容量法を用いた結晶欠陥評価2017
- Author(s)
  児玉大志，毎田修，伊藤利道
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（神奈川県横浜市）
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-16K06262
[Presentation] 単結晶ダイヤモンドのレーザー切断(001)面におけるkeV電子線照射及び水素プラズマ照射効果2017
- Author(s)
  丸岡憲史，毎田修，伊藤利道
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（横浜市）
- Year and Date
  2017-03-16
- Data Source
  KAKENHI-PROJECT-15H03557
[Presentation] CVDダイヤモンド検出器のkeV電子に対する検出特性における信号電流増幅現象2017
- Author(s)
  福島慎市，清水彰人，毎田修，伊藤利道
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（横浜市）
- Year and Date
  2017-03-16
- Data Source
  KAKENHI-PROJECT-15H03557
[Presentation] Behavior of nitrogen-related luminescence centers in laser-cut single-crystalline diamond under irradiation of keV electron beam2017
- Author(s)
  K. Maruoka, T. Naito, O. Maida, T. Ito
- Organizer
  2017 MRS Spring Meeting, Arizona, USA
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03557
[Presentation] 単結晶ダイヤモンドのレーザー切断(001)面におけるkeV電子線照射及び水素プラズマ照射効果2017
- Author(s)
  丸岡憲史，毎田修，伊藤利道
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（神奈川県横浜市）
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-16K06262
[Presentation] ホウ素添加ホモエピタキシャル成長ダイヤモンド薄膜の過渡光容量法を用いた結晶欠陥評価2017
- Author(s)
  児玉大志，毎田修，伊藤利道
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（横浜市）
- Year and Date
  2017-03-16
- Data Source
  KAKENHI-PROJECT-15H03557
[Presentation] SiOxハードマスクを用いた高アスペクト比ダイヤモンドエッチングプロセス2017
- Author(s)
  別府晟多，毎田修，伊藤利道
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  パシフィコ横浜（神奈川県横浜市）
- Year and Date
  2017-03-14
- Data Source
  KAKENHI-PROJECT-16K06262
[Presentation] Behavior of nitrogen-related luminescence centers in laser-cut single-crystalline diamond under irradiation of keV electron beam2017
- Author(s)
  K. Maruoka, T. Naito, O. Maida and T. Ito
- Organizer
  2017 MRS Spring Meeting & Exhibit
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06262
[Presentation] Improvement on p-type CVD diamond semiconducting properties by fabricating thin heavily-boron-doped multi-layer clusters isolated each other2016
- Author(s)
  O. Maida, T. Tabuchi and T. Ito
- Organizer
  20th International Vacuum Congress
- Place of Presentation
  Busan, Korea
- Year and Date
  2016-08-21
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06262
[Presentation] Characterization of Deep Defects in Boron-Doped CVD Diamond Films Using Transient Photocapacitance Method2016
- Author(s)
  O. Maida, T. Hori, T. Kodama and T. Ito
- Organizer
  7th International Symposium on Control of Semiconductor Interfaces / International SiGe Technology and Device Meeting
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2016-06-10
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03557
[Presentation] Improvement on p-type CVD diamond semiconducting properties by fabricating thin heavily-boron-doped multi-layer clusters isolated each other2016
- Author(s)
  O. Maida, T. Tabuchi and T. Ito
- Organizer
  20th International Vacuum Congress
- Place of Presentation
  Busan, Korea
- Year and Date
  2016-08-23
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03557
[Presentation] Characterization of Deep Defects in Boron-Doped CVD Diamond Films Using Transient Photocapacitance Method2016
- Author(s)
  O. Maida, T. Hori, T. Kodama and T. Ito
- Organizer
  7th International Symposium on Control of Semiconductor Interfaces
- Place of Presentation
  Nagoya, Japan
- Year and Date
  2016-06-07
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06262
[Presentation] 単結晶ダイヤモンドのレーザー切断(001)面における電気伝導性及びCLスペクトルの表面処理依存性2016
- Author(s)
  丸岡憲史，内藤大樹，毎田修，伊藤利道
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  新潟コンベンションセンター(新潟市)
- Year and Date
  2016-09-15
- Data Source
  KAKENHI-PROJECT-15H03557
[Presentation] Transient photocapacitance study of deep-level defects in boron-doped diamond films2016
- Author(s)
  O. Maida, T. Hori, T. Kodama and T. Ito
- Organizer
  International Conference on Diamond and Carbon Materials
- Place of Presentation
  Montpellier, France
- Year and Date
  2016-09-04
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K06262
[Presentation] Transient photocapacitance study of deep-level defects in boron-doped diamond films2016
- Author(s)
  O. Maida, T. Hori, T. Kodama and T. Ito
- Organizer
  International Conference on Diamond and Carbon Materials
- Place of Presentation
  Montpellier, France
- Year and Date
  2016-09-07
- Data Source
  KAKENHI-PROJECT-15H03557
[Presentation] 単結晶ダイヤモンドのレーザー切断(001)面における電気伝導性及びCLスペクトルの表面処理依存性2016
- Author(s)
  丸岡憲史，内藤大樹，毎田修，伊藤利道
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  朱鷺メッセ(新潟県新潟市)
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-16K06262
[Presentation] Micro- wave-plasma chemical-vapor-deposition homo- epitaxial processes suitable for heavily P-doped diamond films on vicinal (001) surfaces2012
- Author(s)
  S. Tada,H. Nishio, O. Maida, T. Ito
- Organizer
  11th Asia Pacific Conf. on Plasma Sci. and Technol.
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2012-10-02
- Data Source
  KAKENHI-PROJECT-21246011
[Presentation] ホウ素ドープ単結晶CVDダイヤモンドの高濃度ドープ領域における特性評価II2012
- Author(s)
  森玲央奈, 毎田修, 伊藤利道
- Organizer
  第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学(東京都)
- Year and Date
  2012-03-17
- Data Source
  KAKENHI-PROJECT-22760300
[Presentation] Growth of phsphorus-doped homoepitaxial CVD diamond on vicinal(001) substrates2011
- Author(s)
  H. Nishio, O. Maida and T. Ito
- Organizer
  15th International Conference on Thin Films
- Place of Presentation
  Kyoto(Japan)
- Year and Date
  2011-11-08
- Data Source
  KAKENHI-PROJECT-22760300
[Presentation] Improvement on P-type performance of CVD diamond by isolating thin heavily-boron-doped layer as innumerable islands2011
- Author(s)
  O. Maida, M. Aono and T. Ito
- Organizer
  15th International Conference on Thin Films
- Place of Presentation
  Kyoto(Japan)
- Year and Date
  2011-11-08
- Data Source
  KAKENHI-PROJECT-22760300
[Presentation] Improvement on p-type performance of CVD diamond by isolating thin heavily-boron-doped layer as innumerable islands2011
- Author(s)
  O. Maida, M. Aono, T. Ito
- Organizer
  15th Intl. Conf. on Thin Films
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2011-11-08
- Data Source
  KAKENHI-PROJECT-21246011
[Presentation] ホウ素ドープ単結晶CVDダイヤモンドの高濃度ドープ領域における特性評価2011
- Author(s)
  森玲央奈, 伊藤利道, 毎田修
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学(山形県)
- Year and Date
  2011-08-30
- Data Source
  KAKENHI-PROJECT-22760300
[Presentation] Improvement on P-type performance of CVD diamond by isolating thinheavily-boron-doped layer as innumerable islands2011
- Author(s)
  O.Maida
- Organizer
  15th International Conference on Thin Films
- Place of Presentation
  京都テルサ(京都府)
- Year and Date
  2011-11-08
- Data Source
  KAKENHI-PROJECT-22760300
[Presentation] Improvement on P-type performance of CVD diamond by isolating thin heavily-boron-doped layer as innumerable islands2011
- Author(s)
  O.Maida
- Organizer
  15th International Conference on Thin Films
- Place of Presentation
  京都テルサ(京都府)
- Year and Date
  2011-11-08
- Data Source
  KAKENHI-PROJECT-21246011
[Presentation] (001)微斜面基板上の高濃度燐ドープダイヤモンドのMWPCVD成長における基板温度の適正化2011
- Author(s)
  多田周平, 毎田修, 伊藤利道
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学(山形県)
- Year and Date
  2011-08-30
- Data Source
  KAKENHI-PROJECT-22760300
[Presentation] (001)微斜面基板上の燐ドープCVDダイヤモンド薄膜におけるホモエピタキシャル成長プロセスの適正化2011
- Author(s)
  西尾晴樹, 毎田修, 伊藤利道
- Organizer
  第72回応用物理学会学術講演会
- Place of Presentation
  山形大学(山形県)
- Year and Date
  2011-08-30
- Data Source
  KAKENHI-PROJECT-22760300
[Presentation] Hall data analysis of heavily-boron-doped CVD diamond films based on a two-type carrier model and their application to improvement on p-type performance of CVD diamond2010
- Author(s)
  M. Aono, O. Maida and T. Ito
- Organizer
  21st European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides
- Place of Presentation
  Budapest(Hungary)
- Year and Date
  2010-09-09
- Data Source
  KAKENHI-PROJECT-22760300
[Presentation] Effectiveness of (001) vicinal substrates on fabrication of high-quality diamond films using high-power-density microwave-plasma chemical-vapor-deposition method2010
- Author(s)
  O.Maida
- Organizer
  The 5th International Workshop on New Group IV Semiconductor Nanoelectronics
- Place of Presentation
  Tohoku University, Sendai
- Year and Date
  2010-01-29
- Data Source
  KAKENHI-PROJECT-21246011
[Presentation] Investigation of diamond radiation detectors combined with heavy elements2010
- Author(s)
  H. Sato, A. Yamaguchi, M. Maida, T. Ito
- Organizer
  21st European Conf. on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides (Diamond 2010)
- Place of Presentation
  Budapest, Hungary
- Year and Date
  2010-09-06
- Data Source
  KAKENHI-PROJECT-21246011
[Presentation] Growth and characterization of heavily phosphorus-doped homoepitaxial (001) diamond films grown using high-power-density MWPCVD method with a conventional quartz-tube chamber2010
- Author(s)
  M. Maida, T. Hidaka, T. Ito
- Organizer
  4th Intl. Conf. on New Diamond and Nano Carbons (NDNC2010)
- Place of Presentation
  Suzhou, China
- Year and Date
  2010-05-17
- Data Source
  KAKENHI-PROJECT-21246011
[Presentation] Fabrication of self-standing device-quality single-crystalline diamond films on vicinal (001) surfaces and its application to the high-energy photon detectors2010
- Author(s)
  M.Aono, O.Maida, T.Ito
- Organizer
  21st European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides
- Place of Presentation
  Budapest(Hungary)
- Year and Date
  2010-09-06
- Data Source
  KAKENHI-PROJECT-22760300
[Presentation] Fabrication of self-standing device-quality single-crystalline diamond films on vicinal(001) surfaces and its application to the high-energy photon detectors2010
- Author(s)
  O. Maida, S. Iguchi, T. Igarashi, H. Sato and T. Ito
- Organizer
  21st European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides
- Place of Presentation
  Budapest(Hungary)
- Year and Date
  2010-09-09
- Data Source
  KAKENHI-PROJECT-22760300
[Presentation] Carrier transport property of heavily boron-doped degenerate diamond single-crystalline thin layers etched with hydrogen plasma2010
- Author(s)
  T. Kuki, O. Maida, T. Ito
- Organizer
  2012 Intl. Conf. on Solid State Devices and Materials
- Place of Presentation
  Kyoto. Japan
- Year and Date
  2010-09-26
- Data Source
  KAKENHI-PROJECT-21246011
[Presentation] Growth and characterization of heavily phosphorus-doped homoepitaxial (001) diamond films grown using high-power-density MWPCVD method with a conventional quartz-tube chamber2010
- Author(s)
  O.Maida
- Organizer
  The 4-th International Conference on New Diamond and Nano Carbons (NDNC2010)
- Place of Presentation
  Suzhou, China
- Year and Date
  2010-05-17
- Data Source
  KAKENHI-PROJECT-21246011
[Presentation] Reduced influences of the HPHT substrates on the electronic quality of homoepitaxial CVD diamond layers and on their UV detector performance2010
- Author(s)
  O.Maida
- Organizer
  The 4-th International Conference on New Diamond and Nano Carbons (NDNC2010)
- Place of Presentation
  Suzhou, China
- Year and Date
  2010-05-17
- Data Source
  KAKENHI-PROJECT-21246011
[Presentation] Reduced influ- ences of the HPHT substrates on the electronic quality of homoepitaxial CVD diamond layers and on their UV detector performance2010
- Author(s)
  O. Maida, S. Iguchi, T. Ito
- Organizer
  4th Intl. Conf. on New Diamond and Nano Carbons (NDNC2010)
- Place of Presentation
  Suzhou, China
- Year and Date
  2010-05-17
- Data Source
  KAKENHI-PROJECT-21246011
[Presentation] 高温高圧合成基板によるホモエピタキシャルCVDダイヤモンド膜への影響評価とその低減2010
- Author(s)
  毎田修
- Organizer
  第51回真空に関する連合講演会
- Place of Presentation
  大阪大学, 吹田
- Year and Date
  2010-11-04
- Data Source
  KAKENHI-PROJECT-21246011
[Presentation] Fabrication of self-standing device-quality single-crystalline diamond films on vicinal (001) surfaces and its application to the high-energy photon detectors2010
- Author(s)
  O.Maida
- Organizer
  The 21st European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides (Diamond 2010)
- Place of Presentation
  Budapest, Hungary
- Year and Date
  2010-09-06
- Data Source
  KAKENHI-PROJECT-21246011
[Presentation] Fabrication of self-standing device-quality single-crystalline diamond films on vicinal (001) surfaces and its application to the high-energy photon detectors2010
- Author(s)
  O. Maida, S. Iguchi, T. Igarashi, H. Sato, T. Ito
- Organizer
  21st European Conf. on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides (Diamond 2010)
- Place of Presentation
  Budapest, Hungary
- Year and Date
  2010-09-06
- Data Source
  KAKENHI-PROJECT-21246011
[Presentation] 高出力マイクロ波プラズマCVD法により作製したホモエピタキシャルダイヤモンド(001)微斜面薄膜の評価2009
- Author(s)
  毎田修
- Organizer
  第56回応用物理学関係連合講演会
- Place of Presentation
  筑波大学、つくば市
- Year and Date
  2009-03-31
- Data Source
  KAKENHI-PROJECT-19360018
[Presentation] Fabrication and character- ization of ultra-violet detectors using high-quality CVD diamond films2008
- Author(s)
  O. Maida
- Organizer
  The second international conference on new diamond and nano carbons 2008
- Place of Presentation
  Taipei, Taiwan
- Year and Date
  2008-05-27
- Data Source
  KAKENHI-PROJECT-19360018
[Presentation] Performance of stack-type soft-X-ray detectors fabricated with high-quality CVD diamond films2008
- Author(s)
  O. Maida
- Organizer
  The fourth vacuum and surface sciences conference of Asia and Australia
- Place of Presentation
  Matsue, Japan
- Year and Date
  2008-10-29
- Data Source
  KAKENHI-PROJECT-19360018
[Presentation] 高出力マイクロ波プラズマCVD法によるホモエピタキシャルダイヤモンド薄膜の基板品質及びオフ角依存性2008
- Author(s)
  川嶋慎也、宮武秀宇、有馬和也、毎田修、寺地徳之、伊藤利道
- Organizer
  第55回応用物理学関係連合講演会
- Place of Presentation
  日本大学,千葉
- Year and Date
  2008-03-27
- Data Source
  KAKENHI-PROJECT-19360018
[Presentation] 高品質CVDダイヤモンド薄膜を用いた軟X線・紫外線検出器の特性評価2008
- Author(s)
  岩鍛治陽子、金杉将幸、毎田修、竹田幸治、斉藤祐児、伊藤利道
- Organizer
  第55回応用物理学関係連合講演会
- Place of Presentation
  日本大学,千葉
- Year and Date
  2008-03-27
- Data Source
  KAKENHI-PROJECT-19360018
[Presentation] 高品質CVDダイヤモンド積層構造におけるキャリア拡散制御2008
- Author(s)
  金杉将幸、岩鍛治陽子、山元貴、毎田修、伊藤利道
- Organizer
  第55回応用物理学関係連合講演会
- Place of Presentation
  日本大学,千葉
- Year and Date
  2008-03-27
- Data Source
  KAKENHI-PROJECT-19360018
[Presentation] 高品質CVDダイヤモンド薄膜を用いた軟X線検出器の特性評価2007
- Author(s)
  岩鍛治陽子、金杉将幸、毎田修、竹田幸治、斉藤祐児、伊藤利道
- Organizer
  第68回応用物理学会学術講演会
- Place of Presentation
  北海道工業大学,北海道
- Year and Date
  2007-09-06
- Data Source
  KAKENHI-PROJECT-19360018
[Presentation] Characterization of phosphorus-doped homoepitaxial (100 )diamond films grown using high-power-density MWPCVD method with conventional quartz-tube chamber2007
- Author(s)
  T. Nakai, O. Maida and T. Ito
- Organizer
  The Fifth International Symposium on Control of Semiconductor Interfaces
- Place of Presentation
  首都大学東京、東京
- Year and Date
  2007-11-13
- Data Source
  KAKENHI-PROJECT-19360018
[Presentation] 石英管型低出力MWPCVD装置を用いた高電力密度化によるリンドープダイヤモンド薄膜の作製とその電気的特性の評価2007
- Author(s)
  中井孝洋、毎田修、伊藤利道
- Organizer
  第48回真空に関する連合講演会
- Place of Presentation
  学習院大学,東京
- Year and Date
  2007-11-14
- Data Source
  KAKENHI-PROJECT-19360018
[Presentation] 高光閉じ込め構造を有するアモルファスシリコン太陽電池の特性評価2007
- Author(s)
  毎田修
- Organizer
  第48回真空に関する連合講演会
- Place of Presentation
  学習院大学
- Year and Date
  2007-11-14
- Data Source
  KAKENHI-PROJECT-18760234
[Presentation] Crystalline quality improvements of the homoepitaxial CVD diamond films on the vicinal substrates2007
- Author(s)
  O. Maida
- Organizer
  The Fifth International Symposium on Control of Semiconductor Interfaces
- Place of Presentation
  首都大学東京、東京
- Year and Date
  2007-11-13
- Data Source
  KAKENHI-PROJECT-19360018
[Presentation] ホモエピタキシャルCVDダイヤモンド層からHPHT基板へのキャリアの長距離拡散制御2007
- Author(s)
  毎田修
- Organizer
  第56回応用物理学関係連合講演会
- Place of Presentation
  筑波大学、つくば市
- Year and Date
  2007-04-01
- Data Source
  KAKENHI-PROJECT-19360018
[Presentation] 高品質CVDダイヤモンド軟X線検出器の開発とその特性評価2007
- Author(s)
  岩鍛治陽子、金杉将幸、毎田修、竹田幸治、斉藤祐児、伊藤利道
- Organizer
  第48回真空に関する連合講演会
- Place of Presentation
  学習院大学,東京
- Year and Date
  2007-11-14
- Data Source
  KAKENHI-PROJECT-19360018
[Presentation] 石英管型簡易装置を用いた高電力密度MWPCVD法によるリンドープダイヤモンド薄膜合成2007
- Author(s)
  中井孝洋、毎田修、伊藤利道
- Organizer
  第68回応用物理学会学術講演会
- Place of Presentation
  北海道工業大学,北海道
- Year and Date
  2007-09-06
- Data Source
  KAKENHI-PROJECT-19360018

1. ITO Toshimichi (00183004)

# of Collaborated Projects: 3 results

# of Collaborated Products: 44 results

Maida Osamu 毎田 修

MAIDA Osamu 毎田 修

毎田 修 マイダ オサム

Research Projects

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Improvement of diamond semiconductor device properties by clarifying the non-radiative defect generation mechanismPrincipal Investigator

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Improvement of device characteristics by elucidation of non-radiative defect formation mechanism in diamond crystalsPrincipal Investigator

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Elucidation and control of generation mechanism of non-radiative defects in diamond crystalPrincipal Investigator

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Large-size clusterization of heavily-doped degenerate CVD diamond layer and its functional device application

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Development of high sensitivity non-radiation defect characterization systems for diamond semiconductorPrincipal Investigator

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Development of Fundamental Fabrication Processes for Functionalizing Electronic Devices Composed of High-Quality CVD Diamond

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Development of highly-sensitive diamond detectors with a large amplification function

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セラミック微粒子分散構造による非晶質シリコン太陽電池の高効率化Principal Investigator

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ゲート絶縁膜中固定電荷によるMOSFETのしきい値制御Principal Investigator

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[Book] 太陽光利用最前線

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[Journal Article] Characterization of deep interface states in SiO2/B-doped diamond using the transient photocapacitance method2022

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[Journal Article] Development of Highly-Sensitive Transient Photocapacitance Mesurement System for Deep Defects in Boron-Doped Diamond (100) Films2018

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[Journal Article] Characterization of Deep Defects in Boron-Doped CVD Diamond Films Using Transient Photocapacitance Method2017

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[Journal Article] Improvement on p-type CVD diamond semiconducting properties by fabricating thin heavily-boron-doped multi-layer clusters isolated each other in unintentionally boron-doped diamond layer2017

Author(s)

Maida Osamu 毎田修

MAIDA Osamu 毎田修

毎田修マイダオサム