Matsutani Akihiro 松谷晃宏

… Alternative Names

MATSUTANI Akihiro 松谷晃宏

松谷晁宏マツタニアキヒロ

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Researcher Number	40397047
Other IDs	https://orcid.org/0000-0003-4073-7894
Affiliation (Current)	2025: 東京科学大学, リサーチインフラ・マネジメント機構, 上席技術専門員
Affiliation (based on the past Project Information) *help	2024: 東京工業大学, オープンファシリティセンター, 上席技術専門員 2021 – 2024: 東京工業大学, オープンファシリティセンター, 主任技術専門員 2020: 東京工業大学, オープンファシリティセンター, 技術職員 2019: 東京工業大学, オープンファシリティセンター, 主任技術専門員 2017 – 2018: 東京工業大学, 技術部, 主任技術専門員 … More 2014 – 2016: 東京工業大学, 技術部, 技術専門員 2013 – 2016: 東京工業大学, 技術部, 技術職員 2013: 東京工業大学, 学内共同利用施設等, その他 2012: 東京工業大学, 学内共同利用施設等, 技術職員 2007 – 2012: Tokyo Institute of Technology, Technical Department, Technical Staff 2009: 東京工業大学, 精密工学研究所, 技術専門員 2007: Tokyo Institute of Technology, 技術部半導体MEMS支援センター, 技術専門員 2005 – 2007: 東京工業大学, 精密工学研究所, 技術専門員 Less
Review Section/Research Field	Principal Investigator Nano/Microsystems / Microdevices/Nanodevices / Basic Section 09080:Science education-related Except Principal Investigator Electron device/Electronic equipment / Communication/Network engineering / Basic Section 36020:Energy-related chemistry / Medium-sized Section 16:Astronomy and related fields / Electronic materials/Electric materials / Inorganic materials/Physical properties / Applied optics/Quantum optical engineering / Science and Engineering
Keywords	Principal Investigator 半導体プロセス技術 / 単一細胞分離 / ナノマイクロバイオシステム / プラズマ加工 / リソグラフィ / バイオチップ / 細胞分離 / 微生物細胞 / 球状微粒子 / コーヒーリング効果 … More / STEAM教育 / 光学実験 / 細胞操作技術 / エッチング / マイクロ凹面鏡 / 細胞マニピュレーション / 凹面鏡 / スンプ法 / 細胞捕獲 / optical devices / ultraviolet / high density plasma / fluorite / dry etching / micromachine / semiconductor microfabrication / plasma processing / 固体ソース / 水蒸気 / プラズマ / 光デバイス / 紫外光源 / 高密度プラズマ / 蛍石 / ドライエッチング / マイクロマシン / 半導体微細化 / 流路レス凝集 / 流路レス凝集法 / マイクロプロセス / マイクロレンズ / ナノ・マイクロ科学 / 液体定在波 / 半導体プロセス / マイクロ流路 / マイクロ・ナノデバイス / プラズマプロセス / 単一細胞 / マイクロバイオシステム … More Except Principal Investigator 光デバイス / 光通信 / 面発光レーザ / 光集積回路 / 半導体レーザ / マイクロマシン / 光物性 / 電子デバイス・機器 / フォトニックネットワーク / 光インターコネクト / 光信号処理 / SDGs / ゼロカーボンエネルギー / 低炭素社会 / ゼロエミッション / 半導体 / 熱電 / ゼロカーボン / 熱エネルギー / 酸化還元 / 色素増感型太陽電池 / 熱励起電荷 / 再生可能エネルギー / 熱エネルギー変換 / コロナグラフ / 直接撮像 / 太陽系外惑星 / 光学的波面形状の直接計測 / FPGAによる多入出力で高速な制御 / 極限補償光学 / 装置開発 / 直接撮像観測 / 太陽系外惑星探査 / 赤外線天文学 / 電子・電気材料 / optical physics / electronic device / photonic network / フナトニックネットワーク / 傾斜エッチング / 太陽電池 / 誘電率 / 屈折率 / 電解液 / 反応性イオンエッチング / ナノ構造作製 / 自己集積 / 微細構造 / ナノ加工 / 光圧 / 光熱変換 / プラズモン / ナノ構造 / ボトムアップ / 酸化チタン / ３次元 / リソグラフィー / 電気化学 / フォトニック結晶 / 回折格子 / 光回路 / スローライト / 波長可変レーザ / 高速変調 / マイロマシン Less

Development of teaching materials for STEAM education by optical experiments using spherical micro-particles and coffee ring effectPrincipal Investigator
- Principal Investigator
  
  松谷晃宏
- Project Period (FY)
  2024 – 2026
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 09080:Science education-related
- Research Institution
  Tokyo Institute of Technology
Efficiency definition in sensitized thermal cells
- Principal Investigator
  
  松下祥子
- Project Period (FY)
  2021 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 36020:Energy-related chemistry
- Research Institution
  Institute of Science Tokyo
Characterization of Jovian Exo-Planets by Direct imaging with a Segmented Mirror Telescope
- Principal Investigator
  
  NAGATA Tetsuya
- Project Period (FY)
  2018 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Review Section
  
  Medium-sized Section 16:Astronomy and related fields
- Research Institution
  Kyoto University
A study of two-dimensional array manipulation technique and single-cell isolation using two-dimensional micro-concave mirror array and Koehler illuminationPrincipal Investigator
- Principal Investigator
  
  Matsutani Akihiro
- Project Period (FY)
  2017 – 2019
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Nano/Microsystems
- Research Institution
  Tokyo Institute of Technology
A study of transport of cells and single-cell isolation technology by combination of semiconductor microfabrication processes and Chladni patternsPrincipal Investigator
- Principal Investigator
  
  Matsutani Akihiro
- Project Period (FY)
  2014 – 2016
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Nano/Microsystems
- Research Institution
  Tokyo Institute of Technology
Ultra-low power consumption devices utilizing new two-dimensional diamond film
- Principal Investigator
  
  Hatano Mutsuko
- Project Period (FY)
  2014 – 2015
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Electronic materials/Electric materials
- Research Institution
  Tokyo Institute of Technology
Electrochemical Photonic Crystal with Light Inhibition Ability
- Principal Investigator
  
  Matsushita Sachiko
- Project Period (FY)
  2013 – 2016
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Inorganic materials/Physical properties
- Research Institution
  Tokyo Institute of Technology
Fabrication of single cell isolation structure and very narrow slit cell separation microchannel by semiconductor processingPrincipal Investigator
- Principal Investigator
  
  MATSUTANI Akihiro
- Project Period (FY)
  2011 – 2013
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Microdevices/Nanodevices
- Research Institution
  Tokyo Institute of Technology
Advances of integrated photonics for ultra-low power consumption optical interconnects
- Principal Investigator
  
  KOYAMA FUMIO
- Project Period (FY)
  2010 – 2014
- Research Category
  
  Grant-in-Aid for Scientific Research (S)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Tokyo Institute of Technology
面発光レーザ集積アレイの波長エンジニアリング
- Principal Investigator
  
  小山二三夫
- Project Period (FY)
  2010
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  Tokyo Institute of Technology
A study on ultra-high-speed all-optical forward error correction technique
- Principal Investigator
  
  UENOHARA Hiroyuki
- Project Period (FY)
  2008 – 2010
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Communication/Network engineering
- Research Institution
  Tokyo Institute of Technology
New Functions of VCSEL Photonics
- Principal Investigator
  
  KOYAMA Fumio
- Project Period (FY)
  2007 – 2009
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  Applied optics/Quantum optical engineering
- Research Institution
  Tokyo Institute of Technology
AStudy on Dry etching of C_aF_2using H_2O Vapor Plasma and Solid Source H_2O PlasmaPrincipal Investigator
- Principal Investigator
  
  MATSUTANI Akihiro
- Project Period (FY)
  2006 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Microdevices/Nanodevices
- Research Institution
  Tokyo Institute of Technology
Widely Tunable Hollow Optical Waveguides and Their Applications for Photonic Network Devices
- Principal Investigator
  
  KOYAMA Fumio
- Project Period (FY)
  2005 – 2008
- Research Category
  
  Grant-in-Aid for Scientific Research on Priority Areas
- Review Section
  
  Science and Engineering
- Research Institution
  Tokyo Institute of Technology
AStudy on Ultrahigh-speed optical forward error detection technique with optical data processing
- Principal Investigator
  
  UENOHARA Hiroyuki
- Project Period (FY)
  2005 – 2007
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Communication/Network engineering
- Research Institution
  Tokyo Institute of Technology

[Journal Article] Laboratory demonstration of the birefrigent point-diffraction interferometer wavefront sensor2023
- Author(s)
  Tsukui Ryo、Kino Masaru、Yamamoto Kodai、Sato Mina、Tohnishi Mie、Matsutani Akihiro、Kurita Mikio
- Journal Title
  
  Optics Continuum
  
  Volume: 2 Issue: 2 Pages: 382-382
- DOI
  10.1364/optcon.476318
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-21K03613, KAKENHI-PROJECT-18H03719
[Journal Article] Surface Treatment of Polyimide Using Solid-source H2O Plasma for Fabrication of Ge Electrode2023
- Author(s)
  Mie Tohnishi, Mina Sato, Akihiro Matsutani, Takashi Ubukata, Sachiko Matsushita.
- Journal Title
  
  Sensors and Materials
  
  Volume: 35 Issue: 3 Pages: 1023
- DOI
  10.18494/SAM4276
- ISSN
  0914-4935, 2435-0869
- Year and Date
  2023-03-23
- Language
  English
- Data Source
  KAKENHI-PROJECT-23K21145
[Journal Article] Direct observation of spherical aberration under microscope using concave micromirrors2020
- Author(s)
  Akihiro Matsutani
- Journal Title
  
  European Journal of Physics
  
  Volume: － Issue: 5 Pages: 055303-055303
- DOI
  10.1088/1361-6404/ab90df
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17K05020
[Journal Article] Microfabrication of Concave Micromirror for Microbial Cell Trapping Using K?hler Illumination by XeF2 Vapor Etching2019
- Author(s)
  Akihiro Matsutani, Mina Sato, Koichi Hasebe, Ayako Takada
- Journal Title
  
  Sensors and Materials
  
  Volume: 31 Issue: 4 Pages: 1325
- DOI
  10.18494/SAM.2019.2235
- ISSN
  0914-4935, 2435-0869
- Year and Date
  2019-04-30
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-17K05020
[Journal Article] Celluloid Microenclosure and Microlens Array Fabricated by SUMP method and XeF2 Vapor Etching for Microbial Analysis2018
- Author(s)
  Akihiro Matsutani, Ayako Takada
- Journal Title
  
  Sensors and Materials
  
  Volume: 30 Pages: 149
- DOI
  10.18494/SAM.2018.1729
- ISSN
  0914-4935, 2435-0869
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-17K05020, KAKENHI-PROJECT-15K14690
[Journal Article] Optical performance of Au hemispheric sub-microstructure on polystyrene quadrumer2017
- Author(s)
  3.Tsuyoshi Takahashi, Akihiro Matsutani, Dai Shoji, Kunio Nishioka, Mina Sato, Takayuki Okamoto, Tomotarou Ezaki, Toshihiro Isobe, Akira Nakajima, Sachiko Matsushita
- Journal Title
  
  Colloids. Surf. A
  
  Volume: 513 Pages: 51-56
- DOI
  10.1016/j.colsurfa.2016.11.033
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25420707
[Journal Article] Mivrochannel-free collection and single-cell isolation of yeast cells in a suspension using liquid standing wave2016
- Author(s)
  Akihiro Matsutani, Ayako Takada
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 55 Issue: 11 Pages: 118006-118006
- DOI
  10.7567/jjap.55.118006
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-26390037, KAKENHI-PROJECT-15K14690
[Journal Article] Compact Wavelength Selective Switch Using a Bragg Reflector Waveguide Array with Ultra-Large Number (>100) of Output-Ports2015
- Author(s)
  Xiaodong Gu,Kenya Suzuki,Yuichiro Ikuma,Kazunori Seno,Hiromasa Tanobe,Akihiro Matsutani,Fumio Koyama
- Journal Title
  
  Journal of Lightwave Technology
  
  Volume: vol. 33, no. 7 Issue: 7 Pages: 1358-1364
- DOI
  10.1109/jlt.2014.2386324
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-22226008, KAKENHI-PROJECT-13J03062, KAKENHI-PROJECT-26630152
[Journal Article] Single-Cell Isolation and Size Sieving Using Microenclosure Array for Microbial Analysis2015
- Author(s)
  Akihiro Matsutani, Ayako takada
- Journal Title
  
  Sensors and Materials
  
  Volume: 27 Pages: 383-390
- DOI
  10.18494/SAM.2015.1077
- ISSN
  0914-4935, 2435-0869
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-26390037, KAKENHI-PROJECT-15K14690
[Journal Article] Microfabrication for a polystyrene quadrupole by template-assisted self-assembly2015
- Author(s)
  Tsuyoshi Takahashi, Akihiro Matsutani, Dai Shoji, Kunio Nishioka, Mina Sato, Toshihiro Isobe, Akira Nakajima, Sachiko Matsushita
- Journal Title
  
  Colloid. Surf. A
  
  Volume: 484 Pages: 75-80
- DOI
  10.1016/j.colsurfa.2015.07.057
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25420707
[Journal Article] Simple fabrication of micro-polygons and micro-honeycombs utilizing thermal deformation of monolayer colloidal crystals during reactive ion etching2015
- Author(s)
  Shoya Sano, Kunio Nishioka, Akihiro Matsutani, Toshihiro Isobe, Akira Nakajima, Sachiko Matsushita
- Journal Title
  
  Colloid. Surf. A
  
  Volume: 486 Pages: 1-5
- DOI
  10.1016/j.colsurfa.2015.09.019
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25420707
[Journal Article] Athermalization and on-chip multi-wavelength integration of VCSELs employing thermally actuated micromachined mirrors2014
- Author(s)
  M. Nakahama, T. Sakaguchi, A. Matsutani, F. Koyama
- Journal Title
  
  Applied Physics Letters
  
  Volume: 105 Issue: 9
- DOI
  10.1063/1.4895337
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-13J08625, KAKENHI-PROJECT-22226008
[Journal Article] Highly angular dependent high-contrast grating mirror and its application for transverse-mode control of VCSELs2014
- Author(s)
  Shunya Inoue,Junichi Kashino,Akihiro Matsutani,Hideo Ohtsuki,Takahiro Miyashita,Fumio Koyama
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: vol. 53, no. 9 Issue: 9 Pages: 090306-090306
- DOI
  10.7567/jjap.53.090306
- NAID
  210000144420
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-22226008
[Journal Article] Angled Etching of (001) Rutile Nb-TiO2 Substrate by SF6 Based Capacitive Coupled Plasma2014
- Author(s)
  Akihiro Matsutani, Kunio Nishioka, Mina Sato, Dai Shoji, Daito Kobayashi, Toshihiro Isobe, Akira Nakajima, Tetsu Tatsuma, and Sachiko Matsushita
- Journal Title
  
  Jpn. J. Appl. Phys
  
  Volume: in press
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25420707
[Journal Article] Fluorinated graphene FETs controlled by Ionic Liquid Gate2014
- Author(s)
  Furuyama, K. Tahara, A. Matsutani, T. Iwasaki, M. Hatano,
- Journal Title
  
  IEEE Display Technology, Vol.10 , 962 - 965 (2014)
  
  Volume: Vol.10 Issue: 11 Pages: 962-965
- DOI
  10.1109/jdt.2014.2332636
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26630125
[Journal Article] Lateral Integration of Vertical Cavity Surface Emitting Laser and Slow Light Bragg Reflector Waveguide Devices2014
- Author(s)
  Toshikazu Shimada, Akihiro Matsutani and Fumio Koyama
- Journal Title
  
  Applied Optics
  
  Volume: vol.53, no.9 Issue: 9 Pages: 1766-1774
- DOI
  10.1364/ao.53.001766
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226008
[Journal Article] Generation of vortex beam using Bragg reflector waveguide2014
- Author(s)
  Shota Mochizuki, Xiaodong Gu, Kenji Tanabe, Akihiro Matsutani, Moustafa Ahmed, Ahmed Bakry and Fumio Koyama
- Journal Title
  
  Applied Physics Express
  
  Volume: vol.7, no.2 Issue: 2 Pages: 022502-022502
- DOI
  10.7567/apex.7.022502
- NAID
  210000136960
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226008
[Journal Article] High Frequency Modulation of Transverse-Coupled-Cavity VCSELs for Radio over Fiber Applications2014
- Author(s)
  Hamed Dalir, Akihiro Matsutani , Moustafa Ahmed, Ahmed Bakry and Fumio Koyama
- Journal Title
  
  IEEE Photonics Technology Letters
  
  Volume: Vol.26 no. 3 Issue: 3 Pages: 281-284
- DOI
  10.1109/lpt.2013.2292577
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-12J09691, KAKENHI-PROJECT-22226008
[Journal Article] Slow-light Bragg reflector waveguide array for two-dimensional beam steering2014
- Author(s)
  Kensuke Nakamura, Akihiro Matsutani, Moustafa Ahmed, Ahmed Bakry and Fumio Koyama
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: vol. 53, no. 3 Issue: 3 Pages: 038001-038001
- DOI
  10.7567/jjap.53.038001
- NAID
  210000143457
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226008
[Journal Article] Athermal and widely tunable VCSEL with bimorph micromachined mirror2014
- Author(s)
  M. Nakahama, T. Sakaguchi, A. Matustani and F. Koyama
- Journal Title
  
  Optics Express
  
  Volume: 22 Issue: 18 Pages: 21471-21479
- DOI
  10.1364/oe.22.021471
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-13J08625, KAKENHI-PROJECT-22226008
[Journal Article] 20 μm-long Slow-light Bragg Reflector Waveguide Modulator with over 20GHz Modulation Bandwidth2014
- Author(s)
  Xiaodong Gu （顧　暁冬）, Ayako Suzuki, Akihiro Matsutani, Fumio Koyama
- Journal Title
  
  Applied Physics Express
  
  Volume: 7 Issue: 11 Pages: 114101-114101
- DOI
  10.7567/apex.7.114101
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-13J03062, KAKENHI-PROJECT-22226008
[Journal Article] Wavelength tuning and controlled temperature dependence in vertical-cavity surface-emitting lasers with a thermally and electrostatically actuated cantilever structure2014
- Author(s)
  Masanori Nakahama, Fumio Koyama, et al.
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 53 Issue: 1 Pages: 10303-10306
- DOI
  10.7567/jjap.53.010303
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-13J08625, KAKENHI-PROJECT-22226008
[Journal Article] Fabrication of Silicon Microchannel for Transport of Bacterial Cells by Ar/F2 Vapor Etching Process2013
- Author(s)
  A. Matsutani, and A. Takada
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 52 Issue: 4R Pages: 47001-47001
- DOI
  10.7567/jjap.52.047001
- NAID
  210000141963
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23510141, KAKENHI-PROJECT-23658073
[Journal Article] Compact beam deflector based on slow-light Bragg reflector waveguide monolithically integrated with VCSEL2013
- Author(s)
  Toshikazu Shimada, Akihiro Matsutani and Fumio Koyama
- Journal Title
  
  IEICE Electron. Express
  
  Volume: 10 Issue: 22 Pages: 20130842-20130842
- DOI
  10.1587/elex.10.20130842
- NAID
  130003383497
- ISSN
  1349-2543
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226008
[Journal Article] Low polarization dependent beam deflector based on Bragg reflector waveguide for C-band wavelength demultiplexing2013
- Author(s)
  Xiaodong Gu, Akihiro Matsutani, Fumio Koyama
- Journal Title
  
  Journal of Applied Physics
  
  Volume: 114 Issue: 16
- DOI
  10.1063/1.4828715
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-13J03062, KAKENHI-PROJECT-22226008
[Journal Article] 35-μm Bragg Reflector Waveguide Modulator for High-Speed and Energy -Saving Operation2013
- Author(s)
  Xiaodong Gu, Toshikazu Shimada, Akihiro Matsutani, Furnio Koyama
- Journal Title
  
  IEEE Photonics Technology Letters
  
  Volume: 25 Issue: 18 Pages: 1766-1769
- DOI
  10.1109/lpt.2013.2275190
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-13J03062, KAKENHI-PROJECT-22226008
[Journal Article] Low-polarization dependent thermo-optic phase-shift in slow light Bragg reflector waveguide for beam steering and optical switching2013
- Author(s)
  Ayumi Fuchida, Akihiro Matsutani, Moustafa Ahmed, Ahmed Bakry and Fumio Koyama
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: vol. 53, no.1 Issue: 1 Pages: 010306-010306
- DOI
  10.7567/jjap.53.010306
- NAID
  210000143232
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226008
[Journal Article] Tuning Characteristics of Monolithic MEMS VCSELs With Oxide Anti-Reflection Laver2013
- Author(s)
  Masanori Nakahama, Fumio Koyama, et. al.
- Journal Title
  
  IEEE Photonics Technology Letters
  
  Volume: 25 Issue: 18 Pages: 1747-1750
- DOI
  10.1109/lpt.2013.2272732
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-13J08625, KAKENHI-PROJECT-22226008
[Journal Article] Compact Slow-Light Electro-Absorption Modulator Laterally2013
- Author(s)
  Toshikazu Shimada, Akihiro Matsutani and Fumio Koyama
- Journal Title
  
  Applied Physics Express
  
  Volume: no.6 Issue: 12 Pages: 122102-122102
- DOI
  10.7567/apex.6.122102
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226008
[Journal Article] Low-voltage electro-absorption optical modulator based on slow-light Bragg reflector waveguide2013
- Author(s)
  Xiaodong Gu, Shoki Shimizu, Toshikazu Shimada, Akihiro Matsutani and Fumio Koyama
- Journal Title
  
  Appl. Phys. Lett.
  
  Volume: 102 Issue: 3
- DOI
  10.1063/1.4789533
- NAID
  120006582236
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226008
[Journal Article] スローライトを利用した全反射光スイッチ2012
- Author(s)
  淵田歩, 松谷晃宏, 小山二三夫
- Journal Title
  
  電子情報通信学会論文誌C
  
  Volume: J95-C, No.4 Pages: 75-83
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226008
[Journal Article] Wavelength Trimming of Micro-Machined VCSELs2012
- Author(s)
  Hayato Sano, Norihiko Nakata, Akihiro Matsutani, Fumio Koyama
- Journal Title
  
  IEICE Trans.Electron.
  
  Volume: vol.E95-C Pages: 237-242
- NAID
  10030609942
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226008
[Journal Article] Ultra-compact Beam Steering Device based on Bragg Reflector Waveguide Amplifier with Number of Resolution Points over 1002012
- Author(s)
  Xiaodong Gu, Toshikazu Shimada, Ayumi Fuchida, Akihiro Matsutani, Akihiro Imamura, Fumio Koyama
- Journal Title
  
  Electron.Lett.
  
  Volume: Vol.48, no.6 Pages: 336-337
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226008
[Journal Article] Microfabrication of Si and GaAs by Plasma Etching Process Using Bacterial Cells as an Etching Mask Material2012
- Author(s)
  A. Matsutani and A. Takada
- Journal Title
  
  Jpn. J. Appl. Phys
  
  Volume: 51 Issue: 8R Pages: 87001-87001
- DOI
  10.1143/jjap.51.087001
- NAID
  40019395655
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-23510141, KAKENHI-PROJECT-23658073
[Journal Article] Ultra-high channel-count wavelength demultiplexer based on a Bragg reflector waveguide with large angular dispersion2012
- Author(s)
  Xiaodong Gu, Toshikazu Shimada, Akihiro Matsutani, and Fumio Koyama
- Journal Title
  
  OPTICS EXPRESS
  
  Volume: vol.20, no.26 Issue: 26 Pages: B331-B331
- DOI
  10.1364/oe.20.00b331
- NAID
  120006582216
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226008
[Journal Article] スローライトを利用した全反射型光スイッチ2012
- Author(s)
  淵田歩, 松谷晃宏, 小山二三夫
- Journal Title
  
  電子情報通信学会論文誌
  
  Volume: Vol.J, 95-C, no.4 Pages: 75-83
- NAID
  110009436643
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226008
[Journal Article] Athermal and Tunable Operations of 850nm Vertical Cavity Surface Emitting Lasers with Thermally Actuated T-shape Membrane Structure2012
- Author(s)
  Hayato Sano
- Journal Title
  
  Applied Physics Letters
  
  Volume: 101 Issue: 12 Pages: 121115-121115
- DOI
  10.1063/1.4753807
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-10J09480, KAKENHI-PROJECT-22226008
[Journal Article] Fabrication and Characterization of Bragg Reflector Slow Light Waveguide with Oxide Lateral Confinement2012
- Author(s)
  Ayumi Fuchida, Akihiro Matsutani, Fumio Koyama
- Journal Title
  
  Jpn.J.Appl.Phys.
  
  Volume: Vol.51, no.4
- NAID
  40019280020
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226008
[Journal Article] Giant Wavelength-temperature Dependence of a Micro-machined VCSEL with a Thermally Actuated Cantilever Structure2012
- Author(s)
  Masanori Nakahama, Hayato Sano, Norihiko Nakata, Akihiro Matsutani, Fumio Koyama
- Journal Title
  
  Jpn.J.Applied Physics
  
  Volume: Vol.51, no.4
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226008
[Journal Article] Miniature Non-mechanical Beam Deflector Based on Bragg Reflector Waveguide with a Number of Resolution-points Larger than 10002012
- Author(s)
  Xiaodong Gu, Toshikazu Shimada, Akihiro Matsutani and Fumio Koyama
- Journal Title
  
  IEEE Photon. J.
  
  Volume: Vol.4, no.5 Issue: 5 Pages: 1712-1719
- DOI
  10.1109/jphot.2012.2214206
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226008
[Journal Article] Electro-thermal Tuning of MEMS VCSEL with Giant Wavelength-temperature Dependence2012
- Author(s)
  Masanori Nakahama, Hayato Sano, Norihiko Nakata, Akihiro Matsutani, Fumio Koyama
- Journal Title
  
  Electronics Express
  
  Volume: Vol.9, no.5 Pages: 416-421
- NAID
  130001922364
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226008
[Journal Article] Microfabrication of Si-Based High-Index-Contrast-Grating Structure by Thermal Nanoimprint Lithography and Cl2/Xe-Inductively Coupled Plasma Etching2012
- Author(s)
  Akihiro Matsutani, Yuuki Hashidume, Hideo Ohtsuki and Fumio Koyama
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: Vol. 51 (2012), 06FF05 Issue: 6S Pages: 1-4
- DOI
  10.1143/jjap.51.06ff05
- NAID
  210000140770
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226008
[Journal Article] Giant wavelength-temperature dependence of a micro-machined VCSEL with a thermally actuated cantilever structure2012
- Author(s)
  Masanori Nakahama, Hayato Sano, Norihiko Nakata, Akihiro Matsutani, Fumio Koyama
- Journal Title
  
  Jpn.J.Appl.Phys.
  
  Volume: Vol.51, no.4
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226008
[Journal Article] Electro-Thermal Beam Steering Using Bragg Reflector Waveguide Amplifier2012
- Author(s)
  Xiaodong Gu, Toshikazu Shimada, Ayumi Fuchida, Akihiro Matsutani, Akihiro Imamura, Fumio Koyama
- Journal Title
  
  Jpn.J.Appl.Phys.
  
  Volume: vol.51
- NAID
  40019170201
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226008
[Journal Article] Beam Steering in GalnAs/GaAs Slow-light Bragg Reflector Waveguide Amplifier2011
- Author(s)
  Xiaodong Gu, Toshikazu Shimada, Ayumi Fuchida, Akihiro Matsutani, Akihiro Imamura, Fumio Koyama
- Journal Title
  
  Appl.Phys.Lett.
  
  Volume: vol.99, no.21
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226008
[Journal Article] Inductively Coupled Plasma Etching of Silicon Using Solid Iodine as an Etching Gas Source2011
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Journal Title
  
  Jpn.J.Appl.Phys.
  
  Volume: vol.50
- NAID
  210000070710
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226008
[Journal Article] Multiplexing of Multi-Wavelength 1060-nm-Band GalnAs/GaAs Vertical Cavity Surface Emitting Laser Array Using Tapered Hollow Waveguide2011
- Author(s)
  Akihiro Imamura, Akihiro Matsutani, Fumio Koyatna
- Journal Title
  
  Applied Physics Express
  
  Volume: vol.4
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226008
[Journal Article] Slow-light total-intemal-reflection switch with bending angle of 30 deg2011
- Author(s)
  Ayumi Fuchida, Akihiro Matsutani, Fumio Koyama
- Journal Title
  
  Optics Letters
  
  Volume: vol.36, no.14. Pages: 2644-2646
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226008
[Journal Article] Reactive Ion Etching of Si Using Ar/F_2 Plasma2010
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Journal Title
  
  Jpn.J.App.Phys.
  
  Volume: vol.49, no.6
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22246047
[Journal Article] Reactive Ion Etching of Si Using Ar/F_2 Plasma2010
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Journal Title
  
  Jpn.J.App.Phys.
  
  Volume: vol.49, no.6
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22226008
[Journal Article] Smooth and Vertical Profile Dry Etching od Si Using XeF2 Plasma2009
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Journal Title
  
  Jpn.J.Appl.Phys. vol.48
  
  Pages: 1-3
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19206012
[Journal Article] Smooth and Vertical Profile Dry Etching of Si Using XeF2 Plasma2009
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Journal Title
  
  Jpn. J. Appl. Phys vol.48,06FE09
  
  Pages: 1-3
- NAID
  210000066933
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19206012
[Journal Article] Athermal 850nm Vertical Cavity Surface Emitting Lasers with Thermally Actuated Cantilever Structure2009
- Author(s)
  Hayato Sano, Akihiro Matsutani, Fumio Koyama
- Journal Title
  
  Appl.Phys.Exp. vol.2,
- NAID
  10025087183
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19206012
[Journal Article] Multiple-Wavelength Vertical-Cavity Surface-Emitting Lasers by Grading a Spacer Layer for Short-Reach Wavelength Division Multiplexing Applications2009
- Author(s)
  Padullaparthi Babu Dayal, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
- Journal Title
  
  Appl. Phys. Exp. vol.2,no.9
- NAID
  10025517766
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19206012
[Journal Article] Athermal 850nm Vertical Cavity Surface Emitting Lasers with Thermally Actuated Cantilever Structure2009
- Author(s)
  Hayato Sano, Akihiro Matsutani, Fumio Koyama
- Journal Title
  
  Appl. Phys. Exp. vol.2
- NAID
  10025087183
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19206012
[Journal Article] Multiple-Wavelength Vertical-Cavity Surface-Emitting Lasers by Grading a Spacer Layer for Short-Reach Wavelength Division Multiplexing Applications2009
- Author(s)
  Padullaparthi Babu Dayal, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
- Journal Title
  
  Appl.Phys.Exp. vol.2, no.9
- NAID
  10025517766
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19206012
[Journal Article] Characterization of H_2O-inductively coupled plasma for dry etching2008
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Journal Title
  
  Journal of Physics: Conference Series 100
  
  Pages: 62022-62022
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18510108
[Journal Article] Generation of Solid-Source H_2O Plasma and Its Application to Dry Etching of CaF_22008
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Journal Title
  
  Japanese Journal of Applied Physics 47(掲載決定)
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18510108
[Journal Article] Generation of Solid-Source H2O Plasma and Its Application to Dry Etching of CaF22008
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, and Fumio Koyama
- Journal Title
  
  Jpn. J. Appl. Phys. vol.47
  
  Pages: 5113-5115
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17068006
[Journal Article] Characterization of H2O-inductively coupled plasma for dry etching2008
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Journal Title
  
  J. Phys.
  
  Pages: 1-4
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19206012
[Journal Article] Characterization of H_2O-inductively coupled plasma for dry etching2008
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Journal Title
  
  Journal of Physics: Conference Series(電子ジャーナル) 100
  
  Pages: 62022-62022
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18510108
[Journal Article] Generation of Solid-Source H_2O Plasma and Its Application to Dry Etching of CaF_22008
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Journal Title
  
  Japanese Journal of Applied Physics 47(In press)
- Description
  「研究成果報告書概要(和文)」より
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18510108
[Journal Article] Characterization of H_2O-inductively coupled plasma for dry etching2008
- Author(s)
  Akihiro, Matsutani, Hideo, Ohtsuki, Fumio, Koyama
- Journal Title
  
  Journal of Physics 100, 062022(CONCERNED)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18510108
[Journal Article] Generation of solid-source H2O plasma and its application to dry etching of CaF22008
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Journal Title
  
  Jpn. J. Appl. Phys. Vol.47,no.6
  
  Pages: 5113-5115
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19206012
[Journal Article] Generation of Solid-Source H2O Plasma and Its Application to Dry Etching of CaF22008
- Author(s)
  Akihiro, Matsutani, Hideo, Ohtsuki, Fumio, Koyama
- Journal Title
  
  Japanese Journal of. Appl. Phys 47(in press)(CONCERNED)
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18510108
[Journal Article] Generation of Solid-Source H2O Plasma and Its Application to Dry Etching of CaF22008
- Author(s)
  A. Matsutani, H. Ohtsuki and F. Koyama
- Journal Title
  
  Jpn. J. Appl. Phys. Vol. 47, no. 6
  
  Pages: 5113-5115
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17068006
[Journal Article] 水蒸気導入によるエッチング用H_2O-ICPのプラズマ観測2007
- Author(s)
  松谷彰宏, 大槻秀夫, 小山不二夫
- Journal Title
  
  第24回「プラズマプロセシング研究会(SPP-24)」プロシーディングス
  
  Pages: 139-140
- Data Source
  KAKENHI-PROJECT-18510108
[Journal Article] 水蒸気導入によるエッチング用H_2O-誘導結合プラズマ(ICP)の発光分光分析2007
- Author(s)
  松谷彰宏, 大槻秀夫, 小山不二夫
- Journal Title
  
  第54回応用物理学関係連合講演会講演予稿集 No.3
  
  Pages: 1480-1480
- Data Source
  KAKENHI-PROJECT-18510108
[Journal Article] 液体ソースドライエッチングプロセスのためのH_2Oプラズマの生成2007
- Author(s)
  松谷彰宏
- Journal Title
  
  平成18年度名古屋大学総合技術研究会報告集装置技術分科会
  
  Pages: 114-115
- Data Source
  KAKENHI-PROJECT-18510108
[Journal Article] Wavelength Tuning of Double-Cavity Micromachined Filter with Electrical and Thermal Actuations2007
- Author(s)
  Wiganes Janto, Akihiro Matsutani, Fumio Koyama
- Journal Title
  
  OPTICAL REVIEW vol.14, no. 2
  
  Pages: 86-90
- NAID
  10018912664
- Data Source
  KAKENHI-PROJECT-17068006
[Journal Article] Wavelength Tuning of Double-Cavity Micromachined Filter with Electrical and Thermal Actuations2007
- Author(s)
  W. Janto, A. Matsutani and F. Koyama
- Journal Title
  
  OPTICAL REVIEW vol. 14, no. 2
  
  Pages: 86-90
- NAID
  10018912664
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17068006
[Journal Article] Tunable Planar Air-Core Resonator Based on Tunable Hollow Waveguide2006
- Author(s)
  Yasuki Sakurai, Akihiro Matsutani, Takahiro Sakaguchi, Fumio Koyama
- Journal Title
  
  Jpn.J.Appl.Phys vol.45,no.11(掲載決定)
- NAID
  10018158678
- Data Source
  KAKENHI-PROJECT-17068006
[Journal Article] Tunable stop-band hollow waveguide Bragg reflector with tapered air-core for adaptive dispersion-compensation2006
- Author(s)
  Yasuki Sakurai, Akihiro Matsutani, Fumio Koyama
- Journal Title
  
  Applied Physics Letters (掲載決定)
- Data Source
  KAKENHI-PROJECT-17068006
[Journal Article] Tunable stop-band hollow waveguide Bragg reflector with tapered air-core for adaptive dispersion-compensation2006
- Author(s)
  Y. Sakurai, A. Matsutani and F. Koyama
- Journal Title
  
  Appl. Phys. Lett. vol.88, no. 12
  
  Pages: 121103-121103
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17068006
[Journal Article] Tunable Planar Air-Core Resonator Based on Tunable Hollow Waveguide2006
- Author(s)
  Y. Sakurai, A. Matsutani, T. Sakaguchi and F. Koyama
- Journal Title
  
  Jpn. J. Appl. Phys vol.45, no. 11
- NAID
  10018158678
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17068006
[Journal Article] Solid Source Dry Etching Process for GaAs and InP2006
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Journal Title
  
  Jpn. J. Appl. Phys vol.45, no. 10B
  
  Pages: 8374-8377
- NAID
  10018339878
- Data Source
  KAKENHI-PROJECT-17068006
[Journal Article] Design, Fabrication, and Characterization of Tunable Micromachined Filter with Double-Cavity Structure2006
- Author(s)
  Wiganes Janto, Akihiro Matsutani, Fumio Koyama
- Journal Title
  
  Jpn. J. Appl. Phys vol.45, no. 10A
  
  Pages: 7732-7736
- NAID
  40007462494
- Data Source
  KAKENHI-PROJECT-17068006
[Journal Article] Solid Source Dry Etching Process for GaAs and InP2006
- Author(s)
  A. Matsutani, Hideo Ohtsuki and F. Koyama
- Journal Title
  
  Jpn. J. Appl. Phys. vol. 45, no. 10B
  
  Pages: 8374-8377
- NAID
  10018339878
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17068006
[Journal Article] Giant Bragg wavelength tuning of tunable hollow waveguide Bragg reflector2005
- Author(s)
  Y. Sakurai, A. Matsutani, T. Sakaguchi and F. Koyama
- Journal Title
  
  Jpn. J. Appl. Phys. vol. 44, no. 37
- NAID
  130004533548
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17068006
[Journal Article] Tunable Stop-Band Hollow Waveguide Bragge Reflector with Tapered Air-Core for Adaptive Dispersion-Compensation2005
- Author(s)
  Yasuki Sakurai, Akihiro Matsutani, Fumio Koyama
- Journal Title
  
  CLEO2005 CMP5
- Data Source
  KAKENHI-PROJECT-17068006
[Journal Article] 160nm Continuous Wavelength Tuning of Tunable Hollow Waveguide Bragg Reflector2005
- Author(s)
  Yasuki Sakurai, Akihiro Matsutani, Takahiro Sakaguchi, Fumio Koyama
- Journal Title
  
  CLEO2005 CPDA6
- Data Source
  KAKENHI-PROJECT-17068006
[Journal Article] Iodine Solid Source Inductively Coupled Plasma Etching of InP2005
- Author(s)
  A. Matsutani, H. Ohtsuki and F. Koyama
- Journal Title
  
  Jpn. J. Appl. Phys. vol.44, no.19
- NAID
  10015726485
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-17068006
[Presentation] 点回折干渉計方式による極限補償光学用波面センサの開発2023
- Author(s)
  津久井遼, 木野勝, 山本広大, 佐藤美那, 遠西美重, 松谷晃宏, 栗田光樹夫
- Organizer
  2023年度精密工学会春季大会学術講演会
- Data Source
  KAKENHI-PROJECT-18H03719
[Presentation] Fabrication of nonreflective black germanium in near-infrared region up to a wavelength of 2.5 micro m by SF6+O2/C4F8-plasma-based deep reactive ion etching2023
- Author(s)
  Mie Tohnishi, Sachiko Matsushita, Akihiro Matsutani
- Organizer
  2023 International Symposium on Dry Process (DPS 2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-23K21145
[Presentation] Deep-RIE により作製したブラックGe 微細構造側壁のEDX 分析2023
- Author(s)
  遠西美重, 松谷晃宏, 松下祥子
- Organizer
  2023年第84回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K21145
[Presentation] ポリイミドシート上へスパッタ成膜したCr/Ge電極の固体ソースH2Oプラズマを用いた前処理による低抵抗化2022
- Author(s)
  遠西美重, 佐藤美那, 松下祥子, 松谷晃宏
- Organizer
  応用物理学会
- Data Source
  KAKENHI-PROJECT-23K21145
[Presentation] ポジ型電子線レジストSML1000をマスクとして用いたSF6-RIEによるGeのドライエッチング2022
- Author(s)
  松谷晃宏, 遠西美重, 藤本美穂, 松下祥子
- Organizer
  応用物理学会
- Data Source
  KAKENHI-PROJECT-23K21145
[Presentation] ポジ型電子線レジストSML1000をマスクとして用いたSF6-RIEによるGeのドライエッチング2022
- Author(s)
  松谷晃宏,遠西美重,藤本美穂,松下祥子
- Organizer
  2022年第83回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-23K21145
[Presentation] 点回折干渉計方式を用いた補償光学用波面センサの開発 (V245b)2021
- Author(s)
  津久井遼、木野勝、山本広大、栗田光樹夫(京都大学)、松谷晃宏(東京工業大学)
- Organizer
  日本天文学会2021年秋季年会
- Data Source
  KAKENHI-PROJECT-18H03719
[Presentation] 固体ソースH2Oプラズマを用いて表面処理したポリイミドテープ上のCr/Cu電極の折り曲げ耐久性2021
- Author(s)
  遠西美重, 佐藤美那, 松下祥子, 松谷晃宏
- Organizer
  応用物理学会
- Data Source
  KAKENHI-PROJECT-23K21145
[Presentation] せいめい望遠鏡での極限補償光学に向けた波面センサの開発2021
- Author(s)
  津久井遼、木野勝、山本広大、栗田光樹夫（京都大学）、松谷晃宏（東京工業大学）
- Organizer
  赤外線学会第88回定例研究会
- Invited
- Data Source
  KAKENHI-PROJECT-18H03719
[Presentation] スンプ法によるセルロイドマイクロ時計皿アレイ細胞集積チップの製作2020
- Author(s)
  松谷晃宏
- Organizer
  第67回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-17K05020
[Presentation] Siマイクロ凹面鏡とケーラー照明光による酵母細胞の捕獲2019
- Author(s)
  松谷晃宏，佐藤美那，長谷部浩一，髙田綾子
- Organizer
  第66回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-17K05020
[Presentation] Optical Characterization of Concave Micromirror Array for Microbial Cell Trapping Fabricated by Laser Lithography and SUMP Method2019
- Author(s)
  A. Matsutani, A. Takada
- Organizer
  MNC2019
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05020
[Presentation] スンプ法とレーザー描画により製作したマイクロ凹面鏡の集光特性2019
- Author(s)
  松谷晃宏，髙田綾子
- Organizer
  第80回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-17K05020
[Presentation] XeF2気相エッチングにより製作した微生物細胞捕獲用Siマイクロ凹面鏡の集光実験2018
- Author(s)
  松谷晃宏, 佐藤美那, 長谷部浩一, 髙田綾子
- Organizer
  第79回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-17K05020
[Presentation] XeF2気相エッチングによるSiマイクロ凹面鏡構造の製作2018
- Author(s)
  松谷晃宏, 西岡國生，佐藤美那
- Organizer
  第65回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-17K05020
[Presentation] Microfabrication of Si-based Concave Micromirror Array for Microbial Cell Trapping by XeF2 Vapor Etching2018
- Author(s)
  A. Matsutani, M. Sato, K. Hasebe, A. Takada
- Organizer
  MNC 2018, 31st International Microprocesses and Nanotechnology Conference
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05020
[Presentation] XeF2 気相エッチングとスンプ法により製作したセルロイドマイクロレンズによる酵母細胞の捕獲実験2017
- Author(s)
  松谷晃宏，髙田綾子
- Organizer
  第78回応用物理学会秋季学術講演会
- Data Source
  KAKENHI-PROJECT-17K05020
[Presentation] XeF2気相エッチングとスンプ法によるセルロイドマイクロレンズアレイの製作2017
- Author(s)
  松谷晃宏，髙田綾子
- Organizer
  第64回応用物理学会春季学術講演会
- Place of Presentation
  横浜市
- Year and Date
  2017-03-15
- Data Source
  KAKENHI-PROJECT-26390037
[Presentation] Profile Control in Si Etching by Two-step Etching Process Using XeF2 Vapor for Fabrication of Concave Micromirror2017
- Author(s)
  A. Matsutani, A. Takada
- Organizer
  39th International Symposium on Dry Process (DPS2017)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-17K05020
[Presentation] Si/SiO2上金ナノ円盤の表面電位の光照射依存およびその構造依存性2016
- Author(s)
  江崎智太郎, 松谷晃宏, 西岡國生, 庄司大, 佐藤美那, 岡本隆之, 磯部敏宏, 中島章, 松下祥子
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  朱鷺メッセ
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-25420707
[Presentation] 液体定在波を利用した微生物細胞の流路レス凝集法におけるマイクロ囲いアレイを用いた大きさによる篩い分けと単一分離2016
- Author(s)
  松谷晃宏，髙田綾子
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学
- Year and Date
  2016-03-21
- Data Source
  KAKENHI-PROJECT-26390037
[Presentation] Kelvin Probe Force Microscopic Images on Gold Nanodisks with and without Light Irradiation2016
- Author(s)
  T. Ezaki, A. Matsutani, K. Nishioka, D. Shoji, M. Sato, T. Okamoto, T. Isobe, A. Nakajima, S. Matsushita
- Organizer
  MRS 2016 fall meeting
- Place of Presentation
  Boston, Massachusetts, USA
- Year and Date
  2016-11-27
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25420707
[Presentation] スンプ法により形成したセルロイド製単一細胞分離用プレートによる酵母細胞の分離2016
- Author(s)
  松谷晃宏，髙田綾子
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  新潟市
- Year and Date
  2016-09-14
- Data Source
  KAKENHI-PROJECT-26390037
[Presentation] Single-cell isolation of S. Cerevisiae using celluloid microenclosure array formed by the SUMP method2016
- Author(s)
  Akihiro Matsutani, Ayako Takada
- Organizer
  29th international microprocesses and nanotechnology conference (MNC2016)
- Place of Presentation
  Kyoto
- Year and Date
  2016-11-10
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26390037
[Presentation] Si上に形成した金ナノ円盤が示す表面電位差の光照射依存2016
- Author(s)
  2.江崎智太郎、松谷晃宏、西岡國生、庄司大、佐藤美那、岡本隆之、磯部敏宏、中島章、松下祥子
- Organizer
  第６３回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-25420707
[Presentation] 液体定在波を利用した酵母細胞の流路レス凝集パターンの形成における励振波形の効果2015
- Author(s)
  松谷晃宏，髙田綾子
- Organizer
  第76回応用物理学会秋季学術講演会
- Place of Presentation
  名古屋国際会議場
- Year and Date
  2015-09-15
- Data Source
  KAKENHI-PROJECT-26390037
[Presentation] Microfabrication of polystylene quadrupole combined with top-down and bottom-up approach2015
- Author(s)
  T. Takahashi, A. Matsutani, D. Shoji, K. Nishioka, T. Isobe, A. Nakajima, S. Matsushita
- Organizer
  Western Pacific Colloids Meeting 2015
- Place of Presentation
  Western Pacific Colloids Meeting 2015
- Year and Date
  2015-11-15
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25420707
[Presentation] 液体定在波を利用した酵母細胞の流路レス凝集パターンの振動周波数による制御2015
- Author(s)
  松谷晃宏，高田綾子
- Organizer
  第62回応用物理学会春季学術講演会
- Place of Presentation
  東海大学
- Year and Date
  2015-03-12
- Data Source
  KAKENHI-PROJECT-26390037
[Presentation] タッピングによる酵母細胞の流路レス凝集パターン形成と単一細胞分離2015
- Author(s)
  松谷晃宏，髙田綾子
- Organizer
  第7回集積化MEMSシンポジウム
- Place of Presentation
  朱鷺メッセ
- Year and Date
  2015-10-29
- Data Source
  KAKENHI-PROJECT-26390037
[Presentation] 低周波鉛直加振による液体定在波を利用した酵母細胞の流路レス凝集2014
- Author(s)
  松谷晃宏，高田綾子
- Organizer
  第31回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  くにびきメッセ
- Year and Date
  2014-10-21
- Data Source
  KAKENHI-PROJECT-26390037
[Presentation] 傾斜ドライエッチングを用いた酸化チタンフォトニック結晶の作製と評価2014
- Author(s)
  小林大斗，松谷晃宏，西岡國生，庄司大，佐藤美那，磯部敏宏，中島章，立間徹，松下祥子
- Organizer
  応用物理学会
- Place of Presentation
  青山学院大学
- Data Source
  KAKENHI-PROJECT-25420707
[Presentation] Characteristics of Fluorinated Graphene Field Effect Transistors2014
- Author(s)
  K. Tahara,T. Iwasaki, A. Matsutani, and M. Hatano,
- Organizer
  Education Forum on Environment and Energy Science
- Place of Presentation
  Perth, Australia
- Year and Date
  2014-12-13
- Data Source
  KAKENHI-PROJECT-26630125
[Presentation] フッ化グラフェン中のスピン緩和2014
- Author(s)
  田原康佐，岩崎孝之，松谷晃宏，波多野睦子
- Organizer
  第２８回ダイヤモンドシンポジウム
- Place of Presentation
  東京電機大学東京千住キャンパス
- Year and Date
  2014-11-20
- Data Source
  KAKENHI-PROJECT-26630125
[Presentation] Electro-thermally Tunable 850nm VCSELs with metal/semiconductor Thermally Actuated Mirror2013
- Author(s)
  Masanori Nakahama, Hayato Sano, Shunya Inoue, Akihiro Matsutani, Takahiro Sakaguchi and Fumio Koyama
- Organizer
  CLEO-PR
- Place of Presentation
  Kyoto, Japan. Kyoto International conference Center
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Wavelength tuning and controlled temperature dependence of MEMS VCSELs with thermally and electrostatically actuated micromachined mirror2013
- Author(s)
  Masanori Nakahama, Hayato Sano, Shunya Inoue, Takahiro Sakaguchi, AkihiroMatsutani, and Fumio Koyama
- Organizer
  MOC2013
- Place of Presentation
  Tokyo, Japan. Tokyo Institute of Technology
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Miniature Bragg Reflector Waveguide Beam Deflector for Full C-band Wavelength Demultiplexing with Low Polarization Dependence and High Resolution2013
- Author(s)
  Xiaodong Gu, Kensuke Nakamura, Akihiro Matsutani and Fumio Koyama
- Organizer
  CLEO 2013
- Place of Presentation
  San Jose, USA. San Jose Convention Center
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Super-high Resolution Beam Steering Using Bragg Reflector Waveguides2013
- Author(s)
  Xiaodong Gu, Toshikazu Shimada, Akihiro Matsutani and Fumio Koyama
- Organizer
  iNOW2013
- Place of Presentation
  Corsica, France
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Sub-1V and Sub-100μm Electro-absorption Modulator Based on Bragg Reflector Waveguide2013
- Author(s)
  Xiaodong Gu, Syouki Shimizu, Toshikazu Shimada, Akihiro Matsutani and Fumio Koyama
- Organizer
  CLEO-PR
- Place of Presentation
  Kyoto, Japan. Kyoto International conference Center
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Creation of Vortex Beam based on Integrated Ring-shape Bragg Reflector Waveguide2013
- Author(s)
  Shota Mochizuki, Xiaodong Gu, Akihiro Matsutani and Fumio Koyama
- Organizer
  CLEO 2013
- Place of Presentation
  San Jose, USA. San Jose Convention Center
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Sub-50μm Long Slow-light Electro-absorption Modulator Laterally Integrated with VCSEL2013
- Author(s)
  Toshikazu Shimada, Akihiro Matsutani and Fumio Koyama
- Organizer
  CLEO-PR
- Place of Presentation
  Kyoto, Japan. Kyoto International conference Center
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] High-speed and low-voltage operation of compact Bragg reflector waveguide modulator2013
- Author(s)
  Xiaodong Gu, Shouki Shimizu, Toshikazu Shimada, Akihiro Matsutani and Fumio Koyama
- Organizer
  MOC2013
- Place of Presentation
  Tokyo, Japan. Tokyo Institute of Technology
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Transverse Mode Control of VCSELs Using Angular Dependent High-contrast Grating Mirror2013
- Author(s)
  Junichi Kashino, Shunya Inoue, Akihiro Matsutani, Hideo Ohtsuki, Takahiro Miyashita and Fumio Koyama
- Organizer
  IPC2013
- Place of Presentation
  Seattle, USA. Hyatt Regency Bellevue
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] マイクロピラー構造を用いた大腸菌と酵母の単一細胞分離とサイズ分離2013
- Author(s)
  松谷晃宏,髙田綾子
- Organizer
  2013年第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学
- Year and Date
  2013-03-27
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] InP 基板上に製作したマイクロ囲いを用いた出芽酵母の培養2013
- Author(s)
  松谷晃宏,髙田綾子
- Organizer
  第28回化学とマイクロ・ナノシステム学会
- Place of Presentation
  イーグレ姫路
- Year and Date
  2013-12-06
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] マイクロ牧場アレイを用いた出芽酵母の培養2013
- Author(s)
  松谷晃宏,髙田綾子
- Organizer
  2013年第74回応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学
- Year and Date
  2013-09-16
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] Ar/F_2気相エッチングにより製作したSiマイクロ流路を用いた大腸菌細胞の輸送2013
- Author(s)
  松谷晃宏,髙田綾子
- Organizer
  第4回集積化MEMS技術研究ワークショップ
- Place of Presentation
  大阪府立大学
- Year and Date
  2013-07-27
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] Modulation of Spatial Intensity Distribution of Laterally Coupled Twin VCSELs2013
- Author(s)
  Hamed Dalir, Akihiro Matsutani and Fumio Koyama
- Organizer
  CLEO-PR
- Place of Presentation
  Kyoto, Japan. Kyoto International conference Center
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] SF6 プラズマによるNb-TiO2 結晶基板のドライエッチング2013
- Author(s)
  松谷晃宏，西岡國生，庄司大，佐藤美那, 小林大斗，磯部敏宏，中島章，立間徹，松下祥子
- Organizer
  応用物理学会
- Place of Presentation
  同志社大学
- Data Source
  KAKENHI-PROJECT-25420707
[Presentation] Single-Cell Isolation of Bacteria Using Microenclosure and Its Applications2012
- Author(s)
  A. Matsutani and A. Takada
- Organizer
  RSC Tokyo Conference
- Place of Presentation
  Makuhari, Japan, 幕張メッセ
- Year and Date
  2012-09-06
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] Athermal and Tunable VCSELs with a Thermally Actuated Cantilever Structure for WDM Optical Interconnects2012
- Author(s)
  Hayato Sano, Norihiko Nakata, Masanori Nakahama, Akihiro Matsutani and Fumio Koyama
- Organizer
  ICSJ2012
- Place of Presentation
  Miyako-Messe(Kyoto), Japan
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Switching Characteristics of 30μm×30μm Compact Optical Switch with Slowing Light2012
- Author(s)
  Ayumi Fuchida, Akihiro Matsutani, Fumio Koyama
- Organizer
  OFC/NFOEC2012
- Place of Presentation
  Los Angeles, USA
- Year and Date
  2012-03-07
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Single-Cell Isolation and Sizing of Microorganisms by Microenclosure Array with Multipillar Structure2012
- Author(s)
  A. Matsutani and A. Takada
- Organizer
  MNC2012
- Place of Presentation
  Kyot, Japan, 神戸メリケンパークオリエンタルホテル
- Year and Date
  2012-11-01
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] Ar/F_2 気相エッチングによる細菌細胞輸送用Si マイクロ流路の形成2012
- Author(s)
  松谷晃宏,髙田綾子
- Organizer
  2012年春季第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学
- Year and Date
  2012-03-18
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] Modeling and Experiment on Low Voltage Slow-Light2012
- Author(s)
  Syoki Shimizu, Xiadong Gu, Toshikazu Shimada, Akihiro Matsutani and Fumio Koyama
- Organizer
  ICSJ2012
- Place of Presentation
  Miyako-Messe(Kyoto), Japan
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Microfabrication of Single-Cell Isolation Structure on Vertical Cavity Surface Emitting Laser Wafer2012
- Author(s)
  A. Matsutani and A. Takada
- Organizer
  第29回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  北九州国際会議場
- Year and Date
  2012-10-23
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] 半導体プロセスを用いた細胞サイズ分離用マイクロピラー構造の製作2012
- Author(s)
  松谷晃宏,高田綾子
- Organizer
  2012年秋季第73回応用物理学会学術講演会
- Place of Presentation
  愛媛大学・松山大学
- Year and Date
  2012-09-12
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] Microfabrication of Si based Microchannel for Transport of Bacterial Cells by Ar/F_2 Vapor Etching and Cl_2 Inductively Coupled Plasma Etching2012
- Author(s)
  A. Matsutani, H. Ohtsuki and A. Takada
- Organizer
  11^<th> APCPST
- Place of Presentation
  Kyot, Japan, 京都大学
- Year and Date
  2012-10-03
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] Ar/F2 気相エッチングによる細菌細胞輸送用Si マイクロ流路の形成2011
- Author(s)
  松谷晃宏，高田綾子
- Organizer
  2012年春季第59回応用物理学関係連合講演会
- Place of Presentation
  早稲田大学
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] Fabrication of Si based Microchannel by Ar/F2 Vapor Etching and Plasma Etching2011
- Author(s)
  A. Matsutani and A. Takada
- Organizer
  Plasma Conference 2011 (PLASMA2011)
- Place of Presentation
  石川県立音楽堂
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] Athermal Operations and Giant Temperature Dependence of Micromachined VCSELs2011
- Author(s)
  Hayato Sano, Nakata Norihiko, Masanori Nakahama, Akihiro Matsutani, Fumio Koyama
- Organizer
  International Nano-Optoelectronics Workshop, iNOW2011
- Place of Presentation
  St.Petersburg and Wurzburg, Russia and Germany
- Year and Date
  2011-07-24
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Miniature Slow Light Total-Intemal-Reflection Switch with Carrier Injection2011
- Author(s)
  Ayumi Fuchida, Akihiro Matsutani, Fumio Koyama
- Organizer
  EEE PHOTONICS 2011, IPC2011
- Place of Presentation
  Arlington, USA
- Year and Date
  2011-10-10
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Dry Etching of Escherichia coli by O_2-, Ar-, Air-, and H2_O- Plasma2011
- Author(s)
  A. Matsutani and A. Takada
- Organizer
  Plasma Conference 2011 (PLASMA2011)
- Place of Presentation
  石川県立音楽堂
- Year and Date
  2011-11-23
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] Giant Wavelength-Temperature Dependence of VCSEL with Thermally Actuated Cantilever Structure2011
- Author(s)
  Masanori Nakahama, Hayato Sano, Norihiko Nakata, Akihiro Matsutani, Fumio Koyama
- Organizer
  Conference on Lasers and Electro-Optics, CLEO2011
- Place of Presentation
  Baltimore, USA
- Year and Date
  2011-05-02
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Reflection-type Slow Light Optical Switches Using Current Injection2011
- Author(s)
  Ayumi Fuchida, Akihiro Matsutani, Fumio Koyama
- Organizer
  Conference on Lasers and Electro-Optics, CLEO2011
- Place of Presentation
  Baltimore, USA
- Year and Date
  2011-05-03
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Giant Wavelength-Temperature Dependence of VCSEL with Thermally Actuated Cantilever Structure2011
- Author(s)
  Masanori Nakahama, Hayato Sano, Norihiko Nakata, Akihiro Matsutani Fumio Koyama
- Organizer
  CLEO2011
- Place of Presentation
  U.S.A, Baltimore
- Year and Date
  2011-05-02
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Giant Wavelength-temperature Dependence and Electro-thermal Tuning of MEMSVCSEL2011
- Author(s)
  Masanori Nakahama, Norihiko Nakata, Hayato Sano, Akihiro Matsutani, Fumio Koyama
- Organizer
  EEE PHOTONICS 2011, IPC2011
- Place of Presentation
  Arlington, USA
- Year and Date
  2011-10-13
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Ar/F_2 気相エッチングによる極微小径Si マイクロ流路の形成2011
- Author(s)
  松谷晃宏,髙田綾子
- Organizer
  第24回化学とマイクロ・ナノシステム研究会
- Place of Presentation
  大阪府立大学
- Year and Date
  2011-11-02
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] Ar/F2気相エッチングによる極微小径Siマイクロ流路の形成2011
- Author(s)
  松谷晃宏，高田綾子
- Organizer
  第24回化学とマイクロ・ナノシステム研究会
- Place of Presentation
  大阪府立大学
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] Experimental Demonstration of Beam-Steering Based on Slow-Light Waveguide Amplifier2011
- Author(s)
  Xiaodong Gu, Toshikazu Shimada, Ayumi Fuchida, Akihiro Imamura, Akihiro Matsutani, Fumio Koyama
- Organizer
  17th Microoptics Conference, MOC'11
- Place of Presentation
  Sendai, Japan
- Year and Date
  2011-10-31
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Si based High-index-contrast-grating Structure fabricated by High Temperature Cl_2 Inductively Coupled Plasma Etching using Thermal Nanoimprint Resist Mask2011
- Author(s)
  Akihiro Matsutani, Yuuki Hashidume, Hideo Ohtsuki, Fumio Koyama
- Organizer
  24th International Microprocesses and Nanotechnology Conference, MNC2011
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2011-10-26
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] 低圧プラズマプロセスによる細菌細胞の分解と細菌細胞を用いた半導体のドライエッチング2011
- Author(s)
  松谷晃宏,髙田綾子
- Organizer
  電気学会プラズマ/パルスパワー合同研究会
- Place of Presentation
  東京工業大学
- Year and Date
  2011-12-15
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] Fabrication of Si based Microchannel by Ar/F_2 Vapor Etching and Plasma Etching2011
- Author(s)
  A. Matsutani and A. Takada
- Organizer
  Plasma Conference 2011 (PLASMA2011)
- Place of Presentation
  石川県立音楽堂
- Year and Date
  2011-11-23
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] Wavelength Tuning and Athermal Operations of Micro-machined VCSELs for Uncooled WDM2011
- Author(s)
  Hayato Sano, Norihiko Nakata, Masanori Nakahama, Akihiro Matsutani, Fumio Koyama
- Organizer
  CLEO2011
- Place of Presentation
  U.S.A, Baltimore
- Year and Date
  2011-05-02
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Fabrication and Characterization of Si/SiO2 High Contrast Grating using Nanoimprint Lithography2011
- Author(s)
  Yuuki Hashizume, Yasumitsu Miyake, Akihiro Matsutani, Hideo Obtsuki, Fumio Koyama
- Organizer
  Photonics West 2012, SPIE
- Place of Presentation
  San Francisco, USA
- Year and Date
  2011-01-22
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Wavelength Tuning and Athermal Operations of Micro-machined VCSELs for Uncooled WDM2011
- Author(s)
  Hayato Sano, Norihiko Nakata, Masanori Nakahama, Akihiro Matsutani, Fumio Koyama
- Organizer
  Conference on Lasers and Electro-Optics, CLEO2011
- Place of Presentation
  Baltimore, USA
- Year and Date
  2011-05-02
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Reflection-type Slow Light Optical Switches Using Current Injection2011
- Author(s)
  Ayumi Fuchida, Akihiro Matsutani, Fumio Koyama
- Organizer
  CLEO2011
- Place of Presentation
  U.S.A, Baltimore
- Year and Date
  2011-05-03
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Wavelength Trimming of MEMS VCSELs for Post-process Wavelength Allocation2010
- Author(s)
  Hayato Sano, Norihiko Nakata, Akihiro Matsutani, Fumio Koyama
- Organizer
  22nd IPRM
- Place of Presentation
  Japan, Kanazawa
- Year and Date
  2010-06-02
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Wavelength Control of VCSELs with a Thermally Actuated MEMS Structure2010
- Author(s)
  Hayato Sano, Norihiko Nakata, Akihiro Matsutani, Fumio Koyama
- Organizer
  iNOW 2010
- Place of Presentation
  China, Beijing and Changchun
- Year and Date
  2010-08-03
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Tapered hollow waveguide multiplexer for multi-wavelegth VCSEL array2010
- Author(s)
  Akihiko Imanura, Akihiro Matsutani, Fumio Koyama
- Organizer
  iNOW 2010
- Place of Presentation
  China, Beijing and Changchun
- Year and Date
  2010-08-03
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Controlled temperature dependence of lasing wavelength of VCSELs with a thermally actuated cantilever2010
- Author(s)
  Hayato Sano, Norihiko Nakata, Akihiro Matsutani, Fumio Koyama
- Organizer
  International Semiconductor Laser Conf.
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2010-09-27
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Compact Reflection-type Optical Switch with Slowing Light2010
- Author(s)
  Ayumi Fuchida, Akihiro Matsutani, Fumio Koyama
- Organizer
  OECC2010
- Place of Presentation
  Japan, Sapporo
- Year and Date
  2010-07-10
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Dry Etching of Si by Solid Source I_2 Inductively Coupled Plasma2010
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Organizer
  MNC2010
- Place of Presentation
  Japan, Fukuoka
- Year and Date
  2010-11-11
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Multi-wavelength 1060nm-band VCSEL Array with Tapered Hollow Waveguide Multiplexer2010
- Author(s)
  Akihiro Imamura, Akihiro Matsutani, Fumio Koyama
- Organizer
  International Semiconductor Laser Conf.
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2010-09-29
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Characterizations of Reflection-type Slow Light Optical Switches2010
- Author(s)
  Ayumi Fuchida, Takeru Sakairi, Akihiro Matsutani, Fumio Koyama
- Organizer
  MOC2010
- Place of Presentation
  Taiwan, Hsinchu
- Year and Date
  2010-11-02
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Proposal of Multi-Wavelength Integration of Athermal GAASVCSEL Array with Thermally Actuated Cantilever Structure2010
- Author(s)
  Norihiko Nakata, Hayato Sano, Akihiro Matsutani, Fumio Koyama
- Organizer
  22nd IPRM
- Place of Presentation
  Japan, Kanazawa
- Year and Date
  2010-06-02
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Tapered hollow waveguide multiplexer for multi-wavelength VCSEL array2009
- Author(s)
  Akihiro Imamura, Akihiro Matsutani, Fumio Koyama
- Organizer
  iNOW2009
- Place of Presentation
  Stockholm, Sweden
- Year and Date
  2009-08-08
- Data Source
  KAKENHI-PROJECT-19206012
[Presentation] Athermal and Tunable Operations of 850nm VCSEL with Thermally Actuated Cantilever Structure2009
- Author(s)
  Hayato Sano, Akihiro Matsutani, Fumio Koyama
- Organizer
  35th European Conference and Exhibition on Optical Communication, ECOC2009
- Place of Presentation
  Vienna, Austria
- Year and Date
  2009-09-10
- Data Source
  KAKENHI-PROJECT-19206012
[Presentation] Athermal and Tunable Operations of 850nm VCSEL with Thermally Actuated Cantilever Structure2009
- Author(s)
  Hayato Sano, Akihiro Matsutani, Fumio Koyama
- Organizer
  ECOC2009
- Place of Presentation
  Vienna, Austria
- Year and Date
  2009-09-10
- Data Source
  KAKENHI-PROJECT-19206012
[Presentation] High-Speed Optical Modulation based on Frequency-Modulated VCSELs and Optical Filters2009
- Author(s)
  Koichi Hasebe, Yusuke Mada, Takeru Sakairi, Akihiro Matsutani, fumio Koyama
- Organizer
  IPRM2009
- Place of Presentation
  Newport Beach, USA
- Year and Date
  2009-05-16
- Data Source
  KAKENHI-PROJECT-19206012
[Presentation] Multiple-Wavelength GaInAs/GaAs VCSELs with Gradinga Spacer Layer for Short Reach WDM Applications2009
- Author(s)
  P.Babu Dayal, Akihiro Imamura, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
- Organizer
  IPRM2009
- Place of Presentation
  Newport Beach, USA
- Year and Date
  2009-05-15
- Data Source
  KAKENHI-PROJECT-19206012
[Presentation] Tapered hollow waveguide multiplexer for multi-wavelength VCSEL array2009
- Author(s)
  Akihiro Imamura, Koichi Hasebe, Akihiro Matsutani, Fumio Koyama
- Organizer
  Photonic West 2009
- Place of Presentation
  San Jose, USA
- Year and Date
  2009-01-28
- Data Source
  KAKENHI-PROJECT-19206012
[Presentation] Adjustable Polarization Mode Dispersion Compensation using 3D Hollow Waveguide Bragg Reflector (CThB5)2009
- Author(s)
  M. Kumar, T. Sakaguchi, A. Matsutani and F. Koyama
- Organizer
  Conference on Lasers and Electro-Optics, CLEO/IQEC2009
- Place of Presentation
  Baltimore, USA
- Year and Date
  2009-06-04
- Data Source
  KAKENHI-PROJECT-17068006
[Presentation] Dry Etching of Si using Ar/F2 Plasma2009
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Organizer
  MNC2009,
- Place of Presentation
  Sapporo, Japan
- Year and Date
  2009-11-12
- Data Source
  KAKENHI-PROJECT-19206012
[Presentation] Multiple-Wavelength GaInAs/GaAs VCSELs with Grading a Spacer Layer for Short Reach WDM Applications2009
- Author(s)
  P. Babu Dayal, Akihiro Imamura, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
- Organizer
  2009 International Conference on Indium Phosphide and Related Materials, IPRM2009
- Place of Presentation
  Newport Beach, USA
- Year and Date
  2009-05-15
- Data Source
  KAKENHI-PROJECT-19206012
[Presentation] High-Speed Optical Modulation based on Frequency-Modulated VCSELs and Optical Filters2009
- Author(s)
  Koichi Hasebe, Yusuke Mada, Takeru Sakairi, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
- Organizer
  2009 International Conference on Indium Phosphide and Related Materials, IPRM2009
- Place of Presentation
  Newport Beach, USA
- Year and Date
  2009-05-16
- Data Source
  KAKENHI-PROJECT-19206012
[Presentation] Tapered hollow waveguide multiplexer for multi-wavelength VCSEL array2009
- Author(s)
  Akihiro Imamura, Koichi Hasebe, Akihiro Matsutani, and Fumio Koyama
- Organizer
  Photonic West 2009
- Place of Presentation
  San Jose, USA
- Year and Date
  2009-01-28
- Data Source
  KAKENHI-PROJECT-17068006
[Presentation] Multiple-wavelength VCSEL arrays using surface nano-machining process for WDM applications2008
- Author(s)
  P. Babu Dayal, Jun Nakajima, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
- Organizer
  21st Annual Meeting of The IEEE Lasers & Electro-Optics Society, LEOS2008
- Place of Presentation
  Newport Beach, USA
- Year and Date
  2008-11-11
- Data Source
  KAKENHI-PROJECT-19206012
[Presentation] Miniature optical gate with VCSEL-based slow light bragg reflector waveguide2008
- Author(s)
  Keisuke Kuroki, Ayumi Fuchida, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
- Organizer
  21st IEEE International Semiconductor Laser Conference, ISLC2008
- Place of Presentation
  Sorrento, Italy
- Data Source
  KAKENHI-PROJECT-19206012
[Presentation] Dry Etching of CaF_2 by Solid Source H_2O Plasma2008
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Organizer
  The 25th Symposium on Plasma Processing
- Place of Presentation
  山口県教育会館
- Year and Date
  2008-01-24
- Data Source
  KAKENHI-PROJECT-18510108
[Presentation] Dry Etching of Si by XeF2 Plasma and Investigation of Emission Intensities from Xe and F in XeF2 Plasma2008
- Author(s)
  Akihiro Matsutanil, Hideo Ohtsuki and Fumio Koyama
- Organizer
  MNC2008
- Place of Presentation
  Fukuoka, Japan
- Year and Date
  2008-10-29
- Data Source
  KAKENHI-PROJECT-17068006
[Presentation] Dry Etching of CaF_2 by Solid Source H_2O Plasma2008
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Organizer
  The 25th Symposium on Plasma Processing
- Place of Presentation
  Yamaguchi, Japan
- Year and Date
  2008-01-24
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18510108
[Presentation] Low Polarization Dependence of Bragg Reflector Slow Light Waveguides2008
- Author(s)
  Ayumi Fuchida, P. Babu Dayal, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
- Organizer
  LEOS2008
- Place of Presentation
  Newport Beach, USA
- Year and Date
  2008-11-12
- Data Source
  KAKENHI-PROJECT-19206012
[Presentation] Dry Etching of Si by XeF2 Plasma and Investigation of Emission Intensities from Xe and F in XeF2 Plasma2008
- Author(s)
  Akihiro Matsutanil, Hideo Ohtsuki, Fumio Koyama
- Organizer
  MNC2008
- Place of Presentation
  Fukuoka, Japan
- Year and Date
  2008-10-29
- Data Source
  KAKENHI-PROJECT-19206012
[Presentation] Dry Etching of Si by XeF2 Plasma and Investigation of Emission Intensities from Xe and F in XeF2 Plasma (29D-9-58)2008
- Author(s)
  A. Matsutanil, H. Ohtsuki and F. Koyama
- Organizer
  1st International Microprocessees and Nanotechnology Conference, MNC2008
- Place of Presentation
  Fukuoka, Japan
- Year and Date
  2008-09-29
- Data Source
  KAKENHI-PROJECT-17068006
[Presentation] 固体ソースH_2Oプラズマの生成とCaF_2のドライエッチングへの応用2008
- Author(s)
  松谷晃宏, 大槻秀夫, 小山二三夫
- Organizer
  第55回応用物理学会関係連合講演会
- Place of Presentation
  日本大学
- Year and Date
  2008-03-30
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18510108
[Presentation] Dry Etching of CaF2 by Solid Source H 2O Plasma2008
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Organizer
  The 25th Symposium on Plasma Processing (SPP-24)
- Place of Presentation
  Japan
- Year and Date
  2008-01-24
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18510108
[Presentation] 固体ソースH_2Oプラズマの生成とCaF_2のドライエッチングへの応用2008
- Author(s)
  松谷晃宏, 大槻秀夫, 小山二三夫
- Organizer
  第55回応用物理学会関係連合講演会
- Place of Presentation
  日本大学理工学部船橋キャンパア
- Year and Date
  2008-03-30
- Data Source
  KAKENHI-PROJECT-18510108
[Presentation] Multiple-wavelength VCSEL arrays using surface nano-machining process for WDM applications2008
- Author(s)
  P. Babu Dayal, Jun Nakajima, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
- Organizer
  LEOS2008
- Place of Presentation
  Newport Beach, USA
- Year and Date
  2008-11-11
- Data Source
  KAKENHI-PROJECT-19206012
[Presentation] Generation of Solid Source H 2O Plasma and Its Application to Dry Etching of CaF 22008
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Organizer
  The 55th Spring Meeting, The Japan Society of Applied Physics and Related Societies
- Place of Presentation
  Japan
- Year and Date
  2008-03-30
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18510108
[Presentation] Low Polarization Dependence of Bragg Reflector Slow Light Waveguides2008
- Author(s)
  Ayumi Fuchida, P. Babu Dayal, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
- Organizer
  21st Annual Meeting of The IEEE Lasers & Electro-Optics Society, LEOS2008
- Place of Presentation
  Newport Beach, USA
- Year and Date
  2008-11-12
- Data Source
  KAKENHI-PROJECT-19206012
[Presentation] 固体ソースH_2OプラズマによるCaF_2(蛍石)のドライエッチングプロセス2008
- Author(s)
  松谷晃宏
- Organizer
  Proceedings of Symposium on Technology in Laboratories by Department Service
- Place of Presentation
  岐阜
- Year and Date
  2008-05-06
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18510108
[Presentation] Dry Etching of CaF_2by Solid Source H_2O (ice) Plasma2007
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki and Fumio Koyama
- Organizer
  20th International Microprocesses and Nanotechnology Conference
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-19206012
[Presentation] Plasma characterization of H 2O-inductively coupled plasma for dry etching2007
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Organizer
  17th International Vacuum Congress
- Place of Presentation
  Stockholm, Sweden
- Year and Date
  2007-07-05
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18510108
[Presentation] Plasma characterization of H20-inductively coupled plasma for dry etching2007
- Author(s)
  A.Matsutani, H.Ohtsuki and F.Koyama
- Organizer
  IVC-17
- Place of Presentation
  Stockholm, Sweden
- Data Source
  KAKENHI-PROJECT-19206012
[Presentation] Generation of Solid Source H 2O Plasma Liquid Source Dry Etching2007
- Author(s)
  Akihiro Matsutani
- Organizer
  2007 Symposium on Technology in Laboratories by Department Service
- Place of Presentation
  Japan
- Year and Date
  2007-03-02
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18510108
[Presentation] Plasma characterization of H2O-inductively coupled plasma for dry etching2007
- Author(s)
  A.Matsutani, H.Ohtsuki and F.Koyama
- Organizer
  IVC-17
- Place of Presentation
  Stockholm, Sweden
- Data Source
  KAKENHI-PROJECT-17068006
[Presentation] Tapered Hollow Waveguide Multiplexer for Multi-wavelength VCSEL array2007
- Author(s)
  Naoto Kitabayashi, Akihiro Imamura, Akihiro Matsutani and Fumio Koyama
- Organizer
  OECC/IOOC2007
- Place of Presentation
  Yokohama, Japan
- Data Source
  KAKENHI-PROJECT-17068006
[Presentation] Plasma characterization of H_2O-inductively coupled plasma for dry etching2007
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Organizer
  17th International Vacuum Congress (IVC-17)
- Place of Presentation
  スットックホルム
- Year and Date
  2007-07-05
- Data Source
  KAKENHI-PROJECT-18510108
[Presentation] Transvers-mode and Polarization Characteristics of 1.55μm Micromachined VCSELs2007
- Author(s)
  Koichi Hasebe, Wiganes Janto, Nobuhiko Nishiyama, Catherine Caneau, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama and Chung-En Zah
- Organizer
  OECC/IOOC2007
- Place of Presentation
  Yokohama. Japan
- Data Source
  KAKENHI-PROJECT-19206012
[Presentation] Dry Etching of CaF_2 by Solid Source H_2O(ice)Plasma2007
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Organizer
  20th International Microprocesses and Nanotechnology Conference
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2007-11-06
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18510108
[Presentation] Dry Etching of CaF_2by Solid Source H_2O(ice) Plasma (6A-4-94, pp. 248-249)2007
- Author(s)
  A. Matsutani, H. Ohtsuki and F. Koyama
- Organizer
  20th International Microprocesses and Nanotechnology Conference
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2007-11-15
- Data Source
  KAKENHI-PROJECT-17068006
[Presentation] Plasma characterization of H_2O-inductively coupled plasma for dry etching2007
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Organizer
  17th International Vacuum Congress(IVC-17)
- Place of Presentation
  Stockholm, Sweden
- Year and Date
  2007-07-05
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18510108
[Presentation] Transverse-mode and Polarization Characteristics of 1.55μm Micromachined VCSELs2007
- Author(s)
  Koichi Hasebe, Wiganes Janto, Nobuhiko Nishiyama, Catherine Caneau, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama and Chung-En Zah
- Organizer
  OECC/IOOC2007
- Place of Presentation
  Yokohama, Japan
- Data Source
  KAKENHI-PROJECT-19206012
[Presentation] Tapered Hollow Waveguide Multiplexer for Multi-wavelength VCSEL array," 12th Optoelectronics and Communications Conference/16th International Conference on Integrated Optics and Optical Fiber Communication2007
- Author(s)
  Naoto Kitabayashi, Akihiro Imamura, Akihiro Matsutani and Fumio Koyama
- Organizer
  OECC/IOOC2007
- Place of Presentation
  Yokohama, Japan
- Data Source
  KAKENHI-PROJECT-19206012
[Presentation] 液体ソースドライエッチングプロセスのためのH_2Oプラズマの生成2007
- Author(s)
  松谷晃宏
- Organizer
  平成18年度名古屋大学総合技術研究会装置技術研究会
- Place of Presentation
  名古屋大学
- Year and Date
  2007-03-02
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18510108
[Presentation] Dry Etching of CaF_2 by Solid Source H_2O (ice) Plasma2007
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Organizer
  20th International Microprocesses and Nanotechnology Conference
- Place of Presentation
  京都国際会館
- Year and Date
  2007-11-06
- Data Source
  KAKENHI-PROJECT-18510108
[Presentation] Decreasing of Residual Oxygen by using Si Solid Source in Cl2-ICP Etching of Al2007
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki and Fumio Koyama
- Organizer
  ISPC18
- Place of Presentation
  Kyoto, Japan
- Data Source
  KAKENHI-PROJECT-19206012
[Presentation] 水蒸気導入によるエッチング用H_2O誘導結合プラズマ(ICP)の発光分光分析2007
- Author(s)
  松谷晃宏, 大槻秀夫, 小山二三夫
- Organizer
  第54回応用物理学関係連合講演会
- Place of Presentation
  青山学院大学
- Year and Date
  2007-03-27
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18510108
[Presentation] Plasma Characterization of H_2O-Inductively Coupled Plasma for Dry Etching2007
- Author(s)
  A. Matsutani, H. Ohtsuki and F. Koyama
- Organizer
  The 24th Symposium on Plasma Processing(SPP-24)
- Place of Presentation
  Osaka, Japan
- Year and Date
  2007-01-29
- Description
  「研究成果報告書概要(和文)」より
- Data Source
  KAKENHI-PROJECT-18510108
[Presentation] Plasma Characterization by Optical Emission Analysis of H 2O-Inductively Coupled Plasma for Dry Etching2007
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Organizer
  The 54th Spring Meeting, The Japan Society of Applied Physics and Related Societies
- Place of Presentation
  Aoyama Gakuin
- Year and Date
  2007-03-27
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18510108
[Presentation] Tapered hollow waveguide multiplexer for multi-wavelength VCSEL array2007
- Author(s)
  Naoto Kitabayashi, Akihiro Imamura, Akihiro Matsutani, Fumio Koyama
- Organizer
  12th Optoelectronics and Communications Conference/16th International Conference on Integrated Optics and Optical Fiber Communication, OECC/IOOC2007
- Place of Presentation
  Yokohama, Japan
- Data Source
  KAKENHI-PROJECT-19206012
[Presentation] Tapered Hollow Waveguide Multiplexer for Multi-wavelength VCSEL array,2007
- Author(s)
  Naoto Kitabayashi, Akihiro Imamura, Akihiro Matsutani and Fumio Koyama
- Organizer
  OECC/IOOC2007
- Place of Presentation
  Yokohama, Japan
- Data Source
  KAKENHI-PROJECT-17068006
[Presentation] Tapered Hollow Waveguide Multiplexer for Multi-wavelength VCSEL array2007
- Author(s)
  Naoto Kitabayashi, Akihiro Imamura, Akihiro Matsutani and Fumio Koyama
- Organizer
  OECC/IOOC2007
- Place of Presentation
  Yokohama, Japan
- Data Source
  KAKENHI-PROJECT-19206012
[Presentation] Etching Characteristics of Low-k Polymer for Wide Modulation Bandwidth VCSELs2007
- Author(s)
  Akihiro Matsutani, Naoki Jogan, Fumio Koyama and Kohroh Kobayashi
- Organizer
  OECC/IOOC2007
- Place of Presentation
  Yokohama, Japan
- Data Source
  KAKENHI-PROJECT-19206012
[Presentation] Etching of CaF2 by Solid Source H 2O (ice) Plasma2007
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Organizer
  20th International Microprocesses and "Dry Nanotechnology Conference
- Place of Presentation
  Japan
- Year and Date
  2007-11-06
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18510108
[Presentation] Plasma Characterization of H 2O-Inductively Coupled Plasma for Dry Etching2007
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
- Organizer
  The 24th Symposium on Plasma Processing (SPP-24)
- Place of Presentation
  Japan
- Year and Date
  2007-01-29
- Description
  「研究成果報告書概要(欧文)」より
- Data Source
  KAKENHI-PROJECT-18510108
[Presentation] Decreasing of Residual Oxygen by using Si Solid Source in Cl2-ICP Etching of Al (30P-118)2007
- Author(s)
  A. Matsutani, H. Ohtsuki and F. Koyama
- Organizer
  18th International Symposium on Plasma Chemistry, ISPC18
- Place of Presentation
  Kyoto, Japan
- Year and Date
  2007-09-30
- Data Source
  KAKENHI-PROJECT-17068006
[Presentation] Hollow Waveguide Distributed Bragg Reflector for Widely Tunable Optical Devices (OtuM4)2006
- Author(s)
  Y. Sakurai, H. Yamakawa, Y. Yokota, A. Matsutani, T. Sakaguchi and F. Koyama
- Organizer
  Optical Fiber Communications Conference 2006
- Place of Presentation
  Anaheim, USA
- Year and Date
  2006-03-12
- Data Source
  KAKENHI-PROJECT-17068006
[Presentation] Solid Source Dry Etching Process for III-V Compound Semiconductors (P-2A-42)2006
- Author(s)
  A. Matsutani, H. Ohtsuki and F. Koyama
- Organizer
  6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing, ICRP-6/SPP-23
- Place of Presentation
  Sendai, Japan
- Year and Date
  2006-01-25
- Data Source
  KAKENHI-PROJECT-17068006
[Presentation] Tunable Stop-Band Hollow Waveguide Bragge Reflector with Tapered Air-Core for Adaptive Dispersion-Compensation (Postdeadline Paper, CPDA6, CLEO2005, CMP5)2005
- Author(s)
  Y. Sakurai, A. Matsutani and F. Koyama
- Organizer
  Conference on Lasers and Electro-Optics
- Place of Presentation
  Baltimore, USA
- Year and Date
  2005-05-11
- Data Source
  KAKENHI-PROJECT-17068006
[Presentation] Air-core Resonator with Widely Tunable Hollow Waveguide Bragg Reflectors2005
- Author(s)
  Y. Sakurai, A. Matsutani, T. Sakaguchi and F. Koyama
- Organizer
  31st European Conference on Optical Communication, ECOC2005
- Place of Presentation
  Glasgow, UK
- Year and Date
  2005-10-12
- Data Source
  KAKENHI-PROJECT-17068006
[Presentation] 160nm Continuous Wavelength Tuning of Tunable Hollow Waveguide Bragg Reflector (Postdeadline Paper, CPDA6, CLEO2005, CPDA6)2005
- Author(s)
  Y. Sakurai, A. Matsutani, T. Sakaguchi and F. Koyama
- Organizer
  Conference on Lasers and Electro-Optics
- Place of Presentation
  Baltimore, USA
- Year and Date
  2005-05-09
- Data Source
  KAKENHI-PROJECT-17068006
[Presentation] 半導体プロセスを用いた細胞サイズ分離用マイクロピラー構造の製作
- Author(s)
  松谷晃宏，髙田綾子
- Organizer
  2012年秋季第73回応用物理学会学術講演会，12p-PB3-3
- Place of Presentation
  愛媛大学
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] Ar/F2気相エッチングにより製作したSiマイクロ流路を用いた大腸菌細胞の輸送
- Author(s)
  松谷晃宏，髙田綾子
- Organizer
  第4回集積化ＭＥＭＳ技術研究ワークショップ
- Place of Presentation
  大阪府立大学
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] Dry Etching of 4H-SiC using Ar/F2 Plasma
- Author(s)
  Akihiro Matsutani,Fumio Koyama
- Organizer
  27th International Microprocesses and Nanotechnology Conference, MNC2014
- Place of Presentation
  Hilton Fukuoka Sea Hawk
- Year and Date
  2014-11-04 – 2014-11-07
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Electro-Thermal Tuning of Athermal 850nm VCSELs with Thermally Actuated T-shape Membrane Structure
- Author(s)
  Hayato Sano, Norihiko Nakata, Masanori Nakahama, Akihiro Matsutani and Fumio Koyama
- Organizer
  IPC2012
- Place of Presentation
  Burlingame, USA
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] On-Chip Electro-Thermal Beam Steering based on Slow-light Bragg Reflector Waveguide Laterally Integrated with VCSEL
- Author(s)
  Toshikazu Shimada, Akihiro Matsutani and Fumio Koyama
- Organizer
  IPC2012
- Place of Presentation
  Burlingame, USA
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Single-Cell Isolation of Bacteria Using Microenclosure and Its Applications
- Author(s)
  Akihiro Matsutani and Ayako Takada
- Organizer
  RSC Tokyo Conference, A001
- Place of Presentation
  幕張メッセ
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] Microfabrication of Single-Cell Isolation Structure on Vertical Cavity Surface Emitting Laser Wafer
- Author(s)
  Akihiro Matsutani and Ayako Takada
- Organizer
  第29回「センサ・マイクロマシンと応用システム」シンポジウム，SPLN-10
- Place of Presentation
  北九州国際会議場
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] Push-pull modulation of lateral coupling of dual VCSEL cavities using a bow-tie shape
- Author(s)
  Hamed Dalir, Akihiro Matsutani and Fumio Koyama
- Organizer
  Photonics West 2013
- Place of Presentation
  San Francisco, USA
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] マイクロピラー構造を用いた大腸菌と酵母の単一細胞分離とサイズ分離
- Author(s)
  松谷晃宏，髙田綾子
- Organizer
  2013年第60回応用物理学会春季学術講演会，27p-B6-10
- Place of Presentation
  神奈川工科大学
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] Microfabrication of 4H-SiC by Reactive Ion Etching Using XeF2 Plasma
- Author(s)
  Akihiro Matsutani,Fumio Koyama
- Organizer
  2014 International Symposium on Dry Process, DPS2014
- Place of Presentation
  Annex Hall of the PACIFICO YOKOHAMA
- Year and Date
  2014-11-27 – 2014-11-28
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Giant Electro-thermal Phase-shift in Low-Polarization Dependent Slow Light Bragg Reflector Waveguide
- Author(s)
  Aumi Fuchida Akihiro Matsutani and Fumio Koyama
- Organizer
  IPC2012
- Place of Presentation
  Burlingame, USA
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] InP基板上に製作したマイクロ囲いを用いた出芽酵母の培養
- Author(s)
  松谷晃宏，髙田綾子
- Organizer
  第28回化学とマイクロ・ナノシステム学会
- Place of Presentation
  イーグレ姫路
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] マイクロ牧場アレイを用いた出芽酵母の培養
- Author(s)
  松谷晃宏，髙田綾子
- Organizer
  第74回応用物理学会秋季学術講演会
- Place of Presentation
  同志社大学
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] トップダウン・ボトムアップ統合アプローチによるポリスチレン四重極子の作製
- Author(s)
  高橋毅、松谷晃宏、庄司大、西岡國生、佐藤美那、磯部敏宏、中島章、松下祥子
- Organizer
  応用物理学会
- Place of Presentation
  東海大学
- Year and Date
  2015-03-11 – 2015-03-14
- Data Source
  KAKENHI-PROJECT-25420707
[Presentation] Large Enhancement in Modulation Bandwidth of Low-Voltage Slow Light Bragg Reflector Waveguide Modulator
- Author(s)
  Xiaodong Gu,Ayako Suzuki,Hamed Dalir,Akihiro Matsutani,Fumio Koyama
- Organizer
  The OptoElectronics and Communication Conference 2014,
- Place of Presentation
  The Melbourne Convention and Exhibition Centre
- Year and Date
  2014-07-06 – 2014-07-10
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Single-Cell Isolation and Sizing of Microorganisms by Microenclosure Array with Multipillar Structure
- Author(s)
  Akihiro Matsutani and Ayako Takada
- Organizer
  MNC2012, 1P-7-83
- Place of Presentation
  Kobe
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] Giant wavelength-temperature dependence of 850nm VCSELs with a metal/semiconductor thermally actuated mirror
- Author(s)
  Masanori Nakahama, Hayato Sano, Syunya Inoue, Akihiro Matsutani, Takahiro Sakaguchi, Fumio Koyama
- Organizer
  Photonics West 2013
- Place of Presentation
  San Francisco, USA
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Compact Bragg Reflector Waveguide Modulator Based on VCSEL Structure with Low Driving Voltage below 0.5 V
- Author(s)
  Xiaodong Gu, Toshikazu Shimada, Satoshi Shimizu, Akihiro Matsutani and Fumio Koyama
- Organizer
  ISLC2012
- Place of Presentation
  San Diego, USA
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] High-resolution Wavelength Demultiplexer Based on a Bragg Reflector Waveguide Amplifier with Large Angular Dispersion
- Author(s)
  Xiaodong Gu, Toshikazu Shimada, Akihiro Matsutani, Fumio Koyama
- Organizer
  ECOC2012
- Place of Presentation
  Amsterdam, Netherlands
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Athermal Operation and Wavelength Tuning of VCSELs　with Thermally Actuated MEMS Structure
- Author(s)
  Hayato Sano, Norihiko Nakata, Masanori Nakahama, Akihiro Matsutani and Fumio Koyama
- Organizer
  iNOW 2012
- Place of Presentation
  Berkeley, USA
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] 細菌細胞のプラズマエッチングマスクへの応用
- Author(s)
  松谷晃宏，髙田綾子
- Organizer
  2012年度東京工業大学技術部技術発表会，6
- Place of Presentation
  東京工業大学
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] Athermal multi-wavelength VCSEL array employing thermally actuated micromachined mirrors
- Author(s)
  Masanori Nakahama,Takahiro Sakaguchi,Akihiro Matsutani,Fumio Koyama
- Organizer
  IEEE International Semiconductor Laser Conference
- Place of Presentation
  Meria Palas Atenea(Palma de Mallorca)
- Year and Date
  2014-09-07 – 2014-09-10
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Beam scanner integrated VCSEL with electro-thermal wavelength tuning
- Author(s)
  Toshikazu Shimada,Hamed Dalir,Akihiro Matsutani,Fumio Koyama
- Organizer
  IEEE International Semiconductor Laser Conference
- Place of Presentation
  Meria Palas Atenea(Palma de Mallorca)
- Year and Date
  2014-09-07 – 2014-09-10
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Fabrication of SiC Membrane HCG Blue Reflector Using Nanoimprint Lithography
- Author(s)
  Ying-Yu Lai,Akihiro Matsutani,Tien-Chang Lu,Shing-Chung Wang,Fumio Koyama
- Organizer
  Photonics West2015
- Place of Presentation
  The Moscone Center(San Francisco)
- Year and Date
  2015-02-07 – 2015-02-12
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Microfabrication of Si based Microchannel for Transport of Bacterial Cells by Ar/F2 Vapor Etching and Cl2 Inductively Coupled Plasma Etching
- Author(s)
  Akihiro Matsutani, Hideo Ohtsuki and Ayako Takada
- Organizer
  11th APCPST, 2-P83
- Place of Presentation
  京都大学
- Data Source
  KAKENHI-PROJECT-23510141
[Presentation] Athermal and Widely Tunable VCSEL with Bimorph Micromachined Mirror
- Author(s)
  Masanori Nakahama,Takahiro Sakaguchi,Akihiro Matsutani,Fumio Koyama
- Organizer
  The OptoElectronics and Communication Conference 2014
- Place of Presentation
  The Melbourne Convention and Exhibition Centre
- Year and Date
  2014-07-06 – 2014-07-10
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Improvement in Crosstalk of 200-Port Bragg Reflector Waveguides Array-based Wavelength Selective Switch
- Author(s)
  Xiaodong Gu,Kenya Suzuki,Yuichiro Ikuma,Akihiro Matsutani,Fumio Koyama
- Organizer
  IEEE Photonics Conference, IPC2014
- Place of Presentation
  Hyatt Regency La Jolla(San Diego)
- Year and Date
  2014-10-12 – 2014-10-16
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Thermal and Electrical Beam Steering on a GaInAs/GaAs Slow-light Bragg Waveguide Amplifier
- Author(s)
  Xiaodong Gu, Toshikazu Shimada, Ayumi Fuchida, Akihiro Matsutani, Akihiro Imamura, Fumio Koyama
- Organizer
  CLEO 2012
- Place of Presentation
  San Jose, USA
- Data Source
  KAKENHI-PROJECT-22226008
[Presentation] Lateral Integration of MEMS VCSEL and Slow Light Amplifier for High Single-mode Output Power
- Author(s)
  Masanori Nakahama, Xiaodong Gu, Toshikazu Shimada, Hayato Sano, Akihiro Matsutani and Fumio Koyama
- Organizer
  iNOW 2012
- Place of Presentation
  Berkeley, USA
- Data Source
  KAKENHI-PROJECT-22226008

1. KOYAMA Fumio (30178397)

# of Collaborated Projects: 4 results

# of Collaborated Products: 138 results
2. SAKAGUCHI Takahiro (70215622)

# of Collaborated Projects: 4 results

# of Collaborated Products: 25 results
3. UENOHARA Hiroyuki (20334526)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
4. KONISHI Tsuyoshi (90283720)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
5. WADA Naoya (20358873)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
6. TAKADA Ayako (20401565)

# of Collaborated Projects: 2 results

# of Collaborated Products: 38 results
7. Matsushita Sachiko (50342853)

# of Collaborated Projects: 2 results

# of Collaborated Products: 0 results
8. Hatano Mutsuko (00417007)

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
9. IWASAKI Takayuki (80454031)

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
10. NAGATA Tetsuya (80208016)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
11. 入部正継 (60469228)

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
12. 山本広大 (70738319)

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
13. 松下・I 祥子

# of Collaborated Projects: 0 results

# of Collaborated Products: 17 results
14. 木野勝

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
15. 顧暁冬

# of Collaborated Projects: 0 results

# of Collaborated Products: 3 results

Matsutani Akihiro 松谷 晃宏

MATSUTANI Akihiro 松谷 晃宏

松谷 晁宏 マツタニ アキヒロ

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Development of teaching materials for STEAM education by optical experiments using spherical micro-particles and coffee ring effectPrincipal Investigator

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A study of two-dimensional array manipulation technique and single-cell isolation using two-dimensional micro-concave mirror array and Koehler illuminationPrincipal Investigator

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A study of transport of cells and single-cell isolation technology by combination of semiconductor microfabrication processes and Chladni patternsPrincipal Investigator

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Fabrication of single cell isolation structure and very narrow slit cell separation microchannel by semiconductor processingPrincipal Investigator

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AStudy on Dry etching of C_aF_2using H_2O Vapor Plasma and Solid Source H_2O PlasmaPrincipal Investigator

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Matsutani Akihiro 松谷晃宏

MATSUTANI Akihiro 松谷晃宏

松谷晁宏マツタニアキヒロ