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OGITA Yoh-Ichirro  荻田 陽一郎

ORCIDConnect your ORCID iD *help
Researcher Number 50016549
External Links
Affiliation (based on the past Project Information) *help 1998 – 2000: 神奈川工科大学, 工学部, 教授
Review Section/Research Field
Principal Investigator
Applied materials science/Crystal engineering / Electronic materials/Electric materials
Keywords
Principal Investigator
Subsurface characterization / Silicon wafer / 表面層評価 / 表面層ダメージ / シリコンウェーハ / Surface potential / Ion implantation damage / Polishing damage / Millimeter wave / Subsurface damage … More / Noncontact measurement / 光導電減衰 / キャリヤライフタイム / 光導電振幅 / シリコンウェーハ表面層 / 表面光起電力 / 水素イオン注入ダメージ / ケルビンプローブ / 非接触測定評価 / 表面電位 / イオン注入ダメージ / 研磨ダメージ / ミリ波 / 非接触測定 / Mirror polishing damage / Engineering tool / Ultrasonic vibration grinding / Grinding wheel / Polishing induced damage / Shear-mode grinding / 鏡面研削ダメージ / 鏡面研削 / 研磨加工変質層 / 光導電減衰法 / 非接触測定評価法 / 研削加工変質層 / 超音波振動研削 / エンジニアリングツール / 研削ホイール / 鏡面研磨ダメージ / シェアモード研削 Less
  • Research Projects

    (2 results)
  • Co-Researchers

    (4 People)
  •  Shea-Mode Grinding of Silicon Crystal and Damage AnalysisPrincipal Investigator

    • Principal Investigator
      OGITA Yoh-Ichirro
    • Project Period (FY)
      1998 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (B).
    • Research Field
      Electronic materials/Electric materials
    • Research Institution
      Kanagawa Institute of Technology
  •  A study on noncontact characterization of silicon wafer subsurfacePrincipal Investigator

    • Principal Investigator
      OGITA Yoh-ichiro
    • Project Period (FY)
      1998 – 2000
    • Research Category
      Grant-in-Aid for Scientific Research (C)
    • Research Field
      Applied materials science/Crystal engineering
    • Research Institution
      Kanagawa Institute of Technology
  • 1.  IMAI Kenichiro (00308537)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 2.  HASHIMOTO Hiroshi (10198690)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 3.  BLADEL Kenne
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 4.  DORNFELD Dav
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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