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佐藤 建太郎

ORCIDConnect your ORCID iD *help
Researcher Number 50042263
Affiliation (based on the past Project Information) *help 1986: 宮城工業高等専門学校, 一般, 助教授
Review Section/Research Field
Except Principal Investigator
プラズマ理工学
Keywords
Except Principal Investigator
薄膜生成 / スパッタリング / プラズマプロセス / ECR
  • Research Projects

    (1 results)
  • Co-Researchers

    (4 People)
  •  ECRHプラズマを利用したスパッタリングの応用

    • Principal Investigator
      佐々木 哲彦, 佐々木 あき
    • Project Period (FY)
      1986 – 1987
    • Research Category
      Grant-in-Aid for Developmental Scientific Research
    • Research Field
      プラズマ理工学
    • Research Institution
      Miyagi National College of Technology
  • 1.  佐々木 あき (50026308)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 2.  唐沢 信司 (10042243)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 3.  丹野 浩一 (50042247)
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results
  • 4.  佐々木 哲彦
    # of Collaborated Projects: 1 results
    # of Collaborated Products: 0 results

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