YAMAZAKI Kenji 山崎謙治

Researcher Number	40393764
Affiliation (based on the past Project Information) *help	2014: 日本電信電話株式会社, NTT物性科学基礎研究所・量子電子物性研究部, 主任研究員 2010: 日本電信電話株式会社NTT 物性科学基礎研究所, 量子電子物性研究部, 主任研究員 2010: 日本電信電話株式会社NTT物性科学基礎研究所, 量子電子物性研究部, 主任研究員 2009: 日本電信電話株式会社 NTT物性科学基礎研究所, 量子電子物性研究部, 主任研究員 2008: 日本電信電話株式会社NTT物性科学基礎研究所, 量子電子物性研究部, 主任研究員
Review Section/Research Field	Except Principal Investigator Microdevices/Nanodevices / Electron device/Electronic equipment
Keywords	Except Principal Investigator マイクロ / ナノマシン / マイクロマシン / 新規デバイス / 集積回路 / 電子デバイス / 電子デバイス・機器 / マイクロ・ナノデバイス / 化合物半導体 / 非線形素子 / マイクロメカニクス / ナノメカニクス

Semiconductor nonlinear nanomechanical devices
- Principal Investigator
  
  YAMAGUCHI Hiroshi
- Project Period (FY)
  2011 – 2014
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Microdevices/Nanodevices
- Research Institution
  NTT Basic Research Laboratories
Nanomechanical parametron devices
- Principal Investigator
  
  YAMAGUCHI Hiroshi
- Project Period (FY)
  2008 – 2010
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  NTT Basic Research Laboratories

All 2013 2012 2011 2010 2009 2008

All Journal Article Presentation

[Journal Article] Universal three-dimensional nanofabrication for hard materials2013
- Author(s)
  K. Yamazaki and H. Yamaguchi
- Journal Title
  
  Journal of Vacuum Science and Technology B
  
  Volume: Vol. 31 Issue: 5
- DOI
  10.1116/1.4817177
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23241046
[Journal Article] Electron beam lithography on vertical side faces of micrometer-order Si2012
- Author(s)
  Kenji Yamazaki and Hiroshi Yamaguchi
- Journal Title
  
  Journal of Vacuum Science and Technology B
  
  Volume: 30 Issue: 4 Pages: 41601-41601
- DOI
  10.1116/1.4719561
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23241046
[Journal Article] Resist Coating on Vertical Side Faces Using Conventional Spin Coating for Creating Three-Dimensional Nanostructures in Semiconductors2010
- Author(s)
  K.Yamazaki, H.Yamaguchi
- Journal Title
  
  Appl.Phys.Express
  
  Volume: Volume 3 Pages: 106501-106501
- NAID
  10027441590
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20246064
[Journal Article] Resist coating on vertical side faces using conventional spincoatingforcreating three-dimensional nanostructures insemiconductors2010
- Author(s)
  K.Yamazaki, H.Yamaguchi.
- Journal Title
  
  Appl. Phys. Express 3
  
  Pages: 106501-106501
- Data Source
  KAKENHI-PROJECT-20246064
[Journal Article] Fabrication of nano-mechanical Structures from bulk-GaAs using angled Ion Etching2009
- Author(s)
  V.K.Singh, K.Yamazaki, T.Tawara, H.Okamoto, H.Yamaguchi.
- Journal Title
  
  Appl. Phys. Express 2
  
  Pages: 65001-65001
- NAID
  10025086789
- Data Source
  KAKENHI-PROJECT-20246064
[Journal Article] Fabrication of Nanomechanical Structures from Bulk-GaAs Using Angled Ion Etching2009
- Author(s)
  V.K.Singh, K.Yamazaki, T.Tawara, H.Okamoto, H.Yamaguchi
- Journal Title
  
  Applied Physics Express 2
- NAID
  10025086789
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20246064
[Journal Article] Three-dimensional alignment with 10 nm order accuracy in electron-beam lithography on rotated sample for three-dimensional nanofabrication2008
- Author(s)
  K.Yamazaki, H.Yamaguchi.
- Journal Title
  
  J.Vac. Sci. Technol. B26
  
  Pages: 2529-2529
- Data Source
  KAKENHI-PROJECT-20246064
[Journal Article] Three-dimensional alignment with 10nm order accuracy in electron-beam lithography on rotated sample for three-dimensional nanofabrication2008
- Author(s)
  K. Yamazaki, H. Yamaguchi
- Journal Title
  
  J. Vac. Sci. Technol. B26
  
  Pages: 2529-2533
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20246064
[Journal Article] Flexible nanofabrication in three- dimensional electron-beam lithography enhanced by suppression of proximity effect2008
- Author(s)
  K.Yamazaki, H.Yamaguchi.
- Journal Title
  
  Appl. Phys. Express 1
  
  Pages: 9701-9701
- NAID
  10025082548
- Data Source
  KAKENHI-PROJECT-20246064
[Journal Article] Flexible nanofabrication in three-dimensional electron-beam lithography enhanced by suppression of proximity effect2008
- Author(s)
  K. Yamazaki, H. Yamaguchi
- Journal Title
  
  Appl. Phys. Express 1
  
  Pages: 97001-3
- NAID
  10025082548
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20246064
[Presentation] Siブロックの真横からのエッチングと３次元ナノ構造作製（２）2013
- Author(s)
  山崎　謙治，山口浩司
- Organizer
  第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学　厚木
- Data Source
  KAKENHI-PROJECT-23241046
[Presentation] Siブロックの真横からのエッチングと3次元ナノ構造作成2012
- Author(s)
  山崎謙治，山口浩司
- Organizer
  第73回応用物理学会学術講演会
- Place of Presentation
  愛媛大学・松山大学
- Data Source
  KAKENHI-PROJECT-23241046
[Presentation] New Technique of Three-Dimensional Nanofabrication in Semiconductor by Using Electron Beam Lithography2012
- Author(s)
  K. Yamazaki and H. Yamaguchi
- Organizer
  EIPBN2012
- Place of Presentation
  Waikoloa, US
- Data Source
  KAKENHI-PROJECT-23241046
[Presentation] Resist coating on vertical side faces using conventional spin coating for creating three-dimensional nanostructures in semiconductors2011
- Author(s)
  K.Yamazaki, H.Yamaguchi
- Organizer
  International Symposium on Nanoscale Transport and Technology (ISNTT2011)
- Place of Presentation
  Atsugi
- Data Source
  KAKENHI-PROJECT-20246064
[Presentation] 半導体ナノ構造作製のためのSiブロック垂直側面上レジスト塗布2011
- Author(s)
  山崎謙治、山口浩司
- Organizer
  第58回応用物理学関係連合講演会
- Place of Presentation
  神奈川工科大学
- Year and Date
  2011-03-24
- Data Source
  KAKENHI-PROJECT-20246064
[Presentation] Resist-coating on vertical side faces using conventional spin coating for creating three-dimensional nanostructures in semiconductor2010
- Author(s)
  K.Yamazaki, H.Yamaguchi
- Organizer
  23rd International Microprocesses and Nanotechnology Conference (MNC2010)
- Place of Presentation
  Kokura
- Data Source
  KAKENHI-PROJECT-20246064
[Presentation] ブロック共重合体の面内ハーフシリンダー相の転写特性2009
- Author(s)
  山口徹, 林順三, 山崎謙治, 山口浩司
- Organizer
  第70回応用物理学会学術講演会
- Place of Presentation
  富山大学
- Year and Date
  2009-09-11
- Data Source
  KAKENHI-PROJECT-20246064
[Presentation] 3次元EBリソにおける近接効果抑制によるアスペクト比・構造自由度の向上2009
- Author(s)
  山崎謙治, 山口浩司
- Organizer
  第56回応用物理学関係連合講演会
- Place of Presentation
  筑波大学
- Year and Date
  2009-04-01
- Data Source
  KAKENHI-PROJECT-20246064
[Presentation] A new angled ion etching method to fabricate a nanostructure and its resonance characteristics2009
- Author(s)
  V. K. Singh, K. Yamazaki, T. Tawara, H. Okamoto, H. Yamaguchi
- Organizer
  2009 International Symposium on Nanoscale Transport and Technology (ISNTT2009)
- Place of Presentation
  Atsugi, Japan
- Year and Date
  2009-01-20
- Data Source
  KAKENHI-PROJECT-20246064
[Presentation] ブロック共重合体の面内ハーフシリンダー相の高速配向(2)2009
- Author(s)
  山口徹, 林順三, 山崎謙治, 山口浩司
- Organizer
  第56回応用物理学関係連合講演会
- Place of Presentation
  筑波大学
- Year and Date
  2009-04-01
- Data Source
  KAKENHI-PROJECT-20246064
[Presentation] Pattern Transferability of In-Plane Half-Cylinders of Diblock Copolymers Formd by Rapid Graphoepitaxy2009
- Author(s)
  T.Yamaguchi, K.Yamazaki, H.Yamaguchi
- Organizer
  22bd International Microprocesses and Nanotechnology Conference(MNC2009)
- Place of Presentation
  Sapporo
- Year and Date
  2009-11-19
- Data Source
  KAKENHI-PROJECT-20246064
[Presentation] A new technique of directional angles ion etching to suspend a nanobeam and its resonance2008
- Author(s)
  V. K. Singh, K. Yamazaki, T. Tawara, H. Yamaguchi
- Organizer
  21st International Microprocesses and Nanotechnology Conference (MNC2008)
- Place of Presentation
  Fukuoka, Japan
- Year and Date
  2008-10-29
- Data Source
  KAKENHI-PROJECT-20246064
[Presentation] ブロック共重合体の面内ハーフシリンダー相の高速配向2008
- Author(s)
  山口徹, 尾崎泰野, 林順三, 山崎謙治, 割澤伸一, 石原直, 山口浩司
- Organizer
  第69回応用物理学会学術講演会
- Place of Presentation
  中部大学(春日井キャンパス)
- Year and Date
  2008-09-02
- Data Source
  KAKENHI-PROJECT-20246064
[Presentation] 3Dalignment with 10-nm order accuracy in electron-beam lithography on rotatedsample for 3D nanofabrication2008
- Author(s)
  K.Yamazaki, H.Yamaguchi.
- Organizer
  52ndInternational Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
- Place of Presentation
  Portland, US
- Year and Date
  2008-05-28
- Data Source
  KAKENHI-PROJECT-20246064
[Presentation] Rapid Directed Self-Assembly of Clynder-Forming Diblock Copolymers2008
- Author(s)
  T. Yamaguchi, Y. Ozaki, K. Yamazaki, S. Warisawa, S. Ishihara, H. Yamaguchi
- Organizer
  21st International Microprocesses and Nanotechnology Conference (MNC2008)
- Place of Presentation
  Fukuoka, Japan
- Year and Date
  2008-10-29
- Data Source
  KAKENHI-PROJECT-20246064
[Presentation] EBリソを用いた3次元ナノ加工における10nmオーダの3次元アライメント2008
- Author(s)
  山崎謙治, 山口浩司
- Organizer
  第69回応用物理学会学術講演会
- Place of Presentation
  中部大学(春日井キャンパス)
- Year and Date
  2008-09-02
- Data Source
  KAKENHI-PROJECT-20246064
[Presentation] 3D alignment with 10-nm order accuracy in electron-beam lithography on rotated sample for 3D nanofabrication2008
- Author(s)
  K. Yamazaki, H. Yamaguchi
- Organizer
  52nd International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN2008)
- Place of Presentation
  Portland, US
- Year and Date
  2008-05-28
- Data Source
  KAKENHI-PROJECT-20246064

1. YAMAGUCHI Hiroshi (60374071)

# of Collaborated Projects: 2 results

# of Collaborated Products: 27 results
2. YAMAGUCHI Toru (30393763)

# of Collaborated Projects: 2 results

# of Collaborated Products: 27 results
3. OKAMOTO Hajime (20350465)

# of Collaborated Projects: 2 results

# of Collaborated Products: 3 results
4. ONOMITSU Koji (30350466)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. NAGASE Masao (20393762)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
6. MABOOB Imran (80417097)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. NAKANO Hayato (60393774)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results

YAMAZAKI Kenji 山崎 謙治

Research Projects

Research Products

Co-Researchers

Semiconductor nonlinear nanomechanical devices

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

Nanomechanical parametron devices

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] Universal three-dimensional nanofabrication for hard materials2013

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Electron beam lithography on vertical side faces of micrometer-order Si2012

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Resist Coating on Vertical Side Faces Using Conventional Spin Coating for Creating Three-Dimensional Nanostructures in Semiconductors2010

Author(s)

Journal Title

NAID

Data Source

[Journal Article] Resist coating on vertical side faces using conventional spincoatingforcreating three-dimensional nanostructures insemiconductors2010

Author(s)

Journal Title

Data Source

[Journal Article] Fabrication of nano-mechanical Structures from bulk-GaAs using angled Ion Etching2009

Author(s)

Journal Title

NAID

Data Source

[Journal Article] Fabrication of Nanomechanical Structures from Bulk-GaAs Using Angled Ion Etching2009

Author(s)

Journal Title

NAID

Data Source

[Journal Article] Three-dimensional alignment with 10 nm order accuracy in electron-beam lithography on rotated sample for three-dimensional nanofabrication2008

Author(s)

Journal Title

Data Source

[Journal Article] Three-dimensional alignment with 10nm order accuracy in electron-beam lithography on rotated sample for three-dimensional nanofabrication2008

Author(s)

Journal Title

Data Source

[Journal Article] Flexible nanofabrication in three- dimensional electron-beam lithography enhanced by suppression of proximity effect2008

Author(s)

Journal Title

NAID

Data Source

[Journal Article] Flexible nanofabrication in three-dimensional electron-beam lithography enhanced by suppression of proximity effect2008

Author(s)

Journal Title

NAID

Data Source

[Presentation] Siブロックの真横からのエッチングと３次元ナノ構造作製（２）2013

Author(s)

Organizer

Place of Presentation

Data Source

[Presentation] Siブロックの真横からのエッチングと3次元ナノ構造作成2012

Author(s)

Organizer

Place of Presentation

Data Source

[Presentation] New Technique of Three-Dimensional Nanofabrication in Semiconductor by Using Electron Beam Lithography2012

Author(s)

Organizer

Place of Presentation

Data Source

[Presentation] Resist coating on vertical side faces using conventional spin coating for creating three-dimensional nanostructures in semiconductors2011

Author(s)

YAMAZAKI Kenji 山崎謙治