Toyoda Mitsunori 豊田光紀

… Alternative Names

TOYODA Mitsunori 豊田光紀

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Researcher Number	40375168
Other IDs
Affiliation (Current)	2025: 東京工芸大学, 工学部, 教授
Affiliation (based on the past Project Information) *help	2021 – 2024: 東京工芸大学, 工学部, 教授 2017 – 2021: 東京工芸大学, 工学部, 准教授 2013 – 2017: 東北大学, 多元物質科学研究所, 助教 2007 – 2011: Tohoku University, IMRAM, Assistant Professor 2005 – 2006: 東北大学, 多元物質科学研究所, 助手
Review Section/Research Field	Principal Investigator Optical engineering, Photon science / Basic Section 30020:Optical engineering and photon science-related / Thin film/Surface and interfacial physical properties / Medium-sized Section 30:Applied physics and engineering and related fields / Applied optics/Quantum optical engineering Except Principal Investigator Optical engineering, Photon science / Basic Section 30020:Optical engineering and photon science-related / Engineering / Science and Engineering
Keywords	Principal Investigator 多層膜ミラー / 軟X線 / 顕微鏡 / 極紫外 / 対物鏡 / 収差論 / 多層膜 / リソグラフィ / 極紫外線 / ポリマーブレンド … More / 反射光学系 / 光学設計 / 非球面 / 反射結像系 / 斜入射光学系 / 斜入射 / 超深度イメージング / 集光光学系 / 色収差 / 回折限界 / 高次高調波 / 階層構造 / CCD検出器 / 高倍率 / 応用光学・量子光工学 / EUV顕微鏡 / 高分子 / multi layer mirror / EUV / フレネル数 / 軟X線顕微鏡 / 結像論 / フーリエ結像論 … More Except Principal Investigator 構造観察 / アブレーション / レーザー干渉計 / 軟X線顕微鏡 / 軟X線レーザー / 高次高調波発生 / アト秒科学 / コヒーレント軟X線 / 高次高調波 / スピントロニクス / 量子エレクトロニクス / Growth rate monitor / Ellipsometer / Sputtering / Period thickness distribution control / Laser Plasma / Microscope / Multilayer / Soft X-ray / 成膜レートモニター / エリプソメーター / スパッタリング / 周期膜厚分布制御 / レーザープラズマ / 顕微鏡 / 多層膜 / 軟X線 / 応用光学・量子光工学 / アト秒パルス / 光学素子 Less

Precise wavefront control using layer-by-layer etching of multilayer mirrors for diffraction-limited extreme ultraviolet imagingPrincipal Investigator
- Principal Investigator
  
  豊田光紀
- Project Period (FY)
  2024 – 2027
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Review Section
  
  Medium-sized Section 30:Applied physics and engineering and related fields
- Research Institution
  Tokyo Polytechnic University
軟X線レーザー干渉顕微鏡の開発とアブレーションによる損傷形成過程の解明
- Principal Investigator
  
  石野雅彦
- Project Period (FY)
  2023 – 2025
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 30020:Optical engineering and photon science-related
- Research Institution
  National Institutes for Quantum Science and Technology
Optical design for grazing incidence multilayer mirrors for high-spatial resolution imaging in soft X-ray regionPrincipal Investigator
- Principal Investigator
  
  豊田光紀
- Project Period (FY)
  2021 – 2024
- Research Category
  
  Fund for the Promotion of Joint International Research (Fostering Joint International Research (A))
- Review Section
  
  Basic Section 30020:Optical engineering and photon science-related
- Research Institution
  Tokyo Polytechnic University
EUV Wavefront Synthesizer for Real-Time and Extended Depth-of-Focus ImagingPrincipal Investigator
- Principal Investigator
  
  Toyoda Mitsunori
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 30020:Optical engineering and photon science-related
- Research Institution
  Tokyo Polytechnic University
Generation of circularly polarized femtosecond coherent soft x-rays and its application to ultrafast spin dynamics
- Principal Investigator
  
  Takahashi Eiji
- Project Period (FY)
  2017 – 2020
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Optical engineering, Photon science
- Research Institution
  Institute of Physical and Chemical Research
Lab-scale EUV microscope for wide-field and multi-scale observationPrincipal Investigator
- Principal Investigator
  
  TOYODA Mitsunori
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Optical engineering, Photon science
- Research Institution
  Tokyo Polytechnic University
  Tohoku University
Multilayer-mirror objective for diffraction-limited focusing in extreme ultraviolet regionPrincipal Investigator
- Principal Investigator
  
  Toyoda Mitsunori
- Project Period (FY)
  2016 – 2017
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Optical engineering, Photon science
- Research Institution
  Tohoku University
Diffraction limited focusing of isolated attosecond pulses and generation of intense XUV fields
- Principal Investigator
  
  Takahashi Eiji
- Project Period (FY)
  2014 – 2016
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Optical engineering, Photon science
- Research Institution
  Institute of Physical and Chemical Research
Imaging Properties of High Magnification Soft X-ray Objective with Reduced Fresnel NumberPrincipal Investigator
- Principal Investigator
  
  TOYODA Mitsunori
- Project Period (FY)
  2013 – 2015
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Optical engineering, Photon science
- Research Institution
  Tohoku University
Novel high magnification imaging objective for soft X-ray video microscopy with sub-100nm spatial resolutionPrincipal Investigator
- Principal Investigator
  
  TOYODA Mitsunori
- Project Period (FY)
  2010 – 2011
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  Tohoku University
Development of a practical two-mirror objective with sub-100 nm spatial resolution for soft-X-ray microscopyPrincipal Investigator
- Principal Investigator
  
  TOYODA Mitsunori
- Project Period (FY)
  2008 – 2009
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Thin film/Surface and interfacial physical properties
- Research Institution
  Tohoku University
実用アライメント誤差を許容する軟X線用結像光学系の開発Principal Investigator
- Principal Investigator
  
  豊田光紀
- Project Period (FY)
  2005 – 2006
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Tohoku University
High-resolution, element-specific microscope using a laser-produced-plasma soft X-ray source
- Principal Investigator
  
  YAMAMOTO Masaki
- Project Period (FY)
  2003 – 2007
- Research Category
  
  Grant-in-Aid for Specially Promoted Research
- Review Section
  
  Science and Engineering
  Engineering
- Research Institution
  Tohoku University

[Journal Article] High-irradiance illumination system for transmission extreme ultraviolet microscopy2023
- Author(s)
  Waki Shuntaro、Uchida Takayuki、Chen Jun、Toyoda Mitsunori
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 62 Issue: 5 Pages: 050901-050901
- DOI
  10.35848/1347-4065/accd32
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20KK0312
[Journal Article] Conservation of energy between pupil and image for point spread function2022
- Author(s)
  Shibuya Masato、Tanabe Takao、Toyoda Mitsunori
- Journal Title
  
  Optik
  
  Volume: 249 Pages: 168189-168189
- DOI
  10.1016/j.ijleo.2021.168189
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K05314
[Journal Article] 極紫外多層膜ミラー光学系による回折限界結像とポリマーブレンドの無染色観察への展開2022
- Author(s)
  豊田光紀
- Journal Title
  
  放射光
  
  Volume: 35 Pages: 327-327
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20KK0312
[Journal Article] Development of a high-power EUV irradiation tool in a hydrogen atmosphere2021
- Author(s)
  Harada Tetsuo、Yamakawa Shinji、Toyoda Mitsunori、Watanabe Takeo
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 60 Issue: 8 Pages: 087005-087005
- DOI
  10.35848/1347-4065/ac15ef
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K05314
[Journal Article] Removal of Mo/Si multilayer coatings on fused silica substrates by wet chemical etching2021
- Author(s)
  Toyoda Mitsunori、Yokoyama Ryo、Waki Shuntaro、Kakudate Toshiyuki、Chen Jun
- Journal Title
  
  Applied Physics Express
  
  Volume: 14 Issue: 5 Pages: 052003-052003
- DOI
  10.35848/1882-0786/abf666
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19K05314
[Journal Article] Staining-free observation of polymer blend thin films on transmission extreme ultraviolet microscopy2020
- Author(s)
  Mitsunori Toyoda, Shunsuke Aizawa, Shiori Gondai, Toshiyuki Kakudate, Masaki Ageishi, Hiroshi Jinnai, Jun Chen
- Journal Title
  
  Appl. Phys. Express
  
  Volume: 13 Issue: 8 Pages: 082011-082011
- DOI
  10.35848/1882-0786/aba882
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19K05314
[Journal Article] Global optimization of two-multilayer mirror objective for focusing soft X-ray high harmonics2019
- Author(s)
  Toyoda Mitsunori、Yamashita Shota、Chen Jun
- Journal Title
  
  Proc. SPIE
  
  Volume: 11032 Pages: 26-26
- DOI
  10.1117/12.2520543
- Data Source
  KAKENHI-PROJECT-16H03877
[Journal Article] Multilayer Mirrors for Focusing Objective in 40-nm Wavelength Region2018
- Author(s)
  M. Toyoda, Y. Tamaru, S. Mori, K. Sawada, Y. Fu, E. J. Takahashi, A. Suda, F. Kannari, K. Midorikawa, M. Yanagihara
- Journal Title
  
  Springer Proceedings in Physics
  
  Volume: 202 Pages: 287-290
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16H03877
[Journal Article] LOW-ORDER ABERRATIONS CORRECTION OF EXTREME ULTRAVIOLET IMAGING OBJECTIVE WITH DEFORMABLE MULTILAYER MIRRORS2017
- Author(s)
  Mitsunori TOYODA, Ryo SUNAYAMA, Mihiro YANAGIHARA
- Journal Title
  
  Proceedings of the MEDSI 2016 Conference
  
  Volume: 印刷中
- Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-16H03877
[Journal Article] Multilayer Mirrors for Focusing Objective in 40-nm Wavelength Region2017
- Author(s)
  M. Toyoda, Y. Tamaru, S. Mori, K. Sawada, Y. Fu, E. J. Takahashi, A. Suda, F. Kannari, K. Midorikawa, and M. Yanagihara
- Journal Title
  
  Proceedings of the 15th International Conference on X-Ray Lasers
  
  Volume: 印刷中
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26600122
[Journal Article] Multilayer Mirrors for Focusing Objective in 40-nm Wavelength Region2017
- Author(s)
  M. Toyoda, Y. Tamaru, S. Mori, K. Sawada, Y. Fu, E. J. Takahashi, A. Suda, F. Kannari, K. Midorikawa, M. Yanagihara
- Journal Title
  
  Proceedings of the 15th International Conference on X-Ray Lasers
  
  Volume: 印刷中
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-16K13693
[Journal Article] Imaging properties of an extreme ultraviolet microscope objective with reduced Fresnel number2017
- Author(s)
  Toyoda Mitsunori、Kuramitsu Kota、Yanagihara Mihiro
- Journal Title
  
  Optics Communications
  
  Volume: 405 Pages: 312-317
- DOI
  10.1016/j.optcom.2017.08.031
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K13693, KAKENHI-PROJECT-16H03877
[Journal Article] Flat-field anastigmatic mirror objective for highmagnification extreme ultraviolet microscopy2015
- Author(s)
  Mitsunori Toyoda
- Journal Title
  
  Advanced Optical Technologies
  
  Volume: 4 Issue: 4 Pages: 339-346
- DOI
  10.1515/aot-2015-0020
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25390088
[Journal Article] EUV Multilayer Mirrors for Focusing Isolated Attosecond Pulse in 40 nm Wavelength Region2015
- Author(s)
  M. Toyoda, Y. Tamaru, S. Mori, K. Sawada, Y. Fu, E. J. Takahashi, A. Suda, F. Kannari, K. Midorikawa and M. Yanagihara
- Journal Title
  
  UVSOR ACTIVITY REPORT 2015
- Data Source
  KAKENHI-PROJECT-26600122
[Journal Article] Demonstrating 30-nm spatial resolution of three-multilayer-mirror objective for extreme ultraviolet microscopy: Imaging test by observing lithography mask2014
- Author(s)
  Mitsunori Toyoda,Kenjiro Yamasoe,Akifumi Tokimasa,Kentaro Uchida,Tetsuo Harada,Tsuneo Terasawa,Tsuyoshi Amano,Takeo Watanabe,Mihiro Yanagihara,Hiroo Kinoshita
- Journal Title
  
  Applied Physics Express
  
  Volume: 7 Issue: 10 Pages: 102502-102502
- DOI
  10.7567/apex.7.102502
- NAID
  210000137252
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25390088, KAKENHI-PROJECT-26600122
[Journal Article] Observation of Residual-Type Thin Absorber Defect on Extreme Ultraviolet Lithography Mask Using an Extreme Ultraviolet Microscope2013
- Author(s)
  Tsuyoshi Amano, Susumu Iida, Ryoichi Hirano, Tsuneo Terasawa, Hidehiro Watanabe, Kenjiro Yamasoe, Mitsunori Toyoda, Akifumi Tokimasa, Tetsuo Harada, Takeo Watanabe, Hiroo Kinoshita
- Journal Title
  
  Appl. Phys. Express
  
  Volume: 6 Issue: 4 Pages: 046501-046501
- DOI
  10.7567/apex.6.046501
- NAID
  10031166440
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25390088
[Journal Article] Simulation Analysis of the Characteristics of a High Magnification Imaging Optics for the Observation of Extreme Ultraviolet Lithography Mask to Predict Phase Defect Printability2013
- Author(s)
  Tsuneo Terasawa, Yukiyasu Arisawa, Tsuyoshi Amano, Takeshi Yamane, Hidehiro Watanabe, Mitsunori Toyoda, Tetsuo Harada, Hiroo Kinoshita
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 52 Issue: 9R Pages: 096601-096601
- DOI
  10.7567/jjap.52.096601
- NAID
  210000142809
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25390088
[Journal Article] Aplanatic Three-Mirror Objective for High-Magnification Soft X-Ray Microscopy2011
- Author(s)
  M.Toyoda, T.Jinno, M.Yanagihara
- Journal Title
  
  AIP Conference Proceedings
  
  Volume: 1365 Pages: 176-179
- DOI
  10.1063/1.3625333
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760020
[Journal Article] Aplanatic Three-Mirror Objective for High-Magnification Soft X-Ray Microscopy2011
- Author(s)
  M. Toyoda, T. Jinno, and M. Yanagihara
- Journal Title
  
  AIP Conf. Proc
  
  Volume: 1365 Pages: 176-179
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760020
[Journal Article] Closed-Form Representations for Third-Order Aberrations of Two-Aspherical Mirror Aplanats with the Mirror Tilt and Decenter2011
- Author(s)
  M.Toyoda
- Journal Title
  
  Optical Review
  
  Volume: 18 Pages: 441-447
- NAID
  10030156546
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760020
[Journal Article] Closed-Form Representations for Third-Order Aberrations of Two-Aspherical Mirror Aplanats with the Mirror Tilt and Decenter2011
- Author(s)
  M. Toyoda
- Journal Title
  
  Opt. Rev
  
  Volume: 18 Pages: 441-447
- NAID
  10030156546
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760020
[Journal Article] High throughput and wide field of view EUV microscope for blur-free one-shot imaging of living organisms2010
- Author(s)
  T. Ejima, F. Ishida, H. Murata, M. Toyoda, T. Harada, T. Tsuru, T. Hatano, M. Yanagihara, M. Yamamoto, H. Mizutani
- Journal Title
  
  Opt. Express
  
  Volume: 18 Pages: 7203-7209
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760020
[Journal Article] Theoretical investigation of the meaning of odd-order aspherical surface and numerical confirmation of effectiveness in rotational-symmetric but off-axis optics2010
- Author(s)
  Masato Shibuya, Kazuhisa Maehara, Yoshihito Ishikawa, Akira Takada, Kei Kobayashi, Mitsunori Toyoda, Masanori Tanikawa, Suezou Nakadate
- Journal Title
  
  Opt. Eng
  
  Volume: 49(7) Pages: 73003-73003
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760020
[Journal Article] Theoretical investigation of the meaning of odd-order aspherical surface and numerical confirmation of effectiveness in rotational-symmetric but off-axis optics2010
- Author(s)
  M.Shibuya, M.Toyoda, et.al.
- Journal Title
  
  Opt.Eng.
  
  Volume: 49 Pages: 73003-73003
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760020
[Journal Article] High throughput and wide field of view EUV microscope for blur-free one-shot imaging of living organisms2010
- Author(s)
  T. Ejima, F. Ishida, H. Murata, M. Toyoda, T. Harada, T. Tsuru, T. Hatano, M. Yanagihara, M. Yamamoto, Haruo Mizutani
- Journal Title
  
  Opt. Exp. 18
  
  Pages: 7203-7209
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20760018
[Journal Article] High throughput and wide field of view EUV microscope for blur-free one-shot imaging of living organisms2010
- Author(s)
  T.Ejima, M.Toyoda, et.al.
- Journal Title
  
  Opt.Express
  
  Volume: 18 Pages: 7203-7209
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22760020
[Journal Article] Design study of two-aspherical-mirror anastigmat with reduced sensitivities to misalignments: correction of higher-order aberrations2009
- Author(s)
  M. Toyoda, M. Yanagihara
- Journal Title
  
  J. Phys. Conf. Series 186
  
  Pages: 12076-12076
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20760018
[Journal Article] Frustration of direct photoionization of Ar clusters in intense extreme ultraviolet pulses from a free electron laser2009
- Author(s)
  H.Iwayama, K.Ueda, M.Toyoda, et.al.
- Journal Title
  
  J.Phys.B : At.Mol.Opt.Phys. 42
  
  Pages: 134019-134019
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20760018
[Journal Article] Multi-coincidence ion detection system for EUV-FEL fragmentation experiments at Spring-82009
- Author(s)
  K.Motomura, K.Ueda, M.Toyoda, et.al.
- Journal Title
  
  Nucl.Instrum.Methods A 606
  
  Pages: 770-773
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20760018
[Journal Article] Dead-time-free ion momentum spectroscopy of multiple ionization of Xe clusters irradiated by euv free-electron laser pulses2009
- Author(s)
  H. Fukuzawa, X.-J. Liu, G. Pruemper, M. Okunishi, K. Shimada, K. Ueda, T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, H. Iwayama, K. Nagaya, M. Yao, K. Motomura, N. Saito, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Doerner, M. Nagasono, A. Higashiya, M. Yabashi, T. Ishikawa, H. Ohashi, H. Kimura
- Journal Title
  
  Phys. Rev. A 79
  
  Pages: 31201-3201
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20760018
[Journal Article] Design study of two-aspherical-mirror anastigmat with reduced sensitivities to misalignments : correction of higher-order aberrations2009
- Author(s)
  M.Toyoda, M.Yanagihara
- Journal Title
  
  J.Phys.Conf.Series 186
  
  Pages: 12076-12076
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20760018
[Journal Article] Multi-coincidence ion detection system for EUV-FEL fragmentation experiments at Spring-82009
- Author(s)
  K. Motomura, L. Foucar, A. Czasch, N. Saito, O. Jagutzki, H. Schmidt-Boecking, R. Doerner, X.-J.Liu, H. Fukuzawa, G. Pruemper, K. Ueda, M. Okunishi, K. Shimada, T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, H. Iwayama, K. Nagaya, M. Yao, A. Rudenko, J. Ullrich, M. Nagasono, A. Higashiya, M. Yabashi, T. Ishikawa, H. Ohashi, H. Kimura
- Journal Title
  
  Nucl. Instrum. Methods A 606
  
  Pages: 770-773
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20760018
[Journal Article] Frustration of direct photoionization of Ar clusters in intense extreme ultraviolet pulses from a free electron laser2009
- Author(s)
  H. Iwayama, K. Nagaya, M. Yao, H. Fukuzawa, X.-J. Liu, G. Pruemper, M. Okunishi, K. Shimada, K. Ueda, T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, K. Motomura, N. Saito, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Doerner, M. Nagasono, A. Higashiya, M. Yabashi, T. Ishikawa, H. Ohashi, H. Kimura
- Journal Title
  
  J. Phys. B: At. Mol. Opt. Phys. 42
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20760018
[Journal Article] Analytical designing of two-aspherical-mirror anastigmats permitting practical misalignments in a soft-X-ray optics2006
- Author(s)
  M. Toyoda
- Journal Title
  
  Opt. Rev. 13
  
  Pages: 149-157
- NAID
  10019176674
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] Analytical Designing of Two-Aspherical-Mirror Anastigmats Permitting Practical Misalignments in Soft-X-Ray Optics2006
- Author(s)
  M.Toyoda
- Journal Title
  
  Optical Review 13
  
  Pages: 149-157
- NAID
  10019176674
- Data Source
  KAKENHI-PROJECT-17760037
[Journal Article] Analytical Designing of Two-Aspherical-Mirror Anastigmat Permitting Practical Misalignments for Soft-X-Ray Imaging2006
- Author(s)
  M.Toyoda
- Journal Title
  
  IPAP Conference Series 7
  
  Pages: 186-188
- Data Source
  KAKENHI-PROJECT-15002001
[Journal Article] Analytical designing of two-aspherical-mirror anastigmat permitting practical misalignments for soft-X-ray imaging2006
- Author(s)
  M. Toyoda
- Journal Title
  
  IPAP Conference Series 7
  
  Pages: 186-188
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Patent] 反射型投影光学装置2009
- Inventor(s)
  豊田光紀
- Industrial Property Rights Holder
  東北大学
- Industrial Property Number
  2009-152742
- Filing Date
  2009-06-26
- Data Source
  KAKENHI-PROJECT-20760018
[Patent] 反射型投影光学装置2008
- Inventor(s)
  豊田光紀
- Industrial Property Rights Holder
  東北大学
- Industrial Property Number
  2008-220382
- Filing Date
  2008-08-28
- Data Source
  KAKENHI-PROJECT-20760018
[Patent] 投影光学装置2005
- Inventor(s)
  豊田光紀, 山本正樹
- Industrial Property Rights Holder
  東北大学
- Industrial Property Number
  2005-086418
- Filing Date
  2005-03-24
- Data Source
  KAKENHI-PROJECT-17760037
[Presentation] Imaging Objective for Higher Energy Region2023
- Author(s)
  Mitsunori Toyoda, Shota Yamashita, Jun Chen
- Organizer
  Fraunhofer IISB Lithography Simulation Workshop
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20KK0312
[Presentation] Removal of Mo/Si Multilayer Coatings on Fused Silica Substrates by Wet Chemical Etching2023
- Author(s)
  Mitsunori TOYODA, Ryo YOKOYAMA, Shuntaro WAKI, Jun CHEN
- Organizer
  The International Conference on Physics of X-Ray and Neutron Multilayer Structures 202
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20KK0312
[Presentation] Design Study of Soft X-Ray Aplanat with Four Multilayer Mirrors in Grazing Incidence Configuration2023
- Author(s)
  S. Yamashita, M. Toyoda
- Organizer
  The International Conference on Physics of X-Ray and Neutron Multilayer Structures 202
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20KK0312
[Presentation] 高倍率EUV対物ミラーの100pm精度波面制御と高エネルギー領域への展開2023
- Author(s)
  豊田光紀
- Organizer
  X線・EUV結像光学のフロンティア2023, OPJ2023
- Invited
- Data Source
  KAKENHI-PROJECT-20KK0312
[Presentation] ４面斜入射多層膜ミラーによるaplanatic対物系の検討2023
- Author(s)
  豊田光紀, 陳軍
- Organizer
  第84回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-20KK0312
[Presentation] 石英基板に成膜したMo/SI多層膜ミラーの精密除去法2023
- Author(s)
  豊田光紀、横山諒、脇俊太郎、角館俊行、陳軍
- Organizer
  第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20KK0312
[Presentation] High Irradiance Illuminator for Transmission Extreme Ultraviolet Microscopy2023
- Author(s)
  Shuntaro Waki, Yusuke Tsukui, Jun Chen, Mitsunori Toyoda
- Organizer
  The International Conference on Physics of X-Ray and Neutron Multilayer Structures 202
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20KK0312
[Presentation] レーザープラズマ光源の輝度分布を考慮したEUV照明系照度の精密評価2023
- Author(s)
  脇俊太郎、津久井雄祐、陳軍、豊田光紀
- Organizer
  第70回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20KK0312
[Presentation] デフォーカス収差の直交展開式の解析的導出と干渉計測の補正精度向上2023
- Author(s)
  田邊貴大,豊田光紀、渋谷眞人
- Organizer
  第48回光学シンポジウム
- Data Source
  KAKENHI-PROJECT-20KK0312
[Presentation] レーザープラズマEUV反射率計の絶対値補正2022
- Author(s)
  脇俊太郎、津久井雄祐、陳軍、豊田光紀
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-20KK0312
[Presentation] Diffraction-limited imaging by extreme ultraviolet multilayer mirror objective and its application to staining-free observation of polymer blend samples2022
- Author(s)
  Mitsunori Toyoda
- Organizer
  seminaires generaux du Laboratoire Charles Fabry
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20KK0312
[Presentation] 実験室EUV顕微鏡照明光学系の高照度化(2)2022
- Author(s)
  脇俊太郎、津久井雄祐、陳軍、豊田光紀
- Organizer
  応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05314
[Presentation] EUV顕微対物ミラーの高精度波面計測法の開発(2)2022
- Author(s)
  津久井雄祐、脇俊太郎、陳軍、豊田光紀
- Organizer
  応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05314
[Presentation] 極紫外顕微鏡用の高倍率対物ミラ-で生じるコマ収差の精密補正2022
- Author(s)
  津久井雄祐、脇俊太郎、増根伊織、陳軍、豊田光紀
- Organizer
  第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-20KK0312
[Presentation] 実験室EUV顕微鏡の開発と高分子の無染色可視化への応用2021
- Author(s)
  豊田光紀, 桃野幸文, 角館俊行, 陳軍
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05314
[Presentation] 実験室EUV顕微鏡用の高倍率多層膜ミラー対物光学系の開発2021
- Author(s)
  脇俊太郎, 陳軍, 豊田光紀
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05314
[Presentation] EUV顕微鏡照明光学系の高照度化2021
- Author(s)
  脇俊太郎、津久井雄祐、陳軍、豊田光紀
- Organizer
  応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05314
[Presentation] ２面斜入射対物ミラー設計解の大域的探索（５）2021
- Author(s)
  山下正汰, 陳軍, 豊田光紀
- Organizer
  第68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05314
[Presentation] EUV顕微対物ミラーの高精度波面計測法の開発2021
- Author(s)
  津久井雄祐、脇俊太郎、陳軍、豊田光紀
- Organizer
  応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-19K05314
[Presentation] 軸外物体を考慮したＥＵＶ多層膜ミラーの光学設計2020
- Author(s)
  相澤駿介,豊田光紀
- Organizer
  第67回応用物理学会春季学術講演会（上智大学四谷キャンパス）
- Data Source
  KAKENHI-PROJECT-16H03877
[Presentation] 軸外物体を考慮したＥＵＶ多層膜ミラーの光学設計2020
- Author(s)
  相澤駿介,豊田光紀
- Organizer
  第67回応用物理学会春季学術講演会（上智大学四谷キャンパス）
- Data Source
  KAKENHI-PROJECT-19K05314
[Presentation] EUV顕微鏡付加拡大系用の凹面Mo/Si多層膜ミラーの作製2019
- Author(s)
  相澤駿介,角館俊行,豊田光紀
- Organizer
  第80回応用物理学会秋季学術講演会（北海道大学札幌キャンパス）
- Data Source
  KAKENHI-PROJECT-19K05314
[Presentation] Global optimization of two-multilayer mirror objective for focusing soft X-ray high harmonics2019
- Author(s)
  M. Toyoda, S. Yamashita, J. Chen
- Organizer
  SPIE, EUV and X-ray Optics: Synergy between Laboratory and Space VI
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03877
[Presentation] Observation of Polymer Blend Films on Transmission EUV Microscopy2018
- Author(s)
  Syunsuke Aizawa, Toshiyuki kakudate, Shiori Gondai, Mitunori Toyoda
- Organizer
  PXRNMS2018 International Workshop
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03877
[Presentation] EUV結像系用の曲面多層膜ミラーで生じる色収差とその補正法2018
- Author(s)
  金子明誉,豊田光紀,高田昌樹
- Organizer
  第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16K13693
[Presentation] 回折限界EUV結像を実現するアクロマティックEUV多層膜ミラーの開発2018
- Author(s)
  金子明誉,豊田光紀,高田昌樹
- Organizer
  第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-16K13693
[Presentation] ポリマーブレンドのEUV顕微観察に適した試料準備条件2018
- Author(s)
  相澤駿介, 角館俊行, 権代詩織, 豊田光紀
- Organizer
  第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-16H03877
[Presentation] Extreme Ultraviolet Microscope Based on Multilayer Mirror Optics with Diffraction-Limited Spatial Resolution2017
- Author(s)
  Mitsunori Toyoda
- Organizer
  The 24th General Congress of the International Commission for Optics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03877
[Presentation] Extreme Ultraviolet Microscope Based on Multilayer Mirror Optics with Diffraction-Limited Spatial Resolution2017
- Author(s)
  Mitsunori Toyoda
- Organizer
  The 24th General Congress of the International Commission for Optics
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K13693
[Presentation] 回折限界EUV顕微鏡の開発とポリマー試料のモルフォロジー解析への応用2017
- Author(s)
  豊田光紀
- Organizer
  第14回X線結像光学シンポジウム
- Invited
- Data Source
  KAKENHI-PROJECT-16K13693
[Presentation] 回折限界EUV顕微鏡の開発とポリマー試料のモルフォロジー解析への応用2017
- Author(s)
  豊田光紀
- Organizer
  第14回X線結像光学シンポジウム
- Invited
- Data Source
  KAKENHI-PROJECT-16H03877
[Presentation] 30nm分解能を実現する実験室EUV顕微鏡の開発2017
- Author(s)
  豊田光紀
- Organizer
  日本顕微鏡学会　マルチディメンジョナルトモグラフィ研究部会「様々な量子ビームによる３次元イメージング」
- Data Source
  KAKENHI-PROJECT-16H03877
[Presentation] Point Diffraction Interferometer for Inspection of High-Magnification Objective for Extreme Ultraviolet Microscopy2017
- Author(s)
  Mitsunori Toyoda, Ryo Sunayama, Mihiro Yanagihara
- Organizer
  The 61st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication,USA,Orlando.
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K13693
[Presentation] Point Diffraction Interferometer for Inspection of High-Magnification Objective for Extreme Ultraviolet Microscopy2017
- Author(s)
  Mitsunori Toyoda, Ryo Sunayama, Mihiro Yanagihara
- Organizer
  The 61st International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03877
[Presentation] LOW-ORDER ABERRATIONS CORRECTION OF EXTREME ULTRAVIOLET IMAGING OBJECTIVE WITH DEFORMABLE MULTILAYER MIRRORS2016
- Author(s)
  Mitsunori Toyoda,Ryo Sunayama,Mihiro Yanagihara
- Organizer
  9th edition of the Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation (MEDSI) conference
- Place of Presentation
  バルセロナ (スペイン)
- Year and Date
  2016-09-11
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03877
[Presentation] Multilayer Mirror Objective for Focusing Isolated Attosecond Pulse in 40 nm Wavelength Region2016
- Author(s)
  M. Toyoda,Y. Tamaru,S. Mori1,K. Sawada,Y. Fu,E. J. Takahashi,A. Suda,F. Kannari,K. Midorikawa,M. Yanagihara
- Organizer
  The 15th International Conference on X-Ray Lasers
- Place of Presentation
  奈良春日野国際フォーラム（奈良県・奈良市）
- Year and Date
  2016-05-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26600122
[Presentation] マグネトロンスパッタに適用できる多層膜ミラーの周期長分布制御機構の開発2016
- Author(s)
  金子明誉,豊田光紀,高田昌樹
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  朱鷺メッセ（新潟県・新潟市）
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-26600122
[Presentation] マグネトロンスパッタに適用できる多層膜ミラーの周期長分布制御機構の開発（2）2016
- Author(s)
  金子明誉,豊田光紀,高田昌樹
- Organizer
  第71回応用物理学会東北支部学術講演会
- Place of Presentation
  青葉記念会館(宮城県・仙台市)
- Year and Date
  2016-12-01
- Data Source
  KAKENHI-PROJECT-16H03877
[Presentation] マグネトロンスパッタに適用できる多層膜ミラーの周期長分布制御機構の開発2016
- Author(s)
  金子明誉,豊田光紀,高田昌樹
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  朱鷺メッセ(新潟県・新潟市)
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-16H03877
[Presentation] Multilayer Mirror Objective for Focusing Isolated Attosecond Pulse in 40 nm Wavelength Region2016
- Author(s)
  M. Toyoda,Y. Tamaru,S. Mori1,K. Sawada,Y. Fu,E. J. Takahashi,A. Suda,F. Kannari,K. Midorikawa,M. Yanagihara
- Organizer
  The 15th International Conference on X-Ray Lasers
- Place of Presentation
  奈良春日野国際フォーラム(奈良県・奈良市))
- Year and Date
  2016-05-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K13693
[Presentation] Design, fabrication, and test of extreme ultraviolet microscope with 30-nm spatial resolution2016
- Author(s)
  Mitsunori Toyoda
- Organizer
  Physics of X-Ray and Neutron Multilayer Structures Workshop 2016
- Place of Presentation
  エンスヘーデ (オランダ)
- Year and Date
  2016-11-10
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16H03877
[Presentation] マグネトロンスパッタに適用できる多層膜ミラーの周期長分布制御機構の開発（2）2016
- Author(s)
  金子明誉,豊田光紀,高田昌樹
- Organizer
  第71回応用物理学会東北支部学術講演会
- Place of Presentation
  青葉記念会館（宮城県・仙台市）
- Year and Date
  2016-12-01
- Data Source
  KAKENHI-PROJECT-26600122
[Presentation] 単一アト秒パルス用回折限界集光シテムの開発32016
- Author(s)
  田丸裕基、森哲、澤田和寛、Fu Yuxi、高橋栄治、須田亮、神成文彦、緑川克美、豊田光紀
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東工大　大岡山キャンパス (東京)
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-26600122
[Presentation] EUV用極限集光システムに向けた高反射率多層膜鏡の製作2015
- Author(s)
  田丸裕基、森哲、澤田和寛、Fu Yuxi、高橋栄治、須田亮、神成文彦、緑川克美、豊田光紀
- Organizer
  軟X線イメージングの描く未来
- Place of Presentation
  分子科学研究所 (愛知県・岡崎市）
- Year and Date
  2015-09-07
- Data Source
  KAKENHI-PROJECT-26600122
[Presentation] 単一アト秒パルス用回折限界集光システムの開発22015
- Author(s)
  田丸裕基、森哲、澤田和寛、Fu Yuxi、高橋栄治、須田亮、神成文彦、緑川克美、豊田光紀
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場 (愛知県・名古屋市)
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-26600122
[Presentation] 広視野を30nm解像するEUV顕微鏡の開発2015
- Author(s)
  豊田光紀
- Organizer
  分子研研究会（学協会連携）・放射光学会第8回若手研究会"軟X線イメージングの描く未来
- Place of Presentation
  分子科学研究所(岡崎市)
- Year and Date
  2015-09-07
- Invited
- Data Source
  KAKENHI-PROJECT-25390088
[Presentation] 単一アト秒パルス用回折限界集光システムの開発22015
- Author(s)
  田丸裕基,森哲,澤田和寛,Fu Yuxi,高橋栄治,須田亮,神成文彦,緑川克美,豊田光紀
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場(名古屋市)
- Year and Date
  2015-09-13
- Data Source
  KAKENHI-PROJECT-25390088
[Presentation] 点回折干渉計による高倍率EUV顕微対物ミラーの１nm精度波面制御2015
- Author(s)
  豊田光紀,砂山諒,柳原美広
- Organizer
  The 13th Symposium on X-Ray Imaging Optics
- Place of Presentation
  名古屋大学(名古屋市)
- Year and Date
  2015-11-17
- Invited
- Data Source
  KAKENHI-PROJECT-25390088
[Presentation] EUV用極限集光システムに向けた高反射多層膜鏡の製作2015
- Author(s)
  田丸裕基、澤田和寛、森哲、豊田光紀、高橋栄治、神成文彦、須田亮、緑川克美、柳原美廣
- Organizer
  第15回レーザー学会東京支部研究会
- Place of Presentation
  東海大学高輪キャンパス
- Year and Date
  2015-03-05
- Data Source
  KAKENHI-PROJECT-26600122
[Presentation] Ir レプリカX線反射鏡製作とNi トップレイヤーの性能評価2015
- Author(s)
  吉川駿, 田村啓輔, 松本浩典, 田原譲, 山下広順, 宮澤拓也, 三石郁之, 佐治重孝, 小林洋明, 松本竜弦, 豊田光紀, 柳原美広
- Organizer
  日本天文学会2015年秋季年会
- Place of Presentation
  甲南大学(神戸市)
- Year and Date
  2015-09-09
- Data Source
  KAKENHI-PROJECT-25390088
[Presentation] 多層膜ミラーによるEUV回折限界結像系の開発の現状と展開2014
- Author(s)
  豊田光紀
- Organizer
  レーザー学会第469回研究会
- Place of Presentation
  喜多方市
- Year and Date
  2014-12-05
- Invited
- Data Source
  KAKENHI-PROJECT-26600122
[Presentation] EUV結像系用点回折干渉計の波面測定精度の検証2014
- Author(s)
  砂山諒, 豊田光紀, 近藤祐治, 山川清志, 柳原美廣
- Organizer
  応用物理学会東北支部第69回学術講演会
- Place of Presentation
  仙台
- Year and Date
  2014-12-05
- Data Source
  KAKENHI-PROJECT-26600122
[Presentation] 多層膜ミラーによるEUV回折限界結像系の開発の現状と展開2014
- Author(s)
  豊田光紀
- Organizer
  レーザー学会第469回研究会
- Place of Presentation
  喜多方市
- Year and Date
  2014-12-05
- Data Source
  KAKENHI-PROJECT-25390088
[Presentation] 小型フォトニック結晶波長板による点回折干渉計の高精度化2014
- Author(s)
  砂山諒, 豊田光紀, 近藤祐治, 山川清志, 柳原美廣
- Organizer
  第75回応用物理学会秋季学術講演会
- Place of Presentation
  札幌
- Year and Date
  2014-09-18
- Data Source
  KAKENHI-PROJECT-25390088
[Presentation] EUV結像系用点回折干渉計の波面測定精度の検証2014
- Author(s)
  砂山諒, 豊田光紀, 近藤祐治, 山川清志, 柳原美廣
- Organizer
  応用物理学会東北支部第69回学術講演会
- Place of Presentation
  仙台
- Year and Date
  2014-12-05
- Data Source
  KAKENHI-PROJECT-25390088
[Presentation] 小型フォトニック結晶波長板による点回折干渉計の高精度化2014
- Author(s)
  砂山諒, 豊田光紀, 近藤祐治, 山川清志, 柳原美廣
- Organizer
  第75回応用物理学会秋季学術講演会
- Place of Presentation
  札幌
- Year and Date
  2014-09-18
- Data Source
  KAKENHI-PROJECT-26600122
[Presentation] Design, fabrication, and test of an EUV mask imaging microscope for lithography generations with sub-16 nm half pitch2013
- Author(s)
  M. Toyoda, K. Yamasoe, M. Yanagihara, T. Amano, T. Terasawa, A. Tokimasa, T. Harada, T. Watanabe, H. Kinoshita
- Organizer
  2013 International Symposium on Extreme Ultraviolet Lithography
- Place of Presentation
  Toyama, Japan
- Data Source
  KAKENHI-PROJECT-25390088
[Presentation] Design, fabrication, and test of a novel wide field microscope objective for extreme ultraviolet multiscale imaging.2013
- Author(s)
  Mitsunori Toyoda
- Organizer
  The 12th Symposium on X-ray Imaging Optics
- Place of Presentation
  Osaka, Japan
- Invited
- Data Source
  KAKENHI-PROJECT-25390088
[Presentation] 軟X線多層膜による高倍率対物鏡の開発と生体試料観察への展開2011
- Author(s)
  豊田光紀
- Organizer
  先端計測シンポジウム
- Place of Presentation
  仙台
- Year and Date
  2011-03-03
- Data Source
  KAKENHI-PROJECT-22760020
[Presentation] 軟X線多層膜光学系による顕微鏡開発の現状とコヒーレント軟X線集光への展開2010
- Author(s)
  豊田光紀
- Organizer
  第11回エクストリームフォトニクス研究
- Place of Presentation
  和光市
- Data Source
  KAKENHI-PROJECT-22760020
[Presentation] Development of Wide Field of View EUV Microscope Using Normal-Incident Multilayer Optics with LPP Light Source2010
- Author(s)
  F. Ishida, T. Ejima, M. Toyoda, T. Tsuru, T. Hatano, M. Yanagihara, H. Mizutani
- Organizer
  The 10th international conference on x-ray microscopy
- Place of Presentation
  USA, Chicago
- Data Source
  KAKENHI-PROJECT-22760020
[Presentation] フレネル数の小さい軟X線用顕微光学系の結像特性2010
- Author(s)
  豊田光紀, 倉光康太, 柳原美廣
- Organizer
  第35回光学シンポジウム
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-22760020
[Presentation] Super-Hierarchical Microscope in EUV Region2010
- Author(s)
  T. Ejima, M. Toyoda, T. Tsuru, T. Hatano, M. Yanagihara
- Organizer
  The 10th international conference on x-ray microscopy
- Place of Presentation
  USA, Chicago
- Data Source
  KAKENHI-PROJECT-22760020
[Presentation] 軟X線多層膜光学系による顕微鏡開発の現状とコヒーレント軟X線集光への展開2010
- Author(s)
  豊田光紀
- Organizer
  第11回エクストリームフォトニクス研究
- Place of Presentation
  理化学研究所
- Year and Date
  2010-10-13
- Data Source
  KAKENHI-PROJECT-22760020
[Presentation] Novel multilayer-mirror optics for a whole tissue imaging2010
- Author(s)
  M. Toyoda, T. Jinno, T. Harada, T. Hatano, M. Yanagihara
- Organizer
  The 10th international conference on x-ray microscopy
- Place of Presentation
  Chicago
- Data Source
  KAKENHI-PROJECT-22760020
[Presentation] 軟X線用高倍率対物鏡の結像特性2010
- Author(s)
  豊田光紀, 倉光康太, 柳原美広
- Organizer
  応用物理学会学術講演会
- Place of Presentation
  長崎市
- Data Source
  KAKENHI-PROJECT-22760020
[Presentation] 軟x線用超高倍率顕微対物鏡の開発2009
- Author(s)
  豊田光紀, 神野貴義, 原田哲男, 羽多野忠, 柳原美広
- Organizer
  第34回光学シンポジウム
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-20760018
[Presentation] EUV-FEL光と運動量イメージングを用いたクラスター解離ダイナミクスの研究:クラスターサイズ依存性2009
- Author(s)
  岩山洋士, 永谷清信, 八尾誠, 福澤宏宣, X. -J. Liu, G. Pruemper, 奥西みさき, 嶋田浩三, 上田潔, 原田哲男, 豊田光紀, 柳原美広, 山本正樹, 本村浩治, 齋藤則生, A. Rudenko, J. Ullrich, L. Fouca, A. Czasch, R. Doerner, 永園充, 東谷篤志, 矢橋牧名, 石川哲也, 大橋治彦, 木村洋昭
- Organizer
  第22回日本放射光学会・放射光科学合同シンポジウム
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-20760018
[Presentation] EUV-FEL光と運動量イメージングを用いたクラスター解離ダイナミクスの研究:光強度依存性2009
- Author(s)
  永谷清信, 岩山洋士, 八尾誠, 福澤宏宣, X. -J. Liu, G. Pruemper, 奥西みさき, 嶋田浩三, 上田潔, 原田哲男, 豊田光紀, 柳原美広, 山本正樹, 本村浩治, 齋藤則生, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Doerner, 永園充, 東谷篤志, 矢橋牧名, 石川哲也, 大橋治彦, 木村洋昭
- Organizer
  第22回日本放射光学会・放射光科学合同シンポジウム
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-20760018
[Presentation] 広視野と高倍率を両立した軟x線多層膜顕微鏡の開発2009
- Author(s)
  豊田光紀
- Organizer
  第10回X線結像光学シンポジウム
- Place of Presentation
  つくば市
- Data Source
  KAKENHI-PROJECT-20760018
[Presentation] LPP光源を用いた透過型X線反射多層膜顕微鏡TXM32009
- Author(s)
  江島丈雄, 中村芳雅, 豊田光紀, 原田哲男, 津留俊英, 羽多野忠, 柳原美広, 山本正樹
- Organizer
  第22回日本放射光学会年会・放射光科学合同シンポジウム
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-20760018
[Presentation] 広視野と高倍率を両立した軟X線多層膜顕微鏡の開発2009
- Author(s)
  豊田光紀
- Organizer
  第10回X線結像光学シンポジウム
- Place of Presentation
  つくば国際会議場
- Year and Date
  2009-11-07
- Data Source
  KAKENHI-PROJECT-20760018
[Presentation] EUV-FEL利用実験に用いる多粒子同期計測システムの開発と評価2009
- Author(s)
  本村浩治, 齋藤則生, 福澤宏宣, Liu XiaoJing, Pruemper Georg, 奥西みさき, 嶋田浩三, 上田潔, 原田哲男, 豊田光紀, 柳原美広, 山本正樹, 岩山洋士, 永谷清信, 八尾誠, Rudenko Artem, Ullrich Joachim, Foucar Lutz, Czasch Achim, Doerner Reinhard, 永園充, 東谷篤志, 矢橋牧名, 石川哲也, 大橋治彦, 木村洋昭
- Organizer
  第22回日本放射光学会・放射光科学合同シンポジウム
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-20760018
[Presentation] 極紫外自由電子レーザー照射によるN2およびO2分子多光子多重イオン化2009
- Author(s)
  福澤宏宣, Liu XiaoJing, Pruemper Georg, 奥西みさき, 嶋田浩三, 上田潔, 原田哲男, 豊田光紀, 柳原美広, 山本正樹, 本村浩治, 齋藤則生, 岩山洋士, 永谷清信, 八尾誠, Rudenko Artem, Ullrich Joachim, Foucar Lutz, Czasch Achim, Doerner Reinhard, 永園充, 東谷篤志, 矢橋牧名, 石川哲也, 大橋治彦, 木村洋昭
- Organizer
  第22回日本放射光学会・放射光科学合同シンポジウム
- Place of Presentation
  東京
- Data Source
  KAKENHI-PROJECT-20760018
[Presentation] レーザープラズマ光源を用いた透過型X線反射多層膜顕微鏡TXM3の開発32008
- Author(s)
  江島丈雄, 中村芳雅, 豊田光紀, 原田哲男, 羽多野忠, 柳原美広
- Organizer
  第69回応用物理学会学術講演会
- Place of Presentation
  春日井
- Data Source
  KAKENHI-PROJECT-20760018
[Presentation] 炭素の窓多層膜顕微鏡を目指した0. 1%オーダー精度波長マッチング技術の開発2008
- Author(s)
  原田哲男, 神野貴義, 豊田光紀, 羽多野忠, 山本正樹
- Organizer
  第69回応用物理学会学術講演会講演奨励賞受賞記念講演
- Place of Presentation
  日井
- Data Source
  KAKENHI-PROJECT-20760018
[Presentation] Multiple ionization of rare gas clusters using the EUV-FEL at SPring-82008
- Author(s)
  G. Pruemper, H. Fukuzawa, X.J. Liu, M. Okunishi, K. Shimada, K. Ueda,T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, N. Saito, K. Motomura, H. Iwayama, K. Nagaya, M. Yao, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Doerner, M. Nagasono, A. Higashiya, M. Yabashi, T. Ishikawa, R. Tanaka, H. Ohashi, H. Kimura
- Organizer
  11th International Coference on Multiphoton Processes
- Place of Presentation
  Germany, Heidelberg
- Data Source
  KAKENHI-PROJECT-20760018
[Presentation] 直入射非球面鏡による広視野軟X線結像系2008
- Author(s)
  豊田光紀, 山本正樹, 柳原美広
- Organizer
  第69回応用物理学会学術講演会X線結像光学の最前線
- Place of Presentation
  中部大学
- Year and Date
  2008-09-03
- Data Source
  KAKENHI-PROJECT-20760018
[Presentation] Analytical Designing of Two-Aspherical-Mirror Optics for Soft X-Ray Imaging2008
- Author(s)
  M. Toyoda, M. Yamamoto, M. Yanagihara
- Organizer
  9th International Conference on X-Ray Microscopy
- Place of Presentation
  Switzerland, Zurich
- Data Source
  KAKENHI-PROJECT-20760018
[Presentation] Exact Period Thickness Control of Soft X-ray Multilayers on Curved Substrates2008
- Author(s)
  T. Harada, T. Jinno, M. Toyoda, T. Hatano, M. Yamamoto
- Organizer
  9th International Conference on X-Ray Microscopy
- Place of Presentation
  Switzerland, Zurich
- Data Source
  KAKENHI-PROJECT-20760018
[Presentation] 軟X線用非球面対物鏡の解析的光学設計2008
- Author(s)
  豊田光紀
- Organizer
  先端計測シンポジウム2008-軟X線顕微計測-
- Place of Presentation
  仙台
- Year and Date
  2008-03-05
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] 直入射非球面鏡による広視野軟X線結像系2008
- Author(s)
  豊田光紀, 山本正樹, 柳原美広
- Organizer
  第69回応用物理学会学術講演会x線結像光学の最前線
- Place of Presentation
  春日井
- Data Source
  KAKENHI-PROJECT-20760018
[Presentation] Analytical designing of two-aspherical-mirror optics for soft X-ray imaging[in Japanese]2008
- Author(s)
  M. Toyoda
- Organizer
  The 1st Symposium of CAMS
- Place of Presentation
  Japan, Sendai
- Year and Date
  2008-03-05
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] EUV自由電子レーザー集光用直入射光学系の開発2008
- Author(s)
  豊田光紀, 原田哲男, 山本正樹, 柳原美広, 福澤宏宣, X.J. Liu, G. Prumper, 奥西みさき, 嶋田浩三, 上田潔, 岩山洋士, 永谷清信, 八尾誠, 本村幸治, 齋藤則生, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Dorner, 石川顕一, 永園充, 東谷篤志, 矢橋牧名, 田中隆次, 石川哲也, 大橋治彦, 木村洋昭
- Organizer
  第69回応用物理学会学術講演会
- Place of Presentation
  春日井
- Data Source
  KAKENHI-PROJECT-20760018
[Presentation] ミラーの偏心誤差に強い軟X線用2枚凹面アブラナディック対物鏡の開発2007
- Author(s)
  豊田光紀
- Organizer
  第68回応用物理学会学術講演会
- Place of Presentation
  札幌
- Year and Date
  2007-09-05
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Development of two-concave-mirror aplanat tolerating large misalignments for soft X-ray imaging[in Japanese]2007
- Author(s)
  M. Toyoda
- Organizer
  The 68th Autumn Meeting, 2007, Japan Society of Applied Physics and Related Societies
- Place of Presentation
  Japan, Sapporo
- Year and Date
  2007-09-05
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] 偏心・チルト外乱に強く軟X線適用の“合わせ鏡"2枚凹面アプラナート顕微対物2007
- Author(s)
  豊田光紀
- Organizer
  Optics & Photonics Japan 2007 第10回光設計賞受賞記念講演
- Place of Presentation
  大阪
- Year and Date
  2007-11-27
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] ミラーの偏心誤差に強い軟X 線用2枚凹面アプラナティック対物鏡の開発2007
- Author(s)
  豊田光紀
- Organizer
  第9回X線結像光学シンポジウム
- Place of Presentation
  名古屋
- Year and Date
  2007-11-02
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Design of two-concave-mirror aplanat tolerating large alignment errors for soft X-ray microscope[in Japanese]2007
- Author(s)
  M. Toyoda
- Organizer
  Optics & Photonics Japan 2007
- Place of Presentation
  Japan, Osaka
- Year and Date
  2007-11-27
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Design of Aspherical lmaging Optics Tolerating Practical Misalignments for Soft-X-Ray Microscopes2007
- Author(s)
  M. Toyoda
- Organizer
  The 15th International Conference on Vacuum Ultraviolet Radiation Physics
- Place of Presentation
  Germany, Berlin
- Year and Date
  2007-07-30
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Design of Aspherical Imaging Optics Tolerating Practical Misalignments for Soft-X-Ray Microscopes2007
- Author(s)
  M. Toyoda
- Organizer
  The 15th International Conference on Vacuum Ultraviolet Radiation Physics
- Place of Presentation
  Germany, Berlin
- Year and Date
  2007-07-30
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] 偏心・チルト外乱に強く軟X線適用の"合わせ鏡"2枚凹面アプラナート顕微対物2007
- Author(s)
  豊田光紀
- Organizer
  Optics & Photonics Japan 2007第10回光設計賞受賞記念講演
- Place of Presentation
  大阪
- Year and Date
  2007-11-27
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] ミラーの偏心誤差に強い軟X線用2枚凹面アプラナティック対物鏡の開発2007
- Author(s)
  豊田光紀
- Organizer
  第68回応用物理学会学術講演会
- Place of Presentation
  北海道工業大学
- Year and Date
  2007-09-05
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] ミラーの偏心誤差に強い軟X線用2枚凹面アブラナディック対物鏡の開発2007
- Author(s)
  豊田光紀
- Organizer
  第9回X線結像光学シンポジウム
- Place of Presentation
  名古屋
- Year and Date
  2007-11-02
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Development of two-concave-mirror aplanat tolerating large alignment errors for soft X-ray imaging[in Japanese]2007
- Author(s)
  M. Toyoda
- Organizer
  The 9th Symposium of X-ray Imaging Optics
- Place of Presentation
  Japan, Nagoya
- Year and Date
  2007-11-02
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Analytical designing of two-aspherical-mirror anastigmat permitting practical misalignments for soft-X-ray imaging2006
- Author(s)
  M. Toyoda
- Organizer
  The 8th International Conference on the Physics of X-Ray Multilayer Structures (PXRMS)
- Place of Presentation
  Japan, Sapporo
- Year and Date
  2006-03-13
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] 実用的なアライメント誤差を許容する軟X線用結像光学系の設計2005
- Author(s)
  豊田光紀
- Organizer
  第52回応用物理学関係連合講演会
- Place of Presentation
  さいたま
- Year and Date
  2005-03-31
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Analytical designing of two-aspherical-mirror anastigmats permitting practical misalignments for soft-X-ray imaging2005
- Author(s)
  M. Toyoda
- Organizer
  The 8th International Conference on X-ray Microscopy (XRM)
- Place of Presentation
  Japan, Himeji
- Year and Date
  2005-07-26
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] 瞳の遮光に着目した2面非球面高スループット対物鏡の新設計手法2005
- Author(s)
  豊田光紀
- Organizer
  第52回応用物理学関係連合講演会
- Place of Presentation
  さいたま
- Year and Date
  2005-03-31
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] New design strategy for the two-aspherical-mirror anastigmat[in Japanese]2005
- Author(s)
  M. Toyoda
- Organizer
  The 52nd Spring meeting, 2005, Japan Society of Applied Phvsics and Related Societies
- Place of Presentation
  Japan, Saitama
- Year and Date
  2005-03-31
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] Design of soft x-ray imaging optics tolerating practical alignment errors[in Japanese]2005
- Author(s)
  M. Toyoda
- Organizer
  The 52nd Spring meeting, 2005, Japan Society of Applied Phvsics and Related Societies
- Place of Presentation
  Japan, Saitama
- Year and Date
  2005-03-31
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-15002001
[Presentation] 単一アト秒パルス用回折限界集光システムの開発
- Author(s)
  澤田和寛、森哲、田丸裕基、豊田光紀、高橋栄治、神成文彦、須田亮、緑川克美、柳原美廣
- Organizer
  第62回応用物理学会春季学術講演会
- Place of Presentation
  東海大学
- Year and Date
  2015-03-11 – 2015-03-14
- Data Source
  KAKENHI-PROJECT-26600122

1. Takahashi Eiji (80360577)

# of Collaborated Projects: 3 results

# of Collaborated Products: 10 results
2. TSURU Toshihide (30306526)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
3. YAMAMOTO Masaki (00137887)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
4. YANAGIHARA Mihiro (40174552)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
5. HATANO Tadashi (90302223)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. EJIMA Takeo (80261478)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. 大東琢治 (50375169)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
8. 菊池伸明 (80436170)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
9. 原田哲男 (30451636)

# of Collaborated Projects: 1 results

# of Collaborated Products: 1 results
10. 浅川直紀 (80270924)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. 高田昌樹 (60197100)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. 石野雅彦 (80360410)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
13. 長谷川登 (50360409)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
14. ヂンタンフン (20744808)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

Toyoda Mitsunori 豊田 光紀

TOYODA Mitsunori 豊田 光紀

Research Projects

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Precise wavefront control using layer-by-layer etching of multilayer mirrors for diffraction-limited extreme ultraviolet imagingPrincipal Investigator

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軟X線レーザー干渉顕微鏡の開発とアブレーションによる損傷形成過程の解明

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Optical design for grazing incidence multilayer mirrors for high-spatial resolution imaging in soft X-ray regionPrincipal Investigator

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EUV Wavefront Synthesizer for Real-Time and Extended Depth-of-Focus ImagingPrincipal Investigator

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Generation of circularly polarized femtosecond coherent soft x-rays and its application to ultrafast spin dynamics

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Lab-scale EUV microscope for wide-field and multi-scale observationPrincipal Investigator

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Multilayer-mirror objective for diffraction-limited focusing in extreme ultraviolet regionPrincipal Investigator

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Diffraction limited focusing of isolated attosecond pulses and generation of intense XUV fields

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Imaging Properties of High Magnification Soft X-ray Objective with Reduced Fresnel NumberPrincipal Investigator

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Novel high magnification imaging objective for soft X-ray video microscopy with sub-100nm spatial resolutionPrincipal Investigator

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Development of a practical two-mirror objective with sub-100 nm spatial resolution for soft-X-ray microscopyPrincipal Investigator

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実用アライメント誤差を許容する軟X線用結像光学系の開発Principal Investigator

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High-resolution, element-specific microscope using a laser-produced-plasma soft X-ray source

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Toyoda Mitsunori 豊田光紀

TOYODA Mitsunori 豊田光紀