Sasago Masaru 笹子勝

Researcher Number	40727145
Other IDs
Affiliation (Current)	2025: 大阪公立大学, 大学院工学研究科 , 客員教授
Affiliation (based on the past Project Information) *help	2022 – 2023: 大阪公立大学, 大学院工学研究科, 客員研究員 2020 – 2021: 大阪府立大学, 工学(系)研究科(研究院), 客員研究員
Review Section/Research Field	Principal Investigator Basic Section 28050:Nano/micro-systems-related
Keywords	Principal Investigator 三次元 / 最適化 / デザインルール / シードパターン / 3次元リソグラフィ / ３次元構造 / フォトマスク / 位相振幅 / ３次元リソグラフィ / 一括露光 … More / ３次元結像 / ビルトインレンズマスク / 三次元結像 / 複素透過率 / マスク / 複素振幅 / 波面 / 3次元加工 / フォトリソグラフィ Less

3-dimensional photolithographyPrincipal Investigator
- Principal Investigator
  
  Sasago Masaru
- Project Period (FY)
  2020 – 2023
- Research Category
  
  Grant-in-Aid for Scientific Research (C)
- Review Section
  
  Basic Section 28050:Nano/micro-systems-related
- Research Institution
  Osaka Metropolitan University
  Osaka Prefecture University

All 2024 2023 2021

All Journal Article Presentation

[Journal Article] Computational study of 3-dimensional photo lithography on limitations and possibility for novel structures2023
- Author(s)
  Hirai Yoshihiko、Osumi Tomoaki、Tanaka Toshiaki、Yasuda Masaaki、Sasago Masaru
- Journal Title
  
  Proceedings of SPIE Advanced Lithography + Patterning
  
  Volume: 12497 Pages: 1-7
- DOI
  10.1117/12.2658128
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20K05289
[Journal Article] Automatic design of the build-in lens mask for three-dimensional photo lithography2021
- Author(s)
  Osumi Tomoaki、Sasago Masaru、Yasuda Masaaki、Hirai Yoshihiko
- Journal Title
  
  Proceedings Volume 11908, Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology
  
  Volume: 11908 Pages: 1-5
- DOI
  10.1117/12.2598156
- Peer Reviewed
- Data Source
  KAKENHI-PROJECT-20K05289
[Journal Article] Computational Lithography for 3-Dimensional Fine Photolithography using Sophisticated Built-in Lens Mask2021
- Author(s)
  Osumi Tomoaki、Misaka Akio、Sato Kousuke、Yasuda Masaaki、Sasago Masaru、Hirai Yoshihiko
- Journal Title
  
  J. Photopol. Sci. Technol.
  
  Volume: 34 Issue: 2 Pages: 123-126
- DOI
  10.2494/photopolymer.34.123
- NAID
  130008119664
- ISSN
  0914-9244, 1349-6336
- Year and Date
  2021-06-11
- Language
  English
- Peer Reviewed / Open Access
- Data Source
  KAKENHI-PROJECT-20K05289
[Presentation] ビルトインレンズマスクを用いた三次元フォトリソグラフィによるパターン形成2024
- Author(s)
  田中敏章, 安田雅昭，笹子勝, 平井義彦
- Organizer
  第71回応用物理学会春季学術講演会(3月,2024,東京)
- Data Source
  KAKENHI-PROJECT-20K05289
[Presentation] Computational study of 3-dimensional photo lithography on limitations and possibility for novel structures2023
- Author(s)
  Hirai Yoshihiko、Osumi Tomoaki、Tanaka Toshiaki、Yasuda Masaaki、Sasago Masaru
- Organizer
  SPIE Advanced Lithography + Patterning
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K05289
[Presentation] Computational Lithography for 3-Dimensional Fine Photolithography using Sophisticated Built-in Lens Mask2021
- Author(s)
  T. Osumi, A. Misaka, K. Sato, M. Yasuda, M. Sasago, Y. Hirai,
- Organizer
  The 38th International Conference of Photopolymer Science and Technology (ICPST-38)
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K05289
[Presentation] ビルトインレンズマスクによる三次元フォトリソグラフィ(マスクパターンの最適化検討)2021
- Author(s)
  大住知暉、安田雅昭、笹子勝、平井義彦、
- Organizer
  68回応用物理学会春季学術講演会
- Data Source
  KAKENHI-PROJECT-20K05289
[Presentation] Automatic Design of the Built-in Lens Mask for ThreeDimensional Photo Lithography2021
- Author(s)
  T. Osumi, M. Sasago, M. Yasuda, Y. Hirai
- Organizer
  Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K05289
[Presentation] Optimization of the Built-in Lens Mask for Three-Dimensional Photo Lithography2021
- Author(s)
  T. Osumi, M. Sasago, M. Yasuda, Y. Hirai
- Organizer
  The 64th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (EIPBN 2021),
- Int'l Joint Research
- Data Source
  KAKENHI-PROJECT-20K05289
[Presentation] ビルトインレンズマスクによる三次元フォトリソグラフィ2021
- Author(s)
  大住　知暉, 安田　雅昭，笹子　勝, 平井義彦
- Organizer
  応用物理学会
- Data Source
  KAKENHI-PROJECT-20K05289

1. 平井義彦 (50285300)

# of Collaborated Projects: 1 results

# of Collaborated Products: 9 results

Sasago Masaru 笹子 勝

Research Projects

Research Products

Co-Researchers

3-dimensional photolithographyPrincipal Investigator

Principal Investigator

Project Period (FY)

Research Category

Review Section

Research Institution

[Journal Article] Computational study of 3-dimensional photo lithography on limitations and possibility for novel structures2023

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Automatic design of the build-in lens mask for three-dimensional photo lithography2021

Author(s)

Journal Title

DOI

Data Source

[Journal Article] Computational Lithography for 3-Dimensional Fine Photolithography using Sophisticated Built-in Lens Mask2021

Author(s)

Journal Title

DOI

NAID

ISSN

Year and Date

Language

Data Source

[Presentation] ビルトインレンズマスクを用いた三次元フォトリソグラフィによる パターン形成2024

Author(s)

Organizer

Data Source

[Presentation] Computational study of 3-dimensional photo lithography on limitations and possibility for novel structures2023

Author(s)

Organizer

Data Source

[Presentation] Computational Lithography for 3-Dimensional Fine Photolithography using Sophisticated Built-in Lens Mask2021

Author(s)

Organizer

Data Source

[Presentation] ビルトインレンズマスクによる三次元フォトリソグラフィ(マスクパターンの最適化検討)2021

Author(s)

Organizer

Data Source

[Presentation] Automatic Design of the Built-in Lens Mask for ThreeDimensional Photo Lithography2021

Author(s)

Organizer

Data Source

[Presentation] Optimization of the Built-in Lens Mask for Three-Dimensional Photo Lithography2021

Author(s)

Organizer

Data Source

[Presentation] ビルトインレンズマスクによる三次元フォトリソグラフィ2021

Author(s)

Organizer

Data Source

Sasago Masaru 笹子勝

[Presentation] ビルトインレンズマスクを用いた三次元フォトリソグラフィによるパターン形成2024