Shimizu Tomo 清水共

… Alternative Names

清水共シミズトモ

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Researcher Number	40455168
Other IDs
Affiliation (Current)	2025: 香川高等専門学校, 電子システム工学科, 准教授
Affiliation (based on the past Project Information) *help	2022 – 2023: 香川高等専門学校, 電子システム工学科, 講師 2016 – 2018: 香川高等専門学校, 電子システム工学科, 講師
Review Section/Research Field	Except Principal Investigator Basic Section 62030:Learning support system-related / Science education
Keywords	Except Principal Investigator デバイス / リソグラフィ / 熱拡散 / 微細化 / デバイスプロセス / フォトリソグラフィ / 半導体デバイス / 半導体 / 微細加工 / 電子デバイス・機器 … More / リソグラフィー / バイポーラトランジスタ / MOS FET / pn接合 / Sol Gel / 教育 / 簡素化 / 集積回路 / ｐｎ接合 / Sol-Geｌ / プロセス / 工学教育 / p-n接合 / Sol-Gel Less

Semiconductor device foundry achieved at a nanotech platform established on an average science lab.
- Principal Investigator
  
  長岡史郎
- Project Period (FY)
  2022 – 2024
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 62030:Learning support system-related
- Research Institution
  Kagawa National College of Technology
A nanotechnology platform established in average science laboratories
- Principal Investigator
  
  Nagaoka Shiro
- Project Period (FY)
  2016 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Research Field
  
  Science education
- Research Institution
  Kagawa National College of Technology

All 2024 2023 2019 2018 2017 2016

All Journal Article Presentation

[Journal Article] Proposal for Reducing Pattern Position Alignment Error of A Simplified Photo Lithography Method for Education2018
- Author(s)
  S. Nagaoka, M. Yamamoto, T. Tsuji, K. Matsuda, T. Shimizu, R. W. Johnston, T. Shikama, F. Shimokawa and H. Horibe
- Journal Title
  
  The Proceedings of 12th Internationa Symposium on Advances in Technology Education
  
  Volume: 1 Pages: 512-517
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-16K00992
[Journal Article] Fundamental Study of the Simplified Micro Diffusion Bipolar Transistor as the Educational Resource2017
- Author(s)
  S. Nagaoka, M. Yamamoto, T. Tsuji, T. Shimizu, R. W. Johnston, H. Horibe, F. Shimokawa,T. Shikama and M. Rusop
- Journal Title
  
  Transactions of ISATE 2017 The 11th International Symposium on Advances in Technology Education
  
  Volume: 1 Pages: 275-279
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Journal Article] A feasibility study of the selective and simultaneous thermal impurity diffusion process on the silicon substrate2016
- Author(s)
  西園寺嶺，長岡史郎，辻琢人，山本雅史，R.W.Johnston,清水共，鹿間共一
- Journal Title
  
  The Proceeding of the 6th International Symposium on Technology for Sustainability (ISTS2016) & 2nd International Students Seminar on Leadership and Networking (ISSLN 2016)
  
  Volume: - Pages: 166-171
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-16K00992
[Journal Article] A proposal of the Simplified IC Fab Establishied in the Average Science Laboratory for Cultivating Scientific Mind2016
- Author(s)
  長岡史郎，辻琢人，山本雅史，R.W.Johnston，清水共，鹿間共一
- Journal Title
  
  The Transactons of ISATE2016, The 10th International Symposium on Advances in Technology Education
  
  Volume: - Pages: 13-16
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-16K00992
[Journal Article] A Study of the Simplified IC FAB for the Science and Technical Education2016
- Author(s)
  高垣信巨，長岡史郎，辻琢人，山本雅史，R.W.Johnston,清水共，鹿間共一
- Journal Title
  
  The Proceeding of the 6th International Symposium on Technology for Sustainability (ISTS2016) & 2nd International Students Seminar on Leadership and Networking (ISSLN 2016)
  
  Volume: - Pages: 161-165
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A Study of Resolution Improvement of the Simplified Contact Photo Lithography Using Phase Shift Method for EE Education2024
- Author(s)
  S. Nagaoka*, T. Shimizu, M. Yamamoto, R. W. Johnston, K. Matsuda and H. Horibe
- Organizer
  5th Malaysia-Japan International Conference on Nanoscience, Nanotechnology and Nanoengineering 2024 (MJIC2024)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22K12308
[Presentation] A Study of Resolution an Overlay Accuracy of a Simplified Photo Lithography Process for EE Education Use2023
- Author(s)
  (4)T.Shimizu, M.Yamamoto, R.Johnston, K.Matsuda, H. Horibe and S.Nagaoka,
- Organizer
  4th MALAYSIA- JAPAN International Conference on Nanoscience, Nanotechnology & Nanoengineering 2023 (MJIC 2023)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22K12308
[Presentation] Feasibility Study of a Simplified Nanotech Platform and Device Evaluation Procedure Established for Average Educational Science Laboratories2023
- Author(s)
  S.Nagaoka, M.Yamamoto, T.Shimizu, R.Johnston, K.Matsuda and H.Horibe
- Organizer
  4th MALAYSIA-JAPAN International Conference on Nanoscience, Nanotechnology & Nanoengineering 2023 (MJIC 2023),
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-22K12308
[Presentation] 教育用簡素化微細加工プロセスのレジストパタン解像度と重ね合せ精度改善に関する一考察2023
- Author(s)
  土井彩乃、清水共、川染勇人、山本雅史、ロバートジョンストン、松田和典、堀邊英夫、長岡史郎
- Organizer
  令和５年度電気・電子・情報関係学会四国支部連合大会、11ー5
- Data Source
  KAKENHI-PROJECT-22K12308
[Presentation] A study for reducing pattern position alignment error of a simplified photo lithography method for the nanotech platform established at the average science laboratory2019
- Author(s)
  H. Kunisawa, M. Yamamoto, T. Shimizu, R. W. Johnston, F. Shimokawa, H. Horibe, M. Rusop, and S. Nagaoka
- Organizer
  The 10th International Conference on Nanoscience and Nanotechnology 2019 (NANO-SciTech 2019)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A Proposal of Totally Simplified Educational Semiconductor Device Fabrication Process under Normal Air Environment2018
- Author(s)
  S.Nagaoka,M.Yamamoto,T.Tsuji,T.Shimizu,R.W.Johnston, T. Shikama, and H.Horibe
- Organizer
  9th International Conference on Nanoscience and Nanotechnology 2018, (Nano-SciTech2018)
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] 二層フォトレジストのドライ現像と不純物の熱拡散プロセスへの応用2017
- Author(s)
  西園寺嶺、長岡史郎、辻琢人、山本雅史、ロバート・ジョンストン、堀邊英夫、清水共
- Organizer
  第14回CAT－CVD研究会
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A p-n Junction Study for nMOS FET Fabrication using Alignment-less Lithography2017
- Author(s)
  高垣信巨，長岡史郎，辻琢人，山本雅史，R.W.Johnston,清水共，鹿間共一
- Organizer
  NANO-SciTech2017, International Conference on Nanoscience & Nanotechnology 2017
- Place of Presentation
  Institute of Business Excellence (IBE), Universiti Teknologi MARA (UiTM),Malaysia
- Year and Date
  2017-02-24
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A Boron Selective Thermal Impurity Diffusion Method that Support a Simplified pMOS FET Fabrication Process2017
- Author(s)
  西園寺嶺，長岡史郎，辻琢人，山本雅史，R.W.Johnston,清水共，鹿間共一
- Organizer
  NANO-SciTech2017, International Conference on Nanoscience & Nanotechnology 2017
- Place of Presentation
  Institute of Business Excellence (IBE), Universiti Teknologi MARA (UiTM),Malaysia
- Year and Date
  2017-02-24
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A p-n Junction for the Simplified nMOS FET Fabrication using Alignment-less Lithography2017
- Author(s)
  高垣信巨，長岡史郎、辻琢人，山本雅史，R.W.Jhonston,堀邊英夫，清水共
- Organizer
  The International Seminar on Electronics Engineering and NANO Technology (ISEENT2017)
- Place of Presentation
  香川高専　詫間キャンパス，香川県
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A Feasibility Study of Selective and Simultaneous Thermal Diffusions for Simplified MOS Devie Fabrication2017
- Author(s)
  長岡史郎，塩田幸輝，辻琢人，山本雅史，R.W.Johnsotn, 堀邊英夫，清水共
- Organizer
  International Conference on Nanoscience & Nanotechnology 2017（NANO-SciTech2017),
- Place of Presentation
  Institute of Business Excellence (IBE), Universiti Teknologi MARA (UiTM), Malaysia
- Year and Date
  2017-02-24
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] Measurement of Rate of Photoresist Removal by Hydrogen Radicals using Thin Film Interference2017
- Author(s)
  山本雅史，長岡史郎，鹿間共一，堀邊英夫，清水共
- Organizer
  NANO-SciTech2017, International Conference on Nanoscience & Nanotechnology 2017
- Place of Presentation
  Institute of Business Excellence (IBE), Universiti Teknologi MARA (UiTM), Malaysia
- Year and Date
  2017-02-24
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] Boron Selective Thermal Diffusion for the Simplified pMOS FET Fabrication Process2017
- Author(s)
  西園寺嶺，長岡史郎、辻琢人，山本雅史，R.W.Jhonston,堀邊英夫，清水共
- Organizer
  The International Seminar on Electronics Engineering and NANO Technology (ISEENT2017)
- Place of Presentation
  香川高専　詫間キャンパス，香川県
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] 二層レジストを用いた酸素プラズマによるドライ現像2017
- Author(s)
  高垣信巨、長岡史郎、辻琢人、山本雅史、ロバート・ジョンストン、堀邊英夫、清水共
- Organizer
  第14回CAT－CVD研究会
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A Study of the Simplified IC FAB for the Science and Technical Education2016
- Author(s)
  高垣信巨，長岡史郎，辻琢人，山本雅史，R.W.Johnston,清水共，鹿間共一
- Organizer
  the 6th International Symposium on Technology for Sustainability (ISTS2016) & 2nd International Students Seminar on Leadership and Networking (ISSLN 2016)
- Place of Presentation
  Vocational College Universitas Gadjah MADA, Indonesia
- Year and Date
  2016-10-04
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A feasibility study of the selective and simultaneous thermal impurity diffusion process on the silicon substrate2016
- Author(s)
  西園寺嶺，長岡史郎，辻琢人，山本雅史，R.W.Johnston,清水共，鹿間共一
- Organizer
  The 6th International Symposium on Technology for Sustainability (ISTS2016) & 2nd International Students Seminar on Leadership and Networking (ISSLN 2016)
- Place of Presentation
  Vocational College Universitas Gadjah MADA, Indonesia
- Year and Date
  2016-10-04
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992
[Presentation] A proposal of the Simplified IC Fab Establishied in the Average Science Laboratory for Cultivating Scientific Mind2016
- Author(s)
  長岡史郎，辻琢人，鹿間共一，山本雅史，R.W.Johnsotn，清水共
- Organizer
  The 10th International Symposium on Advances in Technology Education
- Place of Presentation
  School of Engineering, TOHOKU University, Miyagi Japan
- Year and Date
  2016-09-13
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-16K00992

1. Nagaoka Shiro (30300635)

# of Collaborated Projects: 2 results

# of Collaborated Products: 22 results
2. 堀邊英夫 (00372243)

# of Collaborated Projects: 2 results

# of Collaborated Products: 14 results
3. 山本雅史 (60733821)

# of Collaborated Projects: 2 results

# of Collaborated Products: 22 results
4. JOHNSTON ROBERT (60743698)

# of Collaborated Projects: 2 results

# of Collaborated Products: 17 results
5. 鹿間共一 (70206069)

# of Collaborated Projects: 2 results

# of Collaborated Products: 24 results
6. 下川房男 (90580598)

# of Collaborated Projects: 1 results

# of Collaborated Products: 3 results
7. 松田和典 (10192337)

# of Collaborated Projects: 1 results

# of Collaborated Products: 4 results

Shimizu Tomo 清水 共

清水 共 シミズ トモ

Research Projects

Research Products

Co-Researchers

Semiconductor device foundry achieved at a nanotech platform established on an average science lab.

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

A nanotechnology platform established in average science laboratories

Principal Investigator

Project Period (FY)

Research Category

Research Field

Research Institution

[Journal Article] Proposal for Reducing Pattern Position Alignment Error of A Simplified Photo Lithography Method for Education2018

Author(s)

Journal Title

Data Source

[Journal Article] Fundamental Study of the Simplified Micro Diffusion Bipolar Transistor as the Educational Resource2017

Author(s)

Journal Title

Data Source

[Journal Article] A feasibility study of the selective and simultaneous thermal impurity diffusion process on the silicon substrate2016

Author(s)

Journal Title

Data Source

[Journal Article] A proposal of the Simplified IC Fab Establishied in the Average Science Laboratory for Cultivating Scientific Mind2016

Author(s)

Journal Title

Data Source

[Journal Article] A Study of the Simplified IC FAB for the Science and Technical Education2016

Author(s)

Journal Title

Data Source

[Presentation] A Study of Resolution Improvement of the Simplified Contact Photo Lithography Using Phase Shift Method for EE Education2024

Author(s)

Organizer

Data Source

[Presentation] A Study of Resolution an Overlay Accuracy of a Simplified Photo Lithography Process for EE Education Use2023

Author(s)

Organizer

Data Source

[Presentation] Feasibility Study of a Simplified Nanotech Platform and Device Evaluation Procedure Established for Average Educational Science Laboratories2023

Author(s)

Organizer

Data Source

[Presentation] 教育用簡素化微細加工プロセスのレジストパタン解像度と重ね合せ精度改善に関する一考察2023

Author(s)

Organizer

Data Source

[Presentation] A study for reducing pattern position alignment error of a simplified photo lithography method for the nanotech platform established at the average science laboratory2019

Author(s)

Organizer

Data Source

[Presentation] A Proposal of Totally Simplified Educational Semiconductor Device Fabrication Process under Normal Air Environment2018

Author(s)

Organizer

Data Source

[Presentation] 二層フォトレジストのドライ現像と不純物の熱拡散プロセスへの応用2017

Author(s)

Organizer

Data Source

[Presentation] A p-n Junction Study for nMOS FET Fabrication using Alignment-less Lithography2017

Author(s)

Organizer

Place of Presentation

Year and Date

Data Source

[Presentation] A Boron Selective Thermal Impurity Diffusion Method that Support a Simplified pMOS FET Fabrication Process2017

Author(s)

Organizer

Place of Presentation

Year and Date

Data Source

[Presentation] A p-n Junction for the Simplified nMOS FET Fabrication using Alignment-less Lithography2017

Author(s)

Organizer

Shimizu Tomo 清水共

清水共シミズトモ