Toda Masaya 戸田雅也

… Alternative Names

TODA Masaya 戸田雅也

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Researcher Number	40509890
Other IDs
Affiliation (Current)	2025: 東北大学, 工学研究科, 准教授
Affiliation (based on the past Project Information) *help	2024 – 2025: 東北大学, 工学研究科, 准教授 2015 – 2022: 東北大学, 工学研究科, 准教授 2013 – 2016: 東北大学, 工学(系)研究科(研究院), 准教授 2014 – 2015: 東北大学, 大学院工学研究科, 准教授 2012: 東北大学, マイクロシステム融合研究開発センター, 助教
Review Section/Research Field	Principal Investigator General applied physics / Basic Section 20010:Mechanics and mechatronics-related / Basic Section 28050:Nano/micro-systems-related / Nano/Microsystems / Applied physics, general Except Principal Investigator General applied physics / Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields / Basic Section 21060:Electron device and electronic equipment-related / Electron device/Electronic equipment
Keywords	Principal Investigator 磁気共鳴 / マイクロ流路 / カンチレバーセンサ / 電子スピン共鳴 / カンチレバー / イメージング / 磁力センサ / スピン検出 / 3次元画像化 / ラジカルセンシング … More / 3次元イメージング / マイクロデバイス / 表面吸着 / 熱抵抗計測 / マイクロシステム / 熱計測 / 超臨界二酸化炭素 / 超精密計測 / 生体分子 / 微小共振器 / 細胞診断 / 磁気計測 / 活性酸素濃度 / アポトーシス / 磁気プローブ / 高感度計測 / ラジカル / ナノワイヤー / 磁気共鳴力顕微鏡 / 電子スピン / 物理計測・制御 … More Except Principal Investigator MEMS / ダイヤモンド / 磁気センサ / 高温 / 磁気センサー / 電子機械スイッチ / MEMS/NEMS / ロジック / 品質因子 / NEMS / スイッチ / ＭＥＭＳ / Q値 / ナノマシン / 太陽発電 / エナジーハーベスタ / 熱電発電 / クリーンエネルギー / マイクロ発電 / 排熱 / 熱電子発電 / マイクロシステム / マイクロセンサ / 温度センサ / ｐｎ接合 / サーミスタ / マイクロチャンネル / 細胞 / 振動子 / 熱量センサ Less

Magnetic resonance imaging of micro-sample at a standard temperature and pressure conditionsPrincipal Investigator
- Principal Investigator
  
  戸田雅也
- Project Period (FY)
  2024 – 2026
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 20010:Mechanics and mechatronics-related
- Research Institution
  Tohoku University
超磁歪材料/ダイヤモンドMEMS異種接合用いた革新的な磁気イメージセンサの創製
- Principal Investigator
  
  廖梅勇
- Project Period (FY)
  2024 – 2028
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Review Section
  
  Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
- Research Institution
  National Institute for Materials Science
High-performance and high-reliability diamond MEMS: fundamental and magnetic sensing application
- Principal Investigator
  
  LIAO Meiyong
- Project Period (FY)
  2020 – 2022
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 21060:Electron device and electronic equipment-related
- Research Institution
  National Institute for Materials Science
Innovative spin detection with creative assembling with nanosensor and microsystemPrincipal Investigator
- Principal Investigator
  
  Masaya Toda
- Project Period (FY)
  2019 – 2021
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Review Section
  
  Basic Section 28050:Nano/micro-systems-related
- Research Institution
  Tohoku University
Development of an early detection technique of apoptosis by high sensitive magnetic resonance force measurement system(Fostering Joint International Research)Principal Investigator
- Principal Investigator
  
  Toda Masaya
- Project Period (FY)
  2016 – 2017
- Research Category
  
  Fund for the Promotion of Joint International Research (Fostering Joint International Research)
- Research Field
  
  General applied physics
- Research Institution
  Tohoku University
Development of nano/micro system using supercritical fluidPrincipal Investigator
- Principal Investigator
  
  Toda Masaya
- Project Period (FY)
  2015 – 2017
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  Nano/Microsystems
- Research Institution
  Tohoku University
Diamond NEMS logic for extrem environments
- Principal Investigator
  
  Liao Meiyong Liao
- Project Period (FY)
  2015 – 2018
- Research Category
  
  Grant-in-Aid for Scientific Research (B)
- Research Field
  
  Electron device/Electronic equipment
- Research Institution
  National Institute for Materials Science
Development for early detection of apoptosis by high sensitive miniature magnetic resonance force measurement systemPrincipal Investigator
- Principal Investigator
  
  Toda Masaya
- Project Period (FY)
  2014 – 2016
- Research Category
  
  Grant-in-Aid for Young Scientists (A)
- Research Field
  
  General applied physics
- Research Institution
  Tohoku University
Femto watt thermal sensor
- Principal Investigator
  
  Ono Takahito
- Project Period (FY)
  2013 – 2015
- Research Category
  
  Grant-in-Aid for Scientific Research (A)
- Research Field
  
  General applied physics
- Research Institution
  Tohoku University
Narrow gap thermionic power generator
- Principal Investigator
  
  ONO Takahito
- Project Period (FY)
  2013 – 2014
- Research Category
  
  Grant-in-Aid for Challenging Exploratory Research
- Research Field
  
  General applied physics
- Research Institution
  Tohoku University
High sensitive probe for magnetic resonance force microscopyPrincipal Investigator
- Principal Investigator
  
  TODA Masaya
- Project Period (FY)
  2012 – 2013
- Research Category
  
  Grant-in-Aid for Young Scientists (B)
- Research Field
  
  Applied physics, general
- Research Institution
  Tohoku University

All 2023 2022 2021 2020 2019 2018 2017 2016 2015 2014 2013 2012 Other

All Journal Article Presentation

[Journal Article] On‐chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film2023
- Author(s)
  Zhang Zilong、Zhao Wen、Chen Guo、Toda Masaya、Koizumi Satoshi、Koide Yasuo、Liao Meiyong
- Journal Title
  
  Advanced Functional Materials
  
  Volume: 33 Issue: 27 Pages: 2300805-2300805
- DOI
  10.1002/adfm.202300805
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-22K18957, KAKENHI-PROJECT-20H02212, KAKENHI-PROJECT-22KF0382
[Journal Article] Assembled Comb-Drive XYZ-Microstage With Large Displacements and Low Crosstalk for Scanning Force Microscopy2022
- Author(s)
  Xue Gaopeng、Toda Masaya、Li Xinghui、Wang Xiaohao、Ono Takahito
- Journal Title
  
  Journal of Microelectromechanical Systems
  
  Volume: 31 Issue: 1 Pages: 54-62
- DOI
  10.1109/jmems.2021.3123962
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02568
[Journal Article] Three-dimensional imaging of electron spin resonance-magnetic resonance force microscopy at room temperature2021
- Author(s)
  Toda Masaya、Ono Takahito
- Journal Title
  
  Journal of Magnetic Resonance
  
  Volume: 330 Pages: 107045-107045
- DOI
  10.1016/j.jmr.2021.107045
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-19H02568
[Journal Article] Comprehensive study of magnetostriction-based MEMS magnetic sensor of a FeGa/PZT cantilever2021
- Author(s)
  Indianto Mohammad Akita、Toda Masaya、Ono Takahito
- Journal Title
  
  Sensors and Actuators A: Physical
  
  Volume: 331 Pages: 112985-112985
- DOI
  10.1016/j.sna.2021.112985
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H02568
[Journal Article] Magnetic Resonance Force Microscopy With Vacuum-Packaged Magnetic Cantilever Towards Free Radical Detection2021
- Author(s)
  Xue Gaopeng、Toda Masaya、Li Xinghui、Wang Xiaohao、Ono Takahito
- Journal Title
  
  IEEE Sensors Journal
  
  Volume: 21 Issue: 20 Pages: 22578-22586
- DOI
  10.1109/jsen.2021.3106352
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02568
[Journal Article] Evaluation of Microfluidic Channels With Thin Si Windows and Trapping Structures2021
- Author(s)
  Toda Masaya、Hayashi Hideki、Toan Nguyen van、Inomata Naoki、Ono Takahito
- Journal Title
  
  Journal of Microelectromechanical Systems
  
  Volume: 30 Issue: 4 Pages: 560-568
- DOI
  10.1109/jmems.2021.3076791
- Peer Reviewed / Open Access / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02568, KAKENHI-PROJECT-20K15147
[Journal Article] Electroplated FePt Films for Micromechanical Magnetic Sensors2021
- Author(s)
  Toda Masaya、Xu Hao、Ono Takahito
- Journal Title
  
  physica status solidi (a)
  
  Volume: 218 Issue: 8 Pages: 2000547-2000547
- DOI
  10.1002/pssa.202000547
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H02568
[Journal Article] Torsional resonator of Pd?Si?Cu metallic glass with a low rotational spring constant2020
- Author(s)
  Toda Masaya、Li Chunyang、Van Toan Nguyen、Tsai Yao-Chuan、Lin Yu-Ching、Ono Takahito
- Journal Title
  
  Microsystem Technologies
  
  Volume: 27 Issue: 3 Pages: 929-935
- DOI
  10.1007/s00542-020-04996-2
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02568
[Journal Article] Development of assembled microchannel resonator as an alternative fabrication method of a microchannel resonator for mass sensing in flowing liquid2020
- Author(s)
  Indianto M. A.、Toda M.、Ono T.
- Journal Title
  
  Biomicrofluidics
  
  Volume: 14 Issue: 6 Pages: 064111-064111
- DOI
  10.1063/5.0032040
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H02568
[Journal Article] Enhancing Delta E Effect at High Temperatures of Galfenol/Ti/Single-Crystal Diamond Resonators for Magnetic Sensing2020
- Author(s)
  Zilong Zhang, Haihua Wu, Liwen Sang, Yukiko Takahashi, Jian Huang, Linjun Wang, Masaya Toda, Indianto Mohammad Akita, Yasuo Koide, Satoshi Koizumi, Meiyong Liao
- Journal Title
  
  ACS Applied Materials & Interfaces
  
  Volume: 12 Issue: 20 Pages: 23155-23164
- DOI
  10.1021/acsami.0c06593
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PLANNED-16H06419, KAKENHI-PROJECT-20H02212
[Journal Article] Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures2020
- Author(s)
  Zhang Zilong、Wu Yuanzhao、Sang Liwen、Wu Haihua、Huang Jian、Wang Linjun、Takahashi Yukiko、Li Runwei、Koizumi Satoshi、Toda Masaya、Akita Indianto Mohammad、Koide Yasuo、Liao Meiyong
- Journal Title
  
  Materials Research Letters
  
  Volume: 8 Issue: 5 Pages: 180-186
- DOI
  10.1080/21663831.2020.1734680
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-18K14141, KAKENHI-PLANNED-16H06419, KAKENHI-PROJECT-20H02212
[Journal Article] Effect of Deep-Defects Excitation on Mechanical Energy Dissipation of Single-Crystal Diamond2020
- Author(s)
  Sun Huanying、Sang Liwen、Wu Haihua、Zhang Zilong、Teraji Tokuyuki、Li Tie-Fu、You Jiangqiang、Toda Masaya、Koizumi Satoshi、Liao Meiyong
- Journal Title
  
  Physical Review Letters
  
  Volume: 125 Issue: 20 Pages: 206802-206802
- DOI
  10.1103/physrevlett.125.206802
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20H02212, KAKENHI-PROJECT-20H02187
[Journal Article] Bridged resonator based on assembled Si thin wire2020
- Author(s)
  Toda Masaya、Nakamura Taichi、Inomata Naoki、Toan Nguyen Van、Ono Takahito
- Journal Title
  
  Journal of Micromechanics and Microengineering
  
  Volume: 30 Issue: 10 Pages: 105015-105015
- DOI
  10.1088/1361-6439/aba6cc
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K15147, KAKENHI-PROJECT-19H02568
[Journal Article] Vacancy Color Stress Sensing with Embedded Diamond Particles on Si Micro-cantilevers2020
- Author(s)
  Toda Masaya、Shahrukh Akhtar M、Ono Takahito
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines
  
  Volume: 140 Issue: 9 Pages: 222-227
- DOI
  10.1541/ieejsmas.140.222
- NAID
  130007894669
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-19H02568
[Journal Article] Fabrication and evaluation of assembled micro-tube resonator for mass measurement in flowing liquid2018
- Author(s)
  Mohammad Akita Indianto, Masaya Toda, and Takahito Ono
- Journal Title
  
  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems
  
  Volume: 31 Pages: 1261-1263
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15KK0225
[Journal Article] Pico-thermogravimetric material properties analysis using diamond cantilever beam2018
- Author(s)
  Ioana Voiculescu, Meiyong Liao, Marjan Zakerin, Rudiger Berger, Takahito Ono, Masaya Toda
- Journal Title
  
  Sensor and Actuators A: Physical
  
  Volume: 271 Pages: 356-363
- DOI
  10.1109/transducers.2017.7994519
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03999, KAKENHI-PROJECT-15KK0225
[Journal Article] Reducing intrinsic energy dissipation in diamond-on-diamond mechanical resonators toward one million quality factor2018
- Author(s)
  Wu Haihua、Sang Liwen、Li Yumeng、Teraji Tokuyuki、Li Tiefu、Imura Masataka、You Jianqiang、Koide Yasuo、Toda Masaya、Liao Meiyong
- Journal Title
  
  Physical Review Materials
  
  Volume: 2 Issue: 9 Pages: 090601-090601
- DOI
  10.1103/physrevmaterials.2.090601
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-18K14141, KAKENHI-PROJECT-15H03999
[Journal Article] Thermal resistance change of liquid carbon dioxide based on narrow space effect in micro chamber2018
- Author(s)
  Masaya Toda, Tomoyuki Yamagami, Naoki Inomata, Takashi Fujii, and Takahito Ono
- Journal Title
  
  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems
  
  Volume: 31 Pages: 1296-1299
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15K13316
[Journal Article] Pico-thermogravimetric material properties analysis using diamond cantilever beam2018
- Author(s)
  Voiculescu Ioana、Liao Meiyong、Zakerin Marjan、Berger Ruediger、Ono Takahito、Toda Masaya
- Journal Title
  
  Sensors and Actuators, A: Physical
  
  Volume: 271 Pages: 356-363
- DOI
  10.1016/j.sna.2018.01.004
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15KK0225, KAKENHI-PROJECT-15H03999
[Journal Article] Vacuum packaged cantilever sensor mounted with a magnetic particle for magnetic force detection2017
- Author(s)
  Gaopeng Xue, Masaya Toda, Takahito Ono
- Journal Title
  
  Proceedings of the International Conference on Solid-State Sensors, Actuators and Microsystems
  
  Volume: 19 Pages: 1096-1099
- DOI
  10.1109/transducers.2017.7994243
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15KK0225, KAKENHI-PROJECT-16K14189
[Journal Article] Improvement of the quality factor of single crystal diamond mechanical resonators2017
- Author(s)
  M. Liao, M. Toda, L. Sang, T. Teraji, M. Imura, and Y. Koide
- Journal Title
  
  Jpn. J. Appl. Phys.
  
  Volume: 56 Issue: 2 Pages: 0241011-5
- DOI
  10.7567/jjap.56.024101
- NAID
  210000147429
- Peer Reviewed / Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03980, KAKENHI-PROJECT-15H03999
[Journal Article] Microfabrication of a scanning probe with NV centers in a selectively grown diamond thin film through a xenon difluoride etching process2017
- Author(s)
  Zhu Minjie、Li Jinhua、Toda Masaya、Ono Takahito
- Journal Title
  
  Journal of Micromechanics and Microengineering
  
  Volume: 27 Issue: 12 Pages: 125007-125007
- DOI
  10.1088/1361-6439/aa8f12
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-15KK0225
[Journal Article] Cantilever Beam Temperature Sensors for Biological Application2017
- Author(s)
  Masaya Toda, Naoki Inomata, Takahito Ono and Ioana Voiculescu
- Journal Title
  
  IEEJ Transactions on Electrocal and Electronic Engineering
  
  Volume: 12 Issue: 2 Pages: 153-160
- DOI
  10.1002/tee.22360
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PUBLICLY-16H01376, KAKENHI-PROJECT-15KK0225
[Journal Article] Thermal characterization of dynamic silicon cantilever array sensors by digital holographic microscopy2017
- Author(s)
  Marjan Zakerin, Antonin Novak, Masaya Toda, Yves Emery, Filipe Natalio,　Hans-J?rgen Butt and Ruediger Berger
- Journal Title
  
  Sensors (Switzerland)
  
  Volume: 17 Issue: 6 Pages: 1191-1191
- DOI
  10.3390/s17061191
- Peer Reviewed / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15KK0225
[Journal Article] Fabrication and evaluation of CVD diamond resonators2016
- Author(s)
  Yuya Mochimaru, Masaya Toda and Takahito Ono
- Journal Title
  
  Proceedings of the IEEE International Conference on Nanotechnology
  
  Volume: 10 Pages: 676-677
- DOI
  10.1109/nano.2016.7751555
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26706023
[Journal Article] Investigation of bimaterial cantilever beam for heat sensing in liquid2016
- Author(s)
  Ioana Voiculescua, Fei Liu, Takahito Ono, Masaya Toda
- Journal Title
  
  Sensors and Actuators
  
  Volume: 242 Pages: 58-66
- DOI
  10.1016/j.sna.2015.11.030
- Acknowledgement Compliant / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26706023
[Journal Article] Comb-Drive XYZ-microstage With Large Displacements Based on Chip-Level Microassembly2016
- Author(s)
  Gaopeng Xue, Masaya Toda, Takahito Ono
- Journal Title
  
  Journal of Microelectromechanical Systems
  
  Volume: 25 Issue: 6 Pages: 989-998
- DOI
  10.1109/jmems.2016.2607233
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26706023
[Journal Article] Temperature-depended mechanical properties of microfabricated vanadium oxide mechanical resonators for thermal sensing2016
- Author(s)
  N. Inomata, L. Pan, M. Toda, and T. Ono
- Journal Title
  
  Japanese Journal of Applied Physics
  
  Volume: 55 Issue: 3 Pages: 037201-037201
- DOI
  10.7567/jjap.55.037201
- NAID
  210000146154
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-15K17450, KAKENHI-PROJECT-25246031
[Journal Article] Assembled Comb-drive XYZ-microstage with DPPH Sample for the 3D Scanning of Magnetic Resonance Force Microscope2016
- Author(s)
  Gaopeng Xue, Masaya Toda, and Takahito Ono
- Journal Title
  
  Proceedings of the IEEE International Conference on Nanotechnology
  
  Volume: 16 Pages: 980-981
- DOI
  10.1109/nano.2016.7751422
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26706023
[Journal Article] An Investigation of Processes for Glass Micromachining2016
- Author(s)
  Nguyen Van Toan, Masaya Toda, and Takahito Ono
- Journal Title
  
  Micromachines
  
  Volume: 7 Issue: 3 Pages: 1-12
- DOI
  10.3390/mi7030051
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25246031
[Journal Article] Magnetic field sensor based on vacuum packaged cantilever with a mounted magnet2016
- Author(s)
  Gaopeng Xue, Masaya Toda, Nurasyikin Mohd, Zhonglie An, Nguyen Van Toan, Takahito Ono
- Journal Title
  
  「センサ・マイクロマシンと応用システム」シンポジウム論文集
  
  Volume: 33 Pages: 1-4
- NAID
  40021216861
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26706023
[Journal Article] Fabrication of Assembled Scanning Probe with Nitrogen Vacancy Centers in Diamond Particle2016
- Author(s)
  Minjie Zhu, Masaya Toda, Takahito Ono
- Journal Title
  
  IEEE Transactions on Nanotechnology
  
  Volume: 99 Issue: 4 Pages: 1-6
- DOI
  10.1109/tnano.2016.2640191
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26706023, KAKENHI-PROJECT-15KK0225
[Journal Article] ulse-Reverse Electrodeposition and Micromachining of Graphene-Nickel Composite: An Efficient Strategy toward High-Performance Microsystem Application2016
- Author(s)
  Junhua Li, Zhonglie An, Zhuqing Wang, Masaya Toda, and Takahito Ono
- Journal Title
  
  Applied Materials & Interfaces
  
  Volume: 8 Issue: 6 Pages: 3969-3976
- DOI
  10.1021/acsami.5b11164
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25246031
[Journal Article] Scanning Probe with Nitrogen Vacancy Centers in Diamond Particle for Magnetic Resonance Imaging2016
- Author(s)
  Minjie Zhu, Masaya Toda, and Takahito Ono
- Journal Title
  
  Proceedings of the IEEE International Conference on Nanotechnology
  
  Volume: 16 Pages: 210-213
- DOI
  10.1109/nano.2016.7751404
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-26706023
[Journal Article] Packaging Technique of Micro Cantilever for Magnetic Force Sensing2016
- Author(s)
  Nurasyikin Mohd, Naoki Inomata, Nguyen Van Toan, Takahito Ono and Masaya Toda
- Journal Title
  
  Proceedings of the International Workshop on Nanomechanical Sensors
  
  Volume: 12 Pages: 150-151
- Data Source
  KAKENHI-PROJECT-26706023
[Journal Article] Fabrication of nano-gap strcutrues based on plastic deformation of strained Si springs by stiction effects2015
- Author(s)
  Masaya Toda, Atsushi Yokoyama, Nguyen Van Toan, Naoki Inomata, and Takahito Ono
- Journal Title
  
  Microsystem Technologies
  
  Volume: 21 Issue: 3 Pages: 649-654
- DOI
  10.1007/s00542-014-2182-z
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25246031
[Journal Article] MICRO FLUIDIC CHAMBER WITH THIN SI WINDOWS FOR OBSERVATION OF BIOLOGICAL SAMPLES IN VACUUM2015
- Author(s)
  Hideki Hayashi, Masaya Toda, and Takahito Ono
- Journal Title
  
  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems
  
  Volume: 28 Pages: 344-347
- DOI
  10.1109/memsys.2015.7050959
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26706023
[Journal Article] 磁気共鳴イメージングための NVセンターを有するダイヤモンドプローブ2015
- Author(s)
  朱敏杰, 戸田雅也, 小野崇人
- Journal Title
  
  日本機械学会2015年度年次大会講演論文集
  
  Volume: 15
- NAID
  40020857713
- Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26706023
[Journal Article] Si nanowire probe with NdFeB magnet for attonewton-scale force detection2015
- Author(s)
  Yong-Jun Seo, Masaya Toda and Takahito Ono
- Journal Title
  
  Journal of Micromechanics and Microengineering
  
  Volume: 4 Issue: 4 Pages: 1-5
- DOI
  10.1088/0960-1317/25/4/045015
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-26706023
[Journal Article] Diamond Probe with Nitrogen Vacancy Center for Magnetic Resonance Imaging2015
- Author(s)
  Minjie Zhu, Masaya Toda and Takahito Ono
- Journal Title
  
  「センサ・マイクロマシンと応用システム」シンポジウム論文集
  
  Volume: 32
- NAID
  40020857713
- Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-26706023
[Journal Article] Microstructuring of carbon nanotubes-nickel nanocomposite2015
- Author(s)
  Zhonglie An, Liang He, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, and Takahito Ono
- Journal Title
  
  Nanotechnology
  
  Volume: 26 Issue: 19 Pages: 195601-195601
- DOI
  10.1088/0957-4484/26/19/195601
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25246031
[Journal Article] ASSEMBLED COMB-DRIVE XYZ-MICROSTAGE WITH LARGE DISPLACEMENTS FOR LOW TEMPERATURE MEASUREMENT SYSTEMS2015
- Author(s)
  Gaopeng Xue, Masaya Toda, and Takahito Ono
- Journal Title
  
  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems
  
  Volume: 28 Pages: 14-17
- DOI
  10.1109/memsys.2015.7050874
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-26706023
[Journal Article] Chip-Level Microassembly of XYZ-Microstage with Large Displacements2015
- Author(s)
  Gaopeng Xue, Masaya Toda, Takahito Ono
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines
  
  Volume: 135 Issue: 6 Pages: 236-237
- DOI
  10.1541/ieejsmas.135.236
- NAID
  130005072486
- ISSN
  1341-8939, 1347-5525
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25246031
[Journal Article] A Long Bar Type Silicon Resonator with a High Quality Factor2014
- Author(s)
  Nguyen Van Toan, Masaya Toda, Yusuke kawai, and Takahito Ono
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines
  
  Volume: 134 Issue: 2 Pages: 26-31
- DOI
  10.1541/ieejsmas.134.26
- NAID
  130003391578
- ISSN
  1341-8939, 1347-5525
- Language
  English
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25246031
[Journal Article] Fabrication of Silicon Nanowire Probe with Magnet for Magnetic Resonance Force Microscopy2014
- Author(s)
  Yong-Jun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines
  
  Volume: 134 Issue: 6 Pages: 166-167
- DOI
  10.1541/ieejsmas.134.166
- NAID
  130004438741
- ISSN
  1341-8939, 1347-5525
- Language
  English
- Peer Reviewed / Acknowledgement Compliant / Open Access
- Data Source
  KAKENHI-PROJECT-26706023
[Journal Article] Synthesis and Characterization of Carbon Nanotube-Cu Composite using Supercritical Fluid Deposition2014
- Author(s)
  Zhongle An, Masaya Toda, and Takahito Ono
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines
  
  Volume: 134 Issue: 2 Pages: 38-39
- DOI
  10.1541/ieejsmas.134.38
- NAID
  130003391580
- ISSN
  1341-8939, 1347-5525
- Language
  English
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-25246031
[Journal Article] Ultorasensitive Si Nanowire Probe for Magnetic Resonance Detection2014
- Author(s)
  Yongjun Seo、Masaya Toda、Yusuke Kawai、Takahito Ono
- Journal Title
  
  Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems
  
  Volume: 27 Pages: 151-154
- DOI
  10.1109/memsys.2014.6765596
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-24760052, KAKENHI-PROJECT-26706023
[Journal Article] A capacitive silicon resonator with a movable electrode structure for gap width reduction2014
- Author(s)
  Nguyen Van Toan, Masaya Toda, Yusuke kawai, and Takahito Ono
- Journal Title
  
  Journal of Micromechanics and Microengineering
  
  Volume: 24 Issue: 2 Pages: 025006-025006
- DOI
  10.1088/0960-1317/24/2/025006
- Peer Reviewed / Acknowledgement Compliant
- Data Source
  KAKENHI-PROJECT-25246031
[Journal Article] Fabrication of Silicon Nanowire Probe with magnet for Magnetic Resonance Force Microscopy2014
- Author(s)
  Yongjun Seo、Masaya Toda、Yusuke Kawai、Takahito Ono
- Journal Title
  
  IEEJ Transactions on Sensors and Micromachines Letter
  
  Volume: vol.134(印刷中)
- NAID
  130004438741
- URL
  https://www.jstage.jst.go.jp/browse/ieejsmas
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-24760052
[Journal Article] Fabrication of CNT-carbon composite microstructures using Si micromolding and pyrolysis2013
- Author(s)
  L. He, M. Toda, Y. Kawai, H. Miyashita, M. Omori, T. Hashida, R. Berger, T. Ono
- Journal Title
  
  Microsystem Technologies
  
  Volume: (online) Issue: 2 Pages: 201-208
- DOI
  10.1007/s00542-013-1771-6
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-21226004, KAKENHI-PROJECT-25246031
[Presentation] ラジカルセンシングのための封止型磁気センサ2021
- Author(s)
  椎名司, 小野崇人, 戸田雅也
- Organizer
  マグネティックス/マイクロマシン・センサシステム/バイオ・マイクロシステム合同研究会
- Data Source
  KAKENHI-PROJECT-19H02568
[Presentation] 分子吸着検出のための金属多層膜応力センサ2021
- Author(s)
  大久保潤, 戸田雅也, 小野崇人
- Organizer
  マグネティックス/マイクロマシン・センサシステム/バイオ・マイクロシステム合同研究会
- Data Source
  KAKENHI-PROJECT-19H02568
[Presentation] Chip-level-microassembly Comb-drive XYZ-microstage with Large Displacements and Low Crosstalk2021
- Author(s)
  Gaopeng Xue, Masaya Toda, Xinghui Li, Takahito Ono
- Organizer
  IEEE International Conference on Nano/Micro Engineered & Molecular Systems (IEEE-NEMS)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02568
[Presentation] 電子スピンによる磁気共鳴力顕微鏡3次元画像の妥当性の検討2021
- Author(s)
  戸田雅也
- Organizer
  マグネティックス/マイクロマシン・センサシステム/バイオ・マイクロシステム合同研究会
- Data Source
  KAKENHI-PROJECT-19H02568
[Presentation] 磁気共鳴を用いたラジカルセンシングのための磁気センサ2020
- Author(s)
  椎名司,戸田雅也,小野崇人
- Organizer
  電気学会研究会E部門総合研究会マイクロマシン・センサシステム研究会
- Data Source
  KAKENHI-PROJECT-19H02568
[Presentation] NVC を有するナノダイヤモンドを用いた磁場イメージング2019
- Author(s)
  戸田雅也, ホアヴァンチャウジョニー, 小野崇人
- Organizer
  電気学会合同研究会
- Data Source
  KAKENHI-PROJECT-19H02568
[Presentation] ナノダイヤモンドのイオン注入による蛍光強度評価2019
- Author(s)
  巻島創, 戸田雅也, 小野崇人
- Organizer
  電気学会E部門総合研究会
- Data Source
  KAKENHI-PROJECT-19H02568
[Presentation] Advanced Sensing with Assembled, Packaged and Embedded Technologies2019
- Author(s)
  Masaya Toda
- Organizer
  Smart Systems Integration; 13th International Conference and Exhibition on Integration Issues of Miniaturized Systems
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-19H02568
[Presentation] 核スピン偏極度検出のための低弾性率共振子2019
- Author(s)
  李春洋, 戸田雅也, Nguyen Van Toan, 林育菁, Tsai Yao-Chuan, 小野崇人
- Organizer
  電気学会センサ・マイクロマシン部門主催第36回「センサ・マイクロマシンと応用システム」シンポジウム
- Data Source
  KAKENHI-PROJECT-19H02568
[Presentation] Fabrication and evaluation of assembled micro-tube resonator for mass measurement in flowing liquid2018
- Author(s)
  Mohammad Akita Indianto, Masaya Toda, and Takahito Ono
- Organizer
  IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15KK0225
[Presentation] Thermal resistance change of liquid carbon dioxide based on narrow space effect in micro chamber2018
- Author(s)
  Masaya Toda, Tomoyuki Yamagami, Naoki Inomata, Takashi Fujii, and Takahito Ono
- Organizer
  The 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15K13316
[Presentation] Vacuum packaged cantilever sensor mounted with a magnetic particle for magnetic force detection2017
- Author(s)
  Gaopeng Xue, Masaya Toda, and Takahito Ono
- Organizer
  The 19th International Conference on Solid-State Sensors, Actuators and Microsystems
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15KK0225
[Presentation] Pico-thermogravimetric material properties analysis using diamond cantilever beam2017
- Author(s)
  Ioana Voiculescu, Masaya Toda, Meiyong Liao and Takahito Ono
- Organizer
  The 19th International Conference on Solid-State Sensors, Actuators and Microsystems
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15KK0225
[Presentation] ナノ表面構造を持つカンチレバーの力学応答を利用した湿度センサ2017
- Author(s)
  外間匠, 菊池亜紀応, Nguyen Van Toan, 戸田雅也, 小野崇人
- Organizer
  日本機械学会東北支部第52期講演会
- Data Source
  KAKENHI-PROJECT-15K13316
[Presentation] 単結晶ダイヤモンド機械共振子のエネルギー散逸機構2017
- Author(s)
  Meiyong Liao, 戸田雅也, Liwen Sang, 菱田俊一, 井村将隆, 田中秀治, 小出康夫
- Organizer
  第63回応用物理学会春季学術講演会
- Place of Presentation
  横浜パシフィコ
- Year and Date
  2017-03-19
- Data Source
  KAKENHI-PROJECT-15H03999
[Presentation] Single crystal diamond micromechanical and nanomechanical resonators2016
- Author(s)
  M.Y. Liao, M. Toda, L.W Sang, M. Imura, S. Hishita, S. Tanaka, Y. Koide
- Organizer
  The 10th International Conference on New Diamond and Nano Carbons 2016
- Place of Presentation
  Xi'an, China
- Year and Date
  2016-05-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03999
[Presentation] Scanning Probe with Nitrogen Vacancy Centers in Diamond Particle for Magnetic Resonance Imaging2016
- Author(s)
  Minjie Zhu, Masaya Toda, and Takahito Ono
- Organizer
  IEEE International Conference on Nanotechnology
- Place of Presentation
  仙台国際センター、仙台
- Year and Date
  2016-08-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26706023
[Presentation] Assembled Comb-drive XYZ-microstage with DPPH Sample for the 3D Scanning of Magnetic Resonance Force Microscope2016
- Author(s)
  Gaopeng Xue, Masaya Toda, and Takahito Ono
- Organizer
  IEEE International Conference on Nanotechnology
- Place of Presentation
  仙台国際センター、仙台
- Year and Date
  2016-08-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26706023
[Presentation] 単結晶ダイヤモンド機械共振子の品質係数の向上2016
- Author(s)
  Meiyong Liao, 戸田　雅也, Liwen Sang, 寺地徳之, 井村将隆, 小出康夫
- Organizer
  第77回応用物理学会秋季学術講演会
- Place of Presentation
  鷺メッセ（新潟県新潟市）
- Year and Date
  2016-09-13
- Data Source
  KAKENHI-PROJECT-15H03999
[Presentation] Microfabricated vanadium oxide resonant thermal sensor with a high temeperature coefficient of resonant frequency2016
- Author(s)
  Naoki Inomata, Libao Pan, Masaya Toda, and Takahito Ono
- Organizer
  The 29th IEEE International Conference on Micro Electro Mechanical Systems
- Place of Presentation
  新潟　朱鷺メッセ
- Year and Date
  2016-01-24
- Data Source
  KAKENHI-PROJECT-25246031
[Presentation] Fabrication and evaluation of CVD diamond resonators2016
- Author(s)
  Yuya Mochimaru, Masaya Toda and Takahito Ono
- Organizer
  IEEE International Conference on Nanotechnology
- Place of Presentation
  仙台国際センター、仙台
- Year and Date
  2016-08-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26706023
[Presentation] 単結晶ダイヤモンド機械共振子のエネルギー散逸機構2016
- Author(s)
  廖　梅勇、戸田雅也東北、桑、井村将隆、菱田俊一、田中秀治、小出康夫
- Organizer
  2016年第63回応用物理学会春季学術講演会
- Place of Presentation
  東京工業大学　大岡山キャンパス
- Year and Date
  2016-03-19
- Data Source
  KAKENHI-PROJECT-15H03999
[Presentation] CVDダイヤモンド振動子の作製と評価2016
- Author(s)
  持丸裕矢, 戸田雅也, 小野崇人
- Organizer
  日本機械学会東北支部第51期総会・講演会講演論文集
- Place of Presentation
  東北大学，仙台
- Year and Date
  2016-03-11
- Data Source
  KAKENHI-PROJECT-26706023
[Presentation] Single Crystal Diamond Micromechanical and Nanomechanical Resonators2016
- Author(s)
  M. Y. Liao, M Toda, S. Liwen, S. Hishita, M. Imura, S Tanaka, Y. Koide
- Organizer
  The 10th International Conference on New Diamond and Nano Carbon
- Place of Presentation
  Xi'an, China
- Year and Date
  2016-05-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-15H03999
[Presentation] Packaging Technique of Micro Cantilever for Magnetic Force Sensing2016
- Author(s)
  Nurasyikin Mohd, Naoki Inomata, Nguyen Van Toan, Takahito Ono and Masaya Toda
- Organizer
  International Workshop on Nanomechanical Sensors
- Place of Presentation
  デルフト、オランダ
- Year and Date
  2016-06-22
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26706023
[Presentation] Probe with Nitrogen Vacancy in Diamond Thin Film for Magnetic Resonance Imaging2015
- Author(s)
  Minjie Zhu, Masaya Toda and Takahito Ono
- Organizer
  Japan-China-Korea Joint Conference on MEMS/NEMS 2015
- Place of Presentation
  Xi'an, China
- Year and Date
  2015-09-23
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-26706023
[Presentation] Si-based micro-nanomechanics for ultimate sensing2015
- Author(s)
  Takahito Ono, Masaya toda, Yong-Jun Seo, Naoki Inomata
- Organizer
  Electrochemical Society (ECS) spring sympojium
- Place of Presentation
  Chicago, Ilinois, USA
- Year and Date
  2015-05-24
- Invited / Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-25246031
[Presentation] 酸化バナジウムを用いた共振型マイクロ熱量センサ2015
- Author(s)
  猪股直生，潘立葆，戸田雅也，小野崇人
- Organizer
  センサ・マイクロマシンと応用システムシンポジウム
- Place of Presentation
  新潟　朱鷺メッセ
- Year and Date
  2015-10-27
- Data Source
  KAKENHI-PROJECT-25246031
[Presentation] Ultorasensitive Si Nanowire Probe for Magnetic Resonance Detection2014
- Author(s)
  Yongjun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono
- Organizer
  IEEE International　Conference on Micro Electro Mechanical Systems
- Place of Presentation
  Los Angeles, USA
- Data Source
  KAKENHI-PROJECT-24760052
[Presentation] Ultrasensitive Si Nanowire Probe for Magnetic Resonance Detection2014
- Author(s)
  Yongjun Seo、Masaya Toda、Yusuke Kawai、Takahito Ono
- Organizer
  IEEE International Conference on Micro Electro Mechanical Systems
- Place of Presentation
  アメリカ合衆国、サンフランシスコ
- Data Source
  KAKENHI-PROJECT-24760052
[Presentation] Silicon Nanowire Probe with Nd-Fe-B magnet for Magnetic Resonance Force Microscopy2013
- Author(s)
  Yongjun Seo、Masaya Toda、Yusuke Kawai、Takahito Ono
- Organizer
  39^<th> International Conference on Micro and Nano Engineering
- Place of Presentation
  イギリス・ロンドン
- Data Source
  KAKENHI-PROJECT-24760052
[Presentation] Cantilevers of nanosensing : calorimetry of living cel2013
- Author(s)
  Masaya Toda、Naoki Inomata、Masaaki Sato、Akihiko Ishijima、Takahito Ono
- Organizer
  11st International Workshop on Nanomechanical Sensors
- Place of Presentation
  アメリカ合衆国・スタンフォード
- Data Source
  KAKENHI-PROJECT-24760052
[Presentation] SILICON NANOWIRE PROBE FOR MAGNETIC RESONANCE FORCE MICROSCOPY2013
- Author(s)
  YongJun Seo、Masaya Toda、Yusuke Kawai、Takahito Ono
- Place of Presentation
  アメリカ合衆国・スタンフォード
- Data Source
  KAKENHI-PROJECT-24760052
[Presentation] Si Nanowire Probe with a magnet for Magnetic Resonance Detection2013
- Author(s)
  Yongjun Seo、Masaya Toda、Yusuke Kawai、Takahito Ono
- Organizer
  Japan-China-Korea Joint Conference on MEMS/NEMS
- Place of Presentation
  日本・仙台
- Data Source
  KAKENHI-PROJECT-24760052
[Presentation] 磁気共鳴力顕微鏡用シリコンナノワイヤーカンチレバー2013
- Author(s)
  徐溶晙、戸田雅也、川合祐輔、小野崇人
- Organizer
  第60回応用物理学関係連合講演会
- Place of Presentation
  神奈川工科大学
- Data Source
  KAKENHI-PROJECT-24760052
[Presentation] Silicon Nanowire Probe with Nd-Fe-B magnet for Magnetic Resonance Force Microscopy2013
- Author(s)
  Yongjun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono
- Organizer
  39th International Conference on Micro and Nano Engineering
- Place of Presentation
  London, UK
- Data Source
  KAKENHI-PROJECT-24760052
[Presentation] A Si Nanowire Probe with a Nd-Fb-B magnet for Force Detection2013
- Author(s)
  Yongjun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono
- Organizer
  第30回「センサ・マイクロマシンと応用システムシン」ポジウム
- Place of Presentation
  Sendai, Japan
- Data Source
  KAKENHI-PROJECT-24760052
[Presentation] Cantilevers of nanosensing: calorimetry ofr a living cell2013
- Author(s)
  Masaya Toda, Naoki Inomata, Masaaki Sato, Akihiko Ishijima, Takahito Ono
- Organizer
  International Workshop on Nanomechanical Sensors
- Place of Presentation
  Stanford, USA
- Invited
- Data Source
  KAKENHI-PROJECT-24760052
[Presentation] Silicon Nanowire Probe with Nd-Fe-B magnet for Magnetic Resonance Force Microscopy2013
- Author(s)
  Yongjun Seo, Masaya Toda, Yusuke Kawai, and Takahito Ono
- Organizer
  39th International Conference on Micro and Nano Engineering (MNE)
- Place of Presentation
  英国、ロンドン
- Data Source
  KAKENHI-PROJECT-25246031
[Presentation] SILICON NANOWIRE PROBE FOR MAGNETIC RESONANCE FORCE MICROSCOPY2013
- Author(s)
  YongJun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono
- Organizer
  International Workshop on Nanomechanical Sensors
- Place of Presentation
  Stanford, USA
- Data Source
  KAKENHI-PROJECT-24760052
[Presentation] A Si Nanowire Probe with a Nd-Fb-B magnet for Force Detection2013
- Author(s)
  Yongjun Seo、Masaya Toda、Yusuke Kawai、Takahito Ono
- Organizer
  第30回「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  仙台
- Data Source
  KAKENHI-PROJECT-24760052
[Presentation] 磁気共鳴力顕微鏡のための微粒子磁石付Siカンチレバーセンサ2013
- Author(s)
  戸田雅也、徐溶晙、小野崇人
- Organizer
  第60回応用物理学関係連合講演会
- Place of Presentation
  神奈川工科大学
- Data Source
  KAKENHI-PROJECT-24760052
[Presentation] Si Nanowire Probe with a magnet for Magnetic ResonanceDetection2013
- Author(s)
  Yongjun Seo, Masaya Toda, Yusuke Kawai, Takahito Ono
- Organizer
  Japan-China-Korea Joint Conference on MEMS/NEMS
- Place of Presentation
  Sendai, Japan
- Data Source
  KAKENHI-PROJECT-24760052
[Presentation] High sensitive Si cantilevers for magnetic resonance force microscopy2012
- Author(s)
  Masaya Toda、YongJun Seo、Takahito Ono、Ali. A. Golriz、Ruediger Berger、Jochen. S. Gutmann
- Organizer
  38th International Conference on Micro and Nano Engineering
- Place of Presentation
  フランス・トゥールーズ
- Data Source
  KAKENHI-PROJECT-24760052
[Presentation] High sensitive Si cantilevers for magnetic resonance force microscopy2012
- Author(s)
  Masaya Toda, Yongjun Seo, Takahito Ono, Ali. A. Golriz, Ruediger Berger, Jochen S. Gutmann
- Organizer
  38th International Conference on Micro and Nano Engineering (MNE2012)
- Place of Presentation
  Toulouse, FRANCE
- Data Source
  KAKENHI-PROJECT-24760052
[Presentation] Hideotshi Miyashita and Takahito Ono、High Sensitive Si Cantilevers for Magnetic Resonance Force Microscopy2012
- Author(s)
  Masaya Toda、YongJun Seo、Yusuke Kawai、Hideotshi Miyashita and Takahito Ono
- Organizer
  25th International Microprocesses and Nanotechnology Conference
- Place of Presentation
  日本・神戸
- Data Source
  KAKENHI-PROJECT-24760052
[Presentation] A Si nanowire probe with a Nd-Fe-B magnet for force detection
- Author(s)
  Yongjun Seo, Masaya Toda, Yusuke Kawai, and Takahito Ono
- Organizer
  センサ・マイクロマシンと応用システムシンポジウム
- Place of Presentation
  仙台
- Data Source
  KAKENHI-PROJECT-25246031
[Presentation] Micro/Nano-mechanical Resonators for Ultimate Sensing,
- Author(s)
  Takahito Ono, Naoki Inomata and Masaya Toda
- Organizer
  The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies
- Place of Presentation
  Daegu, Korea
- Year and Date
  2014-06-29 – 2014-07-02
- Invited
- Data Source
  KAKENHI-PROJECT-25246031
[Presentation] 磁気共鳴力顕微鏡用シリコンナノワイヤーカンチレバー
- Author(s)
  徐溶晙, 戸田雅也, 小野崇人
- Organizer
  2013年第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学，神奈川県厚木市
- Data Source
  KAKENHI-PROJECT-24760052
[Presentation] CALIBRATION STUDY OF BIMATERIAL CANTILEVER BEAM NANOCALORIMETER USED IN LIQUID APPLICATIONS
- Author(s)
  Masaya Toda, Ioana Voiculescu, Fei Liu, Takahito Ono
- Organizer
  11st International Workshop on Nanomechanical Sesing
- Place of Presentation
  Madrid, Sapin
- Year and Date
  2014-04-30 – 2014-05-02
- Data Source
  KAKENHI-PROJECT-26706023
[Presentation] 磁気共鳴力顕微鏡のための微粒子磁石付Si カンチレバーセンサ
- Author(s)
  戸田雅也, 徐溶晙, 小野崇人
- Organizer
  2013年第60回応用物理学会春季学術講演会
- Place of Presentation
  神奈川工科大学，神奈川県厚木市
- Data Source
  KAKENHI-PROJECT-24760052
[Presentation] Assembled comb-drive XYZ-microstage integrated with capacitive displacement sensor for low temperature measurement systems
- Author(s)
  Gaopeng Xue,Masaya Toda, Takahito Ono
- Organizer
  「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  くにびきメッセ，島根
- Year and Date
  2014-10-20 – 2014-10-22
- Data Source
  KAKENHI-PROJECT-26706023
[Presentation] High Sensitive Si Cantilevers for Magnetic Resonance Force Microscopy
- Author(s)
  Masaya Toda, Yongjun Seo, Yusuke Kawai, Hidetoshi Miyashita and Takahito Ono
- Organizer
  25th International Microprocesses and Nanotechnology Conference (MNC 2012)
- Place of Presentation
  神戸メリケンパークオリエンタルホテル，兵庫県神戸市
- Data Source
  KAKENHI-PROJECT-24760052
[Presentation] 真空中細胞観察のための薄膜Si窓を有するマイクロチャネル型チャンバー
- Author(s)
  林秀樹, 戸田雅也, 小野崇人
- Organizer
  「センサ・マイクロマシンと応用システム」シンポジウム
- Place of Presentation
  くにびきメッセ，島根
- Year and Date
  2014-10-20 – 2014-10-22
- Data Source
  KAKENHI-PROJECT-26706023
[Presentation] Synthesis of Carbon Nanotube-Ni Composite for Micromechanical Elements Application
- Author(s)
  Zhonglie An, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, and Takahito Ono
- Organizer
  The 28th IEEE International Conference on Micro Electro Mechanical Systems
- Place of Presentation
  Estoril, Portugal
- Year and Date
  2015-01-18 – 2015-01-22
- Data Source
  KAKENHI-PROJECT-25246031
[Presentation] Shytheisis and Characterization of Carbon Nanotube-Nickel Composite with High Content of Carbon Nanotubes
- Author(s)
  Zhonglie An, Masaya Toda, Go Yamamoto, Toshiyuki Hashida, and Takahito Ono
- Organizer
  The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies
- Place of Presentation
  Daegu, Korea
- Year and Date
  2014-06-29 – 2014-07-02
- Data Source
  KAKENHI-PROJECT-25246031
[Presentation] A long bar type silicon resonator with a high quality factor
- Author(s)
  Nguyen Van Toan，Masaya Toda, Yusuke Kawai and Takahito Ono
- Organizer
  センサ・マイクロマシンと応用システムシンポジウム
- Place of Presentation
  仙台
- Data Source
  KAKENHI-PROJECT-25246031
[Presentation] Supercritical Fluid Deposition and Characterization of CarbonNanotubes-Cu Composite
- Author(s)
  Zhonglie An, Masaya Toda, Takahito Ono
- Organizer
  The 4th Japan-China-Korea Joint Conference on MEMS/NEMS (JCK MEMS/NEMS 2013)
- Place of Presentation
  仙台
- Data Source
  KAKENHI-PROJECT-25246031

1. Liao Meiyong Liao (70528950)

# of Collaborated Projects: 3 results

# of Collaborated Products: 9 results
2. Ono Takahito (90282095)

# of Collaborated Projects: 2 results

# of Collaborated Products: 17 results
3. Kawai Yusuke (20451536)

# of Collaborated Projects: 2 results

# of Collaborated Products: 4 results
4. 藤井孝志 (80520874)

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
5. 小出康夫 (70195650)

# of Collaborated Projects: 1 results

# of Collaborated Products: 7 results
6. Rüdiger Berger

# of Collaborated Projects: 1 results

# of Collaborated Products: 0 results
7. Voiculescu Ioana

# of Collaborated Projects: 1 results

# of Collaborated Products: 2 results
8. KOIZUMI Satoshi

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
9. 橋田俊之

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
10. 大森守

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
11. 猪股直生

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
12. 寺地徳之

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results
13. SANG Liwen

# of Collaborated Projects: 0 results

# of Collaborated Products: 2 results
14. グエン・ヴァントゥアン

# of Collaborated Projects: 0 results

# of Collaborated Products: 1 results

Toda Masaya 戸田 雅也

TODA Masaya 戸田 雅也

Research Projects

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Co-Researchers

Magnetic resonance imaging of micro-sample at a standard temperature and pressure conditionsPrincipal Investigator

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超磁歪材料/ダイヤモンドMEMS異種接合用いた革新的な磁気イメージセンサの創製

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High-performance and high-reliability diamond MEMS: fundamental and magnetic sensing application

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Innovative spin detection with creative assembling with nanosensor and microsystemPrincipal Investigator

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Development of an early detection technique of apoptosis by high sensitive magnetic resonance force measurement system(Fostering Joint International Research)Principal Investigator

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Development of nano/micro system using supercritical fluidPrincipal Investigator

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Diamond NEMS logic for extrem environments

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Development for early detection of apoptosis by high sensitive miniature magnetic resonance force measurement systemPrincipal Investigator

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Femto watt thermal sensor

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Narrow gap thermionic power generator

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High sensitive probe for magnetic resonance force microscopyPrincipal Investigator

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[Journal Article] On‐chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film2023

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Assembled Comb-Drive XYZ-Microstage With Large Displacements and Low Crosstalk for Scanning Force Microscopy2022

Author(s)

Journal Title

DOI

Toda Masaya 戸田雅也

TODA Masaya 戸田雅也