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Matsutani Akihiro  松谷 晃宏

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MATSUTANI Akihiro  松谷 晃宏

松谷 晁宏  マツタニ アキヒロ

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Researcher Number 40397047
Other IDs
Affiliation (Current) 2023: 東京工業大学, オープンファシリティセンター, 主任技術専門員
Affiliation (based on the past Project Information) *help 2021 – 2022: 東京工業大学, オープンファシリティセンター, 主任技術専門員
2020 – 2021: 東京工業大学, オープンファシリティセンター, 技術職員
2019: 東京工業大学, オープンファシリティセンター, 主任技術専門員
2017 – 2018: 東京工業大学, 技術部, 主任技術専門員
2014 – 2016: 東京工業大学, 技術部, 技術専門員 … More
2013 – 2016: 東京工業大学, 技術部, 技術職員
2013: 東京工業大学, 学内共同利用施設等, その他
2012: 東京工業大学, 学内共同利用施設等, 技術職員
2007 – 2012: Tokyo Institute of Technology, Technical Department, Technical Staff
2009: 東京工業大学, 精密工学研究所, 技術専門員
2007: Tokyo Institute of Technology, 技術部半導体MEMS支援センター, 技術専門員
2005 – 2007: 東京工業大学, 精密工学研究所, 技術専門員 Less
Review Section/Research Field
Principal Investigator
Microdevices/Nanodevices / Nano/Microsystems
Except Principal Investigator
Communication/Network engineering / Electron device/Electronic equipment / Science and Engineering / Applied optics/Quantum optical engineering / Inorganic materials/Physical properties / Electronic materials/Electric materials / Basic Section 36020:Energy-related chemistry / Medium-sized Section 16:Astronomy and related fields
Keywords
Principal Investigator
半導体プロセス技術 / 細胞分離 / バイオチップ / リソグラフィ / プラズマ加工 / ナノマイクロバイオシステム / 単一細胞分離 / マイクロバイオシステム / 単一細胞 / プラズマプロセス … More / マイクロ・ナノデバイス / マイクロ流路 / 半導体プロセス / 液体定在波 / ナノ・マイクロ科学 / マイクロレンズ / マイクロプロセス / 流路レス凝集法 / 流路レス凝集 / 半導体微細化 / マイクロマシン / ドライエッチング / 蛍石 / 高密度プラズマ / 紫外光源 / 光デバイス / プラズマ / 水蒸気 / 固体ソース / plasma processing / semiconductor microfabrication / micromachine / dry etching / fluorite / high density plasma / ultraviolet / optical devices / 細胞捕獲 / スンプ法 / 凹面鏡 / 細胞マニピュレーション / マイクロ凹面鏡 / エッチング / 細胞操作技術 … More
Except Principal Investigator
光通信 / 光デバイス / マイクロマシン / 半導体レーザ / 光集積回路 / 面発光レーザ / 光信号処理 / 光インターコネクト / フォトニックネットワーク / 電子デバイス・機器 / 光物性 / マイロマシン / 高速変調 / 波長可変レーザ / スローライト / 光回路 / 回折格子 / フォトニック結晶 / 電気化学 / リソグラフィー / 3次元 / 酸化チタン / ボトムアップ / ナノ構造 / プラズモン / 光熱変換 / 光圧 / ナノ加工 / 微細構造 / 自己集積 / ナノ構造作製 / 反応性イオンエッチング / 電解液 / 屈折率 / 誘電率 / 太陽電池 / 傾斜エッチング / フナトニックネットワーク / photonic network / electronic device / optical physics / 電子・電気材料 / 再生可能エネルギー / ゼロカーボン / 熱エネルギー / 熱電 / 半導体 / 低炭素社会 / ゼロカーボンエネルギー / 熱エネルギー変換 / SDGs / 太陽系外惑星 / 極限補償光学 / 直接撮像 / コロナグラフ / 赤外線天文学 / 太陽系外惑星探査 / 直接撮像観測 / 装置開発 / FPGAによる多入出力で高速な制御 / 光学的波面形状の直接計測 Less
  • Research Projects

    (14 results)
  • Research Products

    (244 results)
  • Co-Researchers

    (14 People)
  •  Efficiency definition in sensitized thermal cells

    • Principal Investigator
      松下 祥子
    • Project Period (FY)
      2021 – 2024
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Review Section
      Basic Section 36020:Energy-related chemistry
    • Research Institution
      Tokyo Institute of Technology
  •  Characterization of Jovian Exo-Planets by Direct imaging with a Segmented Mirror Telescope

    • Principal Investigator
      長田 哲也
    • Project Period (FY)
      2018 – 2022
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Review Section
      Medium-sized Section 16:Astronomy and related fields
    • Research Institution
      Kyoto University
  •  A study of two-dimensional array manipulation technique and single-cell isolation using two-dimensional micro-concave mirror array and Koehler illuminationPrincipal Investigator

    • Principal Investigator
      Matsutani Akihiro
    • Project Period (FY)
      2017 – 2019
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Nano/Microsystems
    • Research Institution
      Tokyo Institute of Technology
  •  A study of transport of cells and single-cell isolation technology by combination of semiconductor microfabrication processes and Chladni patternsPrincipal Investigator

    • Principal Investigator
      Matsutani Akihiro
    • Project Period (FY)
      2014 – 2016
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Nano/Microsystems
    • Research Institution
      Tokyo Institute of Technology
  •  Ultra-low power consumption devices utilizing new two-dimensional diamond film

    • Principal Investigator
      Hatano Mutsuko
    • Project Period (FY)
      2014 – 2015
    • Research Category
      Grant-in-Aid for Challenging Exploratory Research
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      Tokyo Institute of Technology
  •  Electrochemical Photonic Crystal with Light Inhibition Ability

    • Principal Investigator
      Matsushita Sachiko
    • Project Period (FY)
      2013 – 2016
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Inorganic materials/Physical properties
    • Research Institution
      Tokyo Institute of Technology
  •  Fabrication of single cell isolation structure and very narrow slit cell separation microchannel by semiconductor processingPrincipal Investigator

    • Principal Investigator
      MATSUTANI Akihiro
    • Project Period (FY)
      2011 – 2013
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Microdevices/Nanodevices
    • Research Institution
      Tokyo Institute of Technology
  •  Advances of integrated photonics for ultra-low power consumption optical interconnects

    • Principal Investigator
      KOYAMA FUMIO
    • Project Period (FY)
      2010 – 2014
    • Research Category
      Grant-in-Aid for Scientific Research (S)
    • Research Field
      Electron device/Electronic equipment
    • Research Institution
      Tokyo Institute of Technology
  •  面発光レーザ集積アレイの波長エンジニアリング

    • Principal Investigator
      小山 二三夫
    • Project Period (FY)
      2010
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Electron device/Electronic equipment
    • Research Institution
      Tokyo Institute of Technology
  •  A study on ultra-high-speed all-optical forward error correction technique

    • Principal Investigator
      UENOHARA Hiroyuki
    • Project Period (FY)
      2008 – 2010
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Communication/Network engineering
    • Research Institution
      Tokyo Institute of Technology
  •  New Functions of VCSEL Photonics

    • Principal Investigator
      KOYAMA Fumio
    • Project Period (FY)
      2007 – 2009
    • Research Category
      Grant-in-Aid for Scientific Research (A)
    • Research Field
      Applied optics/Quantum optical engineering
    • Research Institution
      Tokyo Institute of Technology
  •  AStudy on Dry etching of C_aF_2using H_2O Vapor Plasma and Solid Source H_2O PlasmaPrincipal Investigator

    • Principal Investigator
      MATSUTANI Akihiro
    • Project Period (FY)
      2006 – 2007
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Microdevices/Nanodevices
    • Research Institution
      Tokyo Institute of Technology
  •  Widely Tunable Hollow Optical Waveguides and Their Applications for Photonic Network Devices

    • Principal Investigator
      KOYAMA Fumio
    • Project Period (FY)
      2005 – 2008
    • Research Category
      Grant-in-Aid for Scientific Research on Priority Areas
    • Review Section
      Science and Engineering
    • Research Institution
      Tokyo Institute of Technology
  •  AStudy on Ultrahigh-speed optical forward error detection technique with optical data processing

    • Principal Investigator
      UENOHARA Hiroyuki
    • Project Period (FY)
      2005 – 2007
    • Research Category
      Grant-in-Aid for Scientific Research (B)
    • Research Field
      Communication/Network engineering
    • Research Institution
      Tokyo Institute of Technology

All 2021 2020 2019 2018 2017 2016 2015 2014 2013 2012 2011 2010 2009 2008 2007 2006 2005 Other

All Journal Article Presentation

  • [Journal Article] Direct observation of spherical aberration under microscope using concave micromirrors2020

    • Author(s)
      Akihiro Matsutani
    • Journal Title

      European Journal of Physics

      Volume: -

    • DOI

      10.1088/1361-6404/ab90df

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17K05020
  • [Journal Article] Microfabrication of Concave Micromirror for Microbial Cell Trapping Using K?hler Illumination by XeF2 Vapor Etching2019

    • Author(s)
      Akihiro Matsutani, Mina Sato, Koichi Hasebe, Ayako Takada
    • Journal Title

      Sensors and Materials

      Volume: 31 Issue: 4 Pages: 1325-1334

    • DOI

      10.18494/sam.2019.2235

      10.18494/SAM.2019.2235

    • ISSN
      0914-4935, 2435-0869
    • Language
      English
    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-17K05020
  • [Journal Article] Celluloid Microenclosure and Microlens Array Fabricated by SUMP method and XeF2 Vapor Etching for Microbial Analysis2018

    • Author(s)
      Akihiro Matsutani, Ayako Takada
    • Journal Title

      Sensors and Materials

      Volume: 30 Pages: 149-155

    • DOI

      10.18494/sam.2018.1729

      10.18494/SAM.2018.1729

    • ISSN
      0914-4935, 2435-0869
    • Language
      English
    • Peer Reviewed / Open Access
    • Data Source
      KAKENHI-PROJECT-17K05020, KAKENHI-PROJECT-15K14690
  • [Journal Article] Optical performance of Au hemispheric sub-microstructure on polystyrene quadrumer2017

    • Author(s)
      3.Tsuyoshi Takahashi, Akihiro Matsutani, Dai Shoji, Kunio Nishioka, Mina Sato, Takayuki Okamoto, Tomotarou Ezaki, Toshihiro Isobe, Akira Nakajima, Sachiko Matsushita
    • Journal Title

      Colloids. Surf. A

      Volume: 513 Pages: 51-56

    • DOI

      10.1016/j.colsurfa.2016.11.033

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-25420707
  • [Journal Article] Microchannel-free collection and single-cell isolation of yeast cells in a suspension using liquid standing wave2016

    • Author(s)
      Akihiro Matsutani, Ayako Takada
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 55 Issue: 11 Pages: 118006-118006

    • DOI

      10.7567/jjap.55.118006

    • ISSN
      0021-4922, 1347-4065
    • Peer Reviewed / Acknowledgement Compliant / Open Access
    • Data Source
      KAKENHI-PROJECT-26390037, KAKENHI-PROJECT-15K14690
  • [Journal Article] Compact Wavelength Selective Switch Using a Bragg Reflector Waveguide Array with Ultra-Large Number (>100) of Output-Ports2015

    • Author(s)
      Xiaodong Gu,Kenya Suzuki,Yuichiro Ikuma,Kazunori Seno,Hiromasa Tanobe,Akihiro Matsutani,Fumio Koyama
    • Journal Title

      IEEE Journal of Lightwave Technology

      Volume: vol. 33, no. 7 Pages: 1358-1364

    • DOI

      10.1109/jlt.2014.2386324

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-22226008, KAKENHI-PROJECT-13J03062, KAKENHI-PROJECT-26630152
  • [Journal Article] Single-Cell Isolation and Size Sieving Using Microenclosure Array for Microbial Analysis2015

    • Author(s)
      Akihiro Matsutani, Ayako takada
    • Journal Title

      Sensors and Materials

      Volume: 27 Pages: 383-390

    • DOI

      10.18494/sam.2015.1077

      10.18494/SAM.2015.1077

    • ISSN
      0914-4935, 2435-0869
    • Peer Reviewed / Acknowledgement Compliant / Open Access
    • Data Source
      KAKENHI-PROJECT-26390037, KAKENHI-PROJECT-15K14690
  • [Journal Article] Microfabrication for a polystyrene quadrupole by template-assisted self-assembly2015

    • Author(s)
      Tsuyoshi Takahashi, Akihiro Matsutani, Dai Shoji, Kunio Nishioka, Mina Sato, Toshihiro Isobe, Akira Nakajima, Sachiko Matsushita
    • Journal Title

      Colloid. Surf. A

      Volume: 484 Pages: 75-80

    • DOI

      10.1016/j.colsurfa.2015.07.057

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-25420707
  • [Journal Article] Simple fabrication of micro-polygons and micro-honeycombs utilizing thermal deformation of monolayer colloidal crystals during reactive ion etching2015

    • Author(s)
      Shoya Sano, Kunio Nishioka, Akihiro Matsutani, Toshihiro Isobe, Akira Nakajima, Sachiko Matsushita
    • Journal Title

      Colloid. Surf. A

      Volume: 486 Pages: 1-5

    • DOI

      10.1016/j.colsurfa.2015.09.019

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-25420707
  • [Journal Article] Athermalization and on-chip multi-wavelength integration of VCSELs employing thermally actuated micromachined mirrors2014

    • Author(s)
      M. Nakahama, T. Sakaguchi, A. Matsutani, F. Koyama
    • Journal Title

      Applied Physics Letters

      Volume: 105

    • DOI

      10.1063/1.4895337

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-13J08625, KAKENHI-PROJECT-22226008
  • [Journal Article] Highly angular dependent high-contrast grating mirror and its application for transverse-mode control of VCSELs2014

    • Author(s)
      Shunya Inoue,Junichi Kashino,Akihiro Matsutani,Hideo Ohtsuki,Takahiro Miyashita,Fumio Koyama
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: vol. 53, no. 9 Issue: 9 Pages: 090306-090306

    • DOI

      10.7567/jjap.53.090306

    • NAID

      210000144420

    • ISSN
      0021-4922, 1347-4065
    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Journal Article] Angled Etching of (001) Rutile Nb-TiO2 Substrate by SF6 Based Capacitive Coupled Plasma2014

    • Author(s)
      Akihiro Matsutani, Kunio Nishioka, Mina Sato, Dai Shoji, Daito Kobayashi, Toshihiro Isobe, Akira Nakajima, Tetsu Tatsuma, and Sachiko Matsushita
    • Journal Title

      Jpn. J. Appl. Phys

      Volume: in press

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-25420707
  • [Journal Article] Fluorinated graphene FETs controlled by Ionic Liquid Gate2014

    • Author(s)
      Furuyama, K. Tahara, A. Matsutani, T. Iwasaki, M. Hatano,
    • Journal Title

      IEEE Display Technology, Vol.10 , 962 - 965 (2014)

      Volume: Vol.10 Pages: 962-965

    • DOI

      10.1109/jdt.2014.2332636

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-26630125
  • [Journal Article] Lateral Integration of Vertical Cavity Surface Emitting Laser and Slow Light Bragg Reflector Waveguide Devices2014

    • Author(s)
      Toshikazu Shimada, Akihiro Matsutani and Fumio Koyama
    • Journal Title

      Applied Optics

      Volume: vol.53, no.9 Pages: 1766-1774

    • DOI

      10.1364/ao.53.001766

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Journal Article] 20μm long slow-light Bragg reflector waveguide modulator with over 20GHz modulation bandwidth2014

    • Author(s)
      Xiaodong Gu (顧 暁冬), Ayako Suzuki, Akihiro Matsutani, Fumio Koyama
    • Journal Title

      Applied Physics Express

      Volume: 7 Issue: 11 Pages: 114101-114101

    • DOI

      10.7567/apex.7.114101

    • ISSN
      1882-0778, 1882-0786
    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-13J03062, KAKENHI-PROJECT-22226008
  • [Journal Article] Generation of vortex beam using Bragg reflector waveguide2014

    • Author(s)
      Shota Mochizuki, Xiaodong Gu, Kenji Tanabe, Akihiro Matsutani, Moustafa Ahmed, Ahmed Bakry and Fumio Koyama
    • Journal Title

      Applied Physics Express

      Volume: vol.7, no.2 Issue: 2 Pages: 022502-022502

    • DOI

      10.7567/apex.7.022502

    • NAID

      210000136960

    • ISSN
      1882-0778, 1882-0786
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Journal Article] High Frequency Modulation of Transverse-Coupled-Cavity VCSELs for Radio over Fiber Applications2014

    • Author(s)
      Hamed Dalir, Akihiro Matsutani , Moustafa Ahmed, Ahmed Bakry and Fumio Koyama
    • Journal Title

      IEEE Photonics Technology Letters

      Volume: Vol.26 no. 3 Pages: 281-284

    • DOI

      10.1109/lpt.2013.2292577

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-12J09691, KAKENHI-PROJECT-22226008
  • [Journal Article] Slow-light Bragg reflector waveguide array for two-dimensional beam steering2014

    • Author(s)
      Kensuke Nakamura, Akihiro Matsutani, Moustafa Ahmed, Ahmed Bakry and Fumio Koyama
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: vol. 53, no. 3 Issue: 3 Pages: 038001-038001

    • DOI

      10.7567/jjap.53.038001

    • NAID

      210000143457

    • ISSN
      0021-4922, 1347-4065
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Journal Article] Athermal and widely tunable VCSEL with bimorph micromachined mirror2014

    • Author(s)
      M. Nakahama, T. Sakaguchi, A. Matustani and F. Koyama
    • Journal Title

      Optics Express

      Volume: 22 Pages: 21471-21479

    • DOI

      10.1364/oe.22.021471

    • Peer Reviewed / Acknowledgement Compliant
    • Data Source
      KAKENHI-PROJECT-13J08625, KAKENHI-PROJECT-22226008
  • [Journal Article] Wavelength tuning and controlled temperature dependence in vertical-cavity surface-emitting lasers with a thermally and electrostatically actuated cantilever structure2014

    • Author(s)
      Masanori Nakahama, Fumio Koyama, et al.
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 53 Issue: 1 Pages: 010303-010303

    • DOI

      10.7567/jjap.53.010303

    • NAID

      210000143229

    • ISSN
      0021-4922, 1347-4065
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-13J08625, KAKENHI-PROJECT-22226008
  • [Journal Article] Fabrication of Silicon Microchannel for Transport of Bacterial Cells by Ar/F_2 Vapor Etching Process2013

    • Author(s)
      A. Matsutani, and A. Takada
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 52 Issue: 4R Pages: 047001-047001

    • DOI

      10.7567/jjap.52.047001

    • NAID

      210000141963

    • ISSN
      0021-4922, 1347-4065
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23510141, KAKENHI-PROJECT-23658073
  • [Journal Article] Low polarization dependent beam deflector based on Bragg reflector waveguide for C-band wavelength demultiplexing2013

    • Author(s)
      Xiaodong Gu, Akihiro Matsutani, Fumio Koyama
    • Journal Title

      Journal of Applied Physics

      Volume: 114

    • DOI

      10.1063/1.4828715

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-13J03062, KAKENHI-PROJECT-22226008
  • [Journal Article] 35-μm Bragg Reflector Waveguide Modulator for High-Speed and Energy-Saving Operation2013

    • Author(s)
      Xiaodong Gu, Toshikazu Shimada, Akihiro Matsutani, Furnio Koyama
    • Journal Title

      IEEE Photonics Technology Letter

      Volume: 25 Pages: 1766-1769

    • DOI

      10.1109/lpt.2013.2275190

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-13J03062, KAKENHI-PROJECT-22226008
  • [Journal Article] Low-polarization dependent thermo-optic phase-shift in slow light Bragg reflector waveguide for beam steering and optical switching2013

    • Author(s)
      Ayumi Fuchida, Akihiro Matsutani, Moustafa Ahmed, Ahmed Bakry and Fumio Koyama
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: vol. 53, no.1 Issue: 1 Pages: 010306-010306

    • DOI

      10.7567/jjap.53.010306

    • NAID

      210000143232

    • ISSN
      0021-4922, 1347-4065
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Journal Article] Tuning Characteristics of Monolithic MEMS VCSELs with Oxide Anti-reflection Layer2013

    • Author(s)
      Masanori Nakahama, Fumio Koyama, et. al.
    • Journal Title

      IEEE Photonics Technology Letter

      Volume: 25 Pages: 1747-1750

    • DOI

      10.1109/lpt.2013.2272732

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-13J08625, KAKENHI-PROJECT-22226008
  • [Journal Article] Compact Slow-Light Electro-Absorption Modulator Laterally Integrated with 980 nm Vertical-Cavity Surface-Emitting Laser2013

    • Author(s)
      Toshikazu Shimada, Akihiro Matsutani and Fumio Koyama
    • Journal Title

      Applied Physics Express

      Volume: no.6 Issue: 12 Pages: 122102-122102

    • DOI

      10.7567/apex.6.122102

    • ISSN
      1882-0778, 1882-0786
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Journal Article] Low-voltage electro-absorption optical modulator based on slow-light Bragg reflector waveguide2013

    • Author(s)
      Xiaodong Gu, Shoki Shimizu, Toshikazu Shimada, Akihiro Matsutani and Fumio Koyama
    • Journal Title

      Appl. Phys. Lett.

      Volume: 102

    • DOI

      10.1063/1.4789533

    • NAID

      120006582236

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Journal Article] Compact beam deflector based on slow-light Bragg reflector waveguide monolithically integrated with VCSEL2013

    • Author(s)
      Toshikazu Shimada, Akihiro Matsutani and Fumio Koyama
    • Journal Title

      IEICE Electronics Express

      Volume: vol.10, no.22 Issue: 22 Pages: 20130842-20130842

    • DOI

      10.1587/elex.10.20130842

    • NAID

      130003383497

    • ISSN
      1349-2543
    • Language
      English
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Journal Article] スローライトを利用した全反射光スイッチ2012

    • Author(s)
      淵田歩, 松谷晃宏, 小山二三夫
    • Journal Title

      電子情報通信学会論文誌C

      Volume: J95-C, No.4 Pages: 75-83

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Journal Article] Wavelength Trimming of Micro-Machined VCSELs2012

    • Author(s)
      Hayato Sano, Norihiko Nakata, Akihiro Matsutani, Fumio Koyama
    • Journal Title

      IEICE Trans.Electron.

      Volume: vol.E95-C Pages: 237-242

    • NAID

      10030609942

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Journal Article] Ultra-compact Beam Steering Device based on Bragg Reflector Waveguide Amplifier with Number of Resolution Points over 1002012

    • Author(s)
      Xiaodong Gu, Toshikazu Shimada, Ayumi Fuchida, Akihiro Matsutani, Akihiro Imamura, Fumio Koyama
    • Journal Title

      Electron.Lett.

      Volume: Vol.48, no.6 Pages: 336-337

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Journal Article] Microfabrication of Si and GaAs by Plasma Etching Process Using Bacterial Cells as an Etching Mask Material2012

    • Author(s)
      A. Matsutani and A. Takada
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 51 Issue: 8R Pages: 087001-087001

    • DOI

      10.1143/jjap.51.087001

    • NAID

      40019395655

    • ISSN
      0021-4922, 1347-4065
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-23510141, KAKENHI-PROJECT-23658073
  • [Journal Article] Ultra-high channel-count wavelength demultiplexer based on a Bragg reflector waveguide with large angular dispersion2012

    • Author(s)
      Xiaodong Gu, Toshikazu Shimada, Akihiro Matsutani, and Fumio Koyama
    • Journal Title

      OPTICS EXPRESS

      Volume: vol.20, no.26

    • DOI

      10.1364/oe.20.00b331

    • NAID

      120006582216

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Journal Article] スローライトを利用した全反射型光スイッチ2012

    • Author(s)
      淵田 歩, 松谷 晃宏, 小山 二三夫
    • Journal Title

      電子情報通信学会論文誌

      Volume: Vol.J, 95-C, no.4 Pages: 75-83

    • NAID

      110009436643

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Journal Article] Athermal and tunable operations of 850nm vertical cavity surface emitting lasers with thermally actuated T-shape membrane structure2012

    • Author(s)
      Hayato Sano
    • Journal Title

      Appl. Phys. Lett.

      Volume: 101 Pages: 121115-121115

    • DOI

      10.1063/1.4753807

    • NAID

      120006582211

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-10J09480, KAKENHI-PROJECT-22226008
  • [Journal Article] Fabrication and Characterization of Bragg Reflector Slow Light Waveguide with Oxide Lateral Confinement2012

    • Author(s)
      Ayumi Fuchida, Akihiro Matsutani, Fumio Koyama
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: Vol.51, no.4

    • NAID

      40019280020

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Journal Article] Giant Wavelength-temperature Dependence of a Micro-machined VCSEL with a Thermally Actuated Cantilever Structure2012

    • Author(s)
      Masanori Nakahama, Hayato Sano, Norihiko Nakata, Akihiro Matsutani, Fumio Koyama
    • Journal Title

      Jpn.J.Applied Physics

      Volume: Vol.51, no.4

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Journal Article] Miniature Non-mechanical Beam Deflector Based on Bragg Reflector Waveguide with a Number of Resolution-points Larger than 10002012

    • Author(s)
      Xiaodong Gu, Toshikazu Shimada, Akihiro Matsutani and Fumio Koyama
    • Journal Title

      IEEE Photon. J.

      Volume: Vol.4, no.5 Pages: 1712-1719

    • DOI

      10.1109/jphot.2012.2214206

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Journal Article] Electro-thermal Tuning of MEMS VCSEL with Giant Wavelength-temperature Dependence2012

    • Author(s)
      Masanori Nakahama, Hayato Sano, Norihiko Nakata, Akihiro Matsutani, Fumio Koyama
    • Journal Title

      Electronics Express

      Volume: Vol.9, no.5 Pages: 416-421

    • NAID

      130001922364

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Journal Article] Microfabrication of Si-Based High-Index-Contrast-Grating Structure by Thermal Nanoimprint Lithography and Cl<sub>2</sub>/Xe-Inductively Coupled Plasma Etching2012

    • Author(s)
      Akihiro Matsutani, Yuuki Hashidume, Hideo Ohtsuki and Fumio Koyama
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: Vol. 51 (2012), 06FF05 Issue: 6S Pages: 06FF05-06FF05

    • DOI

      10.1143/jjap.51.06ff05

    • NAID

      210000140770

    • ISSN
      0021-4922, 1347-4065
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Journal Article] Giant wavelength-temperature dependence of a micro-machined VCSEL with a thermally actuated cantilever structure2012

    • Author(s)
      Masanori Nakahama, Hayato Sano, Norihiko Nakata, Akihiro Matsutani, Fumio Koyama
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: Vol.51, no.4

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Journal Article] Electro-Thermal Beam Steering Using Bragg Reflector Waveguide Amplifier2012

    • Author(s)
      Xiaodong Gu, Toshikazu Shimada, Ayumi Fuchida, Akihiro Matsutani, Akihiro Imamura, Fumio Koyama
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: vol.51

    • NAID

      40019170201

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Journal Article] Beam Steering in GalnAs/GaAs Slow-light Bragg Reflector Waveguide Amplifier2011

    • Author(s)
      Xiaodong Gu, Toshikazu Shimada, Ayumi Fuchida, Akihiro Matsutani, Akihiro Imamura, Fumio Koyama
    • Journal Title

      Appl.Phys.Lett.

      Volume: vol.99, no.21

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Journal Article] Inductively Coupled Plasma Etching of Silicon Using Solid Iodine as an Etching Gas Source2011

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Journal Title

      Jpn.J.Appl.Phys.

      Volume: vol.50

    • NAID

      210000070710

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Journal Article] Multiplexing of Multi-Wavelength 1060-nm-Band GalnAs/GaAs Vertical Cavity Surface Emitting Laser Array Using Tapered Hollow Waveguide2011

    • Author(s)
      Akihiro Imamura, Akihiro Matsutani, Fumio Koyatna
    • Journal Title

      Applied Physics Express

      Volume: vol.4

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Journal Article] Slow-light total-intemal-reflection switch with bending angle of 30 deg2011

    • Author(s)
      Ayumi Fuchida, Akihiro Matsutani, Fumio Koyama
    • Journal Title

      Optics Letters

      Volume: vol.36, no.14. Pages: 2644-2646

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Journal Article] Reactive Ion Etching of Si Using Ar/F_2 Plasma2010

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Journal Title

      Jpn.J.App.Phys.

      Volume: vol.49, no.6

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22246047
  • [Journal Article] Reactive Ion Etching of Si Using Ar/F_2 Plasma2010

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Journal Title

      Jpn.J.App.Phys.

      Volume: vol.49, no.6

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Journal Article] Smooth and Vertical Profile Dry Etching od Si Using XeF2 Plasma2009

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Journal Title

      Jpn.J.Appl.Phys. vol.48

      Pages: 1-3

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Journal Article] Smooth and Vertical Profile Dry Etching of Si Using XeF2 Plasma2009

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Journal Title

      Jpn. J. Appl. Phys vol.48,06FE09

      Pages: 1-3

    • NAID

      210000066933

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Journal Article] Athermal 850nm Vertical Cavity Surface Emitting Lasers with Thermally Actuated Cantilever Structure2009

    • Author(s)
      Hayato Sano, Akihiro Matsutani, Fumio Koyama
    • Journal Title

      Appl.Phys.Exp. vol.2,

    • NAID

      10025087183

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Journal Article] Multiple-Wavelength Vertical-Cavity Surface-Emitting Lasers by Grading a Spacer Layer for Short-Reach Wavelength Division Multiplexing Applications2009

    • Author(s)
      Padullaparthi Babu Dayal, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
    • Journal Title

      Appl. Phys. Exp. vol.2,no.9

    • NAID

      10025517766

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Journal Article] Athermal 850nm Vertical Cavity Surface Emitting Lasers with Thermally Actuated Cantilever Structure2009

    • Author(s)
      Hayato Sano, Akihiro Matsutani, Fumio Koyama
    • Journal Title

      Appl. Phys. Exp. vol.2

    • NAID

      10025087183

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Journal Article] Multiple-Wavelength Vertical-Cavity Surface-Emitting Lasers by Grading a Spacer Layer for Short-Reach Wavelength Division Multiplexing Applications2009

    • Author(s)
      Padullaparthi Babu Dayal, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
    • Journal Title

      Appl.Phys.Exp. vol.2, no.9

    • NAID

      10025517766

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Journal Article] Characterization of H_2O-inductively coupled plasma for dry etching2008

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Journal Title

      Journal of Physics: Conference Series 100

      Pages: 62022-62022

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18510108
  • [Journal Article] Generation of Solid-Source H_2O Plasma and Its Application to Dry Etching of CaF_22008

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Journal Title

      Japanese Journal of Applied Physics 47(掲載決定)

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18510108
  • [Journal Article] Generation of Solid-Source H2O Plasma and Its Application to Dry Etching of CaF22008

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, and Fumio Koyama
    • Journal Title

      Jpn. J. Appl. Phys. vol.47

      Pages: 5113-5115

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068006
  • [Journal Article] Characterization of H2O-inductively coupled plasma for dry etching2008

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Journal Title

      J. Phys.

      Pages: 1-4

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Journal Article] Characterization of H_2O-inductively coupled plasma for dry etching2008

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Journal Title

      Journal of Physics: Conference Series(電子ジャーナル) 100

      Pages: 62022-62022

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18510108
  • [Journal Article] Generation of Solid-Source H_2O Plasma and Its Application to Dry Etching of CaF_22008

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Journal Title

      Japanese Journal of Applied Physics 47(In press)

    • Description
      「研究成果報告書概要(和文)」より
    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-18510108
  • [Journal Article] Characterization of H_2O-inductively coupled plasma for dry etching2008

    • Author(s)
      Akihiro, Matsutani, Hideo, Ohtsuki, Fumio, Koyama
    • Journal Title

      Journal of Physics 100, 062022(CONCERNED)

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-18510108
  • [Journal Article] Generation of solid-source H2O plasma and its application to dry etching of CaF22008

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Journal Title

      Jpn. J. Appl. Phys. Vol.47,no.6

      Pages: 5113-5115

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Journal Article] Generation of Solid-Source H2O Plasma and Its Application to Dry Etching of CaF22008

    • Author(s)
      Akihiro, Matsutani, Hideo, Ohtsuki, Fumio, Koyama
    • Journal Title

      Japanese Journal of. Appl. Phys 47(in press)(CONCERNED)

    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-18510108
  • [Journal Article] Generation of Solid-Source H2O Plasma and Its Application to Dry Etching of CaF22008

    • Author(s)
      A. Matsutani, H. Ohtsuki and F. Koyama
    • Journal Title

      Jpn. J. Appl. Phys. Vol. 47, no. 6

      Pages: 5113-5115

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068006
  • [Journal Article] 水蒸気導入によるエッチング用H_2O-ICPのプラズマ観測2007

    • Author(s)
      松谷彰宏, 大槻秀夫, 小山不二夫
    • Journal Title

      第24回「プラズマプロセシング研究会(SPP-24)」プロシーディングス

      Pages: 139-140

    • Data Source
      KAKENHI-PROJECT-18510108
  • [Journal Article] 水蒸気導入によるエッチング用H_2O-誘導結合プラズマ(ICP)の発光分光分析2007

    • Author(s)
      松谷彰宏, 大槻秀夫, 小山不二夫
    • Journal Title

      第54回応用物理学関係連合講演会講演予稿集 No.3

      Pages: 1480-1480

    • Data Source
      KAKENHI-PROJECT-18510108
  • [Journal Article] 液体ソースドライエッチングプロセスのためのH_2Oプラズマの生成2007

    • Author(s)
      松谷彰宏
    • Journal Title

      平成18年度名古屋大学総合技術研究会報告集 装置技術分科会

      Pages: 114-115

    • Data Source
      KAKENHI-PROJECT-18510108
  • [Journal Article] Wavelength Tuning of Double-Cavity Micromachined Filter with Electrical and Thermal Actuations2007

    • Author(s)
      Wiganes Janto, Akihiro Matsutani, Fumio Koyama
    • Journal Title

      OPTICAL REVIEW vol.14, no. 2

      Pages: 86-90

    • NAID

      10018912664

    • Data Source
      KAKENHI-PROJECT-17068006
  • [Journal Article] Wavelength Tuning of Double-Cavity Micromachined Filter with Electrical and Thermal Actuations2007

    • Author(s)
      W. Janto, A. Matsutani and F. Koyama
    • Journal Title

      OPTICAL REVIEW vol. 14, no. 2

      Pages: 86-90

    • NAID

      10018912664

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068006
  • [Journal Article] Tunable Planar Air-Core Resonator Based on Tunable Hollow Waveguide2006

    • Author(s)
      Yasuki Sakurai, Akihiro Matsutani, Takahiro Sakaguchi, Fumio Koyama
    • Journal Title

      Jpn.J.Appl.Phys vol.45,no.11(掲載決定)

    • NAID

      10018158678

    • Data Source
      KAKENHI-PROJECT-17068006
  • [Journal Article] Tunable stop-band hollow waveguide Bragg reflector with tapered air-core for adaptive dispersion-compensation2006

    • Author(s)
      Yasuki Sakurai, Akihiro Matsutani, Fumio Koyama
    • Journal Title

      Applied Physics Letters (掲載決定)

    • Data Source
      KAKENHI-PROJECT-17068006
  • [Journal Article] Tunable stop-band hollow waveguide Bragg reflector with tapered air-core for adaptive dispersion-compensation2006

    • Author(s)
      Y. Sakurai, A. Matsutani and F. Koyama
    • Journal Title

      Appl. Phys. Lett. vol.88, no. 12

      Pages: 121103-121103

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068006
  • [Journal Article] Tunable Planar Air-Core Resonator Based on Tunable Hollow Waveguide2006

    • Author(s)
      Y. Sakurai, A. Matsutani, T. Sakaguchi and F. Koyama
    • Journal Title

      Jpn. J. Appl. Phys vol.45, no. 11

    • NAID

      10018158678

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068006
  • [Journal Article] Solid Source Dry Etching Process for GaAs and InP2006

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Journal Title

      Jpn. J. Appl. Phys vol.45, no. 10B

      Pages: 8374-8377

    • NAID

      10018339878

    • Data Source
      KAKENHI-PROJECT-17068006
  • [Journal Article] Design, Fabrication, and Characterization of Tunable Micromachined Filter with Double-Cavity Structure2006

    • Author(s)
      Wiganes Janto, Akihiro Matsutani, Fumio Koyama
    • Journal Title

      Jpn. J. Appl. Phys vol.45, no. 10A

      Pages: 7732-7736

    • NAID

      40007462494

    • Data Source
      KAKENHI-PROJECT-17068006
  • [Journal Article] Solid Source Dry Etching Process for GaAs and InP2006

    • Author(s)
      A. Matsutani, Hideo Ohtsuki and F. Koyama
    • Journal Title

      Jpn. J. Appl. Phys. vol. 45, no. 10B

      Pages: 8374-8377

    • NAID

      10018339878

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068006
  • [Journal Article] Giant Bragg wavelength tuning of tunable hollow waveguide Bragg reflector2005

    • Author(s)
      Y. Sakurai, A. Matsutani, T. Sakaguchi and F. Koyama
    • Journal Title

      Jpn. J. Appl. Phys. vol. 44, no. 37

    • NAID

      130004533548

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068006
  • [Journal Article] Tunable Stop-Band Hollow Waveguide Bragge Reflector with Tapered Air-Core for Adaptive Dispersion-Compensation2005

    • Author(s)
      Yasuki Sakurai, Akihiro Matsutani, Fumio Koyama
    • Journal Title

      CLEO2005 CMP5

    • Data Source
      KAKENHI-PROJECT-17068006
  • [Journal Article] 160nm Continuous Wavelength Tuning of Tunable Hollow Waveguide Bragg Reflector2005

    • Author(s)
      Yasuki Sakurai, Akihiro Matsutani, Takahiro Sakaguchi, Fumio Koyama
    • Journal Title

      CLEO2005 CPDA6

    • Data Source
      KAKENHI-PROJECT-17068006
  • [Journal Article] Iodine Solid Source Inductively Coupled Plasma Etching of InP2005

    • Author(s)
      A. Matsutani, H. Ohtsuki and F. Koyama
    • Journal Title

      Jpn. J. Appl. Phys. vol.44, no.19

    • NAID

      10015726485

    • Peer Reviewed
    • Data Source
      KAKENHI-PROJECT-17068006
  • [Presentation] 点回折干渉計方式を用いた補償光学用波面センサの開発 (V245b)2021

    • Author(s)
      津久井遼、木野勝、山本広大、栗田光樹夫(京都大学)、松谷晃宏(東京工業大学)
    • Organizer
      日本天文学会2021年秋季年会
    • Data Source
      KAKENHI-PROJECT-18H03719
  • [Presentation] せいめい望遠鏡での極限補償光学に向けた波面センサの開発2021

    • Author(s)
      津久井遼、木野勝、山本広大、栗田光樹夫(京都大学)、松谷晃宏(東京工業大学)
    • Organizer
      赤外線学会第88回定例研究会
    • Invited
    • Data Source
      KAKENHI-PROJECT-18H03719
  • [Presentation] スンプ法によるセルロイドマイクロ時計皿アレイ細胞集積チップの製作2020

    • Author(s)
      松谷晃宏
    • Organizer
      第67回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-17K05020
  • [Presentation] Siマイクロ凹面鏡とケーラー照明光による酵母細胞の捕獲2019

    • Author(s)
      松谷晃宏,佐藤美那,長谷部浩一,髙田 綾子
    • Organizer
      第66回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-17K05020
  • [Presentation] Optical Characterization of Concave Micromirror Array for Microbial Cell Trapping Fabricated by Laser Lithography and SUMP Method2019

    • Author(s)
      A. Matsutani, A. Takada
    • Organizer
      MNC2019
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-17K05020
  • [Presentation] スンプ法とレーザー描画により製作したマイクロ凹面鏡の集光特性2019

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      第80回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-17K05020
  • [Presentation] XeF2気相エッチングにより製作した微生物細胞捕獲用Siマイクロ凹面鏡の集光実験2018

    • Author(s)
      松谷晃宏, 佐藤美那, 長谷部浩一, 髙田 綾子
    • Organizer
      第79回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-17K05020
  • [Presentation] XeF2気相エッチングによるSiマイクロ凹面鏡構造の製作2018

    • Author(s)
      松谷晃宏, 西岡國生,佐藤美那
    • Organizer
      第65回応用物理学会春季学術講演会
    • Data Source
      KAKENHI-PROJECT-17K05020
  • [Presentation] Microfabrication of Si-based Concave Micromirror Array for Microbial Cell Trapping by XeF2 Vapor Etching2018

    • Author(s)
      A. Matsutani, M. Sato, K. Hasebe, A. Takada
    • Organizer
      MNC 2018, 31st International Microprocesses and Nanotechnology Conference
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-17K05020
  • [Presentation] XeF2 気相エッチングとスンプ法により製作したセルロイドマイクロレンズによる酵母細胞の捕獲実験2017

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      第78回応用物理学会秋季学術講演会
    • Data Source
      KAKENHI-PROJECT-17K05020
  • [Presentation] XeF2気相エッチングとスンプ法によるセルロイドマイクロレンズアレイの製作2017

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      横浜市
    • Year and Date
      2017-03-15
    • Data Source
      KAKENHI-PROJECT-26390037
  • [Presentation] Profile Control in Si Etching by Two-step Etching Process Using XeF2 Vapor for Fabrication of Concave Micromirror2017

    • Author(s)
      A. Matsutani, A. Takada
    • Organizer
      39th International Symposium on Dry Process (DPS2017)
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-17K05020
  • [Presentation] Si/SiO2上金ナノ円盤の表面電位の光照射依存およびその構造依存性2016

    • Author(s)
      江崎 智太郎, 松谷 晃宏, 西岡 國生, 庄司 大, 佐藤 美那, 岡本 隆之, 磯部 敏宏, 中島 章, 松下 祥子
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ
    • Year and Date
      2016-09-13
    • Data Source
      KAKENHI-PROJECT-25420707
  • [Presentation] 液体定在波を利用した微生物細胞の流路レス凝集法におけるマイクロ囲いアレイを用いた大きさによる篩い分けと単一分離2016

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学
    • Year and Date
      2016-03-21
    • Data Source
      KAKENHI-PROJECT-26390037
  • [Presentation] Kelvin Probe Force Microscopic Images on Gold Nanodisks with and without Light Irradiation2016

    • Author(s)
      T. Ezaki, A. Matsutani, K. Nishioka, D. Shoji, M. Sato, T. Okamoto, T. Isobe, A. Nakajima, S. Matsushita
    • Organizer
      MRS 2016 fall meeting
    • Place of Presentation
      Boston, Massachusetts, USA
    • Year and Date
      2016-11-27
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-25420707
  • [Presentation] スンプ法により形成したセルロイド製単一細胞分離用プレートによる酵母細胞の分離2016

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      新潟市
    • Year and Date
      2016-09-14
    • Data Source
      KAKENHI-PROJECT-26390037
  • [Presentation] Single-cell isolation of S. Cerevisiae using celluloid microenclosure array formed by the SUMP method2016

    • Author(s)
      Akihiro Matsutani, Ayako Takada
    • Organizer
      29th international microprocesses and nanotechnology conference (MNC2016)
    • Place of Presentation
      Kyoto
    • Year and Date
      2016-11-10
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-26390037
  • [Presentation] Si上に形成した金ナノ円盤が示す表面電位差の光照射依存2016

    • Author(s)
      2.江崎 智太郎、松谷晃宏、西岡國生、庄司大、佐藤美那、岡本隆之、磯部 敏宏、中島 章、松下 祥子
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学
    • Year and Date
      2016-03-19
    • Data Source
      KAKENHI-PROJECT-25420707
  • [Presentation] 液体定在波を利用した酵母細胞の流路レス凝集パターンの形成における励振波形の効果2015

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2015-09-15
    • Data Source
      KAKENHI-PROJECT-26390037
  • [Presentation] Microfabrication of polystylene quadrupole combined with top-down and bottom-up approach2015

    • Author(s)
      T. Takahashi, A. Matsutani, D. Shoji, K. Nishioka, T. Isobe, A. Nakajima, S. Matsushita
    • Organizer
      Western Pacific Colloids Meeting 2015
    • Place of Presentation
      Western Pacific Colloids Meeting 2015
    • Year and Date
      2015-11-15
    • Int'l Joint Research
    • Data Source
      KAKENHI-PROJECT-25420707
  • [Presentation] 液体定在波を利用した酵母細胞の流路レス凝集パターンの振動周波数による制御2015

    • Author(s)
      松谷晃宏,高田綾子
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学
    • Year and Date
      2015-03-12
    • Data Source
      KAKENHI-PROJECT-26390037
  • [Presentation] タッピングによる酵母細胞の流路レス凝集パターン形成と単一細胞分離2015

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      第7回集積化MEMSシンポジウム
    • Place of Presentation
      朱鷺メッセ
    • Year and Date
      2015-10-29
    • Data Source
      KAKENHI-PROJECT-26390037
  • [Presentation] 低周波鉛直加振による液体定在波を利用した酵母細胞の流路レス凝集2014

    • Author(s)
      松谷晃宏,高田綾子
    • Organizer
      第31回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      くにびきメッセ
    • Year and Date
      2014-10-21
    • Data Source
      KAKENHI-PROJECT-26390037
  • [Presentation] 傾斜ドライエッチングを用いた酸化チタンフォトニック結晶の作製と評価2014

    • Author(s)
      小林 大斗,松谷晃宏,西岡國生,庄司大,佐藤美那,磯部敏宏,中島章,立間徹,松下祥子
    • Organizer
      応用物理学会
    • Place of Presentation
      青山学院大学
    • Data Source
      KAKENHI-PROJECT-25420707
  • [Presentation] Characteristics of Fluorinated Graphene Field Effect Transistors2014

    • Author(s)
      K. Tahara,T. Iwasaki, A. Matsutani, and M. Hatano,
    • Organizer
      Education Forum on Environment and Energy Science
    • Place of Presentation
      Perth, Australia
    • Year and Date
      2014-12-13
    • Data Source
      KAKENHI-PROJECT-26630125
  • [Presentation] フッ化グラフェン中のスピン緩和2014

    • Author(s)
      田原康佐,岩崎孝之,松谷晃宏,波多野睦子
    • Organizer
      第28回ダイヤモンドシンポジウム
    • Place of Presentation
      東京電機大学東京千住キャンパス
    • Year and Date
      2014-11-20
    • Data Source
      KAKENHI-PROJECT-26630125
  • [Presentation] Electro-thermally Tunable 850nm VCSELs with metal/semiconductor Thermally Actuated Mirror2013

    • Author(s)
      Masanori Nakahama, Hayato Sano, Shunya Inoue, Akihiro Matsutani, Takahiro Sakaguchi and Fumio Koyama
    • Organizer
      CLEO-PR
    • Place of Presentation
      Kyoto, Japan. Kyoto International conference Center
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Wavelength tuning and controlled temperature dependence of MEMS VCSELs with thermally and electrostatically actuated micromachined mirror2013

    • Author(s)
      Masanori Nakahama, Hayato Sano, Shunya Inoue, Takahiro Sakaguchi, AkihiroMatsutani, and Fumio Koyama
    • Organizer
      MOC2013
    • Place of Presentation
      Tokyo, Japan. Tokyo Institute of Technology
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Miniature Bragg Reflector Waveguide Beam Deflector for Full C-band Wavelength Demultiplexing with Low Polarization Dependence and High Resolution2013

    • Author(s)
      Xiaodong Gu, Kensuke Nakamura, Akihiro Matsutani and Fumio Koyama
    • Organizer
      CLEO 2013
    • Place of Presentation
      San Jose, USA. San Jose Convention Center
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Super-high Resolution Beam Steering Using Bragg Reflector Waveguides2013

    • Author(s)
      Xiaodong Gu, Toshikazu Shimada, Akihiro Matsutani and Fumio Koyama
    • Organizer
      iNOW2013
    • Place of Presentation
      Corsica, France
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Sub-1V and Sub-100μm Electro-absorption Modulator Based on Bragg Reflector Waveguide2013

    • Author(s)
      Xiaodong Gu, Syouki Shimizu, Toshikazu Shimada, Akihiro Matsutani and Fumio Koyama
    • Organizer
      CLEO-PR
    • Place of Presentation
      Kyoto, Japan. Kyoto International conference Center
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Creation of Vortex Beam based on Integrated Ring-shape Bragg Reflector Waveguide2013

    • Author(s)
      Shota Mochizuki, Xiaodong Gu, Akihiro Matsutani and Fumio Koyama
    • Organizer
      CLEO 2013
    • Place of Presentation
      San Jose, USA. San Jose Convention Center
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Sub-50μm Long Slow-light Electro-absorption Modulator Laterally Integrated with VCSEL2013

    • Author(s)
      Toshikazu Shimada, Akihiro Matsutani and Fumio Koyama
    • Organizer
      CLEO-PR
    • Place of Presentation
      Kyoto, Japan. Kyoto International conference Center
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] High-speed and low-voltage operation of compact Bragg reflector waveguide modulator2013

    • Author(s)
      Xiaodong Gu, Shouki Shimizu, Toshikazu Shimada, Akihiro Matsutani and Fumio Koyama
    • Organizer
      MOC2013
    • Place of Presentation
      Tokyo, Japan. Tokyo Institute of Technology
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Transverse Mode Control of VCSELs Using Angular Dependent High-contrast Grating Mirror2013

    • Author(s)
      Junichi Kashino, Shunya Inoue, Akihiro Matsutani, Hideo Ohtsuki, Takahiro Miyashita and Fumio Koyama
    • Organizer
      IPC2013
    • Place of Presentation
      Seattle, USA. Hyatt Regency Bellevue
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] マイクロピラー構造を用いた大腸菌と酵母の単一細胞分離とサイズ分離2013

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      2013年第60回応用物理学会春季学術講演会
    • Place of Presentation
      神奈川工科大学
    • Year and Date
      2013-03-27
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] InP 基板上に製作したマイクロ囲いを用いた出芽酵母の培養2013

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      第28回化学とマイクロ・ナノシステム学会
    • Place of Presentation
      イーグレ姫路
    • Year and Date
      2013-12-06
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] マイクロ牧場アレイを用いた出芽酵母の培養2013

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      2013年第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学
    • Year and Date
      2013-09-16
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] Ar/F_2気相エッチングにより製作したSiマイクロ流路を用いた大腸菌細胞の輸送2013

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      第4回集積化MEMS技術研究ワークショップ
    • Place of Presentation
      大阪府立大学
    • Year and Date
      2013-07-27
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] Modulation of Spatial Intensity Distribution of Laterally Coupled Twin VCSELs2013

    • Author(s)
      Hamed Dalir, Akihiro Matsutani and Fumio Koyama
    • Organizer
      CLEO-PR
    • Place of Presentation
      Kyoto, Japan. Kyoto International conference Center
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] SF6 プラズマによるNb-TiO2 結晶基板のドライエッチング2013

    • Author(s)
      松谷晃宏,西岡國生,庄司大,佐藤美那, 小林大斗,磯部敏宏,中島章,立間徹,松下祥子
    • Organizer
      応用物理学会
    • Place of Presentation
      同志社大学
    • Data Source
      KAKENHI-PROJECT-25420707
  • [Presentation] Single-Cell Isolation of Bacteria Using Microenclosure and Its Applications2012

    • Author(s)
      A. Matsutani and A. Takada
    • Organizer
      RSC Tokyo Conference
    • Place of Presentation
      Makuhari, Japan, 幕張メッセ
    • Year and Date
      2012-09-06
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] Athermal and Tunable VCSELs with a Thermally Actuated Cantilever Structure for WDM Optical Interconnects2012

    • Author(s)
      Hayato Sano, Norihiko Nakata, Masanori Nakahama, Akihiro Matsutani and Fumio Koyama
    • Organizer
      ICSJ2012
    • Place of Presentation
      Miyako-Messe(Kyoto), Japan
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Switching Characteristics of 30μm×30μm Compact Optical Switch with Slowing Light2012

    • Author(s)
      Ayumi Fuchida, Akihiro Matsutani, Fumio Koyama
    • Organizer
      OFC/NFOEC2012
    • Place of Presentation
      Los Angeles, USA
    • Year and Date
      2012-03-07
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Single-Cell Isolation and Sizing of Microorganisms by Microenclosure Array with Multipillar Structure2012

    • Author(s)
      A. Matsutani and A. Takada
    • Organizer
      MNC2012
    • Place of Presentation
      Kyot, Japan, 神戸メリケンパークオリエンタルホテル
    • Year and Date
      2012-11-01
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] Ar/F_2 気相エッチングによる細菌細胞輸送用Si マイクロ流路の形成2012

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      2012年春季第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学
    • Year and Date
      2012-03-18
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] Modeling and Experiment on Low Voltage Slow-Light2012

    • Author(s)
      Syoki Shimizu, Xiadong Gu, Toshikazu Shimada, Akihiro Matsutani and Fumio Koyama
    • Organizer
      ICSJ2012
    • Place of Presentation
      Miyako-Messe(Kyoto), Japan
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Microfabrication of Single-Cell Isolation Structure on Vertical Cavity Surface Emitting Laser Wafer2012

    • Author(s)
      A. Matsutani and A. Takada
    • Organizer
      第29回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      北九州国際会議場
    • Year and Date
      2012-10-23
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] 半導体プロセスを用いた細胞サイズ分離用マイクロピラー構造の製作2012

    • Author(s)
      松谷晃宏,高田綾子
    • Organizer
      2012年秋季第73回応用物理学会学術講演会
    • Place of Presentation
      愛媛大学・松山大学
    • Year and Date
      2012-09-12
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] Microfabrication of Si based Microchannel for Transport of Bacterial Cells by Ar/F_2 Vapor Etching and Cl_2 Inductively Coupled Plasma Etching2012

    • Author(s)
      A. Matsutani, H. Ohtsuki and A. Takada
    • Organizer
      11^<th> APCPST
    • Place of Presentation
      Kyot, Japan, 京都大学
    • Year and Date
      2012-10-03
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] Ar/F2 気相エッチングによる細菌細胞輸送用Si マイクロ流路の形成2011

    • Author(s)
      松谷晃宏,高田綾子
    • Organizer
      2012年春季第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] Fabrication of Si based Microchannel by Ar/F2 Vapor Etching and Plasma Etching2011

    • Author(s)
      A. Matsutani and A. Takada
    • Organizer
      Plasma Conference 2011 (PLASMA2011)
    • Place of Presentation
      石川県立音楽堂
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] Athermal Operations and Giant Temperature Dependence of Micromachined VCSELs2011

    • Author(s)
      Hayato Sano, Nakata Norihiko, Masanori Nakahama, Akihiro Matsutani, Fumio Koyama
    • Organizer
      International Nano-Optoelectronics Workshop, iNOW2011
    • Place of Presentation
      St.Petersburg and Wurzburg, Russia and Germany
    • Year and Date
      2011-07-24
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Miniature Slow Light Total-Intemal-Reflection Switch with Carrier Injection2011

    • Author(s)
      Ayumi Fuchida, Akihiro Matsutani, Fumio Koyama
    • Organizer
      EEE PHOTONICS 2011, IPC2011
    • Place of Presentation
      Arlington, USA
    • Year and Date
      2011-10-10
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Dry Etching of Escherichia coli by O_2-, Ar-, Air-, and H2_O- Plasma2011

    • Author(s)
      A. Matsutani and A. Takada
    • Organizer
      Plasma Conference 2011 (PLASMA2011)
    • Place of Presentation
      石川県立音楽堂
    • Year and Date
      2011-11-23
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] Giant Wavelength-Temperature Dependence of VCSEL with Thermally Actuated Cantilever Structure2011

    • Author(s)
      Masanori Nakahama, Hayato Sano, Norihiko Nakata, Akihiro Matsutani, Fumio Koyama
    • Organizer
      Conference on Lasers and Electro-Optics, CLEO2011
    • Place of Presentation
      Baltimore, USA
    • Year and Date
      2011-05-02
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Reflection-type Slow Light Optical Switches Using Current Injection2011

    • Author(s)
      Ayumi Fuchida, Akihiro Matsutani, Fumio Koyama
    • Organizer
      Conference on Lasers and Electro-Optics, CLEO2011
    • Place of Presentation
      Baltimore, USA
    • Year and Date
      2011-05-03
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Giant Wavelength-Temperature Dependence of VCSEL with Thermally Actuated Cantilever Structure2011

    • Author(s)
      Masanori Nakahama, Hayato Sano, Norihiko Nakata, Akihiro Matsutani Fumio Koyama
    • Organizer
      CLEO2011
    • Place of Presentation
      U.S.A, Baltimore
    • Year and Date
      2011-05-02
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Giant Wavelength-temperature Dependence and Electro-thermal Tuning of MEMSVCSEL2011

    • Author(s)
      Masanori Nakahama, Norihiko Nakata, Hayato Sano, Akihiro Matsutani, Fumio Koyama
    • Organizer
      EEE PHOTONICS 2011, IPC2011
    • Place of Presentation
      Arlington, USA
    • Year and Date
      2011-10-13
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Ar/F_2 気相エッチングによる極微小径Si マイクロ流路の形成2011

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      第24回化学とマイクロ・ナノシステム研究会
    • Place of Presentation
      大阪府立大学
    • Year and Date
      2011-11-02
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] Ar/F2気相エッチングによる極微小径Siマイクロ流路の形成2011

    • Author(s)
      松谷晃宏,高田綾子
    • Organizer
      第24回化学とマイクロ・ナノシステム研究会
    • Place of Presentation
      大阪府立大学
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] Experimental Demonstration of Beam-Steering Based on Slow-Light Waveguide Amplifier2011

    • Author(s)
      Xiaodong Gu, Toshikazu Shimada, Ayumi Fuchida, Akihiro Imamura, Akihiro Matsutani, Fumio Koyama
    • Organizer
      17th Microoptics Conference, MOC'11
    • Place of Presentation
      Sendai, Japan
    • Year and Date
      2011-10-31
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Si based High-index-contrast-grating Structure fabricated by High Temperature Cl_2 Inductively Coupled Plasma Etching using Thermal Nanoimprint Resist Mask2011

    • Author(s)
      Akihiro Matsutani, Yuuki Hashidume, Hideo Ohtsuki, Fumio Koyama
    • Organizer
      24th International Microprocesses and Nanotechnology Conference, MNC2011
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2011-10-26
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] 低圧プラズマプロセスによる細菌細胞の分解と細菌細胞を用いた半導体のドライエッチング2011

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      電気学会プラズマ/パルスパワー合同研究会
    • Place of Presentation
      東京工業大学
    • Year and Date
      2011-12-15
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] Fabrication of Si based Microchannel by Ar/F_2 Vapor Etching and Plasma Etching2011

    • Author(s)
      A. Matsutani and A. Takada
    • Organizer
      Plasma Conference 2011 (PLASMA2011)
    • Place of Presentation
      石川県立音楽堂
    • Year and Date
      2011-11-23
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] Wavelength Tuning and Athermal Operations of Micro-machined VCSELs for Uncooled WDM2011

    • Author(s)
      Hayato Sano, Norihiko Nakata, Masanori Nakahama, Akihiro Matsutani, Fumio Koyama
    • Organizer
      CLEO2011
    • Place of Presentation
      U.S.A, Baltimore
    • Year and Date
      2011-05-02
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Fabrication and Characterization of Si/SiO2 High Contrast Grating using Nanoimprint Lithography2011

    • Author(s)
      Yuuki Hashizume, Yasumitsu Miyake, Akihiro Matsutani, Hideo Obtsuki, Fumio Koyama
    • Organizer
      Photonics West 2012, SPIE
    • Place of Presentation
      San Francisco, USA
    • Year and Date
      2011-01-22
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Wavelength Tuning and Athermal Operations of Micro-machined VCSELs for Uncooled WDM2011

    • Author(s)
      Hayato Sano, Norihiko Nakata, Masanori Nakahama, Akihiro Matsutani, Fumio Koyama
    • Organizer
      Conference on Lasers and Electro-Optics, CLEO2011
    • Place of Presentation
      Baltimore, USA
    • Year and Date
      2011-05-02
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Reflection-type Slow Light Optical Switches Using Current Injection2011

    • Author(s)
      Ayumi Fuchida, Akihiro Matsutani, Fumio Koyama
    • Organizer
      CLEO2011
    • Place of Presentation
      U.S.A, Baltimore
    • Year and Date
      2011-05-03
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Wavelength Trimming of MEMS VCSELs for Post-process Wavelength Allocation2010

    • Author(s)
      Hayato Sano, Norihiko Nakata, Akihiro Matsutani, Fumio Koyama
    • Organizer
      22nd IPRM
    • Place of Presentation
      Japan, Kanazawa
    • Year and Date
      2010-06-02
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Wavelength Control of VCSELs with a Thermally Actuated MEMS Structure2010

    • Author(s)
      Hayato Sano, Norihiko Nakata, Akihiro Matsutani, Fumio Koyama
    • Organizer
      iNOW 2010
    • Place of Presentation
      China, Beijing and Changchun
    • Year and Date
      2010-08-03
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Tapered hollow waveguide multiplexer for multi-wavelegth VCSEL array2010

    • Author(s)
      Akihiko Imanura, Akihiro Matsutani, Fumio Koyama
    • Organizer
      iNOW 2010
    • Place of Presentation
      China, Beijing and Changchun
    • Year and Date
      2010-08-03
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Controlled temperature dependence of lasing wavelength of VCSELs with a thermally actuated cantilever2010

    • Author(s)
      Hayato Sano, Norihiko Nakata, Akihiro Matsutani, Fumio Koyama
    • Organizer
      International Semiconductor Laser Conf.
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2010-09-27
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Compact Reflection-type Optical Switch with Slowing Light2010

    • Author(s)
      Ayumi Fuchida, Akihiro Matsutani, Fumio Koyama
    • Organizer
      OECC2010
    • Place of Presentation
      Japan, Sapporo
    • Year and Date
      2010-07-10
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Dry Etching of Si by Solid Source I_2 Inductively Coupled Plasma2010

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Organizer
      MNC2010
    • Place of Presentation
      Japan, Fukuoka
    • Year and Date
      2010-11-11
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Multi-wavelength 1060nm-band VCSEL Array with Tapered Hollow Waveguide Multiplexer2010

    • Author(s)
      Akihiro Imamura, Akihiro Matsutani, Fumio Koyama
    • Organizer
      International Semiconductor Laser Conf.
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2010-09-29
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Characterizations of Reflection-type Slow Light Optical Switches2010

    • Author(s)
      Ayumi Fuchida, Takeru Sakairi, Akihiro Matsutani, Fumio Koyama
    • Organizer
      MOC2010
    • Place of Presentation
      Taiwan, Hsinchu
    • Year and Date
      2010-11-02
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Proposal of Multi-Wavelength Integration of Athermal GAASVCSEL Array with Thermally Actuated Cantilever Structure2010

    • Author(s)
      Norihiko Nakata, Hayato Sano, Akihiro Matsutani, Fumio Koyama
    • Organizer
      22nd IPRM
    • Place of Presentation
      Japan, Kanazawa
    • Year and Date
      2010-06-02
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Tapered hollow waveguide multiplexer for multi-wavelength VCSEL array2009

    • Author(s)
      Akihiro Imamura, Akihiro Matsutani, Fumio Koyama
    • Organizer
      iNOW2009
    • Place of Presentation
      Stockholm, Sweden
    • Year and Date
      2009-08-08
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Presentation] Athermal and Tunable Operations of 850nm VCSEL with Thermally Actuated Cantilever Structure2009

    • Author(s)
      Hayato Sano, Akihiro Matsutani, Fumio Koyama
    • Organizer
      35th European Conference and Exhibition on Optical Communication, ECOC2009
    • Place of Presentation
      Vienna, Austria
    • Year and Date
      2009-09-10
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Presentation] Athermal and Tunable Operations of 850nm VCSEL with Thermally Actuated Cantilever Structure2009

    • Author(s)
      Hayato Sano, Akihiro Matsutani, Fumio Koyama
    • Organizer
      ECOC2009
    • Place of Presentation
      Vienna, Austria
    • Year and Date
      2009-09-10
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Presentation] High-Speed Optical Modulation based on Frequency-Modulated VCSELs and Optical Filters2009

    • Author(s)
      Koichi Hasebe, Yusuke Mada, Takeru Sakairi, Akihiro Matsutani, fumio Koyama
    • Organizer
      IPRM2009
    • Place of Presentation
      Newport Beach, USA
    • Year and Date
      2009-05-16
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Presentation] Multiple-Wavelength GaInAs/GaAs VCSELs with Gradinga Spacer Layer for Short Reach WDM Applications2009

    • Author(s)
      P.Babu Dayal, Akihiro Imamura, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
    • Organizer
      IPRM2009
    • Place of Presentation
      Newport Beach, USA
    • Year and Date
      2009-05-15
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Presentation] Tapered hollow waveguide multiplexer for multi-wavelength VCSEL array2009

    • Author(s)
      Akihiro Imamura, Koichi Hasebe, Akihiro Matsutani, Fumio Koyama
    • Organizer
      Photonic West 2009
    • Place of Presentation
      San Jose, USA
    • Year and Date
      2009-01-28
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Presentation] Adjustable Polarization Mode Dispersion Compensation using 3D Hollow Waveguide Bragg Reflector (CThB5)2009

    • Author(s)
      M. Kumar, T. Sakaguchi, A. Matsutani and F. Koyama
    • Organizer
      Conference on Lasers and Electro-Optics, CLEO/IQEC2009
    • Place of Presentation
      Baltimore, USA
    • Year and Date
      2009-06-04
    • Data Source
      KAKENHI-PROJECT-17068006
  • [Presentation] Dry Etching of Si using Ar/F2 Plasma2009

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Organizer
      MNC2009,
    • Place of Presentation
      Sapporo, Japan
    • Year and Date
      2009-11-12
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Presentation] Multiple-Wavelength GaInAs/GaAs VCSELs with Grading a Spacer Layer for Short Reach WDM Applications2009

    • Author(s)
      P. Babu Dayal, Akihiro Imamura, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
    • Organizer
      2009 International Conference on Indium Phosphide and Related Materials, IPRM2009
    • Place of Presentation
      Newport Beach, USA
    • Year and Date
      2009-05-15
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Presentation] High-Speed Optical Modulation based on Frequency-Modulated VCSELs and Optical Filters2009

    • Author(s)
      Koichi Hasebe, Yusuke Mada, Takeru Sakairi, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
    • Organizer
      2009 International Conference on Indium Phosphide and Related Materials, IPRM2009
    • Place of Presentation
      Newport Beach, USA
    • Year and Date
      2009-05-16
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Presentation] Tapered hollow waveguide multiplexer for multi-wavelength VCSEL array2009

    • Author(s)
      Akihiro Imamura, Koichi Hasebe, Akihiro Matsutani, and Fumio Koyama
    • Organizer
      Photonic West 2009
    • Place of Presentation
      San Jose, USA
    • Year and Date
      2009-01-28
    • Data Source
      KAKENHI-PROJECT-17068006
  • [Presentation] Multiple-wavelength VCSEL arrays using surface nano-machining process for WDM applications2008

    • Author(s)
      P. Babu Dayal, Jun Nakajima, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
    • Organizer
      21st Annual Meeting of The IEEE Lasers & Electro-Optics Society, LEOS2008
    • Place of Presentation
      Newport Beach, USA
    • Year and Date
      2008-11-11
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Presentation] Miniature optical gate with VCSEL-based slow light bragg reflector waveguide2008

    • Author(s)
      Keisuke Kuroki, Ayumi Fuchida, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
    • Organizer
      21st IEEE International Semiconductor Laser Conference, ISLC2008
    • Place of Presentation
      Sorrento, Italy
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Presentation] Dry Etching of CaF_2 by Solid Source H_2O Plasma2008

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Organizer
      The 25th Symposium on Plasma Processing
    • Place of Presentation
      山口県教育会館
    • Year and Date
      2008-01-24
    • Data Source
      KAKENHI-PROJECT-18510108
  • [Presentation] Dry Etching of Si by XeF2 Plasma and Investigation of Emission Intensities from Xe and F in XeF2 Plasma2008

    • Author(s)
      Akihiro Matsutanil, Hideo Ohtsuki and Fumio Koyama
    • Organizer
      MNC2008
    • Place of Presentation
      Fukuoka, Japan
    • Year and Date
      2008-10-29
    • Data Source
      KAKENHI-PROJECT-17068006
  • [Presentation] Dry Etching of CaF_2 by Solid Source H_2O Plasma2008

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Organizer
      The 25th Symposium on Plasma Processing
    • Place of Presentation
      Yamaguchi, Japan
    • Year and Date
      2008-01-24
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-18510108
  • [Presentation] Low Polarization Dependence of Bragg Reflector Slow Light Waveguides2008

    • Author(s)
      Ayumi Fuchida, P. Babu Dayal, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
    • Organizer
      LEOS2008
    • Place of Presentation
      Newport Beach, USA
    • Year and Date
      2008-11-12
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Presentation] Dry Etching of Si by XeF2 Plasma and Investigation of Emission Intensities from Xe and F in XeF2 Plasma2008

    • Author(s)
      Akihiro Matsutanil, Hideo Ohtsuki, Fumio Koyama
    • Organizer
      MNC2008
    • Place of Presentation
      Fukuoka, Japan
    • Year and Date
      2008-10-29
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Presentation] Dry Etching of Si by XeF2 Plasma and Investigation of Emission Intensities from Xe and F in XeF2 Plasma (29D-9-58)2008

    • Author(s)
      A. Matsutanil, H. Ohtsuki and F. Koyama
    • Organizer
      1st International Microprocessees and Nanotechnology Conference, MNC2008
    • Place of Presentation
      Fukuoka, Japan
    • Year and Date
      2008-09-29
    • Data Source
      KAKENHI-PROJECT-17068006
  • [Presentation] 固体ソースH_2Oプラズマの生成とCaF_2のドライエッチングへの応用2008

    • Author(s)
      松谷晃宏, 大槻秀夫, 小山二三夫
    • Organizer
      第55回応用物理学会関係連合講演会
    • Place of Presentation
      日本大学
    • Year and Date
      2008-03-30
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-18510108
  • [Presentation] Dry Etching of CaF2 by Solid Source H 2O Plasma2008

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Organizer
      The 25th Symposium on Plasma Processing (SPP-24)
    • Place of Presentation
      Japan
    • Year and Date
      2008-01-24
    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-18510108
  • [Presentation] 固体ソースH_2Oプラズマの生成とCaF_2のドライエッチングへの応用2008

    • Author(s)
      松谷晃宏, 大槻秀夫, 小山二三夫
    • Organizer
      第55回応用物理学会関係連合講演会
    • Place of Presentation
      日本大学理工学部船橋キャンパア
    • Year and Date
      2008-03-30
    • Data Source
      KAKENHI-PROJECT-18510108
  • [Presentation] Multiple-wavelength VCSEL arrays using surface nano-machining process for WDM applications2008

    • Author(s)
      P. Babu Dayal, Jun Nakajima, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
    • Organizer
      LEOS2008
    • Place of Presentation
      Newport Beach, USA
    • Year and Date
      2008-11-11
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Presentation] Generation of Solid Source H 2O Plasma and Its Application to Dry Etching of CaF 22008

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Organizer
      The 55th Spring Meeting, The Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Japan
    • Year and Date
      2008-03-30
    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-18510108
  • [Presentation] Low Polarization Dependence of Bragg Reflector Slow Light Waveguides2008

    • Author(s)
      Ayumi Fuchida, P. Babu Dayal, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama
    • Organizer
      21st Annual Meeting of The IEEE Lasers & Electro-Optics Society, LEOS2008
    • Place of Presentation
      Newport Beach, USA
    • Year and Date
      2008-11-12
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Presentation] 固体ソースH_2OプラズマによるCaF_2(蛍石)のドライエッチングプロセス2008

    • Author(s)
      松谷晃宏
    • Organizer
      Proceedings of Symposium on Technology in Laboratories by Department Service
    • Place of Presentation
      岐阜
    • Year and Date
      2008-05-06
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-18510108
  • [Presentation] Dry Etching of CaF_2by Solid Source H_2O (ice) Plasma2007

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki and Fumio Koyama
    • Organizer
      20th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Kyoto, Japan
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Presentation] Plasma characterization of H 2O-inductively coupled plasma for dry etching2007

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Organizer
      17th International Vacuum Congress
    • Place of Presentation
      Stockholm, Sweden
    • Year and Date
      2007-07-05
    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-18510108
  • [Presentation] Plasma characterization of H20-inductively coupled plasma for dry etching2007

    • Author(s)
      A.Matsutani, H.Ohtsuki and F.Koyama
    • Organizer
      IVC-17
    • Place of Presentation
      Stockholm, Sweden
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Presentation] Generation of Solid Source H 2O Plasma Liquid Source Dry Etching2007

    • Author(s)
      Akihiro Matsutani
    • Organizer
      2007 Symposium on Technology in Laboratories by Department Service
    • Place of Presentation
      Japan
    • Year and Date
      2007-03-02
    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-18510108
  • [Presentation] Plasma characterization of H2O-inductively coupled plasma for dry etching2007

    • Author(s)
      A.Matsutani, H.Ohtsuki and F.Koyama
    • Organizer
      IVC-17
    • Place of Presentation
      Stockholm, Sweden
    • Data Source
      KAKENHI-PROJECT-17068006
  • [Presentation] Tapered Hollow Waveguide Multiplexer for Multi-wavelength VCSEL array2007

    • Author(s)
      Naoto Kitabayashi, Akihiro Imamura, Akihiro Matsutani and Fumio Koyama
    • Organizer
      OECC/IOOC2007
    • Place of Presentation
      Yokohama, Japan
    • Data Source
      KAKENHI-PROJECT-17068006
  • [Presentation] Plasma characterization of H_2O-inductively coupled plasma for dry etching2007

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Organizer
      17th International Vacuum Congress (IVC-17)
    • Place of Presentation
      スットックホルム
    • Year and Date
      2007-07-05
    • Data Source
      KAKENHI-PROJECT-18510108
  • [Presentation] Transvers-mode and Polarization Characteristics of 1.55μm Micromachined VCSELs2007

    • Author(s)
      Koichi Hasebe, Wiganes Janto, Nobuhiko Nishiyama, Catherine Caneau, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama and Chung-En Zah
    • Organizer
      OECC/IOOC2007
    • Place of Presentation
      Yokohama. Japan
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Presentation] Dry Etching of CaF_2 by Solid Source H_2O(ice)Plasma2007

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Organizer
      20th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2007-11-06
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-18510108
  • [Presentation] Dry Etching of CaF_2by Solid Source H_2O(ice) Plasma (6A-4-94, pp. 248-249)2007

    • Author(s)
      A. Matsutani, H. Ohtsuki and F. Koyama
    • Organizer
      20th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2007-11-15
    • Data Source
      KAKENHI-PROJECT-17068006
  • [Presentation] Plasma characterization of H_2O-inductively coupled plasma for dry etching2007

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Organizer
      17th International Vacuum Congress(IVC-17)
    • Place of Presentation
      Stockholm, Sweden
    • Year and Date
      2007-07-05
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-18510108
  • [Presentation] Transverse-mode and Polarization Characteristics of 1.55μm Micromachined VCSELs2007

    • Author(s)
      Koichi Hasebe, Wiganes Janto, Nobuhiko Nishiyama, Catherine Caneau, Takahiro Sakaguchi, Akihiro Matsutani, Fumio Koyama and Chung-En Zah
    • Organizer
      OECC/IOOC2007
    • Place of Presentation
      Yokohama, Japan
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Presentation] Tapered Hollow Waveguide Multiplexer for Multi-wavelength VCSEL array," 12th Optoelectronics and Communications Conference/16th International Conference on Integrated Optics and Optical Fiber Communication2007

    • Author(s)
      Naoto Kitabayashi, Akihiro Imamura, Akihiro Matsutani and Fumio Koyama
    • Organizer
      OECC/IOOC2007
    • Place of Presentation
      Yokohama, Japan
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Presentation] 液体ソースドライエッチングプロセスのためのH_2Oプラズマの生成2007

    • Author(s)
      松谷晃宏
    • Organizer
      平成18年度名古屋大学総合技術研究会装置技術研究会
    • Place of Presentation
      名古屋大学
    • Year and Date
      2007-03-02
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-18510108
  • [Presentation] Dry Etching of CaF_2 by Solid Source H_2O (ice) Plasma2007

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Organizer
      20th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      京都国際会館
    • Year and Date
      2007-11-06
    • Data Source
      KAKENHI-PROJECT-18510108
  • [Presentation] Decreasing of Residual Oxygen by using Si Solid Source in Cl2-ICP Etching of Al2007

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki and Fumio Koyama
    • Organizer
      ISPC18
    • Place of Presentation
      Kyoto, Japan
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Presentation] 水蒸気導入によるエッチング用H_2O誘導結合プラズマ(ICP)の発光分光分析2007

    • Author(s)
      松谷晃宏, 大槻秀夫, 小山二三夫
    • Organizer
      第54回応用物理学関係連合講演会
    • Place of Presentation
      青山学院大学
    • Year and Date
      2007-03-27
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-18510108
  • [Presentation] Plasma Characterization of H_2O-Inductively Coupled Plasma for Dry Etching2007

    • Author(s)
      A. Matsutani, H. Ohtsuki and F. Koyama
    • Organizer
      The 24th Symposium on Plasma Processing(SPP-24)
    • Place of Presentation
      Osaka, Japan
    • Year and Date
      2007-01-29
    • Description
      「研究成果報告書概要(和文)」より
    • Data Source
      KAKENHI-PROJECT-18510108
  • [Presentation] Plasma Characterization by Optical Emission Analysis of H 2O-Inductively Coupled Plasma for Dry Etching2007

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Organizer
      The 54th Spring Meeting, The Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Aoyama Gakuin
    • Year and Date
      2007-03-27
    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-18510108
  • [Presentation] Tapered hollow waveguide multiplexer for multi-wavelength VCSEL array2007

    • Author(s)
      Naoto Kitabayashi, Akihiro Imamura, Akihiro Matsutani, Fumio Koyama
    • Organizer
      12th Optoelectronics and Communications Conference/16th International Conference on Integrated Optics and Optical Fiber Communication, OECC/IOOC2007
    • Place of Presentation
      Yokohama, Japan
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Presentation] Tapered Hollow Waveguide Multiplexer for Multi-wavelength VCSEL array,2007

    • Author(s)
      Naoto Kitabayashi, Akihiro Imamura, Akihiro Matsutani and Fumio Koyama
    • Organizer
      OECC/IOOC2007
    • Place of Presentation
      Yokohama, Japan
    • Data Source
      KAKENHI-PROJECT-17068006
  • [Presentation] Tapered Hollow Waveguide Multiplexer for Multi-wavelength VCSEL array2007

    • Author(s)
      Naoto Kitabayashi, Akihiro Imamura, Akihiro Matsutani and Fumio Koyama
    • Organizer
      OECC/IOOC2007
    • Place of Presentation
      Yokohama, Japan
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Presentation] Etching Characteristics of Low-k Polymer for Wide Modulation Bandwidth VCSELs2007

    • Author(s)
      Akihiro Matsutani, Naoki Jogan, Fumio Koyama and Kohroh Kobayashi
    • Organizer
      OECC/IOOC2007
    • Place of Presentation
      Yokohama, Japan
    • Data Source
      KAKENHI-PROJECT-19206012
  • [Presentation] Etching of CaF2 by Solid Source H 2O (ice) Plasma2007

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Organizer
      20th International Microprocesses and "Dry Nanotechnology Conference
    • Place of Presentation
      Japan
    • Year and Date
      2007-11-06
    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-18510108
  • [Presentation] Plasma Characterization of H 2O-Inductively Coupled Plasma for Dry Etching2007

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki, Fumio Koyama
    • Organizer
      The 24th Symposium on Plasma Processing (SPP-24)
    • Place of Presentation
      Japan
    • Year and Date
      2007-01-29
    • Description
      「研究成果報告書概要(欧文)」より
    • Data Source
      KAKENHI-PROJECT-18510108
  • [Presentation] Decreasing of Residual Oxygen by using Si Solid Source in Cl2-ICP Etching of Al (30P-118)2007

    • Author(s)
      A. Matsutani, H. Ohtsuki and F. Koyama
    • Organizer
      18th International Symposium on Plasma Chemistry, ISPC18
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2007-09-30
    • Data Source
      KAKENHI-PROJECT-17068006
  • [Presentation] Hollow Waveguide Distributed Bragg Reflector for Widely Tunable Optical Devices (OtuM4)2006

    • Author(s)
      Y. Sakurai, H. Yamakawa, Y. Yokota, A. Matsutani, T. Sakaguchi and F. Koyama
    • Organizer
      Optical Fiber Communications Conference 2006
    • Place of Presentation
      Anaheim, USA
    • Year and Date
      2006-03-12
    • Data Source
      KAKENHI-PROJECT-17068006
  • [Presentation] Solid Source Dry Etching Process for III-V Compound Semiconductors (P-2A-42)2006

    • Author(s)
      A. Matsutani, H. Ohtsuki and F. Koyama
    • Organizer
      6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing, ICRP-6/SPP-23
    • Place of Presentation
      Sendai, Japan
    • Year and Date
      2006-01-25
    • Data Source
      KAKENHI-PROJECT-17068006
  • [Presentation] Tunable Stop-Band Hollow Waveguide Bragge Reflector with Tapered Air-Core for Adaptive Dispersion-Compensation (Postdeadline Paper, CPDA6, CLEO2005, CMP5)2005

    • Author(s)
      Y. Sakurai, A. Matsutani and F. Koyama
    • Organizer
      Conference on Lasers and Electro-Optics
    • Place of Presentation
      Baltimore, USA
    • Year and Date
      2005-05-11
    • Data Source
      KAKENHI-PROJECT-17068006
  • [Presentation] Air-core Resonator with Widely Tunable Hollow Waveguide Bragg Reflectors2005

    • Author(s)
      Y. Sakurai, A. Matsutani, T. Sakaguchi and F. Koyama
    • Organizer
      31st European Conference on Optical Communication, ECOC2005
    • Place of Presentation
      Glasgow, UK
    • Year and Date
      2005-10-12
    • Data Source
      KAKENHI-PROJECT-17068006
  • [Presentation] 160nm Continuous Wavelength Tuning of Tunable Hollow Waveguide Bragg Reflector (Postdeadline Paper, CPDA6, CLEO2005, CPDA6)2005

    • Author(s)
      Y. Sakurai, A. Matsutani, T. Sakaguchi and F. Koyama
    • Organizer
      Conference on Lasers and Electro-Optics
    • Place of Presentation
      Baltimore, USA
    • Year and Date
      2005-05-09
    • Data Source
      KAKENHI-PROJECT-17068006
  • [Presentation] 半導体プロセスを用いた細胞サイズ分離用マイクロピラー構造の製作

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      2012年秋季第73回応用物理学会学術講演会,12p-PB3-3
    • Place of Presentation
      愛媛大学
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] Ar/F2気相エッチングにより製作したSiマイクロ流路を用いた大腸菌細胞の輸送

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      第4回集積化MEMS技術研究ワークショップ
    • Place of Presentation
      大阪府立大学
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] Dry Etching of 4H-SiC using Ar/F2 Plasma

    • Author(s)
      Akihiro Matsutani,Fumio Koyama
    • Organizer
      27th International Microprocesses and Nanotechnology Conference, MNC2014
    • Place of Presentation
      Hilton Fukuoka Sea Hawk
    • Year and Date
      2014-11-04 – 2014-11-07
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Electro-Thermal Tuning of Athermal 850nm VCSELs with Thermally Actuated T-shape Membrane Structure

    • Author(s)
      Hayato Sano, Norihiko Nakata, Masanori Nakahama, Akihiro Matsutani and Fumio Koyama
    • Organizer
      IPC2012
    • Place of Presentation
      Burlingame, USA
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] On-Chip Electro-Thermal Beam Steering based on Slow-light Bragg Reflector Waveguide Laterally Integrated with VCSEL

    • Author(s)
      Toshikazu Shimada, Akihiro Matsutani and Fumio Koyama
    • Organizer
      IPC2012
    • Place of Presentation
      Burlingame, USA
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Single-Cell Isolation of Bacteria Using Microenclosure and Its Applications

    • Author(s)
      Akihiro Matsutani and Ayako Takada
    • Organizer
      RSC Tokyo Conference, A001
    • Place of Presentation
      幕張メッセ
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] Microfabrication of Single-Cell Isolation Structure on Vertical Cavity Surface Emitting Laser Wafer

    • Author(s)
      Akihiro Matsutani and Ayako Takada
    • Organizer
      第29回「センサ・マイクロマシンと応用システム」シンポジウム,SPLN-10
    • Place of Presentation
      北九州国際会議場
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] Push-pull modulation of lateral coupling of dual VCSEL cavities using a bow-tie shape

    • Author(s)
      Hamed Dalir, Akihiro Matsutani and Fumio Koyama
    • Organizer
      Photonics West 2013
    • Place of Presentation
      San Francisco, USA
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] マイクロピラー構造を用いた大腸菌と酵母の単一細胞分離とサイズ分離

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      2013年第60回応用物理学会春季学術講演会,27p-B6-10
    • Place of Presentation
      神奈川工科大学
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] Microfabrication of 4H-SiC by Reactive Ion Etching Using XeF2 Plasma

    • Author(s)
      Akihiro Matsutani,Fumio Koyama
    • Organizer
      2014 International Symposium on Dry Process, DPS2014
    • Place of Presentation
      Annex Hall of the PACIFICO YOKOHAMA
    • Year and Date
      2014-11-27 – 2014-11-28
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Giant Electro-thermal Phase-shift in Low-Polarization Dependent Slow Light Bragg Reflector Waveguide

    • Author(s)
      Aumi Fuchida Akihiro Matsutani and Fumio Koyama
    • Organizer
      IPC2012
    • Place of Presentation
      Burlingame, USA
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] InP基板上に製作したマイクロ囲いを用いた出芽酵母の培養

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      第28回化学とマイクロ・ナノシステム学会
    • Place of Presentation
      イーグレ姫路
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] マイクロ牧場アレイを用いた出芽酵母の培養

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] トップダウン・ボトムアップ統合アプローチによるポリスチレン四重極子の作製

    • Author(s)
      高橋 毅、松谷 晃宏、庄司 大、西岡 國生、佐藤 美那、磯部 敏宏、中島 章、松下 祥子
    • Organizer
      応用物理学会
    • Place of Presentation
      東海大学
    • Year and Date
      2015-03-11 – 2015-03-14
    • Data Source
      KAKENHI-PROJECT-25420707
  • [Presentation] Large Enhancement in Modulation Bandwidth of Low-Voltage Slow Light Bragg Reflector Waveguide Modulator

    • Author(s)
      Xiaodong Gu,Ayako Suzuki,Hamed Dalir,Akihiro Matsutani,Fumio Koyama
    • Organizer
      The OptoElectronics and Communication Conference 2014,
    • Place of Presentation
      The Melbourne Convention and Exhibition Centre
    • Year and Date
      2014-07-06 – 2014-07-10
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Single-Cell Isolation and Sizing of Microorganisms by Microenclosure Array with Multipillar Structure

    • Author(s)
      Akihiro Matsutani and Ayako Takada
    • Organizer
      MNC2012, 1P-7-83
    • Place of Presentation
      Kobe
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] Giant wavelength-temperature dependence of 850nm VCSELs with a metal/semiconductor thermally actuated mirror

    • Author(s)
      Masanori Nakahama, Hayato Sano, Syunya Inoue, Akihiro Matsutani, Takahiro Sakaguchi, Fumio Koyama
    • Organizer
      Photonics West 2013
    • Place of Presentation
      San Francisco, USA
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Compact Bragg Reflector Waveguide Modulator Based on VCSEL Structure with Low Driving Voltage below 0.5 V

    • Author(s)
      Xiaodong Gu, Toshikazu Shimada, Satoshi Shimizu, Akihiro Matsutani and Fumio Koyama
    • Organizer
      ISLC2012
    • Place of Presentation
      San Diego, USA
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] High-resolution Wavelength Demultiplexer Based on a Bragg Reflector Waveguide Amplifier with Large Angular Dispersion

    • Author(s)
      Xiaodong Gu, Toshikazu Shimada, Akihiro Matsutani, Fumio Koyama
    • Organizer
      ECOC2012
    • Place of Presentation
      Amsterdam, Netherlands
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Athermal Operation and Wavelength Tuning of VCSELs with Thermally Actuated MEMS Structure

    • Author(s)
      Hayato Sano, Norihiko Nakata, Masanori Nakahama, Akihiro Matsutani and Fumio Koyama
    • Organizer
      iNOW 2012
    • Place of Presentation
      Berkeley, USA
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] 細菌細胞のプラズマエッチングマスクへの応用

    • Author(s)
      松谷晃宏,髙田綾子
    • Organizer
      2012年度 東京工業大学技術部 技術発表会,6
    • Place of Presentation
      東京工業大学
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] Athermal multi-wavelength VCSEL array employing thermally actuated micromachined mirrors

    • Author(s)
      Masanori Nakahama,Takahiro Sakaguchi,Akihiro Matsutani,Fumio Koyama
    • Organizer
      IEEE International Semiconductor Laser Conference
    • Place of Presentation
      Meria Palas Atenea(Palma de Mallorca)
    • Year and Date
      2014-09-07 – 2014-09-10
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Beam scanner integrated VCSEL with electro-thermal wavelength tuning

    • Author(s)
      Toshikazu Shimada,Hamed Dalir,Akihiro Matsutani,Fumio Koyama
    • Organizer
      IEEE International Semiconductor Laser Conference
    • Place of Presentation
      Meria Palas Atenea(Palma de Mallorca)
    • Year and Date
      2014-09-07 – 2014-09-10
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Fabrication of SiC Membrane HCG Blue Reflector Using Nanoimprint Lithography

    • Author(s)
      Ying-Yu Lai,Akihiro Matsutani,Tien-Chang Lu,Shing-Chung Wang,Fumio Koyama
    • Organizer
      Photonics West2015
    • Place of Presentation
      The Moscone Center(San Francisco)
    • Year and Date
      2015-02-07 – 2015-02-12
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Microfabrication of Si based Microchannel for Transport of Bacterial Cells by Ar/F2 Vapor Etching and Cl2 Inductively Coupled Plasma Etching

    • Author(s)
      Akihiro Matsutani, Hideo Ohtsuki and Ayako Takada
    • Organizer
      11th APCPST, 2-P83
    • Place of Presentation
      京都大学
    • Data Source
      KAKENHI-PROJECT-23510141
  • [Presentation] Athermal and Widely Tunable VCSEL with Bimorph Micromachined Mirror

    • Author(s)
      Masanori Nakahama,Takahiro Sakaguchi,Akihiro Matsutani,Fumio Koyama
    • Organizer
      The OptoElectronics and Communication Conference 2014
    • Place of Presentation
      The Melbourne Convention and Exhibition Centre
    • Year and Date
      2014-07-06 – 2014-07-10
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Improvement in Crosstalk of 200-Port Bragg Reflector Waveguides Array-based Wavelength Selective Switch

    • Author(s)
      Xiaodong Gu,Kenya Suzuki,Yuichiro Ikuma,Akihiro Matsutani,Fumio Koyama
    • Organizer
      IEEE Photonics Conference, IPC2014
    • Place of Presentation
      Hyatt Regency La Jolla(San Diego)
    • Year and Date
      2014-10-12 – 2014-10-16
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Thermal and Electrical Beam Steering on a GaInAs/GaAs Slow-light Bragg Waveguide Amplifier

    • Author(s)
      Xiaodong Gu, Toshikazu Shimada, Ayumi Fuchida, Akihiro Matsutani, Akihiro Imamura, Fumio Koyama
    • Organizer
      CLEO 2012
    • Place of Presentation
      San Jose, USA
    • Data Source
      KAKENHI-PROJECT-22226008
  • [Presentation] Lateral Integration of MEMS VCSEL and Slow Light Amplifier for High Single-mode Output Power

    • Author(s)
      Masanori Nakahama, Xiaodong Gu, Toshikazu Shimada, Hayato Sano, Akihiro Matsutani and Fumio Koyama
    • Organizer
      iNOW 2012
    • Place of Presentation
      Berkeley, USA
    • Data Source
      KAKENHI-PROJECT-22226008
  • 1.  KOYAMA Fumio (30178397)
    # of Collaborated Projects: 4 results
    # of Collaborated Products: 148 results
  • 2.  SAKAGUCHI Takahiro (70215622)
    # of Collaborated Projects: 4 results
    # of Collaborated Products: 29 results
  • 3.  UENOHARA Hiroyuki (20334526)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 4.  KONISHI Tsuyoshi (90283720)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 5.  WADA Naoya (20358873)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 6.  TAKADA Ayako (20401565)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 40 results
  • 7.  Matsushita Sachiko (50342853)
    # of Collaborated Projects: 2 results
    # of Collaborated Products: 0 results
  • 8.  Hatano Mutsuko (00417007)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 3 results
  • 9.  IWASAKI Takayuki (80454031)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 3 results
  • 10.  長田 哲也 (80208016)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 11.  入部 正継 (60469228)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 12.  山本 広大 (70738319)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 2 results
  • 13.  松下・I 祥子
    # of Collaborated Projects: 0 results
    # of Collaborated Products: 11 results
  • 14.  顧 暁冬
    # of Collaborated Projects: 0 results
    # of Collaborated Products: 3 results

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