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松田 史朗

ORCIDConnect your ORCID iD *help
Researcher Number 50005485
Affiliation (based on the past Project Information) *help 1988: 東北大学, 工学部, 助手
Review Section/Research Field
Except Principal Investigator
金属材料(含表面処理・腐食防食)
Keywords
Except Principal Investigator
プラズマ状態 / 複探針法 / プラズマ診断 / 光学定数 / 膜厚 / エリプソメトリー / 窒化ホウ素薄膜 / 屈折率 / 電子密度 / 電子温度 / エリプソメトリ- / BN薄膜 / プラズマCVD
  • Research Projects

    (1 results)
  • Co-Researchers

    (2 People)
  •  プラズマCVDによるBN薄膜生成過程のエリプソメトリ-解析

    • Principal Investigator
      杉本 克久
    • Project Period (FY)
      1988 – 1989
    • Research Category
      Grant-in-Aid for General Scientific Research (C)
    • Research Field
      金属材料(含表面処理・腐食防食)
    • Research Institution
      Tohoku University
  • 1.  杉本 克久 (80005397)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 2.  原 信義 (40111257)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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